KR101432468B1 - Apparatus for inspecting a transparent conductive pattern - Google Patents

Abstract

An apparatus for inspecting transparent conductive patterns includes: a support unit for supporting an object being inspected, which includes a transparent conductive pattern; a photographing unit arranged on top of the support unit to photograph the object; and a reflective lighting unit arranged close to the support unit to provide reflective lights having predetermined kinds of wavelengths by selectively filtering a portion of ultraviolet zones in order to transmit the transparent conductive pattern.

Description

[0001] APPARATUS FOR INSPECTING A TRANSPARENT CONDUCTIVE PATTERN [0002]

The present invention relates to an apparatus for inspecting a transparent conductive film pattern. More particularly, the present invention relates to an apparatus for inspecting a transparent conductive film pattern for picking up a transparent conductive film pattern formed on a substrate.

The touch screen panel (TSP) is applied to mobile phones, tablets, personal computers and the like, so that the user can input information by a touch method. The touch screen panel may include a transparent substrate, a transparent conductive film pattern sequentially formed on the transparent substrate, an adhesive film (OCA), a protective film, a tempered glass, or the like. It is necessary to inspect the transparent conductive film pattern in each unit process at the time of manufacturing the touch screen panel. The transparent conductive film pattern may be generally formed of indium tin oxide.

However, the ITO pattern inspecting apparatus using light in a general visible light region inspects the transparent conductive film pattern by optical properties such as light scattering, refraction, absorption, etc. due to thickness and material components of a transparent substrate, a protective film, There is a difficulty in.

Therefore, there is a demand for a device for inspecting a transparent conductive film pattern capable of determining whether the transparent conductive film pattern is imaged by imaging the transparent conductive film pattern.

An object of the present invention is to provide a device for inspecting a transparent conductive film pattern capable of picking up a transparent conductive film pattern formed on a transparent substrate.

An apparatus for inspecting a transparent conductive film pattern according to an embodiment of the present invention includes a support unit for supporting an object to be inspected including a transparent conductive film pattern, an imaging unit disposed on the support unit for imaging the object, And a reflective illumination unit arranged adjacent to the unit for selectively filtering a part of the light in the ultraviolet region so as to transmit the transparent conductive film pattern and providing reflected light having a specific wavelength to the subject.

In one embodiment of the present invention, the reflected light has a wavelength of 350 to 420 nm.

In an exemplary embodiment of the present invention, the reflective illumination unit may include a first light source for generating light, a plurality of filters for selectively filtering ultraviolet rays of a specific wavelength among ultraviolet rays from the light emitted from the first light source, A band pass filter unit and an ultraviolet condensing lens adapted to adjust a focus of light filtered from the filter in relation to the subject.

The band pass filter unit may further include a driving source for providing a driving force to rotate the filters to select one of the filters.

In addition, the ultraviolet condensing lens may include an antireflective coating layer.

The reflective illumination unit may further include a half mirror positioned between the image sensing unit and the subject to reflect the reflected light toward the subject.

The apparatus for inspecting a transparent conductive film pattern according to an embodiment of the present invention may further include a transparent illumination unit disposed at a lower portion of the support unit and generating transmission light having an ultraviolet wavelength so as to selectively reflect the transparent conductive film pattern .

The apparatus for inspecting a transparent conductive film pattern according to embodiments of the present invention includes a reflective illumination unit capable of filtering ultraviolet rays having a desired wavelength band so that ultraviolet rays are transmitted through the substrate and absorbed in the transparent conductive film pattern, An image having excellent resolution for an object to be inspected such as a touch screen panel having an image can be obtained. Also, since the reflection illumination unit includes the bandpass filter unit, the wavelength region of the ultraviolet light is selected according to the structure and material of the inspection object, so that the image of the transparent conductive film pattern can be clearly realized.

FIG. 1 is a block diagram for explaining an apparatus for inspecting a transparent conductive film pattern according to an embodiment of the present invention.
2 is a photograph of a transparent conductive film formed on a substrate using the transparent conductive film imaging device of FIG.
3 is a photograph of a transparent conductive film formed on a substrate using an imaging device using a general optical microscope.

BRIEF DESCRIPTION OF THE DRAWINGS The invention will be described in more detail below with reference to the accompanying drawings showing embodiments of the invention. However, the present invention should not be construed as limited to the embodiments described below, but may be embodied in various other forms. The following examples are provided so that those skilled in the art can fully understand the scope of the present invention, rather than being provided so as to enable the present invention to be fully completed.

When an element is described as being placed on or connected to another element or layer, the element may be directly disposed or connected to the other element, and other elements or layers may be placed therebetween It is possible. Alternatively, if one element is described as being placed directly on or connected to another element, there can be no other element between them. The terms first, second, third, etc. may be used to describe various items such as various elements, compositions, regions, layers and / or portions, but the items are not limited by these terms .

The terminology used herein is for the purpose of describing particular embodiments only and is not intended to be limiting of the invention. Furthermore, all terms including technical and scientific terms have the same meaning as will be understood by those skilled in the art having ordinary skill in the art, unless otherwise specified. These terms, such as those defined in conventional dictionaries, shall be construed to have meanings consistent with their meanings in the context of the related art and the description of the present invention, and are to be interpreted as being ideally or externally grossly intuitive It will not be interpreted.

Embodiments of the present invention are described with reference to cross-sectional illustrations that are schematic illustrations of ideal embodiments of the present invention. Accordingly, changes from the shapes of the illustrations, such as changes in manufacturing methods and / or tolerances, are those that can be expected. Accordingly, it is to be understood that the embodiments of the present invention are not to be construed as limited to the specific shapes of the areas illustrated by way of illustration, but rather to include deviations in shapes, the areas described in the drawings being entirely schematic, It is not intended to describe the exact shape of the area nor is it intended to limit the scope of the invention.

Hereinafter, preferred embodiments of the present invention will be described in detail with reference to the accompanying drawings.

FIG. 1 is a block diagram for explaining an apparatus for inspecting a transparent conductive film pattern according to an embodiment of the present invention.

Referring to FIG. 1, an inspection apparatus 100 for a transparent conductive film pattern according to an embodiment of the present invention includes a transparent substrate, a transparent conductive film pattern, an adhesive film (OCA film), a protective film, It is possible to pick up an image of the object to be inspected. The substrate may be made of, for example, a PET material, and the transparent conductive film pattern may be made of an ITO material.

The transparent conductive film pattern inspection apparatus 100 includes a support unit 110, an image pickup unit 120, and a reflective illumination unit 130.

The support unit (110) supports the subject (10). The support unit 110 may include a transparent plate 111 to support the subject 10. The transparent plate 111 has a flat surface on its upper surface to uniformly support the subject 10.

The image pickup unit 120 is disposed on the upper portion of the support unit 110. Thus, the imaging unit 120 can be disposed on the subject 10. The image pickup unit 120 can image the subject 10 and check whether the subject 10 is defective or not using the captured image.

The image pickup unit 120 may include image pickup devices 121 and 123 and a condenser lens 125. The image pickup device may include a CCD camera 121 and a CCD adapter 123. The condenser lens 125 is driven up and down to focus the parallel light of the focus to form an image sensing surface and display the image on the CCD camera 121.

The CCD adapter 123 is provided to focus the captured image on the image pickup surface of the CCD camera 121. The CCD camera 121 is provided to display an image obtained from the CCD adapter 123 on a computer or a monitor.

Therefore, the image pickup unit 120 picks up the inspection object 10 using ultraviolet rays of a specific wavelength provided from the reflective illumination unit 130 to detect whether the transparent conductive film pattern formed on the inspection target 10 is defective or not . A detailed description thereof will be given later.

The reflective illumination unit 130 is disposed adjacent to the support unit 110. For example, the reflective illumination unit 130 is disposed on one side of the support unit 10.

The reflection illumination unit 130 may include a first light source 131, a band pass filter unit 133, and an ultraviolet condensing lens 135.

The first light source 131 generates light. The first light source 131 may include, for example, a xenon lamp or a deuterium lamp.

The bandpass filter unit 133 includes a plurality of filters for selectively filtering ultraviolet rays of a specific wavelength among ultraviolet rays generated from the first light source 131. The band-pass filter unit 133 may filter ultraviolet light, particularly light in the ultraviolet region of 350 nm to 420 nm, out of the light generated from the first light source 131.

In one embodiment of the present invention, the bandpass filter unit 133 may include a plurality of filters. The band-pass filter unit 133 includes a plurality of filters having, for example, a band width of 10 nm in sequence. The filters include a first filter for filtering at 350 nm to 360 nm, a second filter for filtering at 360 nm to 370 nm, a third filter for filtering at 370 nm to 380 nm, a fourth filter for filtering at 380 nm to 390 nm, A fifth filter for filtering and a sixth filter for filtering at 410 nm to 420 nm. By rotating the first through sixth filters included in the band-pass filter unit 133, the selected one of the first through sixth filters can selectively filter ultraviolet light having a desired wavelength. Alternatively, the filter may be linearly moved to select ultraviolet light of a corresponding wavelength from the light emitted from the first light source.

When ultraviolet rays of the corresponding wavelength are irradiated onto the object 10, the ultraviolet ray has a good transmission and absorption phenomenon, and as the ultraviolet ray is transmitted through the substrate and absorbed by the transparent conductive film pattern, ≪ / RTI >

Also, by selecting the wavelength region of the ultraviolet ray according to the structure and material of the inspection object 10, an image for a desired transparent conductive film pattern can be realized. That is, the wavelength of the ultraviolet ray may be varied depending on the material and thickness of the substrate, the material forming the transparent conductive film pattern, or the tempered glass. Accordingly, the first to sixth filters included in the band-pass filter unit 133 can be selected so that the image of the transparent conductive film pattern can be optimized.

Alternatively, the bandpass filter unit 133 may include, for example, a monochrometer.

The ultraviolet condensing lens 135 can adjust the focus of the light filtered from the filter in relation to the subject 10. The ultraviolet light of the specific wavelength filtered by the ultraviolet condensing lens 135 can be effectively irradiated onto the subject 10 . The focus of the light can be adjusted by moving the ultraviolet condensing lens 135 in a linear direction.

In one embodiment of the present invention, the ultraviolet condensing lens 135 may include an antireflection coating layer (not shown). Accordingly, the ultraviolet condensing lens 135 can improve the transmittance of the reflected light, so that more light of the reflected light can be provided to the subject 10.

In one embodiment of the present invention, the reflective illumination unit 130 may further include a driving source for providing a driving force for rotating the filters so as to select any one of the filters. The driving source may include, for example, a motor (not shown) and a goniometer (not shown).

In one embodiment of the present invention, the reflective illumination unit 130 may further include a half mirror 137. [

The half mirror 137 is positioned between the imaging unit 120 and the subject 10. [ The half mirror 137 reflects the reflected light having passed through the band-pass filter unit 133 and the ultraviolet condensing lens 135 so as to be directed to the subject 10. The half mirror 137 may transmit a part of the reflected light.

The apparatus for inspecting a transparent conductive film pattern 100 according to an exemplary embodiment of the present invention may further include an objective lens 160.

The objective lens 160 is positioned between the half mirror 137 and the subject 10. The objective lens 160 focuses the ultraviolet light emitted from the reflective illumination unit 130 and further enlarges the image information about the subject 10 obtained by being reflected from the subject 10 and transmits the enlarged image information to the imaging unit . The objective lens 160 may include a plurality of lenses 161 and 163.

The apparatus for inspecting a transparent conductive film pattern 100 according to an exemplary embodiment of the present invention may further include a transmissive illumination unit 150.

The transmissive illumination unit 150 is disposed below the support unit 110. The transmissive illumination unit 150 generates transmitted light having an ultraviolet wavelength selectively absorbable to the transparent conductive film pattern.

The transmissive illumination unit 150 can make the image of the transparent conductive film pattern clearer by providing the transmitted light to the subject 10. The transmitted light is light corresponding to an ultraviolet region, and its wavelength can be selectively controlled.

The transmissive illumination unit 150 may include a second light source 151, a second bandpass filter unit 153, and a second condenser lens 155. Since the transmissive illumination unit 150 has substantially the same configuration as the reflective illumination unit 130, a detailed description thereof will be omitted.

2 is a photograph of a transparent conductive film formed on a substrate using the transparent conductive film imaging device of FIG. 3 is a photograph of a transparent conductive film formed on a substrate using an imaging device using a general optical microscope.

Referring to FIG. 2 and FIG. 3, in the case of FIG. 2, the light in the ultraviolet region (wavelength band: 350 to 420 nm) was used by using the transparent conductive film imaging device according to the present invention. On the other hand, the test object is a touch screen panel including a transparent substrate, a transparent conductive film pattern made of ITO, an adhesive film (OCA film), a protective film, and tempered glass. As shown in FIG. 2, the transparent conductive film image pickup device according to the present invention can secure a clear image of the transparent conductive film pattern.

On the other hand, in the case of FIG. 3, an imaging apparatus using a general optical microscope uses light in a visible light region (wavelength band: 380 to 780 nm). The object to be inspected is a touch screen panel including a transparent substrate, a transparent conductive film pattern made of ITO, an adhesive film (OCA film), a protective film, and tempered glass. The imaging device displays an image of the subject. It can be confirmed that the image for the transparent conductive film pattern is not implemented as shown in FIG.

While the present invention has been particularly shown and described with reference to exemplary embodiments thereof, it is clearly understood that the same is by way of illustration and example only and is not to be taken by way of limitation, And can be implemented in various forms in a variety of forms.

The apparatus for inspecting a transparent conductive film pattern according to the present invention can clearly image an image of the transparent conductive film pattern on a transparent substrate and a touch screen panel including a transparent conductive film pattern.

100: inspection device for transparent conductive film pattern 110:
120: image pickup unit 130:
131: first light source 133: first band pass filter unit
135: ultraviolet condensing lens 137: half mirror
150: Transmitted illumination unit 160: Objective lens

Claims (7)

A support unit for supporting a test object including a transparent conductive film pattern;
An imaging unit disposed on the support unit for imaging the subject; And
And a reflective illumination unit disposed adjacent to the support unit for selectively filtering a part of light in an ultraviolet ray region to transmit the transparent conductive film pattern and providing reflected light having a wavelength of 350 to 420 nm to the inspected object,
The reflective illumination unit
A first light source for generating light;
A plurality of filters for selectively filtering ultraviolet rays of a specific wavelength among ultraviolet rays from the light emitted from the first light source and a band having a goniometer for providing a driving force for rotating the filters to select one of the filters A pass filter section;
An ultraviolet condensing lens which is provided to adjust the focus of the light filtered from the filter in relation to the subject and has an anti-reflection coating layer formed on the surface thereof; And
And a half mirror positioned between the imaging unit and the subject to reflect the reflected light to be irradiated to the subject. delete delete delete delete delete The apparatus according to claim 1, further comprising a transmission illumination unit disposed at a lower portion of the support unit, for generating transmission light having an ultraviolet wavelength so as to selectively reflect the transparent conductive film pattern.

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