KR101496882B1 - Lithographic apparatus and device manufacturing method - Google Patents

Abstract

The present invention relates to a lithographic apparatus having an optical column capable of producing a pattern on a target portion of a substrate. The optical column is provided with a self-emitting contrast device configured to emit a beam and a projection system configured to project the beam onto the target portion. The apparatus is provided with an actuator for moving the optical column or part of the optical column with respect to the substrate. The projection system further comprises an adjustable member for adjusting the position of at least one lens 930 of the movable optical column or a portion of the optical column or optical column that is movable relative to a portion of the optical column.

Description

BACKGROUND OF THE INVENTION 1. Field of the Invention [0001] The present invention relates to a lithographic apparatus,

The present invention relates to a lithographic apparatus, a programmable patterning device, and a device manufacturing method.

Cross-reference to related application

This application claims priority to U.S. Provisional Application Serial No. 61 / 307,397, filed February 23, 2010, the contents of which are incorporated herein by reference in their entirety. 61 / 364,634, filed July 15, 2010, the contents of which are incorporated herein by reference in their entirety.

A lithographic apparatus is a device that imparts a desired pattern onto a substrate or a portion of a substrate. Lithographic apparatus can be used, for example, in the manufacture of integrated circuits (ICs), flat panel displays and other devices or structures with microstructures. In existing lithographic apparatus, a patterning device, which may be referred to as a mask or a reticle, may be used to generate a corresponding circuit pattern on an individual layer of an IC, flat panel display or other device. Such a pattern may be transferred onto (some of) a substrate (e.g., a silicon wafer or a glass wafer), via imaging onto a layer of radiation sensitive material (resist) provided on the substrate, for example.

Instead of a circuit pattern, such a patterning device may be used to create another pattern, for example a color filter pattern, or a dot matrix. Instead of a conventional mask, the patterning device may include a patterning array that includes an array of individually controllable elements that produce a circuit or other applicable pattern. An advantage of this "maskless" system over conventional mask based systems is that patterns can be provided and / or changed more quickly and at less cost.

Thus, a maskless system includes a programmable patterning device (e.g., a spatial light modulator, a contrast device, etc.). Such a programmable patterning device is programmed (e.g., electronically or optically) to form the desired patterned beam using an array of individually controllable elements. Types of programmable patterning devices include micro mirror arrays, liquid crystal display (LCD) arrays, grating light valve arrays, and the like.

It would be desirable to provide a lithographic apparatus, e.g. a flexible and low cost, which includes a programmable patterning device.

In one embodiment, a lithographic apparatus is disclosed, which includes a modulator configured to expose an exposed region of a substrate to a plurality of beams modulated according to a desired pattern, and a projection system configured to project the modulated beam onto the substrate do. The modulator may be movable relative to the exposure area and / or the projection system may have an array of lenses for receiving a plurality of beams and such an array of lenses may be movable relative to the exposure area.

In one embodiment, the lithographic apparatus may be provided with an optical column, which may, for example, generate a pattern on a target portion of the substrate. The optical column may include a self-emitting contrast device configured to emit a radiation beam, and a projection system configured to project at least a portion of the beam onto the target portion. Such an apparatus may be provided with an actuator for moving the optical column or a portion thereof relative to the substrate. Thus, relative movement between the beam and the substrate can be achieved. A pattern can be generated on the substrate by switching the " on "or" off "

The tolerance of the optical column can cause inaccuracies in the pattern projected onto the substrate. It would be desirable to provide a lithographic apparatus and a method of manufacturing a device, for example, wherein some of these tolerances can be at least partially removed.

According to an embodiment of the present invention, an apparatus is provided and comprises:

An optical column capable of producing a pattern on a target portion of a substrate, the projection system comprising a rotatable frame and a plurality of lenses supported by the rotatable frame, the projection system comprising: a projection system configured to project a beam onto the substrate, An optical column;

An actuator configured to rotate the rotatable frame; And

An adjustable member for adjusting the position of at least one of the lenses with respect to the rotatable frame;

.

According to one embodiment of the present invention, a method of manufacturing a device is provided and comprises:

Generating a pattern on a target portion of a substrate by projecting a radiation beam onto the substrate using a projection system having a rotatable frame and a plurality of lenses supported by the rotatable frame; And

Moving the lens relative to the substrate by rotating the rotatable frame

Wherein the position of at least one of the lenses is adjusted relative to the rotatable frame by an adjustable member.

According to an embodiment of the present invention, an apparatus is provided and comprises:

An array of lenses or individually controllable elements supported by a rotatable frame;

An actuator configured to rotate the rotatable frame; And

An adjustable member for adjusting the position of at least one of the lens and / or the individually controllable element with respect to the rotatable frame;

.

According to one embodiment of the invention, as an adjustable member,

For adjusting the position of at least one lens of the plurality of lenses or an individually controllable element of the array of individually controllable elements with respect to a rotatable frame supporting an array of lenses or individually controllable elements, An adjustable member is provided.

According to an embodiment of the present invention, an apparatus is provided and comprises:

An optical column capable of producing a pattern on a target portion of a substrate, comprising: a plurality of individually controllable elements configured to emit a beam, the plurality of individually controllable elements being optically column;

An actuator configured to move the movable frame; And

An adjustable member for adjusting the position of at least one of the individually controllable elements with respect to the movable frame;

.

BRIEF DESCRIPTION OF THE DRAWINGS The accompanying drawings, which are incorporated in and constitute a part of this specification, illustrate embodiments of the invention and, together with the description, serve to explain the principles of the invention and to enable a person skilled in the art to make and use the invention . In the drawings, like reference numbers may indicate identical or functionally similar elements.
1 is a schematic side view of a lithographic apparatus according to an embodiment of the present invention.
2 is a schematic plan view of a lithographic apparatus according to an embodiment of the present invention.
3 is a schematic plan view of a lithographic apparatus according to an embodiment of the present invention.
4 is a schematic plan view of a lithographic apparatus according to an embodiment of the present invention.
Figure 5 is a schematic plan view of a lithographic apparatus according to an embodiment of the invention.
6A-6D are schematic plan and side views of a portion of a lithographic apparatus according to an embodiment of the invention.
7A-7O are schematic plan and side views of a portion of a lithographic apparatus according to an embodiment of the invention.
Figure 7P illustrates a graph of power / forward current of an individually addressable element in accordance with an embodiment of the present invention.
Figure 8 is a schematic side view of a lithographic apparatus according to an embodiment of the invention.
9 is a schematic side view of a lithographic apparatus according to an embodiment of the invention.
10 is a schematic side view of a lithographic apparatus according to an embodiment of the present invention.
Figure 11 is a schematic plan view of an array of individually controllable elements for a lithographic apparatus according to an embodiment of the present invention.
12 shows a mode of transferring a pattern onto a substrate using an embodiment of the present invention.
Figure 13 shows a schematic arrangement of the optical engine.
14A and 14B are schematic side views of a portion of a lithographic apparatus according to an embodiment of the present invention.
15 is a schematic plan view of a lithographic apparatus according to an embodiment of the present invention.
16A is a schematic side view of a portion of a lithographic apparatus according to an embodiment of the present invention.
16B shows the schematic position of the detection area of the sensor with respect to the substrate.
17 is a schematic plan view of a lithographic apparatus according to an embodiment of the present invention.
18 is a schematic cross-sectional side view of a lithographic apparatus according to an embodiment of the present invention.
Figure 19 is a schematic plan layout of a portion of a lithographic apparatus having an individually controllable element and a movable optical element relative thereto that are substantially fixed in an XY plane, in accordance with an embodiment of the present invention.
Figure 20 is a schematic three-dimensional view of a portion of the lithographic apparatus of Figure 19;
Figure 21 is a schematic side view of a portion of a lithographic apparatus having an individually controllable element and an optical element movable therewith substantially fixed in the XY plane, according to an embodiment of the present invention, wherein the individually controllable element Lt; RTI ID = 0.0 > 242 < / RTI >
Figure 22 is a schematic side view of a portion of a lithographic apparatus having an individually controllable element and an optical element moveable therewith substantially fixed in the XY plane, according to an embodiment of the present invention, wherein the individually controllable element Lt; RTI ID = 0.0 > 242 < / RTI >
Figure 23 is a schematic side view of a portion of a lithographic apparatus having an individually controllable element and an optical element moveable therewith substantially fixed in the XY plane, according to an embodiment of the present invention, wherein the individually controllable element Lt; RTI ID = 0.0 > 242 < / RTI >
Figure 24 shows a schematic layout of some of the individually controllable elements 102 when standard laser diodes having a diameter of 5.6 mm are used to obtain full coverage over the width of the substrate.
Figure 25 shows a schematic layout for the details of Figure 24;
Figure 26 is a schematic side view layout of some of the lithographic apparatus having individually controllable elements and movable optical elements that are substantially fixed in the XY plane, in accordance with one embodiment of the present invention.
Figure 27 is a schematic side view layout of some of the lithographic apparatus having individually controllable elements and moving optical elements that are substantially fixed in the XY plane, in accordance with one embodiment of the present invention.
Figure 28 is a schematic side view of a portion of a lithographic apparatus having an individually controllable element and an optical element moveable therewith substantially fixed in the XY plane, according to an embodiment of the present invention, wherein the individually controllable element Lt; RTI ID = 0.0 > 242 < / RTI >
29 is a schematic three-dimensional view of a portion of the lithographic apparatus of FIG.
Figure 30 schematically shows a configuration in which eight lines are simultaneously recorded by one movable optical element 242 set of Figures 28 and 29;
FIG. 31 shows a schematic configuration for controlling focus using a moving rooftop in the configurations of FIGS. 28 and 29; FIG.
32 is a schematic cross-sectional side view layout of a portion of a lithographic apparatus having an individually controllable element and a movable optical element relative thereto, which is substantially fixed in an XY plane, in accordance with an embodiment of the present invention.
33 illustrates a portion of a lithographic apparatus according to an embodiment of the present invention.
Figure 34 is a top view of a portion of the lithographic apparatus of Figure 33 in accordance with an embodiment of the present invention.
Figure 35 is a very schematic perspective view of the details of the lithographic apparatus according to Figure 33 in accordance with an embodiment of the present invention.
36 is a partially transparent, schematic perspective view of the details of the lithographic apparatus shown in FIG. 35, in accordance with an embodiment of the present invention.
Figure 37 is a highly schematic perspective view of a further embodiment of some of the elements shown in Figure 35 in accordance with an embodiment of the present invention.
Figure 38 is a very schematic side view of a portion of an apparatus in accordance with an embodiment of the present invention.
Figure 39 is a very schematic side view of a portion of an apparatus in accordance with an embodiment of the present invention.

One or more embodiments of a maskless lithographic apparatus, a maskless lithographic method, a programmable patterning device, and other apparatus, articles, and methods are described herein. In one embodiment, a low cost and / or flexible maskless lithographic apparatus is provided. Since it is a maskless type, no conventional mask is required to expose, for example, an IC or flat panel display. Similarly, no more than one ring is required for a packaging application; The programmable patterning device may provide a digital edge processing "ring" for the packaging application to avoid edge projection. The maskless type (digital patterning) can be used with a flexible substrate.

In one embodiment, the lithographic apparatus is capable of super-non-critical applications. In one embodiment, the lithographic apparatus is capable of a resolution of 0.1 탆 or more, for example, a resolution of 0.5 탆 or more, or a resolution of 1 탆 or more. In one embodiment, the lithographic apparatus is capable of a resolution of 20 microns or less, for example, a resolution of 10 microns or less, or a resolution of 5 microns or less. In one embodiment, the lithographic apparatus is capable of 0.1 to 10 μm resolution. In one embodiment, the lithographic apparatus is capable of an overlay of 50 nm or more, for example, an overlay of 100 nm or more, an overlay of 200 nm or more, or an overlay of 300 nm or more. In one embodiment, the lithographic apparatus is capable of an overlay of 500 nm or less, for example, an overlay of 400 nm or less, or an overlay of 300 nm or less, or an overlay of 200 nm or less. Such overlay and resolution values may be independent of substrate size and material.

In one embodiment, the lithographic apparatus is highly flexible. In one embodiment, the lithographic apparatus are scalable for substrates having different sizes, types, and characteristics. In one embodiment, the lithographic apparatus has a substantially unlimited field size. Thus, a lithographic apparatus may enable a number of applications (e.g., IC, flat panel display, packaging, etc.) using a single lithographic apparatus or multiple lithographic apparatuses, generally using a common lithographic apparatus platform. In one embodiment, the lithographic apparatus permits automated job creation to provide flexible manufacturing. In one embodiment, the lithographic apparatus provides 3D integration.

In one embodiment, the lithographic apparatus is low cost. In one embodiment, only normal off-the-shelf components are used. In one embodiment, pixel-grid imaging is used to enable simple projection optics. In one embodiment, a substrate holder having a single scan direction is used to reduce cost and / or complexity.

Figure 1 schematically depicts a lithographic projection apparatus 100 according to one embodiment of the present invention. The apparatus 100 includes a patterning device 104, an object holder 106 (e.g., an object table, e.g., a substrate table), and a projection system 108.

In one embodiment, the patterning device 104 includes a plurality of individually controllable elements 102 that modulate radiation to add a pattern to the beam 110. In one embodiment, the position of the plurality of individually controllable elements 102 may be fixed relative to the projection system 108. However, in an alternative configuration, the plurality of individually controllable elements 102 may be configured to accurately position one or more of the plurality of individually controllable elements (e.g., relative to the projection system 108) (Not shown).

In one embodiment, the patterning device 104 is a self-emitting contrast device. This patterning device 104 precludes the need for a radiation system, which can, for example, reduce the cost and size of the lithographic apparatus. For example, each individually controllable element 102 may be a radiation emitting diode, such as a light emitting diode (LED), an organic LED (OLED), a polymer LED (PLED), or a laser diode to be. In one embodiment, each individually controllable element 102 is a laser diode. In one embodiment, each individually controllable element 102 is a blue violet laser diode (e.g., Sanyo Model No. DL-3146-151). These diodes are supplied by companies such as Sanyo, Nichia, Osram, and Nitride. In one embodiment, the diode emits radiation having a wavelength of about 365 nm or about 405 nm. In one embodiment, the diode may provide a selected output power in the 0.5 to 100 mW range. In one embodiment, the size of the laser diode (naked die) is selected in the range of 250 to 600 micrometers. In one embodiment, the laser diode has a selected emission area in the range of 1 to 5 square micrometers. In one embodiment, the laser diode has a selected divergence angle in the range of 7 to 44 degrees. In one embodiment, the patterning device 104 is configured to provide a brightness of about 1 (e.g., about 1 x 10 < ⁸ > W / × 10 ⁵ diodes.

In one embodiment, the self-emitting contrast device is one that is necessary to allow an "extra" individually controllable element 102 to be used if the other individually controllable element 102 fails or does not operate properly More < / RTI > individually controllable elements 102. In one embodiment, redundant individually controllable elements can be advantageously utilized in embodiments that utilize moveable, individually controllable elements 102, for example, as discussed below with respect to FIG.

In one embodiment, the individually controllable element 102 of the self-emitting contrast device operates in a steep portion of the power / forward current curve of the individually controllable element 102 (e.g., a laser diode). This may be more efficient and may result in less power dissipation / heat. In one embodiment, in use, the optical output per individually controllable element is at least 1 mW, such as at least 10 mW, at least 25 mW, at least 50 mW, at least 100 mW, or at least 200 mW. In one embodiment, in use, the optical output per individually controllable element is less than 300 mW, less than 250 mW, less than 200 mW, less than 150 mW, less than 100 mW, less than 50 mW, less than 25 mW, or less than 10 mW. In one embodiment, in use, the power consumption per programmable patterning device is less than 10 kW, for example less than 5 kW, less than 1 kW, or less than 0.5 kW, in order to operate the individually controllable elements. In one embodiment, in use, the power consumption per programmable patterning device is greater than or equal to 100W, for example greater than or equal to 300W, greater than or equal to 500W, or greater than or equal to 1kW, to operate the individually controllable elements.

The lithographic apparatus 100 includes an objective holder 106. In this embodiment, the object holder comprises an object table 106 for holding a substrate 114 (e.g., a resist-coated silicon wafer or glass substrate). The object table 106 is movable and can be connected to a positioner 116 for accurately positioning the substrate 114 according to certain parameters. For example, the positioner 116 may accurately position the substrate 114 relative to the projection system 108 and / or the patterning device 104. In one embodiment, movement of the object table 106 may be accomplished by using a long-stroke module (not shown) and optionally a short-stroke module module, micro-positioning). In one embodiment, such a device does not have at least one short-stroke module for moving the object table 106. A similar system can be used to locate the individually controllable element 102. Alternatively or additionally, the beam 110 may be movable, but the object table 106 and / or the individually controllable element 102 may have a fixed position to provide the necessary relative movement It should be recognized. This configuration can help limit the size of the device. For example, in one embodiment applicable to the manufacture of flat panel displays, the object table 106 may be stationary and the positioner 116 may be movable relative to the substrate table 114 (e.g., above) with respect to the object table 106 . For example, the object table 106 may be provided with a system for scanning the substrate 114 at a substantially constant rate. If this is done, the object table 106 can be provided with a plurality of openings on a flat top surface and gas can be supplied through these openings to provide a gas cushion that can support the substrate 114. This is commonly referred to as a gas bearing configuration. The substrate 114 is moved over the object table 106 using one or more actuators (not shown) that can accurately position the substrate 114 relative to the path of the beam 110. Alternatively, the substrate 114 may be moved relative to the object table 106 by selectively starting and stopping the passage of gas through the opening. In one embodiment, the object holder 106 may be a roll system on which the substrate rolls and the positioner 116 may be a motor for rotating such roll system to provide a substrate on the object table 106 .

To project the patterned beam modulated by the individually controllable element 102 onto a target portion 120 (e.g., one or more dies) of the substrate 114, a projection system 108 (e.g., , A refraction and / or a refraction system including a CaF ₂ lens system or a lens element made of such material, or a mirror system) can be used. The projection system 108 may project an image of a pattern provided by a plurality of individually controllable elements 102 so that the pattern is coherently formed on the substrate 114. Alternatively, the projection system 108 may project an image of a secondary source, in which elements of the plurality of individually controllable elements 102 act as shutters.

In this regard, the projection system may include, for example, a focusing element, or a plurality of focusing elements (generally referred to herein as a lens array), for example to form a secondary source and to image a spot on a substrate 114, Array (also known as MLA) or a Fresnel lens array. In one embodiment, the lens array (e.g., MLA) includes at least 10 focusing elements, such as at least 100 focusing elements, at least 1,000 focusing elements, at least 10,000 focusing elements, at least 100,000 focusing elements, Includes 1,000,000 focusing elements. In one embodiment, the number of individually controllable elements in the patterning device is greater than or equal to the number of focusing elements in the lens array. In one embodiment, the lens array comprises one or more individually controllable elements in the array of individually controllable elements, for example, only one individually controllable element in the array of individually controllable elements, or an individually controllable element Such as at least three, at least five, at least ten, at least twenty, at least twenty-five, at least thirty-five, or at least fifteen individually controllable elements in an array of at least two individually controllable elements A focusing element; In one embodiment, such a focusing element is optically associated with less than 5,000 individually controllable elements, for example less than 2,500, less than 1,000, less than 500, or less than 100 individually controllable elements. In one embodiment, the lens array includes two or more focusing elements (e.g., more than 1,000, most, or almost all) optically associated with one or more individually controllable elements in an array of individually controllable elements .

In one embodiment, the lens array is movable at least toward and away from the substrate using, for example, one or more actuators. If the lens array can be moved toward and away from the substrate, for example, focus adjustment is possible without moving the substrate. In one embodiment, each individual lens element of the lens array, e.g., each individual lens element of the lens array, is movable at least toward and away from the substrate (e.g., on a non-planar substrate, Or to have each optical column at the same focal distance).

In one embodiment, the lens array includes a plastic focusing element (which may be easy to manufacture and / or afford injection molding for example), wherein the wavelength of the radiation is, for example, greater than or equal to about 400 nm , 405 nm). In one embodiment, the wavelength of the radiation is selected in the range of about 400 nm to 500 nm. In one embodiment, the lens array includes a correction focusing element. In one embodiment, each focusing element or plurality of focusing elements may be an asymmetric lens. This asymmetry may be the same for each of the plurality of focusing elements, or may differ from one or more of the plurality of focusing elements for one or more of the plurality of focusing elements. The asymmetric lens may facilitate converting the elliptical radiation output to a circular projected spot or vice versa.

In one embodiment, the focusing element has a high numerical aperture (NA) configured to project radiation from the focus onto the substrate to obtain a low numerical aperture (NA) for the system. A higher NA lens may be more economical, more general, and / or better quality than a lower NA lens available. In one embodiment, the low NA is less than or equal to 0.3, and in other embodiments is less than or equal to 0.18 and less than or equal to 0.15. Thus, a higher NA lens has an NA greater than the design NA for the system, e.g., greater than 0.3, greater than 0.18, or greater than 0.15.

In one embodiment, the projection system 108 is separate from the patterning device 104, but need not be. The projection system 108 may be integrated with the patterning device 104. For example, the lens array block or plate may be attached to patterning device 104 (integrated therewith). In one embodiment, the lens array may be in the form of individually spaced-apart lenslets, each of which may be attached to an individually addressable element of the patterning device 104 as described in more detail below Integration).

Alternatively, the lithographic apparatus may comprise a radiation system for supplying radiation (e.g., ultraviolet (UV) radiation) to a plurality of individually controllable elements 102. If the patterning device is itself a radiation source, for example a laser diode array or an LED array, the lithographic apparatus may be designed without a radiation system, i.e. without a radiation source other than the patterning device, or at least a simplified radiation system.

The radiation system includes an illumination system (illuminator) configured to receive radiation from a radiation source. The illumination system includes one or more of the following elements: a radiation delivery system (e.g., a suitable directing mirror), a radiation conditioner (e.g., a beam expander), an angular intensity distribution of radiation, (Typically, at least the outer radius and / or the inner radius range of the intensity distribution in the pupil plane of the illuminator (typically referred to as outer-sigma and inner-sigma, respectively) may be adjusted) An integrator, and / or a condenser. The illumination system can be used to adjust the radiation to be provided to the individually controllable element 102 so as to have the uniformity and intensity distribution required in the cross section of the emission. The illumination system may be configured to split the radiation into a plurality of sub-beams, each of which may be associated with, for example, one or more of a plurality of individually controllable elements. A two-dimensional diffraction grating may be used, for example, to split the radiation into sub-beams. In this specification, the terms "beam of radiation" and "radiation beam" encompass but are not limited to situations in which the beam is comprised of a plurality of such radiation sub-beams.

The radiation system may also include a radiation source (e.g., an excimer laser) that generates radiation for supply to a plurality of individually controllable elements 102 or for supply by a plurality of individually controllable elements 102 have. For example, if the radiation source is an excimer laser, the radiation source and lithographic apparatus 100 may be separate components. In this case, the radiation source is not considered to form part of the lithographic apparatus 100, and radiation is transferred from the radiation source to the illuminator. In other cases, for example, where the radiation source is a mercury lamp, such a radiation source may be a component integrated into the lithographic apparatus 100. It should be understood that both scenarios are contemplated within the scope of the present invention.

In one embodiment, the radiation source, which in one embodiment may be a plurality of individually controllable elements 102, in one embodiment is at least 5 nm, such as at least 10 nm, at least 50 nm, at least 100 nm, at least 150 nm, at least 175 nm Or more, a wavelength of 200 nm or more, 250 nm or more, 275 nm or more, 300 nm or more, 325 nm or more, 350 nm or more, or 360 nm or more. In one embodiment, the radiation has a wavelength of 450 nm or less, such as 450 nm or less, 425 nm or less, 375 nm or less, 360 nm or less, 325 nm or less, 275 nm or less, 250 nm or less, 225 nm or less, nm or less. In one embodiment, the radiation has a wavelength comprised of 436 nm, 405 nm, 365 nm, 355 nm, 248 nm, 193 nm, 157 nm, 126 nm, and / or 13.5 nm. In one embodiment, the radiation comprises a wavelength of about 365 nm or about 355 nm. In one embodiment, the radiation comprises a broad band of wavelengths, including for example 365 nm, 405 nm and 436 nm. A 355 nm laser source may be used. In one embodiment, the radiation has a wavelength of about 405 nm.

In one embodiment, the radiation is directed from the illumination system to the patterning device 104 at an angle of 0 to 90 degrees, such as 5 to 85 degrees, 15 to 75 degrees, 25 to 65 degrees, or 35 to 55 degrees . The radiation from the illumination system may be provided directly to the patterning device 104. In an alternative embodiment, the radiation may be directed from the illumination system to the patterning device 104 using a beam splitter (not shown), such that the radiation is initially reflected by the beam splitter, . The patterning device 104 modulates the beam and reflects it back to the beam splitter, which transmits the modulated beam toward the substrate 114. However, it should be appreciated that alternative configurations may be used to direct radiation to the patterning device 104 and subsequently to the substrate 114. In particular, if the transmissive patterning device 104 (e.g., an LCD array) is used or the patterning device 104 is a self-emissive type (e.g., a plurality of diodes), then the fixture system configuration may not be required.

In operation of the lithographic apparatus 100, radiation may be emitted from a radiation system (e.g., an illumination system and / or a radiation source) to the patterning device 104 (e.g., For example, a plurality of individually controllable elements) and modulated by the patterning device 104. [ The patterned beam 11 is generated by a plurality of individually controllable elements 102 and then passes through the projection system 108 and the projection system 108 directs the beam 112 onto the target portion 120 of the substrate 114 (Not shown).

Using positioner 116 (and optionally interferometric measuring device, linear encoder or capacitive sensor) that receives position sensor 134 (e.g., interferometer beam 138 on base 136) The substrate 114 may be moved accurately to position a different target portion 120 in the path of the beam 110, for example. When used, a positioner for a plurality of individually controllable elements 102 may be utilized to accurately position the plurality of individually controllable elements 102 relative to the path of the beam 110, for example during a scan Can be modified.

While the lithographic apparatus 100 according to an embodiment of the present invention is described herein for exposing a resist on a substrate, the lithographic apparatus 100 may be used to project a patterned beam 110 for use in resist- It will be appreciated.

As depicted herein, lithographic apparatus 100 is reflective (e.g. employing reflective, individually controllable elements). Alternatively, the lithographic apparatus may be of a transmissive type (e.g. employing a transmissive, individually controllable element).

The depicted apparatus 100 may be used in one or more of the following modes, for example:

1. In the step mode, the entire patterned radiation beam 110 is projected onto the target portion 120 at one time while keeping the individually controllable element 102 and the substrate 114 essentially stationary A single stop exposure). The substrate 114 is then moved in the X and / or Y directions so that a different target portion 120 can be exposed to the patterned radiation beam 110. In step mode, the maximum size of the exposure field limits the size of the target portion 120 imaged in a single stop exposure.

2. In the scan mode, the patterned radiation beam 110 is projected onto the target portion 120 (i.e., a single dynamic exposure) while synchronously scanning the individually controllable element 102 and the substrate 114. [ . The speed and direction of the substrate with respect to the individually controllable elements can be determined by the magnification (reduction factor) and image reversal characteristics of the projection system PS. In scan mode, the maximum size of the exposure field limits the width (non-scanning direction) of the target portion in a single dynamic exposure while the length of the scanning movement limits the height of the target portion (the scanning direction).

3. In the pulsed mode, the individually controllable element 102 is kept essentially stationary, and a pulse (e. G., Provided by a pulsed radiation source or pulsing an individually controllable element) The pattern is projected onto the target portion 120 of the substrate 114. The substrate 114 is moved at a substantially constant rate to cause the patterned beam 110 to scan the line through the substrate 114. [ The pattern provided by the individually controllable element is updated as needed between the pulses and the timing of the pulses is set such that successive target portions 120 are exposed at desired locations on the substrate 114. [ As a result, the patterned beam 110 can be scanned through the substrate 114 to expose a complete pattern for the strip of the substrate 114. This process is repeated until the complete substrate 114 is exposed line by line.

4. In the continuous scan mode, the substrate 114 is scanned at a substantially constant speed relative to the modulated radiation beam 110, and the patterned beam 110 is scanned individually through the substrate 114 Is essentially the same as pulse mode except that the pattern on the array of controllable elements is updated. A substantially constant radiation source or pulse radiation source synchronized with the updating of the pattern on the array of individually controllable elements may be used.

Combinations and / or variations on the above described modes of use, or entirely different modes of use, may also be employed.

2 is a schematic plan view of a lithographic apparatus according to an embodiment of the present invention for use with a wafer (e.g., a 300 mm wafer). As shown in FIG. 2, the lithographic apparatus 100 includes a substrate table 106 for holding a wafer 114. A positioner 116 for moving the substrate table 106 at least in the X direction is associated with the substrate table 106. Alternatively, the positioner 116 may move the substrate table 106 in the Y and / or Z directions. Positioner 116 may also rotate substrate table 106 about X, Y, and / or Z directions. Thus, the positioner 116 may provide movement of less than six degrees of freedom. In one embodiment, the substrate table 106 provides movement only in the X direction, which has the advantage of cost savings and less complexity. In one embodiment, the substrate table 106 includes a relay optics.

The lithographic apparatus 100 further includes a plurality of individually addressable elements 102 arranged on the frame 160. The frame 160 may be mechanically isolated from the substrate table 106 and the positioner 116. Mechanical isolation may be provided, for example, by connecting the frame 160 to a ground or rigid base separate from the frame for the substrate table 106 and / or the positioner 116. Additionally or alternatively, between the structure in which the frame 160 and the frame 160 are connected, such a structure may be used to support the ground, the rigid base or the substrate table 106 and / or the positioner 116 Regardless of the frame, a damper can be provided.

In this embodiment, each individually addressable element 102 is a radiation emitting diode, for example a violet laser diode. As shown in FIG. 2, the individually addressable elements 102 may be arranged in at least three distinct arrays of individually addressable elements 102 extending along the Y direction. In one embodiment, the arrays of individually addressable elements 102 are staggered in the X direction from adjacent arrays of individually addressable elements 102. The lithographic apparatus 100, particularly the individually addressable element 102, can be configured to provide pixel-grid imaging as described in more detail herein.

Each array of individually addressable elements 102 may be part of a separate optical engine component that may be manufactured as a unit for easy reproduction. Further, the frame 160 can be configured to be expandable and configurable to easily employ any number of such optical engine components. The optical engine component may include an array of individually addressable elements 102 and a combination of lens arrays 170 (see, e.g., FIG. 8). For example, in FIG. 2 there are shown three optical engine components (the associated lens being underneath each individual array of individually addressable elements 102). Thus, in one embodiment, multiple optical column configurations may be provided and each optical engine forms a column.

In addition, the lithographic apparatus 100 includes an alignment sensor 150. The alignment sensor is used to determine the alignment between the individually addressable element 102 and the substrate 114 prior to exposure of the substrate 114 and / or during exposure. The results of the alignment sensor 150 may be used by the controller of the lithographic apparatus 100 to position the substrate table 106 to improve alignment by controlling the positioner 116. Additionally or alternatively, the controller may position one or more of the individually addressable elements 102 to improve alignment, for example by controlling a positioner associated with the individually addressable element 102. [ In one embodiment, the alignment sensor 150 may include pattern recognition functionality / software to perform alignment.

Additionally or alternatively, the lithographic apparatus 100 includes a level sensor 150. The level sensor 150 is used to determine whether the substrate 114 is level with respect to the projection of the pattern from the individually addressable element 102. The level sensor 150 may determine the level prior to and / or during exposure of the substrate 114. The result of the level sensor 150 may be used by the controller of the lithographic apparatus 100 to position the substrate table 106 to improve leveling, for example, by controlling the positioner 116. Additionally or alternatively, the controller may control a positioner associated with, for example, the projection system 108 (e.g., a lens array) to control leveling of the elements of the projection system 108 Array). In one embodiment, the level sensor may operate by projecting an ultrasonic beam onto substrate 114 and / or by projecting an electromagnetic radiation beam onto substrate 114.

In one embodiment, the results from the alignment sensor and / or the level sensor can be used to alter the pattern provided by the individually addressable element 102. [ The pattern may include, for example, distortion resulting from the optical instrument (if present) between the individually addressable element 102 and the substrate 114, unevenness in positioning the substrate 114, (unevenness), and the like. Thus, the results from the alignment sensor and / or the level sensor can be used to modify the projected pattern to effect nonlinear distortion correction. Nonlinear distortion correction may be useful for soft displays, for example, which may not have consistent linear or nonlinear distortion.

In operation of the lithographic apparatus 100, the substrate 114 is loaded onto the substrate table 106 using, for example, a robot handler (not shown). Substrate 114 is then displaced in the X direction under frame 160 and individually addressable element 102. The substrate 114 is exposed to the pattern using the individually addressable element 102 after being measured by the level sensor and / or the alignment sensor 150. For example, while the substrate 114 is being scanned through the focal plane (image plane) of the projection system 108, the sub-beam and thus the image spot S (see, e.g., Figure 12) 104 at least partially or ON or OFF as a whole. A feature corresponding to the pattern of the patterning device 104 is formed on the substrate 114. The individually addressable element 102 may, for example, be operable to provide pixel-grid imaging as described herein.

In one embodiment, the substrate 114 may be fully scanned in the positive X direction and then completely in the negative X direction. In this embodiment, an additional level sensor and / or alignment sensor 150 on the opposite side of the individually addressable element 102 may be needed for negative X-directional scanning.

3 is a schematic plan view of a lithographic apparatus for exposing a substrate in the manufacture of, for example, a flat panel display (e.g., LCD, OLED display, etc.), in accordance with an embodiment of the present invention. Similar to the lithographic apparatus 100 shown in Figure 2, the lithographic apparatus 100 includes a substrate table 106 for holding a flat panel display substrate 114, a substrate table 106 for holding a substrate table 106, An alignment sensor 150 for determining the alignment between the individually addressable element 102 and the substrate 114 and an alignment sensor 150 for determining the alignment of the pattern 114 from the individually addressable element 102 And a level sensor 150 for determining whether it is horizontal with respect to the projection.

The lithographic apparatus 100 further includes a plurality of individually addressable elements 102 arranged on the frame 160. In this embodiment, each of the individually addressable elements 102 is a radiation emitting diode, for example a violet laser diode. As shown in FIG. 3, individually addressable elements 102 are arranged in a plurality (e.g., eight or more) of fixed discrete arrays of individually addressable elements 102 that extend along the Y direction. In one embodiment, the array is substantially stationary, i.e. does not substantially move during projection. Also, in one embodiment, multiple arrays of individually addressable elements 102 are staggered alternating in the X direction from adjacent arrays of individually addressable elements 102. The lithographic apparatus 100, particularly the individually addressable element 102, can be configured to provide pixel-grid imaging as described in more detail herein.

In operation of the lithographic apparatus 100, the panel display substrate 114 is loaded onto the substrate table 106 using, for example, a robot handler (not shown). Substrate 114 is then displaced in the X direction under frame 160 and individually addressable element 102. The substrate 114 is exposed to the pattern using the individually addressable element 102 after being measured by the level sensor and / or the alignment sensor 150. The individually addressable element 102 may, for example, be operable to provide pixel-grid imaging as described herein.

Figure 4 is a schematic plan view of a lithographic apparatus for use with a roll-to-roll soft display / electronic apparatus, in accordance with an embodiment of the present invention. Similar to the lithographic apparatus 100 shown in FIG. 3, the lithographic apparatus 100 includes a plurality of individually addressable elements 102 arranged on a frame 160. In this embodiment, each of the individually addressable elements 102 is a radiation emitting diode, for example a violet laser diode. The lithographic apparatus also includes an alignment sensor 150 for determining the alignment between the individually addressable element 102 and the substrate 114 and an alignment sensor 150 for determining the alignment of the pattern from the individually addressable element 102 And a level sensor 150 for determining whether it is horizontal or not.

The lithographic apparatus may also include an object holder having an object table 106 on which the substrate 114 is moved. The substrate 114 is flexible and is rolled onto a roll that is connected to the positioner 116, which may be a motor that rotates the roll. Additionally or alternatively, in one embodiment, the substrate 114 may be rolled from a roll connected to the positioner 116, which may be a motor that rotates the roll. In one embodiment, at least two rolls are provided, from which the substrate is rolled and the substrate is rolled onto the other roll. In one embodiment, the object table 106 need not be provided if, for example, the substrate 114 has sufficient stiffness between the rolls. In this case, the object holder, for example one or more rolls, may still be provided. In one embodiment, the lithographic apparatus may provide substrate carrier-less (e.g., carrier-less-foil (CLF)) and / or roll-to-roll manufacturing. In one embodiment, the lithographic apparatus may provide for sheet-to-sheet manufacture.

In operation of the lithographic apparatus 100, the flexible substrate 114 is rolled in the X direction, rollwise and / or from a roll under the frame 160 and the individually addressable element 102. The substrate 114 is exposed to the pattern using the individually addressable element 102 after being measured by the level sensor and / or the alignment sensor 150. The individually addressable element 102 may, for example, be operable to provide pixel-grid imaging as described herein.

5 is a schematic plan view of a lithographic apparatus having a moveable individually addressable element 102, in accordance with an embodiment of the present invention. Similar to the lithographic apparatus 100 shown in Figure 2, the lithographic apparatus 100 includes a substrate table 106 for holding a substrate 114, a positioning system for moving the substrate table 106 to a degree of freedom of 6 or less, An alignment sensor 150 for determining alignment between the individually addressable element 102 and the substrate 114 and an alignment sensor 150 for determining alignment between the substrate 114 and the individually addressable element 102 And a level sensor 150 for determining whether it is horizontal or not.

The lithographic apparatus 100 further includes a plurality of individually addressable elements 102 arranged on the frame 160. In this embodiment, each of the individually addressable elements 102 is a radiation emitting diode, for example a laser diode, for example a violet laser diode. As shown in FIG. 5, the individually addressable elements 102 are arranged in a plurality of discrete arrays of individually addressable elements 102 extending along the Y direction. Also, in one embodiment, multiple arrays 200 of individually addressable elements 102 are staggered alternating in the X direction from adjacent arrays of individually addressable elements 102. The lithographic apparatus 100, in particular the individually addressable element 102, can be configured to provide pixel-grid imaging. However, in one embodiment, the lithographic apparatus 100 need not provide pixel-grid imaging. Rather, the lithographic apparatus 100 is configured to project the radiation of a diode onto a substrate in a manner that does not form individual pixels for projection onto the substrate, but rather forms a substantially continuous image for projection onto the substrate .

In one embodiment, at least one of the plurality of individually addressable elements 102 includes an exposure area in which one or more individually addressable elements 102 are used to project all or part of the beam 110, The above-described individually addressable elements 102 are movable between positions outside the exposure area that do not project the beam 110 at all. In one embodiment, the one or more individually addressable elements 102 are configured to turn ON or at least partially turn ON, i.e., emit radiation, in the exposed area 204 (the area of light shade in FIG. 5) And is turned off when it is located outside the exposure area 204, that is, does not emit radiation.

In one embodiment, the one or more individually addressable elements 102 are radiation-emitting devices that can be turned on within the exposure region 204 and outside the exposure region 204. In this situation, the one or more individually addressable elements 102 may be configured to provide a compensating exposure when the radiation in the exposure area 204 is not appropriately projected, e.g., by one or more individually addressable elements 102, And may be turned on outside the exposure area 204. [ For example, referring to FIG. 5, one or more of the individually addressable elements 102 in the array on the opposite side of the exposure region 204 may be turned on to correct for an unsuccessful or inadequate projection of radiation in the exposure region 204 .

In one embodiment, the exposure area 204 is an elongated line. In one embodiment, the exposure region 204 is a one-dimensional array of one or more individually addressable elements 102. In one embodiment, the exposure region 204 is a two-dimensional array of one or more individually addressable elements 102. In one embodiment, the exposure area 204 is diagonal.

In one embodiment, each moveable individually addressable element 102 may be moved separately and need not be moved together into a unit.

In one embodiment, such one or more individually addressable elements are movable and, in use, move in a direction transverse to the propagation direction of the beam 110 at least during projection of the beam 110. For example, in one embodiment, the one or more individually addressable elements 102 are radiation-emitting devices that move in a direction substantially perpendicular to the direction of propagation of the beam 110 during projection of the beam 110.

In one embodiment, each array 200 is a laterally displaceable plate having a plurality of spatially separated individually addressable elements 102 arranged along the plate as shown in FIG. In use, each plate translates along direction 208. In use, movement of the individually addressable element 102 is properly timed to be positioned in the exposure area 204 (shown as a dark shaded area in FIG. 6) to project all or a portion of the beam 110 . For example, in one embodiment, the one or more individually addressable elements 102 are radiation-emitting devices, and the turn-on or turn-off of the individually addressable elements 102 is controlled by one or more individually addressable elements 102 Are turned on when they are in the exposure area 204 and turned off when they are outside the exposure area 204. [ For example, in Figure 6 (a), a plurality of two-dimensional arrays of radiation-emitting diodes 200 translate in a direction 208-the two arrays are arranged in a positive direction 208, The middle array is in the negative direction 208. The turn-on or turn-off of the radiation emitting diode 102 is turned on when the particular radiation emitting diode 102 of each array 200 is in the exposure area 204 and is turned off when it is outside the exposure area 204 , Timing is set. Of course, the array 200 can move in the opposite direction, for example when the array 200 reaches the end of travel, that is, the two arrays can be moved in the negative direction 208, The intermediate array can move in the positive direction 208. [ As a further example, in Figure 6 (b), a plurality of interleaved one-dimensional arrays of radiation emitting diodes 200 translate in a direction 208 - alternating in the positive direction 208 and the negative direction 208 So. The turn-on or turn-off of the radiation emitting diode 102 is turned on when the particular radiation emitting diode 102 of each array 200 is in the exposure area 204 and is turned off when it is outside the exposure area 204 , Timing is set. Of course, the array 200 can move in the opposite direction. As a further example, in Fig. 6 (c), a single array of radiation emitting diodes 200 translates in direction 208 (shown, but not necessarily, in one dimension). The turn-on or turn-off of the radiation emitting diode 102 is turned on when the particular radiation emitting diode 102 of each array 200 is in the exposure area 204 and is turned off when it is outside the exposure area 204 , Timing is set.

In one embodiment, each array 200 is a rotatable plate having a plurality of spatially separated individually addressable elements 102 arranged about the plate. In use, each plate rotates about its axis 206, for example, in the direction shown by the arrow in Fig. In other words, the array 200 can alternately rotate clockwise and counterclockwise as shown in Fig. Alternatively, each array 200 may rotate clockwise or counterclockwise. In one embodiment, the array 200 rotates completely around. In one embodiment, the array 200 rotates by less than full circumference. In one embodiment, for example when the substrate is scanned in the Z direction, the array 200 may rotate about an axis extending in the X or Y direction. 6D, the individually addressable elements 102 of the array 200 can be arranged at the edges and projected radially outwardly toward the substrate 114. In one embodiment, The substrate 114 may extend around at least a portion of one side of the array 200. In this case, the array 200 rotates about an axis extending in the X direction and the substrate 114 moves in the X direction.

In use, the movement of the individually addressable element 102 may be suitably timed to be positioned in the exposure area 204 to project all or a portion of the beam 110. For example, in one embodiment, the one or more individually addressable elements 102 are radiation-emitting devices, and the turn-on or turn-off of the individually addressable elements 102 is controlled by one or more individually addressable elements 102 Are turned on when they are in the exposure area 204 and turned off when they are outside the exposure area 204. [ Thus, in one embodiment, the radiation-emitting device 102 can all remain on during movement, and then a specific one of the radiation-emitting devices 102 is modulated to an off state in the exposure area 204. [ An appropriate shield between the substrate and the radiation-emitting device 102 outside the exposure region 204 and in the presence of the radiation is required to shield the exposure region 204 from the turned-on radiation-emitting device 102 outside the exposure region 204 . By continuously putting the radiation-emitting device 102 in an on-state, it becomes easy to bring the radiation-emitting device 102 to a substantially uniform temperature during use. In one embodiment, the radiation-emitting device 102 can be kept off for most of the time and can be turned on when one or more of the radiation-emitting devices 102 is in the exposure region 204.

In one embodiment, the rotatable plate may have the same configuration as shown in Fig. For example, Figure 7 (a) shows a schematic plan view of a rotatable plate. (Compared to the rotatable plate of FIG. 5, which schematically illustrates a single array 200 of individually addressable elements 102 arranged about the plate) An array 210 may have an array 200 arranged around such a plate. In FIG. 7 (a), the sub-array 210 is configured so that the individually addressable elements 102 of one sub-array 210 are between two individually addressable elements 102 of the other sub- Are shown staggered relative to one another. However, the individually addressable elements 102 of the sub-array 210 may be aligned with each other. By way of the motor 216, the individually addressable elements 102 can be rotated individually or together, via the motor 216, in this example about an axis going in the Z direction in Figure 7 (a). The motor 216 can be attached to a rotatable plate and connected to a frame, for example a frame 160, or to a frame, for example a frame 160, and to a rotatable plate. In one embodiment, the motor 216 (or any motor located elsewhere, for example) may cause different motions of the individually addressable element 102, either individually or together. For example, the motor 216 may cause one or more translational movements of the individually addressable elements 102 in the X, Y, and / or Z directions. Additionally or alternatively, the motor 216 may cause one or more rotations (i.e., R _x and / or R _y motion) of the individually addressable elements 102 about the X and / or Y direction .

In the embodiment of the rotatable plate shown schematically in plan view in Figure 7 (b), the rotatable plate may have an opening 212 in the central region, and the array 200 of individually addressable elements 102 And is arranged on a plate outside the opening 212. [ Thus, for example, the rotatable plate can form an annular disk as shown in Figure 7 (b), and the array 200 of individually addressable elements 102 is arranged around the disk. The openings may reduce / reduce the weight of the rotatable plate or facilitate cooling of the individually addressable elements 102.

In one embodiment, the rotatable plate can be supported at the outer periphery using a support 214. The support 214 may be a bearing, for example a roller bearing or a gas bearing. (And / or other motions, e.g., translational motion in the X, Y, and / or Z directions and / or R _x and / or R _y motions) as shown in Figure 7 (a) Can be provided. Additionally or alternatively, the support 214 may be configured to cause the individually addressable element 102 to rotate about axis A (and / or other motions, e.g., X, Y, and / or Z Direction and / or R _x motion and / or R _y motion).

Referring to Figures 7 (d) and 7 (e), in one embodiment, a rotatable plate having an array 200 of individually addressable elements 102 may be attached to the rotatable structure 218. The rotatable structure 218 can be rotated by the motor 220 about the axis B. [ The rotatable plate can also be rotated by the motor 216 relative to the rotatable structure 218 and the motor 216 causes the rotatable plate to rotate about the axis A. [ In one embodiment, the rotational axes A and B do not coincide with one another and thus such axes are spatially separated as shown in Figures 7 (d) and 7 (e). In one embodiment, the rotational axes A and B are substantially parallel to each other. During use during exposure, both the rotatable structure 218 and the rotatable plate rotate. This rotation can be adjusted so that the individually addressable elements 102 in the exposure area 204 can be aligned substantially in a straight line. This can be compared, for example, to the embodiment of FIG. 5 in which the individually addressable elements 102 in the exposure area 204 may not be aligned in a substantially straight line.

Using the individually addressable elements 102 as described above, the number of individually addressable elements 102 can be reduced by moving the individually addressable elements into the exposure area 204 as needed. Thus, the heat load can be reduced.

In one embodiment, more movable individually addressable elements may be provided (e.g., on a rotatable plate) than are theoretically necessary. A possible advantage of such a configuration is that, in the event that one or more moveable individually addressable elements are not corrupted or otherwise in operation, the other one or more moveable individually addressable elements can be used instead. Additionally or alternatively, the redundant, individually addressable elements may be configured such that as more movable individually addressable elements are provided, the movable individually addressable elements outside the exposure region 204 may be cooled As the likelihood is higher, it may have the advantage of being able to control the heat load on the individually addressable elements.

In one embodiment, the moveable individually addressable elements 102 are embedded in a material having a low thermal conductivity. For example, such materials may be ceramics, such as cordierite or cordierite ceramics and / or Zerodur ceramics. In one embodiment, the moveable individually addressable elements 102 are embedded in a material having a high thermal conductivity, such as a metal, e.g., a metal having a relatively light mass, such as aluminum or titanium.

In one embodiment, the array 200 may include a temperature control configuration. For example, referring to Figure 7 (f), the array 200 may include a fluid (e. G., Liquids) for transporting cooling fluid around the array or through the array 200 on the array 200 to cool the array ) Conduction channel 222, as shown in FIG. The channel 222 may be connected to a suitable heat exchanger and pump 228 for circulating fluid through this channel. A supply portion 224 and a return portion 226 may be connected between the channel 222 and the heat exchanger and the pump 228 to facilitate fluid circulation and temperature control. A sensor 234 may be provided within the array to measure the parameters of the array 200 on or around the array, and such measurements may be performed, for example, by controlling the temperature of the fluid flow provided by the heat exchanger and the pump Can be used. In one embodiment, the sensor 234 can measure the rate of expansion and / or shrinkage of the array 200 body and such measurements can be used to control the temperature of the fluid flow provided by the heat exchanger and pump. This rate of expansion and / or shrinkage is a proxy for temperature. In one embodiment, the sensor 234 may be integrated with the array 200 and / or may be separate from the array 200 (as shown by the sensor 234 in the form of a dot) 234). The individual sensor 234 from the array 200 may be an optical sensor.

In one embodiment, referring to FIG. 7 (g), the array 200 may have one or more fins 230 to increase the surface area for heat dissipation. The pin (s) 230 may be, for example, on the top surface of the array 200 and / or on the side of the array 200. Optionally, one or more additional pins 232 may be provided to cooperate with pin (s) 230 to facilitate heat dissipation. For example, the pin (s) 232 may absorb heat from the pin (s) 230 and may be a fluid (e.g., liquid) conduction channel similar to that shown and described with respect to Figure 7 (f) And an associated heat exchanger / pump.

7 (h), the array 200 includes a fluid confinement structure 236 configured to maintain the fluid 238 in contact with the array 200 body to facilitate heat dissipation through the fluid. In one embodiment, Or may be located around the fluid confinement structure 236. In one embodiment, fluid 238 may be a liquid, such as water. In one embodiment, the fluid confinement structure 236 provides a seal between the fluid confinement structure 236 and the array 200 body. In one embodiment, such sealing may be, for example, a contactless seal provided through a gas flow or capillary force. In one embodiment, the fluid 238 is circulated as described for the fluid conduction channel 222 to promote heat dissipation. Fluid 238 may be supplied by fluid supply device 240.

7 (h), the array 200 may be disposed in or adjacent to the fluid supply device 240 configured to project fluid 238 toward the array 200 body. In one embodiment, Thereby facilitating heat dissipation through the fluid. In one embodiment, the fluid 238 is a gas, such as clean dry air, N ₂ , an inert gas, or the like. The fluid confinement structure 236 and the fluid supply device 240 are shown together in Figure 7 (h), but need not necessarily be provided together.

In one embodiment, the array 200 body is a substantially solid structure having a cavity, for example, a fluid conduction channel 222. In one embodiment, the array 200 body is a substantially frame-like structure that is largely open, and various components, such as individually addressable elements 102, fluid conduction channels 222, etc., are attached thereto . This open structure facilitates gas flow and / or increases surface area. In one embodiment, the array 200 body is a substantially solid structure having a plurality of cavities into or through the body to facilitate gas flow and / or increase surface area.

While embodiments to provide cooling have been described heretofore, alternatively or additionally embodiments may provide heating.

In one embodiment, the array 200 is preferably maintained at a substantially constant steady state temperature during exposure use. Thus, for example, all or many of the individually addressable elements 102 of the array 200 can be powered on to reach the desired steady state temperature or near this temperature before exposure, and the array 200 may be cooled and / or heated to maintain a steady state temperature. In one embodiment, any one or more temperature control configurations may be used to heat the array 200 prior to exposure to reach the desired steady state temperature or near this temperature. Any one or more temperature control configurations may then be used to allow the array 200 to cool and / or heat to a steady state temperature during exposure. Measurements from sensor 234 may be used in a feedforward and / or feedback manner to maintain steady state temperatures. In one embodiment, each of the plurality of arrays 200 may have the same steady state temperature, or at least one of the arrays 200 of the plurality of arrays 200 may be the array 200 of the plurality of arrays 200. [ Lt; RTI ID = 0.0 > temperature. ≪ / RTI > In one embodiment, the array 200 is heated to a temperature greater than the desired steady-state temperature and then maintained at a temperature higher than the steady-state temperature required and / or due to cooling applied by any one or more of the temperature control arrangements Since the use of the individually addressable element 102 is insufficient, the temperature drops during exposure.

In one embodiment, the number of arrays 200 bodies is increased along the exposure areas and / or through the exposure areas to improve thermal control and overall cooling. Thus, for example, five, six, seven, eight, nine, ten, or more arrays 200 may be provided instead of the four arrays 200 shown in FIG. It is possible to provide fewer arrays, for example one array 200, e.g. a single large array covering the entire width of the substrate.

In one embodiment, a lens array such as the one described herein is associated with or integrated with a moveable individually addressable element. For example, a lens array plate may be attached to each movable array 200, and thus movable (e.g., rotatable) with the individually addressable element 102. As described above, the lens array plate may be displaceable relative to the individually addressable element 102 (e.g., in the Z direction). In one embodiment, a plurality of lens array plates may be provided for the array 200, and each lens array plate may be associated with a different subset of a plurality of individually addressable elements 102.

7 (i), a single discrete lens 242 may be attached in front of each individually addressable element 102 and may be moved along with the individually addressable element 102. In one embodiment, (For example, it is rotatable about the axis A). The lens 242 may also be displaceable (e.g., in the Z direction) with respect to the individually addressable element 102 using an actuator 244. 7 (j), individually addressable element 102 and lens 242 may be displaced together by actuator 244 relative to body 246 of array 200 . In one embodiment, the actuator 244 is configured to displace the lens 242 only in the Z direction (i.e., with the individually addressable element 102 or with the individually addressable element 102).

In one embodiment, the actuator 244 is configured to displace the lens 242 in three degrees of freedom or less (rotation in the Z direction, rotation about the X direction and / or rotation about the Y direction). In one embodiment, the actuator 244 is configured to displace the lens 242 to a degree of freedom of 6 or less. When the lens 242 is movable relative to the individually addressable element 102, the lens 242 may be moved by the actuator 244 to change the focal position of the lens 242 relative to the substrate. When the lens 242 is movable with the individually addressable element 102, the focal position of the lens 242 is substantially constant, but displaced with respect to the substrate. In one embodiment, the movement of the lens 242 is controlled individually for each lens 242 associated with each individually addressable element 102 of the array 200. In one embodiment, a subset of the plurality of lenses 242 is movable with or for a corresponding subset of the plurality of individually addressable elements 102. [ In the latter situation, the fine of focus control may be lost for lower data overhead and / or faster response. In one embodiment, the size of the radiation spot provided by the individually addressable element 102 can be adjusted by defocusing, i. E., As the defocus increases, the spot size becomes larger.

In one embodiment, referring to FIG. 7 (k), an aperture structure 248 having an aperture therein may be located below the lens 242. In one embodiment, the aperture structure 248 may be located on the lens 242, between the lens 242 and the corresponding individually addressable element 102. The aperture structure 248 may limit the diffraction effect of the lens 242, the corresponding individually addressable element 102, and / or the adjacent lens 242 / individually addressable element 102. [

In one embodiment, the individually addressable element 102 may be a radiation emitting device, for example a laser diode. Such a radiation-emitting device can have high spatial coherence, and thus the speckle problem can be posed. To avoid this speckle problem, the radiation emitted by the radiation-emitting device must be scrambled by shifting the phase of the beam portion relative to the other beam portion. 7 (1) and 7 (m), plate 250 may be positioned, for example, on frame 160, and individually addressable element 102 may be positioned on a plate 250). When the individually addressable element 102 is moved over the plate 250, the plate 250 is subjected to a spatially coherent decay of radiation emitted toward the substrate by the individually addressable element 102 ). In one embodiment, when the individually addressable element 102 is moved over the plate 250, the plate 250 is positioned between the lens 242 and the corresponding individually addressable element 102 . In one embodiment, the plate 250 may be positioned between the lens 242 and the substrate.

7 (n), a spatially coherent decay device 252 may be positioned between the substrate and at least the individually addressable element 102 that projects radiation onto the exposure area . In one embodiment, the spatially coherent decoupling device 252 is located between the individually addressable element 102 and the lens 242 and may be attached to the body 246. In one embodiment, the spatial coherence decay device 252 is a phase modulator, a vibrating plate, or a rotating plate. When the individually addressable element 102 projects the radiation toward the substrate, the spatially incoherent decay device 252 causes a spatially coherent collapse of the radiation emitted by the individually addressable element 102 .

In one embodiment, the lens array is attached to the error bin 200 preferably through a high thermal conductivity material (either together as a unit or as a separate lens) to facilitate thermal conduction from the lens array to the array 200 , Thus cooling can be made more advantageous.

In one embodiment, the array 200 may include one or more focus or level sensors 254, similar to the level sensor 150. For example, the sensor 254 may be configured to measure focus for each individually addressable element 102 of the array 200 or for a plurality of individually addressable elements 102 of the array 200 have. Thus, when an out of focus condition is detected, the focus may be focused on each of the individually addressable elements 102 of the array 200 or on a plurality of individually addressable elements 102 of the array 200 Lt; / RTI > For example, the focus can be modified by moving the lens 242 in the Z direction (and / or about the X direction and / or about the Y direction).

In one embodiment, the sensor 254 is integrated with the individually addressable element 102 (or may be integrated with a plurality of individually addressable elements 102 of the array 200). Referring to Figure 7 (o), an exemplary sensor 254 is schematically illustrated. The focus detection beam 256 is redirected (e.g., reflected) away from the substrate surface and is directed through the lens 242 and towards the detector 262 by a half mirror 258. In one embodiment, the focus detection beam 256 may be radiation used for exposure purposes, which may be redirected from the substrate. In one embodiment, the focus detection beam 256 can be a dedicated beam directed to the substrate, which becomes beam 256 when redirected by the substrate. The knife edge 260 (which may be an opening) is placed in the path of the beam 256 before the beam 256 collides on the detector 262. In this example, the detector 262 includes at least two radiation sensitive portions (e.g., areas or detectors) by a split of the detectors 262 as shown in Fig. 7 (o). If the substrate is in focus, a sharp image is formed on the edge 260 and the radiation sensitive portion of the detector 262 receives the same amount of radiation. If the substrate is out of focus, the beam 256 is shifted and the image will be formed either before the edge 260 or behind the edge 260. Thus, edge 260 may intercept a particular portion of beam 256 and one radiation sensitive portion of detector 262 may receive a smaller amount of radiation than other radiation sensitive portions of detector 262. By comparing the output signals from the radiation sensitive portion of the detector 262, it can be seen how the beam plane 256 is different from the desired position and in what direction the redirected substrate plane is. These signals may be electronically processed, for example, to provide a control signal through which the lens 242 may be adjusted. Mirror 258, edge 260, and detector 262 may be mounted to error bin 200. In one embodiment, the detector 262 may be a quad-cell.

In one embodiment, there may be 400 individually addressable elements 102 (133 at any given time) operating. In one embodiment, an additional individually addressable element 102 (e.g., as described above) may be added to the 600 to 1,200 individually addressable elements 102 in operation, for example, for preliminary and / 102 may be provided. The number of individually addressable elements 102 in operation may depend on, for example, resist, which requires a certain amount of radiation for patterning. When the individually addressable element 102 is rotatable, this individually addressable element 102 may be rotated at a frequency of 6 Hz with 1,200 individually addressable elements 102 in operation. If there are fewer individually addressable elements 102, the individually addressable elements 102 can rotate at a higher frequency; When there are more individually addressable elements 102, the individually addressable elements 102 can rotate at a lower frequency.

In one embodiment, the number of individually addressable elements 102 can be reduced using an individually addressable element 102 that is moveable relative to an array of individually addressable elements 102. For example, 600 to 1,200 active individually addressable elements 102 (at any time) may be provided. Further, this reduced number can produce results that are substantially similar to the array of individually addressable elements 102, but have one or more advantages. For example, for a sufficient exposure capacity to use an array of blue-violet diodes, an array of 100,000 blue-violet diodes may be required, for example, 200 diodes x 500 diodes. When operating at a frequency of 10 kHz, the optical power per laser diode will be 0.33 mW. The power per laser diode will be 150 mW = 35 mA x 4.1 V. Therefore, for the array, the power will be 15 kW. In one embodiment using movable individually addressable elements, 400 bluish-purple diodes operating in 133 may be provided. When operating at a frequency of 9 MHz, the optical power per laser diode will be 250 mW. The power per laser diode will be 1000 mW = 240 mA x 4.2 V. Therefore, for the array, the power will be 133 W. Thus, the diodes of the movable individually addressable element 102 configuration can operate at a steep portion of the optical output power versus the forward current curve (240 mA versus 35 mA), for example, as shown in Figure 7 (p) And will produce high output power per diode (250 mW vs. 0.33 mW), but low power (133 W vs. 15 kW) for a plurality of individually addressable elements. Therefore, such a diode can be used more efficiently, and power consumption and / or heat generation is reduced.

Thus, in one embodiment, the diode operates in a steep portion of the power / forward current curve. Operating in a non-steep section of the power / forward current curve may cause non-coherence of radiation. In one embodiment, the diode operates at an optical power greater than 5 mW but no greater than 20 mW, or no greater than 30 mW, or no greater than 40 mW. In one embodiment, the diode does not operate with optical power greater than 300 mW. In one embodiment, the diode operates in a single-mode rather than a multi-mode.

The number of individually addressable elements 102 on the array 200 may vary considerably (and to the extent mentioned above), the length of the exposure area that the array 200 is intended to cover, the rate at which the array is moved during exposure, (E.g., the dimensions of the spots projected onto the substrate from the individually addressable element 102, e.g., width / diameter), the required intensity to be provided by each individually addressable element 102 (E.g., whether it is necessary to diffuse the intended radiation dose for a spot on the substrate through two or more individually addressable elements to prevent damage to the substrate or resist on the substrate), the required scan speed of the substrate, The frequency at which the individually addressable element is turned on or off, and the frequency at which the redundant individually addressable element 102, For the need (as discussed previously; for example, if the addressable elements in at least one individual faulty or for example pre-corrected exposure purposes) may depend on. In one embodiment, the array 200 includes at least 100 individually addressable elements 102, e.g., at least 200 individually addressable elements, at least 400 individually addressable elements, at least 600 individually addressable elements Elements, at least 1,000 individually addressable elements, at least 1,500 individually addressable elements, at least 2,500 individually addressable elements, or at least 5,000 individually addressable elements. In one embodiment, the array 200 includes less than 50,000 individually addressable elements 102, such as less than 25,000 individually addressable elements, less than 15,000 individually addressable elements, less than 10,000 individually An addressable element, less than 7,500 individually addressable elements, less than 5,000 individually addressable elements, less than 2,500 individually addressable elements, less than 1,200 individually addressable elements, less than 600 individually An addressable element, or less than 300 individually addressable elements.

In one embodiment, the array 200 includes at least 100 individually addressable elements (e.g., a number of individually addressable elements 102 in an array) normalized to a 10 cm long exposure area 102), for example at least 200 individually addressable elements, at least 400 individually addressable elements, at least 600 individually addressable elements, at least 1,000 individually addressable elements, at least 1,500 individually addressable elements, , At least 2,500 individually addressable elements, or at least 5,000 individually addressable elements. In one embodiment, the array 200 includes a plurality of individually addressable elements (e.g., a number of individually addressable elements 102 of the array is normalized to an exposure area of 10 cm in length) every 10 cm long exposure area Such as less than 25,000 individually addressable elements, less than 15,000 individually addressable elements, less than 10,000 individually addressable elements, less than 7,500 individually addressable elements, less than 5,000 individually addressable elements, Less than 2,500 individually addressable elements, no more than 1,200 individually addressable elements, no more than 600 individually addressable elements, or no more than 300 individually addressable elements.

In one embodiment, the array 200 includes less than 75% of the extra individually addressable elements 102, such as less than 67%, less than 50%, less than about 33%, less than 25%, less than 20%, less than 10% , Or no more than 5% of the extra individually addressable elements 102. In one embodiment, the array 200 includes at least 5% of redundant individually addressable elements 102, such as at least 10%, at least 25%, at least 33%, at least 50%, or at least 65% Lt; RTI ID = 0.0 > 102 < / RTI > In one embodiment, the array includes about 67% of the extra individually addressable elements 102.

In one embodiment, the spot size of the individual addressable elements on the substrate is less than 10 microns, 5 microns or less, such as 3 microns or less, 2 microns or less, 1 micron or less, 0.5 microns or less, 0.3 microns or less, to be. In one embodiment, the spot size of the individual addressable elements on the substrate is at least 0.1 micron, at least 0.2 micron, at least 0.3 micron, at least 0.5 micron, at least 0.7 micron, at least 1 micron, at least 1.5 micron, at least 2 micron, Micron. In one embodiment, the spot size is about 0.1 micron. In one embodiment, the spot size is about 0.5 microns. In one embodiment, the spot size is about 1 micron.

In operation of the lithographic apparatus 100, the substrate 114 is loaded onto the substrate table 106 using, for example, a robot handler (not shown). Substrate 114 is then displaced in the X direction under frame 160 and individually addressable element 102. Substrate 114 is exposed to the pattern using individually addressable elements 102 after being measured by level sensor and / or alignment sensor 150, as discussed above. The individually addressable element 102 may, for example, be operable to provide pixel-grid imaging as described herein.

Figure 8 is a schematic side view of a lithographic apparatus according to an embodiment of the invention. As shown in FIG. 8, lithographic apparatus 100 includes patterning device 104 and projection system 108. The projection system 108 includes two lenses 176, The first lens 176 is configured to receive the modulated radiation beam 110 from the patterning device 104 and to focus the beam through the aperture in the aperture stop 174. An additional lens (not shown) may be located in the opening. The radiation beam 110 then diverges and is focused by the second lens 172 (e.g., a field lens).

The projection system 108 further includes a lens array 170 configured to receive the modulated radiation beam 110. A different portion of the modulated radiation beam 110, corresponding to one or more individually controllable elements in the patterning device 104, passes through each different lens of the lens array 170. Each lens focuses each portion of the modulated radiation beam 110 to a point lying on a substrate 114. In this way, an array of radiation spots S (see FIG. 12) is exposed on the substrate 114. It will be appreciated that although only five of the lens arrays 170 shown are shown, the lens array may include hundreds or even thousands of lenses (the same contents may be individually controlled Applicable to possible elements).

A free working distance FWD is provided between the substrate 114 and the lens array 170, as shown in Fig. This distance allows the substrate 114 and / or the lens array 170 to be moved, for example, to effect focus correction. In one embodiment, the free working distance is in the range of 1 to 3 mm, e.g., about 1.4 mm. The individually addressable elements of the patterning device 104 are arranged at a pitch P which is consequently associated with the pitch P of the imaging spots in the substrate 114. In one embodiment, the lens array 170 may provide a NA of 0.15 or 0.18. In one embodiment, the imaging spot size is about 1.6 占 퐉.

In this embodiment, the projection system 108 may be a 1: 1 projection system in that the array spacing of image spots on the substrate 114 is the same as the array spacing of the pixels of the patterning device 104. In order to provide improved resolution, the image spot may be much smaller than the pixels of the patterning device 104.

9 is a schematic side view of a lithographic apparatus according to an embodiment of the invention. In this embodiment, in addition to the lens array 170, there is no optical device between the patterning device 104 and the substrate 114. [

The lithographic apparatus 100 of FIG. 9 includes a patterning device 104 and a projection system 108. In this case, the projection system 108 includes only a lens array 170 configured to receive the modulated radiation beam 110 only. A different portion of the modulated radiation beam 110, corresponding to one or more individually controllable elements in the patterning device 104, passes through each different lens of the lens array 170. Each lens focuses each portion of the modulated radiation beam 110 to a point lying on a substrate 114. In this way, an array of radiation spots S (see FIG. 12) is exposed on the substrate 114. It will be appreciated that although only five of the lens arrays 170 shown are shown, the lens array may include hundreds or even thousands of lenses (the same contents may be individually controlled Applicable to possible elements).

As in Fig. 8, a free working distance FWD is provided between the substrate 114 and the lens array 170. Fig. This distance allows the substrate 114 and / or the lens array 170 to be moved, for example, to effect focus correction. The individually addressable elements of the patterning device 104 are arranged at a pitch P which is consequently associated with the pitch P of the imaging spots in the substrate 114. In one embodiment, the lens array 170 may provide a NA of 0.15. In one embodiment, the imaging spot size is about 1.6 占 퐉.

Figure 10 is a schematic side view of a lithographic apparatus using a movable individually addressable element 102 as discussed above with respect to Figure 5 in accordance with an embodiment of the present invention. In this embodiment, in addition to the lens array 170, there is no optical device between the patterning device 104 and the substrate 114. [

The lithographic apparatus 100 of FIG. 10 includes a patterning device 104 and a projection system 108. In this case, the projection system 108 includes only a lens array 170 configured to receive the modulated radiation beam 110 only. A different portion of the modulated radiation beam 110, corresponding to one or more individually controllable elements in the patterning device 104, passes through each different lens of the lens array 170. Each lens focuses each portion of the modulated radiation beam 110 to a point lying on a substrate 114. In this way, an array of radiation spots S (see FIG. 12) is exposed on the substrate 114. It will be appreciated that although only five of the lens arrays 170 shown are shown, the lens array may include hundreds or even thousands of lenses (the same contents may be individually controlled Applicable to possible elements).

As in Fig. 8, a free working distance FWD is provided between the substrate 114 and the lens array 170. Fig. This distance allows the substrate 114 and / or the lens array 170 to be moved, for example, to effect focus correction. The individually addressable elements of the patterning device 104 are arranged at a pitch P which is consequently associated with the pitch P of the imaging spots in the substrate 114. In one embodiment, the lens array 170 may provide a NA of 0.15. In one embodiment, the imaging spot size is about 1.6 占 퐉.

FIG. 11 shows a plurality of individually addressable elements 102, specifically six individually addressable elements 102. In this embodiment, each of the individually addressable elements 102 is a radiation emitting diode, for example a violet laser diode. Each radiation-emitting diode bridges two power lines for supplying current to the radiation-emitting diode to control the diode. Thus, such a diode forms an addressable grid. The width between the two power supply lines is approximately 250 mu m, and the radiation-emitting diode has a pitch of approximately 500 mu m.

12 schematically illustrates how a pattern on substrate 114 can be generated. The filled circle represents a spot (S) array projected onto the substrate 114 by the lens array MLA in the projection system 108. The substrate 114 is moved relative to the projection system 108 in the X direction as a series of exposures are exposed on the substrate. The hollow circle represents the previously exposed spot exposure (SE) on the substrate. As shown, each spot projected onto the substrate 114 by the lens array 170 within the projection system 108 exposes the row R of spot exposure onto the substrate 114. [ The complete pattern for the substrate 114 is produced by the sum of all the rows R of the spot exposure SE exposed by each spot S. [ This configuration is commonly referred to as "pixel grid imaging ". It will be appreciated that FIG. 12 is a schematic representation and that the spots S may be substantially overlapping.

It can be seen that the array of radiation spots S is arranged at an angle a relative to the substrate 114 (the edge of the substrate 114 lies parallel to the X and Y directions). This is to allow each radiation spot to pass over a different area of the substrate when the substrate 114 is moved in the scanning direction (X direction), so that the entire substrate can be covered by the array of radiation spots S. In one embodiment, the angle alpha is less than 20 degrees, less than 10 degrees, such as less than 5 degrees, less than 3 degrees, less than 1 degrees, less than 0.5 degrees, less than 0.25 degrees, less than 0.10 degrees, less than 0.05 degrees, Or less. In one embodiment, the angle alpha is at least 0.0001 degrees, for example at least 0.001 degrees. The inclination angle alpha and the width of the array in the scanning direction are determined by the image spot size and the array spacing in a direction perpendicular to the scanning direction so that the entire surface area of the substrate 114 is addressed.

FIG. 13 schematically illustrates how an entire optical drive system can be exposed with a single scan using a plurality of optical engines, each optical engine including one or more individually addressable elements. Eight arrays SA of radiation spots S (not shown) are created by eight optical engines, the eight optical engines being arranged such that the edges of one array of radiation spots S are aligned with the radiation spots S, Are arranged in two rows (R1, R2) or in a staggered configuration in the "chess board" such that they slightly overlap the edges of the adjacent arrays of rows. In one embodiment, the optical engine is arranged in at least three rows, e.g., four rows or five rows. In this way, the band of radiation extends through the width of the substrate W, allowing exposure of the entire substrate to be performed in a single scan. This "full width" single pass exposure helps to avoid possible stitching issues that couple two or more passes, and may reduce the mechanical footprint because the substrate need not be moved in a direction across the substrate passing direction . It will be appreciated that any suitable number of optical engines may be used. In one embodiment, the number of optical engines is at least 1, such as at least 2, at least 4, at least 8, at least 10, at least 12, at least 14, or at least 17. In one embodiment, the number of optical engines is less than 40, such as less than 30 or less than 20. Each optical engine may include a separate patterning device 104 and may optionally include a separate projection system 108 and / or a radiation system as described above. It will be appreciated, however, that more than one optical engine may share at least a portion of one or more of the radiation system, the patterning device 104, and / or the projection system 108.

In the embodiment described herein, a controller is provided for controlling individually addressable elements. For example, in the example where the individually addressable element is a radiation-emitting device, such controller may control when the individually addressable element is turned on or off and enable high frequency modulation of the individually addressable element . The controller can control the power of the radiation emitted by the one or more individually addressable elements. The controller can modulate the intensity of the radiation emitted by the one or more individually addressable elements. The controller may control / adjust intensity uniformity across all or a portion of the array of individually addressable elements. The controller may adjust the radiation output of the individually addressable elements to correct imaging errors, such as etendue and optical aberrations (e.g., coma, astigmatism, etc.).

In lithography, a desired feature can be created on a substrate by selectively exposing the resist layer on the substrate to radiation, for example by exposing the resist layer to patterned radiation. The area of the resist that receives a particular minimum radiation dose (the "radiation dose threshold") undergoes a chemical reaction, while the other area remains unchanged. The chemical differences produced in this way in the resist layer make it possible to develop the resist, i. E. Selectively removing areas that have received at least a minimum amount of radiation or removing areas that have not received a minimum amount of radiation. As a result, some of the substrate is still protected by the resist, but the area of the substrate from which the resist has been removed may be exposed to produce features required by, for example, additional processing steps such as selective etching of the substrate, Lt; / RTI > While the radiation transmitted into the region of the resist layer on the substrate in the desired feature has a sufficiently high intensity that this region receives a radiation dose above the radiation dose threshold during exposure, By setting the corresponding individually controllable elements to provide a lower radiation intensity, patterning of radiation can be achieved by setting the individually controllable elements in the patterning device to receive a radiation dose below the radiation dose threshold.

In practice, even if the individually controllable element is set to provide the maximum radiation intensity on one side of the feature boundary and the minimum radiation intensity on the other side, the radiation dose at the edge of the required feature is zero It can not be suddenly changed. Instead, due to the diffraction effect, the level of radiation dose can fall through the transition region. The boundary position of the required feature, which is ultimately formed after development of the resist, is then determined by the position at which the received radiation dose falls below the radiation dose threshold. The profile of the decrease in the amount of radiation through the transition region, and thus the precise location of the feature boundary, can be achieved by providing individually controllable elements that provide radiation at points on the substrate that are on or around the feature boundary, But can be more accurately controlled by setting the intensity level between the maximum intensity level and the minimum intensity level. This is commonly referred to as "gray scaling" or "gray leveling ".

Grayscaling is better than possible in a lithography system where the radiation intensity provided to a substrate by a given individually controllable element can be set to only two values (i. E., Only the minimum and maximum values) Good control can be provided. In one embodiment, at least three different radiant intensity values, such as at least four radiant intensity values, at least eight radiant intensity values, at least sixteen radiant intensity values, at least 32 radiant intensity values, at least 64 radiant intensity values, 100 radiation intensity values, at least 128 radiation intensity values, or at least 256 radiation intensity values may be projected onto the substrate. If the patterning device is a source of radiation (e.g., an array of light emitting diodes or laser diodes), gray scaling may be performed, for example, by controlling the intensity level of the radiation being transmitted. When the contrast device is a micro mirror device, gray scaling can be performed, for example, by controlling the inclination angle of the micromirror. Grayscaling can also be performed by grouping a plurality of programmable elements in the contrast device and controlling the number of elements that are switched on or off at any given time in the group.

In one example, the patterning device may have a series of states including: (a) a black state in which the provided radiation has a minimum or zero contribution to the intensity distribution of the corresponding pixel; (b) a whitest state in which the provided radiation makes a maximum contribution; And (c) a plurality of states in between, wherein the provided radiation has an intermediate contribution. This state is divided into a normal set used for conventional beam patterning / printing, and a compensation set used to compensate for the effects of defective elements. The normal set includes a first group of dark states and intermediate states. This first group will be described as a gray state and can be selected to provide increasingly increasing contributions to the corresponding pixel intensities from the minimum dark state value to a certain typical maximum value. The compensation set includes the remaining second group of intermediate states, together with the nominal state. This second group of intermediate states will be described as a white state and can be selected to provide a contribution greater than the usual maximum value and gradually increase to the true maximum value corresponding to the light state. It will be appreciated that while the second group of intermediate states is described as being white, this is merely to facilitate distinction between the conventional exposure step and the compensating exposure step. The entire plurality of states may alternatively be described as a series of gray states between a dark state and a light state, and may be selected to enable gray scale printing.

It should be appreciated that gray scaling may be used for additional or alternative purposes to those described above. For example, the processing of the substrate after exposure can be tuned to have more than three potential responses of the substrate region according to the received radiation dose level. For example, a portion of a substrate receiving a radiation dose below a first threshold reacts in a first manner; A portion of the substrate that receives a radiation dose that is above a first threshold but below a second threshold reacts in a second manner; The portion of the substrate receiving the radiation dose beyond the second threshold reacts in a third manner. Thus, gray scaling may be used such that a radiation dose profile having three or more required dose levels is provided through the substrate. In one embodiment, the radiation dose profile comprises at least two desired radiation dose levels, such as at least three desired radiation dose levels, at least four desired radiation dose levels, at least six desired radiation dose levels, or at least eight And has the required radiation dose level.

It should be further appreciated that the radiation dose profile can be controlled by methods other than simply controlling the intensity of the radiation received at each point on the substrate, as described above. For example, the amount of radiation received by each point on the substrate may alternatively or additionally be controlled by controlling the exposure duration of such points. As a further example, each point on the substrate may potentially receive radiation in a plurality of successive exposures. Therefore, the amount of radiation received by each point may alternatively or additionally be controlled by exposing such points using a selected subset of such a plurality of successive exposures.

In order to form a pattern on a substrate, it is necessary to set each individually controllable element in the patterning device to a required state at each stage in the exposure process. Therefore, a control signal indicating the required state must be transmitted to each individually controllable element. Preferably, the lithographic apparatus includes a controller 400 that generates a control signal. The pattern to be formed on the substrate may be provided to the lithographic apparatus in a vector-defined format, for example GDSII. To convert design information to control signals for each individually controllable element, the controller includes one or more data manipulation devices, each of which manipulates the data stream representing the pattern . A data manipulator can be collectively referred to as a "data path ".

The data manipulation device of the data path may be configured to perform one or more of the following functions: Converting vector-based design information into bitmap pattern data; Translating the bitmap pattern data into the required radiation dose map (i.e., the radiation dose profile required through the substrate); Converting the required radiation dose map to the required radiation intensity value for each individually controllable element; And converting the required radiant intensity values for each individually controllable element into corresponding control signals.

In one embodiment, the control signals may be provided to the individually controllable element 102 and / or one or more other devices (e.g., sensors) by wire or wireless communication. Further, signals from the individually controllable elements 102 and / or one or more other devices (e.g., sensors) may be communicated to the controller 400.

Referring to Figure 14 (a), in a wireless embodiment, the transceiver (or just the transmitter) 406 emits a signal containing a control signal to be received by the transceiver (or simply receiver) The control signals are transmitted to each individually controllable element 102 by one or more lines 404. In one embodiment, the signal from the transceiver 406 may include a plurality of control signals and the transceiver 402 may transmit this signal to each of the individually controllable elements 102 and / or one or more other devices (e.g., For example, a sensor can be demultiplexed into a plurality of control signals. In one embodiment, the wireless transmission may be by radio frequency (RF).

14 (b), in a wired embodiment, one or more lines 404 connect the controller 400 to an individually controllable element 102 and / or one or more other devices (e.g., sensors) . In one embodiment, a single line 404 may be provided to transfer the respective control signals to and / or from the array 200 body. Control signals may then be separately provided to the individually controllable element 102 and / or one or more other devices (e.g., sensors) in the array 200 body. For example, as in the wireless embodiment, the control signals can be multiplexed to be transmitted on a single line, and then transmitted to the individually controllable element 102 and / or to one or more other devices (e.g., sensors) Can be demultiplexed. In one embodiment, a plurality of lines 404 may be provided to convey individual control signals of the individually controllable element 102 and / or one or more other devices (e.g., sensors). When the array 200 is rotatable, the line (s) 404 may be provided along the axis of rotation A. In one embodiment, the signal may be provided to the array 200 body or from the array 200 body via a sliding contact around the motor 216 or around the motor 216. This may be advantageous for a rotatable embodiment. The sliding contact can be made, for example, through a brush contact plate.

In one embodiment, line (s) 404 may be an optical line. In this case, the signal may be, for example, an optical signal whose different control signals can be transmitted at different wavelengths.

Power can be supplied to the individually controllable element 102 or to one or more other devices (e.g., sensors), by wired or wireless means, in a manner similar to control signals. For example, in a wireline embodiment, power may be supplied by one or more lines 404, regardless of whether it is the same as the line carrying the signal. A sliding contact configuration may be provided as described above for transmitting power. In a wireless embodiment, power can be delivered by RF coupling.

While the previous discussion has focused on the control signals supplied to the individually controllable elements 102 and / or one or more other devices (e.g., sensors), it is alternatively or additionally And the transmission of signals from the controllable element 102 and / or one or more other devices (e.g., sensors) to the controller 400. [ Thus, communication can be performed in one direction (e.g., only with individually controllable elements 102 and / or with one or more other devices (e.g., sensors) or with individually controllable elements 102 and / (E.g., from a sensor) or bi-directional (i.e., from an individually controllable element 102 and / or from one or more other devices (e.g., sensors) (E. G., A sensor). ≪ / RTI > For example, transceiver 402 may multiplex multiple signals from an individually controllable element 102 and / or one or more other devices (e.g., sensors) for transmission to transceiver 406, And can be demultiplexed into an individual signal in the transceiver 406.

In one embodiment, the control signal for providing the pattern may be altered to account for factors that may affect the proper supply and / or realization of the pattern on the substrate. For example, correlation may be applied to the control signal to take charge of heating one or more arrays 200. [ This heating can cause a change in the direction of orientation of the individually controllable element 102, and can change the uniformity of the radiation from the individually controllable element 102, and the like. In one embodiment, the temperature and / or the expansion / contraction rate measured in association with the array 200 (e.g., an array of one or more of the individually controllable elements 102) from the sensor 234, for example, May be used to change the control signal that would have been provided to form the signal. Thus, for example, during exposure, the temperature of the individually controllable element 102 can change, and this change can cause a change in the projected pattern to be provided at a single constant temperature. Therefore, the control signal can be changed to take charge of such a change. Similarly, in one embodiment, the results from the alignment sensor and / or level sensor 150 can be used to change the pattern provided by the individually controllable element 102. [ The pattern can be generated from positioning of the substrate 114 between the individually controllable element 102 and the substrate 114, for example, an optical device (if present), irregularities in the substrate 114, , E.g., to correct for distortion.

In one embodiment, the change in the control signal is based on a theory of the physical / optical results for the required pattern, resulting from the measured parameters (e.g., temperature measured by the level sensor, measured distance, etc.) ≪ / RTI > In one embodiment, a change in the control signal may be determined based on an empirical or empirical model of the physical / optical results for the required pattern, resulting from the measured parameters. In one embodiment, changes in the control signal may be applied in a feedforward and / or feedback manner.

In one embodiment, the lithographic apparatus may include a sensor 500 for measuring the characteristics of radiation to be transmitted or transmitted toward the substrate by one or more of the individually controllable elements 102. [ Such a sensor may be a spot sensor or a transmission image sensor. The intensity of the radiation from the individually controllable element 102, the uniformity of the radiation from the individually controllable element 102, the cross-sectional size or area of the radiation spot from the individually controllable element 102, and / Such a sensor can be used to determine the position (on the XY plane) of the radiation spot from the controllable element 102.

Figure 15 is a schematic plan view of a lithographic apparatus according to an embodiment of the present invention and shows some exemplary locations of the sensor 500. [ In one embodiment, one or more sensors 500 are provided on or in the substrate table 106 for holding the substrate 114. For example, the sensor 500 may be provided at the leading edge of the substrate table 106 and / or at the trailing edge of the substrate table 106. In this example, four sensors 500 are shown, one for each array 200. Preferably, such a sensor is located in a position that may not be covered by the substrate 114. In an alternative, additional example, the sensor may be provided at a lateral edge of the substrate table 106, preferably at a location that may not be covered by the substrate 114. The sensor 500 at the leading edge of the substrate table 106 may be used for pre-exposure detection of the individually controllable element 102. The sensor 500 at the trailing edge of the substrate table 106 may be used for post-exposure detection of the individually controllable element 102. The sensor 500 at the lateral edge of the substrate table 106 may be used for detection during exposure ("on-the-fly" detection) of the individually controllable element 102.

Referring to Figure 16 (a), a schematic side view of a portion of a lithographic apparatus according to an embodiment of the present invention is shown. In this example, only one array 200 is shown and other parts of the lithographic apparatus are omitted for simplicity; The sensors described herein may be applied to each of the arrays 200 or to some of the arrays 200. Some additional or alternative embodiments of the position of the sensor 500 are shown in Figure 16 (a) (in addition to the sensor 500 of the substrate table 106). The first embodiment is a sensor 500 on a frame 160 that receives radiation from an individually controllable element 102 through a beam redirection structure 502 (e.g., a reflective mirror configuration). In this first embodiment, the individually controllable element 102 moves in the XY plane, and thus different elements of the individually controllable element 102 can be positioned to provide radiation to the beam redirecting structure 502 . An additional or alternate second embodiment includes a frame 102 that receives radiation from an individually controllable element 102 from the rear side of the individually controllable element 102, 160). ≪ / RTI > In this second embodiment, the individually controllable element 102 moves in the X-Y plane, and therefore different elements of the individually controllable element 102 can be positioned to provide radiation to the sensor 500. Although the sensor 500 in the second embodiment is shown in the path of the individually controllable element 102 in the exposure area 204, the sensor 500 can be located where the sensor 510 is shown . In one embodiment, the sensor 500 on the frame 160 may be in a fixed position, or may be movable, e.g., by a corresponding actuator. The first and second embodiments may be used to provide "on-the-fly" sensing in addition to or as an alternative to pre- and / or post-exposure sensing. The third embodiment is a sensor 500 on structures 504 and 506. The structures 504 and 506 may be movable by an actuator 508. [ In one embodiment, the structure 504 is located below the path through which the substrate table is movable (as shown in Figure 16 (a)) or on the side of such a path. In one embodiment, the structure 504 can be moved by the actuator 508 to the position of the sensor 500 of the substrate table 106 shown in Figure 16 (a) if the substrate table 106 is not there , And if the structure 504 is on the side of the path, this movement can be in the Z-direction (as shown in Figure 16 (a)) or in the X and / or Y directions. In one embodiment, the structure 506 is located on a path over which the substrate table can be moved (as shown in Figure 16 (a)) or on the side of such a path. In one embodiment, the structure 506 can be moved by the actuator 508 to the position of the sensor 500 of the substrate table 106 shown in Figure 16 (a) if the substrate table 106 is not there . The structure 506 may be attached to the frame 160 and be displaceable relative to the frame 160.

An operation to measure the characteristics of radiation to be transmitted or transmitted to the substrate by one or more of the individually controllable elements (102), comprising the steps of moving and / or moving the sensor (500) By moving the beam, the sensor 500 is positioned in the path of radiation from the individually controllable element 102. Thus, by way of example, the substrate table 106 can be moved to position the sensor 500 in the path of radiation from the individually controllable element 102 as shown in Fig. 16 (a). In this case, the sensor 500 is located in the path of the individually controllable element 102 in the exposure area 204. [ In one embodiment, the sensor 500 includes an individually controllable element 102 (e. G., If the beam redirecting structure 502 is not present therein), outside the exposure area 204, Element 102). ≪ / RTI > Once positioned in the path of radiation, the sensor 500 can detect the radiation and measure the characteristics of the radiation. To facilitate sensing, the sensor 500 may move relative to the individually controllable element 102 and / or the individually controllable element 102 may be moved relative to the sensor 500.

As a further example, the individually controllable element 102 can be moved to a position such that radiation from the individually controllable element 102 collides against the beam redirecting structure 502. [ The beam redirection structure 502 directs the beam to the sensor 500 on the frame 160. To facilitate sensing, the sensor 500 may move relative to the individually controllable element 102 and / or the individually controllable element 102 may be moved relative to the sensor 500. In this example, the individually controllable element 102 is measured outside the exposure area 204.

In one embodiment, the sensor 500 may be fixed or movable. When fixed, the individually controllable element 102 is preferably movable relative to the fixed sensor 500 to facilitate sensing. For example, the array 200 may be moved (e.g., rotated or translated) relative to the sensor 500 (e.g., the sensor 500 on the frame 160) to facilitate sensing by the sensor 500. For example, ). When the sensor 500 is movable (e.g., the sensor 500 on the substrate table 106), the individually controllable element 102 can be kept stationary for sensing, Lt; RTI ID = 0.0 > speed. ≪ / RTI >

The sensor 500 may be used to calibrate one or more individually controllable elements 102. For example, the position of the spot of the individually controllable element 102 can be detected by the sensor 500 before exposure, and the system is thereby calibrated. The exposure can then be adjusted based on this expected position of the spot (e.g., the position of the substrate 114 is controlled, the position of the individually controllable element 102 is controlled, The turn-off or turn-on of the controllable element 102 is controlled, etc.). Further, calibration can be made thereafter. For example, calibration may be performed immediately after exposure, prior to additional exposure, e.g., using sensor 500 on the trailing edge of substrate table 106. The calibration can be made before each exposure, after a certain number of exposures. Further, the position of the spots of the individually controllable element 102 can be detected with the sensor 500 as "on-the-fly" The individually controllable element 102 may possibly be recalibrated based on "on-the-fly" sensing.

In one embodiment, one or more of the individually controllable elements 102 can be coded to detect which of the individually controllable elements 102 is in a particular position or in use. In one embodiment, the individually controllable element 102 may include a marker, and the sensor 510 may be used to detect markers, barcodes, and the like, which may be RFID tags. For example, each of the plurality of individually controllable elements 102 may be moved adjacent the sensor 510 to read the marker. Knowing which of the individually controllable elements 102 are adjacent to the sensor 510 determines which of the individually controllable elements 102 is adjacent to the sensor 500, in the exposure area 204, etc. . In one embodiment, each individually controllable element 102 may be used to provide radiation having a different frequency, and the sensors 500, 510 may be configured such that any of the individually controllable elements 102 is a sensor 500, < RTI ID = 0.0 > 510). ≪ / RTI > For example, each of the plurality of individually controllable elements 102 can be moved adjacent to sensors 500, 510 that receive radiation from the individually controllable elements 102, , 510 may demultiplex the received radiation to determine which of the individually controllable elements 102 is adjacent to the sensor 500, 510 at a particular time. From this knowledge, it can be seen which of the individually controllable elements 102 is adjacent to the sensor 500, in the exposure area 204, and so on.

In one embodiment, as discussed above, a position sensor may be provided to determine the position of one or more individually controllable elements 102 at a freedown of six or less. For example, the sensor 510 may be used for position detection. In one embodiment, the sensor 510 may comprise an interferometer. In one embodiment, the sensor 510 may include an encoder that may be used to detect one or more one-dimensional encoder gratings and / or one or more two-dimensional encoder gratings.

In one embodiment, the sensor 520 may be provided to determine the characteristics of the radiation that has been transmitted to the substrate. In this embodiment, the sensor 520 captures the redirected radiation by the substrate. For exemplary purposes, the redirected radiation captured by the sensor 520 may be used to facilitate determining the position of the radiation spot from the individually controllable element 102 (e.g., individually In the case of misalignment of the radiation spot from the controllable element 102). In particular, the sensor 520 can capture redirected radiation, i.e., latent images, from the portion of the substrate that has just been exposed. The measurement of the intensity of the redirected emission of such a tail may provide an indication as to whether or not the spot is properly aligned. For example, repeated measurements of these tail may provide a repetitive signal, and deviations from this signal will indicate a misalignment of the spot (e.g., out-of-phase signals may indicate misalignment). Fig. 16 (b) shows the schematic location of the detection area of the sensor 520 relative to the exposed area 522 of the substrate 114. Fig. In this embodiment, three muffled regions are shown and the results thereof may be compared and / or combined to aid in recognizing misalignment. Only one detection area, for example, the detection area on the left side needs to be used. In one embodiment, the detector 262 of the individually controllable element 102 may be used in a manner similar to the sensor 520. [ For example, one or more individually controllable elements 102 outside the exposed area 204 of the error field 200 on the right hand side can be used to detect redirected radiation from the latent image on the substrate.

17 shows an embodiment of a lithographic apparatus. In the present embodiment, a plurality of individually controllable elements 102 direct radiation toward a rotatable polygon 600 (polygon). The surface 604 of the polygon 600 where the radiation impinges redirects the radiation toward the lens array 170. The lens array 170 directs radiation toward the substrate 114. During exposure, polygon 600 rotates about axis 602 to cause individual beams from each of a plurality of individually controllable elements 102 to travel through lens array 170 in the Y direction. Specifically, this beam will scan repeatedly through the lens array 170 in the positive Y direction as each new face of the polygon 600 collides with the radiation. As described herein, the individually controllable element 102 is modulated during exposure to provide the desired pattern. The polygon may have any number of suitable sides. Further, the individually controllable element 102 is modulated in timing with the rotating polygon 600 such that each beam impinges on the lens of the lens array 170. [ In one embodiment, an additional plurality of individually controllable elements 102 may be provided on the opposite side of the polygon, i.e., on the right side, to cause radiation to strike the surface 606 of the polygon 600.

In one embodiment, a vibrating optical element may be used in place of the polygon 600. The oscillating optical element has a certain fixed angle with respect to the lens array 170 and translates back and forth in the Y direction so that the beam can be scanned back and forth in the Y direction through the lens array 170. In one embodiment, an optical element that rotates back and forth arcs arcs about an axis 602 may be used in place of the polygon 600. By rotating the optical element back and forth while drawing the arc, the beam is scanned back and forth in the Y direction through the lens array 170. In one embodiment, the polygon 600, the oscillating optical element, and / or the rotating optical element have one or more mirror surfaces. In one embodiment, the polygon 600, the vibrating optical element, and / or the rotating optical element comprise a prism. In one embodiment, an acousto-optic modulator may be used in place of the polygon 600. [ An acousto-optic modulator may be used to scan the beam through the lens array 170. In one embodiment, a lens array 170 is arranged between the plurality of individually controllable elements 102 and the poly cone 600, the oscillating optical element, the rotating optical element, and / or the acousto-optic modulator in the radiation path .

Thus, in general, the width of the exposure area (e.g., substrate) can be covered with a radiation output that is less than the width of the radiation output divided by the width of the exposure area. In one embodiment, this may involve moving the radiation beam source relative to the exposure area or moving the radiation beam relative to the exposure area.

Figure 18 is a schematic cross-sectional side view of a lithographic apparatus 100 having an individually controllable element 102 movable in accordance with an embodiment of the present invention. 5, the lithographic apparatus 100 includes a substrate table 106 for holding a substrate, and a positioner 116 for moving the substrate table 106 to a degree of freedom of 6 or less .

The lithographic apparatus 100 further includes a plurality of individually controllable elements 102 arranged on the frame 160. In this embodiment, each individually controllable element 102 is a radiation emitting diode, e.g., a laser diode, such as a violet laser diode. The individually controllable elements 102 are arranged in an array 200 of individually controllable elements 102 that extend along the Y direction. Although one array 200 is shown, the lithographic apparatus may include a plurality of arrays 200, for example, as shown in FIG.

In this embodiment, the array 200 is a rotatable plate, and a plurality of spatially separated, individually controllable elements 102 are arranged around this rotatable plate. In use, the plate rotates about its axis 206, e.g., in the direction shown by the arrows in Fig. The plate of the array 200 rotates about an axis 206 using a motor 216. In addition, the plate of the array 200 can be moved in the Z direction by the motor 216 so that the individually controllable elements 102 can be displaced with respect to the substrate table 106.

In this embodiment, the array 200 may include one or more pins 230 to increase the surface area for heat dissipation. The pin (s) 230 may be, for example, on the top surface of the array 200. Optionally, one or more additional pins 232 may be provided to cooperate with pin (s) 230 to facilitate heat dissipation. For example, the pin (s) 232 may absorb heat from the pin (s) 230 and may be a fluid (e.g., liquid) conduction channel similar to that shown and described with respect to Figure 7 (f) And an associated heat exchanger / pump.

In this embodiment, a lens 242 may be positioned in front of each individually controllable element 102 and may be movable with the individually controllable element 102 (e.g., As shown in Fig. In FIG. 18, two lenses 242 are shown and attached to the array 200. In addition, the lens 242 may be displaceable relative to the individually controllable element 102 (e.g., in the Z direction).

In this embodiment, an aperture structure 248 having an aperture therein may be located on the lens 242, between the lens 242 and the corresponding individually controllable element 102. The aperture structure 248 may limit the diffraction effect of the lens 242, the corresponding individually addressable element 102, and / or the adjacent lens 242 / individually controllable element 102. [

In this embodiment, the sensor 254 may be provided with an individually addressable element 102 (or a plurality of individually addressable elements 102 of the array 200). In this embodiment, the sensor 254 is configured to detect focus. The focus detection beam 256 is redirected (e.g., reflected) to deviate from the substrate surface and is directed through the lens 242, e.g., by a half mirror 258, towards the detector 262. In one embodiment, the focus detection beam 256 may be radiation used for exposure purposes, which may be redirected from the substrate. In one embodiment, the focus detection beam 256 can be a dedicated beam directed to the substrate, which becomes beam 256 when redirected by the substrate. An exemplary focus sensor has been described above with reference to Figure 7 (o). Mirror 258 and detector 262 may be mounted to array 200.

In this embodiment, the control signal may be provided by wire or wireless communication to the individually controllable element 102 and / or one or more other devices (e.g., sensors). In addition, signals from the individually controllable element 102 and / or one or more other devices (e.g., sensors) may be communicated to the controller. In FIG. 18, line (s) 404 may be provided along the axis of rotation 206. In one embodiment, line (s) 404 may be an optical line. In this case, the signal may be, for example, an optical signal whose different control signals can be transmitted at different wavelengths. Power can be supplied to the individually controllable element 102 or to one or more other devices (e.g., sensors), by wired or wireless means, in a manner similar to control signals. For example, in a wireline embodiment, power may be supplied by one or more lines 404, regardless of whether it is the same as the line carrying the signal. In a wireless embodiment, power may be delivered by RF coupling as shown in FIG.

In this embodiment, the lithographic apparatus may comprise a sensor 500 for measuring the characteristics of radiation to be transmitted or transmitted towards the substrate by one or more of the individually controllable elements 102. Such a sensor may be a spot sensor or a transmission image sensor. The intensity of the radiation from the individually controllable element 102, the uniformity of the radiation from the individually controllable element 102, the cross-sectional size or area of the radiation spot from the individually controllable element 102, and / Such a sensor can be used to determine the position (on the XY plane) of the radiation spot from the controllable element 102. In this embodiment, the sensor 500 is on the frame 160, may be adjacent to the substrate table 106, or accessible through the substrate table 106.

In one embodiment, rather than the individually controllable element 102 being movable in the X-Y plane, the individually controllable element 102 is substantially fixed in the X-Y plane during exposure of the substrate. It does not mean that the individually controllable element 102 can not move in the X-Y plane. For example, these elements may be movable in the X-Y plane to modify their position. A possible advantage of having substantially fixed individually controllable elements 102 is that power and / or data transfer to the individually controllable elements 102 can be made easier. A further or alternative possible advantage is that the ability to locally adjust the focus to compensate for the height difference at the substrate at a spatial frequency that is greater than the focal depth of the system and higher than the pitch of the moving controllable element is improved to be.

In this embodiment, the individually controllable element 102 is substantially fixed, but there is at least one optical element that moves relative to the individually controllable element 102. The various configurations of the individually controllable element 102 that are substantially fixed in the X-Y plane and the optical elements that are movable relative thereto are now described.

In the following description, the term "lens" generally refers to any one or any of various types of optical components including refractive, reflective, magnetic, electromagnetic, and electrostatic optical components, Diffractive, reflective, and / or diffractive optical element that provides the same function as a combination, e.g., a referenced lens. For example, an imaging lens may be implemented in the form of a conventional refractive lens with optical power, in the form of a Schwarzschild reflective system with optical power, and / or in the form of a zone plate with optical power . Further, the imaging lens may include non-imaging optics if the resulting effect is to produce a beam that converges on the substrate.

In the following description, too, reference is made to a plurality of individually controllable elements 102, such as mirrors or a plurality of radiation sources of a mirror array modulator. However, it should be understood that this description refers more generally to a modulator configured to output a plurality of beams. For example, the modulator may be an acousto-optic modulator for outputting a plurality of beams from a beam provided by the radiation source.

Figure 19 is a schematic diagram of an optical system according to an embodiment of the present invention having a plurality of individually controllable elements 102 (e.g., laser diodes) and a movable optical element 242 Is a schematic plan view layout for some of the lithographic apparatus. In this embodiment, a plurality of individually controllable elements 102 are attached to the frame and are substantially fixed in the XY plane, and the plurality of imaging lenses 242 are substantially (As shown by the rotational display of wheel 801 in Fig. 19), and the substrate moves in direction 803. In this way, In one embodiment, the imaging lens 242 moves relative to the individually controllable element 102 by rotating about an axis. In one embodiment, the imaging lens 242 is mounted on a structure that rotates about an axis (e.g., in the direction shown in Figure 19) and is mounted in a circular fashion (e.g., as shown partially in Figure 19) ).

Each individually controllable element 102 provides a collimated beam to the moving imaging lens 242. [ In one embodiment, the individually controllable element 102 is associated with one or more collimating lenses to provide a collimated beam. In one embodiment, the collimating lens (s) is attached to a frame that is substantially fixed to the X-Y plane and to which the individually controllable element 102 is attached.

In this embodiment, the cross-sectional width of the collimated beam is smaller than the cross-sectional width of the imaging lens 242. [ Thus, as soon as the collimated beam enters the optically transmissive portion of the imaging lens 242, the individually controllable element 102 (e.g., a laser diode) can be switched on. The individually controllable element 102 (e.g., a laser diode) is then switched off when the beam exits the optically transmissive portion of the imaging lens 242. Thus, in one embodiment, the beam from the individually controllable element 102 passes through a single imaging lens 242 at any time. The resulting traversal of the imaging lens 242 to the beam from the individually controllable element 102 produces a corresponding imaged line 800 on the substrate from each individually controllable element 102 that is turned on do. 19, three imaged lines 800 are shown for each of the three exemplary individually controllable elements 102 in FIG. 19, but the remaining individually controllable elements 102 in FIG. Lt; RTI ID = 0.0 > 800 < / RTI >

19 layout, the imaging lens 242 pitch can be 1.5 mm, and the cross-sectional width (e.g., diameter) of the beam from each individually controllable element 102 is slightly less than 0.5 mm. With this configuration, it is possible to record a line with a length of about 1 mm, with each individually controllable element 102. Therefore, in this configuration of a beam diameter of 0.5 mm and an imaging lens 242 diameter of 1.5 mm, the duty cycle may be as high as 67%. By properly positioning the individually controllable element 102 with respect to the imaging lens 242, complete coverage over the width of the substrate is possible. Thus, for example, if only a standard 5.6 mm diameter laser diode is used, some concentric rings of laser diodes can be used to obtain full coverage across the substrate width, as shown in FIG. Therefore, in the present embodiment, fewer individual controllable elements 102 are used than using a fixed array of individually controllable elements 102 or perhaps using the moving individually controllable elements 102 described herein It may be possible to use a laser diode 102 (e.g., a laser diode).

In this embodiment, since each individually controllable element 102 will be imaged by all moving imaging lenses 242, each imaging lens 242 must be the same. In this embodiment, a higher NA lens is required, but not all imaging lenses 242 need to image the field, for example an NA lens greater than 0.3, greater than 0.18, or greater than 0.15 is required. With this single optical element, diffraction limited imaging is possible.

The focus of the beam on the substrate is fixed to the optical axis of the imaging lens 242 regardless of where the collimated beam enters the lens (e.g., a schematic three-dimensional drawing of some of the lithographic apparatus of Figure 19 20). A disadvantage of this arrangement is that the beam from the imaging lens 242 towards the substrate is not telecentric, resulting in a focus error and possibly an overlay error.

In this embodiment, adjusting the focus by using an element that does not move in the X-Y plane (e.g., in the individually controllable element 102) is likely to cause vignetting. Therefore, adjustment of the required focus must occur at the moving imaging lens 242. [ And thus may require actuators of higher frequency than the moving imaging lens 242. [

Figure 21 is a schematic side view layout for a portion of a lithographic apparatus having an individually controllable element and a movable optical element that are substantially fixed in the XY plane in accordance with an embodiment of the present invention, 3 shows three different rotational positions of the set of imaging lenses 242 for element 102. By allowing the imaging lens 242 to include two lenses 802 and 804 for receiving the collimated beam from the individually controllable element 102 in this embodiment, the lithographic apparatus of Figures 19 and 20 are extended . 19, the imaging lens 242 moves relative to the individually controllable element 102 in the XY plane (e.g., when the imaging lens 242 is at least partially circularly arranged, ). In this embodiment, the beam from the individually controllable element 102 is collimated by the lens 806 before it reaches the imaging lens 242, but in one embodiment such a lens need not be provided. The lens 806 is substantially fixed in the X-Y plane. The substrate moves in the X direction.

The two lenses 802 and 804 are arranged in the optical path of the collimated beam from the individually controllable element 102 to the substrate such that the beam towards the substrate is telecentric. Between the individually controllable element 102 and the lens 804, the lens 802 includes two lenses 802A and 802B having substantially the same focal length. The collimated beam from the individually controllable element 102 is focused between the two lenses 802A and 802B such that the lens 802B collimates the beam towards the imaging lens 242. [ The imaging lens 242 images the beam onto the substrate.

In this embodiment, the lens 802 moves at a specific speed (e.g., a specific RPM (number of revolutions per minute)) in the X-Y plane with respect to the individually controllable element 102. Thus, in this embodiment, the collimated beam exiting lens 802 will have twice the speed of imaging lens 242 moving in the X-Y plane when traveling at the same speed as lens 802. Thus, in the present embodiment, the imaging lens 804 moves at a different speed than the lens 802 with respect to the individually controllable element 102. In particular, the imaging lens 804 moves in the XY plane at twice the speed of the lens 802 (e.g., twice the RPM of the lens 802) and the beam will be telecentricly focused on the substrate . The alignment of the collimated beam exiting from the lens 802 to the imaging lens 242 is schematically shown at three exemplary positions in FIG. Further, since the actual recording on the substrate will be performed at twice the speed of the example of FIG. 19, the power of the individually controllable element 102 must be doubled.

In this embodiment, adjusting the focus by using an element that does not move in the X-Y plane (e.g., in the individually controllable element 102) is likely to cause vignetting. Therefore, adjustment of the required focus must occur at the moving imaging lens 242. [

Further, in the present embodiment, not all the imaging lenses 242 need to image the field. With this single optical element, diffraction limited imaging is possible. A duty cycle of about 65% is possible. In one embodiment, lenses 806, 802A, 802B, and 804 may include two aspherical lenses and two spherical lenses.

In one embodiment, about 380 individually controllable elements 102 (e.g., standard laser diodes) may be used. In one embodiment, a set of about 1,400 imaging lenses 242 may be used. In an embodiment using a standard laser diode, a set of about 4,200 imaging lenses 242 may be used, which may be arranged in six concentric rings on the wheel. In one embodiment, the rotating wheel of the imaging lens can rotate at about 12,000 RPM.

22 is a schematic side view layout for a portion of a lithographic apparatus having individually controllable elements and movable optical elements that are substantially fixed in the XY plane, in accordance with one embodiment of the present invention, 3 shows three different rotational positions of the set of imaging lenses 242 for element 102. In this embodiment, a so-called 4f telecentric in / telecentric out imaging system for moving the imaging lens 242, in order to avoid lenses moving at different speeds as described in connection with Fig. 21, Can be used as shown. The moving imaging lens 242 includes two imaging lenses (808, 808) that move at substantially the same velocity in the XY plane (e.g., rotating about an axis if the imaging lens 242 is at least partially circularly arranged) 810) and receives a telecentric beam, i.e., a telecentric imaging beam, as an input and an output to the substrate. In this configuration of magnification ratio 1, the image on the substrate travels at twice the speed of the moving imaging lens 242. The substrate moves in the X direction. In such an arrangement, the optics would need to image the field with a relatively large NA, for example greater than 0.3, greater than 0.18, or greater than 0.15. This configuration may not be possible with two single element optics. To obtain a diffraction limited image, more than six elements with very precise alignment tolerances may be required. A duty cycle of about 65% is possible. In this embodiment, it is also relatively easy to locally focus using elements that do not move along the movable imaging lens 242 or that do not move with the movable imaging lens 242.

Figure 23 is a schematic side view layout for a portion of a lithographic apparatus having individually controllable elements and movable optical elements that are substantially fixed in the XY plane, in accordance with one embodiment of the present invention, Showing the five different rotational positions of the set of imaging lenses 242 for the element 102. FIG. In this embodiment, in order to avoid lenses moving at different velocities as described in connection with Fig. 21 and to have optics that do not image fields as discussed in connection with Fig. 22, they are substantially fixed in the XY plane And the combination of the lenses is combined with the moving imaging lens 242. Referring to Figure 23, there is provided an individually controllable element 102 that is substantially fixed in the X-Y plane. (Not shown) to collimate the beam from the individually controllable element 102 and to provide the lens 812 with a collimated beam (e.g., having a cross-sectional width (e.g., diameter) of 0.5 mm) An optional collimating lens 806 is provided.

The lens 812 also includes a collimated beam at a field lens 814 (e.g., having a cross-sectional width (e.g., diameter) of 1.5 mm) of the imaging lens 242 that is substantially fixed in the XY- Focus. The lens 814 has a relatively large focal length (e.g., f = 20 mm).

The field lens 814 of the movable imaging lens 242 moves relative to the individually controllable element 102 (e.g., rotating about an axis if the imaging lens 242 is at least partially circularly arranged) . The field lens 814 directs the beam toward the imaging lens 818 of the moving imaging lens 242. As with the field lens 814, the imaging lens 818 moves relative to the individually controllable element 102 (e.g., rotating about an axis if the imaging lens 242 is at least partially circularly arranged) . In this embodiment, the field lens 814 moves at substantially the same speed as the imaging lens 818. The pair of field lens 814 and imaging lens 818 are aligned with respect to each other. The substrate moves in the X direction.

There is a lens 816 between the field lens 814 and the imaging lens 242. The lens 816 is substantially fixed in the X-Y plane and collimates the beam from the field lens 814 to the imaging lens 818. The lens 816 has a relatively large focal length (e.g., f = 20 mm).

In this embodiment, the optical axis of the field lens 814 will coincide with the optical axis of the corresponding imaging lens 816. The field lens 814 is designed such that the beam is superimposed such that the primary light beam of the beam that is collimated by the lens 816 coincides with the optical axis of the imaging lens 818. [ In this way, the beam towards the substrate is telecentric.

Lenses 812 and 816 may be simple spherical lenses due to their large f value. Field lens 814 should not affect image quality and may also be a spherical element. In this embodiment, collimating lens 806 and imaging lens 818 are lenses that do not need to image fields. With such a single element optical instrument, diffraction limited imaging is possible. A duty cycle of about 65% is possible.

In one embodiment, when the movable imaging lens 242 is rotatable, at least two concentric rings of lenses and individually controllable elements 102 are provided to obtain full coverage over the width of the substrate. In one embodiment, the individually controllable elements 102 on such a ring are arranged at a pitch of 1.5 mm. If a standard laser diode with a diameter of 5.6 mm is used, at least six concentric rings may be required for full coverage. Figures 24 and 25 illustrate the construction of concentric rings of individually controllable elements 102 in accordance with this configuration. In one embodiment, this results in approximately 380 individually controllable elements 102 having corresponding lenses substantially fixed in the X-Y plane. The moving imaging lens 242 will have 700 x 6 rings = 4,200 sets of lenses 814, 818. With this arrangement, it is possible to record a line having a length of about 1 mm with each individually controllable element 102. In one embodiment, a set of about 1,400 imaging lenses 242 may be used. In one embodiment, lenses 812, 814, 816, and 818 may comprise four aspherical lenses.

In the present embodiment, adjusting the focus by using an element that does not move in the XY plane (e.g., in the individually controllable element 102) results in loss of telecentric characteristics and is likely to cause vignetting . Therefore, adjustment of the required focus must occur at the moving imaging lens 242. [ It may therefore require an actuator of higher frequency than the moving imaging lens 242. [

Figure 26 is a schematic side view layout for a portion of a lithographic apparatus having an individually controllable element and a movable optical element that are substantially fixed in the X-Y plane, in accordance with an embodiment of the present invention. In this embodiment, an optical derotator is used to couple to the moving imaging lens 242 an individually controllable element 102 that is substantially fixed in the X-Y plane.

In this embodiment, the individually controllable elements 102 are arranged in a ring with an optional collimating lens. The two parabolic curved mirrors 820 and 822 reduce the ring of collimated beams from the individually controllable elements 102 to an acceptable diameter for the detolator 824. [ In Fig. 26, a Pechan prism is used as the derotator 824. Each separately controllable element 102 appears to be substantially fixed with respect to the individual imaging lens 242 when the di rotator rotates at a speed half the speed of the imaging lens 242. [ Two additional parabolic curved mirrors 826 and 828 expand the rings of the de-rotated beam from the di rotator 824 to an acceptable diameter for the movable imaging lens 242. The substrate moves in the X direction.

In this embodiment, each individually controllable element 102 is paired with an imaging lens 242. Therefore, it may not be possible to mount the individually controllable elements 102 on a concentric ring, and thus the overall coverage across the width of the substrate may not be obtained. A duty cycle of about 33% is possible. In this embodiment, the imaging lens 242 is a lens that does not need to image the field.

Figure 27 is a schematic side view layout for a portion of a lithographic apparatus having an individually controllable element that is substantially fixed in the X-Y plane and a movable optical element therealong, in accordance with an embodiment of the present invention. In this embodiment, the imaging lens 242 is configured to rotate about a direction extending in the X-Y plane (e.g., a rotating drum rather than a rotating wheel as described in connection with FIGS. 19-26). Referring to Fig. 27, a moving imaging lens 242 is arranged on a drum configured to rotate, for example, about the Y direction. The moving imaging lens 242 receives radiation from an individually controllable element 102 that extends linearly in the Y direction between the moving imaging lens 242 and the rotational axis of the drum. In principle, the lines that can be written by the movable imaging lens 242 of this drum may be parallel to the scan direction 831 of the substrate. Thus, the di rotator 830 mounted at 45 ° is configured to rotate the line made by the movable imaging lens 242 of the drum by 90 ° so that the imaged line is perpendicular to the scanning direction of the substrate. The substrate moves in the X direction.

For all stripes on the substrate, a circularly arranged imaging lens 242 may be required on the drum. If such a circle can record a 3 mm wide stripe on a substrate and the substrate width is 300 mm, 700 (optics on the circumference of the drum) x 100 = 70,000 optical assemblies may be required on the drum. And may be less when cylindrical optics are used on the drum. Further, in this embodiment, the imaging optics may need to image a particular field, which may make the optics more complex. A duty cycle of about 95% is possible. An advantage of this embodiment is that the imaged stripes can be substantially parallel and straight, with substantially the same length. It is also relatively easy to locally focus using elements that do not move along the movable imaging lens 242 or that do not move with the movable imaging lens 242.

Figure 28 is a schematic side view layout for a portion of a lithographic apparatus having an individually controllable element and a movable optical element that are substantially fixed in the XY plane in accordance with one embodiment of the present invention, Lt; / RTI > shows the five different rotational positions of the set of imaging lenses 242 for the element.

28, there is provided an individually controllable element 102 that is substantially fixed in the X-Y plane. The movable imaging lens 242 includes a plurality of lens sets, each of which includes a field lens 814 and an imaging lens 818. The substrate moves in the X direction.

The field lens 814 (e.g., a spherical lens) of the movable imaging lens 242 moves in direction 815 relative to the individually controllable element 102 (e.g., the imaging lens 242 At least partially circularly arranged, about the axis). The field lens 814 directs the beam toward an imaging lens 818 (e.g., an aspheric lens, such as a double aspherical lens) of a moveable imaging lens 242. Similar to the field lens 814, the imaging lens 818 moves relative to the individually controllable element 102 (e.g., when the imaging lens 242 is at least partially circularly arranged, ). In this embodiment, the field lens 814 moves at substantially the same speed as the imaging lens 18.

The focal plane of the field lens 814 coincides at a location 815 with the inverse focal plane of the imaging lens 818, providing a telecentric in / telecentric out system. In contrast to the configuration of FIG. 23, the imaging lens 818 implements a particular field. The focal length of the field lens 814 is such that the field size for the imaging lens 818 is less than a half angle of 2 to 3 degrees. Even in this case, it is still possible to obtain diffraction-limited imaging with one single-element optical device (e.g., a double aspherical single element). The field lens 814 is configured to be mounted without a gap between each field lens 814. In this case, the duty cycle of the individually controllable element 102 may be about 95%.

The focal length of the imaging lens 818 is such that, in the case of a NA of 0.2 at the substrate, such a lens is not larger than the diameter of the field lens 814. The focal length of the imaging lens 818 that is equal to the diameter of the field lens 814 will provide the diameter of the imaging lens 818 leaving sufficient space to mount the imaging lens 818. [

Because of the field angle, a line slightly larger than the pitch of the field lens 814 can be recorded. Which also provides superimposition between the imaged lines of the neighboring individually controllable elements 102 on the substrate, depending on the focal length of the imaging lens 818. [ Thus, the individually controllable element 102 can be mounted on the same ring at the same pitch as the imaging lens 242.

29 is a schematic three-dimensional view of a portion of the lithographic apparatus of FIG. In the figure, five individually controllable elements 102 are shown with five corresponding movable imaging lens sets 242. In this figure, It will be apparent that additional individually controllable elements 102 and corresponding movable imaging lens set 242 may be provided. The substrate moves in the X direction as indicated by the arrow 829. [ In one embodiment, the field lens 814 is arranged without a gap therebetween. The pupil plane is located at 817.

In order to avoid a relatively small dual aspheric imaging lens 818 and to reduce the amount of optics of the moving imaging lens 242 and to use a standard laser diode as an individually controllable element 102, There is a possibility of imaging a plurality of individually controllable elements 102 with a single lens set of possible imaging lenses 242. [ The corresponding imaging lens 818 includes an individually controllable element 102 as long as the individually controllable element 102 is telecentricly imaged onto the field lens 814 of each movable imaging lens 242. [ Will re-image the beam from the substrate back onto the substrate telecentrically. For example, if eight lines are to be recorded at the same time, the diameter of the field lens 814 and the focal length of the imaging lens 818 may be increased by 8 times in the same yield, while the amount of the movable imaging lens 242 is 8 It can be reduced by a factor of two. Further, because some of the optics needed to image the individually controllable element 102 on the field lens 814 may be common, the optics that are substantially fixed in the X-Y plane may be reduced. This configuration in which eight lines are simultaneously recorded by a single set of movable imaging lenses 242 is achieved by rotating the imaging lens 242 from the rotational axis 821 and the radius of the set of imaging lenses 242 from that rotational axis 821 , And is schematically shown in Fig. (When eight lines are simultaneously recorded by a single set of movable imaging lenses 242) begins at a pitch of 1.5 mm to 12 mm, sufficient to mount a standard laser diode as an individually controllable element 102 Leaving space. In one embodiment, 224 individually controllable elements 102 (e.g., standard laser diodes) may be used. In one embodiment, a set of 120 imaging lenses 242 may be used. In one embodiment, 28 sets of substantially fixed optics can be used with 224 individually controllable elements 102.

In this embodiment, it is also relatively easy to locally focus using elements that do not move along the movable imaging lens 242 or that do not move with the movable imaging lens 242. As far as the telecentric image of the individually controllable element 102 on the field lens 814 is moved along the optical axis and remains telecentric, only the focal point of the image on the substrate will change and the image will be telecentric It will remain. Fig. 31 shows a schematic configuration for controlling focus using a moving roof top in the configurations of Figs. 28 and 29. Fig. Two folding mirrors 832 with a roof top (e.g., a prism or mirror set) 834 are located in the telecentric beam from the individually controllable element 102 prior to the field lens 814. By moving the roof top 834 in the direction 833 away from the folding mirror 832 or toward the folding mirror 832, the image is shifted along the optical axis and thus also shifted with respect to the substrate. Axial focus shift is F / is the same proportion to the square of the value along the optical axis due to enlargement in size, 25㎛ defocus at the substrate to F / 2.5 beam field to f / 37.5 beam of 5.625mm (37.5 / 2.5) ² Lens 814 will provide a focus shift. In other words, the loop top 834 must move to half thereof.

32 is a schematic cross-sectional side view of a portion of a lithographic apparatus having an individually controllable element and an optical element movable therewith substantially fixed in the X-Y plane, in accordance with an embodiment of the present invention. Figure 32 shows a configuration similar to that of Figure 23, but may be modified as appropriate to match any of the embodiments of Figures 19-22 and / or Figures 24-31.

32, the lithographic apparatus 100 includes a substrate table 106 for holding a substrate, and a positioner 116 for moving the substrate table 106 to a degree of freedom of 6 or less.

The lithographic apparatus 100 further includes a plurality of individually controllable elements 102 arranged on the frame 160. In this embodiment, each individually controllable element 102 is a radiation emitting diode, e.g., a laser diode, such as a violet laser diode. The individually controllable elements 102 are arranged on the frame 838 and extend along the Y direction. Although only one frame 838 is shown, the lithographic apparatus may have a plurality of frames 838 similar to the array 200, for example, as shown in FIG. On the frame 838, lenses 812 and 816 are further arranged. The frame 838, and thus the individually controllable element 102, and the lenses 812 and 816 are substantially fixed in the X-Y plane. The frame 838, the individually controllable element 102 and the lenses 812 and 816 can be moved in the Z direction by an actuator 836. [

In this embodiment, the frame 840 is provided so as to be rotatable. A field lens 814 and an imaging lens 818 are arranged on the frame 840 and the combination of the field lens 814 and the imaging lens 818 forms a movable imaging lens 242. [ In use, the plate rotates about its axis 206, e.g., in the direction shown by the arrows in FIG. 5 relative to the array 200. The frame 840 is rotated about an axis 206 using a motor 216. Frame 840 can also be moved in the Z direction by motor 216 so that movable imaging lens 242 can be displaced relative to substrate table 106. [

In this embodiment, an aperture structure 248 having an aperture therein may be located on the lens 812, between the lens 812 and the corresponding individually addressable element 102. The aperture structure 248 may limit the diffraction effect of the lens 812, the corresponding individually addressable element 102, and / or the adjacent lens 812 / the individually controllable element 102. [

In one embodiment, the lithographic apparatus 100 includes one or more movable plates 890 (e.g., rotatable plates, e.g., rotatable disks) that include an optical element, e.g., a lens. In the embodiment of Figure 32, a plate 890 with a field lens 814 and a plate 890 with an imaging lens 818 are shown. In one embodiment, the lithographic apparatus is free of any reflective optical element that rotates during use. In one embodiment, the lithographic apparatus does not have any reflective optical elements that receive radiation from any individually controllable element 102 or from all individually controllable elements 102 and that rotate during use. In one embodiment, one or more (e. G., All) plates 890 are substantially planar and have any optical element (or portion of the optical element) projecting above or below one or more surfaces of the plate It is not. This may be accomplished, for example, by providing a flat cover plate (not shown) on the plate 890 to allow the plate 890 to be thick enough (i. E. At least to place the optical element at least thicker than the height of the optical element, . Having the at least one surface of the plate substantially planar can help reduce noise, for example, when the device is in use.

33 is a schematic cross-sectional side view of a portion of the lithographic apparatus; In this embodiment, the lithographic apparatus has, but need not be, individually controllable elements that are substantially fixed in the X-Y plane, as will be further described below. The lithographic apparatus 900 includes a substrate table 902 for holding a substrate and a positioner 904 for moving the substrate table 902 to a degree of freedom of 6 or less. The substrate may be a resist coated substrate. In one embodiment, the substrate is a wafer. In one embodiment, the substrate is a polygonal (e.g., rectangular) substrate. In one embodiment, the substrate is a glass substrate. In one embodiment, the substrate is a plastic substrate. In one embodiment, the substrate is a foil. In one embodiment, the lithographic apparatus is suitable for roll-to-roll manufacture.

The lithographic apparatus 900 further includes a plurality of individually controllable self-emitting contrast devices 906 configured to emit a plurality of beams. In one embodiment, the self-emitting contrast device 906 includes a radiation emitting diode, such as a light emitting diode (LED), an organic LED (OLED), a polymer LED (PLED), or a laser diode to be. In one embodiment, each individually controllable element 906 is a blue violet laser diode (e.g., Sanyo Model No. DL-3146-151). These diodes are supplied by companies such as Sanyo, Nichia, Osram, and Nitride. In one embodiment, the diode emits UV radiation having a wavelength of, for example, about 365 nm or about 405 nm. In one embodiment, the diode may provide a selected output power in the 0.5 to 200 mW range. In one embodiment, the size of the laser diode (pure die) is selected in the range of 100 to 800 micrometers. In one embodiment, the laser diode has a selected emission area in the 0.5 to 5 square micrometer range. In one embodiment, the laser diode has a selected divergence angle in the range of 5 to 44 degrees. In one embodiment, the diode has a configuration (e.g., emission region, divergence angle, output power, etc.) to provide a total luminance of about 6.4 x 10 ⁸ W / (m 2.

The self-emitting contrast device 906 may be arranged on the frame 908 and extend along the Y direction and / or the X direction. Although only one frame 908 is shown, the lithographic apparatus may have a plurality of frames 908 as shown in FIG. On the frame 908, a lens 920 is further arranged. The frame 908, and thus the self-emission contrast device 906 and the lens 920, are substantially fixed in the X-Y plane. The frame 908, the self-emission contrast device 906 and the lens 920 can be moved in the Z direction by the actuator 910. [ Alternatively or additionally, the lens 920 may be moved in the Z direction by an actuator associated with the particular lens 920. Alternatively, each lens 920 may be provided with an actuator.

The self-emitting contrast device 906 may be configured to emit a beam and the projection systems 920, 924, and 930 may be configured to project the beam onto a target portion of the substrate. The self-emitting contrast device 906 and the projection system form an optical column. The lithographic apparatus 900 may include an actuator (e.g., a motor 918) for moving the optical column and a portion thereof relative to the substrate. A frame 912 on which the field lens 924 and the imaging lens 930 are arranged may be rotatable by an actuator. The combination of the field lens 924 and the imaging lens 930 forms a movable optical device 914. In use, the frame 912 rotates about its axis 916, e.g., in the direction shown by the arrow in FIG. The frame 912 is rotated about an axis 916 using an actuator, for example, a motor 918. The frame 912 can be moved in the Z direction by the motor 910 so that the movable optical device 914 can be displaced with respect to the substrate table 902. [

An aperture structure 922 having an aperture therein may be located on the lens 920 and between the lens 920 and the self-emission contrast device 906. The aperture structure 922 may limit the diffraction effect of the lens 920, the corresponding self-emission contrast device 906, and / or the adjacent lens 920 / individually controllable self-emission contrast device 906 have.

The depicted apparatus can be used by rotating the frame 912 and simultaneously moving the substrate on the substrate table 902 below the optical column. The self-emitting contrast device 906 may emit a beam through the lenses 920, 924, and 930 when the lenses 920, 924, and 930 are substantially aligned with respect to each other. By moving the lenses 924 and 930, the image of the beam on the substrate is scanned through a portion of the substrate. By simultaneously moving the substrate on the substrate table 902 under the optical column, the portion of the substrate that is the object of the image of the self-emitting contrast device 906 is also moved. It also switches the self-emission contrast device 906 at high speed under the control of a controller that controls the rotation of the optical column or a portion of the two and controls the intensity of the self-emission contrast device 906 and the speed of the substrate, Off "state (e.g., having no output or an output that is below the threshold and has an output that exceeds the threshold when in the" on "state) Can be imaged.

34 is a schematic plan view of the lithographic apparatus of FIG. 33 with self-emission contrast device 906. FIG. Similar to the lithographic apparatus 900 shown in Figure 33, the lithographic apparatus 900 includes a substrate table 902 for holding a substrate, a positioner 904 for moving the substrate table 902 to a degree of freedom of 6 or less And an alignment / level sensor (not shown) for determining the alignment between the self-emission contrast device 906 and the substrate 928 and for determining whether the substrate 928 is horizontal relative to the projection of the self-emission contrast device 906 932). As shown, the substrate 928 has a rectangular shape, but additionally or alternatively, a round shaped substrate may also be processed.

The self-emitting contrast device 906 is arranged on a frame 926. The self-emitting contrast device 906 is a radiation emitting diode, for example a laser diode, such as a violet laser diode. As shown in FIG. 34, the self-emitting contrast device 906 may be arranged in an array 934 that extends in the X-Y plane.

This array 934 may be an elongated line. In one embodiment, such an array 934 may be a one-dimensional array of self-emitting contrast device 906. In one embodiment, such array 934 may be a two-dimensional array of self-emitting contrast device 906. A rotating frame 912 capable of rotating in a direction indicated by an arrow can be provided.

A rotating frame 912 capable of rotating in a direction indicated by an arrow can be provided. The rotating frame may be provided with lenses 924 and 930 (shown in Figure 33) to provide an image of each self-emitting contrast device 906. Such an apparatus may include actuators for rotating optical columns including lenses 924 and 930 and frame 912 relative to the substrate.

As the rotatable frame rotates, the beam is incident on a successive lens, and every time the lens is irradiated by the beam, the position at which the beam is incident on the lens surface shifts. Since the beam is projected onto the substrate differently (i.e., with different deflections) depending on the incident position of the beam on the lens, the beam will make a scanning movement each time it passes through the next lens (upon reaching the substrate).

In this embodiment, different parts of the pattern to be projected onto the substrate can be projected through different lenses because of the moving (rotating in this example) part of the optical column. In order to achieve accurate matching between these parts of the pattern, certain matching between the lenses of the projection system may be required. Differences between projections through various lenses can be related to a variety of causes: for example, each lens can show a specific tolerance when projecting a beam; As another example, the mounting of each lens may have a tolerance; And / or as another example, the positioning of the lens relative to the rotatable frame may have tolerances.

At least one lens of the lenses is connected to the rotatable frame by means of an adjustable member in order to be able to improve the matching between the projections by the lenses of the projection system. An example of such an adjustable member will be described with reference to FIG. 35 shows a portion of a rotatable frame 912 to which an adjustable member 936 is attached for each lens. In this example, the lower wheel of the wheel of the rotatable frame 912 of Fig. 33 is shown, which holds the lens 930. Fig. The same or similar configuration may be provided for the upper wheel of the rotatable frame according to Fig. 33, which holds the lens 924. Fig. In the embodiment shown in Figure 35, each lens is held by a respective adjustable member such that adjustment for each lens is individually allowed. Although only three adjustable members and three lenses are shown in Fig. 35 for purposes of illustration, the adjustable member and corresponding lens can be repeated along the outer periphery of the rotatable frame 912. [

An embodiment of one of these adjustable members will now be described. In the embodiment shown in FIG. 35, the adjustable member 936 includes a base portion 938 attached to a rotatable frame. The intermediate portion 940 is attached to the base portion 938 through the wedge portion 942. [ In this embodiment, the wedge portion and the middle portion each have an adjacent surface that is slightly inclined to a plane perpendicular to the radial direction R of the rotatable frame 912 (i.e., the direction along the radius of the rotatable frame). Adjusting the position of the wedge portion 942 in the vertical direction will adjust the length of the adjustable member so that each lens held by each adjustable member 930) will be adjusted. More generally, intermediate portion 940 and / or wedge portion 942 may have a wedge shape when viewed in the direction of the axis of rotation of the rotatable frame. The base portion, the wedge portion and the intermediate portion are held together by at least one interconnecting bolt 950 as shown in FIG. 36, and this interconnecting bolt 950 is passed through the through hole 942A of the wedge portion 942 . When the interconnecting bolts 950 are tightened, they will press the base portion 938 and the middle portion 940 against both sides of the wedge portion 942.

Each lens 930 is held by a respective lens holder 948 and the lens holder 948 is held by a middle portion 940. [ The holder 948 and the intermediate portion 940 may form an integral portion. The intermediate portion 940 includes a constriction 944 when viewed in the radial direction. In this embodiment, the constricted portion is embodied as a first constricted portion and a second constricted portion 944A, 944B extending in the vertical direction from both sides of the intermediate portion 940. [ The first retraction portion 944A is bridged by a push-pull device, in this example a tensioning device 946. [ The tensioning device 946 may include an elongated (e.g., threaded) portion 946A and a corresponding nut portion 946B configured to cooperate with such elongated portion 946A. The tensioning device 946 allows a force to be applied in the radial direction R on portions of the intermediate portion 940. By tightening the tensioning device 946, tension will be applied between portions of the middle portion on either side of the retraction portion 944 to which the tensioning device is attached. As a result, the intermediate portion will slightly warp in its constricted portion, so that each lens held by each adjustable member and the radially outer portion of the middle portion will be slightly moved along arrow A.

Figure 37 shows a further embodiment of the intermediate part. Here, the interconnecting bolts attaching the wedge portion 942 and the intermediate portion 940 to the base portion 938 extend to the retracted portion 944A, allowing the interconnecting bolts to be easily fastened from the outside. Therefore, a corresponding through hole 952 can be provided in the radially outer portion of the intermediate portion 940.

Adjustment of adjustable member 936 may be performed as described below:

The focus adjustment can be performed for each lens by a two-step approach: First, the middle portion 940 is mounted to the base portion 938 and the wedge portion 942. By positioning the intermediate portion 940 within the allowable clearance range at the time of mounting the base portion 938 and the wedge portion 942, it is possible to roughly set the position of each lens. The fine adjustment may be performed by tightening tensioning device 946 to adjust the position of the lens along direction A. [

(E.g., adjusting the position of each lens in the radial direction R of the rotatable frame 912) can be performed by a two-step approach for each lens: First, the base portion 938, And adjusting the position of the wedge portion 942 with respect to the intermediate portion 940, the position of the lens in the radial direction R is adjusted. The fine adjustment may be performed by tightening the interconnecting bolt 950. In order to enable accurate positioning, the strength of the interconnecting bolt 950 may be configured to be lower than the strength of the wedge portion, base portion and intermediate portion. Thus, tightening the interconnecting bolts will result in a relatively low deformation in the base portion, the wedge portion and the middle portion, thus allowing accurate positioning in the radial direction.

Adjustment of each lens (i.e., adjustment in direction B) in the circumferential direction of rotation of the rotatable frame is performed by mounting adjustable member 936 on rotatable frame 912, and such mounting shows clearance . The residual tolerance on the angular position of the lens may be modified by an appropriate timing setting for driving the intensity of the self-emitting contrast device.

38 shows a portion of a rotatable frame 912 to which an adjustable member 936 is connected. The adjustable member holds the lens, or assembly of lenses 924, 930 in this example. For each assembly of each lens or lens 924, 930, an adjustable member can be provided so that each lens or each assembly of lenses can be individually positioned. In this embodiment, the adjustable member comprises a balance mass. In order to achieve a high yield, a high scanning speed has to be achieved, which results in a high rotation speed of the rotatable frame. As a result, a high centrifugal force can be applied to the adjustable member during use. Under expected operating conditions, a centrifugal acceleration of approximately 5000 grams (i.e., 5000 times of gravity) may be expected. Such a magnitude of force may result in deformation of the adjustable member during operation. The adjustable member can be balanced to some extent to prevent such centrifugal forces from deforming the adjustable member or at least reduce the effect of centrifugal force on the adjustable member. The adjustable member includes a base portion 954 that provides attachment to the rotatable frame, e.g., by the bolts shown. Balance mass 956 is connected to base portion 956 by interconnection structure 958. A balance of the balance mass is achieved with respect to the radial direction of the rotatable frame 912 (or more preferably to a plane perpendicular to the axis of rotation of the rotatable frame). In the present embodiment, the connection structure is smaller in dimension than the balance mass when viewed in a direction parallel to the rotation axis so as to provide a certain "pivot" In one embodiment, the adjustable member is provided with an adjustment mass portion 960. More specifically, in this embodiment, the balance mass is provided with the adjustment mass portion 960. [ The position of the adjustment mass can be adjusted by a suitable positioning mechanism, such as a screw mechanism, to allow some adjustment to the center of gravity of the balance mass (or more generally the adjustable member). When the centrifugal force is applied during the rotation of the rotatable frame due to the adjustment of the center of gravity, the resultant force can provide a small amount of displacement to the lenses 924, 930 and thus the position of the adjustment mass 960 The possibility of adjustment of the position of the lens is provided. As an alternative to or in addition to the adjustment mass 960, a spring load adjustment structure capable of exerting a force between the rotatable frame and the balance mass may be provided, whereby in operation, like the adjustment mass, , 930), thereby enabling positioning of the lens in accordance with the tension of the spring load adjustment structure.

A further embodiment of the adjustable member 936 is shown in Fig. 39 shows an adjustable member 936 that includes a base portion 954, a balance mass 956 and a connecting structure 958 connecting the balance mass 956 to the base portion 954. In this embodiment, the base portion 954 includes an adjustment mechanism 962 that connects the rotatable frame side portion 964 of the base portion 954 to the balance mass side portion 966. The adjustment mechanism 962 includes four shrunk portions 968a, 968b, 968c and 968d and two of these shrunk portions 968a and 968b connect the adjustment mechanism to the rotatable frame side portion 964 And the other two retracted portions 968c and 968d connect the adjustment mechanism 962 to the interconnect structure 958. [ The intermediate portion 970 between the retracted portion 968a and the retracted portion 968c may be positioned by a positioning mechanism, e.g., a positioning screw 972 in this embodiment. A force can be exerted on the balance mass 956 by a spring load regulating structure 974 that couples the balance mass to the rotatable frame 912 and / or the rotatable frame side portion 964.

The embodiments shown and described with reference to Figures 38 and 39 enable adjustment of the position of the lens or lenses 924 and 930 in question as follows. With reference to the embodiment shown in Figure 38, when the adjusting mass portion is moved upward, the center of gravity of the balance mass including the adjusting mass portion will be displaced slightly upward, so that the adjustable structure moves the lenses 924, And / or vice versa. Thus, this movement of the adjustment mass causes a slight bending due to the centrifugal force during rotation, so that the adjustment mass can be used to adjust the focus of the lens. 39, when the position adjusting screw 972 is tightened, the lenses 924 and 930 move upward (i.e., in the z-direction) to adjust the lens focus, while the spring load adjusting structure The lenses 924 and 930 move inward (i.e., in the radial direction) to adjust the radial position of the lens in question. 38 and 39), it is possible to adjust the individual adjustments of the focus (Figs. 38 and 39) and the radial position (Fig. 39) substantially independently, i.e., ", You can do it. This adjustment makes it possible to perform the calibration procedure relatively quickly for a plurality of dark portions mounted on the rotatable frame. At the same time, due to the concept of balancing, the bending force due to the centrifugal force can be considerably prevented. It should be understood that the features of the adjustment mass portion are not limited to those used with the balance mass. Rather, such a solution may be applied to other embodiments of the adjustable member.

It should be understood that the concept of the adjustment mass can be applied to other configurations as well. For example, the adjustable member including the hinge structure at the top may be provided with an adjusting mass portion, and the position of the adjusting mass portion is adjustable in a direction substantially parallel to the rotational axis of the rotatable frame (for example, By mechanism). Adjusting the position of the adjustment mass in a downward direction (i.e., in a direction away from the hinge structure) increases the centrifugal force at the bottom of the adjustable member during operation, thereby providing upward and / or outward adjustment of the adjustable member do.

According to the device manufacturing method, a device, such as a display, an integrated circuit or any other item, may be fabricated from a substrate onto which a pattern is projected.

Due to the moving (e.g., rotating) nature of the projection system in this embodiment, the rotatable frame can rotate at high speed, resulting in a considerable centrifugal force on the rotatable frame, lens, etc., . Despite the adjustable nature of the adjustable member, the embodiment can exhibit low deformation in such centrifugal forces.

Although an adjustable member in this embodiment has been described with reference to the lens 930, it will be understood that the same or similar configurations may be applied to hold and adjust the position of the lens 924 or other components of the apparatus.

Embodiments are also presented below with the following numbered items:

1. A lithographic apparatus comprising:

A substrate holder configured to hold a substrate;

A modulator configured to expose an exposure area of the substrate to a plurality of beams modulated according to a required pattern; And

A projection system configured to project a modulated beam onto a substrate, the projection system comprising a lens array for receiving a plurality of beams,

Wherein the projection system is configured to move the lens array relative to the modulator during exposure of the exposure area.

2. In the first embodiment,

Each lens comprising at least two lenses arranged along a beam path of at least one of the plurality of beams from the modulator to the substrate.

3. In the second embodiment,

Wherein the first of the at least two lenses comprises a field lens and the second of the at least two lenses comprises an imaging lens.

4. In the third embodiment,

Wherein the focal plane of the field lens coincides with the inverse focal plane of the imaging lens.

5. In the third embodiment or the fourth embodiment,

Wherein the imaging lens comprises a double aspherical lens.

6. In any one of the third to fifth embodiments,

Wherein the focal length of the field lens is such that the field size for the imaging lens is less than a half angle of two to three degrees.

7. In any one of the third to sixth embodiments,

The focal length of the imaging lens is such that the imaging lens is not larger than the diameter of the field lens when NA is 0.2 at the substrate.

8. In the seventh embodiment,

Wherein the focal length of the imaging lens is equal to the diameter of the field lens.

9. In any one of the third to eighth embodiments,

Wherein a plurality of beams are imaged in a single combination of a field lens and an imaging lens.

10. In any one of the third to ninth embodiments,

Further comprising a focus control device arranged along a beam path of at least one of the plurality of beams from the modulator to the field lens.

11. The method of embodiment 10,

Wherein the focus control device comprises a folding mirror and a movable roof top.

12. In a third embodiment,

Further comprising a lens for collimating the beam from the first lens to the second lens.

13. The twelfth embodiment,

Wherein the lens on the path for collimating the beam is substantially fixed relative to the modulator.

14. In the third embodiment, the twelfth embodiment or the thirteenth embodiment,

Further comprising a lens in a path between the modulator and the first lens for focusing at least one of the plurality of beams toward the first lens.

15. The process of embodiment 14,

Wherein the lens on the path for focusing the beam is substantially fixed to the modulator.

16. In any one of the third or twelfth to fifteenth embodiments,

Wherein the optical axis of the field lens coincides with the optical axis of the imaging lens.

17. In a second embodiment,

Wherein the first of the at least two lenses comprises at least two sub-lenses, and at least one of the plurality of beams is focused in the middle of the two sub-lenses.

18. The process of embodiment 17,

Each of the at least two sub-lenses having substantially the same focal length.

19. In the second embodiment, the seventeenth embodiment or the eighteenth embodiment,

Wherein the first lens is configured to output a collimated beam towards the second of the at least two lenses.

20. In any one of the second embodiment, or the seventeenth through nineteenth embodiments,

Wherein the first lens of the at least two lenses is configured to move at a different speed than the second one of the at least two lenses.

21. The twentieth embodiment,

The speed of the second lens being twice the speed of the first lens.

22. In a first embodiment,

Each lens comprising a 4f telecentric in / telecentric out imaging system.

23. The process of embodiment 22,

4f. A lithographic apparatus comprising a telecentric in / telecentric out imaging system comprising at least six lenses.

24. In a first embodiment,

Further comprising a derotator between the modulator and the lens array.

25. The process of embodiment 24,

Wherein the di rotator comprises a Pechan prism.

26. The twenty-fourth embodiment or the twenty-fifth embodiment,

Wherein the divertor is configured to move to a half of the speed of the lens array.

27. In any one of the twenty-fourth to twenty-sixth embodiments,

Further comprising a parabolic curved mirror for reducing the size of the beam between the modulator and the de-rotator.

28. In any one of the twenty-fourth to twenty-seventh embodiments,

Further comprising a parabolic curved mirror for increasing the size of the beam between the di rotator and the lens array.

29. In any one of the first through twenty-eighth embodiments,

Wherein the lens array is rotated relative to the modulator.

30. In any one of the first through twenty-ninth embodiments,

Wherein the modulator comprises a plurality of individually controllable radiation sources for emitting electromagnetic radiation.

31. In any one of the first through twenty-ninth embodiments,

Wherein the modulator comprises a micromirror array.

32. In any one of the first to twenty-ninth embodiments,

Wherein the modulator comprises a radiation source and an acousto-optic modulator.

33. A device manufacturing method comprising:

Providing a plurality of beams modulated according to a required pattern; And

Projecting a plurality of beams onto a substrate using a lens array that receives a plurality of beams; And

Moving the lens array relative to the beam during projection

≪ / RTI >

34. The method of embodiment 33,

Each lens comprising at least two lenses arranged along a beam path of at least one of the plurality of beams from the source of the at least one beam to the substrate.

35. The method of embodiment 34,

Wherein the first of the at least two lenses comprises a field lens and the second of the at least two lenses comprises an imaging lens.

36. The method of embodiment 35,

Wherein the focal plane of the field lens coincides with the inverse focal plane of the imaging lens.

37. The 35th embodiment or the 36th embodiment,

Wherein the imaging lens comprises a double aspherical lens.

38. In any one of the 35th to 37th embodiments,

Wherein the focal length of the field lens is such that the field size for the imaging lens is less than a half angle of two to three degrees.

39. The method according to any one of < RTI ID = 0.0 > 35th < / RTI &

Wherein the focal length of the imaging lens is such that the imaging lens is not larger than the diameter of the field lens when NA is 0.2 at the substrate.

40. The process of embodiment 39,

Wherein the focal length of the imaging lens is equal to the diameter of the field lens.

41. In any one of the 35th to 40th embodiments,

Wherein the plurality of beams is imaged in a single combination of a field lens and an imaging lens.

42. In any one of the 35th to 41nd embodiments,

Using a focus control device between a source of at least one of the plurality of beams and a field lens.

43. The process of embodiment 42 wherein < RTI ID = 0.0 >

Wherein the focus control device comprises a folding mirror and a movable roof top.

44. The process of embodiment 35 wherein,

Further comprising the step of collimating at least one beam between the first lens and the second lens using a lens.

45. The process of embodiment 44,

Wherein the lens for collimating at least one beam is substantially fixed with respect to at least one beam.

46. The 35th embodiment, the 44th embodiment, or the 45th embodiment,

Further comprising the step of focusing at least one of the plurality of beams toward the first lens using a lens in a path between the source of the at least one beam and the first lens.

47. The process of embodiment 46 wherein < RTI ID = 0.0 >

Wherein the lens for focusing at least one beam is substantially fixed with respect to at least one beam.

48. The method according to any one of the thirty-fifth to 44th embodiments,

Wherein the optical axis of the field lens coincides with the optical axis of the corresponding imaging lens.

49. The process of embodiment 34,

Wherein the first of the at least two lenses comprises at least two sub-lenses, and at least one of the plurality of beams is focused in the middle of the two sub-lenses.

50. The process of embodiment 49,

Each of the at least two sub-lenses having substantially the same focal length.

51. The process of embodiment 34, 49 or 50,

Wherein the first lens is configured to output a collimated beam toward the second one of the at least two lenses.

52. The method according to any one of the thirty-fourth to fifty-first embodiments, or forty-eighth to fifty-first embodiments,

Moving a first one of the at least two lenses at a different speed than a second one of the at least two lenses.

53. The process of embodiment 52 wherein < RTI ID = 0.0 >

Wherein the speed of the second lens is twice the speed of the first lens.

54. The method of embodiment 33,

Wherein each lens comprises a 4f telecentric in / telecentric out imaging system.

55. The process of embodiment 54,

4f. A method of manufacturing a device, wherein the telecentric in / telecentric out imaging system comprises at least six lenses.

56. The method of embodiment 33,

Further comprising derotating the beam between the source of the beam and the lens array using a di rotator.

57. The method of embodiment 56,

Wherein the di rotator comprises a Pechan prism.

58. The process cartridge of embodiment 56 or claim 57,

And moving the di rotator to one half the speed of the lens array.

59. In any one of embodiments 56 to 58,

Further comprising using a parabolic curved mirror to reduce the size of the beam between the source of the beam and the detonator.

60. In any one of the 56th to 59th embodiments,

Further comprising increasing the size of the beam between the source of the beam and the detonator using a parabolic curved mirror.

61. In any one of embodiments 33 to 60,

And rotating the lens array relative to the beam.

62. The method according to any one of the thirty-third to sixty-first embodiments,

Each of the plurality of individually controllable radiation sources emitting each of the plurality of beams.

63. In any one of the 33nd to 61nd embodiments,

Wherein the micromirror array emits a plurality of beams.

64. In any one of embodiments 33 to 61,

Wherein the radiation source and the acousto-optic modulator generate a plurality of beams.

65. A lithographic apparatus comprising:

A substrate holder configured to hold a substrate;

A modulator configured to expose an exposure area of the substrate to a plurality of beams modulated according to a required pattern, the modulator comprising a plurality of individually controllable radiation sources for emitting electromagnetic radiation; And

A projection system configured to project a modulated beam onto a substrate, the projection system comprising a lens array for receiving a plurality of beams,

/ RTI >

Wherein the projection system is configured to move the lens array relative to the individually controllable radiation source during exposure of the exposure area.

66. A device manufacturing method comprising:

Providing a plurality of beams modulated according to a required pattern using a plurality of individually controllable radiation sources;

Projecting a plurality of beams onto a substrate using a lens array that receives a plurality of beams; And

Moving the lens array relative to the individually controllable radiation source during projection

≪ / RTI >

67. A lithographic apparatus comprising:

A substrate holder configured to hold a substrate;

A modulator configured to expose an exposure area of the substrate to a plurality of beams modulated according to a required pattern; And

A projection system configured to project a modulated beam onto a substrate, the projection system comprising a plurality of lens arrays for receiving a plurality of beams,

/ RTI >

Each lens array being arranged separately along a beam path of the plurality of beams.

68. The process of embodiment 67 wherein < RTI ID = 0.0 >

Wherein the projection system is configured to move the lens array relative to the modulator during exposure of the exposure area.

69. The 67th embodiment or the 68th embodiment,

Wherein the lenses of each array are arranged in a single body.

70. A lithographic apparatus comprising:

A substrate holder configured to hold a substrate;

A plurality of individually controllable radiation sources for emitting electromagnetic radiation and configured to expose an exposure area of the substrate to a plurality of beams modulated according to a required pattern, A modulator configured to move a plurality of radiation sources relative to an exposure area during exposure of the exposure area so as to be able to expose the exposure area; And

A projection system configured to project a modulated beam onto a substrate

/ RTI >

71. A lithographic apparatus comprising:

A plurality of individually controllable radiation sources configured to provide a plurality of beams modulated according to a desired pattern, wherein at least one of the plurality of radiation sources is a plurality of individually A controllable radiation source;

A substrate holder configured to hold a substrate; And

A projection system configured to project a modulated beam onto a substrate

/ RTI >

72. A lithographic apparatus comprising:

A substrate holder configured to hold a substrate;

A plurality of individually controllable radiation sources for emitting electromagnetic radiation, and configured to expose an exposure area of the substrate to a plurality of beams modulated according to a required pattern, wherein the radiation from at least one of the plurality of radiation sources is a plurality A modulator configured to move at least one radiation source of the plurality of radiation sources relative to the exposure area during exposure of the exposure area so as to be adjacent or overlapping with radiation from at least another radiation source of the radiation source; And

A projection system configured to project a modulated beam onto a substrate

/ RTI >

73. A lithographic apparatus comprising:

A substrate holder configured to hold a substrate;

A plurality of individually controllable radiation sources configured to provide a plurality of beams modulated according to a desired pattern in an exposure area of a substrate, wherein at least one of the plurality of radiation sources is positioned at a position capable of emitting radiation in the exposure area, A plurality of individually controllable radiation sources movable between positions in which the radiation can not be emitted; And

A projection system configured to project a modulated beam onto a substrate

/ RTI >

74. A lithographic apparatus comprising:

A substrate holder configured to hold a substrate;

A modulator configured to include a plurality of individually controllable radiation sources and configured to provide a plurality of beams modulated according to a desired pattern to an exposure area of the substrate, the plurality of radiation sources moving relative to the exposure area during exposure of the exposure area The modulator having a plurality of beam outputs to an exposure area, the beam output having a smaller area than an output area of a plurality of radiation sources; And

A projection system configured to project a modulated beam onto a substrate

/ RTI >

75. A lithographic apparatus comprising:

A substrate holder configured to hold a substrate;

A plurality of arrays of individually controllable radiation sources and configured to provide a plurality of beams modulated according to a required pattern to each exposure area of the substrate, wherein each array is moved relative to each exposure area, A modulator configured to move a plurality of beams from each array relative to each other or to move both the array and a plurality of beams with respect to each exposure region, wherein each of the plurality of arrays of exposure regions in the plurality of arrays, during use, A modulator adjacent or superimposed on each exposure area of the array; And

A projection system configured to project a modulated beam onto a substrate

/ RTI >

76. A lithographic apparatus comprising:

A substrate holder configured to hold a substrate;

A lithographic apparatus comprising: a plurality of individually controllable radiation sources, configured to provide a plurality of beams modulated according to a required pattern to an exposure region of a substrate, wherein each of the plurality of radiation sources is moved relative to the exposure region, A modulator configured to move a beam or to move both a plurality of respective radiation sources and a plurality of beams with respect to an exposure area, wherein each radiation source during use operates in a steep portion of each power / forward current curve; And

A projection system configured to project a modulated beam onto a substrate

/ RTI >

77. A lithographic apparatus comprising:

A substrate holder configured to hold a substrate;

A lithographic apparatus comprising: a plurality of individually controllable radiation sources, configured to provide a plurality of beams modulated according to a required pattern to an exposure region of a substrate, wherein each of the plurality of radiation sources is moved relative to the exposure region, A modulator configured to move a beam or to move both a plurality of respective radiation sources and a plurality of beams with respect to an exposure area, each of the individually controllable radiation sources comprising a blue-violet laser diode; And

A projection system configured to project a modulated beam onto a substrate

/ RTI >

78. A lithographic apparatus comprising:

A substrate holder configured to hold a substrate;

A modulator configured to include a plurality of individually controllable radiation sources and configured to provide a plurality of beams modulated according to a desired pattern to an exposure area of the substrate, the modulator configured to move each of the plurality of radiation sources relative to the exposure area, A modulator arranged in at least two concentric arrays; And

A projection system configured to project a modulated beam onto a substrate

/ RTI >

79. The method of embodiment 78,

Wherein at least one circular array of circular arrays is arranged in a staggered manner with at least one other circular array of circular arrays.

80. A lithographic apparatus comprising:

A substrate holder configured to hold a substrate;

A modulator configured to include a plurality of individually controllable radiation sources and configured to provide a plurality of beams modulated according to a desired pattern to an exposure area of the substrate, the modulator configured to move each of the plurality of radiation sources relative to the exposure area, A modulator arranged around a center of the structure and having an opening extending through the structure inside the plurality of radiation sources; And

A projection system configured to project a modulated beam onto a substrate

/ RTI >

81. The process of embodiment 80,

Further comprising a support for holding a substrate structure on or outside the radiation source.

82. The process of embodiment 81 wherein < RTI ID = 0.0 >

Wherein the support comprises a bearing that allows movement of the structure.

83. The 81st embodiment or the 82nd embodiment,

Wherein the support comprises a motor for moving the structure.

84. A lithographic apparatus comprising:

A substrate holder configured to hold a substrate;

A modulator configured to include a plurality of individually controllable radiation sources and configured to provide a plurality of beams modulated according to a desired pattern to an exposure area of the substrate, the modulator configured to move each of the plurality of radiation sources relative to the exposure area, A modulator arranged around the center of the structure;

A support for holding a substrate structure on or outside a radiation source, comprising: a support configured to rotate the structure or allow rotation of the structure; And

A projection system configured to project a modulated beam onto a substrate

/ RTI >

85. The process of embodiment 84 wherein < RTI ID = 0.0 >

Wherein the support includes a bearing that allows rotation of the structure.

86. The process of embodiment 84 or 85 wherein < RTI ID = 0.0 >

Wherein the support comprises a motor for rotating the structure.

87. A lithographic apparatus comprising:

A substrate holder configured to hold a substrate;

A modulator configured to include a plurality of individually controllable radiation sources and configured to provide a plurality of beams modulated according to a desired pattern to an exposure area of the substrate, the modulator configured to move each of the plurality of radiation sources relative to the exposure area, Wherein the movable structure is arranged on a movable plate, the movable structure being arranged on a movable plate; And

A projection system configured to project a modulated beam onto a substrate

/ RTI >

88. The process as set forth in claim 87,

Wherein the movable structure is rotatable.

89. The process as set forth in embodiment 87 or 88,

Wherein the movable plate is rotatable.

90. The process as claimed in claim 89,

Wherein the center of rotation of the movable plate is inconsistent with the center of rotation of the movable structure.

91. A lithographic apparatus comprising:

A substrate holder configured to hold a substrate;

A modulator configured to include a plurality of individually controllable radiation sources and configured to provide a plurality of beams modulated according to a desired pattern to an exposure area of the substrate, the modulator configured to move each of the plurality of radiation sources relative to the exposure area, A modulator arranged in a movable structure or on a movable structure;

A fluid channel arranged in a moveable structure to provide a temperature control fluid at least adjacent to the plurality of radiation sources; And

A projection system configured to project a modulated beam onto a substrate

/ RTI >

92. The process of embodiment 91 wherein < RTI ID = 0.0 >

Further comprising a sensor located within the movable structure or on the movable structure.

93. The process of embodiment 91 or 92, wherein < RTI ID = 0.0 >

Further comprising a sensor disposed at a location adjacent to at least one of the plurality of radiation sources but not disposed within or within the movable structure.

94. The process as in any one of embodiments 92 through 93,

Wherein the sensor comprises a temperature sensor.

95. In any one of the embodiments 92 to 94,

Wherein the sensor comprises a sensor configured to measure the rate of expansion and / or shrinkage of the structure.

96. A lithographic apparatus comprising:

A substrate holder configured to hold a substrate;

A modulator configured to include a plurality of individually controllable radiation sources and configured to provide a plurality of beams modulated according to a desired pattern to an exposure area of the substrate, the modulator configured to move each of the plurality of radiation sources relative to the exposure area, A modulator arranged in a movable structure or on a movable structure;

A fin arranged in the movable structure or on the movable structure to provide temperature control of the structure; And

A projection system configured to project a modulated beam onto a substrate

/ RTI >

97. The process of embodiment 96,

Further comprising a retaining pin cooperating with said pin on a movable structure or on a movable structure.

98. The process of embodiment 97,

Wherein the at least one pin comprises at least two pins on a movable structure or on a movable structure and wherein the pin is movable in or on a movable structure with at least one of the at least two pins in a movable structure, And at least one of the at least two fins on the substrate.

99. A lithographic apparatus comprising:

A substrate holder configured to hold a substrate;

A modulator configured to include a plurality of individually controllable radiation sources and configured to provide a plurality of beams modulated according to a desired pattern to an exposure area of the substrate, the modulator configured to move each of the plurality of radiation sources relative to the exposure area, A modulator arranged in a movable structure or on a movable structure;

A fluid supply device configured to supply fluid to an outer surface of the structure to control the temperature of the structure; And

A projection system configured to project a modulated beam onto a substrate

/ RTI >

100. The process of embodiment 99 wherein < RTI ID = 0.0 >

Wherein the fluid supply device is configured to supply gas.

101. The process of embodiment 99 wherein < RTI ID = 0.0 >

Wherein the fluid supply device is configured to supply liquid.

102. The process as claimed in claim 101,

Further comprising a fluid confinement structure configured to hold the liquid in contact with the structure.

[0073] 103. The process of embodiment 102,

Wherein the fluid confinement structure is configured to maintain a seal between the structure and the fluid confinement structure.

104. A lithographic apparatus comprising:

A substrate holder configured to hold a substrate;

A modulator configured to include a plurality of individually controllable radiation sources and configured to provide a plurality of beams modulated according to a desired pattern to an exposure region of the substrate, the plurality of radiation sources being adapted to move each of the plurality of radiation sources relative to the exposure region; And

A structurally separate lens that is attached to or near each radiation source of the plurality of radiation sources,

And a lithographic apparatus.

105. The process of embodiment 104,

Further comprising an actuator configured to displace the lens for each radiation source.

106. The process cartridge of embodiment 104 or 105 wherein:

Further comprising an actuator configured to displace the lens and each radiation source relative to the lens and the structure supporting each radiation source.

107. The process of embodiment 105 or 106 above,

Wherein the actuator is configured to move the lens at a degree of freedom of 3 or less.

108. In any one of embodiments 104-107,

Further comprising an aperture structure downstream from at least one of the plurality of radiation sources.

109. The reader as in any one of embodiments 104-107,

Wherein the lens is attached to a structure that supports the lens and each radiation source and has a high thermal conductivity.

110. A lithographic apparatus comprising:

A substrate holder configured to hold a substrate;

A modulator configured to include a plurality of individually controllable radiation sources and configured to provide a plurality of beams modulated according to a desired pattern to an exposure region of the substrate, the plurality of radiation sources being adapted to move each of the plurality of radiation sources relative to the exposure region;

A spatially coherent decay device configured to scramble the radiation from at least one of the plurality of radiation sources; And

A projection system configured to project a modulated beam onto a substrate

/ RTI >

111. The process of embodiment 110 wherein < RTI ID = 0.0 >

Wherein the spatially coherent decay device comprises a fixed plate and the at least one radiation source is movable relative to the plate.

112. The process of embodiment 110,

Wherein the spatially coherent decay device comprises at least one selected from: a phase modulator, a rotating plate, or an oscillating plate.

113. A lithographic apparatus comprising:

A substrate holder configured to hold a substrate;

A modulator configured to include a plurality of individually controllable radiation sources and configured to provide a plurality of beams modulated according to a desired pattern to an exposure region of the substrate, the plurality of radiation sources being adapted to move each of the plurality of radiation sources relative to the exposure region;

A sensor configured to measure a focus associated with at least one of the plurality of radiation sources, wherein at least a portion of the sensors is within the at least one radiation source or on the at least one radiation source; And

A projection system configured to project a modulated beam onto a substrate

/ RTI >

114. The process of embodiment 113 wherein < RTI ID = 0.0 >

Wherein the sensor is configured to individually measure a focus associated with each radiation source.

115. The process of embodiment 113 or claim 114,

Wherein the sensor is a knife edge focus detector.

116. A lithographic apparatus comprising:

A substrate holder configured to hold a substrate;

A modulator configured to include a plurality of individually controllable radiation sources and configured to provide a plurality of beams modulated according to a desired pattern to an exposure region of the substrate, the plurality of radiation sources being adapted to move each of the plurality of radiation sources relative to the exposure region;

A transmitter configured to wirelessly transmit signals and / or power to a plurality of radiation sources to control and / or control a plurality of radiation sources, respectively; And

A projection system configured to project a modulated beam onto a substrate

/ RTI >

117. The process of embodiment 116 wherein < RTI ID = 0.0 >

Wherein the signal comprises a plurality of signals and wherein the lithographic apparatus further comprises a demultiplexer for transmitting each of the plurality of signals in response to each radiation source.

118. A lithographic apparatus comprising:

A substrate holder configured to hold a substrate;

A modulator configured to include a plurality of individually controllable radiation sources and configured to provide a plurality of beams modulated according to a desired pattern to an exposure area of the substrate, the modulator configured to move each of the plurality of radiation sources relative to the exposure area, A modulator arranged in a movable structure or on a movable structure;

A single line configured to couple a controller to a movable structure and to transmit a plurality of signals and / or power to a plurality of radiation sources to control and / or control a plurality of radiation sources, respectively; And

A projection system configured to project a modulated beam onto a substrate

/ RTI >

119. The process of embodiment 118 wherein < RTI ID = 0.0 >

Wherein the signal comprises a plurality of signals and wherein the lithographic apparatus further comprises a demultiplexer for transmitting each of the plurality of signals in response to each radiation source.

120. The process of embodiment 118 or 119, wherein < RTI ID = 0.0 >

Wherein the line comprises an optical line.

121. A lithographic apparatus comprising:

A substrate holder configured to hold a substrate;

A modulator configured to include a plurality of individually controllable radiation sources and configured to provide a plurality of beams modulated according to a desired pattern to an exposure region of the substrate, the plurality of radiation sources being adapted to move each of the plurality of radiation sources relative to the exposure region;

A sensor for measuring a characteristic of radiation to be transmitted or transmitted towards the substrate by at least one radiation source of the plurality of radiation sources; And

A projection system configured to project a modulated beam onto a substrate

/ RTI >

122. The process of embodiment 121,

Wherein at least a portion of the sensors are located in or on the substrate holder.

123. The process of embodiment 122 wherein,

Wherein at least some of the sensors are located in or on the substrate holder at an external location of a region where the substrate is supported on the substrate holder.

124. The method as in any one of the embodiments 121-123,

Wherein at least some of the sensors are located at the substrate side which, in use, extends substantially in the scanning direction of the substrate.

125. The method as in any one of the embodiments 121-124,

Wherein at least some of the sensors are mounted on or in a frame for supporting a movable structure.

126. The method as in any one of embodiments 121-125,

Wherein the sensor is configured to measure radiation from at least one radiation source outside the exposure area.

127. The method as in any one of embodiments 121-126,

Wherein at least a portion of the sensor is movable.

128. The method as in any one of embodiments 121-123,

And a controller configured to calibrate at least one radiation source based on the sensor results.

129. A lithographic apparatus comprising:

A substrate holder configured to hold a substrate;

A modulator configured to include a plurality of individually controllable radiation sources and configured to provide a plurality of beams modulated according to a desired pattern to an exposure area of the substrate, the modulator configured to move each of the plurality of radiation sources relative to the exposure area, A modulator arranged in a movable structure or on a movable structure;

A sensor for measuring the position of the movable structure; And

A projection system configured to project a modulated beam onto a substrate

/ RTI >

130. The process of embodiment 129,

Wherein at least some of the sensors are mounted on or in a frame supporting a movable structure.

131. A lithographic apparatus comprising:

A substrate holder configured to hold a substrate;

A modulator configured to include a plurality of individually controllable radiation sources and configured to provide a plurality of beams modulated according to a desired pattern to an exposure area of the substrate, the modulator configured to move each of the plurality of radiation sources relative to the exposure area, The radiation source of which has or provides an identification;

A sensor configured to detect the identifier; And

A projection system configured to project a modulated beam onto a substrate

/ RTI >

132. The process of embodiment 131,

Wherein at least some of the sensors are mounted on or in a frame supporting a plurality of radiation sources.

133. The process of embodiment 131 or 132 above,

Wherein the identifier comprises a frequency of radiation from each radiation source.

134. The method as in any one of embodiments 131-133,

Wherein the identifier comprises at least one of: a bar code, a radio frequency identifier, or a mark.

135. A lithographic apparatus comprising:

A substrate holder configured to hold a substrate;

A modulator configured to include a plurality of individually controllable radiation sources and configured to provide a plurality of beams modulated according to a desired pattern to an exposure region of the substrate, the plurality of radiation sources being adapted to move each of the plurality of radiation sources relative to the exposure region;

A sensor configured to detect radiation from at least one of the plurality of radiation sources redirected by the substrate; And

A projection system configured to project a modulated beam onto a substrate

/ RTI >

136. The process of embodiment 135,

Wherein the sensor is configured to determine a position of a radiation spot from at least one radiation source incident on the substrate from the redirected radiation.

137. In any one of embodiments 70-136,

Wherein the modulator is configured to rotate at least one radiation source about an axis substantially parallel to the direction of propagation of the plurality of beams.

138. The method as in any one of embodiments 70-137,

Wherein the modulator is configured to translate at least one radiation source in a direction transverse to the direction of propagation of the plurality of beams.

[0071] 139. The method as in any one of embodiments 70-137,

The modulator comprising a beam deflector configured to move a plurality of beams.

140. The process of embodiment 139,

Wherein the beam deflector is selected from the group consisting of a mirror, a prism, or an acousto-optic modulator.

141. The process of embodiment 139,

Wherein the beam deflector comprises a polygon.

142. The process of embodiment 139,

Wherein the beam deflector is configured to vibrate.

143. The process of embodiment 139,

Wherein the beam deflector is configured to rotate.

144. The method as in any one of embodiments 70-143,

Wherein the substrate holder is configured to move the substrate in a direction in which a plurality of beams are provided.

145. The process of embodiment 144,

Wherein movement of the substrate is rotation.

146. The method as in any one of embodiments 70-145,

Wherein the plurality of radiation sources are movable together.

147. In any one of embodiments 70-146,

Wherein the plurality of radiation sources are arranged in a circle.

148. The method according to any one of embodiments 70-147,

And a plurality of radiation sources are arranged on the plate so as to be spaced apart from each other.

149. The method as in any one of embodiments 70-148,

Wherein the projection system comprises a lens array.

150. In any one of the 70th to 149th embodiments,

Wherein the projection system consists essentially of a lens array.

151. The process of embodiment 149 or claim 150,

Wherein the lens of the lens array has a high numerical aperture and the lithographic apparatus allows the substrate to be out of focus of the radiation associated with the lens in order to effectively lower the numerical aperture of the lens.

152. The method as in any one of embodiments 70-115,

Each radiation source comprising a laser diode.

153. The 152nd embodiment,

Wherein each laser diode is configured to emit radiation having a wavelength of about 405 nm.

154. In any one of embodiments 70-139,

Further comprising a temperature controller configured to maintain the plurality of radiation sources at a substantially constant temperature during exposure.

155. The process of embodiment 154,

The temperature controller is configured to heat the plurality of radiation sources to a substantially constant temperature or near a substantially constant temperature prior to exposure.

156. The method as in any one of embodiments 70-155,

Wherein the array comprises at least three distinct arrays arranged in a direction, each array comprising a plurality of radiation sources.

157. The method as in any one of embodiments 70 to 156,

Wherein the plurality of radiation sources comprises at least about 1,200 radiation sources.

[0352] 158. The method as in any one of embodiments 70-139,

Further comprising an alignment sensor for determining alignment between at least one of the plurality of radiation sources and the substrate.

159. The method according to any one of embodiments 70-138,

Further comprising a level sensor for determining the position of the substrate relative to the focal point of at least one of the plurality of beams.

160. The controller of embodiment 158 or 159,

Further comprising a controller configured to change the pattern based on the alignment sensor result and / or the level sensor result.

161. In any one of embodiments 70-160,

Further comprising a controller configured to change a pattern based on a temperature measurement of at least one of the plurality of radiation sources or a measurement associated with the at least one radiation source.

162. In any one of embodiments 70-161,

Further comprising a sensor for measuring a characteristic of radiation to be transmitted or transmitted towards the substrate by at least one radiation source of the plurality of radiation sources.

163. A lithographic apparatus comprising:

A plurality of individually controllable radiation sources configured to provide a plurality of beams modulated according to a required pattern;

A lens array including a plurality of small lenses; And

A substrate holder configured to hold a substrate

Lt; / RTI >

Wherein during use, there is no optical device other than the lens array between the plurality of radiation sources and the substrate.

164. A programmable patterning device,

A substrate having an array of radiation emission diodes spaced in at least one direction; And

The lens array on the downstream side of the radiation emitting diode

Wherein the programmable patterning device is a programmable patterning device.

165. The process of embodiment 164 wherein < RTI ID = 0.0 >

The lens array includes a microlens array having a plurality of microlenses, wherein the plurality of microlenses correspond to a plurality of emission diodes, and are arranged to focus the radiation selectively transmitted by each of the emission emission diodes to an array of microspots A programmable patterning device.

166. The process of any one of embodiments 164-116,

Wherein the radiation emitting diodes are spaced apart in at least two orthogonal directions.

167. The method as in any one of embodiments 164-166,

Wherein the radiation emitting diode is embedded in a material having a low thermal conductivity.

168. A device manufacturing method comprising:

Providing a plurality of beams modulated according to a required pattern toward an exposure area of the substrate using a plurality of individually controllable radiation sources;

Moving at least one radiation source of the plurality of radiation sources while providing a plurality of beams such that less than a plurality of radiation sources can expose the exposure area at any time; And

Projecting a plurality of beams onto a substrate

≪ / RTI >

169. A device manufacturing method comprising:

Providing a plurality of beams modulated according to a required pattern using a plurality of individually controllable radiation sources;

Moving at least one radiation source of the plurality of radiation sources between a position at which radiation is emitted and a position at which radiation is not emitted; And

Projecting a plurality of beams onto a substrate

≪ / RTI >

170. A device manufacturing method comprising:

Providing a modulated beam according to a required pattern using a plurality of individually controllable radiation sources, and projecting the modulated beam from the plurality of individually controllable radiation sources onto a substrate using only the lens array. Way.

171. A method for manufacturing a device,

Using a plurality of individually controllable radiation sources to provide a plurality of modulated electromagnetic radiation beams according to a required pattern;

Moving at least one radiation source of the plurality of radiation sources relative to the exposure area during exposure of the exposure area so that radiation from at least one radiation source of the plurality of radiation sources simultaneously adjoins or overlaps radiation from at least the other radiation source; And

Projecting a plurality of beams onto a substrate

≪ / RTI >

172. The method as in any one of embodiments 168-171,

Wherein said moving comprises rotating at least one radiation source about an axis substantially parallel to the direction of propagation of the plurality of beams.

173. In any one of the 168th through 172th embodiments,

Wherein the moving step comprises translating at least one radiation source in a direction transverse to the direction of propagation of the plurality of beams.

[0073] 174. In any one of embodiments 168-173,

And moving the plurality of beams by using a beam deflector.

175. The process of embodiment 174 wherein < RTI ID = 0.0 >

Wherein the beam deflector is selected from the group consisting of a mirror, a prism, or an acousto-optic modulator.

176. The process of embodiment 174 wherein < RTI ID = 0.0 >

Wherein the beam deflector comprises a polygon.

177. The process of embodiment 174 wherein < RTI ID = 0.0 >

Wherein the beam deflector is configured to vibrate.

178. The process of embodiment 174 wherein < RTI ID = 0.0 >

Wherein the beam deflector is configured to rotate.

179. The method as in any one of embodiments 168-178,

And moving the substrate in a direction in which a plurality of beams are provided.

180. The process of embodiment 179 wherein < RTI ID = 0.0 >

Wherein movement of the substrate is rotation.

181. In any one of embodiments 168-180,

And moving the plurality of radiation sources together.

182. The method as in any one of embodiments 168-181,

Wherein the plurality of radiation sources are arranged in a circular shape.

183. In any one of the 168th through 182nd embodiments,

And a plurality of radiation sources are arranged on the plate so as to be spaced apart from each other.

[0072] 184. The method according to any one of embodiments 168-183,

Wherein projecting comprises forming an image of each beam onto a substrate using a lens array.

185. The method as in any one of embodiments 168-184,

Wherein projecting comprises forming an image of each beam onto the substrate using substantially only the lens array.

186. The process of any one of embodiments 168-185,

Wherein each radiation source comprises a laser diode.

187. The process of embodiment 186 wherein < RTI ID = 0.0 >

Wherein each laser diode is configured to emit radiation having a wavelength of about 405 nm.

188. A flat panel display produced according to the method of any one of embodiments 168-187.

189. An integrated circuit device manufactured in accordance with the method of any one of embodiments 168-187.

190. A radiation system,

A plurality of moveable radiation arrays, each radiation array including a plurality of individually controllable radiation sources configured to provide a plurality of modulated beams according to a desired pattern; And

A motor configured to move each radiation array

. ≪ / RTI >

191. The process of embodiment 190 wherein < RTI ID = 0.0 >

Wherein the motor is configured to rotate each radiation array about an axis substantially parallel to the direction of propagation of the plurality of beams.

192. The 190th embodiment or 191nd embodiment,

Wherein the motor is configured to translate each radiation array in a direction transverse to the direction of propagation of the plurality of beams.

193. In any one of the 190th through 192th embodiments,

≪ / RTI > further comprising a beam deflector configured to move a plurality of beams.

194. The 193 < th > embodiment,

Wherein the beam deflector is selected from the group consisting of a mirror, a prism, or an acousto-optic modulator.

195. The process of embodiment 193 wherein < RTI ID = 0.0 >

Wherein the beam deflector comprises a polygon.

196. The process of embodiment 193 wherein < RTI ID = 0.0 >

Wherein the beam deflector is configured to vibrate.

197. The process of embodiment 193 wherein < RTI ID = 0.0 >

Wherein the beam deflector is configured to rotate.

198. The method as in any one of embodiments 190-197,

Wherein a plurality of radiation sources of each radiation array are movable together.

199. In any one of embodiments 190-198,

Wherein a plurality of radiation sources of each radiation array are arranged in a circle.

200. The method according to any one of embodiments 190-199,

Wherein a plurality of radiation sources of each radiation array are arranged spaced apart from one another on the plate.

201. The system as in any one of embodiments 190-100,

≪ / RTI > further comprising a lens array associated with each radiation array.

202. The process of embodiment 201 wherein < RTI ID = 0.0 >

Wherein each of the plurality of radiation sources of each radiation array is associated with a lens of a lens array associated with the radiation array.

203. The reader as in any one of embodiments 190 to 202,

Wherein each of the plurality of radiation sources of each radiation array comprises a laser diode.

204. The process of embodiment 203,

Wherein each laser diode is configured to emit radiation having a wavelength of about 405 nm.

205. A lithographic apparatus for exposing a substrate to radiation,

And a programmable patterning device having 100 to 25,000 individually addressable self-luminous elements.

206. The process of embodiment 205 wherein,

And at least 400 individually addressable self-luminous elements.

207. The process of embodiment 205 wherein,

And at least 1,000 individually addressable self-emitting elements.

208. The method as in any one of embodiments 205-207,

And less than 10,000 individually addressable self-emitting elements.

209. The method as in any one of embodiments 205-207,

And less than 5,000 individually addressable self-emitting elements.

210. The method as in any one of embodiments 205-209,

Wherein the individually addressable self-emitting element is a laser diode.

211. The method as in any one of embodiments 205 to 209,

Wherein the individually addressable self-emissive element is configured to have a spot size on a selected substrate in the range of 0.1 to 3 microns.

212. The method as in any one of embodiments 205 through 209,

Wherein the individually addressable self-emitting element is configured to have a spot size on a substrate of about 1 micron.

213. A lithographic apparatus for exposing a substrate to radiation,

And a programmable patterning device having 100 to 25,000 individually addressable self-luminous elements when normalized to an exposure field length of 10 cm.

214. The process of embodiment 213,

And at least 400 individually addressable self-luminous elements.

215. The process of embodiment 213,

And at least 1,000 individually addressable self-emitting elements.

216. The method as in any one of embodiments 213-215,

And less than 10,000 individually addressable self-emitting elements.

217. The method as in any one of embodiments 213-215,

And less than 5,000 individually addressable self-emitting elements.

218. The method as in any one of embodiments 213-27,

Wherein the individually addressable self-emitting element is a laser diode.

219. The method as in any one of the embodiments 213-27,

Wherein the individually addressable self-emissive element is configured to have a spot size on a selected substrate in the range of 0.1 to 3 microns.

220. The method as in any one of the embodiments 213-217,

Wherein the individually addressable self-emitting element is configured to have a spot size on a substrate of about 1 micron.

221. A programmable patterning device comprising a rotatable disk,

Wherein the disk has 100 to 25,000 individually addressable self-emissive elements.

222. The process of embodiment 221,

Wherein the disk comprises at least 400 individually addressable self-emitting elements.

223. The process as in the embodiment 221,

Wherein the disk comprises at least 1,000 individually addressable self-emitting elements.

224. In any one of embodiments 221-23,

Wherein the disk comprises less than 10,000 individually addressable self-emitting elements.

225. The method as in any one of the embodiments 221-23,

Wherein the disk comprises less than 5,000 individually addressable self-emitting elements.

226. The method as in any one of embodiments 221-255,

Wherein the individually addressable self-emitting element is a laser diode.

227. Use of one or more of the present invention in the manufacture of a flat panel display.

228. Use of one or more of the present invention in integrated circuit packaging.

229. A lithographic method comprising exposing a substrate to radiation using a programmable patterning device having a self-

Wherein during power-on, the power consumption of the programmable patterning device for operating the self-emitting element is less than 10 kW.

230. The process of embodiment 229 wherein < RTI ID = 0.0 >

Wherein the power consumption is less than 5 kW.

231. The method as in 229 or 230,

Wherein the power consumption is at least 100 mW.

232. In any one of embodiments 229 to 231,

Wherein the self-emitting element is a laser diode.

[0323] 233. The process as in embodiment 232,

Wherein the laser diode is a blue-violet laser diode.

234. A lithography method comprising exposing a substrate to radiation using a programmable patterning device having a self-

In use, the light output per light emitting element is at least 1 mW.

235. The process of embodiment 234 wherein < RTI ID = 0.0 >

Wherein the light output is at least 10 mW.

236. The process of embodiment 234 wherein < RTI ID = 0.0 >

Wherein the light output is at least 50 mW.

237. The method as in any one of embodiments 234 to 236,

Wherein the light output is less than 200 mW.

238. The method as in any one of the 234th to 237th embodiments,

Wherein the self-emitting element is a laser diode.

239. The process of embodiment 238 wherein < RTI ID = 0.0 >

Wherein the laser diode is a blue-violet laser diode.

240. The process of embodiment 234 wherein < RTI ID = 0.0 >

Wherein the light output is greater than 5 mW but not greater than 20 mW.

241. The process of embodiment 234 wherein < RTI ID = 0.0 >

Wherein the light output is greater than 5 mW but not greater than 30 mW.

242. The process of embodiment 234 wherein < RTI ID = 0.0 >

Wherein the light output is greater than 5 mW but not greater than 40 mW.

243. In any one of embodiments 234 to 242,

Wherein the self-emitting element operates in a single mode.

244. A lithographic apparatus comprising:

A programmable patterning device having a self-emitting element; And

A rotatable frame having an optical element for receiving radiation from the self-

Wherein the optical element is a refractive optical element.

245. A lithographic apparatus comprising:

A programmable patterning device having a self-emitting element; And

A rotatable frame having an optical element for receiving radiation from the self-

/ RTI >

Wherein the rotatable element has no reflective optical element for receiving radiation from any or all of the self-emitting elements.

246. A lithographic apparatus comprising:

A programmable patterning device; And

A rotatable frame comprising a plate with optical elements

/ RTI >

The plate surface with optical elements is flat.

247. Use of one or more of the present invention in the manufacture of a flat panel display.

248. Use of one or more of the present invention in integrated circuit packaging.

249. A flat panel display produced according to any of the above methods.

250. An integrated circuit device manufactured according to any of the above methods.

251. An apparatus,

An optical column capable of producing a pattern on a target portion of a substrate, the projection system comprising a rotatable frame and a plurality of lenses supported by the rotatable frame, the projection system comprising: a projection system configured to project a beam onto the substrate, An optical column;

An actuator configured to rotate the rotatable frame; And

An adjustable member for adjusting the position of at least one of the lenses with respect to the rotatable frame;

.

252. The process of embodiment 251 wherein < RTI ID = 0.0 >

Each lens being attached to the rotatable frame by a corresponding adjustable member.

253. The process of embodiment 251 or 252,

Wherein the adjustable member comprises a wedge part, the wedge part having a wedge shape when viewed in the direction of the axis of rotation of the rotatable frame.

[0254] 254. The process of embodiment 253 wherein:

Wherein the adjustable member further comprises a base portion interposed between the wedge portion and the rotatable frame, and a connection portion, wherein the wedge portion is interposed between the base portion and the connection portion.

255. The method of embodiment 254,

Wherein the wedge portion includes a through hole and an interconnecting bolt for attaching the connection portion to the base portion through the wedge portion extends through the through hole of the wedge portion.

256. The method of embodiment 255,

Wherein the strength of the interconnect bolt is lower than the strength of the base portion and the connection portion.

257. The method as in any one of operations 254 to 256,

Wherein the connection comprises a constriction in a direction perpendicular to the radial direction of the rotatable frame and a radially extending push / pull device through the constriction.

258. The method according to any one of < RTI ID = 0.0 > 251 < / RTI &

Wherein the rotational movement of the rotatable frame is greater than 500 RPM, greater than 1000 RPM, greater than 2000 RPM, or greater than 4000 RPM.

259. The method according to any one of < RTI ID = 0.0 > 251 < / RTI >

And at least one self-emission contrast device configured to emit the beam.

260. A method of manufacturing a device,

Generating a pattern on a target portion of a substrate by projecting a radiation beam onto the substrate using a projection system having a rotatable frame and a plurality of lenses supported by the rotatable frame; And

Moving the lens relative to the substrate by rotating the rotatable frame

Wherein the position of at least one of the lenses is adjusted relative to the rotatable frame by an adjustable member.

261. The process of embodiment 260,

Wherein focus adjustment is performed on at least one of the lenses,

Mounting the adjustable member on the rotatable frame, and

Adjusting the push / pull device extending in the radial direction of the rotatable frame through the constricted portion of the adjustable member

/ RTI >

Wherein the constriction is in a direction perpendicular to the radial direction of the rotatable frame.

262. The process of embodiment 260 or 261 wherein < RTI ID = 0.0 >

The adjustable member including a wedge portion and an interconnecting bolt extending radially of the rotatable frame through the through hole of the wedge portion,

Adjusting the position of the wedge portion to position the corresponding lens in the radial direction, and

Tightening the interconnect bolt to adjust the position of the lens in the radial direction

≪ / RTI >

263. In any one of the embodiments 260-262,

Further comprising emitting the radiation beam from at least one self-emitting contrast device.

264. As an apparatus,

An array of lenses or individually controllable elements supported by a rotatable frame;

An actuator configured to rotate the rotatable frame; And

An adjustable member for adjusting the position of at least one of the lens and / or the individually controllable element with respect to the rotatable frame;

.

265. An adjustable member,

For adjusting the position of at least one lens of the plurality of lenses or an individually controllable element of the array of individually controllable elements with respect to a rotatable frame supporting an array of lenses or individually controllable elements, Adjustable member.

266. An apparatus,

An optical column capable of producing a pattern on a target portion of a substrate, comprising: a plurality of individually controllable elements configured to emit a beam, the plurality of individually controllable elements being optically column;

An actuator configured to move the movable frame; And

An adjustable member for adjusting the position of at least one of the individually controllable elements with respect to the movable frame;

.

267. The method of any one of embodiment 251, 252 or 266,

Wherein the adjustable member comprises an adjusting mass and the adjusting mass is adjustable in a direction substantially parallel to the axis of rotation of the movable frame.

268. The method of any one of embodiment 251, 252 or 267,

Wherein the adjustable member includes a base portion on which the adjustable member is mounted to the movable frame, a balance mass for holding at least one lens of the lens, and a connection structure for connecting the balance mass to the base portion Wherein the balance mass and the assembly of the at least one lens are substantially balanced with respect to a plane perpendicular to the axis of rotation of the movable frame.

269. The process of embodiment 268 wherein < RTI ID = 0.0 >

The plane crossing the coupling structure.

270. The process of embodiment 268 or 269,

Wherein the balance mass comprises an adjusting mass.

271. The method according to any one of < RTI ID = 0.0 > 268 < / RTI >

Wherein the adjustable member further comprises a spring load adjustment structure configured to apply a force between the movable frame and the balance mass.

272. The method as in any one of embodiments 268 to 271,

Wherein the base portion includes an adjustment mechanism that allows the position of the balance mass side portion of the base portion to be adjusted relative to the frame side portion of the base portion.

Although specific reference may be made in this text to the use of lithographic apparatus in the manufacture of specific devices or structures (e.g., integrated circuits or flat panel displays), the lithographic apparatus and lithographic methods described herein may have other applications . Such applications include, but are not limited to, integrated circuits, integrated optical systems, guidance and detection patterns for magnetic domain memories, flat panel displays, LCDs, OLED displays, thin film magnetic heads, microelectromechanical systems (MEMS) (Such as flexible packaging, packaging (e. G., Flip chip, rewiring, etc.), flexible display or electronics (such as paper rollable, bendable, defect free, consistent, robust, Or lightweight displays or electronic devices, such as flexible plastic displays), and the like. Also for example in flat panel displays, the present apparatus and method can be used to contribute to the creation of various layers, such as thin film transistor layers and / or color filter layers. As used herein, the term "wafer" or "die" is used interchangeably with the more general terms "substrate" or "target portion", respectively, As will be understood by those skilled in the art. The substrate referred to herein may be processed in a test track, typically a track (typically a device that applies a layer of resist to a substrate and develops the exposed resist), a metrology tool, and / or an inspection tool. To the extent applicable, the teachings of the present disclosure may be applied to the substrate processing apparatus and other substrate processing apparatuses. Also, for example, the substrate may be processed multiple times to create a multi-layer IC, so that the term substrate used herein may refer to a substrate that already contains multiple processed layers.

The flat panel display substrate may have a rectangular shape. A lithographic apparatus designed to expose a substrate of this type can cover the entire width of a rectangular substrate or provide an exposure area covering a portion of the width (e.g., 1/2 of the width). While the substrate is scanned below the exposure area, the patterning device may be scanned simultaneously through the patterned beam, or the patterning device may provide a variable pattern. In this way, all or a portion of the desired pattern is transferred to the substrate. If the exposure area covers the entire width of the substrate, the exposure can be completed in a single scan. If the exposure area covers, for example, 1/2 of the substrate width, then the substrate may be moved laterally after the first scan to perform additional scanning to expose the remainder of the substrate.

The term "patterning device " as used herein should be broadly interpreted as referring to any device that can be used to modulate a cross section of a radiation beam, such as to create a pattern on (part of) a substrate. It should be noted that the pattern imparted to the radiation beam may not exactly correspond to the pattern desired in the target portion of the substrate, for example if the pattern comprises a phase-reversal feature or a so-called assist feature. Similarly, a pattern ultimately generated on a substrate may not correspond to a pattern formed at any one moment on an array of individually controllable elements. In a configuration in which a final pattern formed on each portion of the substrate is formed over a given period or a given number of exposures and during such a given period or number of exposures the pattern on the array of individually controllable elements and / The position is changed. Generally, a pattern created on a target portion of a substrate may be formed in a device, such as an integrated circuit or a specific functional layer of a flat panel display (e.g., a color filter layer of a flat panel display or a thin film transistor layer of a flat panel display) ). Examples of such patterning devices include, for example, reticles, programmable mirror arrays, laser diode arrays, light emitting diode arrays, grating light valves, and LCD arrays. Including an electronically programmable patterning device having a plurality of programmable elements that impart a pattern to a radiation beam by modulating a phase of a portion of the radiation beam with respect to an adjacent portion of the radiation beam, (E.g., a patterning device that includes a plurality of programmable elements capable of modulating the intensity of a portion of a radiation beam, respectively (e.g., all of the features mentioned in the preceding sentence except for the reticle) Devices) are collectively referred to herein as "contrast devices ". In one embodiment, the patterning device includes at least 10 programmable elements, such as at least 100, at least 1,000, at least 10,000, at least 100,000, at least 1,000,000, or at least 10,000,000 programmable elements. Embodiments of some of these devices are discussed in more detail below.

- Programmable mirror array. The programmable mirror array may include a matrix-addressable surface having a viscoelastic control layer and a reflective surface. According to the basic principle of this device, for example, the addressed area of the reflective surface reflects the incoming radiation as diffracted radiation, while the unaddressed area reflects the incoming radiation as undiffracted radiation. With a suitable spatial filter, the undiffracted radiation can be filtered out of the reflected beam, leaving only the diffracted radiation reaching the substrate. In this way, the beam is patterned according to the addressing pattern of the matrix-addressable surface. Alternatively, the filter may filter the diffracted radiation, leaving the undiffracted radiation to reach the substrate. An array of diffractive optical MEMS devices may also be used in a corresponding manner. A diffractive optical MEMS device may include a plurality of reflective ribbons that may be deformed relative to one another to form a grating that reflects the incoming radiation to the diffracted radiation. Additional embodiments of the programmable mirror array utilize a matrix arrangement of miniature mirrors and each of these mirrors can be individually tilted about an axis by applying a suitable local electric field or using piezoelectric actuation means. The degree of tilt defines the state of each mirror. Such a mirror is controllable by an appropriate control signal from the controller if the element is free of defects. Each defect-free element is controllable so that any state of a series of states can be employed to adjust the intensity of the corresponding pixel in the projected radiation pattern. Once again, the mirrors are matrix-addressable such that the addressed mirrors reflect the incident radiation beam in a direction different from the unaddressed mirror; In this way, the reflected beam can be patterned according to the addressing pattern of the matrix-addressable mirror. The required matrix addressing can be performed using suitable electronic means. More information on the mirror arrays referred to herein can be found, for example, in U.S. Pat. Nos. 5,296,891 and 5,523,193, and PCT patent applications WO 98/38597 and WO 98/33096, Which is incorporated herein by reference in its entirety.

- Programmable LCD array. An example of such a configuration is provided in U.S. Patent No. 5,229,872, which is incorporated herein by reference in its entirety.

The lithographic apparatus may include one or more patterning devices, e.g., one or more contrasting devices. For example, such devices may have a plurality of arrays of individually controllable elements that are controlled independently of each other. In such an arrangement, some or all of the arrays of individually controllable elements may share a common illumination system (or part of an illumination system), a common support structure for an array of individually controllable elements, and / A portion of the projection system).

If pre-biasing of features, optical proximity correction features, phase shift techniques and / or multiple exposure techniques are used, for example, a pattern "displayed" on an array of individually controllable elements It should be appreciated that the pattern may be substantially different from the pattern eventually transferred to or onto the substrate. Similarly, a pattern ultimately generated on a substrate may not correspond to a pattern formed at any one moment on an array of individually controllable elements. In a configuration in which a final pattern formed on each portion of the substrate is formed over a given period or a given number of exposures and during such a given period or number of exposures the pattern on the array of individually controllable elements and / The position is changed.

The projection system and / or the illumination system may include various types of optical components for directing, shaping, or controlling the radiation beam, such as refractive, reflective, magnetic, Type of optical element, or any combination thereof.

The lithographic apparatus may be of a type having two (e.g., dual stage) or more substrate tables (and / or two or more patterning device tables). In such "multiple stage" devices it is possible to use additional tables in parallel, or to use one or more other tables for exposure while performing a preliminary process on one or more tables.

The lithographic apparatus may also be of a type wherein at least a portion of a substrate is filled with an "immersion liquid ", e.g. water, having a relatively high refractive index to fill the space between the projection system and the substrate. The immersion liquid may also be added to another space within the lithographic apparatus, for example, a space between the patterning device and the projection system. The immersion technique is used to increase the NA of the projection system. The term "immersion" as used herein does not imply that a structure, such as a substrate, must be submerged in liquid, rather that the liquid is positioned, for example, between the projection system and the substrate during exposure.

The apparatus may also be provided with a fluid treatment cell (e.g., to selectively adhere a chemical to the substrate or selectively modify the surface structure of the substrate) to allow interaction between the fluid and the irradiated portion of the substrate .

In one embodiment, the substrate may have a substantially circular shape and may optionally have a notched and / or planarized edge along a portion of the periphery. In one embodiment, the substrate has a polygonal shape, e.g., a rectangular shape. Embodiments in which the substrate has a substantially circular shape include those having a diameter of at least 25 mm, such as at least 50 mm, at least 75 mm, at least 100 mm, at least 125 mm, at least 150 mm, at least 175 mm, at least 200 mm, at least 250 mm, ≪ / RTI > In one embodiment, the diameter of the substrate is less than 500 mm, less than 400 mm, less than 350 mm, less than 300 mm, less than 250 mm, less than 200 mm, less than 150 mm, less than 100 mm, or less than 75 mm. Embodiments in which the substrate is polygonal, e.g., rectangular, include at least one side, e.g., at least two sides, or at least three sides, at least three sides of at least 5 cm, such as at least 25 cm, at least 50 cm, at least 100 cm, At least 200 cm, or at least 250 cm. In one embodiment, the length of at least one side of the substrate is no greater than 1,000 cm, such as no greater than 750 cm, no greater than 500 cm, no greater than 350 cm, no greater than 250 cm, no greater than 150 cm, or no greater than 75 cm. In one embodiment, the substrate is a rectangular substrate having a length of about 250-350 cm and a width of about 250-300 cm. The thickness of the substrate may vary and may depend, for example, to some extent on the substrate material and / or substrate dimensions. In one embodiment, the thickness is at least 50 microns, such as at least 100 microns, at least 200 microns, at least 300 microns, at least 400 microns, at least 500 microns, or at least 600 microns. In one embodiment, the thickness of the substrate is not more than 5,000 mu m, such as not more than 3,500 mu m, not more than 2,500 mu m, not more than 1,750 mu m, not more than 1,250 mu m, not more than 1,000 mu m, Or 300 mu m or less. The substrate referred to herein can be processed in a track, typically a device that applies a layer of resist to a substrate and develops the exposed resist, before and after exposure. The properties of the substrate can be measured before and after exposure, for example in metrology tools and / or inspection tools.

In one embodiment, a resist layer is provided on the substrate. In one embodiment, the substrate is a wafer, for example a semiconductor wafer. In one embodiment, the wafer material is selected from the group consisting of Si, SiGe, SiGeC, SiC, Ge, GaAs, InP and InAs. In one embodiment, the wafer is a III / V compound semiconductor wafer. In one embodiment, the wafer is a silicon wafer. In one embodiment, the substrate is a ceramic substrate. In one embodiment, the substrate is a glass substrate. Glass substrates may be useful, for example, in the manufacture of flat panel displays and liquid crystal display panels. In one embodiment, the substrate is a plastic substrate. In one embodiment, the substrate is transparent (with respect to the naked eye). In one embodiment, the substrate is colored. In one embodiment, the substrate is colorless.

In one embodiment, the patterning device 104 is described and / or shown as being on the substrate 114, but alternatively or additionally may be located below the substrate 114. Also, in one embodiment, the patterning device 104 and the substrate 114 may be positioned side by side, e.g., the patterning device 104 and the substrate 114 extend vertically, and the pattern is projected horizontally. In one embodiment, the patterning device 104 is provided for exposing at least two opposite sides of the substrate 114. For example, to expose these sides, at least two patterning devices 104 may be provided, at least on opposite sides of the substrate 114. In one embodiment, a single patterning device 104 for projecting one side of the substrate 114 and a suitable optical device (not shown) for projecting the pattern from the single patterning device 104 onto the other side of the substrate 114 (E.g., a beam-oriented mirror) may be provided.
An embodiment according to the present invention is a device manufacturing method,
Creating a pattern on a target portion of the substrate by projecting a radiation beam onto the substrate using a projection system having a rotatable frame and a plurality of lenses supported by the rotatable frame; And
Moving the lens relative to the substrate by rotating the rotatable frame
Wherein the position of at least one of the lenses is adjusted relative to the rotatable frame by an adjustable member.
In a further embodiment of the method according to the invention, focus adjustment is performed on at least one of the lenses,
Mounting the adjustable member on the rotatable frame, and
Adjusting the push / pull device extending in the radial direction of the rotatable frame through the constricted portion of the adjustable member
/ RTI >
The constricted portion is a direction perpendicular to the radial direction of the rotatable frame.
In a further embodiment of the method according to the invention the adjustable member comprises a wedge portion and an interconnecting bolt extending radially of the rotatable frame through the through hole of the wedge portion,
Adjusting the position of the wedge portion to position the corresponding lens in the radial direction, and
Tightening the interconnect bolt to adjust the position of the lens in the radial direction
.
A further embodiment of the method according to the invention comprises the step of emitting the radiation beam from at least one self-emitting contrast device.

While specific embodiments of the invention have been described above, it will be appreciated that the invention may be practiced otherwise than as described. For example, an embodiment of the present invention may be implemented as a computer program containing one or more sequences of machine-readable instructions describing a method as disclosed above, or a data storage medium (e.g., Semiconductor memory, magnetic or optical disk).

Furthermore, although the present invention has been disclosed in the context of specific embodiments and examples, it will be apparent to those of ordinary skill in the art that the present invention extends beyond the specifically disclosed embodiments to other alternative embodiments and / or uses of the invention, As shown in FIG. Additionally, although numerous modifications and variations of the present invention have been shown and described in detail, other modifications that are within the scope of this invention based on this disclosure will be apparent to those skilled in the art. For example, it is contemplated that various combinations or subcombinations of certain features and aspects of the embodiments are within the scope of the invention. Thus, it will be appreciated that various features and aspects of the disclosed embodiments may be combined or substituted with one another to form the various modes of the disclosed invention. For example, in one embodiment, the movable individually controllable elements of FIG. 5 may be combined with non-movable arrays of individually controllable elements, for example to provide or have a backup system.

Thus, while various embodiments of the present invention have been described above, it should be understood that they have been presented by way of example only, and not limitation. It will be apparent to those skilled in the art that various changes in form and details may be made therein without departing from the spirit and scope of the invention. Accordingly, the spirit and scope of the present invention should not be limited by any of the above-described exemplary embodiments, but should be defined only in accordance with the following claims and their equivalents.

Claims (22)

As an apparatus,
An optical column capable of producing a pattern on a target portion of a substrate, the projection column comprising a movable frame and a plurality of lenses supported by the movable frame, the projection system comprising: a projection system configured to project a beam onto the substrate, An optical column;
An actuator configured to rotate the movable frame; And
An adjustable member for adjusting the position of at least one of the lenses with respect to the movable frame;
Wherein the movable frame comprises a rotatable frame,
Wherein adjusting the position of the at least one lens of the lens with respect to the movable frame includes focus adjustment and / or radial adjustment. The method according to claim 1,
Each lens being attached to the rotatable frame by a corresponding adjustable member. 3. The method according to claim 1 or 2,
Wherein the adjustable member comprises a wedge part, the wedge part having a wedge shape when viewed in the direction of the axis of rotation of the rotatable frame. The method of claim 3,
Wherein the adjustable member further comprises a base portion interposed between the wedge portion and the rotatable frame and a connection portion, wherein the wedge portion is interposed between the base portion and the connection portion. 5. The method of claim 4,
Wherein the wedge portion includes a through hole and an interconnecting bolt for attaching the connection portion to the base portion through the wedge portion extends through the through hole of the wedge portion. 6. The method of claim 5,
Wherein the strength of the interconnect bolt is lower than the strength of the base portion and the connection portion. 5. The method of claim 4,
Wherein the connection comprises a constriction in a direction perpendicular to the radial direction of the rotatable frame and a radially extending push / pull device through the constriction. 3. The method according to claim 1 or 2,
Wherein the rotational movement of the movable frame is greater than 500 RPM. 3. The method according to claim 1 or 2,
And at least one self-emission contrast device configured to emit the beam. As an apparatus,
An array of lenses or individually controllable elements supported by a rotatable frame;
An actuator configured to rotate the rotatable frame; And
An adjustable member for adjusting the position of at least one of the lens and / or the individually controllable element with respect to the rotatable frame;
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Wherein adjusting the position of at least one of the at least one lens and / or the individually controllable element of the lens with respect to the rotatable frame includes focus adjustment and / or radial adjustment. As an adjustable member,
For adjusting the position of at least one lens of the plurality of lenses or an individually controllable element of the array of individually controllable elements with respect to a rotatable frame supporting an array of lenses or individually controllable elements ,
Wherein adjusting the position of at least one lens of the plurality of lenses or the individually controllable element with respect to the rotatable frame comprises one or both of focus adjustment and radial adjustment. As an apparatus,
An optical column capable of producing a pattern on a target portion of a substrate, comprising: a plurality of individually controllable elements configured to emit a beam, the plurality of individually controllable elements being optically column;
An actuator configured to move the movable frame; And
An adjustable member for adjusting the position of at least one of the individually controllable elements with respect to the movable frame;
Wherein adjusting the position of at least one of the individually controllable elements with respect to the moveable frame includes focus adjustment and / or radial adjustment. 13. The method according to any one of claims 1 to 12,
Wherein the adjustable member comprises an adjusting mass and the adjusting mass is adjustable in a direction parallel to the axis of rotation of the movable frame. 13. The method according to any one of claims 1 to 12,
Wherein the adjustable member includes a base portion on which the adjustable member is mounted to the movable frame, a balance mass for holding at least one lens of the lens, and a connection structure for connecting the balance mass to the base portion Wherein the balance mass and the assembly of the at least one lens are balanced against a plane perpendicular to the axis of rotation of the movable frame. 15. The method of claim 14,
Wherein the balance mass comprises an adjusting mass. delete delete delete delete delete delete delete

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