KR101209118B1 - Polysilicon manufacturing electrode, apparatus for welding polysilicon manufacturing electrode and method for welding thereof - Google Patents

Abstract

The present invention relates to a welding apparatus for an electrode for producing polysilicon, an electrode for producing polysilicon, and a method for producing the same.
The welding apparatus of the electrode for producing polysilicon according to the present invention includes a friction stir welding machine having a cooling water circulation part and a temperature sensor, the cooling water being supplied to the cooling water circulation part according to the temperature detected by the temperature sensor, and moving up and down; A pair of electrode chucks rotatably fixed to both ends of a copper polysilicon electrode for welding in a hollow state; An electrode support for supporting the lower end of the polysilicon electrode; A first slider slidably sliding one electrode chuck in an electrode direction for producing polysilicon; And a second slider that slides to change the position of the polysilicon manufacturing electrode relative to the friction stir welder.
In the present invention, it is possible to ensure the airtightness, smoothness and balanced welding strength of the electrode for producing polysilicon of oxygen-free copper material, to prevent breakage of the friction stir welding machine even at high welding temperature, and it is automatic so that the skill of the operator There is no unnecessary effect.

Description

POLYSILICON MANUFACTURING ELECTRODE, APPARATUS FOR WELDING POLYSILICON MANUFACTURING ELECTRODE AND METHOD FOR WELDING THEREOF}

The present invention relates to a welding apparatus for an electrode for producing polysilicon, an electrode for producing polysilicon, and a method for producing the same.

Polysilicon has a crystal structure of polycrystalline state and very high purity, and is widely used commercially such as semiconductor devices and solar cells. Such polysilicon is prepared by the Siemens precipitation method of producing polysilicon in a solid state using silane gas. Siemens precipitation is a method of producing rod-type polysilicon from silane gas using a Bell-Jar reactor. The silicon core filament is ∩-shaped inside the vertical reactor, and the end of the silicon core filament is Connect Next, by preheating to 300 ℃ or more using a preheater to lower the specific resistance of the silicon core filament to enable electrical resistance heating. Next, electricity of a predetermined potential difference is supplied through an electrode to heat the silicon core filament to a high temperature, and a reaction gas composed of silane gas and hydrogen gas is supplied into the vertical reactor. Thus, polysilicon is deposited on the surface of the silicon core filament. The polysilicon manufacturing electrode for electric resistance heating is formed of a copper material, especially oxygen-free copper to withstand high electrical resistance temperature, and after joining the two cylindrical electrode members to each other to form a hollow inside, Filling the hollow part with fluid facilitates the generation of electrical resistance.

On the other hand, the electrode for polysilicon manufacturing maintains airtightness so that leakage does not occur when joining two cylindrical electrode members because the polysilicon is deposited by heating the filament with an electric resistance heat of 500 ° C. Is important. However, according to the conventional MIG / TIG welding, laser / electron beam welding method, there is a problem that the deformation is generated, the airtightness is lowered, smoothness and balanced weld strength is lowered. On the other hand, the friction stir welding machine can ensure airtightness, smoothness and balanced welding strength, but it is difficult to weld the electrode for producing polysilicon of anoxic copper material having a melting point of 1083 ° C., and the friction stir welding machine has a high welding temperature. There is a problem that is broken.

SUMMARY OF THE INVENTION The present invention has been made to solve the above problems, and provides an electrode for polysilicon production, a welding device for producing polysilicon, and a welding method thereof capable of ensuring airtightness, smoothness and balanced welding strength. have.

In addition, the present invention can easily weld an electrode for producing polysilicon of an oxygen-free copper material, and to provide a welding device and a welding method of the electrode for producing polysilicon that can prevent damage to the welding device even at a high welding temperature. There is this.

The problem to be solved by the present invention is not limited to the above-mentioned problem, another problem to be solved by the present invention not mentioned here is apparent to those skilled in the art from the following description. Can be understood.

The welding apparatus of the electrode for producing polysilicon according to the present invention includes a friction stir welding machine having a cooling water circulation part and a temperature sensor, the cooling water being supplied to the cooling water circulation part according to the temperature detected by the temperature sensor, and moving up and down; A pair of electrode chucks rotatably fixed to both ends of a copper polysilicon electrode for welding in a hollow state; An electrode support for supporting the lower end of the polysilicon electrode; A first slider slidably sliding one electrode chuck in an electrode direction for producing polysilicon; And a second slider that slides to change the position of the polysilicon manufacturing electrode relative to the friction stir welder.

In addition, the friction stir welding machine of the present invention, the cooling water circulation portion is formed so as to circulate from the outside of the friction stir welding machine, the temperature sensor extends to the end of the probe chuck of the friction stir welding machine, and is connected to the other end of the temperature sensor is connected to the temperature signal The apparatus further includes a wireless transmitter for transmitting to a control unit located outside the friction stir welding machine, wherein the control unit moves upwards of the friction stir welding machine when the temperature of the end of the probe chuck rises, and circulates the coolant through the cooling water circulation unit to provide the friction stir welding machine. It is characterized by lowering the temperature.

In addition, the probe of the friction stir welding machine of the present invention is characterized in that the titanium-aluminum-nitrite coating (AlTiN coating) on the tungsten carbide-cobalt (WC-Co) cemented carbide material.

In addition, the electrode for polysilicon production of the present invention is characterized in that the cylindrical surface of the oxygen-free copper material and the circumferential surface to which the second electrode member, part of which is inserted into the first electrode member, are joined are welded. .

In addition, in the present invention, after the circumferential surface welding is finished, the second slider is slid to change the position of the polysilicon manufacturing electrode for the friction stir welding machine from the welding portion to the portion where the drill hole of the first electrode member is to be formed. , The friction stir welding machine is moved upward to complete the welding operation.

The welding method of the electrode for producing polysilicon of the present invention comprises: a chucking step of sliding an electrode chuck in close contact with both ends of an electrode for producing polysilicon made of copper for welding in a hollow state by sliding the first slider; A welding step of welding with a friction stir welder along the circumferential surface of the electrode for producing polysilicon; The friction stir welding machine is equipped with a coolant circulation part and a temperature sensor, and when the temperature sensed by the temperature sensor rises, the friction stir welding machine moves upward and circulates the coolant to the coolant circulation part to maintain the temperature of the friction stir welding machine. step; And after the circumferential surface welding is completed, the second slider is slid to change the position of the polysilicon manufacturing electrode for the friction stir welding machine from the welding portion of the circumferential surface to the portion where the drill hole of the circumferential surface is to be formed, and then the friction stir welding machine is upward. And a welding completion step of moving to complete the welding operation.

In addition, the probe of the friction stir welding machine of the present invention is characterized in that the titanium-aluminum-nitrite coated on a tungsten carbide-cobalt-based cemented carbide material.

In addition, the electrode for producing polysilicon of the present invention is characterized in that the cylindrical surface of the oxygen-free copper material and the circumferential surface to which the second electrode member, part of which is inserted into the first electrode member, are joined are welded. do.

The electrode for polysilicon manufacture of this invention is manufactured by the welding method of the electrode for polysilicon manufacture mentioned above.

By the means for solving the above problems, the welding device of the polysilicon production electrode, the polysilicon production electrode and the welding method thereof have an effect of ensuring the airtightness, smoothness and balanced weld strength of the polysilicon production electrode. have.

In addition, the welding device and the welding method of the polysilicon production electrode according to the present invention can easily weld the polysilicon production electrode of the oxygen-free copper material, it is effective to prevent breakage of the friction stir welding machine even at high welding temperature have.

In addition, since the welding device and the welding method of the electrode for producing polysilicon according to the present invention is automatically achieved, there is an unnecessary effect of the operator's skill.

1 is a front view of a welding apparatus of an electrode for producing polysilicon according to an embodiment of the present invention.
2 is a plan view of a welding device of an electrode for producing polysilicon according to an embodiment of the present invention.
Figure 3 is a right side view of the welding apparatus of the electrode for producing polysilicon according to an embodiment of the present invention.
4 is a view for explaining the coolant circulation unit of the friction stir welding machine according to an embodiment of the present invention.
5 is a view for explaining a temperature sensor of the friction stir welding machine according to an embodiment of the present invention.
6 is a view for explaining an electrode for producing polysilicon according to an embodiment of the present invention.
7 is a view for explaining the welding operation of the welding device of the electrode for producing polysilicon according to an embodiment of the present invention.
8 is a view for explaining a welding method of the electrode for producing polysilicon according to an embodiment of the present invention.

Specific matters including the problem to be solved, the solution to the problem, and the effects of the present invention as described above are included in the following embodiments and the drawings. Advantages and features of the present invention, and methods of achieving the same will become apparent with reference to the embodiments described below in detail in conjunction with the accompanying drawings.

Hereinafter, with reference to the accompanying drawings will be described in detail the present invention.

1 to 3 are views for explaining a welding device of the electrode for producing polysilicon according to an embodiment of the present invention. Specifically, FIG. 1 is a front view of a welding device for producing polysilicon electrodes according to an embodiment of the present invention, FIG. 2 is a plan view of a welding device for producing polysilicon electrodes according to an embodiment of the present invention, and FIG. Right side view of the welding apparatus of an electrode for producing polysilicon according to an embodiment of the present invention.

As shown in Figures 1 to 3, the welding apparatus of the electrode for producing polysilicon according to an embodiment of the present invention is a friction stir welding machine 110, electrode chuck (120a, 120b), electrode support 130, first A slider 140 and a second slider 150 are included.

When the friction stir welding machine 110 is inserted into the material to be joined while rotating the probe at a high speed, heat is generated by mutual friction between the tool and the material to be bonded, and the material around the tool is softened by the frictional heat, and the material by stirring the tool. As a welding machine for welding the material to be joined on the principle that the materials on both sides of the joint forcibly mixed by the plastic flow of the friction stir welding machine 110 according to an embodiment of the present invention, the probe chuck for tightly fixing the probe 111 The welding machine body 113 connecting the probe chuck 112 and the welding motor 114 to form the body of the friction stir welding machine 110, and the welding motor 114 for rotating the probe 111 at high speed. It consists of a friction stir welding. By such a principle, the airtightness, smoothness, and balanced weld strength of the to-be-joined material can be ensured.

Meanwhile, the electrode for producing polysilicon (10, described in detail with reference to FIG. 6), which is a material to be bonded according to an embodiment of the present invention, is a copper material, especially an oxygen-free copper material having a melting point of about 1083 ° C., so that the probe 111 is Tungsten carbide-cobalt (WC-Co) cemented carbide material with sufficient solvent resistance and abrasion resistance should be treated with titanium-aluminum-nitrite coating. Specifically, the probe 111 is a material dough by mixing tungsten and a catalyst, and then processed to the roughing level to the first shape processing, and then to the first sintering process, and then finished within ± 0.5 to the secondary shape After processing, the secondary sintering treatment is performed, and finally, titanium-aluminum-nitrite coating is completed. By using such a probe 111, the electrode 10 for polysilicon manufacture of an oxygen-free copper material can be easily welded.

In addition, the friction stir welding machine 110 may include a transfer plate 115 supporting the friction stir welding machine 110 and moving in the vertical direction, and a sliding bar 116 for guiding the transfer plate 115 to slide in the vertical direction. , The feed motor 117 is provided to provide a transfer force to easily move the friction stir welding machine 110 in the vertical direction.

In addition, in one embodiment of the present invention, in order to prevent breakage of the friction stir welding machine 110 due to the high welding temperature, the cooling water circulation part (see reference numeral '118' in FIG. 4) and the temperature sensor (reference numeral 'in FIG. 5'). 119 '). That is, the friction stir welding machine 110 is moved in the vertical direction according to the temperature sensed by the temperature sensor, and the cooling water is supplied to the cooling water circulation unit. A more detailed description thereof will be described later with reference to FIGS. 4 and 5.

The electrode chucks 120a and 120b consist of a pair of left and right chucks. In FIG. 1, the left electrode chuck 120a has a clamping chuck 121a which is in close contact with and fixed to the electrode 10 for polysilicon manufacturing, and a clamping cylinder which performs the close and release operations of the clamping chuck 121a. 122a, a clamping cylinder, and a rotating motor 123a for rotating the clamping chuck 121a. In addition, the electrode chuck 120b on the right side of FIG. 1 has a clamping chuck 121b for tightly contacting and fixing the electrode 10 for polysilicon production, and a clamping cylinder for performing a close operation and a release operation of the clapping chuck 121b. 122b). By such a configuration, the electrode chucks 120a and 120b are in close contact with both ends of the electrode 10 for polysilicon production and are rotatably fixed.

The electrode support 130 is supported at the lower end of the electrode 10 for producing polysilicon. In addition, the electrode support 130 is provided with a pair of rollers that rotate in conjunction with the rotation of the electrode 10 for producing polysilicon.

The first slider 140 slidably moves one electrode chuck in the direction of the electrode 10 for producing polysilicon. That is, the position of the electrode chuck 120b on the right side is adjusted according to the length of the electrode 10 for polysilicon manufacturing by sliding the electrode chuck 120b on the right side in FIG. To this end, the first slider 140 supports the electrode chuck 120b on the right side, a transfer plate 141 for transferring the electrode 10 for polysilicon production, and a sliding bar for guiding the transfer plate 141 to slide. 142 and a feed motor 143 that provides a feed force.

The second slider 150 slides to change the position of the polysilicon manufacturing electrode 10 with respect to the friction stir welding machine 110. That is, in FIG. 1, the second slider 150 is formed on the main base frame 160 which forms the foundation for supporting the other components at the bottom thereof, and includes the electrode chucks 120a and 120b and the electrode support ( 130 and the components of the first slider 140 are slid in the horizontal direction to adjust the position of the polysilicon manufacturing electrode 10 in the horizontal direction. At this time, since the friction stir welding machine 110 is fixed to the main base frame 160 so as not to move in the left and right directions, the welding position in the left and right directions of the polysilicon electrode 10 is slid by the sliding operation of the second slider 150. I can regulate it. To this end, the second slider 150 supports the integrated components and transfers the feed plate 151 to the left and right directions, a sliding bar 152 to guide the transfer plate 151 to slide, and a transfer force. And a feed motor 153 for providing.

The control unit 170 controls the operation of the welding device of the electrode for producing polysilicon according to an embodiment of the present invention. That is, the friction stir welding machine 110, the left electrode chuck 120a, the first slider 140, and the second slider 150 each include a motor for sliding or rotating, and these motors are the controller 170. Controlled by the welding operation of the welding apparatus according to an embodiment of the present invention can all be made automatically.

In addition, the control unit 170 moves the friction stir welding machine 110 in the up and down direction according to the temperature sensed by the above-described temperature sensor, and controls the operation of supplying the cooling water to the cooling water circulation unit, which will be described later with reference to FIG. 7. It also controls the prevention of generation.

The operation unit 180 includes a display panel for displaying various operating states and parameters of the welding apparatus for polysilicon manufacturing electrodes according to an embodiment of the present invention, and a plurality of buttons for inputting various parameters, so that the user is in a state of the welding apparatus. It is easy to check and operate.

As described above, the welding device for polysilicon production electrode according to an embodiment of the present invention can secure the airtightness, smoothness and balanced welding strength of the polysilicon production electrode, and easily produce the polysilicon production electrode of oxygen-free copper material. In addition, the welding can be prevented, and even at high welding temperatures, the friction stir welding machine can be prevented from being damaged, and since the automatic work is performed, the skill of the operator is unnecessary. 4 to 7 will be described in more detail with respect to the operating characteristics of each component of the welding device of the electrode for producing polysilicon according to an embodiment of the present invention.

4 is a view for explaining the coolant circulation unit of the friction stir welding machine according to an embodiment of the present invention.

As shown in FIG. 4, the coolant circulation part 118 is formed to circulate from the outside of the friction stir welding machine 110. Specifically, the cooling water circulation unit 118 is formed with a cooling water circulation path (not shown) circulating in the friction stir welding machine 110, as shown in (a) of FIG. 4, the cooling water inlet port 118 118a is formed, and the cooling water discharge port 118b is formed at the other side of the cooling water circulation unit 118 as shown in FIG. The coolant inlet 118a and the coolant outlet 118b are connected to a coolant pipe (not shown) for supplying or discharging the coolant of the outer glass. By such a configuration, the coolant can be easily circulated from the outside to the inside, and the cooling efficiency of the friction stir welding machine 110 can be improved.

5 is a view for explaining a temperature sensor of the friction stir welding machine according to an embodiment of the present invention.

As shown in FIG. 5, the temperature sensor 119 is formed to extend to the end of the probe chuck 112 of the friction stir welding machine, whereby the welding temperature is the highest, and the temperature causes damage to the friction stir welding machine 110. The temperature in the vicinity of the probe 111 which affects can be sensed well. In addition, since the friction stir welding machine 110 is a high-speed rotating device, it is connected to the other end of the temperature sensor 119, the wireless transmitter for transmitting a temperature signal to the control unit 170 located outside the friction stir welding machine 110 ( 119a) is further provided.

In addition, the controller 170 receives a temperature signal from the wireless transmitter 119a and compares it with a preset temperature threshold. At this time, when the temperature signal value rises to become the temperature threshold value, the controller 170 starts the cooling operation of the friction stir welding machine 110. That is, the temperature of the friction stir welding machine 110 may be lowered by circulating the cooling water in the cooling water circulation unit 118. The cooling water circulation rate can be controlled according to the sensed temperature signal value. In addition, by controlling the feed motor 117 to move the friction stir welding machine 110 upward, the friction surface of the probe 111 can be reduced to lower the frictional heat and lower the temperature of the friction stir welding machine 110. Furthermore, it is also possible to adjust the temperature of the friction stir welding machine 110 by controlling the rotational speed of the welding motor 114.

As described above, in one embodiment of the present invention, the electrode 10 for preparing polysilicon of anoxic copper material is welded, so that a rising welding temperature is sensed and easily cooled, thereby preventing breakage of the friction stir welding machine. Meanwhile, the cooling water circulation operation and the movement of the friction stir welding machine may be performed together, and only one of the two operations may be selectively performed.

6 is a view for explaining an electrode for producing polysilicon according to an embodiment of the present invention.

As shown in (a) and (b) of Figure 6, the polysilicon manufacturing electrode (10, 10 ') according to an embodiment of the present invention may be manufactured in different lengths as needed. Even if the lengths of the polysilicon electrodes 10 and 10 ′ are different, the electrode chuck 120b may be easily fixed by sliding the first slider 140.

In addition, the polysilicon electrodes 10 and 10 'are composed of a first electrode member 11 and a second electrode member 12. The first electrode member 11 and the second electrode member 12 are made of oxygen-free copper and are formed in a cylindrical shape having a step. Here, the polysilicon electrodes 10 and 10 'are joined to the circumferential surface 13 to which the first electrode member 11 and the second electrode member 12, part of which is inserted into the first electrode member 11, are joined. This is welded to form a hollow state inside. By friction stir welding, the joining circumferential surface 13 of the polysilicon manufacturing electrodes 10 and 10 'can ensure airtightness, smoothness, and balanced weld strength. In the hollow polysilicon manufacturing electrodes 10 and 10 ', a drill hole 11a is formed by a subsequent process and a fluid is filled.

On the other hand, after the circumferential surface welding is finished, if the friction stir welding machine 110 is moved upward and the probe 111 is directly pulled out from the circumferential surface, a groove or a hole is formed in the surface of the electrode 10 for polysilicon production, There is a risk of welding failure. In order to prevent the formation of grooves or holes on the surface, the welding device of the electrode for producing polysilicon according to the embodiment of the present invention has the operating characteristics as shown in FIG.

7 is a view for explaining the welding operation of the welding device of the electrode for producing polysilicon according to an embodiment of the present invention.

As shown in FIG. 7, in one embodiment of the present invention, after the circumferential surface welding is finished, the second slider 150 slides to weld the position of the polysilicon manufacturing electrode 10 to the friction stir welding machine 110. After changing from the portion to the portion where the drill hole 11a of the first electrode member 11 is to be formed, the friction stir welding machine 110 is moved upward to complete the welding operation. Accordingly, since grooves or holes are prevented from being formed on the surface of the electrode 10 for manufacturing polysilicon to secure airtightness, grooves or holes are formed in advance in the portion where the drill hole 11a is to be formed, and then, drill holes When forming (11a) can serve as a guide that can easily form a hole.

8 is a view for explaining a welding method of the electrode for producing polysilicon according to an embodiment of the present invention.

As shown in Figure 8, the welding method of the electrode for producing polysilicon according to an embodiment of the present invention, chucking step (S810). Welding step (S820), welder temperature maintenance step (S830) and welding completion step (S840).

First, in the chucking step (S810), the electrode chuck is fixed by sliding the first slider against both ends of a copper polysilicon electrode for welding in a hollow state. Specifically, the electrode for polysilicon manufacture welds the cylindrical surface which the oxygen-free copper material and the peripheral surface to which the 2nd electrode member in which one part is inserted in the said 1st electrode member are joined.

Next, in the welding step (S820), the circumferential surface of the electrode for polysilicon production is welded with a friction stir welder. In this case, the probe of the friction stir welding machine uses a titanium-aluminum-nitrite coated on a tungsten carbide-cobalt-based cemented carbide material.

Next, in the welding machine temperature holding step (S830), the friction stir welding unit is provided with a cooling water circulation unit and a temperature sensor, and when the temperature detected by the temperature sensor rises, the friction stir welding machine moves upwards and the cooling water is circulated to the cooling water circulation unit. To lower the temperature of the friction stir welding machine.

Next, in the welding completion step (S840), when the circumferential surface welding is finished, the position of the electrode for polysilicon manufacturing for the friction stir welding machine by sliding the second slider, the portion where the drill hole of the circumferential surface is formed in the welding portion of the circumferential surface After changing to, the friction stir welding machine is moved upward to complete the welding operation.

Accordingly, the electrode for producing polysilicon according to the embodiment of the present invention can secure airtightness, smoothness and balanced welding strength, and can prevent breakage of the welder.

<Other Embodiments>

In applying the welding device and the welding method according to an embodiment of the present invention, as in the electrode for producing polysilicon, the melting point is high and the cylindrically joined material may be any.

As described above, it is to be understood that the technical structure of the present invention can be embodied in other specific forms without departing from the spirit and essential characteristics of the present invention.

Therefore, it should be understood that the above-described embodiments are to be considered in all respects as illustrative and not restrictive, the scope of the invention being indicated by the appended claims rather than the foregoing description, All changes or modifications that come within the scope of the equivalent concept are to be construed as being included within the scope of the present invention.

10, 10 ': polysilicon production electrode
11: first electrode member
11a: drill hole
12: second electrode member
13: joining circumferential surface
110: friction stir welding machine
111: probe
112: probe chuck
113: welder body
114: welding motor
115, 141, 151: transfer plate
116, 142, 152: sliding bar
117, 143, 153: feed motor
118: cooling water circulation
118a: cooling water inlet
118b: cooling water outlet
119: temperature sensor
119a: wireless transmitter
120a, 120b: electrode chuck
121a 121b: Clamping Chuck
122a, 122b: clamping cylinder
123a: rotary motor
130: electrode support
140: first slider
150: second slider
160: main base frame
170:
180: control panel

Claims (9)

A friction stir welding machine having a cooling water circulation unit and a temperature sensor, the cooling water being supplied to the cooling water circulation unit according to the temperature detected by the temperature sensor, and moving up and down;
A pair of electrode chucks rotatably fixed to both ends of a copper polysilicon electrode for welding in a hollow state;
An electrode support supporting the lower end of the polysilicon manufacturing electrode;
A first slider slidably sliding said one electrode chuck in the direction of the electrode for producing polysilicon; And
A second slider sliding to change a position of the polysilicon manufacturing electrode relative to the friction stir welding machine;
Welding device for producing polysilicon electrode comprising a. The method of claim 1,
The friction stir welding machine is configured such that the coolant circulation part circulates from the outside of the friction stir welding machine, and the temperature sensor extends to an end of the probe chuck of the friction stir welding machine, and is connected to the other end of the temperature sensor so as to connect a temperature signal. It further comprises a wireless transmitter for transmitting to the control unit located outside the friction stir welding machine,
When the temperature of the end of the probe chuck rises, the control unit moves the friction stir welding machine upwards, circulates the coolant through the cooling water circulation unit, and lowers the temperature of the friction stir welding machine. Device. The method of claim 1,
The probe of the friction stir welding machine is a welding device for a polysilicon electrode, characterized in that the titanium-aluminum-nitrite coating (AlTiN coating) on a tungsten carbide-cobalt (WC-Co) cemented carbide material. The method of claim 1,
The polysilicon production electrode is a polysilicon production, characterized in that the cylindrical surface of the first electrode member, an oxygen-free copper material, and the circumferential surface to which the second electrode member is inserted into the first electrode member is welded. Welding device of electrodes. 5. The method of claim 4,
After the welding of the circumferential surface, the second slider is slid to change the position of the polysilicon manufacturing electrode relative to the friction stir welding machine from the welding portion to the portion where the drill hole of the first electrode member is to be formed. The welding apparatus of the electrode for polysilicon manufacture characterized by moving a friction stir welding machine upward and completing a welding operation. A chucking step of sliding the first slider to bring the electrode chuck into close contact with both ends of a copper polysilicon electrode for welding in a hollow state;
A welding step of welding the friction stir welder along the circumferential surface of the polysilicon electrode;
The friction stir welding machine includes a coolant circulation part and a temperature sensor, and when the temperature sensed by the temperature sensor rises, the friction stir welding machine moves upward and the coolant is circulated to the coolant circulation part to increase the temperature of the friction stir welding machine. Lowering the welder temperature; And
After the circumferential welding, the second slider is slid to change the position of the polysilicon manufacturing electrode for the friction stir welding machine from the welding portion of the circumferential surface to the portion where the drill hole of the circumferential surface is to be formed. A welding completion step of moving the friction stir welding machine upward to complete the welding operation;
Method for welding the polysilicon production comprising a. The method according to claim 6,
The probe of the friction stir welding machine is a welding method of an electrode for producing polysilicon, characterized in that the titanium-aluminum-nitrite coated on a tungsten carbide-cobalt-based cemented carbide material. The method according to claim 6,
The polysilicon production electrode is a polysilicon production, characterized in that the cylindrical surface of the first electrode member, an oxygen-free copper material, and the circumferential surface to which the second electrode member is inserted into the first electrode member is welded. Welding method of electrodes. delete

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