KR101378160B1 - Upper electrode assembly and manufacturing machine FPD having the same - Google Patents

Abstract

The present invention provides a spacing, position, and size of recesses provided in an electrode in order to increase the density of plasma due to a hollow cathode effect, thereby improving processing efficiency. In addition, the present invention relates to an upper electrode assembly (Upper Electrode Assembly) and a flat panel display device manufacturing apparatus having the same that can be changed quickly and easily to optimize the shape according to the working conditions.

The upper electrode assembly is provided with a plurality of gas outlets in the center of the electrode, and is mounted on the exposed surface of the electrode so that the protruding block is detachable by the fastening means, wherein the protruding block is at least a portion of the periphery of the center of the electrode It is formed to have an enclosing shape, and is also provided with two or more rows so as to be spaced apart from each other.

In this case, the electrode may be provided with a concave block inserting portion to accommodate the protruding block, respectively, at a portion of the exposed surface facing the protruding block. In addition, the fastening means may be composed of a plurality of screw holes provided to be spaced apart from each other in each block insertion portion, and fastening bolts respectively coupled to the screw holes through the protruding block.

Upper electrode, chamber, flat panel display device, plasma, lower electrode, hollow cathode

Description

Upper electrode assembly and flat panel display device manufacturing apparatus having same {Upper electrode assembly and manufacturing machine FPD having the same}

1 is a schematic diagram showing a general process chamber.

FIG. 2 is a cross-sectional view of the Y portion of FIG. 1 and illustrates the upper electrode assembly.

3 is a perspective view illustrating an electrode of the upper electrode assembly illustrated in FIG. 2.

4 is a diagram illustrating a process chamber having an upper electrode assembly according to a first embodiment of the present invention.

FIG. 5 is a cross-sectional view of the portion Z of FIG. 4 and illustrates the upper electrode assembly.

6 is a perspective view illustrating an electrode of the upper electrode assembly illustrated in FIG. 5.

7 and 8 show the portion P of FIG. 5, FIG. 7 is an enlarged view, and FIG. 8 is an exploded perspective view.

FIG. 9 is an enlarged view illustrating a portion Q of FIG. 5.

FIG. 10 is an enlarged view illustrating a portion P of FIG. 5 and illustrates a state in which a protruding block having a different longitudinal section shape is applied.

11 and 12 are cross-sectional views showing the main part of the upper electrode assembly according to the second embodiment of the present invention, Figure 11 shows a state in which the protruding block is protruding, Figure 12 is an exposed surface of the electrode of the protrusion block It is in the same plane with the state.

DESCRIPTION OF THE REFERENCE NUMERALS

10 chamber 20 upper electrode assembly

30: lower electrode assembly 50: electrode

50a: peripheral portion of electrode 50c: central portion of electrode

52 gas outlet 54 screw hole

56 block insertion portion 60: protruding block

62: through hole 70: stopper (screw hole stopper)

80: fastening bolt 85: stopper (through hole stopper)

The present invention relates to an upper electrode assembly and a flat panel display device manufacturing apparatus having the same to increase the density of plasma when processing a substrate.

Background Art [0002] Recently, flat panel displays include liquid crystal displays, plasma display panels, and organic light emitting diodes. The apparatus for manufacturing such a flat panel display device is mainly a vacuum processing apparatus, which is a process chamber, a load lock chamber, and a transfer chamber. Etc.

The process chamber serves to process (eg, etch) the substrate (glass) under a vacuum atmosphere using plasma. The load lock chamber alternates atmospheric pressure and vacuum to receive and store a substrate to be processed from the outside, or to carry out the processed substrate to the outside. The transfer chamber has a transfer robot for transferring the substrates between the chambers. The transfer chamber carries a substrate to be processed by the transfer robot from the load lock chamber to the process chamber, or transfers the processed substrate from the process chamber to the load lock chamber. Play a role.

1 is a configuration diagram schematically showing a process chamber among the described chambers.

As shown in FIG. 1, the process chamber includes a chamber 1 provided with a gate slit 1g on a wall thereof, a shower provided in the chamber 1 and providing a process gas for processing a substrate. Upper Electrode Assembly (2) equipped with a Head (Shower Head), a substrate provided in the chamber (1) and placed on the upper surface of the upper electrode assembly (2) so as to face each other The lower electrode assembly (Lower Electrode Assembly) (3), the gate valve (Gate Valve) (4) for opening and closing the gate slit (1g) and the like.

In the process chamber, when a substrate is provided on the upper surface of the lower electrode assembly 3 and a process gas is provided in the chamber 1, high frequency power is applied to the upper electrode assembly 2 and the lower electrode assembly 3. The process gas is brought into a plasma state, and the substrate is processed by the action of this plasma.

2 is a cross-sectional view of the Y portion of Figure 1, Figure 3 is a perspective view of the electrode of the upper electrode assembly.

As shown in FIGS. 2 and 3, the upper electrode assembly 2 has a plurality of gas outlets 2o at the central portion C of the electrode 2e such that the process gas is injected between the lower electrode assembly 3 and the lower electrode assembly 3. A recess 2h is provided on the peripheral portion A exposed surface of the electrode 2e, that is, the surface exposed to the outside, so as to have a form that surrounds at least a portion of the periphery of the central portion C.

The recesses 2h are formed integrally with the electrode 2e, and one or more rows may be provided. This recess (2h) serves to improve the efficiency by increasing the density of the plasma by the Hollow Cathode effect when processing the substrate, the details can be found in the application number 10-1996-0702019 .

However, as described above, the upper electrode assembly 2 of the process chamber is provided with the recess 2h integrally with the electrode 2e, so that the size, shape and position of the recess 2h, the spacing between the recess 2h, etc. There was a problem in that various important factors could not be changed to be optimized according to the processing conditions of the substrate. In other words, in order to change the setting of the recessed part 2h, the electrode 2e having the recessed part 2h of another setting had to be replaced.

This problem is, of course, not only found in the upper electrode assembly of the process chamber, but in the case of the flat panel display device manufacturing apparatus having the upper electrode assembly 2e described. In addition, since the upper electrode assembly is a component that is similarly applied not only to a flat panel display device manufacturing device but also to a device for manufacturing a semiconductor, the above problem may also be found in the same semiconductor manufacturing device.

The present invention has been made in order to solve the problems described above, but provided with a plurality of blocks so that the recess is provided on the periphery of the electrode, it is configured to be removable to simplify the size, shape and position of the recess, such as the gap between the recess An object of the present invention is to provide an upper electrode assembly and a flat panel display device manufacturing apparatus having the same, which can be changed quickly and quickly.

The upper electrode assembly of the present invention for realizing the above technical problem is provided with a plurality of gas outlets in the center of the electrode, the protruding block is mounted on the exposed surface of the electrode so as to be detachable by a fastening means, wherein The protruding block is formed to have a form surrounding at least a portion of the periphery of the central portion and is provided with two or more rows so as to be spaced apart from each other.

Here, the fastening means may be composed of a plurality of screw holes provided to be spaced apart from each other in each of the exposed surface of the peripheral portion facing each other, and fastening bolts respectively screwed into the screw holes through the protruding block have. The protruding block may have a through hole through which the fastening bolt passes, so that the head of the fastening bolt can be accommodated, and a stopper may be inserted into an inlet of the through hole.

On the other hand, the upper electrode assembly as described may further comprise a stopper that is fitted to form the same plane as the exposed surface of the electrode in the screw hole when the protruding block is not mounted.

Alternatively, the upper electrode assembly of the present invention for realizing the above technical problem is provided with a plurality of gas outlets in the center of the electrode, the protruding block is mounted on the exposed surface of the electrode so as to be detachable by the fastening means, Wherein the protruding block is formed to have a form surrounding at least a portion of the periphery of the central portion is provided with two or more rows to be spaced apart from each other, characterized in that the recess is provided between the electrodes, each facing the protruding block in the exposed surface Blocks may be provided with a concave block insertion portion to accommodate each of the protruding block. The fastening means includes a plurality of screw holes provided along the direction in which the protruding block is fitted to the block inserting portion so as to be spaced apart from each other, and fastening bolts respectively coupled to the screw holes through the protruding block. Can be.

The protruding block may be formed to be coplanar with the exposed surface of the electrode when accommodated in the block insert. The protruding block may have a through hole through which the fastening bolt passes, so that the head of the fastening bolt can be accommodated, and a stopper may be inserted into an inlet of the through hole.

According to an aspect of the present invention, there is provided a flat panel display device manufacturing apparatus including a chamber for providing a processing space of a substrate, and a process gas provided in the chamber to provide a process gas for processing the substrate. And an electrode assembly and a lower electrode assembly provided in the chamber to be positioned to face the upper electrode assembly.

Hereinafter, an embodiment of the present invention will be described with reference to the accompanying drawings. For reference, various embodiments of the present invention will be described by taking an example that all are applied to a process chamber, which is one of devices for manufacturing a flat panel display device.

4 is a diagram illustrating a process chamber having an upper electrode assembly according to a first embodiment of the present invention.

As shown in FIG. 4, a process chamber having an upper electrode assembly according to a first embodiment of the present invention has a gate slit for carrying a substrate into one side of a wall or vice versa. A chamber 10 provided with a long left and right sides 12, a shower head for supplying and injecting a process gas required for processing a substrate loaded in the chamber 10 from a gas supply source and thus Upper Electrode Assembly 20 having an electrode 50 for bringing the injected process gas into a plasma state, in the chamber 10 to face each other in front of the lower electrode assembly 20. And a lower electrode assembly 30 on which a substrate loaded on the upper surface is placed. At this time, the gate slit 12 of the chamber 10 is opened and closed by a gate valve 40 provided outside the wall surface of the chamber 10.

5 is a cross-sectional view of the portion Z of Figure 4, Figure 6 is a perspective view showing the electrode of the upper electrode assembly.

As shown in FIGS. 5 and 6, the upper electrode assembly 20 has a plurality of gas outlets 52 at the central portion 50c of the electrode 50 so that the process gas is evenly injected between the lower electrode assembly 30. In addition, a plurality of protruding blocks 60 are provided on the exposed surface exposed to the outside from the peripheral portion 50a of the electrode 50 so that the plasma density is increased by the hollow cathode effect.

Here, the electrode 50 is formed in a plate shape with its exposed surface flat. The protruding block 60 is formed to surround the entirety of the center portion 50c of the electrode 50, that is, disposed along the periphery portion 50a of the electrode 50 to have a ring structure. At this time, the protruding block 60 is mounted so as to be detachable to the electrode 50 by the fastening means, so that a relatively concave recess (S) is provided therebetween. It is provided.

For reference, although the above-described protruding block 60 is formed to have a ring structure, it is not necessary to form the bar at least, so that at least one place surrounds a part of the center 50c of the electrode 50. It may be formed in a broken form. In addition, the number of rows of the protruding block 60 provided may be two or more rows instead of four rows.

7 and 8 show the portion P of FIG. 5, FIG. 7 is an enlarged view, and FIG. 8 is an exploded perspective view.

The fastening means is to fasten and mount the protruding block 60 to the peripheral portion 50a of the electrode 50 by bolting, as shown in FIGS. 7 and 8, the exposed surface of the peripheral portion 50a of the electrode 50. A plurality of screw holes 54 provided at regular intervals so as to be spaced apart from each other in a portion facing each of the protruding blocks 60, and penetrating the protruding blocks 60 so as to be screwed to the screw holes 54, respectively. It consists of a fastening bolt 80 fitted in the screw hole 54 in a state. Of course, the screw holes 54 are all smaller than the protruding block 60 and are formed to be covered by the protruding block 60 when the protruding block 60 is mounted.

Here, each of the protruding blocks 60 penetrates the front face of the screw holes 54 so that the body of the fastening bolt 80 provided with the external thread can be penetrated to be coupled with the screw hole 54 provided with the female thread. Holes 62 are provided, respectively, the through holes 62 are all formed so that the head of the fastening bolt 80 can be accommodated therein without protruding.

On the other hand, the through hole 62 is fitted with a stopper 85 (hereinafter referred to as a through hole stopper) at its inlet. At this time, when the through-hole stopper 85 is inserted into the through-hole 62, it is preferably formed to fill the through-hole 62 while forming the same plane as the surface of the protruding block 60.

FIG. 9 is an enlarged view illustrating a portion Q of FIG. 5.

As described above, the upper electrode assembly 20 may be provided with all of the protruding blocks 60 in the electrode 50, and only a part of the upper electrode assembly 20 may change the size of the recessed part S. When 54 is exposed, as shown in Fig. 9, the screw holes 54 are respectively fitted in the screw holes 54 so as to prevent the exposed screw holes 54 from having the same function as the above recessed portion S. It is comprised by including the stopper 70 which fills 54 (henceforth a screw hole stopper).

Here, the screw hole stopper 70 is formed so as to protrude from the exposed surface of the electrode 50 when the screw hole 54 is inserted, or conversely, so that no unevenness is provided on the exposed surface of the electrode 50. In other words, it is formed to be coplanar with the exposed surface of the electrode 50 when the screw hole 54 is fitted.

In the upper electrode assembly according to the first embodiment of the present invention, the protruding block 60 is formed so that the through hole 62 of the protruding block 60 coincides with the corresponding screw hole 54 of the electrode 50. The fastening bolts 80 to the corresponding screw holes 54 so that the heads of the fastening bolts 80 are accommodated in the through holes 62, respectively. Insert the through hole stopper 85 into the inlet of the) to fill the through hole 62, the installation of the protruding block 60 is completed.

On the other hand, if you want to change the size of the recess (S) by selectively removing the protruding block 60, after loosening the fastening bolt 80 is fastening the protruding block 60 to separate from the electrode 50, Accordingly, the screw hole caps 70 may be inserted in the exposed screw holes 54, respectively.

On the other hand, the upper electrode assembly 20 according to the first embodiment of the present invention can easily install and remove the protruding block 60 at any time as described, because instead of the above protruding block 60 As shown in FIG. 10, the protruding blocks 60A and 60B having different shapes of longitudinal sections may be provided. If the longitudinal section is provided in a different type, the shape of the recessed portion S is changed.

As described above, in the reference numerals not described with reference to FIGS. 4 to 10, 54e is an extension provided at the inlet of the screw hole 54, and 72 is a flange provided at the screw hole stopper 70 so as to fit snugly with the extension 54e. (Flange).

Next, a second embodiment having a configuration similar to that of the upper electrode assembly according to the first embodiment of the present invention will be described. In this case, the second embodiment will be described based on different parts as compared with the first embodiment described above, and only the corresponding parts will be shown in the drawings.

11 and 12 are cross-sectional views illustrating main parts of the upper electrode assembly according to the second embodiment of the present invention.

As shown in FIGS. 11 and 12, the upper electrode assembly according to the second exemplary embodiment of the present invention has the protruding block 60 at a portion of the exposed surface of the electrode 50 facing and facing the protruding block 60. The point in which the concave block inserting portions 56 are provided so as to be accommodated without protruding from the exposed surface of the electrode 50 is typically different from that of the first embodiment.

In the case of the screw hole 54, all of the protruding block 60 is provided in the direction in which the protruding block 60 is inserted into the block insert 56 so that the inlet is located in the block insert 56. In the case of the protruding block 60, the protrusion block 60 is formed to be coplanar with the exposed surface of the electrode 50 when accommodated in the block insertion unit 56.

As described in the second embodiment, when the fastening bolts 80 for mounting one of the protruding blocks 60 to the electrode 50 are tightened, the protruding block 80 enters the screw hole 54 as the fastening bolts 80 enter the screw holes 54. 60 also enters and receives the block insert 56. On the contrary, if the fastening bolt 80 is loosened, the protruding block 60 will come out of the block insert 56 and thus protrude from the exposed surface of the electrode 50. That is, in the second embodiment, the protruding length of the protruding block 60 is changed by such manipulation.

On the other hand, in the second embodiment, the through-hole stopper 70 of the first embodiment is unnecessary in accordance with the above configuration, and thus, the extension 54e does not necessarily need to be provided.

The present invention has been described above, but the present invention is not limited to the embodiments disclosed in the present specification and the accompanying drawings, and those skilled in the art within the technical scope of the present invention have ordinary knowledge in the technical field to which the present invention belongs. I) Various modifications may be made.

The present invention constituted as described above is mounted on the exposed surface of the electrode so that the protruding block is detachable by the fastening means, the protruding block is formed to have a form surrounding at least a portion of the periphery of the electrode and spaced apart from each other Since two or more rows are provided so that recesses are provided therebetween, there is an advantage that the intervals, positions, sizes, and shapes of the recesses can be easily and quickly changed to be optimized according to the processing conditions of the substrate. That is, the present invention can be provided with various types of protruding blocks in advance to change the setting of the main part by selecting, mounting or detaching the necessary ones.

Claims (8)

A plurality of gas outlets are provided at the center of the electrode, and the protruding block is mounted on the exposed surface of the electrode so as to be detachable by a fastening means. The protruding block is formed to have a form surrounding at least a part of the surroundings of the central portion and provided with two or more rows to be spaced apart from each other, the recess is provided between, The fastening means. A plurality of screw holes provided to be spaced apart from each other in the portion facing the protruding block of the exposed surface of the peripheral portion, The upper electrode assembly, characterized in that consisting of a fastening bolt penetrates the protruding block and screwed to the screw hole respectively. delete The method according to claim 1, The upper electrode assembly is characterized in that the top electrode assembly further comprises a stopper that is fitted to form the same plane as the exposed surface of the electrode in the screw hole when the protruding block is not mounted. The method according to claim 1, The protruding block is formed so that the head of the fastening bolt can accommodate the through hole through which the fastening bolt passes. And an end cap is inserted into the inlet of the through hole. The method according to claim 1, The electrode is provided with a concave block inserting portion so as to accommodate each of the protruding block in each of the exposed surface facing the protruding block, The fastening means is composed of a plurality of screw holes provided along the direction in which the protruding block is fitted to the block inserting portion so as to be spaced apart from each other, and fastening bolts respectively coupled to the screw holes through the protruding block. An upper electrode assembly, characterized in that. The method of claim 5, And the protruding block is formed to be flush with the exposed surface of the electrode when accommodated in the block insert. The method of claim 5, The protruding block is formed so that the head of the fastening bolt can accommodate the through hole through which the fastening bolt passes. And an end cap is inserted into the inlet of the through hole. A chamber providing a processing space for the substrate, It is provided in the chamber to provide a process gas required for the processing of the substrate, the upper electrode assembly according to any one of claims 1, 3 to 7, And a lower electrode assembly provided in the chamber such that the lower electrode assembly is positioned below the upper electrode assembly.

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