KR101263602B1 - Cone-Jet Mode Electrostatic Spray Deposition Apparatus - Google Patents

Abstract

The present invention is a cone jet electrostatic spraying apparatus which charges and injects a precursor, and attaches the ejected precursor to a substrate to be processed by an electrostatic force, wherein the precursor in a liquid state is supplied from a separate supply unit. A cone jet nozzle for spraying an aerosol to a substrate to be processed through a cone block; A high voltage applying device applying a high voltage to charge the precursor sprayed through the cone jet nozzle; A guide injection unit arranged to surround an outer circumferential surface of the cone jet injection nozzle and injecting a gas along an injection direction of the cone jet injection nozzle around an outer circumference of the cone jet injection nozzle, the guide injection unit comprising: a central portion in a hollow pipe shape A guide nozzle in which the cone jet nozzle is penetrated in a longitudinal direction to form a gas inflow passage along an outer circumference of the cone jet nozzle; And a gas supply unit supplying gas to the guide nozzle, wherein the guide nozzle has an inlet formed at one side such that gas is supplied from the gas supply unit, and the gas introduced at one end adjacent to the nozzle block of the jet nozzle. The nozzle hole is formed to be injected, and the plurality of cone jet nozzles and the guide nozzles are provided in a planar arrangement structure, the dummy nozzles are connected to the high voltage applying device and spaced apart from the cone jet nozzles and the guide nozzles. It provides a cone-jet mode electrostatic spray device provided.

Description

Cone-Jet Mode Electrostatic Spray Deposition Apparatus

The present invention relates to a cornjet mode electrostatic spray apparatus. More specifically, by mounting a guide injection unit for injecting gas coaxially with the jet direction of the cone jet nozzle around the outer periphery of the cone jet nozzle, guides the jet flow of the jet jet nozzle and blocks the air flow in the opposite direction. In addition, the spray state of the cone jet nozzle can be stably maintained so that continuous spraying can be performed for a long time even in the cone jet mode, and a mesh is installed to allow the gas to flow through the guide nozzle of the guide spray unit. The present invention relates to a cone jet electrostatic spray apparatus which can stabilize the flow of gas inside the nozzle and thus further improve the stabilization function for the cone jet nozzle.

In general, electrostatic spray technology is one of the coating technologies that can spray a variety of precursors to produce a high density and nano-scale thin film, this electrostatic spray technology can be applied to the semiconductor industry, including solar cells, furthermore, painting and cooling It can be applied to various industrial fields such as the trend of the use is expanding recently.

Electrostatic spraying apparatus is a device for performing a coating operation using the electrostatic spraying technology, including a spray nozzle for spraying the precursor, a precursor supply device for supplying the precursor to the spray nozzle, a high voltage application device for charging the precursor, etc. It is composed.

Such an electrostatic spray device supplies the precursor to the spray nozzle at a flow rate of approximately 0.1 to 10 ml / hr through the precursor supply device, and is sprayed toward the substrate while the precursor is charged by the high voltage applying device while passing through the spray nozzle, The precursors are atomized by the electrostatic attraction between the spray nozzle and the substrate and work on the substrate. At this time, the atomized droplets can be adjusted to the nano-size, it is possible to perform the nano-size thin film coating by spraying the atomized droplets.

On the other hand, such an electrostatic spray device may have a variety of spray modes according to the type of injection nozzle, of which in the cone-jet mode (cone-jet mode) using a cone-shaped nozzle of the electrostatic spray device is almost irrespective of the inner diameter of the nozzle It has significant advantages over other spray modes because it forms droplets smaller than the size of the nozzle.

In the conjet mode, the electrostatic spray apparatus can generate droplet sizes from tens of nanometers to hundreds of microns depending on the flow rate of the precursor, the applied voltage of the nozzle, and the electrical conductivity of the precursor. Unlike other electrostatic methods, it is stable to obtain droplets of uniform size. In particular, in the nanometer range, it is considered that the greatest advantage is that it is possible to produce particles or droplets of uniform size that cannot be achieved by mechanical methods using conventional pneumatic or ultrasonic waves.

However, when the precursor has a high electrical conductivity of the precursor is injected through the injection nozzle, there is a problem that it is difficult to carry out continuous injection for a long time in the conjet mode because the cone jet nozzle becomes unstable. Patent application No. 10-507838 discloses a configuration in which the independent potential guard plate is mounted to stabilize the spraying state in the cone jet mode. However, this is a method for maximizing the electrospray generation voltage. There was a problem that it could not be stabilized and a problem that required a long time in the process.

Particularly, in the case of solar cell substrates and the like, manufacturing costs are drastically reduced when a large area is achieved, a need for increasing the area covered by the cone along with stable formation of the cone jet is increasing.

The present invention has been made to solve the problems of the prior art, an object of the present invention is equipped with a guide jet unit for injecting gas in the coaxial direction with the jet direction of the cone jet nozzle in the outer circumference of the cone jet nozzle, the jet jet nozzle By guiding the injection flow of air and blocking the air flow in the opposite direction, it is possible to maintain the spray state of the cone jet nozzle in a stable manner, so that the cone jet mode electrostatic spray can continuously perform a long time in the cone jet mode. To provide a device.

It is another object of the present invention to stabilize the flow of gas inside the guide nozzle by mounting a mesh so that the gas flows through the guide nozzle of the guide injection unit for injecting the gas coaxially with the jet direction of the cone jet nozzle. Accordingly, the jet flow of the gas injected from the guide nozzle is also stabilized to provide a cone jet mode electrostatic spray apparatus that can further improve the stabilization function for the cone jet nozzle.

Further, another object of the present invention is to provide a cone-jet mode electrostatic spray apparatus that enables surface processing of a large-area to-be-processed substrate through stable formation of a plurality of cone jets through a plurality of cone jet nozzles and dummy nozzles.

The present invention is a cone-jet mode electrostatic spraying apparatus in which a precursor is charged and sprayed, and the sprayed precursor is attached to a substrate to be processed by electrostatic attraction, wherein the precursor in a liquid state is supplied from a separate supply unit, and the precursor is supplied. A cone jet nozzle spraying an aerosol to a substrate to be processed through a cone block; A high voltage applying device applying a high voltage to charge the precursor sprayed through the cone jet nozzle; A guide injection unit arranged to surround an outer circumferential surface of the cone jet injection nozzle and injecting a gas along an injection direction of the cone jet injection nozzle around an outer circumference of the cone jet injection nozzle, the guide injection unit comprising: a central portion in a hollow pipe shape A guide nozzle through which the cone jet injection nozzle is coupled in the longitudinal direction to form a gas inflow passage along an outer circumference of the cone jet nozzle; And a gas supply unit supplying gas to the guide nozzle, wherein the guide nozzle has an inlet formed at one side such that gas is supplied from the gas supply unit, and the gas introduced at one end adjacent to the nozzle block of the jet jet nozzle The nozzle hole is formed to be injected, the plurality of the cone jet nozzle and the guide nozzle is provided in a planar arrangement structure, the dummy nozzle is connected to the high voltage applying device and spaced apart from the cone jet nozzle and the guide nozzle It provides a cornjet mode electrostatic spray device characterized in that it comprises.

In the cone jet mode electrostatic spray apparatus, a plurality of dummy nozzles may be provided, and the dummy nozzles spaced apart from each other to be closest to the cone jet injection nozzle may be three at right angles to at least one of the cone jet nozzles. .

In the cone jet mode electrostatic spray apparatus, the cone jet nozzle and the dummy nozzle are arranged in a plurality of rows, the cone jet nozzle row formed by the cone jet nozzle, and the dummy nozzle row formed by the dummy nozzle are treated. The substrates may be intersected with respect to a plane parallel to the plane of the substrate.

In the conjet mode electrostatic spray apparatus, when viewed in a plane parallel to the substrate to be treated, the cone jet nozzle may be disposed in an area formed by the dummy nozzle.

In the conjet mode electrostatic spray apparatus, an end portion of the conjet jet nozzle is disposed between the target substrate and the substrate in the longitudinal direction of the jet jet nozzle, and the positions of the jet jet nozzle and the dummy nozzle are stably maintained. It may be provided with a nozzle fixing frame.

In the cone jet mode electrostatic spray apparatus, an end portion of the cone jet injection nozzle is disposed between the substrate to be processed in the longitudinal direction of the cone jet injection nozzle, and an electric field other than the electrostatic force of the cone jet injection nozzle is applied to the cone jet injection nozzle. It may be provided with a nozzle insulator for blocking the influence on the end.

In the cone jet mode electrostatic spray apparatus, the nozzle hole of the guide nozzle may be formed in a form in which one end of the guide nozzle is completely open.

In the conjet mode electrostatic spray apparatus, a separate mesh may be mounted in the gas inflow passage of the guide nozzle so that the gas introduced into the guide nozzle passes and flows.

In the conjet mode electrostatic spraying apparatus, the gas supply unit includes a gas storage tank that stores gas and is connected to the guide nozzle through a gas supply hose to supply stored gas to the guide nozzle; And it may include a gas flow controller for adjusting the flow rate of the gas supplied from the gas storage tank to the guide nozzle.

In the conjet mode electrostatic spray apparatus, a stage having a ground terminal is formed to be seated and grounded on the substrate, and the stage may be equipped with a heating module to apply heat to the substrate.

In the conjet mode electrostatic spray apparatus, the high voltage applying device may be connected to a precursor supply hose connecting the cone jet injection nozzle from a reservoir to apply a high voltage.

According to the present invention, a guide injection unit for injecting gas coaxially with the jet direction of the jet jet nozzle around the outer periphery of the jet jet nozzle, guides the jet flow of the jet jet nozzle, and blocks the air flow in the opposite direction. As a result, the spraying state of the spray jet nozzle can be stably maintained, and thus, the precursor can be continuously sprayed through the spray jet nozzle for a long time even in the spray jet mode.

In addition, by mounting a mesh so that the gas flows through the guide nozzle of the guide injection unit for injecting the gas coaxially with the injection direction of the cone jet nozzle, it is possible to stabilize the flow of gas in the guide nozzle, accordingly The injection flow of the gas injected from the guide nozzle is also stabilized, so that the stabilization function for the cone jet nozzle can be further improved.

In addition, it is possible to achieve stable cone jet formation through a dummy nozzle plane arrangement structure outside the cone jet nozzle.

In addition, through the formation of a plurality of cone jet nozzles and dummy nozzles as described above, a stable plurality of cone jets can be used to quickly and accurately perform surface processes such as surface application of a large-area target substrate, such as a solar cell substrate. It is also possible to significantly reduce the production cost of.

1 is a view schematically showing the overall configuration of a spray mode electrostatic spray apparatus according to an embodiment of the present invention,
2 is an enlarged view illustrating a configuration of a guide nozzle of a cone jet electrostatic spray apparatus according to an embodiment of the present invention;
3 is a view schematically illustrating various forms of the guide nozzle of the cone jet mode electrostatic spray apparatus according to an embodiment of the present invention.
4 is a schematic partial configuration diagram of another example of the cone jet mode electrostatic spray apparatus according to the embodiment of the present invention.
5 is a schematic block diagram showing an arrangement structure of a plurality of cone jet injection nozzles and a dummy nozzle according to another example of the cone jet mode electrostatic spray apparatus according to an embodiment of the present invention.
6 and 7 are schematic configuration diagrams illustrating an arrangement structure of a plurality of cone jet spray nozzles and a dummy nozzle according to another embodiment of the cone jet mode electrostatic spray device according to an embodiment of the present invention.

Hereinafter, preferred embodiments of the present invention will be described in detail with reference to the accompanying drawings. In the drawings, the same reference numerals are used to designate the same or similar components throughout the drawings. In the following description of the present invention, a detailed description of known functions and configurations incorporated herein will be omitted when it may make the subject matter of the present invention rather unclear.

1 is a view schematically showing the overall configuration of the cone-jet mode electrostatic spray apparatus according to an embodiment of the present invention, Figure 2 is a configuration for the guide nozzle of the cone-jet mode electrostatic spray apparatus according to an embodiment of the present invention It is an enlarged view.

The conjet mode electrostatic spray apparatus according to an embodiment of the present invention is a device capable of continuously maintaining the stability of the cone jet nozzle through a separate guide injection unit, the cone jet nozzle 200 and the high voltage applying device 300 And a guide injection unit 400.

The cone jet nozzle 200 is configured to spray a precursor of a liquid state from a separate supply unit 100 and to spray the aerosol state to a substrate P to be processed, and a nozzle case 210 in which a flow path is formed to allow a precursor to flow therein. ) And a cone block nozzle 220 coupled to one end of the nozzle case 210. At the end of the cone-shaped nozzle block 220 is formed a fine nozzle hole is configured to be sprayed through the precursor.

At this time, the supply unit 100 may be configured as a syringe pump (syringe pump) so that the precursor in the liquid state can be supplied to the cone jet nozzle 200 at a predetermined flow rate, as shown in FIG. The shape of the supply unit 100, which may be configured to supply a constant flow rate through a flow regulator (not shown) from (not shown), may be variously changed.

Here, the precursor may be a precursor in a pure liquid state or a precursor containing separate particles may be applied according to the coating type, all are stored in the supply unit 100 in a liquid state and supplied to the cone jet nozzle 200 in a liquid state, In the process of spraying through the jet jet nozzle 200 is aerosolized and sprayed in an aerosol state. The precursor is sprayed in such a manner that the coating operation is performed in a manner that is applied to the substrate (P) with a small film thickness, in this case, the precursor is sprayed through the jet jet nozzle 200, the high voltage applying device 300 The charged substrate P is configured to be grounded through a separate ground terminal 510, so that the precursor injected in the charged state is attached to the processed substrate P by electrostatic attraction.

The high voltage applying device 300 applies a high voltage so that the precursor sprayed through the cone jet nozzle 200 can be charged, and applies the high voltage to the nozzle case 210 of the cone jet nozzle 200. ) May be connected to the precursor supply hose 110 to apply a high voltage to the precursor supply hose 110 connected to the cone jet injection nozzle 200 as shown in FIG. 1.

That is, the supply unit 100 in which the precursor is stored and the cone jet nozzle 200 are connected through a separate precursor supply hose 110, and the precursor in the liquid state is conjeted from the supply unit 100 through the precursor supply hose 110. Is supplied to the injection nozzle 200, by applying a high voltage to the precursor supply hose 110 through the high voltage applying device 300, the precursor of the liquid state flowing through the precursor supply hose 110 is charged by a high voltage, In the charged state as described above is sprayed in the aerosol state through the jet jet nozzle 200. At this time, since the substrate P is grounded through the ground terminal 510, the charged precursor is easily attached to the substrate P by electrostatic attraction.

For example, when the precursor is charged to the positive electrode (+) by the high voltage applying device 300, the substrate P connected to the ground terminal 510 acts as the negative electrode (−), and thus, charges to the positive electrode (+). The attached precursor is attached to the surface of the substrate P by the electrostatic attraction, and after the adhesion, the electric charges charged to the precursor are released through the ground terminal 510.

In this case, as shown in FIG. 1, a separate stage 500 may be provided so that the substrate P may be seated, and a ground terminal 510 may be formed on one side of the stage 500 to be processed. The substrate P may be configured to be grounded. In addition, a separate heating module 600 may be mounted on the stage 500, which may be configured in a form in which a heating wire is inserted into the stage 500, or alternatively, may be configured as a separate device. Can be. Heat may be applied to the substrate P by the heating module 600, and thus, drying of the substrate P may be performed while the precursor is sprayed onto the substrate P to be coated. It can be done quickly.

On the other hand, the guide injection unit 400 is disposed so as to surround the outer peripheral surface of the cone jet nozzle 200 is configured to inject gas along the injection direction of the cone jet nozzle 200 around the outer periphery of the cone jet nozzle 200. That is, the guide injection unit 400 is configured to inject a gas in the coaxial direction with the injection direction of the cone jet nozzle 200 and to maintain the stability of the cone jet nozzle 200 continuously.

The guide injection unit 400 includes a guide nozzle 410 coupled to the cone jet nozzle 200 and a gas supply unit 420 for supplying gas to the guide nozzle 410 as shown in FIG. 1. It is composed.

As shown in FIGS. 1 and 2, the guide nozzle 410 is formed in a hollow pipe shape so that the cone jet nozzle 200 is penetrated in the longitudinal direction in the center thereof, and the cone jet nozzle 200 is penetrated and coupled to the center. A gas inflow passage 411 is formed along the outer periphery. At this time, the guide nozzle 410 is formed in a double tube shape as shown in Figure 2 is a gas inlet flow path 411 is formed in the space between the inner wall and the outer wall, in a manner that the cone jet nozzle 200 is coupled to the center Can be configured.

An inlet 413 is formed at one side of the guide nozzle 410 such that gas is supplied from the gas supply unit 420, and an inlet gas is injected at one end adjacent to the nozzle block 220 of the cone jet nozzle 200. The nozzle hole 412 is formed. At this time, the nozzle hole 412 is preferably formed in one end of the guide nozzle 410 is fully open, as shown in Figure 2 for the uniform gas flow, in contrast to one end of the guide nozzle 410 It may be variously modified, such as may be configured in a plurality formed along the circumferential direction.

The gas supply unit 420 includes a gas storage tank 422 for storing gas and a gas flow regulator 421 for adjusting the flow rate of the gas supplied from the gas storage tank 422 to the guide nozzle 410. do. The gas storage tank 422 is formed to store gas therein, and an inlet of the guide nozzle 410 through a separate gas supply hose 401 to supply gas from the gas storage tank 422 to the guide nozzle 410. 413 is connected. Gas flow regulator 421 is mounted to this gas supply hose 401 is configured to adjust the gas flow rate.

According to this structure, gas is introduced from the gas storage tank 422 to the inlet 413 of the guide nozzle 410 through the gas supply hose 401, and the gas inlet flow path of the guide nozzle 410 through the inlet 413. The gas introduced into the 411 is injected through the nozzle hole 412 in the same direction as the spraying direction of the cone jet nozzle 200. Thus, since the gas injected from the guide nozzle 410 is formed in the same direction as the spraying direction of the cone jet nozzle 200 around the outer periphery of the cone jet nozzle 200, the precursor jetted from the cone jet nozzle 200 It serves to guide the injection direction and at the same time serves to block the flow of air generated in the opposite direction to the injection direction by the injection force of the jet jet nozzle 200. Therefore, the cone jet nozzle 200 may maintain a stable injection state through the guide injection unit 400.

That is, as shown in FIG. 2, the gas introduced into the guide nozzle 410 through the inlet 413 is injected downward through the nozzle hole 412 located at the lower end in the direction shown in FIG. 2. At this time, the center of the guide nozzle 410 is connected to the cone jet nozzle 200 through the injection is configured to spray down the precursor, the nozzle hole 412 of the guide nozzle 410 is the outer circumference of the cone jet nozzle 200 It is arranged to surround. In addition, the injection direction of the gas injected through the nozzle hole 412 of the guide nozzle 410 is also configured to be injected downward in the coaxial direction with the injection direction of the cone jet nozzle 200.

Therefore, since the injection flow of the precursor injected from the cone jet injection nozzle 200 is guided around the outside by the injection flow of the gas by the guide nozzle 410, it is possible to continuously maintain a stable injection state. In addition, when the precursor is sprayed onto the substrate P from the jet jet nozzle 200, air flow is generated from the substrate P in a direction opposite to the injection pressure, which is illustrated by a thick arrow in FIG. 2. As indicated by upward air flow. Since the upward air flow is opposite to the jet direction of the cone jet nozzle 200, the jet stream of the precursor jetted from the jet jet nozzle 200 may be unstable by the upward air flow. However, since the gas is injected downward from the guide nozzle 410 according to the embodiment of the present invention, this upward injection flow can be blocked, and thus the injection flow of the precursor injected from the cone jet nozzle 200 continues. It can be kept well.

In conclusion, the cone jet mode electrostatic spray apparatus according to an embodiment of the present invention is a guide injection unit 400 for injecting gas in the coaxial direction with the injection direction of the cone jet nozzle 200 around the outer periphery of the jet jet nozzle 200 Through this, it is possible to continuously maintain the stable state of the cone jet nozzle 200, and thus it is possible to spray the precursor stably for a long time even in the cone jet mode.

3 is a view schematically illustrating various forms of the guide nozzle of the cone jet mode electrostatic spray apparatus according to an embodiment of the present invention.

Guide nozzle 410 according to an embodiment of the present invention is supplied to the gas from the gas storage tank 422 through the gas supply hose 401 flows through the gas inlet flow path 411 and injected through the nozzle hole 412 In this case, since the flow of the gas introduced into the gas inflow passage 411 through the inlet 413 flows in an unstable state and can be discharged to the nozzle hole 412, according to an embodiment of the present invention As shown in FIG. 3A, a separate mesh 430 may be mounted to stably induce a flow of air flowing through the gas inflow passage 411.

That is, the gas flowing into the gas inflow passage 411 through the inlet 413 from the gas supply hose 401 hits the inner wall surface of the guide nozzle 410 by the pressure and is unstable in the gas inflow passage 411. Flows to When the gas flows in an unstable state as described above, the injection flow of the gas injected through the nozzle hole 412 also becomes unstable, thereby failing to properly serve as a guide for the cone jet nozzle 200. Therefore, a separate mesh 430 may be mounted on the gas inflow channel 411 to stably guide the flow of the gas flowing through the gas inflow channel 411. The gas flowing into the gas inflow passage 411 is stabilized in the course of passing through the mesh 430, and is injected through the nozzle hole 412 in a stabilized state, and thus the jet jet nozzle according to the stable gas injection. It may serve as a more stable guide for the injection flow of (200).

Meanwhile, in addition to the mesh 430, various other means may be provided to induce a stable flow of gas in the gas inflow passage 411. For example, as illustrated in FIG. It may be configured in such a way that a separate guide plate 440 disposed inclined relative to the 413.

The guide plate 440 is disposed in an inclined direction downward to guide the flow of air flowing through the inlet 413 to move downward along the gas inlet flow path 411. The air introduced through the inlet 413 moves downward along the gas inflow passage 411 and exhibits a stable flow state. Accordingly, the injection flow of gas through the nozzle hole 412 also appears stably.

On the other hand, the cone mode electrostatic spraying apparatus 10a according to the present invention may have a structure including a plurality of cone jet injection nozzles and guide nozzles. That is, when the substrate to be processed is implemented in a large area size such as a large area solar cell substrate, a plurality of nozzle plane arrangement structures may be taken to surface the surface more quickly and accurately. FIG. 4 is a schematic partial state diagram of the cone mode electrostatic spray apparatus 10a according to the present invention, and duplicate descriptions of the cone jet nozzle and the guide spray unit will be omitted. In the present embodiment, the plurality of nozzle structures may be configured in a single body, or may be configured in a combination of individual nozzles. Each cone jet nozzle and guide injection unit receives a gaseous precursor from each supply 100 and adjusts the flow rate of the gas supplied from the gas storage tank 422 to the guide nozzle 410. The predetermined gas flow rate is adjusted through

Through such a plurality of cone jet nozzles to provide a plurality of precursors, for example, Cu, In, Ga, Se, Cd, Te, S, Mo, ZnO and the like to provide a variety of precursors to manufacture a CIGS inorganic thin film solar cell It may be.

At this time, the plurality of cone jet nozzles and the guide nozzle of the cone jet mode electrostatic spray apparatus according to the present invention forms a planar arrangement structure. FIG. 5 shows a schematic arrangement of a plurality of cone jet spray nozzles 200 and a guide plane of the guide nozzle 400 in a plane parallel to the substrate to be processed. The plurality of cone jet spray nozzles 200 and The guide nozzle 400 forms a planar arrangement structure such that three or more placement points are formed on a plane parallel to the substrate to be disposed on one plane, so that even when the substrate P is large in area, the guide nozzle 400 is smooth. Surface application processes can be made.

In addition, in the treatment of a large-area substrate through the planar arrangement structure of the plurality of nozzles, a structure for more accurate surface coating may be further provided. That is, the cone jet mode electrostatic spray apparatus 10a may further include a dummy nozzle 200d. The dummy nozzle 200d may be connected to a high voltage applying device to apply an electrical signal, but injection of a separate precursor or gas may be performed. Not done. The static electricity formed through the dummy nozzle 200d to which such power is applied enables the repulsive force control of the cone jet of the precursor sprayed through the cone jet nozzle.

The arrangement of the dummy nozzle 200d may form various arrangement structures for a more smooth surface application process. That is, as shown in FIG. 5, a plurality of dummy nozzles 200d are also provided, and the dummy nozzles 200d spaced apart from each other so as to be closest to the cone jet nozzle 200 may include at least one cone jet nozzle 200. A honeycomb structure in which three dummy nozzles 200d are conformally disposed with respect to each other may be formed, and the three dummy nozzles 200d may be conformally disposed at 120 degrees with respect to the at least one cone jet nozzle 200. As such, when another cone jet nozzle is disposed outside the one of the jet jet nozzles 200, the smooth formation of the jet may be difficult due to mutual influence by the electrostatic repulsive force formed from the respective jet jet nozzles. Stable cone jet formation of precursors discharged from the individual cone jet nozzles 200 may be achieved by forming a structure in which each of the jet jet nozzles is conformally enclosed through the dummy nozzles 200d of the arranged structure.

In addition, the arrangement structure of the dummy nozzle of the present invention can be modified in a variety of arrangement structure in a range that takes a stable structure. That is, as illustrated in FIG. 6, the cone jet nozzle 200 / guide nozzle 400 and the dummy nozzle 200 d are arranged in a plurality of rows, respectively, and the cone jet nozzle nozzle row formed by the cone jet nozzle 200. (A1, A2, A3) and the dummy nozzle row (B1, B2, B3, B4) formed by the dummy nozzle 200d have a structure in which they are arranged alternately. When arranged in the same row, it is possible to form a stable conjet structure by forming a conjet structure on a line basis.

On the other hand, the arrangement of the cone jet nozzle and the dummy nozzle has a structure in which a plurality of the jet jet nozzles are surrounded by a plurality of dummy nozzles as a whole, so that the stable jet formation for all the jet jet nozzles is achieved. Injection control can be executed. That is, as shown in FIG. 6, a plurality of dummy nozzles 200d are disposed to surround the outer edges of the plurality of cone jet injection nozzles (hatching area D, see FIG. 6), so that unnecessary surface coating of the cone jet out of the target substrate region is performed. This can be prevented.

Also in the above alternate row arrangement structure, the cone jet forming region may be restricted by the structure (hatch region C, see FIG. 7) surrounded entirely by the dummy nozzle to achieve an efficient coating process.

In addition, the cone jet mode electrostatic spraying apparatus 10a according to the present invention may further include a structure for blocking unnecessary disturbances during the formation of the cone jet. That is, the end portion of the jet jet nozzle 200 is disposed between the substrate P in the longitudinal direction of the jet jet nozzle 200, and an electric field other than the electrostatic force of the jet jet nozzle 200 is applied to the jet jet nozzle. It may further include a nozzle insulator 700 for blocking the impact on the end of the (200).

In addition, the cone jet mode electrostatic spraying apparatus 10a according to the present invention may further include a structure for blocking unnecessary disturbances during the formation of the cone jet. That is, the end portion of the jet jet nozzle 200 is disposed between the substrate P in the longitudinal direction of the jet jet nozzle 200, and the positions of the jet jet nozzle 200 and the dummy nozzle 200d are adjusted. It may further include a nozzle fixing frame 800 to maintain a stable. Such a nozzle fixing frame 800 is useful when a plurality of individual jet jet nozzles are provided.

The above description is merely illustrative of the technical idea of the present invention, and those skilled in the art to which the present invention pertains may make various modifications and variations without departing from the essential characteristics of the present invention. Therefore, the embodiments disclosed in the present invention are intended to illustrate rather than limit the scope of the present invention, and the scope of the technical idea of the present invention is not limited by these embodiments. The scope of protection of the present invention should be construed according to the following claims, and all technical ideas falling within the scope of the same shall be construed as falling within the scope of the present invention.

100: supply unit 110: precursor supply hose
200: cone jet nozzle 220: nozzle block
300: high voltage application device 400: guide injection unit
410: guide nozzle 420: gas supply unit
430: mesh 440: guide plate
500: stage 600: heating module

Claims (11)

In the cone-jet mode electrostatic spraying apparatus which charges and sprays a precursor, and attaches the sprayed precursor to a to-be-processed substrate by electrostatic attraction,
A cone jet nozzle configured to receive a precursor in a liquid state from a separate supply and spray the supplied precursor in an aerosol state to a substrate to be processed through a cone block; A high voltage applying device applying a high voltage to charge the precursor sprayed through the cone jet nozzle; A guide injection unit disposed to surround an outer circumferential surface of the cone jet injection nozzle to inject gas along an injection direction of the cone jet injection nozzle around an outer circumference of the cone jet injection nozzle,
The guide injection unit may include: a guide nozzle having a gas inlet flow path formed along the outer circumference of the cone jet nozzle by the cone jet nozzle being longitudinally coupled to a central portion in a hollow pipe shape; And a gas supply unit supplying gas to the guide nozzle, wherein the guide nozzle has an inlet formed at one side such that gas is supplied from the gas supply unit, and the gas introduced at one end adjacent to the nozzle block of the jet jet nozzle Nozzle hole is formed so that the
A plurality of the cone jet nozzle and the guide nozzle is provided in a planar arrangement structure, and connected to the high voltage applying device, and the jet nozzle and the dummy nozzle which is disposed between the guide nozzle spaced apart from the guide nozzle Spray device.
The method of claim 1,
The dummy nozzle is provided with a plurality,
And three dummy nozzles spaced apart from each other so as to be closest to the cone jet nozzles, at least three dummy nozzles are conformal to the at least one cone jet nozzle.
The method of claim 1,
The cone jet nozzle and the dummy nozzle may be arranged in a plurality of rows, the cone jet nozzle row formed by the cone jet nozzle and the dummy nozzle row formed by the dummy nozzle may be parallel to a plane formed by the substrate to be processed. A conjet mode electrostatic spray device, characterized in that it is intersected with respect.
The method of claim 1,
When viewed from a plane parallel to the substrate to be processed, the cone jet nozzle is disposed within the area formed by the dummy nozzle, the jet mode electrostatic spray apparatus.
The method of claim 1,
And a nozzle fixing frame for allowing an end portion of the cone jet spray nozzle to be disposed between the substrate to be processed in a length direction of the cone jet spray nozzle, and stably maintaining the positions of the cone jet spray nozzle and the dummy nozzle. Conjet mode electrostatic spray device.
The method of claim 1,
To allow the end of the cone jet nozzle to be disposed between the substrate and the substrate in the longitudinal direction of the cone jet nozzle, and to prevent an electric field other than the electrostatic force of the cone jet nozzle from affecting the end of the jet nozzle. A cone jet electrostatic spraying device comprising a nozzle insulator.
The method of claim 1,
The nozzle hole of the guide nozzle is formed in the form of the one end of the guide nozzle is a conductive mode electrostatic spray apparatus, characterized in that.
The method of claim 1,
And a separate mesh is installed in the gas inlet flow path of the guide nozzle to allow the gas introduced into the guide nozzle to flow therethrough.
The method according to claim 7 or 8,
The gas supply unit
A gas storage tank storing gas and connected to the guide nozzle through a gas supply hose to supply the stored gas to the guide nozzle; And
A gas flow controller for adjusting a flow rate of the gas supplied from the gas storage tank to the guide nozzle
Conjet mode electrostatic spraying device comprising a.
9. The method according to claim 7 or 8,
And a stage having a ground terminal formed thereon so that the substrate is seated and grounded, and the stage is equipped with a heating module to apply heat to the substrate.
The method according to claim 7 or 8,
The high voltage applying device
And a high voltage applied to a precursor supply hose connecting the cornjet spray nozzle from the reservoir.

Images