KR101144796B1 - The repairing equipment for inferiority on surface of display panel and the repairing methode of the same - Google Patents

The repairing equipment for inferiority on surface of display panel and the repairing methode of the same Download PDF

Info

Publication number
KR101144796B1
KR101144796B1 KR1020050012373A KR20050012373A KR101144796B1 KR 101144796 B1 KR101144796 B1 KR 101144796B1 KR 1020050012373 A KR1020050012373 A KR 1020050012373A KR 20050012373 A KR20050012373 A KR 20050012373A KR 101144796 B1 KR101144796 B1 KR 101144796B1
Authority
KR
South Korea
Prior art keywords
display panel
photosensitive agent
defective
unit
discharging
Prior art date
Application number
KR1020050012373A
Other languages
Korean (ko)
Other versions
KR20060091481A (en
Inventor
강형식
박인태
우창세
조창현
홍순국
Original Assignee
엘지전자 주식회사
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 엘지전자 주식회사 filed Critical 엘지전자 주식회사
Priority to KR1020050012373A priority Critical patent/KR101144796B1/en
Publication of KR20060091481A publication Critical patent/KR20060091481A/en
Application granted granted Critical
Publication of KR101144796B1 publication Critical patent/KR101144796B1/en

Links

Images

Abstract

The present invention relates to a display panel repair apparatus for repairing a defective portion of a display panel and a method thereof, and more particularly, to a display panel repair apparatus for repairing a defective portion of a display panel, including a photosensor filling unit for discharging a photosensitizer differently according to a size of a defective region of the display panel, And a sintering unit for sintering the photosensitive agent filled in the defective display panel area. When a defect occurs in the display panel, the photosensitive member is filled in the defective part after the photoresist development, and a separate sintering unit is used As the photosensitive agent is baked, it is possible to repair defective medium or large size and the adhesion of the chromium film after defective repair is increased.
Display panel, repair, photosensitive agent

Description

 Technical Field [0001] The present invention relates to a display panel repair apparatus and a display panel repair apparatus,

FIG. 1 is a view showing an open failure of a display panel,

FIG. 2 is a configuration diagram illustrating a configuration of a display panel repair apparatus according to the present invention,

3 is a structural view of a display panel repair apparatus according to the present invention.

4 is a flowchart illustrating a display panel repair method according to the present invention.

DESCRIPTION OF THE REFERENCE NUMERALS

110: photosensitive agent filling unit 120: firing unit

130: driving unit 140: image acquisition unit

P: Display panel

The present invention relates to a display panel repair apparatus and method for repairing an open type defect in a display panel, and more particularly, to a display panel repair apparatus and method for repairing a defective display panel, And a method for repairing a display panel which can improve the adhesion of the chromium film.

In general, a photoresist process for manufacturing a display panel P is performed by applying a photoresist (PR), which is a photosensitive agent, on a display panel uniformly coated with a chromium (Cr) film, and selectively exposing and developing Etching, and thin film to form a pattern.

As shown in FIG. 1, when the photoresist (PR) is applied, the photoresist is not properly applied during the exposure process and the development process, and an open defect occurs, (a) (B) In the case where the etching is performed, the chromium film (Cr) is exposed and etched.

When an open defect occurs in the display panel P as described above, a chromium film is selectively stacked on a portion where the chromium film (Cr) is not formed through CVD (Chemical Vapor Deposition) Repair the defective panel.

The CVD (Chemical Vapor Deposition) is a process in which a raw material for forming a chromium film under a pressure of tens to hundreds of torres is made into a gaseous state and the chromium film is sprayed onto the heated display panel P in a high temperature environment of 500 degrees or more. As the raw material to be formed forms a solid film by chemical reaction on the surface of the display panel, it is a method to regenerate the chromium film in the open defect part.

In the case of performing the display panel (P) repair using such CVD, the adhesion of the chromium film formed on the defective portion is lower than that of the deposited chromium film due to the nature of the CVD technique.

In particular, defects that can be repaired by the above CVD method are limited to less than 10 μm, and defects such as medium and large defects larger than 10 μm can not be repaired.

DISCLOSURE Technical Problem The present invention has been conceived to solve the problems of the prior art described above, and it is an object of the present invention to provide a display panel capable of repairing medium / large size defects when a defective open- The present invention also provides a display panel repair apparatus and method which can improve the adhesion of a chromium film to CVD (Chemical Vapor Deposition) system by repairing a defective portion of a panel, thereby achieving uniform adhesion of the chromium film.

According to an aspect of the present invention, there is provided a display panel repair apparatus comprising: a photosensitive agent filling unit for discharging a photosensitive agent in an amount different from a defective area of a display panel to fill a defective area with a photosensitive agent; And a baking unit for baking the photosensitive agent filled in the baking unit.

According to another aspect of the present invention, there is provided a method of repairing a display panel, comprising: a first step of detecting a defective part of a display panel; a second step of filling the defective part of the display panel with a photosensitive agent; And a control unit.

Hereinafter, embodiments of the present invention will be described with reference to the accompanying drawings.

FIG. 2 is a block diagram of a display panel repair apparatus according to the present invention, and FIG. 3 is a structure of a display panel repair apparatus according to the present invention.

2, the display panel repair apparatus of the present invention includes a photosensor filling unit 110 that discharges the amount of the photosensitizer differently according to the size of the defective area of the display panel P, .

The photoresist filling unit 110 contains a photoresist such as a photoresist PR and adjusts the amount of the photoresist depending on the size of the defective area of the display panel P to fill the photoresist with the defective area.

The photoresist filling unit 110 includes a fine nozzle 111 for discharging a photosensitizer and a control module 112 for adjusting the amount of the photosensitizer discharged from the fine nozzles.

The fine nozzles 111 are thin tubes for discharging the photosensitizer to a defective portion. The inner diameter of the fine nozzles 111 may be 15 μm or less and the inner diameter of the fine nozzles may be changed according to the size of the defective portion.

For example, in the case where the fine nozzles 111 having inner diameters of 4 μm, 7 μm and 15 μm are provided, the user uses a fine nozzle having an inner diameter of 4 μm when the size of the bad region is 10 μm or smaller , And in the case of defective medium / large size between 10 mu m and 40 mu m, the amount of the photosensitizer discharged from the fine nozzles can be adjusted by using fine nozzles having a large inner diameter of 7 mu m or 15 mu m.

The control module 112 controls the amount of the photosensitizer discharged from the fine nozzles 111. The display panel repair apparatus of the present invention controls the amount of the photosensitizer discharged from the fine nozzles by pressing the fine nozzles using air do.

As the amount of the photosensitive agent discharged from the fine nozzles per unit time is controlled by controlling the pressure applied to the fine nozzles 111 and the time for applying the pressure, the amount of the photosensitive agent discharged from the fine nozzles depends on the size of the defective portion It is automatically adjustable.

That is, even if the inner diameter of the fine nozzles 111 is not changed as described above, by adjusting the time for applying the pressure and pressure of the air to the fine nozzles 111 by using the control module 112, It is possible to reduce the amount of the photosensitive agent to be discharged and to adjust the size of the photosensitive agent to be discharged when the defective portion is large.

The photosensitive agent filling unit 110 may further include a position adjusting module 113 for adjusting the position of the fine nozzles 111 for discharging the photosensitive agent.

The photosensitive agent charging unit 110 may further include a position adjustment module 113 for adjusting the position of the fine nozzles 111 for discharging the photosensitive agent.

The display panel repair apparatus of the present invention further includes a driving unit 130 that adjusts the position of the photosensitive agent charging unit in three dimensions so that the photosensitive agent charging unit 110 is located in a defective portion of the display panel.

Further, the display panel repair apparatus of the present invention further includes a driving unit 130 that adjusts the position of the photosensitive agent charging unit three-dimensionally such that the photosensitive agent charging unit 110 is located in a defective portion of the display panel.

If the photosensitive agent is filled in the defective portion of the display panel P by the photosensitive agent filling unit 110, the photosensitive agent filled in the defective portion is fired using the firing unit 120. [

The firing unit 120 uses a laser device that emits a CO 2 laser or a hot air blower that discharges hot air to dry the photoresist filled in the defective portion of the display panel P and fired. The CO 2 laser can be used mainly for improvement of the surface material by a laser having good output and condensing ability.

As shown in FIG. 3, the display panel repair apparatus includes an image obtaining unit 140 for photographing a display panel to detect a defective portion of the display panel P, and a monitor (not shown) (150).

The image obtaining unit 140 may be used to scan and photograph the display panel P and to detect a defective portion of the display panel through the image displayed on the monitor 150. [

The image acquisition unit 140 may include a zoom function to enlarge a local area of the display panel P. [

Therefore, the defective portion of the display panel P obtained through the image obtaining unit 140 is detected, and the photosensitive agent filling unit 110 is positioned on the defective portion of the display panel using the driving unit 130, Let the photoresist fill.

At this time, when the position of the fine nozzles 111 of the photosensitive agent filling unit is finely adjusted as a result of driving the driving part or the position adjustment module 113, and when defects of an open shape of medium or large size occur, So that the photosensitive agent is filled.

3, the display panel repair apparatus of the present invention further includes a light source 160, so that when the image acquisition unit 140 captures an image, the display panel P ) Can be investigated to increase the image acquisition efficiency.

Also, when light is irradiated using the light source 160 when filling the photosensitizer, it is easy to check whether the photosensitizer is filled with an appropriate amount by analyzing the image acquired by the image acquiring means 140.

The display panel repair apparatus of the present invention is characterized in that a photosensitive agent is filled in a position where a defect of an open shape occurs after a development process after applying a photosensitive agent such as the photoresist, The adhesion of the re-formed chromium film and the adhesion of the formed chromium film are the same as that of the entire display panel P after the application.

Particularly, it is possible to change the size of the inner diameter of the fine nozzles 111 and adjust the amount of the photosensitizer discharged from the fine nozzles, thereby repairing defects of the open shape of medium or large size of 10 μm or more.

4 is a flowchart showing a repair method of a display panel according to the present invention.

The repair method of the display panel according to the present invention is carried out after the steps S1, S2, and S3 of photoresist such as photoresist in the photomask process.

First, the defective portion of the display panel is sensed in a first step (S4). At this time, the defective display panel which can be repaired is an open type defect in which the chromium film is exposed because the photosensitive agent is not properly applied.

The detection of a defective part of the display panel acquires an image of the display panel using an image acquiring unit such as a CCD camera, and detects a defective part of the panel through the obtained image, in particular, detects an open defective part.

Particularly, since the image acquiring means has a zoom function, it is possible to more effectively photograph the defective portion of the display panel by enlarging and photographing the local region of the display panel.

In the second step, the photosensitive agent is filled in the defective portion of the display panel (S5).

At this time, the photosensitizer is ejected by applying pressure to a nozzle through which the photosensitizer is ejected by using air, so that the amount of the photosensitizer is adjusted by adjusting the applied pressure and time. .

That is, the amount of the filler to be filled in the defective portion is determined according to the size of the defective portion detected in the first step, and the amount of the filler is adjusted according to the size of the used nozzle and the pressure of the air applied to the nozzle.

Therefore, the amount of the photosensitizer discharged per unit time is adjusted to make it possible to repair from defects having a small area of 10 mu m or less to defects having a large area of about 40 mu m, and the size of repairable defective areas is not limited to this specification, It is specified that the defect of large area of 40 μm or more can be repaired by adjusting the amount of the photosensitive agent filled in the defective part.

In the third step, the portion filled with the photosensitive agent is baked (S6). The firing of the filled photosensitizer can locally sinter a portion requiring firing using air at a high temperature or a CO 2 laser.

In the third step, the portion filled with the photosensitive agent is baked (S6). The firing of the filled photosensitizer can locally sinter a portion requiring firing using air at a high temperature or a CO 2 laser.

While the present invention has been particularly shown and described with reference to exemplary embodiments thereof, it is to be understood that the invention is not limited to the disclosed exemplary embodiments, And can be applied by those skilled in the art.

According to the display panel repair apparatus and method of the present invention configured as described above, when an open defect occurs in a display panel, defective repair of a medium or large size can be performed as the photosensitive agent is filled in the defective portion and fired, Since the etch is performed after repairing the defective portion of the display panel after the previous photoresist development, the adhesion of the chromium film formed on the defective portion is improved as compared with the conventional CVD (Chemical Vapor Deposition) method, so that the chromium film has a uniform adhesive property have.

Claims (12)

  1. A photosensitive agent charging unit that discharges the photosensitive agent differently according to the size of the defective portion of the display panel to charge the photosensitive agent to the defective portion; And
    And a baking unit for baking the photosensitive agent filled in the defective display panel portion,
    Wherein the photosensitive agent charging unit includes a fine nozzle for discharging the photosensitive agent and a control module for controlling the amount of the photosensitive agent discharged from the fine nozzle,
    Wherein the control module adjusts the amount of the photosensitive agent by adjusting a pressure applied to the fine nozzles and a time for applying the pressure.
  2. delete
  3. The method according to claim 1,
    Wherein the fine nozzles are tubes having an inner diameter of 15 mu m or less.
  4. The method according to claim 1,
    Wherein the photosensitive agent charging unit further comprises a position adjusting module for adjusting a position of the fine nozzles for discharging the photosensitive agent.
  5. The method according to claim 1,
    Wherein the display panel repair apparatus further comprises a driving unit for three-dimensionally adjusting a position of the photosensitive agent charging unit so that the photosensitive agent charging unit is located at a defective portion.
  6. The method according to claim 1,
    Wherein the firing unit is a laser device emitting a CO 2 laser.
  7. The method according to claim 1,
    Wherein the firing unit is a hot air blower for discharging high-temperature air.
  8. The method according to claim 1,
     Wherein the display panel repair apparatus further comprises an image obtaining unit for obtaining an image of the display panel to detect a defective portion of the panel.
  9. A first step of detecting a defective part of the display panel;
    A second step of discharging the amount of the sensitizer differently according to the size of the defective part of the display panel to fill the defective part with the photosensitive agent; And
    And a third step of baking the portion filled with the photosensitive agent,
    Wherein the second step adjusts the amount of the photosensitive agent by adjusting a pressure applied to the fine nozzles through which the photosensitive agent is discharged and a time for applying the pressure.
  10. 10. The method of claim 9,
    Wherein the repair of the panel defect of the display panel repair method is performed after the development of the photoresist.
  11. 10. The method of claim 9,
    Wherein the second step discharges the photosensitive agent by spraying air in a pressurizing manner.
  12. 12. The method of claim 11,
    Wherein the second step adjusts the pressure applied to the air for discharging the photosensitive agent and the discharging time of the photosensitive agent according to the size of the defective part.
KR1020050012373A 2005-02-15 2005-02-15 The repairing equipment for inferiority on surface of display panel and the repairing methode of the same KR101144796B1 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
KR1020050012373A KR101144796B1 (en) 2005-02-15 2005-02-15 The repairing equipment for inferiority on surface of display panel and the repairing methode of the same

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
KR1020050012373A KR101144796B1 (en) 2005-02-15 2005-02-15 The repairing equipment for inferiority on surface of display panel and the repairing methode of the same

Publications (2)

Publication Number Publication Date
KR20060091481A KR20060091481A (en) 2006-08-21
KR101144796B1 true KR101144796B1 (en) 2012-06-14

Family

ID=37593234

Family Applications (1)

Application Number Title Priority Date Filing Date
KR1020050012373A KR101144796B1 (en) 2005-02-15 2005-02-15 The repairing equipment for inferiority on surface of display panel and the repairing methode of the same

Country Status (1)

Country Link
KR (1) KR101144796B1 (en)

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS60130739A (en) 1983-12-19 1985-07-12 Seiko Epson Corp Correcting method of pinhole of metal mask
JP2003287904A (en) 2002-03-27 2003-10-10 Nec Kagoshima Ltd Pattern formation method and manufacturing method of flat display panel using the same
KR20040004380A (en) * 2000-09-22 2004-01-13 어드밴스드 마이크로 디바이시즈, 인코포레이티드 Pinhole defect repair by resist flow

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS60130739A (en) 1983-12-19 1985-07-12 Seiko Epson Corp Correcting method of pinhole of metal mask
KR20040004380A (en) * 2000-09-22 2004-01-13 어드밴스드 마이크로 디바이시즈, 인코포레이티드 Pinhole defect repair by resist flow
JP2003287904A (en) 2002-03-27 2003-10-10 Nec Kagoshima Ltd Pattern formation method and manufacturing method of flat display panel using the same

Also Published As

Publication number Publication date
KR20060091481A (en) 2006-08-21

Similar Documents

Publication Publication Date Title
JP3339149B2 (en) Scanning exposure apparatus and exposure method
US6806456B1 (en) System and method for lithography process monitoring and control
US5898477A (en) Exposure apparatus and method of manufacturing a device using the same
JP5068242B2 (en) Lithographic apparatus and device manufacturing method
US20040090606A1 (en) Exposure apparatus, exposure method, and device manufacturing method
US20090263736A1 (en) Exposure apparatus, exposure method, and device manufacturing method
US6975387B2 (en) Wavefront aberration measuring instrument, wavefront aberration measuring method, exposure apparatus, and method for manufacturing micro device
JP2006128677A (en) Device and method of supporting substrate and/or adjusting temperature, and support table and chuck
JP4601744B2 (en) Method and system for controlling a photolithographic process
US20060000964A1 (en) System and method for lithography process monitoring and control
US20050037272A1 (en) Method and apparatus for manufacturing semiconductor
CN101678613B (en) Method for producing a three-dimensional object by means of laser sintering
JP2005094015A (en) Adaptive lithographic critical dimension enhancement
JP6140662B2 (en) Stress and overlay feedforward and / or feedback lithographic process control
TWI309342B (en) Lithographic apparatus and device manufacturing method
US7831085B2 (en) Method of manufacturing photo mask, mask pattern shape evaluation apparatus, method of judging photo mask defect corrected portion, photo mask defect corrected portion judgment apparatus, and method of manufacturing a semiconductor device
JP2893778B2 (en) Exposure apparatus
TWI336779B (en) Defect inspection apparatus, defect inspection method,method for fabricating photomask and method for transcribing pattern
CN1542551B (en) Focus spot monitoring in a lithographic projection apparatus
WO2002103766A1 (en) Scanning exposure method and scanning exposure system, and device production method
WO2006030727A1 (en) Correction method and exposure device
DE10261035B4 (en) Photomask repair method and apparatus
CN1920670A (en) Latent overlay metrology
JP2000082661A (en) Heating apparatus, estimating method of heating apparatus and pattern forming method
DE10030143B4 (en) Photomask, manufacturing process thereof and semiconductor device

Legal Events

Date Code Title Description
A201 Request for examination
E902 Notification of reason for refusal
E701 Decision to grant or registration of patent right
GRNT Written decision to grant
FPAY Annual fee payment

Payment date: 20150424

Year of fee payment: 4

FPAY Annual fee payment

Payment date: 20160422

Year of fee payment: 5

FPAY Annual fee payment

Payment date: 20170424

Year of fee payment: 6

FPAY Annual fee payment

Payment date: 20180424

Year of fee payment: 7

FPAY Annual fee payment

Payment date: 20190424

Year of fee payment: 8