KR101562543B1 - 인터포저 장치 및 방법 - Google Patents
인터포저 장치 및 방법 Download PDFInfo
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- KR101562543B1 KR101562543B1 KR1020150027218A KR20150027218A KR101562543B1 KR 101562543 B1 KR101562543 B1 KR 101562543B1 KR 1020150027218 A KR1020150027218 A KR 1020150027218A KR 20150027218 A KR20150027218 A KR 20150027218A KR 101562543 B1 KR101562543 B1 KR 101562543B1
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- 239000000758 substrate Substances 0.000 description 2
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- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 1
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L23/00—Details of semiconductor or other solid state devices
- H01L23/48—Arrangements for conducting electric current to or from the solid state body in operation, e.g. leads, terminal arrangements ; Selection of materials therefor
- H01L23/488—Arrangements for conducting electric current to or from the solid state body in operation, e.g. leads, terminal arrangements ; Selection of materials therefor consisting of soldered or bonded constructions
- H01L23/495—Lead-frames or other flat leads
- H01L23/49541—Geometry of the lead-frame
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
- G01R1/00—Details of instruments or arrangements of the types included in groups G01R5/00 - G01R13/00 and G01R31/00
- G01R1/02—General constructional details
- G01R1/06—Measuring leads; Measuring probes
- G01R1/067—Measuring probes
- G01R1/06705—Apparatus for holding or moving single probes
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
- G01R3/00—Apparatus or processes specially adapted for the manufacture or maintenance of measuring instruments, e.g. of probe tips
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
- G01R1/00—Details of instruments or arrangements of the types included in groups G01R5/00 - G01R13/00 and G01R31/00
- G01R1/02—General constructional details
- G01R1/04—Housings; Supporting members; Arrangements of terminals
- G01R1/0408—Test fixtures or contact fields; Connectors or connecting adaptors; Test clips; Test sockets
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
- G01R1/00—Details of instruments or arrangements of the types included in groups G01R5/00 - G01R13/00 and G01R31/00
- G01R1/02—General constructional details
- G01R1/06—Measuring leads; Measuring probes
- G01R1/067—Measuring probes
- G01R1/06711—Probe needles; Cantilever beams; "Bump" contacts; Replaceable probe pins
- G01R1/06716—Elastic
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
- G01R1/00—Details of instruments or arrangements of the types included in groups G01R5/00 - G01R13/00 and G01R31/00
- G01R1/02—General constructional details
- G01R1/06—Measuring leads; Measuring probes
- G01R1/067—Measuring probes
- G01R1/073—Multiple probes
- G01R1/07307—Multiple probes with individual probe elements, e.g. needles, cantilever beams or bump contacts, fixed in relation to each other, e.g. bed of nails fixture or probe card
- G01R1/07357—Multiple probes with individual probe elements, e.g. needles, cantilever beams or bump contacts, fixed in relation to each other, e.g. bed of nails fixture or probe card with flexible bodies, e.g. buckling beams
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
- G01R1/00—Details of instruments or arrangements of the types included in groups G01R5/00 - G01R13/00 and G01R31/00
- G01R1/02—General constructional details
- G01R1/06—Measuring leads; Measuring probes
- G01R1/067—Measuring probes
- G01R1/073—Multiple probes
- G01R1/07307—Multiple probes with individual probe elements, e.g. needles, cantilever beams or bump contacts, fixed in relation to each other, e.g. bed of nails fixture or probe card
- G01R1/07364—Multiple probes with individual probe elements, e.g. needles, cantilever beams or bump contacts, fixed in relation to each other, e.g. bed of nails fixture or probe card with provisions for altering position, number or connection of probe tips; Adapting to differences in pitch
- G01R1/07371—Multiple probes with individual probe elements, e.g. needles, cantilever beams or bump contacts, fixed in relation to each other, e.g. bed of nails fixture or probe card with provisions for altering position, number or connection of probe tips; Adapting to differences in pitch using an intermediate card or back card with apertures through which the probes pass
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
- G01R31/00—Arrangements for testing electric properties; Arrangements for locating electric faults; Arrangements for electrical testing characterised by what is being tested not provided for elsewhere
- G01R31/26—Testing of individual semiconductor devices
- G01R31/2601—Apparatus or methods therefor
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer
- H01L21/48—Manufacture or treatment of parts, e.g. containers, prior to assembly of the devices, using processes not provided for in a single one of the groups H01L21/18 - H01L21/326 or H10D48/04 - H10D48/07
- H01L21/4814—Conductive parts
- H01L21/4821—Flat leads, e.g. lead frames with or without insulating supports
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L24/00—Arrangements for connecting or disconnecting semiconductor or solid-state bodies; Methods or apparatus related thereto
- H01L24/71—Means for bonding not being attached to, or not being formed on, the surface to be connected
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L24/00—Arrangements for connecting or disconnecting semiconductor or solid-state bodies; Methods or apparatus related thereto
- H01L24/90—Methods for connecting semiconductor or solid state bodies using means for bonding not being attached to, or not being formed on, the body surface to be connected, e.g. pressure contacts using springs or clips
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
- G01R31/00—Arrangements for testing electric properties; Arrangements for locating electric faults; Arrangements for electrical testing characterised by what is being tested not provided for elsewhere
- G01R31/28—Testing of electronic circuits, e.g. by signal tracer
- G01R31/2851—Testing of integrated circuits [IC]
- G01R31/2886—Features relating to contacting the IC under test, e.g. probe heads; chucks
- G01R31/2889—Interfaces, e.g. between probe and tester
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
- H01L2224/80—Methods for connecting semiconductor or other solid state bodies using means for bonding being attached to, or being formed on, the surface to be connected
- H01L2224/89—Methods for connecting semiconductor or other solid state bodies using means for bonding being attached to, or being formed on, the surface to be connected using at least one connector not provided for in any of the groups H01L2224/81 - H01L2224/86
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- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Engineering & Computer Science (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- Manufacturing & Machinery (AREA)
- Measuring Leads Or Probes (AREA)
- Cooling Or The Like Of Electrical Apparatus (AREA)
- Mechanical Engineering (AREA)
- Geometry (AREA)
- Cooling Or The Like Of Semiconductors Or Solid State Devices (AREA)
Abstract
Description
도 1a 및 도 1b는 일부 실시예들에 따른, TE 및 DUT와의 가동 컨택 전 및 이후의 인터포저의 단면 측면도들이다.
도 2a는 일부 실시예들에 따른, 다중 핀들이 있는 인터포저의 분해 사시도이다.
도 2b 및 도 2c는 일부 실시예들에 따른, 도 2a의 인터포저의 측 단면도들이다.
도 3은 일부 실시예에 따라, 인터포저를 제 1 및 제 2 전기 디바이스들에 대하여 포지셔닝하는 방법에 대한 흐름도이다.
도 4a 내지 도 4g는 일부 실시예들에 따라, 다양한 제작 동작들에 후속하는 인터포저를 개략적으로 도시하는 도면이다.
도 5a는 일부 실시예들에 따른 핀 제작 어셈블리의 측면도이다.
도 5b 내지 도 5e는 일부 실시예들에 다른, 도 5a의 핀 제작 어셈블리의 구성요소들의 상면 단면도들이다.
도 6은 일부 실시예들에 따른, 인터포저용 핀을 제작하는 방법에 대한 흐름도이다.
도 7은 일부 실시예들에 따른, 컴퓨팅 디바이스를 개략적으로 도시하는 도면이다.
Claims (7)
- 인터포저 장치를 위한 핀을 제작하는 방법으로서,
제 1 로터리 다이와 제 2 로터리 다이를 제공하는 단계 - 상기 제 1 로터리 다이는 수 다이(a male die)를 제공하는 투스 패턴(tooth pattern)을 가지고 상기 제 2 로터리 다이는 암 다이(a female die)를 제공하는 투스 패턴을 가지며, 상기 제 1 로터리 다이와 상기 제 2 로터리 다이의 각각은 각각의 축을 중심으로 회전 가능함 - 와,
상기 제 1 로터리 다이와 상기 제 2 로터리 다이를 회전시키는 단계와,
상기 제 1 로터리 다이와 상기 제 2 로터리 다이가 회전하는 동안 상기 제 1 로터리 다이와 상기 제 2 로터리 다이 사이에 재료를 공급하여 상기 암 다이 및 상기 수 다이 사이에서 상기 재료를 압축시키는 단계를 포함하는
방법.
- 제 1 항에 있어서,
상기 제 1 로터리 다이 및 상기 제 2 로터리 다이는 스퍼 기어(spur gear)에 부착되는
방법.
- 제 1 항에 있어서,
상기 제 1 로터리 다이와 상기 제 2 로터리 다이를 회전시키는 단계는 상기 제 1 로터리 다이와 상기 제 2 로터리 다이를 실질적으로 일정한 각속도로 회전시키는 단계를 포함하는
방법.
- 제 1 항에 있어서,
제 1 로터리 다이의 투스 패턴은 제 1 커팅면을 더 제공하고 상기 제 2 로터리 다이의 투스 패턴은 제 2 커팅면을 더 제공하고, 상기 제 1 커팅면과 상기 제 2 커팅면은 상기 재료가 상기 암 다이 및 상기 수 다이 사이에서 압축된 후에 상기 재료를 커팅하도록 협력하는
방법.
- 제 1 항 내지 제 4 항 중 어느 한 항에 있어서,
제 1 로터리 다이와 제 2 로터리 다이를 제공하는 단계 후에, 상기 재료의 두께를 수용하기 위해 상기 제 1 로터리 다이와 상기 제 2 로터리 다이의 축들 사이의 거리를 조정하는 단계를 더 포함하는
방법.
- 제 1 항 내지 제 4 항 중 어느 한 항에 있어서,
상기 재료는 실질적으로 원형의 단면 프로파일 또는 실질적으로 편평한 단면 프로파일을 가지는 와이어인
방법.
- 제 1 항 내지 제 4 항 중 어느 한 항에 있어서,
상기 수 다이 및 상기 암 다이는 상기 재료에 아치 형상을 형성하도록 협력하는
방법.
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US13/684,149 US20140139247A1 (en) | 2012-11-21 | 2012-11-21 | Interposer apparatus and methods |
US13/684,149 | 2012-11-21 |
Related Parent Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
KR1020130141717A Division KR20140066109A (ko) | 2012-11-21 | 2013-11-20 | 인터포저 장치 및 방법 |
Related Child Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
KR1020150087710A Division KR20150081416A (ko) | 2012-11-21 | 2015-06-19 | 인터포저 장치 및 방법 |
Publications (2)
Publication Number | Publication Date |
---|---|
KR20150029665A KR20150029665A (ko) | 2015-03-18 |
KR101562543B1 true KR101562543B1 (ko) | 2015-10-23 |
Family
ID=50727366
Family Applications (3)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
KR1020130141717A Ceased KR20140066109A (ko) | 2012-11-21 | 2013-11-20 | 인터포저 장치 및 방법 |
KR1020150027218A Active KR101562543B1 (ko) | 2012-11-21 | 2015-02-26 | 인터포저 장치 및 방법 |
KR1020150087710A Withdrawn KR20150081416A (ko) | 2012-11-21 | 2015-06-19 | 인터포저 장치 및 방법 |
Family Applications Before (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
KR1020130141717A Ceased KR20140066109A (ko) | 2012-11-21 | 2013-11-20 | 인터포저 장치 및 방법 |
Family Applications After (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
KR1020150087710A Withdrawn KR20150081416A (ko) | 2012-11-21 | 2015-06-19 | 인터포저 장치 및 방법 |
Country Status (3)
Country | Link |
---|---|
US (1) | US20140139247A1 (ko) |
KR (3) | KR20140066109A (ko) |
CN (1) | CN103839856B (ko) |
Families Citing this family (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
KR101951284B1 (ko) * | 2017-07-04 | 2019-02-22 | 주식회사 이노글로벌 | 초정밀 가공기술을 활용한 검사용 인터포저 지지 프레임의 제조방법 |
KR102191903B1 (ko) * | 2019-12-04 | 2020-12-16 | 주식회사 파워로직스 | 지그 모듈 및 이를 이용한 테스트 방법 |
Family Cites Families (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH1026646A (ja) * | 1996-07-12 | 1998-01-27 | Toyo Denshi Giken Kk | コンタクト装置 |
US6661244B2 (en) * | 2000-03-06 | 2003-12-09 | Wentworth Laboratories, Inc. | Nickel alloy probe card frame laminate |
JP3486841B2 (ja) * | 2000-08-09 | 2004-01-13 | 日本電子材料株式会社 | 垂直型プローブカード |
US7254889B1 (en) * | 2000-09-08 | 2007-08-14 | Gabe Cherian | Interconnection devices |
EP1650837A4 (en) * | 2003-07-29 | 2007-12-26 | Advantest Corp | BASE AND TEST UNIT |
US20120064738A1 (en) * | 2008-10-03 | 2012-03-15 | Shelsky Robert C | Component Interposer |
-
2012
- 2012-11-21 US US13/684,149 patent/US20140139247A1/en not_active Abandoned
-
2013
- 2013-11-20 CN CN201310590341.4A patent/CN103839856B/zh active Active
- 2013-11-20 KR KR1020130141717A patent/KR20140066109A/ko not_active Ceased
-
2015
- 2015-02-26 KR KR1020150027218A patent/KR101562543B1/ko active Active
- 2015-06-19 KR KR1020150087710A patent/KR20150081416A/ko not_active Withdrawn
Also Published As
Publication number | Publication date |
---|---|
KR20150081416A (ko) | 2015-07-14 |
KR20140066109A (ko) | 2014-05-30 |
CN103839856B (zh) | 2017-06-30 |
US20140139247A1 (en) | 2014-05-22 |
KR20150029665A (ko) | 2015-03-18 |
CN103839856A (zh) | 2014-06-04 |
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