KR101215792B1 - 컬러 필터 제조 라인, 라인 제어 시스템, 라인 제어 방법 - Google Patents

컬러 필터 제조 라인, 라인 제어 시스템, 라인 제어 방법 Download PDF

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Publication number
KR101215792B1
KR101215792B1 KR1020117010170A KR20117010170A KR101215792B1 KR 101215792 B1 KR101215792 B1 KR 101215792B1 KR 1020117010170 A KR1020117010170 A KR 1020117010170A KR 20117010170 A KR20117010170 A KR 20117010170A KR 101215792 B1 KR101215792 B1 KR 101215792B1
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KR
South Korea
Prior art keywords
substrate
monitoring
board
line
buffer
Prior art date
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KR1020117010170A
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English (en)
Korean (ko)
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KR20110065557A (ko
Inventor
요헤이 오가와
아키라 미야마
미치타카 하타
겐스케 구와무라
Original Assignee
도판 인사츠 가부시키가이샤
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Application filed by 도판 인사츠 가부시키가이샤 filed Critical 도판 인사츠 가부시키가이샤
Publication of KR20110065557A publication Critical patent/KR20110065557A/ko
Application granted granted Critical
Publication of KR101215792B1 publication Critical patent/KR101215792B1/ko

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    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B5/00—Optical elements other than lenses
    • G02B5/20—Filters
    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/0005—Production of optical devices or components in so far as characterised by the lithographic processes or materials used therefor
    • G03F7/0007—Filters, e.g. additive colour filters; Components for display devices
    • G—PHYSICS
    • G02—OPTICS
    • G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
    • G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
    • G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour 
    • G02F1/13—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour  based on liquid crystals, e.g. single liquid crystal display cells
    • G02F1/133—Constructional arrangements; Operation of liquid crystal cells; Circuit arrangements
    • G02F1/1333—Constructional arrangements; Manufacturing methods
    • G02F1/1335—Structural association of cells with optical devices, e.g. polarisers or reflectors
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B5/00—Optical elements other than lenses
    • G02B5/001—Axicons, waxicons, reflaxicons

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  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Nonlinear Science (AREA)
  • Optics & Photonics (AREA)
  • Mathematical Physics (AREA)
  • Chemical & Material Sciences (AREA)
  • Crystallography & Structural Chemistry (AREA)
  • Optical Filters (AREA)
KR1020117010170A 2009-01-16 2010-01-15 컬러 필터 제조 라인, 라인 제어 시스템, 라인 제어 방법 KR101215792B1 (ko)

Applications Claiming Priority (5)

Application Number Priority Date Filing Date Title
JP2009007331 2009-01-16
JPJP-P-2009-007331 2009-01-16
JP2009035498 2009-02-18
JPJP-P-2009-035498 2009-02-18
PCT/JP2010/000195 WO2010082495A1 (ja) 2009-01-16 2010-01-15 カラーフィルタ製造ライン、ライン制御システム、ライン制御方法

Publications (2)

Publication Number Publication Date
KR20110065557A KR20110065557A (ko) 2011-06-15
KR101215792B1 true KR101215792B1 (ko) 2012-12-26

Family

ID=42339747

Family Applications (1)

Application Number Title Priority Date Filing Date
KR1020117010170A KR101215792B1 (ko) 2009-01-16 2010-01-15 컬러 필터 제조 라인, 라인 제어 시스템, 라인 제어 방법

Country Status (5)

Country Link
JP (1) JP5569809B2 (ja)
KR (1) KR101215792B1 (ja)
CN (1) CN102216815B (ja)
TW (1) TWI480601B (ja)
WO (1) WO2010082495A1 (ja)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN106249452A (zh) * 2016-10-11 2016-12-21 武汉华星光电技术有限公司 一种cf基板的制造方法及uv固化装置、cf基板生产线

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2000019318A (ja) * 1998-07-02 2000-01-21 Toshiba Electronic Engineering Corp カラーフィルタパネルの製造装置
JP2004109968A (ja) * 2002-07-22 2004-04-08 Dainippon Printing Co Ltd カラーフィルター製造ラインシステム

Family Cites Families (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP3174409B2 (ja) * 1992-09-08 2001-06-11 株式会社日立国際電気 半導体製造装置、及び半導体製造装置に於ける基板処理方法
JP2001206543A (ja) * 2000-01-31 2001-07-31 Mitsubishi Electric Corp 自動枚葉処理ライン
JP3756402B2 (ja) * 2000-12-08 2006-03-15 富士写真フイルム株式会社 基板搬送装置及び方法
JP4334190B2 (ja) * 2002-08-09 2009-09-30 大日本印刷株式会社 バッファ装置およびカラーフィルター製造ライン
JP2006019622A (ja) * 2004-07-05 2006-01-19 Dainippon Screen Mfg Co Ltd 基板処理装置

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2000019318A (ja) * 1998-07-02 2000-01-21 Toshiba Electronic Engineering Corp カラーフィルタパネルの製造装置
JP2004109968A (ja) * 2002-07-22 2004-04-08 Dainippon Printing Co Ltd カラーフィルター製造ラインシステム

Also Published As

Publication number Publication date
CN102216815A (zh) 2011-10-12
TWI480601B (zh) 2015-04-11
TW201033655A (en) 2010-09-16
KR20110065557A (ko) 2011-06-15
JPWO2010082495A1 (ja) 2012-07-05
WO2010082495A1 (ja) 2010-07-22
CN102216815B (zh) 2014-02-05
JP5569809B2 (ja) 2014-08-13

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