KR101216241B1 - Apparatus for supplying resin - Google Patents

Abstract

An apparatus for supplying a resin powder used in a molding process for semiconductor devices, the apparatus comprising: a storage container having a bottom panel having an opening for storing the resin powder and supplying the resin powder downwardly, and the bottom A screw member for extending the upper portion of the panel and supplying the resin powder downwardly through the opening, a rotation drive unit connected to the screw member and providing a rotational force to the screw member, and for supplying the resin powder And a control unit for rotating the screw member and controlling the rotation driving unit to rotate the screw member in the reverse direction so that the resin powder does not fall through the opening after the supply of the resin powder is stopped. Therefore, abnormal supply of the resin powder through the opening can be prevented.

Description

Apparatus for supplying resin

Embodiments of the present invention relate to a resin supply apparatus, and more particularly, to a resin supply apparatus for supplying a resin in powder form for molding semiconductor chips mounted on a substrate.

In general, in the manufacture of a semiconductor device, a molding process may be performed to package semiconductor chips mounted on a substrate using a resin. The molding process may be performed by a molding apparatus including a mold that provides a space for molding the semiconductor chips.

The mold may include an upper mold and a lower mold, and may be supplied with a substrate in which the semiconductor chips are mounted and a resin in a powder state, for example, an epoxy molding compound (EMC), by a loader. have. At this time, the resin powder may be carried by the tray.

The apparatus for supplying the resin powder supplies the resin powder to the tray, and the tray can be conveyed into the mold by the loader.

The resin supply apparatus includes a storage container for storing a resin in a powder state, a storage container for storing the resin powder supplied from the storage container, and an induction furnace for extending the resin powder and transporting the resin powder to the tray. It may include a trench member for performing a function and a vibration generator for vibrating the trench member so that the resin powder is moved through the trench member.

An opening for supplying the resin powder to the storage container is formed in a bottom panel of the storage container, and an upper portion of the opening for supplying the resin powder to the storage container through the opening in the storage container. A screw member extending from may be provided. The screw member may extend through a side wall of the storage container, and an end of the screw member may be connected to a rotational drive including a motor. That is, the resin powder may be supplied to the storage container by the rotation of the screw member.

However, a phenomenon in which the resin powder is pinched between the bottom panel of the storage container and the screw member may occur, thereby increasing the load of the rotary drive unit, and the rotary drive unit may not be normally controlled. have.

In addition, even after the supply of the resin powder is stopped, i.e., even after the rotation of the screw stops, the resin powder around the opening may be dropped into the storage container by an external shock or vibration, thereby supplying the resin to the tray. It can be difficult to precisely control the amount of powder.

Embodiments of the present invention have an object to provide a resin supply device capable of supplying a resin powder stably and accurately.

According to embodiments of the present invention, a resin supply device stores a resin powder and has a storage container having a bottom panel having an opening for supplying the resin powder downwardly, and a resin container extending long from an upper portion of the bottom panel. A screw member for supplying the resin downward through the opening, a rotation drive unit connected to the screw member and providing rotational force to the screw member, and rotating the screw member to supply the resin powder, and supplying the resin powder. It may include a control unit for controlling the rotation drive to rotate the screw member in the reverse direction so that the resin powder does not fall through the opening after the interruption.

According to embodiments of the present invention, the storage container may have a cover plate disposed on a portion of the screw member to reduce the contact area between the screw member and the resin powder.

According to embodiments of the present invention, the cover plate may be configured to be inclined downward toward the opening.

According to embodiments of the present invention, the resin supply apparatus may further include a cooler for supplying a cooling gas into the storage container.

According to embodiments of the present disclosure, the resin supply apparatus may further include a temperature sensor disposed adjacent to the opening, and a temperature controller configured to control the flow rate of the cooling gas based on the temperature measured by the temperature sensor. Can be.

According to embodiments of the present invention, the resin supply apparatus is located below the opening and is a storage container for accommodating the resin powder, and extends from the storage container to the tray for transporting the resin powder, the resin powder A trench member which functions as a delivery passage for supplying a shunt, and is connected to the storage container and moves the resin powder from the storage container toward the end of the trench member, and the resin powder is directed from the end of the trench member toward the tray. The apparatus may further include a vibration generator configured to vibrate the storage container and the trench member so as to be dropped, and a disturbance blocker disposed under the vibration generator to reduce direct transmission of external disturbances to the trench member.

According to embodiments of the present invention, the disturbance blocker is disposed between the upper plate supporting the vibration generator, the lower plate disposed below the upper plate, and the upper plate and the lower plate to absorb the disturbance. Attenuation member may be included.

According to embodiments of the present invention, the resin supply apparatus may further include a chute disposed between the end of the trench member and the tray to guide the resin powder dropped from the end of the trench member to the tray. .

According to embodiments of the invention, the resin supply device is disposed adjacent to the end of the chute, dust generated in the space adjacent to the end of the chute while supplying the resin powder through the chute to the tray It may further include a resin removal unit having a plurality of vacuum holes for removing the.

According to the embodiments of the present invention, the resin removing unit may include an upper and lower suction chambers. An end of the chute may be disposed in the suction chamber while the resin powder is supplied, and the plurality of vacuum holes may be disposed on sidewalls of the suction chamber.

According to the embodiments of the present invention as described above, the direction of rotation of the screw member can be controlled by the controller, thereby preventing abnormal supply of the resin powder from the storage container. In particular, the cover plate disposed in the storage container can reduce the contact area between the resin powder and the screw member, so that the load of the rotary drive can be reduced.

The disturbance blocker may be used to block the disturbance while supplying the resin powder to the tray, whereby the resin powder may be prevented from being irregularly supplied.

As a result, the amount of the resin powder supplied to the tray can be precisely controlled, and the supplying steps of the resin powder can be performed stably.

1 is a schematic diagram illustrating a resin supply apparatus according to an embodiment of the present invention.
FIG. 2 is a schematic rear view illustrating the storage container and the trench member illustrated in FIG. 1.
FIG. 3 is a schematic side view for describing the storage container and the trench member illustrated in FIG. 1.
4 and 5 are schematic views for explaining the resin removing unit shown in FIG.
FIG. 6 is a schematic cross-sectional view for describing the first and second suction chambers of the resin removing unit illustrated in FIG. 1.

BRIEF DESCRIPTION OF THE DRAWINGS The invention will be described in more detail below with reference to the accompanying drawings showing embodiments of the invention. However, the present invention should not be construed as limited to the embodiments described below, but may be embodied in various other forms. The following examples are provided so that those skilled in the art can fully understand the scope of the present invention, rather than being provided so as to enable the present invention to be fully completed.

When an element is described as being placed on or connected to another element or layer, the element may be directly disposed or connected to the other element, and other elements or layers may be placed therebetween It is possible. Alternatively, if one element is described as being placed directly on or connected to another element, there can be no other element between them. The terms first, second, third, etc. may be used to describe various items such as various elements, compositions, regions, layers and / or portions, but the items are not limited by these terms .

The terminology used herein is for the purpose of describing particular embodiments only and is not intended to be limiting of the invention. Furthermore, all terms including technical and scientific terms have the same meaning as will be understood by those skilled in the art having ordinary skill in the art, unless otherwise specified. These terms, such as those defined in conventional dictionaries, shall be construed to have meanings consistent with their meanings in the context of the related art and the description of the present invention, and are to be interpreted as being ideally or externally grossly intuitive It will not be interpreted.

Embodiments of the present invention are described with reference to cross-sectional illustrations that are schematic illustrations of ideal embodiments of the present invention. Accordingly, changes from the shapes of the illustrations, such as changes in manufacturing methods and / or tolerances, are those that can be expected. Accordingly, embodiments of the invention are not to be described as limited to the particular shapes of the areas described as the illustrations, but include deviations in the shapes, and the areas described in the figures are entirely schematic and their shapes. Are not intended to describe the precise shape of the region nor are they intended to limit the scope of the invention.

1 is a schematic diagram illustrating a resin supply apparatus according to an embodiment of the present invention.

Referring to FIG. 1, the resin supply apparatus 100 according to an exemplary embodiment of the present invention may be used to supply a resin powder 2 for performing a molding process in a manufacturing process of a semiconductor device. For example, the resin supply device 100 may be used to supply the epoxy molding compound to the tray 10.

The resin powder 2 supplied to the tray 10 may be supplied into a mold for molding a semiconductor device by a loader. The tray 10 may be supported by a separate tray transfer device 12, for example, a Cartesian robot, under the resin supply device 100, and the tray transfer device 12 may be formed of the resin powder. It can be moved in the horizontal direction to load the.

The resin supply device 100 is provided with a chamber 102 in a box shape, a storage container 104 disposed inside the chamber 102 and storing the resin powder 2, and supplied from the storage container 104. A storage container 134 for storing the resin powder 2, a trench member 136 extending from the storage container 134, and a resin powder supplied from the trench member 136 to the tray 10. And a chute 168 for guiding.

Although not shown in detail, the chamber 102 is open at one side, and the open portion may be opened and closed by a door (not shown). In addition, the chamber 102 may include a movable plate 112 movable in a horizontal direction and a fixing plate 114 disposed to be adjacent to the movable plate 112. The storage container 104 may be disposed on the moving plate 112, and the storage container 104 may be moved out of the chamber 102 by the moving plate 112. That is, the moving plate 112 may be provided for the replacement of the storage container 104.

The storage container 104 may have a bottom panel 106 having an opening 106A for supplying the resin powder 2 downward, and the moving plate 112 may correspond to the opening 106A. It may have an opening 112A. The opening 106A of the storage container 104 may be opened and closed by the door 108.

The storage member 104 may be provided with a screw member 116 for supplying the resin powder 2 downward through the opening 106A. In particular, the screw member 116 may extend long at the top of the bottom panel 106 of the storage container 104, the first end 116A of the screw member 116 being the storage container 104. It may extend outward through the first sidewall of the. Meanwhile, the second end 116B of the screw member 116 may be rotatably supported on the second sidewall of the storage container 104.

The rotation driver 118 may be disposed on the fixing plate 114 to be connected to the first end of the screw member 116 to provide a rotational force to the screw member 116. The rotation driver 118 may include a motor, and the operation of the rotation driver 118 may be controlled by the controller 120.

The controller 120 may rotate the screw member 116 to supply the resin powder 2, and after the supply of the resin powder 2 is stopped, the resin powder 2 opens the opening. The screw member 116 can be rotated in the reverse direction so as not to fall through 106A. For example, the controller 120 may rotate the screw member 116 clockwise to supply the resin powder 2, and after the supply of the resin powder 2 is stopped, the resin powder The screw member 116 can be rotated about 1 to 3 times counterclockwise so that (2) does not fall through the opening 106A. Accordingly, the correct amount of resin powder 2 can be supplied from the storage container 104 to the storage container 134.

Meanwhile, the storage container 104 may have a cover plate 110 disposed on a portion of the screw member 116 to reduce the contact area between the screw member 116 and the resin powder 2. . As shown, the cover plate 110 may cover a portion adjacent to the second end 116B of the screw member 116, whereby the resin powder 2 may be formed of the screw member 116. It may be in contact with a portion adjacent to the first end 116A. As a result, the contact area between the resin powder 2 and the screw member 116 can be relatively reduced, so that the load of the rotary drive unit 118 connected to the screw member 116 can be relatively reduced. Can be.

The cover plate 110 may be configured to be inclined downward toward the opening 106A as shown in order to prevent the resin powder 2 from remaining on the cover plate 110.

On the other hand, the inside of the storage container 104 may be supplied with a cooling gas for temperature control. As the cooling gas, purified air may be used. The cooling gas may be used to prevent agglomeration of the resin powder 2 stored in the storage container 104.

For example, a first cooling line 122 for supplying the first cooling gas may be connected to the chamber 102, and second cooling for supplying a second cooling gas into the storage container 104. Line 124 may be connected to the storage container 104. The first and second cooling gases supplied to the chamber 102 and the storage vessel 104 are first and second exhaust lines 126 and second exhaust line 128 connected to the chamber 102 and the storage vessel 104. Can be discharged through. The first cooling line 122 and the second cooling line 124 may be connected to the first cooler 123 and the second cooler 125, respectively, and the first exhaust line 126 and the second exhaust line ( 128 may be connected to the first exhaust unit 127 and the second exhaust unit 129, respectively.

In addition, the fixing plate 114 may be provided with a temperature sensor 130 disposed to be adjacent to the storage container 104, the temperature sensor 130 may be connected to the temperature control unit 132. Although not shown in detail, the temperature controller 132 may adjust the flow rates of the first cooling gas and the second cooling gas based on the temperature measured by the temperature sensor 130.

A storage container 134 may be disposed below the storage container 104. In particular, the storage container 134 may be arranged to accommodate the resin powder 2 supplied through the opening 106A of the storage container 104.

FIG. 2 is a schematic rear view illustrating the storage container and the trench member illustrated in FIG. 1, and FIG. 3 is a schematic side view illustrating the storage container and the trench member illustrated in FIG. 1.

1 to 3, the accommodating container 134 may have an upper portion open to accommodate the resin powder 2, and may have an inner space that gradually decreases downward. In particular, as illustrated, both sidewalls of the storage container 134 may be adjacent to each other at the bottom, and the rear sidewall may be disposed to be inclined inward of the storage container 134. However, the front sidewall connected to the trench member 136 may extend in the vertical direction.

The trench member 136 may have a trough shape and may extend in a horizontal direction from the front sidewall of the container 134.

The trench member 136 may have a trench used as a passage for transporting the resin powder 2. The trench has a shape that gradually narrows downward, that is, a width gradually narrowing downward to reduce the width of the resin powder 2 falling while the resin powder 2 falls from the trench member 136. Can have For example, the trench member 136 may have a trench having a 'V' shape, and the storage container 134 may have an opening (not shown) connected to the trench. Unlike the above, the trench member 136 may have a 'V' shape or a 'U' shape with a flat bottom.

In addition, by reducing the lower width of the trench member 136 as described above, the resin powder 2 adhered to the inside and the end of the trench member 136 may be reduced.

Meanwhile, the storage container 134 and the trench member 136 may be disposed on the vibration generator 140. The vibration generator 140 includes the container 134 and the trench such that the resin powder 2 is moved from the container 134 toward the end of the trench member 136 within the trench member 136. The member 136 may be vibrated. Although not shown in detail, the vibration generator 140 may include a piezoelectric element or a rotating body connected to a motor. The vibration generator 140 may vibrate the container 134 and the trench member 136 at a frequency of about 100 to 400 Hz. Can be.

The storage container 134 and the trench member 136 may be connected to the vibration generator 140 through separate support panels 142 and reinforcing members 144. The support panel 142 may have a flat plate shape and may be disposed on the vibration generator 140. The reinforcing member 144 may extend along the trench member 136 from the bottom of the container 134, and may have side surfaces of the container 134 and the trench member 136 and the support panel 142. It may have a shape bent to correspond to the upper surface. For example, as shown, a pair of reinforcement members 144 may be attached on the lower sides of the container 134 and the trench member 136, and the pair of reinforcement members 144 may be attached to each other. The support panel 142 may be coupled to each other by bolts 146. In addition, the pair of reinforcing members 144 may be bonded to the container 134 and the trench member 136 using an adhesive, soldering, welding, or the like.

The reinforcing member 144 may be used to prevent secondary vibration of the trench member 136 due to the excitation of the vibration generator 140. That is, by increasing the rigidity of the trench member 136, the secondary vibration of the trench member 136, which may be generated by the vibration transmitted from the vibration generator 140, may be attenuated or reduced. The member 136 may be vibrated at a frequency substantially the same as the frequency of the vibration generator 140.

The resin supply device 100 may include a disturbance blocker 150 for preventing external disturbance, ie, disturbance, from being directly applied to the storage container 134 and the trench member 136. The disturbance blocker 150 may be disposed under the vibration generator 140, and the disturbance may be directly applied to the container 134 and the trench member 136 through the vibration generator 140. Can be used to prevent. That is, external disturbances, for example, vibrations or shocks can be directly transmitted to the container 134 and the trench member 136, thereby sufficiently preventing the resin powder 2 from falling irregularly. In addition, the vibration by the vibration generator 140 can be prevented from being directly transmitted to the molding facility including the resin supply device (100).

According to one embodiment of the invention, the disturbance blocker 150 is the upper plate 152 for supporting the vibration generator 140 and the lower plate 154 and the upper portion disposed below the upper plate 152 A damping member 156 may be disposed between the plate 152 and the lower plate 154 to absorb the disturbance and the vibration. For example, the damping member 156 may include a plurality of coil springs. In addition, although not shown, a pneumatic or hydraulic shock absorber may be additionally disposed between the upper plate 152 and the lower plate 154.

According to another embodiment of the present invention, although not shown, a plurality of elastic blocks (not shown) may be disposed between the upper plate 152 and the lower plate 154 in place of the coil springs. The elastic blocks may be formed of rubber or sponge.

According to an embodiment of the present invention, the resin supply device 100 may include a weight sensor 160 for measuring the weight of the resin powder 2 supplied into the container 134. The load cell may be used as the weight sensor 160. That is, the weight of the resin powder 2 injected into the container 134 may be sensed by the weight sensor 160, and the injected resin powder 2 may be in the trench by vibration by the vibration generator 140. The weight loss of the resin powder 2 can be monitored in the course of being fed to the lower tray 10 via the end of the member 136.

The controller 120 may control the amount of the resin powder 2 supplied to the tray 10 by using data on the weight change of the resin powder 2 transmitted from the weight sensor 160. In addition, the weight sensor 160 may measure the vibration frequency and amplitude by the vibration generator 140 and may transmit a signal relating to the vibration frequency and amplitude to the controller.

Meanwhile, as described above, the storage container 134, the vibration generator 140, and the disturbance blocker 150 are arranged in the vertical direction, and the weight sensor 160 is the lower plate 154 of the disturbance blocker 150. Can be connected to. In this case, when the weight sensor 160 is disposed below the lower plate 154, the height of the resin supply device 100 may be greatly increased. Accordingly, the trench member 136 and the tray 10 may be increased. The height between) can be increased. As a result, the dust generation amount can be increased by increasing the distance that the resin powder 2 falls from the end of the trench member 136.

According to one embodiment of the present invention, in order to reduce the falling distance of the resin powder 2, the weight sensor 160 may be disposed on the side of the disturbance blocking unit 150, the weight sensor 160 And the lower plate 154 includes a cantilever 162 extending in a horizontal direction from the weight sensor 160 and a connection bracket 164 extending downward between the cantilever 162 and the lower plate 154. Can be connected to one another. As a result, since the lower plate 154 of the disturbance blocking unit 150 is positioned lower than the upper surface of the weight sensor 160, the drop distance of the resin powder 2 may be reduced, and thus the resin powder ( The amount of dust generated by falling of 2) can be reduced. The weight sensor 160 may be disposed on the base panel 166.

Referring back to FIG. 1, a resin supply device 100 according to an embodiment of the present invention is disposed between an end of the trench member 136 and the tray 10 to be released from the trench member 136. A chute 168 for guiding the powder 2 to the tray 10 may be further included. The chute 168 may extend in the vertical direction and have an internal passage for guiding the resin powder 2. As a result, it is possible to prevent the resin powder 2 from scattering laterally while the resin powder 2 is dropped.

The lower end of the chute 168 may extend downward through the lower panel of the chamber 102 and may be positioned above the tray 10. The tray 10 may be moved in the horizontal direction by the tray transfer device 12 while the resin powder 2 is supplied through the chute 168. In particular, the tray 10 may be moved in a zigzag form by the tray transfer device 12, and thus the resin powder 2 may be uniformly loaded in the tray 10.

4 and 5 are schematic views for explaining the resin removing unit shown in FIG. 1, and FIG. 6 is a schematic cross-sectional view for explaining the first and second suction chambers of the resin removing unit shown in FIG.

1, 4 to 6, the resin powder 2 scattered during the supply of the resin powder 2 is applied to the upper portion of the tray 10 supported by the tray conveying apparatus 12 using a vacuum. The resin removing unit 170 may be arranged to remove and to remove the residual resin powder 2. The resin removing unit 170 may include a first suction chamber 172 having upper and lower openings, and a second suction chamber 176 connected with the first suction chamber 172 and having an open upper and closed lower portions. It may include. For example, the first and second suction chambers 172 and 176 may be integrally formed and have one common sidewall.

Sidewalls constituting the first suction chamber 172 may include a plurality of first vacuum holes 174 for sucking the scattered resin powder 2, and the second suction chamber 176 may be provided. The side walls and the bottom panel forming the plurality of second vacuum holes 178 may be provided to remove the residual resin powder 2.

The first and second vacuum holes 174 and 178 may be connected to the vacuum module 180 through the first and second vacuum lines 182 and 184. In particular, the first and second vacuum lines 182 and 184 may be connected to the third vacuum line 186, and the third vacuum line 186 may be connected to the vacuum module 180. The sucked resin powder 2 may be removed through filters 188 installed in the first and second vacuum lines 182 and 184.

Meanwhile, first vacuum channels 173 may be provided in the sidewalls of the first suction chamber 172, and second vacuum channels 177 may be provided in the sidewalls and the bottom panel of the second suction chamber 176. ) May be provided. The first and second vacuum channels 173 and 177 may be connected to the first and second vacuum lines 172 and 174, respectively.

According to the exemplary embodiment of the present invention, the chute 168 may be configured to be movable in the vertical direction by the vertical driving unit 190, and the resin removing unit 170 may be horizontally driven by the horizontal driving unit 192. It can be configured to be movable. Although not shown in detail with respect to the vertical drive unit 190 and the horizontal drive unit 192, the vertical drive unit 190 and the horizontal drive unit 192 is a cam and a motor, a ball screw and a motor, a hydraulic or pneumatic cylinder, a linear motor, Or the like.

The lower end of the chute 168 may be disposed in the first suction chamber 172 while supplying the resin powder 2. That is, the resin powder 2 may be supplied to the tray 10 through the lower end of the chute 168, and dust generated in a space adjacent to the lower end of the chute 168, that is, the chute 168. Resin powder 2 scattered from the lower end of the first suction chamber 172 may be removed through the first vacuum holes 174.

The second suction chamber 176 may be used to remove the resin powder 2 introduced into the storage container 134 and the resin powder 2 remaining in the trench member 136. In this case, the chute 168 may be lifted by the vertical drive 190, and then the first and second suction chambers 172, 176 may have a second suction under the raised chute 168. The chamber 176 may be horizontally moved by the horizontal driver 192 to be positioned. Subsequently, the chute 168 is lowered by the vertical driving unit 190 so that the lower end of the chute 168 is positioned inside the second suction chamber 176, and then resin is introduced into the second suction chamber 176. The powder 2 may be dropped, and the dropped resin powder 2 may be removed through the second vacuum holes 178 of the second suction chamber 176.

As described above, dust which may be generated during the supply of the resin powder 2 or during the disposal of the resin powder 2 may be disposed in the first and second vacuum holes of the first and second suction chambers 172 and 176. As it can be sufficiently removed through the (174, 178), contamination of the molding equipment by the dust can be sufficiently reduced.

The controller 120 may be connected to the vibration generator 140 and the weight sensor 160. The controller 120 may control an operation of the vibration generator 140 according to volume information of semiconductor chips to be molded.

The volume information may be calculated using information of semiconductor chips transmitted from a vision inspection unit (not shown). The vision inspection unit may acquire a 3D image of the semiconductor chips while the substrate on which the semiconductor chips are mounted is loaded into a molding facility, and obtain information including the thickness and size of the semiconductor chips from the image. The obtained information may be transmitted to the controller 120, and the controller 120 may process the information to obtain volume information of the semiconductor chips. In addition, the controller 120 may calculate an amount of the resin powder 2 required to mold the semiconductor chips by using the volume information of the semiconductor chips, and load the calculated resin powder 2 into the tray. The operation of the rotation driving unit 118 and the vibration generator 140 may be controlled to be loaded on the 10.

In particular, the control unit 120 uses the vibration generator (B) using information about the weight change of the resin powder 2 transmitted from the weight sensor 160 and the vibration frequency and amplitude provided by the vibration generator 140. The operation of the controller 140 may be feedback controlled.

According to the embodiments of the present invention as described above, the resin supply device 100 by adjusting the rotation direction of the screw member 116 disposed in the storage container 104 from the resin powder ( 2) can be prevented from being abnormally supplied. In particular, the cover plate 110 disposed in the storage container 104 can reduce the load of the rotary drive unit 118 by reducing the contact area between the resin powder 2 and the screw member 116.

The disturbance blocker 150 may be used to block the disturbance while supplying the resin powder 2 to the tray 10 for transporting the resin powder 2, whereby the resin powder 2 This irregular supply can be prevented.

The weight sensor 160 for measuring the weight and vibration frequency and amplitude of the resin powder 2 may be disposed on the side of the disturbance blocker 150, and thus the resin powder from the trench member 136. The throwing distance of (2) can be reduced. As a result, the scattering of the resin powder 2 during feeding of the resin powder 2 can be reduced, and the scattered resin powder 2 is made of a resin disposed to be adjacent to the lower end of the chute 168. May be removed by denial 170.

As a result, the amount of the resin powder 2 supplied to the tray 10 can be precisely controlled, and the supplying steps of the resin powder 2 can be performed stably.

It will be apparent to those skilled in the art that various modifications and variations can be made in the present invention without departing from the spirit or scope of the present invention as defined by the following claims It can be understood that

2: resin powder 10: tray
100: resin supply device 102: chamber
104: storage container 106: bottom panel
108: door 110: cover plate
112: moving plate 114: fixed plate
116: screw member 118: rotation drive unit
120: control unit 130: temperature sensor
132: temperature control unit 134: storage container
136: trench member 140: vibration generator
150: disturbance blocker 160: weight sensor
170: resin removal unit

Claims (10)

A storage container for storing the resin powder and having a bottom panel having an opening for supplying the resin powder downward;
A screw member extending in an upper portion of the bottom panel and supplying the resin powder downwardly through the opening;
A rotation drive unit connected to the screw member and providing a rotational force to the screw member;
A control unit which rotates the screw member to supply the resin powder and controls the rotation drive unit to rotate the screw member in a reverse direction so that the resin powder does not fall through the opening after the supply of the resin powder is stopped; And
And a cover plate disposed in the storage container and disposed on a portion of the screw member to reduce the contact area between the screw member and the resin powder. delete The resin supply apparatus according to claim 1, wherein the cover plate is inclined downward toward the opening. The resin supply apparatus according to claim 1, further comprising a cooler for supplying a cooling gas into the storage container. The apparatus of claim 4, further comprising: a temperature sensor disposed adjacent the opening; And
And a temperature controller for controlling the flow rate of the cooling gas based on the temperature measured by the temperature sensor. The storage apparatus of claim 1, further comprising: a storage container positioned below the opening for receiving the resin powder;
A trench member extending from the storage container and serving as a delivery passage for supplying the resin powder to a tray for conveying the resin powder;
A vibration connected to the storage container to move the resin powder from the storage container toward the end of the trench member and to vibrate the storage container and the trench member so that the resin powder is dropped from the end of the trench member toward the tray. generator; And
And a disturbance blocker disposed below the vibration generator to reduce direct transmission of external disturbances to the trench members. The method of claim 6, wherein the disturbance blocking unit,
An upper plate supporting the vibration generator;
A lower plate disposed below the upper plate; And
And a damping member disposed between the upper plate and the lower plate to absorb the disturbance. The resin supply apparatus according to claim 6, further comprising a chute disposed between the end of the trench member and the tray to guide the resin powder dropped from the end of the trench member to the tray. 10. The apparatus of claim 8, wherein the plurality of vacuum holes are disposed adjacent to an end of the chute and remove dust generated in a space adjacent to the end of the chute while supplying the resin powder to the tray through the chute. The resin supply apparatus further including the resin removal part which has these. 10. The method of claim 9, wherein the resin removal portion comprises a suction chamber which is open at the top and bottom,
An end portion of the chute is disposed in the suction chamber while the resin powder is supplied, and the plurality of vacuum holes are disposed on sidewalls of the suction chamber.

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