JP7378895B2 - Transport vehicle - Google Patents

Description

The present invention relates to a transport vehicle used for transporting workpieces.

2. Description of the Related Art In the manufacturing process of device chips that are incorporated into electronic devices, plate-shaped workpieces, such as semiconductor wafers and resin package substrates, are processed using various processing apparatuses. When transporting workpieces to this processing device, a cassette that can accommodate a plurality of workpieces is usually used. When the processing device receives a cassette containing a plurality of workpieces, the processing device sequentially takes out the workpieces from the cassette and processes them.

In order to increase the efficiency of processing a workpiece, a plurality of processing devices may be used in parallel. In this case, the workpiece must be transported to each of the plurality of processing devices at appropriate timing. Therefore, a conveyance system has been proposed in which a plurality of processing apparatuses are connected through a conveyance path (conveyance path) to realize the conveyance of a workpiece to each processing apparatus (for example, see Patent Document 1).

Japanese Patent Application Publication No. 6-177244

By the way, in order to maximize the capabilities of a plurality of processing devices, it is important to efficiently and safely transport the workpiece to each processing device. However, due to structural reasons of various devices involved in conveying the workpiece, smooth conveyance of the workpiece may not be realized.

The present invention has been made in view of these problems, and an object of the present invention is to provide a transport vehicle that can transport workpieces efficiently and safely.

According to one aspect of the present invention, there is provided a transport vehicle that transports a workpiece by traveling on a transport path installed above a processing device, and the transport vehicle includes a frame on which wheels for traveling are mounted, and the workpiece. a storage area that is provided below the frame and above the lower end of the wheel and stores the container when the workpiece is transported on the conveyance path; an elevating unit provided on the frame for suspending and elevating the container; a contact member provided on the frame for contacting the upper surface side of the container when the workpiece is conveyed on the conveyance path; A control section that controls the unit, and the lifting unit includes a hanging member whose one end side is connected to the container, and a motor that generates power to wind up the hanging member. A transport vehicle is provided that stops the rotation of the motor based on a change in the current value of the motor when the hanging member is wound up and the container comes into contact with the contact member.

In one aspect of the invention, the controller monitors the height of the container based on the amount of rotation of the motor when the hanging member is wound up, and before the container is stored in the storage area. Preferably, the rotational speed of the motor is reduced to slow down the container. Further, it is preferable that the contact member contacts the upper surface side of the container at three or more points.

Moreover, it is preferable that the region of the contact member that contacts the container is made of an elastic member.

By using the transport vehicle according to one aspect of the present invention, workpieces can be transported efficiently and safely.

FIG. 1 is a plan view showing an example of the configuration of a conveyance system. FIG. 2 is a functional block diagram showing an example of the connection relationship of the transport system. FIG. 3 is a side view schematically showing a configuration example of a loader/unloader. FIG. 4(A) is a partially sectional side view showing a state in which the outer door is closed and the inner door is open, and FIG. 4(B) is a partially sectional side view showing a state in which the outer door is open and the inner door is closed. FIG. 3 is a cross-sectional side view. FIG. 5(A) is a partially sectional side view showing the cassette mounting table, etc., and FIG. 5(B) is a bottom view showing the cassette mounting table. FIG. 6(A) is a partially cross-sectional side view showing how the cassette mounting base is pulled out from the internal storage area, and FIG. 6(B) is a partially cross-sectional side view showing how the roller has fallen off from the support base. FIG. 6C is a partially sectional side view showing how the cassette mounting table is returned to the internal storage area. FIG. 7(A) is a partially sectional side view showing how the workpiece unit is temporarily placed on the two upper guide rails, and FIG. 7(B) is a side view showing the workpiece unit being temporarily placed on the two upper guide rails. FIG. 3 is a partially cross-sectional side view showing how the unit is temporarily placed. FIG. 8(A) is a plan view showing two upper guide rails, etc., and FIG. 8(B) is a plan view showing a state in which the interval between the two upper guide rails is narrowed. 9(A) is a perspective view showing the top side of the transport vehicle, and FIG. 9(B) is a perspective view showing the bottom side of the transport vehicle 10. FIG. 10 is an enlarged perspective view showing the front end of the carrier. FIG. 11(A) is a perspective view of the container, and FIG. 11(B) is a front view of the container. FIG. 12 is a perspective view showing the conveyance vehicle with the container placed in the placement area. FIG. 13 is a perspective view showing a carrier in which a container is connected to a hanging member via an elastic member (expandable member). FIG. 14(A) is a plan view showing an example of the configuration of the lifting unit, and FIG. 14(B) is a side view showing an example of the configuration of the lifting unit. FIG. 15(A) is a plan view showing another example of the structure of the lifting unit, and FIG. 15(B) is a side view showing another example of the structure of the lifting unit. FIG. 16(A) is a plan view showing the reel, and FIG. 16(B) is a side view showing the reel. FIG. 17 is an enlarged perspective view showing the cover. FIG. 18(A) is a side view showing the cover with no container stored in the storage area, and FIG. 18(B) is a side view showing the cover with a container stored in the storage area. . FIG. 19(A) is a side view showing the carrier when containers stored in the storage area are placed in the loading area, and FIG. 19(B) is a side view showing the current of the motor when the containers are lowered. It is a graph showing values. FIG. 20(A) is a side view showing the transport vehicle when the container placed in the loading area is stored in the storage area, and FIG. 20(B) is a side view showing the current of the motor when the container is raised. It is a graph showing values. FIG. 21 is a perspective view showing the appearance of the processing device and the conveyance path. FIG. 22 is a perspective view showing the internal structure of the processing device. FIG. 23 is a perspective view showing a part of the conveyance path installed in the processing device. FIGS. 24(A) and 24(B) are perspective views showing a lower frame unit that constitutes a lower frame. FIG. 25 is a plan view showing the arrangement of lower frame units forming the lower frame. FIGS. 26(A) and 26(B) are perspective views showing an upper frame unit that constitutes an upper frame. FIG. 27 is a plan view showing the arrangement of the upper frame units that constitute the upper frame. FIG. 28 is a plan view showing a conveyance path configured by arranging a plurality of road panels. FIG. 29 is a functional block diagram showing the control section of the transport vehicle. FIG. 30 is a diagram for explaining an example of a method of controlling the transport system. FIG. 31 is a perspective view showing the internal structure of the processing device according to the second embodiment.

Embodiments of the present invention will be described with reference to the accompanying drawings. In each of the embodiments below, a case will be described in which a plurality of processing devices to which workpieces are transported are all cutting devices, but the transport system can transfer workpieces to any type of processing device. It suffices if the structure is such that it can transport such items. That is, the destination of the workpiece, etc. may be a processing device other than the cutting device.

For example, a transport system may be configured to transport workpieces to multiple laser processing devices. Further, the conveyance system may be configured to be able to sequentially convey the workpiece to a plurality of types of processing devices used for a series of processes. Further, the transport system may be configured to transport the workpiece to various devices used in any processing associated with processing the workpiece. In other words, the destination of the workpiece may include a tape application device, an ultraviolet irradiation device, a cleaning device, etc. that are not intended for processing the workpiece.

(Embodiment 1)
FIG. 1 is a plan view showing an example of the configuration of the transport system 2 according to the present embodiment, and FIG. 2 is a functional block diagram showing an example of the connection relationship of the transport system 2. As shown in FIG. As shown in FIG. 1, the conveyance system 2 according to the present embodiment includes a plate-shaped workpiece 11 (see FIGS. 8(A), 8(B), etc.) that is processed by the processing device (cutting device) 4. It includes a conveyance path 6 for conveying.

The workpiece 11 is, for example, a disk-shaped wafer made of a semiconductor material such as silicon. The surface side of the workpiece 11 is divided into a plurality of small areas by a plurality of dividing lines (street) that intersect with each other, and each small area includes an IC (Integrated Circuit), a MEMS (Micro Electro Mechanical Systems) ) and other devices are formed.

A tape (dicing tape) 13 having a larger diameter than the workpiece 11 is attached to the back side of the workpiece 11 . The outer peripheral portion of the tape 13 is fixed to an annular frame 15 surrounding the workpiece 11. In this manner, in the transport system 2 according to the present embodiment, the workpiece 11 is transported to the processing device 4 in the state of the workpiece unit 17 supported by the frame 15 via the tape 13.

Note that the workpiece 11 of this embodiment is a disk-shaped wafer made of a semiconductor material such as silicon, but there are no restrictions on the material, shape, structure, size, etc. of the workpiece 11. For example, a substrate made of other materials such as semiconductors, ceramics, resins, metals, etc. can also be used as the workpiece 11.

Similarly, there are no restrictions on the type, quantity, shape, structure, size, arrangement, etc. of devices. The workpiece 11 does not need to have a device formed thereon. Furthermore, in the present embodiment, the workpiece unit 17 in which the workpiece 11 is supported by the frame 15 via the tape 13 is the target of conveyance, but the workpiece 11 to which the tape 13 is not attached or the frame 15 is transported. The workpiece 11 or the like that is not supported by the handle 15 may be the object of conveyance.

The size of the frame 15 described above is set according to the size of the workpiece 11 (the diameter of the workpiece 11, etc.). For example, the outer diameter of the frame 15 that supports the workpiece 11 with a diameter of about 300 mm is larger than the outer diameter of the frame 15 that supports the workpiece 11 with a diameter of about 200 mm. That is, when a large workpiece 11 is used, the outer diameter of the workpiece unit 17 also becomes large.

Further, the processing device 4 that processes the workpiece 11 is connected to the transport system 2 as a destination for transporting the workpiece 11, but is not necessarily a component of the transport system 2. Therefore, as described above, the processing device 4 may be changed or omitted depending on the manner in which the transport system 2 is used.

Although FIG. 1 shows only one processing device 4a for convenience of explanation, and FIG. 2 shows two processing devices 4a and 4b, in this embodiment, the destination of the workpiece 11 is Therefore, two or more processing devices 4 are required. That is, the number of processing devices 4 connected to the transport system 2 is two or more.

The conveyance path 6 is installed above each processing device 4 so as to connect the plurality of processing devices 4. A workpiece 11 is transported to each processing device 4 through this transport path 6 . In addition, since the conveyance path 6 is installed above the processing apparatus 4, the conveyance path 6 does not interfere with the piping 21 etc. which are connected to the side surface of each processing apparatus 4.

Below the conveyance path 6, in addition to the processing device 4, a loader/unloader (conveyance device) 8 is provided in which a workpiece 11 before processing and a workpiece 11 after processing are accommodated. The workpiece 11 to be processed, which is housed in the loader/unloader 8, is transferred to the transport vehicle 10 at an arbitrary timing.

The transport vehicle 10 travels on the transport path 6 and transports the unprocessed workpiece 11 received from the loader/unloader 8 to each processing device 4 . Further, upon receiving the processed workpiece 11 from the processing device 4 , the transport vehicle 10 travels on the transport path 6 and transports the processed workpiece 11 to the loader/unloader 8 .

However, when multiple types of devices (processing devices 4, etc.) are connected to the conveyance system 2, when the conveyance vehicle 10 receives a processed workpiece 11 from a certain processing device 4, the conveyance vehicle 10 The workpiece 11 may be transported to a device to be used in the next step. In addition, although FIG.1 and FIG.2 shows two conveyance vehicles 10a and 10b, there is no limit to the number of conveyance vehicles 10.

As shown in FIG. 2, the processing device 4, the loader/unloader 8, and the transport vehicle 10 are wirelessly connected to a control unit 12 that controls their operations. However, the control unit 12 may be configured to be able to control the operations of the processing device 4, the loader/unloader 8, the transport vehicle 10, etc., and may be connected to these by wire.

FIG. 3 is a side view schematically showing a configuration example of the loader/unloader 8. As shown in FIG. Note that in FIG. 3, some of the components are shown as functional blocks. As shown in FIG. 3, the loader/unloader 8 includes a housing 22 that houses various components. In addition, in FIG. 3, for convenience of explanation, only the outline of the housing 22 is shown.

Cassette storage mechanisms 24 are provided at two different height positions along the height direction (Z _- axis direction) inside the housing 22, respectively. That is, the loader/unloader 8 of this embodiment includes a first cassette accommodation mechanism 24a and a second cassette accommodation mechanism 24b arranged above the first cassette accommodation mechanism 24a. However, there is no limit to the number of cassette storage mechanisms 24 that the loader/unloader 8 has. The loader/unloader 8 only needs to include one or more cassette storage mechanisms 24.

Each cassette storage mechanism 24 has a flat support base 26 . A guide mechanism (not shown) is provided on the upper surface side of the support base 26, and this guide mechanism includes a flat cassette that can be slid along the depth direction (Y _- axis direction) of the housing 22. A mounting table 28 is attached.

A cassette 30 that can accommodate a plurality of (for example, 10 or more) workpieces 11 is placed on the upper surface of the cassette mounting table 28 . The cassette 30 is used when transporting a plurality of workpiece units 17 all at once. By using such a cassette 30, an operator can transport a plurality of workpiece units 17 into the loader/unloader 8 at once.

A loading/unloading port 32 is formed in the housing 22 at a position corresponding to each cassette storage mechanism 24, through which a cassette mounting table 28 on which a cassette 30 is placed can pass. When loading/unloading the cassette 30, the cassette 30 passes through the loading/unloading port 32 by sliding the cassette mounting table 28 on which the cassette 30 is placed.

An outer door (second door) 34 that can close each loading/unloading port 32 is arranged at a position corresponding to each loading/unloading port 32 of the casing 22 . The lower part of the outer door 34 is connected to the outer end of the support base 26 via a rotational connection member 36 such as a hinge having a horizontal axis of rotation. It opens and closes by rotating around its axis.

When the outer door 34 is open, the cassette mounting table 28 can be pulled out to an external carry-in/out area (external area) 38a (see FIG. 6A, etc.) located outside the carry-in/out port 32. Note that an air-driven locking mechanism (not shown) is provided at a position corresponding to each carry-in/outlet 32 of the casing 22 to fix the closed outer door 34 so as not to open it.

For example, the operator places the carried cassette 30 on the cassette mounting table 28 pulled out to the external carry-in/out area 38a. Thereafter, when the operator pushes the cassette mounting table 28 into the housing 22, the cassette mounting table 28 and the cassette 30 are placed in an internal storage area (internal area) 38b (FIG. 6A) located inside the carry-in/outlet 32. etc.).

Note that in this specification, this internal accommodation area 38b may be referred to as a first placement area where the cassette 30 is placed. When carrying out the cassette 30 from the cassette storage mechanism 24, it is sufficient to open the outer door 34 and then pull out the cassette mounting table 28 from the internal storage area 38b to the external carry-in/out area 38a.

An inner door (first door) 40 that is movable in the height direction is provided at a position opposite to the carry-in/out port 32 with respect to the internal storage area 38b of each cassette storage mechanism 24. The inner door 40 of the first cassette storage mechanism 24a moves between an upper closed position adjacent to the internal storage area 38b of the first cassette storage mechanism 24a and a lower open position. The inner door 40 moves between an upper open position adjacent to the inner storage area 38b of the second cassette storage mechanism 24b and a lower closed position. Therefore, the two inner doors 40 do not interfere with each other.

FIG. 4(A) is a partially sectional side view showing the first cassette storage mechanism 24a with the outer door 34 closed and the inner door 40 open. Note that in FIG. 4(A), some components of the loader/unloader 8 are shown as functional blocks. The structure and operation of the second cassette storage mechanism 24b are similar to the structure and operation of the first cassette storage mechanism 24a, except for the movement of the inner door 40.

As shown in FIG. 4(A), a lifting mechanism 42 is connected to the inner door 40. The elevating mechanism 42 is, for example, an air actuator (air cylinder) that moves an object using air pressure, and includes a cylinder tube 42a and a piston rod 42b that can move relative to the cylinder tube 42a.

A piston (not shown) is connected to a base end portion of a piston rod 42b housed in the cylinder tube 42a. Further, a connecting member 42c fixed to the surface of the inner door 40 on the opposite side from the internal storage area 38b is connected to the tip of the piston rod 42b exposed from the cylinder tube 42a.

When the piston and the piston rod 42b are moved from above to below by controlling the air intake and exhaust to the cylinder tube 42a, the inner door 40 of the first cassette accommodation mechanism 24a moves from the closed position to the open position. Furthermore, by moving the piston and piston rod 42b from below to above, the inner door 40 of the first cassette housing mechanism 24a moves from the open position to the closed position. Note that the elevating mechanism 42 may be realized by other mechanisms such as a rodless air cylinder.

A first sensor 44 used to detect whether or not the inner door 40 is open is provided at a position of the support base 26 facing the inner door 40. The first sensor 44 is, for example, a magnet sensor, and detects the strength of a magnetic field generated by a magnet 44a (see FIG. 4(B)) attached to a predetermined position of the inner door 40.

For example, as shown in FIG. 4A, when the inner door 40 opens and the magnet 44a moves away from the first sensor 44, the strength of the magnetic field generated by the magnet 44a becomes weaker at the position of the first sensor 44. Therefore, by using the strength of the magnetic field detected by the first sensor 44, it can be determined whether the inner door 40 is open.

A control device 46 that controls each component of the loader/unloader 8 is connected to the first sensor 44, and the first sensor 44 sends information regarding the strength of the detected magnetic field to the control device 46. The control device 46 determines that the inner door 40 is open when the strength of the magnetic field detected by the first sensor 44 becomes weaker than the reference, and when the strength of the magnetic field detected by the first sensor 44 becomes stronger than the reference, the inner door is opened. It is determined that 40 is closed. Note that the first sensor 44 may be connected to the control device 46 wirelessly.

The control device 46 is configured by a computer including, for example, a processing device such as a CPU (Central Processing Unit), a main storage device such as a DRAM (Dynamic Random Access Memory), and an auxiliary storage device such as a flash memory. . The functions of the control device 46 are realized by operating the processing device and the like according to software stored in the auxiliary storage device.

A second sensor 48 used to detect whether the outer door 34 is open is provided at a position corresponding to the loading/unloading exit 32 of the housing 22. The second sensor 48 is, for example, a magnet sensor, and detects the strength of the magnetic field generated by a magnet 48a attached to a predetermined position of the outer door 34. The second sensor 48 is connected to the control device 46 . Note that the second sensor 48 may be connected to the control device 46 wirelessly.

FIG. 4(B) is a partially sectional side view showing a state in which the outer door 34 is open and the inner door 40 is closed. Note that in FIG. 4(B), the control device 46 is shown as a functional block. As shown in FIG. 4(B), when the outer door 34 opens and the magnet 48a moves away from the second sensor 48, the strength of the magnetic field generated by the magnet 48a becomes weaker at the position of the second sensor 48.

Therefore, by using the strength of the magnetic field detected by the second sensor 48, it can be determined whether the outer door 34 is open. Specifically, the second sensor 48 sends information regarding the strength of the detected magnetic field to the controller 46. The control device 46 determines that the outer door 34 is opened when the strength of the magnetic field detected by the second sensor 48 becomes weaker than the reference, and the control device 46 determines that the outer door 34 is opened when the strength of the magnetic field detected by the second sensor 48 becomes stronger than the reference. It is determined that 34 is closed.

The control device 46 has a function as a first safety mechanism for restricting access from the outside to the inside of the loader/unloader 8. The first safety mechanism is realized by the control device 46 appropriately controlling an air-driven locking mechanism that fixes the closed outer door 34 so as not to open it.

Specifically, when determining that the outer door 34 is closed and determining that the inner door 40 is open, the control device 46 locks the outer door 34 using a locking mechanism to prevent the outer door 34 from opening. to be fixed. In this manner, the control device 46 controls whether the outer door 34 can be opened or closed, thereby preventing the operator from accidentally accessing the movable parts located inside the loader/unloader 8 that are in operation.

Further, the control device 46 has a function as a second safety mechanism for restricting access from the outside to the inside of the loader/unloader 8. The second safety mechanism is realized by the control device 46 appropriately managing the power supply of the loader/unloader 8. Specifically, when it is determined that the outer door 34 is open and the inner door 40 is closed, if the inner door 40 is opened for some reason, the control device 46 controls the loader unloader. Turn off the power to loader 8.

The second safety mechanism causes the loader/unloader 8 to stop in a situation where the outer door 34 and the inner door 40 are opened at the same time. In this way, by appropriately managing the power supply of the loader/unloader 8 by the control device 46, it is possible to prevent the operator from accidentally accessing the movable parts located inside the loader/unloader 8 during operation. .

5(A) is a partially sectional side view showing the cassette mounting table 28 and the like, and FIG. 5(B) is a bottom view showing the cassette mounting table 28. As shown in FIG. A stopper member 50 is arranged on the lower surface 28a side of the cassette mounting table 28. The stopper member 50 has, for example, a square bar 50a that is long in the depth direction. However, the length of this square bar 50a in the depth direction is shorter than the length of the cassette mounting table 28 in the depth direction. Further, the square bar 50a is made of metal such as stainless steel, for example. However, there are no major restrictions on the material, shape, etc. of the square bar 50a.

One end of the square bar 50a located inside in the depth direction (that is, the end on the inner door 40 side) has a rotation axis along the width direction ( _X1 axis direction) that is approximately perpendicular to the height and depth directions. A shaft (not shown) is provided, and a roller 50b is rotatably supported on this rotation shaft. The diameter of the roller 50b is smaller than the distance between the lower surface 28a of the cassette mounting table 28 and the upper surface 26a of the support table 26.

A shaft mechanism 52 that rotatably supports the square bar 50a is provided at a position between one end on the inside and the other end on the outside of the square bar 50a. The shaft mechanism 52 has a rotation shaft 52a extending in the width direction. The rotating shaft 52a is connected to a position on the other end side (outside) of the center of the square bar 50a in the longitudinal direction (depth direction).

Both ends of the rotating shaft 52a in the width direction are inserted into bearing holes of a pair of bearings 52b fixed to the lower surface 28a side of the cassette mounting table 28. Thereby, the square bar 50a is supported by the bearing 52b so that it can rotate around the rotating shaft 52a in a plane parallel to the height and depth directions (in a plane perpendicular to the width direction).

As described above, the rotating shaft 52a is connected to a position closer to the other end than the center of the square bar 50a. Therefore, the direction of the moment of gravity acting on the stopper member 50 around the axis of rotation 52a is such as to move one end of the square bar 50a downward. That is, unless sufficient force is applied to the square bar 50a, the position of one end of the square bar 50a will be lower than the other end of the square bar 50a due to the action of gravity.

Therefore, for example, when the entire cassette mounting table 28 is positioned in the internal storage area 38b, the roller 50b contacts the upper surface 26a of the support table 26. Further, when the cassette mounting table 28 is moved above the support table 26, the roller 50b rolls on the upper surface 26a of the support table 26.

The lower end of a vertically long pin (pressing portion) 54 is connected to the other end of the square bar 50a. A through hole 28c passing through the cassette mounting table 28 in the height direction is formed at a position corresponding to the pin 54 of the cassette mounting table 28, and the pin 54 is inserted into this through hole 28c. The through hole 28c is formed to a size that does not inhibit movement of the inserted pin 54 in the height direction.

The length of the pin 54 in the height direction is longer than the thickness of the cassette mounting table 28. Therefore, when the roller 50b is in contact with the upper surface 26a of the support base 26, the upper part of the pin 54 is exposed on the upper surface 28b side of the cassette mounting base 28. A disc-shaped button 54b having an outer diameter larger than the diameter of the pin 54 is fixed to the exposed portion of the pin 54.

When the button 54b fixed to the pin 54 is pressed down from above, the other end of the square bar 50a moves downward and one end of the square bar 50a moves upward. In other words, the roller 50b moves upward. Note that a ring 54a having an outer diameter larger than the diameter of the through hole 28c is fixed near the lower portion of the pin 54.

FIG. 6(A) is a partially sectional side view showing how the cassette mounting table 28 is pulled out from the internal storage area 38b. The cassette mounting table 28 is slidably attached to the support table 26 by the above-mentioned guide mechanism (not shown), and is pulled out toward the outside of the loading/unloading port 32 .

When the cassette mounting table 28 slides outward and the roller 50b goes beyond the outer edge of the upper surface 26a of the support table 26, the square rod is One end of 50a moves downward. In other words, the roller 50b falls off from the support base 26.

FIG. 6(B) is a partially sectional side view showing how the roller 50b has fallen off the support base 26. FIG. When the roller 50b falls off the support base 26, the roller 50b is positioned at a lower position than the upper surface 26a. As a result, the inward movement of the cassette mounting table 28 is restricted by the stopper member 50 coming into contact with the outer surface 26b of the support table 26. Note that as the roller 50b falls off, the pin 54 rises, and the ring 54a comes into contact with the lower surface 28a of the cassette mounting table 28.

In this way, the stopper member 50 and the shaft mechanism 52 function as a movement restriction mechanism that restricts the movement of the cassette mounting base 28 inward when the cassette mounting base 28 is pulled out. By providing the movement restriction mechanism, for example, it becomes easier to carry in and out the relatively heavy cassette 30, so it is possible to reduce the risk that the workpiece 11 accommodated in the cassette 30 will be damaged due to being carried in and out.

That is, if the cassette mounting table 28 moves inward when placing (carrying in) the cassette 30 on the cassette mounting table 28, there is a risk that the operator will drop the cassette 30, or that the operator will not place the cassette 30 into the outer door 34. However, by restricting inward movement of the cassette mounting table 28 by the movement restriction mechanism, these risks can be suppressed to a sufficiently low level.

Furthermore, if the cassette mounting table 28 moves inward when the operator carries out the cassette 30 from the cassette mounting table 28, the cassette 30 scheduled to be carried out will be removed from the part of the casing 22 located above the loading/unloading port 32. However, by restricting inward movement of the cassette mounting table 28 by the movement restriction mechanism, this risk can be suppressed to a sufficiently low level.

The movement restriction mechanism of this embodiment is realized by rotating the square rod 50a within a plane parallel to the height direction and the depth direction. The cassette accommodating mechanism 24 does not become larger in the width direction as in the case where the cassette accommodating mechanism 24 is provided. Therefore, it becomes easier to realize the cassette storage mechanism 24 that is more compact in the width direction than when the movement restriction mechanism is provided on the outer side of the cassette mounting table 28 in the width direction.

Note that the conditions such as the length of the square bar 50a and the position of the shaft mechanism 52 are such that when the square bar 50a falls off the support base 26, the area on the cassette mounting base 28 where the cassette 30 is placed is within the casing 22. It is set to be fully exposed. Therefore, the operator can place (carry in) the cassette 30 on the cassette mounting table 28 with the cassette 30 completely exposed from the housing 22.

FIG. 6(C) is a partially sectional side view showing how the cassette mounting table 28 is returned to the internal storage area 38b. When returning the cassette mounting table 28 to the internal storage area 38b, the operator presses down the button 54b. For example, the operator presses down the button 54b until the lower part of the button 54b contacts the upper surface 28b of the cassette mounting table 28. As a result, the pin 54 is pushed down, and the roller 50b moves above the upper surface 26a of the support base 26.

The roller 50b rises until it comes into contact with the lower surface 28a of the cassette mounting table 28, for example. As a result, the restriction on the inward movement of the cassette mounting table 28 is released, and the cassette mounting table 28 can be returned to the internal accommodation area 38b. The operator may push the cassette mounting table 28 into the internal storage area 38b while pressing down the button 54b.

Note that the cassette accommodation mechanism 24 is not limited to the above-mentioned example. For example, the stopper members 50 may be provided at two different positions in the width direction of the cassette mounting table 28, respectively. In this case, through holes 28c are formed at positions corresponding to the respective pins 54. Furthermore, in this case, the two square bars 50a constituting the two stopper members 50 may be connected to each other at arbitrary positions. If the two square bars 50a are connected to each other, one of the pins 54 can be omitted.

Further, the through hole 28c may be formed in a region of the cassette mounting table 28 where the cassette 30 is arranged. In this case, when the cassette 30 is placed on the cassette mounting table 28, the pin 54 is pushed down by the weight of the cassette 30. That is, there is no need for the operator to push down the pin 54 to release the restriction by the stopper member 50.

As shown in FIG. 3, the loader/unloader 8 includes a lifting mechanism 56 disposed on the opposite side of the inner door 40 from the internal accommodation area 38b. The lifting mechanism 56 has a support column 56a that is long in the height direction. A pair of guide rails (not shown) are provided on the inner door 40 side of the support column 56a along the longitudinal direction (that is, the height direction) of the support column 56a.

A plate-shaped lifting platform 58 is attached to a pair of guide rails of the lifting mechanism 56 in such a manner that it can slide in the height direction. The upper surface of the lifting platform 58 is formed generally flat. The lifting platform 58 slides in the height direction along a pair of guide rails while keeping its upper surface generally perpendicular to the height direction.

A motor (not shown) and a drive pulley (not shown) connected to the rotating shaft of the motor are provided at the lower part of the support column 56a. Further, a driven pulley (not shown) is provided on the upper part of the support column 56a. A toothed endless belt (not shown) is stretched between the driving pulley and the driven pulley, and a portion of this toothed endless belt is fixed to the lifting platform 58. Therefore, when the rotation axis of the motor is rotated in one direction, the elevator platform 58 rises, and when the rotation axis of the motor is rotated in the other direction, the elevator platform 58 is lowered.

On the upper surface side of the lifting table 58, there is a temporary storage area where the workpiece 11 carried out from the cassette 30 in the cassette storage mechanism 24 and the workpiece 11 carried into the cassette 30 in the cassette storage mechanism 24 are temporarily placed. A unit 60 is provided. The temporary storage unit 60 has a rectangular cylindrical housing 62 with an opening formed on the cassette storage mechanism 24 side. Inside the casing 62, a plurality of transport units (transport mechanisms) 64 that can each grip the workpiece 11 and move in the depth direction are arranged.

When transferring the workpiece unit 17 between the temporary storage unit 60 and the first cassette 30a of the first cassette storage mechanism 24a, the height of the temporary storage unit 60 is adjusted to the height of the first cassette storage mechanism 24a. match. That is, the temporary storage unit 60 is arranged in the first transport area B ₁ a adjacent to the inner door 40 side in the depth direction with respect to the first placement area A ₁ a of the first cassette storage mechanism 24a.

When the temporary storage unit 60 is placed in the first transport area B ₁ a and the inner door 40 of the first cassette storage mechanism 24a is opened, the transport unit 64 is placed in the first cassette 30a of the first storage area A ₁ a. become accessible. For example, the transport unit 64 grips the workpiece unit 17 housed in the first cassette 30a and pulls it out to the temporary storage unit 60.

Further, the transport unit 64 grips the workpiece unit 17 temporarily placed in the temporary storage unit 60 and stores it in the first cassette 30a. In this way, the transport unit 64 can transport the workpiece 11 between the temporary storage unit 60 in the first transport area B ₁ a and the first cassette 30 a in the first placement area A ₁ a.

When transferring the workpiece unit 17 between the temporary storage unit 60 and the second cassette 30b of the second cassette storage mechanism 24b, the height of the temporary storage unit 60 is adjusted to the height of the second cassette storage mechanism 24b. match. That is, the temporary storage unit 60 is arranged in the first transport area B ₁ b adjacent to the inner door 40 side in the depth direction with respect to the first placement area A ₁ b of the second cassette storage mechanism 24b.

When the temporary storage unit 60 is placed in the first transport area B ₁ b and the inner door 40 of the second cassette storage mechanism 24b is opened, the transport unit 64 is placed in the second cassette 30b of the first storage area A ₁ b. become accessible. For example, the transport unit 64 grips the workpiece unit 17 housed in the second cassette 30b and pulls it out to the temporary storage unit 60.

Further, the transport unit 64 grips the workpiece unit 17 temporarily placed in the temporary storage unit 60 and stores it in the second cassette 30b. In this way, the transport unit 64 can transport the workpiece 11 between the temporary storage unit 60 in the first transport area B ₁ b and the second cassette 30b in the first placement area A ₁ b.

Further above the second cassette storage mechanism 24b, a mounting table 66 is provided. Furthermore, an opening 22b that vertically penetrates the ceiling 22a of the housing 22 is provided in a region directly above the mounting table 66. Furthermore, an opening 6a that vertically passes through the transport path 6 is provided in a region directly above the mounting table 66 and the opening 22b.

When transporting the workpiece unit 17 between the transport vehicle 10 and the temporary storage unit 60, first, the transport vehicle 10 equipped with a container (cassette) 102 that can accommodate the workpiece unit 17 is placed in the opening 6a. move it upwards. Then, the container 102 is lowered so as to be suspended by the hanging member 112, and the container 102 is placed on the upper surface of the mounting table 66 (second mounting area A ₂ ).

Further, the height of the temporary storage unit 60 is adjusted to the height of the container 102 placed on the mounting table 66. That is, the temporary placement unit 60 is placed in the second transport area _B2 adjacent to the placement table 66 in the depth direction. This allows the transport unit 64 to access the container 102 placed in the second placement area _A2 . For example, the transport unit 64 grips the workpiece unit 17 housed in the container 102 and pulls it out to the temporary storage unit 60 .

Further, the transport unit 64 grips the workpiece unit 17 temporarily placed in the temporary storage unit 60 and stores it in the container 102 . In this way, the transport unit 64 can transport the workpiece 11 between the temporary storage unit 60 in the second transport area B ₂ and the container 102 placed on the mounting table 66 . Note that the lifting mechanism 56 that raises and lowers the temporary storage unit 60 and the transport unit 64 within the temporary storage unit 60 are connected to the control device 46 described above. The operations of the lifting mechanism 56 and the transport unit 64 are controlled by this control device 46.

Further connected to the control device 46 are a receiver 68 that receives a signal (information) from the outside and sends it to the control device 46, and a transmitter 70 that sends the signal (information) received from the control device 46 to the outside. has been done. The receiver 68 receives, for example, a signal transmitted from the control unit 12 of the transport system 2 and sends it to the control device 46.

The control device 46 controls the operation of each component of the loader/unloader 8 based on signals received from the receiver 68, for example. Further, the control device 46 generates a notification signal and sends it to the transmitter 70, for example. The transmitter 70 transmits, for example, a signal received from the control device 46 to the control unit 12 of the transport system 2.

The loader/unloader 8 of this embodiment has the workpiece units 17 placed between a cassette 30 in which a plurality of workpiece units 17 are stored and a container 102 of the transport vehicle 10 via a temporary storage unit 60. can be transported. Therefore, the workpiece unit 17 can be transported to each processing device 4 in a timely manner, and the workpiece unit 17 processed by each processing device 4 can be recovered in a timely manner.

7(A) is a partially sectional side view showing how the workpiece unit 17 is temporarily placed on the upper stage of the temporary storage unit 60, and FIG. FIG. 3 is a partially sectional side view showing how the object unit 17 is temporarily placed. The housing 62 of the temporary storage unit 60 includes, for example, an upper plate 62a arranged at the upper part and a lower plate 62b arranged at the lower part.

Upper ends of pillars (not shown) are connected to two ends of the upper plate 62a in the width direction, respectively. Further, the lower end portions of the pillars are connected to the two widthwise end portions of the lower plate 62b, respectively. That is, the upper plate 62a and the lower plate 62b are connected to each other via two sets of pillars. A pair of side plates 62c separated in the width direction are arranged in the space between the upper plate 62a and the lower plate 62b. Furthermore, an opening 62d is formed at the end of the housing 62 on the cassette storage mechanism 24 side.

Upper guide rails (first temporary storage portions) 72a that are long in the depth direction are arranged at the same height inside the pair of side plates 62c. Each upper guide rail 72a has a support surface that supports the workpiece unit 17 (frame 15) from below, and a side surface that defines the position of the workpiece unit 17 (frame 15) in the width direction. .

On the inside of the pair of side plates 62c, lower guide rails (second temporary storage portions) 72b, which are long in the depth direction, are arranged at positions below the upper guide rails 72a. Each lower guide rail 72b includes a support surface that supports the workpiece unit 17 (frame 15) from below, and a side surface that defines the position of the workpiece unit 17 (frame 15) in the width direction.

In this way, by providing the upper guide rail 72a and the lower guide rail 72b at different height positions inside the housing 62, the temporary storage unit 60 can accommodate two workpiece units 17 at the same time. Therefore, compared to the case where the temporary storage unit can accommodate only one workpiece unit 17, the workpiece unit 17 can be stored more efficiently between the container 102 or cassette 30 of the transport vehicle 10 and the temporary storage unit 60. Can be transported.

For example, the upper guide rail 72a is used to accommodate the workpiece unit 17 before processing, and the lower guide rail 72b is used to accommodate the workpiece unit 17 after processing. However, there is no limit to the manner in which the workpiece unit 17 is accommodated. The upper guide rail 72a may be used to accommodate the workpiece unit 17 after processing, and the lower guide rail 72b may be used to accommodate the workpiece unit 17 before processing.

A first transport unit 64a is provided at a height corresponding to the upper guide rail 72a, and a second transport unit 64b is provided at a height corresponding to the lower guide rail 72b. Each transport unit 64 includes a gripping section including two plate members arranged one above the other. The two plate members are arranged so that the lower surface of the upper plate member and the upper surface of the lower plate member are approximately parallel to each other.

The gripping section of each transport unit 64 further includes an actuator (not shown) that adjusts the interval between the two plate members. By narrowing the distance between the two plate members by this actuator, the frame 15 of the workpiece unit 17 is gripped. Furthermore, by increasing the distance between the two plate members, the frame 15 of the workpiece unit 17 is released from the two plate members.

Furthermore, each transport unit 64 includes a horizontal movement mechanism (not shown) that moves the gripping section in the depth direction. The horizontal movement mechanism has a linear guide (not shown) provided along the depth direction. A transport unit 64 is slidably connected to this linear guide.

For example, a driven pulley (not shown) having a rotation axis generally parallel to the width direction is provided at one end of the linear guide. Further, the other end of the linear guide is provided with a drive pulley (not shown) having a rotation axis approximately parallel to the width direction, and a motor (not shown) with the rotation axis connected to the drive pulley. There is.

A toothed endless belt (not shown) is stretched between the driven pulley and the driving pulley, and a portion of this toothed endless belt is fixed to the gripping portion. Therefore, when the rotation axis of the motor is rotated in one direction, the grip moves to one side in the depth direction, and when the rotation axis of the motor is rotated in the other direction, the grip moves to the other side in the depth direction.

When temporarily placing the workpiece unit 17 on the upper guide rail 72a, as shown in FIG. The height is adjusted to the height of the container 102 or cassette 30 in which the workpiece unit 17 is housed.

Next, the gripping portion of the first transport unit 64a is moved into the container 102 or the cassette 30. Then, the frame 15 of the workpiece unit 17 housed in the container 102 or the cassette 30 is gripped by the gripping portion of the first transport unit 64a. Thereafter, the gripping portion of the first transport unit 64a is moved in a direction away from the container 102 or the cassette 30. Thereby, the workpiece unit 17 is placed on the upper guide rail 72a.

The same applies to the operation when housing the workpiece unit 17 temporarily placed on the upper guide rail 72a into the container 102 or the cassette 30. In this case, after gripping the workpiece unit 17 temporarily placed on the upper guide rail 72a with the gripping portion of the first conveyance unit 64a, the gripping portion of the first conveyance unit 64a is You can move it inside.

When temporarily placing the workpiece unit 17 on the lower guide rail 72b, as shown in FIG. 7(B), first adjust the height of the temporary placing unit 60 using the lifting mechanism 56, The height is adjusted to the height of the container 102 or cassette 30 in which the workpiece unit 17 is housed.

Next, the gripping portion of the second transport unit 64b is moved into the container 102 or the cassette 30. Then, the frame 15 of the workpiece unit 17 housed in the container 102 or the cassette 30 is gripped by the gripping portion of the second transport unit 64b. Thereafter, the gripping portion of the second transport unit 64b is moved in a direction away from the container 102 or the cassette 30. Thereby, the workpiece unit 17 is placed on the lower guide rail 72b.

The same applies to the operation when housing the workpiece unit 17 temporarily placed on the lower guide rail 72b into the container 102 or the cassette 30. In this case, after the workpiece unit 17 temporarily placed on the lower guide rail 72b is gripped by the gripping part of the second transport unit 64b, the gripping part of the second transport unit 64b is moved to the container 102 or cassette 30. You can move it inside.

The operation involved in conveying the workpiece unit 17 between the cassette 30 and the container 102 is, for example, as follows. First, the height of the temporary storage unit 60 is adjusted by the elevating mechanism 56, and the unprocessed workpiece unit 17 housed in the cassette 30 is pulled out onto the upper guide rail 72a. Next, the temporary storage unit 60 is raised by the lifting mechanism 56, and the processed workpiece unit 17 housed in the container 102 on the mounting table 66 is pulled out to the lower guide rail 72b.

Then, the height of the temporary storage unit 60 is adjusted by the lifting mechanism 56, and the unprocessed workpiece unit 17 temporarily placed on the upper guide rail 72a is accommodated in the container 102 on the mounting table 66. With this operation, the processed workpiece unit 17 is efficiently carried out (recovered) from the container 102 and the unprocessed workpiece unit 17 is carried into the container 102 (distributed). However, the operation related to transporting the workpiece unit 17 is not limited to this. Further, the relationship between the upper guide rail 72a and the lower guide rail 72b may be replaced as necessary.

FIG. 8(A) is a plan view of the two upper guide rails 72a and the like. The upper guide rail 72a and the lower guide rail 72b located on one side in the width direction are fixed to the first side plate _62c1 . Further, the upper guide rail 72a and the lower guide rail 72b located on the other side in the width direction are fixed to the second side plate _62c2 .

At one end of the lower plate 62b in the depth direction, there is a first opening 62e1 vertically penetrating through one side of the lower plate 62b in the width direction, and a first opening _62e1 vertically penetrating through the other side of the lower plate 62b in the width direction. A second opening _62e2 is formed. A part of one end of the first side plate 62c ₁ in the depth direction is inserted into the first opening 62e ₁ , and a part of one end of the second side plate 62c ₂ in the depth direction is inserted into the second opening 62e ₂ . is inserted.

A base portion of a first air actuator 74a and a base portion of a second air actuator 74b are fixed to a region adjacent to the first opening 62e ₁ and the second opening 62e ₂ on the lower surface of the lower plate 62b. A movable part (for example, a piston rod) of the first air actuator 74a is connected to a part of the first side plate 62c ₁ inserted into the first opening 62e ₁ . A movable part (for example, a piston rod) of the second air actuator 74b is connected to a part of the second side plate _62c2 inserted into the second opening _62e2 .

A first guide mechanism 76a and a second guide mechanism 76b are provided at the other end of the lower plate 62b in the depth direction. The first guide mechanism 76a includes a guide rail fixed to the upper surface of the lower plate 62b and long in the width direction, and a slider fixed to the lower side of the first side plate _62c1 and attached to the guide rail so as to be slidable in the width direction. including. The second guide mechanism 76b also includes a guide rail fixed to the upper surface of the lower plate 62b, and a slider fixed to the lower side of the second side plate _62c2 and attached to the guide rail so as to be able to slide in the width direction. include.

Therefore, by changing the distance between the first side plate 62c ₁ and the second side plate 62c ₂ between the first air actuator 74a and the second air actuator 74b, the two upper guide rails 72a can be adjusted while maintaining the parallel state. By changing the interval, the interval between the two lower guide rails 72b can be changed while maintaining a mutually parallel state.

That is, the first side plate 62c ₁ , the first air actuator 74a, the first guide mechanism 76a, the second side plate 62c ₂ , the second air actuator 74b, and the second guide mechanism 76b are spaced apart from each other by the distance between the two upper guide rails 72a. It functions as an interval adjustment mechanism 78 that adjusts the interval between the lower guide rails 72b of books.

The operations of the first air actuator 74a and the second air actuator 74b are controlled by the control device 46 described above. That is, the control device 46 controls the operation of the first air actuator 74a and the second air actuator 74b according to the size of the workpiece unit 17 (workpiece 11), and controls the operation of the two upper guide rails 72a. The interval and the interval between the two lower guide rails 72b are adjusted.

For example, when the diameter of the workpiece 11 is 300 mm, the frame 15 having a width of about 400 mm is used. In this case, the control device 46 controls the distance 72c between the side surfaces of the two upper guide rails 72a (the distance 72c between the side surfaces of the two lower guide rails 72b) to be slightly larger (for example, several mm) than 400 mm. , the first air actuator 74a and the second air actuator 74b are operated.

Further, for example, when the diameter of the workpiece 11 is 200 mm, the frame 15 having a width of about 300 mm is used. In this case, the control device 46 controls the distance 72c between the side surfaces of the two upper guide rails 72a (the distance 72c between the side surfaces of the two lower guide rails 72b) to be slightly larger (for example, several mm) than 300 mm. , the first air actuator 74a and the second air actuator 74b are operated.

FIG. 8(B) is a plan view showing a state in which the interval between the two upper guide rails 72a is narrowed. Note that when the interval between the two upper guide rails 72a is narrowed, the interval between the two lower guide rails 72b is also narrowed. In this way, by adjusting the interval between the two upper guide rails 72a and the interval between the two lower guide rails 72b according to the diameter of the workpiece 11, workpieces 11 of different sizes can be temporarily placed. It becomes possible to temporarily store it in the unit 60. In other words, one temporary storage unit 60 can handle the transportation of workpiece units 17 of a plurality of different sizes.

9(A) is a perspective view showing the top side of the transport vehicle 10 that travels on the transport path 6 and transports the workpiece unit 17, and FIG. 9(B) is a perspective view showing the bottom side of the transport vehicle 10. FIG. As shown in FIGS. 9(A) and 9(B), the transport vehicle 10 includes a plate-shaped frame 82 on which various components are mounted. A pair of axles 84 are arranged at both ends of the front side of the frame 82 . The axle 84 is attached to the lower surface of the frame 82 so that one end protrudes from the side surface of the frame 82 .

A wheel (front wheel) 86 is fixed to one end side of the pair of axles 84, respectively. That is, the pair of wheels 86 are arranged at two positions separated in the width direction of the frame 82 (vehicle width direction). Furthermore, a pair of wheels (rear wheels) 88 are arranged at two positions spaced apart in the width direction at the rear end of the frame 82 . The wheels 88 are, for example, casters that can rotate 360° around a rotation axis extending in the height direction, and are mounted on the lower surface side of the frame 82 . The wheels 86 and the wheels 88 are wheels for traveling when the transport vehicle 10 travels on the transport path 6.

A drive unit 90 that drives a pair of wheels 86 is mounted on the front end of the frame 82 . The drive unit 90 includes a pair of motors 92 each connected to a wheel 86 via an axle 84 or the like. The motor 92 includes a rotating shaft (output shaft) 92a and generates power to rotate the wheels 86.

As shown in FIG. 9(B), a pulley 94 is provided on the other end side of the axle 84. An endless connecting member (not shown) such as a belt or chain is connected between the rotating shaft 92a of the motor 92 and the pulley 94. The rotating shaft 92a of the motor 92, the pulley 94, and the connecting member constitute a power transmission mechanism, and the axle 84 and the motor 92 are connected. As a result, the power (rotational force) generated by the motor 92 is transmitted to the wheels 86, and the wheels 86 rotate.

The drive unit 90 independently controls the rotating directions of the pair of wheels 86 using a pair of motors 92 . By rotating the pair of wheels 86 in the same direction, the transport vehicle 10 moves forward or backward. Furthermore, by rotating the pair of wheels 86 in opposite directions, the transport vehicle 10 can be rotated around a rotation axis extending in the height direction, thereby controlling the direction in which the transport vehicle 10 travels. Note that there are no restrictions on the structures of the wheels 86 and 88. For example, as the wheels 86 and 88, so-called mecanum wheels in which a plurality of inclined barrel-shaped (cylindrical) rotating bodies are attached to the outer circumferential surface that contacts the conveyance path 6 can also be used.

A battery (secondary battery) 96 that supplies power to the motor 92 and the like is connected to the drive unit 90 via power supply wiring (not shown). The battery 96 is attached to the front end of the frame 82, for example, and supplies the motor 92 with electric power for rotating the wheels 86. As the battery 96, a lithium ion battery or the like is used.

FIG. 10 is an enlarged perspective view showing the front end of the transport vehicle 10. As shown in FIG. A pair of terminals (power receiving terminals) 100 connected to the battery 96 via charging wiring (charging wiring) 98 are provided on the lower surface side of the front end of the frame 82 . The pair of terminals 100 are connected, for example, to a power supply terminal installed outside the transport vehicle 10 and receive power used to charge the battery 96. Note that details of charging the battery 96 using the terminal 100 will be described later.

As shown in FIGS. 9A and 9B, a storage area 104 is provided below the frame 82 in which a container (cassette) 102 that accommodates the workpiece unit 17 is stored. The storage area 104 is surrounded by a pair of wheels 86 and a pair of wheels 88, and is located above the lower ends of the wheels 86 and 88. A container 102 that can accommodate one or more workpiece units 17 is arranged in this storage area 104 .

FIG. 11(A) is a perspective view showing the container 102, and FIG. 11(B) is a front view showing the container 102. The container 102 is formed, for example, in the shape of a hexagonal column when viewed from above, and includes a housing section (housing space) 102a in which the workpiece unit 17 can be housed. The accommodating portion 102a is connected to a space outside the container 102 via a slit-shaped opening 102b that opens on one side of the container 102. The workpiece unit 17 is carried into the accommodating part 102a through the opening 102b, and is carried out from the accommodating part 102a through the opening 102b.

As shown in FIG. 11(B), the container 102 is configured to accommodate, for example, two types of workpiece units 17a and workpiece units 17b of different sizes. The accommodating portion 102a of the container 102 is provided with a pair of first guide rails 106 that can hold the workpiece unit 17a and a pair of second guide rails 108 that can hold the workpiece unit 17b.

The pair of first guide rails 106 are fixed to the upper wall 102c of the housing section 102a at a predetermined interval, and have a holding surface 106a that holds the lower surface side of the workpiece unit 17a from below, and a holding surface 106a that holds the lower surface side of the workpiece unit 17a from below. and a side surface 106b that defines the horizontal position of. Further, the pair of second guide rails 108 are fixed to the bottom wall 102d of the housing portion 102a at a predetermined interval, and include a holding surface 108a that holds the lower surface side of the workpiece unit 17b from below. Note that the horizontal position of the workpiece unit 17b is defined by the inner side surface of the container 102.

The distance between the pair of first guide rails 106 is narrower than the distance between the pair of second guide rails 108. Therefore, the pair of first guide rails 106 can hold the workpiece unit 17a smaller than the workpiece unit 17b held by the second guide rail 108. For example, a workpiece 11 with a diameter of about 200 mm (8 inches) is held by a pair of first guide rails 106, and a workpiece 11 with a diameter of about 300 mm (12 inches) is held by a pair of second guide rails 108. be done.

As mentioned above, the container 102 is not configured to accommodate multiple workpiece units 17 of the same type (same size). In this respect, the function and use of container 102 is significantly different from that of cassette 30, which can accommodate multiple workpiece units 17 of the same type.

However, there are no restrictions on the structure of the container 102 or the housing section 102a. For example, the accommodating portion 102a may be configured to accommodate one or more workpiece units 17. Furthermore, the housing section 102a may be configured to accommodate a plurality of workpiece units 17 of the same type.

When the workpiece unit 17 is transported by the transport vehicle 10, the container 102 is stored in the storage area 104, as shown in FIG. 9(A). At this time, the lower surface of the container 102 is positioned above the lower ends of the wheels 86 and 88. Therefore, the container 102 does not come into contact with the conveyance path 6 while the conveyance vehicle 10 is traveling.

An elevating unit (elevating mechanism) 110 for suspending and elevating the container 102 is provided in an area on the upper surface side of the frame 82 located above the storage area 104. The lifting unit 110 lowers the container 102 stored in the storage area 104 and places it on a predetermined placement area. Further, the lifting unit 110 raises the container 102 placed in a predetermined placement area, and stores the container 102 in the storage area 104.

FIG. 12 is a perspective view showing the carrier 10 with the container 102 placed in the placement area A. The lifting unit 110 includes a hanging member 112 whose one end (lower end) is connected to the container 102, and a drive mechanism 114 that winds up and sends out the hanging member 112. Note that the mounting area A is, for example, the upper surface of the mounting table 66 of the loader/unloader 8 (second mounting area A ₂ , see FIG. 3).

As shown in FIG. 12, the elevating unit 110 includes four hanging members 112. As the hanging member 112, for example, a belt having a predetermined width is used. The tips (lower ends) of the four hanging members 112 are connected to four positions on the upper surface side of the container 102, respectively.

When the hanging member 112 is sent out by the drive mechanism 114 while the container 102 is stored in the storage area 104, the container 102 is lowered and placed in the placement area A. Furthermore, when the hanging member 112 is wound up by the drive mechanism 114 while the container 102 is placed in the placement area A, the container 102 is raised and stored in the storage area 104.

When a belt is used as the hanging member 112, as shown in FIG. It is preferable to adjust the orientation of the belt with respect to the container 102 so that the width direction of the belt is along the belt. Since the container 102 is difficult to swing in the width direction of the belt, in this embodiment, the possibility that the workpiece unit 17 will pop out from the opening 102b while the container 102 is being raised or lowered can be suppressed.

The direction of the belt with respect to the container 102 is such that the width direction of the belt is along the direction in which the workpiece unit 17 passes through the opening 102b when the workpiece unit 17 is carried into the storage section 102a. It may be adjusted to In this embodiment, the belt and the container 102 are connected such that the width direction of the belt is arranged along a direction perpendicular to a plane including the opening 102b of the container 102. Note that as the hanging member 112, a member other than the belt, such as a wire rope that can be wound up and sent out, may be used.

As shown in FIG. 9(B), a plurality of contact members 116 are provided on the lower surface side of the frame 82 and contact the upper surface side of the container 102. Each of the plurality of contact members 116 is formed into a columnar shape having approximately the same height, and is fixed to the frame 82 so as to protrude downward from the lower surface of the frame 82. When the container 102 is stored in the storage area 104, the upper surface side of the container 102 contacts the lower ends of the plurality of contact members 116 and pushes each contact member 116 upward.

The contact member 116 is formed of, for example, an elastic member that is elastically deformed when the container 102 is pressed against it. That is, when the contact member 116 is pushed by the container 102 stored in the storage area 104, it deforms along the shape of the upper surface of the container 102, and is deformed by an elastic body that generates a restoring force that pushes the container 102 downward. configured.

When an elastic member is used for the contact member 116, for example, the impact when the container 102 contacts the contact member 116 is alleviated, and the container 102 and the workpiece unit 17 inside the container 102 are less likely to be damaged. Furthermore, when the transport vehicle 10 travels along the transport path 6, the contact member 116 acts as a buffer material, making it difficult for the vibrations of the frame 82 to be transmitted to the container 102 and the workpiece unit 17.

As the contact member 116, for example, a columnar member made of rubber (urethane rubber, silicone rubber, etc.), sponge, etc. can be used. In particular, by using the contact member 116 made of rubber that exerts a large frictional force with the container 102, displacement of the container 102 during transportation can be suppressed. Note that the entire contact member 116 does not necessarily need to be made of an elastic member, and it is sufficient that at least the area (lower end portion) of the contact member 116 that contacts the container 102 is made of an elastic member.

Further, it is preferable that the contact member 116 contacts the upper surface side of the container 102 at three or more positions. In this embodiment, three columnar contact members 116 are provided on the frame 82, as shown in FIG. 9(B). In this case, since the upper surface of the container 102 is arranged along a plane including the lower ends of the three contact members 116, the container 102 becomes difficult to tilt. However, conditions such as the shape, number, and arrangement of the contact members 116 may be changed arbitrarily. For example, the frame 82 may be provided with a pair of linear (band-shaped) contact members 116 that are arranged substantially parallel to each other.

Moreover, in order to make it difficult for the vibration of the frame 82 to be transmitted to the container 102, the container 102 may be connected to the hanging member 112 via an elastic member. FIG. 13 is a perspective view showing the transport vehicle 10 in which the container 102 is connected to a hanging member 112 via an elastic member (expandable member) 118. Note that in this case, the contact member 116 may be omitted.

An elastic member 118 is provided between the tip side (lower end side) of the hanging member 112 and the container 102. The elastic member 118 is a member that expands and contracts along the length direction of the hanging member 112 when the hanging member 112 shakes, and is made of an elastic body that can be expanded and contracted, such as rubber or a spring. Further, as the elastic member 118, an expandable component such as an expansion joint can also be used.

When the container 102 is stored in the storage area 104, the amount of winding of the hanging member 112 is adjusted so that the upper surface side of the container 102 does not come into contact with the frame 82 or the contact member 116. Thus, for example, even if the frame 82 vibrates, the vibration is not directly transmitted to the container 102. Further, vibrations transmitted from the frame 82 via the lifting unit 110 and the hanging member 112 are relaxed by the expansion and contraction of the elastic member 118, and therefore are difficult to be transmitted to the container 102. In this way, the elastic member 118 functions as a vibration isolator.

However, when the contact member 116 is provided on the lower surface side of the frame 82, the amount of winding of the hanging member 112 is adjusted such that the container 102 is stored in the storage area 104 while being in contact with the contact member 116. May be adjusted. In this case, the transmission of vibrations from the frame 82 to the container 102 is alleviated by the contact member 116, and the transmission of vibrations from the hanging member 112 to the container 102 is alleviated by the elastic member 118.

A cover 120 is provided below the rear end of the frame 82 . The cover 120 covers the opening 102b of the container 102 (see FIG. 11(A)) when the container 102 is stored in the storage area 104. When the opening 102b is covered by the cover 120, foreign matter can be prevented from entering the accommodating portion 102a of the container 102 while the transport vehicle 10 is running, and adhesion of the foreign matter to the workpiece unit 17 can be prevented.

Further, even if the container 102 is tilted or vibrates while the transport vehicle 10 is running, the cover 120 prevents the workpiece unit 17 from jumping out from the opening 102b. Note that details of the structure and operation of the cover 120 will be described later (see FIGS. 17, 18(A), and 18(B)).

A pair of first sensors 122 are provided at the front and rear ends of the frame 82 . That is, the pair of first sensors 122 are provided at two positions separated in the length direction (vehicle length direction) of the frame 82. Furthermore, a pair of second sensors 124 are provided at both end portions of the frame 82. That is, the pair of second sensors 124 are arranged at two positions separated in the width direction of the frame 82 (vehicle width direction).

The first sensor 122 and the second sensor 124 are each mounted so as to face the transport path 6 along which the transport vehicle 10 travels, and detect marks provided on the transport path 6. Based on the detection results of the marks by the first sensor 122 and the second sensor 124, the traveling, turning, stopping, etc. of the transport vehicle 10 are controlled. Details of the control of the transport vehicle 10 using the first sensor 122 and the second sensor 124 will be described later.

The specific positions where the first sensor 122 and the second sensor 124 are installed are adjusted according to the specifications of the transport path 6 along which the transport vehicle 10 travels. For example, the pair of first sensors 122 are each mounted near the center of the frame 82 in the width direction between the front end and the rear end of the frame 82 . Further, the pair of second sensors 124 are each mounted near the center in the length direction of the frame 82 among both end portions of the frame 82 .

Note that the pair of second sensors 124 may be fixed to the frame 82 so as to be lined up on a straight line passing through the pair of wheels 86. For example, the pair of second sensors 124 are provided outside the pair of wheels 86 so as to sandwich the pair of wheels 86 in the width direction of the frame 82 . Further, the pair of second sensors 124 may be provided inside the pair of wheels 86 so as to be sandwiched between the pair of wheels 86 in the width direction of the frame 82.

In this way, by arranging the pair of second sensors 124 on a straight line passing through the pair of wheels 86, the pair of second sensors 124 can detect this mark at the same time as the wheel 86 passes the mark to be detected. can be detected by the pair of second sensors 124. Therefore, if the guided vehicle 10 is turned or stopped at the timing when this mark is detected, the traveling of the guided vehicle 10 can be appropriately controlled without any correction.

On the other hand, when the pair of second sensors 124 is away from the straight line passing through the pair of wheels 86, in addition to the timing at which the mark is detected, the pair of second sensors 124 and the pair of wheels 86 (the pair of axles 84), the traveling speed of the guided vehicle 10, etc. to control the timing of turning and stopping of the guided vehicle 10.

Further, as shown in FIG. 10, a third sensor 126 is provided at the front end of the frame 82 to detect when the guided vehicle 10 has collided with an obstacle. For example, a pair of third sensors 126 are attached to both ends of the front end of the frame 82. As the third sensor 126, for example, a push button switch is used.

When the front end of the guided vehicle 10 collides with an obstacle, the third sensor 126 is activated and the collision of the guided vehicle 10 is detected. Then, when a collision of the guided vehicle 10 is detected by the third sensor 126, the guided vehicle 10 stops operating. Note that there are no restrictions on the structure or type of the third sensor 126 as long as it can detect a collision of the transport vehicle 10.

For example, the transport vehicle 10 may be covered with a flexible exterior cover that can reduce shock caused by a collision or the like. In this case, when the exterior cover covering the front end side of the guided vehicle 10 collides with an obstacle, the exterior cover deforms and contacts the third sensor 126, and the collision of the guided vehicle 10 is detected.

As shown in FIGS. 9(A) and 9(B), a plate-shaped support 128 fixed to the frame 82 is provided above the elevating unit 110. A control section (control unit) 130 that controls the operation of the transport vehicle 10 is fixed to the upper surface of the support base 128. The control unit 130 is connected to each component of the transport vehicle 10 (drive unit 90, lifting unit 110, first sensor 122, second sensor 124, third sensor 126, etc.), and controls the operation of each component. do.

The control unit 130 is configured by a computer including, for example, a processing device such as a CPU (Central Processing Unit), a main storage device such as a DRAM (Dynamic Random Access Memory), and an auxiliary storage device such as a flash memory. . The functions of the control unit 130 are realized by operating the processing device and the like according to software stored in the auxiliary storage device.

Further, on the support base 128, there is a receiver 132 that receives signals (information) from the outside and sends them to the control unit 130, and a transmitter 134 that sends the signals (information) received from the control unit 130 to the outside. is fixed. The receiver 132 and the transmitter 134 are each connected to the control unit 130.

The receiver 132 receives, for example, a signal transmitted from the control unit 12 of the transport system 2 and sends it to the control unit 130. The control unit 130 controls the operation of the guided vehicle 10 based on a signal received from the receiver 132, for example. Further, the control unit 130 generates a notification signal and sends it to the transmitter 134, for example. The transmitter 134 transmits, for example, a signal received from the control unit 130 to the control unit 12 of the transport system 2 (see FIG. 2).

Note that each component of the transport vehicle 10 (elevating unit 110, first sensor 122, second sensor 124, third sensor 126, control unit 130, receiver 132, transmitter 134, etc.) is connected via power supply wiring. The device is connected to a battery 96, and is operated by power supplied from the battery 96.

FIG. 14(A) is a plan view showing an example of the configuration of the lifting unit 110, and FIG. 14(B) is a side view showing an example of the configuration of the lifting unit 110. As described above, the lifting unit 110 includes a drive mechanism 114 that winds up and sends out the plurality of hanging members 112. The drive mechanism 114 includes a motor 142 having a rotating shaft (output shaft) 142a.

The motor 142 generates power used for winding up and sending out the hanging member 112 by rotating the rotating shaft 142a. A first rotating shaft (first shaft) 144a and a second rotating shaft (second shaft) 144b, which are arranged generally parallel to each other, are provided at two positions sandwiching the motor 142 therebetween.

A pulley 146 is provided on one end side of the first rotating shaft 144a. An endless connecting member 148 such as a belt or chain is connected between the rotating shaft 142a of the motor 142 and the pulley 146. A power transmission mechanism is configured by the rotating shaft 142a of the motor 142, the pulley 146, and the connecting member 148, and the motor 142 and the first rotating shaft 144a are connected. On the other hand, a pulley or the like for realizing connection with the motor 142 is not provided on one end side of the second rotating shaft 144b.

A pulley 150a is provided on the other end side of the first rotating shaft 144a, and a pulley 150b having the same diameter as the pulley 150a is provided on the other end side of the second rotating shaft 144b. An endless connecting member 152 such as a belt or chain is hung between the pulley 150a and the pulley 150b. The pulley 150a, the pulley 150b, and the connecting member 152 constitute a power transmission mechanism, and the first rotating shaft 144a and the second rotating shaft 144b are connected.

A cylindrical reel 154a around which the hanging member 112 is wound is fixed to each end of the first rotating shaft 144a. Furthermore, cylindrical rollers 156a that support the hanging members 112 are rotatably arranged at two positions outside each reel 154a (on the opposite side from the motor 142) and below each reel 154a. There is. The rotation axis of each roller 156a is generally parallel to the first rotation axis 144a.

On the other hand, cylindrical reels 154b around which the hanging members 112 are wound are fixed to both ends of the second rotating shaft 144b, respectively. Furthermore, cylindrical rollers 156b that support the hanging members 112 are rotatably arranged at two positions outside each reel 154b (on the opposite side from the motor 142) and below each reel 154b. There is. The rotation axis of each roller 156b is generally parallel to the second rotation axis 144b.

The base end side of the hanging member 112 is fixed to the reel 154a and the reel 154b, respectively. The hanging member 112 fixed to the reel 154a hangs down while contacting the outer portion of the roller 156a. Further, the hanging member 112 fixed to the reel 154b hangs down while contacting the outer portion of the roller 156b.

Note that the hanging member 112 fixed to the reel 154a passes above the reel 154a and is supported by the roller 156a, as shown in FIG. 14(B). On the other hand, the hanging member 112 fixed to the reel 154b passes under the reel 154b and is supported by the roller 156b.

When the rotating shaft 142a of the motor 142 is rotated in a first direction (the direction indicated by arrow _C1 in FIG. 14(B) in the direction shown by arrow _C2 ). Thereby, the hanging member 112 is sent out from the reel 154a via the roller 156a.

Further, the torque of the first rotating shaft 144a is transmitted to the second rotating shaft 144b by the connecting member 152, and the reel 154b fixed to the second rotating shaft 144b sends out the hanging member 112 (in the direction shown by the arrow in FIG. 14(B)). C ₃ ). Thereby, the hanging member 112 is sent out from the reel 154b via the roller 156b.

On the other hand, when the rotating shaft 142a of the motor 142 is rotated in a second direction opposite to the first direction (the direction indicated by arrow _D1 in FIG. 14(B)), the reel fixed to the first rotating shaft 144a rotates. 154a rotates in the direction of winding up the hanging member 112 (the direction shown by arrow _D2 in FIG. 14(B)). Thereby, the hanging member 112 is wound onto the reel 154a via the roller 156a.

Further, the torque of the first rotating shaft 144a is transmitted to the second rotating shaft 144b by the connecting member 152, and the reel 154b fixed to the second rotating shaft 144b moves in the direction of winding up the hanging member 112 (FIG. 14(B)). (direction shown by arrow _D3 ). Thereby, the hanging member 112 is wound onto the reel 154b via the roller 156b.

When each hanging member 112 is sent out from the drive mechanism 114, the container 102 connected to the tip side of the hanging member 112 is lowered. Thereby, the container 102 can be placed in the placement area A (see FIG. 12). Moreover, when each hanging member 112 is wound up by the drive mechanism 114, the container 102 connected to the tip side of the hanging member 112 rises. Thereby, the container 102 can be stored in the storage area 104 of the transport vehicle 10 (see FIG. 9(A)).

Note that it is also possible to use the elevating unit 110 equipped with another drive mechanism having a different structure from the drive mechanism 114 described above. FIG. 15(A) is a plan view showing another example of the configuration of the lifting unit 110, and FIG. 15(B) is a side view showing another example of the configuration of the lifting unit 110. The lifting unit 110 shown in FIGS. 15(A) and 15(B) is equipped with a driving mechanism 162 instead of the driving mechanism 114 described above.

The drive mechanism 162 includes a motor 164 including a rotating shaft (output shaft) 164a, a first rotating shaft (first shaft) 166a, a second rotating shaft (second shaft) 166b, and a third rotating shaft that are arranged generally parallel to each other. A rotating shaft (third shaft) 166c is included. The first rotating shaft 166a is arranged between the second rotating shaft 166b and the third rotating shaft 166c.

The motor 164 is disposed, for example, between a first rotating shaft 166a and a second rotating shaft 166b, and generates power used for winding up and feeding out the hanging member 112 by rotating the rotating shaft 164a. However, the motor 164 may be arranged between the first rotating shaft 166a and the third rotating shaft 166c.

A pulley 168 is provided on one end side of the first rotating shaft 166a. An endless connecting member 170 such as a belt or chain is hung between the rotating shaft 164a of the motor 164 and the pulley 168. A power transmission mechanism is configured by the rotating shaft 164a of the motor 164, the pulley 168, and the connecting member 170, and the motor 164 and the first rotating shaft 166a are connected.

A plurality of cylindrical reels 172 around which the hanging members 112 are wound are fixed to the first rotating shaft 166a. Specifically, a pair of reels 172 are fixed to both ends of the first rotating shaft 166a. Two hanging members 112 are fixed to each reel 172 and wound in the same direction.

FIG. 16(A) is a plan view showing the reel 172, and FIG. 16(B) is a side view showing the reel 172. The lifting unit 110 includes a cylindrical fixing member 174 for fixing the hanging member 112 to the reel 172, and the two hanging members 112 are collectively fixed to the reel 172 by this fixing member 174. Ru.

As shown in FIG. 16(B), a groove (recess) 172a is provided in a part of the outer circumference of the reel 172 along the rotation axis of the reel 172 (that is, the first rotation axis 166a). The inner surface of the groove 172a is formed into a curved shape. Further, both ends of the groove 172a reach both ends of the reel 172 in the rotation axis direction. The two hanging members 112 are arranged in the same direction so that their base ends overlap with this groove 172a.

The fixing member 174 has a curved outer peripheral surface corresponding to the shape of the inner surface of the groove 172a. The fixing member 174 is arranged such that the base ends of the two hanging members 112 overlap with the groove 172a, and the fixing member 174 moves the base ends of the two hanging members 112 toward the inner surface of the groove 172a. It is fitted into the groove 172a by pressing it. As a result, the base ends of the two hanging members 112 are sandwiched between the inner surface of the groove 172a and the outer peripheral surface of the fixing member 174, and are fixed to the reel 172.

As shown in FIG. 16(A), a pair of protrusions (convex parts) are provided on the outer circumference of the reel 172 so as to sandwich the two hanging members 112 fixed to the reel 172 in the width direction. 172b is provided. The pair of protrusions 172b function as a guide to prevent the hanging member 112 from shifting in the width direction. By rotating the reel 172 configured in this manner, the two hanging members 112 can be wound up or the two hanging members 112 can be sent out.

As shown in FIGS. 15(A) and 15(B), one of the two hanging members 112 fixed to the reel 172 hangs down while contacting the second rotating shaft 166b. Further, the other of the two hanging members 112 fixed to the reel 172 hangs down while contacting the third rotating shaft 166c.

The second rotating shaft 166b and the third rotating shaft 166c are each supported in a state where they can be easily rotated according to a force applied from the outside, and their outer circumferential surfaces are in contact with the hanging member 112. A pair of guides 176 that prevent the suspension member 112 from shifting in the width direction are provided on both sides of the area where the suspension member 112 contacts the second rotation shaft 166b and the third rotation shaft 166c.

When the rotating shaft 164a of the motor 164 is rotated in the first direction (the direction indicated by arrow _E1 in FIG. 15(B)), the reel 172 moves in the direction in which the hanging member 112 is sent out (FIGS. 15(B) and 16(B)). ) in the direction shown by arrow _E2 ). As a result, the two hanging members 112 are sent out from the reel 172 via the second rotating shaft 166b and the third rotating shaft 166c, and as a result, the container 102 connected to the hanging members 112 is lowered.

On the other hand, when the rotating shaft 164a of the motor 164 is rotated in a second direction opposite to the first direction (direction indicated by arrow _F1 in FIG. 15(B)), the reel 172 winds up the hanging member 112. (the direction shown by arrow _F2 in FIGS. 15(B) and 16(B)). As a result, the two hanging members 112 are wound onto the reel 172 via the second rotating shaft 166b and the third rotating shaft 166c, and as a result, the container 102 connected to the hanging members 112 rises.

As described above, the drive mechanism 162 shown in FIG. 15(A) has two reels 172 fixed to the first rotating shaft 166a, and two hanging members 112 fixed to each of the two reels 172. has been done. Therefore, the feeding and winding of the four hanging members 112 are controlled by the rotation of the first rotating shaft 166a. Thereby, the number of parts constituting the drive mechanism 114 can be reduced, making it possible to reduce the weight of the transport vehicle 10, reduce the possibility of failure, and reduce costs.

By using the lifting unit 110 as described above, the container 102 in which the workpiece unit 17 is housed can be raised and lowered between the storage area 104 and the mounting area A below this storage area 104. I can do it. The details of the lifting unit 110 may be changed within a range that allows the container 102 to be raised and lowered appropriately.

Note that the second rotating shaft 166b and the third rotating shaft 166c may be fixed in a non-rotating state. In this case, the hanging member 112 is sent out from the reel 172 or wound onto the reel 172 while sliding on the outer peripheral surface of the second rotating shaft 166b or the third rotating shaft 166c.

FIG. 17 is an enlarged perspective view showing the cover 120. The cover 120 is disposed at the rear end of the lower surface of the frame 82 so as to face one side (rear) of the container 102 stored in the storage area 104. The cover 120 includes a lid portion 182 that is rotatably coupled to the frame 82. The lid portion 182 is formed in a shape and size that can cover the opening 102b of the container 102 (see FIG. 18(B)). Further, a plurality of contact parts 184 are fixed to the upper part of the lid part 182 so as to be in contact with the upper surface side of the container 102.

When the container 102 rises toward the storage area 104, the upper surface side of the container 102 contacts the lower end of the contact portion 184 and pushes the contact portion 184 upward. As a result, the lid 182 moves (rotates) in a direction approaching the container 102, and the opening 102b of the container 102 is covered by the lid 182.

FIG. 18(A) is a side view of the cover 120 with no container 102 stored in the storage area 104, and FIG. 18(B) is a side view of the cover 120 with the container 102 stored in the storage area 104. FIG. A fixed block 186 is fixed to the lower surface of the frame 82. A connecting block (L-shaped block) 188, which is L-shaped when viewed from the width direction (vehicle width direction) of the frame 82, is rotatably connected to the fixed block 186.

The connecting block 188 includes an upper connecting portion 188a (on the frame 82 side) and a fixing portion 188b below the connecting portion 188a. The connecting portion 188a is provided with a through hole that penetrates in the width direction of the frame 82, and a connecting shaft 190 fixed to the fixed block 186 is inserted into this through hole. Thereby, the connecting block 188 is connected to the fixed block 186 in a state where it can rotate around the connecting shaft 190.

The lid part 182 is fixed to the storage area 104 side (front side) of the fixed part 188b. Note that since the connecting shaft 190 inserted into the through hole is generally parallel to the width direction of the frame 82, the lid portion 182 rotates together with the connecting block 188 along a plane that is generally perpendicular to the width direction of the frame 82. I will do it.

The lid portion 182 includes a plate member 182a fixed to a fixed portion 188b of the connecting block 188. A flexible member 182b is provided on the storage area 104 side (front side) surface of the plate member 182a. The flexible member 182b is formed in a shape and size that can cover the entire opening 102b of the container 102.

Further, a contact portion 184 is arranged on the storage area 104 side (front side) of the plate member 182a. The contact portion 184 includes, for example, a fixing member 184a fixed to the plate member 182a above the flexible member 182b, and a roller 184b supported by a portion of the fixing member 184a on the storage area 104 side (front side). There is.

The roller 184b is formed of an elastic member such as rubber, and is supported by the fixed member 184a so as to be rotatable around a rotation axis that is generally parallel to the width direction of the frame 82. Further, the lower end of the roller 184b is positioned below the lower end of the fixing member 184a. Therefore, when the upper surface side of the container 102 is in contact with the roller 184b, the roller 184b also rotates in accordance with the rotation of the lid portion 182.

For example, when the container 102 rises toward the storage area 104, the upper surface side of the container 102 contacts the roller 184b of the contact portion 184, pushing the contact portion 184 upward. Then, the cover 120 rotates around the connecting shaft 190 in a direction in which its lower end approaches the container 102 (in the direction indicated by arrow G in FIG. The front surface thereof is approximately parallel to the lower surface of the frame 82. Then, the flexible member 182b of the lid part 182 comes into contact with one side (rear part) of the container 102 and closes the opening 102b.

Note that if the opening 102b of the container 102 stored in the storage area 104 remains exposed, foreign matter such as dust may enter the accommodating portion 102a of the container 102. In particular, while the conveyance vehicle 10 is running, static electricity generated by friction between the conveyance path 6 and the wheels 88 attracts, for example, a very small amount of foreign matter in the clean room where the conveyance path 6 is installed toward the conveyance vehicle 10. There is a high possibility that the foreign matter will enter the housing portion 102a.

Therefore, in the present embodiment, when the container 102 is stored in the storage area 104, the opening 102b of the container 102 is covered with the cover 120, so that foreign matter does not enter the storage part 102a of the container 102 while the transport vehicle 10 is traveling. I try not to get into it. Further, even if the container 102 is tilted or vibrates while the transport vehicle 10 is running, the workpiece unit 17 is prevented from jumping out from the container 102.

On the other hand, while the container 102 is being raised and lowered by the lifting unit 110, static electricity is not generated due to friction between the transport path 6 and the wheels 88, and foreign matter is not rolled up by the movement of the transport vehicle 10. Therefore, even if the opening 102b of the container 102 is not covered while the container 102 is being moved up and down, there is a low possibility that foreign matter will enter the accommodating portion 102a.

Further, a flexible member 182b is provided in a region of the cover 120 corresponding to the opening 102b. For example, the flexible member 182b deforms when the workpiece unit 17 housed in the container 102 collides with the workpiece unit 17, thereby alleviating the impact acting on the workpiece unit 17. That is, the flexible member 182b functions as a cushioning material. This flexible member 182b makes it difficult for the workpiece 11 included in the workpiece unit 17 to be damaged.

There are no restrictions on the material, structure, etc. of the flexible member 182b. For example, it is preferable to use a flexible member 182b that can reduce the impact to such an extent that the workpiece 11 of the workpiece unit 17 is not damaged. More specifically, as the flexible member 182b, a member made of sponge, rubber, cotton, cloth, etc., styrofoam, foam cushioning material, etc. can be used.

Particularly, since sponge is flexible and easily deformed, if a sponge is used as the flexible member 182b, the impact acting on the workpiece unit 17 can be effectively alleviated. Further, when a sponge is used as the flexible member 182b, the flexible member 182b is appropriately deformed along the shape of the side surface of the container 102, and the opening 102b is reliably closed.

As shown in FIG. 18A, the weight of each part of the cover 120 is such that when the container 102 is lowered from the storage area 104, the lower end of the cover 120 moves away from the storage area 104 due to its own weight (see FIG. 18A). It is adjusted so that it rotates in a direction opposite to the direction indicated by arrow G in (B). Therefore, when the container 102 is not stored in the storage area 104, the surface of the plate member 182a on the storage area 104 side (front side) is inclined with respect to the lower surface of the frame 82.

Note that there is no limit to the number and arrangement of covers 120. For example, a cover 120 that contacts the side surface of the container 102 can be provided at the front end of the frame 82 in addition to the rear end of the frame 82. In this case, when the container 102 is stored in the storage area 104, the two sides (front and rear) of the container 102 are sandwiched between the pair of covers 120. This suppresses shaking (vibration) of the container 102. In this case, it is particularly easy to suppress the shaking (vibration) of the container 102 in the longitudinal direction (front-back direction) of the frame 82.

Further, covers 120 may be provided at the front end, rear end, and both side ends of the frame 82, respectively. In this case, four sides (front, rear, both sides) of the container 102 stored in the storage area 104 are in contact with the cover 120, respectively. This suppresses shaking (vibration) of the container 102. In this case, it is particularly easy to suppress the shaking (vibration) of the container 102 in the length direction (back and forth direction) and width direction of the frame 82.

When the container 102 is raised and lowered, the rotation of the motor 142 and the like of the raising and lowering unit 110 is controlled by the control unit 130. FIG. 19(A) is a side view showing the carrier 10 when the container 102 stored in the storage area 104 is placed in the placement area A. When placing the container 102 on the placing area A, the rotation direction and rotation speed of the motor 142 are controlled so that the hanging member 112 is sent out from the drive mechanism 114 at an arbitrary speed. For example, the control unit 130 controls the current value of the motor 142 so that the rotation speed of the motor 142 is maintained.

FIG. 19(B) is a graph showing the current value of the motor 142 when the container 102 is lowered. When the container 102 descends and reaches the placement area A, the container 102 is supported in the placement area A from below. As a result, the load acting on the rotating shaft 142a of the motor 142 is weakened, and the current value of the motor 142 is reduced.

The control unit 130 stops the rotation of the motor 142 based on the change in the current value of the motor 142 when the container 102 is placed on the placement area A. For example, a predetermined threshold value is stored in advance in the control unit 130, and the control unit 130 compares this threshold value with the current value of the motor 142. Then, if the current value of the motor 142 is less than or equal to the threshold value (or less than the threshold value), the control unit 130 stops the rotation of the motor 142. This completes the placement of the container 102 in the placement area A.

FIG. 20(A) is a side view showing the carrier 10 when the container 102 placed in the placement area A is stored in the storage area 104. When storing the container 102 in the storage area 104, the rotation direction and rotation speed of the motor 142 are controlled so that the hanging member 112 is wound up at an arbitrary speed by the drive mechanism 114. For example, the control unit 130 controls the current value of the motor 142 so that the rotation speed of the motor 142 is maintained.

FIG. 20(B) is a graph showing the current value of the motor 142 when the container 102 is raised. When the container 102 rises and reaches the storage area 104, the container 102 is pressed against a plurality of contact members 116 provided on the lower surface side of the frame 82. As a result, the load acting on the rotating shaft 142a of the motor 142 becomes stronger, and the current value of the motor 142 increases.

The control unit 130 stops the rotation of the motor 142 based on the change in the current value of the motor 142 when the container 102 contacts the contact member 116 . For example, a predetermined threshold value is stored in advance in the control unit 130, and the control unit 130 compares this threshold value with the current value of the motor 142. Then, when the current value of the motor 142 is equal to or greater than the threshold value (or exceeds the threshold value), the control unit 130 stops the rotation of the motor 142. This completes storage of the container 102 in the storage area 104.

As described above, when controlling the operation of the motor 142 when raising and lowering the container 102 based on the current value of the motor 142, a sensor for detecting the container 102 is installed in the storage area 104 or the placement area A. There is no need to provide one. This simplifies the structures of the transport vehicle 10, the mounting area A, and the like. Furthermore, the weight of the transport vehicle 10 is also reduced.

However, there is no limit to the method of controlling the motor 142. For example, a sensor (such as a push-button switch) may be provided on the bottom side of the frame 82 or on the top side of the placement area A to detect that the container 102 is placed. In this case, when the sensor detects the container 102, the control unit 130 stops the rotation of the motor 142. Note that detection using a sensor and detection based on the current value of the motor 142 can also be used together.

Note that when detecting that the container 102 is placed on the placement area A only on the placement area A side (for example, the loader/unloader 8 side), the control unit 12 of the conveyance system 2 (see FIG. 2) ) issues an instruction to the transport vehicle 10 to stop the rotation of the motor 142 after being notified from the placement area A side that the container 102 has been placed in the placement area A. Then, the control unit 130 of the transport vehicle 10 stops the rotation of the motor 142.

On the other hand, as described above, when the conveyance vehicle 10 side detects that the container 102 is placed in the placement area A, the control unit 130 of the conveyance vehicle 10 controls the control unit of the conveyance system 2. The motor 142 stops rotating at its own discretion without waiting for an instruction from the motor 142. Thereby, the time lag from when the container 102 is placed in the placement area A until the rotation of the motor 142 is stopped can be reduced.

Further, the vertical speed of the container 102 does not necessarily have to be constant. For example, just before the container 102 is placed in the placement area A or stored in the storage area 104, the rotation speed of the motor 142 may be lowered to decelerate the container 102. Thereby, the impact when the container 102 comes into contact with the placement area A or the contact member 116 can be alleviated. In this case, the control unit 130 may monitor the height of the container 102 based on, for example, the amount of rotation of the motor 142.

When the container 102 is placed in the placement area A, the control unit 130 generates a signal to notify that the placement of the container 102 is completed, and transmits the signal from the transmitter 134 to the control unit 12 of the transport system 2. Send. Furthermore, when the container 102 is stored in the storage area 104, the control unit 130 generates a signal to notify that storage of the container 102 is completed, and transmits the signal from the transmitter 134 to the control unit 12 of the transport system 2 (see FIG. (see 2). Note that these signals may be sent to the processing device 4.

FIG. 21 is a perspective view showing the appearance of the processing device 4 and the conveyance path 6, and FIG. 22 is a perspective view showing the internal structure of the processing device 4. Note that in FIG. 21, some of the components are shown as functional blocks. As shown in FIGS. 21 and 22, the processing device 4 includes a base 202 that supports each component.

A recess 202a is formed at a corner of the base 202, and an elevating table 204 that is raised and lowered by an elevating mechanism (not shown) is disposed in this recess 202a. The container 102 of the transport vehicle 10 described above is placed on the placement area A on the upper surface of the lifting table 204. Note that a plurality of position defining members (not shown) are provided on the upper surface of the lifting platform 204 to define the horizontal position of the container 102. It is placed on the placement area A determined by .

Each position defining member includes, for example, a curved guide surface that guides the container 102 that is descending toward the placement area A, and is fixed at a position corresponding to the side surface of the container 102 on the lifting table 204. When lowering the container 102 toward the lifting table 204, the container 102 is guided by the guide surfaces of each position defining member. Therefore, even if the container 102 swings in the horizontal direction, the container 102 can be placed on the placement area A.

For example, in a region below the mounting region A of the lifting table 204, a storage region is formed in which the workpiece unit 17 after processing can be temporarily stored. The workpiece unit 17 processed by the processing device 4 is stored in this storage area until it is ready to be transported to the container 102 of the transport vehicle 10. In addition to the storage area, an irradiation unit that irradiates ultraviolet rays, a detection unit that detects the position of the notch, a reading unit that reads barcodes, etc. are arranged in the area below the mounting area A of the lifting table 204. It may be done.

A recess 202b that is long in the _X2 axis direction (back and forth direction, processing feed direction) is formed on the side of the recess 202a. A ball screw-type X-axis moving mechanism (processing feed unit) 206 that moves an X-axis moving table (not shown) in the _X2- axis direction is arranged in the recess 202b. A table cover 206a is arranged above the X-axis moving table. Further, bellows-shaped dust-proof and drip-proof covers 206b are attached to the front and rear of the table cover 206a.

A chuck table 208 that holds the workpiece 11 is arranged above the X-axis moving table in such a manner that it is exposed from the table cover 206a. The chuck table 208 is connected to a rotational drive source (not shown) such as a motor, and rotates around a rotation axis that is generally parallel to the Z _2- axis direction (vertical direction, cutting feed direction). Furthermore, the chuck table 208 is moved in the X2 _- axis direction by the above-mentioned X-axis moving mechanism 206 (processing feed).

The upper surface of the chuck table 208 is a holding surface 208a for holding the workpiece 11 via the tape 13. The holding surface 208a is connected to a suction source (not shown) via a suction path (not shown) formed inside the chuck table 208. Additionally, four clamps 210 are provided around the chuck table 208 for fixing the frame 15 that supports the workpiece 11 from all sides.

Above the recess 202b, a pair of guide rails 212 are provided that approach and move away from each other while maintaining a parallel state in the Y _-2 axis direction (left-right direction, index feed direction). The pair of guide rails 212 each include a support surface that supports the frame 15 from below and a side surface that is generally perpendicular to the support surface. ) in the X2 _- axis direction and align it to the specified position.

A gate-shaped first support structure 214 is arranged above the base 202 so as to straddle the recess 202b. A first rail 216 along the Y _- axis direction is fixed to the front surface of the first support structure 214 (the surface on the guide rail 212 side), and a first rail 216 is fixed to the first rail 216 via a first moving mechanism 218 or the like. A first holding unit 220 is connected to the first holding unit 220.

The first holding unit 220 , for example, comes into contact with the upper surface of the frame 15 and attracts the frame 15 , is raised and lowered by the first moving mechanism 218 , and moves along the first rail 216 in the Y _-2 axis direction. A gripping mechanism 220a for gripping the frame 15 is provided on the lifting platform 204 side of the first holding unit 220.

For example, if the frame 15 is gripped by the gripping mechanism 220a and the first holding unit 220 is moved in the _Y direction, the workpiece unit 17 is pulled out from the container 102 in the placement area A onto the pair of guide rails 212, Alternatively, the workpiece unit 17 on the pair of guide rails 212 can be inserted into the container 102 in the placement area A. Note that after the frame 15 is aligned with the pair of guide rails 212, the frame 15 is sucked by the first holding unit 220, and the workpiece unit 17 is carried into the chuck table 208.

Further, on the front surface of the first support structure 214, a second rail 222 extending along the Y _- axis direction is fixed above the first rail 216. A second holding unit 226 is connected to this second rail 222 via a second moving mechanism 224 and the like. The second holding unit 226 , for example, comes into contact with the upper surface of the frame 15 to attract the frame 15 , is raised and lowered by the second moving mechanism 224 , and moves along the second rail 222 in the Y _- axis direction.

A gate-shaped second support structure 228 is arranged behind the first support structure 214 . On the front surface of the second support structure 228 (the surface on the first support structure 214 side), two sets of processing units (cutting units) are connected via Y-axis and Z-axis movement mechanisms (indexing feed unit, cutting feed unit) 230, respectively. 232 is provided. Each processing unit 232 is moved in the Y 2-axis direction (index feed) and in the Z ₂ -axis direction (cut feed) by the corresponding Y-axis and Z _- axis movement mechanism 230.

Each processing unit 232 is equipped with a spindle (not shown) serving as a rotation axis that is generally parallel to the Y _- axis direction. An annular cutting blade 234 is attached to one end of each spindle. A rotational drive source (not shown) such as a motor is connected to the other end of each spindle. Furthermore, a nozzle for supplying cutting fluid such as pure water to the workpiece 11 and the cutting blade 234 is arranged near the cutting blade 234 .

The workpiece 11 can be machined (cut) by causing the rotated cutting blade 234 to cut into the workpiece 11 held on the chuck table 208 while supplying cutting fluid from this nozzle. An imaging unit (camera) 236 is provided adjacent to the processing unit 232 to take an image of the workpiece 11 etc. held on the chuck table 208. This imaging unit 236 is also moved in the Y two-axis direction and in the Z _{two -axis direction by the Y-axis and Z-} axis moving mechanism 230.

A cleaning unit 238 is disposed at a position opposite to the lifting platform 204 with respect to the recess 202b. The cleaning unit 238 includes a spinner table 240 that holds the workpiece 11 within a cylindrical cleaning space. A rotational drive source (not shown) that rotates the spinner table 240 at a predetermined speed is connected to the lower part of the spinner table 240.

A spray nozzle 242 is arranged above the spinner table 240 to spray a cleaning fluid (typically, a mixed fluid of water and air) toward the workpiece 11 held by the spinner table 240. has been done. The workpiece 11 can be cleaned by rotating the spinner table 240 holding the workpiece 11 and jetting cleaning fluid from the jet nozzle 242.

After cutting the workpiece 11 in the processing unit 232, for example, the second holding unit 226 sucks the frame 15 and carries the workpiece unit 17 into the cleaning unit 238. After cleaning the workpiece 11 with the cleaning unit 238, for example, the first holding unit 220 adsorbs the frame 15 and places the workpiece unit 17 on the pair of guide rails 212, and then the frame 15 is attached to the gripping mechanism. 220a and accommodates the workpiece unit 17 in the container 102 in the placement area A.

As shown in FIG. 21, the upper surface side of the base 202 is covered with a cover 244, and each of the above-mentioned components is housed inside the cover 244. An opening (not shown) that vertically penetrates the ceiling 244a of the cover 244 is provided in a region directly above the recess 202a. The container 102 of the transport vehicle 10 moves from the outside to the inside of the cover 244 through this opening, and from the inside to the outside of the cover 244 through this opening. There are no restrictions on the shape or size of the opening, but the opening must be configured to at least allow passage through the container 102.

Each component of the processing device 4 described above is connected to a control device 246. The control device 246 is configured by a computer including, for example, a processing device such as a CPU (Central Processing Unit), a main storage device such as a DRAM (Dynamic Random Access Memory), and an auxiliary storage device such as a flash memory. . The functions of the control device 246 are realized by operating the processing device and the like according to software stored in the auxiliary storage device.

Further connected to the control device 246 are a receiver 248 that receives a signal (information) from the outside and sends it to the control device 246, and a transmitter 250 that sends the signal (information) received from the control device 246 to the outside. has been done. The receiver 248 receives, for example, a signal (control signal) transmitted from the control unit 12 of the transport system 2 and sends it to the control device 246.

The control device 246 controls the operation of each component of the processing device 4 based on a signal received from the receiver 248, for example. Further, the control device 246 generates a notification signal and sends it to the transmitter 250, for example. The transmitter 250 transmits, for example, a signal received from the control device 246 to the control unit 12 of the transport system 2.

A side wall of the base 202 is provided with a pipe connection part 202c to which various pipes 21 are connected. Furthermore, a door 244b is provided on the side wall of the cover 244 to be opened and closed during maintenance or the like. Note that the side wall of the cover 244 may be provided with an operation panel (not shown) for inputting instructions to the control device 246, a display (not shown) for displaying various information regarding the processing device 4, etc. good.

This processing device 4 operates in conjunction with the conveyance system 2 of this embodiment. For example, the transport vehicle 10 stops at a stopping area on the transport path 6 and places the container 102 containing the workpiece unit 17 on the upper surface (placing area A) of the lifting platform 204 of the processing device 4. do. When the container 102 is placed on the lifting platform 204, the control unit 130 of the transport vehicle 10 generates a signal to notify that, and causes the transmitter 134 to transmit the signal. This signal is sent from the transmitter 134 to the control unit 12 of the transport system 2.

The control unit 12 carries out the unprocessed workpiece unit 17 from the container 102 and carries the processed workpiece unit 17 into the container 102 based on the signal transmitted from the transmitter 134 of the transport vehicle 10. A signal is generated to instruct the processing device 4 to do so. When the receiver 248 of the processing device 4 receives a signal from the control unit 12 and the control device 246 receives an instruction based on this signal, the control device 246 places the device on the upper surface of the lifting table 204 (placing area A). The unprocessed workpiece unit 17 is carried out from the container 102 into the first holding unit 220. As a result, the workpiece unit 17 is pulled out by the pair of guide rails 212, and processing of the workpiece 11 is started.

For example, when machining of the workpiece 11 is started, the control device 246 adjusts the height of the lifting platform 204, and moves the workpiece after processing from the storage area provided below the mounting area A. 17 to a pair of guide rails 212. Then, the processed workpiece unit 17 on the pair of guide rails 212 is accommodated in the container 102 on the lifting table 204.

When the processed workpiece unit 17 is accommodated in the container 102, the control device 246 of the processing device 4 generates a signal to notify that, and the signal is sent from the transmitter 250 to the control unit 12 of the transport system 2. Send. Based on the signal transmitted from the transmitter 250 of the processing device 4, the control unit 12 generates a signal for instructing the guided vehicle 10 to proceed to the next destination.

When the receiver 132 of the guided vehicle 10 receives a signal from the control unit 12 and the control section 130 receives an instruction based on this signal, the control section 130 causes the guided vehicle 10 to travel toward the next destination. . In this way, by using the transport system 2, the processing device 4 can receive the unprocessed workpiece unit 17 in a timely manner and can timely collect the processed workpiece unit 17.

As shown in FIGS. 1, 21, etc., the transport path 6 constituting the transport system 2 is located on the upper surface side of the ceiling 244a of the cover 244 of each processing device 4, or on the casing 22 of the loader/unloader 8. It is installed on the upper surface side of the ceiling 22a, etc. That is, the conveyance path 6 is arranged directly above the processing apparatus 4, the loader/unloader 8, etc. so as to connect the plurality of processing apparatuses 4, loader/unloader 8, etc.

Therefore, the conveyance path 6 does not interfere with structures such as the pipe connection portion 202c and the door 244b provided on the side surface of the processing device 4. That is, when designing the conveyance path 6, there is no need to consider the structure of the side surface of the processing device 4. Thereby, the transport system 2 can be easily constructed. Furthermore, since the conveyance path 6 is arranged at a location lower than the ceiling of the factory, etc., the work involved in installing the conveyance path 6 becomes easier.

For example, when constructing the conveyance path 6 in an environment where a plurality of processing devices 4, etc. are already installed, the processing devices 4, etc. may be moved, such as when a conveyance path is provided on the ceiling of a factory, etc. There is no need to secure a work space. Furthermore, since the processing equipment 4 and the like that have already been installed serve as the base of the conveyance path 6, the number of work steps is reduced compared to the case where a new base is provided.

FIG. 23 is a perspective view showing a part of the conveyance path 6 installed in the processing device 4. As shown in FIG. The structure of the conveyance path 6 installed above the loader/unloader 8 is generally the same as the structure of the conveyance path 6 installed above the processing device 4. A lower frame 262 is fixed to the ceiling 244a of the plurality of processing devices 4, the ceiling 22a of the loader/unloader 8, etc. with screws, bolts, or the like.

The lower frame 262 is, for example, a composite of rod-shaped frame members formed of a material containing metal such as aluminum, and has a shape that connects, for example, the adjacent processing equipment 4 or loader/unloader 8. It is assembled into. By fixing this lower frame 262 to the ceiling 244a of each processing device 4, the ceiling 22a of the loader/unloader 8, etc., the base of the conveyance path 6 is formed.

Note that when fixing the lower frame 262 to each processing device 4, loader/unloader 8, etc., the upper surface of the lower frame 262 is approximately horizontal, and the height of the upper surface of the lower frame 262 is approximately equal. The height of the lower frame 262 relative to each processing device 4, loader/unloader 8, etc. is adjusted so that

Thereby, even if the heights of the ceilings 244a of each processing device 4, the ceilings 22a of the loader/unloader 8, etc. are not completely equal, the conveyance path 6 can be formed horizontally and at the same height. There is no limit to the method of adjusting the height of the lower frame 262 with respect to the processing equipment 4, the loader/unloader 8, etc., but for example, the height of the lower frame 262 can be adjusted with respect to the ceiling 244a of each processing equipment 4, the ceiling 22a of the loader/unloader 8, etc. A method of arranging a height adjustment member between the lower surface of the lower frame 262 and the lower surface of the lower frame 262 can be used.

Of course, the heights of the processing device 4 and the loader/unloader 8 may be adjusted. For example, the lower ends (legs) of the processing device 4 and the loader/unloader 8 are provided with an adjustment mechanism for height adjustment. Therefore, if the heights of the processing equipment 4 and the loader/unloader 8 are adjusted using this adjustment mechanism, and the heights of the ceiling 244a of each processing equipment 4, the ceiling 22a of the loader/unloader 8, etc. are made equal, the conveyance can be improved. The lower frame 262 suitable for the foundation of the road 6 can be realized.

An upper frame 264 is fixed to the upper surface side of the lower frame 262 with screws, bolts, or the like. The upper frame 264 is a composite of rod-shaped frame members made of a material containing metal such as aluminum, and has a shape that matches the arrangement of the transport path 6 so that the transport path 6 can be properly fixed. It is assembled.

A conveyance path 6 is provided above the upper frame 264. The conveyance path 6 is formed, for example, by arranging a plurality of flat road panels 266 in a horizontal direction. In this way, by forming the transport path 6 by combining a plurality of road panels 266, various transport paths 6 can be easily realized depending on the arrangement of the plurality of processing devices 4, loader/unloader 8, etc.

The road surface panel 266 is formed into a rectangular shape in plan view using a lightweight and high-strength material such as polyamide, polycarbonate, or CFRP (Carbon Fiber Reinforced Plastic), and is suitable for the traveling of the transport vehicle 10. It has a flat top surface. Furthermore, a through hole is formed at an end of the road panel 266 to vertically penetrate the road panel 266.

On the other hand, on the upper surface side of the upper frame 264, a screw hole (not shown) having a diameter corresponding to the diameter of the screw 268 is opened at a position corresponding to the through hole of the road surface panel 266. Therefore, the road panel 266 can be fixed to the upper frame 264 by placing the road panel 266 on the upper surface side of the upper frame 264 and then tightening the screws 268 into the screw holes of the upper frame 264 through the through holes (not shown). .

The lower frame 262 is formed, for example, by combining a plurality of lower frame units 270 each including a plurality of rod-shaped frame members. Similarly, the upper frame 264 is formed, for example, by combining a plurality of upper frame units 272 each including a plurality of rod-shaped frame members.

In this way, when forming the lower frame 262 using a plurality of lower frame units 270 and forming the upper frame 264 using a plurality of upper frame units 272, it is necessary to Then, frame members in the form of a lower frame unit 270 and an upper frame unit 272 are brought in.

That is, high-quality lower frame 262 and upper frame 264 are formed using high-quality lower frame unit 270 and upper frame unit 272 that are produced in a stable environment. Moreover, the complicated work required when connecting rod-shaped frame members above the processing device 4 does not occur. Therefore, a high quality conveyance path 6 can be formed in a short period of time.

24(A) is a perspective view showing a lower frame unit 270a forming the lower frame 262, and FIG. 24(B) is a perspective view showing a lower frame unit 270b forming the lower frame 262. The lower frame unit 270a and the lower frame unit 270b are selectively used depending on the mode of the conveyance path 6, for example.

FIG. 25 is a plan view showing the arrangement of the lower frame unit 270 that constitutes the lower frame 262. As shown in FIG. FIG. 25 shows a case where a transport path 6 is formed that can transport the workpiece unit 17 between a total of eight devices (processing device 4, loader/unloader 8, etc.). For example, the lower frame unit 270a is used in the region corresponding to the portion of the transport path 6 excluding the corners (the linear region of the transport path 6), and the lower frame unit 270a is used in the region corresponding to the corner of the transport path 6. A lower frame unit 270b is used.

Note that the lower frame unit 262 in FIG. 25 includes a lower frame unit 270c, which is an inverted version of the lower frame unit 270a, and a lower frame unit 270d, which is an inverted version of the lower frame unit 270b. That is, two of each of the four types of lower frame units 270 are used in the lower frame 262 of FIG. 25 . Each lower frame unit 270 is configured so that the rod-shaped frame members do not overlap with an opening 282 (see FIG. 28, corresponding to the opening 6a in FIG. 3) formed in the conveyance path 6.

When forming the lower frame 262, for example, it is preferable to fix the lower frame unit 270 to the processing device 4, the loader/unloader 8, etc., and then connect the adjacent lower frame units 270 to each other. For example, a joint is used to connect adjacent lower frame units 270. However, it is also possible to connect the lower frame unit 270 and then fix it to the processing device 4, the loader/unloader 8, etc.

26(A) is a perspective view showing an upper frame unit 272a forming the upper frame 264, and FIG. 26(B) is a perspective view showing an upper frame unit 272b forming the upper frame 264. The upper frame unit 272a and the upper frame unit 272b are selectively used depending on the mode of the conveyance path 6, for example.

FIG. 27 is a plan view showing the arrangement of the upper frame unit 272 that constitutes the upper frame 264. FIG. 27 shows a case where the transport path 6 is configured using the lower frame 262 of FIG. 25. For example, the upper frame unit 272a is used in a part of the area connecting adjacent processing equipment 4, loader/unloader 8, etc., and the upper frame unit 272a is used in the area directly above processing equipment 4, loader/unloader 8, etc. 272b is used.

That is, the upper frame 264 in FIG. 27 uses two upper frame units 272a and eight upper frame units 272b. Each upper frame unit 272 is configured so that the rod-shaped frame members do not overlap with the opening 282 (see FIG. 28) formed in the transport path 6.

When forming the upper frame 264, for example, the upper frame unit 272 is fixed to the lower frame 262. Note that the two adjacent upper frame units 272 may not be connected to each other and may be separated from each other. Further, if necessary, it is also possible to use an upper frame unit 272 having a structure in which the upper frame unit 272a is inverted, or an upper frame unit 272 having a structure in which the upper frame unit 272b is inverted.

FIG. 28 is a plan view schematically showing the conveyance path 6 configured by arranging a plurality of road panels 266. FIG. 28 shows a case where the transport path 6 is constructed using the lower frame 262 of FIG. 25 and the upper frame 264 of FIG. 27. Furthermore, in FIG. 28, the boundaries between adjacent road panels 266 are shown with broken lines.

When forming the conveyance path 6, for example, the road panel 266 is fixed to the upper frame 264. In the upper frame 264 of FIG. 27, for example, a small gap is formed between the adjacent upper frame unit 272a and the upper frame unit 272b, and a large gap is formed between the two adjacent upper frame units 272b. . Therefore, the conveyance path 6 cannot be formed in the portion corresponding to this gap using only the road surface panel 266 which is rectangular in plan view. In other words, a gap is also formed in the conveyance path 6.

Therefore, a flat bridging panel 274a and a flat bridging panel 274b are used to fill these gaps. A small bridging panel 274a is arranged in a small gap between adjacent upper frame units 272a and 272b. A large bridging panel 274b is arranged in a large gap between two adjacent upper frame units 272b.

The bridging panel 274a and the bridging panel 274b are fixed to the upper frame 264, for example, so as to sufficiently reduce gaps and steps formed in the transport path 6. Thereby, the impact on the traveling transport vehicle 10 can be suppressed to a small level, and damage to the workpiece 11 and the like can be prevented. Note that if a small gap remains in the transport path 6, this gap may be closed using, for example, a tape having a core material along the direction in which the transport vehicle 10 moves.

Further, instead of the bridging panel 274a or the bridging panel 274b, a bridging panel having slopes formed at both ends in the direction in which the transport vehicle 10 moves may be used. In this case, for example, the bridging panel can be used in an overlapping manner above the road surface panel 266, which eases the requirement for the size of the bridging panel. This increases the versatility of the bridging panel. Note that adjacent road panels 266 can also be connected using a thin, flexible bridging panel.

When the conveyance vehicle 10 travels on the conveyance path 6 configured in this manner, static electricity is generated due to friction between the wheels 86 of the conveyance vehicle 10 and the conveyance path 6, for example. The workpiece 11 may be adversely affected. For example, if a semiconductor device is formed on the workpiece 11, there is a risk that this semiconductor device will be destroyed by static electricity.

Therefore, it is preferable to expose a conductive member to a portion of the upper surface of the road panel 266 that becomes the conveyance path 6 and which is in contact with the wheels 86 and the like. As the conductive member, for example, in addition to metals such as aluminum and copper, CFRP and the like are used. Note that when the road surface panel 266 is made of CFRP, the CFRP is also exposed on its upper surface. In other words, a state in which the conductive member is exposed on the upper surface of the road panel 266 is realized.

In this way, by exposing the conductive member on the upper surface of the road panel 266, it is possible to suppress the generation and accumulation of static electricity due to friction, and prevent an adverse effect on the workpiece 11. can. Note that the conductive member exposed on the upper surface of the road panel 266 may be grounded via a conducting wire (not shown) or the like. In this case, the static electricity generated by the contact between the wheels 86 and the like and the road panel 266 is discharged through the conductor, so that it does not accumulate on the road panel 266. Therefore, the workpiece 11 is transported more safely by the transport vehicle 10.

In the conveyance system 2 of this embodiment, the operation of the conveyance vehicle 10 is controlled so that the conveyance vehicle 10 does not reach the end of the conveyance path 6 in principle. However, if some trouble occurs in the transport vehicle 10, the control unit 12, etc., there is a possibility that the transport vehicle 10 will reach the end of the transport path 6 and fall from the end of the transport path 6. There is also.

Therefore, it is desirable to provide a guard portion 276 at the end of the transport path 6, which serves as a barrier to prevent the transport vehicle 10 from falling from the transport path 6, as shown in FIG. The guard portion 276 is made of, for example, a material containing metal such as aluminum, and is fixed to the upper frame 264 or the road panel 266. The height from the upper surface of the road panel 266 to the upper end of the guard portion 276 is, for example, greater than the radius of the wheels 86 of the transport vehicle 10. Preferably, it is larger than the diameter of wheel 86.

Note that this guard portion 276 may be formed at a height that makes contact with the third sensor 126 or the exterior cover of the carrier 10. In this case, when the guard portion 276 comes into contact with the third sensor 126 or the exterior cover of the guided vehicle 10, the guided vehicle 10 detects a collision with an obstacle and stops. Therefore, the transport vehicle 10 can travel more safely.

As shown in FIG. 28, the transport path 6 includes a travel area 278 mainly used for traveling the transport vehicle 10, a stopping area 280 mainly used for stopping the transport vehicle 10, and a stop region 280 mainly used for stopping the transport vehicle 10. and a standby area 284 used for standby. The workpiece unit 17 is transported between the transport vehicle 10 stopped at the stop area 280 and the processing device 4, loader/unloader 8, etc. located below the stop area 280.

The travel area 278 is formed, for example, in an annular shape along the arrangement of the processing device 4, the loader/unloader 8, and the like. For example, the transport vehicle 10 travels in one direction along this annular travel area 278 and does not travel in the other direction (that is, one-way traffic). Thereby, the transport vehicle 10 can be driven safely with simple control.

However, there are no restrictions on the shape of the travel area 278, the manner in which the transport vehicle 10 travels, etc. For example, the travel area 278 may be configured to allow the guided vehicle 10 to travel in both directions. Furthermore, the running area 278 does not need to be formed in an annular shape without an end, and may be formed in a straight line with an end, for example.

On the other hand, the parking area 280 is provided with an opening 282 that vertically penetrates the road surface panel 266. The opening 282 is formed to be slightly larger than the top and bottom surfaces of the container 102, for example, and allows the container 102 to pass up and down. On the other hand, the width of the opening 282 in the direction perpendicular to the direction of entry when the transport vehicle 10 enters the parking area 280 is narrower than the distance between the pair of wheels 86 of the transport vehicle 10 . As a result, when the guided vehicle 10 enters the parking area 280 in an appropriate direction, the wheels 86 do not fall into the opening 282.

The waiting area 284 is arranged, for example, in an area where the transport vehicle 10 is likely to be placed on standby. By having the guided vehicle 10 wait in the waiting area 284, other guided vehicles 10 can overtake the waiting guided vehicle 10. Furthermore, if the guided vehicles 10 are allowed to travel in both directions, the two guided vehicles 10 can be made to cross each other by temporarily waiting in this waiting area 284. . Note that the conveyance path 6 does not necessarily have to include the standby area 284.

A plurality of types of guidance marks 286 (see FIG. 23) are provided on the upper surfaces of the road panel 266, bridging panel 274a, bridging panel 274b, etc. that constitute the transport path 6, and are detected by sensors included in the transport vehicle 10. ing. The transport vehicle 10 performs control such as traveling, turning, and stopping based on various marks 286 detected by sensors.

As shown in FIG. 23, the mark 286 is configured in a linear shape having a color different from that of other areas on the upper surface of the road panel 266, for example. In this embodiment, as the marks 286, as shown in FIG. 28, a first mark 286a, a second mark 286b, a third mark 286c, and a fourth mark 286d are used.

However, there is no limit to the form of the mark 286. For example, the mark 286 may include a curved line or may be formed by a broken line. Further, as the mark 286, letters, numbers, designs, etc. can also be used. Further, there are no restrictions on the color etc. of the mark 286. For example, the transport vehicle 10 may be configured to use a plurality of marks 286 of different colors and perform various controls based on the colors of the marks 286.

A first mark 286a is provided in the travel area 278 along the direction in which the transport vehicle 10 moves. The first mark 286a is formed, for example, in a region through which the transport vehicle 10 traveling in the travel region 278 should pass. More specifically, the first mark 286a is provided directly below the pair of first sensors 122 of the transport vehicle 10 traveling in the travel area 278.

FIG. 29 is a functional block diagram showing the control unit 130 of the transport vehicle 10. As shown in FIG. 29, the control unit 130 of the conveyance vehicle 10 causes each of the pair of first sensors 122 to monitor the upper surface of the travel area 278 etc. (conveyance path 6) and detect the first mark 286a. It includes a control unit 130a and a travel instruction unit 130b that specifies the direction indicated by the first mark 286a detected by the first sensor 122 and causes the guided vehicle 10 to travel along the determined direction.

Each of the pair of first sensors 122 detects the first mark 286a according to a control signal input from the first sensor control unit 130a. Information regarding the first mark 286a detected by the first sensor 122 is sent to the travel instruction section 130b via the first sensor control section 130a.

The travel instruction section 130b specifies the direction indicated by the first mark 286a based on the information about the first mark 286a sent from the first sensor control section 130a. Then, the traveling instruction section 130b controls the drive unit 90 to cause the guided vehicle 10 to travel along the specified direction. That is, the conveyance vehicle 10 can detect the first mark 286a with the pair of first sensors 122 and travel on the conveyance path 6 along the first mark 286a.

As shown in FIG. 28, two linear first marks 286a intersect in a predetermined portion of the travel area 278. While the transport vehicle 10 is traveling along one first mark 286a, the second sensor 124 detects the other first mark 286a that intersects with this one first mark 286a. When the second sensor 124 detects the other first mark 286a, the transport vehicle 10 turns as necessary.

That is, the traveling direction of the transport vehicle 10 is changed at any intersection where the two linear first marks 286a intersect. In this way, a portion of the other first mark 286a described above detected by the second sensor 124 functions as a second mark 286b indicating the position at which the transport vehicle 10 turns. Note that there are a number of second marks 286b on the conveyance path 6 corresponding to the number of intersections where two first marks 286a intersect. That is, a plurality of second marks 286b are present on the conveyance path 6 in FIG. 28.

As shown in FIG. 29, the control unit 130 of the conveyance vehicle 10 includes a second sensor control unit 130c that causes the second sensor 124 to monitor the upper surface of the travel area 278 etc. (conveyance path 6) and detect the second mark 286b. , a turning instruction section 130d that counts the number of second marks 286b detected by the second sensor 124 and turns the transport vehicle 10 based on the counted number of second marks 286b.

The second sensor 124 detects the second mark 286b according to a control signal input from the second sensor control unit 130c. Then, for example, every time the second sensor 124 detects the second mark 286b, the second sensor control unit 130c notifies the turning instruction unit 130d of the control unit 130 to that effect.

The turning instruction section 130d counts the number of second marks 286b detected by the second sensor 124 based on the notification from the second sensor control section 130c, and, for example, based on the instruction from the control unit 12 of the transport system 2. It is compared with the number of corresponding second marks 286b (predetermined number). Then, when the number of second marks 286b detected by the second sensor 124 reaches the number of second marks 286b corresponding to the instruction from the control unit 12, the turning instruction section 130d controls the drive unit 90 to The transport vehicle 10 is rotated.

That is, the turning instruction section 130d changes the direction of the conveyance vehicle 10 according to the number of detected second marks 286b. In this way, the transport vehicle 10 can detect the second mark 286b with the second sensor 124 and change the direction as necessary. Note that the second mark 286b is, for example, a corner part of the running area 278 (corner part of the conveyance path 6), a part of the running area 278 adjacent to the stopping area 280, or a part of the running area 278 adjacent to the standby area 284. etc.

By the way, when the pair of second sensors 124 are arranged on a straight line passing through the pair of wheels 86, the second sensor 124 is placed on the second mark 286b at the same time as the wheel 86 passes the second mark 286b. It can be detected by sensor 124. Therefore, by turning the transport vehicle 10 at the timing when the second mark 286b is detected, the pair of first sensors 122 will not deviate significantly from the first mark 286a that should be detected after turning. In other words, the transport vehicle 10 can be appropriately rotated without any correction.

As shown in FIG. 28, a third mark 286c is provided in the stopping area 280 along the direction in which the guided vehicle 10 enters. That is, the third mark 286c indicates the direction in which the guided vehicle 10 enters the parking area 280. The third marks 286c are formed, for example, at two positions sandwiching the opening 282 in a direction perpendicular to the direction in which the transport vehicle 10 enters, and are detected by the second sensor 124 of the transport vehicle 10.

As shown in FIG. 29, the control unit 130 of the guided vehicle 10 includes an entry control unit 130e that causes the guided vehicle 10 to enter the stop area 280 along the direction indicated by the third mark 286c detected by the second sensor 124. . The entry control section 130e is connected to the second sensor control section 130c.

The second sensor control unit 130c causes the second sensor 124 to monitor the upper surface of the parking area 280 and the like (transport path 6) to detect the third mark 286c. Information regarding the third mark 286c detected by the second sensor 124 is sent to the approach control unit 130e via the second sensor control unit 130c.

The approach control unit 130e identifies the direction indicated by the third mark 286c based on the information about the third mark 286c input from the second sensor control unit 130c. The entry control unit 130e then controls the drive unit 90 to cause the guided vehicle 10 to enter the stop area 280 along the specified direction. The third mark 286c is typically provided in a region where the wheels 86 of the carrier 10 should pass. However, there are no restrictions on the arrangement of the third mark 286c.

As shown in FIG. 28, on the rear side (front side) of the parking area 280 (or waiting area 284) in the direction in which the guided vehicle 10 enters the parking area 280 (or waiting area 284), there is a first mark 286a. A fourth mark 286d is provided which intersects with the third mark 286c. This fourth mark 286d indicates the position of the parking area 280 (or standby area 284).

As shown in FIG. 29, the control unit 130 of the guided vehicle 10 detects the fourth mark 286d by the first sensor 122 (one of the pair of first sensors 122) located on the rear side in the direction in which the guided vehicle 10 moves. It includes a stop control unit 130f that stops the guided vehicle 10 when the transport vehicle 10 is stopped. The stop control section 130f is connected to the first sensor control section 130a.

The first sensor control unit 130a causes the first sensor 122 to monitor the upper surface of the driving area 278, the stopping area 280, etc. (transport path 6), and causes the first sensor 122 to detect the fourth mark 286d. When the fourth mark 286d is detected by the first sensor 122, the stop control unit 130f is notified of this via the first sensor control unit 130a.

When the stop control unit 130f is notified by the first sensor control unit 130a that the fourth mark 286d has been detected, the stop control unit 130f controls the drive unit 90 to quickly stop the guided vehicle 10. That is, for example, when the first sensor 122 on the rear side detects the fourth mark 286d, the transport vehicle 10 immediately stops.

Note that this fourth mark 286d may be provided on the front side (rear side) of the stopping area 280 (or waiting area 284) in the direction in which the guided vehicle 10 enters the stopping area 280 (or waiting area 284). . In this case, the guided vehicle 10 will stop immediately when the first sensor 122 on the front side detects the fourth mark 286d.

Note that the fourth mark 286d may be provided at a position that can be detected by the second sensor 124. In this case, the stop control section 130f shown in FIG. 29 is connected to the second sensor control section 130c. Then, when the second sensor 124 controlled by the second sensor control section 130c detects the fourth mark 286d, the stop control section 130f controls the drive unit 90 to stop the guided vehicle 10.

Further, the stop control unit 130f may stop the guided vehicle 10 after a predetermined time has elapsed since the fourth mark 286d was detected by the first sensor 122 or the second sensor 124. The time from detection of the fourth mark 286d to the stop of the guided vehicle 10 is adjusted based on, for example, the distance between the fourth mark 286d and the stop area 280, the speed at which the guided vehicle 10 travels, and the like.

As shown in FIG. 28, a power supply terminal (power supply terminal) connected to a power source (not shown) is located at the front side (rear side) of the parking area 280 and the standby area 284 in the direction in which the guided vehicle 10 enters. 288 are arranged. For example, if the guided vehicle 10 is stopped in the parking area 280 or the standby area 284 and the terminal (power receiving terminal) 100 of the guided vehicle 10 is brought into contact with the terminal 288, the terminal 100 and the charging wiring (charging wiring) 98 are connected. Power for charging is supplied to the battery (secondary battery) 96 via the battery (secondary battery). In other words, the battery 96 can be charged.

As shown in FIG. 23, the terminal 288 is supported by a terminal support portion 290 fixed to the road surface panel 266 or the upper frame 264, and is connected to power supply wiring (power supply wiring) 292. In other words, this terminal 288 is connected to a power source via a power supply wiring 292.

The terminal support section 290 includes, for example, a biasing member (not shown) that biases the terminal 288 toward the parking area 280 or the standby area 284. By urging the terminal 288 with the urging member, the terminal 288 can be appropriately connected to the terminal 100. However, there are no restrictions on the structure of the terminal 288 or the terminal support section 290, etc.

For example, after the transport vehicle 10 has stopped in the stopping area 280, the container 102 is raised and lowered by the lifting unit 110. In this embodiment, since the power supply terminal 288 is arranged in the parking area 280, the battery 96 is charged even when the container 102 is raised or lowered. Therefore, the large amount of power consumed by the lifting unit 110 when lifting and lowering the container 102 can be sufficiently covered.

Note that in this embodiment, terminals 288 are also arranged in the standby area 284. Therefore, for example, the battery 96 is also charged when the transport vehicle 10 is placed on standby in the standby area 284. Thereby, the operating time of the transport vehicle 10 can be extended, and the efficiency of transporting the workpiece 11 can be increased.

The operation of moving the transport vehicle 10 from a certain position (starting point) to another position (destination) on the transport path 6 is, for example, as follows. First, the control unit 12 of the transport system 2 sends a signal corresponding to an instruction to move from the starting point to the destination to the moving vehicle 10 .

The control unit 130 of the guided vehicle 10 receiving instructions from the control unit 12 first determines a route to the destination using its current position as the starting point, and along this route, the guided vehicle 10 moves from the starting point to the destination. The number of second marks 286b existing between each position to be turned and the direction of turning at each position to be turned are determined. Then, the control unit 130 of the transport vehicle 10 controls the drive unit 90 and the like based on the number of second marks 286b and the turning direction determined by the control unit 130.

For example, the control unit 130 of the transport vehicle 10 causes the transport vehicle 10 to travel while monitoring the upper surface of the transport path 6 using the first sensor 122 and the second sensor 124. In other words, the control unit 130 moves the transport vehicle 10 along the direction indicated by the first mark 286a detected by the first sensor 122, and moves the second mark 286b that the second sensor 124 passes through to the second sensor 122. 124 for detection.

When the number of second marks 286b passed by the second sensor 124 reaches the number of second marks 286b determined by the control section 130, the control section 130 causes the conveyance vehicle 10 to turn in the turning direction determined by the control section 130. After that, the control unit 130 causes the transport vehicle 10 to travel again along the direction indicated by the first mark 286a. When the transport vehicle 10 arrives at the destination, the control unit 130 sends a signal to the control unit 12 to notify the arrival.

Note that when the guided vehicle 10 enters the stopping area 280, the control unit 130 causes the second sensor 124 to detect the third mark 286c, and finely adjusts the direction in which the guided vehicle 10 moves. This can prevent the wheels 86 of the transport vehicle 10 from falling into the opening 282. At this time, it is preferable to keep the traveling speed lower than when the transport vehicle 10 travels along the direction indicated by the first mark 286a. After that, the control unit 130 causes the first sensor 122 to detect the fourth mark 286d, and stops the guided vehicle 10 in the stopping area 280.

As a general rule, the transport vehicle 10 travels so that the wheels 86 are located at the front in the direction of travel, and the wheels 88 are located at the rear in the direction of travel. However, when moving from the stop area 280 or standby area 284 to the running area 278, the transport vehicle 10 is moved so that the wheels 86 are located at the rear in the direction of travel and the wheels 88 are located at the front in the direction of travel. It will be run to.

When the transport vehicle 10 stops at the parking area 280, the container 102 is positioned directly above the opening 282. Further, the terminal 100 on the transport vehicle 10 side contacts the terminal 288 on the transport path 6 side. Thereby, the transport vehicle 10 can lower the container 102 while charging the battery 96 and place the container 102 in the mounting area A located below the opening 282.

Note that in the above-described mode of operation, the number of second marks 286b and the direction of turning are determined by the control unit 130, but the determination by the control unit 130 may be kept to a minimum. In this case, for example, a signal including information about the number of second marks 286b existing between the starting point and each position where the transport vehicle 10 should turn and the direction of turning at each position where the transport vehicle 10 should turn is used. is sent from the control unit 12. In this operation, the control section 130 does not need to determine the number of second marks 286b or the direction of rotation, so the control section 130 can be simplified.

Next, an example of a method of controlling the transport system 2 according to this embodiment will be explained. FIG. 30 is a diagram for explaining an example of a method of controlling the transport system 2. As shown in FIG. For example, when a situation arises in which the unprocessed workpiece 11 is newly required, the control device 246 of the processing device 4 generates a signal (workpiece request signal) to notify this fact. The signal generated by the control device 246 (workpiece request signal) is transmitted from the transmitter 250 to the control unit 12.

As shown in FIG. 30, the control unit 12 includes a control section (signal generation section) 302 that generates signals for performing various controls. The control unit 302 is configured by a computer including, for example, a processing device such as a CPU (Central Processing Unit), a main storage device such as a DRAM (Dynamic Random Access Memory), and an auxiliary storage device such as a flash memory. There is. The functions of the control unit 302 are realized by operating the processing device and the like according to the software stored in the auxiliary storage device.

The control unit 302 includes a receiver 304 that receives signals transmitted from the processing device 4, loader/unloader 8, transport vehicle 10, etc. A transmitter 306 that transmits signals is connected.

Upon receiving the notification signal (workpiece request signal) transmitted from the transmitter 250 of the processing device 4, the receiver 304 of the control unit 12 sends this to the control unit 302. When the control unit 302 confirms the notification signal (workpiece request signal) from the processing device 4, the control unit 302 causes the arbitrary transport vehicle 10 to move to the parking area 280 directly above the loader/unloader 8, and unloads the container. 102 on the upper surface of the mounting table 66 (second mounting area A ₂ ) of the loader/unloader 8. Specifically, the control unit 302 generates a control signal (first placement instruction signal) corresponding to this instruction, and transmits it from the transmitter 306 to the transport vehicle 10.

Upon receiving the signal (first placement instruction signal) from the control unit 12, the receiver 132 of the carrier 10 sends the signal to the control unit 130. The control unit 130 controls the drive unit 90 and the like based on this signal (first placement instruction signal), and causes the transport vehicle 10 to travel along the transport path 6. When the transport vehicle 10 stops at the parking area 280 directly above the loader/unloader 8, the container 102 is positioned directly above the opening 282.

With the carrier vehicle 10 stopped in the parking area 280, the control unit 130 controls the lifting unit 110 to send out the hanging member 112. Thereby, the container 102 can be lowered so as to pass through the opening 282 and the like, and can be placed on the upper surface of the mounting table 66.

After placing the container 102 on the top surface of the mounting table 66, the control unit 130 sends a notification signal (first placement completion signal) to notify that the container 102 has been placed on the top surface of the mounting table 66. signal). The signal generated by the control section 130 (first placement completion signal) is transmitted from the transmitter 134 to the control unit 12.

Upon receiving the signal (first placement completion signal) transmitted from the transmitter 134 of the transport vehicle 10, the receiver 304 of the control unit 12 sends the signal to the control unit 302. When the control unit 302 confirms the signal (first placement completion signal) from the transport vehicle 10, it notifies the loader/unloader 8 that placement of the container 102 on the top surface of the placement table 66 is completed. do. Specifically, the control unit 302 generates a notification signal (second placement completion signal) for notifying that the placement of the container 102 on the top surface of the placement table 66 has been completed, and transmits the notification signal to the transmitter 306. from there to the loader/unloader 8.

When the receiver 68 of the loader/unloader 8 receives the signal (second placement completion signal) from the control unit 12, it sends the signal to the control device 46. When the control device 46 receives this signal (second placement completion signal), it controls the operation of each component and carries the unprocessed workpiece 11 into the container 102. Note that when the processed workpiece 11 is stored in the container 102, the processed workpiece 11 is carried out from the container 102, and then the unprocessed workpiece 11 is carried into the container 102.

When the unprocessed workpiece 11 is carried into the container 102, the control device 46 sends a notification signal (a first conveyance completion signal) to notify that the workpiece 11 has been carried into the container 102. ) is generated. The signal (first conveyance completion signal) generated by the control device 46 is transmitted from the transmitter 70 to the control unit 12.

Upon receiving the signal (first conveyance completion signal) transmitted from the transmitter 70 of the loader/unloader 8, the receiver 304 of the control unit 12 sends the signal to the control section 302. When the control unit 302 confirms the signal from the loader/unloader 8 (first transport completion signal), the control unit 302 moves the transport vehicle 10 to the parking area 280 directly above the processing device 4 and transfers the container 102 to the processing device 4. An instruction is given to place the object on the upper surface of the lifting platform 204 (placement area A). Specifically, the control unit 302 generates a control signal (second placement instruction signal) corresponding to this instruction, and transmits it from the transmitter 306 to the transport vehicle 10.

Upon receiving the signal (second placement instruction signal) from the control unit 12, the receiver 132 of the carrier 10 sends the signal to the control unit 130. The control unit 130 controls the lifting unit 110 based on this signal (second placement instruction signal) and winds up the hanging member 112. Thereby, the container 102 can be raised to pass through the opening 282 and the like and stored in the storage area 104. Thereafter, the control unit 130 controls the drive unit 90 and the like to cause the transport vehicle 10 to travel along the transport path 6.

When the transport vehicle 10 stops at the parking area 280 directly above the processing device 4, the container 102 is positioned directly above the opening 282. With the carrier vehicle 10 stopped in the parking area 280, the control unit 130 controls the lifting unit 110 to send out the hanging member 112. Thereby, the container 102 can be lowered so as to pass through the opening 282 and the like, and can be placed on the upper surface of the lifting table 204 of the processing device 4.

After placing the container 102 on the top surface of the lifting table 204, the control unit 130 sends a notification signal (third placement complete) to notify that the container 102 has been placed on the top surface of the lifting table 204. signal). The signal generated by the control section 130 (third placement completion signal) is transmitted from the transmitter 134 to the control unit 12.

Upon receiving the signal (third placement completion signal) transmitted from the transmitter 134 of the carrier 10, the receiver 304 of the control unit 12 sends this to the control unit 302. When the control unit 302 confirms the signal from the transport vehicle 10 (third placement completion signal), it notifies the processing device 4 that placement of the container 102 on the upper surface of the lifting platform 204 has been completed. Specifically, the control unit 302 generates a notification signal (fourth placement completion signal) for notifying that the placement of the container 102 on the top surface of the placement table 66 is completed, and transmits the notification signal to the transmitter 306. from there to the processing device 4.

Upon receiving the signal (fourth placement completion signal) from the control unit 12, the receiver 248 of the processing device 4 sends the signal to the control device 246. When the control device 246 receives this signal (fourth placement completion signal), it controls the operation of each component and carries out the unprocessed workpiece 11 from the container 102. Note that when the processed workpiece 11 is present in the processing device 4, the processed workpiece 11 is carried into the container 102 after the unprocessed workpiece 11 is carried out from the container 102.

When the unprocessed workpiece 11 is carried out from the container 102, the control device 246, for example, sends a notification signal (second transport completion signal). The signal generated by the control device 246 (second conveyance completion signal) is transmitted from the transmitter 250 to the control unit 12.

Through such a procedure, the unprocessed workpiece 11 housed in the loader/unloader 8 can be transported to any processing device 4. Note that although the procedure for transporting the workpiece 11 from the loader/unloader 8 to the processing device 4 has been mainly explained here, the procedure for transporting the workpiece 11 from the processing device 4 to the loader/unloader 8 is The procedure for transporting the same is also the same.

Note that the above-described procedure can be arbitrarily changed within a range that allows the workpiece 11 to be transported appropriately. For example, a plurality of steps included in the above-described procedure may be performed simultaneously, or the order of the steps may be changed within a range that does not hinder the transportation of the workpiece 11. Similarly, any steps may be added, changed, or omitted as long as the conveyance of the workpiece 11 is not hindered.

As described above, the transport path 6, the loader/unloader (transport device) 8, the transport vehicle 10, the cassette storage mechanism 24, and the lifting unit (lifting mechanism) 110 according to the present embodiment all support the workpiece 11. It is constructed so that it can be transported efficiently and safely. Therefore, by using the transport system 2 incorporating these, the workpiece 11 can be transported efficiently and safely.

(Embodiment 2)
In this embodiment, a processing apparatus in a different aspect from the embodiments described above will be described. FIG. 31 is a perspective view showing the internal structure of the processing device (cutting device) 402 according to this embodiment. In addition, in the following description, the same reference numerals are attached to the same components as in the embodiment described above, and detailed description thereof will be omitted.

The container 102 of the transport vehicle 10 is not placed on the lifting platform 404 of the processing device 402 . Instead, the lifting platform 404 of the processing device has the same structure as the two-stage cassette accommodating mechanism 24 (i.e., the first cassette accommodating mechanism 24a and the second cassette accommodating mechanism 24b) of the loader/unloader 8 of the above-described embodiment. A two-stage cassette storage mechanism 406 (a first cassette storage mechanism 406a and a second cassette storage mechanism 406b) is provided.

That is, the cassette 30 is carried into the processing apparatus 402 of this embodiment. The processing device 402 is also equipped with a movement regulating mechanism including a stopper member 50 and a shaft mechanism 52. This makes it easier to carry in and out the relatively heavy cassette 30, so it is possible to reduce the risk that the workpieces 11 accommodated in the cassette 30 will be damaged as they are carried in and out. Moreover, it becomes easier to realize the cassette accommodation mechanism 406 that is compact in the width direction.

Further, the processing device 402 of this embodiment also implements a first safety mechanism and a second safety mechanism for restricting access from the outside to the inside of the processing device 402. Thereby, it is possible to prevent the operator from accidentally accessing movable parts located inside the processing device 402 that are in operation.

In addition, the processing device 402 of this embodiment may be independent from the above-mentioned conveyance system 2. That is, the processing device 402 according to this embodiment does not necessarily need to be connected to the above-described transport system 2.

The cassette storage mechanism 406 according to this embodiment is configured to be able to efficiently and safely transport the workpiece 11, similarly to the cassette storage mechanism 24 of the embodiment described above. Therefore, by using the processing device 4 incorporating this, the workpiece 11 can be transported efficiently and safely.

In addition, the structures, methods, etc. of the above-described embodiments, modifications, etc. can be modified and implemented as appropriate without departing from the scope of the objective of the present invention.

2: Conveyance system 4: Processing equipment (cutting equipment)
4a: Processing device 4b: Processing device 6: Conveyance path 6a: Opening 8: Loader/unloader (conveyance device)
10: Transport vehicle 10a: Transport vehicle 10b: Transport vehicle 12: Control unit 21: Piping 22: Housing 22a: Ceiling 22b: Opening 24: Cassette storage mechanism 24a: First cassette storage mechanism 24b: Second cassette storage mechanism 26: Support stand 26a: Upper surface 26b: Outer surface 28: Cassette mounting table 28a: Lower surface 28b: Upper surface 28c: Through hole 30: Cassette 30a: First cassette 30b: Second cassette 32: Carrying in/out exit 34: Outer door (second door)
36: Rotating connection member 38a: External loading/unloading area (external area)
38b: Internal storage area (internal area)
40: Inner door (first door)
42: Lifting mechanism 42a: Cylinder tube 42b: Piston rod 42c: Connection member 44: First sensor 44a: Magnet 46: Control device 48: Second sensor 48a: Magnet 50: Stopper member 50a: Square bar 50b: Roller 52: Shaft Mechanism 52a: Rotating shaft 52b: Bearing 54: Pin (pressing part)
54a: Ring 54b: Button 56: Lifting mechanism 56a: Support column 58: Lifting platform 60: Temporary unit 62: Housing 62a: Upper plate 62b: Lower plate 62c: Side plate 62c ₁ : First side plate 62c ₂ : Second side plate 62d: Opening 62e ₁ : First opening 62e ₂ : Second opening 64: Transport unit (transport mechanism)
64a: First transport unit 64b: Second transport unit 66: Placement table 68: Receiver 70: Transmitter 72a: Upper guide rail (first temporary storage part)
72b: Lower guide rail (second temporary storage part)
72c: Spacing 74a: First air actuator 74b: Second air actuator 76a: First guide mechanism 76b: Second guide mechanism 78: Spacing adjustment mechanism 82: Frame 84: Axle 86: Wheel (front wheel)
88: Wheel (rear wheel)
90: Drive unit 92: Motor 92a: Rotating shaft (output shaft)
94: Pulley 96: Battery (secondary battery)
98: Wiring (charging wiring)
100: Terminal (power receiving terminal)
102: Container (cassette)
102a: Accommodation section (accommodation space)
102b: Opening 102c: Top wall 102d: Bottom wall 104: Storage area 106: First guide rail 106a: Holding surface 106b: Side surface 108: Second guide rail 108a: Holding surface 110: Elevating unit (elevating mechanism)
112: Hanging member 114: Drive mechanism 116: Contact member 118: Elastic member (expandable member)
120: Cover 122: First sensor 124: Second sensor 126: Third sensor 128: Support stand 130: Control section (control unit)
130a: First sensor control section 130b: Travel instruction section 130c: Second sensor control section 130d: Turn instruction section 130e: Approach control section 130f: Stop control section 132: Receiver 134: Transmitter 142: Motor 142a: Rotation shaft ( output shaft)
144a: First rotating shaft (first shaft)
144b: Second rotating shaft (second shaft)
146: Pulley 148: Connecting member 150a: Pulley 150b: Pulley 152: Connecting member 154a: Reel 154b: Reel 156a: Roller 156b: Roller 162: Drive mechanism 164: Motor 164a: Rotating shaft (output shaft)
166a: First rotating shaft (first shaft)
166b: Second rotating shaft (second shaft)
166c: Third rotation axis (third shaft)
168: Pulley 170: Connecting member 172: Reel 172a: Groove (recess)
172b: Protrusion (protrusion)
174: Fixed member 176: Guide 182: Lid portion 182a: Plate member 182b: Flexible member 184: Contact portion 184a: Fixed member 184b: Roller 186: Fixed block 188: Connection block (L-shaped block)
188a: Connecting portion 188b: Fixed portion 190: Connecting shaft 202: Base 202a: Recessed portion 202b: Recessed portion 202c: Piping connection portion 204: Lifting table 206: X-axis movement mechanism (processing feed unit)
206a: Table cover 206b: Dust-proof and drip-proof cover 208: Chuck table 208a: Holding surface 210: Clamp 212: Guide rail 214: First support structure 216: First rail 218: First moving mechanism 220: First holding unit 220a: Gripping mechanism 222: Second rail 224: Second moving mechanism 226: Second holding unit 228: Second support structure 230: Y-axis and Z-axis moving mechanism (index feed unit, incision feed unit)
232: Processing unit (cutting unit)
234: Cutting blade 236: Imaging unit (camera)
238: Cleaning unit 240: Spinner table 242: Spray nozzle 244: Cover 244a: Ceiling 244b: Door 246: Control device 248: Receiver 250: Transmitter 262: Lower frame 264: Upper frame 266: Road panel 268: Screw 270: Lower frame unit 270a: Lower frame unit 270b: Lower frame unit 270c: Lower frame unit 270d: Lower frame unit 272: Upper frame unit 272a: Upper frame unit 272b: Upper frame unit 274a: Bridging panel 274b: Bridging panel 276: Guard section 278: Driving area 280: Parking area 282: Opening 284: Standby area 286: Mark 286a: First mark 286b: Second mark 286c: Third mark 286d: Fourth mark 288: Terminal (power supply terminal)
290: Terminal support part 292: Wiring (power supply wiring)
302: Control unit 304: Receiver 306: Transmitter 402: Processing device (cutting device)
404: Elevating table 406: Cassette storage mechanism 406a: First cassette storage mechanism 406b: Second cassette storage mechanism 11: Workpiece 13: Tape (dicing tape)
15: Frame 17: Workpiece unit 17a: Workpiece unit 17b: Workpiece unit A: Placement area _A1a : First placement area _A1b : First placement area _A2 : Second placement area Placement area _B1a : First conveyance area _B1b : First conveyance area _B2 : Second conveyance area _C1 : Arrow _{C2 :} Arrow _C3 : Arrow D1: Arrow _D2 : Arrow _D3 : Arrow E ₁ : Arrow E ₂ : Arrow F ₁ : Arrow F ₂ : Arrow G: Arrow

Claims (4)

A transport vehicle that transports a workpiece by traveling on a transport path installed above a processing device,
A frame to which running wheels are attached,
a container containing the workpiece;
a storage area that is provided below the frame and above the lower end of the wheel, and stores the container when the workpiece is transported on the transport path;
a lifting unit that is provided on the frame and lifts and lowers the container;
a contact member provided on the frame and in contact with the upper surface side of the container when the workpiece is transported on the transport path;
A control unit that controls the elevating unit,
The lifting unit includes a hanging member whose one end side is connected to the container, and a motor that generates power to wind up the hanging member,
The control unit stops the rotation of the motor based on a change in the current value of the motor when the hanging member is wound up and the container comes into contact with the contact member. . The control unit monitors the height of the container based on the rotation amount of the motor when the hanging member is wound up, and reduces the rotation speed of the motor before the container is stored in the storage area. 2. The carrier vehicle according to claim 1, wherein the container is decelerated. The conveyance vehicle according to claim 1 or 2 , wherein the contact member contacts the upper surface side of the container at three or more points. The transport vehicle according to any one of claims 1 to 3 , wherein a region of the contact member that contacts the container is made of an elastic member.