JP2021174952A - Processing device, opening/closing mechanism, and link mechanism - Google Patents

Abstract

To provide a processing device capable of suppressing the amount of upward movement of a lid (moving body) even when the lid is rotated at the time of opening/closing (attaching/detaching) of the lid (moving body).SOLUTION: A processing device 100 includes a chamber body 10 that processes a substrate, a lid 21 that covers the upper part of the chamber body 10, and an opening/closing mechanism 30 that opens and closes the lid 21 from the chamber body 10. The opening/closing mechanism 30 includes an elevating mechanism 40 that moves the lid 21 up and down to a lowering position where the lid 21 covers the chamber body 10 and an ascending position where the lid 21 is separated upward from the chamber body 10, a rotation mechanism 50 that rotatably supports the lid 21 around the horizontal rotation axis RA, a slide mechanism 60 that supports the lid 21 and the rotation mechanism 50 so as to be slidable in the lateral direction with respect to the chamber body 10, and a link mechanism 70 that is connected to the rotation mechanism 50 and operates the rotation mechanism 50 so as to rotate the lid 21 in conjunction with the slide movement of the rotation mechanism 50.SELECTED DRAWING: Figure 1

Description

The present invention relates to a processing device, an opening / closing mechanism, and a link mechanism, and more particularly to a processing device, an opening / closing mechanism, and a link mechanism in which a lid (moving body) is opened / closed (attached / detached).

Conventionally, a processing device for opening and closing a lid for maintenance work is known (see, for example, Patent Document 1).

Patent Document 1 discloses a processing device including a chamber main body, a lid body that can be opened and closed on the chamber main body, and an opening / closing device that opens and closes the lid body. The opening / closing device of this processing device includes an elevating mechanism that raises the lid to a position where it can rotate vertically without contacting the chamber body, a rotating mechanism that rotates the lid vertically, and a lid. It has a slide mechanism that slides the lid to a position where it does not overlap with the chamber body in the vertical state. The elevating mechanism, the rotating mechanism, and the sliding mechanism each have a motor, and the operation is controlled by a control unit.

During maintenance of the processing device, the elevating mechanism first raises the lid to a position where it can rotate in the vertical direction without contacting the chamber body. In this state, the lid is rotated 1/4 by the rotation mechanism to be in a vertical state. Next, the sliding mechanism slides the lid to a position where it can be removed from the chamber body. As a result, the lid does not exist above the chamber body, and the inside of the chamber body can be maintained.

Japanese Patent No. 5595202

In Patent Document 1, when the lid body is detached from the chamber body, the lid body is raised to a position where it does not come into contact with the chamber body even if the lid body is rotated by an elevating mechanism. Therefore, it is necessary to move the lid by a distance larger than at least the radius of gyration of the lid by the rotation mechanism. When the lid is provided with an accessory that rotates integrally with the lid, the radius of gyration of the rotating portion including the lid is further increased. As a result, in Patent Document 1, in order to avoid contact between the lid body and the chamber body during rotation of the lid body, the amount of movement of the lid body upward (that is, in the vertical direction between the lid body and the chamber body). There is a problem that it is necessary to secure a large interval).

The present invention has been made to solve the above problems, and one object of the present invention is to rotate the lid body when opening / closing (attaching / detaching) the lid body (moving body). It is an object of the present invention to provide a processing device, an opening / closing mechanism, and a link mechanism capable of suppressing an upward movement amount of a lid body (moving body).

In order to achieve the above object, the processing apparatus according to the first aspect of the present invention includes a chamber body for processing the substrate, a lid covering the upper part of the chamber body, and an opening / closing mechanism for opening and closing the lid from the chamber body. The opening / closing mechanism includes an elevating mechanism that moves the lid up and down to a lowering position where the lid covers the chamber body and an ascending position where the lid is separated upward from the chamber body, and a rotation axis for the lid in the horizontal direction. A rotation mechanism that rotatably supports the lid, a slide mechanism that slidably supports the lid and the rotation mechanism in the lateral direction with respect to the chamber body, and a lid that is connected to the rotation mechanism and interlocked with the slide movement of the rotation mechanism. It includes a link mechanism that operates the rotation mechanism so as to rotate the body.

In the processing apparatus according to the first aspect of the present invention, when the lid is slid laterally in the ascending position as described above, the lid is interlocked with the sliding movement by the link mechanism connected to the rotation mechanism. Rotate. As a result, the lid body can be rotated while retracting the lid body laterally from the chamber body. That is, one of the lids that rotates due to the lateral movement of the lid even at a height position where a part of the lid comes into contact with the chamber body when the lid is simply rotated while stopped above the chamber body. The lid can be rotated while allowing the portion to escape from the chamber body to a non-contact lateral position. As a result, when the lid body is attached and detached, the amount of upward movement of the lid body can be suppressed even when the lid body is rotated. Furthermore, since the lid is rotated in conjunction with the slide movement by the link mechanism, it is possible to easily and quickly rotate the lid simply by sliding the lid, unlike the case where the lid is slid and then rotated. can.

In the processing apparatus according to the first aspect, preferably, the rotating mechanism has a rotating shaft portion provided so that the rotating shaft passes through the position of the center of gravity of the rotating portion including the lid. With this configuration, the moment of inertia and imbalance when rotating the lid around the rotation axis can be minimized. As a result, the lid can be easily rotated.

In the processing apparatus according to the first aspect, preferably, the rotating mechanism has a mounting portion to which the lid body is attached, and the first distance between the rotating shaft and the position of the center of gravity of the rotating portion including the lid body rotates. It is smaller than the second distance between the shaft and the mounting part. As a result, even when the position of the center of gravity is not on the axis of rotation, the axis of rotation is sufficiently close to the position of the center of gravity, so that the moment of inertia when rotating the lid around the axis of rotation can be effectively reduced. Therefore, the lid can be easily rotated.

In the processing apparatus according to the first aspect, preferably, the slide mechanism has a first position in which the lid is located directly above the chamber body and a second position in which the lid is retracted laterally with respect to the chamber body. The lid is slid between, and the link mechanism is configured to increase the amount of rotation of the lid as the lid approaches the first and second positions. The amount of rotation of the lid is the rotation angle of the lid with respect to the lid at the first position. As a result, the lid body can be gradually rotated as the lid body slides, instead of the lid body rotating suddenly at a specific position in the slide direction. As a result, it is possible to suppress a rapid increase in the load for rotating the lid.

In the processing device according to the first aspect, preferably, the link mechanism is a slider crank mechanism configured to rotate and reciprocate up and down in conjunction with the lateral slide movement of the rotation mechanism. With this configuration, the direction in which the link mechanism operates can be directed mainly in the vertical direction, so that the space occupied by the link mechanism can be narrowed in the retracting direction (sliding direction) of the lid. Therefore, it is possible to prevent the link mechanism from becoming an obstacle during maintenance work of the lid body and the chamber body.

In the processing apparatus according to the first aspect, preferably, the slide mechanism has a first position in which the lid is located directly above the chamber body and a second position in which the lid is retracted laterally with respect to the chamber body. The lid body is slid between them, and the slide mechanism moves to a position where the first member is fixed in the slide direction, a position where the first member protrudes to the first position side, and a position where the cover body retracts to the second position side. Includes a second member that is slidably attached to the lid. With this configuration, the second member can be retracted to the second position side together with the lid. As a result, during maintenance work of the lid body and the chamber body in the retracted state, it is possible to prevent the first member from interfering with the work in the vicinity of the first position, so that maintenance workability can be improved.

In the processing apparatus according to the first aspect, preferably, the lower end portion of the rotating portion including the lid body is arranged at a position lower than the upper surface of the chamber body in a state where the lid body in the raised position is slid and rotated. NS. In the ascending position according to this configuration, if the lid in the ascending position is rotated on the spot, it will come into contact with the chamber body. On the other hand, according to the present invention in which the sliding movement and rotation of the lid are linked by the link mechanism, the lower end of the rotating portion does not come into contact with the chamber body, and the position is below the upper surface of the chamber body. Can be rotated. Therefore, the amount of upward movement of the lid by the elevating mechanism can be effectively suppressed.

The opening / closing mechanism according to the second aspect of the present invention is an opening / closing mechanism for opening / closing the lid body provided so as to cover the container body from the container body, and is a rotation that rotatably supports the lid body around a rotation axis in the horizontal direction. A mechanism, a slide mechanism that supports the lid and the rotation mechanism in a laterally slidable manner with respect to the container body, and a rotation mechanism that is connected to the rotation mechanism and rotates the lid in conjunction with the slide movement of the rotation mechanism. It is provided with a link mechanism for operating the above.

In the processing apparatus according to the second aspect of the present invention, as in the first aspect, the height at which a part of the lid body comes into contact with the container body when the lid body is rotated while stopped above the container body. Even at the position, the lateral movement of the lid allows the lid to rotate while allowing a part of the rotating lid to escape from the container body to a non-contact lateral position. As a result, when the lid body is attached and detached, the amount of upward movement of the lid body can be suppressed even when the lid body is rotated. Further, since the lid body is rotated in conjunction with the slide movement by the link mechanism, the lid body can be easily rotated only by sliding the lid body, unlike the case where the lid body is rotated after the slide movement.

The link mechanism according to the third aspect of the present invention is a link mechanism for attaching and detaching a moving body provided so as to cover the fixed body from the fixed body, and is a rotation that rotatably supports the moving body around a rotation axis in the horizontal direction. A mechanism, a slide mechanism that slidably supports a moving body and a rotating mechanism in a lateral direction with respect to a fixed body, and a rotating mechanism that rotates in conjunction with the sliding movement of the rotating mechanism and reciprocates up and down. A slider crank mechanism that operates the rotation mechanism so as to rotate the moving body is provided.

In the link mechanism according to the third aspect of the present invention, as in the first aspect, the height at which a part of the moving body comes into contact with the fixed body when the moving body is rotated while stopped above the fixed body. Also at the position, the lateral movement of the moving body allows the moving body to be rotated while allowing a part of the rotating moving body to escape from the fixed body to a non-contact lateral position. As a result, when the moving body is attached and detached, the amount of upward movement of the moving body can be suppressed even when the moving body is rotated. Further, since the moving body is rotated in conjunction with the sliding movement by the slider crank mechanism, the moving body can be easily rotated by simply sliding the moving body, unlike the case where the moving body is rotated after being slid. .. Further, since the direction in which the slider crank mechanism operates can be mainly directed in the vertical direction in order to rotate the moving body, the space occupied by the slider crank mechanism is narrowed in the lateral direction (sliding direction) which is the retracting direction of the moving body. be able to. Therefore, even when the slider crank mechanism is provided, a large space around the upper region of the fixed body can be secured in the retracted state.

According to the present invention, as described above, when the lid body (moving body) is attached or detached, the amount of upward movement of the lid body (moving body) can be suppressed even when the lid body is rotated.

It is a schematic perspective view of the processing apparatus. It is an enlarged side view of the state where the lid body is attached to the chamber body. It is an enlarged side view of the state which raised the lid body from the chamber body in the 1st position. It is an enlarged side view of the state which the lid body was slid and moved to the 2nd position. It is an enlarged side view which showed the slide mechanism, the rotation mechanism and the link mechanism. It is an enlarged perspective view which showed the slide mechanism, the rotation mechanism and the link mechanism. It is a figure for demonstrating the positional relationship between the position of the center of gravity of a rotating part, and the rotating shaft of a rotating mechanism. It is a schematic diagram which showed the slide mechanism, the rotation mechanism and the link mechanism in the 1st position. It is a schematic diagram which showed the state which the rotation mechanism is between the 1st position and the 2nd position. It is a schematic diagram which showed the slide mechanism, the rotation mechanism and the link mechanism in the 2nd position. It is a schematic diagram for demonstrating the structure of a slider crank mechanism. It is a schematic diagram for demonstrating the configuration example (deformation example) of a slider crank mechanism. It is a figure for demonstrating the positional relationship between the position of the center of gravity of the rotating part and the rotating shaft of a rotating mechanism by a modification. It is a figure (A)-(C) explaining the flow of operation of the link mechanism by a modification.

Hereinafter, embodiments of the present invention will be described with reference to the drawings.

(Configuration of processing equipment)
The configuration of the processing apparatus 100 according to the present embodiment will be described with reference to FIGS. 1 to 12. The processing device 100 is provided adjacent to the transport device 200 that transports the substrate (not shown). Further, the processing device 100 is configured to process the substrate conveyed by the transfer device 200 via a carry-in port (not shown).

As shown in FIG. 1, the processing device 100 includes a chamber body 10. A substantially cylindrical space 11 is formed inside the chamber body 10. However, the shape of the space 11 may be a rectangle or a polygon. The chamber body 10 is configured to process the substrate in the internal space 11. Further, the outer shape of the chamber body 10 has a substantially rectangular parallelepiped shape. The chamber body 10 is an example of the "container body" and the "fixed body" in the claims.

Further, the processing device 100 includes a lid 21. The lid 21 is arranged above the chamber body 10. The lid 21 is provided so as to cover the upper part of the chamber body 10. The lid 21 is configured to seal the space 11 inside the chamber body 10. Further, the lid body 21 has a substantially cylindrical shape.

The space inside the lid 21 is provided with a structure for processing the substrate. For example, the processing device 100 is a dry etching device, and a plasma source for generating plasma is housed inside the lid 21. Further, an accommodating portion 22 for accommodating an electric circuit is provided at the rear portion of the lid 21, and the accommodating portion 22 is provided with, for example, a matching device connected to a high-frequency power supply. The matching box performs impedance matching between the high frequency power supply and the plasma source.

Further, the processing device 100 includes an opening / closing mechanism 30. The opening / closing mechanism 30 is configured to open / close (attach / detach) the lid 21 from the chamber body 10. When the lid 21 is removed from the chamber body 10 by the opening / closing mechanism 30, the space 11 inside the chamber body 10 is opened. FIG. 1 shows a state in which the lid 21 is moved to a position directly above the chamber body 10 by the opening / closing mechanism 30.

The opening / closing mechanism 30 is mainly used during maintenance work of the processing device 100. With the lid 21 removed from the chamber body 10, maintenance of the space 11 inside the chamber body 10 and maintenance of the space inside the lid 21 are performed. At the time of processing the substrate, the lid 21 is attached to the chamber body 10 and the space 11 is sealed.

In the present specification, for convenience, in the horizontal direction, the Y1 direction in which the processing device 100 faces the conveying device 200 is the front of the processing device 100, and the Y2 direction opposite to the Y1 direction is the rear of the processing device 100. The direction is the Y direction. Of the horizontal directions, the direction orthogonal to the Y direction is defined as the X direction. The Z direction orthogonal to the X direction and the Y direction is the vertical direction. The Y direction is the loading / unloading direction of the substrate. The maintenance work is carried out by the operator accessing the chamber body 10 and the lid 21 from the X direction side of the processing device 100.

(Detailed configuration of opening / closing mechanism)
Hereinafter, the detailed configuration of the opening / closing mechanism 30 will be described.

As shown in FIG. 1, the opening / closing mechanism 30 includes an elevating mechanism 40, a rotation mechanism 50, a slide mechanism 60, and a link mechanism 70. The opening / closing mechanism 30 has a pair (two) of units including one elevating mechanism 40, one rotation mechanism 50, one slide mechanism 60, and one link mechanism 70. The opening / closing mechanism 30 movably supports the lid 21 from both sides in the X direction by a pair of units arranged on both sides in the X direction with respect to the lid 21. Each elevating mechanism 40 of the pair of units is installed in the main body 5 of the processing device 100 in which the chamber main body 10 is provided in a fixed state. Since the pair of units are symmetrical with respect to the lid 21 in the X direction and have substantially the same structure, only one unit will be described below.

In the present embodiment, the opening / closing mechanism 30 is operated by a manual operation by an operator. That is, the opening / closing mechanism 30 (elevating mechanism 40, rotation mechanism 50, slide mechanism 60, link mechanism 70) is not provided with a drive source such as an electric motor or a control device for the drive source.

<Elevating mechanism>
The elevating mechanism 40 is configured to move the lid 21 up and down. The elevating mechanism 40 has a lowering position Pz1 (see FIG. 2) in which the lid 21 covers the chamber body 10 and an ascending position Pz2 (see FIGS. 3 and 4) in which the lid 21 is separated upward from the chamber body 10. The lid body 21 is configured to be movable. The elevating mechanism 40 supports the lid 21 so as to be movable in the vertical direction via the slide mechanism 60 and the rotating mechanism 50.

As shown in FIG. 3, the elevating mechanism 40 is configured by a linear motion mechanism. The elevating mechanism 40 has a guide pillar 41 in the vertical direction and a screw shaft 42 for transmitting a driving force in the vertical direction. The guide pillar 41 guides the movement of the lid 21. A nut portion 43 connected to the lid 21 is attached to the screw shaft 42. The rotation of the screw shaft 42 causes the nut portion 43 to move up and down.

The elevating mechanism 40 includes a manual input mechanism 44. In the example of FIG. 1, the input mechanism 44 converts the rotation of the handle 44a into the rotation of the screw shaft 42. The input mechanisms 44 of the pair of units are connected to each other by a transmission shaft for transmitting the rotation of the handle 44a. By rotating the handle 44a provided on one unit in the X direction, the elevating mechanism 40 of both units operates. The drive source of the elevating mechanism 40 may be an electric motor or flood control.

Further, the elevating mechanism 40 includes an urging member 45 that assists the elevating operation by the elevating mechanism 40. The urging member 45 extends in the vertical direction, its lower end is fixed to the main body 5 (see FIG. 1) of the processing device 100, and its upper end is connected to the nut 43. The urging member 45 is provided so as to urge the nut portion 43 upward. The urging member 45 reduces the load on the operator when moving the input mechanism 44 (rotating the screw shaft 42). The urging member 45 is composed of, for example, a gas spring.

<Slide mechanism>
As shown in FIG. 1, the slide mechanism 60 supports the lid 21 and the accommodating portion 22, which are heavy objects, in the vertical direction. Further, the slide mechanism 60 is configured to slidably support the lid 21 and the rotation mechanism 50 with respect to the chamber body 10. The lateral direction may be any direction in the horizontal plane, but in the present embodiment, the slide mechanism 60 slides the lid 21 in the front-rear direction (Y direction) of the processing device 100. The slide mechanism 60 slides the lid 21 in a horizontal plane. Since the position of the lid 21 may change in the lateral direction, the slide mechanism 60 may slide the lid 21 in a direction tilted upward or downward from the horizontal direction.

The slide mechanism 60 has a first position Py1 (see FIG. 3) in which the lid 21 is located directly above the chamber body 10 and a second position Py2 (see FIG. 4) in which the lid 21 is retracted laterally with respect to the chamber body 10. The lid 21 is configured to slide to and from (see).

As shown in FIG. 5, the slide mechanism 60 includes a slide member 61 fixed in the Y direction and a slide rail 62 slidably attached to the lid 21 with respect to the slide member 61. The slide member 61 and the slide rail 62 are examples of the "first member" and the "second member" in the claims, respectively. The slide member 61 is a roller that rotates in an engaged state with the slide rail 62. The slide member 61 is attached to a support member 63 connected to a nut portion 43 of the elevating mechanism 40. In the example of FIG. 5, a plurality (four) of slide members 61 are provided side by side along the Y direction. A connecting portion 63a to which the nut portion 43 is fixed and an elevating roller 63b that rolls in the guide groove 41a of the guide pillar 41 are attached to the support member 63. The support member 63 (and the slide member 61) is restrained (immovable) in the Y direction by the elevating roller 63b and the guide pillar 41.

The slide rail 62 is provided so as to face the support member 63 and the slide member 61 in the X direction (see FIG. 6). The slide rail 62 extends linearly along the Y direction. The slide rail 62 has a concave groove 62a extending in the Y direction, and four slide members 61 are arranged in the concave groove 62a in an engaged state. The slide rail 62 is constrained in the Z direction and the X direction by engagement with the four slide members 61, and can move in the Y direction. The slide rail 62 may be fixed to the support member 63 so that the slide member 61 attached to the lid 21 can be slidable.

The slide mechanism 60 has a regulating member (stopper) (not shown) that determines a slideable range. The first position Py1 is the moving end on the Y1 direction side, and the second position Py2 is the moving end on the Y2 direction side. Further, in the slide mechanism 60, the slide rail 62 is positioned and temporarily fixed at the first position Py1 and the second position Py2 by a locking member (not shown) such as a ball plunger.

<Rotation mechanism>
As shown in FIG. 1, the rotation mechanism 50 is arranged so as to be adjacent to the lid 21 in the X direction, and is connected to the lid 21 from the outside in the X direction. The lid 21 is supported from both sides in the X direction by each rotation mechanism 50 of the pair of units. The rotation mechanism 50 is configured to rotatably support the lid 21 around the horizontal rotation axis RA (see FIG. 5). In this embodiment, the rotation axis RA is an axis in the X direction. The rotation mechanism 50 is supported by the slide mechanism 60, is moved up and down in the Z direction integrally with the slide mechanism 60 by the elevating mechanism 40, and is slid and moved in the Y direction integrally with the slide rail 62.

As shown in FIG. 5, the rotation mechanism 50 has a rotation shaft portion 51. The rotation mechanism 50 is rotatably connected to the slide mechanism 60 (slide rail 62 side) at the rotation shaft portion 51. The rotating shaft portion 51 includes a shaft and a bearing. The rotation mechanism 50 has a mounting portion 52 to which the lid 21 is mounted. When the rotating mechanism 50 rotates around the rotating shaft portion 51, the lid 21 fixed to the mounting portion 52 rotates integrally with the rotating mechanism 50.

As shown in FIG. 6, the mounting portion 52 is provided at a position different from that of the rotating shaft portion 51. The rotating shaft portion 51 and the mounting portion 52 are connected by a rotating plate portion 53. The mounting portion 52 and the rotating plate portion 53 rotate integrally with the rotating shaft portion 51.

As shown in FIG. 7, in the present embodiment, the rotating shaft portion 51 is provided so that the rotating shaft RA passes through the center of gravity position MG of the rotating portion 20 including the lid body 21. The rotating portion 20 includes a lid 21 and an accessory that rotates integrally with the lid 21, and means the entire structure rotated by the rotating mechanism 50. The rotating portion 20 includes a housing portion 22 provided at the rear portion of the lid 21. The position of the rotation axis RA and the position of the center of gravity MG are mathematically determined at one point, but in practice, in consideration of tolerances and the like, when viewed from the direction along the rotation axis RA (X direction) as shown in FIG. 7, for example. If the center-of-gravity position MG is within the range of the diameter (outer diameter) Da of the rotating shaft portion 51, it may be considered that the rotating shaft RA passes through the center-of-gravity position MG. Even in this case, the moment of inertia and the imbalance around the rotation axis can be sufficiently reduced, and the rotational torque required for rotating the lid 21 is not so different.

The rotation mechanism 50 is configured to rotate the lid 21 by approximately 1/4 rotation (rotation by about 90 degrees). That is, in the rotation mechanism 50, the lid 21 (lower surface of the lid 21) has a first posture along the horizontal plane (see FIG. 3) and the lid 21 has a second posture along the vertical plane (XZ plane) (see FIG. 4). ) And the lid 21 can be rotated.

As shown in FIG. 7, the lid body 21 is configured to be separable into a lower first portion 21a and an upper second portion 21b. The attachment portion 52 of the rotation mechanism 50 is connected to the upper second portion 21b of the lid body 21. The opening / closing mechanism 30 opens / closes the entire lid 21 in a state where the first portion 21a and the second portion 21b are connected. The opening / closing mechanism 30 separates the second portion 21b from the first portion 21a and opens / close the second portion 21b in a state where the first portion 21a and the second portion 21b can be separated. As a result, the maintenance work of the second portion 21b can be easily performed.

<Link mechanism>
As shown in FIG. 6, the link mechanism 70 is a mechanism configured to perform a desired operation by a plurality of joints and a link connecting the plurality of joints. The link mechanism 70 is connected to the rotation mechanism 50. The link mechanism 70 operates the rotation mechanism 50 so as to rotate the lid 21 in conjunction with the slide movement of the rotation mechanism 50. In the link mechanism 70, the link mechanism 70 itself rotates as the rotation mechanism 50 slides, and this rotation causes the attachment portion 52 of the rotation mechanism 50 to rotate around the rotation axis RA.

When the lid 21 is in the first position Py1 (see FIG. 8), the link mechanism 70 puts the lid 21 in the first horizontal posture via the rotation mechanism 50, and the lid 21 is in the second position Py2 (see FIG. 10). (See), the lid 21 is configured to be in a vertical second position via a rotation mechanism 50.

As shown in FIGS. 8 to 10, the link mechanism 70 increases the amount of rotation θ of the lid 21 as the lid 21 approaches the second position Py2 from the first position Py1. The amount of rotation between the first posture and the second posture is 90 degrees. That is, when the lid 21 in the first posture at the first position Py1 has a rotation amount θ = 0 degrees, the rotation amount θ approaches θ = 90 degrees as it approaches the second position Py2. The amount of rotation θ increases monotonically toward the second position Py2. When the lid body 21 moves from the second position Py2 to the first position Py1, the link mechanism 70 monotonically reduces the rotation amount θ of the lid body 21 in the reverse route. The link mechanism 70 is configured so that the position of the lid 21 (that is, the rotation mechanism 50) in the slide direction (Y direction) and the amount of rotation have a one-to-one correspondence.

The link mechanism 70 is a slider crank mechanism configured to rotate and reciprocate up and down in conjunction with the lateral slide movement of the rotation mechanism 50.

Specifically, as shown in FIG. 8, the link mechanism 70 includes a slider guide portion 71 that extends in the vertical direction and is fixed in the slide direction, a slider portion 72 that reciprocates along the slider guide portion 71, and one end thereof. Is connected to the rotation mechanism 50, and the other end includes a link portion 73 rotatably connected to the slider portion 72.

The slider guide portion 71 is fixed to the support member 63 (see FIG. 5) of the slide mechanism 60. The slider guide portion 71 is a guide rod that extends linearly in the vertical direction. The slider guide portion 71 may be a guide rail, a guide groove, a slit, or the like.

The slider portion 72 is slidably attached to the slider guide portion 71. The slider portion 72 (see FIG. 5) is a guide bush (cylindrical member) through which a guide rod is inserted. The slider portion 72 can move in the Z direction with respect to the slider guide portion 71, and cannot move in the X direction and the Y direction with respect to the slider guide portion 71. In the process of operating the link mechanism 70, the slider portion 72 reciprocates in the Z direction along the slider guide portion 71.

The link portion 73 is connected to the rotation mechanism 50 so as to rotate integrally with the rotation mechanism 50. Specifically, the link portion 73 is provided on the rotating plate portion 53 that connects the rotating shaft portion 51 of the rotating mechanism 50 and the mounting portion 52. One end of the link portion 73 is rotatably connected to the slide mechanism 60 (slide rail 62 side) via the rotating plate portion 53 and the rotating shaft portion 51, is bent in an L shape, and the other end 73b side is a slider. It extends to part 72. The link portion 73 is connected to the slider portion 72 via the rotation shaft 74 at the other end 73b portion.

8 to 10 show the operation process of the link mechanism 70. In FIGS. 8 to 10, for convenience, the lid 21 attached to the attachment portion 52 is schematically illustrated by a dotted rectangular frame in order to explain the posture of the lid 21.

As shown in FIG. 8, at the first position Py1, the lid 21 is held in the first posture, and the slider portion 72 of the link mechanism 70 is located at the top dead center (upper limit position of the stroke).

When the lid 21 is moved in the Y2 direction toward the second position Py2, one end 73a side of the link portion 73 is moved in the Y2 direction. Since the slider portion 72 on the other end 73b side of the link portion 73 does not move in the Y direction, the link portion 73 is rotated around the rotation shaft 74 while pushing down the slider portion 72 downward. As shown in FIG. 9, at the third position between the first position Py1 and the second position Py2, the slider portion 72 of the link mechanism 70 is located at the bottom dead center (lower limit position of the stroke), and at this time, the lid body. 21 is in a state of being rotated diagonally. In FIGS. 9 and 10, the state during rotation of the lid 21 is indicated by a chain double-dashed line.

When the lid 21 is moved in the Y2 direction beyond the intermediate position, one end 73a side of the link portion 73 is further moved in the Y2 direction. As a result, the link portion 73 is rotated around the rotation shaft 74 while pulling up the slider portion 72 upward. As shown in FIG. 10, when the lid 21 reaches the second position Py2, the link mechanism 70 is rotated by 90 degrees, and the slider portion 72 of the link mechanism 70 returns to the top dead center.

Such a configuration of the link mechanism 70 corresponds to a so-called double slider crank chain mechanism. As shown in a schematic diagram in FIG. 11, structurally, the link mechanism 70 is structurally composed of a first joint composed of a rotation mechanism 50 (rotation shaft portion 51) and a slide mechanism 60 on one end 73a side of the link portion 73. It has a first slider in the Y direction. The link mechanism 70 has a second joint formed by the rotating shaft 74 and a second slider formed by the slider portion 72 on the other end 73b side of the link portion 73. By connecting the link portion 73 and the rotation mechanism 50, the first joint (rotation mechanism 50) and the lid 21 attached to the first joint (rotation mechanism 50) rotate in conjunction with the movement of the first slider. The link mechanism 70 may have such a structure, and for example, the shape of the link portion 73 may be arbitrary. In FIG. 11, the hatched portion is the third position where the second slider (slider portion 72) reaches the bottom dead center.

In the example of FIG. 11, the link portion 73 is tilted at 45 degrees at the first position Py1, and the lid 21 rotates 45 degrees at the third position. The moving distance of the lid 21 between the first position Py1 and the third position is equal to the moving distance of the lid 21 between the second position Py2 and the third position. The third position is the midpoint between the first position Py1 and the second position Py2. In the case of FIG. 12, the link portion 73 is tilted at 30 degrees at the first position Py1, and the lid 21 rotates 60 degrees at the third position. The third position is closer to the second position Py2 than the first position Py1. The link mechanism 70 may have such a configuration.

(Positional relationship between rotating part and fixed part)
In the opening / closing mechanism 30 having the above configuration, as shown in FIG. 3, the elevating mechanism 40 moves the lid 21 by the distance D11 between the descending position Pz1 and the ascending position Pz2. In this embodiment, the distance D11 is smaller than the Y-direction distance D12 between the end of the rotating portion 20 in the Y2 direction and the rotation axis RA. The ascending position Pz2 is a height position where the rotating portion 20 comes into contact with the chamber body 10 if the lid 21 is rotated directly above the chamber body 10 (first position Py1). In the example of FIG. 3, when the lid body 21 is rotated as it is at the ascending position Pz2, the accommodating portion 22 provided at the rear portion of the lid body 21 is in a position where it comes into contact with the chamber body 10.

As shown in FIG. 4, the slide mechanism 60 moves the lid 21 between the first position Py1 and the second position Py2 by the slide distance D13. The slide distance D13 of the slide mechanism 60 is larger than the distance D11 (see FIG. 3).

In the present embodiment, the lower end portion 20a of the rotating portion 20 is below the upper surface 10a of the chamber body 10 in a state where the lid 21 at the ascending position Pz2 is slid and rotated (the state of the second position Py2 and the second posture). It is placed in the position where The lower end portion 20a of the rotating portion 20 in the second posture is the rear side surface of the accommodating portion 22. In this way, even if the upward movement distance D11 by the elevating mechanism 40 is small, the lid 21 can be rotated to the second posture without the rotating portion 20 coming into contact with the chamber body 10.

Further, when the lid body 21 is in the second position Py2 (see FIG. 4) in the second posture, the Y1 direction end portion 21c of the lid body 21 is located in the Y2 direction with respect to the Y2 direction end portion of the chamber body 10. Therefore, the entire lid 21 is retracted in the Y2 direction from the space directly above the chamber body 10.

Further, as shown in FIGS. 3 and 4, the slide rail 62 protrudes toward the first position Py1 side (Y1 direction side) from the Y direction position to the upper side of the chamber body 10 at the first position Py1 (see FIG. 3). It slides to the position where it is to be moved and the position where it is retracted to the second position Py2 side (Y2 direction side).

Here, as shown in FIG. 1, at the time of maintenance, the work space of the worker is directly above the chamber body 10, but the access path of the worker is on the X direction side of the work space. Therefore, the slide rail 62 at the first position Py1 is located on the access path of the operator. On the other hand, as shown in FIG. 4, the slide rail 62 at the second position Py2 retracts in the Y2 direction from the access path of the operator.

Further, as shown in FIG. 10, with the lid 21 at the second position Py2, the link mechanism 70 is closer to the second position Py2 than the end of the slide rail 62 on the first position Py1 side in the slide direction. Have been placed. Therefore, the link mechanism 70 does not interfere with the maintenance work. The link mechanism 70 may be arranged closer to the first position Py1 than the slide rail 62 of the second position Py2.

(Operation of opening / closing mechanism)
Next, the operation of the opening / closing mechanism 30 will be described. When the lid 21 is removed from the chamber body 10 by the opening / closing mechanism 30, the lid 21 is first moved in the Z1 direction from the lowering position Pz1 (see FIG. 2) to the rising position Pz2 (see FIG. 3) by the elevating mechanism 40. When the operator operates (rotates) the handle 44a of the input mechanism 44, the lid 21, the accommodating portion 22, the slide mechanism 60, the rotation mechanism 50, and the link mechanism 70 move upward. The Y-direction position of the lid 21 remains the first position Py1. The lid 21 maintains the first posture (rotation amount θ = 0 degrees).

Next, the lid body 21 is slid and moved in the Y2 direction from the first position Py1 (see FIG. 3) to the second position Py2 (see FIG. 4) by the slide mechanism 60. When the operator grips the grip portion (not shown) of the lid body 21 and pushes it toward the second position Py2, the lid body 21 moves in the Y2 direction. In order to facilitate the rotation of the lid body 21, it is preferable that the operator pushes the position of the lid body 21 above the rotation shaft portion 51 at an angle slightly toward the Z1 direction. The lid 21, the accommodating portion 22, the slide rail 62, the rotating mechanism 50, and the link portion 73 move in the Y2 direction.

The link mechanism 70 rotates the rotation mechanism 50 in conjunction with the slide movement of the lid 21 (rotation mechanism 50) (see FIGS. 8 to 10). Since the lid 21 and the accommodating portion 22 rotate while retracting in the Y2 direction, the chamber body 10 is along the movement locus Tr while the rotating portion 20 (accommodating portion 22) maintains a non-contact state with respect to the chamber body 10. Rotate so as to enter the side of the Y2 direction side. When the lid body 21 reaches the second position Py2, the lid body 21 is in the second posture (rotation amount θ = 90 degrees) facing in the vertical direction.

As a result, the lid 21 is retracted from the region directly above the chamber body 10 and is in the second posture (see FIG. 4) facing in the vertical direction. The operator performs maintenance work on the inside of the chamber body 10 and the inside of the lid 21. When the retracted lid 21 is closed (attached to the chamber body 10), the above procedure is only executed in reverse, and thus the description thereof will be omitted.

(Effect of this embodiment)
In this embodiment, the following effects can be obtained.

In the processing device 100 (opening / closing mechanism, link mechanism) of the present embodiment, when the lid 21 (moving body) is slid laterally in the raised position as described above, the link mechanism 70 connected to the rotating mechanism 50 is used. The lid 21 rotates in conjunction with the slide movement. As a result, the lid body 21 can be rotated while retracting the lid body 21 laterally from the chamber body 10 (container body, fixed body). That is, when the lid 21 is simply rotated while stopped above the chamber body 10, even at a height position where a part of the lid 21 comes into contact with the chamber body 10, the lid 21 is rotated by lateral movement of the lid 21. The lid body 21 can be rotated while allowing a part of the lid body 21 to be released from the chamber body 10 to a non-contact lateral position. As a result, even when the lid 21 is rotated when the lid 21 (moving body) is opened / closed (attached / detached), the amount of upward movement of the lid 21 can be suppressed. Further, since the lid 21 is rotated by the link mechanism 70 in conjunction with the slide movement, the lid 21 can be easily rotated by simply sliding the lid 21, unlike the case where the lid 21 is slid and then rotated. Can be made to.

Further, in the present embodiment, as described above, the rotation mechanism 50 has a rotation shaft portion 51 provided on the rotation shaft RA passing through the center of gravity position MG of the rotation portion 20 including the lid 21. As a result, the moment of inertia and the imbalance when rotating the lid 21 around the rotation axis RA can be minimized. As a result, the lid 21 can be easily rotated.

Further, in the present embodiment, as described above, the link mechanism 70 is configured to increase the amount of rotation (angle) θ of the lid 21 as the lid 21 approaches the second position Py2 from the first position Py1. ing. As a result, the lid 21 can be gradually rotated as the lid 21 slides. As a result, it is possible to suppress a rapid increase in the load for rotating the lid 21.

Further, in the present embodiment, as described above, the link mechanism 70 is a slider crank mechanism configured to rotate and reciprocate up and down in conjunction with the lateral slide movement of the rotation mechanism 50. .. As a result, the direction in which the link mechanism 70 operates can be directed mainly in the vertical direction, so that the space occupied by the link mechanism 70 can be narrowed in the retracting direction (sliding direction) of the lid 21. Therefore, it is possible to prevent the link mechanism 70 from becoming an obstacle during maintenance work of the lid body 21 and the chamber body 10.

Further, in the present embodiment, as described above, the slide mechanism 60 moves to the slide member 61 fixed in the slide direction, the position protruding toward the first position Py1 side with respect to the slide member 61, and the second position Py2 side. Includes a slide rail 62 that is slidably attached to the lid 21 at the retracted position. As a result, when the lid 21 is slid from the first position Py1 to the second position Py2, the slide rail 62 can be retracted together with the lid 21 to the second position Py2 side. As a result, during maintenance work of the lid 21 and the chamber body 10 in the retracted state, it is possible to prevent the slide rail 62 from interfering with the work near the first position Py1, so that maintenance workability can be improved. ..

Further, in the present embodiment, as described above, the lower end portion 20a of the rotating portion 20 including the lid body 21 is below the upper surface 10a of the chamber body 10 in a state where the lid body 21 in the raised position is slid and rotated. It is placed in the position where. As a result, the lower end portion 20a of the rotating portion 20 can be rotated to a position below the upper surface 10a of the chamber main body 10 without contacting the chamber main body 10. Therefore, the amount of upward movement of the lid 21 by the elevating mechanism 40 can be effectively suppressed.

[Modification example]
It should be noted that the embodiments disclosed this time are exemplary in all respects and are not considered to be restrictive. The scope of the present invention is shown by the scope of claims rather than the description of the above-described embodiment, and further includes all modifications (modifications) within the meaning and scope equivalent to the scope of claims.

For example, in the above embodiment, the rotation mechanism 50 has a rotation shaft portion 51 provided on the rotation shaft RA passing through the center of gravity position MG of the rotation portion 20 including the lid 21, but the present invention shows the present invention. Not limited to this. In the present invention, the rotating shaft portion 51 may be provided on the rotating shaft RA that passes near the center of gravity position MG of the rotating portion 20.

In the modified example shown in FIG. 13, the rotating shaft portion 51 is provided so that the rotating shaft RA passes near the center of gravity position MG of the rotating portion 20 including the lid body 21. In the modified example shown in FIG. 13, the rotation axis RA is arranged at a position near the center of gravity MG. The smaller the distance between the rotation axis RA and the center of gravity position MG, the more preferable.

As a result, the moment of inertia when rotating the lid 21 around the rotation axis RA can be reduced. As a result, the operator can easily manually rotate the lid 21 without using a drive source such as a motor to rotate the lid 21.

Further, in this modification, as a predetermined range of the distance between the rotating shaft RA and the center of gravity position MG, the first distance D1 between the rotating shaft RA and the center of gravity position MG of the rotating portion 20 is the rotating shaft RA and the mounting portion 52. It is smaller than the second distance D2 between and. As a result, even when the center-of-gravity position MG is not on the rotation axis RA, the rotation axis RA is sufficiently close to the center-of-gravity position MG, so that the lid 21 can be easily rotated.

Further, in the above embodiment, an example is shown in which the rotating mechanism 50 has a mounting portion 52 to which the lid 21 is mounted at a position different from that of the rotating shaft portion 51, but the present invention is not limited to this. .. In the present invention, the lid 21 may be directly attached to the rotating shaft portion 51 of the rotating mechanism 50. That is, the rotating shaft portion 51 and the mounting portion 52 may be provided at the same position (coaxial).

Further, in the above embodiment, an example is shown in which the link mechanism 70 is configured so that the rotation amount θ of the lid body 21 is increased as the lid body 21 approaches the second position Py2 from the first position Py1. Not limited to this. In the present invention, the link mechanism 70 may be configured to rotate the lid 21 when a predetermined position between the first position Py1 and the second position Py2 is reached.

Further, in the above embodiment, an example in which the lid body 21 is rotated 1/4 (rotated by 90 degrees) is shown, but the present invention is not limited to this. The lid 21 may be rotated at an angle other than 90 degrees. For example, the lid 21 may be rotated to a predetermined angle in the range of 75 degrees or more and 180 degrees or less. The predetermined angle at which the lid 21 is rotated may be in the range of about ± 5 degrees in consideration of an error.

Further, in the above embodiment, an example in which the link mechanism 70 is a slider crank mechanism is shown, but the present invention is not limited to this. In the present invention, the link mechanism 70 may be a link mechanism having a structure other than the slider crank mechanism. For example, instead of providing the slider portion 72 and the slider guide portion 71 on the other end 73b of the link portion 73, the other end 73b of the link portion 73 is connected to the fixed portion via the rotation shaft 74, and the link portion 73 itself can be expanded and contracted. May be provided with a telescopic mechanism.

Further, in the above embodiment, an example is shown in which the slider portion 72 of the link mechanism 70 linearly moves in the vertical direction along the slider guide portion 71, but the present invention is not limited to this. The slider guide portion may be composed of an oval (oval) orbit, an elliptical orbit, or a circular orbit.

Further, in the above embodiment, an example is shown in which the lower end portion 20a of the rotating portion 20 is arranged at a position lower than the upper surface 10a of the chamber main body 10 in a state where the lid 21 in the raised position is slid and rotated. However, the present invention is not limited to this. In the present invention, the lower end 20a of the rotating portion 20 may be arranged at the same height as or above the upper surface 10a of the chamber body 10.

Further, in the above embodiment, an example in which the accommodating portion 22 is provided in the lid 21 is shown, but the present invention is not limited to this. In the present invention, the lid 21 does not have to be provided with the accommodating portion 22. Further, the accommodating portion 22 may be provided at another position of the lid body 21, such as the upper portion of the lid body 21 instead of the rear portion. Accessories other than the accommodating portion 22 may be provided on the lid 21.

Further, in the above embodiment, an example of the configuration in which the slide mechanism 60 manually slides the lid 21 is shown, but the present invention is not limited to this. The slide mechanism 60 may be configured to electrically slide and move the lid 21 by a drive source such as an electric motor.

Further, in the above embodiment, an example of the opening / closing mechanism 30 of the lid 21 of the processing device 100 is shown, but the present invention is not limited to this. The opening / closing mechanism of the present invention can be applied to opening / closing a lid in a structure including a lid and a container body, and may be applied to opening / closing a lid other than the processing device 100.

Further, in the above embodiment, an example of the link mechanism 70 used for the opening / closing mechanism 30 of the lid 21 of the processing device 100 is shown, but the present invention is not limited to this. The link mechanism of the present invention is not limited to the lid and the container body, and can be applied to the attachment / detachment of the moving body in the structure including the fixed body and the moving body covering the fixed body, and the moving body other than the lid body. It may be applied to the opening / closing mechanism of.

In the above embodiment, the link mechanism 70 shows an example in which the link portion 73 connected to the slider guide portion 71 attached to the support member 63 on the non-rotating side via the constant rotation shaft 74 and the slider portion 72 is used. However, the present invention is not limited to this. For example, as shown in FIGS. 14 (A), (B), and (C), the link mechanism 70 is in non-contact with the fixed portion 80 at the first position Py1, and when the rotating mechanism 50 is slid by the slide mechanism 60, the link portion 73 The other end of the link mechanism may be a link mechanism that contacts (connects) the fixed portion 80. The link mechanism 70 operates the rotation mechanism 50 connected to one end side of the link portion 73 when the slide movement of the link portion 73 is locked by the fixing portion 80 and is further slid to the second position Py2 side. This link mechanism is a link mechanism including a joint having two degrees of freedom of rotation and slide.

10: Chamber body (container body, fixed body), 10a: upper surface, 20: rotating part, 20a: lower end, 21: lid (moving body), 30: opening / closing mechanism, 50: rotating mechanism, 51: rotating shaft part , 52: Mounting part, 60: Slide mechanism, 61: Slide member (first member), 62: Slide rail (second member), 70: Link mechanism, 100: Processing device, D1: First distance, D2: First 2 distance, MG: center of gravity position, Py1: 1st position, Py2: 2nd position, Pz1: descending position, Pz2: ascending position, RA: rotation axis, θ: rotation amount

Claims (9)

The chamber body that processes the substrate and
A lid covering the upper part of the chamber body and
It is provided with an opening / closing mechanism for opening / closing the lid from the chamber body.
The opening / closing mechanism
An elevating mechanism for moving the lid up and down to a lowering position where the lid covers the chamber body and an ascending position where the lid is separated upward from the chamber body.
A rotation mechanism that rotatably supports the lid body around a horizontal rotation axis,
A slide mechanism that supports the lid and the rotation mechanism in a laterally slidable manner with respect to the chamber body.
A processing device including a link mechanism connected to the rotation mechanism and operating the rotation mechanism so as to rotate the lid in conjunction with the slide movement of the rotation mechanism. The processing apparatus according to claim 1, wherein the rotating mechanism has a rotating shaft portion provided so that the rotating shaft passes through the position of the center of gravity of the rotating portion including the lid body. The rotating mechanism has a mounting portion to which the lid body is mounted.
The processing apparatus according to claim 1, wherein the first distance between the rotating shaft and the position of the center of gravity of the rotating portion including the lid is smaller than the second distance between the rotating shaft and the mounting portion. The slide mechanism slides the lid body between a first position where the lid body is located directly above the chamber body and a second position where the lid body is retracted laterally with respect to the chamber body. Move,
The link mechanism according to any one of claims 1 to 3, wherein the link mechanism is configured to increase the amount of rotation of the lid as the lid approaches the second position from the first position. Processing equipment. The link mechanism is any one of claims 1 to 4, which is a slider crank mechanism configured to rotate and reciprocate up and down in conjunction with the lateral slide movement of the rotation mechanism. The processing device described. The slide mechanism slides the lid body between a first position where the lid body is located directly above the chamber body and a second position where the lid body is retracted laterally with respect to the chamber body. Move,
The slide mechanism is slidable to a first member fixed in the slide direction, a position protruding toward the first position side with respect to the first member, and a position retracted toward the second position side. The processing apparatus according to any one of claims 1 to 5, further comprising a second member attached to the device. Any of claims 1 to 6, wherein the lower end of the rotating portion including the lid is arranged below the upper surface of the chamber body in a state where the lid in the raised position is slid and rotated. The processing apparatus according to item 1. An opening / closing mechanism for opening and closing a lid provided so as to cover the container body from the container body.
A rotation mechanism that rotatably supports the lid body around a horizontal rotation axis,
A slide mechanism that slidably supports the lid body and the rotation mechanism in the lateral direction with respect to the container body,
An opening / closing mechanism that is connected to the rotation mechanism and includes a link mechanism that operates the rotation mechanism so as to rotate the lid in conjunction with the sliding movement of the rotation mechanism. A link mechanism for attaching and detaching a moving body provided so as to cover the fixed body from the fixed body.
A rotation mechanism that rotatably supports the moving body around a horizontal rotation axis,
A slide mechanism that slidably supports the moving body and the rotating mechanism in the lateral direction with respect to the fixed body, and
It is provided with a slider crank mechanism which is connected to the rotation mechanism, rotates in conjunction with the slide movement of the rotation mechanism, and reciprocates up and down to operate the rotation mechanism so as to rotate the moving body. Link mechanism.

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