KR101368809B1 - Supporting Member for Slot Port of Chamber and Apparatus for Treating Substrate Having the Same - Google Patents

Abstract

In the present invention, the support member is coupled to the upper portion of the slot port in which the object to be processed is located on one side of the substrate processing apparatus including a chamber having a space therein for the manufacture of the flat display device, the upper end of the slot port A support member including a support that is tightly fastened to a center, a slot port, and a reinforcing bar spaced apart from and fixed to an upper surface of the support, and a substrate processing apparatus including the support member. The support member of the present invention can reduce the damage of the processing object that can be caused in the manufacturing process of the flat panel display device by preventing the sagging and deformation of the slot port through which the processing object, such as glass, which is being enlarged, enters and exits. Of course, it is possible to maintain the airtightness between the components constituting the chamber can prevent the uniformity of the thin film thickness and the degradation of product properties.

Description

Supporting member for Slot Port of Chamber and Apparatus for Treating Substrate Having the Same}

The present invention relates to a substrate processing apparatus, and more particularly, to a support member and a substrate processing apparatus including the same for preventing the deformation of the slot port formed on one side of the chamber constituting the substrate processing apparatus.

The cathode ray tube (CRT), which has been widely used as a conventional display device, needs to concentrate an electron-beam from an electron gun to a screen displaying a screen. Accordingly, the image display device using the cathode ray tube requires a minimum distance for concentrating the electron beam and thus has a disadvantage of being bulky and heavy. Recently, liquid crystal display (LCD), plasma display panel (PDP), organic light emitting diode (OLED), and solar cells (Solar) So-called flat panel devices such as cells are widely used.

In order to manufacture such a flat panel display device, various electrodes, color filters, etc. may be formed on the surface of the glass as a base material through deposition, photolithography, and etching of various source gases. The fabrication process is carried out continuously, each of which is performed in a substrate processing apparatus such as various chambers equipped with optimum process conditions.

In general, in order to manufacture a flat panel display device, various chambers as substrate processing apparatuses are clustered in a cluster form, so that the incoming and transported objects can be continuously performed. FIG. 1 is an example of a flat panel display device manufacturing apparatus. FIG. 3 is a layout view schematically showing a conventional liquid crystal display device manufacturing apparatus. As shown in the drawing, a general liquid crystal display device manufacturing apparatus includes a plurality of process chambers in which main processes are performed, and a plurality of process chambers for drawing / drawing the glass 50 into the process chamber 10. A transfer chamber 20 adjacent to 10 and having a polygonal shape as a whole, a loadrock chamber 30 installed adjacent to the other side of the transfer chamber 20, and the load lock chamber 30. It includes a transfer unit 40 and the like coupled to the side.

In this case, the process chamber 10 is a space in which the main processes such as thin film deposition and etching of the glass 50 to be processed are performed, and is usually placed under high vacuum and high temperature conditions, and the transfer chamber 20 is a process chamber ( A vacuum state is maintained as a space for transferring the glass 50 between the load lock chamber 30 and the load lock chamber 30, and a transfer chamber robot 21 for transporting the glass is provided therein. On the other hand, the transfer unit 40 is a space for introducing / exporting the glass 50 to / from the cassette outside the apparatus, and a guide for horizontal movement of the transfer unit robot 41 and the transfer unit robot 41 as a transport means therein. The rail 42 is provided. Finally, the load lock chamber 30 is a space that serves as a buffer between the transfer portion 40 in the atmospheric pressure state and the transfer chamber 20 in the vacuum state, the atmospheric pressure state when the transfer portion 40 and the glass is introduced / removed Furnace, when the transfer chamber 20 and the glass is drawn in / out is switched to the vacuum state, respectively.

As described above, a passage is formed on the side wall of each chamber to open the glass between the chambers 10, 20, 30 and the transfer part 40 so that the glass can pass therethrough. It demonstrates centering on the process chamber 10. FIG. 2 is an exploded perspective view schematically illustrating a conventional process chamber, in which the process chamber 10 includes a chamber body 11 having a susceptor 14 having a glass mounted thereon, and the chamber body 11. The chamber lid 12 is coupled to the upper portion of the chamber body 11 and the chamber lid 12 in contact with the O-ring 16 is interposed for the vacuum-sealing. In particular, an approximately rectangular slot port 18 is formed at one side of the chamber body 11 through which the glass is drawn into or out of the process chamber 10. Typically the slot port 18 is formed at a position higher than the middle of the chamber body (11).

Meanwhile, a gate valve 60 having a slot 61 communicating with the slot port 18 is coupled to an outer surface of the chamber body 11 in which the slot port 18 is formed. A slot valve (not shown) is installed inside the gate valve 60 to open and close the slot 61 according to a process, and the slot valve driving unit 62 to the lower end of the gate valve 60 to drive the slot 61. Is connected. However, the slot port 18 having a constant opening area is installed in the transfer chamber 20 and the load lock chamber 30 in which the glass is to be drawn in and out as well as the process chamber 10. 60 serves to control the opening and closing of the passage for inlet / outlet of the glass between the respective chambers, and a vacuum is applied to the connection regions of the respective chambers 10, 20, 30 and the gate valve 60. O-rings are installed separately to maintain and prevent leakage of various process gases.

However, the inside of the process chamber 10 in which the process such as thin film deposition on the glass 50 is performed is under high vacuum and high temperature, while the outside thereof is at atmospheric pressure, and a large pressure is generated toward the inside. Deformation of the slot port 18 formed on one side of the chamber 10 results. That is, as described above, since the slot port 18 having a substantially rectangular shape is formed at a position higher than the middle of the chamber body 11, the thickness or height of the upper portion is much thinner than the thickness or height of the lower portion.

Therefore, as shown in FIG. 3, the slot port 18 installed on the side wall of the chamber body 11 constituting the process chamber 10 is deformed due to the pressure difference and the high temperature reaction region. The deformation sagging down by "d" occurs. In particular, as the size of the glass increases in size, the width of the slot port 18 for drawing / carrying glass also increases, so that the deformation width d of the slot port 18 increases to about 5 mm.

In addition, because the chamber lid 12 is coupled to the upper portion of the slot port 18, the chamber lid 12 is also deformed due to the deformation of the slot port 18. Accordingly, a gap is generated between the chamber body 11 and the chamber lead 12, and RF power (not shown) electrically connected to the chamber lead 12 and the like is not evenly transmitted to the area inside the process chamber 10. There is a problem that the quality of the thin film as well as the uniformity of the thin film thickness also occurs. In addition, there is a risk that the glass collides with the side wall of the glass while the glass is introduced / exported and thus the glass does not maintain its original shape.

The present invention has been proposed to solve the above problems, and an object of the present invention is to prevent the deformation of the slot port of the chamber for the manufacture of a flat panel display device, for example, which may be caused by the deformation of the slot port. It is an object of the present invention to provide a support member for a slot port of a chamber capable of reducing defects of a processed material and a substrate processing apparatus including the same.

Another object of the present invention is to provide a support member for a slot port capable of maintaining the airtightness of a chamber that cannot be maintained by deformation of the slot port, and a substrate processing apparatus including the support member.

Other objects and advantages of the present invention will become more apparent through the structure of the following invention.

According to an aspect of the present invention, the present invention is located on one side of the substrate processing apparatus including a chamber having a space defined therein for the manufacture of a flat panel display device coupled to the upper portion of the slot port through which the object to be processed The support member is provided, the support member is in close contact with the center of the upper end of the slot port, and the support member is spaced apart from the upper surface of the slot port and the support, the reinforcing bar is coupled to the support.

The separation distance between the reinforcing bar constituting the supporting member and the upper surface of the slot port is smaller than the separation distance between the reinforcing bar and the support, wherein the reinforcing bar is bent upwardly or has a central lower end of the dome shape. It characterized in that it has a or H-beam shape.

The support constituting the support member according to the present invention is fastened to the upper surface of the slot port through a fixing bolt, in particular the center of the reinforcement bar is coupled to the support through the support bolt, and the lower end of the periphery of the reinforcement bar Spacers may be interposed between the upper surfaces of the slot port peripheral parts. At this time, preferably, the support bolt is strongly coupled to the support toward the center portion of the slot port, thereby more efficiently preventing deformation of the slot port.

According to the present invention, the support member fastened to the upper portion of the slot port may be made of a material having a strength greater than that of the chamber, for example, stainless steel, etc. According to one embodiment, the support member may be As well as the upper portion of the slot port is characterized in that it is coupled to the upper portion of the gate valve which is installed in contact with the outer surface of the slot port.

On the other hand, according to another aspect of the present invention, a substrate processing apparatus including a chamber having a space defined therein for the manufacture of a flat panel display device, which is located on at least one side of the chamber, the slot port to be processed Wow; A support member coupled to at least an upper portion of the slot port, the support member being tightly fastened to the center of the upper end of the slot port, the support member being spaced apart from the upper surface of the slot port and the support, and a reinforcing bar fastened to the support member. It provides a substrate processing apparatus comprising.

The support member constituting the substrate processing apparatus according to the present invention has the above-described characteristics, and in particular, in one embodiment of the present invention, the substrate processing apparatus includes a gate valve in contact with an outer surface of the slot port and in communication with the reaction space of the chamber. The support member is further coupled to the upper portion of the slot port and the gate valve.

According to the present invention, due to the reinforcing effect of the support member coupled to and fixed to the upper portion of the slot port, deformation such as sagging of the slot port and the chamber lid located thereon due to high vacuum and thermal deformation inside the substrate processing apparatus can be prevented. have.

Since the deformation of the slot port can be prevented in this way, the gap between the chamber lid and the chamber body can be prevented from occurring due to the deformation of the slot port. Therefore, the uniformity of the thickness of the thin film performed in the reaction region inside the substrate processing apparatus can be prevented. The deterioration of the thin film characteristics can be prevented, and the damage of the workpiece to enter and exit through the slot port can also be reduced.

4 is an exploded perspective view schematically showing a process chamber which is one of substrate processing apparatuses in which a supporting member is coupled to an upper portion of a slot port according to an embodiment of the present invention. The process chamber 100 according to the present embodiment is And a chamber body 111 on which a susceptor 114 on which a glass is placed is disposed, and a chamber lead 112 coupled to an upper portion of the chamber body 111, wherein the chamber body 111 and the chamber lead are disposed. The o-ring 116 is interposed for the vacuum-sealing at the area where 112 is in contact. A slot port 118 is formed at one side of the chamber body 111, and the slot port 118 has a rectangular shape having a width in a substantially horizontal direction compared to a height in a longitudinal direction. Meanwhile, a gate valve 160 having a slot 161 communicating with the slot port 18 is coupled to an outer surface of the chamber body 11 in which the slot port 118 is formed, and opens and closes the slot 161. The slot valve driver 162 is connected to the lower end of the gate valve 160 to drive a slot valve (not shown).

On the other hand, according to the present invention, the slot port to solve the problems caused by the deformation of the slot port 118 and the chamber lead 112 disposed thereon caused by the high vacuum, high temperature reaction conditions, etc. in the process chamber 100 A support member 200 is installed to prevent deformation of 118. In particular, as described above, since the slot port 118 is generally formed at a position higher than the middle of the chamber body 111, since the thickness of the upper portion of the slot port 118 is much thinner than the thickness of the lower portion, the slot port 118 Deformation occurs more easily at the upper part than at the lower part. Therefore, the support member 200 for preventing deformation of the slot port 118 according to the present invention is preferably coupled and fastened to the upper portion of the slot port 118, in particular the chamber body 111 and the chamber lid 112 ) Is installed on the outside of the o-ring 116 to maintain the airtightness of the process chamber 100 through a vacuum seal.

The support member 200 for reinforcing the slot port 118 according to the present embodiment is largely spaced apart from the upper surface of the slot port 118 and is fixed to the reinforcement bar 210 and the center upper portion of the slot port 118, It is configured to include a support 220 which is fastened, and between the bottom of the periphery of the reinforcement bar 210 and the top of the peripheral portion of the slot port 118 so as to space the upper surface of the reinforcement bar 210 and the slot port 118 The spacer 230 may be interposed therebetween. The support member 200 according to the present embodiment is for preventing deformation of the slot port 118 caused by high vacuum and high temperature reaction conditions, and is preferably made of a material having a higher rigidity than the chamber body 111. . In general, the chamber body 111 is made of an aluminum alloy containing 90% or more of aluminum, and the supporting member 200 according to the present invention has better rigidity and less thermal expansion than an aluminum alloy, for example, stainless steel. It is preferably made of steel and fastened to the upper portion of the slot port 118 so that an upward force (stress) can be applied to the slot port 118.

The coupling relationship between the support member 200 and the slot port 118 formed on at least one side of the chamber body 111 according to the present embodiment will be described in more detail. 5 is an exploded perspective view schematically illustrating a coupling and disposition relationship of a support member coupled to an upper portion of a slot port according to an embodiment of the present invention, and FIG. 6 illustrates a chamber in which the support member is coupled to an upper portion of the slot port. 7 is a cross-sectional view schematically illustrating a connection form in which an object to be processed enters and leaves between a process chamber in which a supporting member is installed and a transfer chamber according to the present invention. As shown, the stainless steel reinforcement bar 210 constituting the support member 200 is fastened to the upper surface of the slot port 118 formed on one side of the chamber body 111 according to one aspect thereof The top of the periphery and the periphery have the same height, but the bottom of the periphery has a shape in which the central portion 210a is bent upward from the periphery 210b, so that the central portion 210a is the slot port 118 when compared with the periphery 210b. It is configured to be further spaced apart from the upper surface of the). In particular, the spacer 230 having a predetermined height is interposed between the lower edge of the periphery 210b of the reinforcement bar 210 and the upper edge of the slot port 118, so that the center portion 210a of the reinforcement bar 210 is, of course, the same. The peripheral portion 210b is also spaced apart from the upper surface of the slot port 118 at regular intervals. Preferably, in consideration of the deformation of the upper portion of the slot port 118 caused by the high vacuum, high temperature conditions inside the process chamber 100, the spacer 230 has a height of about 3 ~ 15 mm, through The peripheral portion 210b of the reinforcing bar 210 is configured to be spaced apart from the upper surface of the slot port 118 by the gap. In particular, since the deformation width of the upper portion of the slot port 118 decreases as the height of the reinforcement bar 210 increases, the vertical height of the reinforcement bar 210 is preferably larger than the thickness in the horizontal direction.

On the other hand, the support member 200 according to the present invention includes a support 220 in close contact with the upper end of the slot port 118, preferably, the support 220 may have a rod shape. That is, the support 220 is interposed between the lower end of the center portion 210a of the reinforcement bar 210 and the center upper end of the slot port 118, and in particular, the upper end of the reinforcement bar 210 and the slot port 118, respectively. Independently fastened to serve to secure the support member 200 according to the present invention to the upper portion of the slot port 118. Like the reinforcement bar 210, the support 220 may be made of a stainless steel with low thermal expansion and good rigidity, and the slot port 118 is considered if the center portion of the slot port 118 is more deformed than the periphery thereof. The height is made larger than the spacer 230 placed in the edge region of, preferably has a height of about 20 ~ 30 mm.

In particular, considering that the support member 200 according to the present invention is intended to prevent the deformation of the upper portion of the slot port 118, in particular the lower side, the support member 200 is fastened to the upper surface of the slot port 118 It is preferable to be coupled, and particularly preferably, as shown in FIG. 5, the reinforcing bar 210 and the support 220 forming the support member 200 through the independent fastening means, respectively, of the slot port 118. It is fixed to the top. First, a fixing bolt (first bolt, 224) is fastened at the upper portion of the support 220 to fasten the support 220 interposed to the center lower end of the reinforcement bar 210 to the center upper portion of the slot port 118. . A fixing bolt through-hole 226 is formed in the support 220 so that the support 220 can be brought into close contact with the center upper end of the slot port 118 through the fixing bolt 224. A fixing bolt fastening hole 228 corresponding to 226 is formed at the center upper end of the slot port 118.

In addition, the support bolt (second bolt, 214) through the center portion 210a of the reinforcing bar 210 from the top of the reinforcing bar 210 to fix the reinforcing bar 210 to the upper surface of the support 230. Is fastened. To this end, a support bolt through-hole 212 is formed in the central portion 210a of the reinforcing bar 210 in a predetermined shape, and the support 220 penetrates the support bolt independently of the fixing bolt through-hole 226 described above. A support bolt fastening hole 222 corresponding to the hole 212 is formed. In particular, the support bolt 214 is to prevent the deformation of the slot port 118 due to heat-deformation through the stress due to its own torque by coupling the reinforcing bar 210 and the support 220, the slot port ( 118) is not in direct contact or connection.

The number and arrangement of the support bolts 214 and the fixing bolts 224 as fastening means for fixing the support member 200 according to the present invention are the size and shape of the slot port 118 through which the object is to be moved in and out. It may vary. In particular, in consideration of the fact that the center region of the slot port 118 is much more easily deformed than the peripheral region, the bonding strength of the support bolt 214 fastened to the upper portion of the support 220 may be configured differently. That is, among the support bolt fastening holes 222 formed on the upper part of the support 220 which is in close contact with the upper center of the slot port 118, the depth of the support bolt fastening hole formed at the center of the support 220 is determined by the support 220. By increasing the depth of the support bolt fastening hole formed at the periphery of the support or by varying the fastening strength, the size of the torque (and the resulting stress) of the support bolt coupled to the center upper portion of the support 220 to the upper portion of the support 220 It can be adjusted to be much larger than the torque of the supporting bolts to be coupled. In other words, the support bolt 214 may be configured to be more strongly coupled to the upper surface of the support 220 as the center of the slot port 118, so that in particular the center of the slot port 118 and the adjacent area and In comparison, the support bolt 214 is subjected to much greater stress and thus is pulled upward compared to the adjacent region.

As such, in the present invention, reinforcement is made using the torque of the fastening means for fixing the support member 200 to the upper portion of the slot port 118 and the stress generated therefrom to the area where the deformation of the slot port 118 occurs. Since the stress of the bar 210 can be increased, the deformation of the slot port 118 can be prevented to the maximum.

Particularly, according to the present invention, the reinforcing bar 210 may be spaced apart from the upper portion of the slot port 118 so as to efficiently transmit the torque of the support bolt 214 itself and the resulting stress to the slot port 118. desirable. In particular, even if the support member 200 according to the present invention is made of a material having superior rigidity and less heat-strain than the slot port 118 formed on one side of the chamber body 111, the inside and outside of the process chamber 110 Deformation may occur due to the pressure difference and the internal high temperature conditions, which occur much larger in the central region than in the peripheral region, as with the slot port 118.

Therefore, the reinforcing bar 210 spaced apart from and fixed to the upper portion of the slot port 118 is preferably disposed such that the separation distance between the peripheral area and the central area is different, and in particular, the separation distance of the central area is larger than the peripheral area. do. For example, as described above, the separation distance h2 between the lower end of the periphery 210b of the reinforcement bar 210 and the upper end of the slot port 118 is configured to be about 3 to 15 mm, compared to that of the reinforcement bar 210. The separation distance h1 between the bottom of the center and the top of the support 220 which is in close contact with the top center of the slot port 118 is preferably greater than about 8 to 20 mm, preferably about 10 to 15 mm. As such, if the distance h1 between the center bottom of the reinforcing bar 210 and the upper end of the support 220 can be adjusted, the shape of the center bottom 211 of the reinforcing bar 210 is viewed from the side as shown. The shape which is bent upward compared to the adjacent area can of course have a dome-shaped that bends upward towards its center, for example. In addition, as the center bottom 211 of the reinforcing bar 210 is bent upward and the center top is bent downward, the reinforcement bar 210 may have an overall H-beam shape when viewed from the side.

In addition, the reinforcing bar 210 and the supporter 220 constituting the support member 200 preferably has a length substantially the same as the width of the slot port 110, at least about 20mm to penetrate the bolt for fastening Preferably, it has a thickness in the range of 40 to 60 mm. In particular, the thickness of the reinforcement bar 210 may be configured to be smaller than its height.

On the other hand, the O-ring 116 inserted between the chamber body 111 and the chamber lead 112 has a margin of about 0.5 mm, so that the gap between the chamber body 111 and the chamber lead 112 is 0.5 mm. If it exceeds the gas leakage occurs, the airtightness of the process chamber 100 is not maintained, the vacuum is not formed, the process is difficult to proceed. Therefore, the reinforcing bar 210 constituting the support member 200 according to the present invention can suppress the gap between the chamber body 111 and the chamber lead 112 caused by the deformation of the slot port 118. If possible, have a high height. Preferably, the reinforcement bar 210 has a height of about 70 mm or more, preferably 160 to 300 mm as a whole. That is, since the gap between the chamber body 111 and the chamber lid 112 is allowed in the 7th generation LCD, the upper portion of the slot port 118 is deformed to less than 0.2 mm. ) Should have a height of at least 160 mm, and even if the height of the reinforcement bar 210 exceeds 300 mm, the deformation width of the slot port 118 is hardly reduced, and bolting is also inconvenient, and the reinforcement bar 210 is excessively upper. This is because the height is preferably limited to about 300mm because it protrudes.

Meanwhile, in the above, the support member 200 is fastened and fixed only to the upper portion of the slot port 118, but the support is fixed and coupled to the upper portion of the gate valve 160 installed adjacent to the side of the chamber body 111. The member is also possible. FIG. 8 is an exploded perspective view schematically illustrating a process chamber in which a supporting member is fixed and coupled to an upper portion of a slot port and a gate valve interviewing a side surface of the slot port according to another embodiment of the present invention, and FIG. 4 is an exploded perspective view schematically illustrating a coupling and disposition relationship of a support member coupled to an upper portion of a slot port and a gate valve according to another embodiment of FIG. As shown, the support member 200 according to the present embodiment has a slot 161 communicating with the slot port 118 as well as an upper portion of the slot port 118 formed on one side of the chamber body 111. It is also engaged with the inner upper end of the gate valve 160 to have. To this end, the reinforcing bar 210 and the supporter 220 forming the support member 200 according to the present embodiment have been widened, and the support bolt 214 and the fixing bolt 224 as fastening means, and these fastening means The arrangement of the through holes 212 and 222 for penetrating the holes is changed, and fastening holes 228 for fastening the fixing bolts 224 are formed on the upper surface of the slot port 118 and the gate valve 160. The reinforcing bar 210 and the supporter 220 constituting the support member 200 according to the present exemplary embodiment may have a width wide enough to cover the entire upper portion of the slot port 118 and the gate valve 160. It has a width sufficient to cover at least the entire upper portion of the slot port 118 and the inner upper portion of the gate valve 160.

Accordingly, the inside of the gate valve 160 also communicates with the process chamber and / or the transfer chamber in a vacuum state and is deformed under pressure from the outside in the process of receiving and transporting the workpiece between the transfer chamber and the process chamber 100. In this embodiment, it is possible to prevent this through the support member 200 that is in close contact with the top of the gate valve 160 as well as the chamber body 111.

In the above, a preferred embodiment of the present invention has been described, but the present invention is not limited thereto. Rather, one of ordinary skill in the art will be able to easily make various modifications and changes based on the illustrated embodiments. As an example, in the above description, the support member applied to the process chamber has been described. However, the support member according to the present invention has another substrate processing apparatus provided with a moving passage of the workpiece on the side so that the substrate can be placed therein. For example, it can be applied to a transfer chamber or a load lock chamber. However, it will be apparent from the appended claims that such variations and modifications fall within the scope of the present invention without departing from the spirit of the present invention.

1 is a layout view schematically showing a conventional liquid crystal display device manufacturing apparatus as an example of a flat panel display device manufacturing apparatus.

Figure 2 is an exploded perspective view schematically showing a conventional process chamber.

Figure 3 schematically illustrates the deflection of the slot port formed on the side of the conventional chamber.

4 is an exploded perspective view schematically illustrating a process chamber which is one of substrate processing apparatuses in which a supporting member is coupled to an upper portion of a slot port according to one embodiment of the present invention;

5 is an exploded perspective view schematically showing a coupling and disposition relationship of a support member coupled to an upper portion of a slot port according to an embodiment of the present invention.

Figure 6 is a schematic side view of a chamber in which the support member is coupled to the top of the slot port.

Figure 7 is a cross-sectional view showing a connection form in which the workpiece is moved in and out between the process chamber and the transfer chamber is installed in accordance with the present invention.

8 is an exploded perspective view schematically illustrating a process chamber in which a support member is fixed and coupled to an upper portion of a slot port and a gate valve in contact with a side surface of the slot port according to another embodiment of the present invention.

FIG. 9 is an exploded perspective view schematically illustrating a coupling and disposition relationship of a support member coupled to an upper portion of a slot port and a gate valve according to another embodiment of the present invention. FIG.

<Description of the symbols for the main parts of the drawings>

100: substrate processing apparatus (process chamber) 110: chamber

111: chamber body 112: chamber lead

114: susceptor 118: slot port

120: transfer chamber 160: gate valve

200: support member 210: reinforcement bar

220: support 230: spacer

Claims (18)

delete delete delete delete delete delete delete delete delete A substrate processing apparatus including a chamber having a space defined therein for the manufacture of a flat panel display device, A slot port positioned on at least one side of the chamber and into which an object is to be inserted; A support member coupled to an upper portion of the slot port, the support being tightly fastened to the upper surface of the slot port through a first bolt, and spaced apart from the upper surface of the slot port and the support, and including a reinforcement bar fastened to the support. Substrate processing apparatus comprising a support member. The method of claim 10, The separation distance between the reinforcing bar and the upper surface of the slot port is smaller than the separation distance between the reinforcing bar and the support. The method according to claim 10 or 11, wherein The reinforcing bar is a substrate processing apparatus, characterized in that it has an upper bent shape or a central lower end of the dome-shaped or H-beam shape. delete The method of claim 10, The center of the reinforcement bar is coupled to the support through a second bolt, the substrate processing apparatus, characterized in that a spacer is interposed between the lower end of the peripheral portion of the reinforcement bar and the upper surface of the slot port peripheral portion. 15. The method of claim 14, And the second bolt is strongly coupled with the support toward the center of the slot port. The method of claim 10, The support member is a substrate processing apparatus, characterized in that made of a material having a greater strength than the chamber. The method according to claim 10 or 16, The support member is a substrate processing apparatus made of stainless steel. The method of claim 10, And a gate valve in contact with an outer surface of the slot port and in communication with the reaction space of the chamber, wherein the support member is coupled to the slot port and an upper portion of the gate valve.

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