KR101131096B1 - Downward type effusion cell - Google Patents

Abstract

The present invention relates to a top-down vacuum evaporation source apparatus, comprising: a source crucible in which a source material is stored and an inlet is open upward; A heat radiation / source reflector disposed to be spaced apart from the outside of the source crucible so as to surround the inlet of the source crucible; At least one heating element inserted into the heat radiation / source reflector to emit heat to heat the heat radiation / source reflector; A source crucible support supporting a lower portion of the source crucible and having at least one opening; And a housing formed outside the heat radiation / source reflector, the housing receiving the source crucible, the heat radiation / source reflector, the heating element and the source crucible support, wherein the heat radiation / source reflector heated by the heating element is directed toward the source crucible. Radiating to heat the source crucible and the source material of the source crucible, and also to reheat and reflect and re-evaporate the source material emitted from the source crucible, wherein the source material to be reflected and re-evaporated is an opening provided in the source crucible support. It provides a top-down vacuum evaporation source device characterized in that it is discharged to the outside through.

Description

DOWNWARD TYPE EFFUSION CELL}

The present invention relates to a top-down vacuum evaporation source device, and more particularly, to a top-down vacuum evaporation source device having improved efficiency by disposing a heating element inside a heat radiation / source reflector.

Vacuum deposition or vacuum evaporation is a deposition method in which a target material to be deposited is placed in a chamber of a high vacuum, and the source material is heated by an electric current to evaporate the particles and condense it on a surface of a relatively cold substrate to form a thin film. For example, it is widely used to form a thin film made of a specific material on the surface of a wafer in a semiconductor manufacturing process or to form a thin film made of a desired material on a surface such as a glass substrate in the manufacture of a thin film solar cell or a large flat panel display device.

Meanwhile, the quaternary compound semiconductor CuInGaSe2 (CIGS) solar cell, which is recently attracting attention as a next-generation solar cell, has a Mo back electrode, a light absorption layer (CIGS), a CdS buffer layer, a ZnO transparent window layer, and an antireflection layer on an insulating soda-lime glass substrate. It is manufactured by forming grid electrodes (Al / Ni), and unlike a typical IT-semiconductor device, it is a simple structure that requires no device pattern at all. So far, the best cell efficiency is 0.45 cm2, 19.9%, developed by the US Energy Research Institute (NREL), a very good result, comparable to 20.3% of polycrystalline (poly) silicon solar cells. In addition, the use of this material is also very strong environmental stability and resistance to radiation. As the CIGS solar cell attracts attention, the importance of the development of equipment technology, which is the core technology of the CIGS solar cell, is being highlighted. Two methods for producing a four-element compound CIGS absorber are known as co-evaporation and two-step process by heat treatment after deposition of precursor. . The simultaneous evaporation method is a method of forming a thin film on a high temperature substrate by simultaneously evaporating unit elements copper (Cu), indium (In), gallium (Ga) and selenium (Se) using a thermal evaporation source. Although there is an advantage of easy composition control, there is a limit in manufacturing a large area solar cell. Therefore, in order to manufacture a large area solar cell, it is urgent to develop a highly efficient linear source. However, in order to mass-produce a large area thin film, a thin film must be manufactured while the substrate is horizontally moved in-line on a linear evaporation source, and thus high efficiency is required in the vacuum evaporation source device and the vacuum deposition device.

As a vacuum evaporation source device and a vacuum deposition device for forming such a conventional thin film, there is a bottom-up deposition method, in which a vacuum evaporation source containing a source material is placed in a chamber and a vacuum evaporation source containing a source material is placed under the chamber. Evaporation of the source material in the direction. However, the bottom-up deposition method has a problem in that the source material evaporated upwards is subject to gravity, and thus the source material falls down without coming into contact with the surface of the substrate located thereon, and thus the use efficiency of the source material is low. In addition, when a mask is to be used, there is a mask deflection phenomenon, and when a substrate is to be heated to a high temperature, in the case of a large area substrate, a warpage phenomenon may occur, and thus it is difficult to apply to a large area substrate.

In order to solve the problems of the bottom-up deposition method, the applicant of the present invention has developed a top-down vacuum evaporation source device and a vacuum deposition device, and has applied for the patent application Nos. 10-2008-0112708 and 10-2009-0039222. The technique disclosed by the above patent application solves the problems of the bottom-up vacuum deposition apparatus as described above, but since these top-down vacuum deposition apparatuses are evaporation sources, there is a limitation in the large-area process and the heating element is along the outer circumferential surface of the heat radiation / source reflector. And heats the heat radiation / source reflector by dissipating heat, and the heat radiation / source reflector heated by the heating element radiates heat radiation toward the source crucible to heat the source crucible and the source material of the source crucible and discharge it to the outside ( 1), there is a problem that a difference between the temperature of the heating element and the temperature applied to the source crucible occurs due to the distance between the heating element and the source crucible. In addition, the shape of the heating element, which is arranged in a plurality of long wire structure causes a deformation at a high temperature, there is a limit in generating a high temperature.

The present invention has been made to solve the problems described above, by inserting the heating element into the heat radiation / source reflector plate to minimize the heat loss that can occur in the vacuum evaporation source device and further reduce the power loss of the vacuum evaporation source device capacity of the controller It is an object of the present invention to provide a top-down vacuum evaporation source device that can reduce the manufacturing and maintenance costs of the device can be reduced.

In addition, it is another object of the present invention to provide a top-down vacuum evaporation source device capable of integrating equipment by reducing the space occupied by the heating element as compared with the related art.

In addition, the present invention by inserting and combining the tubular support formed of the same material as the heat radiation / source reflector in the empty space of the heat radiation / source reflector to which the heating element is inserted and fixed, to minimize the heat that can be lost in the heating element to be released from the heating element Another object is to provide a top-down vacuum evaporation source device capable of efficiently heating the entire apparatus by absorbing heat to the fullest extent.

In order to solve the above problems, the present invention, the source material is stored, the source crucible in the inlet is open upward; A heat radiation / source reflector disposed to be spaced apart from the outside of the source crucible so as to surround the inlet of the source crucible; At least one heating element inserted into the heat radiation / source reflector to emit heat to heat the heat radiation / source reflector; A source crucible support supporting a lower portion of the source crucible and having at least one opening; And a housing formed outside the heat radiation / source reflector, the housing receiving the source crucible, the heat radiation / source reflector, the heating element and the source crucible support, wherein the heat radiation / source reflector heated by the heating element is directed toward the source crucible. Radiating to heat the source crucible and the source material of the source crucible, and also to reheat and reflect and re-evaporate the source material emitted from the source crucible, wherein the source material to be reflected and re-evaporated is an opening provided in the source crucible support. It is possible to provide a top-down vacuum evaporation source device characterized in that it is discharged to the outside through.

Here, it may be configured to further include a reflector formed between the housing and the heat radiation / source reflector to reflect heat emitted from the heat radiation / source reflector toward the heat radiation / source reflector.

In addition, the heating element may be configured to be inserted into the through-hole formed in the heat radiation / source reflector.

In addition, at least one insulating fixing portion having a hole therein is fitted to the heating element at intervals from each other, the heating element is spaced apart from the inner surface of the through hole by the at least one insulating fixing portion to be disposed in the center of the through hole It can also be configured.

In addition, the fitted insulating fixing part and the heating element are inserted into and coupled to the inside of the tubular first support having an empty inside, and the tubular first support is inserted into contact with the through hole, so that the heating element is formed by the insulating fixing part. 1 may be arranged so as to be spaced apart from the support and the through hole in the center of the through hole and the tubular first support.

In addition, between the at least one insulating fixing portion may be configured such that the second hollow tubular support is coupled.

In addition, the fitted insulating fixing part and the heating element are inserted and coupled to the inside of the first hollow tubular support, the tubular second support having an empty interior is coupled between the at least one insulating fixing part, the tubular first The support may be inserted into contact with the through hole, such that the heating element is spaced apart from the tubular first support and the through hole by an insulating fixing part so as to be disposed at the center of the through hole and the tubular first support.

In addition, the tubular first support, the tubular second support, and the heat radiation / source reflector may be formed of the same material.

In addition, the tubular first support, the tubular second support, and the heat radiation / source reflector may be formed of graphite material.

According to the present invention, by inserting the heating element into the heat radiation / source reflector, the heat loss that can occur in the vacuum evaporation source device can be minimized and the power loss of the vacuum evaporation source device can be reduced to reduce the capacity of the controller, thereby reducing the manufacturing and maintenance costs of the device. It is possible to provide a top-down vacuum evaporation source device that can be saved.

In addition, according to the present invention, since it is possible to integrate the equipment by reducing the space occupied by the heating element as compared to the prior art it can provide a top-down vacuum evaporation source device that can be more compact the whole apparatus.

In addition, according to the present invention, by inserting the tubular support formed of the same material as the heat radiation / source reflector in the empty space of the heat radiation / source reflector to which the heating element is inserted and fixed, to reduce the heat that can be lost in the heat generating element to the maximum By absorbing the heat emitted to the maximum, it is possible to provide a top-down vacuum evaporation source device capable of efficiently heating the entire apparatus.

1 is a cross-sectional view showing a top-down vacuum evaporation source device according to the prior art.
2 is a cross-sectional view showing an embodiment of a top-down vacuum evaporation source device 100 according to the present invention.
3 is a perspective view illustrating a part of the heating element 14 coupled with the insulating fixing part 15.
4 is a partially cutaway perspective view for explaining a configuration in which the insulating fixing part 15 and the heating element 14 are coupled using the tubular first support 21.
FIG. 5 is a cross-sectional view for explaining a configuration in which the insulating fixing part 15 and the heating element 14 are coupled using the tubular first support 21.
6 is a perspective view illustrating another configuration in which the insulating fixing part 15 and the heating element 14 are coupled using the tubular support.
7 is an external perspective view of the tubular first support 21 and the tubular second support 22 coupled together.
8 is a partial cutaway perspective view of the tubular first support 21 and the tubular second support 22 coupled together.
9 is a diagram illustrating an embodiment in which the top-down vacuum evaporation source device according to the present invention is linearly configured.

Hereinafter, exemplary embodiments of the present invention will be described in detail with reference to the accompanying drawings.

2 is a cross-sectional view showing an embodiment of a top-down vacuum evaporation source device 100 according to the present invention.

Referring to FIG. 2, the top-down vacuum evaporation source apparatus 100 according to the present embodiment includes a source crucible 12 in which a source material 11 is stored and an inlet is open upward, and an inlet of the source crucible 12. A heat radiation / source reflector 13 spaced apart from the source crucible 12 so as to surround the heat crucible 12, and inserted into the heat radiation / source reflector 13 to dissipate heat to thereby radiate the heat radiation / source reflector 13 At least one heating element 14 for heating, a source crucible support 17 having a lower portion of the source crucible 12 and having at least one opening 20, and an outside of the heat radiation / source reflecting plate 13 And a housing 19 for receiving the source crucible 12, the heat radiation / source reflecting plate 13, the heating element 14, and the source crucible support 17.

The downward vacuum evaporation source device 100 having such a configuration operates as follows. That is, at least one heating element 14 inserted into the heat radiation / source reflector 13 heats the heat radiation / source reflector 13, and the heated heat radiation / source reflector 13 is the source crucible 12. Radiating heat radiation toward to heat the source crucible 12 and the source material 11 of the source crucible 12. When the source crucible 12 and the source material 11 are heated so that the source material 11 is released upward from the source crucible 12 (the direction indicated by A in FIG. 2), it reaches the heat radiation / source reflector 13. The heat radiation / source reflector 13 reheats the reached source material 11 to reflect and re-evaporate, and the source material 11 to be reflected and re-evaporated is moved downward in the direction indicated by B of FIG. 2. . The source material 11 moving downward is discharged to the outside through the opening 20 formed in the source crucible support 17, as indicated by C of FIG. 2, thereby placing a substrate disposed below the opening 20 (not shown). ) To perform a top-down vacuum deposition by coating a substrate to form a thin film.

In this embodiment, the heat radiation / source reflector 13 heats the source material 11 and the source crucible 12 as described above to evaporate the source material 11 upwards, and evaporates from the source crucible 12. To decompose the source material 11 reaching the heat radiation / source reflector 13 in the form of a molecular beam into a source material 11 of smaller size while reflecting and re-evaporating, and also having a higher energy source. Reheating is performed simultaneously. In addition, a function of heating the substrate positioned below the vacuum evaporation source device 100 to a high temperature may provide a required energy for forming a thin film.

The inlet of the source crucible 12 is open upward as shown in FIG. 2, and the heat radiation / source reflector 13 and the housing 19 allow the source material in the form of a molecular beam to be radiated downward. It is preferable that the cross section is formed in the form of a rectangle, a letter or the like with an open lower portion.

Here, the source crucible support 17 is formed to shield the open lower part of the heat radiation / source reflector 13 from the outside, except that the source material 11 passes downward (C direction) of the evaporation source device 100. The opening 20 is formed so that it can be. Through the opening 20, the source material in the form of molecular beams reflected and re-evaporated by the heat radiation / source reflector 13 may be discharged downward. By the configuration of the source crucible support 17, the heat radiation / source reflector 13 may be sealed to a predetermined level or more, thereby minimizing heat loss.Increasing the pressure inside the source crucible 12 increases the source material Can be sprayed. In addition, by forming the openings 20 provided in the source crucible support 17 in various patterns, the uniformity of the source material 11 in the form of radiation radiated to the substrate may be adjusted. In addition, by adjusting the inclination of the opening 20 provided in the source crucible support 17 in the vertical axis direction, the direction of the source material in the form of radiation radiated to the substrate may be adjusted.

On the other hand, the heating element 14 may be generated by, for example, an electrical means and may be connected to a power source (not shown) through an electrode (not shown) for this purpose. In addition, the heating element 14 is shown as a straight line having a circular cross section, but is not limited thereto. As shown in FIG. 2, a plurality of heating elements 14 may be disposed in the heat radiation / source reflector 13 along the circumference thereof. The plurality of heating elements 14 may be set to be separately controlled to allow the source material to be heated to the most suitable temperature according to the evaporation path.

The heating element 14 may be inserted into the through hole 16 formed in the heat radiation / source reflector 13. The through hole 16 is formed to have a diameter larger than the cross section of the heating element 14 to accommodate the heating element 14. Since the heating element 14 may be heated by an electric means, a leakage current may occur when the heat radiation / source reflector 14 is in direct contact. Thus, an insulating fixing part 15 (refer to FIG. 3) may be installed to prevent the heating element 14. ) And the heat radiation / source reflector 14 are spaced apart so as not to directly contact.

3 is a perspective view illustrating a part of the heating element 14 coupled with the insulating fixing part 15.

Referring to FIG. 3, the heating element 14 is fitted to at least one insulating fixing part 15 having a hole therein. The insulating fixing part 15 may be disposed in plural at appropriate intervals in consideration of the required length and weight of the heating element 14. In addition, the insulating fixing part 15 is preferably formed of a material such as ceramic for electrical insulation. As shown in FIG. 3, by inserting the combined body in which the heating element 14 and the insulating fixing part 15 are fitted into the through hole 16, the heating element 14 is spaced apart from the inner surface of the through hole 16 so as to be the center of the through hole 16. Can be placed in. As a result, the heating element 14 may perform an insulation function to prevent leakage current from being generated by directly contacting the inner surface of the through hole 16, that is, the heat radiation / source reflector 13. In the example of FIG. 3, the insulating fixing part 15 is formed to correspond to the shape of the through hole 16, but the diameter of the cross section is slightly smaller than the inner circumference of the through hole 16 so that the insulating fixing part 15 can be smoothly inserted into the through hole 16. It is desirable to.

On the other hand, the heating element 14 and the insulating fixing portion 15 may be inserted into the through hole 16 by using a tubular support to be more smoothly inserted into the through hole 16, and further improve the insulation function and heat transfer efficiency. 4 and 5 are partial cutaway perspective views and cross-sectional views for explaining the configuration of coupling the insulating fixing part 15 and the heating element 14 by using the tubular first support 21.

4 and 5, the hollow tubular first support 21 extends in the longitudinal direction, and the insulating fixing part 15 as described in FIG. 3 is disposed inside the tubular first support 21. . As described above, the insulating fixing part 15 is also formed with a through hole large enough to accommodate the heat generating element 14 therein, and the heat generating element 14 is inserted into the through hole so that the tubular first support 21 and It may be spaced apart.

The tubular first support 21 is inserted through the through hole 16 formed inside the heat radiation / source reflector 13 as described above, and is formed of the same material as the heat radiation / source reflector 13 to increase the thermal conductivity. It is desirable to. In particular, the heat radiation / source reflector 13 and the tubular first support 21 may be formed of a graphite material to increase thermal conductivity. The tubular first support 21 is illustrated as being circular in cross section, but is not limited thereto, and is configured in a form corresponding to the through hole 16. For example, the through hole 16 and the tubular first support 21 may be rectangular or Of course, it can also be formed in the shape of a triangle or the like.

When the actual device is configured, the insulating fixing part 15 and the heat generating element 14 may be first fitted and the combination may be inserted into the tubular first support 21.

By this configuration, the tubular first support 21 is inserted into contact with the through hole 16 so that the heat transfer efficiency can be increased, and the heating element 14 is formed by the insulating fixing part 15. And spaced apart from the through hole 16, that is, the heat radiation / source reflector 13, the insulation hole 16 may be disposed at the center of the through hole 16 and the tubular first support 21.

6 is a perspective view illustrating another configuration in which the insulating fixing part 15 and the heating element 14 are coupled using the tubular support. The tubular support of FIG. 6 is represented by a tubular second support 22 to distinguish it from the tubular first support 21 of FIG. 5.

Referring to FIG. 6, it can be seen that the tubular second support 22 having a hollow inside is fitted between the insulating fixing parts 15. The tubular second support 22 can be considered to be a form in which the tubular first support 21 is cut out. When the actual device is configured, the insulating fixing part 15 and the tubular second support 22 are alternately inserted into the heating element 14 to form the shape as shown in FIG. 6 and insert the same into the through hole 16. As another example, the heating element 14 may be first inserted into the through hole 16, and the insulating fixing part 15 and the tubular second support 22 may be alternately inserted to be fitted.

In this case, the outer diameter of the tubular second support 22 may be configured to be equal to, slightly larger or smaller than the outer diameter of the insulating fixing part 15. According to such a configuration, the insulating fixing portion 15 can perform the insulation function and at the same time, the insulating fixing portion 15 can be more firmly stabilized in the through hole 16, and the tubular second support 22 is thermally radiated. When the material is made of the same material as the / reflective plate 13, the heat transfer efficiency can be increased.

7 and 8 illustrate an external perspective view and a partial cutaway perspective view of a tubular first support 21 and a tubular second support 22 coupled together with reference to FIGS. 4 to 6.

7 and 8, it can be seen that the tubular first support 21 is coupled to surround the tubular second support 22 as described with reference to FIG. 6. In the combination of FIGS. 7 and 8, the outer diameter of the tubular second support 22 is formed to be the same as or slightly smaller than the tubular first support 21 so as to be in contact with or slightly separated from the inner surface of the tubular first support 21. do. 7 and 8, the insulating fixing part 15 and the tubular second support 22 are alternately fitted to the heating element 14, and the entirety of the combination is connected to the tubular first support 21. After inserting in, the entirety of the combination can then be inserted into the through hole 16. Of course, the heating element 14 may be first inserted into the through hole 16, and the insulating fixing part 15 and the tubular second support 22 may be alternately inserted, and then the tubular first support 21 may be inserted. In addition, the tubular first support 21 is first inserted into the through hole 16, and a coupling form of inserting in the reverse order is also possible.

7 and 8, an insulating function is performed by the insulating fixing part 15, and the insulating fixing part 15 is fixed by the tubular second support 22, and the tubular first support ( 21) and the second support 22 can perform a combination of various functions that can increase the heat transfer efficiency. In order to increase the heat transfer efficiency, the tubular first support 21, the second support 22, and the heat radiation / source reflector 13 are made of the same material. In particular, in order to increase the heat transfer efficiency, it is preferable to form a graphite (graphite) material.

Referring back to FIG. 2, the vacuum evaporation source device 100 is formed along the inner circumferential surface of the housing 19 between the housing 19 and the heat radiation / source reflector 13 in order to increase thermal efficiency. It may further include a reflecting plate 18 for reflecting heat emitted from the (13) toward the heat radiation / source reflecting plate (13). The reflecting plate 18 reflects the heat radiated from the heat radiation / source reflector 13 toward the housing 19 and reaches the heat radiation / source reflector 13 to increase the thermal efficiency.

According to the exemplary embodiment described with reference to FIGS. 2 to 8, the heat generator 14 is inserted into the heat radiation / source reflector 13 to increase overall thermal efficiency and to integrate the device as a whole.

9 shows another embodiment of the top-down vacuum evaporation source apparatus according to the present invention, and illustrates the case where the vacuum evaporation source apparatus 100 is linearly configured.

Referring to FIG. 9, a plurality of source crucibles 12 are arranged linearly in a horizontal direction, and the heating element 14 is disposed along the side of the source crucible 12 as described with reference to FIGS. 3 to 8, and the source crucible 12 It can be seen that the heating element 14 is arranged to extend in the direction (length direction) of the source crucible 12 at the top of the).

According to the embodiment as shown in Figure 9, since the vacuum evaporation source device 100 can be configured in a plurality of linear, there is an advantage that can easily deposit a large-area substrate.

In the above, the present invention has been described with reference to preferred embodiments, but the present invention is not limited to the above embodiments, and those skilled in the art to which the present invention pertains may make various modifications and variations from such descriptions. will be. Therefore, the present invention should be construed with reference to the overall description of the appended claims and drawings, and all equivalent or equivalent modifications thereof will belong to the scope of the present invention.

100 ... down vacuum evaporation source device,
11 source material, 12 source crucible,
13 ... heat radiation / source reflector, 14 ... heating element,
15 ... insulating fixture, 16 ... through,
17 source sauce crucible support, 18 reflector plate,
19 ... housing, 20 ... openings,
21 ... tubular first support, 22 ... tubular second support.

Claims (9)

A source crucible in which the source material is stored and whose inlet is open upward;
A heat radiation / source reflection plate disposed to be spaced apart from the outside of the source crucible so as to surround the source crucible;
At least one heating element inserted into the heat radiation / source reflector to emit heat to heat the heat radiation / source reflector;
A source crucible support supporting a lower portion of the source crucible and having at least one opening; And
A housing formed outside the heat radiation / source reflector and accommodating the source crucible, the heat radiation / source reflector, a heating element and a source crucible support
Including;
The heating element is inserted into the through hole formed in the heat radiation / source reflector,
At least one insulating fixing part having a hole therein is fitted into the heating element at intervals from each other so that the heating element is spaced apart from the inner surface of the through hole by the at least one insulating fixing part, and is disposed at the center of the through hole.
The heat radiation / source reflector heated by the heating element radiates heat radiation toward the source crucible to heat the source crucible and the source material of the source crucible, and also to reheat and reflect and re-evaporate the source material emitted from the source crucible, The source material that is reflected and re-evaporated is discharged to the outside through the opening provided in the source crucible support.
The method of claim 1,
A reflector formed between the housing and the heat radiation / source reflector to reflect heat emitted from the heat radiation / source reflector toward the heat radiation / source reflector
Top down vacuum evaporation source device characterized in that it further comprises.
delete delete The method of claim 1,
The fitted insulating fixing part and the heating element are inserted into and coupled to the inside of the tubular first support having an empty interior, and the tubular first support is inserted into contact with the through hole so that the heating element is connected to the tubular first support by the insulating fixing part. And a spaced apart from the through hole and disposed in the center of the through hole and the tubular first support.
The method of claim 1,
Top down vacuum evaporation source device, characterized in that the tubular second support is coupled between the at least one insulating fixing portion.
The method of claim 1,
The fitted insulating fixing part and the heating element are inserted into and coupled to the inside of the first hollow tubular support, and the tubular second support having an empty inside is coupled between the at least one insulating fixing part,
The tubular first support is inserted into contact with the through hole, so that the heating element is spaced apart from the tubular first support and the through hole by an insulating fixing part and is disposed in the center of the through hole and the tubular first support. Device.
8. The method according to any one of claims 5 to 7,
The tubular first support, the tubular second support and the heat radiation / source reflector is a top-down vacuum evaporation source device, characterized in that formed of the same material.
The method of claim 8,
The tubular first support, the tubular second support and the heat radiation / source reflector is a top-down vacuum evaporation source device, characterized in that formed of a graphite material.

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