KR20120074491A - Vertical vacuum isolation apparatus - Google Patents

Abstract

PURPOSE: A vertical vibration blocking device is provided to block vibration between work chambers in which work objects such as panel glasses are handled wherein the work objects vertically move. CONSTITUTION: A housing(1) includes a vertical inlet(13). The vertical inlet vertically forms a long axis. A support panel(2) horizontally moves in front of the housing. A valve plate(3) is mounted on the support panel. The valve plate shields the inlet. A driving unit(4) horizontally moves the support panel. The driving unit includes a side member, an actuator, a link arm, and a driving arm.

Description

Vertical vacuum isolation apparatus

The present invention relates to a vacuum interruption device for shielding an entrance formed perpendicular to a working chamber.

Image display apparatuses are becoming larger in size, and thus liquid crystal panels (eg, FPDs) used in image display apparatuses are also increasingly manufactured. The liquid crystal panel needs to be processed in various vacuum regions according to low vacuum and ultra high vacuum, and a plurality of working chambers are formed intensively or sequentially in order to realize a vacuum state. The entrance and exit of each working chamber is provided with a vacuum shutoff device such as a slot valve for maintaining a vacuum inside.

The doorway of the conventional vacuum cut-off device is formed to be horizontally long, and through this horizontal doorway, the panel glass, which is a work object, is moved down. However, the disadvantage of increasing foreign substances due to scratching and partial crushing of the glass surface during the process of moving the panel glass of large size lying down, and the area occupied by these equipments are increased due to the increase of the size of mobile equipment to secure the working area. The disadvantage of increased costs has emerged.

In order to improve these disadvantages, a method of vertically moving the panel glass is considered. In order to realize this, it is required to develop a vacuum blocking device that can shield the vertical entrance of each working chamber.

The present invention has been developed for the shielding of the vertical entrance as described above, and is intended to block the vacuum between the working chambers to handle the workpiece such as the panel glass to be moved vertically.

Specifically, it has an object of vacuum-blocking the entrance and exit of the working chamber formed relatively longer than the width.

In addition, it has the purpose to obtain structural stability and to add convenience of maintenance.

In accordance with an aspect of the present invention, there is provided an embodiment of the present invention, comprising: a housing having a vertical entrance formed in a vertical axis in a vertical direction; a support panel movable in a left and right direction of the entrance from the front of the housing; The present invention provides a vertical vacuum interruption device including a valve plate for shielding the entrance and exit, and a driving part for moving the support panel in left and right directions.

Wherein the drive side member. An actuator coupled to the side member, a link arm connected to the actuator and moving in the left and right direction, and one end fixed to the link arm and penetrating the side member, the other end being fixed to the support panel. It may include.

In addition, the drive unit is coupled to the side member and the cylinder body, one end of the spline shaft is fixed to the link arm, the spline nut coupled to the spline shaft may further include a ball spline fixed to the cylinder body.

In addition, the driving unit may be provided with the cylinder body and the ball spline respectively above and below the actuator, and the driving arm may be provided above and below the cylinder body and the ball spline, respectively.

On the other hand, the drive unit has a bellows surrounding the periphery of the through hole of the side member through which the drive arm passes, the drive arm is wrapped around the circumference at the front side of the side member facing the support panel, the foreign matter into the through hole against the side member Blocking block for blocking the intrusion of, and is mounted around the through-hole, may protrude a portion may include an O-ring in contact with the blocking block.

In addition, the side member may be movable apart from the housing so that the support panel and the valve plate is exposed.

At this time, the movement of the side member relative to the housing is made by a sliding portion mounted to the upper and lower sides of the side member, the sliding portion is a slider mounted on the top and bottom of the side member, and the slider is coupled to slide It may include a rail formed in the left and right directions with respect to the housing.

On the other hand, both ends of the support panel is provided with a first inclined block, the inner surface of the housing of both ends of the entrance is provided with a second inclined block in contact with the first inclined block, the second inclined block is the entrance The contact surface of the first inclined block having a contact surface inclined toward the support panel facing the second inclined block may be formed to be inclined oppositely to correspond to the second inclined block.

Furthermore, the housing includes a front surface and a rear surface, each of which has an entrance formed at an opposite position, and the support panel is movable left and right between the front surface and the rear surface, and an entrance of the front plate is connected to the valve plate. It is shielded by, and the sealing member facing the periphery of the entrance may protrude from the rear surface of the support panel in contact with the entrance of the rear plate.

According to an embodiment of the present invention, the entrance formed in the upper and lower sides is completely opened to allow the work object which is erected through the entrance to pass through, or to shield the entrance to maintain another pressure state before and after the entrance. This enables the airtightness of the working chamber having the vertical entrance and exit, and has the effect of ameliorating the disadvantages as described above.

In addition, the cylinder of the actuator is coupled to the side member, and the piston, the link arm and the driving arm are configured to pass through the side member to be coupled to the support panel, thereby preventing contamination of the actuator by foreign matter generated inside the housing. In addition, there is an effect that the design for airtight inside the housing is also easy, and the structural strength of the entire apparatus is improved.

In addition, since the ball spline is provided, there is an effect of preventing the problem of the actuator being damaged due to sagging of the supporting panel or vertical load applied to the actuator.

In addition, since the plurality of shaft members connect the side members and the link arms, the health of the link arms is greatly increased.

In addition, the O-ring facing the blocking block is mounted on the side member has the advantage of preventing damage to the bellows caused by foreign matter invading the bellows.

In addition, as the side members are separated and moved in the housing in this way, access to the support panel and the valve plate is improved, and thus convenience of maintenance is increased.

In addition, the support panel and the housing does not directly hit the operation of the valve plate, there is an effect to ensure the manufacturing tolerances and assembly errors.

1 is a schematic front view of a vertical vacuum interrupter according to an embodiment of the present invention.
2 is an exploded perspective view of a portion of the embodiment shown in FIG. 1;
3 is a front view of a portion showing a use state of the embodiment shown in FIG.
4 is a sectional view of the driving unit employed in FIG. 1 as viewed from the front;
5 is a plan view of a main part employed in FIG.
6 is a front view showing the closed state of the embodiment shown in FIG.
7 is a front view showing a repair state of the embodiment shown in FIG.
8 is an enlarged perspective view of a part of a housing and a support panel employed in the embodiment shown in FIG. 1;
9 is a plan view showing a state of use according to the AA section of FIG.

Hereinafter, with reference to the accompanying drawings will be described the configuration, function and operation of the vertical vacuum interruption apparatus according to an embodiment of the present invention. However, the same reference numerals for similar or identical components are used uniformly.

1 and 2, the vertical vacuum shutoff device 100 according to an exemplary embodiment of the present invention includes a housing 1 having a vertical entrance 13 having a long axis in a vertical direction, and the entrance 13. ) And a support plate (2) movable in the left and right directions of the doorway (13), protrudingly mounted to the support plate (2), the valve plate (3) shielding the doorway (13), and the A driving unit 4 for moving the support pattern 2 in the left and right directions is included.

The housing 1 is formed in a substantially hexahedron, and an entrance 13 is formed in the front plate 11 and the rear plate 12. In addition, one side of the housing 1 may be formed of a side member 41 constituting the drive unit (4). An empty space is formed between the front plate 11 and the rear plate 12 on which the entrances and exits 13 are formed, respectively. This empty space is a space in which a device for controlling an entrance is operated.

The doorway 13 formed in the housing 1 has a right and left constant width, and is formed in a long hole or a quadrangle having a long axis in a vertical direction that is relatively long with respect to the length of the width. That is, the doorway 13 is formed in the vertical height is long in preparation for the width, it is possible to pass through the doorway in the state in which the plate-like workpiece such as panel glass through the doorway.

The front plate 11 and the rear plate 12 of the housing 1 are connected with different working chambers (not shown). For example, the front plate 11 may be connected to a work chamber for processing panel glass in a low vacuum state, and the back plate 12 may be connected to another work chamber for processing panel glass in an atmospheric pressure state.

The support pattern 2 is a member that slides from side to side in an empty space formed inside the housing 1. That is, the support plate 2 is slid left and right in front of the doorway 13 is interposed between the doorway formed in the front plate 11 and the rear plate 12, or as shown in FIG. It is possible to escape on the path connecting the front and rear doors without interfering with the panel glass passing through 13).

On the other hand, the valve plate 3 is mounted to the support plate 2 so as to protrude, pressurizes the periphery of the doorway 13 and shields the doorway (13). The valve plate 3 is a plate having at least an entrance and an area or an area larger than the entrance and exit. A sealing for airtightness is interposed between the inner surface of the housing, that is, one surface of the valve plate 3 in contact with the periphery of the entrance and exit. The configuration in which the valve plate protrudes from the support panel and is pressed against the periphery of the entrance and exit may consist of various mechanical means for pushing the valve plate out of the support panel. The mechanical means may be an expansion means using a piston and a cylinder, such as an air cylinder, a hydraulic actuator, to be described later, or a mechanical operation means using a combination of the rotation and the rack of the motor.

The drive unit 4 is an operation means for moving the support pattern 2 from side to side with respect to the doorway 13 as described above. In addition, the drive unit 4 supports the load of the support pattern 2 and the valve plate 3.

Such a vertical vacuum cut-off device according to an embodiment of the present invention is to open the entrance formed long vertically and completely to allow the workpiece to be passed through the entrance, or to shield the entrance to maintain the other pressure state before and after the entrance. You can do it. This makes it possible to seal the working chamber with the vertical entrance and to remedy the disadvantages described above.

2 to 4, the driving unit 4 employed in the present invention will be described.

The drive unit 4 is a means for sliding the support pattern 2 in the left and right direction, the drive unit 4 according to an embodiment of the present invention is a side member (41). An actuator 42 coupled to the side member 41, a link arm 43 connected to the actuator 42 and moving in a left and right direction, and one end is fixed to the link arm 43, and the side member Passing through 41, the other end includes a drive arm 44 fixed to the support pattern 2.

The side member 41 constitutes one side of the housing 1. As the side members are coupled to the housing, the interior of the working chamber and the housing respectively connected to the front plate and the rear plate may form an airtight space. The side member 41 may be a plate connecting the front plate 11 and the rear plate 12. The side member 41 may be formed longer than the long axis in the vertical direction of the vertical entrance.

The side member 41 is formed with a through hole through which the drive arm 44 coupled to the support pattern 2 located inside the housing 1 passes.

The actuator 42 may include a cylinder 421 fixed to the side member 41 and a piston 422 extended or expanded in the cylinder 421. Actuator 42 may be to operate the piston with the air supplied from the equipment provided separately. At this time, the actuator may use a fluid instead of air, and the actuator may be replaced with another mechanical configuration.

The link arm 43 is a member connected to the actuator 42 and movable in the left and right directions. The link arm 43 is provided in parallel with the longitudinal direction of the support patch 2.

The driving arm 44 passes through the through hole of the side member 41, and both ends thereof are coupled to the link arm 43 and the support pattern 2.

As a result, the stretching operation of the piston 422 provided in the actuator 42 is configured to move the link arm 43, the drive arm 44, and the support pattern 2 in the left and right directions. Therefore, the operation length of the piston 422 is from the position where the support plate 2 covers the entrance 13 (see FIG. 6) to the position away from the passage formed by the front and rear doors 13 (see FIG. 1). It is equal to the length moving from side to side.

As such, the cylinder of the actuator is coupled to the side member, and the piston, the link arm, and the driving arm are configured to pass through the side member to the support panel, thereby preventing contamination of the actuator by foreign matter generated inside the housing. Also, the design for airtight inside the housing is facilitated, and the structural strength of the entire apparatus is improved. Specifically, when the entrance is opened, small pieces of glass generated in the working chamber or foreign substances generated during the movement of the workpiece are introduced into the housing, and the actuators are provided on the outside of the housing, thereby eliminating the possibility of these foreign substances entering the actuator. . In addition, since the member penetrating the side member is limited to the driving arm, foreign matter is prevented from entering the through hole portion of the side member through which the driving arm passes. Therefore, compared to the configuration in which several other members penetrate the side member and coupled to the support panel, there are fewer parts that need to take countermeasures against foreign matter intrusion. In addition, since the length of the drive arm coupled to the support panel can be shortened based on the side member, the bending of the drive arm can be minimized by the load of the support panel suspended like the cantilever on the drive arm. In addition, since the cylinder portion of the heavy actuator is coupled to the side member, there is no need for a separate bracket or frame for coupling the cylinder.

Furthermore, the drive unit 4 may further include a cylinder body 45 coupled to the side member 41 and a ball spline 46 coupled to the cylinder body. At this time, one end of the spline shaft 461 is fixed to the link arm 43, the spline nut 462 coupled to the spline shaft 461 is fixed to the cylinder body 45. Specifically, the outer circumferential surface of the spline nut 462 is coupled to the hollow hole 451 formed in the cylinder body 45. The spline shaft 461 coupled to the spline nut 462 has a load of the support pattern 2 transmitted through the link arm 43 through the spline nut 462 and the cylinder body 45. To be supported by In addition, by the rotation of the ball provided in the spline nut 462, the spline shaft 461 is capable of smoothly sliding with respect to the spline nut 462 while transmitting the load of the support pattern (2).

The combination of the cylinder body coupled to the side member and the ball spline fixed to the link arm can prevent the entire load of the support panel from being transmitted to the actuator. Therefore, it is possible to prevent the problem that the actuator is damaged by the sagging of the support panel or the vertical load applied to the actuator.

Furthermore, in order to increase the health of the driving unit, each shaft member connecting the link arm 43 and the side member 41 may be provided in plural. Specifically, the cylinder body 45 and the ball spline 46 are provided symmetrically on the upper and lower sides of the actuator 42, and the driving arms 44 are symmetrically disposed on the upper and lower sides of the cylinder body 45 and the ball spline 46, respectively. It may be provided.

The piston 422 of the actuator 42 is coupled to the center of the link arm 43, and the cylinder body 45 and the ball spline 46 described above are provided above and below the actuator 42, respectively. The driving arm 44 is provided on the upper and lower outer sides. This has a vertically symmetrical configuration based on the actuator.

In this case, a plurality of shaft members connect the side members and the link arms, thereby greatly increasing the health of the driving unit. In addition, the shaft member is provided symmetrically with respect to the actuator, thereby minimizing the rotation moment transmitted to the piston connected to the center of the link arm to prevent the actuator from failing. In addition, it is possible to increase the distance between the drive arm provided up and down, so that it is possible to stably support the support panel formed long up and down.

In addition, when the doorway 13 through which the large-size panel glass passes, the drive unit 4 with a plurality of shaft members as shown in the figure may be provided with a plurality of side members.

On the other hand, in order to seal the inside of the housing 1, the bellows 47 surrounding the through hole of the side member 41 through which the drive arm 44 passes may be further coupled. Specifically, the bellows 47 has one end coupled to the side member 41 in a shape surrounding the periphery of the through hole 411, and the other end is coupled around the drive arm 44. The bellows 47 may be formed of a corrugated pipe and may be stretched according to the movement of the driving arm.

In addition, as shown in Fig. 5, the drive from the front side of the side member 41 toward the support patch 2 in order to block the foreign matter generated in the interior of the housing 1 into the bellows 47. Wrapped around the arm 44 and is mounted to protrude around the blocking block 48 to block the intrusion of foreign matter into the through hole 411 against the side member 41, and the through hole 411 O-ring 49 may be further provided in contact with the blocking block 48.

Specifically, in order to mount the O-ring 49, a recessed groove 412 is formed in a circumference of the through hole 411 in a circle. The recessed groove 412 is formed to have a larger cross-sectional area toward the inside so that the inlet side of the recessed groove 412 is narrower than the diameter of the O-ring 49. In addition, since the depth of the recessed groove 412 is also formed to be shallower than the diameter of the O-ring 49, a portion of the O-ring 49 inserted into the recessed groove 412 protrudes from the surface of the side member 41 to block the block ( It is elastically deformed in contact with 48). Therefore, it is possible to block the inflow of foreign matter between the blocking block 48 and the surface of the side member 41. This can increase the life expectancy of the bellows.

5 shows a configuration in which the valve plate 3 protrudes from the support pattern 2. A flow path 441 for introducing or discharging air in the longitudinal direction is formed in the drive arm 44. In addition, inside the support pattern 2, a passage 21 in the vertical direction connected to the flow path 441 of the driving arm 44 is formed. The support pattern 2 is formed with a plurality of air chambers 22 communicating with the passage 21 and open toward the front of the support pattern 2. Each air chamber 22 is provided with a piston member 23 pushed outward by the air introduced. The valve plate 3 is mounted to the plurality of piston members 23.

Therefore, when air is positively applied to the drive arm 44, the valve plate 3 protrudes from the support plate 2 to shield the entrance 13, and when air is negatively applied to the drive arm 44, the valve plate 3 is applied. The door is moved to its original position to stop the doorway 13 shielding.

At this time, by adjusting the pressure of the air injected through the drive shaft it is possible to adjust the degree to press the entrance portion of the valve plate. That is, the control unit 6 measures the pressure of the air injected into the drive arm, and substitutes the measured injection pressure value into the pressurization relationship of the valve plate to the injection pressure value known in advance by the experiment to determine the pressure state of the valve plate. Can be calculated. Therefore, it is possible to control the supply pressure of air according to the pressing force of the valve plate required in accordance with the pressure state in the working chamber.

On the other hand, the side member 41 may be separated and moved in the housing 1 so that the support pattern 2 and the valve plate 3 are exposed.

To this end, the side member 41 may be provided with a sliding portion 5 to be separated from the housing to move in a direction away from the housing. In more detail, the sliding part may be an LM guide or a configuration having a rail and a slider. The sliding part may be formed in the same configuration above and below the side member, and the lower sliding part supporting the load may be provided with a plurality of LM guides in parallel.

The side member may release a coupling means such as a bolt that couples the side member and the front plate or the rear plate to be separated from the housing. The side member may then be moved to the side of the housing by the sliding portion. At this time, the moving length of the sliding part is formed long enough so that at least the support panel and the valve plate can be separated out of the housing.

As the side member is separated and moved from the housing as described above, the operator separates and exposes the housing without the hassle of separating the whole housing or using a separate hoist for mounting the support panel. The support panel and the valve plate can be accessed for convenient replacement and repair of parts such as O-rings.

Meanwhile, referring to FIGS. 8 and 9, first inclined blocks 24 are provided at both ends of the support patch 2, and inner surfaces of the housings 1 at both ends of the doorway 13 are provided at the first inclined blocks. A second inclination block 14 which is in contact with 14 is provided. The first slope block 24 and the second slope block 14 are supported by the support plate 2 which is pushed backward when the valve plate 3 of the support plate 2 presses the doorway 13 of the front plate 11. ) To prevent the rear plate 12 and the support pattern 2 from colliding with each other.

At this time, the second inclined block 14 has a contact surface 141 inclined downward toward the support patch 2 moving to the left toward the doorway 13, and the second inclined block 14 is in contact with the contact surface of the second inclined block 14. The contact surface 241 of the first inclined block 24 is formed to be inclined oppositely to correspond to the contact surface of the second inclined block 14. Accordingly, as shown in FIG. 9A, when the support pattern 2 moves toward the doorway 13, the first inclination block 24 does not collide with the side surface of the second inclination block 14. In addition, as shown in (b) of FIG. 9, when the valve plate 3 presses the doorway 13, the first inclination block 24 contacts the second inclination block 14 and the support pattern 2 is removed. To prevent contact with the housing.

On the other hand, when the inclined surface is formed parallel to the support panel, strict tolerances are required to prevent the first inclined block from interfering with the second inclined block when the support panel is moved, thereby increasing the manufacturing cost and increasing the probability of assembly failure. There is a disadvantage to be raised. By forming the contact surfaces of the first and second inclined blocks inclined as in the present invention, it is possible to alleviate the restriction of play between members due to assembly errors or tolerances.

Referring back to FIG. 8, when the valve plate 3 presses the doorway 13 of the front plate 11 as the support plate 2 is formed long up and down, the rear surface 2a of the support plate 2 is rearward. There is a risk of contact with the barrier plate 12. In order to solve this problem, a sealing member 25 facing the periphery of the doorway 13 is provided on the rear surface 2a of the support plate 2 in contact with the doorway 13 of the rear plate 12. At this time, the sealing member 25 may have a configuration such as an O-ring inserted into the recessed groove described above. By the sealing member and the first and second inclination blocks, the rear surface of the support panel does not contact the housing, thereby preventing wear of the support panel and the housing.

100: vacuum interrupter
1: housing
11 front plate 12 rear plate 13 doorway
14: second slope block 141: contact surface
2: support panel
21 passage 22 22 air chamber 23 piston member
24: first inclined block 241: contact surface 2a: rear surface 25: sealing member
3: valve plate
4: drive unit
41: side member 411: through hole 412: recessed groove
42: actuator 421: cylinder 422: piston
43: link arm 44: driving arm 441: flow path
45 cylinder body 451 hollow hole 46 ball spline
461: spline shaft 462: spline nut 47: bellows
48: blocking block 49: O-ring
5: sliding part
6:

Claims (9)

A housing having a vertical entrance having a long axis in a vertical direction,
A support panel movable in a left and right direction of the doorway in front of the housing,
A valve plate protruding from the support panel and shielding the entrance and exit;
Vertical vacuum interrupter comprising a drive unit for moving the support panel in the left and right directions. In claim 1,
The driving unit
Side member.
An actuator coupled to the side member,
A link arm connected to the actuator and moving in a left and right direction, and
One end is fixed to the link arm, and penetrates through the side member, the other end comprises a drive arm fixed to the support panel. In claim 2,
The driving unit
Is coupled to the side member and the cylinder body,
One end of the spline shaft is fixed to the link arm, and the spline nut coupled to the spline shaft further comprises a ball spline fixed to the cylinder body. 4. The method of claim 3,
The drive unit
The cylinder body and the ball spline are provided above and below the actuator, respectively.
Vertical vacuum cut-off device is provided with the driving arm on the upper and lower sides of the cylinder body and the ball spline. In claim 2,
The drive unit
Bellows surrounding the periphery of the through hole of the side member through which the drive arm passes,
Blocking block for enclosing the drive arm in the front side of the side member facing the support panel and blocking the intrusion of foreign matter into the through hole against the side member, And
It is mounted around the through-hole, the vertical vacuum cut-off device including an O-ring a part protruding in contact with the blocking block. In claim 2,
The side member is
And a vertical vacuum cut-off device movable from the housing so that the support panel and the valve plate are exposed. The method of claim 6,
Movement of the side member relative to the housing is made by sliding parts mounted above and below the side member,
The sliding part
Sliders mounted on the top and bottom of the side member, And
And a slider to which the slider is slidably coupled, the rail being formed in a lateral direction with respect to the housing. In claim 1,
First inclined blocks are provided at both ends of the support panel,
On the inner surface of the housing of both ends of the doorway is provided a second inclined block which is in contact with the first inclined block,
The second inclined block has a contact surface inclined toward the support panel facing the doorway,
The contact surface of the first inclined block is in contact with the contact surface of the second inclined block is a vertical vacuum blocking device is formed to be inclined opposite to the second inclined block. In claim 1,
The housing includes a front face and a rear face having entrances formed at opposite locations, respectively, and the support panel is movable left and right between the front face and the rear face, and the entrance and exit of the front plate is shielded by the valve plate. Become,
And a sealing member facing the periphery of the doorway protrudes from a rear surface of the support panel in contact with the doorway of the rear plate.

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