KR100670165B1 - Ir filter test apparatus and the method of testing ir filter - Google Patents

Ir filter test apparatus and the method of testing ir filter Download PDF

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KR100670165B1
KR100670165B1 KR1020050078463A KR20050078463A KR100670165B1 KR 100670165 B1 KR100670165 B1 KR 100670165B1 KR 1020050078463 A KR1020050078463 A KR 1020050078463A KR 20050078463 A KR20050078463 A KR 20050078463A KR 100670165 B1 KR100670165 B1 KR 100670165B1
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filter
particles
image
scan camera
reading
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Korean (ko)
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김주환
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주식회사 힘스
김주환
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    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/17—Systems in which incident light is modified in accordance with the properties of the material investigated
    • G01N21/25—Colour; Spectral properties, i.e. comparison of effect of material on the light at two or more different wavelengths or wavelength bands
    • G01N21/31—Investigating relative effect of material at wavelengths characteristic of specific elements or molecules, e.g. atomic absorption spectrometry
    • G01N21/35—Investigating relative effect of material at wavelengths characteristic of specific elements or molecules, e.g. atomic absorption spectrometry using infrared light
    • G01N21/359—Investigating relative effect of material at wavelengths characteristic of specific elements or molecules, e.g. atomic absorption spectrometry using infrared light using near infrared light
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F21—LIGHTING
    • F21V—FUNCTIONAL FEATURES OR DETAILS OF LIGHTING DEVICES OR SYSTEMS THEREOF; STRUCTURAL COMBINATIONS OF LIGHTING DEVICES WITH OTHER ARTICLES, NOT OTHERWISE PROVIDED FOR
    • F21V7/00—Reflectors for light sources
    • F21V7/22—Reflectors for light sources characterised by materials, surface treatments or coatings, e.g. dichroic reflectors
    • F21V7/28—Reflectors for light sources characterised by materials, surface treatments or coatings, e.g. dichroic reflectors characterised by coatings
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/17—Systems in which incident light is modified in accordance with the properties of the material investigated
    • G01N21/25—Colour; Spectral properties, i.e. comparison of effect of material on the light at two or more different wavelengths or wavelength bands
    • G01N21/31—Investigating relative effect of material at wavelengths characteristic of specific elements or molecules, e.g. atomic absorption spectrometry
    • G01N21/35—Investigating relative effect of material at wavelengths characteristic of specific elements or molecules, e.g. atomic absorption spectrometry using infrared light
    • G01N21/37—Investigating relative effect of material at wavelengths characteristic of specific elements or molecules, e.g. atomic absorption spectrometry using infrared light using pneumatic detection
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/84—Systems specially adapted for particular applications
    • G01N21/88—Investigating the presence of flaws or contamination
    • G01N21/8851—Scan or image signal processing specially adapted therefor, e.g. for scan signal adjustment, for detecting different kinds of defects, for compensating for structures, markings, edges
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/17—Systems in which incident light is modified in accordance with the properties of the material investigated
    • G01N21/25—Colour; Spectral properties, i.e. comparison of effect of material on the light at two or more different wavelengths or wavelength bands
    • G01N21/31—Investigating relative effect of material at wavelengths characteristic of specific elements or molecules, e.g. atomic absorption spectrometry
    • G01N21/314—Investigating relative effect of material at wavelengths characteristic of specific elements or molecules, e.g. atomic absorption spectrometry with comparison of measurements at specific and non-specific wavelengths
    • G01N2021/3181—Investigating relative effect of material at wavelengths characteristic of specific elements or molecules, e.g. atomic absorption spectrometry with comparison of measurements at specific and non-specific wavelengths using LEDs
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/17—Systems in which incident light is modified in accordance with the properties of the material investigated
    • G01N21/59—Transmissivity
    • G01N21/5907—Densitometers
    • G01N2021/5957—Densitometers using an image detector type detector, e.g. CCD

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  • Spectroscopy & Molecular Physics (AREA)
  • Biochemistry (AREA)
  • General Health & Medical Sciences (AREA)
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  • General Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • General Engineering & Computer Science (AREA)
  • Computer Vision & Pattern Recognition (AREA)
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  • Investigating Materials By The Use Of Optical Means Adapted For Particular Applications (AREA)

Abstract

An IR filter testing apparatus and a testing method thereof are provided to improve the testing performance of the IR filter reflecting the light of the infrared ray area by photographing the surface of the IR filter through the scan camera and reading the particles. An IR filter testing apparatus is composed of a body(2); a setting board(4) installed at the body to set an IR filter; a cartridge(6) placed at the perimeter part of the setting board to receive the IR filter; a moving unit(8) placed between the setting board and the cartridge to transfer the IR filter; a lamp(10) obliquely mounted at the upper side of the setting board to project the light with a predetermined incidence angle; a scan camera(12) placed on the path of the light to photograph the image of the infrared ray area; and a control part(14) connected to the scan camera to read the image photographed from the scan camera. The setting board is rotatably installed by the driving motor. The IR filter is tested by reading the particles and checking the number of the particles.

Description

아이알 필터 검사장치 및 검사방법{IR filter test apparatus and the method of testing IR filter}IR filter test apparatus and the method of testing IR filter

도 1은 본 발명에 따른 IR 필터 검사장치를 도시한 정면도1 is a front view showing an IR filter inspection apparatus according to the present invention

도 2는 본 발명의 IR 필터 검사장치의 주요부분을 도시한 발췌도2 is an extract showing the main part of the IR filter inspection apparatus of the present invention

도 3은 본 발명의 IR 필터 검사장치의 거치대를 도시한 평면도Figure 3 is a plan view showing the cradle of the IR filter inspection apparatus of the present invention

도 4는 본 발명의 IR 필터 검사방법을 도시한 참고도Figure 4 is a reference diagram showing the IR filter test method of the present invention

<도면의 주요부분에 대한 부호의 설명><Description of the symbols for the main parts of the drawings>

2. 본체 4. 거치대2. Body 4. Cradle

6. 카트리지 8. 이송수단6. Cartridge 8. Transfer means

10. 램프 12. 스캔카메라10. Lamp 12. Scan Camera

14. 제어부 20. IR 필터 14. Control unit 20. IR filter

본 발명은 IR 필터 검사장치에 관한 것으로서, 보다 상세하게는 근적외선 영역의 빛을 반사하는 IR 필터를 보다 효율적으로 검사할 수 있도록 된 새로운 구조의 IR 필터 검사장치 및 검사방법에 관한 것이다.The present invention relates to an IR filter inspection apparatus, and more particularly, to an IR filter inspection apparatus and inspection method having a new structure, which enables inspection of an IR filter reflecting light in the near infrared region more efficiently.

일반적으로, 휴대폰 디지털 카메라의 보호창 등에 사용되는 IR 필터는 유리면에 특수코팅을 하여 파장이 긴 적색 부근의 빛 즉, 근적외선 영역의 빛을 반사하여 차단할 수 있도록 한 것으로, 디지털 카메라가 가시광선이 아닌 근적외선 빛까지 모두 인식하여 영상데이터가 포화되는 것을 방지하는 기능을 한다.In general, the IR filter used for the protection window of a mobile phone digital camera is a special coating on the glass surface so that the light can be blocked by reflecting light near a long wavelength of red, that is, near infrared light. It recognizes all near-infrared light and prevents saturation of image data.

한편, 이러한 IR 필터는 웨이퍼 형상의 유리판 일면을 코팅한 후, 커팅기를 이용하여 유리판을 규정된 사이즈로 절단하여 제작된다. 이때, 커팅기로 유리판을 절단할 때 발생되는 칩 등에 의해 IR 필터의 표면이 오염되거나, IR 필터의 절단면이 깨끗하게 잘리지 못하게 되는 경우가 있으므로, 유리판을 절단한 후에 세척공정과 검사과정을 거처서 불량품을 골라내게 된다. 이때, IR 필터의 표면이 오염된 부위나 절단면이 깨끗하지 못한 부위를 파티클이라 칭하며, IR 필터는 파티클의 개수가 일정수준을 넘어설 경우, 불량판정을 받게 된다.On the other hand, such an IR filter is produced by coating one surface of a wafer-shaped glass plate, and then cutting the glass plate to a prescribed size using a cutting machine. At this time, the surface of the IR filter may be contaminated by chips generated when cutting the glass plate with a cutter, or the cut surface of the IR filter may not be cut cleanly. After cutting the glass plate, select the defective product through the cleaning process and the inspection process. To me. At this time, a portion of the surface of the IR filter is contaminated or the cut surface is called a particle, the IR filter is a bad decision when the number of particles exceeds a certain level.

이와 같이 세척공정을 거친 IR 필터를 검사하는 검사장비는 CCD 카메라 등을 이용하여 IR 필터의 코팅면을 촬영하고, 촬영된 영상을 프로그램적으로 분석하여, IR 필터의 불량 여부를 판단하게 된다. 그러나, 상기 CCD 카메라는 가시광선 영역의 영상을 촬영하는데 반해, IR 필터는 근적외선 영역 이외의 빛이 투과되기 때문에, CCD 카메라로 촬영된 영상을 이용하여 IR필터 표면의 파티클을 검사하는 것이 매우 어렵고, 에러율이 높은 문제점이 있었다. In this way, the inspection equipment for inspecting the IR filter that has undergone the cleaning process photographs the coating surface of the IR filter by using a CCD camera, and analyzes the photographed image programmatically to determine whether the IR filter is defective. However, since the CCD camera captures an image in the visible light region, while the IR filter transmits light outside the near infrared region, it is very difficult to inspect particles on the surface of the IR filter using the image captured by the CCD camera. There was a problem with a high error rate.

또한, 이러한 검사장비는 IR필터의 코팅면을 검사할 수는 있지만 코팅면의 반대쪽 면을 검사하는 방법이 개발되지 않아서, 코팅면 반대쪽면에 파티클이 발생되었을 경우 이를 검사하고 확인할 수 없으므로, 제품의 신뢰성을 떨어뜨릴 수 있는 장점이 있었다.In addition, such inspection equipment can inspect the coated surface of the IR filter, but no method of inspecting the opposite side of the coated surface has not been developed. Therefore, if a particle is generated on the opposite side of the coated surface, it cannot be checked and confirmed. There was an advantage that can reduce the reliability.

본 발명은 상기의 문제점을 해결하기 위한 것으로서, 본 발명의 목적은 근적외선 영역의 빛을 반사하는 IR 필터를 보다 효율적으로 검사할 수 있도록 된 새로운 구조의 IR 필터 검사장치 및 검사방법을 제공하는 것이다.SUMMARY OF THE INVENTION The present invention has been made to solve the above problems, and an object of the present invention is to provide an IR filter inspection apparatus and inspection method of a new structure that can more efficiently inspect the IR filter reflecting light in the near infrared region.

본 발명에 따르면, 근적외선 영역의 빛을 반사하는 IR 필터(20)의 표면을 검사하는 IR 필터 검사장치에 있어서, 본체(2)와, 이 본체(2)에 구비되며 IR 필터(20)를 거치할 수 있도록 된 거치대(4)와, 이 거치대(4)의 둘레부에 배치되며 IR 필터(20)를 수납할 수 있도록 된 카트리지(6)와, 상기 거치대(4)와 카트리지(6)의 사이에 배치되어 IR 필터(20)를 이송할 수 있도록 된 이송수단(8)과, 상기 거치대 (4)의 상측에 경사지게 배치되어 상기 거치대(4)에 거치된 IR 필터(20)에 설정된 입사각으로 빛을 주사할 수 있도록 된 램프(10)와, IR 필터(20)에서 반사되는 빛의 경로상에 배치되어 IR 필터(20)에서 반사된 근적외선 영역의 영상을 촬영하는 스캔카메라(12)와, 이 스캔카메라(12)에 연결되며 스캔카메라(12)에 촬영된 영상을 판독하는 제어부(14)를 포함하여, 상기 스캔카메라(12)로 상기 IR 필터(20)의 표면에서 반사되는 근적외선 영역의 영상을 촬영하고, 상기 제어부(14)가 촬영된 영상을 판독하여 파티클을 확인하므로써, IR 필터(20)를 검사할 수 있도록 된 것을 특징으로 하는 IR 필터 검사장치가 제공된다.According to the present invention, in the IR filter inspection apparatus for inspecting the surface of the IR filter 20 that reflects light in the near infrared region, the main body 2 and the main body 2 are provided and pass through the IR filter 20. A cradle (4) capable of being made, a cartridge (6) arranged at the periphery of the cradle (4) and capable of storing the IR filter (20), and between the cradle (4) and the cartridge (6). A conveying means 8 arranged to be able to convey the IR filter 20, and disposed at an upper side of the cradle 4 so as to be inclined at an angle of incidence set at the IR filter 20 mounted to the cradle 4. A lamp 10 capable of scanning the light, a scan camera 12 disposed on a path of light reflected by the IR filter 20 to capture an image of the near-infrared region reflected by the IR filter 20, and A control unit 14 connected to the scan camera 12 and reading an image captured by the scan camera 12 to the scan camera 12. The IR filter 20 can be inspected by capturing an image of a near infrared region reflected from the surface of the IR filter 20 and checking the particle by reading the captured image. An IR filter inspection device is provided.

본 발명의 다른 특징에 다르면, 상기 거치대(4)는 구동모터에 의해 회전할 수 있도록 설치되어, 이 거치대(4)를 회전시켜 거치대(4)에 거치된 IR 필터(20)를 다양한 방향에서 촬영할 수 있도록 된 것을 특징으로 하는 IR 필터 검사장치가 제공된다.According to another feature of the invention, the cradle (4) is installed to be rotated by the drive motor, by rotating the cradle (4) to shoot the IR filter 20 mounted on the cradle (4) in various directions An IR filter inspection device is provided, which is characterized in that it is possible.

본 발명의 또다른 특징에 따르면, IR필터(20)의 코팅면에서 반사되는 근적외선 영역의 영상을 촬영할 수 있는 스캔카메라(12)를 이용하여, IR 필터(20)의 코팅면 반대쪽 면을 검사하는 방법에 있어서, 코팅면이 하측을 향하도록 배치된 IR 필터(20)의 상측 표면을 1차 촬영하는 단계와, 촬영된 IR필터(20)의 영상을 판독하여 확인된 파티클의 좌표데이터를 1차좌표로 설정하는 단계와, IR 필터(20)를 180°회전시켜 IR 필터(20)의 상측 표면을 2차 촬영하는 단계와, 2차 촬영된 IR필터(20)의 영상을 판독하여 확인된 파티클의 좌표데이터를 2차좌표로 설정하는 단계와, 파티클의 1차좌표와 2차좌표의 데이터를 상호 정렬되도록 회전 또는 반전시켜 비교하여 파티클의 개수를 판독하는 단계를 포함하는 것을 특징으로 하는 IR필터 검사방법이 제공된다.According to another feature of the invention, by using a scan camera 12 that can capture the image of the near infrared region reflected from the coating surface of the IR filter 20, inspecting the surface opposite the coating surface of the IR filter 20 In the method, the first step of photographing the upper surface of the IR filter 20 disposed so that the coating surface is facing downward, and the coordinate data of the particles confirmed by reading the image of the photographed IR filter 20 as the primary Setting the coordinates, rotating the IR filter 20 by 180 °, photographing the upper surface of the IR filter 20 secondly, and reading the image of the second-filtered IR filter 20 to confirm the particles. IR coordinates comprising the step of setting the coordinate data of the secondary coordinates, and reading the number of particles by rotating or inverting the data of the primary and secondary coordinates of the particles to be mutually aligned Inspection methods are provided.

이하, 본 발명의 바람직한 실시예를 첨부한 도면에 의거하여 설명하면 다음과 같다.Hereinafter, preferred embodiments of the present invention will be described with reference to the accompanying drawings.

도 1내지 3는 본 발명에 따른 IR 필터 검사장치를 도시한 것으로, 본체(2)와, 이 본체(2)에 구비되며 IR 필터(20)를 거치할 수 있도록 된 거치대(4)와, 이 거치대(4)의 둘레부에 배치되며 IR 필터(20)를 수납할 수 있도록 된 카트리지(6)와, 상기 거치대(4)와 카트리지(6)의 사이에 배치되어 IR 필터(20)를 이송할 수 있도록 된 이송수단(8)과, 상기 본체(2)의 상측에 구비되며 상기 거치대(4)에 거치된 IR 필터(20)에 설정된 입사각으로 빛을 주사할 수 있도록 된 램프(10)와, 본체(2)의 상측에 상기 램프(10)의 빛이 IR 필터(20)에서 반사되는 빛의 경로상에 배치되어 IR 필터(20)에서 반사된 영상을 촬영하는 스캔카메라(12)와, 이 스캔카메라(12)에 연결되며 스캔카메라(12)에 촬영된 영상을 판독하여 파티클의 개수를 검색하는 제어부(14)가 구비된다. 이때, 상기 IR 필터(20)는 접착프레임(16,18)에 고정되어 적재 및 이송, 검사되며, 상기 접착프레임(16,18)은 링형상의 프레임(16)에 접착면이 상부를 향하도록 접착테이프(18)를 고정하여, 이 접착테이프(18)의 상면에 다수개의 IR 필터(20)를 붙여 고정할 수 있도록 구성된다.1 to 3 show an IR filter inspection apparatus according to the present invention, a main body 2, a cradle 4 provided on the main body 2 and configured to mount an IR filter 20, and A cartridge 6 disposed at the periphery of the holder 4 to accommodate the IR filter 20, and disposed between the holder 4 and the cartridge 6 to transfer the IR filter 20. And a lamp 10 provided at an upper side of the main body 2 and configured to scan light at an angle of incidence set in the IR filter 20 mounted on the holder 4, A scan camera 12 on the upper side of the main body 2 that is disposed on a path of light reflected by the IR filter 20 to capture an image reflected by the IR filter 20, and The controller 14 is connected to the scan camera 12 and reads an image captured by the scan camera 12 to search for the number of particles. At this time, the IR filter 20 is fixed to the adhesive frame (16, 18) is loaded, transported, and inspected, the adhesive frame (16, 18) so that the adhesive surface facing the ring-shaped frame 16 to the top The adhesive tape 18 is fixed, and a plurality of IR filters 20 are attached to the upper surface of the adhesive tape 18 so as to be fixed.

상기 본체(2)는 박스형태로 구성되어 그 내부에 각종 설비가 장착되는 것으로, 전면에 도어(22)가 장착된다. 상기 거치대(4)는 그 상면에 상기 접착프레임(16,18)을 거치할 수 있도록 된 것으로, 도 3에 도시한 바와 같이, X축과 Y축 가이드레일(24,25)에 회전가능하게 설치되고 도시안된 구동모터에 구동되어, 그 상면에 거치된 접착프레임(16,18)을 X-Y축으로 위치이송시키거나 회전시킬 수 있도록 구성된다. 상기 카트리지(6)는 상기 본체(2)의 내부 양측에 각각 구비되어, 검사를 할 접착프레임(16,18)과 검사가 끝난 접착프레임(16,18)을 각기 분류하여 수납할 수 있도록 구성된다. 상기 이송수단(8)은 피커가 구비되어 카트리지(6)에 적재된 접착프레임(16,18)을 이송하여 상기 거치대(4)에 거치하거나, 거치대(4)에 거치되어 검사가 끝난 접착프레임(16,18)을 이송하여 카트리지(6)에 수납할 수 있도록 구성된다.The main body 2 is configured in the form of a box in which various facilities are mounted, and the door 22 is mounted on the front surface thereof. The holder 4 is to be mounted to the adhesive frame 16, 18 on its upper surface, as shown in Figure 3, rotatably installed on the X-axis and Y-axis guide rails (24, 25) And driven by a drive motor (not shown), the adhesive frames 16 and 18 mounted on the upper surface thereof can be moved or rotated on the XY axis. The cartridge 6 is provided on both sides of the main body 2, respectively, so that the adhesive frames 16 and 18 to be inspected and the adhesive frames 16 and 18 which have been inspected can be classified and stored, respectively. . The transfer means 8 is provided with a picker to transfer the adhesive frame (16,18) loaded on the cartridge 6 to be mounted on the holder (4), or mounted on the holder (4) the adhesive frame after the inspection ( 16, 18 is configured to be transported and stored in the cartridge (6).

상기 램프(10)는 할로겐 램프를 이용하며, 거치대(4) 상면에 거치된 접착프레임(16,18)의 IR 필터(20)에 45°각도로 빛을 주사할 수 있도록 설치된다. 상기 스캔카메라(12)는 적색을 포함한 근적외선 영역의 빛을 인식하여 촬영할 수 있는 것으로, 상기 램프(10)와 대응되도록 45°각도로 설치되어 IR 필터(20)에서 반사된 근적외선 영역의 영상을 촬영할 수 있도록 구성된다. 상기 제어부(14)는 영상판독프로그램을 이용하여 스캔카메라(12)에 의해 촬영된 영상을 판독하고, 해당 영상에서 색이 다른 부분은 적외선이 반사되지 않는 파티클을 촬영한 부분으로 판정하는 것으로, 확인된 파티클의 좌표 등을 포함한 해당 IR 필터(20)의 정보를 메모리에 저장할 수 있도록 구성된다. 그리고, 이와 별도로, 상기 제어부(14)는 상기 스캔카 메라(12)에 의해 촬영된 붉은 색의 영상을 판독이 용이한 흰색으로 변환하여 별도의 디스플레이장치(26)로 출력하므로써, 작업자가 육안으로 IR 필터(20)의 불량여부를 확인할 수 있도록 한다. The lamp 10 uses a halogen lamp and is installed to scan light at an angle of 45 ° to the IR filter 20 of the adhesive frames 16 and 18 mounted on the upper surface of the holder 4. The scan camera 12 may recognize and photograph light in a near infrared region including red. The scan camera 12 may be installed at a 45 ° angle to correspond to the lamp 10 to capture an image of the near infrared region reflected by the IR filter 20. It is configured to be. The control unit 14 reads an image photographed by the scan camera 12 using an image reading program, and determines that a part having a different color from the image is a part photographing a particle which is not reflected by infrared rays. It is configured to store the information of the IR filter 20, including the coordinates of the particles, etc. in the memory. Separately, the controller 14 converts the red image captured by the scan camera 12 into a white color for easy reading and outputs it to a separate display device 26, so that the operator can see with the naked eye. Check whether the IR filter 20 is defective.

따라서, 다수개의 IR 필터(20)가 접착된 접착프레임(16,18)을 상기 카트리지(6)에 수납하면, 상기 이송수단(8)이 접착프레임(16,18)을 이송하여 거치대(4)에 거치하며, 상기 스캔카메라(12)는 IR필터(20)의 코팅면(28)에서 반사되는 영상을 촬영한다. 그리고, 상기 제어부(14)는 스캔카메라(12)에 의해 촬영된 영상을 판독하여 파티클의 개수를 확인하여, 파티클의 개수가 일정수준을 넘어서면 해당 IR 필터(20)를 불량으로 판정하며, 해당 기록을 메모리에 기록한다. 이때, 상기 접착프레임(16,18)에는 다수개의 IR 필터(20)가 고정되어 있으므로, 상기 거치대(4)는 X-Y축방향으로 순차적으로 이동되어, 상기 스캔카메라(12)를 이용하여 각각의 IR 필터(20)를 개별적으로 촬영할 수 있도록 한다. 그리고, 검사가 완료된 접착프레임(16,18)은 상기 이송수단(8)에 의해 이송되어 카트리지(6)에 수납된다. Accordingly, when the adhesive frames 16 and 18 to which the plurality of IR filters 20 are attached are accommodated in the cartridge 6, the transfer means 8 transfers the adhesive frames 16 and 18 to the holder 4. Mounted on, the scan camera 12 captures the image reflected from the coating surface 28 of the IR filter 20. The controller 14 reads an image photographed by the scan camera 12 and checks the number of particles. If the number of particles exceeds a predetermined level, the controller 14 determines that the IR filter 20 is defective. Write the record to memory. In this case, since the plurality of IR filters 20 are fixed to the adhesive frames 16 and 18, the holder 4 is sequentially moved in the XY axis direction, and each IR is used by using the scan camera 12. The filter 20 can be photographed individually. In addition, the inspection-completed adhesive frames 16 and 18 are transported by the transfer means 8 and stored in the cartridge 6.

한편, IR필터(20)의 표면 검사모드는 도 4의 (a)에 도시한 바와같이, IR필터(20)의 코팅면(28)이 상측을 향한 상태에서 코팅면(28)을 검사하는 모드와, 도 4의 (b)에 도시한 바와 같이, 코팅면(28)이 하측을 향한 상태에서 코팅면(28)의 반대쪽 면을 검사하는 모드가 있다. 이와같이 코팅면(28)의 반대쪽 면을 검사할 때는 IR필터(20)에 빛을 주사하고, 하측의 코팅면(28)에 반사되어 IR필터(20) 상면을 통과한 근저외선 영역의 영상을 촬영하여 파티클을 검사하게 된다. 그런데, IR필터(20)의 측면은 커터에 의해 절단되어 표면이 거칠어서 빛이 잘 투과되지 못하므로, 코팅면 (28) 반대쪽 면을 검사할 때는 빛이 통과하지 못하여 촬영되지 않는 촬영불가구역(B)이 발생된다. Meanwhile, the surface inspection mode of the IR filter 20 is a mode in which the coating surface 28 is inspected while the coating surface 28 of the IR filter 20 faces upward as shown in FIG. And, as shown in Fig. 4 (b), there is a mode for inspecting the opposite side of the coating surface 28 in a state in which the coating surface 28 is directed downward. As described above, when the opposite side of the coating surface 28 is inspected, light is irradiated to the IR filter 20, and the image of the near-low ultraviolet region that is reflected by the lower coating surface 28 and passes through the IR filter 20 upper surface is taken. To inspect the particles. However, since the side of the IR filter 20 is cut by the cutter and the surface is rough so that light is not transmitted well, when inspecting the opposite side of the coating surface 28, the light cannot pass and cannot be photographed. B) is generated.

따라서, 이와같이 코팅면(28)이 하측을 향하도록 배치하여 코팅면(28)의 반대면을 검사할 때는 IR 필터(20)를 1차 촬영하고, 상기 제어부(14)가 촬영된 IR필터(20)의 영상을 판독하여 파악된 파티클의 좌표를 1차좌표로 설정하여 메모리에 저장한다. 그리고, 상기 거치대(4)로 IR 필터(20)를 180°회전시켜 IR 필터(20)를 2차 촬영하고, 2차 촬영된 IR필터(20)의 영상을 판독하여 파악된 파티클의 좌표를 2차 좌표로 설정한 후, 메모리에 저장된 1차좌표를 180°회전시켜 2차좌표와 겹쳐지게 배치하고, 겹쳐진 좌표데이터에서 파티클의 개수를 판독한다. 이때, 촬영불가구역(B) 이외의 구역에 발생된 파티클은 2번 촬영되고, 촬영불가구역(B) 내의 파티클은 한번씩 촬영되어, IR 필터(20)를 180°회전시켜 2번 촬영하여 각 영상에서 판독된 파티클의 좌표를 겹쳐놓으면, 촬영불가구역(B) 이외의 구역에 발생되어 2번씩 촬영된 파티클은 서로 겹쳐져 하나로 판독된다. 따라서, 1차좌표와 2차좌표를 겹친상태에서 파티클의 개수를 판독하면, 촬영불가구역(B)구역 내부의 파티클까지 모두 파악할 수 있다. 이때, 촬영된 영상을 직접 저장하여 비교하지 않고 파티클의 좌표만을 설정하여 저장하는 이유는, 스캔카메라(12)에 의해 촬영되는 IR필터(20)의 영상데이터의 사이즈가 매우 커서 저장용량을 많이 차지할 뿐 아니라, 저장 및 로딩에 걸리는 시간이 오래 걸리기 때문이다. Accordingly, when the coating surface 28 is disposed downward in this way and the surface opposite to the coating surface 28 is inspected, the IR filter 20 is first photographed and the controller 14 is photographed by the IR filter 20. Read the image of) and set the coordinates of the identified particles as primary coordinates and store them in the memory. Then, the IR filter 20 is rotated 180 ° with the holder 4 to photograph the IR filter 20 secondly, and the image of the second captured IR filter 20 is read to determine the coordinates of the particle. After setting the difference coordinates, the primary coordinates stored in the memory are rotated 180 degrees to be overlapped with the secondary coordinates, and the number of particles is read from the overlapping coordinate data. At this time, particles generated in the area other than the non-capable area B are photographed twice, and particles in the non-capable area B are photographed once, and each image is photographed twice by rotating the IR filter 20 by 180 °. When the coordinates of the particles read in are superimposed, particles generated in the area other than the non-capable area B and photographed twice are read as one by overlapping each other. Therefore, if the number of particles is read while the primary and secondary coordinates overlap, it is possible to grasp all the particles inside the non-photographable area B. In this case, the reason for setting and storing only the coordinates of the particles without directly storing and comparing the captured images is that the size of the image data of the IR filter 20 captured by the scan camera 12 is very large and occupies a lot of storage capacity. In addition, storage and loading takes a long time.

이와같이 구성된 IR 필터 검사장치는 근적외선 영역의 빛을 반사하는 IR 필터(20)의 특성을 이용하여, 스캔카메라(12)를 이용하여 IR 필터(20)에서 반사된 영 상을 촬영햐여 파티클을 검사하므로, 파티클을 정확히 검색할 수 있으며, 에러율을 낮출 수 있는 장점이 있다. 또한, IR필터(20)를 180°회전시켜 2번 촬영한 후, 각 화면에서 판독된 파티클의 좌표를 겹쳐놓고 파티클의 개수를 판독하므로써, IR 필터(20)의 코팅면(28) 반대쪽 면의 파티클까지 모두 검사할 수 있는 장점이 있다. 특히, IR필터(20)의 파티클의 좌표를 설정 및 저장하여, 좌표데이터를 이용하여 파티클을 검사하므로써, 데이터저장용량을 줄이고, 검사에 걸리는 시간을 단축할 수 있는 장점이 있다.The IR filter inspection device configured as described above uses the characteristics of the IR filter 20 reflecting light in the near infrared region, and thus inspects particles by capturing the image reflected from the IR filter 20 using the scan camera 12. In this case, the particles can be searched accurately and the error rate can be lowered. In addition, after photographing twice by rotating the IR filter 20 by 180 °, the number of particles is read by superimposing the coordinates of the particles read on each screen, so that the surface opposite the coating surface 28 of the IR filter 20 is read. It has the advantage of inspecting all the particles. In particular, by setting and storing the coordinates of the particles of the IR filter 20, by inspecting the particles using the coordinate data, there is an advantage that the data storage capacity can be reduced, and the time required for inspection can be shortened.

본 실시예의 경우, IR 필터(20)의 검사가 끝나면 상기 이송수단(8)이 접착프레임(16,18)을 이송하여 카트리지(6)에 수납하도록 구성하였으나, 필요에 따라, 이송경로 중간에 마킹수단을 구비하여, 불량 판정이난 IR필터(20)에 불량표시를 하므로써, 후공정에서 작업자가 불량 IR필터(20)를 손쉽게 골라낼 수 있도록 하는 것도 가능하다. 또한, 본 실시예의 경우, 상기 접착프레임(16,18)에 다수개의 IR 필터(20)를 붙여 검사할 수 있도록 하였으나, 필요에 따라, 상기 접착프레임(16,18)을 이용하지 않고, IR 필터(20)를 하나씩 이송 및 검사할 수 있도록 하는 것도 가능하다. 또한, 상기 램프(10)는 설명한 할로겐 램프 이외에, 제논아크램프, 메탈 할라이드램프, 수은램프, LED, 레이져 등 적색을 포함한 근적외선 파장의 빛을 낼 수 있는 것은 어떠한 것도 가능하다. 그리고, 이 램프(10)와 스캔카메라(12)가 45°각도로 경사지게 설치되는 것을 예시하였으나, 이 램프(10)와 스캔카메라(12)의 설치각도는 제작자의 필요에 따라 변경가능하다.In the present embodiment, after the inspection of the IR filter 20, the transfer means 8 is configured to transport the adhesive frames 16, 18 to be stored in the cartridge 6, but if necessary, marking in the middle of the transfer path It is also possible to provide a means to display a defective display on the IR filter 20 which has been determined as defective, so that an operator can easily pick out the defective IR filter 20 in a later step. In addition, in the present embodiment, a plurality of IR filters 20 are attached to the adhesive frames 16 and 18 to be inspected. However, if necessary, the IR filters are not used without the adhesive frames 16 and 18. It is also possible to make it possible to transport and inspect (20) one by one. In addition to the halogen lamp described above, the lamp 10 may emit any light having a near infrared wavelength including red, such as a xenon arc lamp, a metal halide lamp, a mercury lamp, an LED, and a laser. In addition, although the lamp 10 and the scan camera 12 are illustrated to be inclined at an angle of 45 °, the installation angles of the lamp 10 and the scan camera 12 may be changed as required by the manufacturer.

또한, 본 발명에 따른 IR필터 검사장치는 커팅공정이 완료된 IR필터(20)의 사후 검사에 이용되도록 설계되었으나, 필요에 따라, IR필터(20)를 잘라 개별화하는 커팅공정 이전에 IR필터(20) 반제품의 코팅상태 및 코팅면 반대쪽 면의 상태를 검사하는데 이용가능하다.In addition, the IR filter inspection apparatus according to the present invention is designed to be used for the post inspection of the IR filter 20 after the cutting process is completed, if necessary, the IR filter 20 before the cutting process to cut and individualize the IR filter 20 as needed. ) It can be used to inspect the coating condition of semi-finished product and the opposite side of coating surface.

이상에서와 같이 본 발명에 의하면, 근적외선 영역의 빛을 반사하는 IR 필터의 특성을 이용하여, 근적외선 영역의 영상을 촬영할 수 있는 스캔카메라로 IR필터의 표면을 촬영하여 파티클을 판독하므로써, 근적외선 영역의 빛을 반사하는 IR 필터를 보다 효율적으로 검사할 수 있도록 된 새로운 구조의 IR 필터 검사장치 및 검사방법을 제공할 수 있다.According to the present invention as described above, by using the characteristics of the IR filter reflecting light in the near infrared region, by scanning the surface of the IR filter with a scan camera that can capture the image of the near infrared region, by reading the particles, It is possible to provide a new IR filter inspection device and inspection method that can more efficiently inspect the IR filter reflecting light.

Claims (3)

근적외선 영역의 빛을 반사하는 IR 필터(20)의 표면을 검사하는 IR 필터 검사장치에 있어서, 본체(2)와, 이 본체(2)에 구비되며 IR 필터(20)를 거치할 수 있도록 된 거치대(4)와, 이 거치대(4)의 둘레부에 배치되며 IR 필터(20)를 수납할 수 있도록 된 카트리지(6)와, 상기 거치대(4)와 카트리지(6)의 사이에 배치되어 IR 필터(20)를 이송할 수 있도록 된 이송수단(8)과, 상기 거치대(4)의 상측에 경사지게 배치되어 상기 거치대(4)에 거치된 IR 필터(20)에 설정된 입사각으로 빛을 주사할 수 있도록 된 램프(10)와, IR 필터(20)에서 반사되는 빛의 경로상에 배치되어 IR 필터(20)에서 반사된 근적외선 영역의 영상을 촬영하는 스캔카메라(12)와, 이 스캔카메라(12)에 연결되며 스캔카메라(12)에 촬영된 영상을 판독하는 제어부(14)를 포함하며, 상기 거치대(4)는 구동모터에 의해 회전 가능하게 구비되고, 상기 스캔카메라(12)로 상기 거치대(4)에 거치된 IR 필터(20)의 표면에서 반사되는 근적외선 영역의 영상을 다방향에서 촬영하고, 상기 스캔카메라(12)에 의해 촬영된 각 영상을 상기 제어부(14)에 의해 상호 정렬시켜 파티클을 판독하고 파티클의 개수를 확인하여 IR 필터(20)를 검사할 수 있도록 된 것을 특징으로 하는 IR 필터 검사장치.An IR filter inspection apparatus for inspecting a surface of an IR filter 20 that reflects light in a near infrared region, the apparatus comprising: a main body 2 and a holder provided on the main body 2 to mount the IR filter 20. (4), a cartridge (6) disposed at the periphery of the holder (4) to accommodate the IR filter (20), and disposed between the holder (4) and the cartridge (6). A transfer means 8 capable of transferring 20 and an obliquely arranged upper side of the cradle 4 so as to scan light at an angle of incidence set on the IR filter 20 mounted on the cradle 4; A lamp 10 and a scan camera 12 arranged on a path of light reflected by the IR filter 20 to capture an image of a near-infrared region reflected by the IR filter 20, and the scan camera 12. It is connected to the control unit 14 for reading the image taken by the scan camera 12, the cradle 4 is rotated by a drive motor The image of the near-infrared region reflected by the surface of the IR filter 20 mounted on the holder 4 by the scan camera 12 may be photographed in multiple directions, and the image may be captured by the scan camera 12. IR filters inspection apparatus, characterized in that each image is aligned with each other by the control unit 14 to read the particles and check the number of particles to inspect the IR filter (20). 삭제delete IR필터(20)의 표면에서 반사되는 근적외선 영역의 영상을 촬영할 수 있는 스캔카메라(12)를 이용하여 IR 필터(20)의 코팅면의 반대면을 검사하는 방법에 있어서, 코팅면이 하측을 향하도록 배치된 IR 필터(20)의 상측 표면을 1차 촬영하는 단계와, 촬영된 IR필터(20)의 영상을 판독하여 확인된 파티클의 좌표데이터를 1차좌표로 설정하는 단계와, IR 필터(20)를 180°회전시켜 IR 필터(20)의 상측 표면을 2차 촬영하는 단계와, 2차 촬영된 IR필터(20)의 영상을 판독하여 확인된 파티클의 좌표데이터를 2차좌표로 설정하는 단계와, 파티클의 1차좌표와 2차좌표의 데이터를 상호 정렬되도록 회전 또는 반전시켜 비교하여 파티클의 개수를 판독하는 단계를 포함하며, 상호 정렬되어 겹쳐진 1차좌표와 2차좌표 데이터에서 파티클을 판독하고 파티클의 개수를 확인하는 것을 특징으로 하는 IR필터 검사방법.In the method of inspecting the opposite side of the coating surface of the IR filter 20 by using a scan camera 12 capable of capturing an image of the near-infrared region reflected from the surface of the IR filter 20, the coating surface faces downward. Photographing the upper surface of the IR filter 20 arranged so as to perform primary imaging, reading the image of the photographed IR filter 20, and setting coordinate data of the identified particles as primary coordinates; 20) by rotating the 180 ° secondary image of the upper surface of the IR filter 20, and by reading the image of the secondary IR filter 20 taken to set the coordinate data of the confirmed particles to secondary coordinates And reading the number of particles by rotating or inverting the data of the primary and secondary coordinates of the particles so as to be mutually aligned, and reading the number of particles from the superimposed primary and secondary coordinate data. Specially for reading and checking the number of particles IR filter test method for.
KR1020050078463A 2005-08-25 2005-08-25 Ir filter test apparatus and the method of testing ir filter KR100670165B1 (en)

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Cited By (1)

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Publication number Priority date Publication date Assignee Title
KR20150100330A (en) 2014-02-25 2015-09-02 한국영상기술(주) Apparatus for inspecting and relocating the component

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR20150100330A (en) 2014-02-25 2015-09-02 한국영상기술(주) Apparatus for inspecting and relocating the component

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