KR101439402B1 - Three dimensional nanoscale pattern fabrication apparatus and method using electrojetting - Google Patents

Three dimensional nanoscale pattern fabrication apparatus and method using electrojetting Download PDF

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KR101439402B1
KR101439402B1 KR1020130099563A KR20130099563A KR101439402B1 KR 101439402 B1 KR101439402 B1 KR 101439402B1 KR 1020130099563 A KR1020130099563 A KR 1020130099563A KR 20130099563 A KR20130099563 A KR 20130099563A KR 101439402 B1 KR101439402 B1 KR 101439402B1
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South Korea
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electrode plate
syringe tip
polymer
jet
nano
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KR1020130099563A
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Korean (ko)
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김호영
이민희
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서울대학교산학협력단
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Priority to KR1020130099563A priority Critical patent/KR101439402B1/en
Priority to US14/465,839 priority patent/US9770865B2/en
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Publication of KR101439402B1 publication Critical patent/KR101439402B1/en

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    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B82—NANOTECHNOLOGY
    • B82B—NANOSTRUCTURES FORMED BY MANIPULATION OF INDIVIDUAL ATOMS, MOLECULES, OR LIMITED COLLECTIONS OF ATOMS OR MOLECULES AS DISCRETE UNITS; MANUFACTURE OR TREATMENT THEREOF
    • B82B3/00—Manufacture or treatment of nanostructures by manipulation of individual atoms or molecules, or limited collections of atoms or molecules as discrete units
    • B82B3/0009—Forming specific nanostructures
    • B82B3/0038—Manufacturing processes for forming specific nanostructures not provided for in groups B82B3/0014 - B82B3/0033
    • D—TEXTILES; PAPER
    • D01—NATURAL OR MAN-MADE THREADS OR FIBRES; SPINNING
    • D01D—MECHANICAL METHODS OR APPARATUS IN THE MANUFACTURE OF ARTIFICIAL FILAMENTS, THREADS, FIBRES, BRISTLES OR RIBBONS
    • D01D5/00—Formation of filaments, threads, or the like
    • D01D5/0007—Electro-spinning
    • D01D5/0015—Electro-spinning characterised by the initial state of the material
    • D—TEXTILES; PAPER
    • D01—NATURAL OR MAN-MADE THREADS OR FIBRES; SPINNING
    • D01D—MECHANICAL METHODS OR APPARATUS IN THE MANUFACTURE OF ARTIFICIAL FILAMENTS, THREADS, FIBRES, BRISTLES OR RIBBONS
    • D01D5/00—Formation of filaments, threads, or the like
    • D01D5/0007—Electro-spinning
    • D01D5/0061—Electro-spinning characterised by the electro-spinning apparatus
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B82—NANOTECHNOLOGY
    • B82Y—SPECIFIC USES OR APPLICATIONS OF NANOSTRUCTURES; MEASUREMENT OR ANALYSIS OF NANOSTRUCTURES; MANUFACTURE OR TREATMENT OF NANOSTRUCTURES
    • B82Y40/00—Manufacture or treatment of nanostructures

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  • Engineering & Computer Science (AREA)
  • Chemical & Material Sciences (AREA)
  • Mechanical Engineering (AREA)
  • Textile Engineering (AREA)
  • Crystallography & Structural Chemistry (AREA)
  • Nanotechnology (AREA)
  • Manufacturing & Machinery (AREA)
  • Spinning Methods And Devices For Manufacturing Artificial Fibers (AREA)
  • Nonwoven Fabrics (AREA)

Abstract

The present invention relates to an apparatus or method for forming a three-dimensional nanopattern by radiating polymer nano-jet from one side of a syringe tip. A three-dimensional nanopattern forming apparatus according to the present invention includes a syringe tip at which a polymer nanojet is radiated at one end and an electrode plate positioned at a radial direction side of the polymer nanojet and forming an electric field between the syringe tip, The electrode plate includes a first electrode plate and a second electrode plate, a third electrode plate connected to the first electrode plate and the second electrode plate, and a third electrode plate provided with a pattern forming unit in which the polymer nano- A syringe tip or electrode plate having an electrode plate and capable of relative movement between a first electrode plate, a second electrode plate, and a third electrode plate, and a relative reciprocating movement above the pattern forming portion, And a mobile device capable of moving.
Thus, the present invention overcomes the instability inherent in the electrospinning process of the nanojet and suppresses the wiping instability of the nanojet, thereby stably forming a three-dimensional nanopattern.

Description

TECHNICAL FIELD [0001] The present invention relates to a three-dimensional nano-pattern forming apparatus using electrospinning,

The present invention relates to an apparatus and a method for forming a three-dimensional nanopattern using electrospinning. More particularly, the present invention relates to an apparatus and a method for overcoming instability inherent in electrospinning of a nanojet and forming a stable three-dimensional nanopattern

BACKGROUND ART [0002] Lithography technology used for manufacturing various devices such as semiconductor integrated circuits, image pickup devices, or liquid crystal displays is a core technology of various microfabrication processes. However, such a lithography technique is disadvantageous in that the process is complicated and expensive.

That is, in the conventional lithography technique, in manufacturing a single device in which a plurality of layers are stacked, a mask is formed to form one layer, and a photoresist (PR, Photo Resist) And then an exposure step of transferring the pattern of the mask onto the material is performed, and the like, and the process is complicated and troublesome.

To reduce this inefficiency, various nano fabrication techniques have begun to be studied. Nano fabrication technology is a technology that can directly deposit a specific material on a target without a mask. It uses technology such as STM (Scanning Tunneling Microscope) or AFM (Atomic Force Microscope) or ALD (Atomic Layer Deposition) have.

DPN (Dip Pen Nanolithography) technology or Inkjet Printing technology is also proposed. However, DPN technology has the merit of achieving very fine resolution, but it has a drawback that it is very slow, and inkjet printing has advantages of speed, but it can not lower the resolution. Therefore, these techniques are problematic in that they are applied in accordance with the trend of lithography technology becoming increasingly precise and increasing in size.

Therefore, as one of the newly proposed methods, there is a method of forming a nanopattern by using a polymer nanojet ejected through electrospinning. At this time, the electrospinning refers to a method of obtaining nanoscale polymer jets by applying a strong electric field to a polymer droplet.

1 is a view showing a state in which polymer nano-jet is extracted through electrospinning. As shown in Fig. 1, when a strong electric field is applied to the polymer droplet 1, a repulsive force is generated between the molecules in the liquid due to the polarization in the liquid, and eventually, The polymer nanotubes 3 having a small thickness are emitted.

According to such electrospinning, fine fibers having a diameter of 1 탆 or less can be obtained easily, and thus the electrospinning technique is attracting attention in a field requiring a small scale fiber such as a filter, a drug delivery, a protective clothing material, and a cell proliferation.

Here, in order to form the nanopattern using the electrospinning method, the polymer nanofiber must be stably supplied, and the polymer nanofiber should be placed on the surface where the pattern is formed.

However, as shown in Fig. 2, the polymer nanojet 3, which is radiated from the syringe 5 by electrospinning, emits by self-repulsion of the charges present on the surface thereof and is blown out in a very unstable locus As a result, the polymer nano-jet can not be formed on the surface 7 on which the pattern is to be formed, making it difficult to apply it to the formation of the three-dimensional nanopattern.

On the other hand, as in Patent Document 1, there has been proposed a method of stacking polymers on a sharp-tip non-conductive plate such as a needle, but there is a limit to forming a three-dimensional structure.

Patent Document 1: Korean Patent Publication No. 2010-0119630

It is an object of the present invention to provide an apparatus and a method capable of overcoming the instability inherent in electrospinning of a nanojet and forming a stable three-dimensional nanopattern.

Other objects and methods of the present invention can be understood by the following description and can be more clearly understood by the embodiments of the present invention. Further, the objects and advantages of the present invention can be realized by means of the means shown in the claims and their combinations.

A three-dimensional nanopattern forming apparatus according to an embodiment of the present invention includes a syringe tip in which a polymer nanojet is radiated at one end and an electrode plate positioned at a radial direction side of the polymer nanojet and forming an electric field between the syringe tip And the electrode plate is connected to the first electrode plate and the second electrode plate, the first electrode plate and the second electrode plate, and the polymer nano jet is adhered to form a pattern forming unit for forming a three-dimensional nano pattern on the upper part And a moving device capable of moving the syringe tip or the electrode plate so as to enable relative movement between the first electrode plate, the second electrode plate, and the third electrode plate of the syringe tip, , And the polymer nanojet from the syringe tip reciprocates on the upper side of the pattern forming portion.

Here, the moving device can move the syringe tip or the electrode plate so that the syringe tip is relatively movable on the upper side of the pattern forming portion.

Further, the electrode plate is formed on the substrate, and the moving device can move the substrate.

In addition, the radial direction of the polymer nanojet and the direction in which the syringe tip or electrode plate is moved may be perpendicular to each other.

The third electrode plate has a long shape in the longitudinal direction and may be connected to the first electrode plate and the second electrode plate at both ends in the longitudinal direction.

Here, the three-dimensional nanopattern may be formed by stacking the nano-jet radiated from the syringe tip in the longitudinal direction in the pattern forming portion as the moving device reciprocates the electrode plate in the longitudinal direction of the third electrode plate .

The third electrode plate may have a waveform shape in the longitudinal direction, and may be connected to the first electrode plate and the second electrode plate at both ends thereof.

Here, the three-dimensional nanopattern may be formed by stacking the nano-jet radiated from the syringe tip in the longitudinal direction in the pattern forming portion as the moving device reciprocates the electrode plate in the longitudinal direction of the third electrode plate .

A method of forming a three-dimensional nanopattern according to an embodiment of the present invention includes: forming a three-dimensional nanopattern on an upper side of a substrate by radiating a polymer nanojet toward a substrate from one side of the syringe tip, A step in which the polymer nanojet is emitted from the syringe tip by an electric field between the syringe tip and the first electrode plate; and a step in which the syringe tip is located in the pattern forming portion of the third electrode plate connected to the first electrode plate And polymer nano-jet radiated from the syringe tip are laminated as the polymer nano-jet radiated from the syringe tip is reciprocated relative to the pattern forming portion on the upper side of the pattern forming portion to form a three-dimensional nano- And the like.

Here, the third electrode plate has a long shape in the longitudinal direction and may be connected to the first electrode plate and the second electrode plate at both ends in the longitudinal direction.

The present invention overcomes the instability inherent in electrospinning of the polymer nanojet and suppresses the wiping instability of the polymer nanojet, and at the same time, the polymer nano-jet is magnetically laminated and can stably form a three-dimensional nanopattern.

1 is a view showing a state in which polymer nano-jet is extracted through electrospinning,
2 is a view showing a state in which an unstable polymer nano-jet is radiated through an electrospinning process,
3 is a schematic view of a three-dimensional nanopattern forming apparatus according to an embodiment of the present invention,
4 is a view showing a shape of a third electrode according to an embodiment of the present invention,
5 is a view showing a state in which a three-dimensional nanopattern is laminated by a three-dimensional nanopatterning apparatus according to an embodiment of the present invention,
6 is a view showing a rectangular three-dimensional nano pattern formed by the three-dimensional nano-pattern forming apparatus according to the embodiment of the present invention,
7 is a flowchart of a three-dimensional nanopattern formation method according to an embodiment of the present invention,
8 is a diagram of a three-dimensional nanopattern formed in accordance with an embodiment of the present invention.

Hereinafter, one embodiment of the present invention will be described in detail with reference to the drawings.

In the following description, a detailed description of known functions and configurations incorporated herein will be omitted when it may make the subject matter of the present invention rather unclear. The following terms are defined in consideration of the functions of the present invention, and may be changed according to the intention or custom of the user, the operator, and the like. Therefore, the definition should be based on the contents throughout this specification.

The technical idea of the present invention is determined by the claims, and the following embodiments are merely a means for effectively explaining the technical idea of the present invention to a person having ordinary skill in the art to which the present invention belongs.

Hereinafter, an apparatus for forming a three-dimensional nanopattern using a polymer nanojet radiated by an electrospinning method will be described in detail.

3 is a schematic view of a three-dimensional nanopattern forming apparatus according to the present invention. The three-dimensional nanopattern forming apparatus of the present invention comprises a syringe tip 20 at one end of which a polymer nano-jet 10 is radiated, an electrode plate 30 located at a radial direction of the polymer nano-jet 10, And a moving device 40 capable of moving the tip 20 or the electrode plate 30.

First, the syringe tip 20 emits polymer nano-jet 10 at one end, which can be supplied by the pump 24 from the polymer reservoir 22. Here the pump 24 precisely controls the flow rate or pressure in the polymer reservoir 22 so that the polymer droplet 12 is formed at the end 26 of the syringe tip 20, The nano-scale polymer nano-jet 10 is stably radiated from the polymer droplets 12 formed in the syringe tip 20 by the electric field applied between the plates 30. [ In other words, the syringe tip 20 functions as the anode (+) and the electrode plate 30 functions as the cathode (-) so that the polymer droplets 12 formed in the syringe tip 20 are filled with polymer particles And the polymer nano-jet 10 is radiated to the electrode plate 30 toward the electrode plate 30 due to the electrical attraction with the negative charge charged to the electrode plate 30 by the positively charged polymer.

In order to form such an electric field, according to the embodiment of the present invention, the syringe tip 20 is directly connected to the high voltage supply H so that the syringe tip 20 functions as an anode (+), Can be grounded to function as a cathode (-). In this case, the voltage supplied to the syringe tip 20 may be 1 kv to 3 kv, but it is needless to say that the supplied voltage is not limited thereto and can be adjusted to a voltage necessary for the implementation of the present invention.

In the present invention, the polymer may be at least one selected from the group consisting of polyethylene oxide (PEO), polyvinylidene fluoro-hexafluoropropylene (PVDF-HFP), polyacrylonitrile (PAN), polymethylmethacrylate (PMMA) (PVA), polystyrene (PS), polyaniline (PANi), polyvinyl chloride (PVDC), polybutadiene (PB), polyethylene (PE), polypropylene (PP), polyisobutyl (EPDM), and various other polymer materials can be used

The electrode plate 30 may include a first electrode plate 32, a second electrode plate 34 and a third electrode plate 36 connected to each other and may be electrically connected to the syringe tip 20 So that the polymer nano-jet 10 can be stably radiated. The electrode plate 30 may be formed of a conductive metal, and may be formed of copper (Cu), platinum (Pt), or the like. Hereinafter, the electrode plate 30 is mainly formed of platinum Pt.

3, the first electrode plate 32 and the second electrode plate 34 may be formed in a plate shape, and the third electrode plate 36 may include a first electrode plate 32 and a second electrode plate 34. [ And the second electrode plate 34 may be formed in a strip shape.

The first electrode plate 32 or the second electrode plate 34 is formed such that the syringe tip 20 stays on the upper side thereof so that the polymer nanojet 10 radiated from the syringe tip 20 by the electrospinning is stabilized Function. The third electrode plate 36 allows the polymer nano-jet 10 to be reciprocated and stacked thereon.

Here, the third electrode plate 36 may include a pattern forming portion P where the polymer nano-jet 10 is adhered to form a three-dimensional nano-pattern. Here, the pattern forming portion P may be a part of the third electrode plate 36 in the strip shape in the longitudinal direction of the third electrode plate 36.

The pattern forming portion P is provided on the third electrode plate 36 according to the embodiment of the present invention and the polymer nanojet 10 radiated from the syringe tip 20 is adhered to the pattern forming portion P A three-dimensional nano pattern is formed. Here, the three-dimensional nano pattern is formed by the polymer nano-jet 10, which is radiated from the syringe tip 20, relatively moves reciprocally on the upper side of the pattern forming portion P above the third electrode plate 36, The polymer nano-jet 10 radiated from the substrate 20 can be adhered while being magnetically laminated. The polymer nano-jet 10 radiated from the syringe tip 20 is magnetically laminated by a relative reciprocating movement of the polymer nano-jet 10 in a predetermined section in a state where the syringe tip 20 is fixed, Dimensional nanopattern can be formed. Further, the third electrode plate 36 may be magnetically laminated in a longer section than the predetermined section according to the relative reciprocating motion of the pattern forming section P in accordance with the relative movement of the third electrode plate 36, thereby forming a three-dimensional nano pattern.

The first electrode plate 32 and the second electrode plate 34 according to the embodiment of the present invention are formed in such a manner that the polymer nanojet 10 radiated from the syringe tip 20 contacts the upper side of the pattern forming portion P Before or during the reciprocating movement, it functions to form an electric field with the syringe tip 10 at a position where the syringe tip 20 is stopped to stabilize the spinning polymer nano-jet 10. For example, when the syringe tip 10 is relatively moved on the upper side of the electrode plate 30, the polymer nano-jet 10, in which the syringe tip 20 stays on the upper side of the first electrode plate 32 for a while, Dimensional nanopattern can be formed on the upper side of the pattern forming portion P after being stabilized and moved relatively to the third electrode plate 36 side.

The mobile device 40 then moves the syringe tip 20 or the electrode plate 30 to enable relative movement of the syringe tip 20 relative to the electrode plate 30. [ Specifically, the mobile device 40 is configured to move the syringe tip 20 relative to the first electrode plate 32, the second electrode plate 34, and the third electrode plate 36, The electrode plate 20 or the electrode plate 30 can be moved. Further, the syringe tip 20 may be relatively reciprocated on the upper side of the pattern forming portion P.

Hereinafter, as shown in FIG. 3, the case where the mobile device 40 moves the electrode plate 30 to enable such relative movement will be described in detail. However, when the syringe tip 20 is moved, Of course, be possible. It should be noted that the moving device 40 can move the electrode plate 30 itself in moving the electrode plate 30, The substrate 50 formed on the substrate 50 is moved.

The moving device 40 may include a body portion 42 for accommodating a linear motor and the like and a connecting portion 44 for moving the substrate 50 in cooperation with the linear motor. The connection portion 44 may extend from the inside of the body portion 42 and may be coupled to the substrate 50. The body portion 42 may be provided with a guide opening 46 for guiding the parallel movement of the connecting portion 44. [ 3, the moving device 40 can move the substrate 50 in parallel, that is, in the direction of the arrow A (left and right parallel direction in FIG. 3). With the movement of the substrate 50, the electrode plate 30 formed on the substrate 50 is also moved. This allows relative movement of the electrode plate 30 relative to the syringe tip 20 wherein the relative movement is such that the syringe tip 20 moves from the first electrode plate 32 to the third electrode plate 36, The third electrode plate 36 is relatively moved from the second electrode plate 34 to the second electrode plate 34 or vice versa, . ≪ / RTI >

According to the three-dimensional nano pattern forming apparatus of the present embodiment, the polymer nano-jet 10 radiated from the syringe tip 20 located on the pattern forming portion P reciprocates in the pattern forming portion P, So that a three-dimensional nanopattern can be formed.

Further, by allowing the moving device 40 to reciprocate with respect to the syringe tip 20 in which the polymer nanojet 10 is radiated, the electrode plate 30 can be moved in the direction in which the pattern forming portion Dimensional nanopattern may be formed on the substrate 40. In this case, a longer three-dimensional nanopattern may be formed as compared with the case where the syringe tip 20 is not reciprocated by the moving device 40. [

Specifically, the electric field formed between the syringe tip 20 and the electrode plate 30 causes the polymer nano-jet 10 to be radiated from the polymer droplet 12 formed at one end of the syringe tip 20. Here, the first electrode plate 32, the third electrode plate 36, and the second electrode plate 34 are grounded to be connected to each other and function as a cathode. At this time, the direction in which the polymer nano-jet 10 is radiated and the direction in which the polymer nano-jet 10 is stacked in the pattern forming portion P are perpendicular to each other. By the repulsion by the bending of the polymer nano- The polymer nanotubes 10 that are radiated advance along the pattern forming portion P and are magnetically stacked by an electrical attraction force so that a three-dimensional nanopattern having a predetermined length can be formed. Here, when the syringe tip 20 reciprocates on the upper side of the pattern forming portion P of the third electrode plate 36, when the polymer nanojet 10 to be radiated is stacked along the pattern forming portion P, So that the length of the lamination on the pattern forming portion P becomes longer.

That is, the syringe tip 20 functions as an anode by the high voltage supply H, the polymer droplet 12 is charged with positive charge, and the polymer nano-jet 10 is irradiated with a positive charge The electrode plate 30 is grounded and functions as a cathode, so that the polymer nano-jet 10 is guided toward the electrode plate 30, that is, pulled. Thereby, the polymer nano-jet 10 radiated from the syringe tip 20 can be stably attracted to the electrode plate 30 and adhered thereto. At this time, in the state where the syringe tip 20 is fixed, the direction in which the polymer nano-jet 10 is radiated is the vertical direction in Fig. 3, whereas the polymer nano-jet 10 is laminated in the pattern- The polymer nano jet 20 pulled by the third electrode plate 36 in the left and right direction experiences bending bent by 90 degrees just before being stacked on the pattern forming portion P, The polymer nano-jet 10 can be reciprocated along the pattern forming portion P with a straight line and the polymer nano-jet 10 can be reciprocated along the pattern forming portion P, And a three-dimensional nanopattern can be formed. In addition, when the electrode plate 30 is reciprocated on the pattern forming portion P by the moving device 40, the polymer nano-jets 10 guided onto the pattern forming portion P are stacked longer Dimensional nanopattern can be formed longer than when the electrode plate 30 is not reciprocated.

The pattern forming portion P is provided as a part of the third electrode plate 36 and may have a long shape in the longitudinal direction having a predetermined width. The predetermined width may be, for example, 20 mu m. Here, in the electric field formed between the syringe tip 20 and the third electrode plate 36, since the distribution of the electric field is directed toward the center of the third electrode plate 36 formed of platinum metal, the polymer nanojet 10 are pulled toward the center in the width direction of the third electrode plate 36, specifically toward the center in the width direction of the pattern forming portion P. Furthermore, since the polymer is positively charged at a high voltage, an induced charge is present in the third electrode plate 36, and the amount of the induced charge is formed in the third electrode plate 36 formed of platinum, The polymer nano-jet 10 is strongly attracted in the direction of the third electrode plate 36.

4, when the third electrode plate 36 (at least the pattern forming portion P) is formed into a linear shape 36a having a predetermined width, the polymer nano-jet 10 also has such a shape The third electrode plate 36 is pulled toward the center in the width direction of the third electrode plate 36 so as to conform to the shape of the third electrode plate 36 to form a three- A nano-wall as a nanopattern can be formed.

In the process of forming the three-dimensional nanopattern, since the polymer nano-jet 10 radiated from the syringe tip 20 is reciprocated, the polymer nano-jet 10 is advanced to the end of the pattern forming portion P The polymer nano-jet 10 can be stacked on the pattern forming portion P because the polymer nano-jet 10 is rotated 180 degrees, that is, the direction is changed again to pass over the pattern forming portion P. The polymer nano-jet 10 is laminated on the pattern forming portion P and then electrically neutralized due to the grounding of the electrode plate 30 and at the same time an opposite charge is obtained to obtain a polymer nano- . As a result, the polymer nano-jet 10 is easily laminated on the pattern forming portion P. As a result, as shown in FIG. 5, the polymer nano-jet 10 can be stacked in a vertically stacked manner over time. 5 is a side view of the laminated structure of the polymer nano-jet 10, showing that the polymer nano-jet 10 is laminated over the substrate 50 over time. An image photographed on the lower side of the substrate 50 is obtained by reflecting the image on the upper side.

4, when the third electrode plate 36 (at least the pattern forming portion P) has a predetermined width and is formed into the corrugated shape 36b in the longitudinal direction, the polymer The nano-jet 10 can form a corrugated nano-wall.

Therefore, the polymer nano-jet 10 radiated from the syringe tip 20 is stacked along the specific shape of the pattern forming portion P of the third electrode plate 36, thereby forming a three-dimensional nano pattern.

On the other hand, as shown in FIG. 6, the laminated three-dimensional nano patterns 60 have annular laminated portions 62 formed at both ends thereof. That is, when the polymer nano-jet 10 is stacked by reciprocating motion above the pattern forming portion P, the direction of movement of the polymer nano-jet 10 at both ends is changed, 62 are formed. The annular lamination portion 62 is approximately one half of the lamination height of the intermediate portion 64 of the three dimensional nanopattern 60. This is because the polymer nanojet 10 is not piled up in the annular lamination portion 62 Because they are nested in the elliptical shape.

In this case, the spinning speed of the polymer nano-jet 10 may be 10 to 50 mm / s so that the polymer nano-jet 10 is stably radiated to form a three-dimensional nano-pattern. If the spinning speed of the polymer nanojet 10 is less than 10 mm / s, the formation of the three-dimensional nanopattern is delayed. If the spinning speed is more than 50 mm / s, the thickness of the polymer nano- As a result, the control of the polymer nano-jet 10 becomes difficult.

Next, as shown in FIG. 7, a method of forming a three-dimensional nanopattern according to an embodiment of the present invention is a method in which a polymer nano-jet 10 is radiated from a side of a syringe tip 20 toward a substrate 50, Dimensional nanopattern is formed on the upper side of the substrate 50, which will be described in detail.

First, in the method of forming a three-dimensional nanopattern according to the embodiment of the present invention, the syringe tip 20 is positioned at the upper side of the first electrode plate 32 or the second electrode plate 34 (S1). In this state, applying a high voltage, for example, 3 to 4 kV, to the syringe tip 20 causes the polymer droplet 12 of the syringe tip 20 to move toward the grounded first electrode plate 32, And the polymer nano-jet 10 is irradiated (S2). Since the polymer nanotubes 10 that are initially radiated are ejected at a high velocity, for example, at a high velocity of at least 50 mm / s, once the polymer nanotubes 10 begin to emit, the voltage applied to the syringe tip 20 For example, 1.2 to 1.8 kv, to slow and stabilize the polymer nanojet (10). Here, the syringe tip 20 may be positioned on the upper side of the first electrode plate 32 or the second electrode plate 34, for example, for 1 to 2 minutes until the radiation of the polymer nanojet 10 becomes stable. As shown in FIG. However, the time for which the syringe tip 20 is fixed on the upper side of the first electrode plate 32 or the second electrode plate 34 is not limited to 1 to 2 minutes but may be shorter or longer.

When the polymer nanojet 10 emanating from the syringe tip 20 is stabilized, the syringe tip 20 is held in contact with the first electrode plate 32 or the third electrode plate 34 connected to the second electrode plate 34 (S) to the pattern forming portion (P) of the pattern forming portion (36). This can be achieved not only by moving the syringe tip 20, but also by moving the substrate 50 on which the electrode plate 30 is formed.

Next, the polymer nano-jet 10 radiated from the syringe tip 20 is reciprocated relative to the pattern forming portion P on the upper side of the pattern forming portion P of the third electrode plate 36, The polymer nano-jet 10 radiated from the syringe tip 20 is then laminated (S4) to form a three-dimensional nano pattern on the pattern forming portion P. Finally, after the three-dimensional nanopattern is formed, the syringe tip 20 may relatively move and be positioned on the first electrode plate 32 or the second electrode plate 34.

Hereinafter, embodiments for implementing embodiments according to the present invention will be described in detail.

* Example

In this embodiment, a glass plate having a size of 35 mm in width and 10 mm in length is used as the substrate 50 and the first electrode plate 32, the second electrode plate 34, and the third electrode plate 36 ) Is formed using a photoresist process and a sputtering process.

A rectangular platinum (Pt) film is coated on the substrate 50 with a width of 10 mm and a length of 10 mm to form the first electrode plate 32. In this embodiment, And the second electrode plate 34 and the first electrode plate 32 and the second electrode plate 34 are connected between the first electrode plate 32 and the second electrode plate 34, A platinum (Pt) line having a width of 20 mu m is formed to form the third electrode plate 36. [ The first electrode plate 32 and the second electrode plate 34 are connected to the third electrode plate 36 and the second electrode plate 34. The first electrode plate 32 and the second electrode plate 34 are connected to the third electrode plate 36, A groove having a thickness of 20 mu m is formed on the portion where the plate 36 is to be formed and a platinum wire is vapor-deposited thereon to a thickness of about 30 to 40 nm. Then, a lift- The third electrode plate 36 having a width of 20 mu m is formed on the substrate 50 by removing the resist. The polymer solution used in this embodiment is PEO (Poly Ethylene Oxide) (Mv = 300,000) 5 wt%, and the pump 24 is a product of Picoplus and Harvard Apparatus.

The voltage supplied to the syringe tip 20 is 1.2 to 1.8 kV, for example, 1.6 kV in the process of depositing the polymer nano-jet 10 on the pattern forming portion P. The distance between the syringe tip 20 and the substrate 50 may be variously selected in consideration of the size of the three-dimensional nanopattern to be formed and the voltage applied to the syringe tip 20, and may be between 1 mm and 5 mm In this embodiment, the distance between the syringe tip 20 and the substrate 50 is 2 mm to 3 mm.

The three-dimensional nanopattern forming apparatus according to the present embodiment can be used in an environment having a relative humidity of 50% or less, and the polymer supplied by the pump 24 is approximately 5 to 10 μL / h. The spinning speed of the polymer nano-jet 10 is set to 10 to 40 mm / s and the diameter thereof is set to 180 nm. In this case, the flow rate of the polymer nano-jet 10 is approximately 2.6 nL / h. At this time, since the flow rate of the polymer radiated from the syringe tip 20 is larger than the flow rate supplied by the pump 24, the size of the polymer droplet 12 at the end of the syringe tip 20 gradually increases with time. If the polymer flow rate supplied by the pump 24 is less than or equal to the sum of the flow rate being radiated to the polymer nanojet 10 and the flow rate being vaporized at the polymer droplet 12, 12 may not be spinnable by the polymer nano-jet 10, and may be hardened or multi-jetted in a multi-jet manner, which may cause the device to malfunction. In addition, if the flow rate of the polymer supplied by the pump 24 exceeds 10 μL / h, the polymer droplet 12 becomes large at a high speed, and the water content of the surface of the polymer droplet 12 The viscosity of the polymer nano-jet 10 is decreased, and the speed of the injected nano-jet is relatively higher than 50 mm / s. As a result, the thickness of the polymer nano-

In the present embodiment, the distance by which the moving device 40 reciprocates the pattern forming portion P is 1 mm, and the total distance is 50 reciprocations. The speed at which the mobile device 40 is reciprocated is equal to or substantially equal to the rate at which the polymer nanojet 10 is emitted. If the speed of the polymer nano-jet 10 is faster than the speed of the mobile device 40, the polymer nano-jet 10 will move horizontally faster than the mobile device 40, Dimensional pattern is difficult to be formed and the speed of the polymer nano-jet 10 is slower than the speed of the moving device 40, the polymer nano-jet 10 is stretched and stretched, So that the formation becomes difficult.

The three-dimensional pattern formed according to this embodiment is as shown in Fig.

While the present invention has been particularly shown and described with reference to exemplary embodiments thereof, it is clearly understood that the same is by way of illustration and example only and is not to be taken by way of limitation, And variations are possible.

1: polymer droplet 3: polymer nanojet
5: syringe 7: face where the pattern should be formed
10: polymer nano-jet 12: polymer droplet
20: Syringe tip 22: polymer reservoir
24: pump 30: electrode plate
32: first electrode plate 34: second electrode plate
36: third electrode plate 40: moving device
42: main body part 44:
46: Guide opening P: Pattern forming part
H: High voltage supply

Claims (10)

A syringe tip at which a polymer nanojet is radiated,
And an electrode plate positioned on the radial direction side of the polymer nanojet and forming an electric field with the syringe tip,
The electrode plate includes a first electrode plate and a second electrode plate, a pattern forming portion connected to the first electrode plate and the second electrode plate, and the polymer nanojet being adhered to form a three-dimensional nano pattern on the upper portion, And a second electrode plate provided on the second electrode plate,
And a moving device capable of moving the syringe tip or the electrode plate such that relative movement between the first, second, and third electrode plates of the syringe tip is possible,
Wherein the polymer nano-jet from the syringe tip is reciprocally moved on the upper side of the pattern forming portion
3-dimensional nanopattern forming apparatus.
The method according to claim 1,
The mobile device comprising:
The syringe tip or the electrode plate may be moved such that the syringe tip is relatively movable on the upper side of the pattern forming unit
3-dimensional nanopattern forming apparatus.
3. The method according to claim 1 or 2,
The electrode plate is formed on a substrate,
The moving device moves the substrate
3-dimensional nanopattern forming apparatus.
3. The method according to claim 1 or 2,
The radial direction of the polymer nano-jet and the direction in which the syringe tip or the electrode plate is moved are perpendicular to each other
3-dimensional nanopattern forming apparatus.
The method according to claim 1,
The third electrode plate has a long shape in the longitudinal direction and is connected to the first electrode plate and the second electrode plate at both ends in the longitudinal direction
3-dimensional nanopattern forming apparatus.
6. The method of claim 5,
Wherein the nano jet radiated from the syringe tip is reciprocally moved in the longitudinal direction of the pattern forming portion by the moving device reciprocating the electrode plate in the longitudinal direction of the third electrode plate, Stacked
3-dimensional nanopattern forming apparatus.
3. The method according to claim 1 or 2,
Wherein the third electrode plate has a waveform shape in the longitudinal direction and is connected to the first electrode plate and the second electrode plate at both ends,
3-dimensional nanopattern forming apparatus.
8. The method of claim 7,
Wherein the nano jet radiated from the syringe tip is reciprocally moved in the longitudinal direction of the pattern forming portion by the moving device reciprocating the electrode plate in the longitudinal direction of the third electrode plate, Stacked
3-dimensional nanopattern forming apparatus.
Dimensional nanopattern is formed on the substrate by irradiating the polymer nano-jet toward the substrate at one side of the syringe tip,
The syringe tip being positioned above the first electrode plate,
Emitting the polymer nano-jet from the syringe tip by an electric field between the syringe tip and the first electrode plate;
Wherein the syringe tip is positioned in a pattern forming portion of a third electrode plate connected to the first electrode plate,
As the polymer nanojet radiated from the syringe tip is reciprocally moved relative to the pattern forming unit from the top of the pattern forming unit, the polymer nano jet radiated from the syringe tip is laminated, Comprising the step of forming a nanopattern
3-dimensional nanopattern formation method.
10. The method of claim 9,
The third electrode plate has a long shape in the longitudinal direction and is connected to the first electrode plate and the second electrode plate at both ends in the longitudinal direction
3-dimensional nanopattern formation method.
KR1020130099563A 2013-08-22 2013-08-22 Three dimensional nanoscale pattern fabrication apparatus and method using electrojetting KR101439402B1 (en)

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Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR100903963B1 (en) 2008-07-09 2009-06-25 건국대학교 산학협력단 Apparatus for jetting droplet using nanotip
KR20110062216A (en) * 2009-12-03 2011-06-10 한국전자통신연구원 A electrospinning apparatus and a method for preparing well aligned nanofibers using the same

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR100903963B1 (en) 2008-07-09 2009-06-25 건국대학교 산학협력단 Apparatus for jetting droplet using nanotip
KR20110062216A (en) * 2009-12-03 2011-06-10 한국전자통신연구원 A electrospinning apparatus and a method for preparing well aligned nanofibers using the same

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Title
BULLETIN OF THE POLISH ACADEMY OF SCIENCES TECHNICAL SCIENCES, 2005, Vol. 53, pp. 385-394. *

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