KR101422406B1 - System for controlling transportation process of tray - Google Patents

System for controlling transportation process of tray Download PDF

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Publication number
KR101422406B1
KR101422406B1 KR1020130045246A KR20130045246A KR101422406B1 KR 101422406 B1 KR101422406 B1 KR 101422406B1 KR 1020130045246 A KR1020130045246 A KR 1020130045246A KR 20130045246 A KR20130045246 A KR 20130045246A KR 101422406 B1 KR101422406 B1 KR 101422406B1
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KR
South Korea
Prior art keywords
trays
storage
port
conveying
storage device
Prior art date
Application number
KR1020130045246A
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Korean (ko)
Inventor
이성호
Original Assignee
세메스 주식회사
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Priority to KR1020130045246A priority Critical patent/KR101422406B1/en
Application granted granted Critical
Publication of KR101422406B1 publication Critical patent/KR101422406B1/en

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    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R31/00—Arrangements for testing electric properties; Arrangements for locating electric faults; Arrangements for electrical testing characterised by what is being tested not provided for elsewhere
    • G01R31/26—Testing of individual semiconductor devices
    • G01R31/2601—Apparatus or methods therefor
    • G01R31/2603—Apparatus or methods therefor for curve tracing of semiconductor characteristics, e.g. on oscilloscope
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/67005—Apparatus not specifically provided for elsewhere
    • H01L21/67242—Apparatus for monitoring, sorting or marking
    • H01L21/67276—Production flow monitoring, e.g. for increasing throughput
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
    • H01L21/67703—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations between different workstations
    • H01L21/67721—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations between different workstations the substrates to be conveyed not being semiconductor wafers or large planar substrates, e.g. chips, lead frames
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L22/00—Testing or measuring during manufacture or treatment; Reliability measurements, i.e. testing of parts without further processing to modify the parts as such; Structural arrangements therefor
    • H01L22/10—Measuring as part of the manufacturing process
    • H01L22/14—Measuring as part of the manufacturing process for electrical parameters, e.g. resistance, deep-levels, CV, diffusions by electrical means
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L22/00—Testing or measuring during manufacture or treatment; Reliability measurements, i.e. testing of parts without further processing to modify the parts as such; Structural arrangements therefor
    • H01L22/30—Structural arrangements specially adapted for testing or measuring during manufacture or treatment, or specially adapted for reliability measurements

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  • Engineering & Computer Science (AREA)
  • Manufacturing & Machinery (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • Automation & Control Theory (AREA)
  • Testing Of Individual Semiconductor Devices (AREA)
  • Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)

Abstract

A system for managing transportation process of a tray includes a storage device, a test handler, a storage transfer device, and a hoist transfer device. The storage device stacks and stores multiple trays to accommodate a semiconductor element. The test handler is installed at a position adjacent to the storage device and connects the semiconductor element to a testing apparatus in order to test the electrical performance of the semiconductor element. The storage transfer device includes a master port which is removably mounted on the primary side of the storage device and a transfer port which is disposed in the master port to transfer some or all of the trays stacked in the storage device to a second direction perpendicular to the primary side and more protruded than the secondary side. The hoist transport device supplies the trays to the test handler while picking up trays that are further protruded than the second side in the storage transfer device to transfer along a rail.

Description

[0001] SYSTEM FOR CONTROLLING TRANSPORTATION PROCESS OF TRAY [0002]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a transporting process management system of a tray, and more particularly, to a transportation process management system of customer trays accommodating semiconductor devices tested or tested.

In general, a semiconductor device is a component that performs electrical driving in an electronic device, and has a structure in which a chip is connected to a substrate. Examples of the memory device include a memory device such as a DRAM (DRAM), a SRAM .

The semiconductor device is fabricated on the basis of a wafer made of a thin monocrystalline substrate made of a silicon material. Specifically, the semiconductor device includes a fab process for forming a plurality of chips on which a circuit pattern is patterned on the wafer, a bonding process for electrically connecting each of the chips formed in the fab process to each of the substrates, A molding process for protecting the substrate from the outside, and the like. The semiconductor devices thus manufactured are subjected to a separate test process to inspect their electrical functions.

The testing process proceeds substantially through a test device that performs testing on the semiconductor devices and a test handler that handles the devices to connect the semiconductor devices. At this time, the semiconductor devices are not individually supplied when the semiconductor devices are supplied to the test handler in a storage place, but are supplied while being accommodated in customer trays, which are separate receiving means, for process efficiency.

However, when the customer trays are supplied to the test handler from the storage place, there is no facility for automating the test trays. Therefore, the operator has to supply the test trays manually.

It is an object of the present invention to provide a transportation process system of a tray capable of automatically supplying test trays to customer trays.

According to an aspect of the present invention, there is provided a tray transporting process management system including a storage device, a test handler, a storage transport device, and a hoist transport device.

The storage device has a plurality of trays for storing semiconductor devices. The test handler connects the semiconductor device to the test device to test the electrical performance of the semiconductor device. Wherein the storage conveying device comprises a master port detachably mounted on a first side of the storage device and a second storage device installed on the master port and partially or entirely storing trays stored in the storage device, And a conveying port that conveys the first side surface of the second side surface of the second side surface of the second side surface. The hoist transfer device picks up the trays protruded from the second side by the storage and conveying device and feeds the test handler while moving along the rails.

The transporting process management system according to an exemplary embodiment of the present invention is connected to the storage transporting device and the hoist transporting device and controls the driving of the storage transporting device and the hoist transporting device by setting a position where the trays are transported or picked up And may further include a control unit.

The transport port may have a structure in which a setting unit for setting a transport position of the trays is exposed to the outside through the control unit.

The storage conveying apparatus according to an embodiment may have an opening at a portion facing a side of the conveying trays to confirm whether the trays are smoothly conveyed.

The transport port according to one embodiment may have an anodized surface.

According to the transporting process management system of such a tray, a plurality of trays accommodating semiconductor elements are transported through a storage and conveying apparatus to some or all of the trays so that a hoist transporting apparatus moving along the rails can pick them up, The trays are picked up through the hoist transfer device and supplied to the test handler for handling the semiconductor devices in the test process so that the stacked trays can be automatically supplied to the test handler without any direct handling by the operator. Thus, a process of testing a large number of semiconductor devices can be performed very efficiently.

1 is a block diagram conceptually showing a tray transportation management system according to an embodiment of the present invention.
FIG. 2 is a view showing in detail a storage device and a storage conveying device in the transportation process management system shown in FIG. 1. FIG.
3 is a side view of the storage device and the storage conveying device shown in Fig.
4 is a front view of the transfer port of the storage conveying apparatus shown in Fig.
5 is an enlarged view of a portion A in Fig.

DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS Hereinafter, a detailed description will be given of a tray transporting management system according to an embodiment of the present invention with reference to the accompanying drawings. The present invention is capable of various modifications and various forms, and specific embodiments are illustrated in the drawings and described in detail in the text. It should be understood, however, that the invention is not intended to be limited to the particular forms disclosed, but includes all modifications, equivalents, and alternatives falling within the spirit and scope of the invention. Like reference numerals are used for like elements in describing each drawing. In the accompanying drawings, the dimensions of the structures are enlarged to illustrate the present invention in order to clarify the present invention.

The terms first, second, etc. may be used to describe various components, but the components should not be limited by the terms. The terms are used only for the purpose of distinguishing one component from another. For example, without departing from the scope of the present invention, the first component may be referred to as a second component, and similarly, the second component may also be referred to as a first component.

The terminology used in this application is used only to describe a specific embodiment and is not intended to limit the invention. The singular expressions include plural expressions unless the context clearly dictates otherwise. In this application, the terms "comprises", "having", and the like are used to specify that a feature, a number, a step, an operation, an element, a part or a combination thereof is described in the specification, But do not preclude the presence or addition of one or more other features, integers, steps, operations, components, parts, or combinations thereof.

On the other hand, unless otherwise defined, all terms used herein, including technical or scientific terms, have the same meaning as commonly understood by one of ordinary skill in the art to which this invention belongs. Terms such as those defined in commonly used dictionaries are to be interpreted as having a meaning consistent with the contextual meaning of the related art and are to be interpreted as either ideal or overly formal in the sense of the present application Do not.

FIG. 1 is a conceptual diagram illustrating a tray transporting process management system according to an embodiment of the present invention. FIG. 2 is a view illustrating a storage device and a storage transport device in the transporting process management system shown in FIG. 1 And Fig. 3 is a side view of the storage device and the storage conveying device shown in Fig.

1 to 3, a tray transporting process management system 1000 according to an embodiment of the present invention includes a storage device 100, a test handler 200, a storage conveying device 300, a hoist transfer device 400 and a control unit 500.

The storage device 100 is loaded with a plurality of trays 20 that accommodate the semiconductor device 10 or the tested semiconductor device 10 for testing its electrical performance. For example, the trays 20 may be stored in the storage device 100 in a plurality of rows and columns. At this time, the trays 20 stored in the storage device 100 can be stacked and stored such that the number of trays to be transported once is different from each other.

The test handler 200 is installed at a position adjacent to the storage device 100. The test handler 200 handles the semiconductor device 10 and a test device (not shown) for testing the electrical performance of the semiconductor device 10 and connects the semiconductor device 10 to the test device. At this time, the test handler 200 receives the semiconductor device 10 in a state in which the semiconductor device 10 is received in the customer tray, transfers the semiconductor device 10 to a test tray, and connects the test device to the test device. Accordingly, the above-mentioned tray 20 may substantially mean the above-mentioned customer tray.

The storage and conveying device 300 transports some or all of the trays 20 stored in the storage device 100. The storage and transfer device 300 includes a master port 310 mounted on the storage device 100 and a transfer port 320 installed on the master port 310 to transfer the trays 20 substantially .

The master port 310 is detachably mounted on a first side of the storage device 100 that contacts the y-axis. Therefore, since the storage transfer device 300 can be utilized by mounting the master port 310 only for the current process of the storage device 100, it is possible to efficiently utilize the facility. The storage device 100 has an outlet 110 for allowing the trays 20 to be stored therein to be moved to a position where the master port 310 is mounted, A door (not shown) may be installed.

The transfer port 320 includes a first transfer part 330 moving along the y axis between the inside of the storage device 100 and the master port 310 through the outlet 110, A second transfer part 340 connected to the first transfer part 330 and moving along the x axis and a seating part 350 coupled to the second transfer part 340 and on which the trays 20 to be transferred are placed. At this time, the second transfer part 340 slides in a stroke such that the trays 20 placed on the seating part 350 can protrude more than the second side perpendicular to the first side . This is because the hoist transfer device 400 moving along the y axis at a position opposite to the second side of the storage device 100 described below moves the trays 20 placed on the seating part 350 in the moving section So that it can be picked up.

The transfer port 320 is a continuously driven structure. The transfer port 320 may be made of a light metal having a high strength to ensure durability for a long time, for example, an aluminum material. Therefore, in order to prevent scratches or the like from being generated due to other interference structures or foreign substances during the transportation of the receiving part 350 where the trays 20 are placed, The surface can be anodized to be firmly held.

The hoist transfer device 400 picks up the trays 20 protruding more than the second side by the transfer port 320 and supplies the test handler 200 while moving along the rail 410. Here, the rail 410 is basically formed along the y axis at a position facing the second side of the storage device 100 so that the hoist transfer device 400 can pick up the trays 20 . These rails 410 are installed in a ceiling (not shown) inside a factory (not shown) in which the transportation process management system 1000 of the present invention is structured, basically including the above- . That is, in addition to feeding the trays 20 to the test handler 200 basically as described above, the hoist transporting apparatus 400 can also supply the trays 20 to other storage devices 100 So that the rail 410 can be designed to be transported.

A plurality of the trays 20 accommodating the semiconductor device 10 can be partially or wholly transported by the hoist transport apparatus 400 so that the hoist transport apparatus 400 moving along the rail 410 can pick up The test handler 200 for picking up the transported trays 20 through the hoist transport device 400 and for handling the semiconductor device 10 in a test process, So that the stacked trays 20 can be automatically supplied to the test handler 200 without any direct handling by the operator. Thus, a process of testing a large number of the semiconductor devices 10 can be performed very efficiently.

The control unit 500 is connected to the storage conveying apparatus 300 and the hoist transfer apparatus 400. The control unit 500 sets the position at which the storage conveying apparatus 300 transfers the trays 20 or the position at which the hoist transfer apparatus 400 picks up the trays 20 to control the driving of the trays 20 .

At this time, since the position where the hoist transfer device 400 picks up the trays 20 is limited to the position of the rail 410, the position of the storage conveying device 300 at which the trays 20 are transported It is more important to set the rail 410 more accurately and precisely in consideration of the position of the rail 410. For this purpose, the control unit 500 may set a separate setting unit 352 in the transport port 320 to set the transport position of the trays 20.

FIG. 4 is a front view of the transfer port of the storage conveying apparatus shown in FIG. 3, and FIG. 5 is an enlarged view of a portion A of FIG.

4 and 5, the setting unit 352 may be formed on the seat 350 exposed to the outside of the transfer port 320 so that the operator can easily determine the setting unit 352.

Accordingly, the operator can easily set the position through the setting unit 352 that is exposed to the outside, while the operator has difficulty in setting the position thereof because there is no criteria for setting it, such as other existing magazines and cassettes .

In addition, the setting unit 352 may be adapted to be compatible with other magazine and cassette transporting systems, so that the transportation system management system 1000 of the present invention can partially It is possible to simplify and change the structure so that the equipment manufacturing cost can be remarkably reduced.

In order to accurately and precisely set the position of the feed port 320 sliding along the x-axis with the seating portion 350, at least one of the second feeding portion 340 and the seating portion 350 A scale 342 can be displayed.

The seating portion 350 of the conveyance port 320 has an opening 354 at a portion facing the side of the placed tray 20 in order to simply check whether the trays 20 laid thereon are laid flatly ). At this time, a second scale 342 may be displayed around the opening 354 of the seating part 350 to more accurately check the flatness of the trays 20 placed on the seating part 350. Accordingly, the trays 20 are erroneously twisted on the seating part 350, so that the hoist transfer device 400 can not normally pick up the trays 20, It is possible to prevent breakage of the magnetic field.

While the present invention has been described in connection with what is presently considered to be practical and exemplary embodiments, it is to be understood that the invention is not limited to the disclosed embodiments, but, on the contrary, It will be understood by those skilled in the art that various changes in form and details may be made therein without departing from the spirit and scope of the invention as defined by the appended claims.

10: Semiconductor device 20: Tray
100: Storage device 200: Test handler
300: Storage transfer device 310: Master port
320: Feed port 330: First transfer part
340: second transfer part 342: scale
350: seat part 352: setting part
354: opening 356: second graduation
400: hoist transfer device 410: rail
500: control unit 1000: transportation process management system

Claims (7)

A storage device in which a plurality of trays accommodating semiconductor elements are stacked;
A test handler installed at a position adjacent to the storage device and connecting the semiconductor device to the test device to test the electrical performance of the semiconductor device;
A master port detachably mounted on a first side of the storage device and a part or all of trays installed on the master port and stored in the storage device are arranged in a second lateral direction perpendicular to the first side, A storage conveying device including a conveying port for conveying the recording medium to be projected from the second side; And
And a hoist transfer device for picking up the trays protruding from the second side by the storage conveying device and supplying the test handler while moving along the rail. The apparatus according to claim 1, further comprising a control unit connected to the storage conveying apparatus and the hoist conveying apparatus, and configured to control the driving of the storage conveying apparatus and the hoist conveying apparatus by setting a position to which the trays convey or a position to pick up And the transporting process management system of the tray. The system according to claim 2, wherein the transporting port has a structure in which a setting unit for setting a transporting position of the trays is exposed to the outside through the control unit. The system according to claim 1, wherein the conveying port has an opening at a position facing the side of the trays for conveying to check whether the trays are smoothly conveyed. 5. The system according to claim 4, wherein the transporting port is scaled around the opening. The system according to claim 1, wherein the conveyance port is marked with a second scale along a direction in which the trays are conveyed. The system according to claim 1, wherein the transporting port has an anodized surface.
KR1020130045246A 2013-04-24 2013-04-24 System for controlling transportation process of tray KR101422406B1 (en)

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Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR100829232B1 (en) 2006-09-29 2008-05-14 미래산업 주식회사 Handler for testing electronic parts
KR20080087459A (en) * 2007-03-27 2008-10-01 세크론 주식회사 Semiconductor device tester, test system for semiconductor device having plural semiconductor device tester, and testing method for semiconductor device using the same

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR100829232B1 (en) 2006-09-29 2008-05-14 미래산업 주식회사 Handler for testing electronic parts
KR20080087459A (en) * 2007-03-27 2008-10-01 세크론 주식회사 Semiconductor device tester, test system for semiconductor device having plural semiconductor device tester, and testing method for semiconductor device using the same

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