KR101364961B1 - Water cyclone apparatus - Google Patents

Abstract

The present invention relates to a water cyclone device which includes a central processing unit comprising a first outer container which is opened at the bottom and has a first cylinder therein, a first inlet pipe which is formed on one side of the first cylinder and through which exhaust gas flows in, and a first discharge pipe which is formed at the other side of the first cylinder and discharges the exhaust gas; a first inner container which is located inside the first cylinder; an outer water supply unit which supplies water flowing on the inner wall of the first cylinder at the upper part of the first cylinder; and an inner water supply unit which supplies water flowing on the outer wall of the first cylinder in the upper part of the first inner container.

Description

Water Cyclone Apparatus

The present invention relates to a water cyclone apparatus used to treat water soluble gases or particles in processes requiring the treatment of exhaust gases, such as semiconductor processes.

Exhaust gases generated in the electronics industry, such as semiconductor production, LCD production, or OLED production, are composed of a mixture of fine particles, PFC gas, and other foreign matter. The fine particles are small particles generated by PFCs (Per Fluoro Compounds) used in etching processes and thin film deposition processes, and organic droplet materials scattered in a vacuum drying process after substrate cleaning. The PFC gas is one of gas components generated during a semiconductor etching process and a chemical vapor deposition process, and is known as a gas that promotes global warming. In addition, the organic droplet material is likewise a substance that disturbs the atmospheric environment upon release into the atmosphere and is a substance of emission regulation.

As the fine particles, a filtering method using a physical filter is most commonly used. That is, the filtering method is a method of removing fine particles while passing the exhaust gas through the filter. However, the filtering method may not sufficiently remove the microparticles having a particle size of about 10 μm or less among the fine particles included in the exhaust gas. In addition, the filtering method may reduce the throughput of the exhaust gas by adsorbing a large amount of fine particles in the filter over time, and may increase the load of the blowing fan for transporting the exhaust gas. In addition, the organic droplet material is highly viscous, so that the degree of adsorption to the filter is high, shortening the life of the filter.

On the other hand, the PFC gas is known to be a gas that is very stable and difficult to decompose during processing. The PFC gas is processed by an exhaust gas treatment process by heating, adsorption or plasma.

The present invention provides a water cyclone apparatus capable of efficiently removing particles or water-soluble gases in a pretreatment step or an aftertreatment step of an exhaust gas treatment step.

The water cyclone apparatus of the present invention is formed on one side of the first cylindrical portion having a hollow inside and the first cylindrical portion and formed on the other side of the first inlet pipe through which the exhaust gas flows and on the other side of the first cylindrical portion to exhaust the exhaust gas. A first outer passage having a first outflow tube, the lower opening of which is opened; a first inner passage positioned inside the first cylindrical portion; And a central processing unit including a water supply unit and an inner water supply unit configured to supply water flowing from an upper portion of the first inner cylinder to an outer wall of the first inner cylinder.

In addition, the first inlet pipe is coupled to the upper portion of the first cylindrical portion, the central axis is coupled to the outer side with respect to the vertical central axis of the first cylindrical portion relative to the horizontal direction, the first outlet pipe is the It is coupled to the lower portion of the first cylindrical portion, the central axis is coupled so as to face outward with respect to the vertical central axis of the first cylindrical portion relative to the horizontal direction, so that the exhaust gas flows in the spiral form inside the first cylindrical portion Can be formed. In addition, the first outer cylinder includes a water supply slit formed in a slit shape along the circumferential direction in the upper portion of the first cylindrical portion, the outer water supply portion is formed in the outer wall of the first cylindrical portion in the lower portion of the water supply slit And an external water storage tank formed in a cylindrical shape in a circumferential direction and an external water supply pipe for supplying water so as to flow in the circumferential direction from the inside of the external water storage tank, wherein the external water supply unit includes water through the water supply slit hole. Overflow may be formed to flow along the inner wall of the first cylindrical portion.

The internal water supply unit may include an internal water storage tank formed at an upper portion of the first inner cylinder and an internal water supply pipe for supplying water to the internal water storage tank, and the internal water supply unit may be configured to have water overflow from the internal water storage tank. It may be formed to flow along the outer wall of the first inner cylinder.

In addition, the inner water reservoir may be formed such that the outer wall of the inner water reservoir has the same surface as the outer wall of the first inner cylinder.

In addition, the water cyclone device is located in the lower portion of the upper cylindrical portion and the upper cylindrical portion that is hollow inside and the gradually increasing diameter after the gradually decreasing diameter and the lower cylindrical portion located in the lower portion of the speed increasing portion A second outer cylinder having a second inlet tube coupled to an upper portion of the upper cylindrical portion and introducing an exhaust gas into the upper cylindrical portion, and positioned inside the second outer cylinder, and a lower end of which is located at the lower end of the speed increasing portion. And a pretreatment unit extending in correspondence with a second inner cylinder, the upper portion extending outward through an upper portion of the upper cylindrical portion to supply exhaust gas to the first inlet pipe.

The pretreatment unit may further include a filtering means coupled to a lower end of the second inner cylinder, wherein the filtering means includes a filter support ring coupled to a lower end of the second inner cylinder;

It may include a filter band wound in the center direction from the filter support ring and a filter support bar for supporting the filter tee to the filter support ring. The filter strip may be formed to be wound in a horizontal direction, a lower direction, or an upper direction of the filter support ring.

The water cyclone apparatus may further include a housing formed at a lower portion of the housing and including a third inlet tube through which the exhaust gas flows from the first outer cylinder, and a third outlet tube formed at the upper portion through which the exhaust gas may flow. And a filter member formed at an upper portion of the housing, an absorbing member positioned below the filter member, a support member supporting the absorbing member, and having a plurality of through holes formed therein, and a central portion of the support member. It may further include a post-processing unit including a drain pipe formed extending to the lower portion of the housing.

The water cyclone apparatus may further include a water tank connected to a lower portion of the first outer cylinder, a lower portion of the second outer cylinder, and a lower portion of the housing and storing moisture therein.

The water cyclone apparatus of the present invention has an effect of effectively removing fine particles or water-soluble gas by contacting with water while supplying exhaust gas in a cyclone manner.

In addition, the water cyclone apparatus of the present invention passes through the cyclone pretreatment unit before contacting the exhaust gas with water to remove relatively large particles first, thereby increasing the removal efficiency of the fine particles.

In addition, the water cyclone apparatus of the present invention has the effect that the exhaust gas after contact with water further passes through the filter member and the absorbing member to further remove the moisture and fine particles of the exhaust gas.

1 is a plan view of a water cyclone apparatus according to an embodiment of the present invention.
FIG. 2 is an AA vertical section view of the water cyclone apparatus shown in FIG. 1.
3 is a BB vertical cross-sectional view of the water cyclone apparatus shown in FIG. 1.
4A is a side view of the filtering means used in the water cyclone apparatus of FIG. 1.
4B is a side view of a filtering means according to another embodiment.
4C is a side view of a filtering means according to another embodiment.
4D is a bottom view of the filtering means of FIG. 4C.

Hereinafter, a water cyclone apparatus according to an embodiment of the present invention will be described with reference to the accompanying drawings.

First, a water cyclone apparatus according to an embodiment of the present invention will be described.

1 is a plan view of a water cyclone apparatus according to an embodiment of the present invention. FIG. 2 is an AA vertical section view of the water cyclone apparatus shown in FIG. 1. 3 is a BB vertical cross-sectional view of the water cyclone apparatus shown in FIG. 1. 4A is a side view of the filtering means used in the water cyclone apparatus of FIG. 1. 4B is a side view of a filtering means according to another embodiment. 4C is a side view of a filtering means according to another embodiment. 4D is a bottom view of the filtering means of FIG. 4C.

1 to 4D, the water cyclone apparatus according to the embodiment of the present invention is formed including the central processing unit 100. In addition, the water cyclone apparatus may further include a pretreatment unit 200, a post-treatment unit 300, and a water tank 400.

The water cyclone device is installed in an exhaust gas treatment line of an electronic industry process such as a semiconductor production process, a flat panel display device production process, or a solar cell production process to process particles or water-soluble gas contained in the exhaust gas. In particular, the water cyclone apparatus is installed before or after the apparatus, such as a plasma processing apparatus for treating silane gas or fluorine compound gas contained in the exhaust gas, to treat particles or water-soluble gas.

In addition, the water cyclone apparatus is installed in the air purification line of the process of generating particles, such as cement production process, construction waste treatment process or thermal power plant waste treatment process to remove the particles contained in the exhaust air.

The central processing unit 100 includes a first outer cylinder 110, a first inner cylinder 120, an external water supply unit 130, and an internal water supply unit 140.

The central processing unit 100 removes fine particles while allowing the exhaust gas to flow between the first outer cylinder 110 and the first inner cylinder 120 to flow in a cyclone manner. In addition, the central processing unit 100 removes the water-soluble gas contained in the exhaust gas by allowing the exhaust gas to contact water flowing through the inner wall of the first outer cylinder 110 and the outer wall of the first inner cylinder 120. Done. In addition, the central processing unit 100 allows fine particles or water-soluble gas included in the exhaust gas to flow into the water tank 400 together with the water.

The first outer cylinder 110 is formed to include a first cylindrical portion 112, the first inlet pipe 114 and the first outlet pipe 115. In addition, the first outer cylinder 110 may further include a first cone portion 113 and the water supply slit 116. The first outer cylinder 110 has an open lower portion connected to the water tank 400 so that water flowing along the inner wall of the first cylindrical portion 112 flows into the water tank 400. Accordingly, the first outer cylinder 110 flows along the inner wall of the first cylindrical portion 112 and collects fine particles and water-soluble gas into the water tank 400 to be removed.

The first cylindrical portion 112 is formed in a cylindrical shape with a hollow inside, the upper portion is sealed, the lower portion is formed open. The first outer cylinder 110 is formed of a material resistant to corrosion of corrosive gas, such as stainless steel or PVC material.

The first cone portion 113 is coupled to the lower portion of the first cylindrical portion 112, and is formed in a funnel shape in which the horizontal cross-sectional area is gradually reduced.

The first inlet pipe 114 is formed on one side of the first cylindrical portion 112, preferably coupled to the upper portion of the first cylindrical portion (112). The first inlet pipe 114 allows exhaust gas to flow into the first cylindrical portion 112. The first inlet pipe 114 is preferably coupled such that its central axis faces outward with respect to the vertical central axis of the first cylindrical portion 112 with respect to the horizontal direction. More specifically, the first inlet pipe 114 has a central axis toward the outside of the center of the first cylindrical portion 112, the exhaust gas forms a spiral inside the first cylindrical portion 112, the lower portion To flow in a direction. Therefore, the first inlet pipe 114 allows the fine particles contained in the exhaust gas to be collected in water while flowing along the inner wall of the first outer cylinder 110 by a cyclone method. In addition, the first inlet pipe 114 allows the exhaust gas to stay inside the first cylinder 112 for as much time as possible to increase the time for contacting the inner wall of the first cylinder 112.

The first outlet pipe 115 is formed on the other side of the first cylindrical portion 112 and is preferably coupled to the lower portion of the first cylindrical portion 112. The first outlet pipe 115 allows the exhaust gas to flow out of the first cylindrical portion 112. The first outlet pipe 115 is preferably coupled such that its central axis faces outward with respect to the vertical central axis of the first cylindrical portion 112 with respect to the horizontal direction. In addition, the first outlet pipe 115 is coupled to extend in parallel with the tangent in the direction in which the exhaust gas flows. Therefore, the first outflow pipe 115 allows the first outflow pipe 115 to flow out of the first cylinder portion 112 without changing the direction in which the exhaust gas flowing under the first cylinder portion 112 flows.

The water supply slit 116 is generally formed along the circumferential direction at the top of the first cylindrical portion 112, and is formed to have a predetermined height. The water supply slit 116 allows the water supplied from the external water supply unit 130 to flow along the inner wall of the first cylindrical portion 112. In particular, the water supply slit 116 allows the water to overflow and flow along the inner wall of the first cylindrical portion 112. Accordingly, the water supply slit port 116 always flows water to the inner wall of the first cylindrical portion 112 as a whole.

The first inner cylinder 120 is formed in a cylindrical column or cylindrical shape, it is located inside the first cylindrical portion (112). The outer wall of the first inner cylinder 120 is spaced apart from the inner wall of the first cylindrical portion 112 to form a space in which the exhaust gas flows. The upper portion of the first inner cylinder 120 is sealed by an internal water supply unit. Therefore, the exhaust gas does not flow into the first inner cylinder 120.

The first inner cylinder 120 is formed so that the lower end is spaced apart from the lower portion of the first outer cylinder 110 in the upper direction. That is, the first inner cylinder 120 is formed to be spaced apart from the lower end of the first cone portion 113. Therefore, the first inner cylinder 120 allows fine particles and water to flow into the water tank 400 through the lower portion of the first outer cylinder 110.

The external water supply unit 130 is formed to include an external water reservoir 132 and an external water supply pipe 134. The external water supply unit 130 is formed on the upper portion of the first cylindrical portion 112 to supply water flowing along the inner wall of the first cylindrical portion 112 to the water supply slit port 116. The external water supply unit 130 is preferably supplied to the water to overflow through the water supply slit 116.

The external water reservoir 132 forms a space in the circumferential direction along the outer wall of the first cylindrical portion 112 at the lower portion of the water supply slit 116. Therefore, the external water reservoir 132 is formed in a cylindrical shape as a whole, and is formed so that the upper part is opened and the lower part is sealed. The external water reservoir 132 stores the water supplied from the external water supply pipe 134, so that the water overflows through the water supply slit 116 and flows along the inner wall of the first cylindrical portion 112. do.

The external water supply pipe 134 is coupled through the outer wall of the external water reservoir 132. In addition, the external water supply pipe 134 is coupled such that its central axis faces outward with respect to the vertical central axis of the first cylindrical portion 112. Therefore, the external water supply pipe 134 is supplied so that water flows in the circumferential direction inside the external water reservoir 132.

In addition, the external water supply pipe 134 is formed at intervals of 90 degrees along the circumferential direction of the external water reservoir 132. The external water supply pipe 134 allows the water supplied to the external water reservoir 132 to flow while drawing a circle along the circumferential direction inside the external water reservoir 132 at a uniform pressure as a whole. Accordingly, the water flowing in the circumferential direction in the outer water reservoir 132 flows in a spiral form along the inner wall of the first outer cylinder 112 while overflowing the water supply slit 116.

The internal water supply unit 140 is formed to include an internal water reservoir 142 and the internal water supply pipe 144. The inner water supply unit 140 is positioned above the first inner cylinder 120, and supplies water to the outer wall of the first inner cylinder 120. The inner water supply unit 140 preferably supplies water to flow along the outer wall of the first inner cylinder 120 while the water overflows in the inner water reservoir 142.

The inner water reservoir 142 has a hollow inside and is sealed at a lower portion thereof to have a container shape, and is coupled to an upper end of the first inner cylinder 120. In addition, the inner water reservoir 142 is formed so that the outer wall is the same surface as the outer wall of the first inner cylinder (120). For example, when the inner water reservoir 142 is formed in a cylindrical shape in which the lower portion protrudes outward, the outer wall of the cylinder is formed to have the same surface as the outer wall of the first inner cylinder 120. Therefore, the inner water reservoir 142 allows the water that overflows to flow along the outer wall of the first inner cylinder 120 without splashing.

The internal water supply pipe 144 is formed to supply water to the internal water reservoir 142. The internal water supply pipe 144 extends from the outside of the first cylindrical portion 112 to an upper portion of the internal water reservoir 142. In addition, the internal water supply pipe 144 may be formed so as not to splash the water is extended to the inside of the upper portion of the internal water reservoir 142.

Reference numeral 150 denotes a pump for supplying water to the external water supply unit 130 and the internal water supply unit 140.

The pretreatment unit 200 includes a second outer cylinder 210, a second inner cylinder 220, and a first connecting pipe 240. The pretreatment unit 200 may further include a filtering means 230.

The pretreatment unit 200 is installed before the central processing unit 100. The pretreatment unit 200 removes particles contained in the exhaust gas by a cyclone method. The pretreatment unit 200 causes the exhaust gas to flow into the upper portion of the second outer cylinder 210 and rotate downward to drop particles contained in the exhaust gas to the lower portion of the second outer cylinder 210 to be removed. Done. In addition, the pretreatment unit 200 passes the exhaust gas from which particles are removed to the inside of the second inner cylinder 220 to discharge it to the central processing unit 100.

The second outer cylinder 210 includes an upper cylindrical portion 212, a speed increasing portion 213, a lower cylindrical portion 214, and a second inflow pipe 216 and is formed to open at a lower portion thereof. In addition, the second outer cylinder 210 may be formed by further including a second cone portion 215.

The upper cylindrical portion 212 is formed in a cylindrical shape hollow inside, the upper portion is formed in a closed shape. The upper cylindrical portion 212 may have the same diameter from the top to the bottom.

The speed increasing portion 213 is positioned below the upper cylindrical portion 212 and includes a reduction region 213a that gradually decreases in diameter and an increase region 213b that gradually increases in diameter. The speed increasing part 213 is formed to gradually increase again after the distance between the inner wall and the outer wall of the second inner cylinder 220 gradually decreases. Further, the speed increasing portion 213 is preferably formed such that the diameter of the upper end of the reduction area 213a is smaller than the diameter of the lower end of the increase area 213b. The speed increasing portion 213 increases the velocity of the exhaust gas flowing downward from the upper cylinder portion 212 and decreases the exhaust gas away from the end of the second inner cylinder 220. Accordingly, the speed increasing unit 213 allows the particles contained in the exhaust gas to fall downward from a far distance from the end of the second inner cylinder 220, and minimize the inflow into the second inner cylinder 220. Let's go.

The lower cylindrical portion 214 is formed in a cylindrical shape of the hollow inside, it is located below the speed increasing portion 213. The lower cylindrical portion 214 may be formed to have the same diameter from the top to the bottom. In addition, the lower cylindrical portion 214 is preferably formed to be larger than the diameter of the upper cylindrical portion 212, the distance that the inner wall is spaced apart from the end of the second inner cylinder 220 is separated from the exhaust gas Reduced entry of particles into the second inner cylinder 220.

The second cone portion 215 is coupled to the lower portion of the lower cylindrical portion 214 and is formed in a funnel shape in which the horizontal cross-sectional area is gradually reduced.

The second inlet pipe 216 is coupled to an upper portion of the upper cylindrical portion 212 to allow the exhaust gas to flow into the upper cylindrical portion 212. The second inlet pipe 216 is preferably coupled such that its central axis faces outward with respect to the vertical central axis of the upper cylindrical portion 212 with respect to the horizontal direction. More specifically, the second inlet pipe 216 has a central axis toward the outside of the center of the upper cylindrical portion 212, the exhaust gas in a spiral form inside the upper cylindrical portion 212 in the downward direction Let it flow Therefore, the second inlet pipe 216 allows the fine particles contained in the exhaust gas to move in the direction of the inner wall of the upper cylindrical portion 212 by the cyclone method.

The second inner cylinder 220 is formed in a cylindrical shape inside the hollow, it is located inside the second outer cylinder (210). An outer wall of the second inner cylinder 220 is spaced apart from an inner wall of the second outer cylinder 210 to form a space in which exhaust gas flows. More specifically, the second inner cylinder 220 is positioned inside the upper cylindrical portion 212 and the speed increasing portion 213, and the lower end portion is formed to be at a position corresponding to the end of the speed increasing portion 213. In addition, the second inner cylinder 220 is formed so that the upper portion penetrates the upper portion of the upper cylindrical portion 212 and extends to the outside. Therefore, the second inner cylinder 220 allows the exhaust gas from which some of the particles are removed to flow out of the lower end and outflow through the upper end.

The filtering means 230, 230a, 230b, 230c are formed to include a filter support ring 232, filter bands 234a, 234b, 234c, and filter support bars 236a, 236b, 236c. The filtering means 230, 230a, 230b, 230c are coupled to the lower end of the second inner cylinder 220 to additionally collect particles contained in the exhaust gas. The filtering means 230a, 230b, and 230c are formed in various shapes according to the direction in which the filter bands 234a, 234b and 234c and the filter support bars 236a, 236b and 236c extend as shown in FIGS. 4A to 4C. Can be.

The filter support ring 232 is formed in a ring shape and is coupled to the lower portion of the second inner cylinder 220. The filter support ring 232 may be coupled to an end of the second inner cylinder 220 or inserted into a portion thereof.

The filter bands 234a, 234b, and 234c are formed in a band shape having a predetermined width and wound in a spiral shape. The filter bands 234a, 234b, and 234c are formed by being wound in the center direction of the filter support ring 232, and are wound so as to protrude in a lower direction of the filter support ring 232, or in an upper direction of the filter support ring 232. It may be wound to protrude, or may be wound in a horizontal direction of the filter support ring 232.

The filter support bars 236a, 236b, and 236c are formed in a bar shape, and filter bands 234a, 234b, one side of which is coupled to the filter support ring 232 and the other side of which is located in the center of the filter support ring 232. 234c). A plurality of filter support bars 236a, 236b, and 236c may be installed at predetermined intervals in the circumferential direction of the filter support ring. For example, three filter support bars 236a, 236b, and 236c may be installed at intervals of 120 degrees. Can be. Accordingly, the filter support bars 236a, 236b, and 236c are formed to face the horizontal, lower, or upper direction of the filter support ring 232 according to the direction in which the filter bands 234a, 234b, and 234c are wound. The filter support bars 236a, 236b, and 236c tightly couple the filter strip to the filter support ring 232.

One end of the first connection pipe 240 is connected to the upper end of the second inner cylinder 220 and the other end is connected to the first inlet pipe 114 of the central processing unit 100. Accordingly, the first connection pipe 240 supplies the exhaust gas from which some of the particles are removed from the pretreatment unit 200 to the first inlet pipe 114. The first connection pipe 240 may be integrally formed with the second inner cylinder 220, and may be integrally formed with the first inlet pipe 114.

The post-treatment unit 300 includes a housing 310, a filter member 320, an absorbent member 330, a support member 340, and a drain pipe 350. In addition, the aftertreatment unit 300 may further include a second connection pipe 360.

In addition, the aftertreatment unit 300 collects moisture or fine particles included in the exhaust gas to reduce the content of the moisture or fine particles of the exhaust gas that is finally discharged.

The housing 310 includes a third cylindrical portion 312, a third cone portion 314, a third inlet pipe 316, and a third outlet pipe 318.

The third cylindrical portion 312 is formed in a cylindrical shape of the hollow inside, the lower portion is formed in an open shape. The third cylindrical portion 312 allows the exhaust gas flowing through the third inlet pipe 316 to flow upward.

The third cone portion 314 is coupled to the lower portion of the third cylindrical portion 312, and is formed in a funnel shape in which the horizontal cross-sectional area is gradually reduced. The third cone portion 314 is formed with the lower portion open. Accordingly, the third cone portion 314 allows water and fine particles falling from the upper portion to flow into the lower water tank 400.

The third inlet pipe 316 is coupled to the lower portion of the housing 310 to allow the exhaust gas to flow into the housing 310. The third inlet pipe 316 is preferably coupled such that its central axis faces outward with respect to the vertical central axis of the housing 310 with respect to the horizontal direction. More specifically, the third inlet pipe 316 has a central axis facing the outside of the housing 310, the exhaust gas flows in the upper direction while forming a spiral form inside the housing 310.

The third outlet pipe 318 is coupled to the upper portion of the housing 310 to allow the exhaust gas to flow out.

The filter member 320 is positioned above the inside of the housing 310, and is formed by stacking members in which a plurality of holes are formed, such as a mesh net and a perforated plate. The filter member 320 collects moisture contained in the exhaust gas flowing upward. In addition, the filter member 320 allows the fine particles contained in the exhaust gas to be collected in the moisture present on the surface. Moisture and fine particles collected in the filter member 320 is dropped to the bottom by natural falling.

The absorbing member 330 is positioned below the filter member 320 and is formed by stacking members having an increased surface area. The absorbing member 330 may be formed of typical linear structure fillers having increased surface area by forming a space therein such as palling and tellerette packing used in a waste gas treatment apparatus. The absorbing member 330 allows the exhaust gas to flow upward through the internal space so that the exhaust gas contacts the surface. Accordingly, the absorbing member 330 collects moisture and fine particles included in the exhaust gas together with the filter member 320.

The support member 340 is formed in a plate shape in which a plurality of through holes 342 are formed, and is positioned below the absorbing member 330 to support the absorbing member 330. In addition, the support member 340 allows the exhaust gas rising from the lower portion of the housing 310 to flow into the absorbing member 330 through the plurality of through holes 342. In addition, the support member 340 allows water falling from the absorbing member 330 to flow downward.

The support member 340 is formed to be inclined in an inner downward direction from the outside of the housing 310. When the support member 340 is formed to be inclined, the surface area of the support member 340 increases, so that more through holes 342 are formed, and the exhaust gas can smoothly rise in the direction of the absorbing member 330. do. In addition, the support member 340 guides the water flowing down from the absorbing member 330 to the central portion to flow downward through the drain pipe 350. Meanwhile, the support member 340 may be formed to be horizontal in the housing 310.

The drain pipe 350 is formed in a cylindrical shape having a hollow inside, is coupled to the central portion from the lower portion of the support member 340 is extended to the lower portion of the housing 310. The drain pipe 350 guides water falling downward through the support member 340 to the lower water tank 400.

One end of the second connection pipe 360 is connected to the first outlet pipe 115 of the first inner cylinder 120, and the other end thereof is connected to the third inlet pipe 316 of the housing 310. The pipe 360 supplies the exhaust gas flowing out of the central processing unit 100 to the third inlet pipe 316. The second connection pipe 360 may be integrally formed with the first outlet pipe 115 and may be integrally formed with the third inlet pipe 316.

The water tank 400 is formed in a box shape, and is connected to a lower portion of the first outer cylinder 110 and the second outer cylinder 210 and a lower portion of the housing 310. The water tank 400 accommodates the water falling into the first outer cylinder 110 and the housing 310, and allows the particles falling from the second outer cylinder 210 to flow. In addition, the water tank 400 maintains a constant water level therein so that the exhaust gas is not introduced.

Reference numeral 410 denotes a drain pipe used to discharge water from the water tank 400 to the outside.

The reference numeral 500 is approximately four wheel assemblies, allowing the water cyclone device to be moved to the desired position.

What has been described above is just one embodiment for implementing the water cyclone apparatus according to the present invention, and the present invention is not limited to the above-described embodiment, and as claimed in the following claims, the gist of the present invention Without departing from the technical spirit of the present invention to the extent that any person of ordinary skill in the art to which the present invention pertains various modifications can be made.

100: central processing unit
110: first outer cylinder 120: first inner cylinder
130: external water supply 140: internal water supply
200: pretreatment unit
210: second outer cylinder 220: second inner cylinder 220
230: filtering means 240: first connector
300: post-processing unit
310: housing 320: filter member
330: absorbent member 340: support member
350: drain pipe 360: 2nd connector
400: water tank

Claims (10)

A first cylindrical portion having a hollow inside and a first inflow tube formed at one side of the first cylindrical portion to introduce exhaust gas, and a first outlet tube formed at the other side of the first cylindrical portion to allow exhaust gas to flow out; The first external passage through which
A first inner passage located inside the first cylindrical portion,
An external water supply unit configured to supply water flowing from the upper portion of the first cylindrical portion to the inner wall of the first cylindrical portion;
And a central processing unit including an internal water supply unit for supplying water flowing from the upper portion of the first inner cylinder to the outer wall of the first inner cylinder. The method of claim 1,
The first inlet pipe is coupled to the upper portion of the first cylindrical portion, the central axis is coupled to the outside with respect to the vertical central axis of the first cylindrical portion relative to the horizontal direction,
The first outlet pipe is coupled to the lower portion of the first cylindrical portion, the central axis is coupled to the outside with respect to the vertical central axis of the first cylindrical portion relative to the horizontal direction,
And the exhaust gas is formed to flow in a spiral form inside the first cylindrical portion. The method of claim 1,
The first outer cylinder includes a water supply slit formed in a slit shape along the circumferential direction in the upper portion of the first cylindrical portion,
The external water supply unit supplies an external water reservoir configured to have a cylindrical shape in a circumferential direction along the outer wall of the first cylindrical portion at the lower portion of the water supply slit, and to supply water to flow in the circumferential direction inside the external water reservoir. Including;
And the external water supply portion is formed such that water overflows through the water supply slit and flows along the inner wall of the first cylindrical portion. The method of claim 1,
The internal water supply unit is an internal water reservoir formed on the upper portion of the first inner cylinder and
It includes an internal water supply pipe for supplying water to the internal water reservoir,
And the inner water supply unit is formed such that water overflows in the inner water reservoir and flows along the outer wall of the first inner cylinder. 5. The method of claim 4,
And the inner water reservoir is formed such that the outer wall of the inner water reservoir is flush with the outer wall of the first inner cylinder. The method of claim 1,
Located on the lower portion of the upper cylindrical portion and the upper cylindrical portion that is hollow inside and the gradually increasing diameter and gradually increasing after the diameter decreases and the lower cylindrical portion and the upper portion of the upper cylindrical portion hollow inside. A second outer cylinder having a second inlet pipe coupled thereto to introduce exhaust gas into the upper cylindrical portion;
A second inner cylinder positioned inside the second outer cylinder, the lower end of which extends to correspond to the lower end position of the speed increasing portion, and an upper portion of which extends outward through an upper portion of the upper cylindrical portion to supply exhaust gas to the first inlet pipe; Water cyclone apparatus further comprises a pretreatment unit comprising a. The method according to claim 6,
The pretreatment unit further includes a filtering means coupled to the lower end of the second inner cylinder,
The filtering means
A filter support ring coupled to a lower end of the second inner cylinder,
A filter band wound from the filter support ring toward the center;
And a filter support bar for supporting the filter tee to the filter support ring. The method of claim 7, wherein
And the filter strip is formed to be wound in a horizontal direction, a lower direction, or an upper direction of the filter support ring. The method according to claim 6,
A housing formed at a lower portion of the housing, including a third inlet tube through which the exhaust gas flows from the first outer cylinder, and a third outlet tube formed at the upper portion through which the exhaust gas flows;
A filter member formed at an upper portion of the housing;
An absorbing member positioned below the filter member;
A support member supporting the absorbing member and having a plurality of through holes formed therein;
And a post-processing unit comprising a drain pipe extending from a central portion of the support member to a lower portion of the housing. The method of claim 9,
The water cyclone device further comprises a water tank connected to a lower portion of the first outer cylinder, a lower portion of the second outer cylinder, and a lower portion of the housing and storing moisture therein.

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