KR101471357B1 - Packaging box for transport of mask substrate - Google Patents

Abstract

And more particularly, to a packaging box for transporting a mask substrate, which minimizes the generation of static electricity and minimizes adhesion of contaminants such as particles adhering to the blank mask and the photomask when the packaging box for transporting the mask substrate for FPD is transported.
The blank mask and the mask for transporting the photomask according to the present invention may include a body part for housing the blank mask and the photomask, a transfer part disposed on one side of the body part, And a washer provided between the body portion, the transfer portion, and the gap fur and the bolt, wherein the gapper and the washer are arranged such that the static electricity generated in the transfer portion is separated from the gap portion between the body portion, And is made of a nonconductive material in order to prevent the body portion from being charged.

Description

{PACKAGING BOX FOR TRANSPORT OF MASK SUBSTRATE}

The present invention relates to a packaging box for transporting a mask substrate, and more particularly, to a packaging box for transporting a mask substrate capable of minimizing adhesion of impurities including particles during transportation of a blank mask for FPD (Flat Pannel Display) .

Blank masks are widely used for manufacturing semiconductor and flat panel displays (FPD) as raw materials of photomasks used in photolithography processes. These blank masks and photomasks are generally classified into a binary mask type and a phase inversion mask type. A mask in binary form is formed by sequentially laminating a light-shielding film, an antireflection film, and a resist film on a transparent substrate. A phase reversed mask is formed by sequentially laminating a phase reversal film, a light-shielding film, an antireflection film, and a resist film on a transparent substrate.

The blank mask is generally manufactured by a blank mask manufacturer and then transported to a photomask manufacturer for photomask manufacture, and the photomask is transferred to a manufacturer for producing semiconductors and FPDs. Therefore, in order to manufacture a high-quality photomask and a semiconductor and an FPD using the same, the blank mask, which is a raw material thereof, must be transported to maintain a high quality state.

For example, the blank mask should be protected from being adhered to the blank mask during transportation and to protect the blank mask from damage during transportation. In particular, minimizing the adherence of foreign matter to the blank mask, which is a raw material of the photomask, for forming a fine pattern is indispensable not only in the manufacturing process of the blank mask but also in the transportation process.

Meanwhile, a blank mask and a transparent substrate for a photomask used for manufacturing an FPD panel such as a TFT-LCD (Thin Film Transistor Liquid Crystal Display), an OLED (Organic Light Emitting Diode), and a PDP (Plasma Display Pannel) As it has a size, it has considerable weight and it is difficult to transport it. Accordingly, in order to minimize workability and impact during transportation, a transporting box for transporting a transparent substrate is used by attaching a transporting wheel to the lower end of the packaging box.

However, when the packaging box is moved, static electricity is generated due to rotation of the lower end conveyance wheel and friction with the ground, and the static electricity is charged on the entire packaging box, so that contaminants such as particles in the box are transferred to the blank mask A phenomenon of sticking to the mask occurred. Accordingly, the contaminants such as the adhered particles act as defect sources of the blank mask and the photomask, thereby deteriorating the quality of the blank mask and the photomask.

Disclosed is a packaging box for transporting a mask substrate, which minimizes the generation of static electricity and minimizes adhesion of contaminants such as particles to the blank mask and the photomask when transporting the packing box for transporting the mask substrate for FPD.

The mask for transporting a mask substrate for transporting a blank mask and a photomask according to the present invention may comprise a body part for containing the blank mask and the photomask, a transport part disposed on one side of the body part, And a washer arranged to surround the side surface of the bolt, wherein the washer is made of a nonconductive material so that static electricity generated in the transfer part is prevented from being charged to the body part.

And a gap portion provided between the body portion and the transfer portion and a connection portion provided between the gap portion and the transfer portion, wherein the bolt wrapped by the washer passes through the gap portion and the connection portion.

The washer has a length penetrating at least the connection portion or has a length passing through at least one of the gapper or the body portion including the connection portion.

The gapper is made of a nonconductive material in order to prevent static electricity generated in the transferring part from being charged to the body part.

The conveying unit includes a conveying unit body, a wheel attached to the conveying unit body, and a connection part that is attached to the conveying unit body and disposed on the bottom surface of the body part.

At least one of the connecting portion, the gapper and the body portion has a hole into which the bolt is inserted, and the inner surface of the hole has a shape of a screw thread.

The outer surface of the washer is in the form of a thread.

The gapper and the washer may be made of BAREX resin, Ultra High Molecular Weight Polyethylene (UHMW PE), Polyethylene (PE), Polypropylene (PP), Polytetrafluoroethylene PTFE), polycarbonate (PC), polyethyleneterephthalate (PET), polymethylmethacrylate (PMMA), polyvinylchloride (PVC), Teflon, polyimide ). ≪ / RTI >

And a ground line connected to the conveyance unit and discharging static electricity generated in the conveyance unit to the outside.

And a cushioning portion provided between the connecting portion and the transferring body portion. The cushioning portion has one of a shape of a spring and a shape of a hydraulic shock absorber using an air.

The present invention is characterized in that a connecting gapper provided between a body portion of a packaging box for carrying an FPD blank mask or a photomask and a conveying portion including a wheel and a washer surrounding the bolt are formed of a nonconductive material or a ground line Respectively.

Therefore, the static electricity of the transfer part caused by the friction between the wheel and the ground during the transportation of the packaging box can be prevented from being charged to the body of the packaging box, so that the particles adhering to the blank mask or the photomask inside the packaging box can be minimized, The quality of the mask and the photomask can be improved.

In addition, it is possible to prevent the blank mask or the photomask, which has a considerable weight, from being damaged by the impact during the transfer process by forming the buffer part between the transfer part and the body part, thereby improving the quality of the blank mask and the photomask.

BRIEF DESCRIPTION OF THE DRAWINGS FIG. 1A and FIG. 1B are simplified views for explaining a packaging box for transporting a mask substrate according to an embodiment of the present invention.
Fig. 2 is a view showing part A of Fig. 1A and Fig. 1B. Fig.
Fig. 3 is a view showing part A of Fig. 1A and Fig. 1B. Fig.

Hereinafter, preferred embodiments of the present invention will be described in detail with reference to the accompanying drawings. However, it should be understood that the embodiments have been used merely to aid in the description and illustration of the present invention and not to limit the scope of the present invention. It will thus be appreciated that various modifications and similar embodiments are possible in light of the embodiments. Accordingly, the true scope of protection of the present invention should be determined by the technical matters of the claims.

BRIEF DESCRIPTION OF THE DRAWINGS FIG. 1 is a schematic view for explaining a packaging box for transporting a mask substrate according to an embodiment of the present invention, and FIGS. 2 and 3 are views showing a portion A of FIG.

Referring to FIGS. 1 (a) and 1 (b), a packaging box 100 for transporting a mask substrate according to an embodiment of the present invention includes a body 110 and a transfer unit 130.

The body 110 includes a blank mask 102 for an FPD in which at least one metal film and a photoresist are formed on a transparent substrate, or a photomask 102 on which at least one or more metal film patterns are formed A lower body 112 and an upper body 114.

The transfer unit 130 may be provided on the body 110 in order to facilitate the transfer operation of the masks 102 as the FPD blank mask and the photomask 102 are gradually enlarged, Respectively. At least two transfer units 130 are attached to the bottom and upper bodies 112 and 114 of the body 110, respectively.

2, the transfer unit 130 includes a wheel 134 for easily moving the transfer unit body 132 and the body unit 110, and a body 134 for fixing the body unit 110 and the transfer unit 130. [ And a connection portion 136 disposed opposite to the surface 110a. A gapper 140 is disposed between the transfer unit 130 and the body bottom surface 110a. The gapper 140 is disposed between the connecting portion 136 of the transferring portion 130 and the bottom surface 110a of the body portion so as to enhance the fastening of the coupling portion 136 and the body bottom surface 110a, So that it is prevented from being charged.

The connection part 136 of the transfer part 130, the gapper 140 and the bottom part 110a of the body part are fastened by the bolts 170. At least four bolts 170 are used for one transfer part 130 . A washer 180 for strengthening the fastening force of the bolt 170 is disposed at a portion where the bolt 170 is fastened. The bolt 170 has a length corresponding to the connecting portion 136, the gapper 140 and the body bottom surface 110a and preferably has a length not passing through the body bottom surface 110a.

The washer 180 serves to prevent the static electricity of the transfer part 130 generated by the friction between the wheel 134 and the floor from being charged directly to the body part 110 by the metal bolt 170 do. The washer 180 has a shape that wraps around the side surface of the bolt 170 and has a length at least passing through the connecting portion 136 so that static electricity from the bolt 170 is not charged by the connecting portion 136. Further, the washer 180 may have a length that passes through the gapper 140 or the body 110 as required.

Although not shown, the connecting portion 136, the gapper 140, the body bottom surface 110a, and the washer 180 are fixed to the inner surface of the hole through which the bolt 170 passes, This can be in the form of a screw thread. The outer surface of the washer 180 may be in the form of a thread for easy connection with the connecting portion 136, the gapper 140, and the bottom surface 110a of the body portion. The gapper 104 has a sufficient rigidity on the bottom surface 110a of the body part so that the connection part 130 using the bolt 170 and the bottom part 110a of the body part can be used to fasten and transfer the transfer part 130 For example, when the thickness of the body bottom surface 110a is large, it may not be provided.

The gapper 140 and the washer 180 are made of a non-conductive material, preferably a polymer material, rather than a metal. More specifically, static electricity of about 3 kV or more is generated in the transporting unit 130 in accordance with the moving distance of the masking box 100. The static electricity may be charged to the body 110 through the gapper 140, the washer 180 and the bolts 170. In order to prevent the static electricity, the static electricity may be transferred to the gap 130 between the transfer part 130 and the body bottom surface 110a, 140 and the washer 180 are formed of a non-conductive material rather than a metallic material. The nonconductive material may be, for example, a BAREX resin, an ultra high molecular weight polyethylene (UHMW PE), a polyethylene (PE), a polypropylene (PP), a poly (PTFE), polycarbonate (PC), polyethyleneterephthalate (PET), polymethylmethacrylate (PMMA), polyvinylchloride (PVC), Teflon (polytetrafluoroethylene) , And polyimide (PI), and it is preferable to use all polymer materials having a rigidity of at least a certain level.

In addition, the mask box 100 for packaging transports the static electricity generated from the transfer unit 130 to the outside, that is, the bottom of the path to be transferred, so as to minimize the static electricity charged to the body 110, And a ground line 150 connected to the ground line 150. The ground line 150 connected to the transfer unit 130 is preferably fastened to a portion to which the transfer unit body 132 and the wheel 134 are connected and may be connected to any part of the transfer unit body 132.

Referring to FIG. 3, the transfer unit 130 may further include a buffer unit 160 provided between the transfer unit body 132 and the connection unit 136. In detail, as the blank mask and the photomask for the FPD are gradually increased in size, they have a considerable weight, so that an impact may be applied to the masks during the transfer process, thereby causing breakage of the masks. The buffer 160 serves as a device for preventing the impact in the transfer process from being directly applied to the masks. The buffer 160 preferably has a shape of a spring, a shape of a hydraulic pressure buffer using oil or air, and may have any other form capable of buffering .

(Example)

Hereinafter, the static electricity generation amount and the particle number evaluation according to the movement of the packing box for transporting the mask substrate according to the present invention will be described in more detail with reference to the following examples.

≪ Examples 1-3 >

And a transportation box including a wheel on the lower surface was attached to form a packaging box for transporting the mask substrate.

2, a washer 180, a body bottom surface 110a, and a transfer unit (not shown) are formed to surround the bolt 170 connecting the conveyance unit 130 and the bottom surface 110a of the body of the packaging box, 130 are formed of a non-conductive material to form a packaging box for transporting the mask substrate.

In Embodiment 2, a gap box 140 made of stainless steel (SUS) and a washer 180 are used, and a ground line 150 is connected to the transfer unit 130 to form a packaging box for transporting the mask substrate.

In Embodiment 3, a packing box for transporting a mask substrate is constructed by using a gaper 140 and a washer 180 of a nonconductive material, and connecting a ground line 150 to the transfer unit 130.

≪ Comparative Examples 1 and 2 >

In Comparative Examples 1 and 2, a washer 180 surrounding the bolt 170 connecting the conveying unit 130 and the bottom surface 110a of the body of the packaging box, and a washer 180 between the bottom of the body 110a and the conveying unit 130 The gapper 140 is formed of a metal material such as stainless steel and brass to constitute a packaging box for transporting the mask substrate.

In order to evaluate the amount of generated static electricity and the number of particles according to the packing boxes for transporting a mask substrate constructed as in the above-described Examples 1 to 3 and Comparative Examples 1 and 2, an FPD The mask for transporting the mask substrate was moved at a speed of 600 mm / sec.

The amount of static electricity was measured every 24,000 mm, 48,000 mm, 72,000 mm and 96,000 mm movement of the mask box transporting box, and the amount of static electricity was measured at nine points of each of the lower body and the upper body, and averaged. In addition, the number of particles was measured using a particle measurement apparatus for the blank mask.

Gapper and Washer Material Ground line Change in static capacitance (KV) Particle number change (ea) Before moving After Variation Before moving Before moving Variation Example 1 Polymer X 0.8 1.2 0.4 590 832 242 Example 2 SUS O 0.95 1.8 0.85 331 932 601 Example 3 Polymer O 0.8 1.05 0.25 239 311 72 Comparative Example 1 SUS X 0.8 3.3 2.5 1,518 3,137 1,619 Comparative Example 2 Brass X 0.8 3.5 2.7 1,426 3,325 1,899

Referring to Table 1, in Example 1 in which the gapper and the washer were formed of a nonconductive material, a change in the static amount before and after movement in the body of the packaging box occurred at a maximum of 0.4 kV in accordance with the distance of the packaging box, Of the total number of workers. In Example 2, in which a gap line and a washer were formed of a metal material and a ground line was formed in the transporting portion, a maximum amount of change of the body portion before and after movement of the packaging box was about 0.85 kV, and the number of particles was 601 Respectively. In the third embodiment, in which a gap line and a washer are formed of a non-conductive material and a ground line is formed in the transfer part, a maximum amount of change of the body part before and after movement of the packaging box is about 0.25 kV, Respectively.

On the contrary, in Comparative Examples 1 and 2 in which the gapper and the washer were formed of a metal material, the maximum amount of change in the body portion before and after the movement of the packaging box occurred by about 2.5 kV and 2.7 kV, respectively, and the number of particles increased by 1,619 and 1,899 Respectively.

Accordingly, it has been found that the number of the attached parts decreases when the gapper and the washer of the packaging box are formed of a non-conductive material or the ground line is attached according to the embodiment of the present invention. Particularly, as in Embodiment 3, when the gapper and the washer are formed in a nonconductive state and the ground line is attached, the transfer of static electricity to the body portion of the transfer portion is minimized, so that attachment of particles can be minimized .

As described above, according to the present invention, there is provided a blank mask for an FPD such as a TFT-LCD, an OLED, a PDP or the like, a connecting gapper provided between a body portion of a packaging box for transporting a photomask and a conveying portion including a wheel, Is formed of a nonconductive material, or a ground line is further attached to the conveyance portion. As a result, the static electricity of the transferring portion caused by the friction between the wheel and the ground during transportation of the packaging box can be prevented from being charged to the body portion of the packaging box, so that the particles adhering to the blank mask or the photomask inside the packaging box can be minimized . In addition, it is possible to prevent the blank mask or the photomask, which has a considerable weight, from being damaged by the impact during the transfer process by forming the buffer part between the transfer part and the body part.

Therefore, the adhesion of the particles to the blank mask and the photomask inside the packaging box can be minimized, and the quality of the blank mask and the photomask can be improved.

Although the present invention has been described with reference to the experimental examples, the technical scope of the present invention is not limited to the ranges described in the above experimental examples. It will be apparent to those skilled in the art that various modifications and improvements can be made to the examples described above. It is apparent from the description of the claims that the form of such modification or improvement can be included in the technical scope of the present invention.

100: Packing box for transporting mask substrate
102: Blank mask
110:
130:
132: transfer body
134: wheel
136: Connection
140: Gapper
150: ground line
160: buffer
170: Bolt
180: Washer

Claims (10)

1. A packaging box for transporting a mask substrate for transporting a blank mask and a photomask,
A body portion for containing the blank mask and the photomask therein;
A conveying part disposed on one surface of the body part;
A gapper provided between the body part and the transfer part;
At least one bolt connecting the body portion and the transfer portion; And
And a washer disposed to surround a side surface of the bolt,
Wherein the washer is made of a nonconductive material so that static electricity generated in the transferring part is prevented from being charged to the body part. The method according to claim 1,
Further comprising a connection part provided between the gap fur and the transfer part, wherein the bolt wrapped by the washer is passed through the gap fur and the connection part. 3. The method of claim 2,
Wherein the washer has a length penetrating at least the connection portion or has a length including at least one of the gapper and the body portion including the connection portion. 3. The method of claim 2,
Wherein the gapper is made of a nonconductive material in order to prevent static electricity generated in the transferring part from being charged to the body part. The method according to claim 1,
Wherein the transfer unit includes a transfer unit body, wheels attached to the transfer unit body, and a connection part attached to the transfer unit body, the connection parts being disposed on the bottom surface of the body part in opposition to each other. 3. The method of claim 2,
Wherein at least one of the connecting portion, the gapper and the body portion has a hole into which the bolt is inserted, and the inner surface of the hole has a shape of a screw thread. 3. The method of claim 2,
Wherein the outer surface of the washer is in the form of a thread. 3. The method of claim 2,
The gapper and the washer may be made of BAREX resin, Ultra High Molecular Weight Polyethylene (UHMW PE), Polyethylene (PE), Polypropylene (PP), Polytetrafluoroethylene PTFE), polycarbonate (PC), polyethyleneterephthalate (PET), polymethylmethacrylate (PMMA), polyvinylchloride (PVC), Teflon, polyimide And a polymeric material including the polymeric material. The method according to claim 1,
And a ground line connected to the transfer unit for discharging static electricity generated in the transfer unit to the outside. 6. The method of claim 5,
And a cushioning portion provided between the connecting portion and the transferring body portion, wherein the cushioning portion has one of a shape of a spring and a shape of a hydraulic shock absorber using an oil pressure. Packing box.

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