KR101141933B1 - Sensor floating unit loading air bearing block - Google Patents

Abstract

PURPOSE: A sensor floating unit in which an air bearing block is mounted is provided to accurately maintain a horizontal state between a sensor plate and a panel. CONSTITUTION: A sensor plate(30) inspects patterning of a panel while the sensor plate moves in the longitudinal direction of a panel. A guide block(40) is integrated with a lower plate(20). An air bearing block(50) is arranged on the lower plate. The air bearing block sprays air, which is supplied from the outside, onto an external side of the guide block. The air bearing block guides vertical movement of the lower plate.

Description

Sensor floating unit with air bearing block {sensor floating unit loading air bearing block}

The present invention relates to a sensor floating unit in which an air bearing block is mounted, and in detail, the sensor plate and the panel for inspecting the patterning of the panel are stroked in a vertical vertical direction while moving in a state spaced apart from the upper surface of the panel in a predetermined distance. It relates to a technique for maintaining this mutual level.

In general, a display panel mounted on an outer surface of a computer monitor, a TV, a mobile communication terminal, or the like performs a display function by using the electrical and optical properties of the liquid crystal injected therein.

Display panels are being widely applied in various fields due to the advantages of small size, light weight and low power consumption. Such display panels may be classified into LCD panels for generating image data, liquid crystal display panels, and backlight units for applying light to the liquid crystal display panels.

These are each manufactured by a separate manufacturing process and then assembled through an assembly process to form a completed display panel.

In this case, the display panel goes through a certain inspection process for each step of these manufacturing processes, and in particular, before the assembly is performed after all the manufacturing processes are completed, visual inspection of each finished product is performed to confirm whether there is an abnormality of the product. do. The final inspection of the display panel is generally performed by applying a test signal to the driving circuit of the panel and then checking whether there is an abnormality of the image information displayed on the display.

Accordingly, for the final inspection of the display panel, a precise inspection apparatus is required to compress the driving circuit and the test signal applying unit so that a stable supply of the test signal can be achieved. At this time, the inspection is performed including whether the driving circuit patterned on the panel is open or shorted.

Such a conventional inspection apparatus is configured to compress between a driving circuit and a test signal applying unit (sensor) by a lever method, a clamp method or a cylinder method. However, among the above methods, the lever method or the clamp method allows the user to directly control the lever or the clamp by manual operation, which causes problems such as slow working speed, inconvenience in use, and damage to the driving circuit. In the case of the method, there is a problem in that a large cost is required for the configuration of the inspection apparatus, and it is difficult to manufacture a small size.

To overcome this problem, with the panel seated on the wide table top, the sensor (test head application) is placed at a preset height (approximately 100 microns) from the top of the panel, then the panel is patterned by moving the sensor. Will be examined.

However, even if the top surface of the table looks flat to the naked eye, it causes another problem that, after installation of the table from a mechanical point of view, a deviation of 100 microns or more frequently occurs depending on the change of time or the environment.

In order to solve this problem, a technique for maintaining a constant distance between the upper surface of the panel and the sensor for inspecting the patterning of the panel by spraying air downward of the sensor is disclosed as a conventional technique, in which the air is discharged downward. In the process of stroke in the vertical direction while spraying, there is another problem that the alignment of the vertical up and down direction does not fit, the bottom surface of the sensor and the top surface of the panel does not achieve an exact equilibrium.

An object of the present invention is to maintain a constant distance between the upper surface of the display panel and the sensor for inspecting the patterning of the panel, the air to maintain the alignment in the vertical vertical direction in the process of moving the sensor in the vertical direction The present invention provides a sensor floating unit equipped with a bearing block.

In order to achieve the above object, a sensor floating unit equipped with an air bearing block according to the present invention is inspected for patterning formed on a panel while moving along the longitudinal direction of the panel while floating on an upper surface of the panel seated on a table. A sensor floating unit, comprising: an upper plate having an acceptor for receiving air from the outside and an injector for injecting air drawn in from the acceptor to the outside; It is arranged at a lower distance from the lower part of the upper plate, and is connected to the injector of the upper plate and has an acceptor for receiving air, and a plurality of through holes for injecting the air drawn in from the acceptor downwards, so that the predetermined distance from the upper surface of the panel is provided. Floating bottom plate; A communication hole is formed which communicates with the through hole of the lower plate and passes downward. The patterning formed on the panel is inspected while being stacked on the lower surface of the lower plate and moving along the longitudinal direction of the panel in a state of being injured a certain distance from the upper surface of the panel integrally with the lower plate. Sensor plate; A guide block connected to an upper end of the lower plate to move integrally with the lower plate; It is disposed on the upper portion of the lower plate in a state fastened to the lower portion of the upper plate, the air bearing block for guiding the vertical vertical movement of the lower plate by injecting air supplied from the outside to the outer wall of the guide block.

In the sensor floating unit of the present invention, the air bearing block is formed to surround the outer wall of the guide block, and the inner wall of the air bearing block and the outer wall of the guide block are preferably configured to maintain a constant gap with each other.

In addition, in the sensor floating unit of the present invention, the air bearing block has a plurality of micropores formed on an inner wall facing the outer wall of the guide block, and the guide block is formed by spraying air supplied from the outside to the outer wall of the guide block through the micropores. It moves in contact with the inner wall of the bearing block.

In the sensor floating unit of the present invention, a stepped portion bent outward is formed at the upper edge portion of the guide block, and when the guide block is moved downward downward, the stepped portion is caught on the upper surface of the air bearing block so as to reduce the downward movement width of the guide block. Configured to restrict.

On the other hand, the sensor floating unit of the present invention is configured to further include a plurality of sensor units for sensing the upward stroke distance of the guide block is arranged in a plurality of vertical upper portion so as to measure the horizontal of the lower plate.

Sensor floating unit equipped with an air bearing block according to the present invention,

First, the sensor plate and the panel can be leveled more accurately by providing an air bearing block that maintains the alignment of the sensor plate in the vertical direction in the process of moving the sensor plate up and down with respect to the upper surface of the panel for the patterning inspection of the panel. It becomes possible.

Secondly, the air bearing block is operated in a non-contact manner with respect to the vertical vertical stroke of the sensor plate, thereby obtaining durability and a good inspection result of the panel.

1 is a schematic overall configuration diagram of a panel inspection system equipped with a sensor floating unit according to the present invention;
2 is a perspective view of the sensor floating unit mounted with an air bearing block according to the present invention;
3 is an exploded perspective view of a sensor floating unit mounted with an air bearing block according to the present invention;
Figure 4 is an exploded perspective view showing an extract of the guide block and the air bearing block in the sensor floating unit of the present invention,
5 is a plan sectional view showing an extract of a guide block and an air bearing block in the sensor floating unit of the present invention;
6 is a plan view showing an extract of the guide block and the air bearing block in the sensor floating unit of the present invention,
FIG. 7 is a cross-sectional view taken along the line AA of FIG. 6 and an enlarged view of main parts.

Hereinafter, embodiments of the present invention will be described in detail with reference to the drawings.

FIG. 1 is a schematic overall configuration diagram of a panel inspection system equipped with a sensor floating unit according to the present invention. Referring to FIG. 1, the operation of the panel inspection system will be briefly described as follows.

The panel P is seated on the upper surface of the table 6, and LM guides (linear motion guides) 5 are disposed on both sides of the table. In addition, the panel may be lifted to the table 6 through an external robot arm (not shown), or a conveyor unit (not shown) may be provided on the upper surface of the table in contact with the panel.

The LM guide (5) guides the gantry bridge (4) disposed across both sides of the table to move forward and backward, and a linear motor (not shown) for transmitting a driving force to the LM guide (5), each LM guide It is preferred to be mounted on.

The gantry bridge 4 has a bar shape, and both ends of the gantry bridge 4 are bent downward, and then the bent lower portion is connected to the LM guide 5 to control the LM guide 5. It moves along the longitudinal direction of the table 6.

In addition, the gantry bridge 4 is arranged in a plurality of head portion transfer means 3a, 3b along the longitudinal direction, and the head portion transfer means 3a, 3b slides along the longitudinal direction of the gantry bridge 4. It is arranged to be movable.

When the panel is inspected for patterning, the head conveying means 3a and 3b mounted on the gantry bridge 4 are arranged to be spaced apart from each other along the longitudinal direction of the gantry bridge 4 so that the table 6 ) It can be positioned up to portions corresponding to both ends of the width of the panel (P) seated on the upper surface.

As a result, when the gantry bridge 4 moves along the longitudinal direction of the table 6, the head transfer means 3a and 3b may evenly pass the upper surface of the panel P along the longitudinal direction of the panel P. Will be.

Since the sensor floating unit 1 according to the present invention is mounted below the head transfer means 3a and 3b, the sensor floating unit 1 is formed on the panel P while passing through the upper surface of the panel P evenly. Patterning can be checked efficiently.

On the other hand, the head conveying means (3a, 3b) is the upper head portion conveying means (3a) and the lower head portion conveying portion connected to the lower end of the upper head portion conveying means (3a) slides across the gantry bridge (4) Means 3b.

And the test head portion 2 is mounted to the lower head portion transfer means 3b, and the sensor floating unit 1 of the present invention is integrated at the lower end of the lower head portion transfer means 3b adjacent to the test head portion 2. Leads to.

The lower head portion conveying means 3b is preferably configured to extend downwardly or to be folded upwardly with respect to the upper head portion conveying means 3a.

When the upper head portion feeding means 3a and the lower head portion feeding means 3b extend to each other, the sensor floating unit 1 mounted on the lower end of the lower head portion feeding means 3b is placed on the upper surface of the panel seated on the table. Close contact.

When air is injected downward of the sensor floating unit while the sensor floating unit 1 is in close contact with the upper surface of the panel, the sensor floating unit 1 corresponds to a certain distance (approximately 100 microns) from the panel according to the air injection pressure. You will rise upward.

The up-and-down stroke of the sensor floating unit 1 in order to accurately maintain a constant distance between the sensor floating unit 1 and the panel P moving in an injured state so that the patterning formed on the panel P can be accurately and accurately inspected. Maintaining alignment in the vertical vertical direction is a key technology of the present invention.

When the gantry bridge 4 moves forward along the longitudinal direction of the panel while the sensor floating unit 1 is floating on the panel, the sensor floating unit 1 moves along the upper surface of the panel and performs patterning formed on the panel. Will be examined. This patterning test includes whether the driving circuit is open / shorted during patterning formed in the panel.

Hereinafter, the sensor floating unit of the present invention will be described in more detail.

2 is a combined perspective view of a sensor floating unit equipped with an air bearing block according to the present invention, and FIG. 3 is an exploded perspective view of a sensor floating unit mounted with an air bearing block according to the present invention.

2 and 3, the sensor floating unit equipped with the air bearing according to the present invention is moved to the panel while moving along the longitudinal direction of the panel while floating on the upper surface of the panel seated on the table. The present invention relates to a sensor floating unit for inspecting the formed patterning, and includes a top plate 10, a bottom plate 20, a sensor plate 30, a guide block 40, and an air bearing block 50.

First, the upper plate 10 is connected to an external test head, and includes an acceptor 11 for receiving air from the outside, and an injector 12 for injecting air drawn in from the acceptor to the outside.

The upper plate 10 is preferably composed of a portion of the inner empty space, the empty space is a passage for the air supplied from the outside is discharged to the outside again. In the embodiment of the present invention is composed of a plate of hexahedron, it may be of a disk shape or various other forms.

The upper plate 10 is provided with a plurality of acceptors 11 for receiving air from the outside, it is preferable to use the compressed air of high pressure. In addition, the acceptor 11 may be connected to an external air source and a hose. 2 and 3, the configuration of the hose is omitted.

Air introduced into the upper plate 10 through the acceptor 11 is injected back to the outer lower plate 20 through the injector 12 communicating with the acceptor 11.

The lower plate 20 is disposed below the upper plate 10 by a predetermined distance, and is connected to the injector 12 of the upper plate 10 to accept the air 21 and the acceptor 21. A plurality of through holes for injecting the air drawn from the lower side is provided to rise a certain distance from the upper surface of the panel.

The connecting portion H of the injector 12 of the upper plate 10 and the acceptor 21 of the lower plate 20 may preferably consist of a flexible hose. Since the separation distance between the upper plate 10 and the lower plate 20 becomes narrower and larger, the injector 12 of the injector 12 and the lower plate 20 of the upper plate 10 described above are repeated. The connection portion (H) is preferably composed of a flexible hose.

The sensor plate 30 communicates with the through hole of the lower plate 20 to form a communication hole communicating downwardly, and is laminated on the lower surface of the lower plate 20 to be injured for a predetermined distance from the upper surface of the panel integrally with the lower plate 20. The patterning formed on the panel is inspected as the furnace moves along the longitudinal direction of the panel.

That is, since the sensor plate 30 is stacked and integrally connected to the lower part of the lower plate 20, the separation distance between the sensor floating unit 1 and the panel is more specifically the separation distance between the sensor plate 30 and the panel ( Approximately 100 microns).

The through hole of the lower plate 20 and the communication hole of the sensor plate 30 are preferably composed of a plurality of micropores, and the communication hole of the sensor plate 30 is preferably evenly distributed over the entire range.

Air injected downward of the sensor plate 30 is evenly sprayed on the upper surface of the panel and the force of air reflected from the panel is evenly transmitted to the lower surface of the sensor plate 30 so that the horizontality of the sensor plate 30 is more precise. Can be maintained.

And the guide block 40 and the air bearing block 50 of the present invention will be described in detail with reference to [FIG. 4] to [FIG. 7] below.

4 is an exploded perspective view showing an extract of the guide block and the air bearing block in the sensor floating unit of the present invention, Figure 5 is an extract of the guide block and the air bearing block in the sensor floating unit of the present invention 6 is a plan view showing the guide block and the air bearing block in the sensor floating unit of the present invention, and FIG. 7 is a sectional view taken along the line AA and the enlarged view of the main part of FIG.

4 and 7, the guide block 40 of the present invention is connected to the lower end of the lower plate 20 to move integrally with the lower plate 20 ([FIG. 3] and 3, a stepped portion 41 bent outwardly is formed at the upper edge portion of the guide block 40, and the stepped portion 41 is air when the guide block 40 is moved upwards downward. It is configured to engage the upper surface of the bearing block 50 to limit the downward movement width of the guide block 40.

That is, the guide block 40 is stroked in the vertical direction with respect to the air bearing block 50 in a state of being fitted to the air bearing block 50. In detail, when the air is injected below the sensor plate 30 and the repulsive force causes the sensor plate 30 to rise to a certain height, and the lower plate 20 which moves integrally with the sensor plate 30 moves upward, the lower plate ( The guide block 40 integrally connected with 20 is stroked along the inner circumferential wall of the air bearing block 50.

The air bearing block 50 of the present invention is disposed on the upper portion of the lower plate 20 while being fastened to the lower portion of the upper plate 10, and sprays air supplied from the outside to the outer wall of the guide block 40. The vertical movement of the plate 20 is guided.

And the air bearing block 50 is made of a form surrounding the outer wall of the guide block 40, preferably the inner wall of the air bearing block 50 and the outer wall of the guide block 40 is configured to maintain a constant gap with each other In a state where the outer wall of the guide block 40 and the inner wall of the air bearing block 50 are in close proximity to each other, the guide block 40 is non-contacted and strokes in an up and down direction as if sliding against the inner wall of the air bearing block 50.

In addition, the air bearing block 50 has a plurality of fine holes are formed in the inner wall facing the outer wall of the guide block 40, the air supplied from the outside through the micro holes to the outer wall of the guide block 40 by the guide block 40 moves in contact with the inner wall of the air bearing block 50.

5 and 7, the air bearing block 50 includes a first block 51 having a 'b' shape, a second block 52 having a '-' shape, and a '-' character. The third block 53 having a shape is connected in a rectangular shape to allow air to flow internally, and preferably, the center portion has an opening having a rectangular pillar shape in a vertical direction so that the guide block 40 can be fitted in the center portion.

The inner wall of the air bearing block 50 facing the outer wall of the guide block 40, that is, the inner wall of the first block 51, the inner wall of the second block 52, and the inner wall of the third block 53, respectively, It consists of the porous bodies 51b, 52b, 53b passed through.

When air is supplied from the external air injector J through the air inlet 50a formed on the side wall of the first block 51, the respective passages 51a of the first, second, and third blocks 51, 52, 53 are provided. Air introduced through 52a and 53a is injected through the porous bodies 51b, 52b, and 53b of each of the blocks 51, 52, and 53, and thus air injected through each of the porous bodies 51b, 52b, and 53b. Is sprayed on the outer wall of the slope of the guide block 40 disposed close to each other and the inner wall of the air bearing block 50 and the outer wall of the guide block 40 maintain a constant gap with each other, and are not in contact with each other by air injected into the gap. State is maintained.

Then, when the sensor plate 30 injects air downward to the upper surface of the panel, the guide block 40 is stroked upward, the guide block 40 and the air bearing block 50 is in contact with each other as described above. The guide block 40 is stroked in the vertical direction while maintaining the state.

As such, the guide block 40 and the air bearing block 50 maintain a constant distance in a non-contact manner with each other, so that the guide block 40 can maintain alignment with respect to the vertical up and down direction, and thus, the sensor plate 30 and The panels can be leveled with each other accurately.

And by maintaining the desired constant distance in the state where the sensor plate 30 and the upper surface of the panel is horizontal, it is possible to obtain a good inspection result of the panel.

4, 6, and 7 are circumferential walls of the guide block and are disposed facing the inner wall of the air bearing block.

According to the present invention, a plurality of sensor units (not shown) are disposed on a plurality of vertical portions of the stepped portion 41 of the guide block 40 so as to measure the horizontality of the lower plate 20 to detect an upward stroke distance of the guide block 40. It is configured to further include.

The sensor unit (not shown) may detect the separation distance between the panel and the sensor plate 30 by measuring the separation distance from the guide block 40 by sensing, and the detected data is transmitted to an external control unit. The separation distance between the sensor plate 30 and the sensor is monitored, and if a deviation occurs, the injection pressure of the air can be adjusted accordingly.

The sensor unit (not shown) may be selectively configured by an external control unit in a wired / wireless manner, and may be detachably attached to a side wall of the frame 60 supporting the upper plate 10 and the lower plate 20. Is mounted.

Meanwhile, referring to FIGS. 2 and 3, the frame 60 of the present invention supports the upper plate 10 and the lower plate 20 to each other, and according to the distance from which the lower plate floats from the upper surface of the panel. It guides the vertical movement of this lower plate.

That is, after the air injected downward by communicating with the lower plate 20 and the sensor plate 30 hits the panel, the separation distance between the sensor floating unit 1 and the panel is determined by the force of the rising air. After hitting the panel, the floating air will float only the lower plate 20 and the sensor plate 30 upward.

In this case, the lower plate 20 and the sensor plate 30 are integrally moved upwardly along the lower wall of the lower end of the frame 60, and when the supply of air is completed, the lower plate 20 and the sensor plate 30 are moved downwardly along the peripheral wall of the frame 60 again. Make a stroke.

2 and 3, the grip block 70 may be mounted on the sidewall of the frame 60, and a sensor unit (not shown) is detachably mounted on the grip block 70. Can be.

In addition, reference numeral 80 of FIGS. 2 and 3 denotes a fixing block, which simultaneously clamps both side walls of the lower plate 20 stacked in a plurality of stages in a direction opposite to each other, thereby providing a laminated structure of the lower plate. I can keep it solid.

1: Sensor floating unit equipped with the inventor's air bearing block
2: test head part 3a, 3b: head part transfer means
4: Gantry Bridge 5: LM Guide
6: table 10: upper plate
11: acceptor 12: injector
20: lower plate 21: acceptor
30: sensor plate 40: guide block
41: step 42: main wall
50: air bearing block 50a: air inlet
51: first block 51a: passage
51 b: porous body 52: second block
52a: passage 52b: porous body
53: third block 53a: passage
53b: porous body 60: frame
70: grip block 80: fixed block
J: Air injector P: Panel
H: Connection part

Claims (5)

A sensor floating unit that inspects the patterning of a panel while moving along the longitudinal direction of the panel while floating on an upper surface of the panel seated on a table,
An upper plate (10) having an acceptor for receiving air from the outside and an injector for injecting air drawn in from the acceptor to the outside;
The panel is disposed below the upper plate at a predetermined distance, and includes an acceptor connected to the injector of the upper plate to receive air, and a plurality of through holes for injecting air drawn in from the acceptor downward. A lower plate 20 which is floated from a predetermined distance;
Communication holes communicating with the through-holes of the lower plate are formed downwardly and are laminated on the lower surface of the lower plate and move along the longitudinal direction of the panel in a state of being injured for a predetermined distance from the upper surface of the panel integrally with the lower plate. A sensor plate 30 for inspecting patterning formed on the panel;
A guide block 40 connected to an upper end of the lower plate to move integrally with the lower plate;
The air bearing block 50 is disposed above the lower plate while being fastened to the lower part of the upper plate, and sprays air supplied from the outside to the outer wall of the guide block to guide vertical movement of the lower plate. ;
It is configured to include,
The air bearing block 50 is formed to surround the outer wall of the guide block 40, the inner wall of the air bearing block 50 and the outer wall of the guide block 40 is maintained in a constant gap with each other Sensor floating unit with block.
delete The method according to claim 1,
The air bearing block 50 has a plurality of fine holes are formed in the inner wall facing the outer wall of the guide block, the air supplied from the outside through the micro holes to the outer wall of the guide block 40 by spraying the guide block 40 is a sensor floating unit equipped with an air bearing block, characterized in that it moves in contact with the inner wall of the air bearing block (50).
The method according to claim 3,
A stepped portion 41 bent outwardly is formed at the upper edge portion of the guide block 40, and the stepped portion 41 is the air bearing block 50 when the guide block 40 is moved upward downward. Sensor floating unit is mounted on the air bearing block, characterized in that to limit the width of the downward movement of the guide block (40) by being caught on the upper surface.
The method of claim 4,
And a plurality of sensors arranged on a plurality of vertical portions of the stepped part so as to measure horizontality of the lower plate to detect an upward stroke distance of the guide block.

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