KR101385456B1 - Cleaning apparatus for cassette - Google Patents

Abstract

The present invention relates to a cassette cleaning apparatus for removing metallic particles under the cassette in contact with a stocker shelf or loader.

Cassette cleaning apparatus according to the invention a plurality of seating spaced apart; A cassette seated on the adjacent seating portion; And one or more lower cleaning portions movably installed between the adjacent seating portions to clean the cassette while moving along the rear surface of the cassette.

By such a configuration, the present invention can contribute to improving process productivity by minimizing glass defects and foreign matters generated in the liquid crystal display device by removing metallic particles under the cassette.

Cassette, Injection Nozzle, LM Guide, Cleaning

Description

Cassette cleaning device {CLEANING APPARATUS FOR CASSETTE}

1 schematically shows a cassette cleaning apparatus of the present invention.

2 is a view showing a lower cleaning portion of the cassette cleaning apparatus of the present invention.

Description of the Related Art [0002]

100: cassette 102: seating portion

104: upper cleaning part 106: side cleaning part

108: guide rail 110: lower cleaning part

112: first injection nozzle 114: first main piping

116: rotating shaft 118: second injection nozzle

120: second main piping 122: third injection nozzle

124: moving block 126: third main piping

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a cassette cleaning apparatus, and more particularly, to a cassette cleaning apparatus for removing metallic particles under a cassette in contact with a stocker shelf or a stacker.

Recently, as the information society develops, the demand for display devices is increasing in various forms, and in recent years, liquid crystal display (LCD), plasma display panel (PDP), electro luminescent display (ELD), and vacuum fluorescent (VFD) have been developed. Various flat panel display devices have been studied, and some are already used as display devices in various equipments.

Among them, liquid crystal displays are currently being used most frequently, replacing CRTs (Cathode Ray Tubes) for mobile image display devices because of their excellent image quality, light weight, thinness, and low power consumption. In addition to the use, various developments have been made for televisions for receiving and displaying broadcast signals, monitors for computers, and the like.

The liquid crystal panel of the liquid crystal display includes a thin film transistor substrate having a thin film transistor and a pixel electrode formed in a pixel region defined by a gate line and a data line, a color filter substrate having a color filter layer and a common electrode, and a liquid crystal layer formed between two substrates. Is done. The liquid crystal panel configured as described above is loaded in a cassette capable of accommodating a plurality of substrates to perform each manufacturing process.

In this way, a plurality of substrate-loaded cassettes are placed on a stocker shelf or a loader that temporarily stores or stores them by an automatic transport cart (AGV).

At this time, metallic particles are generated in the lower portion of the cassette in contact with the stocker shelf or the loader.

On the other hand, the manufacturing process of the liquid crystal panel in most cases require an environment such as high temperature, high pressure or vacuum, in particular the manufacturing process of the substrate should be placed in a very clean working environment.

However, metallic particles generated at the bottom of the cassette during the manufacturing process are scattered and become a major cause of glass damage and deterioration of cleanliness.

Accordingly, in order to solve the above problems, the present invention is to provide a cassette cleaning apparatus for removing metallic particles in the lower cassette in contact with the stocker shelf or loader.

Cassette cleaning apparatus according to an embodiment of the present invention for achieving the above technical problem is a plurality of seating spaced apart; A cassette seated on the adjacent seating portion; And one or more lower cleaning portions movably installed between the adjacent seating portions to clean the cassette while moving along the rear surface of the cassette.

Each of the lower washing parts may include a moving block having one or more washing water spray nozzles for spraying washing water into the cassette.

And at least one rail disposed between the adjacent seating portions to move each of the moving blocks.

Each of the lower cleaning parts; One or more rails disposed between the adjacent seating portions; And a cylinder for moving the moving block along the rail.

Each of the lower cleaners further includes one or more gas injection nozzles for injecting gas for cleaning and simultaneously drying the cassette.

It is installed to face the upper portion of the cassette further comprises an upper cleaning unit for spraying the washing water toward the cassette.

The upper cleaning unit is rotatable.

Each of the upper cleaning parts; A washing water supply pipe through which the washing water is supplied; And at least one washing water spray nozzle installed in the washing water supply pipe to spray the washing water to the cassette.

Each of the upper cleaning parts; A gas supply pipe to which the gas is supplied; And at least one gas injection nozzle installed in the gas supply pipe to inject the gas into the cassette.

And a side washing part installed to face at least one side of the cassette to spray washing water toward the cassette.

Each of the side cleaners; A washing water supply pipe through which the washing water is supplied; And at least one washing water spray nozzle installed in the washing water supply pipe to spray the washing water to the cassette.

Each of the side cleaners; A gas supply pipe to which the gas is supplied; And at least one gas injection nozzle installed in the gas supply pipe to inject the gas into the cassette.

Hereinafter, exemplary embodiments of the present invention will be described in detail with reference to the accompanying drawings and embodiments.

1 is a view schematically showing a cassette cleaning apparatus according to an embodiment of the present invention, Figure 2 is a view showing a lower cleaning unit according to an embodiment of the present invention.

1 and 2, a cassette cleaning apparatus according to an exemplary embodiment of the present invention includes a plurality of spaced-separated seating units 102, a cassette 100 seated on an adjacent seating unit 102, and an adjacent seating unit 102. It is configured to include one or more lower cleaning unit 110 to be movable between the cleaning of the cassette 100 while moving along the back of the cassette 100.

Cassette seating portion 102 is formed of a plurality of spaced apart seating blocks (102a to 102d), as shown in Figure 2 so that the cassette 100 can be seated.

The cassette 100 is formed so that a plurality of substrates can be loaded. At this time, the cassette 100 is high in strength and hardly deformed even in long-term use, and is formed of SUS material having excellent corrosion resistance.

Here, the cleaning unit for cleaning the cassette 100 includes an upper cleaning unit 104, a side cleaning unit 106, and a lower cleaning unit 110.

The upper cleaning part 104 includes a first main pipe 114, one or more first injection nozzles 112, and a rotation shaft 116.

The first main pipe 114 has a washing water supply pipe for supplying the washing water supplied from the outside to the first injection nozzle 112 and a gas supply for supplying the gas supplied from the outside to the first injection nozzle 112. It is formed including a pipe.

The first spray nozzle 112 includes one or more washing water spray nozzles for spraying the washing water from the upper portion of the cassette 100 and a gas spray nozzle for spraying the gas for drying the cleaned cassette 100. . In this case, the first injection nozzle 112 sprays deionized water and clean dry air to clean and dry the cassette 100.

The rotating shaft 116 is formed to rotate the first injection nozzle 112 formed on the first main pipe 114 with a motor (not shown) so that the cleaning material is evenly sprayed on the front surface of the cassette 100.

The side cleaner 106 is installed to face at least one side of the cassette 100 to inject cleaning water toward the cassette 100, and includes a second main pipe 120 and one or more second injection nozzles 118. It is configured by.

The second main pipe 120 supplies a washing water supply pipe for supplying the washing water supplied from the outside to the second injection nozzle 118 and a gas supply for supplying the gas supplied from the outside to the second injection nozzle 118. It is formed including a pipe.

The second spray nozzle 118 includes one or more washing water spray nozzles for spraying washing water from both sides of the cassette 100, and a gas spray nozzle for spraying gas for drying the cleaned cassette 100. . At this time, the second injection nozzle 118 sprays deionized water and clean dry air to clean and dry the cassette 100.

The lower cleaning unit 110 is installed to spray the washing water from the rear surface of the cassette 100 to spray the washing water toward the cassette 100, and the third main pipe 126 and one or more third spray nozzles 122 to be discharged. It is configured to include.

The third main pipe 126 has a washing water supply pipe for supplying the washing water supplied from the outside to the third injection nozzle 122 and a gas supply for supplying the gas supplied from the outside to the third injection nozzle 122. It is formed including a pipe.

The third spray nozzle 122 includes one or more washing water spray nozzles for spraying the washing water from the lower portion of the cassette 100 and a gas spray nozzle for spraying the gas for drying the cleaned cassette 100. . At this time, the third injection nozzle 122 sprays deionized water and clean dry air to clean and dry the cassette 100.

The moving block 124 is formed such that the third spray nozzle 122 for spraying the washing water from the lower portion of the cassette 100 seated on the cassette seat 102 moves along the guide rail 108. At this time, the moving block 124 is formed to be movable by a linear motor or cylinder not shown.

One or more guide rails 108 are disposed between adjacent seating portions 102 to allow the moving block 124 to move.

The cassette cleaning apparatus according to the embodiment of the present invention removes metallic particles in the lower portion of the cassette 100 in contact with the stocker shelf or the stacker to minimize glass defects and foreign substances in the clean room during the manufacturing process of the liquid crystal display. It can contribute to productivity improvement.

While the present invention has been described in connection with what is presently considered to be practical exemplary embodiments, it is to be understood that the invention is not limited to the disclosed embodiments, but, on the contrary, is intended to cover various modifications and equivalent arrangements included within the spirit and scope of the appended claims. And will be apparent to those skilled in the art.

The cassette cleaning apparatus according to the embodiment of the present invention as described above can contribute to improving process productivity by minimizing glass defects and foreign substances generated in the liquid crystal display device by removing metallic particles under the cassette.

Claims (12)

A first seating unit consisting of two seating blocks spaced apart from each other; A second seating unit, which is spaced apart from two seating blocks of the first seating unit and is composed of two seating blocks spaced apart from each other; A cassette seated on the four seating blocks; And at least one lower cleaning part movably provided between the first seating part and the second seating part to move along the bottom of the cassette and to clean the bottom of the cassette; The cassette is placed on the four seating blocks with its lower portion facing in the direction of gravity; The lower part of the cassette is a surface in contact with the stocker shelf or the loader; Each of the lower cleaning parts may include a moving block provided with at least one washing water spray nozzle for spraying washing water into the lower part of the cassette, and disposed between the first seating part and the second seating part to move each of the moving blocks. At least one rail, a cylinder for moving the moving block along the rail, and at least one gas injection nozzle for injecting gas for cleaning and drying the lower portion of the cassette. . delete delete delete delete The method of claim 1, And an upper washing unit installed to face the upper portion of the cassette to spray washing water toward the cassette. The method according to claim 6, The upper cleaning unit is a cassette cleaning apparatus, characterized in that rotatable. The method according to claim 6, Each of the upper cleaning parts; A washing water supply pipe through which the washing water is supplied; And And at least one washing water spray nozzle installed in the washing water supply pipe to spray the washing water to the cassette. The method according to claim 6, Each of the upper cleaning parts; A gas supply pipe through which gas is supplied; And And at least one gas injection nozzle installed in the gas supply pipe to inject the gas into the cassette. The method of claim 1, And a side washing unit installed to face at least one side of the cassette to spray washing water toward the cassette. 11. The method of claim 10, Each of the side cleaners; A washing water supply pipe through which the washing water is supplied; And And at least one washing water spray nozzle which is installed in the washing water supply pipe and sprays the washing water to the cassette. 11. The method of claim 10, Each of the side cleaners; A gas supply pipe through which gas is supplied; And And at least one gas injection nozzle installed in the gas supply pipe to inject the gas into the cassette.

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