JP7471743B2 - Transport path - Google Patents

Description

The present invention relates to a transport path used to transport workpieces.

In the manufacturing process of device chips to be incorporated into electronic devices, etc., plate-shaped workpieces, such as semiconductor wafers and resin package substrates, are processed by various processing equipment. When the workpieces are transported to these processing equipment, a cassette capable of holding multiple workpieces is usually used. When the processing equipment receives a cassette containing multiple workpieces, it removes the workpieces from the cassette in order and processes them.

To increase the efficiency of processing the workpieces, multiple processing devices may be used in parallel. In this case, the workpieces must be transported to each of the multiple processing devices at the appropriate time. For this reason, a transport system has been proposed in which multiple processing devices are connected by a transport path (transport route) to transport the workpieces to each processing device (see, for example, Patent Document 1).

Japanese Patent Application Laid-Open No. 6-177244

In order to maximize the capabilities of multiple processing devices, it is important to transport workpieces to each processing device efficiently and safely. However, due to structural reasons of the various devices involved in transporting workpieces, it has sometimes been impossible to transport workpieces smoothly.

The present invention was made in consideration of these problems, and its purpose is to provide a transport path that allows workpieces to be transported efficiently and safely.

According to one aspect of the present invention, there is provided a transport path along which a transport vehicle that transports workpieces to a processing device runs, the transport path having a road panel with a flat upper surface installed above the processing device, a conductive member exposed at a position on the upper surface of the road panel where the wheels of the transport vehicle contact, the conductive member including carbon fiber reinforced plastic, and grounded.

In this transport path, it is preferable that the conductive member cover the entire upper surface of the road panel.

Furthermore, in this transport path, it is preferable that the road surface panels are connected in a direction parallel to the upper surface.

In one aspect of the present invention, the transport path has a flat road panel installed above the processing device, and a conductive member is exposed at the position where the wheels of the transport vehicle come into contact with the top surface of the road panel. This suppresses the generation and accumulation of static electricity caused by friction between the transport path and the wheels of the transport vehicle, preventing adverse effects on the workpiece.

Therefore, by using a transport path according to one aspect of the present invention, it becomes possible to transport workpieces efficiently and safely.

FIG. 1 is a plan view showing an example of the configuration of a transport system. FIG. 2 is a functional block diagram showing an example of connections in the transport system. FIG. 3 is a side view showing a schematic configuration example of a loader/unloader. FIG. 4(A) is a partial cross-sectional side view showing a state in which the outer door is closed and the inner door is open, and FIG. 4(B) is a partial cross-sectional side view showing a state in which the outer door is open and the inner door is closed. 5A is a partially sectional side view showing a cassette mounting table and the like, and FIG. 5B is a bottom view showing the cassette mounting table. Figure 6(A) is a partial cross-sectional side view showing the cassette mounting table being pulled outward from the internal storage area, Figure 6(B) is a partial cross-sectional side view showing the roller falling off the support table, and Figure 6(C) is a partial cross-sectional side view showing the cassette mounting table being returned to the internal storage area. Figure 7 (A) is a partial cross-sectional side view showing how a workpiece unit is temporarily placed on two upper guide rails, and Figure 7 (B) is a partial cross-sectional side view showing how a workpiece unit is temporarily placed on two lower guide rails. FIG. 8A is a plan view showing two upper guide rails and the like, and FIG. 8B is a plan view showing a state in which the gap between the two upper guide rails is narrowed. 9A is a perspective view showing the top side of the transport vehicle, and FIG. 9B is a perspective view showing the bottom side of the transport vehicle 10. FIG. FIG. 10 is an enlarged perspective view showing the front end of the transport vehicle. FIG. 11(A) is a perspective view showing the container, and FIG. 11(B) is a front view showing the container. FIG. 12 is a perspective view showing the transport vehicle with the container placed on the placement area. FIG. 13 is a perspective view showing a transport vehicle in which a container is connected to a hanging member via an elastic member (expandable member). FIG. 14A is a plan view showing an example of the configuration of a lifting unit, and FIG. 14B is a side view showing the example of the configuration of a lifting unit. FIG. 15A is a plan view showing another example of the configuration of the lifting unit, and FIG. 15B is a side view showing another example of the configuration of the lifting unit. FIG. 16A is a plan view showing the reel, and FIG. 16B is a side view showing the reel. FIG. 17 is an enlarged perspective view showing the cover. FIG. 18(A) is a side view showing the cover when no container is stored in the storage area, and FIG. 18(B) is a side view showing the cover when a container is stored in the storage area. Figure 19 (A) is a side view showing the transport vehicle when a container stored in a storage area is placed in a loading area, and Figure 19 (B) is a graph showing the motor current value when the container is lowered. Figure 20 (A) is a side view showing the transport vehicle when a container placed in the loading area is stored in the storage area, and Figure 20 (B) is a graph showing the motor current value when the container rises. FIG. 21 is a perspective view showing the appearance of the processing device and the transport path. FIG. 22 is a perspective view showing the internal structure of the processing device. FIG. 23 is a perspective view showing a part of a transport path installed in the processing device. 24(A) and 24(B) are perspective views showing a lower frame unit that constitutes the lower frame. FIG. 25 is a plan view showing the arrangement of lower frame units that constitute the lower frame. 26(A) and 26(B) are perspective views showing an upper frame unit that constitutes the upper frame. FIG. 27 is a plan view showing the arrangement of upper frame units that constitute the upper frame. FIG. 28 is a plan view showing a transport path formed by arranging a plurality of road panels. FIG. 29 is a functional block diagram showing the control unit of the transport vehicle. FIG. 30 is a diagram for explaining an example of a control method of the transport system. FIG. 31 is a perspective view showing an internal structure of the processing device according to the second embodiment.

Embodiments of the present invention will be described with reference to the attached drawings. Note that in each of the following embodiments, a case will be described in which the multiple processing devices to which the workpieces are transported are all cutting devices, but the transport system may be configured to transport the workpieces, etc. to any type of processing device. In other words, the destination of the workpieces, etc. may be a processing device other than a cutting device.

For example, the conveying system may be configured to convey the workpiece to multiple laser processing devices. The conveying system may also be configured to convey the workpiece in sequence to multiple types of processing devices used in a series of processes. Furthermore, the conveying system may be configured to convey the workpiece to various devices used in any process associated with the processing of the workpiece. In other words, the destinations for the workpiece, etc., may include tape application devices, ultraviolet irradiation devices, cleaning devices, etc. that are not intended for processing the workpiece.

(Embodiment 1)
Fig. 1 is a plan view showing a configuration example of a conveying system 2 according to this embodiment, and Fig. 2 is a functional block diagram showing an example of a connection relationship of the conveying system 2. As shown in Fig. 1, the conveying system 2 according to this embodiment includes a conveying path 6 for conveying a plate-shaped workpiece 11 (see Figs. 8(A) and 8(B), etc.) to be processed by a processing device (cutting device) 4.

The workpiece 11 is, for example, a disk-shaped wafer made of a semiconductor material such as silicon. The surface side of the workpiece 11 is divided into a number of small regions by a number of mutually intersecting planned division lines (streets), and devices such as ICs (Integrated Circuits) and MEMS (Micro Electro Mechanical Systems) are formed in each small region.

A tape (dicing tape) 13 having a diameter larger than that of the workpiece 11 is attached to the back side of the workpiece 11. The outer periphery of the tape 13 is fixed to an annular frame 15 that surrounds the workpiece 11. In this manner, in the conveying system 2 according to this embodiment, the workpiece 11 is conveyed to the processing device 4 as a workpiece unit 17 supported by the frame 15 via the tape 13.

In this embodiment, the workpiece 11 is a disk-shaped wafer made of a semiconductor material such as silicon, but there are no limitations on the material, shape, structure, size, etc. of the workpiece 11. For example, a substrate made of other materials such as semiconductors, ceramics, resins, metals, etc. can also be used as the workpiece 11.

Similarly, there are no restrictions on the type, number, shape, structure, size, arrangement, etc. of the devices. The workpiece 11 does not have to have a device formed thereon. Furthermore, in this embodiment, the workpiece unit 17 in which the workpiece 11 is supported on the frame 15 via the tape 13 is the object of transport, but the workpiece 11 to which the tape 13 is not attached, or the workpiece 11 not supported on the frame 15, etc. may also be the object of transport.

The size of the frame 15 described above is set according to the size of the workpiece 11 (such as the diameter of the workpiece 11). For example, the outer diameter of a frame 15 supporting a workpiece 11 with a diameter of approximately 300 mm is larger than the outer diameter of a frame 15 supporting a workpiece 11 with a diameter of approximately 200 mm. In other words, when a large workpiece 11 is used, the outer diameter of the workpiece unit 17 also becomes larger.

The processing device 4 that processes the workpiece 11 is connected to the transport system 2 as a destination of the workpiece 11, but is not necessarily a component of the transport system 2. Therefore, as described above, the processing device 4 may be modified or omitted depending on the manner in which the transport system 2 is used.

For ease of explanation, FIG. 1 shows only one processing device 4a, and FIG. 2 shows two processing devices 4a and 4b, but in this embodiment, two or more processing devices 4 are required as destinations for the workpiece 11. In other words, the number of processing devices 4 connected to the transport system 2 is two or more.

The conveying path 6 is installed above each processing device 4 so as to connect multiple processing devices 4. The workpiece 11 is conveyed to each processing device 4 through this conveying path 6. Since the conveying path 6 is installed above the processing devices 4, the conveying path 6 does not interfere with the pipes 21, etc., connected to the side of each processing device 4.

Below the transport path 6, in addition to the processing device 4, a loader/unloader (transport device) 8 is provided, which stores workpieces 11 before and after processing. The workpieces 11 before processing stored in the loader/unloader 8 are transported to the transport vehicle 10 at any time.

The transport vehicle 10 travels on the transport path 6 and transports the unprocessed workpiece 11 received from the loader/unloader 8 to each processing device 4. In addition, when the transport vehicle 10 receives the processed workpiece 11 from the processing device 4, it travels on the transport path 6 and transports the processed workpiece 11 to the loader/unloader 8.

However, when multiple types of devices (such as processing devices 4) are connected to the transport system 2, the transport vehicle 10 may receive a processed workpiece 11 from a processing device 4, travel along the transport path 6, and transport the processed workpiece 11 to a device used in the next process. Although two transport vehicles 10a and 10b are shown in Figures 1 and 2, there is no limit to the number of transport vehicles 10.

As shown in FIG. 2, a control unit 12 that controls the operation of the processing device 4, the loader/unloader 8, and the transport vehicle 10 is wirelessly connected to them. However, the control unit 12 only needs to be configured to be able to control the operation of the processing device 4, the loader/unloader 8, the transport vehicle 10, etc., and may also be connected to them by wires.

Figure 3 is a side view showing a schematic configuration example of the loader/unloader 8. Note that in Figure 3, some of the components are shown as functional blocks. As shown in Figure 3, the loader/unloader 8 includes a housing 22 that houses various components. Note that in Figure 3, for ease of explanation, the housing 22 is shown only by outline.

A cassette accommodating mechanism 24 is provided at each of two different height positions along the height direction ( _Z1 axis direction) within the housing 22. That is, the loader/unloader 8 of this embodiment includes a first cassette accommodating mechanism 24a and a second cassette accommodating mechanism 24b disposed above the first cassette accommodating mechanism 24a. However, there is no limit to the number of cassette accommodating mechanisms 24 provided in the loader/unloader 8. It is sufficient for the loader/unloader 8 to be provided with one or more cassette accommodating mechanisms 24.

Each cassette housing mechanism 24 has a flat support base 26. A guide mechanism (not shown) is provided on the upper surface side of the support base 26, and a flat cassette placement base 28 is attached to this guide mechanism so as to be slidable along the depth direction of the housing 22 ( _Y1 axis direction).

A cassette 30 capable of accommodating multiple (e.g., 10 or more) workpieces 11 is placed on the upper surface of the cassette placement table 28. The cassette 30 is used when transporting multiple workpiece units 17 together. By using such a cassette 30, the operator can load multiple workpiece units 17 together into the loader/unloader 8.

At positions on the housing 22 corresponding to each cassette storage mechanism 24, an access port 32 is formed through which the cassette mounting table 28 on which the cassette 30 is placed can pass. When loading or unloading the cassette 30, the cassette mounting table 28 on which the cassette 30 is placed is slid so that the cassette 30 passes through the access port 32.

At positions corresponding to each loading/unloading opening 32 of the housing 22, an outer door (second door) 34 capable of closing each loading/unloading opening 32 is disposed. The lower part of the outer door 34 is connected to the outer end of the support base 26 via a rotating connecting member 36, such as a hinge having a horizontal rotation axis, and the outer door 34 is opened and closed by rotating around the rotation axis of the rotating connecting member 36.

When the outer door 34 is open, the cassette placement platform 28 can be pulled out to an external loading/unloading area (external area) 38a (see FIG. 6A, etc.) located outside the loading/unloading openings 32. An air-driven locking mechanism (not shown) is provided at a position corresponding to each loading/unloading opening 32 of the housing 22 to prevent the outer door 34 from being opened when closed.

For example, the operator places the cassette 30 that he or she has brought on the cassette mounting table 28 that has been pulled out to the external loading/unloading area 38a. When the operator then pushes the cassette mounting table 28 into the housing 22, the cassette mounting table 28 and the cassette 30 move to the internal storage area (internal area) 38b (see FIG. 6A, etc.), which is located inside the loading/unloading opening 32.

In this specification, the internal storage area 38b is sometimes referred to as the first loading area where the cassette 30 is placed. When the cassette 30 is to be removed from the cassette storage mechanism 24, the outer door 34 is opened, and then the cassette loading platform 28 is pulled out from the internal storage area 38b to the external loading/unloading area 38a.

An inner door (first door) 40 that can move along the height direction is provided at a position opposite the loading/unloading opening 32 with respect to the internal storage area 38b of each cassette storage mechanism 24. The inner door 40 of the first cassette storage mechanism 24a moves between an upper closed position adjacent to the internal storage area 38b of the first cassette storage mechanism 24a and a lower open position, and the inner door 40 of the second cassette storage mechanism 24b moves between an upper open position adjacent to the internal storage area 38b of the second cassette storage mechanism 24b and a lower closed position. Therefore, the two inner doors 40 do not interfere with each other.

Figure 4(A) is a partial cross-sectional side view showing the first cassette storage mechanism 24a with the outer door 34 closed and the inner door 40 open. Note that in Figure 4(A), some of the components of the loader/unloader 8 are shown as functional blocks. The structure and operation of the second cassette storage mechanism 24b are similar to those of the first cassette storage mechanism 24a, except for the movement of the inner door 40.

As shown in FIG. 4(A), a lifting mechanism 42 is connected to the inner door 40. The lifting mechanism 42 is, for example, an air actuator (air cylinder) that uses air pressure to move an object, and has a cylinder tube 42a and a piston rod 42b that can move relative to the cylinder tube 42a.

A piston (not shown) is connected to the base end of the piston rod 42b housed in the cylinder tube 42a. A connecting member 42c is fixed to the surface of the inner door 40 opposite the internal storage area 38b and connected to the tip end of the piston rod 42b exposed from the cylinder tube 42a.

When the intake and exhaust of the cylinder tube 42a is controlled to move the piston and piston rod 42b from top to bottom, the inner door 40 of the first cassette storage mechanism 24a moves from the closed position to the open position. When the piston and piston rod 42b are moved from bottom to top, the inner door 40 of the first cassette storage mechanism 24a moves from the open position to the closed position. The lifting mechanism 42 may be realized by other mechanisms such as a rodless air cylinder.

A first sensor 44 is provided at a position on the support base 26 facing the inner door 40, and is used to detect whether the inner door 40 is open or not. The first sensor 44 is, for example, a magnet sensor, and detects the strength of the magnetic field generated by a magnet 44a (see FIG. 4B) attached to a predetermined position on the inner door 40.

For example, as shown in FIG. 4A, when the inner door 40 is opened and the magnet 44a moves away from the first sensor 44, the strength of the magnetic field generated by the magnet 44a weakens at the position of the first sensor 44. Therefore, by using the strength of the magnetic field detected by the first sensor 44, it is possible to determine whether the inner door 40 is open or not.

The first sensor 44 is connected to a control device 46 that controls each component of the loader/unloader 8, and the first sensor 44 sends information about the strength of the detected magnetic field to the control device 46. When the strength of the magnetic field detected by the first sensor 44 becomes weaker than a reference value, the control device 46 determines that the inner door 40 is open, and when the strength of the magnetic field detected by the first sensor 44 becomes stronger than the reference value, the control device 46 determines that the inner door 40 is closed. The first sensor 44 may be connected to the control device 46 wirelessly.

The control device 46 is configured by a computer including, for example, a processing device such as a CPU (Central Processing Unit), a main storage device such as a DRAM (Dynamic Random Access Memory), and an auxiliary storage device such as a flash memory. The functions of the control device 46 are realized by operating the processing device etc. in accordance with software stored in the auxiliary storage device.

A second sensor 48 used to detect whether the outer door 34 is open or not is provided at a position corresponding to the loading/unloading opening 32 of the housing 22. The second sensor 48 is, for example, a magnet sensor, and detects the strength of the magnetic field generated by a magnet 48a attached to a predetermined position of the outer door 34. The second sensor 48 is connected to the control device 46. The second sensor 48 may be connected to the control device 46 wirelessly.

Figure 4 (B) is a partially cross-sectional side view showing the state in which the outer door 34 is open and the inner door 40 is closed. Note that in Figure 4 (B), the control device 46 is shown in functional blocks. As shown in Figure 4 (B), when the outer door 34 is opened and the magnet 48a moves away from the second sensor 48, the strength of the magnetic field generated by the magnet 48a weakens at the position of the second sensor 48.

Therefore, by using the strength of the magnetic field detected by the second sensor 48, it is possible to determine whether the outer door 34 is open or not. Specifically, the second sensor 48 sends information related to the strength of the detected magnetic field to the control device 46. When the strength of the magnetic field detected by the second sensor 48 becomes weaker than a reference value, the control device 46 determines that the outer door 34 is open, and when the strength of the magnetic field detected by the second sensor 48 becomes stronger than the reference value, the control device 46 determines that the outer door 34 is closed.

The control device 46 functions as a first safety mechanism for restricting access from the outside to the inside of the loader/unloader 8. The first safety mechanism is realized by the control device 46 appropriately controlling an air-driven locking mechanism that fixes the outer door 34 in a closed state so that it cannot be opened.

Specifically, when it is determined that the outer door 34 is closed and that the inner door 40 is open, the control device 46 uses a locking mechanism to fix the outer door 34 so that it cannot be opened. In this way, the control device 46 controls whether the outer door 34 can be opened or closed, thereby preventing the operator from accidentally accessing moving parts and the like that are located inside the loader/unloader 8 and are in operation.

The control device 46 also functions as a second safety mechanism for restricting access from the outside to the inside of the loader/unloader 8. The second safety mechanism is realized by the control device 46 appropriately managing the power supply to the loader/unloader 8. Specifically, when it is determined that the outer door 34 is open and that the inner door 40 is closed, if the inner door 40 is opened for some reason, the control device 46 turns off the power supply to the loader/unloader 8.

The second safety mechanism stops the loader/unloader 8 in a situation where the outer door 34 and inner door 40 are open at the same time. In this way, the control device 46 appropriately manages the power supply to the loader/unloader 8, preventing the operator from accidentally accessing moving parts and the like located inside the loader/unloader 8 that are in operation.

Figure 5 (A) is a partial cross-sectional side view showing the cassette mounting table 28, and Figure 5 (B) is a bottom view showing the cassette mounting table 28. A stopper member 50 is disposed on the underside 28a of the cassette mounting table 28. The stopper member 50 has, for example, a rectangular bar 50a that is long in the depth direction. However, the length of the rectangular bar 50a in the depth direction is shorter than the length of the cassette mounting table 28 in the depth direction. The rectangular bar 50a is formed from a metal such as stainless steel. However, there are no significant limitations on the material or shape of the rectangular bar 50a.

A rotation shaft (not shown) is provided on one end of the square bar 50a located inside in the depth direction (i.e., the end on the inner door 40 side) along the width direction ( _X1 axis direction) that is approximately perpendicular to the height direction and the depth direction, and a roller 50b is supported on this rotation shaft in a rotatable manner. The diameter of the roller 50b is smaller than the distance between the lower surface 28a of the cassette mounting table 28 and the upper surface 26a of the support table 26.

A shaft mechanism 52 is provided between the inner end and the outer end of the square bar 50a to support the square bar 50a in a rotatable manner. The shaft mechanism 52 has a rotating shaft 52a that runs along the width direction. The rotating shaft 52a is connected to a position on the other end side (outside) of the square bar 50a rather than the center in the longitudinal direction (depth direction).

The widthwise ends of the rotating shaft 52a are inserted into bearing holes of a pair of bearings 52b fixed to the underside 28a of the cassette mounting table 28. As a result, the square bar 50a is supported by the bearings 52b so that it can rotate around the rotating shaft 52a in a plane parallel to the height and depth directions (in a plane perpendicular to the width direction).

As described above, the rotation axis 52a is connected to the square bar 50a at a position closer to the other end than the center. Therefore, the direction of the moment of gravity acting on the stopper member 50 around the rotation axis 52a is such that it moves one end of the square bar 50a downward. In other words, unless sufficient force is applied to the square bar 50a, the position of one end of the square bar 50a will be lower than the position of the other end of the square bar 50a due to the action of gravity.

Therefore, for example, when the entire cassette mounting table 28 is positioned in the internal storage area 38b, the rollers 50b come into contact with the upper surface 26a of the support table 26. Also, when the cassette mounting table 28 is moved above the support table 26, the rollers 50b roll on the upper surface 26a of the support table 26.

The lower end of a pin (pressure portion) 54 that is long in the height direction is connected to the other end of the square bar 50a. A through hole 28c that passes through the cassette mounting table 28 in the height direction is formed at a position corresponding to the pin 54 of the cassette mounting table 28, and the pin 54 is inserted into this through hole 28c. The through hole 28c is formed to be large enough not to impede the movement of the inserted pin 54 in the height direction.

The height of the pin 54 is longer than the thickness of the cassette mounting base 28. Therefore, when the roller 50b is in contact with the upper surface 26a of the support base 26, the upper part of the pin 54 is exposed on the upper surface 28b side of the cassette mounting base 28. A disk-shaped button 54b with an outer diameter larger than the diameter of the pin 54 is fixed to the exposed part of the pin 54.

When the button 54b fixed to the pin 54 is pressed down from above, the other end of the square bar 50a moves downward and one end of the square bar 50a moves upward. In other words, the roller 50b moves upward. A ring 54a with an outer diameter larger than the diameter of the through hole 28c is fixed near the bottom of the pin 54.

Figure 6 (A) is a partial cross-sectional side view showing the cassette mounting table 28 being pulled outward from the internal storage area 38b. The cassette mounting table 28 is attached so as to be slidable relative to the support table 26 by the above-mentioned guide mechanism (not shown), and is pulled outward toward the outside of the loading/unloading opening 32.

When the cassette mounting table 28 slides outward and the roller 50b goes beyond the outer end of the upper surface 26a of the support table 26, one end of the square bar 50a moves downward due to the moment of gravity acting on the stopper member 50 around the rotation axis 52a. In other words, the roller 50b falls off the support table 26.

Figure 6 (B) is a partial cross-sectional side view showing the roller 50b having fallen off the support base 26. When the roller 50b falls off the support base 26, the roller 50b is positioned lower than the upper surface 26a. As a result, the inward movement of the cassette mounting base 28 is restricted by the stopper member 50 coming into contact with the outer surface 26b of the support base 26. As the roller 50b falls off, the pin 54 rises and the ring 54a comes into contact with the lower surface 28a of the cassette mounting base 28.

In this way, the stopper member 50 and the shaft mechanism 52 function as a movement restriction mechanism that restricts the inward movement of the cassette mounting table 28 when the cassette mounting table 28 is pulled out. By providing a movement restriction mechanism, for example, it becomes easier to load and unload the relatively heavy cassette 30, thereby reducing the risk of damage to the workpiece 11 contained in the cassette 30 when it is loaded and unloaded.

In other words, if the cassette loading table 28 moves inward when the cassette 30 is loaded (transported) onto it, there is a high risk that the operator will drop the cassette 30 or collide the cassette 30 with the outer door 34; however, by restricting the inward movement of the cassette loading table 28 using a movement restriction mechanism, these risks can be sufficiently reduced.

In addition, if the cassette loading table 28 moves inward when the operator removes the cassette 30 from the cassette loading table 28, there is a high risk that the cassette 30 to be removed will collide with a part of the housing 22 located above the loading/unloading opening 32. However, this risk can be sufficiently reduced by restricting the inward movement of the cassette loading table 28 using a movement restriction mechanism.

The movement restriction mechanism of this embodiment is realized by rotating the square bar 50a in a plane parallel to the height and depth directions, so the cassette storage mechanism 24 does not become larger in the width direction, as would be the case, for example, if the movement restriction mechanism were provided on the outer width portion of the cassette mounting table 28. Therefore, it is easier to realize a cassette storage mechanism 24 that is compact in the width direction, compared to a case in which the movement restriction mechanism is provided on the outer width portion of the cassette mounting table 28.

The length of the square bar 50a, the position of the shaft mechanism 52, and other conditions are set so that when the square bar 50a falls off the support base 26, the area on the cassette mounting base 28 where the cassette 30 is placed is completely exposed from the housing 22. Therefore, the operator can place (carry) the cassette 30 on the cassette mounting base 28 with the cassette 30 completely exposed from the housing 22.

Figure 6 (C) is a partial cross-sectional side view showing the cassette mounting table 28 being returned to the internal storage area 38b. When returning the cassette mounting table 28 to the internal storage area 38b, the operator presses down the button 54b. For example, the operator presses down the button 54b until the bottom of the button 54b comes into contact with the upper surface 28b of the cassette mounting table 28. This causes the pin 54 to be pressed downward, and the roller 50b to move above the upper surface 26a of the support table 26.

The roller 50b rises, for example, until it comes into contact with the underside 28a of the cassette loading platform 28. As a result, the restriction on the inward movement of the cassette loading platform 28 is lifted, and the cassette loading platform 28 can be returned to the internal storage area 38b. The operator simply pushes the cassette loading platform 28 into the internal storage area 38b while pressing down the button 54b.

The cassette storage mechanism 24 is not limited to the above example. For example, the stopper members 50 may be provided at two different positions in the width direction of the cassette mounting table 28. In this case, through holes 28c are formed at positions corresponding to the respective pins 54. In this case, the two square bars 50a constituting the two stopper members 50 may be connected to each other at any position. If the two square bars 50a are connected to each other, one of the pins 54 can be omitted.

The through hole 28c may also be formed in the area of the cassette mounting table 28 where the cassette 30 is placed. In this case, when the cassette 30 is placed on the cassette mounting table 28, the pin 54 is pushed down by the cassette 30's own weight. In other words, it is no longer necessary for the operator to push down the pin 54 to release the restriction imposed by the stopper member 50.

As shown in FIG. 3, the loader/unloader 8 is equipped with a lifting mechanism 56 arranged on the opposite side of the inner door 40 from the internal storage area 38b. The lifting mechanism 56 has a support pillar 56a that is long in the height direction. On the inner door 40 side of the support pillar 56a, a pair of guide rails (not shown) are provided along the longitudinal direction (i.e., the height direction) of the support pillar 56a.

A plate-shaped lift platform 58 is attached to the pair of guide rails of the lift mechanism 56 in such a way that it can slide in the height direction. The top surface of the lift platform 58 is formed to be generally flat. The lift platform 58 slides in the height direction along the pair of guide rails while keeping its top surface generally perpendicular to the height direction.

A motor (not shown) and a drive pulley (not shown) connected to the motor's rotating shaft are provided at the bottom of the support pillar 56a. A driven pulley (not shown) is provided at the top of the support pillar 56a. A toothed endless belt (not shown) is stretched between the drive pulley and the driven pulley, and a part of this toothed endless belt is fixed to the lifting platform 58. Therefore, when the motor's rotating shaft is rotated in one direction, the lifting platform 58 rises, and when the motor's rotating shaft is rotated in the other direction, the lifting platform 58 descends.

On the upper surface side of the lifting platform 58, a temporary placement unit 60 is provided on which workpieces 11 removed from the cassette 30 in the cassette storage mechanism 24 and workpieces 11 to be loaded into the cassette 30 in the cassette storage mechanism 24 are temporarily placed. The temporary placement unit 60 has a rectangular cylindrical housing 62 with an opening formed on the cassette storage mechanism 24 side. Inside the housing 62, multiple transport units (transport mechanisms) 64 are arranged, each capable of gripping a workpiece 11 and moving it in the depth direction.

When transferring the workpiece unit 17 between the temporary placement unit 60 and the first cassette 30a of the first cassette storage mechanism 24a, the height of the temporary placement unit 60 is adjusted to the height of the first cassette storage mechanism 24a. In other words, the temporary placement unit 60 is disposed in the first transport area _B1a adjacent to the inner door 40 side in the depth direction relative to the first placement area _A1a of the first cassette storage mechanism 24a.

When the temporary placement unit 60 is placed in the first transport area _B1a and the inner door 40 of the first cassette storage mechanism 24a is opened, the transport unit 64 can access the first cassette 30a in the first placement area _A1a . For example, the transport unit 64 grasps the workpiece unit 17 stored in the first cassette 30a and pulls it out to the temporary placement unit 60.

Further, the transport unit 64 grasps the workpiece unit 17 temporarily placed on the temporary placement unit 60 and stores it in the first cassette 30a. In this manner, the transport unit 64 can transport the workpiece 11 between the temporary placement unit 60 in the first transport area _B1a and the first cassette 30a in the first placement area _A1a .

When transferring the workpiece unit 17 between the temporary placement unit 60 and the second cassette 30b of the second cassette storage mechanism 24b, the height of the temporary placement unit 60 is adjusted to the height of the second cassette storage mechanism 24b. In other words, the temporary placement unit 60 is disposed in the first transport area _B1b adjacent to the inner door 40 side in the depth direction relative to the first placement area _A1b of the second cassette storage mechanism 24b.

When the temporary placement unit 60 is placed in the first transport area _B1b and the inner door 40 of the second cassette storage mechanism 24b is opened, the transport unit 64 can access the second cassette 30b in the first placement area _A1b . For example, the transport unit 64 grasps the workpiece unit 17 stored in the second cassette 30b and pulls it out to the temporary placement unit 60.

Furthermore, the transport unit 64 grasps the workpiece unit 17 temporarily placed on the temporary placement unit 60 and stores it in the second cassette 30b. In this manner, the transport unit 64 can transport the workpiece 11 between the temporary placement unit 60 in the first transport area _B1b and the second cassette 30b in the first placement area _A1b .

A mounting table 66 is provided further above the second cassette storage mechanism 24b. An opening 22b is provided in the area directly above the mounting table 66, vertically penetrating the ceiling 22a of the housing 22. An opening 6a is provided in the area directly above the mounting table 66 and the opening 22b, vertically penetrating the transport path 6.

When the workpiece unit 17 is transported between the transport vehicle 10 and the temporary placement unit 60, first, the transport vehicle 10 equipped with a container (cassette) 102 capable of accommodating the workpiece unit 17 is moved above the opening 6a. Then, the container 102 is lowered so as to be suspended by the suspension member 112, and the container 102 is placed on the upper surface (second placement area _A2 ) of the placement table 66.

Also, the height of the temporary placement unit 60 is adjusted to the height of the container 102 placed on the placement table 66. That is, the temporary placement unit 60 is disposed in the second transport area _B2 adjacent to the placement table 66 in the depth direction. This allows the transport unit 64 to access the container 102 placed in the second placement area _A2 . For example, the transport unit 64 grasps the workpiece unit 17 housed in the container 102 and pulls it out to the temporary placement unit 60.

Furthermore, the transport unit 64 grasps the workpiece unit 17 temporarily placed on the temporary placement unit 60 and places it in the container 102. In this manner, the transport unit 64 can transport the workpiece 11 between the temporary placement unit 60 in the second transport area _B2 and the container 102 placed on the placement table 66. The lifting mechanism 56 that lifts and lowers the temporary placement unit 60 and the transport unit 64 in the temporary placement unit 60 are connected to the above-mentioned control device 46. The operations of the lifting mechanism 56 and the transport unit 64 are controlled by this control device 46.

The control device 46 is further connected to a receiver 68 that receives a signal (information) from the outside and sends it to the control device 46, and a transmitter 70 that transmits the signal (information) received from the control device 46 to the outside. The receiver 68 receives a signal sent from the control unit 12 of the transport system 2, for example, and sends it to the control device 46.

The control device 46 controls the operation of each component of the loader/unloader 8 based on, for example, a signal received from the receiver 68. The control device 46 also generates, for example, a notification signal and sends it to the transmitter 70. The transmitter 70 transmits, for example, the signal received from the control device 46 to the control unit 12 of the transport system 2.

The loader/unloader 8 of this embodiment can transport the workpiece units 17 between the cassette 30, which contains multiple workpiece units 17, and the container 102 of the transport vehicle 10 via the temporary placement unit 60. This allows the workpiece units 17 to be transported to each processing device 4 at the appropriate time, and also allows the workpiece units 17 processed by each processing device 4 to be collected at the appropriate time.

Figure 7 (A) is a partial cross-sectional side view showing the workpiece unit 17 being temporarily placed on the upper level of the temporary placement unit 60, and Figure 7 (B) is a partial cross-sectional side view showing the workpiece unit 17 being temporarily placed on the upper level of the temporary placement unit 60. The housing 62 of the temporary placement unit 60 includes, for example, an upper plate 62a arranged at the top and a lower plate 62b arranged at the bottom.

The upper ends of pillars (not shown) are connected to the two widthwise ends of the upper plate 62a. The lower ends of pillars are connected to the two widthwise ends of the lower plate 62b. In other words, the upper plate 62a and the lower plate 62b are connected to each other via two sets of pillars. A pair of side plates 62c separated in the widthwise direction are arranged in the space between the upper plate 62a and the lower plate 62b. Furthermore, an opening 62d is formed in the end of the housing 62 on the cassette storage mechanism 24 side.

A long upper guide rail (first temporary placement section) 72a is arranged along the depth direction at the same height inside the pair of side panels 62c. Each upper guide rail 72a has a support surface that supports the workpiece unit 17 (frame 15) from below, and a side surface that determines the widthwise position of the workpiece unit 17 (frame 15).

Lower guide rails (second temporary placement sections) 72b, which are long along the depth direction, are disposed on the inside of the pair of side panels 62c and below the upper guide rails 72a. Each lower guide rail 72b has a support surface that supports the workpiece unit 17 (frame 15) from below and a side surface that determines the widthwise position of the workpiece unit 17 (frame 15).

In this way, by providing the upper guide rail 72a and the lower guide rail 72b at different height positions inside the housing 62, the temporary placement unit 60 can simultaneously accommodate two workpiece units 17. Therefore, the workpiece units 17 can be transported more efficiently between the container 102 or cassette 30 of the transport vehicle 10 and the temporary placement unit 60, compared to when the temporary placement unit can only accommodate one workpiece unit 17.

For example, the upper guide rail 72a is used to accommodate the workpiece unit 17 before processing, and the lower guide rail 72b is used to accommodate the workpiece unit 17 after processing. However, there are no limitations on the manner in which the workpiece unit 17 is accommodated. The upper guide rail 72a may be used to accommodate the workpiece unit 17 after processing, and the lower guide rail 72b may be used to accommodate the workpiece unit 17 before processing.

A first transport unit 64a is provided at a height position corresponding to the upper guide rail 72a, and a second transport unit 64b is provided at a height position corresponding to the lower guide rail 72b. Each transport unit 64 has a gripping portion including two plate members arranged one above the other. The two plate members are arranged so that the lower surface of the upper plate member and the upper surface of the lower plate member are generally parallel.

The gripping portion of each transport unit 64 further includes an actuator (not shown) that adjusts the distance between the two plate members. By narrowing the distance between the two plate members with this actuator, the frame 15 of the workpiece unit 17 is gripped. By widening the distance between the two plate members, the frame 15 of the workpiece unit 17 is released from the two plate members.

Each transport unit 64 also has a horizontal movement mechanism (not shown) that moves the gripping portion in the depth direction. The horizontal movement mechanism has a linear guide (not shown) that is provided along the depth direction. The transport unit 64 is connected to this linear guide in a manner that allows it to slide.

For example, a driven pulley (not shown) having a rotation axis generally parallel to the width direction is provided on one end of the linear guide. Also, a drive pulley (not shown) having a rotation axis generally parallel to the width direction and a motor (not shown) whose rotation axis is connected to the drive pulley are provided on the other end of the linear guide.

A toothed endless belt (not shown) is stretched between the driven pulley and the drive pulley, and a part of this toothed endless belt is fixed to the gripping part. Therefore, when the motor shaft is rotated in one direction, the gripping part moves to one side in the depth direction, and when the motor shaft is rotated in the other direction, the gripping part moves to the other side in the depth direction.

When temporarily placing the workpiece unit 17 on the upper guide rail 72a, as shown in FIG. 7(A), first, the height of the temporary placement unit 60 is adjusted by the lifting mechanism 56, and the height of the upper guide rail 72a is adjusted to match the height of the container 102 or cassette 30 in which the workpiece unit 17 is housed.

Next, the gripping portion of the first transport unit 64a is moved into the container 102 or cassette 30. Then, the frame 15 of the workpiece unit 17 housed in the container 102 or cassette 30 is gripped by the gripping portion of the first transport unit 64a. After that, the gripping portion of the first transport unit 64a is moved in a direction away from the container 102 or cassette 30. As a result, the workpiece unit 17 is placed on the upper guide rail 72a.

The same operation is performed when the workpiece unit 17 temporarily placed on the upper guide rail 72a is placed in the container 102 or cassette 30. In this case, the workpiece unit 17 temporarily placed on the upper guide rail 72a is gripped by the gripping portion of the first transport unit 64a, and then the gripping portion of the first transport unit 64a is moved into the container 102 or cassette 30.

When temporarily placing the workpiece unit 17 on the lower guide rail 72b, as shown in FIG. 7(B), first, the height of the temporary placement unit 60 is adjusted by the lifting mechanism 56, and the height of the lower guide rail 72b is adjusted to match the height of the container 102 or cassette 30 in which the workpiece unit 17 is housed.

Next, the gripping portion of the second transport unit 64b is moved into the container 102 or cassette 30. The frame 15 of the workpiece unit 17 housed in the container 102 or cassette 30 is then gripped by the gripping portion of the second transport unit 64b. After that, the gripping portion of the second transport unit 64b is moved in a direction away from the container 102 or cassette 30. This causes the workpiece unit 17 to be placed on the lower guide rail 72b.

The same operation is performed when the workpiece unit 17 temporarily placed on the lower guide rail 72b is placed in the container 102 or the cassette 30. In this case, the workpiece unit 17 temporarily placed on the lower guide rail 72b is gripped by the gripping portion of the second transport unit 64b, and then the gripping portion of the second transport unit 64b is moved into the container 102 or the cassette 30.

The operation for transporting the workpiece unit 17 between the cassette 30 and the container 102 is, for example, as follows. First, the height of the temporary placement unit 60 is adjusted by the lifting mechanism 56, and the unprocessed workpiece unit 17 housed in the cassette 30 is pulled out onto the upper guide rail 72a. Next, the temporary placement unit 60 is raised by the lifting mechanism 56, and the processed workpiece unit 17 housed in the container 102 on the mounting table 66 is pulled out onto the lower guide rail 72b.

Then, the height of the temporary placement unit 60 is adjusted by the lifting mechanism 56, and the unprocessed workpiece unit 17 temporarily placed on the upper guide rail 72a is placed in the container 102 on the placement table 66. This operation allows the processed workpiece unit 17 to be efficiently removed (collected) from the container 102 and the unprocessed workpiece unit 17 to be efficiently carried into the container 102. However, the operation of transporting the workpiece unit 17 is not limited to this. Also, the relationship between the upper guide rail 72a and the lower guide rail 72b may be reversed as necessary.

8A is a plan view of the two upper guide rails 72a, etc. The upper guide rail 72a and the lower guide rail 72b located on one side in the width direction are fixed to the first side plate _62c1 . The upper guide rail 72a and the lower guide rail 72b located on the other side in the width direction are fixed to the second side plate _62c2 .

A first opening _62e1 that vertically penetrates one side of the lower plate 62b in the width direction and a second opening _62e2 that vertically penetrates the other side of the lower plate 62b in the width direction are formed on one end side of the lower plate _62b in the depth direction. A part of one end side of the first side plate _62c1 in the depth direction is inserted into the first opening _62e1 , and a part of one end side of the second side plate 62c2 in the depth direction is inserted into the second opening _62e2 .

A base of a first air actuator 74a and a base of a second air actuator 74b are fixed to an area adjacent to the first opening _62e1 and the second opening _62e2 on the lower surface of the lower plate 62b. A movable part (e.g., a piston rod) of the first air actuator 74a is connected to a part of the first side plate _62c1 inserted into the first opening _62e1 . A movable part (e.g., a piston rod) of the second air actuator 74b is connected to a part of the second side plate _62c2 inserted into the second opening _62e2 .

A first guide mechanism 76a and a second guide mechanism 76b are provided on the other end side in the depth direction of the lower plate 62b. The first guide mechanism 76a includes a guide rail that is fixed to the upper surface of the lower plate 62b and is long in the width direction, and a slider that is fixed to the lower side of the first side plate 62c- ₁ and attached to the guide rail in a state where it can slide in the width direction. The second guide mechanism 76b includes a guide rail that is fixed to the upper surface of the lower plate 62b, and a slider that is fixed to the lower side of the second side plate 62c- ₂ and attached to the guide rail in a state where it can slide in the width direction.

Therefore, by changing the distance between the first side plate _62c1 and the second side plate _62c2 using the first air actuator 74a and the second air actuator 74b, the distance between the two upper guide rails 72a can be changed while maintaining them parallel to each other, and the distance between the two lower guide rails 72b can be changed while maintaining them parallel to each other.

In other words, the first side plate _62c1 , the first air actuator 74a, the first guide mechanism 76a, the second side plate _62c2 , the second air actuator 74b, and the second guide mechanism 76b function as a spacing adjustment mechanism 78 that adjusts the spacing between the two upper guide rails 72a and the spacing between the two lower guide rails 72b.

The operation of the first air actuator 74a and the second air actuator 74b is controlled by the above-mentioned control device 46. In other words, the control device 46 controls the operation of the first air actuator 74a and the second air actuator 74b according to the size of the workpiece unit 17 (workpiece 11), and adjusts the distance between the two upper guide rails 72a and the distance between the two lower guide rails 72b.

For example, if the diameter of the workpiece 11 is 300 mm, a frame 15 with a width of approximately 400 mm is used. In this case, the control device 46 operates the first air actuator 74a and the second air actuator 74b so that the distance 72c between the sides of the two upper guide rails 72a (the distance 72c between the sides of the two lower guide rails 72b) is slightly larger than 400 mm (for example, by a few mm).

For example, when the diameter of the workpiece 11 is 200 mm, a frame 15 having a width of approximately 300 mm is used. In this case, the control device 46 operates the first air actuator 74a and the second air actuator 74b so that the distance 72c between the sides of the two upper guide rails 72a (the distance 72c between the sides of the two lower guide rails 72b) is slightly larger than 300 mm (for example, by a few mm).

Figure 8 (B) is a plan view showing the state where the spacing between the two upper guide rails 72a has been narrowed. Note that when the spacing between the two upper guide rails 72a is narrowed, the spacing between the two lower guide rails 72b is also narrowed. In this way, by adjusting the spacing between the two upper guide rails 72a and the spacing between the two lower guide rails 72b according to the diameter of the workpiece 11, workpieces 11 of different sizes can be temporarily placed on the temporary placement unit 60. In other words, one temporary placement unit 60 can accommodate the transport of workpiece units 17 of multiple sizes.

Figure 9 (A) is a perspective view showing the top side of the transport vehicle 10 that travels on the transport path 6 to transport the workpiece unit 17, and Figure 9 (B) is a perspective view showing the bottom side of the transport vehicle 10. As shown in Figures 9 (A) and 9 (B), the transport vehicle 10 has a plate-shaped frame 82 on which various components are mounted. A pair of axles 84 are arranged on both side ends on the front side of the frame 82. The axles 84 are attached to the underside of the frame 82 so that one end protrudes from the side of the frame 82.

A wheel (front wheel) 86 is fixed to one end of each of the pair of axles 84. That is, the pair of wheels 86 are arranged at two positions spaced apart in the width direction (vehicle width direction) of the frame 82. In addition, a pair of wheels (rear wheels) 88 are arranged at two positions spaced apart in the width direction of the rear end of the frame 82. The wheels 88 are, for example, casters that can rotate 360° around a rotation axis along the height direction, and are attached to the underside of the frame 82. The wheels 86 and 88 are wheels for driving the transport vehicle 10 when it travels on the transport path 6.

A drive unit 90 that drives a pair of wheels 86 is mounted on the front end of the frame 82. The drive unit 90 includes a pair of motors 92 each connected to the wheels 86 via an axle 84 or the like. The motors 92 include a rotating shaft (output shaft) 92a and generate power to rotate the wheels 86.

As shown in FIG. 9(B), a pulley 94 is provided on the other end of the axle 84. An endless connecting member (not shown), such as a belt or chain, is hung between the rotating shaft 92a of the motor 92 and the pulley 94. The rotating shaft 92a of the motor 92, the pulley 94, and the connecting member form a power transmission mechanism, which connects the axle 84 and the motor 92. As a result, the power (rotational force) generated by the motor 92 is transmitted to the wheel 86, causing the wheel 86 to rotate.

The drive unit 90 uses a pair of motors 92 to independently control the direction of rotation of the pair of wheels 86. By rotating the pair of wheels 86 in the same direction, the transport vehicle 10 moves forward or backward. In addition, by rotating the pair of wheels 86 in opposite directions, the transport vehicle 10 can be rotated around a rotation axis along the height direction, thereby controlling the direction in which the transport vehicle 10 travels. There are no limitations on the structure of the wheels 86 and 88. For example, so-called Mecanum wheels, in which multiple inclined barrel-shaped (cylindrical) rotating bodies are attached to the outer circumferential surface that contacts the transport path 6, can be used as the wheels 86 and 88.

A battery (secondary battery) 96 that supplies power to the motor 92 and other components is connected to the drive unit 90 via a power supply wiring (not shown). The battery 96 is attached, for example, to the front end of the frame 82, and supplies power to the motor 92 to rotate the wheels 86. A lithium-ion battery or the like is used as the battery 96.

Figure 10 is an enlarged perspective view showing the front end of the transport vehicle 10. A pair of terminals (power receiving terminals) 100 are provided on the underside of the front end of the frame 82, which are connected to the battery 96 via a charging wire (charging wire) 98. The pair of terminals 100 are connected, for example, to a power supply terminal installed outside the transport vehicle 10, and receive a supply of power used to charge the battery 96. The details of charging the battery 96 using the terminals 100 will be described later.

As shown in Figures 9(A) and 9(B), a storage area 104 is provided below the frame 82 in which a container (cassette) 102 that contains the workpiece unit 17 is stored. The storage area 104 is surrounded by a pair of wheels 86 and a pair of wheels 88, and is located above the lower ends of the wheels 86 and 88. In this storage area 104, a container 102 that can contain one or more workpiece units 17 is placed.

Fig. 11(A) is a perspective view showing the container 102, and Fig. 11(B) is a front view showing the container 102. The container 102 is formed, for example, in a hexagonal prism shape in a plan view, and has a storage section (storage space) 102a inside which the workpiece unit 17 can be stored. The storage section 102a is connected to the space outside the container 102 via a slit-shaped opening 102b that opens on one side of the container 102. The workpiece unit 17 is carried into the storage section 102a through the opening 102b, and is carried out of the storage section 102a through the opening 102b.

As shown in FIG. 11(B), the container 102 is configured to accommodate, for example, two different sizes of workpiece unit 17a and workpiece unit 17b. The accommodation section 102a of the container 102 is provided with a pair of first guide rails 106 capable of holding the workpiece unit 17a, and a pair of second guide rails 108 capable of holding the workpiece unit 17b.

The pair of first guide rails 106 are fixed to the upper wall 102c of the storage section 102a at a predetermined interval, and have a holding surface 106a that holds the lower surface of the workpiece unit 17a from below, and a side surface 106b that determines the horizontal position of the workpiece unit 17a. The pair of second guide rails 108 are fixed to the bottom wall 102d of the storage section 102a at a predetermined interval, and have a holding surface 108a that holds the lower surface of the workpiece unit 17b from below. The horizontal position of the workpiece unit 17b is determined by the inner side surface of the container 102.

The distance between the pair of first guide rails 106 is narrower than the distance between the pair of second guide rails 108. Therefore, the pair of first guide rails 106 can hold a workpiece unit 17a that is smaller than the workpiece unit 17b held by the second guide rails 108. For example, the pair of first guide rails 106 holds a workpiece 11 with a diameter of approximately 200 mm (8 inches), and the pair of second guide rails 108 holds a workpiece 11 with a diameter of approximately 300 mm (12 inches).

As described above, the container 102 is not configured to accommodate multiple workpiece units 17 of the same type (same size). In this respect, the function and use of the container 102 is significantly different from the function and use of the cassette 30, which can accommodate multiple workpiece units 17 of the same type.

However, there are no limitations on the structure of the container 102 or the storage section 102a. For example, the storage section 102a may be configured to store one or three or more workpiece units 17. The storage section 102a may also be configured to store multiple workpiece units 17 of the same type.

When the workpiece unit 17 is transported by the transport vehicle 10, the container 102 is stored in the storage area 104 as shown in FIG. 9(A). At this time, the bottom surface of the container 102 is positioned higher than the bottom ends of the wheels 86 and 88. Therefore, the container 102 does not come into contact with the transport path 6 while the transport vehicle 10 is traveling.

A lifting unit (lifting mechanism) 110 that suspends and raises the container 102 is provided in the upper surface area of the frame 82 located above the storage area 104. The lifting unit 110 lowers the container 102 stored in the storage area 104 and places it in a specified placement area. The lifting unit 110 also raises the container 102 placed in the specified placement area and stores the container 102 in the storage area 104.

12 is a perspective view showing the transport vehicle 10 with the container 102 placed on the placement area A. The lifting unit 110 includes a hanging member 112 having one end (lower end) connected to the container 102, and a drive mechanism 114 for winding up and sending out the hanging member 112. The placement area A is, for example, the upper surface of the placement platform 66 of the loader/unloader 8 (second placement area _A2 , see FIG. 3).

As shown in FIG. 12, the lifting unit 110 has four hanging members 112. For example, a belt having a predetermined width is used as the hanging members 112. The tips (lower ends) of the four hanging members 112 are connected to four positions on the upper surface side of the container 102, respectively.

When the hanging member 112 is sent out by the drive mechanism 114 while the container 102 is stored in the storage area 104, the container 102 is lowered and placed in the placement area A. When the hanging member 112 is wound up by the drive mechanism 114 while the container 102 is placed in the placement area A, the container 102 is raised and stored in the storage area 104.

When a belt is used as the hanging member 112, as shown in FIG. 12, it is preferable to adjust the orientation of the belt relative to the container 102 so that the width direction of the belt is aligned with the direction in which the workpiece unit 17 passes through the opening 102b when it is conveyed out of the storage section 102a. Since the container 102 is unlikely to swing in the width direction of the belt, this embodiment reduces the possibility of the workpiece unit 17 jumping out of the opening 102b while the container 102 is being raised or lowered.

The orientation of the belt relative to the container 102 may be adjusted so that the width direction of the belt is aligned with the direction in which the workpiece unit 17 passes through the opening 102b when the workpiece unit 17 is carried into the storage section 102a. In this embodiment, the belt and the container 102 are connected so that the width direction of the belt is aligned with a direction perpendicular to the plane including the opening 102b of the container 102. The hanging member 112 may be a member other than a belt, such as a wire rope that can be wound up and let out.

As shown in FIG. 9(B), a plurality of contact members 116 that come into contact with the upper surface side of the container 102 are provided on the lower surface side of the frame 82. Each of the plurality of contact members 116 is formed in a columnar shape of approximately the same height, and is fixed to the frame 82 so as to protrude downward from the lower surface of the frame 82. When the container 102 is stored in the storage area 104, the upper surface side of the container 102 comes into contact with the lower ends of the plurality of contact members 116, pushing each contact member 116 upward.

The contact member 116 is formed, for example, from an elastic member that undergoes elastic deformation when the container 102 is pressed against it. In other words, the contact member 116 is formed from an elastic body that, when pressed by the container 102 stored in the storage area 104, deforms to conform to the shape of the upper surface side of the container 102, and generates a restoring force that presses the container 102 downward.

When an elastic member is used for the contact member 116, for example, the impact when the container 102 comes into contact with the contact member 116 is mitigated, making it less likely that the container 102 or the workpiece unit 17 inside the container 102 will be damaged. In addition, when the transport vehicle 10 travels along the transport path 6, the contact member 116 acts as a buffer material, making it less likely that vibrations of the frame 82 will be transmitted to the container 102 or the workpiece unit 17.

The contact member 116 may be, for example, a columnar member made of rubber (urethane rubber, silicone rubber, etc.), sponge, or the like. In particular, by using a contact member 116 made of rubber that exerts a large frictional force between the contact member 116 and the container 102, it is possible to prevent the container 102 from shifting position during transport. Note that the entire contact member 116 does not necessarily need to be made of an elastic material, and it is sufficient that at least the area (lower end) of the contact member 116 that comes into contact with the container 102 is made of an elastic material.

It is also preferable that the contact members 116 contact the upper surface of the container 102 at three or more positions. In this embodiment, as shown in FIG. 9(B), three columnar contact members 116 are provided on the frame 82. In this case, the upper surface of the container 102 is arranged along a plane including the lower ends of the three contact members 116, so that the container 102 is less likely to tilt. However, the shape, number, arrangement, and other conditions of the contact members 116 can be changed as desired. For example, a pair of linear (strip-shaped) contact members 116 arranged roughly parallel to each other may be provided on the frame 82.

In addition, in order to prevent vibrations of the frame 82 from being transmitted to the container 102, the container 102 may be connected to the hanging member 112 via an elastic member. Figure 13 is a perspective view showing a transport vehicle 10 in which the container 102 is connected to the hanging member 112 via an elastic member (expandable member) 118. In this case, the contact member 116 may be omitted.

An elastic member 118 is provided between the tip side (lower end side) of the hanging member 112 and the container 102. The elastic member 118 is a member that expands and contracts along the length of the hanging member 112 when the hanging member 112 sways, and is made of an expandable elastic body such as rubber or a spring. Also, an expandable part such as an expansion joint can be used as the elastic member 118.

When the container 102 is stored in the storage area 104, the amount of winding of the hanging member 112 is adjusted so that the top side of the container 102 does not come into contact with the frame 82 or the contact member 116. As a result, even if the frame 82 vibrates, the vibration is not directly transmitted to the container 102. Furthermore, vibration transmitted from the frame 82 via the lifting unit 110 and the hanging member 112 is mitigated by the expansion and contraction of the elastic member 118, and is therefore unlikely to be transmitted to the container 102. In this way, the elastic member 118 functions as a vibration-proofing material.

However, if a contact member 116 is provided on the underside of the frame 82, the amount of winding of the hanging member 112 may be adjusted so that the container 102 is stored in the storage area 104 in a state of contact with the contact member 116. In this case, the transmission of vibration from the frame 82 to the container 102 is mitigated by the contact member 116, and the transmission of vibration from the hanging member 112 to the container 102 is mitigated by the elastic member 118.

A cover 120 is provided below the rear end of the frame 82. The cover 120 covers the opening 102b (see FIG. 11(A)) of the container 102 when the container 102 is stored in the storage area 104. When the opening 102b is covered by the cover 120, foreign objects are prevented from entering the storage section 102a of the container 102 while the transport vehicle 10 is traveling, and foreign objects are prevented from adhering to the workpiece unit 17.

In addition, even if the container 102 tilts or vibrates while the transport vehicle 10 is moving, the cover 120 prevents the workpiece unit 17 from jumping out of the opening 102b. Details of the structure and operation of the cover 120 will be described later (see Figures 17, 18(A), and 18(B)).

A pair of first sensors 122 are provided at the front and rear ends of the frame 82. That is, the pair of first sensors 122 are provided at two positions spaced apart in the length direction (vehicle length direction) of the frame 82. In addition, a pair of second sensors 124 are provided at both side ends of the frame 82. That is, the pair of second sensors 124 are provided at two positions spaced apart in the width direction (vehicle width direction) of the frame 82.

The first sensor 122 and the second sensor 124 are mounted facing the transport path 6 along which the transport vehicle 10 travels, and detect marks provided on the transport path 6. Based on the results of the detection of the marks by the first sensor 122 and the second sensor 124, the travel, turning, stopping, etc. of the transport vehicle 10 are controlled. Details of the control of the transport vehicle 10 using the first sensor 122 and the second sensor 124 will be described later.

The specific locations at which the first sensor 122 and the second sensor 124 are installed are adjusted according to the specifications of the transport path 6 along which the transport vehicle 10 travels. For example, the pair of first sensors 122 are mounted on the front and rear ends of the frame 82, respectively, near the center of the frame 82 in the width direction. The pair of second sensors 124 are mounted on both side ends of the frame 82, respectively, near the center of the frame 82 in the length direction.

The pair of second sensors 124 may be fixed to the frame 82 so as to be aligned on a straight line passing through the pair of wheels 86. For example, the pair of second sensors 124 are provided on the outside of the pair of wheels 86 so as to sandwich the pair of wheels 86 in the width direction of the frame 82. The pair of second sensors 124 may also be provided on the inside of the pair of wheels 86 so as to be sandwiched between the pair of wheels 86 in the width direction of the frame 82.

In this way, by arranging a pair of second sensors 124 on a straight line passing through a pair of wheels 86, the pair of second sensors 124 can detect the mark that is the target of detection by the pair of second sensors 124 at the same time that the wheels 86 pass over the mark. Therefore, by turning or stopping the transport vehicle 10 at the timing when the mark is detected, the travel of the transport vehicle 10 can be appropriately controlled without making any corrections.

On the other hand, when the pair of second sensors 124 are away from the straight line passing through the pair of wheels 86, it is advisable to control the timing of turning and stopping of the transport vehicle 10 using the distance between the pair of second sensors 124 and the pair of wheels 86 (pair of axles 84) and the traveling speed of the transport vehicle 10 in addition to the timing at which the mark is detected.

Furthermore, as shown in FIG. 10, a third sensor 126 is provided at the front end of the frame 82 to detect when the transport vehicle 10 collides with an obstacle. For example, a pair of third sensors 126 are attached to both ends of the front end of the frame 82. As the third sensor 126, for example, a push button switch is used.

When the front end of the transport vehicle 10 collides with an obstacle, the third sensor 126 is activated and detects the collision of the transport vehicle 10. When the third sensor 126 detects the collision of the transport vehicle 10, the transport vehicle 10 stops operating. Note that there are no restrictions on the structure or type of the third sensor 126, as long as it can detect the collision of the transport vehicle 10.

The transport vehicle 10 may be covered by a flexible exterior cover that can, for example, reduce the impact caused by a collision. In this case, when the exterior cover covering the front end of the transport vehicle 10 collides with an obstacle, the exterior cover deforms and comes into contact with the third sensor 126, and the collision of the transport vehicle 10 is detected.

As shown in Figures 9 (A) and 9 (B), a plate-shaped support base 128 fixed to the frame 82 is provided above the lifting unit 110. A control unit (control unit) 130 that controls the operation of the transport vehicle 10 is fixed to the upper surface of this support base 128. The control unit 130 is connected to each component of the transport vehicle 10 (drive unit 90, lifting unit 110, first sensor 122, second sensor 124, third sensor 126, etc.) and controls the operation of each component.

The control unit 130 is configured by a computer including, for example, a processing device such as a CPU (Central Processing Unit), a main storage device such as a DRAM (Dynamic Random Access Memory), and an auxiliary storage device such as a flash memory. The functions of the control unit 130 are realized by operating the processing device etc. in accordance with software stored in the auxiliary storage device.

Also fixed on the support base 128 are a receiver 132 that receives signals (information) from the outside and sends them to the control unit 130, and a transmitter 134 that transmits signals (information) received from the control unit 130 to the outside. The receiver 132 and the transmitter 134 are each connected to the control unit 130.

The receiver 132, for example, receives a signal transmitted from the control unit 12 of the transport system 2 and sends it to the control unit 130. The control unit 130, for example, controls the operation of the transport vehicle 10 based on the signal received from the receiver 132. The control unit 130 also, for example, generates a notification signal and sends it to the transmitter 134. The transmitter 134, for example, transmits the signal received from the control unit 130 to the control unit 12 of the transport system 2 (see FIG. 2).

In addition, each component of the transport vehicle 10 (lifting unit 110, first sensor 122, second sensor 124, third sensor 126, control unit 130, receiver 132, transmitter 134, etc.) is connected to a battery 96 via power supply wiring and operates using power supplied from this battery 96.

Fig. 14(A) is a plan view showing an example of the configuration of the lifting unit 110, and Fig. 14(B) is a side view showing an example of the configuration of the lifting unit 110. As described above, the lifting unit 110 includes a drive mechanism 114 that winds up and sends out the multiple hanging members 112. The drive mechanism 114 includes a motor 142 having a rotation shaft (output shaft) 142a.

The motor 142 rotates the rotating shaft 142a to generate power used to wind and unwind the hanging member 112. A first rotating shaft (first shaft) 144a and a second rotating shaft (second shaft) 144b are provided at two positions on either side of the motor 142 and are arranged roughly parallel to each other.

A pulley 146 is provided on one end of the first rotating shaft 144a. An endless connecting member 148 such as a belt or chain is hung between the rotating shaft 142a of the motor 142 and the pulley 146. The rotating shaft 142a of the motor 142, the pulley 146, and the connecting member 148 form a power transmission mechanism, which connects the motor 142 and the first rotating shaft 144a. On the other hand, no pulley or the like that realizes connection with the motor 142 is provided on one end of the second rotating shaft 144b.

A pulley 150a is provided on the other end of the first rotating shaft 144a, and a pulley 150b with the same diameter as the pulley 150a is provided on the other end of the second rotating shaft 144b. An endless connecting member 152 such as a belt or chain is hung between the pulleys 150a and 150b. The pulleys 150a, 150b, and the connecting member 152 form a power transmission mechanism, which connects the first rotating shaft 144a and the second rotating shaft 144b.

Cylindrical reels 154a around which the hanging members 112 are wound are fixed to both ends of the first rotating shaft 144a. Cylindrical rollers 156a supporting the hanging members 112 are rotatably arranged at two positions outside each reel 154a (the side opposite the motor 142) and below each reel 154a. The rotation axis of each roller 156a is generally parallel to the first rotating shaft 144a.

On the other hand, cylindrical reels 154b around which the hanging members 112 are wound are fixed to both ends of the second rotating shaft 144b. In addition, cylindrical rollers 156b supporting the hanging members 112 are rotatably arranged at two positions outside each reel 154b (the side opposite the motor 142) and below each reel 154b. The rotation axis of each roller 156b is generally parallel to the second rotating shaft 144b.

The base end of the hanging member 112 is fixed to the reel 154a and the reel 154b. The hanging member 112 fixed to the reel 154a hangs down while in contact with the outer part of the roller 156a. The hanging member 112 fixed to the reel 154b hangs down while in contact with the outer part of the roller 156b.

The hanging member 112 fixed to the reel 154a passes above the reel 154a and is supported by the roller 156a, as shown in FIG. 14(B). On the other hand, the hanging member 112 fixed to the reel 154b passes below the reel 154b and is supported by the roller 156b.

When the rotating shaft 142a of the motor 142 is rotated in a first direction (the direction shown by the arrow _C1 in FIG. 14B), the reel 154a fixed to the first rotating shaft 144a rotates in a direction (the direction shown by the arrow _C2 in FIG. 14B) for unwinding the hanging member 112. As a result, the hanging member 112 is unwound from the reel 154a via the rollers 156a.

Furthermore, the torque of the first rotating shaft 144a is transmitted to the second rotating shaft 144b by the connecting member 152, and the reel 154b fixed to the second rotating shaft 144b rotates in a direction (indicated by an arrow _C3 in FIG. 14B) for unwinding the hanging member 112. As a result, the hanging member 112 is unwound from the reel 154b via the rollers 156b.

On the other hand, when the rotating shaft 142a of the motor 142 is rotated in a second direction (indicated by an arrow _D1 in FIG. 14B) which is opposite to the first direction, the reel 154a fixed to the first rotating shaft 144a rotates in a direction (indicated by an arrow _D2 in FIG. 14B) for winding up the hanging member 112. As a result, the hanging member 112 is wound up onto the reel 154a via the roller 156a.

Furthermore, the torque of the first rotating shaft 144a is transmitted to the second rotating shaft 144b by the connecting member 152, and the reel 154b fixed to the second rotating shaft 144b rotates in a direction (indicated by an arrow _D3 in FIG. 14B) for winding up the hanging member 112. As a result, the hanging member 112 is wound up onto the reel 154b via the roller 156b.

When each hanging member 112 is sent out from the drive mechanism 114, the container 102 connected to the tip of the hanging member 112 is lowered. This allows the container 102 to be placed in the placement area A (see FIG. 12). Also, when each hanging member 112 is wound up by the drive mechanism 114, the container 102 connected to the tip of the hanging member 112 is raised. This allows the container 102 to be stored in the storage area 104 of the transport vehicle 10 (see FIG. 9 (A)).

It is also possible to use a lifting unit 110 equipped with another drive mechanism having a structure different from the drive mechanism 114 described above. FIG. 15(A) is a plan view showing another example of the configuration of the lifting unit 110, and FIG. 15(B) is a side view showing another example of the configuration of the lifting unit 110. The lifting unit 110 shown in FIG. 15(A) and FIG. 15(B) is equipped with a drive mechanism 162 instead of the drive mechanism 114 described above.

The drive mechanism 162 includes a motor 164 having a rotating shaft (output shaft) 164a, and a first rotating shaft (first shaft) 166a, a second rotating shaft (second shaft) 166b, and a third rotating shaft (third shaft) 166c arranged generally parallel to one another. The first rotating shaft 166a is arranged between the second rotating shaft 166b and the third rotating shaft 166c.

The motor 164 is disposed, for example, between the first rotating shaft 166a and the second rotating shaft 166b, and generates power used to wind and unwind the hanging member 112 by rotating the rotating shaft 164a. However, the motor 164 may also be disposed between the first rotating shaft 166a and the third rotating shaft 166c.

A pulley 168 is provided on one end of the first rotating shaft 166a. An endless connecting member 170 such as a belt or chain is hung between the rotating shaft 164a of the motor 164 and the pulley 168. The rotating shaft 164a of the motor 164, the pulley 168, and the connecting member 170 form a power transmission mechanism, which connects the motor 164 and the first rotating shaft 166a.

A plurality of cylindrical reels 172 around which the hanging members 112 are wound are fixed to the first rotating shaft 166a. Specifically, a pair of reels 172 are fixed to both ends of the first rotating shaft 166a. Two hanging members 112 are fixed to each reel 172 and wound in the same direction.

Figure 16 (A) is a plan view showing the reel 172, and Figure 16 (B) is a side view showing the reel 172. The lifting unit 110 is equipped with a cylindrical fixing member 174 for fixing the hanging members 112 to the reel 172, and the two hanging members 112 are fixed together to the reel 172 by this fixing member 174.

As shown in FIG. 16B, a groove (recess) 172a is provided on part of the outer periphery of the reel 172, which is aligned with the rotation axis of the reel 172 (i.e., the first rotation axis 166a). The inner surface of the groove 172a is curved. In addition, both ends of the groove 172a reach both ends in the direction of the rotation axis of the reel 172. The two hanging members 112 are arranged in the same direction so that their base ends overlap with the groove 172a.

The fixed member 174 has a curved outer peripheral surface that corresponds to the shape of the inner surface of the groove 172a. The fixed member 174 is fitted into the groove 172a so as to push the base ends of the two hanging members 112 toward the inner surface of the groove 172a, with the base ends of the two hanging members 112 positioned so as to overlap with the groove 172a. As a result, the base ends of the two hanging members 112 are sandwiched between the inner surface of the groove 172a and the outer peripheral surface of the fixed member 174, and are fixed to the reel 172.

As shown in FIG. 16(A), a pair of protrusions (convex portions) 172b are provided on the outer periphery of the reel 172 to sandwich the two hanging members 112 fixed to the reel 172 in the width direction. The pair of protrusions 172b function as guides to prevent the hanging members 112 from shifting in the width direction. By rotating the reel 172 configured in this manner, the two hanging members 112 can be wound up or the two hanging members 112 can be fed out.

As shown in Figures 15(A) and 15(B), one of the two hanging members 112 fixed to the reel 172 hangs down while in contact with the second rotating shaft 166b. The other of the two hanging members 112 fixed to the reel 172 hangs down while in contact with the third rotating shaft 166c.

The second rotating shaft 166b and the third rotating shaft 166c are each supported in a state in which they can easily rotate in response to an externally applied force, and their outer circumferential surfaces contact the hanging member 112. A pair of guides 176 are provided on both sides of the area where the hanging member 112 contacts the second rotating shaft 166b and the third rotating shaft 166c, to prevent the hanging member 112 from shifting in the width direction.

When the rotating shaft 164a of the motor 164 is rotated in a first direction (the direction indicated by the arrow _E1 in FIG. 15B), the reel 172 rotates in a direction (the direction indicated by the arrow _E2 in FIG. 15B and FIG. 16B) in which the hanging members 112 are fed out. This causes the two hanging members 112 to be fed out from the reel 172 via the second rotating shaft 166b and the third rotating shaft 166c, and as a result, the container 102 connected to the hanging members 112 is lowered.

On the other hand, when the rotating shaft 164a of the motor 164 is rotated in a second direction (indicated by an arrow _F1 in FIG. 15(B)) opposite to the first direction, the reel 172 rotates in a direction (indicated by an arrow _F2 in FIG. 15(B) and FIG. 16(B)) in which the hanging members 112 are wound up. As a result, the two hanging members 112 are wound up on the reel 172 via the second rotating shaft 166b and the third rotating shaft 166c, and as a result, the container 102 connected to the hanging members 112 is raised.

As described above, the drive mechanism 162 shown in FIG. 15(A) has two reels 172 fixed to the first rotating shaft 166a, and two hanging members 112 fixed to each of the two reels 172. Therefore, the sending out and winding up of the four hanging members 112 are controlled by the rotation of the first rotating shaft 166a. This reduces the number of parts that make up the drive mechanism 114, making the transport vehicle 10 lighter, reducing the possibility of breakdowns, and reducing costs.

By using the lifting unit 110 as described above, the container 102 in which the workpiece unit 17 is housed can be raised and lowered between the storage area 104 and the placement area A below the storage area 104. Details of the lifting unit 110 can be changed within a range that allows the container 102 to be raised and lowered appropriately.

The second rotating shaft 166b and the third rotating shaft 166c may be fixed in a non-rotating state. In this case, the hanging member 112 is fed out from the reel 172 or wound up onto the reel 172 while sliding along the outer circumferential surface of the second rotating shaft 166b or the third rotating shaft 166c.

Figure 17 is an enlarged perspective view showing the cover 120. The cover 120 is disposed at the rear end of the underside of the frame 82 so as to face one side (rear) of the container 102 stored in the storage area 104. This cover 120 includes a lid portion 182 connected to the frame 82 so as to be rotatable relative to the frame 82. The lid portion 182 is formed in a shape and size capable of covering the opening 102b (see Figure 18 (B)) of the container 102. In addition, a plurality of contact portions 184 are fixed to the upper portion of the lid portion 182 so as to come into contact with the upper surface side of the container 102.

When the container 102 rises toward the storage area 104, the upper surface of the container 102 comes into contact with the lower end of the contact portion 184, pushing up the contact portion 184. This causes the lid portion 182 to move (rotate) in a direction approaching the container 102, and the opening 102b of the container 102 is covered by the lid portion 182.

Figure 18 (A) is a side view showing the cover 120 when the container 102 is not stored in the storage area 104, and Figure 18 (B) is a side view showing the cover 120 when the container 102 is stored in the storage area 104. A fixed block 186 is fixed to the underside of the frame 82. A connecting block (L-shaped block) 188 that is L-shaped when viewed from the width direction of the frame 82 (vehicle width direction) is connected to the fixed block 186 in a rotatable manner.

The connecting block 188 includes a connecting portion 188a on the upper side (the frame 82 side) and a fixed portion 188b below the connecting portion 188a. The connecting portion 188a has a through hole that penetrates the frame 82 in the width direction, and a connecting shaft 190 fixed to the fixed block 186 is inserted into this through hole. This allows the connecting block 188 to be connected to the fixed block 186 in a state in which it can rotate around the connecting shaft 190.

The lid 182 is fixed to the storage area 104 side (front side) of the fixing part 188b. Since the connecting shaft 190 inserted into the through hole is generally parallel to the width direction of the frame 82, the lid 182 rotates together with the connecting block 188 along a plane generally perpendicular to the width direction of the frame 82.

The lid portion 182 comprises a plate-like member 182a fixed to a fixing portion 188b of the connecting block 188. A flexible member 182b is provided on the surface of the plate-like member 182a facing the storage area 104 (front side). The flexible member 182b is formed in a shape and size capable of covering the entire opening 102b of the container 102.

A contact portion 184 is disposed on the storage area 104 side (front side) of the plate-shaped member 182a. The contact portion 184 includes, for example, a fixed member 184a that is fixed to the plate-shaped member 182a above the flexible member 182b, and a roller 184b that is supported on the storage area 104 side (front side) of the fixed member 184a.

The roller 184b is formed of an elastic member such as rubber, and is supported by the fixed member 184a so that it can rotate around an axis of rotation that is generally parallel to the width direction of the frame 82. The lower end of the roller 184b is positioned lower than the lower end of the fixed member 184a. Therefore, when the upper surface side of the container 102 is in contact with the roller 184b, the roller 184b also rotates in accordance with the rotation of the lid portion 182.

For example, when the container 102 rises toward the storage area 104, the upper surface of the container 102 comes into contact with the roller 184b of the contact portion 184, pushing up the contact portion 184. Then, the cover 120 rotates about the connecting shaft 190 in a direction in which its lower end approaches the container 102 (the direction shown by the arrow G in FIG. 18(B)), and the surface of the plate-like member 182a on the storage area 104 side (front side) becomes roughly parallel to the bottom surface of the frame 82. Then, the flexible member 182b of the lid portion 182 comes into contact with one side (rear) of the container 102, closing the opening 102b.

If the opening 102b of the container 102 stored in the storage area 104 remains exposed, there is a possibility that foreign matter such as dust may enter the container 102's storage section 102a. In particular, while the transport vehicle 10 is traveling, static electricity generated by friction between the transport path 6 and the wheels 88 may attract, for example, a very small amount of foreign matter present in the clean room in which the transport path 6 is installed to the transport vehicle 10, and the foreign matter may enter the storage section 102a.

In this embodiment, when the container 102 is stored in the storage area 104, the opening 102b of the container 102 is covered by a cover 120 to prevent foreign objects from entering the storage section 102a of the container 102 while the transport vehicle 10 is traveling. In addition, even if the container 102 tilts or vibrates while the transport vehicle 10 is traveling, the workpiece unit 17 is prevented from jumping out of the container 102.

On the other hand, while the container 102 is being raised and lowered by the lifting unit 110, no static electricity is generated due to friction between the transport path 6 and the wheels 88, and no foreign objects are stirred up by the movement of the transport vehicle 10. Therefore, even if the opening 102b of the container 102 is not covered while the container 102 is being raised and lowered, there is a low possibility that foreign objects will enter the storage section 102a.

In addition, a flexible member 182b is provided in the area of the cover 120 corresponding to the opening 102b. For example, the flexible member 182b deforms when the workpiece unit 17 contained in the container 102 collides with it, mitigating the impact acting on the workpiece unit 17. In other words, the flexible member 182b functions as a cushioning material. This flexible member 182b makes it difficult for the workpiece 11 contained in the workpiece unit 17 to be damaged.

There are no limitations on the material or structure of the flexible member 182b. For example, it is advisable to use a flexible member 182b that can absorb impact to the extent that the workpiece 11 of the workpiece unit 17 is not damaged. More specifically, the flexible member 182b may be made of a material such as sponge, rubber, cotton, or cloth, or may be made of polystyrene foam or bubble cushioning material.

In particular, sponge is flexible and easily deformed, so using sponge as the flexible member 182b can effectively reduce the impact acting on the workpiece unit 17. In addition, using sponge as the flexible member 182b allows the flexible member 182b to appropriately deform to conform to the shape of the side of the container 102, ensuring that the opening 102b is closed.

The weight of each part of the cover 120 is adjusted so that, as shown in FIG. 18(A), when the container 102 is lowered from the storage area 104, the cover 120 rotates under its own weight such that its bottom end moves away from the storage area 104 (the opposite direction to the direction indicated by arrow G in FIG. 18(B)). Therefore, when the container 102 is not stored in the storage area 104, the surface of the plate-shaped member 182a facing the storage area 104 (front side) is inclined with respect to the bottom surface of the frame 82.

There is no limit to the number and arrangement of covers 120. For example, in addition to the rear end of the frame 82, a cover 120 that contacts the side of the container 102 can be provided on the front end of the frame 82. In this case, when the container 102 is stored in the storage area 104, the two sides (front and rear) of the container 102 are sandwiched between a pair of covers 120. This suppresses shaking (vibration) of the container 102. In this case, it is particularly easy to suppress shaking (vibration) of the container 102 in the length direction (front-to-back direction) of the frame 82.

Furthermore, covers 120 may be provided on the front end, rear end, and both side ends of the frame 82. In this case, the four side faces (front, rear, and both side ends) of the container 102 stored in the storage area 104 are in contact with the covers 120. This suppresses shaking (vibration) of the container 102. In this case, it is particularly easy to suppress shaking (vibration) of the container 102 in the length direction (front-rear direction) and width direction of the frame 82.

When the container 102 is raised or lowered, the rotation of the motor 142 of the lifting unit 110 and the like is controlled by the control unit 130. FIG. 19 (A) is a side view showing the transport vehicle 10 when the container 102 stored in the storage area 104 is placed in the loading area A. When the container 102 is placed in the loading area A, the rotation direction and rotation speed of the motor 142 are controlled so that the hanging member 112 is sent out from the drive mechanism 114 at a desired speed. For example, the control unit 130 controls the current value of the motor 142 so that the rotation speed of the motor 142 is maintained.

Figure 19 (B) is a graph showing the current value of the motor 142 when the container 102 descends. When the container 102 descends and reaches the placement area A, the container 102 is supported from below in the placement area A. As a result, the load acting on the rotating shaft 142a of the motor 142 weakens, and the current value of the motor 142 decreases.

The control unit 130 stops the rotation of the motor 142 based on the change in the current value of the motor 142 when the container 102 is placed in the placement area A. For example, a predetermined threshold value is stored in advance in the control unit 130, and the control unit 130 compares this threshold value with the current value of the motor 142. Then, if the current value of the motor 142 is equal to or less than the threshold value (or is less than the threshold value), the control unit 130 stops the rotation of the motor 142. This completes the placement of the container 102 in the placement area A.

Figure 20 (A) is a side view showing the transport vehicle 10 when the container 102 placed in the loading area A is stored in the storage area 104. When storing the container 102 in the storage area 104, the rotation direction and rotation speed of the motor 142 are controlled so that the hanging member 112 is wound at a desired speed by the drive mechanism 114. For example, the control unit 130 controls the current value of the motor 142 so that the rotation speed of the motor 142 is maintained.

Figure 20 (B) is a graph showing the current value of the motor 142 when the container 102 rises. When the container 102 rises and reaches the storage area 104, the container 102 is pressed against the multiple contact members 116 provided on the underside of the frame 82. As a result, the load acting on the rotating shaft 142a of the motor 142 increases, and the current value of the motor 142 increases.

The control unit 130 stops the rotation of the motor 142 based on the change in the current value of the motor 142 when the container 102 comes into contact with the contact member 116. For example, a predetermined threshold value is stored in advance in the control unit 130, and the control unit 130 compares this threshold value with the current value of the motor 142. Then, when the current value of the motor 142 is equal to or greater than the threshold value (or exceeds the threshold value), the control unit 130 stops the rotation of the motor 142. This completes the storage of the container 102 in the storage area 104.

As described above, when the operation of the motor 142 when raising and lowering the container 102 is controlled based on the current value of the motor 142, there is no need to provide a sensor for detecting the container 102 in the storage area 104 or the loading area A. This simplifies the structure of the transport vehicle 10, the loading area A, etc. Also, the weight of the transport vehicle 10 is reduced.

However, there are no limitations on the method of controlling the motor 142. For example, a sensor (such as a push button switch) that detects that the container 102 has been placed may be provided on the underside of the frame 82 or on the upper side of the mounting area A. In this case, when the container 102 is detected by the sensor, the control unit 130 stops the rotation of the motor 142. Note that detection by the sensor and detection by the current value of the motor 142 can also be used in combination.

When the placement of the container 102 in the placement area A is detected only by the placement area A side (e.g., the loader/unloader 8 side), the control unit 12 of the transport system 2 (see FIG. 2) instructs the transport vehicle 10 to stop the rotation of the motor 142 after being notified by the placement area A side that the container 102 has been placed in the placement area A. Then, the control unit 130 of the transport vehicle 10 stops the rotation of the motor 142.

In contrast, as described above, when the transport vehicle 10 detects that the container 102 has been placed in the placement area A, the control unit 130 of the transport vehicle 10 stops the rotation of the motor 142 at its own discretion without waiting for an instruction from the control unit 12 of the transport system 2. This makes it possible to reduce the time lag between when the container 102 is placed in the placement area A and when the rotation of the motor 142 is stopped.

The lifting and lowering speed of the container 102 does not necessarily have to be constant. For example, the rotation speed of the motor 142 may be reduced to decelerate the container 102 immediately before the container 102 is placed in the placement area A or immediately before it is stored in the storage area 104. This can reduce the impact when the container 102 comes into contact with the placement area A or the contact member 116. In this case, the control unit 130 may monitor the height of the container 102 based on, for example, the amount of rotation of the motor 142.

When the container 102 is placed in the placement area A, the control unit 130 generates a signal to notify that the placement of the container 102 is complete, and transmits this signal from the transmitter 134 to the control unit 12 of the transport system 2. When the container 102 is stored in the storage area 104, the control unit 130 generates a signal to notify that the storage of the container 102 is complete, and transmits this signal from the transmitter 134 to the control unit 12 of the transport system 2 (see FIG. 2). These signals may also be sent to the processing device 4.

Figure 21 is a perspective view showing the external appearance of the processing device 4 and the transport path 6, and Figure 22 is a perspective view showing the internal structure of the processing device 4. Note that in Figure 21, some of the components are shown as functional blocks. As shown in Figures 21 and 22, the processing device 4 has a base 202 that supports each component.

A recess 202a is formed at the corner of the base 202, and a lifting platform 204 that is raised and lowered by a lifting mechanism (not shown) is disposed in this recess 202a. The container 102 of the transport vehicle 10 described above is placed on the loading area A on the upper surface of the lifting platform 204. Note that the upper surface of the lifting platform 204 is provided with a number of position defining members (not shown) that define the horizontal position of the container 102, and the container 102 that has been lowered from the transport vehicle 10 is placed on the loading area A determined by the multiple position defining members.

Each position determination member has, for example, a curved guide surface that guides the descending container 102 toward the placement area A, and is fixed at a position corresponding to the side of the container 102 on the lift platform 204. When the container 102 is lowered toward the lift platform 204, the container 102 is guided by the guide surface of each position determination member. Therefore, even if the container 102 oscillates horizontally, the container 102 can be placed on the placement area A.

For example, a storage area is formed in the area below the loading area A of the lifting platform 204 in which the processed workpiece unit 17 can be temporarily stored. The workpiece unit 17 after processing by the processing device 4 is stored in this storage area until the transport vehicle 10 is ready to transport it to the container 102. In addition to the storage area, an irradiation unit that irradiates ultraviolet light, a detection unit that detects the position of a notch, a reading unit that reads barcodes, etc. may also be arranged in the area below the loading area A of the lifting platform 204.

A long recess 202b is formed on the side of the recess 202a in the _X2- axis direction (front-back direction, processing feed direction). A ball screw type X-axis moving mechanism (processing feed unit) 206 that moves an X-axis moving table (not shown) in the _X2 -axis direction is disposed in the recess 202b. A table cover 206a is disposed above the X-axis moving table. In addition, bellows-shaped dust-proof and drip-proof covers 206b are attached to the front and rear of the table cover 206a.

A chuck table 208 for holding the workpiece 11 is disposed above the X-axis moving table in a manner that it is exposed from the table cover 206a. The chuck table 208 is connected to a rotary drive source (not shown) such as a motor, and rotates about a rotation axis that is approximately parallel to the _Z2- axis direction (vertical direction, cutting feed direction). The chuck table 208 is also moved in the _X2- axis direction (processing feed) by the above-mentioned X-axis moving mechanism 206.

The upper surface of the chuck table 208 is a holding surface 208a for holding the workpiece 11 via the tape 13. The holding surface 208a is connected to a suction source (not shown) via a suction path (not shown) formed inside the chuck table 208. In addition, four clamps 210 are provided around the periphery of the chuck table 208 for fixing the frame 15 supporting the workpiece 11 from all sides.

A pair of guide rails 212 are provided above the recess 202b, which approach and move away from each other while maintaining a state parallel to the _Y2- axis direction (left-right direction, indexing feed direction). Each of the pair of guide rails 212 has a support surface that supports the frame 15 from below and a side surface that is approximately perpendicular to the support surface, and sandwiches the workpiece unit 17 (frame 15) pulled out of the container 102 in the placement area A in the _X2- axis direction to align it to a predetermined position.

A gate-shaped first support structure 214 is disposed so as to straddle the recess 202b above the base 202. A first rail 216 is fixed to the front surface (the surface on the guide rail 212 side) of the first support structure 214, and a first holding unit ₂₂₀ is connected to the first rail 216 via a first moving mechanism 218 and the like.

The first holding unit 220, for example, contacts the upper surface of the frame 15 to adsorb the frame 15, and is raised and lowered by the first moving mechanism 218 and moves in the _Y2- axis direction along the first rail 216. A gripping mechanism 220a for gripping the frame 15 is provided on the lift table 204 side of the first holding unit 220.

For example, by gripping the frame 15 with the gripping mechanism 220a and moving the first holding unit 220 in the _Y2- axis direction, the workpiece unit 17 can be pulled out from the container 102 in the placement area A onto the pair of guide rails 212, or the workpiece unit 17 on the pair of guide rails 212 can be inserted into the container 102 in the placement area A. After the frame 15 is positioned by the pair of guide rails 212, the frame 15 is sucked by the first holding unit 220, and the workpiece unit 17 is carried into the chuck table 208.

A second rail 222 extending along the _Y2- axis direction is fixed above the first rail 216 on the front surface of the first support structure 214. A second holding unit 226 is connected to this second rail 222 via a second moving mechanism 224 and the like. The second holding unit 226, for example, comes into contact with the upper surface of the frame 15 to adsorb the frame 15, and is raised and lowered by the second moving mechanism 224 while moving along the second rail 222 in the _Y2- axis direction.

A gate-shaped second support structure 228 is disposed behind the first support structure 214. Two sets of processing units (cutting units) 232 are provided on the front surface (the surface on the first support structure 214 side) of the second support structure 228 via Y-axis/Z-axis movement mechanisms (indexing feed unit, cutting feed unit) 230. Each processing unit 232 is moved in the _Y2- axis direction (indexing feed) and in the _Z2- axis direction (cutting feed) by the corresponding Y-axis/Z-axis movement mechanism 230.

Each processing unit 232 is equipped with a spindle (not shown) that serves as a rotation axis that is approximately parallel to the _Y2 axis direction. An annular cutting blade 234 is attached to one end of each spindle. A rotation drive source (not shown) such as a motor is connected to the other end of each spindle. In addition, a nozzle is disposed near the cutting blade 234 to supply cutting fluid such as pure water to the workpiece 11 and the cutting blade 234.

While supplying cutting fluid from this nozzle, the rotating cutting blade 234 is caused to cut into the workpiece 11 held on the chuck table 208, thereby processing (cutting) the workpiece 11. An imaging unit (camera) 236 for capturing images of the workpiece 11 held on the chuck table 208 is provided at a position adjacent to the processing unit 232. This imaging unit 236 is also moved in the _Y2- axis direction and in the _Z2 -axis direction by the Y-axis/Z-axis moving mechanism 230.

A cleaning unit 238 is disposed at a position opposite the lift table 204 with respect to the recess 202b. The cleaning unit 238 includes a spinner table 240 that holds the workpiece 11 in a cylindrical cleaning space. A rotary drive source (not shown) that rotates the spinner table 240 at a predetermined speed is connected to the lower part of the spinner table 240.

Above the spinner table 240, there is disposed an injection nozzle 242 which injects a cleaning fluid (typically a mixed fluid of water and air) toward the workpiece 11 held by the spinner table 240. The spinner table 240 holding the workpiece 11 is rotated and the injection nozzle 242 injects the cleaning fluid, thereby cleaning the workpiece 11.

After the workpiece 11 is cut by the machining unit 232, for example, the frame 15 is adsorbed by the second holding unit 226 and the workpiece unit 17 is carried into the cleaning unit 238. After the workpiece 11 is cleaned by the cleaning unit 238, for example, the frame 15 is adsorbed by the first holding unit 220 and the workpiece unit 17 is placed on a pair of guide rails 212, and then the frame 15 is gripped by the gripping mechanism 220a and the workpiece unit 17 is placed in the container 102 in the placement area A.

As shown in FIG. 21, the upper surface side of the base 202 is covered by a cover 244, and each of the above-mentioned components is housed inside the cover 244. In the area directly above the recess 202a, an opening (not shown) is provided that vertically penetrates the ceiling 244a of the cover 244. The container 102 of the transport vehicle 10 moves from the outside to the inside of the cover 244 through this opening, and moves from the inside to the outside of the cover 244 through this opening. There are no restrictions on the shape or size of the opening, but this opening must be configured to at least allow the container 102 to pass through.

Each of the components of the processing device 4 described above is connected to the control device 246. The control device 246 is configured by a computer including, for example, a processing device such as a CPU (Central Processing Unit), a main storage device such as a DRAM (Dynamic Random Access Memory), and an auxiliary storage device such as a flash memory. The functions of the control device 246 are realized by operating the processing device etc. according to software stored in the auxiliary storage device.

Further connected to the control device 246 are a receiver 248 that receives a signal (information) from the outside and sends it to the control device 246, and a transmitter 250 that transmits the signal (information) received from the control device 246 to the outside. The receiver 248 receives a signal (control signal) sent from the control unit 12 of the transport system 2, for example, and sends it to the control device 246.

The control device 246 controls the operation of each component of the processing device 4 based on, for example, a signal received from the receiver 248. The control device 246 also generates, for example, a notification signal and sends it to the transmitter 250. The transmitter 250 transmits, for example, the signal received from the control device 246 to the control unit 12 of the conveying system 2.

A piping connection section 202c to which various piping 21 is connected is provided on the side wall of the base 202. A door 244b that is opened and closed during maintenance and the like is provided on the side wall of the cover 244. Note that an operation panel (not shown) for inputting instructions to the control device 246, a display (not shown) for displaying various information related to the processing device 4, and the like may also be provided on the side wall of the cover 244.

This processing device 4 operates in conjunction with the transport system 2 of this embodiment. For example, the transport vehicle 10 stops at a stopping area on the transport path 6, and places the container 102 containing the workpiece unit 17 on the upper surface (placement area A) of the lifting platform 204 of the processing device 4. When the container 102 is placed on the lifting platform 204, the control unit 130 of the transport vehicle 10 generates a signal to notify the same and has the transmitter 134 transmit the signal. This signal is sent from the transmitter 134 to the control unit 12 of the transport system 2.

Based on a signal transmitted from the transmitter 134 of the transport vehicle 10, the control unit 12 generates a signal to instruct the processing device 4 to unload the unprocessed workpiece unit 17 from the container 102 and load the processed workpiece unit 17 into the container 102. When the receiver 248 of the processing device 4 receives the signal from the control unit 12 and the control device 246 receives an instruction based on this signal, the control device 246 causes the unprocessed workpiece unit 17 to be unloaded from the container 102 placed on the upper surface (loading area A) of the lifting table 204 to the first holding unit 220. This causes the workpiece unit 17 to be pulled out onto the pair of guide rails 212, and processing of the workpiece 11 begins.

For example, when processing of the workpiece 11 begins, the control device 246 adjusts the height of the lifting table 204 and pulls out the processed workpiece unit 17 from the storage area provided below the placement area A onto the pair of guide rails 212. Then, the processed workpiece unit 17 on the pair of guide rails 212 is stored in the container 102 on the lifting table 204.

When the processed workpiece unit 17 is placed in the container 102, the control device 246 of the processing device 4 generates a signal to notify the same and transmits it from the transmitter 250 to the control unit 12 of the transport system 2. Based on the signal transmitted from the transmitter 250 of the processing device 4, the control unit 12 generates a signal to instruct the transport vehicle 10 to proceed to the next destination.

When the receiver 132 of the transport vehicle 10 receives a signal from the control unit 12 and the control unit 130 receives an instruction based on this signal, the control unit 130 drives the transport vehicle 10 toward the next destination. In this way, by using the transport system 2, the processing device 4 can receive the workpiece unit 17 before processing at the appropriate time and retrieve the workpiece unit 17 after processing at the appropriate time.

As shown in Figures 1 and 21, the transport path 6 constituting the transport system 2 is installed on the upper side of the ceiling 244a of the cover 244 provided for each processing device 4, or on the upper side of the ceiling 22a of the housing 22 provided for the loader/unloader 8. In other words, the transport path 6 is disposed directly above the processing devices 4 and the loader/unloader 8 so as to connect between the multiple processing devices 4 and the loader/unloader 8.

Therefore, the transport path 6 does not interfere with structures such as the pipe connection part 202c and the door 244b provided on the side of the processing device 4. In other words, when designing the transport path 6, it is not necessary to consider the structure of the side of the processing device 4. This makes it easy to construct the transport system 2. In addition, since the transport path 6 is placed in a location lower than the ceiling of the factory, the work involved in installing the transport path 6 is also easier.

For example, when constructing a transport path 6 in an environment where multiple processing devices 4, etc. are already installed, there is no need to move the processing devices 4, etc. to secure work space, as is the case when a transport path is provided on the ceiling of a factory. Furthermore, since the processing devices 4, etc. that are already installed serve as the foundation for the transport path 6, the labor required is less than when a new foundation is provided.

Figure 23 is a perspective view showing a portion of the conveying path 6 installed in the processing device 4. The structure of the conveying path 6 installed above the loader/unloader 8 is generally the same as the structure of the conveying path 6 installed above the processing device 4. The lower frame 262 is fixed to the ceilings 244a of the multiple processing devices 4 and the ceiling 22a of the loader/unloader 8 with screws, bolts, etc.

The lower frame 262 is a composite of rod-shaped frame members formed of a material containing a metal such as aluminum, and is assembled into a shape that connects, for example, adjacent processing devices 4 and loader/unloader 8. The base of the transport path 6 is formed by fixing the lower frame 262 to the ceiling 244a of each processing device 4 and the ceiling 22a of the loader/unloader 8, etc.

When the lower frame 262 is fixed to each processing device 4, loader/unloader 8, etc., the upper surface of the lower frame 262 is roughly horizontal, and the height of the lower frame 262 relative to each processing device 4, loader/unloader 8, etc. is adjusted so that the heights of the upper surfaces of the lower frame 262 are roughly equal.

This makes it possible to form the transport path 6 horizontally and at the same height even if the heights of the ceilings 244a of the processing devices 4 and the ceiling 22a of the loader/unloader 8 are not completely equal. There are no limitations on the method for adjusting the height of the lower frame 262 relative to the processing devices 4 and the loader/unloader 8, but for example, a method can be used in which a height adjustment member is placed between the ceiling 244a of each processing device 4 or the ceiling 22a of the loader/unloader 8 and the underside of the lower frame 262.

Of course, the height of the processing device 4 and the loader/unloader 8 may be adjusted. For example, the lower end (leg) of the processing device 4 and the loader/unloader 8 is provided with an adjustment mechanism for adjusting the height. Therefore, by using this adjustment mechanism to adjust the height of the processing device 4 and the loader/unloader 8 and making the height of the ceiling 244a of each processing device 4 and the ceiling 22a of the loader/unloader 8 equal, a lower frame 262 suitable for the base of the transport path 6 can be realized.

The upper frame 264 is fixed to the top side of the lower frame 262 with screws, bolts, etc. The upper frame 264 is a composite of rod-shaped frame members made of a material that contains a metal such as aluminum, and is assembled into a shape that matches the arrangement of the transport path 6 so that the transport path 6 can be appropriately fixed.

A transport path 6 is provided above the upper frame 264. The transport path 6 is formed, for example, by arranging multiple flat road surface panels 266 in a horizontal direction. In this way, by combining multiple road surface panels 266 to form the transport path 6, various transport paths 6 can be easily realized according to the arrangement of multiple processing devices 4 and loaders/unloaders 8.

The road surface panel 266 is formed in a rectangular shape in a plan view using a lightweight, high-strength material such as polyamide, polycarbonate, or CFRP (Carbon Fiber Reinforced Plastic), and has a flat upper surface suitable for the travel of the transport vehicle 10. In addition, a through hole is formed at the end of the road surface panel 266, penetrating the road surface panel 266 from top to bottom.

On the other hand, a screw hole (not shown) having a diameter corresponding to the diameter of the screw 268 is opened on the top surface of the upper frame 264 at a position corresponding to the through hole of the road panel 266. Therefore, after placing the road panel 266 on the top surface of the upper frame 264, the screw 268 can be fastened through the through hole (not shown) into the screw hole of the upper frame 264 to fix the road panel 266 to the upper frame 264.

The lower frame 262 is formed, for example, by combining a plurality of lower frame units 270, each of which includes a plurality of rod-shaped frame members. Similarly, the upper frame 264 is formed, for example, by combining a plurality of upper frame units 272, each of which includes a plurality of rod-shaped frame members.

In this way, when the lower frame 262 is formed using multiple lower frame units 270 and the upper frame 264 is formed using multiple upper frame units 272, the frame members are transported in the form of the lower frame units 270 and the upper frame units 272 to the factory or the like where the processing device 4 is installed.

In other words, high-quality lower frame 262 and upper frame 264 are formed using high-quality lower frame unit 270 and upper frame unit 272 produced in a stable environment. In addition, no complicated work is required, such as when connecting rod-shaped frame members above the processing device 4. Therefore, a high-quality transport path 6 can be formed in a short period of time.

Figure 24 (A) is a perspective view showing the lower frame unit 270a that constitutes the lower frame 262, and Figure 24 (B) is a perspective view showing the lower frame unit 270b that constitutes the lower frame 262. The lower frame unit 270a and the lower frame unit 270b are selectively used according to the state of the transport path 6, for example.

Figure 25 is a plan view showing the arrangement of the lower frame units 270 that make up the lower frame 262. Figure 25 shows a case where a transport path 6 is formed that can transport workpiece units 17 between a total of eight devices (such as processing devices 4 and loaders/unloaders 8). For example, lower frame unit 270a is used in the area corresponding to the portion of the transport path 6 excluding the corners (the linear area of the transport path 6), and lower frame unit 270b is used in the area corresponding to the corners of the transport path 6.

The lower frame 262 in FIG. 25 uses lower frame unit 270c, which has a structure obtained by inverting lower frame unit 270a, and lower frame unit 270d, which has a structure obtained by inverting lower frame unit 270b. In other words, the lower frame 262 in FIG. 25 uses two of each of the four types of lower frame units 270. Each lower frame unit 270 is configured so that the rod-shaped frame member does not overlap with the opening 282 (see FIG. 28, corresponding to opening 6a in FIG. 3) formed in the transport path 6.

When forming the lower frame 262, for example, it is advisable to first fix the lower frame units 270 to the processing device 4 or the loader/unloader 8, etc., and then connect adjacent lower frame units 270 to each other. Adjacent lower frame units 270 can be connected using, for example, joints. However, the lower frame units 270 can also be connected and then fixed to the processing device 4 or the loader/unloader 8, etc.

Figure 26 (A) is a perspective view showing the upper frame unit 272a that constitutes the upper frame 264, and Figure 26 (B) is a perspective view showing the upper frame unit 272b that constitutes the upper frame 264. The upper frame unit 272a and the upper frame unit 272b are selectively used according to the state of the transport path 6, for example.

Figure 27 is a plan view showing the arrangement of the upper frame units 272 that make up the upper frame 264. Figure 27 shows a case where the transport path 6 is formed using the lower frame 262 of Figure 25. For example, upper frame unit 272a is used in part of the area connecting adjacent processing devices 4 and loaders/unloaders 8, and upper frame unit 272b is used in the area directly above the processing devices 4 and loaders/unloaders 8.

In other words, the upper frame 264 in FIG. 27 uses two upper frame units 272a and eight upper frame units 272b. Each upper frame unit 272 is configured so that the rod-shaped frame members do not overlap the opening 282 (see FIG. 28) formed in the transport path 6.

When forming the upper frame 264, for example, the upper frame unit 272 is fixed to the lower frame 262. Note that two adjacent upper frame units 272 are not connected to each other and may be separated. Also, if necessary, it is possible to use an upper frame unit 272 having a structure inverted from the upper frame unit 272a, or an upper frame unit 272 having a structure inverted from the upper frame unit 272b.

Figure 28 is a plan view showing a schematic diagram of a transport path 6 formed by arranging multiple road surface panels 266. Figure 28 shows a case where the transport path 6 is formed using the lower frame 262 of Figure 25 and the upper frame 264 of Figure 27. Also, in Figure 28, the boundary between adjacent road surface panels 266 is shown by a dashed line.

When forming the transport path 6, for example, the road surface panel 266 is fixed to the upper frame 264. Note that in the upper frame 264 of FIG. 27, for example, a small gap is formed between adjacent upper frame units 272a and 272b, and a large gap is formed between two adjacent upper frame units 272b. Therefore, the transport path 6 cannot be formed in the portion corresponding to this gap using only the road surface panel 266, which is rectangular in plan view. In other words, a gap is also formed in the transport path 6.

Therefore, flat bridging panels 274a and 274b are used to fill these gaps. A small bridging panel 274a is placed in the small gap between adjacent upper frame units 272a and 272b. A large bridging panel 274b is placed in the large gap between two adjacent upper frame units 272b.

The bridging panels 274a and 274b are fixed to the upper frame 264, for example, so as to sufficiently reduce any gaps or steps formed in the transport path 6. This reduces the impact on the transport vehicle 10 while it is moving, and prevents damage to the workpiece 11, etc. If a small gap remains in the transport path 6, it is advisable to seal the gap using, for example, a tape with a core material that runs along the direction in which the transport vehicle 10 travels.

In addition, instead of bridging panel 274a and bridging panel 274b, a bridging panel with slopes formed on both ends in the direction in which the transport vehicle 10 travels may be used. In this case, for example, the bridging panel can be used by stacking it above the road panel 266, so the requirements for the size of the bridging panel are relaxed. This increases the versatility of the bridging panel. Adjacent road panels 266 can also be connected using flexible thin bridging panels.

When the transport vehicle 10 travels on the transport path 6 configured in this manner, for example, static electricity is generated due to friction between the wheels 86 of the transport vehicle 10 and the transport path 6, which may adversely affect the workpiece 11 contained in the container 102 of the transport vehicle 10. For example, if a semiconductor device is formed on the workpiece 11, the semiconductor device may be destroyed by static electricity.

Therefore, it is preferable to expose a conductive member on the upper surface of the road panel 266, which forms the transport path 6, in the area where the wheels 86 and the like come into contact. As the conductive member, for example, metals such as aluminum and copper, as well as CFRP, etc. are used. Note that if the road panel 266 is made of CFRP, the CFRP is also exposed on its upper surface. In other words, a state in which the conductive member is exposed on the upper surface of the road panel 266 is realized.

In this way, by exposing the conductive member on the upper surface of the road panel 266, it is possible to suppress the generation and accumulation of static electricity due to friction, and prevent adverse effects on the workpiece 11. The conductive member exposed on the upper surface of the road panel 266 may be grounded via a conductor (not shown) or the like. In this case, static electricity generated by contact between the wheels 86 and the road panel 266 is discharged through the conductor, and does not accumulate on the road panel 266. Therefore, the workpiece 11 can be transported more safely by the transport vehicle 10.

In the transport system 2 of this embodiment, the operation of the transport vehicle 10 is controlled in principle so that the transport vehicle 10 does not reach the end of the transport path 6. However, if some kind of trouble occurs with the transport vehicle 10, the control unit 12, etc., the transport vehicle 10 may reach the end of the transport path 6 and fall from the end of the transport path 6.

Therefore, as shown in FIG. 23, it is desirable to provide a guard portion 276 at the end of the transport path 6 as a barrier to prevent the transport vehicle 10 from falling off the transport path 6. This guard portion 276 is formed, for example, from a material containing a metal such as aluminum, and is fixed to the upper frame 264 and the road panel 266. The height from the top surface of the road panel 266 to the upper end of the guard portion 276 is, for example, larger than the radius of the wheels 86 of the transport vehicle 10. Preferably, it is larger than the diameter of the wheels 86.

The guard portion 276 may be formed at a height that allows it to come into contact with the third sensor 126 or the exterior cover of the transport vehicle 10. In this case, when the guard portion 276 comes into contact with the third sensor 126 or the exterior cover of the transport vehicle 10, the transport vehicle 10 detects a collision with an obstacle and stops. This allows the transport vehicle 10 to travel more safely.

As shown in FIG. 28, the transport path 6 includes a travel area 278 that is mainly used for the transport vehicle 10 to travel, a parking area 280 that is mainly used for the transport vehicle 10 to stop, and a waiting area 284 that is mainly used for the transport vehicle 10 to wait. The workpiece unit 17 is transported between the transport vehicle 10 parked in the parking area 280 and the processing device 4, loader/unloader 8, etc. that are located below the parking area 280.

The travel area 278 is formed, for example, in a ring shape that follows the arrangement of the processing device 4, the loader/unloader 8, etc. The transport vehicle 10 travels, for example, in one direction along this ring-shaped travel area 278 and does not travel in the other direction (i.e., one-way). This allows the transport vehicle 10 to travel safely with simple control.

However, there are no limitations on the shape of the travel area 278 or the manner in which the transport vehicle 10 travels. For example, the travel area 278 may be configured to allow the transport vehicle 10 to travel in both directions. In addition, the travel area 278 does not need to be formed in a ring shape with no end, and may be formed, for example, in a straight line with an end.

On the other hand, the parking area 280 is provided with an opening 282 that penetrates the road panel 266 from top to bottom. The opening 282 is formed, for example, slightly larger than the upper and lower surfaces of the container 102, allowing the container 102 to pass through from above to below. On the other hand, the width of the opening 282 in a direction perpendicular to the direction in which the transport vehicle 10 enters the parking area 280 is narrower than the distance between the pair of wheels 86 of the transport vehicle 10. As a result, if the direction in which the transport vehicle 10 enters the parking area 280 is appropriate, the wheels 86 will not fall off the opening 282.

The waiting area 284 is arranged, for example, in an area where the transport vehicle 10 is likely to be waiting. By having the transport vehicle 10 wait in the waiting area 284, other transport vehicles 10 can overtake the waiting transport vehicle 10. Furthermore, if the transport vehicle 10 is permitted to travel in both directions, the two transport vehicles 10 can pass each other by temporarily waiting the transport vehicle 10 in this waiting area 284. Note that the transport path 6 does not necessarily have to include the waiting area 284.

On the upper surfaces of the road panel 266, the bridging panel 274a, the bridging panel 274b, etc. that make up the transport path 6, multiple types of guiding marks 286 (see FIG. 23) that are detected by a sensor equipped in the transport vehicle 10 are provided. The transport vehicle 10 controls its running, turning, stopping, etc. based on the various marks 286 detected by the sensor.

As shown in FIG. 23, the mark 286 is configured in a linear shape, for example, with a color different from other areas on the top surface of the road panel 266, etc. In this embodiment, as shown in FIG. 28, a first mark 286a, a second mark 286b, a third mark 286c, and a fourth mark 286d are used as the mark 286.

However, there is no limit to the form of the mark 286. The mark 286 may include curved lines or may be composed of dashed lines, for example. Letters, numbers, designs, etc. may also be used as the mark 286. Furthermore, there is no limit to the color, etc., of the mark 286. For example, the transport vehicle 10 may be configured to use multiple marks 286 of different colors and to perform various controls based on the colors of the marks 286.

A first mark 286a is provided in the travel area 278 along the direction in which the transport vehicle 10 travels. The first mark 286a is formed, for example, in an area through which the transport vehicle 10 traveling in the travel area 278 must pass. More specifically, the first mark 286a is provided directly below a pair of first sensors 122 of the transport vehicle 10 traveling in the travel area 278.

Figure 29 is a functional block diagram showing the control unit 130 of the transport vehicle 10. As shown in Figure 29, the control unit 130 of the transport vehicle 10 includes a first sensor control unit 130a that causes each of the pair of first sensors 122 to monitor the upper surface of the travel area 278 etc. (transport path 6) and detect the first mark 286a, and a travel instruction unit 130b that identifies the direction indicated by the first mark 286a detected by the first sensor 122 and causes the transport vehicle 10 to travel in that direction.

Each of the pair of first sensors 122 detects the first mark 286a according to a control signal input from the first sensor control unit 130a. Information about the first mark 286a detected by the first sensor 122 is sent to the driving instruction unit 130b via the first sensor control unit 130a.

The travel instruction unit 130b identifies the direction indicated by the first mark 286a based on the information of the first mark 286a sent from the first sensor control unit 130a. The travel instruction unit 130b then controls the drive unit 90 to make the transport vehicle 10 travel along the identified direction. In other words, the transport vehicle 10 detects the first mark 286a with the pair of first sensors 122, and can travel on the transport path 6 along this first mark 286a.

As shown in FIG. 28, two straight first marks 286a intersect at a predetermined portion of the travel area 278. While the transport vehicle 10 travels along one of the first marks 286a, the second sensor 124 detects the other first mark 286a that intersects with the first mark 286a. When the second sensor 124 detects the other first mark 286a, the transport vehicle 10 turns as necessary.

In other words, the direction of travel of the transport vehicle 10 is changed at any intersection where two linear first marks 286a intersect. In this way, a part of the other first mark 286a described above detected by the second sensor 124 functions as a second mark 286b indicating the position where the transport vehicle 10 turns. Note that there are a number of second marks 286b on the transport path 6 corresponding to the number of intersections where two first marks 286a intersect. In other words, there are multiple second marks 286b on the transport path 6 in FIG. 28.

As shown in FIG. 29, the control unit 130 of the transport vehicle 10 includes a second sensor control unit 130c that causes the second sensor 124 to monitor the upper surface of the travel area 278 etc. (transport path 6) and detect the second marks 286b, and a rotation instruction unit 130d that counts the number of second marks 286b detected by the second sensor 124 and rotates the transport vehicle 10 based on the counted number of second marks 286b.

The second sensor 124 detects the second mark 286b according to a control signal input from the second sensor control unit 130c. Then, for example, the second sensor control unit 130c notifies the turning instruction unit 130d of the control unit 130 every time the second sensor 124 detects the second mark 286b.

The turning instruction unit 130d counts the number of second marks 286b detected by the second sensor 124 based on a notification from the second sensor control unit 130c, and compares it with, for example, the number of second marks 286b (a predetermined number) corresponding to an instruction from the control unit 12 of the transport system 2. Then, when the number of second marks 286b detected by the second sensor 124 reaches the number of second marks 286b corresponding to the instruction from the control unit 12, the turning instruction unit 130d controls the drive unit 90 to turn the transport vehicle 10.

In other words, the turning instruction unit 130d changes the orientation of the transport vehicle 10 according to the number of detected second marks 286b. In this way, the transport vehicle 10 can detect the second marks 286b with the second sensor 124 and change its orientation as necessary. The second marks 286b are provided, for example, at corners of the travel area 278 (corners of the transport path 6), at parts of the travel area 278 adjacent to the stopping area 280, and at parts of the travel area 278 adjacent to the waiting area 284.

When a pair of second sensors 124 are arranged on a straight line passing through a pair of wheels 86, the second mark 286b can be detected by the pair of second sensors 124 at the same time as the wheels 86 pass the second mark 286b. Therefore, by turning the transport vehicle 10 at the timing when the second mark 286b is detected, the pair of first sensors 122 will not be significantly misaligned from the first mark 286a that should be detected after turning. In other words, the transport vehicle 10 can be turned appropriately without making any corrections.

As shown in FIG. 28, the stopping area 280 is provided with a third mark 286c that is aligned with the direction in which the transport vehicle 10 enters. In other words, the third mark 286c indicates the direction in which the transport vehicle 10 enters the stopping area 280. The third mark 286c is formed, for example, at two positions on either side of the opening 282 in a direction perpendicular to the direction in which the transport vehicle 10 enters, and is detected by the second sensor 124 of the transport vehicle 10.

As shown in FIG. 29, the control unit 130 of the transport vehicle 10 includes an entry control unit 130e that causes the transport vehicle 10 to enter the parking area 280 in the direction indicated by the third mark 286c detected by the second sensor 124. The entry control unit 130e is connected to the second sensor control unit 130c.

The second sensor control unit 130c causes the second sensor 124 to monitor the top surface of the parking area 280 etc. (conveyor path 6) and detect the third mark 286c. Information about the third mark 286c detected by the second sensor 124 is sent to the entry control unit 130e via the second sensor control unit 130c.

The entry control unit 130e identifies the direction indicated by the third mark 286c based on the information of the third mark 286c input from the second sensor control unit 130c. The entry control unit 130e then controls the drive unit 90 to cause the transport vehicle 10 to enter the parking area 280 in the identified direction. The third mark 286c is typically provided in an area through which the wheels 86 of the transport vehicle 10 should pass. However, there are no limitations on the arrangement of the third mark 286c, etc.

As shown in FIG. 28, a fourth mark 286d that intersects with the first mark 286a and the third mark 286c is provided on the rear (near side) of the stopping area 280 (or waiting area 284) in the direction in which the transport vehicle 10 enters the stopping area 280 (or waiting area 284). This fourth mark 286d indicates the position of the stopping area 280 (or waiting area 284).

As shown in FIG. 29, the control unit 130 of the transport vehicle 10 includes a stop control unit 130f that stops the transport vehicle 10 when the fourth mark 286d is detected by the first sensor 122 (one of a pair of first sensors 122) located at the rear of the transport vehicle 10 in the traveling direction. The stop control unit 130f is connected to the first sensor control unit 130a.

The first sensor control unit 130a causes the first sensor 122 to monitor the upper surface of the travel area 278, the parking area 280, etc. (conveyor path 6) and causes the first sensor 122 to detect the fourth mark 286d. When the first sensor 122 detects the fourth mark 286d, the fact is notified to the parking control unit 130f via the first sensor control unit 130a.

When the first sensor control unit 130a notifies the stop control unit 130f that the fourth mark 286d has been detected, the stop control unit 130f controls the drive unit 90 to quickly stop the transport vehicle 10. In other words, when the transport vehicle 10 detects the fourth mark 286d, for example, by the first sensor 122 at the rear, it immediately stops.

The fourth mark 286d may be provided at the front (rear) of the stopping area 280 (or waiting area 284) in the direction in which the transport vehicle 10 enters the stopping area 280 (or waiting area 284). In this case, the transport vehicle 10 will immediately stop when the first sensor 122 at the front detects the fourth mark 286d.

The fourth mark 286d may be provided at a position where it can be detected by the second sensor 124. In this case, the stop control unit 130f shown in FIG. 29 is connected to the second sensor control unit 130c. Then, when the second sensor 124 controlled by the second sensor control unit 130c detects the fourth mark 286d, the stop control unit 130f controls the drive unit 90 to stop the transport vehicle 10.

The stopping control unit 130f may also stop the transport vehicle 10 after a predetermined time has elapsed since the fourth mark 286d was detected by the first sensor 122 or the second sensor 124. The time from the detection of the fourth mark 286d to the stopping of the transport vehicle 10 is adjusted based on, for example, the distance between the fourth mark 286d and the stopping area 280, the speed at which the transport vehicle 10 is traveling, etc.

As shown in FIG. 28, a power supply terminal (power supply terminal) 288 connected to a power source (not shown) is disposed at a position in front (at the rear) of the stopping area 280 and waiting area 284 in the direction in which the transport vehicle 10 enters. For example, when the transport vehicle 10 is stopped in the stopping area 280 or waiting area 284 and the terminal (power receiving terminal) 100 of the transport vehicle 10 is brought into contact with the terminal 288, charging power is supplied to the battery (secondary battery) 96 via the terminal 100 and the charging wiring (charging wiring) 98. In other words, the battery 96 can be charged.

As shown in FIG. 23, the terminal 288 is supported by a terminal support 290 fixed to the road panel 266 or the upper frame 264, and is connected to a power supply wiring (power supply wiring) 292. In other words, the terminal 288 is connected to a power source via the power supply wiring 292.

The terminal support portion 290 includes, for example, a biasing member (not shown) that biases the terminal 288 toward the parking area 280 or the waiting area 284. By biasing the terminal 288 with the biasing member, the terminal 288 can be appropriately connected to the terminal 100. However, there are no limitations on the structure of the terminal 288 or the terminal support portion 290.

For example, after the transport vehicle 10 stops in the parking area 280, the container 102 is raised and lowered by the lifting unit 110. In this embodiment, since a power supply terminal 288 is disposed in the parking area 280, the battery 96 is charged even when the container 102 is raised and lowered. Therefore, the large amount of power consumed by the lifting unit 110 when raising and lowering the container 102 can be fully covered.

In this embodiment, a terminal 288 is also provided in the waiting area 284. Therefore, for example, the battery 96 is charged even when the transport vehicle 10 is waiting in the waiting area 284. This extends the operating time of the transport vehicle 10, thereby improving the efficiency of transporting the workpiece 11.

The operation of moving the transport vehicle 10 from one position (start point) on the transport path 6 to another position (destination) is, for example, as follows. First, the control unit 12 of the transport system 2 sends a signal to the transport vehicle 10 to be moved, which corresponds to an instruction to move from the start point to the destination.

The control unit 130 of the transport vehicle 10, which has received instructions from the control unit 12, first determines a route from its current position as the starting point to the destination, and determines the number of second marks 286b that exist along this route between the starting point and each position to which the transport vehicle 10 should turn, and the direction of turning at each position to which the transport vehicle 10 should turn. The control unit 130 of the transport vehicle 10 then controls the drive unit 90, etc., based on the number of second marks 286b and the direction of turning that it has determined.

For example, the control unit 130 of the transport vehicle 10 drives the transport vehicle 10 while monitoring the top surface of the transport path 6 with the first sensor 122 and the second sensor 124. In other words, the control unit 130 drives the transport vehicle 10 along the direction indicated by the first mark 286a detected by the first sensor 122, and causes the second sensor 124 to detect the second mark 286b that the second sensor 124 passes through.

When the number of second marks 286b passed by the second sensor 124 reaches the number of second marks 286b determined by the control unit 130, the control unit 130 turns the transport vehicle 10 in the direction of turning determined by the control unit 130. The control unit 130 then causes the transport vehicle 10 to travel again along the direction indicated by the first marks 286a. When the transport vehicle 10 arrives at the destination, the control unit 130 sends a signal to the control unit 12 to notify the control unit 12 of this fact.

When the transport vehicle 10 enters the stopping area 280, the control unit 130 causes the second sensor 124 to detect the third mark 286c and finely adjusts the direction in which the transport vehicle 10 travels. This prevents the wheels 86 of the transport vehicle 10 from falling off the opening 282. In this case, it is preferable to keep the travel speed lower than when the transport vehicle 10 travels along the direction indicated by the first mark 286a. The control unit 130 then causes the first sensor 122 to detect the fourth mark 286d and stops the transport vehicle 10 in the stopping area 280.

As a rule, the transport vehicle 10 travels with the wheels 86 positioned at the front of the vehicle in the direction of travel, and the wheels 88 positioned at the rear of the vehicle in the direction of travel. However, when moving from the parking area 280 or the waiting area 284 to the travel area 278, the transport vehicle 10 travels with the wheels 86 positioned at the rear of the vehicle in the direction of travel, and the wheels 88 positioned at the front of the vehicle in the direction of travel.

When the transport vehicle 10 stops in the parking area 280, the container 102 is positioned directly above the opening 282. In addition, the terminal 100 on the transport vehicle 10 side comes into contact with the terminal 288 on the transport path 6 side. This allows the transport vehicle 10 to lower the container 102 while charging the battery 96, and place the container 102 on the placement area A located below the opening 282.

In the above-described operation, the control unit 130 determines the number of second marks 286b and the direction of rotation, but the determination by the control unit 130 may be kept to a minimum. In this case, for example, a signal including the number of second marks 286b existing between the starting point and each position to which the transport vehicle 10 should turn, and information regarding the direction of rotation at each position to which the transport vehicle 10 should turn, is sent from the control unit 12. In this operation, the control unit 130 does not need to determine the number of second marks 286b and the direction of rotation, and therefore the control unit 130 can be simplified.

Next, an example of a control method for the conveying system 2 according to this embodiment will be described. FIG. 30 is a diagram for explaining an example of a control method for the conveying system 2. For example, when a situation arises in which a new unprocessed workpiece 11 is required, the control device 246 of the processing device 4 generates a signal (workpiece request signal) to notify that fact. The signal (workpiece request signal) generated by the control device 246 is transmitted from the transmitter 250 to the control unit 12.

As shown in FIG. 30, the control unit 12 includes a control unit (signal generating unit) 302 that generates signals for performing various controls. This control unit 302 is configured by a computer including, for example, a processing device such as a CPU (Central Processing Unit), a main storage device such as a DRAM (Dynamic Random Access Memory), and an auxiliary storage device such as a flash memory. The functions of the control unit 302 are realized by operating the processing device etc. according to software stored in the auxiliary storage device.

The control unit 302 is connected to a receiver 304 that receives signals transmitted from the processing device 4, the loader/unloader 8, the transport vehicle 10, etc., and a transmitter 306 that transmits signals to the processing device 4, the loader/unloader 8, the transport vehicle 10, etc.

When the receiver 304 of the control unit 12 receives a notification signal (workpiece request signal) transmitted from the transmitter 250 of the processing device 4, it sends the notification signal to the control unit 302. When the control unit 302 confirms the notification signal (workpiece request signal) from the processing device 4, it instructs an arbitrary transport vehicle 10 to move to the parking area 280 directly above the loader/unloader 8 and place the container 102 on the upper surface (second placement area _A2 ) of the placement table 66 of the loader/unloader 8. Specifically, the control unit 302 generates a control signal (first placement instruction signal) corresponding to this instruction and transmits it from the transmitter 306 to the transport vehicle 10.

When the receiver 132 of the transport vehicle 10 receives a signal (first placement instruction signal) from the control unit 12, it sends it to the control unit 130. The control unit 130 controls the drive unit 90 and the like based on this signal (first placement instruction signal) to cause the transport vehicle 10 to travel along the transport path 6. When the transport vehicle 10 stops in the parking area 280 directly above the loader/unloader 8, the container 102 is positioned directly above the opening 282.

When the transport vehicle 10 is parked in the parking area 280, the control unit 130 controls the lifting unit 110 to send out the hanging member 112. This allows the container 102 to be lowered so that it passes through the opening 282, etc., and the container 102 can be placed on the upper surface of the mounting platform 66.

After the container 102 is placed on the top surface of the mounting table 66, the control unit 130 generates a notification signal (first mounting completion signal) to notify that the container 102 has been placed on the top surface of the mounting table 66. The signal (first mounting completion signal) generated by the control unit 130 is transmitted from the transmitter 134 to the control unit 12.

When the receiver 304 of the control unit 12 receives the signal (first placement completion signal) transmitted from the transmitter 134 of the transport vehicle 10, it sends it to the control unit 302. When the control unit 302 confirms the signal (first placement completion signal) from the transport vehicle 10, it notifies the loader/unloader 8 that the placement of the container 102 on the upper surface of the placement table 66 is complete. Specifically, the control unit 302 generates a notification signal (second placement completion signal) to notify that the placement of the container 102 on the upper surface of the placement table 66 is complete, and transmits this from the transmitter 306 to the loader/unloader 8.

When the receiver 68 of the loader/unloader 8 receives a signal (second placement completion signal) from the control unit 12, it sends it to the control device 46. When the control device 46 receives this signal (second placement completion signal), it controls the operation of each component to load the unprocessed workpiece 11 into the container 102. Note that if the container 102 contains a processed workpiece 11, the processed workpiece 11 is removed from the container 102, and then the unprocessed workpiece 11 is loaded into the container 102.

When the workpiece 11 before processing is carried into the container 102, the control device 46 generates a notification signal (first transport completion signal) to notify that the workpiece 11 has been carried into the container 102. The signal (first transport completion signal) generated by the control device 46 is transmitted from the transmitter 70 to the control unit 12.

When the receiver 304 of the control unit 12 receives the signal (first transport completion signal) transmitted from the transmitter 70 of the loader/unloader 8, it sends it to the control unit 302. When the control unit 302 confirms the signal (first transport completion signal) from the loader/unloader 8, it instructs the transport vehicle 10 to move to the parking area 280 directly above the processing device 4 and place the container 102 on the upper surface (placement area A) of the lifting platform 204 of the processing device 4. Specifically, the control unit 302 generates a control signal (second placement instruction signal) equivalent to this instruction and transmits it from the transmitter 306 to the transport vehicle 10.

When the receiver 132 of the transport vehicle 10 receives a signal (second placement instruction signal) from the control unit 12, it sends it to the control unit 130. The control unit 130 controls the lifting unit 110 based on this signal (second placement instruction signal) to wind up the hanging member 112. This allows the container 102 to be raised so that it passes through the opening 282, etc., and stored in the storage area 104. The control unit 130 then controls the drive unit 90, etc., to cause the transport vehicle 10 to travel along the transport path 6.

When the transport vehicle 10 stops in the parking area 280 directly above the processing device 4, the container 102 is positioned directly above the opening 282. With the transport vehicle 10 stopped in the parking area 280, the control unit 130 controls the lifting unit 110 to send out the hanging member 112. This allows the container 102 to be lowered so that it passes through the opening 282, etc., and the container 102 can be placed on the upper surface of the lifting platform 204 of the processing device 4.

After the container 102 is placed on the top surface of the lifting platform 204, the control unit 130 generates a notification signal (third placement completion signal) to notify that the placement of the container 102 on the top surface of the lifting platform 204 has been completed. The signal (third placement completion signal) generated by the control unit 130 is transmitted from the transmitter 134 to the control unit 12.

When the receiver 304 of the control unit 12 receives the signal (third placement completion signal) transmitted from the transmitter 134 of the transport vehicle 10, it sends it to the control unit 302. When the control unit 302 confirms the signal (third placement completion signal) from the transport vehicle 10, it notifies the processing device 4 that the placement of the container 102 on the upper surface of the lifting platform 204 is complete. Specifically, the control unit 302 generates a notification signal (fourth placement completion signal) to notify that the placement of the container 102 on the upper surface of the mounting platform 66 is complete, and transmits this from the transmitter 306 to the processing device 4.

When the receiver 248 of the processing device 4 receives a signal (fourth placement completion signal) from the control unit 12, it sends it to the control device 246. When the control device 246 receives this signal (fourth placement completion signal), it controls the operation of each component to remove the unprocessed workpiece 11 from the container 102. Note that if a processed workpiece 11 is present in the processing device 4, the unprocessed workpiece 11 is removed from the container 102, and then the processed workpiece 11 is loaded into the container 102.

When the unprocessed workpiece 11 is removed from the container 102, for example, the control device 246 generates a notification signal (second transport completion signal) to notify that removal of the workpiece 11 from the container 102 has been completed. The signal (second transport completion signal) generated by the control device 246 is transmitted from the transmitter 250 to the control unit 12.

By using this procedure, the unprocessed workpiece 11 stored in the loader/unloader 8 can be transported to any processing device 4. Note that while the procedure for transporting the workpiece 11 from the loader/unloader 8 to the processing device 4 has been mainly described here, the procedure for transporting the workpiece 11 from the processing device 4 to the loader/unloader 8 is also similar.

The above-described procedure can be changed as desired within the scope of allowing the workpiece 11 to be transported appropriately. For example, multiple steps included in the above-described procedure can be performed simultaneously, or the order of the steps can be changed within the scope of allowing the workpiece 11 to be transported without being affected. Similarly, any step can be added, changed, or omitted within the scope of allowing the workpiece 11 to be transported without being affected.

As described above, the transport path 6, the loader/unloader (transport device) 8, the transport vehicle 10, the cassette storage mechanism 24, and the lifting unit (lifting mechanism) 110 in this embodiment are all configured to transport the workpiece 11 efficiently and safely. Therefore, by using the transport system 2 incorporating these, the workpiece 11 can be transported efficiently and safely.

(Embodiment 2)
In this embodiment, a processing device different from the above-mentioned embodiment will be described. Fig. 31 is a perspective view showing the internal structure of a processing device (cutting device) 402 according to this embodiment. In the following description, the same reference numerals are used to designate components common to the above-mentioned embodiment, and detailed description thereof will be omitted.

The container 102 of the transport vehicle 10 is not placed on the lifting platform 404 of the processing device 402. Instead, the lifting platform 404 of the processing device is provided with a two-stage cassette storage mechanism 406 (first cassette storage mechanism 406a and second cassette storage mechanism 406b) similar to the two-stage cassette storage mechanism 24 (i.e., the first cassette storage mechanism 24a and the second cassette storage mechanism 24b) of the loader/unloader 8 of the above-mentioned embodiment.

In other words, the cassette 30 is loaded into the processing device 402 of this embodiment. The processing device 402 is also equipped with a movement restriction mechanism consisting of a stopper member 50 and an axis mechanism 52. This makes it easier to load and unload the relatively heavy cassette 30, reducing the risk of the workpiece 11 contained in the cassette 30 being damaged during loading and unloading. It also makes it easier to realize a cassette storage mechanism 406 that is compact in the width direction.

The processing device 402 of this embodiment also has a first safety mechanism and a second safety mechanism for restricting access from the outside to the inside of the processing device 402. This makes it possible to prevent an operator from accidentally accessing moving parts and the like that are located inside the processing device 402 during operation.

The processing device 402 of this embodiment may be independent of the above-mentioned conveying system 2. In other words, the processing device 402 of this embodiment does not necessarily need to be connected to the above-mentioned conveying system 2.

The cassette storage mechanism 406 of this embodiment is configured to transport the workpiece 11 efficiently and safely, similar to the cassette storage mechanism 24 of the above-described embodiment. Therefore, by using the processing device 4 incorporating this, the workpiece 11 can be transported efficiently and safely.

In addition, the structures, methods, etc. of the above-mentioned embodiments and variations can be modified as appropriate without departing from the scope of the present invention.

2: Transport system 4: Processing equipment (cutting equipment)
4a: Processing device 4b: Processing device 6: Transport path 6a: Opening 8: Loader/unloader (transport device)
10: Transport vehicle 10a: Transport vehicle 10b: Transport vehicle 12: Control unit 21: Pipe 22: Housing 22a: Ceiling 22b: Opening 24: Cassette storage mechanism 24a: First cassette storage mechanism 24b: Second cassette storage mechanism 26: Support base 26a: Upper surface 26b: Outer surface 28: Cassette placement base 28a: Lower surface 28b: Upper surface 28c: Through hole 30: Cassette 30a: First cassette 30b: Second cassette 32: Loading/unloading opening 34: Outer door (second door)
36: Rotating coupling member 38a: External loading/unloading area (external area)
38b: Internal storage area (internal area)
40: Inner door (first door)
42: Lifting mechanism 42a: Cylinder tube 42b: Piston rod 42c: Connecting member 44: First sensor 44a: Magnet 46: Control device 48: Second sensor 48a: Magnet 50: Stopper member 50a: Square bar 50b: Roller 52: Shaft mechanism 52a: Rotating shaft 52b: Bearing 54: Pin (pressing portion)
54a: Ring 54b: Button 56: Lifting mechanism 56a: Support column 58: Lifting platform 60: Temporary placement unit 62: Housing 62a: Upper plate 62b: Lower plate 62c: Side plate 62c1: _First side plate _62c2 : Second side plate _62d : Opening 62e1: First opening _62e2 : Second opening 64: Transport unit (transport mechanism)
64a: First transport unit 64b: Second transport unit 66: Placement table 68: Receiver 70: Transmitter 72a: Upper guide rail (first temporary placement section)
72b: Lower guide rail (second temporary placement section)
72c: Distance 74a: First air actuator 74b: Second air actuator 76a: First guide mechanism 76b: Second guide mechanism 78: Distance adjustment mechanism 82: Frame 84: Axle 86: Wheel (front wheel)
88: Wheels (rear)
90: Drive unit 92: Motor 92a: Rotating shaft (output shaft)
94: Pulley 96: Battery (secondary battery)
98: Wiring (charging wiring)
100: Terminal (receiving terminal)
102: Container (cassette)
102a: Storage section (storage space)
102b: Opening 102c: Upper wall 102d: Bottom wall 104: Storage area 106: First guide rail 106a: Holding surface 106b: Side surface 108: Second guide rail 108a: Holding surface 110: Lifting unit (lifting mechanism)
112: Hanging member 114: Driving mechanism 116: Contact member 118: Elastic member (stretchable member)
120: Cover 122: First sensor 124: Second sensor 126: Third sensor 128: Support base 130: Control unit
130a: First sensor control unit 130b: Travel instruction unit 130c: Second sensor control unit 130d: Turn instruction unit 130e: Entry control unit 130f: Stop control unit 132: Receiver 134: Transmitter 142: Motor 142a: Rotating shaft (output shaft)
144a: First rotating shaft (first shaft)
144b: second rotating shaft (second shaft)
146: Pulley 148: Connection member 150a: Pulley 150b: Pulley 152: Connection member 154a: Reel 154b: Reel 156a: Roller 156b: Roller 162: Driving mechanism 164: Motor 164a: Rotating shaft (output shaft)
166a: First rotating shaft (first shaft)
166b: Second rotating shaft (second shaft)
166c: Third rotating shaft (third shaft)
168: Pulley 170: Connecting member 172: Reel 172a: Groove (recess)
172b: protrusion (convex portion)
174: Fixed member 176: Guide 182: Lid portion 182a: Plate-shaped member 182b: Flexible member 184: Contact portion 184a: Fixed member 184b: Roller 186: Fixed block 188: Connection block (L-shaped block)
188a: Connection part 188b: Fixation part 190: Connection shaft 202: Base 202a: Recess 202b: Recess 202c: Pipe connection part 204: Lifting platform 206: X-axis movement mechanism (processing feed unit)
206a: Table cover 206b: Dust-proof/water-proof cover 208: Chuck table 208a: Holding surface 210: Clamp 212: Guide rail 214: First support structure 216: First rail 218: First movement mechanism 220: First holding unit 220a: Grip mechanism 222: Second rail 224: Second movement mechanism 226: Second holding unit 228: Second support structure 230: Y-axis/Z-axis movement mechanism (indexing feed unit, incision feed unit)
232: Processing unit (cutting unit)
234: Cutting blade 236: Imaging unit (camera)
238: Cleaning unit 240: Spinner table 242: Spray nozzle 244: Cover 244a: Ceiling 244b: Door 246: Control device 248: Receiver 250: Transmitter 262: Lower frame 264: Upper frame 266: Road surface panel 268: Screw 270: Lower frame unit 270a: Lower frame unit 270b: Lower frame unit 270c: Lower frame unit 270d: Lower frame unit 272: Upper frame unit 272a: Upper frame unit 272b: Upper frame unit 274a: Bridging panel 274b: Bridging panel 276: Guard section 278: Travel area 280: Parking area 282: Opening 284: Waiting area 286: Mark 286a: First mark 286b: Second mark 286c: Third mark 286d: Fourth mark 288: Terminal (power supply terminal)
290: Terminal support portion 292: Wiring (power supply wiring)
302: Control unit 304: Receiver 306: Transmitter 402: Processing device (cutting device)
404: Lifting platform 406: Cassette accommodating mechanism 406a: First cassette accommodating mechanism 406b: Second cassette accommodating mechanism 11: Workpiece 13: Tape (dicing tape)
15: Frame 17: Workpiece unit 17a: Workpiece unit 17b: Workpiece unit A: Placement area _A1a : First placement area _A1b : First placement area _A2 : Second placement area _B1a : First transport area _B1b : First transport area _B2 : Second transport area C1: Arrow _C2 : _Arrow C3: _{Arrow D1} : _{Arrow D2} : Arrow D3: Arrow _E1 : Arrow _E2 : Arrow _F1 : Arrow _F2 : Arrow G: Arrow

Claims (3)

A transport path along which a transport vehicle that transports a workpiece to a processing device runs,
A road panel having a flat upper surface is installed above the processing device,
A conductive member is exposed at a position on the upper surface of the road panel where the wheels of the transport vehicle come into contact,
The conductive member includes carbon fiber reinforced plastic and is grounded. The transport path according to claim 1, characterized in that the conductive member covers the entire upper surface of the road panel. 3. The transport path according to claim 1 , wherein a plurality of said road panels are connected in a direction parallel to said upper surface.