KR20210061927A - Transport road - Google Patents

Abstract

Workpieces are efficiently and safely transported. As transport road on which a transport vehicle transporting a workpiece to the processing device travels, surface panel is installed above the processing device and having a flat top, and a conductive member is exposed on the upper surface of the road panel at a position where the wheels of the transport vehicle come into contact with each other. Preferably, the conductive member covers the entire area of the upper surface of the road surface panel. More preferably, the conductive member includes carbon fiber reinforced plastic. In addition, preferably, the conductive member is grounded. In addition, preferably, a plurality of the road surface panels are connected in a direction parallel to the top surface. The generation and accumulation of static electricity due to friction between the conveying path and the wheels of the conveying vehicle are suppressed, and adverse effects is prevented from being exerted to the workpiece.

Description

Transportation Road {TRANSPORT ROAD}

The present invention relates to a conveying path used for conveying a workpiece.

In the manufacturing process of a device chip embedded in an electronic device or the like, a plate-shaped workpiece represented by a semiconductor wafer or a resin package substrate is processed by various processing apparatuses. When conveying a workpiece to this processing apparatus, a cassette capable of accommodating a plurality of workpieces is usually used. When the processing apparatus receives a cassette in a state in which a plurality of workpieces are accommodated, the workpieces are sequentially taken out from the cassette and processed.

In order to increase the efficiency related to the processing of the workpiece, a plurality of processing devices are sometimes used in parallel. In this case, the workpiece must be conveyed at an appropriate timing for each of the plurality of processing devices. Therefore, a conveying system has been proposed in which a plurality of processing devices are connected by a path for conveyance (a conveyance path) to realize conveyance of a workpiece to each processing device (for example, see Patent Document 1).

Japanese Unexamined Patent Application Publication No. Hei 6-177244

However, in order to maximize the ability of a plurality of processing devices, it is important to efficiently and safely convey the workpiece to each processing device. However, there have been cases in which smooth conveyance of the workpiece cannot be realized due to structural reasons of various devices related to conveyance of the workpiece.

The present invention has taken these problems into consideration, and an object thereof is to provide a conveying path that enables efficient and safe conveying of a workpiece.

According to an aspect of the present invention, as a conveyance path on which a conveyance vehicle for conveying a workpiece to the processing device travels, it has a road surface panel installed above the processing device and a flat top surface, and the upper surface of the road surface panel is A conveying path is provided, characterized in that the conductive member is exposed at a position where the wheels of the conveying vehicle come into contact.

In this conveyance path, it is preferable that the conductive member covers the entire area of the upper surface of the road surface panel.

Moreover, in this conveyance path, it is preferable that the said electroconductive member contains carbon fiber reinforced plastic.

Moreover, in this conveyance path, it is preferable that the said electroconductive member is grounded.

Further, in this conveyance path, it is preferable that a plurality of the road surface panels are connected in a direction parallel to the upper surface.

In the conveyance path according to an aspect of the present invention, a road surface panel provided above the processing apparatus and having a flat top surface is provided, and a conductive member is exposed at a position where the wheels of the conveyance vehicle on the upper surface of the road surface panel contact. Therefore, generation and accumulation of static electricity due to friction between the conveyance path and the wheel of the conveyance vehicle can be suppressed, and adverse effects on the workpiece can be prevented.

Therefore, by using the conveying path according to one aspect of the present invention, it is possible to efficiently and safely convey the workpiece.

1 is a plan view showing a configuration example of a conveying system.
2 is a functional block diagram showing an example of the connection relationship of the conveyance system.
3 is a side view schematically showing a configuration example of a loader and an unloader.
Fig. 4(A) is a partial cross-sectional side view showing a state in which the outer door is closed and the inner door is open, and Fig. 4(B) is a partial cross-sectional side view showing a state in which the outer door is open and the inner door is closed.
Fig. 5(A) is a partial cross-sectional side view showing a cassette mounting table and the like, and Fig. 5(B) is a bottom view showing the cassette mounting table.
Fig. 6(A) is a partial cross-sectional side view showing a state in which the cassette mounting table is pulled out from the inner receiving area, and Fig. 6(B) is a partial cross-sectional side view showing a state in which the roller is removed from the support, and Fig. 6 (C) is a partial cross-sectional side view showing a state in which the cassette mounting table is returned to the internal accommodation area.
Fig. 7(A) is a partial cross-sectional side view showing a state in which a work unit is temporarily disposed on two upper guide rails, and Fig. 7(B) is a state in which the work unit is temporarily disposed on two lower guide rails. It is a partial sectional side view showing
Fig. 8(A) is a plan view showing two upper end guide rails and the like, and Fig. 8(B) is a plan view showing a state in which the distance between two upper end guide rails is narrowed.
9(A) is a perspective view showing the upper surface side of the transport vehicle, and FIG. 9(B) is a perspective view illustrating the bottom surface side of the transport vehicle 10.
10 is an enlarged perspective view showing the front end of the transport vehicle.
Fig. 11(A) is a perspective view showing the container, and Fig. 11(B) is a front view showing the container.
Fig. 12 is a perspective view showing a transport vehicle in a state in which a container is placed in a mounting area.
Fig. 13 is a perspective view showing a transport vehicle in which a container is connected to a suspension member via an elastic member (expansion member).
Fig. 14(A) is a plan view showing a configuration example of the lifting unit, and Fig. 14(B) is a side view showing a configuration example of the lifting unit.
Fig. 15A is a plan view showing another configuration example of the lifting unit, and Fig. 15B is a side view showing another configuration example of the lifting unit.
Fig. 16(A) is a plan view showing the reel, and Fig. 16(B) is a side view showing the reel.
17 is an enlarged perspective view showing the cover.
Fig. 18(A) is a side view showing a cover in a state in which the container is not stored in the storage area, and Fig. 18(B) is a side view showing the cover in a state in which the container is stored in the storage area.
Fig. 19(A) is a side view showing the conveyance difference when the container stored in the storage area is placed in the mounting area, and Fig. 19(B) is a graph showing the current value of the motor when the container is lowered.
Fig. 20(A) is a side view showing the conveyance difference when the container placed in the mounting area is stored in the storage area, and Fig. 20(B) is a graph showing the current value of the motor when the container is raised.
21 is a perspective view showing the appearance of a processing device and a conveyance path.
22 is a perspective view showing the internal structure of the processing apparatus.
23 is a perspective view showing a part of a conveying path provided in a processing apparatus.
24(A) and 24(B) are perspective views showing the lower frame units constituting the lower frame.
25 is a plan view showing an arrangement of lower frame units constituting the lower frame.
26(A) and 26(B) are perspective views showing the upper frame unit constituting the upper frame.
Fig. 27 is a plan view showing an arrangement of upper frame units constituting the upper frame.
Fig. 28 is a plan view showing a conveying path configured by arranging a plurality of road surface panels.
29 is a functional block diagram showing a control unit of the transport vehicle.
30 is a diagram for explaining an example of a control method of a conveyance system.
31 is a perspective view showing the internal structure of the processing apparatus according to the second embodiment.

Embodiments of the present invention will be described with reference to the accompanying drawings. In addition, in each of the following embodiments, a case in which all of the plurality of processing devices to be conveyed to the workpiece are cutting devices will be described, but the conveying system is capable of conveying the workpiece to any type of processing device. It is good if it is composed. That is, a destination for conveyance of a workpiece or the like may be a processing device other than a cutting device.

For example, the conveying system may be configured to convey a workpiece to a plurality of laser processing apparatuses. Further, the conveying system is also configured to be capable of sequentially conveying a workpiece to a plurality of types of processing apparatuses used in a series of processing. Further, the conveying system may be configured so that the workpiece can be conveyed to various apparatuses used in arbitrary processing incidental to the processing of the workpiece. That is, the conveyance destination of the work piece, etc. may include a tape attaching device, an ultraviolet irradiation device, a cleaning device, and the like, which are not intended to process the work piece.

(Embodiment 1)

1 is a plan view showing a configuration example of a conveying system 2 according to the present embodiment, and FIG. 2 is a functional block diagram illustrating an example of a connection relationship between the conveying system 2. As shown in FIG. 1, the conveying system 2 according to the present embodiment is a plate-shaped workpiece 11 (FIG. 8(A), FIG. 8 ( B), etc.).

The workpiece 11 is, for example, a disk-shaped wafer made of a semiconductor material such as silicon. The surface side of the workpiece 11 is divided into a plurality of small regions by a plurality of planned division lines (streets) intersecting each other, and each small region includes an IC (Integrated Circuit) and MEMS (Micro Electro Mechanical Systems). A device such as the one is formed.

On the back side of the workpiece 11, a tape (dicing tape) 13 having a diameter larger than that of the workpiece 11 is attached. The outer circumferential portion of the tape 13 is fixed to an annular frame 15 surrounding the workpiece 11. As described above, in the conveying system 2 according to the present embodiment, the workpiece 11 is conveyed to the processing device 4 in the state of the workpiece unit 17 supported by the frame 15 via the tape 13. do.

In addition, although the work piece 11 of this embodiment is a disk-shaped wafer made of a semiconductor material such as silicon, there is no limitation on the material, shape, structure, size, etc. of the work piece 11. For example, a substrate made of a material such as other semiconductors, ceramics, resins, and metals may be used as the workpiece 11.

Likewise, there are no restrictions on the type, quantity, shape, structure, size, or arrangement of devices. A device may not be provided on the workpiece 11. In addition, in this embodiment, the object unit 17 supported by the frame 15 through the tape 13 is used as the object to be conveyed, but the tape 13 is not attached. The workpiece 11 or the workpiece 11 that is not supported by the frame 15 may be subjected to conveyance.

The size of the frame 15 described above is set according to the size of the workpiece 11 (a diameter of the workpiece 11, etc.). For example, the outer diameter of the frame 15 supporting the workpiece 11 having a diameter of about 300 mm is larger than the outer diameter of the frame 15 supporting the workpiece 11 having a diameter of about 200 mm. That is, when the large work piece 11 is used, the outer diameter of the work piece unit 17 also becomes large.

In addition, the processing device 4 for processing the workpiece 11 is connected to the transport system 2 as a transport destination for the workpiece 11, but is not necessarily a component of the transport system 2. Therefore, the processing apparatus 4 may be changed or omitted according to the mode of use of the conveying system 2, as described above.

In addition, in FIG. 1, for convenience of explanation, only one processing device 4a is shown, and in FIG. 2, two processing devices 4a, 4b are shown, but in this embodiment, the destination of the workpiece 11 As a result, two or more processing devices 4 are required. That is, the number of the processing apparatus 4 connected to the conveyance system 2 is 2 or more.

The conveyance path 6 is provided in the upper part of each processing device 4 so that a plurality of processing devices 4 may be connected. Through this conveyance path 6, the workpiece 11 is conveyed to each processing device 4. Moreover, since the conveyance path 6 is provided above the processing apparatus 4, the conveyance path 6 does not interfere with the pipe 21 etc. connected to the side surface of each processing apparatus 4.

Below the conveyance path 6, in addition to the processing device 4, a loader/unloader (transport device) 8 in which the workpiece 11 before processing and the workpiece 11 after processing are accommodated is provided. The workpiece 11 before processing accommodated in the loader/unloader 8 is carried into the transport vehicle 10 at an arbitrary timing.

The conveyance vehicle 10 travels on the conveyance path 6 and conveys the workpiece 11 before processing received from the loader/unloader 8 to each processing apparatus 4. In addition, when the transport vehicle 10 receives the processed workpiece 11 from the processing device 4, it travels on the conveyance path 6 and transfers the processed workpiece 11 to the loader/unloader 8 ) To return.

However, when a plurality of types of devices (processing device 4, etc.) are connected to the conveying system 2, the conveying vehicle 10 transfers the processed workpiece 11 from a certain processing device 4 Upon receipt, it travels on the conveyance path 6, and the processed object 11 may be conveyed to an apparatus used in the next step. In addition, although FIG. 1 and FIG. 2 shows two conveyance vehicles 10a, 10b, there is no limit to the number of the conveyance vehicles 10.

As shown in Fig. 2, a control unit 12 for controlling such an operation is wirelessly connected to the processing apparatus 4, the loader/unloader 8, and the transport vehicle 10. However, the control unit 12 may be configured so as to be able to control the operation of the processing device 4, the loader/unloader 8, the transport vehicle 10, and the like, and may be connected to them by wire.

3 is a side view schematically showing a configuration example of the loader/unloader 8. In addition, in FIG. 3, some constituent elements are shown as functional blocks. As shown in Fig. 3, the loader/unloader 8 includes a case 22 that accommodates various components. In addition, in FIG. 3, only the outline of the case 22 is shown for convenience of description.

Cassette accommodating mechanisms 24 are respectively provided at positions of two different heights along the height direction (Z _{1 axis direction) in the case 22.} That is, the loader/unloader 8 of the present embodiment includes a first cassette storage mechanism 24a and a second cassette storage mechanism 24b disposed above the first cassette storage mechanism 24a. However, there is no limit to the number of cassette accommodation mechanisms 24 provided in the loader/unloader 8. The loader/unloader 8 may be provided with one or more cassette accommodation mechanisms 24.

Each cassette receiving mechanism 24 has a flat plate-shaped support base 26. And a support 26 (not shown) side, the guide unit the upper surface of the installed, the guide mechanism has, for mounting the cassette of the plate-like to slide along the inside direction (Y _1-axis direction) of the case (22) (28) is equipped.

On the upper surface of the cassette mounting table 28, a cassette 30 capable of accommodating a plurality (eg, 10 or more) of the workpiece 11 is mounted. The cassette 30 is used when a plurality of workpiece units 17 are collected and transported. By using such a cassette 30, an operator can collect a plurality of workpiece units 17 and carry them into the loader/unloader 8.

In a position corresponding to each cassette receiving mechanism 24 of the case 22, a carry-in outlet 32 through which the cassette mounting table 28 on which the cassette 30 is placed can pass is formed. When carrying in and out of the cassette 30, the cassette 30 passes through the carry-in outlet 32 by sliding the cassette mounting table 28 on which the cassette 30 is placed.

At positions corresponding to the respective carry-in outlets 32 of the case 22, an outer door (second door) 34 capable of closing each carry-in outlet 32 is disposed. The lower part of the outer door 34 is connected to the outer end of the support 26 through a rotating connecting member 36 such as a hinge having a horizontal rotating shaft, and the outer door 34 is a rotating connecting member It is opened and closed by rotating around the axis of rotation of (36).

When the outer door 34 is open, the cassette mounting table 28 can be withdrawn into the external carry-in/out area (outer area) 38a (refer to FIG. 6(A), etc.) located outside the carry-in outlet 32. I can. Further, at positions corresponding to the respective carry-in outlets 32 of the case 22, an air-driven locking mechanism (not shown) that fixes the closed outer door 34 so as not to be opened is provided.

For example, the operator places the conveyed cassette 30 on the cassette mounting table 28 taken out in the external carry-in/out area 38a. Thereafter, when the operator pushes the cassette mounting table 28 into the case 22, the cassette mounting table 28 and the cassette 30 are located in an inner receiving area (inside Area) 38b (refer to Fig. 6(A) and the like).

In addition, in this specification, this internal accommodating area 38b may be called a 1st mounting area in which the cassette 30 is mounted. When carrying out the cassette 30 from the cassette receiving mechanism 24, after opening the outer door 34, the cassette mounting table 28 may be pulled out from the inner receiving area 38b to the outer carrying-in/out area 38a. .

In a position opposite to the carry-in outlet 32 with respect to the inner receiving area 38b of each cassette receiving mechanism 24, an inner door (first door) 40 of an aspect that can be moved along the height direction is provided. . The inner door 40 of the first cassette receiving mechanism 24a moves between an upper closed position and a lower open position adjacent to the inner receiving region 38b of the first cassette receiving mechanism 24a, The inner door 40 on the side of the second cassette receiving mechanism 24b moves between the upper open position and the lower closed position adjacent to the inner receiving region 38b of the second cassette receiving mechanism 24b. . Therefore, there is no case where the two inner doors 40 interfere with each other.

Fig. 4A is a partial cross-sectional side view showing the first cassette accommodation mechanism 24a in a state in which the outer door 34 is closed and the inner door 40 is open. In addition, in Fig. 4A, some components of the loader/unloader 8 are shown as functional blocks. The structure and operation of the second cassette receiving mechanism 24b are the same as the structure and operation of the first cassette receiving mechanism 24a except for the moving operation of the inner door 40.

As shown in FIG. 4(A), an elevating mechanism 42 is connected to the inner door 40. As shown in FIG. The lifting mechanism 42 is, for example, an air actuator (air cylinder) that moves an object using pneumatic pressure, and has a cylinder tube 42a and a piston rod 42b that can move relative to the cylinder tube 42a.

A piston (not shown) is connected to the base end of the piston rod 42b accommodated in the cylinder tube 42a. Further, to the tip of the piston rod 42b exposed from the cylinder tube 42a, a connecting member 42c fixed to a surface opposite to the inner receiving region 38b of the inner door 40 is connected.

When intake and exhaust to the cylinder tube 42a are controlled to move the piston and piston rod 42b from the top to the bottom, the inner door 40 of the first cassette receiving mechanism 24a moves from the closed position to the open position. . Further, when the piston and piston rod 42b are moved from the bottom to the top, the inner door 40 of the first cassette receiving mechanism 24a moves from the open position to the closed position. Further, the lifting mechanism 42 may be realized by another mechanism such as a rodless air cylinder.

At a position facing the inner door 40 of the support 26, a first sensor 44 used to detect whether the inner door 40 is open is provided. The first sensor 44 is, for example, a magnet sensor, and detects the strength of a magnetic field by a magnet 44a (see Fig. 4B) mounted at a predetermined position of the inner door 40.

For example, as shown in Fig. 4(A), when the inner door 40 is opened and the magnet 44a is away from the first sensor 44, the strength of the magnetic field by the magnet 44a is determined by the first sensor ( 44) weakens at the position. Therefore, by using the strength of the magnetic field detected by the first sensor 44, it can be determined whether or not the inner door 40 is open.

A control device 46 that controls each component of the loader/unloader 8 is connected to the first sensor 44, and the first sensor 44 controls information on the intensity of the detected magnetic field. Send to device 46. When the strength of the magnetic field detected by the first sensor 44 becomes weaker than the reference, the control device 46 determines that the inner door 40 is open, and the strength of the magnetic field detected by the first sensor 44 is less than the reference. When it becomes stronger, it is determined that the inner door 40 is closed. Further, the first sensor 44 may be wirelessly connected to the control device 46.

The control device 46 is configured by a computer including, for example, a processing device such as a CPU (Central Processing Unit), a main storage device such as a dynamic random access memory (DRAM), and an auxiliary storage device such as a flash memory. have. The function of the control device 46 is realized by operating the processing device or the like in accordance with software stored in the auxiliary storage device.

At a position corresponding to the carrying-in outlet 32 of the case 22, a second sensor 48 used to detect whether or not the outer door 34 is open is provided. The second sensor 48 is, for example, a magnet sensor, and detects the strength of the magnetic field by the magnet 48a mounted at a predetermined position of the outer door 34. The second sensor 48 is connected to the control device 46. Further, the second sensor 48 may be wirelessly connected to the control device 46.

4(B) is a partial cross-sectional side view showing a state in which the outer door 34 is open and the inner door 40 is closed. In addition, in Fig. 4B, the control device 46 is shown as a functional block. As shown in Fig. 4B, when the outer door 34 is opened and the magnet 48a is away from the second sensor 48, the strength of the magnetic field by the magnet 48a is the second sensor 48 Weakens in the position of.

Therefore, by using the strength of the magnetic field detected by the second sensor 48, it is possible to determine whether the outer door 34 is open. Specifically, the second sensor 48 sends information about the detected magnetic field strength to the control device 46. When the intensity of the magnetic field detected by the second sensor 48 becomes weaker than the reference, the control device 46 determines that the outer door 34 is open, and the intensity of the magnetic field detected by the second sensor 48 is less than the reference. When it becomes stronger, it is determined that the outer door 34 is closed.

The control device 46 has a function as a first safety mechanism for restricting access from the outside to the inside of the loader/unloader 8. The first safety mechanism is realized by the control device 46 appropriately controlling an air-driven locking mechanism that fixes the outer door 34 in a closed state so as not to be opened.

Specifically, when it is determined that the outer door 34 is closed, and it is determined that the inner door 40 is open, the control device 46 uses a locking mechanism to prevent the outer door 34 from being opened. Fix (34). In this way, by controlling whether the control device 46 can open or close the outer door 34, it is possible to prevent the operator from accidentally accessing the movable parts located inside the loader/unloader 8 during operation. have.

Further, the control device 46 has a function as a second safety mechanism for restricting access from the outside to the inside of the loader/unloader 8. The second safety mechanism is realized by the control device 46 properly managing the power supply of the loader/unloader 8. Specifically, when it is determined that the outer door 34 is open, and when it is determined that the inner door 40 is closed, when the inner door 40 is opened for some reason, the control device 46 is Turn off the power of the unloader (8).

In a situation where the outer door 34 and the inner door 40 are simultaneously opened by the second safety mechanism, the loader/unloader 8 is stopped. In this way, by appropriately managing the power supply of the loader/unloader 8 by the control device 46, it is possible to prevent the operator from accidentally accessing the moving parts located inside the loader/unloader 8 during operation. I can.

5(A) is a partial cross-sectional side view showing the cassette mounting table 28 and the like, and FIG. 5(B) is a bottom view showing the cassette mounting table 28. As shown in FIG. A stopper member 50 is disposed on the lower surface 28a side of the cassette mounting table 28. The stopper member 50 has, for example, a long angle bar 50a in the inward direction. However, the length of the angle bar 50a in the inward direction is shorter than the length in the inward direction of the cassette mounting table 28. Further, the square bar 50a is formed of, for example, a metal such as stainless steel. However, there is no major limitation on the material or shape of each rod 50a.

At one end (that is, the end of the inner door 40 side) of the angle bar 50a positioned inward from the inside direction, a rotation axis along the _{width direction (X 1 axis direction) approximately perpendicular to the height direction and the inside direction (} (Not shown) is provided, and the roller 50b is supported in a rotatable state on this rotating shaft. The diameter of the roller 50b is smaller than the distance between the lower surface 28a of the cassette mounting table 28 and the upper surface 26a of the support base 26.

At a position between the inner one end of the leg 50a and the other end of the outer side, a shaft mechanism 52 for supporting the leg 50a in a manner capable of rotating is provided. The shaft mechanism 52 has a rotation shaft 52a along the width direction. The rotation shaft 52a is connected to the position of the other end side (outer side) than the center of the length direction (inward direction) of the leg 50a.

Both ends of the rotation shaft 52a in the width direction are inserted into the bearing holes of a pair of bearings 52b fixed to the lower surface 28a side of the cassette mounting table 28. Accordingly, the angle bar 50a is supported by the bearing 52b so that it can rotate around the rotational shaft 52a in a plane parallel to the height direction and the inner direction (in a plane perpendicular to the width direction).

As described above, the rotation shaft 52a is connected to a position on the other end side than the center of the leg 50a. Accordingly, the direction of the moment around the rotation shaft 52a of gravity acting on the stopper member 50 is a direction in which one end of the corner rod 50a is moved downward. That is, as long as sufficient force is not applied to the corner rod 50a, the position of one end of the corner rod 50a becomes lower than the position of the other end of the corner rod 50a due to the action of gravity.

Therefore, for example, in a state in which the entire cassette mounting table 28 is located in the inner receiving area 38b, the roller 50b contacts the upper surface 26a of the support base 26. Further, when the cassette mounting table 28 is moved above the support table 26, the roller 50b rolls the upper surface 26a of the support table 26.

To the other end of each rod 50a, a lower end of a pin (pressing portion) 54 long in the height direction is connected. In a position corresponding to the pin 54 of the cassette mounting table 28, a through hole 28c penetrating the cassette mounting table 28 in the height direction is formed, and the pin 54 is the through hole 28c. ). The through hole 28c is formed to have a size such that it does not hinder the movement of the inserted pin 54 in the height direction.

The length of the pin 54 in the height direction is longer than the thickness of the cassette mounting table 28. Therefore, when the roller 50b is in contact with the upper surface 26a of the support base 26, the upper part of the pin 54 is exposed on the upper surface 28b side of the cassette mounting table 28. As shown in FIG. A disk-shaped button 54b having an outer diameter larger than the diameter of the pin 54 is fixed to the exposed portion of the pin 54.

When the button 54b fixed to the pin 54 is pressed down from above, the other end of the leg 50a moves downward, and one end of the leg 50a moves upward. That is, the roller 50b moves upward. Further, in the vicinity of the lower portion of the pin 54, a ring 54a having an outer diameter larger than the diameter of the through hole 28c is fixed.

Fig. 6A is a partial cross-sectional side view showing a state in which the cassette mounting table 28 is pulled out from the inner receiving region 38b. The cassette mounting table 28 is mounted so as to be able to slide with respect to the support table 26 by the above-described guide mechanism (not shown), and is pulled out toward the outside of the carry-in outlet 32.

When the cassette mounting table 28 slides outward, and the roller 50b comes out of the outer end of the upper surface 26a of the support table 26, the circumference of the rotation shaft 52a of gravity acting on the stopper member 50 One end of each rod 50a moves downward by the moment of. In other words, the roller 50b is in a state where it is removed from the support 26.

6(B) is a partial cross-sectional side view showing a state in which the roller 50b has been removed from the support base 26. As shown in FIG. When the roller 50b is detached from the support base 26, the roller 50b is located at a position lower than the upper surface 26a. As a result, the movement of the cassette mounting table 28 to the inside is restricted by the stopper member 50 contacting the outer surface 26b of the support table 26. Further, as the roller 50b is removed, the pin 54 rises, and the ring 54a contacts the lower surface 28a of the cassette mounting table 28.

In this way, the stopper member 50 and the shaft mechanism 52 function as a movement regulating mechanism that regulates the movement of the cassette mounting table 28 to the inside when the cassette mounting table 28 is pulled out. By providing the movement control mechanism, it becomes easy to carry in, for example, the relatively heavy cassette 30, so that the risk that the workpiece 11 accommodated in the cassette 30 is damaged due to the carry-in can be reduced.

That is, when placing (carrying in) the cassette 30 on the cassette mounting table 28, if the cassette mounting table 28 moves to the inside, there is a risk that the operator will drop the cassette 30, and the operator will Although the risk of colliding 30) with the outer door 34 increases, such a risk can be suppressed sufficiently low by restricting the movement of the cassette mounting table 28 to the inside by a movement regulation mechanism.

In addition, when the operator takes out the cassette 30 from the cassette mounting table 28, the cassette mounting table 28 moves inward, and the cassette 30 to be taken out is located at the top of the carry-in outlet 32. Although the risk of colliding with a part of the case 22 is increased, such a risk can be suppressed to a sufficiently low level by restricting the movement of the cassette mounting table 28 to the inside by a movement regulation mechanism.

The movement regulating mechanism of the present embodiment is realized by rotation of the angle bar 50a in a plane parallel to the height direction and the inward direction, so, for example, the movement is restricted to a portion outside the width direction of the cassette mounting table 28. As in the case of providing the mechanism, the cassette accommodating mechanism 24 does not increase in the width direction. Therefore, it becomes easier to realize the compact cassette storage mechanism 24 in the width direction compared to the case where the movement limiting mechanism is provided in the outer portion of the cassette mounting table 28 in the width direction.

In addition, conditions, such as the length of the leg 50a and the position of the shaft mechanism 52, are in a state in which the leg 50a is removed from the support 26, and the cassette 30 on the cassette mounting table 28 is placed. The area is set to be completely exposed from the case 22. Therefore, the operator can place (carry in) the cassette 30 on the cassette mounting table 28 with the cassette 30 completely exposed from the case 22.

Fig. 6(C) is a partial cross-sectional side view showing a state in which the cassette mounting table 28 is returned to the inner accommodation region 38b. When returning the cassette mounting table 28 to the inner accommodation area 38b, the operator pushes down the button 54b. The operator presses down the button 54b until the lower part of the button 54b contacts the upper surface 28b of the cassette mounting table 28, for example. Accordingly, the pin 54 is pressed downward, and the roller 50b moves upward than the upper surface 26a of the support base 26.

The roller 50b rises until it contacts the lower surface 28a of the cassette mounting table 28, for example. As a result, the restriction of the movement of the cassette mounting table 28 to the inside is released, and the cassette mounting table 28 can be returned to the inner receiving area 38b. The operator may push the cassette mounting table 28 into the inner accommodation area 38b while pushing down the button 54b.

In addition, the cassette accommodating mechanism 24 is not limited to the example described above. For example, the stopper members 50 may be provided at two different positions in the width direction of the cassette mounting table 28, respectively. In this case, a through hole 28c is formed at a position corresponding to each pin 54. Further, in this case, the two corner rods 50a constituting the two stopper members 50 may be connected to each other at an arbitrary position. When the two angle rods 50a are connected to each other, one pin 54 may be omitted.

Further, the through hole 28c may be formed in a region of the cassette mounting table 28 in which the cassette 30 is disposed. In this case, when the cassette 30 is mounted on the cassette mounting table 28, the pin 54 is pressed down by the weight of the cassette 30. That is, there is no need for the operator to press down the pin 54 to release the regulation by the stopper member 50.

As shown in FIG. 3, the loader/unloader 8 is provided with an elevating mechanism 56 disposed on the side opposite to the interior receiving area 38b of the inner door 40. The lifting mechanism 56 has a support column 56a that is elongated in the height direction. On the inner door 40 side of the support pillar 56a, a pair of guide rails (not shown) along the longitudinal direction (ie, the height direction) of the support pillar 56a are provided.

A plate-shaped lifting platform 58 is attached to a pair of guide rails of the lifting mechanism 56 in such a manner that it can slide in the height direction. The upper surface of the lifting platform 58 is formed substantially flat. The lifting platform 58 slides in the height direction along a pair of guide rails while maintaining its upper surface in a state substantially perpendicular to the height direction.

A motor (not shown) and a driving pulley (not shown) connected to the rotating shaft of the motor are provided below the support pillar 56a. Further, a driven pulley (not shown) is provided on the upper part of the support pillar 56a. One endless belt with teeth (not shown) is overlaid on the drive pulley and the driven pulley, and a part of this endless belt with teeth is fixed to the lifting platform 58. Therefore, when the rotation shaft of the motor is rotated in one direction, the platform 58 rises, and when the rotation shaft of the motor is rotated in the other direction, the platform 58 descends.

On the upper surface side of the lifting platform 58, a workpiece 11 carried out from the cassette 30 in the cassette housing mechanism 24 and the workpiece 11 carried in the cassette 30 in the cassette housing mechanism 24 are temporarily A temporary placement unit 60 to be disposed is installed. The temporary arrangement unit 60 has an angled cylindrical case 62 in which an opening is formed on the side of the cassette accommodation mechanism 24. Inside the case 62, a plurality of conveying units (conveying mechanisms) 64 capable of holding each of the workpieces 11 and moving in the inward direction are disposed.

When transferring the workpiece unit 17 between the temporary placement unit 60 and the first cassette 30a of the first cassette accommodating mechanism 24a, the height of the temporary placement unit 60 is adjusted to the first cassette accommodating mechanism. Adjust to the height of (24a). _{That is, in the first transfer area B 1} a adjacent to the inner door 40 side from the inside direction with respect to _{the first mounting area A 1} a of the first cassette receiving mechanism 24a, the temporary placement unit 60 ) Is placed.

When the temporary placement unit 60 is disposed in the first conveying area B ₁ a and the inner door 40 of the first cassette accommodating mechanism 24 a is opened, the conveying unit 64 is _It becomes possible to access the first cassette 30a of 1a). For example, the conveyance unit 64 grips the workpiece unit 17 accommodated in the first cassette 30a, and draws it out to the temporary placement unit 60.

In addition, the conveyance unit 64 grips the workpiece unit 17 temporarily disposed in the temporary placement unit 60 and accommodates it in the first cassette 30a. In this way, the transfer unit 64 is between the temporary placement unit 60 of the first transfer area B1a and the first cassette 30a of the first _{mounting area A 1 a, and the workpiece 11} ) Can be returned.

When sending and receiving the workpiece unit 17 between the temporary placement unit 60 and the second cassette 30b of the second cassette accommodating mechanism 24b, the height of the temporary placement unit 60 is adjusted to the second cassette accommodating mechanism. Adjust to the height of (24b). _{That is, in the first transfer area B 1} b adjacent to the inner door 40 side from the inside direction to _{the first mounting area A 1} b of the second cassette receiving mechanism 24 b, the temporary placement unit 60 ) Is placed.

When the temporary placement unit 60 is disposed in the first conveying area B ₁ b and the inner door 40 of the second cassette receiving mechanism 24 b is opened, the conveying unit 64 is the first placement area A ₁ The second cassette 30b of b) becomes accessible. For example, the conveyance unit 64 grips the workpiece unit 17 accommodated in the second cassette 30b, and draws it out to the temporary placement unit 60.

Further, the transfer unit 64 grips the workpiece unit 17 temporarily disposed in the temporary placement unit 60 and accommodates it in the second cassette 30b. In this way, the conveying unit 64 is between _{the temporary placement unit 60 of the first conveying area B 1} b and the second cassette 30 b of the first mounting area A1b, the workpiece 11 ) Can be returned.

Further above the second cassette accommodation mechanism 24b, a mounting table 66 is provided. In addition, in the region immediately above the mounting table 66, an opening 22b penetrating the ceiling 22a of the case 22 vertically is provided. Further, in the region immediately above the mounting table 66 and the opening 22b, an opening 6a penetrating the conveyance path 6 vertically is provided.

When transporting the workpiece unit 17 between the transport vehicle 10 and the temporary placement unit 60, first, a container (cassette) 102 capable of accommodating the workpiece unit 17 is provided. The transport vehicle 10 is moved above the opening 6a. Then, the container 102 is lowered so as to be suspended by the suspending member 112, and the container 102 is mounted on the upper surface of the mounting table 66 (the second mounting area A ₂ ).

Further, the height of the temporary placement unit 60 is adjusted to the height of the container 102 placed on the mounting table 66. That is, the temporary placement unit 60 is disposed in _{the second conveying area B 2} adjacent to the mounting table 66 in the inward direction. Thereby, the conveyance unit 64 becomes able to access the container 102 placed on _{the 2nd placement area A 2.} For example, the conveyance unit 64 grips the workpiece unit 17 accommodated in the container 102 and takes it out to the temporary placement unit 60.

In addition, the conveyance unit 64 grips the workpiece unit 17 temporarily disposed in the temporary placement unit 60 and accommodates it in the container 102. In this way, the conveyance unit 64 conveys _{the workpiece 11 between the temporary placement unit 60 in the second conveyance area B 2} and the container 102 placed on the mounting table 66. can do. Moreover, the lifting mechanism 56 which raises and lowers the temporary arrangement unit 60 and the conveyance unit 64 in the temporary arrangement unit 60 are connected to the above-described control device 46. The operation of the lifting mechanism 56 and the conveyance unit 64 is controlled by this control device 46.

The control device 46 includes a receiver 68 that receives an external signal (information) and sends it to the control device 46, and a transmitter 70 that transmits the signal (information) received from the control device 46 to the outside. Is more connected. The receiver 68 receives, for example, a signal transmitted from the control unit 12 of the transport system 2 and sends it to the control device 46.

The control device 46 controls the operation of each component of the loader/unloader 8 based on, for example, a signal received from the receiver 68. Further, the control device 46 generates, for example, a signal for notification and sends it to the transmitter 70. The transmitter 70 transmits, for example, a signal received from the control device 46 to the control unit 12 of the transport system 2.

The loader/unloader 8 of the present embodiment connects the cassette 30 in which a plurality of workpiece units 17 are accommodated and the container 102 of the transport vehicle 10 via the temporary placement unit 60. The work piece unit 17 can be conveyed between. Therefore, the workpiece unit 17 can be transferred to each processing apparatus 4 in a timely manner, and the workpiece unit 17 processed by each processing apparatus 4 can be recovered in a timely manner.

Fig. 7(A) is a partial cross-sectional side view showing a state in which the workpiece unit 17 is temporarily disposed at the upper end of the temporary placement unit 60, and Fig. 7(B) is at the top of the temporary placement unit 60 It is a partial cross-sectional side view showing a state in which the work unit 17 is temporarily arranged. The case 62 of the temporary placement unit 60 includes, for example, an upper plate 62a disposed above and a lower plate 62b disposed below.

To the two end portions of the upper plate 62a in the width direction, an upper end portion of a column (not shown) is connected, respectively. In addition, the lower end portions of the pillars are connected to two end portions of the lower plate 62b in the width direction, respectively. That is, the upper plate 62a and the lower plate 62b are connected to each other through two sets of columns. In the space between the upper plate 62a and the lower plate 62b, a pair of side plates 62c spaced apart in the width direction are disposed. In addition, an opening 62d is formed at an end portion of the case 62 on the cassette accommodation mechanism 24 side.

At positions of the same height on the inner side of the pair of side plates 62c, an elongated upper end guide rail (first temporary arrangement portion) 72a is disposed along the inner direction, respectively. Each top guide rail 72a defines a support surface for supporting the work unit 17 (frame 15) from below and the position of the work unit 17 (frame 15) in the width direction. It has a side.

On the inner side of the pair of side plates 62c, at positions below the upper end guide rail 72a, long lower end guide rails (second temporary arrangement portions) 72b are disposed along the inner direction, respectively. Each lower guide rail 72b defines a support surface for supporting the work unit 17 (frame 15) from below and the position of the work unit 17 (frame 15) in the width direction. It has a side.

In this way, by providing the upper guide rail 72a and the lower guide rail 72b at positions of different heights inside the case 62, the temporary arrangement unit 60 provides the two workpiece units 17 It can be accommodated at the same time. Therefore, compared to the case where the temporary placement unit can accommodate only one workpiece unit 17, the distance between the container 102 or the cassette 30 of the transport vehicle 10 and the temporary placement unit 60 The workpiece unit 17 can be transported efficiently.

For example, the upper guide rail 72a is used for accommodating the workpiece unit 17 before processing, and the lower guide rail 72b is used for accommodating the workpiece unit 17 after processing. However, there is no limitation on the mode of accommodation of the workpiece unit 17. The upper guide rail 72a may be used for accommodating the workpiece unit 17 after processing, and the lower guide rail 72b may be used for accommodating the workpiece unit 17 before processing.

A first transfer unit 64a is installed at a position at a height corresponding to the upper guide rail 72a, and a second transport unit 64b is installed at a position at a height corresponding to the lower guide rail 72b. have. Each conveyance unit 64 is provided with a gripping part including two plate members arranged above and below. The two plate members are arranged so that the lower surface of the upper plate member and the upper surface of the lower plate member are substantially parallel.

The holding portion of each conveying unit 64 further includes an actuator (not shown) that adjusts the spacing between the two plate members. By narrowing the gap between the two plate members by this actuator, the frame 15 of the work unit 17 is gripped. Further, by increasing the distance between the two plate members, the frame 15 of the work unit 17 is separated from the two plate members.

In addition, each conveyance unit 64 is provided with a horizontal movement mechanism (not shown) which moves the gripping part in the inward direction. The horizontal movement mechanism has a linear guide (not shown) provided along the inward direction. This linear guide is connected in such a way that the transfer unit 64 can be slid.

For example, at one end side of the linear guide, a driven pulley (not shown) having a rotation axis substantially parallel in the width direction is provided. Further, on the other end side of the linear guide, a drive pulley (not shown) having a rotation shaft substantially parallel in the width direction, and a motor (not shown) connected to the drive pulley are provided.

One endless belt with teeth (not shown) is strung between the driven pulley and the drive pulley, and a part of this endless belt with teeth is fixed to the gripping portion. Therefore, when the rotation shaft of the motor is rotated in one direction, the gripping part moves to one side in the inward direction, and when the rotation shaft of the motor is rotated in the other direction, the gripping part moves to the other side in the inward direction.

When temporarily disposing the workpiece unit 17 on the upper guide rail 72a, as shown in Fig. 7(A), first, the height of the temporary placement unit 60 is adjusted with the elevating mechanism 56, The height of the upper guide rail 72a is adjusted to the height of the container 102 or the cassette 30 in which the workpiece unit 17 is accommodated.

Next, the holding portion of the first transfer unit 64a is moved into the container 102 or the cassette 30. Then, the frame 15 of the workpiece unit 17 accommodated in the container 102 or the cassette 30 is gripped by the gripping portion of the first transfer unit 64a. After that, the gripping portion of the first transfer unit 64a is moved in a direction away from the container 102 or the cassette 30. Accordingly, the workpiece unit 17 is mounted on the upper guide rail 72a.

The same applies to the operation when the object unit 17 temporarily disposed on the upper guide rail 72a is accommodated in the container 102 or the cassette 30. In this case, after gripping the workpiece unit 17 temporarily arranged on the upper guide rail 72a by the gripping portion of the first transfer unit 64a, the gripping portion of the first transfer unit 64a is a container. It is good to move to the inside of (102) or the cassette (30).

When temporarily disposing the workpiece unit 17 on the lower guide rail 72b, as shown in Fig. 7(B), first, the height of the temporary placement unit 60 is adjusted with the elevating mechanism 56, The height of the lower guide rail 72b is adjusted to the height of the container 102 or the cassette 30 in which the workpiece unit 17 is accommodated.

Next, the holding portion of the second transfer unit 64b is moved into the container 102 or the cassette 30. Then, the frame 15 of the workpiece unit 17 accommodated in the container 102 or the cassette 30 is gripped by the gripping portion of the second conveying unit 64b. After that, the gripping portion of the second transfer unit 64b is moved in a direction away from the container 102 or the cassette 30. Accordingly, the workpiece unit 17 is mounted on the lower guide rail 72b.

The same applies to the operation when the workpiece unit 17 temporarily disposed on the lower guide rail 72b is accommodated in the container 102 or the cassette 30. In this case, after gripping the workpiece unit 17 temporarily arranged on the lower guide rail 72b by the gripping portion of the second conveying unit 64b, the gripping portion of the second conveying unit 64b is a container. It is good to move to the inside of (102) or the cassette (30).

The operation related to conveyance of the workpiece unit 17 between the cassette 30 and the container 102 is, for example, as follows. First, the height of the temporary placement unit 60 is adjusted by the lifting mechanism 56, and the pre-processed work unit 17 accommodated in the cassette 30 is taken out to the upper guide rail 72a. Next, the temporary placement unit 60 is raised by the lifting mechanism 56, and the processed workpiece unit 17 accommodated in the container 102 on the mounting table 66 is taken out to the lower guide rail 72b.

Then, the height of the temporary placement unit 60 is adjusted with the elevating mechanism 56, and the pre-processed work unit 17 temporarily disposed on the upper guide rail 72a is placed in the container 102 on the mounting table 66. To accept. By this operation, carrying out (recovery) of the workpiece unit 17 after processing from the container 102 and carrying in (distribution) of the workpiece unit 17 before processing into the container 102 proceeds efficiently. However, the operation related to the conveyance of the workpiece unit 17 is not limited thereto. Further, the relationship between the upper guide rail 72a and the lower guide rail 72b may be switched as necessary.

8(A) is a plan view of two upper end guide rails 72a and the like. The upper end guide rail 72a and the lower end guide rail 72b positioned on one side in the width direction are fixed to _{the first side plate 62c 1.} Further, the upper guide rail 72a and the lower guide rail 72b positioned on the other side in the width direction are fixed to _{the second side plate 62c 2.}

At one end side in the inward direction of the lower plate 62b, a first opening 62e ₁ penetrating vertically through a portion on one side of the width direction of the lower plate 62b, and a portion on the other side in the width direction of the lower plate 62b A second opening 62e ₂ penetrating vertically is formed. In the first opening 62e ₁ , a part of one end in the inward direction of the first side plate 62c _{1 is inserted, and in the second opening 62e 2} , one end in the inward direction of the second side plate 62c ₂ A part of the side is inserted.

The base portion of the first air actuator 74a and the base portion of the second air actuator 74b are fixed in a region adjacent to _{the first opening 62e 1} and the second opening 62e ₂ on the lower surface of the lower plate 62b. Has been. The movable portion (eg, piston rod) of the first air actuator 74a is connected to a part of the first side plate 62c _{1 inserted into the first opening 62e 1.} The movable portion (eg, piston rod) of the second air actuator 74b is connected to a part of the second side plate 62c _{2 inserted into the second opening 62e 2.}

A first guide mechanism 76a and a second guide mechanism 76b are provided on the other end side of the lower plate 62b in the inward direction. The first guide mechanism 76a is fixed to the upper surface of the lower plate 62b and is elongated in the width direction, and the first guide mechanism 76a is fixed to _{the lower side of the first side plate 62c 1} so as to slide in the width direction. Includes a slider mounted on. In addition, the second guide mechanism 76b is fixed to the guide rail fixed to the upper surface of the lower plate 62b, and _{is fixed to the lower side of the second side plate 62c 2} to be mounted on the guide rail in a state that can slide in the width direction. Included sliders.

Therefore, if the distance between the first air actuator 74a, the second air actuator 74b, the first side plate 62c ₁ and the second side plate 62c ₂ is changed, the two upper ends are kept parallel to each other. The spacing of the guide rails 72a may be changed, and the spacing of the two lower guide rails 72b may be changed while maintaining a state parallel to each other.

That is, the first side plate 62c ₁ , the first air actuator 74a, the first guide mechanism 76a, the second side plate 62c ₂ , the second air actuator 74b, and the second guide mechanism 76b are , It functions as a spacing adjustment mechanism 78 that adjusts the spacing of the two upper guide rails 72a and the spacing of the two lower guide rails 72b.

The operation of the first air actuator 74a and the second air actuator 74b is controlled by the control device 46 described above. That is, the control device 46 controls the operation of the first air actuator 74a and the second air actuator 74b according to the size of the work unit 17 (work 11), and controls the operation of the two upper ends. The spacing of the guide rail 72a and the spacing of the two lower guide rails 72b are adjusted.

For example, when the diameter of the workpiece 11 is 300 mm, a frame 15 having a width of about 400 mm is used. In this case, the control device 46 has a spacing 72c of the side surfaces of the two upper guide rails 72a (the spacing 72c of the side surfaces of the two lower guide rails 72b) slightly less than 400 mm (for example, The first air actuator 74a and the second air actuator 74b are operated so as to increase by several mm).

Further, for example, when the diameter of the workpiece 11 is 200 mm, a frame 15 having a width of about 300 mm is used. In this case, the control device 46 has a spacing 72c of the side surfaces of the two upper guide rails 72a (the spacing 72c of the side surfaces of the two lower guide rails 72b) slightly less than 300 mm (for example, The first air actuator 74a and the second air actuator 74b are operated so as to increase by several mm).

Fig. 8(B) is a plan view showing a state in which the gap between two upper end guide rails 72a is narrowed. Further, if the distance between the two upper guide rails 72a is narrowed, the distance between the two lower guide rails 72b is also narrowed. In this way, by adjusting the distance between the two upper guide rails 72a and the distance between the two lower guide rails 72b according to the diameter of the workpiece 11, the workpieces 11 of different sizes are temporarily placed in the unit ( 60) can be temporarily deployed. That is, with one temporary arrangement unit 60, it is possible to cope with conveyance of the workpiece unit 17 of a plurality of types of sizes.

Fig. 9(A) is a perspective view showing the upper surface side of the transport vehicle 10 that travels on the transport path 6 and transports the workpiece unit 17, and Fig. 9(B) is the transport vehicle 10 It is a perspective view showing the bottom surface side of. As shown in Figs. 9A and 9B, the transport vehicle 10 includes a plate-shaped frame 82 on which various components are mounted. A pair of axles 84 are arranged at both ends of the frame 82 on the front side. The axle 84 is attached to the lower surface side of the frame 82 so that one end side protrudes from the side surface of the frame 82.

Wheels (front wheels) 86 are fixed to one end side of the pair of axles 84, respectively. That is, a pair of wheel 86 is disposed at two positions spaced apart in the width direction (vehicle width direction) of the frame 82. Further, a pair of wheel (rear wheel) 88 is disposed at two positions spaced apart in the width direction of the rear end of the frame 82. The wheel 88 is, for example, a caster capable of rotating 360° around a rotational shaft along the height direction, and is mounted on the lower surface side of the frame 82. The wheel 86 and the wheel 88 are running wheels when the conveyance vehicle 10 travels on the conveyance path 6.

A drive unit 90 for driving a pair of wheels 86 is mounted on the front end of the frame 82. Each of the drive units 90 includes a pair of motors 92 connected to the wheels 86 via an axle 84 or the like. The motor 92 includes a rotation shaft (output shaft) 92a and generates power to rotate the wheel 86.

As shown in Fig. 9B, a pulley 94 is provided on the other end side of the axle 84. Endless connecting members (not shown) such as belts and chains are strung on the rotation shaft 92a of the motor 92 and the pulley 94. A power transmission mechanism is constituted by the rotation shaft 92a, the pulley 94, and the connecting member of the motor 92, and the axle 84 and the motor 92 are connected. Accordingly, the power (rotation power) generated by the motor 92 is transmitted to the wheel 86, and the wheel 86 rotates.

The drive unit 90 independently controls the direction in which the pair of wheels 86 rotate by the pair of motors 92. By rotating the pair of wheels 86 in the same direction, the conveyance vehicle 10 advances or retreats. Further, by rotating the pair of wheels 86 in opposite directions to each other, the transport vehicle 10 can be rotated around a rotational shaft along the height direction, and the direction in which the transport vehicle 10 travels can be controlled. In addition, there are no restrictions on the structures of the wheels 86 and 88. For example, as the wheel 86 and the wheel 88, a so-called Macanum wheel, which is mounted on an outer peripheral surface in which a plurality of inclined cylindrical rotating bodies are in contact with the conveyance path 6, may be used.

A battery (secondary battery) 96 for supplying electric power to the motor 92 or the like is connected to the drive unit 90 via a wire for power supply (not shown). The battery 96 is mounted, for example, at the front end of the frame 82 and supplies electric power for rotating the wheel 86 to the motor 92. As the battery 96, a lithium ion battery or the like is used.

10 is an enlarged perspective view showing the front end of the transport vehicle 10. On the lower surface side of the front end portion of the frame 82, a pair of terminals (receiving terminals, power receivers) 100 connected to the battery 96 via a charging wiring (charging wiring) 98 are provided. The pair of terminals 100 is connected to, for example, a terminal for power feeding provided outside of the carrier vehicle 10 and is supplied with electric power used for charging the battery 96. In addition, details of charging of the battery 96 using the terminal 100 will be described later.

9(A) and 9(B), under the frame 82, a storage area 104 in which a container (cassette) 102 for accommodating the workpiece unit 17 is stored is provided. Is formed. The storage area 104 is surrounded by a pair of wheels 86 and a pair of wheels 88 and is located above the lower ends of the wheels 86 and 88. In this storage area 104, a container 102 capable of accommodating one or a plurality of workpiece units 17 is disposed.

FIG. 11(A) is a perspective view showing the container 102, and FIG. 11(B) is a front view showing the container 102. As shown in FIG. The container 102 is formed in, for example, a hexagonal columnar shape in plan view, and has a receiving portion (accommodating space) 102a capable of accommodating the workpiece unit 17 therein. The accommodation portion 102a is connected to a space outside the container 102 through a slit-shaped opening 102b that opens from one side of the container 102. The to-be-processed unit 17 passes through the opening 102b, is carried into the accommodation part 102a, passes through the opening 102b, and is carried out from the accommodation part 102a.

As shown in Fig. 11B, the container 102 is configured to accommodate, for example, two types of workpiece units 17a and 17b having different sizes. In the receiving portion 102a of the container 102, a pair of first guide rails 106 capable of holding the work unit 17a, and a pair of second guides capable of holding the work unit 17b Rail 108 is formed.

The pair of first guide rails 106 are fixed to the upper wall 102c of the receiving portion 102a at predetermined intervals, and the holding surface 106a holding the lower surface side of the workpiece unit 17a from the lower side, and , And a side surface 106b defining the position of the workpiece unit 17a in the horizontal direction. In addition, the pair of second guide rails 108 are fixed to the bottom wall 102d of the receiving portion 102a at predetermined intervals, and a holding surface that holds the lower surface side of the workpiece unit 17b from the lower side. (108a) is provided. In addition, the position of the workpiece unit 17b in the horizontal direction is defined according to the inner side surface of the container 102.

The distance between the pair of first guide rails 106 is smaller than the distance between the pair of second guide rails 108. Therefore, the pair of first guide rails 106 can hold the workpiece unit 17a smaller than the workpiece unit 17b held by the second guide rail 108. For example, a work piece 11 having a diameter of about 200 mm (8 inches) is held by a pair of first guide rails 106, and about 300 mm (12 inches) by a pair of second guide rails 108 The workpiece 11 of a diameter of inches) is held.

As described above, the container 102 is not configured to accommodate a plurality of workpiece units 17 of the same type (same size). In this respect, the function and use of the container 102 is significantly different from the function and use of the cassette 30 capable of accommodating a plurality of workpiece units 17 of the same type.

However, there is no limitation on the structure of the container 102 or the receiving portion 102a. For example, the receiving portion 102a may be configured to accommodate one or three or more workpiece units 17. Further, the accommodation portion 102a may be configured to accommodate a plurality of workpiece units 17 of the same type.

When conveying the workpiece unit 17 by the conveyance vehicle 10, the container 102 is stored in the storage area 104 as shown in FIG. 9(A). At this time, the lower surface of the container 102 is positioned above the lower end of the wheel 86 or the lower end of the wheel 88. Therefore, the container 102 does not come into contact with the conveyance path 6 while the conveyance vehicle 10 is running.

An elevating unit (elevating mechanism) 110 for suspending and elevating the container 102 is provided in an area on the upper surface side of the frame 82 positioned above the storage area 104. The lifting unit 110 lowers the container 102 stored in the storage area 104 and mounts it in a predetermined mounting area. In addition, the lifting unit 110 raises the container 102 placed in a predetermined mounting area, and stores the container 102 in the storage area 104.

12 is a perspective view showing the transport vehicle 10 in a state in which the container 102 is mounted in the mounting area A. The lifting unit 110 includes a suspension member 112 having one end (lower end) connected to the container 102, and a drive mechanism 114 for winding and discharging the suspension member 112. Equipped. In addition, the mounting area A is, for example, an upper surface of the mounting table 66 of the loader/unloader 8 (the second mounting area A ₂ , see FIG. 3 ).

As shown in FIG. 12, the elevating unit 110 includes four suspending members 112. As the suspending member 112, for example, a belt having a predetermined width is used. The distal ends (lower ends) of the four suspending members 112 are connected to four positions on the upper surface side of the container 102, respectively.

When the suspension member 112 is delivered by the drive mechanism 114 in the state where the container 102 is stored in the storage area 104, the container 102 descends and is placed in the mounting area A. Further, in the state where the container 102 is placed in the mounting area A, when the suspension member 112 is wound by the drive mechanism 114 (when it is wound up), the container 102 rises and the storage area 104 It is stored in.

In the case of using a belt as the suspending member 112, as shown in FIG. 12, the workpiece unit 17 passes through the opening 102b when the workpiece unit 17 is unloaded from the receiving portion 102a. With respect to the direction, it is preferable to adjust the direction of the belt relative to the container 102 so that the width direction of the belt follows. Since the container 102 is unlikely to swing in the width direction of the belt, in this embodiment, the possibility that the workpiece unit 17 protrudes from the opening 102b during the lifting and lowering of the container 102 can be suppressed to a low level.

In addition, the direction of the belt with respect to the container 102 is relative to the direction in which the workpiece unit 17 passes through the opening 102b when the workpiece unit 17 is carried into the receiving portion 102a. It may be adjusted so as to follow the width direction. In this embodiment, the belt and the container 102 are connected so that the width direction of the belt may be arranged along a direction perpendicular to the surface including the opening 102b of the container 102. Further, as the suspending member 112, a member other than a belt such as a wire rope capable of winding and feeding may be used.

As shown in FIG. 9B, on the lower surface side of the frame 82, a plurality of contact members 116 contacting the upper surface side of the container 102 are provided. The plurality of contact members 116 are each formed in a columnar shape of substantially the same height, and are fixed to the frame 82 so as to protrude downward from the lower surface of the frame 82. When the container 102 is stored in the storage area 104, the upper surface side of the container 102 contacts the lower ends of the plurality of contact members 116 and presses each contact member 116 upward.

The contact member 116 is formed, for example, by an elastic member that causes elastic deformation when the container 102 is pressed. That is, when the contact member 116 is pressed by the container 102 stored in the storage area 104, it is deformed along the shape of the upper surface side of the container 102, and a restoring force that presses the container 102 downward. It is constituted by an elastic body that produces a.

When an elastic member is used for the contact member 116, for example, the impact when the container 102 comes into contact with the contact member 116 is alleviated, and the workpiece unit 17 in the container 102 or the container 102 It becomes difficult to break. In addition, even when the transport vehicle 10 travels the transport path 6, the contact member 116 becomes a buffer material, and the vibration of the frame 82 is difficult to be transmitted to the container 102 or the workpiece unit 17. Lose.

As the contact member 116, a columnar member made of, for example, rubber (urethane rubber, silicone rubber, etc.), sponge, or the like can be used. In particular, by using the contact member 116 made of rubber having a large frictional force acting between the container 102, it is possible to suppress the displacement of the container 102 during transportation. In addition, the contact member 116 does not necessarily have to be entirely composed of an elastic member, and at least the region (lower end) of the contact member 116 in contact with the container 102 may be formed of an elastic member.

In addition, it is preferable that the contact member 116 contacts at three or more positions with respect to the upper surface side of the container 102. In this embodiment, as shown in FIG. 9B, three columnar contact members 116 are provided on the frame 82. In this case, since the upper surface of the container 102 is disposed along the plane including the lower end of the three contact members 116, the container 102 becomes difficult to incline. However, conditions such as the shape, number, and arrangement of the contact members 116 may be arbitrarily changed. For example, a pair of linear (band-shaped) contact members 116 arranged substantially parallel to each other may be provided on the frame 82.

Further, in order to make it difficult for the vibration of the frame 82 to be transmitted to the container 102, the container 102 may be connected to the suspension member 112 via an elastic member. 13 is a perspective view showing the transport vehicle 10 in which the container 102 is connected to the suspension member 112 via an elastic member (expansion member) 118. Further, in this case, the contact member 116 may be omitted.

An elastic member 118 is provided between the front end side (lower end side) of the suspension member 112 and the container 102. The elastic member 118 is a member in which the suspend member 112 expands and contracts along the lengthwise direction when vibration occurs in the suspend member 112, and is made of, for example, an elastic body such as rubber or spring. Further, as the elastic member 118, an elastic component such as an elastic joint may be used.

In order for the container 102 to be stored in the storage area 104, the amount of winding of the suspension member 112 is adjusted so that the upper surface side of the container 102 does not contact the frame 82 or the contact member 116. Accordingly, even if the frame 82 vibrates, for example, the vibration is not transmitted directly to the container 102. In addition, the vibration transmitted from the frame 82 through the lifting unit 110 and the suspension member 112 is alleviated by the elastic member 118, so it is difficult to be transmitted to the container 102. In this way, the elastic member 118 functions as a vibration isolator.

However, when the contact member 116 is provided on the lower surface side of the frame 82, the suspension member 112 may be stored in the storage area 104 while the container 102 is in contact with the contact member 116. ) May be adjusted. In this case, the transmission of vibration from the frame 82 to the container 102 is alleviated by the contact member 116, and the transmission of the vibration from the suspend member 112 to the container 102 is reduced by the elastic member 118. It is alleviated.

A cover 120 is provided below the rear end of the frame 82. The cover 120 covers the opening 102b of the container 102 (see Fig. 11A) when the container 102 is stored in the storage area 104. When the opening 102b is covered by the cover 120, it is possible to prevent foreign matters from entering the receiving portion 102a of the container 102 during the running of the transport vehicle 10, and to the workpiece unit 17. The adhesion of foreign matter is prevented.

Further, even if the container 102 tilts or vibrates while the transport vehicle 10 is running, the work unit 17 is prevented from protruding from the opening 102b by the cover 120. Further, details of the structure and operation of the cover 120 will be described later (see Figs. 17, 18(A), 18(B)).

A pair of first sensors 122 are provided at the front end and rear ends of the frame 82. That is, the pair of first sensors 122 are provided at two positions where the frame 82 is separated in the longitudinal direction (the vehicle longitudinal direction). Further, a pair of second sensors 124 are provided at both ends of the frame 82. That is, the pair of second sensors 124 are disposed at two positions spaced apart in the width direction (vehicle width direction) of the frame 82.

The first sensor 122 and the second sensor 124 are mounted so as to face the conveyance path 6 on which the conveyance vehicle 10 travels, respectively, and detect marks provided on the conveyance path 6. Based on the detection result of the mark by the first sensor 122 and the second sensor 124, the running, turning, stopping, and the like of the transport vehicle 10 are controlled. Details of the control of the transport vehicle 10 using the first sensor 122 and the second sensor 124 will be described later.

The specific positions at which the first sensor 122 and the second sensor 124 are installed are adjusted according to the specifications of the conveyance path 6 on which the conveyance vehicle 10 travels. For example, the pair of first sensors 122 are mounted near the center of the frame 82 in the width direction among the front and rear ends of the frame 82, respectively. In addition, as for the pair of second sensors 124, among both end portions of the frame 82, the frame 82 is mounted near the center in the longitudinal direction.

Further, the pair of second sensors 124 may be fixed to the frame 82 so that they are arranged on a straight line passing through the pair of wheels 86. For example, the pair of second sensors 124 are provided outside the pair of wheels 86 so as to sandwich the pair of wheels 86 in the width direction of the frame 82. Further, the pair of second sensors 124 may be provided inside the pair of wheels 86 so as to be between the pair of wheels 86 in the width direction of the frame 82.

In this way, by arranging the pair of second sensors 124 on a straight line passing through the pair of wheels 86, the mark targeted for detection by the pair of second sensors 124 is displayed on the wheel 86. Simultaneously with passing through, this mark can be detected by the pair of second sensors 124. Therefore, if the transport vehicle 10 is turned or stopped at the timing when this mark is detected, it is possible to appropriately control the traveling of the transport vehicle 10 without performing any correction.

On the other hand, when the pair of second sensors 124 are separated from the straight line passing through the pair of wheels 86, along with the timing at which the mark is detected, the pair of second sensors 124 and the pair of The timing of turning or stopping of the transport vehicle 10 may be controlled using the distance between the wheels 86 (a pair of axles 84), the speed at which the transport vehicle 10 travels, or the like.

In addition, as shown in FIG. 10, a third sensor 126 is provided at the front end of the frame 82 that detects that the transport vehicle 10 collides with an obstacle. For example, a pair of third sensors 126 are mounted on both ends of the front end portion of the frame 82. As the third sensor 126, for example, a push button type switch is used.

When the front end of the transport vehicle 10 collides with an obstacle, the third sensor 126 operates to detect the collision of the transport vehicle 10. And, when the collision of the conveyance vehicle 10 is detected by the 3rd sensor 126, the conveyance vehicle 10 stops operation. In addition, as long as the collision of the transport vehicle 10 can be detected, there is no limitation on the structure or type of the third sensor 126.

The transport vehicle 10 may be covered with a flexible exterior cover capable of weakening the impact caused by a collision or the like, for example. In this case, when the exterior cover covering the front end side of the transport vehicle 10 collides with an obstacle, the exterior cover deforms and contacts the third sensor 126, and the collision of the transport vehicle 10 is detected.

9(A) and 9(B), a plate-shaped support stand 128 fixed to the frame 82 is provided on the upper side of the lifting unit 110. A control unit (control unit) 130 that controls the operation of the transport vehicle 10 is fixed on the upper surface of the support stand 128. The control unit 130 includes components of the transport vehicle 10 (drive unit 90, lift unit 110, first sensor 122, second sensor 124, third sensor 126, etc.) It is connected to and controls the operation of each component.

The control unit 130 is constituted by a computer including, for example, a processing device such as a CPU (Central Processing Unit), a main storage device such as a dynamic random access memory (DRAM), and an auxiliary storage device such as a flash memory. . The function of the control unit 130 is realized by operating the processing device or the like in accordance with software stored in the auxiliary storage device.

In addition, on the support stand 128, a receiver 132 that receives an external signal (information) and sends it to the control unit 130, and a transmitter 134 that transmits the signal (information) received from the control unit 130 to the outside. It is fixed. The receiver 132 and the transmitter 134 are respectively connected to the control unit 130.

The receiver 132 receives, for example, a signal transmitted from the control unit 12 of the transport system 2 and sends it to the control unit 130. The control unit 130 controls the operation of the carrier vehicle 10 based on, for example, a signal received from the receiver 132. Further, the control unit 130 generates, for example, a signal for notification and sends it to the transmitter 134. The transmitter 134 transmits, for example, a signal received from the control unit 130 to the control unit 12 (see Fig. 2) of the transport system 2.

In addition, each component of the transport vehicle 10 (elevating unit 110, first sensor 122, second sensor 124, third sensor 126, control unit 130, receiver 132, transmitter (134) and the like) are connected to the battery 96 via a wiring for power supply, and operate by power supplied from the battery 96.

14(A) is a plan view showing a configuration example of the lifting unit 110, and FIG. 14(B) is a side view showing a configuration example of the lifting unit 110. As shown in FIG. As described above, the lifting unit 110 includes a drive mechanism 114 that winds up and delivers the plurality of suspension members 112. The drive mechanism 114 includes a motor 142 having a rotation shaft (output shaft) 142a.

The motor 142 generates power used for winding and sending out the suspension member 112 by rotating the rotation shaft 142a. At two positions between the motor 142, a first rotation shaft (first shaft) 144a and a second rotation shaft (second shaft) 144b disposed substantially parallel to each other are provided.

At one end side of the first rotation shaft 144a, a pulley 146 is provided. An endless connection member 148 such as a belt or a chain is hung on the rotation shaft 142a and the pulley 146 of the motor 142. A power transmission mechanism is configured by the rotation shaft 142a, the pulley 146, and the connection member 148 of the motor 142, and the motor 142 and the first rotation shaft 144a are connected. On the other hand, at one end side of the second rotation shaft 144b, a pulley or the like for realizing connection with the motor 142 is not provided.

A pulley 150a is provided on the other end side of the first rotation shaft 144a, and a pulley 150b having the same diameter as the pulley 150a is provided on the other end side of the second rotation shaft 144b. An endless connection member 152 such as a belt or a chain is hung between the pulley 150a and the pulley 150b. A power transmission mechanism is configured by the pulley 150a, the pulley 150b, and the connecting member 152, and the first rotation shaft 144a and the second rotation shaft 144b are connected.

At both ends of the first rotation shaft 144a, a cylindrical reel 154a on which the suspend member 112 is wound is fixed. In addition, at two positions outside each reel 154a (opposite to the motor 142) and below each reel 154a, a cylindrical roller 156a supporting the suspension member 112 rotates. It is arranged to be able to do it. The rotation axis of each roller 156a is substantially parallel to the first rotation axis 144a.

On the other hand, at both ends of the second rotation shaft 144b, a cylindrical reel 154b, on which the suspend member 112 is wound, is fixed. In addition, at two positions outside each reel 154b (opposite to the motor 142) and below each reel 154b, a cylindrical roller 156b supporting the suspension member 112 rotates. It is arranged to be able to do it. The rotation axis of each roller 156b is substantially parallel to the second rotation axis 144b.

The base end side of the suspension member 112 is fixed to the reel 154a and the reel 154b, respectively. The suspending member 112 fixed to the reel 154a is in contact with the outer part of the roller 156a and droops downward. Further, the suspension member 112 fixed to the reel 154b sags downward while in contact with the outer portion of the roller 156b.

Further, the suspension member 112 fixed to the reel 154a is supported by the roller 156a past the upper side of the reel 154a, as shown in Fig. 14B. On the other hand, the suspension member 112 fixed to the reel 154b passes the lower side of the reel 154b and is supported by the roller 156b.

When the rotation shaft 142a of the motor 142 is rotated in the first direction (the direction indicated by the arrow C1 in FIG. 14B), the reel 154a fixed to the first rotation shaft 144a is transferred to the suspension member 112 ) Is rotated in the direction (indicated by arrow C2 in Fig. 14B). Accordingly, the suspend member 112 is sent out from the reel 154a through the roller 156a.

In addition, the torque of the first rotation shaft 144a is transmitted to the second rotation shaft 144b by the connection member 152, and the reel 154b fixed to the second rotation shaft 144b transmits the suspension member 112. It rotates in the direction (direction indicated by arrow C3 in Fig. 14B). Accordingly, the suspension member 112 is sent out from the reel 154b through the roller 156b.

On the other hand, when the rotation shaft 142a of the motor 142 is rotated in a second direction opposite to the first direction (the direction indicated by the arrow D1 in Fig. 14(B)), it is fixed to the first rotation shaft 144a. The resulting reel 154a rotates in a direction in which the suspend member 112 is wound (a direction indicated by an arrow D2 in Fig. 14B). Accordingly, the suspend member 112 is wound around the reel 154a through the roller 156a.

In addition, the torque of the first rotation shaft 144a is transmitted to the second rotation shaft 144b by the connection member 152, and the reel 154b fixed to the second rotation shaft 144b winds up the suspension member 112. It rotates in the direction (direction indicated by arrow D3 in Fig. 14B). Accordingly, the suspend member 112 is wound around the reel 154b through the roller 156b.

When each suspension member 112 is delivered from the drive mechanism 114, the container 102 connected to the distal end side of the suspension member 112 descends. Accordingly, the container 102 can be mounted on the mounting area A (see Fig. 12). Further, when each suspension member 112 is wound by the drive mechanism 114, the container 102 connected to the distal end side of the suspension member 112 rises. Thereby, the container 102 can be stored in the storage area 104 of the conveyance vehicle 10 (refer FIG. 9(A)).

Further, it is also possible to use the elevating unit 110 equipped with another drive mechanism different in structure from the drive mechanism 114 described above. FIG. 15A is a plan view showing another configuration example of the lifting unit 110, and FIG. 15B is a side view illustrating another configuration example of the lifting unit 110. In the lifting unit 110 shown in Figs. 15A and 15B, a drive mechanism 162 is mounted in place of the drive mechanism 114 described above.

The drive mechanism 162 includes a motor 164 having a rotation shaft (output shaft) 164a, a first rotation shaft (first shaft) 166a disposed substantially parallel to each other, and a second rotation shaft (second shaft). (166b), and a third rotation shaft (third shaft) 166c. The first rotation shaft 166a is disposed between the second rotation shaft 166b and the third rotation shaft 166c.

The motor 164 is, for example, disposed between the first rotation shaft 166a and the second rotation shaft 166b, and by rotating the rotation shaft 164a, the power used for winding and sending out the suspension member 112 Is created. However, the motor 164 may be disposed between the first rotation shaft 166a and the third rotation shaft 166c.

At one end side of the first rotation shaft 166a, a pulley 168 is provided. An endless connection member 170 such as a belt or a chain is overlaid on the rotation shaft 164a and the pulley 168 of the motor 164. A power transmission mechanism is configured by the rotation shaft 164a, the pulley 168, and the connection member 170 of the motor 164, and the motor 164 and the first rotation shaft 166a are connected.

A plurality of cylindrical reels 172 around which the suspend member 112 is wound are fixed to the first rotation shaft 166a. Specifically, a pair of reels 172 are fixed to both ends of the first rotation shaft 166a. Two suspending members 112 are fixed to each reel 172 and wound in the same direction.

Fig. 16(A) is a plan view showing the reel 172, and Fig. 16(B) is a side view showing the reel 172. The lifting unit 110 is provided with a cylindrical fixing member 174 for fixing the suspend member 112 to the reel 172, and the two suspending members 112 are attached to the fixing member 174. Thereby, it is collected and fixed to the reel 172.

As shown in Fig. 16(B), a groove (recess) 172a along the rotation axis of the reel 172 (that is, the first rotation axis 166a) is installed in a part of the outer circumference of the reel 172 have. The inner surface of the groove 172a is formed in a curved shape. In addition, both ends of the groove 172a reach both ends of the reel 172 in the rotational axis direction. The two suspending members 112 are arranged in the same direction so that the proximal ends overlap with the groove 172a.

The fixing member 174 has a curved outer circumferential surface corresponding to the shape of the inner surface of the groove 172a. The fixing member 174 is arranged so that the base ends of the two suspending members 112 overlap with the groove 172a, and the base ends of the two suspending members 112 are pressed toward the inner surface of the groove 172a. It is fitted into the groove 172a so that it is possible. Accordingly, the base ends of the two suspending members 112 are fitted into the inner surface of the groove 172a and the outer circumferential surface of the fixing member 174 and are fixed to the reel 172.

In addition, as shown in Fig. 16(A), a pair of protrusions ( The convex portion) 172b is provided. The pair of protrusions 172b functions as a guide for preventing displacement of the position of the suspend member 112 in the width direction. By rotating the reel 172 configured as described above, the two suspending members 112 can be wound up, or the two suspending members 112 can be delivered.

As shown in Figs. 15A and 15B, one of the two suspending members 112 fixed to the reel 172 sags downward while in contact with the second rotation shaft 166b. Further, the other side of the two suspending members 112 fixed to the reel 172 sags downward while in contact with the third rotation shaft 166c.

The second rotation shaft 166b and the third rotation shaft 166c are supported in a state that can be easily rotated according to an external force, respectively, and their outer circumferential surfaces contact the suspension member 112. A pair of guides 176 for preventing displacement of the position of the suspension member 112 in the width direction are provided on both sides of the region where the second rotation shaft 166b and the suspension member 112 of the third rotation shaft 166c contact each other. Installed.

When the rotation shaft 164a of the motor 164 is rotated in the first direction (the direction indicated by the arrow E1 in FIG. 15(B)), the direction in which the reel 172 sends the suspend member 112 (FIG. 15 ( B) and the direction indicated by the arrow E2 in Fig. 16(B)). Accordingly, the two suspending members 112 are sent out from the reel 172 through the second rotational shaft 166b and the third rotational shaft 166c, and as a result, the container 102 connected to the suspending member 112 is Descend.

On the other hand, when the rotation shaft 164a of the motor 164 is rotated in a second direction opposite to the first direction (a direction indicated by an arrow F1 in FIG. 15(B)), the reel 172 is a suspension member ( 112) is rotated in the winding direction (direction indicated by arrow F2 in Figs. 15(B) and 16(B)). Accordingly, the two suspension members 112 are wound on the reel 172 through the second rotation shaft 166b and the third rotation shaft 166c, and as a result, the container 102 connected to the suspension member 112 rises. do.

As described above, in the drive mechanism 162 shown in Fig. 15A, two reels 172 are fixed to the first rotation shaft 166a, and each of the two reels 172 is two suspending members 112 ) Is fixed. Therefore, the delivery and winding of the four suspending members 112 are controlled by the rotation of the first rotation shaft 166a. Accordingly, the number of parts constituting the drive mechanism 114 can be reduced, and the weight of the transport vehicle 10 can be reduced, the possibility of failure can be reduced, and the cost can be reduced.

By using the lifting unit 110 as described above, the container 102 in which the workpiece unit 17 is accommodated is provided with a storage area 104 and a mounting area A below the storage area 104. You can get it up and down between lessons. Details of the lifting unit 110 may be changed within a range in which the container 102 can be properly elevated.

Moreover, the 2nd rotation shaft 166b and the 3rd rotation shaft 166c may be fixed in the state which does not rotate. In this case, the suspending member 112 is sent out from the reel 172 or wound around the reel 172 while gliding on the outer circumferential surface of the second rotation shaft 166b or the third rotation shaft 166c.

17 is an enlarged perspective view showing the cover 120. The cover 120 is disposed at the rear end of the lower surface side of the frame 82 so as to face one side (rear portion) of the container 102 stored in the storage area 104. The cover 120 includes a cover portion 182 connected to the frame 82 so that it can rotate with respect to the frame 82. The lid portion 182 is formed in a shape and size capable of covering the opening 102b of the container 102 (see Fig. 18B). Further, a plurality of contact portions 184 are fixed to the upper portion of the lid portion 182 so as to contact the upper surface side of the container 102.

When the container 102 rises toward the storage area 104, the upper surface side of the container 102 contacts the lower end of the contact part 184 and pushes the contact part 184 up. Accordingly, the lid portion 182 moves (rotates) in a direction closer to the container 102, and the opening 102b of the container 102 is covered by the lid portion 182.

Fig. 18(A) is a side view showing the cover 120 in a state in which the container 102 is not stored in the storage area 104, and Fig. 18(B) is a container 102 in the storage area 104 It is a side view showing the cover 120 in a state in which is stored. A fixing block 186 is fixed to the lower surface of the frame 82. The fixed block 186 is connected in such a manner that the shape viewed from the width direction (vehicle width direction) of the frame 82 can rotate the L-shaped connecting block (L-shaped block) 188.

The connecting block 188 includes a connecting portion 188a above (the frame 82 side) and a fixing portion 188b below the connecting portion 188a. A through hole penetrating in the width direction of the frame 82 is provided in the connecting portion 188a, and a connecting shaft 190 fixed to the fixing block 186 is inserted into the through hole. Accordingly, the connection block 188 is connected to the fixed block 186 in a state capable of rotating around the connection shaft 190.

The lid portion 182 is fixed to the storage region 104 side (front side, front side) of the fixing portion 188b. In addition, since the connecting shaft 190 inserted into the through hole is substantially parallel to the width direction of the frame 82, the cover portion 182 is, together with the connecting block 188, with respect to the width direction of the frame 82 It rotates along a roughly vertical plane.

The lid portion 182 includes a plate-shaped member 182a fixed to the fixing portion 188b of the connection block 188. The flexible member 182b is provided on the surface of the plate-shaped member 182a on the side (front side) of the storage region 104. The flexible member 182b is formed in a shape and size capable of covering the entire opening 102b of the container 102.

Further, a contact portion 184 is disposed on the side (front side) of the storage region 104 of the plate member 182a. The contact portion 184 is supported by, for example, a fixing member 184a fixed to the plate-shaped member 182a above the flexible member 182b, and a portion of the storage area 104 side (front side) of the fixing member 184a. It includes a roller (184b) to be used.

The roller 184b is formed of, for example, an elastic member such as rubber, and is supported by the fixing member 184a so that it can rotate around a rotational axis substantially parallel to the width direction of the frame 82. Further, the lower end of the roller 184b is positioned below the lower end of the fixing member 184a. Therefore, in a state in which the upper surface side of the container 102 is in contact with the roller 184b, the roller 184b also rotates in accordance with the rotation of the lid portion 182.

For example, when the container 102 rises toward the storage area 104, the upper surface side of the container 102 contacts the roller 184b of the contact part 184, and this contact part 184 is pushed up. Then, the cover 120 rotates about the connection shaft 190 in the direction in which the lower end thereof approaches the container 102 (a direction indicated by an arrow G in FIG. 18(B)), and a plate shape The surface of the member 182a on the side (front side) of the storage area 104 is substantially parallel to the lower surface of the frame 82. Then, the flexible member 182b of the lid portion 182 contacts one side (rear portion) of the container 102 and closes the opening 102b.

In addition, when the opening 102b of the container 102 stored in the storage area 104 remains exposed, there is a possibility that foreign matter such as dust enters the receiving portion 102a of the container 102. In particular, during the running of the transport vehicle 10, due to static electricity generated by friction between the transport path 6 and the wheels 88, for example, very little foreign matter in the clean room in which the transport path 6 is installed is transported. There is a high possibility of being drawn by the car 10 and entering the accommodation portion 102a.

So, in this embodiment, when the container 102 is stored in the storage area 104, the opening 102b of the container 102 is covered by the cover 120, and the container ( Foreign matters are prevented from entering the receiving portion 102a of 102). Further, even if the container 102 tilts or vibrates while the transport vehicle 10 is running, the workpiece unit 17 is prevented from protruding from the container 102.

On the other hand, while the container 102 is raised and lowered by the lifting unit 110, static electricity is not generated due to friction between the conveyance path 6 and the wheels 88, and foreign matter is caused by the movement of the conveyance vehicle 10. There is no thing to roll up. Therefore, even if the opening 102b of the container 102 is not covered during the lifting of the container 102, the possibility of foreign matter entering the receiving portion 102a is low.

Further, in the region corresponding to the opening 102b of the cover 120, a flexible member 182b is provided. The flexible member 182b deforms, for example, when the object unit 17 accommodated in the container 102 collides, and alleviates the impact acting on the object unit 17. That is, the flexible member 182b functions as a buffer material. The flexible member 182b makes it difficult to damage the work 11 included in the work unit 17.

There is no limitation on the material or structure of the flexible member 182b. For example, a flexible member 182b capable of mitigating an impact to the extent that the work 11 of the work unit 17 is not damaged may be used. More specifically, as the flexible member 182b, a member made of sponge, rubber, cotton, cloth, or the like, foamed plastic, foam cushioning material, or the like can be used.

In particular, since the sponge is flexible and easily deformable, the impact acting on the workpiece unit 17 can be effectively alleviated by using the sponge as the flexible member 182b. In addition, when a sponge is used as the flexible member 182b, the flexible member 182b deforms appropriately along the shape of the side surface of the container 102, and the opening 102b is reliably closed.

The weight of each portion of the cover 120 is, as shown in Fig. 18(A), when the container 102 is lowered from the storage area 104, the cover 120 is due to its own weight, and its lower end is It is adjusted so as to rotate in a direction away from the storage area 104 (a direction opposite to the direction indicated by an arrow G in Fig. 18B). Therefore, in the state where the container 102 is not stored in the storage area 104, the surface of the plate-like member 182a on the storage area 104 side (front side) tilts with respect to the lower surface of the frame 82.

In addition, there is no limitation on the number and arrangement of the covers 120. For example, in addition to the rear end of the frame 82, a cover 120 that contacts the side surface of the container 102 may be provided at the front end of the frame 82. In this case, when the container 102 is stored in the storage area 104, the two side surfaces (the front part and the rear part) of the container 102 are sandwiched by a pair of covers 120. Accordingly, shaking (vibration) of the container 102 is suppressed. Further, in this case, the frame 82 is particularly easy to suppress the vibration (vibration) of the container 102 in the longitudinal direction (front-to-back direction).

Further, a cover 120 may be provided at the front end, the rear end, and both ends of the frame 82, respectively. In this case, the four side surfaces (front, rear, and both sides) of the container 102 stored in the storage area 104 contact the cover 120, respectively. Accordingly, shaking (vibration) of the container 102 is suppressed. Further, in this case, the frame 82 is particularly easy to suppress shaking (vibration) of the container 102 in the longitudinal direction (front-rear direction) and the width direction.

When the container 102 is raised or lowered, the rotation of the motor 142 or the like of the lifting unit 110 is controlled by the control unit 130. Fig. 19(A) is a side view showing the transport vehicle 10 when the container 102 stored in the storage area 104 is placed in the mounting area A. When the container 102 is mounted in the mounting area A, the rotation direction and the number of rotations of the motor 142 are controlled so that the suspension member 112 is sent out from the drive mechanism 114 at an arbitrary speed. For example, the control unit 130 controls the current value of the motor 142 so that the number of rotations of the motor 142 is maintained.

19(B) is a graph showing the current value of the motor 142 when the container 102 descends. When the container 102 descends and reaches the placement area A, the container 102 is supported from the lower side in the placement area A. As a result, the load acting on the rotation shaft 142a of the motor 142 is weakened, and the current value of the motor 142 decreases.

The control unit 130 stops the rotation of the motor 142 based on a change in the current value of the motor 142 when the container 102 is mounted in the mounting area A. For example, a predetermined threshold is stored in the control unit 130, and the control unit 130 compares the threshold value with the current value of the motor 142. And, when the current value of the motor 142 is less than the threshold value (or less than the threshold value), the control unit 130 stops the rotation of the motor 142. This completes the placement of the container 102 on the placement area A.

FIG. 20(A) is a side view showing the transport vehicle 10 when the container 102 placed on the placement area A is stored in the storage area 104. As shown in FIG. When the container 102 is stored in the storage area 104, the rotation direction and the number of rotations of the motor 142 are controlled so that the suspension member 112 is wound at an arbitrary speed by the drive mechanism 114. For example, the control unit 130 controls the current value of the motor 142 so that the number of rotations of the motor 142 is maintained.

20(B) is a graph showing the current value of the motor 142 when the container 102 is raised. When the container 102 rises and reaches the storage area 104, the container 102 is pressed against the plurality of contact members 116 provided on the lower surface side of the frame 82. As a result, the load acting on the rotation shaft 142a of the motor 142 increases, and the current value of the motor 142 increases.

The control unit 130 stops the rotation of the motor 142 based on a change in the current value of the motor 142 when the container 102 contacts the contact member 116. For example, a predetermined threshold is stored in the control unit 130, and the control unit 130 compares the threshold value with the current value of the motor 142. And, when the current value of the motor 142 is equal to or greater than the threshold value (or exceeds the threshold value), the control unit 130 stops the rotation of the motor 142. Accordingly, storage of the container 102 into the storage area 104 is completed.

As described above, when the operation of the motor 142 when the container 102 is raised or lowered is controlled based on the current value of the motor 142, a sensor for detecting the container 102 is provided in the storage area 104 ) There is no need to provide in the mounting area (A). Accordingly, structures such as the transport vehicle 10 and the mounting area A are simplified. In addition, the weight of the transport vehicle 10 is also reduced.

However, there is no limitation on the control method of the motor 142. For example, a sensor (such as a push button type switch) that detects that the container 102 is disposed may be provided on the lower surface side of the frame 82 or the upper surface side of the mounting area A. In this case, when the container 102 is detected by the sensor, the control unit 130 stops the rotation of the motor 142. In addition, detection by a sensor and detection by the current value of the motor 142 can also be used together.

In addition, when detecting only the placement area A side (e.g., the loader/unloader 8 side) that the container 102 has been placed in the placement area A, the control unit 12 of the transfer system 2 ) (See Fig. 2) instructs the transport vehicle 10 to stop the rotation of the motor 142 after notifying from the side of the mounting area A that the container 102 has been placed in the mounting area A. Down. Then, the control unit 130 of the transport vehicle 10 stops the rotation of the motor 142.

On the other hand, as described above, when detecting from the side of the transport vehicle 10 that the container 102 has been placed in the mounting area A, the control unit 130 of the transport vehicle 10 is the transport system 2 ), the motor 142 stops rotating at its own discretion without waiting for an instruction from the control unit 12. Thereby, the time lag from which the container 102 is mounted in the mounting area A until the rotation of the motor 142 is stopped can be reduced.

In addition, the lifting speed of the container 102 may not necessarily be constant. For example, immediately before the container 102 is placed in the mounting area A or immediately before being stored in the storage area 104, the rotational speed of the motor 142 may be lowered to reduce the container 102. Accordingly, the impact when the container 102 contacts the mounting region A or the contact member 116 can be alleviated. Further, in this case, the control unit 130 may monitor the height of the container 102 based on, for example, the amount of rotation of the motor 142 or the like.

When the container 102 is placed in the mounting area A, the control unit 130 generates a signal for notifying that the mounting of the container 102 has been completed, and the transmitter 134 controls the transfer system 2 It transmits to the unit 12. In addition, when the container 102 is stored in the storage area 104, the control unit 130 generates a signal for notifying that the storage of the container 102 has been completed, and the transfer system 2 from the transmitter 134 To the control unit 12 (see Fig. 2). In addition, such a signal may be sent to the processing device 4.

FIG. 21 is a perspective view showing the external appearance of the processing device 4 and the conveying path 6, and FIG. 22 is a perspective view illustrating the internal structure of the processing device 4. In addition, in FIG. 21, some constituent elements are shown as functional blocks. 21 and 22, the processing apparatus 4 is provided with a base 202 which supports each component.

A concave portion 202a is formed in the corner portion of the base 202, and a lifting platform 204 that is raised and lowered by an elevating mechanism (not shown) is disposed in the concave portion 202a. The container 102 of the transport vehicle 10 described above is mounted in the mounting area A on the upper surface of the hoisting platform 204. In addition, on the upper surface of the lifting platform 204, a plurality of position defining members (not shown) for defining the horizontal position of the container 102 are provided, and the container 102 descending from the transport vehicle 10 is , Mounted on the mounting area A defined by a plurality of position defining members.

Each position defining member is provided with a curved guide surface for guiding the descending container 102 toward the mounting area A, and is fixed at a position corresponding to the side surface of the container 102 on the lifting platform 204 Has been. When lowering the container 102 toward the lifting platform 204, the container 102 is guided along the guide surface of each position defining member. Therefore, even if the container 102 swings in the horizontal direction, the container 102 can be loaded in the mounting area A.

For example, in an area below the mounting area A of the lifting platform 204, a receiving area capable of temporarily accommodating the processed work unit 17 is formed. The workpiece unit 17 after being processed by the processing apparatus 4 is accommodated in this accommodation area until preparations for transport of the transport vehicle 10 to the container 102 are prepared. In addition, in the area below the mounting area A of the lift platform 204, in addition to the receiving area, an irradiation unit that irradiates ultraviolet rays, a detection unit that detects the position of the notch, a reading unit that reads a bar code, etc. is disposed There is.

On the side of the concave portion 202a, an _{elongated concave portion 202b is formed in the X 2} axial direction (front-rear direction, processing feed direction). In the concave portion 202b, a ball screw type X-axis moving mechanism (processing transfer unit) 206 for moving an X-axis moving table (not shown) in the X _{2 axis direction is disposed.} A table cover 206a is disposed above the X-axis movement table. Further, before and after the table cover 206a, a bellows-shaped dustproof and splashproof cover 206b is attached.

Above the X-axis movement table, a chuck table 208 holding the workpiece 11 is disposed in such a manner that it is exposed from the table cover 206a. The chuck table 208 is connected to a rotation drive source (not shown) such as a motor, and rotates _{around a rotation axis substantially parallel to the Z 2} axis direction (vertical direction, cut-out feed direction). Further, the chuck table 208 is moved in the X ₂ axis direction by the X-axis moving mechanism 206 described above (processing feed).

The upper surface of the chuck table 208 is a holding surface 208a for holding the workpiece 11 through the tape 13. The holding surface 208a is connected to a suction source (not illustrated) through a suction path (not illustrated) or the like formed in the chuck table 208. Further, around the chuck table 208, four clamps 210 are provided for fixing the frame 15 supporting the workpiece 11 from all directions.

Above the concave portion 202b, a pair of guide rails 212 approached and spaced apart from each other while maintaining a state parallel to the _{Y 2 axis direction (left and right direction, indexing transfer direction) are provided.} Each of the pair of guide rails 212 has a support surface for supporting the frame 15 from below and a side surface substantially perpendicular to the support surface, and the blood drawn out from the container 102 in the mounting area A. The workpiece unit 17 (frame 15) is _{interposed in the X 2} axis direction, and is adjusted to a predetermined position.

Above the base 202, a door-shaped first support structure 214 is disposed so as to exceed the concave portion 202b. First, the front (the guide rail 212 side of the side), the first rail 216 along the Y ₂ axis direction is fixed, a first rail 216 of the supporting structure 214, the first mobile The first holding unit 220 is connected via a mechanism 218 or the like.

The first holding unit 220, for example, contacts the upper surface of the frame 15 and adsorbs the frame 15, lifts and descends by the first moving mechanism 218, and moves Y along the first rail 216. _It moves in the 2 axis direction. A gripping mechanism 220a for gripping the frame 15 is provided on the side of the lifting platform 204 of the first holding unit 220.

For example, when the frame 15 is gripped with the gripping mechanism 220a and the first holding unit 220 _{is moved in the Y 2} axis direction, the workpiece unit 17 is removed from the container 102 in the mounting area A. It can be pulled out to the pair of guide rails 212, or the workpiece unit 17 on the pair of guide rails 212 can be inserted into the container 102 of the mounting area (A). In addition, after aligning the position of the frame 15 with a pair of guide rails 212, the frame 15 is adsorbed by the first holding unit 220, and the workpiece unit 17 is mounted on the chuck table 208. ).

Further, on the front surface of the first support structure 214, _{a second rail 222 along the Y 2} axis direction is fixed above the first rail 216. The second holding unit 226 is connected to the second rail 222 via a second moving mechanism 224 or the like. The second holding unit 226, for example, contacts the upper surface of the frame 15 and adsorbs the frame 15, is lifted and lowered by the second moving mechanism 224, and is Y along the second rail 222. _It moves in the 2 axis direction.

A door-shaped second support structure 228 is disposed behind the first support structure 214. On the front surface of the second support structure 228 (surface on the first support structure 214 side), two sets of processing units ( A cutting unit) 232 is installed. _{Each processing unit 232 moves in the Y 2} axis direction by the corresponding Y axis Z axis movement mechanism 230 (indexing feed), _{and moves in the Z 2} axis direction (cutting feed).

Each processing unit 232 is provided with a spindle (not shown) that becomes a rotation axis substantially parallel to the _{Y 2 axis direction.} On one end side of each spindle, an annular cutting blade 234 is attached. A rotation drive source (not shown) such as a motor is connected to the other end of each spindle. Further, in the vicinity of the cutting blade 234, a nozzle for supplying a cutting liquid such as pure water to the workpiece 11 or the cutting blade 234 is disposed.

The workpiece 11 can be processed (cut) by cutting the rotating cutting blade 234 into the workpiece 11 held in the chuck table 208 while supplying the cutting fluid from this nozzle. At a position adjacent to the processing unit 232, an imaging unit (camera) 236 for capturing an image of the workpiece 11 and the like held on the chuck table 208 is provided. _{This imaging unit 236 also moves in the Y 2} axis direction by the Y axis Z axis movement mechanism 230, and moves in the Z ₂ axis direction.

A cleaning unit 238 is disposed at a position opposite to the platform 204 with respect to the recess 202b. The cleaning unit 238 is provided with a spinner table 240 that holds the workpiece 11 in a cylindrical cleaning space. A rotation driving source (not shown) for rotating the spinner table 240 at a predetermined speed is connected to the lower portion of the spinner table 240.

A spray nozzle 242 that sprays a cleaning fluid (typically, a mixed fluid of water and air) toward the workpiece 11 held by the spinner table 240 above the spinner table 240 ) Is placed. The work 11 can be cleaned by rotating the spinner table 240 holding the work 11 and spraying the cleaning fluid from the spray nozzle 242.

After cutting the workpiece 11 with the processing unit 232, for example, the frame 15 is adsorbed with the second holding unit 226 to carry the workpiece unit 17 into the cleaning unit 238. After cleaning the workpiece 11 with the cleaning unit 238, for example, the frame 15 is adsorbed with the first holding unit 220 to attach the workpiece unit 17 to the pair of guide rails 212. After loading, the frame 15 is gripped by the gripping mechanism 220a to accommodate the workpiece unit 17 in the container 102 of the mounting area A.

As shown in FIG. 21, the upper surface side of the base 202 is covered with the cover 244, and each of the above-described components is accommodated inside the cover 244. As shown in FIG. An opening (not shown) which penetrates the ceiling 244a of the cover 244 vertically is provided in a region immediately above the concave portion 202a. The container 102 of the transport vehicle 10 moves from the outside to the inside of the cover 244 through this opening, and moves from the inside to the outside of the cover 244 through this opening. There is no limitation on the shape or size of the opening, but the opening needs to be configured to be able to at least pass through the container 102.

Each component of the above-described processing device 4 is connected to the control device 246. The control device 246 is configured by, for example, a computer including a processing device such as a CPU (Central Processing Unit), a main storage device such as a dynamic random access memory (DRAM), and an auxiliary storage device such as a flash memory. . The function of the control device 246 is realized by operating the processing device or the like in accordance with software stored in the auxiliary storage device.

The control device 246 includes a receiver 248 that receives an external signal (information) and sends it to the control device 246, and a transmitter 250 that transmits the signal (information) received from the control device 246 to the outside. Is more connected. The receiver 248 receives, for example, a signal (control signal) transmitted from the control unit 12 of the transport system 2 and sends it to the control device 246.

The control device 246 controls the operation of each component of the processing device 4 based on, for example, a signal received from the receiver 248. Further, the control device 246 generates, for example, a signal for notification and sends it to the transmitter 250. The transmitter 250 transmits, for example, a signal received from the control device 246 to the control unit 12 of the transport system 2.

A pipe connecting portion 202c to which various types of pipes 21 are connected is provided on the side wall of the base 202. Further, on the side wall of the cover 244, a door 244b that opens and closes during maintenance or the like is provided. In addition, on the side wall of the cover 244, an operation panel (not shown) in which an instruction to the control device 246 is input, or a display (not shown) in which various types of information related to the processing device 4 are displayed. Light may be installed.

This processing apparatus 4 operates in conjunction with the conveyance system 2 of this embodiment. For example, the conveyance vehicle 10 stops at a stop area on the conveyance path 6, and the container 102 in which the workpiece unit 17 is accommodated is placed on the upper surface of the lifting platform 204 of the processing device 4 (placement area). (A)). When the container 102 is placed on the platform 204, the control unit 130 of the transport vehicle 10 generates a signal for notifying the effect and transmits it to the transmitter 134. This signal is transmitted from the transmitter 134 to the control unit 12 of the conveying system 2.

The control unit 12, based on the signal transmitted from the transmitter 134 of the conveyance vehicle 10, carries out the workpiece unit 17 before processing from the container 102, and the workpiece unit 17 after processing A signal is generated for instructing the processing device 4 to carry in to the container 102. When the receiver 248 of the processing device 4 receives a signal from the control unit 12 and the control device 246 receives an instruction based on this signal, the control device 246 The workpiece unit 17 before processing is carried out from the container 102 placed on the upper surface (placement area A) to the first holding unit 220. Accordingly, the workpiece unit 17 is drawn out to the pair of guide rails 212, and the workpiece 11 is started to be processed.

For example, when processing of the workpiece 11 is started, the control device 246 adjusts the height of the lifting platform 204, and the processed workpiece unit ( 17) is drawn out to the pair of guide rails 212. Then, the processed object unit 17 on the pair of guide rails 212 is accommodated in the container 102 on the lifting platform 204.

When the processed object unit 17 after processing is accommodated in the container 102, the control device 246 of the processing device 4 generates a signal for notifying that, and the transfer system 2 from the transmitter 250 ) To the control unit 12. The control unit 12 generates a signal for instructing the carrier vehicle 10 to go to the next destination based on the signal transmitted from the transmitter 250 of the processing apparatus 4.

When a signal from the control unit 12 is received by the receiver 132 of the carrier vehicle 10, and the control unit 130 receives an instruction based on this signal, the control unit 130 is directed to the next destination. Run (10). In this way, by using the conveying system 2, the processing apparatus 4 can timely receive the workpiece unit 17 before processing and recover the processed workpiece unit 17 after processing in a timely manner.

1, 21, etc., the conveying path 6 constituting the conveying system 2 is the upper surface side of the ceiling 244a of the cover 244 provided by each processing device 4, or It is installed on the upper surface side of the ceiling 22a of the case 22 provided by the loader/unloader 8, or the like. That is, the conveyance path 6 is disposed directly above the processing device 4 or the loader/unloader 8 so as to connect between the plurality of processing devices 4 and the loader/unloader 8, etc. have.

Therefore, the conveying path 6 does not interfere with structures such as the pipe connecting portion 202c and the door 244b provided on the side surface of the processing apparatus 4. That is, when designing the conveyance path 6, there is no need to consider the structure of the side surface of the processing device 4. Thereby, the conveyance system 2 can be constructed easily. In addition, since the conveying path 6 is disposed at a place lower than that of the ceiling of the factory, the work required to install the conveying path 6 is also facilitated.

And, for example, in the case of constructing the conveying path 6 in an environment in which a plurality of processing devices 4 and the like are already installed, the processing device 4 or the like is moved as in the case of providing a conveying path such as a ceiling of a factory. There is no need to reserve a work space. In addition, since the processing equipment 4 or the like already installed serves as the basis for the conveying path 6, the number of steps required for work is reduced compared to the case where a new foundation is provided or the like.

23 is a perspective view showing a part of the conveying path 6 provided in the processing device 4. In addition, the structure of the conveyance path 6 provided above the loader/unloader 8 is substantially the same as the structure of the conveyance path 6 provided above the processing device 4. The lower frame 262 is fixed to the ceiling 244a of the plurality of processing apparatuses 4, the ceiling 22a of the loader/unloader 8, and the like with screws, bolts, or the like.

The lower frame 262 is, for example, a composite of rod-shaped frame members made of a material containing a metal such as aluminum, and is a shape that connects the adjacent processing device 4 or the loader/unloader 8 to each other. It is assembled with. The base of the conveyance path 6 is formed by fixing this lower frame 262 to the ceiling 244a of each processing apparatus 4, the ceiling 22a of the loader/unloader 8, and the like.

In addition, when fixing the lower frame 262 to each processing device 4 or loader/unloader 8, the upper surface of the lower frame 262 becomes substantially horizontal, and the upper surface of the lower frame 262 is The height of the lower frame 262 with respect to each processing apparatus 4, the loader/unloader 8, etc. is adjusted so that the height of the frame becomes substantially the same.

Accordingly, even when the heights of the ceiling 244a of each processing apparatus 4 and the ceiling 22a of the loader/unloader 8 are not completely the same, the conveyance path ( 6) can be formed. Although there is no limitation on the method of adjusting the height of the lower frame 262 for the processing device 4, the loader/unloader 8, etc., for example, the ceiling 244a or the loader/unloader ( It is possible to use a method of arranging a member for height adjustment between the ceiling 22a of 8) and the lower surface of the lower frame 262.

Of course, the height of the processing device 4 and the loader/unloader 8 may be adjusted. For example, an adjustment mechanism for height adjustment is provided in the lower end (leg part) of the processing apparatus 4 and the loader/unloader 8. Therefore, the height of the processing device 4 or the loader/unloader 8 is adjusted using this adjustment mechanism, and the ceiling 244a of each processing device 4 and the ceiling 22a of the loader/unloader 8 are If the height of) and the like are the same, the lower frame 262 suitable for the foundation of the conveyance path 6 can be realized.

On the upper surface side of the lower frame 262, the upper frame 264 is fixed by screws, bolts, or the like. The upper frame 264 is, for example, a composite of rod-shaped frame members made of a material containing metal such as aluminum, and has a shape tailored to the arrangement of the conveying path 6 so that the conveying path 6 can be properly fixed. Can be assembled.

Above the upper frame 264, a conveyance path 6 is provided. The conveyance path 6 is formed, for example, by arranging a plurality of flat road surface panels 266 in a horizontal direction. In this way, by forming the conveying path 6 by combining the plurality of road surface panels 266, various conveying paths 6 according to the arrangement of the plurality of processing devices 4 and the loader/unloader 8 can be easily performed. Come true.

The road surface panel 266 is formed in a rectangular shape in a plan view using a lightweight and high strength material such as polyamide, polycarbonate, and carbon fiber reinforced plastic (CFRP), and the transport vehicle 10 ) It has a flat top surface suitable for driving. Further, at the end of the road surface panel 266, a through hole penetrating the road surface panel 266 vertically is formed.

On the other hand, on the upper surface side of the upper frame 264, a screw hole (not shown) having a diameter corresponding to the diameter of the screw 268 is opened at a position corresponding to the through hole of the road surface panel 266. Therefore, when the road surface panel 266 is disposed on the upper surface side of the upper frame 264 and then the screw 268 is fastened to the screw hole of the upper frame 264 through the through hole (not shown), the road surface panel The 266 can be fixed to the upper frame 264.

The lower frame 262 is formed, for example, by combining a plurality of lower frame units 270 each including a plurality of rod-shaped frame members. Similarly, the upper frame 264 is formed, for example, by combining a plurality of upper frame units 272 each including a plurality of rod-shaped frame members.

In this way, when forming the lower frame 262 using the plurality of lower frame units 270 and forming the upper frame 264 using the plurality of upper frame units 272, the processing device 4 For a factory where is installed, the frame member is transported in the form of a lower frame unit 270 and an upper frame unit 272.

That is, by using the high-quality lower frame unit 270 and the upper frame unit 272 produced in a stable environment, the high-quality lower frame 262 and the upper frame 264 are formed. Further, when the rod-shaped frame member is connected above the processing device 4, the same troublesome operation does not occur. Therefore, the high-quality conveyance path 6 can be formed in a short period of time.

Fig. 24(A) is a perspective view showing the lower frame unit 270a constituting the lower frame 262, and Fig. 24(B) is a perspective view showing the lower frame unit 270b constituting the lower frame 262 to be. The lower frame unit 270a and the lower frame unit 270b are selectively used according to the mode of the conveyance path 6, for example.

25 is a plan view showing an arrangement of the lower frame units 270 constituting the lower frame 262. In Fig. 25, a case where a conveying path 6 capable of conveying the workpiece unit 17 is formed between a total of eight devices (processing device 4, loader/unloader 8, etc.) . For example, in an area corresponding to a portion other than the corners of the conveying path 6 (a linear area of the conveying path 6), the lower frame unit 270a is used, and the area corresponding to the corner of the conveying path 6 In this, the lower frame unit 270b is used.

In addition, in the lower frame 262 of FIG. 25, a lower frame unit 270c having a structure in which the lower frame unit 270a is inverted and a lower frame unit 270d having a structure in which the lower frame unit 270b are inverted are combined. Is used. That is, in the lower frame 262 of FIG. 25, four types of lower frame units 270 are used, respectively, two. Each lower frame unit 270 is configured such that a rod-shaped frame member does not overlap with the opening 282 (refer to FIG. 28, corresponding to the opening 6a in FIG. 3) formed in the conveyance path 6.

When forming the lower frame 262, for example, after fixing the lower frame unit 270 to the processing device 4 or the loader/unloader 8, the adjacent lower frame units 270 may be connected to each other. . For the connection of the adjacent lower frame units 270, for example, a joint is used. However, after connecting the lower frame unit 270, it may be fixed to the processing device 4, the loader/unloader 8, or the like.

Fig. 26(A) is a perspective view showing the upper frame unit 272a constituting the upper frame 264, and Fig. 26(B) is a perspective view showing the upper frame unit 272b constituting the upper frame 264 to be. The upper frame unit 272a and the upper frame unit 272b are selectively used according to the mode of the conveyance path 6, for example.

27 is a plan view showing an arrangement of the upper frame unit 272 constituting the upper frame 264. In FIG. 27, the case of configuring the conveyance path 6 using the lower frame 262 of FIG. 25 is shown. For example, the upper frame unit 272a is used in a part of the area connecting the adjacent processing device 4, the loader/unloader 8, etc., and is directly connected to the processing device 4 or the loader/unloader 8 In the upper area, the upper frame unit 272b is used.

That is, in the upper frame 264 of FIG. 27, two upper frame units 272a and eight upper frame units 272b are used. Each upper frame unit 272 is configured so that the rod-shaped frame members do not overlap with the opening 282 (see FIG. 28) formed in the conveyance path 6.

When forming the upper frame 264, for example, the upper frame unit 272 is fixed to the lower frame 262. Further, the two adjacent upper frame units 272 are not connected to each other and may be separated from each other. Further, if necessary, an upper frame unit 272 having a structure in which the upper frame unit 272a is inverted, or an upper frame unit 272 having a structure in which the upper frame unit 272b is inverted may be used.

28 is a plan view schematically showing a conveyance path 6 configured by arranging a plurality of road surface panels 266. In FIG. 28, the case of configuring the conveyance path 6 using the lower frame 262 of FIG. 25 and the upper frame 264 of FIG. 27 is shown. In addition, in FIG. 28, the boundary of the adjacent road surface panel 266 is shown with a broken line.

When forming the conveyance path 6, the road surface panel 266 is fixed to the upper frame 264, for example. In addition, in the upper frame 264 of FIG. 27, for example, a small gap is formed between the adjacent upper frame unit 272a and the upper frame unit 272b, and the two adjacent upper frame units 272b are A large gap is formed between them. Therefore, only with the road surface panel 266 having a rectangular shape in plan view, the conveyance path 6 cannot be formed in a portion corresponding to this gap. That is, a gap is also formed in the conveyance path 6.

So, to cover this gap, a flat-type intermediate panel 274a and a flat-type intermediate panel 274b are used. A small intermediary panel 274a is disposed in a small gap between the adjacent upper frame unit 272a and the upper frame unit 272b. A large intermediary panel 274b is disposed in a large gap between two adjacent upper frame units 272b.

The intermediary panel 274a and the intermediary panel 274b are fixed to the upper frame 264 so that, for example, a gap or a step formed in the conveyance path 6 is sufficiently small. Thereby, the impact to the transport vehicle 10 during running can be suppressed to a small extent, and damage to the workpiece 11 or the like can be prevented. In the case where a small gap remains in the conveyance path 6, for example, a tape provided with a core material along the direction in which the conveyance vehicle 10 travels may be used to close the gap.

In addition, instead of the intermediate panel 274a or the intermediate panel 274b, an intermediate panel in which slopes are formed at both ends in the direction in which the transport vehicle 10 travels may be used. In this case, for example, since the intermediate panel can be used by overlapping the road surface panel 266, the demand for the size of the intermediate panel is alleviated. This increases the versatility of the intermediary panel. In addition, adjacent road panels 266 may be connected by using a flexible thin board-shaped intermediary panel.

When the transport vehicle 10 travels through the transport path 6 configured as described above, static electricity is generated due to friction with the transport path 6 by, for example, the wheels 86 of the transport vehicle 10, and the like, and the transport vehicle 10 ) There is a case that adverse effects are exerted on the workpiece 11 accommodated in the container 102. For example, when a semiconductor device is formed on the workpiece 11, there is a risk that the semiconductor device is destroyed by static electricity.

Therefore, it is preferable to expose a conductive member to a portion where the wheels 86 or the like on the upper surface of the road surface panel 266 serving as the conveyance path 6 contact. As the conductive member, for example, in addition to metals such as aluminum and copper, CFRP or the like is used. In addition, when the road surface panel 266 is composed of CFRP, the CFRP is also exposed on the upper surface thereof. That is, a state in which the conductive member is exposed on the upper surface of the road panel 266 is realized.

In this way, by exposing the conductive member on the upper surface of the road surface panel 266, generation and accumulation of static electricity due to friction can be suppressed, and adverse effects on the workpiece 11 can be prevented. Further, the conductive member exposed on the upper surface of the road surface panel 266 may be grounded through a conductive line (not shown) or the like. In this case, since static electricity generated by contact with the wheel 86 or the like with the road surface panel 266 is discharged through the conducting wire, it does not accumulate in the road surface panel 266. Therefore, the workpiece 11 is transported more safely by the transport vehicle 10.

In the conveying system 2 of the present embodiment, in principle, the operation of the conveying vehicle 10 is controlled so that the conveying vehicle 10 does not reach the end of the conveying path 6. However, when any trouble occurs in the transport vehicle 10 or the control unit 12, the transport vehicle 10 reaches the end of the transport path 6, and the transport vehicle 10 reaches the end of the transport path 6 There is a possibility that (10) will fall.

Therefore, at the end of the conveyance path 6, as shown in FIG. 23, it is preferable to provide a guide portion 276 serving as a barrier for preventing the fall of the conveyance vehicle 10 from the conveyance path 6. . This guide portion 276 is formed of a material containing a metal such as aluminum, and is fixed to the upper frame 264 or the road surface panel 266. The height from the upper surface of the road surface panel 266 to the upper end of the guide portion 276 is, for example, greater than the radius of the wheels 86 of the transport vehicle 10. Preferably, it is larger than the diameter of the wheel 86.

Further, the guide portion 276 may be formed at a height that contacts the third sensor 126 or the exterior cover of the transport vehicle 10. In this case, when the guide portion 276 contacts the third sensor 126 or the exterior cover of the transport vehicle 10, the transport vehicle 10 detects a collision with an obstacle and stops. Therefore, the transport vehicle 10 can be driven more safely.

As shown in FIG. 28, the conveyance path 6 includes a travel area 278 mainly used for traveling of the conveyance vehicle 10, a stop area 280 mainly used for stopping the conveyance vehicle 10, and , And a waiting area 284 mainly used for waiting of the transport vehicle 10. The workpiece unit 17 is transported between the transport vehicle 10 stopped at the stop area 280 and the processing device 4 or loader/unloader 8 located below the stop area 280 do.

The travel area 278 is formed in an annular shape according to the arrangement of the processing device 4, the loader/unloader 8, and the like, for example. The transport vehicle 10, for example, travels in one direction along the annular travel area 278 and does not travel in the other direction (ie, one-way traffic). Accordingly, the transport vehicle 10 can be safely driven by simple control.

However, there are no restrictions on the shape of the travel area 278 and the mode of travel of the transport vehicle 10. For example, the travel area 278 may be configured to allow the transport vehicle 10 to travel in both directions. Further, the travel region 278 need not be formed in an annular shape without a terminal, but may be formed in a linear shape having, for example, a terminal.

On the other hand, in the stopping area 280, an opening 282 penetrating the road surface panel 266 vertically is provided. The opening 282 is formed slightly larger than the upper and lower surfaces of the container 102, for example, and allows the container 102 to pass up and down. On the other hand, the width of the opening 282 in the direction perpendicular to the direction of entry when the conveyance vehicle 10 enters the stop area 280 is the width of the pair of wheels 86 of the conveyance vehicle 10. It is getting narrower than the gap. Accordingly, when the direction of entry when the transport vehicle 10 enters the stop region 280 is appropriate, the wheels 86 do not drop off the opening 282.

The waiting area 284 is disposed in an area where there is a high possibility of waiting for the transport vehicle 10, for example. By waiting the transport vehicle 10 in the waiting area 284, the other transport vehicle 10 can overtake the transport vehicle 10 in the atmosphere. In addition, when traveling in both directions of the transport vehicle 10 is permitted, the two transport vehicles 10 can be staggered by temporarily waiting for the transport vehicle 10 in this waiting area 284. In addition, the conveyance path 6 does not necessarily need to include the waiting area 284.

On the upper surfaces of the road surface panel 266, the intermediate panel 274a, and the intermediate panel 274b constituting the conveyance path 6, a plurality of types of guidance devices detected by sensors provided in the conveyance vehicle 10 are used. Mark 286 (see Fig. 23) is provided. The transport vehicle 10 performs control such as running, turning, and stopping, based on various marks 286 detected by a sensor.

As shown in FIG. 23, the mark 286 is comprised in a straight line which has a color different from other areas of the upper surface, such as the road surface panel 266, for example. In this embodiment, as this mark 286, as shown in Fig. 28, a first mark 286a, a second mark 286b, a third mark 286c, and a fourth mark 286d are used. do.

However, there is no limit to the aspect of the mark 286. The mark 286 may include, for example, a curved line or may be constituted by a broken line. Further, as the mark 286, letters, numbers, and designs may be used. Also, there is no limitation on the color of the mark 286 or the like. For example, the transport vehicle 10 may be configured such that a plurality of marks 286 of different colors are used and various controls are performed based on the colors of the marks 286.

In the travel area 278, a first mark 286a is provided along the direction in which the transport vehicle 10 travels. The first mark 286a is formed, for example, in a region where the transport vehicle 10 traveling in the travel region 278 must pass. More specifically, the first mark 286a is provided immediately under the pair of first sensors 122 of the transport vehicle 10 traveling in the travel area 278.

29 is a functional block diagram showing the control unit 130 of the transport vehicle 10. As shown in Fig. 29, the control unit 130 of the transport vehicle 10 monitors the upper surface of the travel area 278 or the like (transport path 6) of each of the pair of first sensors 122 1 A direction indicated by the first sensor control unit 130a for detecting the mark 286a and the first mark 286a detected by the first sensor 122 is specified, and the transport vehicle 10 is moved along the direction. It includes a driving instruction unit (130b) to travel.

Each of the pair of first sensors 122 detects a first mark 286a according to a control signal input from the first sensor control unit 130a. Information on the first mark 286a detected by the first sensor 122 is sent to the travel instruction unit 130b through the first sensor control unit 130a.

The travel instruction unit 130b specifies the direction indicated by the first mark 286a based on the information on the first mark 286a sent from the first sensor control unit 130a. Then, the travel instruction unit 130b controls the drive unit 90 to drive the transport vehicle 10 along the specified direction. That is, the conveyance vehicle 10 can detect the 1st mark 286a with the pair of 1st sensors 122, and can run on the conveyance path 6 along this 1st mark 286a.

As shown in Fig. 28, in a predetermined portion of the travel area 278, two linear first marks 286a intersect. The conveyance vehicle 10 passes the other first mark 286a crossing the first mark 286a to the second sensor 124 while advancing along one first mark 286a. To detect. When the other 1st mark 286a is detected by the 2nd sensor 124, the conveyance vehicle 10 turns as needed.

That is, the traveling direction of the conveyance vehicle 10 is changed at an arbitrary intersection point where the two linear first marks 286a intersect. As described above, a part of the other first mark 286a detected by the second sensor 124 functions as the second mark 286b indicating the position at which the transport vehicle 10 turns. Further, in the conveyance path 6, a number of second marks 286b corresponding to the number of intersection points at which the two first marks 286a intersect are present. That is, in the conveyance path 6 of FIG. 28, a plurality of second marks 286b exist.

As shown in Fig. 29, the control unit 130 of the transport vehicle 10 causes the second sensor 124 to monitor the upper surface of the travel area 278 or the like (the transport path 6), and the second mark 286b ) To detect the second sensor control unit 130c, and count the number of second marks 286b detected by the second sensor 124, and based on the counted number of second marks 286b It includes a turning instruction unit (130d) for turning (10).

The second sensor 124 detects the second mark 286b according to the control signal input from the second sensor control unit 130c. Then, the second sensor control unit 130c notifies the turning instruction unit 130d of the control unit 130 of this effect whenever the second sensor 124 detects the second mark 286b, for example.

The turning instruction unit 130d counts the number of the second marks 286b detected by the second sensor 124 based on the notification from the second sensor control unit 130c, for example, It compares with the number (a predetermined number) of the second marks 286b corresponding to the instruction from the control unit 12. And, when the number of second marks 286b detected by the second sensor 124 reaches the number of second marks 286b corresponding to the instruction from the control unit 12, the turning instruction unit 130d is driven. By controlling the unit 90, the transport vehicle 10 is made to turn.

That is, the turning instruction unit 130d changes the direction of the transport vehicle 10 according to the number of detected second marks 286b. In this way, the transport vehicle 10 can detect the second mark 286b with the second sensor 124 and change the direction as necessary. In addition, the second mark 286b is, for example, a corner portion of the travel area 278 (a corner portion of the conveyance path 6), a portion adjacent to the stop area 280 of the travel area 278, or a driving area. It is provided in a portion adjacent to the waiting area 284 of 278 or the like.

By the way, when the pair of second sensors 124 are arranged on a straight line passing through the pair of wheels 86, the second mark 286b passes through the wheel 86, and at the same time, The 2 mark 286b can be detected by a pair of second sensors 124. Therefore, by turning the transport vehicle 10 at the timing when the second mark 286b is detected, the pair of first sensors 122 will not significantly shift from the first mark 286a to be detected after turning. . That is, even if no correction is performed, the transport vehicle 10 can be properly rotated.

As shown in Fig. 28, in the stopping area 280, a third mark 286c is provided along the direction in which the transport vehicle 10 enters. That is, the 3rd mark 286c indicates the direction in which the conveyance vehicle 10 enters with respect to the stopping area 280. This third mark 286c is formed, for example, in a direction perpendicular to the entry direction of the transport vehicle 10 at two positions sandwiching the opening 282, and the second sensor of the transport vehicle 10 It is detected by 124.

As shown in Fig. 29, the control unit 130 of the transport vehicle 10 stops the transport vehicle 10 along the direction indicated by the third mark 286c detected by the second sensor 124. It includes an entry control unit (130e) to enter 280. The entry control unit 130e is connected to the second sensor control unit 130c.

The 2nd sensor control part 130c makes the 2nd sensor 124 monitor the upper surface of the stop area 280 etc. (transport path 6), and makes the 3rd mark 286c detect. Information on the third mark 286c detected by the second sensor 124 is sent to the entry control unit 130e through the second sensor control unit 130c.

The entry control unit 130e specifies the direction indicated by the third mark 286c based on the information of the third mark 286c input from the second sensor control unit 130c. Then, the entry control unit 130e controls the drive unit 90 to enter the transport vehicle 10 into the stop area 280 along the specified direction. The 3rd mark 286c is typically provided in the area|region where the wheel 86 of the conveyance vehicle 10 should pass. However, there is no limitation on the arrangement of the third mark 286c.

As shown in Fig. 28, the rear side of the stopping area 280 (or waiting area 284) in the direction in which the transport vehicle 10 enters the stopping area 280 (or waiting area 284) ( On the front side), a fourth mark 286d intersecting with the first mark 286a or the third mark 286c is provided. This fourth mark 286d indicates the position of the stopping area 280 (or the waiting area 284).

As shown in Fig. 29, the control unit 130 of the transport vehicle 10 includes a first sensor 122 (a pair of first sensors 122) positioned behind the transport vehicle 10 in the traveling direction. It includes a stop control unit 130f that stops the transport vehicle 10 when the fourth mark 286d is detected by one of). The vehicle stop control unit 130f is connected to the first sensor control unit 130a.

The first sensor control unit 130a monitors the top surface of the travel area 278 or the stop area 280 (transport path 6), etc., to the first sensor 122 to mark a fourth mark on the first sensor 122. (286d) is detected. When the fourth mark 286d is detected by the first sensor 122, the fact is notified to the stop control unit 130f through the first sensor control unit 130a.

When notifying that the fourth mark 286d has been detected from the first sensor control unit 130a, the vehicle stop control unit 130f controls the drive unit 90 to stop the transport vehicle 10 quickly. That is, the transport vehicle 10 stops immediately when, for example, the fourth mark 286d is detected by the rear first sensor 122.

In addition, this fourth mark 286d is the stopping area 280 (or the waiting area 284) in the direction in which the transport vehicle 10 enters the stopping area 280 (or the waiting area 284). It may be installed on the front side (inside) of the. In this case, the transport vehicle 10 stops immediately when the fourth mark 286d is detected by the first sensor 122 on the front side.

Further, the fourth mark 286d may be provided at a position detectable by the second sensor 124. In this case, the vehicle stop control unit 130f shown in FIG. 29 is connected to the second sensor control unit 130c. Then, when the second sensor 124 controlled by the second sensor control unit 130c detects the fourth mark 286d, the stop control unit 130f controls the drive unit 90 to control the transport vehicle 10 ) To stop.

In addition, even if the vehicle stop control unit 130f stops the transport vehicle 10 after a predetermined time has elapsed after the fourth mark 286d is detected by the first sensor 122 or the second sensor 124 good. The time from the detection of the fourth mark 286d to the stop of the transport vehicle 10 is, for example, the distance between the fourth mark 286d and the stop area 280, the speed at which the transport vehicle 10 travels, etc. It is adjusted on the basis of.

As shown in Fig. 28, in the front (inside) position of the stop area 280 and the standby area 284 in the direction in which the transport vehicle 10 enters, power supply connected to a power supply (not shown) is provided. The terminal (power supply terminal) 288 of is arranged. For example, when the transport vehicle 10 is stopped in the stop region 280 or the standby region 284, and the terminal (receiving terminal) 100 of the transport vehicle 10 is brought into contact with the terminal 288, the terminal 100 And power for charging is supplied to the battery (secondary battery) 96 via the charging wiring (charging wiring) 98. That is, the battery 96 can be charged.

23, the terminal 288 is supported by the terminal support part 290 fixed to the road surface panel 266 or the upper frame 264, and the wiring (power supply wiring) 292 for power feeding Is connected to. That is, this terminal 288 is connected to the power supply through the wiring 292 for power supply.

The terminal support portion 290 includes, for example, a pressing member (not shown) that presses the terminal 288 toward the stop region 280 or the standby region 284. By pressing the terminal 288 by the pressing member, the terminal 288 can be properly connected to the terminal 100. However, there is no limitation on the structure of the terminal 288 or the terminal support 290.

For example, after the transport vehicle 10 stops in the stop area 280, the container 102 is raised and lowered by the lifting unit 110. In this embodiment, since the terminal 288 for power supply is disposed in the stopping area 280, the battery 96 is charged even when the container 102 is raised or lowered. Therefore, when raising and lowering the container 102, a large amount of power consumed by the lifting unit 110 can be sufficiently supplied.

In addition, in this embodiment, the terminal 288 is also arranged in the standby area 284. Thus, for example, even when making the transport vehicle 10 wait in the standby area 284, the battery 96 is charged. Accordingly, the time during which the transport vehicle 10 can be operated can be extended, and the efficiency for transporting the workpiece 11 can be improved.

The operation when moving the conveyance vehicle 10 from a certain position (departure point) on the conveyance path 6 to another position (destination) is as follows, for example. First, the control unit 12 of the transport system 2 sends a signal corresponding to an instruction indicating that the vehicle is moving from the starting point to the destination to the transport vehicle 10 to be moved.

The control unit 130 of the transport vehicle 10, which has been instructed by the control unit 12, first determines a route to the destination using its current position as the starting point, and along this route, the transport vehicle ( 10) The number of second marks 286b existing between each position to be turned and the direction of turning to each position to be turned are obtained. Then, the control unit 130 of the transport vehicle 10 controls the drive unit 90 or the like based on the number of second marks 286b requested by itself and the direction of the turning.

For example, the control unit 130 of the transport vehicle 10 makes the transport vehicle 10 run while monitoring the upper surface of the transport path 6 with the first sensor 122 and the second sensor 124. That is, the control unit 130 drives the transport vehicle 10 along the direction indicated by the first mark 286a detected by the first sensor 122, while the second mark through which the second sensor 124 passes. (286b) is made to detect by this 2nd sensor 124.

When the number of second marks 286b passed by the second sensor 124 reaches the number of second marks 286b determined by the second sensor 124, the control unit 130 moves the conveyance vehicle 10 in the direction of the calculated rotation. To turn. After that, the control unit 130 makes the transport vehicle 10 travel again along the direction indicated by the first mark 286a. When the carrier vehicle 10 arrives at its destination, the control unit 130 sends a signal for notifying the fact to the control unit 12.

In addition, in order to enter the transport vehicle 10 into the stop area 280, the control unit 130 detects the third mark 286c by the second sensor 124, and the direction in which the transport vehicle 10 travels Finely adjust. Accordingly, it is possible to prevent the wheels 86 of the transport vehicle 10 from falling out of the openings 282. At this time, compared to the case of running the transport vehicle 10 along the direction indicated by the first mark 286a, it is sufficient to suppress the speed applied to travel to be low. After that, the control unit 130 causes the first sensor 122 to detect the fourth mark 286d, and causes the transport vehicle 10 to stop at the stopping area 280.

In principle, the transport vehicle 10 travels so that the wheels 86 are located in front of the traveling direction and the wheels 88 are located in the rear of the traveling direction. However, when moving from the stop area 280 or the waiting area 284 to the travel area 278, the conveyance vehicle 10 has the wheels 86 located at the rear of the moving direction, and the wheels 86 are located in the front of the moving direction. It runs so that 88 is located.

When the conveyance vehicle 10 stops in the stopping area 280, the container 102 is positioned directly above the opening 282. Moreover, the terminal 100 on the side of the conveyance vehicle 10 contacts the terminal 288 on the side of the conveyance path 6. Accordingly, the transport vehicle 10 can lower the container 102 while charging the battery 96 to load the container 102 in the mounting area A positioned below the opening 282.

Further, in the above-described mode of operation, although the control unit 130 obtains the number of second marks 286b and the direction of rotation, the determination by the control unit 130 may be limited to a minimum. In this case, for example, information on the number of second marks 286b existing between the starting point and each position where the transport vehicle 10 should turn, and information on the direction of turning at each position to be turned. A signal is sent from the control unit 12. In this operation, since the control unit 130 does not need to obtain the number of the second marks 286b or the direction of rotation, the control unit 130 can be simplified.

Next, an example of a control method of the transfer system 2 according to the present embodiment will be described. 30 is a diagram for describing an example of a control method of the conveyance system 2. For example, the control device 246 of the processing device 4 generates a signal (work piece request signal) for notifying that when the work piece 11 before processing becomes a new necessary situation. The signal (workpiece request signal) generated by the control device 246 is transmitted from the transmitter 250 to the control unit 12.

As shown in Fig. 30, the control unit 12 includes a control unit (signal generation unit) 302 that generates signals for performing various types of control. This control unit 302 is constituted by a computer including, for example, a processing device such as a CPU (Central Processing Unit), a main storage device such as a DRAM (Dynamic Random Access Memory), and an auxiliary storage device such as a flash memory. . The function of the control unit 302 is realized by operating the processing unit or the like in accordance with software stored in the auxiliary storage unit.

The control unit 302 includes a receiver 304 for receiving signals transmitted from the processing device 4, the loader/unloader 8, the carrier vehicle 10, etc., the processing device 4, and a loader/unloader ( 8) A transmitter 306 that transmits signals to the carrier vehicle 10 or the like is connected.

When the receiver 304 of the control unit 12 receives a notification signal (a workpiece request signal) transmitted from the transmitter 250 of the processing apparatus 4, it sends it to the control unit 302. When the control unit 302 confirms the notification signal (workpiece request signal) from the processing device 4, the stop area immediately above the loader/unloader 8 for an arbitrary transport vehicle 10 It moves to 280 and instructs to load the container 102 on the upper surface of the mounting table 66 of the loader/unloader 8 (second mounting area A _{2 ).} Specifically, the control unit 302 generates a control signal (first tack instruction signal) corresponding to this instruction, and transmits it from the transmitter 306 to the carrier vehicle 10.

When the receiver 132 of the carrier vehicle 10 receives a signal (a first tact indication signal) from the control unit 12, it sends it to the control unit 130. The control unit 130 controls the drive unit 90 or the like based on this signal (first mounting instruction signal), and causes the transport vehicle 10 to travel along the transport path 6. When the conveyance vehicle 10 stops in the stop area 280 immediately above the loader/unloader 8, the container 102 is positioned directly above the opening 282.

With the conveyance vehicle 10 stopped in the stopping area 280, the control unit 130 controls the elevating unit 110 to deliver the suspension member 112. Accordingly, the container 102 is lowered to pass through the opening 282 or the like, so that the container 102 can be loaded on the upper surface of the mounting table 66.

After loading the container 102 on the upper surface of the placing table 66, the control unit 130 provides a notification signal for notifying that the placing of the container 102 on the upper surface of the placing table 66 has been completed ( The first tact complete signal) is generated. The signal generated by the control unit 130 (the first mounting completion signal) is transmitted from the transmitter 134 to the control unit 12.

When the receiver 304 of the control unit 12 receives the signal (first mounting completion signal) transmitted from the transmitter 134 of the carrier vehicle 10, it sends it to the control unit 302. When the control unit 302 confirms the signal (first mounting completion signal) from the transport vehicle 10, the loader/unloader 8 is placed on the top surface of the mounting table 66. Is notified of completion. Specifically, the control unit 302 generates a notification signal (second mounting completion signal) for notifying that the mounting of the container 102 on the upper surface of the mounting table 66 has been completed, and the transmitter 306 ) To the loader/unloader 8.

When the receiver 68 of the loader/unloader 8 receives a signal from the control unit 12 (a second mounting completion signal), it sends it to the control device 46. Upon receiving this signal (second mounting completion signal), the control device 46 controls the operation of each component to carry the workpiece 11 before processing into the container 102. In addition, in the case where the processed object 11 is accommodated in the container 102, the processed object 11 is taken out from the container 102, and then the processed object 11 is brought into the container 102. do.

When the workpiece 11 before processing is carried into the container 102, the control device 46 provides a notification signal for notifying that the carry-in of the workpiece 11 to the container 102 has been completed (first return Complete signal). The signal (first conveyance completion signal) generated by the control device 46 is transmitted from the transmitter 70 to the control unit 12.

When the receiver 304 of the control unit 12 receives the signal (first conveyance completion signal) transmitted from the transmitter 70 of the loader/unloader 8, it sends it to the control unit 302. When the control unit 302 confirms the signal (first transfer completion signal) from the loader/unloader 8, the transfer vehicle 10 moves to the stop area 280 immediately above the processing device 4. It moves, and instructs to load the container 102 on the upper surface (mounting area A) of the lifting platform 204 of the processing apparatus 4. Specifically, the control unit 302 generates a control signal (a second mounting instruction signal) corresponding to this instruction, and transmits it from the transmitter 306 to the carrier vehicle 10.

When the receiver 132 of the carrier vehicle 10 receives a signal (a second tact indication signal) from the control unit 12, it sends it to the control unit 130. The control unit 130 controls the lifting unit 110 based on this signal (the second mounting instruction signal), and winds the suspension member 112 (winding up). Accordingly, the container 102 can be raised so as to pass through the opening 282 or the like, and stored in the storage area 104. After that, the control unit 130 controls the drive unit 90 or the like to make the transport vehicle 10 travel along the transport path 6.

When the conveyance vehicle 10 stops in the stopping area 280 directly above the processing apparatus 4, the container 102 is positioned directly above the opening 282. With the conveyance vehicle 10 stopped in the stopping area 280, the control unit 130 controls the elevating unit 110 to deliver the suspension member 112. Accordingly, the container 102 is lowered so as to pass through the opening 282 or the like, and the container 102 can be loaded on the upper surface of the lifting platform 204 of the processing apparatus 4.

After loading the container 102 on the upper surface of the platform 204, the control unit 130 provides a notification signal for notifying that the placement of the container 102 on the upper surface of the platform 204 has been completed. Wit completion signal) is generated. The signal generated by the control unit 130 (the third tack completion signal) is transmitted from the transmitter 134 to the control unit 12.

When the receiver 304 of the control unit 12 receives the signal (third mounting completion signal) transmitted from the transmitter 134 of the carrier vehicle 10, it sends it to the control unit 302. When the control unit 302 confirms the signal (third mounting completion signal) from the transport vehicle 10, it indicates that the mounting of the container 102 on the upper surface of the hoisting platform 204 has been completed with respect to the processing device 4 To notify. Specifically, the control unit 302 generates a notification signal (fourth mounting completion signal) for notifying that the mounting of the container 102 on the upper surface of the mounting table 66 has been completed, and the transmitter 306 ) To the processing device 4.

When the receiver 248 of the processing device 4 receives a signal (the fourth mounting completion signal) from the control unit 12, it sends it to the control device 246. Upon receiving this signal (the fourth mounting completion signal), the control device 246 controls the operation of each component to take out the workpiece 11 before processing from the container 102. In addition, in the case where the processed object 11 is present in the processing device 4, the processed object 11 before processing is taken out from the container 102, and then the processed object 11 is transferred to the container 102. Bring it in.

When the workpiece 11 before processing is taken out from the container 102, for example, the control device 246 provides a notification signal for notifying that the carrying out of the workpiece 11 from the container 102 has been completed ( A second carrier completion signal) is generated. The signal (second conveyance completion signal) generated by the control device 246 is transmitted from the transmitter 250 to the control unit 12.

By such a procedure, the workpiece 11 before processing accommodated in the loader/unloader 8 can be conveyed to the arbitrary processing apparatus 4. In addition, although the procedure for conveying the workpiece 11 from the loader/unloader 8 to the processing device 4 has mainly been described, the loader/unloader 8 from the processing device 4 The same applies to the procedure when conveying the workpiece 11 with respect to it.

In addition, the above-described order can be arbitrarily changed within a range in which the workpiece 11 can be properly conveyed. For example, a plurality of steps included in the above-described procedure may be performed at the same time, or the order of steps may be changed within a range that does not interfere with the transport of the workpiece 11. Similarly, arbitrary steps may be added, changed, or omitted within the range that does not interfere with the conveyance of the workpiece 11.

As described above, the conveyance path 6, the loader/unloader (transport device) 8, the conveyance vehicle 10, the cassette accommodation mechanism 24, and the elevating unit (elevating mechanism) 110 according to the present embodiment. All silver are configured so that the workpiece 11 can be efficiently and safely conveyed. Therefore, the workpiece 11 can be transported efficiently and safely by using the transport system 2 in which these are constructed.

(Embodiment 2)

In this embodiment, a processing apparatus having an aspect different from that of the above-described embodiment will be described. 31 is a perspective view showing the internal structure of a processing device (cutting device) 402 according to the present embodiment. In the following description, the same reference numerals are assigned to components common to those of the above-described embodiment, and detailed descriptions thereof are omitted.

The container 102 of the conveyance vehicle 10 is not mounted on the lifting platform 404 of the processing apparatus 402. Instead, in the lifting platform 404 of the processing apparatus, the two-stage cassette receiving mechanism 24 (that is, the first cassette receiving mechanism 24a and the second cassette) of the loader/unloader 8 of the above-described embodiment. A two-stage cassette storage mechanism 406 (a first cassette storage mechanism 406a and a second cassette storage mechanism 406b) is provided, such as the storage mechanism 24b.

That is, the cassette 30 is carried into the processing apparatus 402 of the present embodiment. Further, the processing device 402 is also equipped with a movement restricting mechanism comprising a stopper member 50 and a shaft mechanism 52. Accordingly, since it becomes easy to carry in the relatively heavy cassette 30 in and out, it is possible to reduce the risk that the workpiece 11 accommodated in the cassette 30 is damaged due to carrying in and out. In addition, it becomes easy to realize the compact cassette accommodation mechanism 406 in the width direction.

Further, also in the processing apparatus 402 of the present embodiment, a first safety mechanism and a second safety mechanism for restricting access from the outside to the inside of the processing apparatus 402 are realized. Accordingly, it is possible to prevent the operator from accidentally accessing the moving part or the like during operation located inside the processing apparatus 402.

Moreover, the processing apparatus 402 of this embodiment may be independent from the conveyance system 2 mentioned above. That is, the processing apparatus 402 according to the present embodiment may not necessarily be connected to the conveying system 2 described above.

The cassette storage mechanism 406 according to the present embodiment is configured to be able to efficiently and safely transport the workpiece 11, similarly to the cassette storage mechanism 24 of the above-described embodiment. Therefore, by using the processing apparatus 4 in which this is configured, the workpiece 11 can be transported efficiently and safely.

In addition, structures, methods, and the like related to the above-described embodiments and modifications can be appropriately changed and implemented as long as they do not depart from the scope of the object of the present invention.

2: conveying system
4: Processing device (cutting device)
4a: processing device
4b: processing device
6: return route
6a: opening
8: loader/unloader (transport device)
10: transport vehicle
10a: transport vehicle
10b: transport vehicle
12: control unit
21: piping
22: case
22a: ceiling
22b: opening
24: cassette receiving mechanism
24a: first cassette receiving mechanism
24b: second cassette receiving mechanism
26: support
26a: top surface
26b: outer surface
28: cassette mount table
28a: if
28b: top surface
28c: through hole
30: cassette
30a: first cassette
30b: second cassette
32: entrance exit
34: outer door (second door)
36: rotating connection member
38a: External carry-in/out area (outer area)
38b: inner receiving area (inner area)
40: inner door (first door)
42: lifting mechanism
42a: cylinder tube
42b: piston rod
42c: connection member
44: first sensor
44a: magnet
46: control device
48: second sensor
48a: magnet
50: stopper member
50a: angle bar
50b: roller
52: shaft mechanism
52a: rotating shaft
52b: bearing
54: pin (pressing part)
54a: ring
54b: button
56: lifting mechanism
56a: support column
58: hoist
60: temporary placement unit
62: case
62a: top plate
62b: lower plate
62c: shroud
62c1: first shroud
62c2: second shroud
62d: opening
62e1: first opening
62e2: second opening
64: transfer unit (transport mechanism)
64a: first transfer unit
64b: second transfer unit
66: wit
68: receiver
70: transmitter
72a: upper guide rail (first temporary placement part)
72b: lower guide rail (second temporary placement part)
72c: thickness
74a: first air actuator
74b: second air actuator
76a: first guide mechanism
76b: second guide mechanism
78: spacing adjustment mechanism
82: frame
84: axle
86: wheel (front wheel)
88: wheel (rear wheel)
90: drive unit
92: motor
92a: rotation shaft (output shaft)
94: pulley
96: battery (secondary battery)
98: wiring (charging wiring)
100: terminal (receiving terminal)
102: container (cassette)
102a: accommodating part (accommodating space)
102b: opening
102c: upper wall
102d: floor wall
104: containment area
106: first guide rail
106a: retention surface
106b: side
108: second guide rail
108a: retention surface
110: elevating unit (elevating mechanism)
112: Suspended absence
114: drive mechanism
116: contact member
118: elastic member (expansion member)
120: cover
122: first sensor
124: second sensor
126: third sensor
128: support
130: control unit (control unit)
130a: first sensor control unit
130b: driving instruction unit
130c: second sensor control unit
130d: turn instruction unit
130e: entry control
130f: stop control
132: receiver
134: transmitter
142: motor
142a: rotating shaft (output shaft)
144a: first rotation shaft (first shaft)
144b: second rotation shaft (second shaft)
146: pulley
148: connection member
150a: pulley
150b: pulley
152: connection member
154a: reel
154b: reel
156a: roller
156b: roller
162: drive mechanism
164: motor
164a: rotating shaft (output shaft)
166a: first rotation shaft (first shaft)
166b: second rotation shaft (second shaft)
166c: third rotation shaft (third shaft)
168: pulley
170: connection member
172: reel
172a: groove (recess)
172b: protrusion (convex)
174: fixing member
176: guide
182: cover portion
182a: plate-shaped member
182b: flexible member
184: contact
184a: fixing member
184b: roller
186: fixed block
188: connection block (L-shaped block)
188a: connection
188b: fixed part
190: connecting shaft
202: base
202a: recess
202b: recess
202c: piping connection
204: hoist
206: X-axis movement mechanism (processing transfer unit)
206a: table cover
206b: dustproof and splashproof cover
208: chuck table
208a: retention surface
210: clamp
212: guide rail
214: first support structure
216: first rail
218: first moving mechanism
220: first maintenance unit
220a: gripping mechanism
222: second rail
224: second movement mechanism
226: second maintenance unit
228: second support structure
230: Y-axis Z-axis movement mechanism (indexing transfer unit, infeed transfer unit)
232: machining unit (cutting unit)
234: cutting blade
236: imaging unit (camera)
238: cleaning unit
240: spinner table
242: spray nozzle
244: cover
244a: ceiling
244b: door
246: control device
248: receiver
250: transmitter
262: lower frame
264: upper frame
266: road panel
268: screw
270: lower frame unit
270a: lower frame unit
270b: lower frame unit
270c: lower frame unit
270d: lower frame unit
272: upper frame unit
272a: upper frame unit
272b: upper frame unit
274a: mediation panel
274b: mediation panel
276: guide part
278: driving area
280: stop zone
282: passage
284: waiting area
286: Mark
286a: first mark
286b: second mark
286c: third mark
286d: fourth mark
288: terminal (feed terminal)
290: terminal support
292: wiring (power supply wiring)
302: control unit
304: receiver
306: transmitter
402: processing device (cutting device)
404: hoist
406: cassette receiving mechanism
406a: first cassette receiving mechanism
406b: second cassette receiving mechanism
11: Workpiece
13: tape (dicing tape)
15: frame
17: work piece unit
17a: work piece unit
17b: work piece unit
A: Wit area
A1a: first place area
A1b: first place area
A2: 2nd wiping area
B1a: first conveyance area
B1b: first conveyance area
B2: second conveyance area
C1: arrow
C2: arrow
C3: arrow
D1: arrow
D2: arrow
D3: arrow
E1: arrow
E2: arrow
F1: arrow
F2: arrow
G: arrow

Claims (5)

As a conveying path through which a conveying vehicle that conveys a workpiece to a processing device runs,
It has a road surface panel installed above the processing device and a flat top surface,
A conveyance path, wherein a conductive member is exposed at a position where the wheels of the conveyance vehicle on the upper surface of the road surface panel come into contact with each other. The conveyance path according to claim 1, wherein the conductive member covers the entire area of the upper surface of the road surface panel. The described conveyance path according to claim 1 or 2, wherein the conductive member contains carbon fiber reinforced plastic. The conveying path according to claim 1 or 2, wherein the conductive member is grounded. The conveyance path according to claim 1 or 2, wherein a plurality of the road surface panels are connected in a direction parallel to the upper surface.

Images