KR101194109B1 - Exhaust cart for processing panel - Google Patents

Abstract

[assignment]

The panel laminated exhaust cart which guides the laminated | multilayer laminated | stacked panel to a process furnace and exhausts the inside of each panel is made small, and various cost is reduced.

[Resolution]

A panel holding magazine 20 for stacking and holding panels P in multiple stages on the cart body 10, and an exhaust head 34 for holding chip tubes 33 for executing sealed exhaust processing in each panel. An exhaust cart for processing a panel having an exhaust treatment means provided with a coolant, comprising: a coolant collection inlet tube 37 and a coolant assembly discharge pipe 38 installed in an insulating box 35 provided near the panel holding magazine. Guide pipes 37a and 38a are connected to the respective exhaust heads from the inlet pipe and the cooling water collection discharge pipe, respectively, while each exhaust pipe 36d for performing exhaust in each panel and compressed air for retaining the chip pipe in the exhaust head. Each high-pressure air guide pipe 36c to be guided was installed outside the insulation box.

Description

Exhaust Cart for Panel Processing {EXHAUST CART FOR PROCESSING PANEL}

1 is a schematic plan view and a schematic side view of a conventional exhaust trolley for panel processing.

Fig. 2 is a schematic explanatory view showing a state in which the respective pipes provided in the heat insulation box are connected to each exhaust head in the exhaust panel for conventional panel processing.

Fig. 3 is a schematic plan view and schematic side view of a conventional panel processing exhaust cart in which two rows of panels are mounted.

Fig. 4 is a schematic plan view and schematic side view of a panel processing exhaust cart in which two rows of panels are mounted in one embodiment of the present invention.

Fig. 5 is a schematic explanatory diagram showing a state in which each pipe provided inside and outside the heat insulation box is connected to each exhaust head in the exhaust cart for panel processing according to the embodiment;

6 is a schematic plan view and a schematic side view showing a piping state of each exhaust pipe that exhausts exhaust gas in each panel in the panel processing exhaust cart according to the embodiment;

7 is a schematic plan view and a schematic side view of a panel processing exhaust cart according to another embodiment in which a panel is mounted in a single row.

DESCRIPTION OF THE REFERENCE NUMERALS

10: cart body 11: wheel

12: partition wall 20: panel holding magazine

21: magazine prop 22: support girder

23: support member 32: exhaust head attachment member

33: chip pipe 34: exhaust head

35: insulation box 36c: high pressure air guide tube

36d: exhaust pipe 37: cooling water collection inlet pipe

37a: guide tube 38: coolant assembly discharge pipe

38a: Officer 39: Main Exhaust Pipe

P: Panel R: Rail

INDUSTRIAL APPLICABILITY The present invention relates to a panel processing for use in the case where panels such as plasma display panels are stacked in multiple stages, guided to a processing furnace, and the inside of each panel is subjected to sealed exhaust treatment. It relates to an exhaust cart. In particular, the panel cart has a feature that the exhaust cart for miniaturization can be miniaturized and various costs can be reduced.

Conventionally, when sealing and exhausting a panel such as a plasma display panel, as described in Japanese Patent Application Laid-Open Nos. 2003-146409 and 2004-127900, the panel is laminated in multiple stages on an exhaust cart for panel processing. In addition, each panel laminated by this panel processing exhaust cart is led to a processing furnace, and sealing and exhaust processing of each panel are performed.

In general, as a conventional panel cart, a vacuum pump (not shown) or the like is built in the inside, and the rail R runs on the lower portion as shown in FIGS. 1 (A) and (B). And a cart body 10 in which a partition wall 12 is provided on the rear side of the wheel 11 and a panel P on the cart body 10 in multiple stages. A panel holding magazine 20 and an exhaust treatment means for sealing and exhausting each panel P are used.

Here, in the panel holding magazine 20, four magazine supports 21 are arranged on the cart body 10 so as to have a flat rectangular shape, and the support girders 22 are provided in multiple stages in the magazine support 21. The support member 23 which is provided in (i) and which holds the said panel P in each support girders 22 is provided.

Further, in the exhaust treatment means, an exhaust head support 31 is provided in the vicinity of one magazine support 21 on the cart body 10. A plurality of stages of the exhaust head attaching member 32 are attached to the exhaust head support 31 so as to correspond to the support girders 22, and the exhaust gas in the panel P is attached to each exhaust head attaching member 32. An exhaust head 34 is provided which holds a chip tube 33 for executing the process. In addition, a heat insulation box 35 is installed near the panel holding magazine 20.

In the heat insulation box 35, as shown in FIG. 2, after cooling each individual inlet pipe 36a which guides cooling water to each said exhaust head 34 separately, and each exhaust head 34, it cools. Cooling water individual discharge pipes 36b for returning the cooling water individually, each high-pressure air guide pipe 36c for guiding compressed air to each exhaust head 34 for retaining the chip pipe 33 in the exhaust head 34, Each exhaust pipe 36d for evacuating the inside of each panel P from each exhaust head 34 through the chip pipe 33 is accommodated, and each of these pipes 36a to 36d is an exhaust head 34, respectively. Is connected to.

However, as described above, if a large number of pipes 36a to 36d are piped into the heat insulation box 35, the heat insulation box 35 becomes large, and cooling water is supplied to each exhaust head 34 in the heat insulation box 35. Since the cooling water individual introduction pipe 36a for guiding the exhaust pipe 36d and the exhaust pipe 36d for performing the vacuum exhaust treatment of each panel P are housed together, the heat of the exhaust pipe 36d is transferred to the cooling water individual introduction pipe 36a. There was a problem that the temperature of the cooling water was increased, and the heat insulation efficiency of the heat insulation box 35 worsened.

In addition, since the large heat insulation box 35 is provided in the cart main body 10 as described above, the cart main body 10 becomes large, and the exhaust trolley for panel processing becomes large, the manufacturing cost becomes high, and this panel processing There existed a problem that the heat processing efficiency in the case where each panel P laminated | stacked on the exhaust gas cart for delivery is led to a processing furnace, and sealing exhaust processing falls, and running cost also increases.

In addition, in recent years, as shown in FIG. 3, in order to improve the heat processing efficiency in the case where each panel P laminated | stacked on the panel processing exhaust cart is guided to a processing furnace and sealed exhaust processing is carried out, as shown in FIG. 10) Two panel holding magazines 20 and two exhaust treatment means as described above are provided, and two rows of panels P disposed in each panel holding magazine 20 are sealed by one panel treating exhaust cart. Exhaust treatment has also been proposed.

However, even when the panel holding magazine 20 and two exhaust treatment means are respectively installed on the cart body 10 as described above, since the insulation box 35 is large as described above, the same problem still exists as in the above case. , Not enough effect.

An object of the present invention is to solve the above-mentioned problems in a panel exhaust bag for use in the case where a panel such as a plasma display panel is stacked in multiple stages, guided to a processing furnace, and the inside of each panel is sealed and exhausted. It is to be.

That is, in the panel processing exhaust cart according to the present invention, when sealing and exhausting each panel stacked in multiple stages, piping of cooling water for cooling each exhaust head, its insulation, and the like can be efficiently performed. It is to make it a task.

Further, in the panel treating exhaust cart according to the present invention, the insulation box is made smaller, the panel treating exhaust cart is made smaller, the manufacturing cost is reduced, and each panel is led to the treatment furnace to seal the exhaust treatment. It is a problem to improve the heat treatment efficiency in the case of reducing the running cost.

In the present invention, in order to solve the above problems, an exhaust head having a cart body, a panel holding magazine for stacking and holding panels in multiple stages on the cart body, and a chip tube for performing vacuum exhaust treatment in the panel. A panel processing exhaust cart provided with exhaust treatment means provided for each panel, wherein an insulation box is provided in the vicinity of the panel holding magazine and guides cooling water to cool each exhaust head in the insulation box. The cooling water collection introduction pipe and the cooling water collection discharge pipe which return the cooling water after cooling each exhaust head are provided, and a guide pipe is respectively connected to each said exhaust head from the said cooling water collection introduction pipe and the cooling water collection discharge pipe, respectively, Exhaust heads for carrying out exhaust in each panel from the Compressed air for retention was provided for each high-pressure air guide pipe that leads to the exhaust head, outside the heat insulating box.

Here, as the panel holding magazine, at least two pairs of magazine struts are erected and installed on the cart body, and a support girder for holding a panel is interposed between each pair of magazine struts. When installing a heat insulation box in the vicinity, it is preferable to install a heat insulation box in the space part between the said pair of magazine posts.

In addition, as the panel holding magazine, three pairs of magazine posts are erected and installed on the cart body, and a support girder holding a panel is provided between the adjacent magazine pairs. It is preferable to arrange two rows.

In the case of arranging two rows of panels in the panel holding magazine in this manner, it is preferable to install the heat insulation boxes in the space portions between the two pairs of magazine posts. In addition, it is preferable to connect the exhaust pipes of each row for exhausting the inside of each panel from the exhaust heads of each row provided corresponding to the two rows of panels to the main exhaust pipes located in the middle.

BRIEF DESCRIPTION OF THE DRAWINGS The objects, advantages and features of the present invention will become apparent from the drawings and description that illustrate specific parts of the invention which are described below.

BEST MODE FOR CARRYING OUT THE INVENTION [

EMBODIMENT OF THE INVENTION Below, the exhaust gas cart for panel processing which concerns on embodiment of this invention is demonstrated concretely by an accompanying drawing. In addition, the exhaust cart for panel processing which concerns on this invention is not limited to what is shown to the following embodiment, It can change and implement suitably within the range which does not change the summary of invention.

In the panel processing exhaust cart according to the present embodiment, as shown in FIG. 4, a vacuum pump (not shown) or the like is built in the inside, and the wheel 11 that travels on the rail R is disposed at the lower portion thereof. A cart body 10 provided with a partition wall 12 at a rear part thereof, a panel holding magazine 20 for stacking and holding the panel P in multiple stages on the cart body 10; Exhaust treatment means for enclosing the panel P is provided.

In the panel processing exhaust cart according to the present embodiment, as the panel holding magazine 20, three pairs (six) of magazine struts 21 are arranged so that two quadrangles are formed on the cart body 10. In addition, the support girders 22 holding the panel P are provided in multiple stages so as to span between adjacent pairs of the magazine struts 21, and the support girders 22 hold the panel P. A support member 23 is provided to allow two rows of panels P to be mounted.

As exhaust treatment means for sealing and exhausting each panel P, an exhaust head attachment member (1) is formed so as to correspond to the support girders 22 with respect to one magazine support 21 in the first row and the second row. 32) is attached in multiple stages. In each of the exhaust head attachment members 32, an exhaust head 34 having a chip tube 33 for executing the sealed exhaust process in the panel P is provided. Moreover, the heat insulation box 35 is provided in the space part between the said magazine support | pillar 21 in a 1st row and a 2nd row, respectively.

In each of the heat insulating boxes 35, as shown in FIG. 5, the cooling water collection inlet pipe 37 for guiding the cooling water for cooling each exhaust head 34 and the cooling water after cooling each exhaust head 34 are stored. The returning cooling water collection discharge pipe 38 is provided, and the guide pipes 37a and 38a are connected to the respective exhaust heads 34 from the cooling water collection introduction pipe 37 and the cooling water collection discharge pipe 38, respectively.

On the other hand, the high pressure air guide pipes 36c for guiding the compressed air for retaining the chip pipes 33 to the exhaust heads 34 to the respective exhaust heads 34, and the chip tubes 33 from the exhaust heads 34, respectively. 36 d of exhaust pipes for performing the vacuum exhaust process of each panel P are arrange | positioned outside the said heat insulation box 35 through each.

In this way, the heat insulation box 35 can be made small in size and arrange | positioned in the space part between the magazine support | pillars 21 as mentioned above, and the heat of the exhaust pipe 36d is transferred to the said coolant collection introduction pipe 37. The temperature of the cooling water does not rise. In addition, since the temperature inside the exhaust pipe 36d rises as compared with the case where the exhaust pipe 36d is provided in the heat insulation box 35, the discharge of the outgas on the inner wall surface of the exhaust pipe 36d is accelerated. It becomes possible to exhaust by high vacuum more rapidly.

Moreover, in the panel processing exhaust cart of this embodiment, exhaust gas in each panel P is exhausted from the exhaust head 34 of each row provided corresponding to the panel P of 2 rows through the chip tube 33 as mentioned above. When piping the exhaust pipe 36d of each row to be performed, as shown to FIG. 6 (A), (B), the exhaust pipe 36d of each row is provided on both sides of the large main exhaust pipe 39 located in the middle. Are connected to each other so that the air guided from the exhaust pipe 36d of each row is discharged through the main exhaust pipe 39.

In addition, if necessary, the gas to be filled in each panel P through the main exhaust pipe 39 is led to the exhaust pipes 36d of each row, and the gas delivered to each exhaust pipe 36d is discharged to each of the exhaust heads 34. ) To be filled in each panel P through the chip tube 33. In this way, only one main exhaust pipe 39 having a large diameter can be provided, and the cost can be reduced as compared with the case where two main exhaust pipes 39 are provided corresponding to the exhaust pipes 36d in each row. .

In the panel processing exhaust cart according to the present embodiment, three pairs (six pieces) are formed so that two squares are formed on the cart body 10 in order to mount two rows of panels P on the panel holding magazine 20. Since the magazine support 21 of 2) was arrange | positioned and the magazine support 21 of a 2nd row was used together, this panel holding magazine 20 becomes small and it becomes possible to further miniaturize the exhaust cart for panel processing. . As a result, the manufacturing cost of the panel processing exhaust cart is reduced, and the heating in the case where each panel P laminated | stacked on this panel processing exhaust cart is led to a processing furnace (not shown) and sealed exhaust processing is carried out. The processing efficiency is further improved, and the running cost is further reduced.

In the panel treating exhaust cart of the present embodiment, two rows of panels P are mounted in the panel holding magazine 20. However, as shown in FIG. 7, one quadrangle is formed on the cart body 10. FIG. It is also possible to arrange | position two pairs (four) magazine struts so that 1 row of panels P may be mounted in the panel holding magazine 20 as much as possible.

In addition, the present invention has been sufficiently described by the above-described embodiments, but various modifications and changes are possible without departing from the gist of the present invention.

Such changes and modifications should be considered to be included in the present invention unless they depart from the scope of the present invention.

In the panel processing exhaust cart according to the present invention, as described above, in the heat insulation box, a cooling water collection introduction pipe leading to cooling water for cooling each exhaust head and a cooling water collection discharge pipe returning the cooling water after cooling each exhaust head. Since the guide pipes are connected to the respective exhaust heads from the cooling water collection introduction pipe and the cooling water collection discharge pipe, the cooling water individual introduction pipes and the respective exhaust heads respectively guiding the cooling water to each exhaust head are conventionally provided. As compared with the case where the cooling water individual discharge pipes returning the cooling water after cooling are individually installed in the heat insulation box, the heat insulation box can be miniaturized.

Further, in the panel processing exhaust cart according to the present invention, since each exhaust pipe for exhausting each panel from the exhaust head through the chip pipe is provided outside the insulation box, the insulation box can be further miniaturized. In addition, the heat of the exhaust pipe is transmitted to the cooling water collection introduction pipe so that the temperature of the cooling water does not rise, and the heat insulation efficiency of the heat insulation box is improved.

Further, as a result of the miniaturization of the heat insulation box as described above, it is also possible to install the heat insulation box in the space between the pair of magazine struts in the panel holding magazine, thereby reducing the size of the entire exhaust cart for panel processing. Can be made small.

As a result, the manufacturing cost of the panel trolley exhaust bag is reduced, and the heat treatment efficiency in the case where each panel laminated to the panel trolley exhaust bag is delivered to the processing furnace and sealed exhaust treatment is also improved, and the running The cost is also reduced.

In addition, as the panel holding magazine, three pairs of magazine props are erected and installed on the cart main body, and a support girder holding a panel is disposed between the adjacent magazine pairs. By arranging the panels in two rows, and installing an insulation box in each of the spaces between the two pairs of magazine struts, the weight of the panel holding magazine is reduced to reduce the heat load, and the exhaust cart for panel treatment. The length of can be shortened, so that the heat treatment efficiency in the case where each panel laminated in the panel treatment exhaust cart is guided to the treatment furnace and sealed exhaust treatment is further improved, and the running cost is further reduced.

Claims (5)

A panel processing comprising a cart body, a panel holding magazine for stacking and holding panels in multiple stages on the cart body, and an exhaust head having an exhaust head for each panel, the exhaust head having chip tubes for executing sealed exhaust processing in the panel. In the exhaust cart for use, a heat insulation box is provided in the vicinity of the panel holding magazine, and in the heat insulation box, a cooling water collection inlet tube for guiding cooling water for cooling the respective exhaust heads and cooling water after cooling each exhaust head. A returning cooling water collection discharge pipe is provided, and a guide pipe is connected to each of the exhaust heads from the cooling water collection introduction pipe and the cooling water collection discharge pipe, respectively, and each exhaust pipe for performing the exhaust in each panel from each of the exhaust heads through the chip pipe. And the compressed air for retaining the chip pipe in the exhaust head to each exhaust head. Each high pressure air guide pipe is an exhaust cart for panel treatment, characterized in that is installed outside the insulation box. The magazine according to claim 1, wherein at least two pairs of magazine posts are erected and installed on the cart body, and a support girder for holding the panel is interposed between the pairs of magazine posts, and the insulation box is a panel. An exhaust cart for processing a panel, which is provided in a space portion between a pair of magazine struts in a holding magazine. The magazine of claim 1, wherein three pairs of magazine posts are erected and installed on the cart body, and a support girder for holding the panel is disposed between adjacent pairs of magazine posts, and the panel is held by the panel. An exhaust cart for panel processing, wherein two rows are arranged in a magazine. The exhaust cart for panel processing according to claim 3, wherein the heat insulation box is provided in each of the spaces between the two pairs of magazine posts in the panel holding magazine. The exhaust pipe of each row provided in correspondence with the two rows of panels arranged in the panel holding magazine is connected to a main exhaust pipe in which each row of exhaust pipes for performing exhaust in each panel is disposed in between. Exhaust cart for panel treatment, characterized in that.

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