KR101400289B1 - Scanning electron microscope - Google Patents

Abstract

The present invention relates to an electron microscope for observing a sample while linearly moving and rotating using a position adjusting unit in a chamber, comprising: a first position adjusting unit for moving a sample in a plane-linear direction through driving of a motor located inside the chamber; A second position adjusting unit for rotating the sample through the driving of a motor located inside the chamber, a second position adjusting unit for vertically penetrating the chamber bottom surface from the outside of the lower end of the chamber and connected to the lower end of the first position adjusting unit, A third position adjusting unit for moving the motor in the Z-axis direction, and a controller for controlling driving of each of the motors.
According to the present invention, it is possible to reduce the manufacturing cost due to the simple design of the power structure, the manufacturing cost, and the vacuum sealing is very easy, thereby improving the product performance.

Description

{SCANNING ELECTRON MICROSCOPE}

The present invention relates to an electron microscope stage, and more particularly to an electron microscope stage in which a power transmitting means for adjusting a position of a sample in X-axis, Y-axis, R-axis and T- The present invention relates to a scanning electron microscope stage capable of easily maintaining a vacuum state inside a chamber and simplifying the structure of the apparatus and reducing the size of the chamber.

The electron microscope captures secondary electrons generated by accelerating and colliding electrons with the sample to be observed in the vacuum chamber, converts the number of the secondary electrons into shaded images, and observes the converted image. The magnified image of the sample Can be displayed.

Such an electron microscope can be classified into a transmission electron microscope (TEM), a scanning electron microscope (SEM), a reflection electron microscope (REM), a projection scanning electron microscope (STEM), a low voltage electron microscope (LVEM)

Electron microscopes are used in various technical fields such as life and nano because samples can be enlarged by several hundred thousand times or more.

The electron microscope operates with the sample, which is the sample, placed on the stage. Typically, other parts of the electron microscope are fixed and the stage moves to allow the various parts of the sample to be observed. That is, it means that the stage moves in the X-axis, Y-axis, and Z-axis directions, and in the R-axis direction and the T-axis direction so that a desired point can be observed by the operator.

Korean Patent No. 0890001 "A stage unit of a small-sized scanning electron microscope" has been disclosed as a technique relating to a stage on which linear and rotational movements are performed.

According to Korean Patent No. 0890001, an operation portion for moving the stage in the X-axis, Y-axis, Z-axis, R-axis and T-axis directions of each stage on which the specimen holder is placed is provided outside the chamber door. A complex link and a gear are combined.

Such a conventional electron microscope has a complicated structure of the positioning unit, which limits the design of the electron microscope of a compact size, is expensive, and is not easy to maintain.

In addition, since the conventional electron microscope is connected to the power transmission part inside the chamber in a state where the operating part for linear and rotational movement operation is connected to the door, the stage system assembled together with the chamber door is exposed to the outside during sample exchange, It is easily contaminated.

In addition, since a large number of operating parts outside the door are connected to the power transmitting part inside the chamber, there are many holes passing through the inside of the chamber, which makes vacuum holding difficult.

In order to solve the disadvantages of the background art, the present invention relates to a method for adjusting a position of a sample by motor-coupling a sample in an X-axis, Y-axis, R-axis and T- Only the unit is provided outside the lower end of the chamber to minimize the power transmission means inside the chamber and to minimize the number of holes passing through the inside of the chamber.

According to a preferred aspect of the present invention, there is provided an electron microscope for observing a sample while linearly moving and rotating the sample using a position adjusting unit in a chamber, A second position adjusting unit for rotating the sample through driving of a motor located inside the chamber, a second position adjusting unit for vertically penetrating the bottom face of the chamber from outside the lower end of the chamber, A third position adjusting unit coupled to the lower end of the adjusting unit, for elevating and lowering the sample in the Z-axis direction through motor driving, and a controller for controlling driving of each of the motors.

The first position adjustment unit includes a base stage coupled with an upper end of the third position adjustment unit, and a second position adjustment unit that is installed on the upper end of the base stage to be slidable in the X- An X-axis position adjusting section including an X-axis stage moving in the X-axis direction; a Y-axis position adjusting section provided on the top of the X-axis stage and slidable in the Y- And a Y-axis position adjustment unit including a Y-axis stage.

The X-axis position adjustment unit includes an X-axis motor fixedly installed on one side of the base stage, a first rotation shaft that is axially coupled to the X-axis motor and has a screw on an axis, And an X-axis stage that is coupled to one side of the first coupling bracket and linearly moves in the X-axis direction of the base stage, in the same manner as the first coupling bracket, The Y-axis position adjustment unit includes a Y-axis motor fixedly installed on one side of the X-axis stage, a second rotation shaft axially coupled to the Y-axis motor and having a screw on the shaft, And a Y-axis stage in which one side is coupled to one side of the second engagement bracket and linearly moved in the Y-axis direction of the X-axis stage, .

The second position adjustment unit includes a tilting axis position adjusting unit including a tilting axis stage vertically rotatable on the first position adjusting unit and vertically rotated by driving a connection tilting axis motor on one side, And an R-axis position adjusting unit coupled to the tilting shaft stage so as to be horizontally rotatable and including a rotating body that rotates horizontally by driving an R-axis motor connected to one side.

Here, the tilting axis position adjustment unit includes a tilting axis motor, first rotation direction switching means that is axially coupled to the tilting axis motor on one side and converts the rotational force of the motor to a rotational force in the tilting axis direction, Axis direction, and a rotation plate coupled to the other side of the direction switching unit to rotate in the vertical direction, wherein the R-axis position adjustment unit includes an R-axis motor, And a sample stage having one side thereof coupled to the other side of the second rotation direction switching means and rotating in the R-axis direction.

The third position adjustment unit includes a Z-axis motor provided outside the lower end of the chamber, a third rotation shaft which is axially coupled to the Z-axis motor and has a screw formed on the outer peripheral surface thereof, And an elevating shaft having one end connected to one side of the third engaging bracket and the other end passing through the bottom surface of the chamber and coupled to the lower end of the first position adjusting unit, Do.

Further, it is preferable that an opening is formed in the bottom of the chamber, a sealing hole is formed at the center of the chamber to allow the lifting shaft to be penetrated and sealed, and a sealing plate having a wire discharge hole formed at one side thereof is installed to seal the opening.

In addition, it is more preferable that a protective plate for sealing the electric wire, which is discharged through the lifting shaft and the electric wire discharging hole, from the outside is vertically installed in the lower part of the sealing plate.

According to the present invention, there is an effect that the power structure is simple, there is no power transmission loss, the fine adjustment is easy, the designing and manufacturing are easy, the manufacturing cost is reduced, and the vacuum sealing is very easy.

In addition, since each axis is independent from the control unit and the driving unit, it is possible to realize the minimum size, and the stroke range of the X, Y and Z axes is increased due to the minimum size, have.

1 is a perspective view showing an appearance of a scanning electron microscope stage according to the present invention.
2 is a perspective view showing a stage system according to the present invention.
3 is an exploded perspective view of the stage system.
Fig. 4 shows a five-axis position adjustment operation of the stage system according to the present invention.

Hereinafter, a preferred embodiment of the present invention will be described in detail with reference to the accompanying drawings.

1 is a perspective view showing an appearance of a scanning electron microscope stage according to the present invention.

1, the scanning electron microscope stage 1 according to the present invention includes a sample and a sample position adjusting unit, and has a chamber 10 and a chamber 10, which are hermetically sealed to the outside, And a chamber door 20 installed on one side of the chamber 10. A third position adjusting unit 90 for moving the sample up and down in the Z axis direction is provided below the chamber 10.

In the present invention, the chamber door 20 is not provided with an operating portion, and the chamber door 20 is provided with a position adjusting unit for multi- Only the position adjusting unit 90 is installed externally and the remaining units for position adjustment in the four axial directions are installed inside the chamber so that there is only one hole that passes through the inside of the chamber, Is not connected to the door so that the stage system is not contaminated by the external environment.

Fig. 2 is a perspective view showing a stage system according to the present invention, and Fig. 3 is an exploded perspective view of a stage system.

Referring to the drawings, a stage system according to the present invention mainly includes a first position adjusting unit for moving a sample table 100 in a plane and straight line through driving motors 52 and 62 positioned in a chamber 10, A second position adjusting unit for rotating the sample table by driving the motors 72 and 81 located inside the chamber 10; a second position adjusting unit for vertically penetrating the bottom surface of the chamber 10 from outside the lower end of the chamber 10, A third position adjusting unit 90 for moving the sample table in the Z-axis direction by driving the motor 91, and a controller for controlling the driving of each motor. The structure of the controller is omitted in the drawing, and the structure of the first to third position adjusting units will be described in more detail as follows.

The first position adjusting unit includes a base stage 40 coupled to an upper end of the third position adjusting unit 90, an X-axis motor 40 slidably mounted on the upper end of the base stage 40 in the X- Axis position adjusting section 50 including an X-axis stage 51 that moves in the X-axis direction by driving of the X-axis stage 52, And a Y-axis position adjusting unit 60 including a Y-axis stage 61 that moves in the Y-axis direction by driving a Y-axis motor 62 connected to one side.

More specifically, the X-axis position adjustment unit 50 includes an X-axis motor 52 fixedly installed on one side of the base stage 40, a first shaft 42 coupled to the X-axis motor 52, A first coupling bracket 54 having a rotation shaft 53 and a first through hole to be screwed with the first rotation shaft 53 and a second coupling bracket 54 having one side connected to one side of the first coupling bracket 54, And an X-axis stage 51 that linearly moves along the X-axis stage 51.

An LM guide 41 is provided on the upper surface of the base stage 40 in the X axis direction and the X axis stage 51 is slidably coupled to the LM guide 41. Therefore, when the first rotary shaft 53 is rotated by the rotational driving force of the X-axis motor 52, since the X-axis motor 52 is fixed to the base stage 40 through the fixing bracket 55, The first engaging bracket 54 screwed to the rotating shaft 53 linearly moves along the first rotating shaft 53 so that the X axis stage 51 coupled to the first engaging bracket 54 is guided by the LM guide (41).

The Y-axis position adjusting unit 60 includes a Y-axis motor 62 fixed to one side of the X-axis stage 51, a second rotary shaft (not shown) And a second engagement bracket 64 having a second through hole to be screwed with the second rotation shaft 63. The first engagement bracket 64 is engaged with one side of the second engagement bracket 64, And a Y-axis stage 61 that linearly moves in the Y-axis direction of the Y-axis.

An LM guide 56 is provided on the upper surface of the X-axis stage 51 in the Y-axis direction and the Y-axis stage 61 is slidably coupled to the LM guide 56. Accordingly, when the second rotary shaft 63 is rotated by the rotational driving force of the Y-axis motor 62, the Y-axis motor 62 is fixed to the X-axis stage 51 through the fixing bracket 65, The second engaging bracket 64 screwed to the second rotary shaft 63 is linearly moved along the second rotary shaft 63 so that the Y-axis stage 61 coupled to the second engaging bracket 64 is moved to the LM Thereby sliding along the guide 56.

The second position adjustment unit includes a tilting axis stage 71 that is vertically rotatable on the Y axis stage 61 and includes a tilting axis stage 71 that is vertically rotated by driving a tilting axis motor 72 connected to one side, An R-axis position adjusting unit 80 including a position adjusting unit 70, a rotating body that is horizontally rotatable on the tilting shaft stage 71 and rotates horizontally by driving an R-axis motor 81 connected to one side, .

More specifically, the tilting-axis position adjusting unit 70 includes a tilting-axis motor 72, a first tilting-axis motor 72 that is shaft-coupled to the tilting-axis motor 72 on one side and converts the rotational force of the motor 72 into a rotational force in the tilting- Rotation direction switching means 73 and 74 and a rotation plate 71 which is coupled to the other side of the first rotation direction switching means 73 and 74 and rotates in the vertical direction.

The first rotation direction switching means may be composed of a worm gear 73 that is shaft-coupled to the tilting shaft motor 72 and a screw gear 74 that is screwed in a direction orthogonal to the worm gear 73 and installed in a vertical direction . By this first rotation direction switching means, the horizontal rotation force of the tilting axis motor 72 is converted into the vertical rotation force, and the rotation plate 71 is rotated in the vertical direction to realize the tilting axis.

The R-axis position adjustment unit 80 includes an R-axis motor 81 and a second rotation direction change-over switch 80, one side of which is axially coupled to the R-axis motor 81 and switches the rotational force of the motor 81 to a rotational force in the R- Means 82 and 83 and a sample stage 100 which is coupled to the other side of the second rotation direction switching means 82 and 83 and rotates in the direction of the R axis.

The second rotation direction switching means may be constituted by a worm gear 82 which is axially coupled to the R-axis motor 81 and a screw gear 83 which is screwed in a direction orthogonal to the worm gear 73 and installed horizontally . By this second rotation direction switching means, the horizontal rotation force of the R-axis motor 81 is converted into the R-direction rotation force so that the sample stage 100 rotates in the R direction to realize the R-axis.

Finally, the third position adjustment unit 90 includes a Z-axis motor 91 installed on the outside of the lower end of the chamber 10, a third rotation shaft 92 having a screw formed on the outer peripheral surface thereof, A third coupling bracket 93 having one end connected to one side of the third coupling bracket 93 and the other end connected to one side of the chamber 10, And an elevation shaft 94 coupled to the lower end of the base stage 40 through the bottom surface. A Z-axis motor 91 is fixedly mounted on the bottom surface of the chamber 10 and a protection plate 110 for protecting the third rotation shaft 92, the third engagement bracket 93 and the elevation shaft 94 is installed do.

A Z-axis support plate 120 having an LM guide 121 formed in the Z-axis direction is provided at a lower side of the chamber 10, and the guide plate 122 is slidably coupled to the LM guide 121. Here, a coupling hole 123 to which the third coupling bracket 93 is coupled is formed on one side of the guide plate 122. Therefore, when the third rotary shaft 92 is rotated by the rotary driving force of the Z-axis motor 91, since the Z-axis motor 52 is fixed to the protection plate 110, the third rotary shaft 92 is screwed The third coupling bracket 93 is moved up and down along the third rotary shaft 92 so that the elevation shaft 94 coupled to the third coupling bracket 93 moves up and down. The guide plate 122 connected to the engaging bracket 93 slides along the LM guide 41 to guide the up and down movement of the lifting shaft 94.

A guide plate 35 is vertically provided on both sides of the base stage 40 for smoothly lifting and lowering the base stage 40 and an LM guide 36 is formed on the guide plate 35 in the Z- have. Both sides of the base stage 40 are slidably coupled to the LM guide 36 of the guide plate 35 through a bracket or the like so that the base stage 40 is moved in the LM guide 36 when the lifting shaft 94 is moved up and down. And the Z axis is moved up and down.

An opening is formed in the bottom of the chamber and a sealing plate 30 having a coupling hole 31 through which the lifting shaft 94 is coupled at the center is formed at the center and a wire discharge hole 32 is formed at one side And is installed to seal the opening. It is preferable that the sealing plate 30 has a tapered structure having a step on its outer side in order to increase the sealing force.

The wire discharge hole 32 is for discharging the electric wire for supplying power to the motors 52, 62, 72 and 81 installed inside the chamber 10, So that the vacuum state inside the chamber 10 is maintained.

Fig. 4 shows the five-axis position adjusting operation of the stage system according to the present invention. In Fig. 4, movement and rotation in each axis direction are indicated by arrows. As shown in FIG. 4, by controlling the linear movement or the rotational movement of each axis by using an electric motor, it is possible to perform fine adjustment without power transmission loss through a simple power structure, and each axis can be compactly It can be realized that the stroke range of the X, Y and Z axes is increased due to the minimum size, so that it is possible to perform a wide range of observation with very easy adjustment of the stage position.

10: chamber 20: chamber door
30: sealing plate 40: base stage
50: X-axis position adjustment unit 60: Y-axis position adjustment unit
70: a tilting axis position adjustment unit 80: an R-axis position adjustment unit
90: Third position adjustment unit 100:
110: protection plate 120: Z-axis support plate

Claims (11)

An electron microscope for observing a sample while linearly moving and rotating the sample using a position adjusting unit in a chamber,
A first position adjusting unit for moving the sample in a plane linear direction through driving of a motor located inside the chamber;
A second position adjusting unit for rotating the sample through driving of a motor located inside the chamber;
A third position adjusting unit coupled to the lower end of the first position adjusting unit vertically through the bottom of the chamber from the outside of the lower end of the chamber and elevating the sample in the Z axis direction through motor driving; And
And a controller for controlling driving of each of the motors,
And the third position adjustment unit comprises:
A Z-axis motor installed outside the lower end of the chamber,
A third rotating shaft which is axially coupled to the Z-axis motor and has a screw formed on an outer circumferential surface thereof,
A third engaging bracket formed with a third through hole to be screwed with the third rotation shaft,
And an elevation shaft having one end coupled to one side of the third engagement bracket and the other end passing through a bottom surface of the chamber and coupled to a lower end of the first position adjustment unit,
An opening is formed in the bottom surface of the chamber,
Wherein the opening is provided with a coupling hole through which the lifting shaft is coupled at a center, and a sealing plate having a wire discharge hole formed at one side thereof to seal the opening.
The method according to claim 1,
The first position adjustment unit
A base stage coupled to an upper end of the third position adjustment unit,
An X-axis position adjusting unit slidably mounted on an upper end of the base stage and including an X-axis stage moving in the X-axis direction by driving an X-axis motor connected to one side;
And a Y-axis position adjusting unit provided on the upper end of the X-axis stage and slidable in the Y-axis direction and including a Y-axis stage moving in the Y-axis direction by driving a Y-axis motor connected to one side Scanning electron microscope stage.
3. The method of claim 2,
The X-axis position adjustment unit
An X-axis motor fixedly installed on one side of the base stage,
A first rotating shaft which is axially coupled to the X-axis motor and on which an axial screw is formed,
A first engaging bracket formed with a first through hole to be screwed with the first rotation shaft,
And an X-axis stage having one side coupled to one side of the first coupling bracket and linearly moving in the X-axis direction of the base stage.
3. The method of claim 2,
The Y-axis position adjustment unit
A Y-axis motor fixed to one side of the X-axis stage,
A second rotation shaft axially coupled to the Y-axis motor and having a screw on an axis,
A second engaging bracket formed with a second through hole to be screwed with the second rotation shaft,
And a Y-axis stage having one side engaged with one side of the second engagement bracket and linearly moving in the Y-axis direction of the X-axis stage.
The method according to claim 1,
The second position adjustment unit
A tilting axis position adjusting unit including a tilting axis stage vertically rotatable on the first position adjusting unit and vertically rotating by driving a connection tilting axis motor on one side,
And an R-axis position adjusting unit coupled to the tilting shaft stage so as to be horizontally rotatable and including a rotatable body that rotates horizontally by driving an R-axis motor connected to one side of the R-axis position adjusting unit.
6. The method of claim 5,
The tilting axis position adjusting unit
A tilting axis motor,
A first rotation direction switching means for switching a rotational force of the motor to a rotational force in a tilting axis direction through a screw gear which is axially coupled to the tilting shaft motor at one side and screwed to the worm gear,
And a pivoting plate having one side coupled to the other side of the first rotation direction switching means and rotating in a vertical direction.
6. The method of claim 5,
The R-axis position adjustment unit
An R-axis motor,
A second rotation direction switching means for switching a rotational force of the motor to a rotational force in an R axis direction through a screw gear screwed to the worm gear,
And a sample stage having one side coupled to the other side of the second rotation direction switching means and rotating in the R axis direction.
delete delete delete The method according to claim 1,
And a protection plate for vertically sealing the electric wire, which is discharged through the lifting shaft and the electric wire discharging hole, from the outside is installed in the lower portion of the sealing plate.

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