KR101586391B1 - Apparatus for inspecting and relocating the component - Google Patents

Abstract

A sample foreign object inspection and relocation apparatus according to the present invention includes a first region, a second region, a third region, and a third region formed along the circumferential direction and capable of rotating with reference to a predetermined center point, And a rotating head unit having a plurality of arms configured to cyclically enter the fourth region so that one of the arms enters the first region by rotating the rotating head unit, The rotating head is rotated so that the arm is brought into the second region and the lower surface of the gripped sample is photographed to perform a foreign object inspection and the rotating head unit is rotated according to the result of the foreign matter inspection The arm is allowed to enter the third region or the fourth region, and the sample held on the arm is attached to the target cartridge or the defective cartridge .

Description

[0001] APPARATUS FOR INSPECTING AND RELOCATING THE COMPONENT [0002]

More particularly, the present invention relates to an apparatus for rearranging only a good sample without foreign matter on the upper and lower surfaces of a plurality of loaded samples.

In recent years, compact mobile electronic devices such as mobile phones and tablets are basically equipped with ultra-small cameras. On the other hand, components such as a lens applied to a camera, an infrared cut filter (IR filter), and an image pickup device (for example, a CCD) have been miniaturized and refined to such an extent that minimal foreign matter can not be accepted.

On the other hand, Korean Patent No. 10-670165 (titled "IR filter inspection apparatus and method") (hereinafter referred to as patent document) can be referred to as a technique for inspecting foreign objects with respect to the above-described components.

As shown in Fig. 1, the patent document includes a main body 2, a cradle 4 provided on the main body 2 and capable of receiving the IR filter 20, A carriage 6 disposed at the periphery of the carriage 4 and capable of accommodating the IR filter 20 and a conveying means 16 disposed between the carriage 4 and the cartridge 6 and capable of conveying the IR filter 20. [ A lamp 10 disposed at an upper side of the cradle 4 so as to scan light at an incident angle set in the IR filter 20 mounted on the cradle 4, A scan camera 12 disposed on a path of light reflected by the IR camera 20 to capture an image of a near infrared region reflected by the IR filter 20, And a control unit (14) for reading an image of the near infrared region reflected by the surface of the IR filter (20) by the scan camera (12) Is taken and, By reading the image, the controller 14 is taken to make the particles, the disclosed IR filter testing apparatus, characterized in that the check to the IR filter 20.

However, in this inspection apparatus in the patent document, an operation of separately inspecting a plurality of filters attached to a frame fixed to a cradle to identify foreign objects, and separately arranging the IR filters according to presence or absence of foreign objects It can not provide.

Furthermore, the inspection apparatus of the patent document can perform only one operation of photographing the surface of the IR filter to determine whether or not the foreign object is present, and can not perform various operations at the same time.

Therefore, it can not meet the demand for a high-speed operation in which a foreign object is inspected for a large amount of samples and the samples are quickly relocated according to the inspection result.

Korean Patent No. 10-670165

It is an object of the present invention to provide a sample foreign matter inspection and relocation device capable of realizing a high speed operation of inspecting a large amount of samples as described above and quickly rearranging the samples according to the inspection results.

According to an aspect of the present invention, there is provided an apparatus for inspecting and relocating a sample foreign object, comprising: a first region rotatable about a predetermined center point and capable of holding a predetermined sample at each end thereof, A rotating head unit having a plurality of arms configured to cyclically enter the second region, the third region, and the fourth region; A first stage part disposed in the first area and in which a source cartridge to which one or more samples are attached is placed; A lower surface foreign matter inspection unit disposed in the second area and photographing a lower surface of the sample gripped by the arm for inspection of a foreign object; A second stage disposed in the third area and on which a target cartridge on which samples determined by the lower surface foreign matter inspection unit as lower surface foreign matter are arranged is placed; A third stage part disposed in the fourth area and on which a defective cartridge to which a sample determined to be present on the lower surface exists is placed; A controller for controlling the operation of each of the angular portions, wherein the rotary head unit is rotated to move one of the arms to the first region, and one of the specimens is gripped at the distal end of the arm, And a control unit for controlling the rotation of the rotary head unit according to a result of the foreign matter inspection to detect an image of the lower surface of the sample gripped by the arm, 3 region or a fourth region, and attaching the sample held on the arm to the target cartridge or the defective cartridge.

The first area may further include an upper surface foreign matter inspection part for photographing an upper surface of a sample attached to the source cartridge for foreign object inspection and transmitting the photographed image to the control part.

In addition, the control unit may further include a control unit for controlling the control unit to control the control unit such that the control unit controls the control unit to control the control unit such that, Therefore, the sample can be separately attached to different areas of the defective cartridge.

In addition, the control unit may cause only the sample whose upper surface is determined to be a foreign material to be gripped by the arm of the rotating head unit, and to put it into the following process.

The first to fourth regions are defined on an intersecting line orthogonal to the center point, and the arms are orthogonal to each other so as to enter the first to fourth regions at the same time every 90 [deg.] Rotation of the rotating head portion It can be composed of four arms.

Each of the four arms enters one of the first to fourth regions at the same time in accordance with the rotation of the rotary head portion, and the control portion controls the first stage portion, the lower surface foreign matter inspection portion, And the third stage unit can be independently controlled at the same time so that each of them can perform the designated operation simultaneously.

The end of each arm of the rotating head portion may be provided with a suction nozzle for gripping at least one sample by vacuum suction.

The suction nozzle may be configured to move forward and backward from a distal end of the arm toward a sample attached to an arbitrary cartridge, and the apparatus for inspecting and relocating the sample foreign matter may be arranged in the third region or the fourth region And a pushing portion for advancing the suction nozzle of the rotating head portion toward the target cartridge or the defective cartridge under the control of the control portion so that the specimen vacuum-adsorbed to the suction nozzle is transferred to the target cartridge or the defective cartridge .

The source cartridge may include a sheet having a plurality of samples arranged therein, a frame having an opening sized to surround at least a region of the surface of the sheet where the samples are arranged, And a fixing mechanism for fixing the sheet to the frame.

The first stage portion may include a seating surface on which the source cartridge is placed and a second stage portion that is configured to push up a portion of the sheet from the inside of the opening when the source cartridge is seated and to pull the sheet from the seating surface And a clamp for fixing the source cartridge in a state in which the sheet is stretched tightly to the seating surface.

The first stage further includes a push mechanism that pushes up the lower surface of the sheet of the source cartridge to allow the arm of the rotating head to grasp at least one sample attached to the upper surface of the sheet can do.

The lower surface foreign matter inspection unit may include an infrared illuminating means for irradiating infrared rays toward the lower surface of the sample adsorbed on the arm that has entered the second region, And infrared ray photographing means for photographing an infrared ray reflected by a foreign object existing in the infrared ray or a portion other than the foreign object and transmitting the taken infrared ray image to the control portion for a bottom foreign matter inspection.

According to the apparatus for inspecting and relocating a sample according to the present invention having the above-described structure, it is possible to inspect the upper surface of a plurality of samples arranged in the cartridge in a single apparatus, It is possible to carry out an operation of inspecting the lower surface of the sample for foreign matter on the lower surface thereof and disposing only the sample for which there is no foreign substance on the lower surface thereof in the target cartridge. In addition, since four motions are simultaneously performed using the rotary head having at least four arms, a yield of at least four times or more can be achieved, as compared with linearly performing one job at a time with one head.

1 is a view showing a conventional IR filter inspection apparatus.
FIG. 2 is a block diagram for explaining a configuration of a sample foreign object inspection and relocation apparatus according to the present invention.
3 is a diagram for explaining a positional relationship between parts of a sample foreign object inspection and relocation apparatus according to the present invention.
4 is a plan view schematically showing the external appearance of the sample foreign object inspection and relocation apparatus according to the present invention.
5 is a perspective view schematically showing the external appearance of a sample foreign object inspection and relocation apparatus according to the present invention.
6 is a view showing a configuration example of the source cartridge.
7 is a diagram showing a configuration example of the first stage unit.
8 is a view for explaining a push mechanism of the first stage portion;
9 is a view showing an example of the configuration of the rotary head portion.
Fig. 10 is a view for explaining the configuration and operation of the suction nozzle formed at the distal end of the arm.

DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS Hereinafter, with reference to the accompanying drawings, a detailed description will be given of the operation of a sample foreign object inspection and relocation apparatus according to the present invention.

2 is a block diagram for explaining a configuration of a sample foreign object inspection and relocation apparatus according to the present invention. The apparatus for inspecting and relocating a sample according to the present invention includes a rotary head 60, a first stage 10, a lower surface foreign matter inspection unit 20, a second stage 30, A stage unit 40, and a control unit 70. [ Further, the upper surface foreign matter inspection unit 50 and the pressing unit 70 may be further included. Furthermore, the legs can be placed on a support B (see Fig. 5) which can be fixed to the floor.

The support (B) is provided with a generally planar first support surface (B1). X-axis and Y-axis can be defined on the first supporting surface. In addition, the first area A1, the second area A2, the third area A3 and the fourth area A4 can be divided along the circumferential direction with reference to a predetermined center point (or the origin) ( 4). It is preferable that the first to fourth regions are defined on an intersection line orthogonal to the center point as an intersection point.

The support base (B) may be provided with a second support surface which is generally flat at a position spaced apart from the origin of the first support surface in the Z-axis direction.

In this support B, the first stage portion 10, the lower surface foreign matter inspection portion 20, the second stage portion 30, and the third stage portion 40 are preferably disposed on the first support surface, The rotary head portion 60 is preferably disposed on the second support surface and configured to be rotatable about the Z axis as a central axis.

The first stage portion 10 may be disposed in the first region A1 defined in the support B. Further, the first stage unit 10 can be installed so as to be horizontally movable in the X-axis and Y-axis directions within the first region. Further, the first stage unit 10 may be configured to be rotatable within a predetermined angle range with the Z axis as a rotation axis, and may be configured to be able to be elevated in the Z axis direction.

The control unit 70 rotates the arm 61 provided with the suction nozzle 66 at the distal end to stop at the upper portion of the first stage unit 10 of the first area A1. In the first region A1, the upper surface of the sample is inspected and the sample holding process is performed.

The source cartridge 5 can be supplied to the first stage portion 10 from the outside, for example, by manual operation of the operator or by a separate cartridge loading device. The source cartridge 5 includes a frame 7 in which an opening 6 opened in a predetermined form is formed and a frame 7 in which a plurality of samples F are arranged in an n.times.m arrangement in a substantially central portion, And a fixing mechanism 8 for fixing the sheet S with respect to the frame such that an area where the samples F are arranged in the sheet is positioned at the opening 6 of the frame . An example of the configuration of the source cartridge 5 can be understood with reference to Fig.

Here, the outer shape of the frame 7 is generally close to a tetragon, and the shape of the opening 6 may be generally circular. Further, the sheet S may be generally rectangular. Therefore, the four corners of the sheet can be brought into contact with the frame 7 outside the opening, and the contacted portion can be fixed to the frame by the fixing mechanism. Of course, the size of the sheet is sufficiently larger than the size of the opening, so that all sides of the sheet may be fixed by the fixing mechanism.

The fixing mechanism 8 may preferably be an adhesive tape, but various methods can be applied, such as a method of pressing and fixing with a sharp claw or a claw of a rubber material having high frictional force, a method of holding the sheet by an electrostatic force or a vacuum suction force . The detailed illustration is omitted.

On the other hand, the first stage portion 10 may be formed with a generally flat seating surface 12 so that the source cartridge 5 can be seated thereon. Further, a clamp (not shown) for firmly fixing the source cartridge to the seating surface may be disposed on the seating surface. The configuration example of the first stage portion can be referred to FIG.

Further, on the seating surface 12, there is provided a protruding swell (not shown) having a proper height so as to be able to push up the sheet S attached to the source cartridge 5 to some extent when the source cartridge is placed on the seating surface and fixed by a clamp or the like. A mechanism 14 may be provided. The swelling mechanism 14 may be disposed, for example, within the opening of the source cartridge 5, and the swelling mechanism 14 may be disposed in the opening of the source cartridge 5, corresponding to the form in which the samples F are arranged and attached in the sheet S of the source cartridge. Shaped protruding structure having a shape corresponding to the shape of the opening 6. At this time, it is preferable that the upper surface of the protruded structure, that is, the portion to be in contact with the sheet S, is substantially planar.

When the source cartridge is fixed to the seating surface of the first stage portion by the clamp, the swelling mechanism 14 pushes up the sheet S of the source cartridge 5, so that the sheet S becomes a shape in which the sheet S is pulled up tightly. Thereby, the sample (F) adhered to the sheet (S) can be held fixed on the flat sheet surface.

On the other hand, on the seating surface 12 of the first stage portion 10, an opening 13 having a larger size than that in which the samples are arranged at least on the sheet of the source cartridge will be formed. A push mechanism 16 that can be advanced or retracted toward the seat fixed to the source cartridge of the seating surface within the opening 13 can be constructed. In general, the push mechanism 16 is disposed below the sheet S and can be configured to move up and down.

The push mechanism 16 is fixed in correspondence with the position of the suction nozzle 66 which rotates and stops at the upper portion. The first stage portion 10, on which the cartridge with the sample F mounted thereon is moved by XY, The sample can be controlled so that it can be pushed up by the push mechanism 16.

Further, the push mechanism 16 can be configured to be movable in the X and Y directions to an arbitrary position inside the opening 13. [ In this case, the push mechanism moves relative to the movement of the first stage to more actively select and push up the sheet.

Further, the push mechanism 16 may have a substantially flat shape at its distal end. Further, at the distal end of the push mechanism 16, one or a plurality of push pins that can protrude upward (in a forward direction of the push mechanism) are provided (See FIG. 8).

With this arrangement, the pushing mechanism can be primarily raised to push up the lower surface of the sheet, and any sample attached to the upper surface of the sheet can be pushed up to a desired height close to the suction nozzle of the arm of the rotating head, The sample attached to the upper surface of the sheet is likely to be desorbed, and at the same time, it will come into contact with the adsorption nozzle and be vacuum-adsorbed.

On the other hand, in the first area A1, an upper surface foreign matter inspecting section 50 for inspecting foreign matter on plural samples attached to the sheet of the source cartridge can be arranged. The upper surface foreign matter inspection unit 50 includes an upper surface illuminator for illuminating the upper surface of the sample F attached to the sheet S using light having a predetermined wavelength, And an upper surface photographing camera for generating an upper surface foreign object image.

The sample (F) in the present invention can be, for example, an infrared (IR) filter applied to a small-sized camera. The illuminator of the upper surface foreign matter inspection unit 50 may be designed to emit infrared rays, and the upper surface photographing camera may be configured to detect infrared rays.

When a plurality of samples are arranged on the sheet of the source cartridge 5, the control unit 70 controls the operation of the illuminator so as to illuminate one or a plurality of samples, captures an illuminated sample, The upper surface photographing camera is controlled. Then, a foreign object inspection is performed to determine whether or not there is foreign matter in the photographed foreign object image. Then, while controlling the movement of the first stage unit 10 in the XY direction relative to the upper surface foreign object inspection unit 50, another foreign object is illuminated and photographed to acquire a new foreign object image and perform foreign object inspection.

The control unit 70 performs a scanning operation to perform the above foreign object inspection operation on all the samples F attached to the sheet S of the source cartridge 5 and outputs the upper surface foreign matter inspection results .

Further, in this scanning operation, it is possible to inspect the attached position (including the XY coordinate or the rotated state in the Z axis direction) of each sample on the sheet. In the following sample gripping operation, By controlling the XY movement and the rotation in the Z axis direction of the first stage section 10 with respect to the fixing position of the suction nozzle 66 provided at the end of the arm 61 of the rotary head section 60 to be positioned, So that any specimen F pushed up by the push mechanism 16 can be accurately adsorbed to the adsorption nozzle 66.

Next, in the second area A2, the lower surface of the sample F picked up by the suction nozzle 66 provided at the end of the arm 61 of the rotary head part 60 is photographed to generate a lower surface foreign image The lower surface foreign matter inspection unit 20 may be disposed.

The control unit 70 rotates the arm 61 to which the sample is attached to the adsorption nozzle in the first region to stop the upper portion of the lower surface foreign matter inspection unit 20 of the second region. In the second region, the lower surface of the sample is inspected.

The lower surface foreign matter inspection unit 20 may have the same configuration as the upper surface foreign matter inspection unit 50 described above. A lower surface illuminator (not shown) for illuminating light of a predetermined wavelength toward the lower surface of the sample F attached to the adsorption nozzle at the lower portion of the adsorption nozzle 66; And a lower surface photographing camera (not shown) for photographing a lower surface foreign object image.

The photographed bottom surface foreign object image is transmitted to the control unit 70, and the control unit analyzes the image to perform the bottom surface foreign matter inspection. It is possible to judge whether the sample is good or bad according to the result of the foreign matter inspection on the lower surface of the sample F. [

Further, the control unit 70 obtains the positional information of the sample F attached to the suction nozzle 66 based on the bottom surface foreign object image. The obtained positional information can be utilized for position alignment when the sample F is subsequently placed on the target cartridge or the defective cartridge.

The third area A3 includes a second stage part 30 to be placed on the suction nozzle 66 and to be placed on the lower surface after the foreign matter inspection process on the lower surface is determined to be free of foreign matter. In the third region, a good product arrangement process is performed in which the good samples are arranged and arranged.

The control unit 70 rotates the arm 61 to rotate the second stage unit 30 when the lower surface foreign matter inspection is completed while passing the sample F adsorbed to the suction nozzle 66 through the lower surface foreign matter inspection unit 20 ). The sample F adsorbed to the present absorption nozzle 66 is absent from the lower surface of the sample (not only when there is no foreign matter on the lower surface of the sample but also when foreign matter exists, Or the case where the number of foreign matters or the like of the foreign object in the sample is within the permissible limit), the second stage unit 30 is moved XY to an arbitrary position So that the sample F adsorbed to the adsorption nozzle can be transferred and attached to the target cartridge disposed in the second stage unit 30 by pressing down the suction nozzle 66 of the arm 61 .

The second stage unit 30 is provided with a seating surface 32 capable of rotating in a plane movement in the XY axis direction, a vertical movement in the Z axis direction, and a Z axis as the rotation axis as the first stage unit 10, On the upper side of the surface, a target cartridge having a sheet on which samples determined as good can be arranged can be disposed. The target cartridge may be, for example, a structure in which a film-like sheet is adhered to a sheet material of a predetermined size by a predetermined attaching mechanism, for example, an adhesive tape or the like. Alternatively, the configuration of the source cartridge may be utilized as it is.

The fourth area A4 includes a third stage section 40 on which a sample of a defective product determined to be present in the lower part of the sample F in the preceding lower surface foreign matter inspection step is to be placed. In the fourth region, a defective product processing step for processing the defective sample is performed.

That is, when the sample F is judged to be a defective product by passing the sample F attached to the suction nozzle 66 through the lower surface foreign matter inspection unit 20, the control unit 70 reads the sample F from the preceding second stage unit 30, Is not attached to the target cartridge. Then, the arm 61 is rotated to enter the fourth region and stopped at the upper portion of the third stage portion 40. Next, a defective product processing step is carried out in which the sample F adsorbed to the suction nozzle 66 of the arm is transferred to a defective cartridge which can be disposed in the third stage unit 40.

The configuration of the third stage unit 40 in which the defective cartridge is placed can be applied as it is to the second stage unit 30 capable of XY movement. Alternatively, the third stage unit 40 may be provided with a member such as a bowl for discarding the defective sheet, without preparing a separate cartridge or sheet to which the defective article is to be attached.

On the other hand, the rotary head portion 60 can be installed on the second support surface B2 of the support base B and can be provided with the first stage portion, the lower surface foreign matter inspection portion, the second stage portion and the third stage portion A rotary body 65 having a plurality of arms rotatable in the upper portion thereof, and a rotary motor 68 for rotating and stopping the rotary body by a predetermined angle under the control of the control unit. Further, at the distal end of each arm 61, a suction nozzle 66 capable of vacuum-sucking a sample may be provided.

The suction nozzle 66 is provided so as to extend from the end of each arm 61 constituting the rotating body 65 toward a lower sheet (for example, a sheet of a source cartridge, a sheet of a target cartridge, or a sheet of a defective cartridge) Forward and retracted. In particular, the suction nozzle 66 is normally retracted by resilient means such as a spring, and can be configured to advance downward only while the pushing portion 70, described below, is pressed.

When the suction nozzle 66 is pushed by the pressing portion 70 to come into contact with the sample F attached to the sheet after advancing toward the sheet S of the source cartridge 5, A suction groove (not shown) may be formed so as to perform the adsorption function. The structure of the suction groove for vacuum suction of the sample (F) is not described separately, as it is possible to refer to the known technical content.

In this case, the adsorption nozzle 66 may be configured to communicate with a vacuum connection mechanism (not shown) formed in the pressing portion 70 so as to perform vacuum adsorption. In this case, after the sample is adsorbed to the adsorption nozzle, To maintain the vacuum level in order to keep the vacuum adsorption on the sample even when separated from the vacuum connection mechanism during the advance to attach the adsorbed sample to the other sample, Means (not shown) may be provided in the adsorption nozzle.

On the other hand, when the suction nozzle 66 reaches the sheet of the target cartridge or the upper portion of the sheet of the defective cartridge, and the pressing portion 70 presses the suction nozzle 66, the sample F adsorbed to the end of the suction nozzle The opening and closing means of the suction nozzle 66 may operate to break the degree of vacuum on the sheet or the vacuum connection mechanism of the pressing portion 70 may blow the sample F. In this case,

The adsorption nozzle 66 may be applied with a method of attaching the sample by an electrostatic attractive force or by an adhesive force by an adhesive material without holding the sample by vacuum adsorption. Furthermore, the adsorption nozzle may be provided with a plurality of fingers (not shown) to grasp the sample from the side surface.

The sample foreign object inspection and relocation apparatus according to the present invention can include a pusher 70 which is mounted on the upper portion of the suction nozzle at the stop position of each arm on the second support surface B2 And may also be disposed in the first, third and fourth regions. The pushing portion 70 pushes the suction nozzle 66 of the arm 61 stopped at the top of any one of the first stage portion 10, the second stage portion 30 and the third stage portion 40 Thereby performing the function of bringing the end of the suction nozzle 66 into contact with the sheet positioned below.

Thus, when the end of the suction nozzle 66 comes into contact with the sheet S of the source cartridge 5, an arbitrary sample F can be gripped (or adsorbed) at the end of the suction nozzle. When the end of the adsorption nozzle 66 to which the sample F is adsorbed comes into contact with the target cartridge or the sheet of the defective cartridge, the sample F is separated from the end of the adsorption nozzle 66 and adhered to the lower sheet .

On the other hand, the pressing portion 70 is provided with a vacuum suction mechanism (not shown) to enable the vacuum suction function of the suction nozzle. The vacuum suction mechanism can communicate with the opening / closing mechanism of the suction nozzle through the vacuum connection mechanism. The vacuum suction mechanism is not disposed in the rotary body or the arm of the rotary head and is disposed at a position different from that of the rotary body of the rotary head so that the rotary head can rotate more quickly and stop at an accurate position by reducing the weight of the rotary head .

If the adsorption nozzle uses electrostatic attraction, a vacuum suction mechanism and a vacuum connection mechanism are unnecessary.

3 is a diagram illustrating a first area A1 in which the first stage unit 10 and the upper surface foreign matter inspection unit 50 are disposed and a second area A2 in which the lower surface foreign matter inspection unit 20 is disposed, A third region A3 in which the second stage unit 30 is arranged and a fourth region A4 in which the third stage unit 40 is arranged are defined on a crossing line orthogonal to the center point, Lt; / RTI > At this time, as shown in the drawing, the rotation head having four mutually orthogonal arms 61 so that it can enter the first region, the second region, the third region, and the fourth region at the same time, The positional relationship of the portion 60 is also shown.

Here, the rotary head portion 60 is provided on the second support surface and is configured to be rotatable on the upper portion of the first stage portion, the lower surface foreign matter inspection portion, the second stage portion, and the third stage portion. Of course, the rotary head portion 60 may be provided on the first support surface B1.

The four arms 61 of the rotary head portion 60 are simultaneously positioned one by one in the respective regions and are configured to sequentially enter the next region each time the rotary head portion 60 rotates by 90 degrees. According to this operation, the first arm enters the first region and grasps the sample. When the rotary head rotates by 90 degrees, the first arm enters the second region to perform the lower surface foreign matter inspecting process, and at the same time, The arm enters the first region and grips the sample.

When the rotating head part is further rotated by 90 degrees, the third arm enters the first area to perform the sample grasping process, the second arm performs the bottom surface foreign matter inspection process, the first arm enters the third area, And the sample is attached to the target cartridge.

When the rotating head portion is further rotated by 90 degrees, the fourth arm enters the first region, the third arm enters the second region, and the second arm enters the third region. Further, the first arm enters the fourth region, and when the sample is a defective product and is not attached to the target cartridge in the third region, a step of adhering the defective sample to the defective cartridge is performed.

Then, the rotating head portion is rotated by 90 degrees again, and the first arm again enters the first region to hold another sample. Other arms also run through the designated process.

By rotating the four arms of the rotary head sequentially through the first to fourth regions, the foreign matter inspection and repositioning process of the sample can be continuously performed. In comparison with the single arm, A speed increase of 4 times can be expected.

Although the embodiment according to the present invention is described as being divided into four areas arranged at right angles and having four arms, each area may not be arranged at right angles and may be divided into four or more areas.

Furthermore, the number of arms may be comprised of more than four. For example, it is also possible to have eight arms radiating at intervals of 45 degrees with four regions separated at right angles. In this case, the rotating angle of the rotating head can be reduced, and the process can be performed faster.

Next, referring to the plan view of FIG. 4 and the perspective view of FIG. 5, the external appearance and operation of the sample foreign object inspection and relocation apparatus according to the present invention will be described. 4 and 5, the configuration and positional relationship between the first stage portion disposed on the first support surface of the support, the lower surface foreign matter inspection portion, the second stage, and the third stage can be understood.

In the plan view of Fig. 4, the respective seating surfaces 12, 32 of the first stage portion 10 of the first region A1 and the second stage portion 30 of the third region A3 are shown. The third stage of the fourth area A4 is not shown, but its configuration can be predicted.

In the second area, the lower surface foreign matter inspection unit 20 including the lower surface photographing camera for photographing the lower surface of the sample can be identified. The lower surface illuminator may be disposed at an appropriate position where the camera can accurately capture the foreign object with respect to the lower surface of the sample.

At least the seating surfaces 12 and 32 of the first stage portion 10 and the second stage portion 30 are positioned at a desired position of the seat S relative to the arm 61, The XY-axis movement can also be appropriately rotated about the Z-axis movement and the Z-axis so that the position of the sample to be contacted or the position to which the sample is to be contacted.

Referring to FIG. 5, the arm 61 provided on the second supporting surface B2 and stopped at the upper portion of the first stage unit 10 can be seen. This arm will be rotated by 90 degrees by the motor 68. In addition, an upper surface foreign matter inspection unit 50 that generates positional information while inspecting the foreign object with respect to the upper surface of the sample at the upper portion of the sheet can be seen.

6 is a view for explaining an example of a configuration of a source cartridge, which includes a frame 7 having a generally rectangular outer shape, an opening 6 formed in the inner space of the frame, The sheet S can be seen to be fixed to the frame 7 by at least four corners fixed by a fixing mechanism 8 such as a tape.

7 is a view for explaining the first stage unit.

In Fig. 7 (a), a swelling mechanism 14 is arranged inside the opening 13, with a seating surface 12 having an inner portion formed as an opening 13. Further, it can be seen that a push mechanism 16 for pushing the sheet upward from below is located in the inside of the opening 13.

For reference, it can be referred to that a driving band is formed around the first stage unit 10 so as to rotate the first stage about the Z axis.

In Fig. 7 (b), the operation of the swelling mechanism will be described. In the first stage portion 10, the opening 13 and the swelling mechanism 14 should be so arranged as to be located inside the opening 6 formed in the source cartridge 5. That is, the opening 6 of the source cartridge is formed to have a larger diameter than the opening 13 of the first stage portion.

On the other hand, the swelling mechanism 14 can be raised to some extent above the seating surface 12 as shown. With this configuration, by pressing the sheet fixed to the source cartridge, the sheet can be held tight.

8 shows a state in which the sample S attached to the source cartridge 5 is pushed up from the bottom and provided on the first stage unit 10 so that any sample F adhered to the upper surface of the sheet is adhered to the suction nozzle 66, The pushing mechanism 16 is in contact with the distal end of the pushing mechanism. Referring to the drawings, a plurality of grooves are formed in a generally flat end of a push mechanism, and a push pin can protrude from the inside of the groove. In addition, a suction port for sucking a plurality of vacuums may be formed at the distal end of the push mechanism, and the lower surface of the sheet can be brought into close contact with the distal end of the push mechanism by the suction port.

9 is a diagram showing a configuration example of a rotary head portion. The drawing shows the present embodiment in which the rotating body 65 of the rotating head portion is raised from below. Referring to the drawings, suction nozzles 66 are provided on the respective ends of four arms 61 arranged in a perpendicular direction so as to be movable back and forth, and retracted by an elastic mechanism 69 such as a coil spring (See Fig. 10). The rotating body having four arms can be rotated and rotated at a desired angle, for example, 90 degrees by driving the rotating motor 68. [

10 is a view for explaining the structure and operation of the suction nozzle provided at the end of the arm. As described above, the suction nozzle 66 is held retracted from the arm by the elastic mechanism 69, and the pushing portion 70 moves the sample F adsorbed to the end of the suction nozzle by pressing the suction nozzle, Can be moved forward.

The structure for holding the suction nozzle 66 in a retracted state includes not only an elastic mechanism but also a structure in which the pushing portion is pulled back and then pulled back, a structure in which the forward or backward movement is driven by the electromagnetic solenoid, Configuration and so on.

Claims (12)

A second region, a third region, and a fourth region that are rotatable with respect to a predetermined center point and are capable of holding a predetermined sample at each end and formed along the circumferential direction, A rotary head unit having a plurality of arms;
A first stage part disposed in the first area and in which a source cartridge to which one or more samples are attached is placed;
A lower surface foreign matter inspection unit disposed in the second area and photographing a lower surface of the sample gripped by the arm for inspection of a foreign object;
A second stage disposed in the third area and on which a target cartridge on which samples determined by the lower surface foreign matter inspection unit as lower surface foreign matter are arranged is placed;
A third stage part disposed in the fourth area and on which a defective cartridge to which a sample determined to be present on the lower surface exists is placed;
The rotary head unit is rotated so that one of the arms enters the first region and then one of the specimens is gripped at the end of the arm, and the rotary head unit is rotated to move the arm into the second region The lower surface of the sample gripped by the arm is photographed, the photographed image is analyzed to perform a foreign object inspection, the rotation head is rotated according to the result of the foreign object inspection to enter the arm into the third region or the fourth region, And a controller for attaching the sample held by the arm to the target cartridge or the defective cartridge. The method according to claim 1,
Further comprising a top surface foreign matter inspection unit for photographing the upper surface of the sample attached to the source cartridge for the foreign object inspection and transmitting the photographed image to the control unit in the first area, Device. 3. The method of claim 2,
Wherein the control unit is further configured to determine whether or not a sample is detected based on the upper surface foreign matter inspection result determined by the image captured by the upper surface foreign matter inspection unit and the foreign matter presence result determined by the lower foreign matter inspection result determined by the image captured by the lower surface foreign matter inspection unit, Are separately attached to different areas of the defective cartridge. 3. The method of claim 2,
Wherein the control unit causes only the sample whose upper surface is judged to be a foreign matter to be gripped by the arm of the rotating head unit and to put it into the following step. The method according to claim 1,
Wherein the first to fourth regions are defined on an intersecting line orthogonal to the center point,
Wherein the arm is composed of four arms which are orthogonal to each other so as to simultaneously enter the first to fourth regions at every 90 占 rotation of the rotating head portion. 6. The method of claim 5,
Each of the four arms enters one of the first to fourth regions simultaneously with the rotation of the rotating head portion,
Wherein the control unit controls each of the first stage unit, the lower surface foreign matter inspection unit, the second stage unit and the third stage unit to simultaneously perform the specified operation. The method according to claim 1,
Wherein an end of each arm of the rotating head portion is provided with a suction nozzle for gripping at least one sample by vacuum suction. 8. The method of claim 7,
The suction nozzle is configured to be able to move forward and backward from a distal end of the arm toward a sample attached to an arbitrary cartridge,
The apparatus for inspecting and relocating a sample according to claim 1, wherein the sample foreign object inspecting and repositioning device is configured such that a specimen vacuum-adsorbed to the adsorption nozzle in the third region or the fourth region is transferred to the target cartridge or the defective cartridge, Further comprising a pushing portion for moving the suction nozzle toward the target cartridge or the defective cartridge. The method according to claim 1,
The source cartridge includes:
A frame having a plurality of samples arranged thereon, a frame having an opening sized to surround at least an area of the surface of the sheet, the area in which the samples are arranged to be fixed to the frame And a fixing mechanism for fixing the foreign object to the sample. 10. The method of claim 9,
The first stage unit includes:
A swelling mechanism of a structure protruding from the seating surface so as to push up a part of the sheet from the inside of the opening when the source cartridge is seated, Further comprising a clamp for fixing the source cartridge in a state in which the sheet is pulled in an unfolded state to the seating surface. 10. The method of claim 9,
The first stage unit includes:
Further comprising a push mechanism for pushing up the lower surface of said sheet of said source cartridge to allow said arm of said rotating head portion to grip at least one sample attached to an upper surface of said sheet, And a relocation device. The method according to claim 1,
The sample is an infrared cut filter,
The lower surface foreign matter inspection unit may include infrared illumination means for irradiating infrared rays toward the lower surface of the sample adsorbed on the arm that has entered the second region, Further comprising infrared ray photographing means for photographing an infrared ray reflected from a portion other than the foreign object and transmitting the taken infrared ray image to the control portion for lower foreign body inspection.

Images