KR101188804B1 - Deodorization purification device of VOC gas - Google Patents

Deodorization purification device of VOC gas Download PDF

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KR101188804B1
KR101188804B1 KR1020100076317A KR20100076317A KR101188804B1 KR 101188804 B1 KR101188804 B1 KR 101188804B1 KR 1020100076317 A KR1020100076317 A KR 1020100076317A KR 20100076317 A KR20100076317 A KR 20100076317A KR 101188804 B1 KR101188804 B1 KR 101188804B1
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voc gas
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KR20110016406A (en
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신이치 나카무라
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가부시키가이샤 오메가
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    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01D—SEPARATION
    • B01D53/00—Separation of gases or vapours; Recovering vapours of volatile solvents from gases; Chemical or biological purification of waste gases, e.g. engine exhaust gases, smoke, fumes, flue gases, aerosols
    • B01D53/34—Chemical or biological purification of waste gases
    • B01D53/74—General processes for purification of waste gases; Apparatus or devices specially adapted therefor
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    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01D—SEPARATION
    • B01D47/00—Separating dispersed particles from gases, air or vapours by liquid as separating agent
    • B01D47/06—Spray cleaning
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01D—SEPARATION
    • B01D53/00—Separation of gases or vapours; Recovering vapours of volatile solvents from gases; Chemical or biological purification of waste gases, e.g. engine exhaust gases, smoke, fumes, flue gases, aerosols
    • B01D53/005—Separation of gases or vapours; Recovering vapours of volatile solvents from gases; Chemical or biological purification of waste gases, e.g. engine exhaust gases, smoke, fumes, flue gases, aerosols by heat treatment
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
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    • B01D2257/00—Components to be removed
    • B01D2257/70—Organic compounds not provided for in groups B01D2257/00 - B01D2257/602
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    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01D—SEPARATION
    • B01D2258/00—Sources of waste gases
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    • B01D2258/0216—Other waste gases from CVD treatment or semi-conductor manufacturing
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    • Y02A50/00—TECHNOLOGIES FOR ADAPTATION TO CLIMATE CHANGE in human health protection, e.g. against extreme weather
    • Y02A50/20—Air quality improvement or preservation, e.g. vehicle emission control or emission reduction by using catalytic converters

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Abstract

종래보다도 용이하게 처리를 할 수 있는 VOC가스의 탈취 정화 기구를 제공하고자 한다.
보내어져 오는 VOC가스(2)를 가열하여서 탄화하는 가열존(3)과, 가열후의 VOC가스(2)에 전해수를 분무하는 전해수 분무존(4)을 구비하며, 상기 가열존(3)은 산소 농도를 저감하도록 한 것을 특징으로 한다. 이 VOC가스의 탈취 정화기구에서는 가열존에서 보내어지는 VOC가스를 가열하여서 탄화하도록 하였기 때문에 복잡한 제어를 수행할 필요가 없다. It is an object of the present invention to provide a deodorizing and purifying mechanism of VOC gas that can be easily processed.
The heating zone 3 which heats and carbonizes the VOC gas 2 sent, and the electrolytic water spray zone 4 which sprays electrolytic water to the VOC gas 2 after heating, The said heating zone 3 is oxygen It is characterized by reducing the concentration. In this deodorizing and purifying mechanism of the VOC gas, since the VOC gas sent from the heating zone is heated and carbonized, no complicated control is required.

Description

ＶＯＣ가스의 탈취 정화 기구 {Deodorization purification device of VOC gas}Deodorization purification device of VOC gas

본 발명은 톨루엔, 자일렌 그 밖의 VOC가스의 탈취정화기구에 관한 것이다.
The present invention relates to a deodorization mechanism for toluene, xylene and other VOC gases.

종래, 반도체 공장이나 액정공장에서의 휘발성 유기화합물 등의 유기화합물을 함유하는 배기가스를 처리하는 배기가스 처리장치의 출원이 있으며 다음의 내용이 기재되어 있다(특허문헌1).Conventionally, there is an application for an exhaust gas treating apparatus for treating exhaust gas containing organic compounds such as volatile organic compounds in a semiconductor factory or a liquid crystal factory, and the following contents are described (Patent Document 1).

즉 반도체공장이나 액정공장에서의 휘발성 유기화합물 함유 배기가스를 처리하는 방법으로서, (1)활성탄에 의한 흡착법, (2)배기가스를 공기와 혼합하여서 직접적으로 연소시키는 직접연소법, (3)물, 산, 알칼리 용액 등의 액체에 대상이 되는 가스를 흡수시키는 방법이 채용되고 있었던 바, 본 출원은 배기가스 중의 휘발성 유기 화합물을 적은 에너지로 효율적으로 분해할 수 있으면서 초기비용 및 러닝 코스트를 저감할 수 있는 배기가스 처리장치를 제공하기 위해 휘발성 유기 화합물을 함유하는 배기가스를 세정수에 접촉시켜서, 상기 배기가스 중의 휘발성 유기 화합물을 상기 세정수로 흡수, 이행시키는 스크러버부와, 상기 스크러버부에서 도입되는 세정수에 산소를 용존시키면서 나노 버블을 함유시키는 용존 산소조정부와, 상기 용존 산소 조정부에서 상기 나노버블을 함유한 세정수가 도입되면서 이 세정수가 함유하는 휘발성 유기 화합물을 나노 버블로 활성화한 호기성 미생물로 분해 처리하고, 이 분해 처리한 세정수를 상기 스크러버부로 반송하는 활성탄 흡착탑과, 상기 활성탄 흡착탑에서 치리된 세정수가 도입되면서 이 세정수의 용존 산소농도 또는 전체 유기 탄소 농도 중 적어도 한쪽을 측정하는 측정부와, 상기 측정부가 측정한 상기 세정수의 용존 산소 농도 또는 전체 유기 탄소 농도 중 적어도 한쪽에 의거하여 상기 용존 산소 조정부의 운전을 제어하는 제어부를 구비하고 있다. That is, a method for treating volatile organic compound-containing exhaust gas in a semiconductor factory or a liquid crystal factory, which includes (1) adsorption by activated carbon, (2) direct combustion by mixing exhaust gas directly with air, (3) water, Since a method of absorbing a target gas into a liquid such as an acid or an alkaline solution has been adopted, the present application can efficiently decompose volatile organic compounds in exhaust gas with low energy while reducing initial cost and running cost. In order to provide an exhaust gas treating apparatus, a scrubber portion for contacting the exhaust gas containing a volatile organic compound with the washing water to absorb and transfer the volatile organic compound in the exhaust gas into the washing water, Dissolved oxygen adjusting unit which contains nano bubbles while dissolving oxygen in the washing water, and the dissolved oxygen adjusting unit The activated carbon adsorption tower for decomposing and treating the volatile organic compound containing the nanobubbles into the aerobic microorganism activated by the nanobubble, and returning the decomposed treated water to the scrubber unit while introducing the washing water containing the nanobubbles, and the activated carbon A measuring unit for measuring at least one of the dissolved oxygen concentration or the total organic carbon concentration of the washing water while introducing the washing water from the adsorption column, and at least one of the dissolved oxygen concentration or the total organic carbon concentration of the washing water measured by the measuring unit. On the basis of this, a control unit for controlling the operation of the dissolved oxygen adjusting unit is provided.

그러나 상기 운전 제어는 쉬운 것이 아니며 실제로는 좀처럼 제어가 힘들다는 문제가 있었다.
However, the operation control is not easy and there is a problem that the control is difficult in practice.

일본 특허공개공보 제2009-165992호Japanese Patent Publication No. 2009-165992

여기서 본 발명은 종래보다도 용이하게 처리를 수행할 수 있는 VOC가스의 탈취 정화 기구를 제공하고자 하는 것이다.
It is an object of the present invention to provide a deodorizing and purifying mechanism of a VOC gas which can be easily processed.

상기 과제를 해결하기 위하여 본 발명에서는 다음과 같은 기술적 수단을 강구하였다.In order to solve the above problems, the present invention has been made the following technical means.

본 발명의 VOC(휘발성 유기화합물)가스의 탈취정화기구는 보내어져 온 VOC가스를 가열하여서 탄화하는 가열존과, 가열후의 VOC가스에 전해수를 분무하는 전해수 분무존을 구비하고, 상기 가열존은 산소농도를 저감하도록 한 것을 특징으로 한다. The deodorization and purification mechanism of the VOC (volatile organic compound) gas of the present invention includes a heating zone for heating and carbonizing the sent VOC gas, and an electrolytic water spray zone for spraying electrolytic water on the heated VOC gas. It is characterized by reducing the concentration.

이 VOC가스의 탈취 정화 기구에서는 가열존에서 보내어져 온 VOC가스를 가열하여서 탄화하도록 하였기 때문에 복잡한 제어를 수행할 필요가 없다. 그리고, VOC가스를 탄화(炭化)함으로써 탈취할 수 있다.In this deodorizing and purifying mechanism of the VOC gas, since the VOC gas sent from the heating zone is heated and carbonized, no complicated control is required. And it can deodorize by carbonizing VOC gas.

또한 보내어진 VOC가스를 가열하여서 탄화하는 가열존은 산소농도를 저감하도록 하였기 때문에 VOC가스 성분은 산소와 결합되기 어려워 탄화되기 쉬워져서 이산화탄소를 생성하기 힘들어지게 되어 지구 온난화(환경파괴)를 회피하면서 VOC가스를 정화?탈취할 수 있다. 정화후에는 VOC가스가 탄화하여 이루어지는 탄소(그을음)이 생성된다. In addition, the heating zone where carbonized by heating the sent VOC gas is to reduce the oxygen concentration, VOC gas components are difficult to combine with oxygen and carbonized, making it difficult to produce carbon dioxide, while avoiding global warming (environmental destruction) Can purify and deodorize gas. After purification, carbon (soot) produced by carbonization of VOC gas is produced.

그리고 또한, 가열후의 VOC가스에 전해수를 분무하는 전해수 분무존을 구비하도록 하였기 때문에 가열된 VOC가스는 냉각되면서 분해되지 않은 VOC가스 성분이 있다 하더라도 이것을 전해수 중에 집어넣어서 분해할 수 있다.In addition, since the electrolytic water spray zone for spraying electrolytic water is provided to the VOC gas after heating, the heated VOC gas can be decomposed by being put in the electrolyzed water even if there is a VOC gas component which is not decomposed while cooling.

게다가 VOC가스의 산소농도가 저감된 상태에서 가열함으로써 유기화합물을 탄화할 수 있어서 연소(불꽃을 동반하는 산화 발열 반응)를 회피하면서 탄화물(그을음)을 회수하여서 재이용할 수 있다.In addition, by heating in a state where the oxygen concentration of the VOC gas is reduced, the organic compound can be carbonized, and the carbide (soot) can be recovered and reused while avoiding combustion (oxidative exothermic reaction with a flame).

상기 가열 존(zone)에서는 600℃~700℃로 가열할 수 있다. 가열하기 위한 수단으로서 VOC가스의 배관을 전기히터로 가열하거나 VOC가스의 배관의 외주에 내열성의 오일을 순환시키거나 VOC가스의 배관의 외주를 증기로 가열하거나 할 수 있다. In the said heating zone, it can heat at 600 degreeC-700 degreeC. As a means for heating, the pipe of VOC gas can be heated by an electric heater, heat-resistant oil can be circulated on the outer periphery of the pipe of VOC gas, or the outer periphery of the pipe of VOC gas can be heated by steam.

상기 가열존은 불활성 가스를 공급함으로써 산소농도를 저감하도록 할 수 있는데 상기 불활성 가스로서 예를 들면 질소 가스를 사용할 수 있다.
The heating zone can reduce the oxygen concentration by supplying an inert gas. For example, nitrogen gas may be used as the inert gas.

본 발명은 상술한 구성으로 이루어져 다음과 같은 효과를 갖는다. The present invention consists of the above-described configuration has the following effects.

복잡한 제어를 할 필요가 없어서 종래보다고 쉽게 처리를 할 수 있는 VOC가스의 탈취 정화 기구를 제공할 수 있다.
It is possible to provide a deodorizing and purifying mechanism of VOC gas which can be treated more easily than the conventional one because no complicated control is required.

도1은 본 발명의 VOC가스의 탈취 정화기구의 실시형태를 설명하는 시스템 흐름도이다. BRIEF DESCRIPTION OF THE DRAWINGS It is a system flowchart explaining embodiment of the deodorization purification mechanism of VOC gas of this invention.

이하, 본 발명의 실시형태를 설명한다. Hereinafter, embodiments of the present invention will be described.

도1에서 나타내는 바와 같이 본 실시 형태인 VOC가스의 탈취 정화기구(1)는, 보내어져 온 VOC가스(2)를 가열하여서 탄화하는 가열존(3)과, 가열후의 VOC가스(2)에 전해수를 분무하는 전해수 분무존(4)을 구비하며, 상기 가열존(3)은 탄소농도를 저감하도록 한다. As shown in Fig. 1, the deodorizing and purifying mechanism 1 of the VOC gas according to the present embodiment is electrolyzed in the heating zone 3 for heating and carbonizing the sent VOC gas 2 and the VOC gas 2 after heating. It is provided with an electrolytic water spray zone (4) for spraying, the heating zone (3) to reduce the carbon concentration.

상기 VOC가스(2)로서 농약 제조시에 나오는 배기가스를 처리하였다. 이 배기가스에는 디클로로에틸렌, N,N-디메틸포름아미드, 디메틸에테르, 개미산 메틸, 에틸알코올, 메톡시아세트산, 디메틸 설피드 보레인(Dimethyl sulfideborane), 개미산 에틸, 트리메틸아민, 클로로포름, 1,2-디클로로메탄, 시클로헥산, 톨루엔이 함유된다. 또한 이 배기가스는 황화나트륨과 산에서 발생한 무기 가스인 황화수소가스(H2S)도 함유되어 있는 혼합가스로 이루어져 있어, 처리전에는 유기 냄새와 강한 황화수소의 냄새가 난다.As the VOC gas (2), the exhaust gas emitted during pesticide production was treated. This exhaust gas includes dichloroethylene, N, N-dimethylformamide, dimethyl ether, formic acid methyl, ethyl alcohol, methoxyacetic acid, dimethyl sulfideborane, ethyl formic acid, trimethylamine, chloroform, 1,2- Dichloromethane, cyclohexane, toluene. In addition, the exhaust gas is composed of a mixed gas containing sodium sulfide and hydrogen sulfide gas (H 2 S), which is an inorganic gas generated from an acid, and has an organic smell and a strong hydrogen sulfide smell before treatment.

공급된 배기가스는, 우선 상향 유로(5)의 배관을 상승하고 이어서 대략 U자형상으로 하향 유로(6)로 방향 전환된다. 하향 유로(6)의 배관은 일정영역에 전기히터(7)를 감아서 가열존(3)을 형성한다. 상기 가열존(3)에서는 VOC가스(2)의 배관 외측에서 600℃~700℃로 가열하도록 한다. 가열된 VOC가스(2) 성분이 탄화되어 이루는 그을음은 하방의 폐기물함(8)으로 회수된다. 이 실시형태에서는 전기히터(7)에 의해 가열되었는데, VOC가스(2) 배관 외주에 내열성의 오일을 순환시키거나 VOC가스(2)의 배관 외주를 증기로 가열하거나 할 수도 있다.The supplied exhaust gas first raises the pipe of the upward flow path 5 and then is diverted to the downward flow path 6 in a substantially U-shape. The pipe of the downward flow path 6 winds the electric heater 7 in a predetermined region to form the heating zone 3. In the heating zone (3) to be heated to 600 ° C ~ 700 ° C outside the pipe of the VOC gas (2). The soot formed by carbonization of the heated VOC gas 2 component is recovered to the waste box 8 below. In this embodiment, although heated by the electric heater 7, heat-resistant oil may be circulated to the outer periphery of the VOC gas 2 piping, or the piping outer periphery of the VOC gas 2 may be heated by steam.

가열존(3)은 그 바로 앞에서 불활성 가스를 공급함으로써 공기중 산소농도를 저감하도록 하고 있으며 상기 불활성 가스로서 질소가스(9)를 사용하였다. 이 가열존(3)을 통과한 후에 팬에 의해 유인되어서 다음의 전해수 분무존(4)로 보내진다. The heating zone 3 is designed to reduce the oxygen concentration in the air by supplying an inert gas immediately before it, and nitrogen gas 9 is used as the inert gas. After passing through this heating zone 3, it is attracted by a fan and sent to the next electrolytic water spray zone 4.

전해수 분무존(4)에서는 무격막 전해장치(10)에서 전해액조(11)에서 공급되는 차아염소산 소다를 물에 첨가하여서 전기분해하여 이루어지는 전해수를 전해 스크러버(12)에서 가열존(3) 통과후의 VOC가스(2)에 대하여 펌프P에 의해 분무하도록 한다. 전해수 중에는 산화력이 있는 차아염소산(HOCl)과 ?OH라디칼이 존재하며, 이에 의해 가열존(3)에서의 탄화(炭化)를 면한 잔류 VOC가스(2) 성분을 분해한다. 즉, 잔류 VOC가스(2)의 탄소 골격은 차아염소산(HOCl)과 ?OH라디칼에 의해 분해된다. 또한, 분무되는 전해수를 알칼리성으로 조정함에 따라 황화수소 가스를 집어넣어 배기가스의 냄새를 없앨 수 있다. In the electrolytic water spray zone (4), electrolytic water obtained by electrolysis by adding sodium hypochlorite supplied from the electrolytic solution tank (11) from the membrane-free electrolytic apparatus (10) to water and passing through the heating zone (3) through the electrolytic scrubber (12) The VOC gas (2) is to be sprayed by the pump P. In electrolytic water, oxidative hypochlorous acid (HOCl) and? OH radicals are present, thereby decomposing the residual VOC gas (2) component which avoids carbonization in the heating zone (3). That is, the carbon skeleton of the residual VOC gas 2 is decomposed by hypochlorous acid (HOCl) and? OH radicals. In addition, by adjusting the electrolyzed water sprayed to alkaline, hydrogen sulfide gas can be put in to remove the smell of the exhaust gas.

그 후에 팬으로 유인하여 최종적인 확인을 위해 활성탄 여과조(13)를 통과하게 하여 완전히 청정화된 상태로 대기방출(14)된다. 이 시점에서는 황화 수소 냄새도 유기물 냄새도 전혀 나지 않는 무취(無臭)의 상태가 된다. It is then drawn to a fan and passed through an activated carbon filtration tank 13 for final confirmation, which is then released 14 to a completely clean state. At this point, it becomes an odorless state with neither hydrogen sulfide odor nor organic substance odor.

이어서 본 실시형태의 VOC가스의 탈취 정화기구의 사용상태를 설명한다. Next, the use state of the deodorization purification mechanism of VOC gas of this embodiment is demonstrated.

이 VOC가스의 탈취정화기구(1)에서는 보내어져 온 VOC가스(2)를 가열존(3)에서 가열하고 탄화하도록 하였기 때문에 복잡한 제어를 수행할 필요가 없으며 종래보다도 용이하게 처리를 수행할 수 있는 이점이 있다. 그리고 VOC가스(2)를 탄화함으로써 탈취할 수 있었다.In the deodorizing and purifying mechanism 1 of the VOC gas, the sent VOC gas 2 is heated and carbonized in the heating zone 3 so that no complicated control is required and the process can be performed more easily than before. There is an advantage. And it could deodorize by carbonizing VOC gas (2).

또한 보내어져 오는 VOC가스(2)를 가열하여서 탄화하는 가열존(3)은 질소가스(9)의 공급에 의해 탄소농도를 저감하도록 하였기 때문에 VOC가스(2) 성분은 산소와 결합되기 어려워 탄화되기 쉬워지기 때문에 이산화탄소를 생성하기 힘들어져 지구온난화(환경파괴)를 회피하면서 VOC가스(2)를 정화?탈취할 수 있는 이점이 있다. 정화후에는 VOC가스(2)가 탄화되어 이루어지는 그을음이 생성된다. In addition, the heating zone (3) for heating and carbonizing the VOC gas (2) to be sent is to reduce the carbon concentration by the supply of nitrogen gas (9), so that the VOC gas (2) component is difficult to combine with oxygen and carbonized Since it becomes easier to produce carbon dioxide, there is an advantage that the VOC gas 2 can be purified and deodorized while avoiding global warming (environmental destruction). After purification, soot produced by carbonization of the VOC gas 2 is produced.

그리고 가열후의 VOC가스(2)에 전해수를 분무하는 전해수 분무존(4)를 구비하도록 함으로써 가열된 VOC가스(2)는 냉각되면서 탄화되지 못한 VOC가스(2) 성분이 있다 하더라도 이것을 전해수 중에 집어넣어서 분해할 수 있는 이점이 있다.The heated VOC gas 2 is provided with an electrolytic water spray zone 4 for spraying electrolytic water on the VOC gas 2 after heating, even if there is a component of the VOC gas 2 that is not carbonized while being cooled. There is an advantage to disassembly.

게다가 질소가스(9)의 공급에 의해 VOC가스(2)의 산소농도가 저감된 상태로 가열함으로써 유기화합물을 탄화할 수 있기 때문에 연소(불꽃을 수반하는 산화 발열 반응)를 회피하면서 탄화물(그을음)을 회수하여 재이용할 수 있는 이점이 있다.
In addition, since the organic compound can be carbonized by heating in a state where the oxygen concentration of the VOC gas 2 is reduced by the supply of nitrogen gas 9, carbides (soot) are avoided while avoiding combustion (oxidative exothermic reaction with flame). There is an advantage that can be recovered and reused.

종래보다도 용이하게 처리를 할 수 있어서 여러 가지의 VOC가스 탈취 정화의 용도에 적용할 수 있다.
The treatment can be performed more easily than in the prior art, and can be applied to various VOC gas deodorization purification applications.

2; VOC가스
3; 가열 존(zone)
4; 전해수 분무존2; VOC gas
3; Heating zone
4; Electrolyzed Water Spray Zone

Claims (1)

보내어져 온 VOC가스(2)를 가열하여서 탄화하는 가열존(3)과, 가열후의 VOC가스(2)에 전해수를 분무하는 전해수 분무존(4)을 구비하며, 상기 가열존(3)은 질소 가스(9)의 공급에 의해 산소 농도를 저감하도록 한 것을 특징으로 하는 VOC가스의 탈취 정화기구. And a heating zone (3) for heating and carbonizing the sent VOC gas (2) and an electrolytic water spray zone (4) for spraying electrolytic water on the heated VOC gas (2), wherein the heating zone (3) is nitrogen. A deodorizing and purifying mechanism for VOC gas, characterized by reducing oxygen concentration by supplying gas (9).
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