KR20070058855A - Cleaning chamber and door sealing method of the same - Google Patents

Abstract

A cleaning chamber is provided to reduce the possibility of generation of a leak in a sealing tube by removing a sealing part. An inlet is formed in one lateral surface of a cleaning chamber(100). A door opens/shuts the inlet by a sliding method. When the door is shut, the edge of the inlet is surrounded by a sealing tube(120) to adjoin the edge of the door wherein one end of the sealing tube is sealed. A nozzle(130) is jointed to the other end of the sealing tube. A pump injects gas to the inside of the sealing tube through the nozzle or absorbs the gas in the sealing tube. The gas can be CDA(clean dry air). The one end of the sealing tube can be sealed by a bracket(122).

Description

Cleaning chamber and door sealing method of the same}

1 is a perspective view of a typical cassette.

2 is a perspective view of a portion of a typical cassette cleaning chamber.

3 is an enlarged perspective view of a portion A of FIG.

4 is a perspective view of a portion of a cassette cleaning chamber in accordance with the present invention.

5 is an enlarged perspective view of a portion B of FIG. 4.

FIG. 6 is a sectional view taken along line VI-VI of FIG. 4; FIG.

7 is a plan view of a cassette cleaning apparatus in a cassette cleaning chamber according to the present invention;

<Description of the symbols for the main parts of the drawings>

100: cleaning chamber 102: inlet

112: door 120: sealing tube

122: bracket 124: screw

130: nozzle 134: screw joint

136: Nipple 140: CDA Tank

150 pump

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a cleaning chamber and a door sealing method thereof, and more particularly, to cleaning a large object such as a cassette by using a liquid such as DI (De-Ionized). In particular, the present invention relates to a cleaning chamber for carrying out the present invention, and more particularly to a sealing structure and a sealing method of a door for opening and closing an inlet thereof.

In line with the recent information age, the display field for displaying images through electrical signals has also been rapidly developed. As a flat panel display device having advantages of light weight, thinness, and low power consumption, Liquid Crystal Display Device (LCD), Plasma Display Panel Device (PDP), Field Emission Display Device (FED), Electroluminescence Display Device (ELD), etc. This introduction is rapidly replacing the existing Cathode Ray Tube (CRT).

These flat panel display devices have a flat panel display panel as an essential component for image realization, and it shows a form in which a flat panel display panel is bonded to each other through a unique layer of fluorescent or polarizing material between a pair of substrates. Recently, an active matrix type in which a pixel, which is a basic unit of image expression, is arranged in a matrix method on a flat panel display panel and then individually controlled by a switching element such as a thin film transistor (TFT). ) Is widely used because of its excellent video reproducibility and color reproduction.

On the other hand, the manufacture of a general flat panel display device includes a thin film deposition process, a photolithography process, and an etching process several times. In addition, many processes such as cleaning, bonding, and cutting are involved. In particular, the cleaning process is a process to improve cleanliness by removing foreign substances adsorbed on the object surface using liquid such as DI (De-Ionizwd water), which is essential for improving product reliability including the manufacturing process of flat panel display devices. It is a process.

Therefore, the object of cleaning is not limited to the silk substrate, but targets all elements that can directly or indirectly affect the cleanliness of the substrate, and requires a separate space isolated from the surroundings by using a liquid such as DI. Typically, a bath provided on a moving path of an in-line facility is used for cleaning a substrate, while a separate cleaning chamber is mobilized for cleaning a large object such as a cassette.

At this time, the cassette is a substrate storage case that forms the minimum unit for storing and transporting the substrate in the entire manufacturing process of the current flat panel display device. As shown in the perspective view of FIG. It shows a box shape.

That is, the general cassette 10 is composed of upper and lower surfaces 14 and 16 and three side surfaces 22, 24 and 26 connecting them to define a substrate storage space therein, and two side surfaces 22 and 26 parallel to each other. The slot pins 32 of the upper and lower constant pitches project from each other in a direction facing each other, and from the other side 24 facing the open inlet 12, A support bar (34) showing the same pitch protrudes horizontally toward the entrance face (12).

Accordingly, the substrates are received layer by layer by the support bars 34 supporting both edges by the slot pins 32 corresponding to each other and simultaneously supporting the substrates.

And the cleaning chamber for performing the cleaning process for such a cassette 10, etc. define a separate cleaning space isolated from the outside, one side thereof is provided with an inlet for carrying in and out of the object, the inside DI injection nozzle And a separate cleaning unit for cleaning the object by using the DI injected therefrom, and the sliding door has a structure that blocks or opens the front of the entrance.

At this time, since the general cleaning chamber uses a large amount of liquid such as DI, a unique sealing structure is adopted in the door part to prevent external leakage of the liquid.

That is, FIG. 2 is a schematic perspective view of a general cleaning chamber 50, which includes a cleaning chamber 50 defining a cleaning space, an inlet 52 provided at one side thereof, and a door for opening and closing the inlet 52. 54 is shown, and the double door 54 represents a larger area to open and close the inlet 52 in a sliding manner.

Therefore, when the door 54 is closed, the edge of the door 54 faces the edge of the inlet 52, and a clearance of about 20 mm is generated between them, and the above clearance is selectively selected depending on the opening and closing of the door 54. A sealing tube (sealing tube) 60 of silicon is enclosed along the edge of the inlet 52 to seal the inside thereof, and a CDA (Clean Dry Air) is supplied therein to close the clearance part through expansion and contraction of the volume. Seal or open. That is, as the CDA is supplied into the sealing tube 60 when the door 54 is closed, the play portion is sealed due to volume expansion. When the supply of CDA is stopped, the volume of the sealing tube 60 is reduced so that the door 54 is closed. Is the way it is opened.

In this case, in order to supply the CDA into the sealing tube 60, the CDA inlet 72 connected to the external CDA tank 70 is mobilized, and their connecting structure is enlarged as shown in FIG. (60) A part is cut and the CDA injection hole 72 is inserted, and then the CDA injection hole 72 including the incision line is resealed with an adhesive.

However, such a sealing structure of the general cleaning chamber 50 exhibits some of the following problems.

First, due to frequent opening and closing of the door 54, as the volume expansion and contraction of the sealing tube 60 is repeated, a breakage phenomenon in which a leak appears in the sealing part appears.

More specifically, the CDA supplied to the general sealing tube 60 is 1.2 kgf of high pressure, and the internal pressure is further increased due to the elastic force of the sealing tube 60 itself. When the internal pressure increase is repeated, the sealing portion of the sealing tube 60, which is relatively weak in strength, does not overcome the pressure and ruptures, causing leakage. In this case, the inlet 52 and the door of the cleaning chamber 50 Since it is impossible to completely seal the gap between 54), a liquid such as DI inside the cleaning chamber 50 leaks out.

Therefore, if a leak occurs in the sealing portion that is the connection point between the sealing tube 60 and the CDA inlet 72, it should be repaired, and the temporary damage of simply resealing the leak portion is likely to cause damage again. Eventually, after replacing the entire sealing tube 60 with a new one, a portion of the incision is inserted into the CDA inlet 72 and then a series of processes are followed.

However, the replacement of the sealing tube 60 and the reconnection process of the CDA inlet 72 is very cumbersome and takes about 3 hours even by a skilled person, and the cleaning chamber 50 during the replacement time of the sealing tube 60. Is impossible to use. In addition, the possibility of failure of the newly replaced sealing tube 60 still remains.

In addition, another problem exhibited by the sealing structure of the general cleaning chamber 50 can be found in the absence of any means for forcibly discharging the CDA injected into the sealing tube 60. Therefore, the door 54 is currently closed. Waited for the CDA in the sealing tube 60 to be naturally discharged while the CDA supply was stopped.

Therefore, the disadvantage of having to wait for a long time unnecessarily, the waiting time for the discharge of the CDA in the sealing tube 60 is usually 20 seconds or more, during this time also the use of the cleaning chamber 50 is not possible to improve the work yield It causes the deterioration.

Accordingly, the present invention has been made to solve the above problems, by providing a sealing structure and a sealing method for the door of the cleaning chamber of more stable and durable concrete concrete method to improve the work yield and extend the life of the equipment The purpose is to present.

In order to achieve the above object, the present invention, an open inlet of one side;

A door for opening and closing the entrance in a sliding manner; A sealing tube, one end of which is sealed around an edge of the inlet so as to face closer along the edge of the door when the door is closed; A nozzle jointly connected to the other end of the sealing tube; The cleaning chamber includes a pump for injecting gas into the sealing tube or exhausting the gas in the sealing tube through the nozzle.

At this time, the gas is characterized in that the CDA, characterized in that it further comprises a bracket for sealing one end of the sealing tube, the bracket is in close contact with one edge of the upper end of the inlet with one end of the sealing tube in between Sealing the sealing tube, characterized in that the corner in contact with one end of the sealing tube is rounded.

In addition, the other end of the sealing tube is characterized in that located on one edge of the top of the inlet.

In addition, the present invention is a door sealing method of the cleaning chamber according to the above description, the door is closed and the sealing tube facing the edge along the edge of the door; The pump injecting gas through the nozzle to expand the volume of the sealing tube, thereby adhering along the edge of the door; The pump suctioning gas through the nozzle to reduce the volume of the sealing tube so as to be spaced apart from the edge of the door; It provides a door sealing method of the cleaning chamber comprising the step of opening the door.

Hereinafter, the present invention will be described in more detail with reference to the accompanying drawings.

4 is a perspective view schematically showing the overall configuration including the inlet 102 and the door 112 as the cleaning chamber 100 according to the present invention.

At this time, the cleaning chamber 100 according to the present invention is for cleaning a large object, such as a cassette, the cleaning chamber has a cassette cleaning unit such as a spray nozzle for spraying DI and a stage for supporting and rotating the object. It may be provided, and if necessary, a hot air spray unit for injecting high-temperature CDA may be provided to perform a function of drying after cleaning. And one side thereof is provided with an inlet 102 for carrying in and out of the object, the door 112 is provided with a larger area than the inlet 102 to open and close it in a sliding manner.

Therefore, when the door 112 is closed, the edge thereof faces the edge of the inlet 102, and a clearance of about 20 mm appears between them, so that the clearance space can be selectively sealed according to the opening and closing of the inlet 102. As a sealing structure, the sealing tube 120 and the CDA tank 140 and the CDA stored therein are connected to the sealing tube 120, one end of which is sealed at one end of the sealing tube 120, and the other end thereof. ) Or pump (150) for injecting gas or forcibly discharging the gas in the sealing tube (120).

The door 112 sealing structure of the cleaning chamber 100 according to the present invention will be described in more detail with reference to FIG.

First, the sealing tube 120 covering the edge of the inlet 102 of the cleaning chamber 100 may be made of a silicone or rubber material having elasticity, and is located at one upper end of the edge of the inlet 102 of the cleaning chamber 100. One end is wrapped around the entrance 102 in a clockwise direction for convenience, and the other end, which is a distal end, is also located at the top of one edge of the entrance 102, which is the same position as the starting point.

The starting point of the sealing tube 120, that is, one end of the sealing tube 120 may be sealed through the bracket 122.

At this time, the bracket 122 is to seal one end of the sealing tube 120, there is no specific limitation, but for example, around the inlet 102 of the cleaning chamber 100 with one end of the sealing tube 120 interposed therebetween. As it is in close contact with one point of the can take a way to seal.

Therefore, the bracket 122 has a larger contact surface than one end of the sealing tube 120, and the thickness is smaller than 20 mm, which is a clearance distance between the edge of the inlet 102 of the cleaning chamber 100 and the door 112. At least one screw hole is perforated to penetrate each of them, and then one end of the sealing tube 120 through one or more screws 124 that are firmly inserted into a point around the inlet 102 of the cleaning chamber 100. It can be sealed tightly. In addition, at least one edge of the bracket 122 in close contact with the sealing tube 120 may be rounded to prevent the sealing tube 120 from being damaged by the bracket 122.

In addition, the other end of the sealing tube 120 is connected to the nozzle 130, for this purpose, joint means such as screw joint (screw joint 134) and nipple (nipple: 136) can be mobilized, whereby the nozzle ( 130 is jointly connected to be disassembled and assembled from the other end of the sealing tube (120).

In addition, the nozzle 130 is connected to the CDA tank 140 through an external pump 150 to inject gas into the sealing tube 120, for example, CDA or to forcely discharge the gas in the sealing tube 120. .

Looking at the sealing method of the door 112 of the cleaning chamber 100 according to the present invention based on the above, on the premise that the first door 112 is opened, the object to be cleaned through the inlet 102 of the cleaning chamber 100 The cassette is imported.

The door 112 is then closed in a sliding manner, whereby the edge of the door 112 faces the edge of the inlet 102 at an interval of about 20 mm, between which the sealing tube 120 is located.

Next, the CDA is supplied to the nozzle 130 through the pump 150 and filled into the sealing tube 120.

At this time, the supply pressure of the CDA is preferably about 1.2kgf, and as a result, the clearance is sealed between the edge of the inlet 102 and the edge of the door 112 of the cleaning chamber 100 due to the volume expansion of the sealing tube 120.

Accordingly, a cleaning process using a liquid such as DI is performed in the cleaning space in the cleaning chamber 100. During this process, the pump 150 maintains the supply pressure of the CDA so that the volume expansion state of the sealing tube 120 is maintained. It prevents the outflow of liquid.

On the other hand, between the edge of the inlet 102 and the edge of the door 112 during the above process, there is a bracket 122 for sealing one end thereof, including the sealing tube 120, unlike the sealing tube 120 bracket 122 Since the volume expansion is impossible, a certain amount of play may occur between the bracket 122 and the door 112. However, if the mounting position of the bracket 122 is the upper end of any one of the edges of the door 112, the outflow point of the liquid is substantially lower than this, there is a concern that the liquid leaked through the portion of the bracket 122 none.

Subsequently, cleaning is completed, and the CDA in the sealing tube 120 is quickly discharged through the nozzle 130 by the pump 150.

That is, the sealing structure of the door 112 of the cleaning chamber 100 according to the present invention can be forced exhaust of the gas filled in the sealing tube 120 as compared to the general case can significantly reduce the unnecessary waiting time, Accordingly, when the sealing tube 120 is separated from the door 112, the door 112 is opened in a sliding manner.

The cleaned object in the cleaning space is carried out to the outside through the inlet 102.

In the sealing structure of the door 112 of the cleaning chamber 100 according to the present invention described above, unlike the usual case, a separate incision or suture for connecting the CDA inlet (see 72 of FIG. 3) to the sealing tube 120 Unnecessary, and therefore, the possibility of breakage of leaks and the like is greatly reduced despite frequent volume expansion.

On the other hand, the cleaning chamber 100 according to the present invention described above is a stocker for the loading and storage of the cassette and the variation in the pitch of the support bar (see 34 in Fig. 1), including the inclination of the cassette in the presence of abnormality It can be constructed as a so-called in-line (in line) system that is interlocked with the inspection device to check whether the attached, Figure 6 is a block diagram of a cassette inspection and cleaning system comprising a cleaning chamber 100 according to the present invention.

Among them, the stocker 160 provides a plurality of shelves divided into upper, lower, left and right as a part for sorting and stacking cassettes according to the purpose so that the cassettes are separately loaded on each, and a so-called rock master, which is a cassette transport robot, Is provided to carry the cassette between each shelf, including inside and outside. Next, the cassette cleaning chamber 100 receives the cassette through a loader (loader) 162, which is a connection medium with the stocker 160, and proceeds with cleaning and drying. The cassette having cleaning is a cassette having an unloader function. After passing over to the inspection apparatus 164 and finishing the inspection, it is transferred to the stocker 160 and loaded.

By including the cleaning chamber according to the present invention in such a cassette inspection and cleaning system, the efficiency for cleaning and inspection of the cassette can be greatly improved.

The present invention as described above provides a more stable and durable door sealing structure and sealing method of the cleaning chamber, thereby improving the work yield and the effect of extending the life of the equipment.

In other words, the cleaning chamber according to the present invention reduces the possibility of leakage of the sealing tube by removing the seals, thereby reducing the effort and time required for replacement and repair, and the nozzles are easily connected to the sealing tube to be disassembled and assembled. It can be easily removed and has the advantage of simplifying the replacement of the sealing tube and the connection of the nozzle.

In addition, the cleaning chamber according to the present invention is provided with a function of forcibly discharging the CDA in the sealing tube to minimize unnecessary waiting time, thereby greatly improving the work yield for the cassette cleaning operation.

Claims (6)

An open inlet on one side; A door for opening and closing the entrance in a sliding manner; A sealing tube having one end sealed around an edge of the inlet so as to face close to the edge of the door when the door is closed; A nozzle jointly connected to the other end of the sealing tube; A pump for injecting gas into the sealing tube or sucking gas in the sealing tube through the nozzle; Cleaning chamber comprising a. The method of claim 1, The gas is a cleaning chamber of CDA. The method of claim 1, Bracket for sealing one end of the sealing tube The cleaning chamber further comprising. The method of claim 3, wherein The bracket may be in close contact with one edge of the inlet with one end of the sealing tube closed to seal the sealing tube, and the edge contacting one end of the sealing tube has a rounding treatment chamber. The method of claim 4, wherein The other end of the sealing tube is located in the upper edge of the inlet of the cleaning chamber. A door sealing method of a cleaning chamber according to any one of claims 1 to 5, Closing the door to face the sealing tube along an edge of the door; The pump injecting gas through the nozzle to expand the volume of the sealing tube, thereby adhering along the edge of the door; The pump suctioning gas through the nozzle to reduce the volume of the sealing tube so as to be spaced apart from the edge of the door; Opening the door Door sealing method of the cleaning chamber comprising a.

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