KR101407390B1 - Apparatus to clean substrate - Google Patents

Abstract

A substrate cleaning apparatus according to an embodiment of the present invention includes a recovery chamber capable of collecting a chemical liquid to be scattered from a substrate, an outer tube having one end connected to the recovery chamber to recover a chemical solution from the recovery chamber, A chemical liquid separator for separating the recovered chemical liquid by type, an inner tube having an inner tube which is relatively rotatable inside the outer tube and has an opening communicating selectively with the open space of the outer tube as it relatively rotates, And a chemical liquid discharge portion including a chemical liquid transfer portion for transferring the separated chemical liquid including an open space communicating with the open space of the outer tube of the separation portion and a connection member and an outlet connected to the chemical liquid transfer portion, Can be classified and discharged.

Description

[0001] APPARATUS TO CLEAN SUBSTRATE [0002]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a substrate cleaning apparatus, and more particularly, to a substrate cleaning apparatus capable of classifying and discharging chemical fluids generated in a process.

A wafer widely used as a material for manufacturing semiconductor devices refers to a single crystal silicon thin plate. Such wafers include a slicing process for thinly cutting a single crystal silicon ingot into a wafer shape, a lapping process for improving the flatness while polishing the wafer to a desired wafer thickness, an etching process for removing the damaged layer inside the wafer, Polishing is performed to improve etching, surface hardening and flatness, and cleaning to remove contaminants on the surface of the wafer.

Contaminants such as various particles, metal impurities, organic impurities and the like may remain on the wafer during these processes. Since contaminants adversely affect the yield and reliability of semiconductor devices, a cleaning process is performed to remove contaminants remaining on the wafer during semiconductor manufacturing.

The wet cleaning method generally includes an etching solution such as an acid or alkali, a deionized water, or the like, in order to remove contaminants. In the wet cleaning method, . The wet cleaning method of the wafer is typically divided into a batch type wafer cleaning method and a single wafer type wafer cleaning method.

In general, a single-wafer type cleaning apparatus uses a spinning method for removing a contamination source by using a centrifugal force due to the rotation of the wafer and a pressure due to the spraying of the cleaning liquid by jetting the cleaning liquid onto the wafer surface rotated at a high speed do.

Here, the cleaning liquid sprayed onto the wafer during the cleaning process and scattered on the wafer surface is collected and collected by the recovery cup on the side of the chamber, and the exhaust gas generated during the cleaning process is discharged to the outside of the chamber through the exhaust portion provided inside the recovery cup.

A prior art document 2012-0110271, filed on Mar. 29, 2011, describes a single wafer type wafer cleaning apparatus configured to clean a foreign substance adhering to a wafer by a single wafer.

An object of the present invention is to provide a chemical liquid separation system capable of classifying and sorting chemical liquids used during a cleaning process.

An object of the present invention is to provide a chemical liquid separation system capable of preventing an excessive increase in pressure when the recovery chamber is not used.

An object of the present invention is to provide a chemical liquid separation system that solves the restriction of the installation space to maximize the space utilization and can be separately detached when leakage occurs, which is advantageous for maintenance or repair.

An object of the present invention is to provide a substrate cleaning apparatus including a chemical liquid separation system according to an embodiment, and capable of easily classifying and discharging chemical liquids according to an embodiment.

According to an aspect of the present invention, there is provided a chemical liquid separation system including a chemical liquid separator for separating the recovered chemical liquid into one kind, the chemical liquid separator having one end connected to a recovery chamber in which a chemical liquid used for substrate cleaning is recovered, And a chemical liquid delivering unit for delivering the separated chemical liquids to the respective recovery chambers, wherein the chemical liquid separating unit is connected to the recovery cups of the recovery chambers and communicates with the chemical liquid delivering unit, A first tube having a first tube and a second tube disposed so as to be inscribed or circumscribed to the first tube and relatively rotatable with respect to the first tube and having an opening communicating with the open space of the first tube in a relative rotation, .

According to one aspect of the present invention, a plurality of open spaces of the first pipe are disposed around the first pipe, one of the openings of the second pipe is provided, It is possible to communicate with only one of them.

According to one aspect of the present invention, the chemical liquid transfer portion includes a number of transfer lines corresponding to the open space of the first pipe, and the open spaces of the first pipe are in contact with the open space of the transfer lines, .

According to one aspect of the present invention, the apparatus may further include a chemical liquid discharge unit connected to the chemical liquid transfer unit and capable of discharging the chemical liquid transferred from the chemical liquid transfer unit.

According to one aspect of the present invention, the chemical liquid discharging portion includes a frame, a connecting member mounted on the frame and connectable to the liquid medicine delivering portion, and an outlet capable of discharging the liquid medicine delivered through the connecting member, And the discharge port may be provided in a number corresponding to the type of the chemical liquid.

According to one aspect of the present invention, the liquid discharge portion may be provided with a pressure regulating member that can be opened and closed, and the pressure regulating member may be opened when the recovery chamber is not used to regulate the pressure of the recovery chamber.

According to an aspect of the present invention, there is provided a substrate cleaning apparatus comprising: a recovery chamber capable of collecting a chemical liquid scattered from a substrate; one end connected to the recovery chamber to recover a chemical solution from the recovery chamber; And an inner tube rotatable inside the outer tube and having an opening communicating with the open space of the outer tube to separate the recovered chemical liquid into different types; And a chemical liquid discharge unit including a chemical liquid transfer unit for transferring the separated chemical liquid including an open space communicable with the open space of the outer tube, and a connection member and an outlet connected to the chemical liquid transfer unit.

According to one aspect of the present invention, the chemical liquid transfer unit includes a plurality of transfer lines arranged radially outside the chemical liquid separation unit, and different types of chemical liquids can be transferred through the respective transfer lines.

According to the chemical liquid separation system according to one embodiment, the chemical liquid used during the cleaning process can be classified and discharged.

According to the chemical liquid separation system according to one embodiment, it is possible to prevent the pressure from rising excessively when the recovery chamber is not used.

According to the chemical liquid separation system according to one embodiment, it is possible to maximize the space utilization by solving the restriction of the installation space, and it is possible to separately separate when leakage occurs, which is advantageous for maintenance or repair.

According to the chemical liquid separation system of one embodiment, the chemical liquid separation system according to one embodiment can easily classify and discharge the chemical liquid.

1 shows a substrate cleaning apparatus in one embodiment.
2 shows a chemical liquid separation system according to one embodiment.
3 shows a chemical liquid separator of the chemical liquid separation system according to one embodiment.
4 shows a chemical liquid discharge portion of the chemical liquid separation system according to one embodiment.
5 shows the separation of the chemical liquid in the chemical liquid separation system according to one embodiment.

Hereinafter, embodiments according to the present invention will be described in detail with reference to the accompanying drawings. However, the present invention is not limited to or limited by the embodiments. Like reference symbols in the drawings denote like elements.

Fig. 1 shows a substrate cleaning apparatus according to an embodiment, Fig. 2 shows a chemical liquid separation system according to an embodiment, Fig. 3 shows a chemical liquid separation unit of a chemical liquid separation system according to an embodiment, FIG. 5 illustrates the separation of the chemical liquid in the chemical liquid separation system according to one embodiment, and FIG. 5 illustrates separation of the chemical liquid in the chemical liquid separation system according to one embodiment.

1, a substrate cleaning apparatus 10 according to an embodiment may include a recovery chamber 100, a recovery cup 200, and a chemical liquid separation unit 300. [

The recovery chamber 100 provides a space for collecting the cleaning liquid scattered on the substrate W during the cleaning process.

Here, the substrate W may be a silicon wafer which becomes a semiconductor substrate. However, the present invention is not limited thereto, and the substrate W may be a transparent substrate such as a glass used for a flat panel display device such as a liquid crystal display (LCD) or a plasma display panel (PDP). Further, the shape and size of the substrate W are not limited by the drawings, and may have substantially various shapes and sizes such as circular and rectangular plates. The size and shape of the recovery chamber 100 and the spin chuck may be changed depending on the shape and size of the substrate W. [

A recovery cup 200 may be provided in the recovery chamber 100 to collect the cleaning liquid.

Here, the cleaning liquid includes a chemical liquid determined depending on the type of the substrate W and the type of the substance to be removed, and a mixed liquid in which pure water, pure water, and chemical liquids are mixed at a predetermined ratio.

The recovery cup 200 may be provided to prevent the different types of chemical liquids from being mixed with each other in the cleaning liquid supplied to the substrate W and recover the same. For example, the recovery cup 200 comprises a first recovery cup and a second recovery cup for collecting two different kinds of chemical liquids, and a third recovery cup for collecting pure water, and the first to third recovery cups May be stacked in multiple stages.

A chemical liquid separation system 300 may be connected to the recovery chamber 100.

Specific details of the chemical liquid separation system 300 will be described below. Various types of chemical liquids can be separated and discharged by the chemical liquid separation system 300.

With this configuration, the substrate cleaning apparatus 10 according to one embodiment can be operated as follows.

First, after the substrate W is placed in the substrate cleaning apparatus 10, the cleaning process proceeds.

At this time, the chemical solution used for cleaning may be collected in the recovery cup 200 while striking the substrate W. For example, different chemical solutions may be collected in each recovery cup 200, or different chemical solutions may be sequentially collected in one recovery cup 200.

Subsequently, the collected chemical liquid is transferred to the chemical liquid separation system 300 connected to the recovery chamber 100, so that the chemical liquid can be sorted and discharged according to the type in the chemical liquid separation system 300. For example, the chemical liquid may be classified into a first chemical liquid, a second chemical liquid, and a third chemical liquid. The chemical liquid thus classified can be discharged through the outlet provided for each type.

2, the chemical liquid separation system 300 will be described in detail as follows.

The chemical liquid separation unit 300 may include a chemical liquid separation unit 310, a chemical liquid transfer unit 320, and a chemical liquid discharge unit 330.

One end of the chemical liquid separator 310 may be connected to the recovery chamber 100.

3, the chemical liquid separator 310 may include a first pipe and a second pipe. Hereinafter, a case where the first pipe is composed of an outer pipe and the second pipe is composed of an inner pipe arranged to be in contact with the inside of the outer pipe will be described as an example.

The outer tube 312 can be connected to the recovery cup 200 of the recovery chamber 100 and has an open space communicating with a chemical solution transfer part 320 to be described later. For example, the open space of the outer tube 312 may be disposed around the outer tube 312. As shown in FIG. 2, the open spaces of the three outer tubes 312 may be arranged at intervals of 90 degrees, respectively. The open space of the outer tube 312 and the open space 322 of the chemical solution transfer unit 320 may be the same shape or the same area but they are not limited thereto and may be variously arranged such that the recovered chemical solution may be transferred It can be formed.

The open space of the outer tube 312 is disposed to face the chemical solution transferring part 320 so that the chemical solution recovered from the recovery cup 200 can be transferred through the open space of the outer tube 312.

The inner tube 314 is arranged to contact the inner tube 312 with respect to the outer tube 312 and can rotate relative to the outer tube 312. Alternatively, the outer tube 312 may be arranged to be in contact with the outside of the inner tube 314, and may be rotated relative to the inner tube 314. Hereinafter, the case where the inner tube 314 rotates with respect to the outer tube 312 will be described as an example.

The inner tube 314 may be provided with one opening 3142. The opening 3142 of the inner tube 314 can communicate with the open space of the outer tube 312 by the relative rotation of the inner tube 314 with respect to the outer tube 312. [ The opening 3142 of the inner tube 314 communicates with only one of the open spaces of the outer tube 312 and the open space of the remaining outer tube 312 communicates with the opening 3142 of the inner tube 314 Can be blocked.

For example, when the first chemical liquid is recovered, the inner tube 314 rotates so that the opening 3142 of the inner tube 314 communicates with the open space of the outer tube 312, and the opening of the inner tube 314 Can be transmitted only to the open space of one outer tube 312 through the third tube 3142. Alternatively, when the second chemical liquid is recovered, the inner tube 314 rotates so that the opening 3142 of the inner tube 314 communicates with the open space of the outer tube 312, and the opening 3142 of the inner tube 314 To the open space of the other outer tube (312). The inner tube 314 is rotated such that the opening 3142 of the inner tube 314 communicates with the open space of the outer tube 312 and the opening 3142 of the inner tube 314 To the open space of another outer tube 312 through the openings of the outer tube 312. According to the structure of the chemical liquid separator 310, the chemical liquid recovered from the recovery chamber 100 can be separated by type.

One or more chemical liquid separation units 310 may be provided, and the chemical liquid may be separated as follows.

For example, the first chemical liquid, the second chemical liquid, and the third chemical liquid may be sequentially delivered through one chemical liquid separating unit 310 connected to the recovery chamber 100. Accordingly, various kinds of chemical liquids can be recovered and sorted through one chemical liquid separating unit 310. [

Alternatively, when a plurality of chemical liquid separating units 310 are provided and connected to the recovery chamber 100, the same or different types of chemical liquids are recovered from the respective chemical liquid separating units 310, Can be classified.

The chemical liquid transfer unit 320 may be disposed outside the chemical liquid separation unit 310.

The chemical liquid transfer unit 320 may include a number of transfer lines corresponding to the open space of the outer tube 312 of the chemical liquid separation unit 310. For example, if the outer tube 312 is provided with three open spaces, the chemical liquid transfer unit 320 may be provided with three transfer lines.

In addition, each of the transfer lines may be arranged radially outside the chemical liquid separator 310, and each transfer line may be allocated to transfer different chemical fluids. For example, one delivery line may be assigned a first drug solution, another delivery line may be assigned a second drug solution, and another delivery line may be assigned a third drug solution. Thereby, only one type of medicament can be delivered to one delivery line.

In addition, the chemical liquid transfer unit 320 may be provided with an open space 322. Specifically, each of the delivery lines may be provided with an open space 322. At this time, the chemical liquid separated from the chemical liquid separating unit 310 can be transferred through the open space 322 of the chemical liquid transfer unit 320. The chemical liquid is delivered when the opening 3142 of the inner tube 314 of the chemical liquid separating portion 310, the open space of the outer tube 312 and the open space 322 of the chemical solution delivering portion 320 are aligned, The chemical liquid recovered from the recovery cup 200 can be transferred from the inner tube 314 of the chemical liquid separating unit 310 to the chemical liquid transfer unit 320.

The chemical solution delivery portion 320 may be connected to the chemical solution discharge portion 330.

4, the chemical liquid discharging portion 330 may include a frame 332, a connecting member 334, and an outlet 336. [

The frame 332 is shown in a box shape, but is not limited thereto, and may have various shapes.

Further, a connecting member 334 may be mounted on the frame 332.

The connection member 334 may be provided at a number corresponding to the chemical liquid transfer unit 320. Specifically, the number corresponding to the number of transfer lines included in the chemical liquid transfer unit 320. For example, if three delivery lines are provided, the connecting member 334 may also be provided in three.

The connection member 334 may be connected to the chemical solution transfer part 320 to transfer the chemical solution.

Further, the connection member 334 may be connected to a discharge port 336. The discharge port 336 may be provided in a number corresponding to the type of the used chemical liquid and may discharge the chemical liquid delivered from the chemical liquid transfer unit 320. Therefore, one kind of chemical liquid can be discharged through one discharge port 336. [

Further, the chemical liquid discharge portion 330 may further be provided with a pressure regulating member 338. [ The pressure regulating member 338 may be mounted on the frame 332 adjacent to the connecting member 334. The pressure regulating member 338 is openable and closable, and if necessary, the pressure regulating member 338 can be opened to regulate the pressure. For example, when the recovery chamber 100 is not used, the pressure regulating member 338 may be opened to prevent the pressure in the recovery chamber 100 from excessively increasing.

With this chemical liquid separation system 300, it is possible to classify various kinds of chemical liquids into one type by one chemical liquid separation unit 310, thereby improving the space utilization. In case of leakage, It is possible to separate and cope with each other, which is advantageous for maintenance or repair.

In particular, with reference to FIG. 5, the chemical liquid separation system 300 according to one embodiment operates as follows. 5 (a) shows a case where the chemical liquid is transferred through the transfer line located above the chemical liquid separating unit 310, (b) shows the case where the chemical liquid is transferred through the transfer line located on the side of the chemical liquid separating unit 310 A case where the chemical solution is delivered is shown.

First, the chemical liquid separation system 300 is coupled to the recovery chamber 100 in the substrate cleaning apparatus 10 according to one embodiment.

Then, the cleaning process proceeds.

When the first chemical solution process is performed, the first chemical solution scattered from the substrate W is collected in the recovery cup 200 of the recovery chamber 100, and the first chemical solution can be recovered through the chemical solution separation unit 310.

At this time, the inner tube 314 of the chemical liquid separator 310 can communicate the opening 3142 of the inner tube 314 with the open space of the outer tube 312 by the relative rotation with respect to the outer tube 312.

Specifically, the opening 3142 of the inner tube 314 is aligned with the open space of the outer tube 312 through which the first chemical liquid can be discharged and the open space 322 of the chemical liquid transfer portion 320, The first chemical solution may be delivered to the chemical solution delivery unit 320. At this time, the other open spaces of the outer tube 312 can not be aligned with the open space 322 of the chemical solution delivery portion 320, so that the first chemical solution can be supplied only through the open space of one outer tube 312, ). ≪ / RTI >

The first chemical solution delivered to the chemical solution delivery portion 320 may be discharged through the discharge port 336 through the connection member 334 of the chemical solution discharge portion 330 allocated as the first chemical solution.

In addition, when the second chemical solution process is performed, the second chemical solution scattered from the substrate W is collected in the recovery cup 200 of the recovery chamber 100, and the second chemical solution can be recovered through the chemical solution separation unit 310 have. Here, the second chemical liquid may be recovered through the same chemical liquid separating unit 310 as the chemical liquid separating unit 310 from which the first chemical liquid is recovered, or may be separated from the chemical liquid separating unit 310 which is different from the chemical liquid separating unit 310 from which the first chemical liquid is recovered. Lt; / RTI >

At this time, the inner tube 314 of the chemical liquid separator 310 can communicate the opening 3142 of the inner tube 314 with the open space of the outer tube 312 by the relative rotation with respect to the outer tube 312.

The opening 3142 of the inner tube 314 of the chemical liquid separating portion 310 is connected to the open space of the outer tube 312 through which the second chemical liquid can be discharged and the open space 322 of the chemical liquid transfer portion 320, So that the second chemical liquid can be transferred to the chemical liquid transfer unit 320 through the space. At this time, The other open spaces of the outer tube 312 can not be matched with the open space 322 of the liquid medicament delivery portion 320 and the second liquid medicament can be supplied only to the liquid medicament delivery portion 320 through the open space of one outer tube 312 Lt; / RTI >

The second chemical solution delivered to the chemical solution delivery portion 320 may be discharged through the discharge port 336 through the connection member 334 of the chemical solution discharge portion 330 allocated as the second chemical solution.

In addition, when the third chemical solution process is performed, the third chemical solution scattered from the substrate W is collected in the recovery cup 200 of the recovery chamber 100, and the third chemical solution can be recovered through the chemical solution separation unit 310 have. The third chemical liquid is recovered through the chemical liquid separating unit 310 which is the same as the chemical liquid separating unit 310 from which the first chemical liquid and the second chemical liquid are recovered or the chemical liquid separating unit 310 in which the first chemical liquid and the second chemical liquid are recovered, Liquid separation unit 310, as shown in FIG.

At this time, the inner tube 314 of the chemical liquid separator 310 can communicate the opening 3142 of the inner tube 314 with the open space of the outer tube 312 by the relative rotation with respect to the outer tube 312.

The opening 3142 of the inner tube 314 of the chemical liquid separating portion 310 is connected to the open space of the outer tube 312 through which the third liquid medicament can be discharged and the open space 322 of the liquid medicament- So that the third chemical liquid can be transferred to the chemical liquid transfer unit 320 through the space. At this time, The other open spaces of the outer tube 312 can not be aligned with the open space 322 of the chemical solution delivery portion 320 so that the third chemical solution is only supplied to the chemical solution delivery portion 320 through the open space of one outer tube 312 Lt; / RTI >

The third chemical liquid delivered to the chemical liquid transfer unit 320 may be discharged through the discharge port 336 through the connection member 334 of the chemical liquid discharge unit 330 allocated as the third chemical liquid.

As described above, the substrate cleaning apparatus according to the embodiment can directly sort the chemical liquid by connecting the chemical liquid separation system to the recovery chamber, and does not require a separate unit for discharging the chemical liquid. Therefore, it is possible to efficiently discharge various kinds of chemical liquids by kind. Further, it is possible to provide a pressure adjusting member capable of opening and closing to prevent the pressure of the recovery chamber from rising when the recovery chamber is not used.

Although the present invention has been described in connection with what is presently considered to be practical exemplary embodiments, it is to be understood that the invention is not limited to the disclosed embodiments, but, on the contrary, And various modifications and changes may be made thereto without departing from the scope of the present invention. Accordingly, the spirit of the present invention should not be construed as being limited to the embodiments described, and all of the equivalents or equivalents of the claims, as well as the following claims, belong to the scope of the present invention .

10: Substrate cleaning apparatus
100: recovery chamber
200: Recovery Cup
300: chemical liquid separation system
310: chemical liquid separation unit
312: outer tube
314: Inner tube
3142: opening
320:
322: opening space of the chemical solution delivery portion
330:
332: Frame
334:
336: Outlet
338: Pressure regulating member
W: substrate

Claims (8)

A chemical liquid separator for separating the recovered chemical liquid into one type by connecting one end to a recovery chamber in which a chemical liquid used for substrate cleaning is recovered; And
A chemical liquid delivering unit disposed outside the chemical liquid separating unit and delivering the separated chemical liquids;
Lt; / RTI >
The chemical-
A first tube connected to the recovery cup of the recovery chamber and having an open space communicating with the chemical liquid transfer portion and disposed along the periphery; And
A second tube disposed so as to be inscribed or circumscribed by the first tube and relatively rotatable with respect to the first tube and having an opening selectively communicating with the open space of the first tube as it relatively rotates;
/ RTI >
Wherein a plurality of openings of the first tube are disposed around the first tube, one of the openings of the second tube is provided, and the opening of the second tube is connected to only one of the open spaces of the first tube Communicating,
The open spaces of the first pipe are arranged at regular intervals,
Wherein the chemical solution transfer part includes a number of transfer lines corresponding to the open space of the first pipe, the open spaces of the first pipe are in contact with the open space of the transfer lines,
Wherein the transfer lines are arranged radially outside of the chemical liquid separating section, and each of the transfer lines is assigned to transfer different chemical liquids. delete delete The method according to claim 1,
And a chemical liquid discharge unit connected to the chemical liquid transfer unit and capable of discharging the chemical liquid transferred from the chemical liquid transfer unit. 5. The method of claim 4,
The chemical-
frame;
A connection member mounted on the frame and connectable with the liquid medicine delivery portion; And
A discharge port through which the chemical liquid delivered through the connection member can be discharged;
Lt; / RTI >
Wherein the connection member is provided in a number corresponding to the chemical solution delivery portion, and the discharge port is provided in a number corresponding to the type of the chemical solution. 6. The method of claim 5,
The chemical liquid discharge portion may be provided with a pressure regulating member capable of being opened and closed, and the pressure regulating member may be opened when the recovery chamber is not used to regulate the pressure of the recovery chamber. A recovery chamber capable of collecting a chemical liquid scattered from the substrate;
An outer tube having one end connected to the recovery chamber and recovering the chemical solution from the recovery chamber, an outer tube having an open space around the outer tube, and an opening rotatable inside the outer tube to selectively communicate with the open space of the outer tube A chemical liquid separator for separating the recovered chemical liquid including the inner tube by type;
A chemical liquid transfer unit for transferring the separated chemical liquid including an open space communicating with an open space of the outer tube of the chemical liquid separation unit; And
A chemical liquid discharge portion having a connection member and an outlet connected to the chemical liquid transfer portion;
Lt; / RTI >
Wherein a plurality of open spaces of the outer tube are disposed around the outer tube, one of the openings of the inner tube is provided so that the opening of the inner tube communicates with only one of the open spaces of the outer tube,
The open spaces of the outer tubes are arranged at equal intervals,
Wherein the chemical solution transferring portion includes a plurality of transfer lines arranged radially outside the chemical liquid separating portion, and different types of chemical liquids are transferred through the transferring lines. delete

Images