KR101213496B1 - Laser irradiation device and method for manufacturing organic light emitting display device using the same - Google Patents

Abstract

An embodiment of the present invention provides a laser irradiation apparatus capable of cleaning and transferring during a manufacturing process of an organic light emitting display device by a laser thermal transfer method and a method of manufacturing an organic light emitting display device using the same.

Description

Laser irradiation device and method for manufacturing organic light emitting display device using the same}

An aspect of the present invention relates to a laser irradiation apparatus and a method of manufacturing an organic light emitting display device using the same, and more particularly, a laser irradiation apparatus capable of cleaning and transferring during a laser thermal transfer process and an organic light emitting display device using the same. It is about.

Flat panel display devices are used as display devices replacing cathode ray-ray tube display devices due to their light weight and thinness. Representative examples of such a flat panel display include a liquid crystal display (LCD) and an organic light emitting diode (OLED). Among these, the organic light emitting display device has excellent luminance characteristics and viewing angle characteristics as compared to the liquid crystal display device, and does not require a backlight, and thus, an organic light emitting display device may have an ultra-thin shape.

Such an organic light emitting display device combines electrons and holes injected through a cathode and an anode to an organic thin film to recombine to form excitons, and a specific wavelength is determined by energy from the excitons formed. The display device using the phenomenon that light is generated.

The organic light emitting display device is classified into a passive matrix method and an active matrix method according to a driving method, and an active driving method has a circuit using a thin film transistor (TFT). The passive driving method has an advantage in that the display area is composed of a matrix-type device by an anode and a cathode, and thus is easy to manufacture, but due to problems such as resolution, an increase in driving voltage, and a decrease in material life, Limited to the application of the display. In the active driving method, a thin film transistor is mounted in each pixel to display a stable luminance as a constant current is supplied to each pixel. In addition, low power consumption plays an important role in realizing high resolution and large display.

Laser induced thermal imaging (Laser Induced Thermal Imaging) is a method of forming red, green, and blue light emitting layers in order for the organic light emitting display device to realize full color. In the laser thermal transfer method, a laser beam generated from a laser source is patterned using a mask pattern, and the patterned laser beam is formed on a donor substrate including a transfer layer, which is an organic layer including a base substrate, a photothermal conversion layer, and a light emitting layer. By irradiating a portion of the transfer layer to the device substrate by irradiation, a method of forming an organic film layer pattern including the light emitting layer on the device substrate, each light emitting layer can be finely patterned, there is an advantage that the dry process.

A main object of the present invention is to provide a laser irradiation apparatus capable of cleaning and transferring during a manufacturing process of an organic light emitting display device by a laser thermal transfer method and a method of manufacturing an organic light emitting display device using the same.

A laser irradiation apparatus according to an embodiment of the present invention includes a main body portion for generating a laser beam, and a head portion for providing a movement path of the ray point beam, wherein the head portion generates vibration to irradiate the laser beam. Foreign matter on the surface of the object can be removed.

In the present invention, the head portion, a laser emitting portion for providing the movement path so that the laser beam is emitted to the outside, a vibration generating portion for generating a vibration while the gas is introduced and discharged, and absorbs the foreign matter A suction port may be provided.

In the present invention, the vibration generating portion, the inlet portion to which the gas flows in, the outlet portion through which the gas flows out, the passage portion connecting the inlet portion and the outlet portion and providing a passage of the gas, and the passage It may be provided with vibration particles disposed in the portion.

In the present invention, the vibration particles may not be discharged to the outside through the inlet.

In the present invention, the vibration particles may be formed larger than the diameter of the inlet or the outlet.

In the present invention, the vibrating particles may be made of a material that can move by the flow of the gas.

In the present invention, the vibrating particles may be made of ceramic.

In the present invention, the vibration generating unit may generate the vibration by moving the vibration particles by the flow of the gas when the gas is introduced into the inlet and discharged to the outlet.

In the present invention, the vibration generating unit may generate ultrasonic waves.

In the present invention, the suction port may suck the foreign matter on the irradiated object by maintaining the pressure inside thereof less than the pressure outside.

In the present invention, the inside of the suction port can maintain a vacuum state.

In the present invention, the gas may be nitrogen gas or air.

According to another aspect of the present invention, there is provided a method of manufacturing an organic light emitting display device. The method of manufacturing an organic light emitting display device by a laser thermal transfer method includes laminating a donor film and an acceptor substrate, and a surface of the donor film. Cleaning and irradiating a laser beam onto the donor film to transfer the transfer layer of the donor film to the acceptor substrate.

In the present invention, the cleaning step, spraying a gas on one surface of the donor film, applying a vibration to one surface of the donor film, one surface of the donor film by the sprayed gas and the applied vibration It may include the step of separating the foreign matter present on one surface of the donor film, and the step of sucking the foreign matter.

According to an embodiment of the present invention, by performing cleaning and transfer at the same time during the manufacturing process of the organic light emitting display device by the laser thermal transfer method, it is possible to prevent the transfer failure by the particles generated during the thermal transfer, to improve the transfer quality Can be.

1 is a perspective view schematically showing a laser irradiation apparatus according to an embodiment of the present invention,
FIG. 2 is a schematic cross-sectional view of the laser irradiation apparatus shown in FIG. 1.

BRIEF DESCRIPTION OF THE DRAWINGS The present invention is capable of various modifications and various embodiments, and specific embodiments are illustrated in the drawings and described in detail in the detailed description. It is to be understood, however, that the invention is not to be limited to the specific embodiments, but includes all modifications, equivalents, and alternatives falling within the spirit and scope of the invention. DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS Hereinafter, the present invention will be described in detail with reference to the accompanying drawings.

The terms first, second, etc. may be used to describe various elements, but the elements should not be limited by terms. Terms are used only for the purpose of distinguishing one component from another.

The terminology used herein is for the purpose of describing particular example embodiments only and is not intended to be limiting of the present invention. Singular expressions include plural expressions unless the context clearly indicates otherwise. In this application, the terms "comprise" or "have" are intended to indicate that there is a feature, number, step, operation, component, part, or combination thereof described in the specification, and one or more other features. It is to be understood that the present invention does not exclude the possibility of the presence or the addition of numbers, steps, operations, components, components, or a combination thereof.

Hereinafter, an embodiment of an organic light emitting diode display according to the present invention will be described in detail with reference to the accompanying drawings, and in the following description with reference to the accompanying drawings, the same or corresponding components are assigned the same reference numerals and duplicated thereto. The description will be omitted.

1 is a perspective view schematically showing a laser irradiation apparatus according to an embodiment of the present invention, Figure 2 is a cross-sectional view schematically showing a head portion of the laser irradiation apparatus shown in FIG.

1 and 2, the laser irradiation apparatus 100 according to an embodiment of the present invention is located on the donor film 210. The laser irradiation apparatus 100 may be installed outside or inside the chamber (not shown), and may be installed so that the laser beam may be emitted from the upper portion of the donor film 210.

The laser irradiation apparatus 100 may include a main body 110 and a head 120.

The main body 110 generates a laser beam. The main body 110 may use a CW ND: YAG laser (1604 nm), include a galvanometer scanner, and include a scan lens and a cylinder lens. However, the present invention is not limited thereto.

The head 120 may include a laser emitter 121, a vibration generator 122, and a suction port 123.

The laser emitter 121 is a path along which the laser beam generated by the main body 110 moves. The laser beam is irradiated to the outside through the laser emitter 121. The laser emission part 121 penetrates toward the main body part 110 and the other end toward the donor film 210 which is the irradiated body.

 The vibration generator 122 may include an inlet 122a, an outlet 122b, a passage 122c, and a vibration particle 122d. Gas flows into the inlet 122a and gas flows into the inlet 122a through the outlet 122b. The gas flowing out to the outlet 122b may face the donor film 210. The gas leaked into the donor film 210 may blow foreign matter present on the donor film 210 by the flow thereof to remove the foreign matter on the donor film 210. The gas may be nitrogen gas or air.

The passage portion 122c connects the inlet portion 122a and the outlet portion 122b and provides a passage of the gas. Vibration particles 122d may be disposed in the passage part 122c. The vibrating particle 122d may be disposed at the outlet 122b. The vibrating particle 122d may be larger than the diameter of the outlet portion 122b. Therefore, the vibrating particles 122d do not exit the outlet 122b. The vibrating particle 122d may be made of a material that can move by the flow of gas moving from the inlet portion 122a to the outlet portion 122b. For example, the vibrating particles 122d may be made of ceramic.

The vibrating particle 122d generates vibration by the flow of gas. In detail, the vibration particles 122d are present in the passage portion 122c, and the vibration particles 122d are

The inlet 122a may move in accordance with the flow of the gas flowing through the passage 122c and exit the outlet 122b to generate vibration. In particular, the vibration particles 122d may generate vibration while colliding with the passage part 122c while moving in accordance with the flow of gas. The vibration generator 122 may generate ultrasonic waves.

The sound wave generated by the vibration generator 122 is transmitted to the foreign matter present on the donor film 210, and the foreign matter vibrating by the sound wave is absorbed by the suction port 123, thereby cleaning the surface of the donor film 210. do. The pressure in the suction port 123 is kept smaller than the pressure outside the head 120, so that the gas flowing out of the vibration generating unit 122 is sucked into the suction port 123. The pressure in the suction port 123 can be maintained in a vacuum.

In addition, the foreign matter on the donor film 210 is also sucked into the suction port 123 to clean the surface of the image of the donor film 210. The foreign matter on the donor film 210 may be lifted off the surface of the donor film 210 by the gas leaked from the vibration generating unit 122 and the vibration, and the foreign matter raised from the donor film 210 surface may be lifted in the inlet 123. It can be easily sucked through) so that the surface of the donor film 210 is more clean.

The foreign matter on the donor film 210 may interfere with the path of the laser beam irradiated onto the donor film 210 to cause a transfer failure in which the transfer layer is not sufficiently transferred from the donor film 210 to the acceptor substrate 220. However, according to an embodiment of the present invention, the foreign material on the surface of the donor film 210 is not only the gas flowing out of the vibration generating unit 122 but also the donor film 210 by the vibration generated in the vibration generating unit 122. Since it is more easily fall off the surface of the foreign matter is sucked into the suction port 123 is removed, it can prevent the transfer failure by the foreign matter.

Hereinafter, a method of manufacturing the organic light emitting display apparatus using the laser irradiation apparatus 100 will be described.

The laser beam irradiated from the laser irradiation apparatus 100 is irradiated onto one surface of the acceptor substrate 220 and the donor film 210 lined up. In the donor film 210 irradiated with a laser beam, a transfer layer (not shown) is transferred onto the acceptor substrate 220. The above is as follows.

The donor film 210 preferably has a size sufficient to cover the entire acceptor substrate 220. However, the donor film 210 may have a size smaller than the acceptor substrate 220 as necessary.

Predetermined elements constituting the organic light emitting diode may be formed on the acceptor substrate 220. That is, the thin film transistor, a planarization layer disposed on the upper portion, and a pixel electrode may be formed on the planarization layer.

The donor film 210 may be a donor film for an organic light emitting device. The donor film 210 may be formed by stacking a base substrate, a photothermal conversion layer, and a transfer layer. The transfer layer may face the acceptor substrate 220, and the laser irradiation apparatus 100 may be disposed toward the substrate substrate.

The base substrate may be made of a transparent polymer, and such polymers may include polyester such as polyethylene and terephthalate, polyacryl, polyepoxy, polyethylene, polystyrene, and the like.

The light-to-heat conversion layer is a light source, that is, a layer that absorbs and converts a laser beam into heat, and may be formed of one of an organic layer, a metal, and a composite layer thereof, in which a laser beam absorbing material is included.

A gas generating layer (not shown) may be formed at a position adjacent to the photothermal conversion layer. When the gas generating layer absorbs light or heat, it generates a decomposition reaction and releases nitrogen gas or hydrogen gas to provide transfer energy, and is selected from pentaerythrite tetranitrate (PETN) and trinitrotoluene (TNT). It may be made of. Since the gas generating layer needs to receive heat from the photothermal conversion layer, the gas generating layer may form a single layer by adjoining the upper or lower portion of the photothermal conversion layer or by mixing with a material forming the photothermal conversion layer.

The transfer layer is made of an organic material as a material film to be patterned on the acceptor substrate. When the organic light emitting device is manufactured using the donor film, the donor film includes an organic film for a hole injection layer, an organic film for a hole transport layer, an organic film for a light emitting layer, an organic film for a hole suppression layer, an organic film for an electron transport layer, and an organic film for an electron injection layer. It may have a single layer film or two or more types of multilayer film structure selected from the group consisting of. Furthermore, the organic layers may be a high molecular material or a low molecular material. On the other hand, the transfer layer may be formed using one method selected from the group consisting of extrusion, spin coating, knife coating, vacuum deposition and CVD (chemical vapor deposition).

A buffer layer (not shown) may be further formed between the photothermal conversion layer and the transfer layer. The buffer layer controls the adhesion with the transfer layer so that the transfer pattern characteristics can be improved.

The donor film 210 may further include not only the above layers but also layers having various uses, and may be used by changing the lamination structure according to the use.

The transfer layer is transferred onto the acceptor substrate 220 by irradiating a laser beam to a predetermined region of the donor film 210 which is laminated on the acceptor substrate 220.

In this case, a laser beam generated by the laser irradiation apparatus 100 is used as a light source irradiated on the donor film 210.

The laser irradiation apparatus 100 separates the transfer layer from the donor film 210 and transfers the transfer layer onto the acceptor substrate 220 to generate a laser beam required to form a predetermined pattern. Therefore, the intensity of the laser beam generated by the laser irradiation apparatus 100 has an intensity enough to break the coupling in the transfer layer.

One surface of the donor film 210 may be provided with foreign substances while passing through various deposition chambers and transfer chambers. The foreign matters interfere with the path of the laser beam, which causes a problem that a sufficient amount of the laser beam does not reach the transfer layer and is incompletely transferred. Therefore, in the present invention, as described above, the surface of the donor film 210 is cleaned before the laser beam irradiation.

To clean the surface of the donor film 210, first, a gas such as nitrogen gas or air is injected onto the surface of the donor film 210. The gas injected onto the donor film 210 allows foreign matter to be separated from the surface of the donor film 210. In addition, in the present invention, by applying a vibration to the surface of the donor film 210, foreign matter is more easily separated from the surface of the donor film 210. That is, the gas is discharged from the head portion 120 of the laser irradiation device 100, the vibration particles 122d of the vibration generating unit 122 rotates or collides as the gas is discharged to generate a vibration, thus generated The vibration is transmitted to the foreign matter on the donor film 210 so that the foreign matter falls off the surface of the donor film 210 more easily.

The foreign matter dropped from the donor film 210 is sucked and removed by the suction port 123 of the laser irradiation apparatus 100.

Foreign matter on the donor film 210 may be removed before the laser beam irradiation, thereby preventing a transfer failure caused by the foreign matter.

While the present invention has been described with reference to exemplary embodiments, it is to be understood that the invention is not limited to the disclosed embodiments, but, on the contrary, is intended to cover various modifications and equivalent arrangements included within the spirit and scope of the appended claims. Accordingly, the true scope of the present invention should be determined by the technical idea of the appended claims.

100: laser irradiation device 110: the main body
120: head portion 121: laser emitting portion
122: vibration generating unit 123: suction unit

Claims (14)

A main body unit generating a laser beam; And
And a head unit providing a moving path of the ray point beam,
Wherein:
A laser emitter providing the movement path so that the laser beam can be emitted to the outside;
Vibration generating unit for generating a vibration as the gas flows in and out; And
A suction port for absorbing the foreign matter;
And the head portion vibrates the gas, and the vibration vibrates the foreign matter on the surface of the irradiated object to which the laser beam is irradiated so that the foreign matter is removed by the suction port. delete The method of claim 1,
The vibration generating unit may include:
An inlet for introducing the gas;
An outlet portion through which the gas flows out;
A passage portion connecting the inlet portion and the outlet portion and providing a passage of the gas; And
And a vibrating particle disposed in the passage portion. The method of claim 3,
The vibrating particle is a laser irradiation device, characterized in that not discharged to the outside through the inlet. The method of claim 3,
The vibration particle is a laser irradiation apparatus, characterized in that larger than the diameter of the inlet or the outlet. The method of claim 3,
The vibration particle is a laser irradiation device, characterized in that made of a material that can move by the flow of the gas. The method according to claim 6,
The vibration particle is a laser irradiation apparatus, characterized in that made of ceramic. The method of claim 3,
And the vibration generating unit generates the vibration by moving the vibration particles by the flow of the gas when the gas is introduced into the inlet and discharged to the outlet. The method according to claim 1 or 8,
The vibration generator is a laser irradiation apparatus, characterized in that for generating ultrasonic waves. The method of claim 1,
And the suction port keeps the pressure inside thereof smaller than the outside pressure to suck the foreign matter on the object to be irradiated. The method of claim 10,
The inside of the suction port is a laser irradiation apparatus, characterized in that to maintain a vacuum state. The method of claim 1,
The gas is a laser irradiation apparatus, characterized in that the nitrogen gas or air. In the method of manufacturing an organic light emitting display device using a laser irradiation device,
The laser irradiation device,
A main body unit generating a laser beam; And a head unit providing a movement path of the laser beam.
Wherein:
A laser emitter providing the movement path so that the laser beam can be emitted to the outside;
Vibration generating unit for generating a vibration as the gas flows in and out; And
A suction port for absorbing the foreign matter;
The manufacturing method of the organic light emitting display device,
Laminating the donor film and the acceptor substrate;
Cleaning one surface of the donor film; And
Irradiating a laser beam on the donor film to transfer the transfer layer of the donor film to the acceptor substrate,
The cleaning step,
Spraying the gas flowing out of the vibration generating unit on one surface of the donor film;
Applying vibration generated by the vibration generator to one surface of the donor film;
Separating foreign matter present on one surface of the donor film from one surface of the donor film by the sprayed gas and the applied vibration; And
Inhaling a foreign material through the suction hole; and manufacturing the organic light emitting display device. delete

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