KR101265189B1 - Method for cleaning gas to be treated - Google Patents

Method for cleaning gas to be treated Download PDF

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KR101265189B1
KR101265189B1 KR1020100086340A KR20100086340A KR101265189B1 KR 101265189 B1 KR101265189 B1 KR 101265189B1 KR 1020100086340 A KR1020100086340 A KR 1020100086340A KR 20100086340 A KR20100086340 A KR 20100086340A KR 101265189 B1 KR101265189 B1 KR 101265189B1
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KR20110025623A (en
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신이치 나카무라
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가부시키가이샤 오메가
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    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01D—SEPARATION
    • B01D53/00—Separation of gases or vapours; Recovering vapours of volatile solvents from gases; Chemical or biological purification of waste gases, e.g. engine exhaust gases, smoke, fumes, flue gases, aerosols
    • B01D53/34—Chemical or biological purification of waste gases
    • B01D53/74—General processes for purification of waste gases; Apparatus or devices specially adapted therefor
    • B01D53/77—Liquid phase processes
    • B01D53/78—Liquid phase processes with gas-liquid contact
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01D—SEPARATION
    • B01D2257/00—Components to be removed
    • B01D2257/70—Organic compounds not provided for in groups B01D2257/00 - B01D2257/602
    • B01D2257/702—Hydrocarbons
    • B01D2257/7027—Aromatic hydrocarbons
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01D—SEPARATION
    • B01D2257/00—Components to be removed
    • B01D2257/70—Organic compounds not provided for in groups B01D2257/00 - B01D2257/602
    • B01D2257/708—Volatile organic compounds V.O.C.'s
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01D—SEPARATION
    • B01D2258/00—Sources of waste gases
    • B01D2258/02—Other waste gases
    • B01D2258/0216—Other waste gases from CVD treatment or semi-conductor manufacturing

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Abstract

본 발명은 함유 오염성분을 종래보다도 더 제거할 수 있는 피처리가스의 정화방법을 제공하고자 하는 것이다.
공급되어 오는 피처리가스를 압축하는 압축공정과, 압축된 상기 피처리가스를 미세 기포로서 전해수중으로 불어넣는 기액접촉공정, 및 상기 압축공정과 기액접촉공정 사이에, 압축된 피처리가스를 탄화하는 가열공정을 갖는 것을 특징으로 한다. It is an object of the present invention to provide a method for purifying a gas to be treated, which can remove the contained contaminant more conventionally.
A compression step of compressing the supplied target gas, a gas-liquid contact step of blowing the compressed target gas into electrolytic water as fine bubbles, and carbonization of the compressed target gas between the compression step and the gas-liquid contact step It is characterized by having a heating step.

Description

피처리가스의 정화방법 {Method for cleaning gas to be treated}Method for cleaning gas to be treated

본 발명은 톨루엔, 자일렌 그 밖의 VOC가스 기타 피처리가스의 정화방법에 관한 것이다.
The present invention relates to a method for purifying toluene, xylene and other VOC gases and other target gases.

종래, 반도체공장이나 액정공장에서의 휘발성 유기화합물 등의 유기화합물을 함유하는 배기가스를 처리하는 배기가스 처리장치의 출원이 있으며, 다음과 같은 내용이 기재되어 있었다(특허문헌1).Conventionally, there is an application for an exhaust gas treating apparatus for treating exhaust gas containing organic compounds such as volatile organic compounds in a semiconductor factory or a liquid crystal factory, and the following contents have been described (Patent Document 1).

즉, 반도체공장이나 액정공장에서의 휘발성 유기화합물 함유 배기가스를 처리하는 방법으로서, (1)활성탄에 의한 흡착법, (2)배기가스를 공기와 혼합하여서 직접적으로 연소시키는 직접연소법, (3)물, 산, 알칼리용액 등의 액체에 대상으로 하는 가스를 흡수시키는 방법이 채용되고 있는바, 본 출원은 배기가스 중의 휘발성 유기 화합물을 적은 에너지로 효율적으로 분해할 수 있으면서 초기비용 및 운영비용을 저감할 수 있는 배기가스 처리장치를 제공하기 위해 휘발성 유기화합물을 함유하는 배기가스를 세정수에 접촉시켜서 상기 배기가스 중의 휘발성 유기화합물을 상기 세정수에 흡수, 이행시키는 스크러버부와, 상기 스크러버부에서 도입되는 세정수에 산소를 용존시키면서 동시에 나노 버블을 함유시키는 용존 산소 조정부와, 상기 용존 산소 조정부에서 상기 나노 버블을 함유한 세정수가 도입되면서 이 세정수가 함유한 휘발성 유기화합물을 나노 버블로 활성화한 호기성 미생물로 분해처리하고, 이 분해 처리한 세정수를 상기 스크러버부로 반송하는 활성탄 흡착탑과, 상기 활성탄 흡착탑에서 처리된 세정수가 도입되면서 이 세정수의 용존 산소농도 또는 총유기탄소농도 중 적어도 한쪽을 측정하는 측정부와, 상기 측정부가 측정한 상기 세정수의 용존 산소농도 또는 총유기탄소농도 중 적어도 한쪽에 의거하여 상기 용존 산소 조정부의 운전을 제어하는 제어부를 구비하고 있는 것이다.That is, a method of treating exhaust gas containing volatile organic compounds in a semiconductor factory or a liquid crystal factory, comprising: (1) an adsorption method using activated carbon, (2) a direct combustion method in which exhaust gas is directly mixed with air, and (3) water. A method of absorbing a target gas into a liquid such as an acid, an alkaline solution, and the like has been adopted. The present application can efficiently decompose volatile organic compounds in exhaust gas with low energy while reducing initial and operating costs. In order to provide an exhaust gas treatment apparatus capable of providing a waste gas treatment apparatus, a scrubber portion for absorbing and transferring the volatile organic compounds in the exhaust gas into the washing water by contacting the exhaust gas containing the volatile organic compound with the washing water, A dissolved oxygen adjusting unit for dissolving oxygen in the washing water and simultaneously containing nano bubbles; and the dissolved oxygen tank The activated carbon adsorption tower which decomposes the volatile organic compound containing the washing water into the aerobic microorganism activated by the nanobubble while introducing the washing water containing the nanobubble, and returns the decomposed washing water to the scrubber unit, and At least one of a measuring unit for measuring at least one of dissolved oxygen concentration or total organic carbon concentration of the washing water while the washing water treated in the activated carbon adsorption column is introduced, and at least one of the dissolved oxygen concentration or total organic carbon concentration measured by the measuring unit. It is provided with the control part which controls the operation of the said dissolved oxygen adjustment part based on one side.

그러나 휘발성 유기 화합물 등의 유기화합물(오염성분 함유)은 배기가스에서세정수로 충분하게는 이행되지 못하는 문제가 있었다.
However, organic compounds such as volatile organic compounds (containing contaminants) have a problem that they cannot be sufficiently transferred to the washing water in the exhaust gas.

일본특허공개공보 제2009-165992호Japanese Patent Publication No. 2009-165992

여기서, 본 발명은 함유된 오염성분을 종래보다도 더 제거할 수 있는 피처리 가스의 정화방법을 제공하고자 하는 것이다.
It is an object of the present invention to provide a method for purifying a gas to be treated which can further remove the contaminated component contained therein.

상기 과제를 해결하기 위해 본 발명에서는 다음과 같은 기술적 수단을 강구하였다. In order to solve the above problems, the present invention takes the following technical means.

(1)이 피처리 가스의 정화방법은, 공급되어 오는 피처리가스를 압축하는 압축공정과, 압축된 상기 피처리가스를 미세 기포로서 전해수중으로 불어넣는 기액(氣液)접촉공정을 갖는 것을 특징으로 한다. (1) The method for purifying a target gas includes a compression step of compressing the supplied target gas and a gas-liquid contact step of blowing the compressed target gas into electrolytic water as fine bubbles. It features.

삭제delete

또한 피처리가스의 미세 기포는 단순한 물이 아니고 전해수중으로 불어넣도록 하였기 때문에 액중에 용해된 함유 오염성분(휘발성 유기화합물)은 전기분해에 의해 액중에 생성된 산화성 물질(·OH라디칼이나 유효염소 등)에 의해 분해되어 가게 된다. In addition, since the fine bubbles of the gas to be treated are not simply water but blown into the electrolytic water, the contaminants (volatile organic compounds) dissolved in the liquid are oxidative substances (.OH radicals or effective chlorine) generated in the liquid by electrolysis. And so on).

여기서, 상기 압축공정에서는 피처리가스의 단면적이 축소되도록 강제적으로 밀어넣도록(압입한다) 하여도 좋다. 또한 압축된 피처리가스를 전해수중으로 불어 넣을 때에 산기관을 사용해도 된다. Here, in the compression step, the cross section of the gas to be processed may be forcibly pushed in (press-in). In addition, an acid pipe may be used to blow the compressed gas into electrolytic water.

이와 같이 하여서 피처리가스의 미세기포가 전해수중으로 불어 넣어져서 그 함유 오염성분이 액중에 용해되어 분리·분해·제거된 후의 청정한 기체가 전해수로부터 방출되게 된다.
In this way, fine bubbles of the gas to be treated are blown into the electrolyzed water so that the polluting component thereof is dissolved in the liquid, and the clean gas after separation, decomposition and removal is released from the electrolyzed water.

(2)상기 압축공정과 기액접촉공정 사이에, 압축된 피처리가스를 탄화하는 가열공정을 갖도록 구성하여도 좋다. (2) Between the compression step and the gas-liquid contact step, a heating step of carbonizing the compressed target gas may be provided.

이와 같이 구성하면, 피처리가스가 VOC가스인 경우, 함유 오염성분인 휘발성유기화합물이 탄화(예를 들면, 600∼700℃로 가열한다)된 상태에서 전해수로 불어넣어지게 되고, 휘발성 유기화합물이 소수성이라 해도 액중에서 취급되기 쉬운 것이 되면서 미탄화로 잔류된 휘발성 유기화합물만을 전해수중의 산화물질로 분해하면 충분하게 된다. In this configuration, when the gas to be treated is a VOC gas, the volatile organic compound, which is a contaminating component, is blown into the electrolyzed water in the state of being carbonized (for example, heated to 600 to 700 ° C.). Even in the case of hydrophobicity, it becomes easy to handle in the liquid, and it is sufficient to decompose only volatile organic compounds remaining by uncarbonization into oxides in electrolytic water.

여기서, 가열하기 위한 수단으로서 VOC가스의 배관 주위를 전기히터로 돌려감거나, 내열성 오일을 순환시키거나, 증기배관을 설치하거나 할 수 있다. Here, as a means for heating, it is possible to turn around the piping of the VOC gas with an electric heater, circulate heat resistant oil, or provide a steam pipe.

또한 가열할 존(영역)에 불활성 가스를 공급함에 따라 산소농도를 저감하도록 할 수 있으며, 상기 불활성 가스로서 예를 들면 질소가스를 사용할 수 있다.
In addition, the oxygen concentration can be reduced by supplying an inert gas to a zone (region) to be heated, and for example, nitrogen gas can be used as the inert gas.

본 발명은 상술한 바와 같은 구성으로 이루어져 다음과 같은 효과를 갖는다. The present invention is configured as described above and has the following effects.

함유 오염성분을 종래보다도 더 제거할 수 있는 피처리 가스의 정화방법을 제공할 수 있다.
The purification method of the to-be-processed gas which can remove a containing contaminant further than before can be provided.

도1은 본 발명의 피처리가스의 정화방법의 실시형태를 설명하는 시스템·흐름도이다. 1 is a system flow diagram illustrating an embodiment of a method for purifying a gas to be processed according to the present invention.

이하, 본 발명의 실시형태를 설명한다. Hereinafter, embodiments of the present invention will be described.

(1)이 실시형태에서는 피처리가스로서 화학공장에서 농약제조시에 나오는 VOC가스를 처리하였다. 이 VOC가스에는 디클로로에틸렌, N,N-디메틸포름아미드, 디메틸에테르, 개미산 메틸, 에틸알코올, 메톡시아세트산, 디메틸 설피드 보레인(Dimethyl sulfideborane), 개미산 에틸, 트리메틸아민, 클로로포름, 1,2-디클로로메탄, 시클로헥산, 톨루엔이 함유되어 있다.(1) In this embodiment, the VOC gas which comes out at the time of manufacture of an agricultural chemical in a chemical plant was processed as to-be-processed gas. Dichloroethylene, N, N-dimethylformamide, dimethyl ether, formic acid methyl, ethyl alcohol, methoxyacetic acid, dimethyl sulfideborane, ethyl formic acid, trimethylamine, chloroform, 1,2- Dichloromethane, cyclohexane, toluene.

도1에서 나타내는 바와 같이, 피처리가스의 정화방법은 화학공장의 각 시스템(계통)에서 보내어져 오는 VOC가스를 우선 전처리장치(1)에서 스크린을 이용하여 입자를 여과하고, 이어서 팬에 의해 승압펌프(2)로 압축하는 압축공정으로 보낸다. 그리고, 압축된 상기 피처리가스를 미세 기포로 해서 전해수조(3)의 전해수중으로 불어넣는(에어레이션) 기액(氣液)접촉공정을 갖도록 한다. 또한 압축공정과 기액접촉공정 사이에 탄화장치(4)(후술)를 개재시킨다. As shown in Fig. 1, in the method for purifying the gas to be treated, VOC gas sent from each system (system) of the chemical plant is first filtered through the screen by the screen in the pretreatment apparatus 1, and then boosted by a fan. It is sent to the compression process to compress with the pump (2). Then, the compressed gas to be treated has fine gas bubbles, and a gas-liquid contact step of blowing (aeration) into the electrolyzed water of the electrolytic water tank 3 is provided. In addition, the carbonization device 4 (described later) is interposed between the compression step and the gas-liquid contact step.

상기 압축공정에서는 승압펌프(예를 들면, 루트·펌프)를 이용하여서 피처리가스의 단면적이 축소하도록 강제적으로 밀어넣도록(압입한다) 한다. 또한 압축된 피처리가스를 전해수중으로 불어넣을 때에 산기관(디퓨저)(5)을 사용한다. In the compression step, a boost pump (for example, a root pump) is used to forcibly push (press in) the cross-sectional area of the gas to be processed. In addition, an diffuser 5 is used to blow the compressed gas into electrolytic water.

상기 전해수는 10%농도의 식염수를 저류하는 전해액조(6)에서 펌프(P)로 식염수를 전해장치(7)로 공급하고, 이 전해장치(7)에서 무격막으로 전기분해함으로써 생성시키도록 한다. 또한, 상기 전해장치(7)와 전해수조(3)는 펌프P에 의해 순환시키도록 하며, 전해수조(3)에는 항상 신선한 전해수가 공급되도록 한다. The electrolyzed water is produced by supplying the saline solution to the electrolyzer 7 by the pump P in the electrolytic solution 6 storing the saline solution of 10% concentration, and electrolyzing the electrolyzer into the non-diaphragm in the electrolyzer 7. . In addition, the electrolytic apparatus 7 and the electrolytic water tank 3 are circulated by the pump P, and the electrolytic water tank 3 is always supplied with fresh electrolytic water.

이어서 본 실시형태의 피처리가스의 정화방법의 사용상태를 설명한다. Next, the use state of the purification method of the to-be-processed gas of this embodiment is demonstrated.

피처리가스의 미세 기포는 단순한 물이 아니고 전해수 중으로 불어넣도록 하였기 때문에 액중에 용해된 함유 오염성분은 전기분해에 의해 액중에 생성된 산화성 물질(·OH라디컬이나 유효 염소 등)에 의해 분해되어 가게 된다. Since the microbubbles of the gas to be treated are not simply water but blown into the electrolyzed water, the contaminants dissolved in the liquid are decomposed by oxidizing substances (.OH radicals, effective chlorine, etc.) generated in the liquid by electrolysis. I will go.

삭제delete

이와 같이 하여서 피처리가스의 미세 기포가 전해수중으로 불어넣어져 그 함유 오염성분이 액중에 용해되어 분리·분해·제거된 후의 청정한 기체가 전해수로부터 방출되게 된다.
In this way, fine bubbles of the gas to be treated are blown into the electrolyzed water so that the polluting component thereof is dissolved in the liquid, and clean gas is released from the electrolyzed water after separation, decomposition and removal.

(2)상기 압축공정과 기액접촉공정 사이에, 압축된 피처리가스를 탄화하는 가열공정(600∼700℃로 가열)을 갖도록 한다. 이를 위한 탄화장치(4)에서는 가열수단으로서 VOC가스의 배관(8)의 주위를 전기히터(9)로 감아 돌린 구조를 채용했는데, 내열성의 오일을 순환시키거나 증기배관을 설치하거나 할 수도 있다(미도시). 탄화장치(4)를 나온 후에 피처리가스는 일단 점차 직경이 줄어드는 부분(16)을 거친 후 배관을 통하여 산기관(5)으로 보내지도록 한다. 탄화물은 처리 종료후에 회수(10)하도록 하였다. 가열된 피처리가스는 미세 기포로서 전해수조(3)중에 용존되어 있을 때에 냉각되게 된다. (2) Between the compression step and the gas-liquid contact step, a heating step (heating at 600 to 700 ° C.) for carbonizing the compressed target gas is performed. The carbonization apparatus 4 for this purpose employs a structure in which the periphery of the pipe 8 of the VOC gas is wound around the electric heater 9 as a heating means, and the heat resistant oil can be circulated or a steam pipe can be installed ( Not shown). After exiting the carbonization device 4, the gas to be treated is once passed through the portion 16, which gradually decreases in diameter, and then sent to the diffuser 5 through the pipe. Carbide was recovered 10 after the end of the treatment. The heated target gas is cooled when it is dissolved in the electrolytic water tank 3 as microbubbles.

이와 같이 구성하였기 때문에 피처리가스가 VOC가스인 경우, 함유 오염성분인 휘발성 유기화합물이 탄화된 상태에서 전해수로 불어 넣어지게 되며, 휘발성 유기화합물이 소수성이라 하더라도 액중에 쉽게 취급되는 물질로 되면서 미탄화로 잔류된 휘발성 유기화합물만을 전해수중의 산화물질로 분해하면 족하게 되는 이점이 있다. In this way, when the gas to be treated is a VOC gas, the volatile organic compound, which is a contaminating component, is blown into the electrolyzed water in a carbonized state. There is an advantage in that only the remaining volatile organic compounds are decomposed into the oxide material in the electrolytic water.

또한 가열할 존(영역)에 불활성 가스를 공급함으로써 산소농도를 저감하도록 하고 있으며, 상기 불활성 가스로서 질소가스(11)를 사용하였다. 이에 의해 VOC가스의 유기화합물은 산화하여서(지구온난화가 염려된다) 이산화탄소가 되는 것이 아니라(2차 이용을 기대할 수 있다) 탄화물이 된다.
In addition, the oxygen concentration is reduced by supplying an inert gas to the zone (region) to be heated, and nitrogen gas 11 is used as the inert gas. As a result, the organic compound of the VOC gas is oxidized (concerned about global warming), so that it is not carbon dioxide (which can be expected to use secondary), but is carbide.

(3)전해수조(3)의 전해수중으로부터 부상하여서 기상(氣相)으로 이동한 피처리 가스의 미세 기포는 정화되어 있고, 이 피처리가스를 염소가스 제거용의 전해스크러버(12)를 통하게 하고(전해수중에는 염소가스가 용존하고 있어서), 그리고 충전제(13)로서 활성탄이 수용되어 있는 활성탄 여과조(14)를 통하게 하여 완전하게 청정화하여 팬으로 대기방출(15)하였다.(3) Fine bubbles of the gas to be processed which floated in the electrolytic water of the electrolytic water tank 3 and moved to the gas phase are purified, and the gas is passed through the electrolytic scrubber 12 for removing chlorine gas. (Chlorine gas is dissolved in the electrolyzed water), and activated carbon was filtered through a activated carbon filtration tank 14 containing activated carbon as a filler 13 to completely purify the air and discharge it into a fan 15.

상기 전해스크러버(12)는, 전술된 전해장치(7)와의 사이에서 펌프P에 의해 전해수의 순환을 수행한다. 또한 전해스크러버(12)는 전해수를 활성탄 여과조(14)의 상방에서 분무하도록 하고 있으며, 가열된 피처리가스가 냉각되게 된다. The electrolytic scrubber 12 performs circulation of electrolyzed water by the pump P between the electrolytic apparatus 7 described above. In addition, the electrolytic scrubber 12 sprays the electrolyzed water above the activated carbon filtration tank 14, and the heated target gas is cooled.

그리고, 최종적으로 방출된 시점에서는 피처리가스에는 실온 정도로 냉각되어 유기물 냄새는 전혀 없는 문자 그대로 무취의 상태가 된다.
At the time of the final discharge, the gas to be treated is cooled to about room temperature, and the odorless state is literally without any organic substance smell.

함유 오염성분을 종래보다도 더 제거할 수 있음에 따라 여러 가지 VOC가스 그 밖의 피처리가스의 정화 용도에 적용할 수 있다.
Since the contained contaminant can be removed more than before, it can be applied to the purification use of various VOC gas and other to-be-processed gas.

2; 승압펌프
3; 전해수조
4; 탄화장치
5; 산기관(디퓨저)2; Boost pump
3; Electrolytic water tank
4; Carbonization
5; Diffuser (diffuser)

Claims (2)

공급되어 오는 피처리가스를 압축하는 압축공정과, 압축된 상기 피처리가스를 미세 기포로서 전해수중으로 불어넣는 기액(氣液)접촉공정을 갖는 피처리가스의 정화방법에 있어서, 상기 압축공정과 기액접촉공정 사이에, 압축된 피처리가스를 탄화하는 가열공정을 갖는 것을 특징으로 하는 피처리가스의 정화방법.
In the purification method of the to-be-processed gas which has the compression process which compresses the to-be-processed gas supplied, and the gas-liquid contact process which injects the compressed to-be-processed gas into a electrolytic water as a micro bubble, The said compression process, And a heating step of carbonizing the compressed target gas between the gas-liquid contacting steps.
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