KR101460053B1 - 전자 생성 및 포커싱 홈들을 갖는 캐소드, 이온 소스 및 관련 방법 - Google Patents

전자 생성 및 포커싱 홈들을 갖는 캐소드, 이온 소스 및 관련 방법 Download PDF

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Publication number
KR101460053B1
KR101460053B1 KR1020107000056A KR20107000056A KR101460053B1 KR 101460053 B1 KR101460053 B1 KR 101460053B1 KR 1020107000056 A KR1020107000056 A KR 1020107000056A KR 20107000056 A KR20107000056 A KR 20107000056A KR 101460053 B1 KR101460053 B1 KR 101460053B1
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South Korea
Prior art keywords
cathode
grooves
angled
ion
ion source
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KR1020107000056A
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English (en)
Korean (ko)
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KR20100041732A (ko
Inventor
닐 제이. 바쏨
Original Assignee
베리안 세미콘덕터 이큅먼트 어소시에이츠, 인크.
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    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/02—Details
    • H01J37/04—Arrangements of electrodes and associated parts for generating or controlling the discharge, e.g. electron-optical arrangement or ion-optical arrangement
    • H01J37/08—Ion sources; Ion guns
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J27/00—Ion beam tubes
    • H01J27/02—Ion sources; Ion guns
    • H01J27/20—Ion sources; Ion guns using particle beam bombardment, e.g. ionisers
    • H01J27/205—Ion sources; Ion guns using particle beam bombardment, e.g. ionisers with electrons, e.g. electron impact ionisation, electron attachment
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J2237/00—Discharge tubes exposing object to beam, e.g. for analysis treatment, etching, imaging
    • H01J2237/06—Sources
    • H01J2237/061—Construction
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J2237/00—Discharge tubes exposing object to beam, e.g. for analysis treatment, etching, imaging
    • H01J2237/06—Sources
    • H01J2237/08—Ion sources
    • H01J2237/0815—Methods of ionisation
    • H01J2237/082—Electron beam
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J2237/00—Discharge tubes exposing object to beam, e.g. for analysis treatment, etching, imaging
    • H01J2237/30—Electron or ion beam tubes for processing objects
    • H01J2237/317—Processing objects on a microscale
    • H01J2237/31701—Ion implantation

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  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Combustion & Propulsion (AREA)
  • Analytical Chemistry (AREA)
  • Electron Sources, Ion Sources (AREA)
KR1020107000056A 2007-06-26 2008-06-09 전자 생성 및 포커싱 홈들을 갖는 캐소드, 이온 소스 및 관련 방법 Active KR101460053B1 (ko)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
US11/768,242 US7723699B2 (en) 2007-06-26 2007-06-26 Cathode having electron production and focusing grooves, ion source and related method
US11/768,242 2007-06-26
PCT/US2008/066312 WO2009002692A2 (en) 2007-06-26 2008-06-09 Cathode having electron production and focusing grooves, ion source and related method

Publications (2)

Publication Number Publication Date
KR20100041732A KR20100041732A (ko) 2010-04-22
KR101460053B1 true KR101460053B1 (ko) 2014-11-11

Family

ID=40159236

Family Applications (1)

Application Number Title Priority Date Filing Date
KR1020107000056A Active KR101460053B1 (ko) 2007-06-26 2008-06-09 전자 생성 및 포커싱 홈들을 갖는 캐소드, 이온 소스 및 관련 방법

Country Status (6)

Country Link
US (2) US7723699B2 (https=)
JP (1) JP5481375B2 (https=)
KR (1) KR101460053B1 (https=)
CN (1) CN101689488B (https=)
TW (1) TWI441228B (https=)
WO (1) WO2009002692A2 (https=)

Families Citing this family (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US7723699B2 (en) * 2007-06-26 2010-05-25 Varian Semiconductor Equipment Associates, Inc. Cathode having electron production and focusing grooves, ion source and related method
JP5363413B2 (ja) * 2010-05-10 2013-12-11 電気化学工業株式会社 電子源
JP6100619B2 (ja) * 2013-06-04 2017-03-22 株式会社日立ハイテクノロジーズ イオン源およびイオンミリング装置
US9818570B2 (en) * 2015-10-23 2017-11-14 Varian Semiconductor Equipment Associates, Inc. Ion source for multiple charged species
CN106449386A (zh) * 2016-09-26 2017-02-22 中国电子科技集团公司第四十八研究所 一种用于SiC晶片掺杂的离子注入方法及装置
TWI730548B (zh) * 2018-12-17 2021-06-11 美商應用材料股份有限公司 用於光學設備製造的電子束裝置
KR20240132726A (ko) 2023-02-27 2024-09-04 삼성전자주식회사 이온 발생 장치용 리펠러, 이온 발생 장치 및 반도체 웨이퍼 이온 주입 장치
WO2025243543A1 (ja) * 2024-05-24 2025-11-27 国立大学法人豊橋技術科学大学 真空アーク放電発生装置における陰極および真空アーク放電発生装置

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH09512659A (ja) * 1994-03-24 1997-12-16 フェド．コーポレーション 選択的形状の電界放出電子ビーム源、およびそれと共に使用する蛍光体配列
JPH10199430A (ja) * 1996-12-31 1998-07-31 Eaton Corp イオン注入機に用いるためのイオン源、カソード、及びそのエンドキャップ
JP2005310681A (ja) * 2004-04-23 2005-11-04 Matsushita Electric Works Ltd イオン発生装置

Family Cites Families (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3594885A (en) * 1969-06-16 1971-07-27 Varian Associates Method for fabricating a dimpled concave dispenser cathode incorporating a grid
JP2787899B2 (ja) * 1995-03-20 1998-08-20 日本電気株式会社 冷陰極およびこれを用いた電子銃とマイクロ波管
JPH0963981A (ja) * 1995-08-29 1997-03-07 Hitachi Ltd イオン発生装置およびそれを用いたイオン注入装置
US5703375A (en) * 1996-08-02 1997-12-30 Eaton Corporation Method and apparatus for ion beam neutralization
JP3970497B2 (ja) 2000-03-30 2007-09-05 株式会社神戸製鋼所 イオン源を用いたイオンビーム発生方法，イオン源
CN100524577C (zh) * 2000-07-19 2009-08-05 松下电器产业株式会社 电子发射元件及采用其的图象显示装置
US6576909B2 (en) * 2001-02-28 2003-06-10 International Business Machines Corp. Ion generation chamber
US6936145B2 (en) * 2002-02-28 2005-08-30 Ionedge Corporation Coating method and apparatus
US7723699B2 (en) * 2007-06-26 2010-05-25 Varian Semiconductor Equipment Associates, Inc. Cathode having electron production and focusing grooves, ion source and related method

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH09512659A (ja) * 1994-03-24 1997-12-16 フェド．コーポレーション 選択的形状の電界放出電子ビーム源、およびそれと共に使用する蛍光体配列
JPH10199430A (ja) * 1996-12-31 1998-07-31 Eaton Corp イオン注入機に用いるためのイオン源、カソード、及びそのエンドキャップ
JP2005310681A (ja) * 2004-04-23 2005-11-04 Matsushita Electric Works Ltd イオン発生装置

Also Published As

Publication number Publication date
WO2009002692A2 (en) 2008-12-31
US20090001281A1 (en) 2009-01-01
JP2010532082A (ja) 2010-09-30
WO2009002692A3 (en) 2009-02-26
US7723699B2 (en) 2010-05-25
TWI441228B (zh) 2014-06-11
KR20100041732A (ko) 2010-04-22
TW200903554A (en) 2009-01-16
US20100140495A1 (en) 2010-06-10
JP5481375B2 (ja) 2014-04-23
CN101689488A (zh) 2010-03-31
US8022371B2 (en) 2011-09-20
CN101689488B (zh) 2012-05-30

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