KR101326861B1 - The Gate Covering And Openning Device Used As Board Disposal - Google Patents

Abstract

The present invention relates to a gate opening and closing device used for substrate processing, comprising a body coupled to the upper portion, a pump coupled to the lower portion having a body for shielding the opening to process the substrate in the chamber in a vacuum state, the body The cylinder which is driven back and forth in providing the drive means for operating the upper and lower plate slides inserted into the body coupled to the upper one side of the body to shield the opening, the rack gear driven back and forth according to the driving of the cylinder, the rack gear And a pinion gear which is rotated forward and backward according to the forward and backward driving of the rack gear, and is fixed to the pivot member mounted under the pinion gear to rotate together with the pinion gear and the first link, which is a sliding connection means to the pivot member. A first link driven according to the forward and reverse rotation of the pivot member, and hinged with the first link to drive the first link. The second link is driven, and the upper and lower plate slides which slide inside the body while being accommodated in the sliding long groove of the body hinged with the second link and slide the inside of the body, the step generated during the slide process The upper plate slide shields the opening by the lower plate slide which is further slid by the vertical slide, and vertically and horizontal rollers are installed on the left and right sides of the lower plate slide alternately to prevent the up, down, left and right flow due to the driving of the lower plate slide. It is to provide a gate opening and closing device that is used in the substrate processing for airtight shielding the opening and reducing the failure of the upper and lower plate slide to implement the ease of maintenance and repair.

Description

The Gate Covering And Openning Device Used As Board Disposal}

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a gate opening and closing device used for substrate processing, and more particularly, to a gate opening and closing device that is coupled to a lower portion of a chamber chamber for processing a substrate under vacuum to shield air in the chamber chamber.

Conventionally, as a substrate processing system in which a predetermined process such as etching or film formation is performed on a large glass substrate in the manufacturing process of a flat panel display such as a solar cell or a liquid crystal display generally, Japanese Patent Laid-Open Publication No. 5-196150 "Multi-chamber type substrate processing system provided with several process chambers" of the arc is known. (Patent Document 1)

The said patent document 1 has a common conveyance room provided with the conveying apparatus which conveys a board | substrate (process object), and exchanges the unprocessed board | substrate and the board | substrate after a process between this process chamber, a common conveyance chamber, and atmospheric pressure atmosphere around this common conveyance chamber. A load lock chamber and the like are provided. These common conveyance chambers, processing chambers, and load lock chambers are vacuum apparatuses, and these vacuum apparatuses are evacuated using an exhaust mechanism to bring the interior into a predetermined pressure-reduced state, wherein the vacuum apparatus includes a hermetically sealed container body. Openings for carrying in and out of the object are provided.

The opening is opened and closed using a gate valve. When the opening is closed by the gate valve, the inside of the container body is hermetically sealed, so that the pressure inside the container body can be reduced to a predetermined process pressure, or it can be switched between the atmospheric state and the reduced pressure state. The structural example of a gate valve is described in the said patent document 1.

In the gate valve described in Patent Document 1, a plate-shaped gate base which is lifted and lowered by a hydraulic cylinder is provided, and both sides of the gate base and the valve body are rotated by a linkage connection to support and pressurize the valve body. have.

The gate valve using such a link mechanism separates the valve body from the periphery of the opening when the link is oblique to the valve body, and extrudes the valve body by the extrusion of the valve body when the link is horizontal to the valve body. In close contact.

However, in the gate valve using the link mechanism of the said patent document 1, when the weight of a valve body increases, it will become difficult to hold a valve body by a link. In addition, since the valve body is pressed from both sides, there is a fear that the pressurization of the upper and lower parts of the valve body is insufficient due to the increase in the size of the opening. In the state where the pressure on the opposite side to the pressing direction is high (back pressure state), if the link mechanism is slightly shifted from the horizontal state, leakage occurs between the valve body and the periphery of the opening, which tends to reduce the airtightness of the gate valve. I have a problem.

These problems are because the larger the opening, that is, the larger the valve body is, the greater the pressure received in the back pressure state, the stronger the force is to press the valve body, and the greater the degree of deflection of the valve body.

Therefore, in order to solve such problems, a recently disclosed "gate valve and a substrate processing system using the same" (Patent Document 2) of Patent Publication No. 10-2011-0014118, which is difficult to reduce the airtightness even when the size of the valve body is increased, has been proposed. The said patent document 2 slides in the direction parallel to a valve body pressurized around the opening part into which a to-be-processed object is carried in and carried out, the press part provided along the said opening in the surface of the said valve body, and the opening surface of the said opening part. A main slider and a press mechanism provided on the main slider, the press mechanism for pressurizing the press portion, wherein the press mechanism includes a protrusion for pressing the valve body around the opening, and an inclined portion inclined downward from the protrusion. And a pressurizing mechanism facing the valve element in front of the opening. In addition, it has been proposed as a technique characterized by extruding in a direction perpendicular to the opening face of the opening, and pressing the valve body around the opening.

In Patent Document 2, when the main slider slides, the protrusion presses the pressurization portion of the valve body. At this time, the roller of the pressurization portion rotates along the inclined portion inclined from the protrusion portion, and the rotation stops at the protrusion portion, and the valve body tightly seals the opening portion. All.

However, while the roller rotates along the inclined portion, the bending angle must be exceeded in order to enter the protrusion. At this time, the pressure transmitted to the roller is very large, which causes frequent trouble or scratches or defects in the driving of the roller.

In addition, when the connecting member attached to the main slider slides along the guide rail, when driving with two cylinders disposed on both sides, the connecting member may have a problem such as breakage or defect of the connecting member in the case of a driving speed difference between the two cylinders. And wastes power.

In addition, the protrusion is formed in the main slider, the inclined portion is formed, there is a problem that the entire main slider should be replaced in the event of breakage or defects of the protrusion and the inclined portion in the slide operation process.

In addition, even in the connecting member sliding along the guide rail, the coefficient of friction at the time of sliding is large. And the configuration of the flange portion and the like is complicated to have a lot of problems and defects in any one part configuration, and this causes a difficulty in maintenance and repair as frequent problems due to the sliding implementation.

Japanese Patent Laid-Open Publication No. 5-196150-Patent Document 1 Patent Publication No. 10-2011-0014118-Patent Document 2

In order to solve the above-mentioned problems, the gate opening and closing device used in the substrate processing according to the present invention is to achieve airtight shielding while preventing air leakage around the valve body opening, The purpose of the present invention is to provide bending prevention, and to reduce pressure transmitted to the roller that rotates along the inclined portion and simultaneously provide ease of maintenance with prevention of trouble.

In addition, when the stepped portion is fitted to the first hole of the lower plate slide by hitting the pressurizer, and foreign matter gets on the rounding surface formed on the bottom surface of the stepped portion, the rounding surface is scratched during the roller operation of the driving unit. The purpose of the present invention is to prevent the overall replacement of the lower plate slides, thereby reducing the replacement cost, and to reduce the speed of replacement and the labor cost.

In addition, it is possible to prevent the breakage of the spring by firmly tightening the tension means, and even if there is a spring breakage, it is possible to replace only the tension means in question. The aim is to reduce the speed of labor and reduce labor.

In addition, there is an object to form an extension in the body so that when a defect or a defect of the drive means and the sliding connection means, it can be replaced at once.

Gate opening and closing device used in the substrate processing according to the present invention to achieve the above object,

A body for coupling the chamber to the upper part and the pump to the lower part to shield the opening so as to process the substrate in the chamber in a vacuum state;

Drive means coupled to the upper one side of the body to operate the upper and lower plate slide inserted in the body to shield the opening;

A rotating member mounted inside the driving means and the body to rotate in the forward and reverse directions by driving the driving means while fixedly coupling the sliding connecting means;

A sliding connection means fixedly coupled to the pivot member to allow the upper and lower plate slides to slide back and forth within the body at the same time as the forward and reverse pivots of the pivot member;

Upper and lower plate slides connected to the sliding connection means and slide back and forth within the body to shield and open the body opening;

Tension means for providing a tension to the upper and lower plate slides when the upper and upper plate slides are arranged in pairs at left and right ends between the upper and lower plate slides to shield and open the opening;

And a control unit.

In addition, the driving means coupled to the upper one side of the body,

A plate coupled with a binding flange;

A cylinder integrated with one side of the plate;

A rack gear connected to the piston of the cylinder and inserted into the plate and operated back and forth according to the movement of the piston;

A pinion gear connected to the rack gear and rotated in the forward and reverse directions according to the forward and backward motion of the rack gear;

Characterized in that comprises a.

In addition, the sliding connecting means,

A first link inserted into the stepped groove of the rotation member and fixed to one side by a washer and an insertion bolt fastened to a bolt hole formed at the center of the stepped groove, the other side of which is hinged by a ball bearing connection with one side of the second link;

A second link hinged to the other side and one side of the first link, the other side of the first link being hinged with the center of the depression, which is the upper end of the lower plate slide, to slide the lower plate slide;

Characterized in that comprises a.

In addition, the top plate slide,

Protruding portion to protrude in a state symmetrical to the front end portion and the bottom portion when sliding into the body, so that when the sole sliding of the lower plate slide, the projection portion is caught on the stepped portion fixed to the upper surface recessed portion of the lower plate slide so as not to impact the roller;

A step roller which protrudes from the tip when sliding into the body and generates a step in the lower plate slide when it contacts the rear inner wall of the body;

A driving unit which is moved upwardly by a stepped portion of the lower plate slide which slides as much as the generated stepped portion while being arranged in a circle shape in the bottom portion and is hermetically sealed;

Characterized in that comprises a.

In addition, the driving unit,

Symmetrical hook portion;

A screw inserted into the hook portion to fix the shaft rod inserted between the hook portions;

A shaft rod fixed to the screw and inserted between the hook portions;

A roller inserted into the shaft to rotate along the step rounding of the lower plate slide;

It is characterized by being configured to include a quick and easy replacement in the event of failure and defect of the roller.

In addition, the bottom plate slide,

A depression recessed with the other side of the second link to be recessed by the thickness of the second link to provide freedom to drive the second link in the body sliding long groove;

A depression that is recessed while being symmetric with the top surface of the tip to accommodate the protrusion of the top plate slide;

A stepped piece which is inserted into and fixed to the rear end of the recessed part so that the protrusion part of the upper plate slide is caught when sliding;

A vertical roller inserted between the stepped protrusions formed on the left and right sides of the sliding long groove of the body while being mounted on the left and right sides to move along the stepped protrusion surface to prevent vertical flow;

Horizontal rollers mounted on left and right sides to prevent left and right flow while moving along the left and right inner walls between the stepped protrusions;

A step portion in which the top plate slide induces an opening by moving the driving portion of the top plate slide upward when sliding by a step difference generated by a plurality of circular arrangements identical to the driving unit arrangement of the top slide;

A first long hole which is fitted with the stepped portion by the hitting of a pressurizer while being formed in a plurality in the same circle shape as the driving portion of the upper plate slide;

A second long hole arranged in a pair of pairs while communicating with the top and bottom surfaces at the left and right ends to accommodate the insertion and exit of the tension means and form an extension without insertion and exit interference;

And a control unit.

In addition, the step portion,

The first bend is formed in the first step and the second step of the lower plate slide formed in multiple stages in the order of the front and rear downwards by hitting the pressure presser, and are fitted in the first step and the second step formed in the front and rear downward direction, the inner circumferential surface of the first long hole. A part and a second bent part;

When sliding the lower plate slide by the generated step, the round plate is formed on the bottom surface of the upper slide plate to move the upper plate slide upwardly without providing an impact on the roller by flexibly inducing the roller rotation of the upper plate slide drive.

The rounding is,

A bottom point for guiding the upper plate slide to open the opening by moving the roller downward;

A high point portion that guides the top plate slide to shield the opening by moving the roller in an upward position;

Characterized in that made.

In addition, the vertical roller and the horizontal roller,

It is alternately mounted on the left and right sides of the lower plate slide, characterized in that to prevent the flow of the upper and lower left and right at the same time when the lower plate slide sliding.

In addition, the rotating member mounted to the drive means,

While combined with the pinion gear, to form a stepped groove for fixing one side of the first link in the center;

A bolt hole for inserting an insertion bolt in the center of the stepped groove;

A gate opening and closing device used for substrate processing, characterized in that the forming.

In addition, the tension means,

Protrusions symmetrically coupled to the bottom left and right ends of the top plate slide, respectively;

Shafts respectively inserted between the protrusions;

A fastener which is inserted into the shaft and rotates back and forth, and has a screw thread formed therein to fasten the fastening screw;

The left and right protrusions are inserted into the grooves of the left and right fixing pieces which are bolted to the vicinity of the second long hole of the bottom plate slide and are fixed to the second long hole of the bottom plate slide while being located in the fastener downward direction, thereby rotating forward and backward. And inserting the spring and the fastening screw accommodating sequentially, and through the fastening screw through;

The insert is inserted into the insertion outlet so that one side is engaged with the insertion outlet and the other side is engaged with the fastening screw, while the opening and closing of the upper plate slide is compressed and tensioned by the up and down movement of the fastening screw. A spring providing tension to the spring;

The other side is engaged with the spring and the other side is engaged with the spring while the other side is inserted into the spring, and a thread is formed and fastened to the fastener, and the spring is compressed and tensioned by the vertical movement of the fastener. Fastening screw to move up and down in the;

A fixing piece having a groove formed on the inner surface of the lower plate slide, the groove being fixed to the left and right bottom surfaces near the second long hole by inserting the left and right protrusions of the insertion hole into the hinge to fix the hinge;

And a control unit.

As described above, the gate opening and closing apparatus used in the substrate processing of the present invention has the effect of reducing the coefficient of friction along with the effect of tightly shielding the opening to prevent air leakage.

In addition, it is possible to reduce the trouble and defect of the implementation means to achieve the opening and closing, to reduce the maintenance cost by not replacing the whole due to some damage, and to facilitate the maintenance and repair of the device by reducing the trouble and defect It is effective in reducing labor input at the same time.

1 is a perspective view of the present invention.
2 is an exploded perspective view of the present invention.
3 is a perspective view of the connection of the present invention.
4 is an image of the present invention. Detailed construction diagram of the bottom plate slide.
Figure 5 is a detailed view of the body of the present invention.
Figure 6 is a top slide operation state diagram of the present invention.
Figure 7 is an operating state of the upper and lower plate slide of the present invention.
8, 9 is a cross-sectional view and an operating state of the AA 'incision line shown in FIG.
FIG. 10 is a cross-sectional view of the binding of the stepped portion, taken along line BB ′, shown in FIG. 5.
Figure 11 is an enlarged side cross-sectional view showing the inside of the body extension of the present invention.

Hereinafter, with reference to the accompanying drawings will be described in detail.

Regarding the gate opening and closing apparatus used in the substrate processing according to the present invention, as shown in Figures 1, 2, 3,

The body 20 is provided on the die 10 to be used at the bottom of the chamber chamber for processing the substrate under vacuum, and one side of the body 20 is formed with the sliding long groove 21 formed therein. In communication with (27).

In the sliding long groove 21, the left and right inner walls 23 form a stepped protrusion 22, and the bottom of the plate 32 of the driving means 30 is formed in the binding flange 25 formed on one side of the upper surface of the body 20. Combined, the upper flange 26 formed on the other side of the upper surface and the lower flange 28 of the bottom to form the upper flange 26 is combined with the chamber chamber (not shown), the lower flange 28 is vacuum In combination with the pump (not shown).

An opening 27 is formed between the upper flange 26 and the lower flange 28, and the opening 27 is in communication with the sliding long groove 21.

Therefore, it is the gate opening and closing apparatus of the present invention to shield the opening 27 so that the inside of the chamber chamber is under vacuum after sucking the air in the chamber chamber with the vacuum pump.

The gate opening and closing device of the present invention, in the body 20 formed in the die 10 as described above, the sliding long groove 21 while the upper plate slide 60 and the lower plate slide 70 is accommodated inside the sliding long groove 21. Sliding the inside, wherein the drive means 30 for sliding the upper plate slide 60 and the lower plate slide 70 is provided.

The driving means 30 is provided on one side of the upper portion of the body 20, and in detail, the cylinder 31 and the plate 32 are integrated, and the plate 32 is connected to the piston of the cylinder 31. The size gear 33 is installed, and the pinion gear 34 is geared to the rack gear 33.

The rotating member 40 formed with the pinion gear 34 is provided at the lower portion of the plate 32, which is lower than the pinion gear 34, and the stepped groove 40b is formed at the center of the rotating member 40. A bolt hole 40a is formed in the center of the stepped groove 40b.

Sliding connecting means 50 is provided along with the driving means 30 for sliding the upper plate slide 60 and the lower plate slide 70. In detail, a first link 51 is provided, and the first link is provided. One side of the 51 is formed with a through-hole 51a in the center, the other side of the first link 51 is connected to the second link 53 and the hinge, the smoothness of the rotation by the connection by the ball bearing 52 The other side of the second link 53 hinged with the first link 51 is hinged and connected to the rear of the lower plate slide 70.

As shown in FIG. 11, the first link 51 of the sliding connecting means 50 connected to the driving means 30 together with the driving means 30 is inside the extension part 20a of the body 20. If the replacement is necessary due to defects, defects or failures occurring in the first link 51 of the driving means 30 and the sliding connecting means 50 as the structure is fastened in the body 20 extension 20a configuration The speed of replacement can be achieved.

To see the configuration of the upper plate slide 60 and the lower plate slide 70 accommodated in the sliding long groove 21 of the body 20 to slide in the body 20, first, when sliding in the body 20, the upper plate The slide 60 is made to slide in the body 20 in the superimposed state with the lower plate slide 70.

As shown in Figs. 4, 5, 6, and 7,

The upper plate slide 60 forms a rubber ring 60a on the upper surface portion, and forms protrusions 61 symmetrically symmetrically on the front end portion and the lower surface portion in the slide travel direction of the upper plate slide 60, and on the protrusion portion 61. A step roller 61a is provided, and a plurality of driving parts 62 arranged at regular intervals in a circular shape are provided at the bottom portion, and a hook part 62a symmetrical is formed in the driving part 62. The shaft rod 62c placed between the hook portions 62a is fixed by a screw 62b, and a roller 62d is inserted and rotated in the shaft rod 62c.

In addition, as shown in FIGS. 5, 8, and 9, the pair of pairs are disposed at the left and right ends between the upper and lower plate slides 60 so that the upper plate slides 60 shield and open the opening 27, Tension means (63) for providing tension to the upper and lower plate slides (60) and (70) to prevent detachment forms a protruding piece (64) which is symmetrically coupled to the left and right ends of the bottom surface of the upper plate slide (60), respectively. And a shaft rod (65) inserted between each of the protrusion pieces (64), the shaft being inserted in the shaft rod (65) and rotated back and forth, and a thread is formed therein to fasten and fasten the fastening screw (68b). A sphere 66 is provided.

The left and right fixing pieces 69 are fastened by bolts near the second long hole 76 of the bottom of the bottom plate slide 60 while being accommodated in the second long hole 76 of the lower plate slide 60 in the downward direction of the fastener 66. The left and right projections 67a are inserted into the grooves 69a of the crankshaft and rotate back and forth while being fixed, and the springs 68a and the fastening screws 68b are sequentially received while allowing the fastening screws 68b to penetrate. Dislocation 67 is provided.

When the insert is inserted into the insertion outlet 67, one side is engaged with the insertion outlet 67 and the other side is engaged with the fastening screw 68b, while shielding and opening the opening 27 of the upper plate slide 60, A spring 68a is provided to provide tension to the upper and lower plate slides 60 and 70 while being compressed and tensioned by the up and down movement of the fastening screw 68b.

The other side is engaged with the spring 68a while the other side is inserted into the spring 68a and penetrates the insertion hole 67, and one side is formed with a screw thread to be fastened to the fastener 66 to fix the fastener 66. And a fastening screw 68b for compressing and tensioning the spring 68a by vertical movement of the top and bottom, and moving up and down within the insertion / exit opening 67.

Fixing piece 69 which is fixed to the left and right bottom surface near the second long hole 76 of the lower plate slide 70 to control the rotation radius during the forward and backward rotation of the inserting outlet 67 while fixing the inserting outlet 67. It is to provide a tension means 63 including a.

The fixing piece 69 is formed in a portion of the inner surface length of the left and right fixing piece 69, the groove for preventing detachment of the insertion port 67 for inserting the left and right projections 67a of the insertion port 67 and hinged. It consists of 69a.

Accordingly, when the upper plate slide 60 and the lower plate slide 70 are stacked on each other, the protrusion pieces 64 and the shaft rod 65 and the fastener 66 and the lower plate slide 70 formed on the bottom surface of the upper plate slide 60 are formed. An insertion hole 67 hinged to the fixing piece 69 coupled to the bottom is received in the second long hole 76 of the lower plate slide 70, and the protruding piece 64 is an extension of the second long hole 76. Located in the portion 76a, when the upper plate slide 60 moves upward, the fastener 66 also moves upward, and a fastening screw 68b having one side fixed to the fastener 66 is also provided. In this case, the fastening screw 68b compresses the spring 68a upward while pressing the other end of the spring 68a to move upward in the insertion outlet 67 and at the same time, the insertion outlet 67 When the lower plate slide 70 in the second long hole 76 is slid forward by the generated step is flipped backward.

On the contrary, when the lower plate slide 70 is slid back to the rear side, the inserting hole 67 is flipped forward and the fastener 66 is moved downward by the upper plate slide 60 moving downward. The fastening screw 68b inserted in the 67 is also moved downward, and the other side of the spring 68a is also returned downward by the elastic force.

The lower plate slide 70 having the bottom portion of the upper plate slide 60 overlaps with the other side of the second link 53 to form a recessed portion 70a, and a portion of the upper plate slide at the top end of the lower plate slide 70. The depression 70b is formed to be symmetrical to the left and right in the same manner as the protrusion 61 of 60, and the stepped portion 71 is inserted and fixed in the depression 70b, and the vertical roller 72 in the vertical direction is fixed to the left and right sides. ) And horizontal rollers 73 in the horizontal direction are alternately mounted, and a plurality of stepped portions 74 are arranged in a circular shape on the upper surface portion in the same manner as the driving portion 62 arrangement of the upper plate slide 60.

That is, as shown in FIGS. 5 and 10, when the step portion 74 is fitted to the first long hole 75 of the lower plate slide 70, the stepped portion 74 may be moved to the first long hole by a pressurizer. 75, the first bent portion (74a) and the second bent portion (74b) is formed in the front and rear outer surface of the step portion 74 is formed in multiple stages in the downward direction, so that the step of the step portion 74 The first and second bent portions 74a and 74b are mounted on the first and second stepped portions 75a and 75b formed in multiple stages in the front and rear outer surfaces of the first long hole 75 to fix the step portion 74. Is done.

Therefore, when foreign matter is deposited on the rounding 74c formed at the bottom of the stepped portion 74 of the plurality of stepped portions 74, scratches or defects occur, only the stepped portion 74 of the corresponding problem is replaceable and the lower plate slide. (70) It is possible to reduce the trouble of having to replace the whole, to reduce the replacement cost, and to reduce the input labor during the replacement.

In addition, the step portion 74 forms a rounding 74c to provide flexibility to the rotation of the roller 62d of the upper plate slide 60 and the driving unit 62, and the rounding (when the lower plate slide 70 slides). 74c) is provided with a bottom portion 74d for shifting the roller 62d of the upper slide 60 drive unit 62 downward, and the roller 62d of the upper slide 60 drive unit 62 is formed. The high point portion 74e is formed to move the position upward.

That is, when the roller 62d is at the low point portion 74d, the upper plate slide 60 is in a state of opening the opening 27, and when the roller 62d is at the high point portion 74c, the upper plate slide ( 60 is a state which shielded the opening part 27. FIG.

Therefore, the upper plate slide 60 and the lower plate slide 70 overlapped with the sliding long groove 21 formed at one side of the body 20 is accommodated, and at this time, vertical rollers 72 alternately mounted on the left and right sides of the lower plate slide 70. Is rotated along the stepped projection 22 formed on the left and right sides of the sliding long groove 21, the horizontal roller 73 is rotated along the left and right inner wall (23) of the body 20 between the stepped projection (22). The lower plate slide 70 is prevented from flowing up, down, left, and right.

That is, the stepped groove 40b of the pivot member 40 serves to fix one side of the first link 51, and the bolt hole 40a and the first link 51 formed at the center of the stepped groove 40b. By rotating the insertion member 80 and the washer 81 is inserted into the through hole (51a) formed on one side of the rotation member 40 is to form a fixed one side of the first link (51).

Hereinafter will be described the operating state of the present invention.

Referring to FIGS. 1 to 5, as shown in FIGS. 6, 7, 8, and 9, in the present invention, the rack gear 33 moves forward when the piston (not shown) of the cylinder 31 moves forward. The pinion gear 34 geared to the rack gear 33 is rotated in the forward direction. At this time, the rotation member 40 mounted on the pinion gear 34 is also rotated in the same manner as the pinion gear 34. Will be achieved.

As the first link 51 coupled to the pivot member 40 rotates to induce driving of the second link 53 hinged to the other side, the second link 53 is operated to perform the second link 53. The lower plate slide 70 hinged with the link 53 is started in the sliding inner groove 21 of one side of the body 20 and starts to move in the direction of the posterior inner wall 24 inside the body 20.

At this time, the upper plate of the lower plate 70, the upper plate slide 60 is nested with the lower plate slide 70 proceeds in the direction of the rear inner wall 24 inside the body 20, the predetermined slide progress is made When the step rollers 62d, 61a, 61a of the upper plate slide 60 come into contact with the inner inner wall 24 of the body 20, the upper plate slide 60 no longer slides, and the lower plate slide 70 ) And the lower inner plate slide 70 moves toward the rear inner wall 24 by the step distance.

At this time, the lower plate slide in which the roller 62d of the upper plate slide 60 driving part 62, which is located at the bottom portion 74d of the rounding 74c in the step portion 74 of the lower plate slide 70, proceeds as much as the step generation. 70 is rotated along the rounding (74c) to form a position movement to the high point portion 74e of the rounding (74c), the upper plate slide 60 is formed in the upper surface of the upper plate slide (60) The rubber ring 60a hermetically shields the opening 27.

At this time, the rounding 74c of the step portion 74 provides a smooth and flexible rotation of the roller 62d, thereby serving to prevent damage and defects of the driving portion 62 around the roller 62d, and the upper plate slide ( The spring 68a of the tension means 63 connecting the 60 and the lower plate slide 70 serves to prevent detachment and lifting of the upper and lower plate slides 60 and 70, and also lower plate slide ( The stepped piece 71 fixed to the recessed portion of the 70 is engaged with the protrusion 61 of the upper plate slide 60 to stop the slide further, thereby serving to prevent the impact of the roller 62d.

To explain in more detail the operating state of the tension means 63, when the roller 62d of the upper plate slide 60 rotates along the rounding 74c of the lower plate slide 70 to move to the high point portion 74e. The fastener 66 formed on the bottom surface of the upper plate slide 60 moves upward with the upper plate slide 60, with one side fixedly coupled to the fastener 66 and inserted into the inserting outlet 67. While the fastening screw 68b penetrating moves upward in the upward movement of the fastener 66, one side of the spring 68a is also pressed upward by the upward movement of the fastening screw 68b. Compression is achieved, the insertion hole 67 in the second long hole 76 formed in the lower plate slide 70 is made to be turned back.

On the contrary, when the roller 62d of the upper plate slide 60 rotates along the rounding 74c of the lower plate slide 70 and moves to the low point 74d, the fastener 66 moves downward and the fastening screw 68b. In addition, the spring 68a is also returned by the elastic force while moving downwardly in the insertion hole 67, and the insertion hole 67 is again turned forward at the second long hole 76.

As described above, the gate opening and closing apparatus used for the substrate processing according to the present invention can reduce the coefficient of friction with the effect of preventing air leakage by hermetically shielding the opening.

In addition, to reduce the trouble and defect of the implementation means to achieve the opening and closing, and to reduce the maintenance cost by not replacing the whole due to some damage, and to facilitate the maintenance and repair of the device by reducing the trouble and defect Accordingly, there is an effect that it is possible to achieve the prompt replacement of the replacement and labor savings during the replacement.

DESCRIPTION OF THE REFERENCE SYMBOLS
10: die
20: body 20a: extension
21: sliding long groove
22: stepped stone 23: left and right inner wall
24: posterior inner wall 25: binding flange
26: upper flange 27: opening
28: lower flange
30: Driving means
31 cylinder 32 plate
33: rack gear 34: pinion gear
40: rotating member 40a: bolt hole
40b: stepped groove
50: sliding connection means
51: first link 51a: through hole
52: ball bearing 53: second link
60: top plate slide 60a: rubber ring
61: projection 61a: step roller
62: drive portion 62a: hook portion
62b: screw 62c: shaft
62d: roller
63: tension means
64: protrusion 65: shaft
66: fastener
67: insertion inlet 67a: protrusion
68a: Spring 68b: Tightening Screw
69: fixing piece 69a: groove
70: bottom plate slide
70a: depression
70b: depression 71: stepped piece
72: vertical roller 73: horizontal roller
74: stepped portion 74a: first bent portion
74b: second bend 74c: rounding
74d: low point 74e: high point
75: first chapter 75a: first step
75b: second step
76: Chapter 2 76a: Expansion
80: insertion bolt 81: washer

Claims (10)

A body 20 for coupling the chamber to the upper part and the pump to the lower part to shield the opening 27 so as to process the substrate in the chamber in a vacuum state;
A driving means (30) coupled to the upper one side of the body (20) to operate the upper and lower plate slides (60) and (70) inserted into the body (20) to shield the opening (27);
A rotating member 40 mounted inside the driving means 30 and the body 20 to rotate in the forward and reverse directions by driving the driving means 30 while fixedly coupling the sliding connecting means 50;
Sliding is fixed to the rotating member 40 to simultaneously swing forward and reverse according to the forward and reverse rotation of the rotating member 40 to slide the upper and lower plate slides (60) and (70) back and forth inside the body (20). Connecting means 50;
Upper and lower plate slides 60 and 70 connected to the sliding connection means 50 to slide back and forth inside the body 20 to shield and open the body 20 opening 27;
The upper and lower plate slides 60 and 70 are arranged in pairs at the left and right ends, respectively, so that the upper and lower plate slides 60 and 70 are provided when the upper plate slide 60 shields and opens the opening 27. And tension means (63) for providing tension and preventing detachment;
The rotating member 40 mounted to the driving means 30 forms a stepped groove 40b for fixing one side of the first link 51 in the center while being coupled to the pinion gear 34. And a bolt hole (40a) for inserting the insertion bolt (90) in the center of the stepped groove (40b).
According to claim 1, The drive means 30 is coupled to the upper one side of the body 20,
A plate 32 engaged with the binding flange 25;
A cylinder 31 integrated with one side of the plate 32;
A rack gear 33 connected to the piston of the cylinder 31 and operated back and forth according to the movement of the piston while being inserted into the plate 32;
A pinion gear 34 connected to the rack gear 33 and rotated in the forward and reverse directions according to the forward and backward motion of the rack gear 33;
Gate opening and closing device used for substrate processing, characterized in that comprising a. The method of claim 1, wherein the sliding connecting means 50,
One side is fixed by the washer 81 and the insertion bolt 80 inserted into the stepped groove 40b of the rotation member 40 and fastened to the bolt hole 40a formed at the center of the stepped groove 40a. A first link 51 hinged by one side of the two links 53 and a ball bearing 52 connection;
The second link 53 which hinges the other side and one side of the first link 51 and the other side is hinged with the center of the recess 70a which is the upper end of the lower plate slide 70 to slide the lower plate slide 70. ;
Gate opening and closing device used for substrate processing, characterized in that comprising a. The top plate slide of claim 1,
When sliding into the body 20 protrudes in a symmetrical state in the front end and the bottom portion when the sole sliding of the lower plate slide 70 is inserted into the upper end recessed portion 70b of the front end of the lower plate slide 70 A projection portion 61 which does not catch the roller 62d and impinge the impact on the roller 62d;
A step roller (61a) which protrudes at the tip when sliding into the body (20) to generate a step on the lower plate slide (70) when it contacts the body inner wall (24);
The driving part which is moved upwardly by the step part 74 of the lower plate slide 70 which slides as much as the generated step | step while being arranged in circular form at the bottom part, and airtightly shields the opening part 27 ( 62);
Gate opening and closing device used for substrate processing, characterized in that comprising a. The method of claim 4, wherein the drive unit 62,
Symmetrical hook portion 62a;
A screw 62b inserted into the hook portion 62a to securely couple the shaft rod 62c inserted between the hook portions 62a;
A shaft rod 62c fixedly coupled to the screw 62b and inserted between the hook portions 62a;
A roller 62d inserted into the shaft rod 62c and rotating along a step 74 rounding 74c of the lower plate slide 70;
The gate opening and closing device used in the substrate processing, characterized in that the replacement is easy in the event of a failure and defect of the roller by being configured to include. The lower plate slide 70 of claim 1,
A recess recessed with the other side of the second link 53 to be recessed by the thickness of the second link 53 to provide freedom for driving the second link 53 in the sliding long groove 21 of the body 20 ( 70a);
A depression 70b recessed while being symmetric with the top surface of the tip portion to accommodate the protrusion 61 of the upper slide 60;
A stepped piece 71 inserted into and fixed to the rear end of the recess 70b so that the protrusion 61 of the upper slide 60 is caught when sliding;
Vertical rollers 72, which are inserted between the stepped protrusions 22 formed on the left and right sides of the sliding long groove 21 of the body 20 while being mounted on the left and right sides, and move along the surface of the stepped protrusions 22 to prevent vertical flow. 62d);
Horizontal rollers 73 and 62d mounted on left and right sides to prevent left and right flow while moving along the left and right inner walls 23 between the stepped protrusions 22;
In the same way as the arrangement of the driving unit 62 of the upper plate slide 60, when the slide is generated by a plurality of steps generated by the circular form, the upper plate slide 60 by moving the driving unit 62 of the upper plate slide upwards A stepped portion 74 which guides the shielding opening 27;
A first long hole (75) fitted with the step portion (74) by striking the other pressurizer while being formed in the same circular shape as the driving portion (62) of the upper plate slide (60);
The second chapter, which is arranged in a pair of pairs while communicating the upper surface and the bottom surface at the left and right ends to accommodate the insertion and exit ports 67 of the tension means 63 and to form the expansion portion 76a without interference with the insertion and exit ports 67. (76);
Gate opening and closing device used for substrate processing, characterized in that comprising a. The method of claim 6, wherein the step portion 74,
The first stepped portion 75a which is formed in multiple stages in the order of the front and rear downwards by hitting the pressurizer and is formed in the stage of the front and rear downwards which is the inner circumferential surface of the first long hole 75 in the first long hole 75 of the lower plate slide 70. ) And the first bent portion 74a and the second bent portion 74b that are fitted to the second stepped portion 75b;
When sliding the lower plate slide 70 by the generated step, the roller 62d of the upper plate slide 60 drive unit 62 is flexibly guided so that the roller 62d does not provide an impact to the roller 62d together with the roller 62d. Rounding (74c) is formed on the bottom surface to move the upper plate slide 60 in the upward direction,
The rounding 74c is,
A bottom portion 74d for guiding the upper plate slide 60 to open the opening 27 by the downward positional movement of the roller 62d;
A high point portion 74e for guiding the upper plate slide 60 to shield the opening 27 by the upward positional movement of the roller 62d;
A gate opening and closing device used for substrate processing, characterized in that made. The vertical rollers (72, 62d) and the horizontal rollers (73), (62d),
Gate alternately mounted on the left and right sides of the lower plate slide 70 to prevent the upper, lower, left and right flow of the lower plate slide 70 at the time of sliding of the lower plate slide 70, the gate opening and closing device used for processing. delete According to claim 1, the tension means 63,
Protrusions 64 symmetrically coupled to the bottom left and right ends of the upper plate slide 60, respectively;
Shaft rods 65 respectively inserted between the protruding pieces 64;
A fastener 66 which is inserted into the shaft bar 65 and rotates back and forth and has a screw thread formed therein to fasten the fastening screw 68b;
Left and right fixed to the fastener (66), while being accommodated in the second long hole (76) of the lower plate slide 60, the left and right fixed to the bolt near the second long hole (76) of the bottom surface of the lower plate slide (60) The left and right protrusions 67a are inserted into the grooves 69a of the piece 69 and rotated back and forth while being fixed, thereby accommodating the spring 68a and the fastening screw 68b in sequence, and accepting the fastening screw 68b. An insertion and discharging outlet 67 for penetrating;
When the insert is inserted into the insertion outlet 67, one side is engaged with the insertion outlet 67 and the other side is engaged with the fastening screw 68b, while shielding and opening the opening 27 of the upper plate slide 60, A spring 68a which provides tension to the upper and lower plate slides 60 and 70 while being compressed and tensioned by the up and down movement of the fastening screw 68b;
The other side is engaged with the spring 68a while the other side is inserted into the spring 68a and penetrates through the insertion outlet 67, and one side is formed with a screw thread to be fastened and fastened to the fastener 66. A fastening screw 68b which compresses and tensions the spring 68a by vertical movement of the 66 and moves up and down within the insertion and discharging opening 67;
Fixed to form a groove (69a) in the inner surface of the lower plate slide 70 is fixed to the left and right bottom near the second long hole (76) to insert the left and right projections (67a) of the insertion hole 67 and hinged Piece 69;
Gate opening and closing device used for substrate processing, characterized in that comprises a.

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