KR101270102B1 - Carbon dioxide injection apparatus and method - Google Patents

Abstract

The present invention relates to a carbon dioxide injection device and an injection method, the case in which the inlet and outlet ports for water is introduced and discharged in front and rear, respectively, the venturi portion installed in the case and the capillary tube provided in the venturi portion It is connected to provide a configuration including an injection unit for injecting carbon dioxide at a predetermined pressure to the water flowing through the capillary tube.
By using the carbon dioxide injection device and the injection method as described above, the present invention injects carbon dioxide into the water moving along the capillary of the venturi portion and dissolves the carbon dioxide in water using the diffusion principle of water to discharge the water in the uninterrupted state.

Description

CO2 injection device and injection method {CARBON DIOXIDE INJECTION APPARATUS AND METHOD}

The present invention relates to a carbon dioxide injection device and an injection method, and more particularly, to make pure or ultrapure water used for cleaning semiconductors or panels in an uninterruptible state in a semiconductor or panel manufacturing process. A carbon dioxide injection apparatus and an injection method for injecting carbon dioxide.

In general, during a panel manufacturing process such as a semiconductor, a liquid crystal display (LCD), or a plasma display panel (PDP), a liquid (pure or ultrapure) is used to clean a semiconductor or a panel. have.

The reason why pure water or ultrapure water is used is that the conductivity of the liquid is high and the electrical conductivity is very low. Therefore, after cleaning the semiconductor or the panel by applying a semi-interruptible state using pure or ultrapure water, the foreign matter is reattached to the semiconductor or the panel. You can prevent it.

However, pure water or ultrapure water is not a perfect uninterrupted state, so a defect occurs in the cleaning process.

Therefore, in order to reduce the defects caused by the reattachment of foreign matter after the cleaning operation, a technique of performing the cleaning process using an uninterrupted solution in which carbon dioxide is dissolved in pure water or ultrapure water has been used.

1 is a configuration diagram of a carbon dioxide dissolving device for dissolving carbon dioxide in pure water or ultrapure water according to the related art.

As shown in FIG. 1, the conventional carbon dioxide dissolving device incorporates a hollow fiber filter 2 inside a case 1 made of stainless steel, and then, inside the hollow fiber membrane filter 2. Water flows and pressurizes carbon dioxide (CO ₂ ) from the outside of the hollow fiber membrane filter (2), so that carbon dioxide penetrates into the hollow fiber membrane filter (2) through the pores of the hollow fiber membrane and microbubbles it into the water. Allow to dissolve (H ₂ O + CO ₂ → H ₂ CO ₃ ).

Here, the pores formed in the hollow fiber membrane has a diameter of about 0.5mm.

In the conventional carbon dioxide dissolving device configured as described above, when scale is generated inside the hollow fiber membrane in the process of dissolving carbon dioxide in pure water or ultrapure water using the hollow fiber membrane, the flow of water is disturbed.

Accordingly, the conventional carbon dioxide dissolving apparatus that dissolves carbon dioxide in pure water or ultrapure water using a hollow fiber membrane has to increase the cost and time required for maintenance as the hollow fiber membrane must be periodically replaced so that water can flow smoothly. there was.

In addition, since the hollow fiber of the hollow fiber membrane filter is leaked to the outside, the conventional carbon dioxide dissolving device has to be provided with a drain for discharging the leaked hollow fiber, the structure is complicated, and the work of the assembly work increases and the workability is deteriorated. There is a problem that the manufacturing cost increases due to the increase in the number of parts.

The present invention is to solve the problems described above, an object of the present invention is to provide a carbon dioxide injection device and an injection method for dissolving carbon dioxide in pure water or ultrapure water used in the semiconductor or panel cleaning process to produce an uninterrupted solution To provide.

It is another object of the present invention to provide a carbon dioxide injection apparatus and an injection method which can easily prepare an uninterruptible solution in which carbon dioxide is completely dissolved.

Still another object of the present invention is to provide a carbon dioxide injection apparatus and an injection method capable of injecting carbon dioxide by removing a drain and using a simple structure.

According to a feature of the present invention for achieving the object as described above, the present invention is a case in which the inlet and outlet ports are formed in the front and rear, respectively, the inlet and outlet, the venturi portion and the ben installed inside the case It is connected to the capillary tube provided in the turing portion includes an injection unit for injecting carbon dioxide at a predetermined pressure to the water flowing through the capillary tube.

The venturi portion is a capillary tube having a diameter and a length that are preset to increase a flow velocity of water transferred through the first inclined portion, the first inclined portion is formed to gradually decrease in diameter to increase the flow rate of the water introduced through the inlet port And a second inclined portion having one side connected to the capillary and gradually increasing in diameter.

The case is coupled to the upper and lower openings of the cylindrical portion, the first and second covers coupled to the front and rear ends of the cylindrical portion, and the upper and lower sides to form an annular shape to combine the first and second cover and the cylindrical portion It includes a member, the front and rear ends of the cylindrical portion, the rear end of the first cover and the front outer peripheral surface of the second cover is characterized in that the protruding annulus corresponding to the groove formed in the inner peripheral surface of the upper and lower coupling members is formed.

The grooves of the upper and lower coupling members are inclined obliquely toward the front and rear, and the protruding annulus is formed obliquely inclined toward the front or the rear.

The injection portion is characterized in that it comprises an injection pipe connected to the capillary tube and a socket coupled to the upper end of the injection pipe and coupled with a pipe or hose for supplying carbon dioxide.

According to another feature of the invention, the present invention comprises the steps of (a) introducing water of a predetermined pressure and flow rate through the inlet into the case, (b) the agent formed to gradually decrease the diameter of the water introduced into the case Moving through the first inclined portion to increase the flow rate of water, (c) injecting carbon dioxide into the capillary connected to the first inclined portion, and (d) gradually increasing the diameter of the water injected with carbon dioxide in the (c) step. Displacing carbon dioxide in water using a diffusion principle of water by moving through the second inclined portion.

Water in which carbon dioxide is dissolved in step (d) is characterized in that it is in an uninterrupted state.

As described above, the present invention injects carbon dioxide into water moving along the capillary of the venturi portion, and dissolves the carbon dioxide in water using the diffusion principle of water to discharge the water in the uninterrupted state.

According to the experimental results, the present invention provides an uninterrupted water having a specific resistance of about 0.068 to 0.078 dl / cm by injecting carbon dioxide, thereby performing the cleaning process of the semiconductor or panel using the uninterrupted water according to the present invention. In this case, it is possible to prevent foreign matter from reattaching to the semiconductor or the panel.

In the present invention, the specific resistance of water, the pressure into which water is introduced, and the pressure into which carbon dioxide is injected are set in advance by theoretical calculations, and the water can be introduced in accordance with the setting to completely dissolve carbon dioxide in water according to the principle of water diffusion in the capillary. have.

In addition, the present invention has a simple structure compared to the prior art using a hollow fiber membrane filter, and does not require maintenance work such as replacement of the hollow fiber membrane filter, thereby reducing the economic, time and human cost required for maintenance.

1 is a block diagram of a carbon dioxide dissolving device according to the prior art.
2 is a block diagram of a carbon dioxide injection apparatus according to a preferred embodiment of the present invention.
Figure 3 is a graph of the results of pressure drop by inner diameter of the capillary tube.
Figure 4 is a flow chart illustrating a step-by-step method of injecting a carbon dioxide injection apparatus according to an embodiment of the present invention.

Hereinafter, a carbon dioxide injection apparatus according to a preferred embodiment of the present invention will be described in detail with reference to the accompanying drawings.

2 is a block diagram of a carbon dioxide injection apparatus according to a preferred embodiment of the present invention.

As shown in FIG. 2, the carbon dioxide injecting apparatus according to the preferred embodiment of the present invention has a cylindrical shape, and a case 10 having an inlet 14 and an outlet 15 through which water is introduced and discharged in front and rear ends, respectively. ), The carbon dioxide is injected into the water flowing through the capillary tube 21 at a predetermined pressure connected to the venturi portion 20 installed in the case 10 and the capillary tube 21 provided on the venturi portion 20. It includes an injection unit 30 to.

In the present embodiment, for convenience of description, the direction in which the inlet 14 is formed is referred to as 'front', and the direction in which the outlet 15 is formed is referred to as 'rear' when viewed in FIG. 2.

The case 10 is coupled to the cylindrical portion 11 having the front and rear openings, the first and second covers 12 and 13 coupled to the front and rear ends of the cylindrical portion 11, and to be annular in the upper and lower sides. Upper and lower coupling members (16, 17) for coupling the second cover (12, 13) and the cylindrical portion (11).

To this end, protruding annulus corresponding to the grooves formed on the inner circumferential surfaces of the upper and lower coupling members 16 and 17 on the front and rear ends of the cylindrical portion 11, the rear end of the first cover 12 and the front outer peripheral surfaces of the second cover 13. 18 is formed.

The grooves of the upper and lower coupling members 16 and 17 are formed obliquely inclined toward the front and rear, and the protruding annulus 18 is formed obliquely inclined toward the front or the rear.

An inlet 14 through which water is introduced is formed at the front end of the first cover 17, and an outlet 15 through which water is discharged is formed at the rear end of the second cover 13.

Here, the water is purified water such as pure water or ultrapure distilled water (Delonized Water, DIW, deionized water), in this embodiment, ultrapure distilled water having a specific resistance of about 18 kW / cm is used.

Water enters the inlet 14 at a temperature of about 25 ° C. at a predetermined pressure, ie, a pressure of about 2-3 kgf / cm 2.

The venturi portion 20 is formed to have a diameter and a length set in advance so as to increase the flow rate of the water transmitted through the first slope portion 21 and the first slope portion 21 to decrease the pressure and decrease the pressure. Capillary tube 22 and one side is connected to the rear end of the capillary tube 22 includes a second inclined portion 23 is formed to gradually increase in diameter.

The venturi portion 20 increases the flow rate of water according to the diffusion principle of water, and then, when carbon dioxide is injected from the injection portion 30, decreases the flow rate of water again to destabilize water molecules so that carbon dioxide is naturally mixed with water and dissolved. .

To this end, the venturi portion 20 gently forms an inclination of the first inclination portion 21 to gently increase and rapidly lower the flow velocity of water flowing therein, and sets the inclination angle of the second inclination portion 23. It is formed rapidly by making it larger than the inclination angle of the one inclination part 21.

For example, the first inclined portion 21 is formed at an inclination of about 26 degrees, and the second inclined portion 23 is formed at an inclination of about 55 degrees.

The capillary tube 22 is formed to have an inner diameter of about 10 mm or 15 mm and a length of about 30 mm.

For example, Table 1 is a pressure drop test results table by the inner diameter of the capillary tube, Figure 3 is a graph of the test results in Table 1.

Flow rate (lpm) Pressure drop (psi) Inner diameter (Φ) 10mm Inner diameter (Φ) 15mm 10 2.4 0.3 15 5.5 0.6 20 9.5 1.1 25 16.9 1.8 30 25.6 2.6 35 34.5 3.4 40 - 4.5 45 - 6.0 50 - 7.2 55 - 9.1 60 - 11.3 65 - 12.8

As shown in Table 1 and Figure 3, when the inner diameter of the capillary tube 22 is 10mm, the capillary tube in the present embodiment because the pressure drop increases very rapidly as the flow rate flowing through the capillary tube 22 gradually increases It is preferably formed with an inner diameter of about 15 mm.

As shown in FIG. 2, the injection part 30 is connected to the upper end of the injection pipe 31 and the injection pipe 31 connected to the capillary tube 22, and a socket 32 coupled to a pipe or a hose supplying carbon dioxide. ).

In this embodiment, the carbon dioxide is injected into the capillary through the injection portion at a pressure of about 3kgf / ㎠ and a flow rate of about 2LPM.

As described above, the present invention presets the specific resistance of water, the pressure into which water is introduced, and the pressure into which carbon dioxide is injected by theoretical calculation. Let's do it.

Next, a method of injecting a carbon dioxide injection apparatus according to a preferred embodiment of the present invention will be described in detail with reference to FIG. 4.

4 is a flowchart illustrating a step-by-step injection method of the carbon dioxide injection device according to an embodiment of the present invention.

As shown in FIG. 4, inside the case 10 of the carbon dioxide injecting apparatus of the present invention, the purified water, such as ultrapure water distilled water, is pre-set at a pressure of about 2-3 2-3 kgf / cm 2 through the inlet 14. Inflow to (S10).

As such, the water flowing into the case 10 gradually increases in flow velocity while passing through the first inclined portion 21 and the capillary tube 22 formed to have a smaller diameter.

At this time, the carbon dioxide is injected into the capillary tube 22 at a preset pressure of about 3 kgf / cm 2 and a flow rate of about 2 LPM through the injection part 30 (S11).

Then, the water and carbon dioxide is moved to the second inclined portion 23 connected to the capillary tube 22.

At this time, as the second inclined portion 23 is formed at an inclination angle of about 55 ° so as to rapidly increase in diameter, the water molecules are in a chemically unstable state due to the rapid expansion of the flow path.

Accordingly, the carbon dioxide moved to the second inclined portion 23 is microbubble while forming ultra-fine bubbles of 5 μm or less and naturally mixed between water molecules to be dissolved (S12).

As such, the water in which carbon dioxide is dissolved is discharged through the discharge port 15 and used for the cleaning process of the semiconductor or the panel.

Table 2 is a table of the experimental results of measuring the specific resistance (resistivilty) of water in which carbon dioxide is dissolved according to the carbon dioxide injection device and the injection method according to a preferred embodiment of the present invention.

division Specific resistance of water in which carbon dioxide is dissolved (㏁ / ㎝) Primary Secondary Third Fourth 5th Before CO2 injection 17.60 17.58 17.52 17.61 17.53 After CO2 injection 0.078 0.077 0.068 0.078 0.070

Here, the experimental results of Table 2 shows that the specific resistance is 18 ㏁ / ㎝ or more and 25 ° C room temperature ultra pure distilled water at a pressure of about 2 ~ 3 kgf / ㎠, carbon dioxide is about 3 kgf / ㎠ pressure and 2 LPM Injected at the flow rate of the result of the experiment over five times.

As can be seen from Table 2, the present invention provides an uninterrupted water having a specific resistance of about 0.068 to 0.078 dl / cm by injecting carbon dioxide.

Accordingly, when the cleaning process of the semiconductor or the panel is performed using the uninterruptible water according to the present invention, it is possible to prevent the foreign matter from reattaching to the semiconductor or the panel.

Through the above process, the present invention injects carbon dioxide into the water moving along the capillary of the venturi portion to dissolve the carbon dioxide in water using the diffusion principle of water to discharge the water in the uninterrupted state.

Although the present invention has been described in detail with reference to the above embodiments, it is needless to say that the present invention is not limited to the above-described embodiments, and various modifications may be made without departing from the spirit of the present invention.

10: case 11: cylindrical part
12,13: first and second cover 14: inlet
15: outlet 16, 17: upper and lower coupling member
18: protrusion projection 20: venturi part
21: first slope 22: capillary tube
23: second inclined portion 30: injection portion
31: injection tube 32: socket

Claims (7)

Cases in which the inlet and outlet ports are formed at the front and rear ends, respectively,
Venturi portion is installed inside the case and
It is connected to the capillary tube provided in the venturi portion includes an injection unit for injecting carbon dioxide at a predetermined pressure to the water flowing through the capillary tube,
The venturi portion is a first inclined portion is formed to gradually decrease in diameter to increase the flow rate of water introduced through the inlet,
A capillary tube having a predetermined diameter and length to increase the flow rate of water delivered through the first inclined portion;
One side is connected to the capillary and includes a second inclined portion formed to gradually increase in diameter,
Water in which carbon dioxide is dissolved in the venturi part is in an uninterrupted state to be used as washing water of a semiconductor or a panel.
The inclination angle of the second inclined portion is larger than the inclination angle of the first inclined portion carbon dioxide injection apparatus. delete The method of claim 1,
The case is a cylindrical portion that is opened front and rear,
First and second covers coupled to front and rear ends of the cylindrical portion;
It is coupled to the upper and lower sides in an annular shape includes an upper and lower coupling member for coupling the first and second cover and the cylindrical portion,
The front and rear ends of the cylindrical portion, the rear end of the first cover and the front outer peripheral surface of the second cover of the carbon dioxide injection device, characterized in that the protrusion corresponding to the groove formed in the inner peripheral surface of the upper and lower coupling members. The method of claim 3, wherein
The grooves of the upper and lower coupling members are inclined obliquely toward the front and rear,
The protruding annulus is a carbon dioxide injection device, characterized in that formed obliquely toward the front or rear. The method of claim 3, wherein the injection portion
An injection tube connected to the capillary tube
Carbon dioxide injection device characterized in that it is connected to the upper end of the injection pipe and the socket coupled to the pipe or hose for supplying carbon dioxide. (a) introducing water at a predetermined pressure and flow rate through the inlet into the case;
(b) increasing the flow rate of water by moving the water introduced into the case through a first inclined portion having a smaller diameter;
(c) injecting carbon dioxide into the capillary connected to the first inclined portion;
(d) dissolving carbon dioxide in the water by moving the water injected with carbon dioxide in the step (c) through a second slope formed to gradually increase in diameter,
In step (d), the water flows through the second inclined part which is larger than the inclination angle of the first inclined part, and the flow rate is decreased to dissolve the carbon dioxide injected in the step (c) using the diffusion principle of water.
The carbon dioxide-dissolved water is a carbon dioxide injection method, characterized in that the uninterrupted state to use as the wash water of the conductor or panel.
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