JP7490440B2 - Processing device, opening/closing mechanism and link mechanism - Google Patents

Description

This invention relates to a processing device, an opening/closing mechanism, and a link mechanism, and in particular to a processing device, an opening/closing mechanism, and a link mechanism in which a lid (movable body) is opened and closed (attached and detached).

Conventionally, processing equipment that opens and closes a lid for maintenance work is known (see, for example, Patent Document 1).

The above-mentioned Patent Document 1 discloses a processing device that includes a chamber body, a lid body that is openably and closably mounted on the chamber body, and an opening/closing device that opens and closes the lid body. The opening/closing device of this processing device has a lifting mechanism that lifts the lid body to a position where the lid body can rotate vertically without contacting the chamber body, a rotation mechanism that rotates the lid body vertically, and a slide mechanism that slides the lid body to a position where it does not overlap with the chamber body in the vertical state. The lifting mechanism, rotation mechanism, and slide mechanism each have a motor, and their operation is controlled by a control unit.

When performing maintenance on the processing equipment, the lifting mechanism first raises the lid to a position where it can be rotated vertically without coming into contact with the chamber body. In this state, the rotation mechanism rotates the lid a quarter turn to a vertical position. Next, the sliding mechanism slides the lid to a position where it is removed from the chamber body. This leaves the lid no longer above the chamber body, making it possible to perform maintenance on the inside of the chamber body.

Patent No. 5595202

In Patent Document 1, when the lid is removed from the chamber body, the lifting mechanism raises the lid to a position where it will not come into contact with the chamber body even when the lid is rotated. This requires that the lid be moved at least a distance greater than the radius of rotation of the lid by the rotation mechanism. If the lid is provided with an attachment that rotates integrally with the lid, the radius of rotation of the rotating part including the lid becomes even greater. As a result, Patent Document 1 has the problem that a large amount of upward movement of the lid (i.e., the vertical distance between the lid and the chamber body) must be ensured in order to avoid contact between the lid and the chamber body when the lid is rotated.

This invention has been made to solve the problems described above, and one object of the invention is to provide a processing device, an opening/closing mechanism, and a link mechanism that can reduce the amount of upward movement of the lid body (movable body) when opening/closing (attaching/detaching) the lid body (movable body) even when the lid body is rotated.

In order to achieve the above-mentioned object, a processing apparatus according to a first aspect of the present invention comprises a chamber body for processing a substrate, a lid body covering an upper part of the chamber body, and an opening/closing mechanism for opening and closing the lid body from the chamber body, the opening/closing mechanism including a lifting mechanism for moving the lid body up and down to a lowered position where the lid body covers the chamber body and an elevated position where the lid body is spaced above the chamber body, a rotation mechanism for supporting the lid body rotatably about a horizontal rotation axis, a slide mechanism for supporting the lid body and the rotation mechanism slidably laterally relative to the chamber body , and a link mechanism connected to the rotation mechanism, having a plurality of joints and links connecting the plurality of joints, and operating the rotation mechanism to rotate the lid body in conjunction with the sliding movement of the rotation mechanism.

In the processing apparatus according to the first aspect of the present invention, as described above, when the lid body is slid laterally at the raised position, the link mechanism connected to the rotation mechanism rotates the lid body in conjunction with the sliding movement. This allows the lid body to be rotated while retracting laterally from the chamber body. That is, even at a height position where a part of the lid body comes into contact with the chamber body when the lid body is simply rotated while stopped above the chamber body, the lid body can be rotated while the part of the rotating lid body escapes to a lateral position where it does not come into contact with the chamber body by the lateral movement of the lid body. As a result, even when the lid body is rotated when attaching or detaching the lid body, the amount of upward movement of the lid body can be suppressed. Furthermore, since the link mechanism rotates the lid body in conjunction with the sliding movement, the lid body can be easily and quickly rotated by simply sliding the lid body, unlike when the lid body is rotated after sliding the lid body.
A processing apparatus according to a second aspect of the present invention comprises a chamber body for processing a substrate, a lid body covering an upper part of the chamber body, and an opening/closing mechanism for opening and closing the lid body from the chamber body, the opening/closing mechanism including a lifting mechanism for moving the lid body up and down to a lowered position where the lid body covers the chamber body and an elevated position where the lid body is spaced above the chamber body, a rotation mechanism for supporting the lid body rotatably about a horizontal rotation axis, a slide mechanism for supporting the lid body and the rotation mechanism slidably laterally relative to the chamber body, and a link mechanism connected to the rotation mechanism and operating the rotation mechanism to rotate the lid body in conjunction with the sliding movement of the rotation mechanism, and the link mechanism operates the rotation mechanism in conjunction with the sliding movement of the rotation mechanism so that there is a one-to-one correspondence between the position of the lid body in the sliding direction and the amount of rotation.
A processing apparatus according to a third aspect of the present invention comprises a chamber body for processing a substrate, a lid body covering an upper part of the chamber body, and an opening/closing mechanism for opening and closing the lid body from the chamber body, the opening/closing mechanism including a lifting mechanism for moving the lid body up and down to a lowered position where the lid body covers the chamber body and an upper position where the lid body is spaced above the chamber body, a rotation mechanism for supporting the lid body rotatably about a horizontal rotation axis, a sliding mechanism for supporting the lid body and the rotation mechanism slidably laterally relative to the chamber body, and a link mechanism connected to the rotation mechanism and operating the rotation mechanism to rotate the lid body in conjunction with the sliding movement of the rotation mechanism, the rotation mechanism having an attachment portion to which the lid body is attached, and a first distance between the rotation axis and a center of gravity of the rotating part including the lid body is smaller than a second distance between the rotation axis and the attachment portion.
A processing apparatus according to a fourth aspect of the present invention comprises a chamber body for processing a substrate, a lid body covering an upper part of the chamber body, and an opening/closing mechanism for opening and closing the lid body from the chamber body, the opening/closing mechanism including a lifting mechanism for moving the lid body up and down to a lowered position where the lid body covers the chamber body and an upper position where the lid body is spaced above the chamber body, a rotation mechanism for supporting the lid body rotatably about a horizontal rotation axis, a slide mechanism for supporting the lid body and the rotation mechanism so that they can slide laterally relative to the chamber body, and a link mechanism connected to the rotation mechanism and operating the rotation mechanism to rotate the lid body in conjunction with the sliding movement of the rotation mechanism, the link mechanism being a slider crank mechanism configured to rotate and reciprocate up and down in conjunction with the lateral sliding movement of the rotation mechanism.

In the processing apparatus according to the first to fourth aspects, the rotation mechanism preferably has a rotation shaft portion provided such that the rotation shaft passes through the center of gravity of the rotating portion including the lid. With this configuration, the moment of inertia and imbalance when rotating the lid around the rotation shaft can be minimized. As a result, the lid can be easily rotated.

In the processing apparatus according to the first , second or fourth aspect, the rotation mechanism preferably has an attachment part to which the lid is attached, and a first distance between the rotation axis and the center of gravity of the rotating part including the lid is smaller than a second distance between the rotation axis and the attachment part. As a result, even if the center of gravity is not on the rotation axis, the rotation axis is sufficiently close to the center of gravity, so that the moment of inertia when rotating the lid around the rotation axis can be effectively reduced. Therefore, the lid can be easily rotated.

In the processing apparatus according to the first to fourth aspects, preferably, the slide mechanism slides the lid between a first position where the lid is located directly above the chamber body and a second position where the lid is laterally retracted from the chamber body, and the link mechanism is configured to increase the amount of rotation of the lid as the lid approaches the second position from the first position. The amount of rotation of the lid is the rotation angle of the lid based on the lid at the first position. This allows the lid to rotate gradually as the lid slides, rather than suddenly at a specific position in the sliding direction. As a result, a sudden increase in the load required to rotate the lid can be suppressed.

In the processing apparatus according to the first to third aspects, the link mechanism is preferably a slider crank mechanism configured to rotate and reciprocate up and down in conjunction with the lateral sliding movement of the rotation mechanism. With this configuration, the direction in which the link mechanism operates can be directed primarily in the vertical direction, so that the space occupied by the link mechanism can be narrowed in the retraction direction (sliding direction) of the lid body. This prevents the link mechanism from getting in the way during maintenance work on the lid body or the chamber body.

In the processing apparatus according to the first to fourth aspects, preferably, the slide mechanism slides the lid between a first position where the lid is located directly above the chamber body and a second position where the lid is retracted laterally relative to the chamber body, and the slide mechanism includes a first member fixed in the sliding direction and a second member attached to the lid so as to be slidable between a position protruding toward the first position relative to the first member and a position retracted toward the second position. With this configuration, the second member can be retracted toward the second position together with the lid. This prevents the first member from interfering with the work near the first position during maintenance work on the lid or the chamber body in the retracted state, thereby improving maintenance workability.

In the processing apparatus according to the first to fourth aspects, preferably, when the lid in the raised position is slid and rotated, the lower end of the rotating part including the lid is located at a position below the upper surface of the chamber body. In the raised position according to this configuration, if the lid in the raised position were to be rotated in place, it would come into contact with the chamber body. In contrast, according to the present invention, in which the sliding movement and rotation of the lid are linked by a link mechanism, the lower end of the rotating part can be rotated to a position below the upper surface of the chamber body without coming into contact with the chamber body. Therefore, the amount of upward movement of the lid by the lifting mechanism can be effectively suppressed.

An opening/closing mechanism according to a fifth aspect of the present invention is an opening/closing mechanism for opening and closing a lid body, which is provided to cover the container body, from the container body, and includes a rotation mechanism for supporting the lid body rotatably around a horizontal rotation axis, a slide mechanism for supporting the lid body and the rotation mechanism so that they can slide laterally relative to the container body, and a link mechanism connected to the rotation mechanism, having a plurality of joints and links connecting the plurality of joints, and operating the rotation mechanism to rotate the lid body in conjunction with the sliding movement of the rotation mechanism.

In the opening/closing mechanism according to the fifth aspect of the present invention, as in the first aspect, even at a height position where a part of the lid body comes into contact with the container body when the lid body is rotated while stopped above the container body, the lid body can be rotated while moving laterally to a lateral position where the part of the rotating lid body does not come into contact with the container body. As a result, even when the lid body is rotated when attaching or detaching the lid body, the amount of upward movement of the lid body can be suppressed. Furthermore, since the link mechanism rotates the lid body in conjunction with the sliding movement, the lid body can be easily rotated by simply sliding the lid body, unlike when the lid body is rotated after sliding the lid body.
An opening/closing mechanism according to a sixth aspect of the present invention is an opening/closing mechanism for opening and closing a lid body, which is provided to cover the container body, from the container body, and includes a rotation mechanism for supporting the lid body rotatably around a horizontal rotation axis, a slide mechanism for supporting the lid body and the rotation mechanism so that they can slide laterally relative to the container body, and a link mechanism connected to the rotation mechanism and operating the rotation mechanism to rotate the lid body in conjunction with the sliding movement of the rotation mechanism, and the link mechanism operates the rotation mechanism in conjunction with the sliding movement of the rotation mechanism so that there is a one-to-one correspondence between the position of the lid body in the sliding direction and the amount of rotation.

A link mechanism according to a seventh aspect of the present invention is a link mechanism for attaching and detaching a movable body, which is arranged to cover a fixed body, from the fixed body, and includes a rotation mechanism that supports the movable body rotatably about a horizontal rotation axis, a slide mechanism that supports the movable body and the rotation mechanism so that they can slide laterally relative to the fixed body, and a slider crank mechanism that is connected to the rotation mechanism and rotates in conjunction with the sliding movement of the rotation mechanism and moves back and forth up and down, thereby operating the rotation mechanism to rotate the movable body.

In the link mechanism according to the seventh aspect of the present invention, as in the first aspect, even at a height position where a part of the moving body contacts the fixed body when the moving body is rotated while stopped above the fixed body, the moving body can be rotated while moving laterally to a lateral position where the part of the moving body does not contact the fixed body. As a result, even when the moving body is rotated when attaching or detaching the moving body, the amount of upward movement of the moving body can be suppressed. Furthermore, since the moving body rotates in conjunction with the sliding movement by the slider crank mechanism, the moving body can be easily rotated by simply sliding the moving body, unlike the case where the moving body is rotated after sliding the moving body. Furthermore, since the direction in which the slider crank mechanism operates to rotate the moving body can be mainly directed upward and downward, the space occupied by the slider crank mechanism can be narrowed in the lateral direction (sliding direction) which is the retracting direction of the moving body. Therefore, even when the slider crank mechanism is provided, a large space can be secured around the upper region of the fixed body in the retracted state.

According to the present invention, as described above, even when the lid body (movable body) is rotated when attaching or detaching the lid body (movable body), the amount of upward movement of the lid body (movable body) can be suppressed.

FIG. 2 is a schematic perspective view of a processing apparatus. FIG. 4 is an enlarged side view of the state in which the lid is attached to the chamber body. FIG. 11 is an enlarged side view showing the lid body raised from the chamber body at a first position. 13 is an enlarged side view showing a state in which the cover is slid to a second position. FIG. FIG. 4 is an enlarged side view showing a slide mechanism, a rotation mechanism, and a link mechanism. FIG. 4 is an enlarged perspective view showing a slide mechanism, a rotation mechanism, and a link mechanism. 4 is a diagram for explaining the positional relationship between the center of gravity of a rotating portion and a rotation axis of a rotation mechanism. FIG. 4 is a schematic diagram showing a slide mechanism, a rotation mechanism, and a link mechanism in a first position. FIG. 4 is a schematic diagram showing a state in which the rotation mechanism is between a first position and a second position; FIG. 11 is a schematic diagram showing the slide mechanism, the rotation mechanism, and the link mechanism in a second position. FIG. 5A and 5B are schematic diagrams for explaining the structure of a slider crank mechanism. 11A and 11B are schematic diagrams for explaining a configuration example (modification) of a slider crank mechanism. 13A and 13B are diagrams for explaining the positional relationship between the center of gravity of a rotating portion and a rotation axis of a rotating mechanism according to a modified example. 13A to 13C are diagrams illustrating the flow of operation of a link mechanism according to a modified example.

The following describes an embodiment of the present invention with reference to the drawings.

(Configuration of Processing Device)
The configuration of a processing apparatus 100 according to this embodiment will be described with reference to Figures 1 to 12. The processing apparatus 100 is provided adjacent to a transport apparatus 200 that transports a substrate (not shown). The processing apparatus 100 is configured to process a substrate transported by the transport apparatus 200 through a loading/unloading port (not shown).

As shown in FIG. 1, the processing apparatus 100 includes a chamber body 10. The chamber body 10 has an approximately cylindrical space 11 formed therein. However, the shape of the space 11 may be rectangular or polygonal. The chamber body 10 is configured to process a substrate in the internal space 11. The outer shape of the chamber body 10 is approximately rectangular. The chamber body 10 is an example of the "container body" and "fixed body" in the claims.

The processing apparatus 100 also includes a lid 21. The lid 21 is disposed above the chamber body 10. The lid 21 is provided so as to cover the upper part of the chamber body 10. The lid 21 is configured to seal the internal space 11 of the chamber body 10. The lid 21 also has a substantially cylindrical shape.

The space inside the lid 21 is provided with a structure for processing the substrate. For example, the processing apparatus 100 is a dry etching apparatus, and a plasma source that generates plasma is housed inside the lid 21. In addition, a housing section 22 that houses an electric circuit is provided at the rear of the lid 21, and a matching box connected to a high-frequency power source, for example, is provided in the housing section 22. The matching box performs impedance matching between the high-frequency power source and the plasma source.

The processing apparatus 100 also includes an opening/closing mechanism 30. The opening/closing mechanism 30 is configured to open and close (attach and detach) the lid body 21 from the chamber body 10. When the opening/closing mechanism 30 detaches the lid body 21 from the chamber body 10, the space 11 inside the chamber body 10 is opened. Figure 1 shows the state in which the lid body 21 has been moved to a position directly above the chamber body 10 by the opening/closing mechanism 30.

The opening and closing mechanism 30 is primarily used during maintenance work on the processing apparatus 100. With the lid 21 removed from the chamber body 10, maintenance of the space 11 inside the chamber body 10 and maintenance of the space inside the lid 21 are performed. When processing a substrate, the lid 21 is attached to the chamber body 10, sealing the space 11.

For the sake of convenience, in this specification, the Y1 direction in the horizontal direction in which the processing device 100 faces the transport device 200 is defined as the front of the processing device 100, the Y2 direction opposite the Y1 direction is defined as the rear of the processing device 100, and the front-to-back direction is defined as the Y direction. In the horizontal direction, the direction perpendicular to the Y direction is defined as the X direction. The Z direction perpendicular to the X and Y directions is the up-down direction. The Y direction is the direction in which substrates are loaded and unloaded. Maintenance work is performed by an operator accessing the chamber body 10 and the lid 21 from the X direction side of the processing device 100.

(Detailed configuration of opening/closing mechanism)
The detailed configuration of the opening/closing mechanism 30 will be described below.

As shown in FIG. 1, the opening/closing mechanism 30 includes a lifting mechanism 40, a rotating mechanism 50, a sliding mechanism 60, and a link mechanism 70. The opening/closing mechanism 30 has a pair (two) of units each consisting of one lifting mechanism 40, one rotating mechanism 50, one sliding mechanism 60, and one link mechanism 70. The opening/closing mechanism 30 supports the lid body 21 movably from both sides in the X direction by a pair of units arranged on both sides of the lid body 21 in the X direction. Each lifting mechanism 40 of the pair of units is installed in the main body 5 of the processing apparatus 100 to which the chamber body 10 is fixedly provided. The pair of units are symmetrical in the X direction with respect to the lid body 21 as the center and are substantially identical in structure, so only one unit will be described below.

In this embodiment, the opening/closing mechanism 30 is operated by manual operation by an operator. In other words, the opening/closing mechanism 30 (lifting mechanism 40, rotating mechanism 50, sliding mechanism 60, link mechanism 70) is not provided with a driving source such as an electric motor or a control device for the driving source.

<Lifting mechanism>
The lifting mechanism 40 is configured to vertically move the lid body 21. The lifting mechanism 40 is configured to be able to move the lid body 21 between a lowered position Pz1 (see FIG. 2) where the lid body 21 covers the chamber body 10 and an elevated position Pz2 (see FIGS. 3 and 4) where the lid body 21 is spaced upward from the chamber body 10. The lifting mechanism 40 supports the lid body 21 via a sliding mechanism 60 and a rotating mechanism 50 so as to be able to move the lid body 21 in the vertical direction.

As shown in FIG. 3, the lifting mechanism 40 is composed of a linear motion mechanism. The lifting mechanism 40 has a vertical guide pillar 41 and a screw shaft 42 that transmits driving force in the vertical direction. The guide pillar 41 guides the movement of the lid body 21. A nut portion 43 that is connected to the lid body 21 is attached to the screw shaft 42. The nut portion 43 moves up and down as the screw shaft 42 rotates.

The lifting mechanism 40 includes a manual input mechanism 44. In the example of FIG. 1, the input mechanism 44 converts the rotation of the handle 44a into the rotation of the screw shaft 42. The input mechanisms 44 of the pair of units are connected by a transmission shaft for transmitting the rotation of the handle 44a. By rotating the handle 44a provided on one unit in the X direction, the lifting mechanisms 40 of both units are operated. The driving source of the lifting mechanism 40 may be an electric motor or hydraulics.

The lifting mechanism 40 also includes a biasing member 45 that assists the lifting operation of the lifting mechanism 40. The biasing member 45 extends in the vertical direction, and its lower end is fixed to the main body 5 (see FIG. 1) of the processing device 100, and its upper end is connected to the nut portion 43. The biasing member 45 is arranged to bias the nut portion 43 upward. The biasing member 45 reduces the load on the operator when moving the input mechanism 44 (rotating the screw shaft 42). The biasing member 45 is, for example, a gas spring.

<Slide mechanism>
As shown in Fig. 1, the slide mechanism 60 supports the lid body 21 and the storage section 22, which are heavy objects, in the vertical direction. The slide mechanism 60 is also configured to support the lid body 21 and the rotation mechanism 50 so that they can slide laterally relative to the chamber body 10. The lateral direction may be any direction within a horizontal plane, but in this embodiment, the slide mechanism 60 slides the lid body 21 in the front-rear direction (Y direction) of the processing apparatus 100. The slide mechanism 60 slides the lid body 21 within a horizontal plane. As long as the position of the lid body 21 is changed laterally, the slide mechanism 60 may slide the lid body 21 in a direction inclined upward or downward from the horizontal direction.

The sliding mechanism 60 is configured to slide the lid body 21 between a first position Py1 (see FIG. 3) where the lid body 21 is located directly above the chamber body 10 and a second position Py2 (see FIG. 4) where the lid body 21 is laterally retracted from the chamber body 10.

As shown in FIG. 5, the slide mechanism 60 includes a slide member 61 fixed in the Y direction and a slide rail 62 attached to the cover body 21 so as to be slidable relative to the slide member 61. The slide member 61 and the slide rail 62 are examples of the "first member" and "second member" in the claims, respectively. The slide member 61 is a roller that rotates while engaged with the slide rail 62. The slide member 61 is attached to a support member 63 connected to the nut portion 43 of the lifting mechanism 40. In the example of FIG. 5, a plurality of (four) slide members 61 are arranged in the Y direction. The support member 63 is attached with a connection portion 63a to which the nut portion 43 is fixed, and a lifting roller 63b that rolls in the guide groove 41a of the guide column 41. The lifting roller 63b and the guide column 41 restrain the support member 63 (and the slide member 61) in the Y direction (immobile).

The slide rail 62 is arranged to face the support member 63 and the slide member 61 in the X direction (see FIG. 6). The slide rail 62 extends linearly along the Y direction. The slide rail 62 has a groove 62a extending in the Y direction, and four slide members 61 are arranged in an engaged state within the groove 62a. The slide rail 62 is constrained in the Z direction and the X direction by engagement with the four slide members 61, and is movable in the Y direction. Note that the slide rail 62 may be fixed to the support member 63, and the slide member 61 attached to the cover body 21 may be configured to be slidable.

The slide mechanism 60 has a restricting member (stopper) (not shown) that determines the range in which it can slide. The first position Py1 is the end of movement in the Y1 direction, and the second position Py2 is the end of movement in the Y2 direction. In addition, in the slide mechanism 60, the slide rail 62 is positioned and temporarily fixed at the first position Py1 and the second position Py2 by a locking member (not shown), such as a ball plunger.

<Rotation mechanism>
As shown in Fig. 1, the rotation mechanism 50 is disposed adjacent to the cover body 21 in the X direction and is connected to the cover body 21 from the outside in the X direction. The cover body 21 is supported from both sides in the X direction by each of the rotation mechanisms 50 of the pair of units. The rotation mechanisms 50 are configured to support the cover body 21 so as to be rotatable around a horizontal rotation axis RA (see Fig. 5). In this embodiment, the rotation axis RA is an axis in the X direction. The rotation mechanism 50 is supported by a slide mechanism 60, and is raised and lowered in the Z direction together with the slide mechanism 60 by the lifting mechanism 40, and is slid in the Y direction together with the slide rail 62.

As shown in FIG. 5, the rotation mechanism 50 has a rotation shaft portion 51. The rotation mechanism 50 is rotatably connected to the slide mechanism 60 (slide rail 62 side) at the rotation shaft portion 51. The rotation shaft portion 51 includes a shaft and a bearing. The rotation mechanism 50 has an attachment portion 52 to which the lid body 21 is attached. When the rotation mechanism 50 rotates around the rotation shaft portion 51, the lid body 21 fixed to the attachment portion 52 rotates integrally with the rotation mechanism 50.

As shown in FIG. 6, the mounting portion 52 is provided at a different position from the rotating shaft portion 51. The rotating shaft portion 51 and the mounting portion 52 are connected by the rotating plate portion 53. The mounting portion 52 and the rotating plate portion 53 rotate integrally with the rotating shaft portion 51.

As shown in FIG. 7, in this embodiment, the rotating shaft portion 51 is provided so that the rotation axis RA passes through the center of gravity MG of the rotating part 20 including the lid body 21. The rotating part 20 means the entire structure including the lid body 21 and the accessories that rotate integrally with the lid body 21 and are rotated by the rotation mechanism 50. The rotating part 20 includes a storage portion 22 provided at the rear of the lid body 21. The position of the rotation axis RA and the center of gravity MG are mathematically determined to be one point, but in practice, taking into account tolerances, etc., it can be considered that the rotation axis RA passes through the center of gravity MG if the center of gravity MG is within the range of the diameter (outer diameter) Da of the rotating shaft portion 51 when viewed from the direction along the rotation axis RA (X direction) as shown in FIG. 7. Even in this case, the moment of inertia and imbalance around the rotation axis can be sufficiently reduced, and the rotation torque required to rotate the lid body 21 is not significantly different.

The rotation mechanism 50 is configured to rotate the lid body 21 by approximately 1/4 rotation (approximately 90 degrees). That is, the rotation mechanism 50 can rotate the lid body 21 between a first position (see FIG. 3) in which the lid body 21 (the lower surface of the lid body 21) is aligned along a horizontal plane, and a second position (see FIG. 4) in which the lid body 21 is aligned along a vertical plane (XZ plane).

As shown in FIG. 7, the cover 21 is configured to be separable into a lower first part 21a and an upper second part 21b. The mounting portion 52 of the rotation mechanism 50 is connected to the upper second part 21b of the cover 21. When the first part 21a and the second part 21b are joined, the opening/closing mechanism 30 opens and closes the entire cover 21. When the first part 21a and the second part 21b are separable, the opening/closing mechanism 30 opens and closes the second part 21b by separating it from the first part 21a. This makes it easy to perform maintenance work on the second part 21b.

Link mechanism
6, the link mechanism 70 is a mechanism configured to perform a desired operation using a plurality of joints and links connecting the plurality of joints. The link mechanism 70 is connected to the rotation mechanism 50. The link mechanism 70 operates the rotation mechanism 50 to rotate the cover body 21 in conjunction with the sliding movement of the rotation mechanism 50. The link mechanism 70 itself rotates in conjunction with the sliding movement of the rotation mechanism 50, and this rotation rotates the attachment portion 52 of the rotation mechanism 50 about the rotation axis RA.

The link mechanism 70 is configured to place the lid body 21 in a horizontal first position via the rotation mechanism 50 when the lid body 21 is in the first position Py1 (see FIG. 8), and to place the lid body 21 in a vertical second position via the rotation mechanism 50 when the lid body 21 is in the second position Py2 (see FIG. 10).

As shown in Figures 8 to 10, the link mechanism 70 increases the rotation amount θ of the cover body 21 as the cover body 21 approaches the second position Py2 from the first position Py1. The rotation amount between the first and second postures is 90 degrees. In other words, if the rotation amount θ of the cover body 21 in the first posture at the first position Py1 is 0 degrees, the rotation amount θ approaches θ = 90 degrees as the cover body 21 approaches the second position Py2. The rotation amount θ monotonically increases toward the second position Py2. When the cover body 21 moves from the second position Py2 to the first position Py1, the link mechanism 70 monotonically decreases the rotation amount θ of the cover body 21 in the reverse path. The link mechanism 70 is configured to provide a one-to-one correspondence between the position of the cover body 21 (i.e., the rotation mechanism 50) in the sliding direction (Y direction) and the rotation amount.

The link mechanism 70 is a slider crank mechanism that rotates and moves up and down in response to the lateral sliding movement of the rotation mechanism 50.

Specifically, as shown in FIG. 8, the link mechanism 70 includes a slider guide portion 71 that extends in the vertical direction and is fixed in the sliding direction, a slider portion 72 that moves back and forth along the slider guide portion 71, and a link portion 73 that has one end connected to the rotation mechanism 50 and the other end rotatably connected to the slider portion 72.

The slider guide portion 71 is fixed to the support member 63 (see FIG. 5) of the slide mechanism 60. The slider guide portion 71 is a guide rod that extends linearly in the vertical direction. The slider guide portion 71 may be a guide rail, a guide groove, a slit, etc.

The slider portion 72 is attached to the slider guide portion 71 so as to be able to slide. The slider portion 72 (see FIG. 5) is a guide bush (a cylindrical member) through which a guide rod is inserted. The slider portion 72 is movable in the Z direction relative to the slider guide portion 71, but is immovable in the X and Y directions relative to the slider guide portion 71. During the operation of the link mechanism 70, the slider portion 72 reciprocates in the Z direction along the slider guide portion 71.

The link portion 73 is connected to the rotation mechanism 50 so as to rotate integrally with the rotation mechanism 50. Specifically, the link portion 73 is provided on the rotating plate portion 53 that connects the rotating shaft portion 51 and the mounting portion 52 of the rotation mechanism 50. One end 73a of the link portion 73 is rotatably connected to the slide mechanism 60 (slide rail 62 side) via the rotating plate portion 53 and the rotating shaft portion 51, bent into an L shape, and the other end 73b extends to the slider portion 72. The link portion 73 is connected to the slider portion 72 via a rotating shaft 74 at the other end 73b.

Figures 8 to 10 show the process of operation of the link mechanism 70. For the sake of convenience, in Figures 8 to 10, the lid body 21 attached to the mounting portion 52 is illustrated diagrammatically by a dotted rectangular frame in order to explain the posture of the lid body 21.

As shown in FIG. 8, in the first position Py1, the cover body 21 is held in the first posture, and the slider portion 72 of the link mechanism 70 is positioned at the top dead center (the upper limit position of the stroke).

When the lid body 21 is moved in the Y2 direction toward the second position Py2, one end 73a of the link part 73 is moved in the Y2 direction. Since the slider part 72 on the other end 73b of the link part 73 does not move in the Y direction, the link part 73 rotates around the rotation shaft 74 while pushing the slider part 72 downward. As shown in FIG. 9, at the third position between the first position Py1 and the second position Py2, the slider part 72 of the link mechanism 70 is located at the bottom dead center (lower limit position of the stroke), and at this time the lid body 21 is rotated at an angle. In FIG. 9 and FIG. 10, the state of the lid body 21 midway through rotation is indicated by a two-dot chain line.

When the cover body 21 is moved in the Y2 direction beyond the intermediate position, the one end 73a of the link portion 73 is further moved in the Y2 direction. As a result, the link portion 73 rotates around the rotation shaft 74 while pulling the slider portion 72 upward. As shown in FIG. 10, when the cover body 21 reaches the second position Py2, the link mechanism 70 is rotated 90 degrees, and the slider portion 72 of the link mechanism 70 returns to the top dead center.

Such a configuration of the link mechanism 70 corresponds to a so-called double slider crank chain mechanism. As shown in the schematic diagram of FIG. 11, the link mechanism 70 has a first joint constituted by the rotating mechanism 50 (rotating shaft portion 51) and a first slider in the Y direction constituted by the slide mechanism 60 at one end 73a of the link portion 73. The link mechanism 70 has a second joint constituted by the rotating shaft 74 and a second slider constituted by the slider portion 72 at the other end 73b of the link portion 73. By connecting the link portion 73 and the rotating mechanism 50, the first joint (rotating mechanism 50) and the lid body 21 attached thereto rotate in conjunction with the movement of the first slider. The link mechanism 70 may have such a structure, and the shape of the link portion 73, for example, is arbitrary. In FIG. 11, the hatched portion is the third position where the second slider (slider portion 72) reaches the bottom dead center.

In the example of FIG. 11, the link portion 73 is inclined at 45 degrees at the first position Py1, and the lid body 21 rotates 45 degrees at the third position. The movement distance of the lid body 21 between the first position Py1 and the third position is equal to the movement distance of the lid body 21 between the second position Py2 and the third position. The third position is the midpoint between the first position Py1 and the second position Py2. In the case of FIG. 12, the link portion 73 is inclined at 30 degrees at the first position Py1, and the lid body 21 rotates 60 degrees at the third position. The third position is closer to the second position Py2 than the first position Py1. The link mechanism 70 may be configured in this way.

(Positional relationship between rotating part and fixed part)
In the opening/closing mechanism 30 having the above configuration, as shown in FIG. 3, the lifting mechanism 40 moves the cover 21 by a distance D11 between the lowered position Pz1 and the raised position Pz2. In this embodiment, the distance D11 is smaller than a Y-direction distance D12 between the Y2-direction end of the rotating part 20 and the rotation axis RA. The raised position Pz2 is a height position at which the rotating part 20 comes into contact with the chamber body 10 if the cover 21 is rotated just above the chamber body 10 (first position Py1). In the example of FIG. 3, if the cover 21 is rotated as it is at the raised position Pz2, the accommodation section 22 provided at the rear of the cover 21 is in a position where it comes into contact with the chamber body 10.

As shown in FIG. 4, the slide mechanism 60 moves the cover 21 by a slide distance D13 between the first position Py1 and the second position Py2. The slide distance D13 of the slide mechanism 60 is greater than the distance D11 (see FIG. 3).

In this embodiment, when the cover 21 at the raised position Pz2 is slid and rotated (second position Py2 and second posture), the lower end 20a of the rotating part 20 is positioned below the upper surface 10a of the chamber body 10. The lower end 20a of the rotating part 20 in the second posture is the rear side surface of the storage part 22. In this way, even if the distance D11 of the upward movement by the lifting mechanism 40 is small, it is possible to rotate the cover 21 to the second posture without the rotating part 20 coming into contact with the chamber body 10.

When the lid body 21 is in the second position Py2 (see FIG. 4) in the second posture, the Y1 end 21c of the lid body 21 is located further in the Y2 direction than the Y2 end of the chamber body 10. Therefore, the entire lid body 21 retreats in the Y2 direction from the space directly above the chamber body 10.

As shown in Figures 3 and 4, when the slide rail 62 is at the first position Py1 (see Figure 3), it slides between a position where it protrudes toward the first position Py1 (Y1 direction) up to above the chamber body 10, and a position where it retreats to the second position Py2 (Y2 direction).

As shown in FIG. 1, during maintenance, the area directly above the chamber body 10 becomes the work space for the worker, and the X-direction side of the work space becomes the access path for the worker. Therefore, the slide rail 62 at the first position Py1 is located on the access path for the worker. In contrast, as shown in FIG. 4, the slide rail 62 at the second position Py2 retreats in the Y2 direction from the access path for the worker.

As shown in FIG. 10, when the cover 21 is in the second position Py2, the link mechanism 70 is disposed closer to the second position Py2 than the end of the slide rail 62 on the first position Py1 side in the sliding direction. Therefore, the link mechanism 70 does not get in the way of maintenance work. The link mechanism 70 may be disposed closer to the first position Py1 than the slide rail 62 in the second position Py2.

(Operation of opening and closing mechanism)
Next, the operation of the opening/closing mechanism 30 will be described. When the opening/closing mechanism 30 is used to remove the lid 21 from the chamber body 10, the lifting mechanism 40 first moves the lid 21 in the Z1 direction from the lowered position Pz1 (see FIG. 2) to the raised position Pz2 (see FIG. 3). When an operator operates (rotates) the handle 44a of the input mechanism 44, the lid 21, the storage section 22, the slide mechanism 60, the rotation mechanism 50, and the link mechanism 70 move upward. The Y-direction position of the lid 21 remains at the first position Py1. The lid 21 maintains the first attitude (amount of rotation θ=0 degrees).

Next, the lid body 21 is slid in the Y2 direction from the first position Py1 (see FIG. 3) to the second position Py2 (see FIG. 4) by the slide mechanism 60. The lid body 21 moves in the Y2 direction when an operator grasps a gripping portion (not shown) of the lid body 21 and pushes it toward the second position Py2. To facilitate smooth rotation of the lid body 21, it is preferable for the operator to push a portion of the lid body 21 above the rotation shaft portion 51 at a slight angle toward the Z1 direction. The lid body 21, storage portion 22, slide rail 62, rotation mechanism 50, and link portion 73 move in the Y2 direction.

Linked to the sliding movement of the lid body 21 (rotation mechanism 50), the link mechanism 70 rotates the rotation mechanism 50 (see Figures 8 to 10). As the lid body 21 and the storage section 22 rotate while retreating in the Y2 direction, the rotating part 20 (storage section 22) rotates along the movement trajectory Tr to enter the side of the chamber body 10 in the Y2 direction while maintaining a non-contact state with the chamber body 10. When the lid body 21 reaches the second position Py2, it assumes a second posture (rotation amount θ = 90 degrees) in which the lid body 21 faces vertically.

As a result, the lid 21 is withdrawn from the area directly above the chamber body 10 and is placed in a second position (see FIG. 4) facing vertically. The worker performs maintenance work on the inside of the chamber body 10 and the inside of the lid 21. When closing the withdrawn lid 21 (attaching it to the chamber body 10), the above steps are simply carried out in reverse, so a description thereof will be omitted.

(Effects of this embodiment)
In this embodiment, the following effects can be obtained.

In the processing apparatus 100 (opening/closing mechanism, link mechanism) of this embodiment, when the lid body 21 (moving body) is slid laterally in the raised position as described above, the link mechanism 70 connected to the rotation mechanism 50 rotates the lid body 21 in conjunction with the sliding movement. This allows the lid body 21 to be rotated while being evacuated laterally from the chamber body 10 (container body, fixed body). In other words, even at a height position where a part of the lid body 21 contacts the chamber body 10 when the lid body 21 is simply rotated while stopped above the chamber body 10, the lid body 21 can be rotated while a part of the rotating lid body 21 escapes to a lateral position where it is not in contact with the chamber body 10 by the lateral movement of the lid body 21. As a result, even when the lid body 21 is rotated when opening/closing (attaching/detaching) the lid body 21 (moving body), the amount of upward movement of the lid body 21 can be suppressed. Furthermore, the link mechanism 70 allows the lid body 21 to rotate in conjunction with the sliding movement, so unlike when the lid body 21 is rotated after sliding the lid body 21, the lid body 21 can be easily rotated simply by sliding the lid body 21.

In addition, in this embodiment, as described above, the rotation mechanism 50 has a rotation shaft portion 51 provided on a rotation axis RA that passes through the center of gravity MG of the rotating part 20 including the lid body 21. This makes it possible to minimize the moment of inertia and imbalance when rotating the lid body 21 around the rotation axis RA. As a result, the lid body 21 can be easily rotated.

In addition, in this embodiment, as described above, the link mechanism 70 is configured to increase the amount of rotation (angle) θ of the lid body 21 as the lid body 21 approaches the second position Py2 from the first position Py1. This allows the lid body 21 to rotate gradually as the lid body 21 slides. As a result, a sudden increase in the load required to rotate the lid body 21 can be suppressed.

In addition, in this embodiment, as described above, the link mechanism 70 is a slider crank mechanism configured to rotate and reciprocate up and down in conjunction with the lateral sliding movement of the rotation mechanism 50. This allows the direction in which the link mechanism 70 operates to be primarily in the vertical direction, so that the space occupied by the link mechanism 70 can be narrowed in the retraction direction (sliding direction) of the lid body 21. This prevents the link mechanism 70 from getting in the way during maintenance work on the lid body 21 or the chamber body 10.

In addition, in this embodiment, as described above, the slide mechanism 60 includes a slide member 61 fixed in the sliding direction, and a slide rail 62 attached to the cover body 21 so as to be slidable between a position protruding toward the first position Py1 relative to the slide member 61 and a position retracted toward the second position Py2. This allows the slide rail 62 to be retracted toward the second position Py2 together with the cover body 21 when the cover body 21 is slid from the first position Py1 to the second position Py2. This prevents the slide rail 62 from interfering with the work near the first position Py1 during maintenance work on the cover body 21 or the chamber body 10 in the retracted state, thereby improving the ease of maintenance work.

In addition, in this embodiment, as described above, when the lid body 21 in the raised position is slid and rotated, the lower end 20a of the rotating part 20 including the lid body 21 is positioned below the upper surface 10a of the chamber body 10. This allows the lower end 20a of the rotating part 20 to be rotated to a position below the upper surface 10a of the chamber body 10 without contacting the chamber body 10. Therefore, the amount of upward movement of the lid body 21 by the lifting mechanism 40 can be effectively suppressed.

[Modification]
It should be noted that the embodiments disclosed herein are illustrative and not restrictive in all respects. The scope of the present invention is indicated by the claims, not by the description of the embodiments above, and further includes all modifications (variations) within the meaning and scope of the claims.

For example, in the above embodiment, an example was shown in which the rotation mechanism 50 has a rotation shaft portion 51 provided on a rotation axis RA that passes through the center of gravity MG of the rotating portion 20 including the lid body 21, but the present invention is not limited to this. In the present invention, the rotation shaft portion 51 may be provided on a rotation axis RA that passes near the center of gravity MG of the rotating portion 20.

In the modified example shown in FIG. 13, the rotating shaft portion 51 is arranged so that the rotation axis RA passes near the center of gravity MG of the rotating part 20 including the lid body 21. In the modified example shown in FIG. 13, the rotation axis RA is disposed in a position near and above the center of gravity MG. The smaller the distance between the rotation axis RA and the center of gravity MG, the more preferable it is.

This reduces the moment of inertia when rotating the lid body 21 around the rotation axis RA. As a result, an operator can easily rotate the lid body 21 manually without having to use a drive source such as a motor to rotate the lid body 21.

In addition, in this modified example, as a predetermined range of the distance between the rotation axis RA and the center of gravity MG, the first distance D1 between the rotation axis RA and the center of gravity MG of the rotating part 20 is smaller than the second distance D2 between the rotation axis RA and the mounting part 52. As a result, even if the center of gravity MG is not on the rotation axis RA, the rotation axis RA comes close enough to the center of gravity MG, so that the lid body 21 can be easily rotated.

In the above embodiment, the rotation mechanism 50 has an attachment portion 52 to which the lid body 21 is attached at a position different from the rotation shaft portion 51, but the present invention is not limited to this. In the present invention, the lid body 21 may be attached directly to the rotation shaft portion 51 of the rotation mechanism 50. In other words, the rotation shaft portion 51 and the attachment portion 52 may be provided at the same position (coaxially).

In the above embodiment, an example was shown in which the link mechanism 70 is configured to increase the amount of rotation θ of the lid body 21 as the lid body 21 approaches the second position Py2 from the first position Py1, but the present invention is not limited to this. In the present invention, the link mechanism 70 may be configured to rotate the lid body 21 when it reaches a predetermined position between the first position Py1 and the second position Py2.

In addition, in the above embodiment, an example was shown in which the lid body 21 is rotated 1/4 times (rotated 90 degrees), but the present invention is not limited to this. The lid body 21 may be rotated to an angle other than 90 degrees. For example, the lid body 21 may be rotated to a predetermined angle in the range of 75 degrees to 180 degrees. Note that the predetermined angle by which the lid body 21 is rotated may be in the range of about ±5 degrees of the predetermined angle, taking into account an error.

In the above embodiment, the link mechanism 70 is a slider crank mechanism, but the present invention is not limited to this. In the present invention, the link mechanism 70 may be a link mechanism having a structure other than a slider crank mechanism. For example, instead of providing the slider portion 72 and the slider guide portion 71 at the other end 73b of the link portion 73, the other end 73b of the link portion 73 may be connected to a fixed portion via a rotating shaft 74, and the link portion 73 itself may be provided with an expandable and contractable mechanism.

In the above embodiment, the slider portion 72 of the link mechanism 70 moves linearly in the vertical direction along the slider guide portion 71, but the present invention is not limited to this. The slider guide portion may be configured with an oval orbit, an elliptical orbit, or a circular orbit.

In the above embodiment, an example was shown in which the lower end 20a of the rotating part 20 is positioned below the upper surface 10a of the chamber body 10 when the cover 21 in the raised position is slid and rotated, but the present invention is not limited to this. In the present invention, the lower end 20a of the rotating part 20 may be positioned at the same height as or above the upper surface 10a of the chamber body 10.

In the above embodiment, an example is shown in which the storage section 22 is provided in the lid body 21, but the present invention is not limited to this. In the present invention, the storage section 22 does not have to be provided in the lid body 21. Furthermore, the storage section 22 may be provided in another position on the lid body 21, such as the upper part rather than the rear part of the lid body 21. Accessories other than the storage section 22 may be provided on the lid body 21.

In the above embodiment, an example of a configuration in which the slide mechanism 60 manually slides the lid body 21 is shown, but the present invention is not limited to this. The slide mechanism 60 may be configured to electrically slide the lid body 21 using a drive source such as an electric motor.

In addition, in the above embodiment, an example of the opening and closing mechanism 30 for the lid 21 of the processing device 100 is shown, but the present invention is not limited to this. The opening and closing mechanism of the present invention can be applied to opening and closing a lid in a structure including a lid and a container body, and may be applied to opening and closing a lid other than that of the processing device 100.

In addition, in the above embodiment, an example of the link mechanism 70 used in the opening/closing mechanism 30 of the lid 21 of the processing device 100 is shown, but the present invention is not limited to this. The link mechanism of the present invention is not limited to the lid and the container body, but can be applied to the attachment and detachment of a moving body in a structure that includes a fixed body and a moving body that covers the fixed body, and may be applied to the opening and closing mechanism of a moving body other than the lid.

In the above embodiment, the link mechanism 70 uses the link part 73 that is always connected to the slider guide part 71 attached to the support member 63, which is the non-rotating side, via the rotating shaft 74 and the slider part 72, but the present invention is not limited to this. For example, as shown in Figures 14 (A), (B), and (C), the link mechanism 70 may be a link mechanism that is not in contact with the fixed part 80 at the first position Py1, and when the rotating mechanism 50 slides due to the slide mechanism 60, the other end of the link part 73 contacts (connects) with the fixed part 80. When the link mechanism 70 slides further to the second position Py2 side due to the sliding movement of the link part 73 being locked by the fixed part 80, it operates the rotating mechanism 50 connected to one end side of the link part 73. This link mechanism is a link mechanism equipped with a joint that has two degrees of freedom, rotation and sliding.

10: chamber body (container body, fixed body), 10a: upper surface, 20: rotating part, 20a: lower end, 21: lid body (moving body), 30: opening/closing mechanism, 50: rotation mechanism, 51: rotation shaft part, 52: mounting part, 60: slide mechanism, 61: slide member (first member), 62: slide rail (second member), 70: link mechanism, 100: processing device, D1: first distance, D2: second distance, MG: center of gravity position, Py1: first position, Py2: second position, Pz1: lowered position, Pz2: raised position, RA: rotation axis, θ: amount of rotation

Claims (13)

a chamber body for processing a substrate;
a lid for covering an upper portion of the chamber body;
an opening and closing mechanism for opening and closing the lid from the chamber body,
The opening and closing mechanism includes:
a lifting mechanism for moving the lid body up and down between a lowered position where the lid body covers the chamber body and an elevated position where the lid body is spaced above the chamber body;
a rotation mechanism that supports the lid body so as to be rotatable about a horizontal rotation axis;
a slide mechanism that supports the lid body and the rotation mechanism so as to be slidable laterally relative to the chamber body;
a link mechanism connected to the rotation mechanism, having a plurality of joints and links connecting the plurality of joints, and operating the rotation mechanism to rotate the lid body in conjunction with the sliding movement of the rotation mechanism. a chamber body for processing a substrate;
a lid for covering an upper portion of the chamber body;
an opening and closing mechanism for opening and closing the lid from the chamber body,
The opening and closing mechanism includes:
a lifting mechanism for moving the lid body up and down between a lowered position where the lid body covers the chamber body and an elevated position where the lid body is spaced above the chamber body;
a rotation mechanism that supports the lid body so as to be rotatable about a horizontal rotation axis;
a slide mechanism that supports the lid body and the rotation mechanism so as to be slidable laterally relative to the chamber body;
a link mechanism that is connected to the rotation mechanism and operates the rotation mechanism to rotate the lid body in conjunction with a sliding movement of the rotation mechanism,
The link mechanism operates the rotation mechanism in conjunction with the sliding movement of the rotation mechanism so that the position of the lid body in the sliding direction and the amount of rotation correspond one-to-one. a chamber body for processing a substrate;
a lid for covering an upper portion of the chamber body;
an opening and closing mechanism for opening and closing the lid from the chamber body,
The opening and closing mechanism includes:
a lifting mechanism for moving the lid body up and down between a lowered position where the lid body covers the chamber body and an elevated position where the lid body is spaced above the chamber body;
a rotation mechanism that supports the lid body so as to be rotatable about a horizontal rotation axis;
a slide mechanism that supports the lid body and the rotation mechanism so as to be slidable laterally relative to the chamber body;
a link mechanism that is connected to the rotation mechanism and operates the rotation mechanism to rotate the lid body in conjunction with a sliding movement of the rotation mechanism,
the rotation mechanism has an attachment portion to which the lid body is attached,
A processing apparatus, wherein a first distance between the rotation shaft and a center of gravity of a rotating portion including the lid is smaller than a second distance between the rotation shaft and the mounting portion. a chamber body for processing a substrate;
a lid for covering an upper portion of the chamber body;
an opening and closing mechanism for opening and closing the lid from the chamber body,
The opening and closing mechanism includes:
a lifting mechanism for moving the lid body up and down between a lowered position where the lid body covers the chamber body and an elevated position where the lid body is spaced above the chamber body;
a rotation mechanism that supports the lid body so as to be rotatable about a horizontal rotation axis;
a slide mechanism that supports the lid and the rotation mechanism so as to be slidable laterally relative to the chamber body;
a link mechanism that is connected to the rotation mechanism and operates the rotation mechanism to rotate the lid body in conjunction with a sliding movement of the rotation mechanism,
The link mechanism is a slider crank mechanism configured to rotate and reciprocate up and down in conjunction with the lateral sliding movement of the rotation mechanism. 5. The processing apparatus according to claim 1 , wherein the rotation mechanism has a rotation shaft portion provided so that the rotation shaft passes through a center of gravity of a rotation portion including the lid body. the rotation mechanism has an attachment portion to which the lid body is attached,
The processing apparatus according to claim 1 , 2 or 4 , wherein a first distance between the rotation shaft and a center of gravity of a rotating portion including the lid is smaller than a second distance between the rotation shaft and the mounting portion. the slide mechanism slides the lid body between a first position where the lid body is located directly above the chamber body and a second position where the lid body is laterally retracted from the chamber body,
The processing apparatus according to claim 1 , wherein the link mechanism is configured to increase an amount of rotation of the lid body as the lid body moves from the first position toward the second position. 4. The processing apparatus according to claim 1 , wherein the link mechanism is a slider crank mechanism configured to rotate and reciprocate up and down in conjunction with lateral sliding movement of the rotation mechanism. the slide mechanism slides the lid body between a first position where the lid body is located directly above the chamber body and a second position where the lid body is laterally retracted from the chamber body,
The processing apparatus according to any one of claims 1 to 8, wherein the sliding mechanism includes a first member fixed in a sliding direction, and a second member attached to the cover body so as to be slidable between a position protruding toward the first position relative to the first member and a position retracted toward the second position. The processing apparatus according to claim 1 , wherein when the lid body in the raised position is slid and rotated, a lower end of a rotating part including the lid body is positioned below an upper surface of the chamber body. An opening/closing mechanism for opening and closing a lid provided to cover a container body from the container body,
a rotation mechanism that supports the lid body so as to be rotatable about a horizontal rotation axis;
a slide mechanism that supports the lid body and the rotation mechanism so as to be slidable laterally relative to the container body;
an opening/closing mechanism comprising: a link mechanism connected to the rotation mechanism, having a plurality of joints and links connecting the plurality of joints, and operating the rotation mechanism to rotate the lid body in conjunction with the sliding movement of the rotation mechanism. An opening/closing mechanism for opening and closing a lid provided to cover a container body from the container body,
a rotation mechanism that supports the lid body so as to be rotatable about a horizontal rotation axis;
a slide mechanism that supports the lid body and the rotation mechanism so as to be slidable laterally relative to the container body;
a link mechanism that is connected to the rotation mechanism and operates the rotation mechanism to rotate the lid body in conjunction with a sliding movement of the rotation mechanism,
The link mechanism operates the rotation mechanism in conjunction with the sliding movement of the rotation mechanism so that the position of the lid body in the sliding direction and the amount of rotation correspond one-to-one to an opening/closing mechanism. A link mechanism for attaching and detaching a movable body to and from a fixed body, the movable body being provided so as to cover the fixed body,
a rotation mechanism that supports the moving body so as to be rotatable about a horizontal rotation axis;
a slide mechanism that supports the movable body and the rotating mechanism so as to be slidable laterally relative to the fixed body;
a slider crank mechanism connected to the rotation mechanism and rotating in conjunction with the sliding movement of the rotation mechanism and reciprocating up and down, thereby operating the rotation mechanism to rotate the moving body.

Images