KR101109078B1 - Substrate supporting unit, substrate inspecting apparatus including the unit, and substrate inspecting method using the apparatus - Google Patents

Abstract

The present invention provides a substrate support unit, a substrate inspection apparatus including the same, and a substrate inspection method using the same. The board inspection apparatus is a device for inspecting the attachment state of the flat panel display panel and the flexible printed circuit board attached to one side thereof. During the inspection, the main support plate supports the center area of the flat panel display panel, and the auxiliary support plate is the flat display panel. And a region between the central region of and the attachment region to which the flexible printed circuit board is attached. The inspection unit moves along the attachment area, scans the attachment area, performs indentation inspection, foreign material inspection on the flexible printed circuit board, and alignment inspection of the flat panel and the flexible printed circuit board using the photographed image. .

Flat Panel, Printed Circuit Board, Anisotropic Conductive Film, Scanning, Indentation Inspection, Alignment Inspection, Foreign Material Inspection

Description

SUBSTRATE SUPPORTING UNIT, SUBSTRATE INSPECTING APPARATUS INCLUDING THE UNIT, AND SUBSTRATE INSPECTING METHOD USING THE APPARATUS

The present invention relates to an apparatus and method for manufacturing a flat panel display device, and more particularly, to an apparatus and method for inspecting the adhesion state of a panel of a flat panel display device and a flexible printed circuit board attached to one side thereof.

In general, an information processing apparatus has a display panel for displaying predetermined information. Recently, with the development of technology, the use of flat panel display devices such as a flat panel display device which is light and occupies a small space is increasing.

The flat panel display includes a flat panel display panel receiving a signal to display an image, and one side of the flat panel display panel is a tape automatic bonding (TAB) or film on glass (FOG) flexible printed circuit board that outputs a signal to the flat panel display panel. ) Are attached a lot.

The process of manufacturing such a flat panel display device includes an inspection process of inspecting an adhesion state of a flat panel display panel and a flexible printed circuit board attached to one side thereof.

As shown in FIGS. 1A and 1B, a general substrate inspection apparatus is provided based on a panel 1 of the smallest size that the stage 10 can inspect, in order to correspond to panels 1 of various sizes, and an area. The scan camera photographs a portion of the panel and examines the adhesion of the printed circuit board with the captured image.

However, since it is practically difficult for the area scan camera to photograph the entire area to which the printed circuit board is attached, the indentation inspection cannot be performed on the entire area to which the printed circuit board is attached. In addition, the alignment inspection of the flat panel display panel and the printed circuit board and the pattern inspection of the printed circuit board may not be performed on all the printed circuit boards, and a separate device capable of performing the alignment inspection and pattern inspection may be performed. Is required.

The present invention provides a substrate inspection apparatus and a substrate inspection method capable of improving the inspection speed.

The present invention provides a substrate inspection apparatus and a substrate inspection method capable of performing indentation inspection on the entirety of a plurality of printed circuit boards attached to a flat panel display panel.

The present invention provides a substrate inspection apparatus and a substrate inspection method capable of performing an indentation inspection on the entire pitch provided in one printed circuit board.

The present invention provides a substrate inspection apparatus and a substrate inspection method capable of simultaneously performing indentation inspection of an attachment region, alignment inspection of a flat panel display panel and a printed circuit board, and foreign material inspection on a printed circuit board.

The object of the present invention is not limited thereto, and other objects not mentioned will be clearly understood by those skilled in the art from the following description.

The present invention provides a substrate inspection apparatus. The present invention relates to a device for inspecting the attachment state of the flat panel display panel and the flexible printed circuit board attached to one side thereof, the substrate support unit for supporting the flat panel display panel; And an inspection unit positioned at one side of the substrate support unit and inspecting an attachment region to which the flexible printed circuit board is attached, wherein the substrate support unit includes a main support plate supporting a central region of the flat panel display panel; And an auxiliary support plate disposed between the main support plate and the inspection unit, supporting an area between the central area and the attachment area and provided independently of the main support plate.

The main support plate is a stage; And a support pad provided on the stage and on which the flat panel display panel is disposed, wherein the support pad is made of an elastic material.

According to an embodiment, the stage is provided in a rectangular plate shape.

According to another embodiment, the stage, when viewed from the top, the first stage disposed in a direction perpendicular to the longitudinal direction of the auxiliary support plate; And a second stage disposed to be spaced apart from the first stage in a longitudinal direction of the auxiliary supporting plate, wherein the substrate inspection unit is configured to adjust the relative distance between the first stage and the second stage so as to adjust the first stage or the second stage. And a main support plate driver for moving the second stage.

The main support plate is formed with a main vacuum hole for vacuum adsorption of the central area, the auxiliary support plate is formed with an auxiliary vacuum hole for vacuum adsorption between the center area and the attachment area is formed, the substrate inspection apparatus is the main vacuum And a pressure regulating member that can independently adjust the pressure of the hole and the pressure of the auxiliary vacuum hole.

The auxiliary vacuum holes are formed in a plurality of spaced apart from each other along the longitudinal direction of the auxiliary support plate.

The auxiliary support plate is disposed in the longitudinal direction parallel to one side of the stage, the length is provided longer than one side of the stage.

The first stage and the second stage are provided in a rod shape, and the support pads are provided in a plurality of spaced apart from each other in the first stage and the second stage in the longitudinal direction of the first stage and the second stage, respectively. do.

The substrate support unit further includes a main support plate driver for driving the main support plate, wherein the main support plate driver moves the main support plate in a direction perpendicular to the longitudinal direction of the auxiliary support plate when viewed from above. ; A second driver for moving the main support plate in a vertical direction; And a third driver for rotating the main support plate.

The inspection unit may move along a first direction parallel to a longitudinal direction of the auxiliary support plate, and scan a photograph of the attachment area to provide an image; A coaxial illuminator fixed to the line scan camera and irradiating light to the attachment region; And an inspector for receiving the image and inspecting the attachment region, wherein the inspector includes an indentation inspection unit that performs an indentation inspection of the attachment region. The inspector includes a foreign material inspection unit that inspects a foreign material in the attachment region.

The inspection unit is located on top of the line scan camera, the external light for irradiating the transmitted light to the attachment area; And a bracket connecting the external light and the line scan camera to fix the relative position of the external light with respect to the line scan camera, wherein the inspector is disposed between the flat panel display panel and the flexible printed circuit board in the attachment area. The apparatus may further include an alignment inspection unit that performs alignment inspection.

The line scan camera is positioned lower than the upper surface of the auxiliary support plate, and the external illumination is positioned higher than the upper surface of the auxiliary support plate.

The main support plate is disposed in pairs spaced apart from each other in a first direction parallel to the longitudinal direction of the auxiliary support plate, the auxiliary support plate is arranged in pairs corresponding to each of the main support plate.

The present invention also provides a substrate support unit. The present invention relates to a unit for supporting a flat panel display panel having a flexible printed circuit board attached to one side thereof, the main support plate supporting a central area of the flat panel display panel; And an auxiliary vacuum hole disposed at one side of the main support plate to support an area between the attachment area and the center area to which the flexible printed circuit board is attached, and to vacuum suck the area between the attachment area and the center area. And an auxiliary support plate provided independently of the main support plate, wherein the main support plate comprises: a stage; And a support pad provided on the stage, on which the flat panel display panel is disposed, provided with an elastic material, and having a main vacuum hole for vacuum suction of the central region, wherein the unit includes a pressure and the auxiliary pressure of the main vacuum hole. It further includes a pressure regulating member that can independently adjust the pressure of the vacuum hole.

The auxiliary supporting plate has a length longer than that of the long side of the stage, and the auxiliary vacuum holes are provided in plurality, spaced apart along the longitudinal direction of the auxiliary supporting plate.

The stage may include a first stage disposed in a direction perpendicular to the longitudinal direction of the auxiliary supporting plate when viewed from the top; And a second stage disposed to be parallel to the first stage, wherein the substrate inspection unit moves the first stage or the second stage to adjust a relative distance between the first stage and the second stage. It includes a driver.

The present invention also provides a substrate inspection method. The present invention relates to a method for inspecting an attachment state of a flat panel display panel and a flexible printed circuit board attached to one side thereof, wherein the line scan camera moves along the attachment region to which the flexible printed circuit board is attached, and scans the attachment region. Taking an image to provide an image and inspecting the inspection item in the attached state with the image, while the scan photographing is in progress, a center region of the flat panel display panel is supported by a main support plate, and is a region between the center region and the attachment region. Is supported on an auxiliary support plate arranged parallel to the moving direction of the line scan camera to maintain flatness of the attachment area.

The central region is vacuum adsorbed on the main support plate, and the auxiliary region is vacuum adsorbed on the auxiliary support plate, and the suction force of the auxiliary support plate is greater than that of the main support plate. The flat panel display panel is disposed on the elastic member in the main support plate.

The main support plate includes a first stage disposed in a direction perpendicular to the longitudinal direction of the auxiliary support plate when viewed from the top, and a second stage spaced apart from the first stage in the longitudinal direction of the auxiliary support plate. The relative distance between the first stage and the second stage is adjusted according to the size of the flat panel display panel.

The test item includes an indentation test. The inspection item further includes a foreign material inspection on the flexible printed circuit board, wherein the foreign material inspection is performed in the same image as the indentation inspection.

The inspection item further includes an alignment inspection of the flat panel display panel and the flexible printed circuit board, wherein the alignment inspection is performed in the same image as the indentation inspection.

The inspection item includes at least two inspections selected from an indentation inspection, a foreign material inspection on the flexible printed circuit board, and an alignment inspection of the flat panel display panel and the flexible printed circuit board, wherein the inspections are performed on the same image.

According to the present invention, since the inspection unit moves along the attachment area of the flat panel display and scans, the photographing time of the attachment area can be reduced and the indentation inspection speed is improved.

Further, according to the present invention, since the inspection unit provides a scan photographed image of the entire printed circuit board attached to the flat panel display panel, the inspection unit can perform the indentation inspection on the entire attached printed circuit board.

Further, according to the present invention, since the inspection unit provides a scan photographed image for the entire pitch provided to one printed circuit board, the inspection unit can perform the inspection for the entire pitch provided to the printed circuit board.

In addition, according to the present invention, the indentation inspection of the attachment region, the alignment inspection of the flat panel display panel and the printed circuit board, and the foreign material inspection on the printed circuit board can be simultaneously performed using one scan photographed image.

Hereinafter, embodiments of the present invention will be described in more detail with reference to the accompanying drawings, FIGS. 1 to 14. Embodiments of the invention may be modified in various forms, the scope of the invention should not be construed as limited to the following embodiments. This example is provided to more completely explain the present invention to those skilled in the art. Therefore, the shape of the elements in the drawings are exaggerated to emphasize a more clear description.

FIG. 2A is a plan view illustrating a flat panel display, FIG. 2B is a cross-sectional view taken along the line II ′ of FIG. 2A, FIG. 2C is a cross-sectional view taken along the line II-II ′ of FIG. 2A, and FIG. 2D is a view of FIG. 2A. Is an enlarged view of III, and FIG. 2E is a cross-sectional view taken along line IV-IV 'of FIG. 2A.

2A to 2D, the flat panel display 10 performs a display function. The flat panel display apparatus 10 includes a flat panel display panel 11 and flexible printed circuit boards 14 and 16.

The flat panel display panel 11 receives a signal from the flexible printed circuit boards 14 and 16 and displays an image. The flat panel display panel 11 includes an array substrate 12, an opposing substrate 13, and a flat panel layer (not shown).

The array substrate 12 includes a first base substrate 12a, a data line 12b, a gate line 12c, and a pixel electrode (not shown).

The first base substrate 12a is provided as a rectangular glass substrate, and the data lines 12b and the gate lines 12c are formed on the first base substrate 12a. The data lines 12b are disposed on the first base substrate 12a in parallel with each other, and the gate lines 12c intersect the data lines 12a and are disposed in parallel with each other. The pixel electrode is disposed on the pixel region defined by the neighboring data lines 12b and the gate lines 12c.

The opposite substrate 13 is disposed to be spaced apart from the array substrate 12 by a predetermined interval. The opposing substrate 13 includes a second base substrate (not shown), a color filter (not shown), and a common electrode (not shown). The second base substrate is disposed opposite the array substrate 12. The color filter is formed on the second base substrate and expresses a predetermined color using light. The common electrode is made of a transparent conductive material and is formed on the color filter to receive a common voltage.

The flat panel layer adjusts light transmittance according to an electric field formed between the pixel electrodes and the through electrode, and provides the adjusted light to the color filter. The image is thereby displayed.

The flexible printed circuit boards 14 and 16 are attached to one side of the array substrate 12. The flexible printed circuit boards 14 and 16 are electrically connected to the data line 12b or the gate line 12c and output a signal to the flat panel display panel 11. The flexible printed circuit boards 14 and 16 are provided in a Data Tape Carrier Package 14 and a Gate Tape Carrier Package 16.

A plurality of data tape carrier packages 14 are attached to the data area BA1 of the array substrate 12. The data area BA1 is positioned at one side of one side of the array substrate 12 provided with a relatively long length. The data tape carrier package 16 is electrically connected to the data line 12b and outputs a data signal to the flat panel display panel 11. The data tape carrier package 14 includes a first base film 14a, a data lead 14b, and a data chip 15. A plurality of data lead wires 14b are formed on the first base film 14a and receive and output data signals from the data chip 15. An anisotropic conductive film 18 is provided between the data lead line 14b and the data line 12b. The anisotropic conductive film 18 includes conductive particles 18a and an adhesive 18b. When an appropriate pressure and temperature are applied to the array substrate 12 and the data tape carrier package 14, the conductive particles 18a in the adhesive 18b deform and the data lead wire 14b and the data line 12b are conductive. At this time, when observing the back surface of the array substrate 12a, indentation d pressed by the electroconductive particle 18a is formed in the back surface. The data signal output from the data lead line 14b is applied to the data line 12b through the conductive particles 18a.

The gate tape carrier package 16 is attached to the gate area BA2 of the array substrate 12. The gate area BA2 is positioned on one side of one side of the array substrate 12 that is provided with a relatively short length. The gate tape carrier package 16 is electrically connected to the gate line 12c to output a gate signal to the flat panel display panel 11. The gate tape carrier package 16 includes a second base film 16a, a gate lead line 16b, and a gate chip 17. A plurality of gate lead lines 16b are formed on the second base film 16a and receive and output gate signals from the gate chip 17. An anisotropic conductive film 18 having conductive particles 18a is provided between the gate lead line 16b and the gate line 12c. The gate lead line 16b and the gate line 12c are conducted by the conductive particles 18a, and the gate signal output from the gate lead line 16b is applied to the gate line 12c through the conductive particles 18a. The indentation pressed by the electroconductive particle 18a is formed in the back surface of the gate line 12c.

The flat panel display panel 11 receives a gate signal from the gate tape carrier packages 14 and receives a data signal from the data tape carrier packages 16 to display an image.

Hereinafter, the area where the flexible printed circuit boards 14 and 16 are attached to the flat panel display panel 11, that is, the data area BA1 and the gate area BA2 is referred to as a bonding area BA.

3 is a perspective view showing a substrate inspection apparatus 1000 according to an embodiment of the present invention.

2A and 3, the substrate inspecting apparatus 1000 inspects an attachment state of the flat panel display panel 11 and the flexible printed circuit boards 14 and 16. The substrate inspection apparatus 1000 includes a substrate support unit 100, an inspection unit 400, a substrate transfer unit 500, and a prealign unit 600. The substrate support unit 100 supports the flat panel display panel 11 during the inspection process, and the inspection unit 400 inspects the attachment area BA to which the flexible printed circuit boards 14 and 16 are attached. The substrate transfer unit 500 loads the flat panel display panel 11 provided in the inspection process onto the substrate support unit 100, or unloads the flat panel display panel 11 from which the inspection is completed, from the substrate support unit 100. , The prealign unit 300 aligns the flat panel display panel 11 to be positioned at a designated position on the substrate support unit 100.

The substrate inspecting apparatus 1000 according to an exemplary embodiment of the present invention is provided to inspect two flat panel display panels 11 simultaneously. Alternatively, the substrate inspection apparatus may be provided to inspect the single flat panel display panel 11. In the substrate inspection apparatus 1000 according to the exemplary embodiment of the present invention, the substrate support units 100 are disposed in pairs 100a and 100b spaced apart in one direction so as to simultaneously inspect two flat panel display panels 11. The substrate support units 100a and 100b independently support the flat panel display panel 11. Each substrate support unit 100a, 100b is provided in the same configuration. The inspection unit 400 is provided on one side of the substrate support units 100a and 100b to independently inspect the flat panel display panels 11 supported by the substrate support units 100a and 100b. Hereinafter, a direction in which the pair of substrate support units 100a and 100b are disposed is referred to as a first direction 2, and a direction in which the substrate support unit 100a and the inspection unit 400a are disposed in a second direction (3). It is called). The second direction 3 is a direction perpendicular to the first direction 2 when viewed from the top. The direction perpendicular to each of the first and second directions 2 and 3 is referred to as a third direction 4. Hereinafter, each structure is demonstrated in detail.

4 is a perspective view illustrating the substrate support unit of FIG. 3, and FIG. 5A is a plan view illustrating the substrate support unit of FIG. 4. 5B is a cross-sectional view taken along the line II ′ of FIG. 5A.

3 to 5B, the substrate support unit 100a includes a main support unit 200, a main support plate driver 250, an auxiliary support unit 300, and a pressure regulating member 370.

The main support unit 200 supports the center area of the flat panel display panel 11. The main support unit 200 includes a main support plate 210, a rotation shaft 220, a moving bracket 222, and a guide rail 223.

The main support plate 210 supports the center area CA of the flat panel display panel 11. The main support plate 210 includes a stage 211 and a support pad 212. The stage 211 is provided in a rectangular plate, and an upper surface thereof is provided with an area smaller than that of the flat panel display panel 11. A plurality of grooves 215 are formed on an upper surface of the stage 211, and a support pad 212 is inserted into each of the grooves 215. An inner passage 214 is formed inside the stage 211, and the inner passage 214 connects the main vacuum hole 213 formed in the support pad 212 and the pressure regulating member 370.

A support pad 212 is provided on the stage 211, and a center area CA of the flat panel display panel 11 is disposed on the support pad 212. The support pads 212 are provided to be spaced apart from the upper edge area of the stage 211, and are provided to be combined with each other to form a rectangular ring arrangement. In contrast, the support pad 212 may be integrally provided in a rectangular ring shape along the upper edge of the stage 211. Alternatively, the support pad 212 may be provided in the entire upper surface area of the stage 211. According to the embodiment, the support pad 212 has a circular top surface and is inserted into the groove 215 formed in the stage 211. The upper surface of the support pad 212 is provided higher than the upper surface of the stage 211. Each support pad 212 is formed with a main vacuum hole 213. The main vacuum hole 213 is formed through the upper and lower surfaces of the support pad 212 and is connected to the inner passage 214 of the stage 211. The main vacuum hole 213 is connected to the pressure regulating member 370 through the inner passage 214 of the stage 211, and the internal pressure is reduced by the pressure regulating member 370 to vacuum the flat panel display panel 11. Adsorb.

The support pad 212 is provided with an elastic material. During the inspection of the flat panel display panel 11, the area between the central area CA and the attachment area BA of the flat panel display panel 11 is vacuum-adsorbed to the auxiliary support plate 300, and The area DA between the center area CA and the attachment area BA of the flat panel display panel 11 maintains flatness due to the attraction force. For this reason, the center area CA and the attachment area BA of the flat panel display panel 11 follow the flatness.

FIG. 5C is an enlarged view of II of FIG. 5B.

Referring to FIG. 5C, when the center area CA of the flat panel display 11 follows the flatness, a change occurs in the force that the flat panel display panel 11 presses on the support pad 212. The support pad 212 is deformed according to the force of the flat panel display panel 11. Since the support pad 212 of the present invention is provided with an elastic material and can be freely deformed according to the change of the force, even if the center area CA of the flat panel display 11 follows the flatness, the flat display panel 11 Can support

3 to 5B, the rotation shaft 221 is positioned below the main support plate 210 and supports the main support plate 210. The rotation shaft 221 is rotated by the rotational force generated by the main support plate driver 250 to rotate the main support plate 210 at a predetermined angle. According to the embodiment, when the inspection of the data area BA1 of the flat panel display panel 11 is completed, the rotation shaft 221 moves the main support plate 210 at a predetermined angle so that the inspection of the gate area BA2 can proceed. Rotate

The movement bracket 222 is positioned below the rotation shaft 221 and supports the rotation shaft 221. In addition, the moving bracket 222 moves in the second direction 3 along the guide rail 223. When the flat panel display panel 11 is loaded on the main support plate 210, the movement bracket 3 moves so that the attachment area BA of the flat panel display panel 11 is positioned in the test area of the test unit 400.

 The guide rail 223 is disposed along the second direction 3 to guide the movement of the movement bracket 222.

The main support plate driver 250 generates a driving force to move the main support plate 210. The main support plate driver 250 includes a first driver 251, a second driver 252, and a third driver 253.

The first driver 251 is located on one side of the guide rail 223 and moves the main support plate 210 in a second direction 3 perpendicular to the longitudinal direction of the auxiliary support plate 310. The movement bracket 222 moves in the second direction 3 along the guide rail 223 by the driving force generated by the first driver 251.

The second driver 252 is located at one side of the movement bracket 222 and elevates the main support plate 210 in the third direction 4. The second driver 252 rotates the flat panel display panel 11 or loads the area DA between the central area CA and the attachment area BA of the flat panel display panel 11 onto the auxiliary support plate 310. Alternatively, when unloading from the auxiliary support plate 310, the main support plate 210 is elevated.

The third driver 253 is located below the rotation shaft 221 and rotates the main support plate 210. The driving force generated in the third driver 253 is transmitted to the main support plate 210 through the rotation shaft 221. The third driver 253 rotates the main support plate 210 so that the data area BA1 or the gate area BA2 of the flat panel display panel 11 can be positioned in the test area of the test unit 400.

Optionally, the main support plate driver 250 may further include a driver for moving the main support plate 210 in a first direction 2 parallel to the longitudinal direction of the auxiliary support plate 310.

The auxiliary support unit 300 is disposed between the main support unit 200 and the inspection unit 400 and supports the area DA between the center area CA and the attachment area BA of the flat panel display panel 11. . The auxiliary support unit 300 includes an auxiliary support plate 310 and a support bracket 350.

The auxiliary support plate 310 is disposed between the main support plate 210 and the inspection unit 400, and is provided separately from the main support plate 210. The auxiliary support plate 310 is provided adjacent to the inspection unit 400. The auxiliary supporting plate 210 supports the area DA between the center area CA and the attachment area BA of the flat panel display panel 11. The auxiliary supporting plate 310 is disposed in the second direction 3 in parallel with one side of the stage 211, and is provided longer than one side of the stage 211. The upper surface of the auxiliary support plate 310 may be provided at the same height as the upper surface of the support pad 212. The material of the auxiliary support plate 310 may be a material having a hardness greater than that of the support pad 212.

An auxiliary vacuum hole 312 is formed on an upper surface of the auxiliary supporting plate 310. The auxiliary vacuum hole 312 vacuum-absorbs the area DA between the center area CA and the attachment area BA of the flat panel display panel 11. The auxiliary vacuum hole 312 vacuum-adsorbs the flat panel display panel 11 independently of the main vacuum hole 213. A plurality of auxiliary vacuum holes 312 are spaced apart from each other along the longitudinal direction of the auxiliary support plate 310. The auxiliary vacuum holes 312 are formed to have a different length from the adjacent auxiliary vacuum holes 312. The auxiliary vacuum hole 312 is formed to be symmetrical with respect to the central axis of the auxiliary support plate 310 parallel to the second direction 3, and the auxiliary vacuum holes 312 formed at positions symmetrical with respect to the central axis have the same length. Have Each of the auxiliary vacuum holes 312 is individually pressure-controlled according to the width of the flat panel display panel 11 placed on the auxiliary support plate 310 to vacuum-adsorb the flat panel display panel 11. Optionally, the auxiliary vacuum holes 312 formed of the same length may be designated as a group and equally pressure-controlled.

According to the embodiment, the auxiliary vacuum holes 312 have a first vacuum hole 312a, a second vacuum hole 312b, a third vacuum hole 312c, and a fourth vacuum hole 312d. The first to fourth vacuum holes 312a to 312d have different lengths from each other. The first vacuum hole 312a is formed in the central region of the auxiliary support plate 310 and has the longest length. The second vacuum hole 312b is symmetrically formed at both sides of the first vacuum hole 312a and has the shortest length. The third vacuum hole 312c and the fourth vacuum hole 312d are sequentially formed at one side of the second vacuum holes 312b adjacent to the end of the auxiliary support plate 310, respectively, and are shorter than the first vacuum hole 312a. It has a length longer than the second vacuum hole 312b. The first to fourth vacuum holes 312a to 312d are individually pressure-controlled according to the width of the flat panel display panel 11. For example, when the data area BA1 having a relatively longer length than that of the gate area BA2 is inspected, the first to fourth vacuum holes 312a to 312d may correspond to the flat display panel 11 according to the length of the data area BA1. ) Is adjusted to vacuum suction. Alternatively, when the gate area BA2 is inspected, the first to third vacuum holes 312a to 312c or the first and second vacuum holes 312a and 312b may be formed according to the length of the gate area BA2. 11) is adjusted to vacuum suction. Alternatively, the auxiliary vacuum holes 312 may be provided with the same length, and each auxiliary vacuum hole may be provided spaced apart from each other at the same interval.

The support bracket 313 is positioned below the auxiliary support plate 310 and supports the auxiliary support plate 310.

The pressure regulating member 370 independently adjusts the pressure of the main vacuum hole 213 and the pressure of the auxiliary vacuum hole 312. The pressure regulating member 370 adjusts the pressure of the main vacuum hole 213 and the auxiliary vacuum hole 312 such that the suction force of the auxiliary vacuum hole 312 is greater than that of the main vacuum hole 213. The pressure regulating member 370 includes a pump 371, a main line 372, a first auxiliary line 373, a second auxiliary line 374, a first pressure regulator 375, and a second pressure regulator 376. It includes.

One end of the main line 372 is connected to the pump 371, and the other end thereof is branched to be connected to the first auxiliary line 373 and the second auxiliary line 374. The first auxiliary line 373 connects the main line 372 and the inner passage 214 of the stage 211. The second auxiliary line 374 connects the main line 372 and the auxiliary vacuum hole 312. A first pressure regulator 375 is installed in the first auxiliary line 373, and a second pressure regulator 376 is installed in the second auxiliary line 374. By controlling the first pressure regulator 375 and the second pressure regulator 376, the pressure of the main vacuum hole 213 and the auxiliary vacuum hole 312 is adjusted. Valves may be used as the pressure regulators 375 and 376. The opening degree of the second valve 376 may be greater than that of the first valve 375 so that the suction force of the auxiliary vacuum hole 312 may be greater than that of the main vacuum hole 213. By the adsorption force of the auxiliary supporting plate 310, the area DA between the center area CA and the attachment area BA of the flat panel display panel 11 maintains flatness, and follows the flatness so that the flat display panel ( The attachment area BA of 11) minimizes the degree of bending along its longitudinal direction. Optionally, a plurality of second auxiliary lines 374 may be provided corresponding to the auxiliary vacuum holes 312, and each of the second auxiliary lines 374 may be provided with a second pressure regulator 376 separately.

In contrast, the pressure regulating member 370 may be provided with a pump independently in each of the main vacuum hole 213 and the auxiliary vacuum hole 312. The main vacuum hole may be pressure-controlled by being connected to one pump through the first vacuum line, and the auxiliary vacuum hole may be pressure-controlled by being connected with another pump through the second vacuum line.

6 is a perspective view illustrating the inspection unit of FIG. 3, and FIG. 7 is a perspective view illustrating the imaging unit of FIG. 6.

3, 6, and 7, the inspection unit 400 is disposed on one side of the substrate support unit 100 and inspects the attachment area BA to which the flexible printed circuit boards 14 and 16 are attached. The inspection unit 400 includes a photographing unit 410, an inspector 440, and a guide rail 450.

The photographing unit 410 moves in the first direction 2 along the guide rail 450 and scans the attachment area BA of the flat panel display panel 11 to provide an image. The photographing unit 410 is a line scan camera 411, coaxial illumination 413, focusing plate 415, focusing rail 416, focusing driver 417, displacement sensor 421, external lighting 431 ), A bracket 432, and a moving plate 435.

The line scan camera 411 moves along the first direction 2 and scans the attachment area BA of the flat panel display panel 11 to provide an image. The line scan camera 411 is positioned lower than the top surface of the auxiliary support plate 310 of FIG. 4. The line scan camera 411 includes a lens 411a, a barrel 411b, and an image storage unit 411c. The lens 411a is positioned above the barrel 411b, and the image storage unit 411c is positioned below the barrel 411b. The light reflected from the attachment area BA of the flat panel display panel 11 is refracted by the lens 411a to be captured by the line scan camera 411, and the captured image is stored in the image storage unit 411c.

The coaxial light 413 is fixed to the line scan camera 411 and irradiates light to the attachment area BA of the flat panel display panel 11. Coaxial light 413 is fixedly coupled to one side of the barrel (411b).

The line scan camera 411 is fixedly coupled to the focus adjustment plate 415. The focus adjustment plate 415 moves up and down along the focus adjustment rail 416, and adjusts the distance between the lens 411a and the flat panel display panel 11. The focus adjustment plate 415 is installed on one surface of the moving plate 435 in the vertical direction.

The displacement sensor 421 measures the distance between the line scan camera 411 and the flat panel display panel 11. The displacement sensor 421 includes a light emitter 421a and a light receiver 412b. The light emitter 412a and the light receiver 412b are installed on the focus adjustment plate 415 so that the relative position of the line scan camera 411 is fixed. According to the embodiment, the light emitting portion 421a and the light receiving portion 412b are fixedly positioned at both sides of the lens 411a. The light emitter 421a irradiates light onto the flat panel display panel 11, and the light receiver 421b receives light reflected from the flat panel display panel 11. The displacement sensor 421 measures the time until the light irradiated from the light emitter 421a reaches the light receiver 412b to measure the distance between the line scan camera 411 lens 411a and the flat panel display panel 11. do.

The focus adjustment driver 417 raises and lowers the focus adjustment plate 415 according to the distance between the line scan camera 411 and the flat panel display panel 11 measured by the displacement sensor 421. The focus driver 417 adjusts the focus of the line scan camera 411 by moving the focus adjustment plate 415.

The external light 431 is positioned above the line scan camera 411 and irradiates light to the attachment area BA of the flat panel display panel 11. The external light 431 is positioned higher than the top surface of the auxiliary support plate 310. The external light 431 is turned on while the line scan camera 411 moves while scanning the attachment area BA of the flat panel display panel 11. Specifically, while the line scan camera 411 scans and photographs one flexible printed circuit board 14 and 16, the external light 431 is turned on once at each end of the flexible printed circuit board 14 and 16, respectively. It is on-off. While the external lighting 431 is turned on, the line scan camera 411 stores an image to which the transmitted light is irradiated.

Referring again to FIG. 2D, grooves m1 and m2 which are not provided in the film are formed at both ends ML1 and MR2 of the first base film 14b where the data lead lines 14a are not provided. The grooves m1 and m2 are provided as alignment inspection regions of the flat panel display panel 11 and the data tape carrier package 14. The grooves m1 and m2 are provided with fixed positions relative to the data lead lines 14b. The alignment marks ML1 and MR1 are provided on the array substrate 12a in correspondence with the alignment inspection regions m1 and m2. The alignment marks ML1 and MR1 are provided with fixed positions relative to the data lines 12b. Since the irradiated transmitted light is transmitted to the lower portion of the flat panel display 11 in the grooves m1 and m2, the light is photographed relatively brighter than the area where the first base film 14b is provided. When the photographed grooves m1 and m2 are positioned on the same straight lines T1 and T2 as the protrusions of the alignment marks ML1 and MR1, the alignment state of the data lead line 14b and the data line 12b is good. Judging by it.

3, 6, and 7, the bracket 432 connects the external light 431 and the line scan camera 411 so that the relative position of the external light 431 with respect to the line scan camera 411 is fixed. The lower end 432a of the bracket 432 is fixedly coupled to the focus adjustment plate 415, and the upper end 432b is provided perpendicular to the lower end 432a. The external light 431 is fixed to the upper end portion 432b of the bracket 432 by being spaced apart from the lens 411a of the line scan camera 411 by a predetermined distance.

The moving plate 435 is installed on the guide rail 451 and moves in the first direction 2 along the guide rail 451. The elevating rail 416 is installed in one side of the movable plate 435 in the vertical direction.

The inspector 440 receives one image photographed from the line scan camera 411 to inspect the attachment area BA of the flat panel display panel 11. The tester 440 includes an indentation tester 441, a foreign material tester 442, and an alignment tester 443.

The indentation inspection unit 441 performs indentation inspection of the attachment area BA of the flat panel display panel 11. The indentation inspection unit 441 performs the indentation inspection by observing the position, number, and contrast of the indentation shown in the photographed image.

The foreign material inspection unit 442 inspects the presence or absence of the foreign material on the flexible printed circuit board 14 using the image used in the indentation inspection unit. The foreign material may electrically conduct the data line 12b of FIG. 2D and the data line 12b adjacent thereto or the data lead line 14b of FIG. 2D and the data lead line 14b adjacent thereto. Alternatively, the gate line 12c of FIG. 2C and the gate line 12c adjacent thereto or the gate lead line 16b of FIG. 2C and the gate lead line 16b adjacent thereto may be electrically conductive. The foreign material inspecting unit 442 inspects the presence or absence of the foreign matter so that the flexible printed circuit board 14 can safely output a signal to the flat panel display panel 11.

The alignment inspection unit 443 examines the alignment state of the flat panel display panel 11 and the flexible printed circuit boards 14 and 16 using the image used in the indentation inspection unit. The alignment inspection unit 443 may include grooves (m1 and m2 of FIG. 2D) and array substrates 12a formed at both ends ML2 and MR2 of the first base film 14a of FIG. 2D of the data tape carrier package 14. The alignment state is inspected by whether or not the projections of the alignment marks ML1 and MR1 provided in the above are located on the same straight lines T1 and T2. Specifically, when the grooves m1 and m2 and the protrusions of the alignment marks ML1 and MR1 are located on the same straight line T1 and T2, the alignment state of the data lead line 14b and the data line 12b is It is judged to be good. The alignment inspection unit 443 performs an alignment inspection on the gate tape carrier package 16 in the same manner as the alignment inspection of the data tape carrier package 14.

As such, the inspector 440 of the present invention performs the indentation test, the foreign material test, and the alignment test by using the same image photographed from the line scan camera 411.

The guide rail 441 is disposed in the first direction 2 on one side of the substrate support unit 100. The guide rail 441 is provided from one end of one auxiliary support plate 310 to the other end of the other auxiliary support plate 310 along the first direction 2.

8 is a perspective view showing an inspection unit 400 according to another embodiment of the present invention.

Referring to FIG. 8, a plurality of photographing units 410a to 410d move in the first direction 2 to scan images of the attachment areas 14a and 14b of one flat panel display panel 11a and 11b to provide an image. do. According to an exemplary embodiment, four photographing units 410a to 410d are provided in the guide rail 450, and two photographing units 410a and 410b are formed by attaching an area 14a of one flat panel display panel 11a. Scan to shoot. The two photographing units 410a and 410b which scan-scan the attachment area 14b of one flat panel display panel 11a perform scan photographing so that the photographing areas do not overlap. The two photographing units 410a and 410b may move in the same direction and scan the photograph. One photographing unit 410a moves from one end of the attachment area 14a to the center point in the first direction 2 and scans, and the other photographing unit 410b is the center point of the attachment area 14a. To the other end of the attachment region 14a in the first direction 2 to scan. The entire image of the attachment area 14a is provided by combining the images provided by the two photographing units 410a and 410b. The speed at which the two photographing units 410a and 410b move may be the same. Alternatively, the moving speeds of the two imaging units 410a and 410b may be different.

Alternatively, the two photographing units 410a and 410b may move in opposite directions and scan scan. The two imaging units 410a and 410b may move closer to each other and scan the attachment area 14a. One photographing unit 410a moves from one end of the attachment area 14a to the center point in the first direction 2 and scans the scan. The other photographing unit 410b is attached in the first direction 2. It scans while moving from the other end of the area 14a to the center point. Alternatively, the two photographing units 410a and 410b may move away from each other and scan the attachment area 14a. The two imaging units 410a and 410b may move away from each other from the center point of the attachment area 14a to both ends and scan the attachment area 14a.

As such, the two imaging units 410a and 410b scan and scan the attachment regions 14a and 14b of one flat panel display panel 11a and 11b to quickly provide an image of the attachment regions 14a and 14b. can do.

9 is a perspective view illustrating the substrate transfer unit of FIG. 3.

3, 4, and 9, the substrate transfer unit 500 is located on one side of the substrate support unit 100 opposite to the inspection unit 400, and the flat panel display panel 11 in the first direction 2. Transfer it. The substrate transfer unit 500 transfers the flat panel display panel 11 carried in the preprocessing apparatus in the first direction 2 to be provided to the inspection process, and provides the flat panel display panel 11 on which the inspection process is completed. Transfer to the first direction (2) to provide a post-processing device (not shown). The substrate transfer unit 500 includes a loading transfer 510, an unloading transfer 520, and a transfer guide rail 530.

The loading transfer unit 510 moves in the first direction 2 along the transfer guide rail 530, and the main support plate 210 receives the flat panel display panel 11 carried in the substrate processing apparatus 1000 from the preprocessing device. Load in. The loading transformer 510 loads the flat panel display panel 11 onto each of the pair of main support plates 210 arranged along the first direction 2. The loading transfer unit 510 includes a first support plate 511, a first support pin 512, a connection bracket 517, a first transfer plate 514, and a first driver 515.

The first support plate 511 is provided as a rectangular plate and supports the flat panel display panel 11. The flat cover panel 11 may be supported on the upper portion of the first support plate 511. A plurality of first support pins 512 protrude upward from the first support plate 511 on the top surface of the first support plate 511, and the flat panel display panel 11 may include the first support pins 512. Is placed on. Alternatively, the flat panel display panel 11 may be supported at the rear of the first support plate. A plurality of suction pads (not shown) are provided on a lower surface of the first support plate 511, and suction holes are formed in the suction pads. The suction hole is connected to a vacuum pump (not shown) to vacuum suck the flat panel display panel 11.

The connection bracket 513 connects the first support plate 511 and the first transfer plate 514. According to the embodiment, the connecting bracket 513 is disposed in the first direction (2), one end of the first support plate 511 is coupled, the other end is coupled to the first transfer plate 514.

The first transfer plate 514 is installed on the transfer guide rail 530 and moves in the first direction 2 along the transfer guide rail 530. A first driver 515 is installed at an upper end of the first transfer plate 530, and the first driver 515 provides a driving force to move the first transfer plate 514 along the transfer guide rail 530. .

The unloading transfer 520 is installed on the transfer guide rail 530 adjacent to the post-processing device relatively than the loading transfer 510. The unloading transfer 520 moves in the first direction 2 along the transfer guide rail 530, and unloads the flat panel display panel 11, from which the inspection process is completed, from the main support plate 210 to the post-processing device. Transfer. The unloading transfer 520 unloads the flat panel display panel 11 supported by each main support plate 210. The unloading transfer 520 includes a second support plate 521, a second support pin 522, a second transfer plate 523, and a second driver 524.

The second support plate 521 is provided as a rectangular plate and supports the flat display panel 11 to be transferred. The second support plate 521 supports the flat panel display panel 11 in the same configuration as the first support plate 511.

The second transfer plate 523 is installed on the transfer guide rail 530 and moves in the first direction 2 along the transfer guide rail 530. The second transfer plate 523 has a longitudinal direction parallel to the second direction 3, and a second support plate 521 is coupled to one end of the second transfer plate 523. The second driver 524 is installed on an upper portion of the second transfer plate 523, and the second driver 524 provides a driving force to move the second transfer plate 523 along the transfer guide rail 530. .

The transfer guide rail 530 is disposed in the first direction 2 and guides the movement of the loading transfer 510 and the unloading transfer 520. The transfer guide rail 530 is provided from one end of one auxiliary support plate 310 to the other end of the other auxiliary support plate 310 along the first direction 2.

FIG. 10 is a perspective view illustrating the prealign unit of FIG. 3. FIG.

3 and 10, the pre-align unit 600 aligns the flat panel display panel 11 to be positioned at a designated position on the main support plate 210. The pre-align unit 600 includes an align camera 610 and a camera support 611.

The alignment camera 610 is positioned between the main support unit 200 and the auxiliary support unit 300 and is disposed in a pair 610a and 610b spaced apart from each other along the first direction 2. The alignment cameras 610a and 610b are spaced apart from each other by a distance corresponding to the width of the first direction 2 of the flat panel display panel 11 on the main support plate 210. In addition, the alignment cameras 610a and 610 may be provided such that relative distances may be adjusted according to the size of the flat panel display panel 11 mounted on the main support plate 210. For example, the alignment cameras 610a and 610b may move along guide rails (not shown) arranged in the first direction 2 according to the size of the flat panel display panel 11 to move the alignment cameras 610a and 610b. You can adjust the relative distance. The alignment camera 610 is installed at a lower position than the main support plate 210 and the auxiliary support plate 310. The alignment camera 610 photographs alignment marks respectively displayed at the rear end of the rear panel of the flat panel display panel 11, so that the flat panel display panel 11 is positioned at a designated position on the main support plate 210 using the photographed image. Align. The camera support part 611 supports the alignment cameras 610a and 610b at positions lower than the main support plate 210 and the auxiliary support plate 310.

Hereinafter, a method of inspecting a substrate using the substrate inspection apparatus 1000 as described above will be described.

3 to 5B and 9, when the flat panel display panel 11 is brought into the substrate inspection apparatus 1000 along the first direction 2 from the preprocessing apparatus (not shown), the loading transfer 510 is flat. The display panel 11 is supported. The loading transfer 510 moves in the first direction 2 along the transfer guide rail 530 to load the flat panel display panel 11 onto any one of the main support plates 210.

 In the flat panel display panel 11, a central area is supported by the main support plate 210, and the center area is disposed on the support pad 212 provided on the upper surface of the stage 211. When the flat panel display panel 11 is placed on the support pad 212, the alignment camera 610 photographs the alignment marks respectively displayed at the rear end of the flat panel display panel 11. The pre-alignment unit 600 aligns the flat panel display panel 11 to be positioned at a designated position on the main support plate 210 using the photographed alignment mark image.

When the flat panel display panel 11 is positioned at a designated position on the main support plate 210, the first valve 375 is opened to reduce the internal pressure of the main vacuum hole 213. Due to the reduced pressure of the main vacuum hole 213, the flat panel display panel 11 is vacuum-adsorbed to the support pad 212.

When the flat panel display panel 11 is vacuum-adsorbed to the main support plate 210, the main support plate 210 is moved by the driving force generated by the main support plate driver 250. In detail, the second driver 252 raises the main support plate 210, and the first driver 251 is an area DA between the center area CA and the attachment area BA of the flat panel display panel 11. The main support plate 210 is moved in the second direction 3 to be positioned above the auxiliary support plate 310. When the main support plate 210 is moved in the second direction 3, the main support plate 210 is lowered by the driving of the second driver 252, whereby the center area CA and the attachment area of the flat panel display panel 11 ( The area DA between the BAs is supported by the auxiliary supporting plate 310.

11A is a plane view illustrating a process of inspecting a data area of a flat panel display panel according to an exemplary embodiment of the present invention, and FIG. 11B is a side view illustrating one side of FIG. 11A.

11A and 11B, when the flat panel display panel 11 is supported by the auxiliary support plate 310, the second valve 376 is opened to reduce the internal pressure of the auxiliary vacuum holes 312. The auxiliary vacuum holes 312 are individually pressure-controlled according to the width of the flat panel display panel 11 placed on the auxiliary support plate 310. According to the exemplary embodiment, since one side of the flat panel display panel 11 to which the data taper carrier package 14 is attached has a width corresponding to the length of the auxiliary support plate 310, the first to fourth vacuum holes 312a to 312d may be formed. Decompression Due to the reduced pressure of the auxiliary vacuum hole 312, the area between the center area and the attachment area of the flat panel display panel 11 is vacuum-adsorbed to the auxiliary support plate 310. In this case, since the opening degree of the second valve 376 is controlled to be greater than that of the first valve 375, the auxiliary vacuum hole 312 may have a suction force greater than that of the main vacuum hole 213. Vacuum suction the area between the center area and the attachment area. Due to the attraction force of the auxiliary support plate 310, the area between the center region and the attachment region of the flat panel display panel 11 maintains flatness. The attachment area of the flat panel display panel 11 follows the flatness and minimizes the degree of bending along its longitudinal direction.

When the attachment area of the flat panel display panel 11 follows the flatness, the inspection process by the inspection unit 400 proceeds. 6 and 7, first, the displacement sensor 421 measures the distance between the line scan camera 411 and the flat panel display panel 11. The distance between the line scan camera lens 411a and the flat panel display panel 11 is measured by measuring the time from the light emitted from the light emitting unit 421a to the flat panel display panel 11 until the light is reflected. do. If the distance measured by the displacement sensor 421 does not correspond to the reference distance, the focusing driver 417 moves the focusing plate 415 up and down so that the distance between the line scan camera lens 411a and the flat panel display panel 11 is increased. Adjust As a result, the focus of the attachment area of the flat panel display panel 11 is adjusted.

Referring back to FIGS. 11A and 11B, when the focus of the attachment area of the flat panel display panel 11 is adjusted, the line scan camera 411 moves along the guide rail 451 in the first direction 2 and the flat panel display panel is moved. Scanning of the attachment area of (11).

The displacement sensor 421 continuously measures the distance between the line scan camera 411 and the flat panel display panel 11 while the line scan camera 411 moves. The focus driver 417 adjusts the focus of the line scan camera 411 by adjusting the distance between the line scan camera 411 and the flat panel display panel 11 based on the distance measured by the displacement sensor 421. .

FIG. 12 is a graph illustrating a bending deformation of a flat panel display panel when an auxiliary support plate is provided and an auxiliary support plate is not provided in an embodiment of the present invention.

Referring to FIG. 12, in the present invention, since the attachment area BA of the flat panel display panel 11 follows the flatness and the degree of bending is minimized, the variation in the amount of bending deformation along the longitudinal direction of the attachment area B is Δ δ1) is smaller than the deflection deflection amount Δδ2 when the auxiliary supporting plate is not provided. When it is not provided to the auxiliary support plate, since the deviation Δδ2 of the bending deformation amount is relatively large, the distance that the line scan camera 411 moves in the vertical direction is large for the focus adjustment. As a result, the focus of the line scan camera 411 may not be sharply adjusted. On the other hand, in the present invention δ1, since the deviation Δδ1 of the bending deformation amount is relatively small, the distance that the line scan camera 411 moves in the vertical direction for the focusing is short. As a result, the time required for focusing is reduced, and an image of the attachment area BA having a sharp focus can be provided.

Referring back to FIGS. 11A and 11B, light is irradiated from the coaxial light 413 to the attachment area of the flat panel display panel 11, and the light is reflected by the light reflected from the attachment area BA of the flat panel display panel 11. The scan camera 411 captures the attachment area BA of the flat panel display panel 11, and the captured image is stored in the image storage unit 411c.

During the scanning scan of the line scan camera 411, the light irradiated from the external light 431 passes through the attachment area BA of the flat panel display panel 11 and is captured by the line scan camera. In detail, the external illumination 431 is turned on and off once at each end of each data tape carrier package 14 in which no data leads are provided, thereby irradiating light. The grooves m1 and m2 of the first base film 14a transmit light and are photographed relatively brightly. The photographed grooves m1 and m2 are provided for alignment inspection of the flat panel display panel 11 and the data tape carrier package 14 together with the alignment marks ML1 and MR1.

When the image photographed by the line scan camera 411 is provided, the inspector 440 inspects the attachment state of the flat panel display panel 11 and the data tape carrier package 14 using the provided image. The inspector 440 inspects the attachment state of all the data tape carrier packages 14 attached to one side of the flat panel display panel 11 and attaches the data leads 14b in each data tape carrier package 14. Check it. The inspector 440 inspects the inspection items described below.

The inspector 440 inspects the indentation of the attachment area BA. The inspector 440 determines the alignment state of the flat panel display panel 11 and the data tape carrier package 14 by comparing the position and the number of indentations in the photographed image with a reference value, and observes the contrast formed by the indentation. Determine the strength of the indentation by

Then, the inspector 440 inspects the presence or absence of the foreign matter on the data tape carrier package 14. The inspector 440 inspects the presence or absence of foreign matter in the photographed image so that the data tape carrier package 14 can safely output a signal to the flat panel display panel 11.

In addition, the inspector 440 inspects the alignment state of the flat panel display panel 11 and the data tape carrier package 14. The inspector 440 determines whether the image of the grooves m1 and m2 through which the transmitted light is irradiated and the projections of the alignment marks ML1 and MR1 are positioned on the same straight lines T1 and T2. The alignment state of the lines 12b is determined. When the photographed grooves m1 and m2 and the projections of the alignment marks ML1 and MR1 are located on the same straight line, it is determined that the alignment state of the data lead line 14b and the data line 12b is good.

The tester 440 may perform at least two tests selected from the test items together. The inspector 440 may perform the indentation test and the foreign material test together using the provided image, or may perform the indentation test and the alignment test together. Alternatively, all of the above inspection items may be performed together.

When the inspection of the data area BA1 of the flat panel display panel 11 is completed, the pressure regulating member 370 maintains the second valve 376 in the closed state. As a result, the internal pressure of the auxiliary vacuum hole 312 is maintained at the atmospheric pressure state, and the vacuum suction state of the area between the center area CA and the attachment area BA of the flat panel display panel 11 is released.

When the vacuum suction state of the auxiliary support plate 311 is released, the second driver 252 raises the main support plate 210, and the third driver 253 moves the gate area BA1 of the flat panel display panel 11 to the auxiliary support plate 311. The main support plate 210 is rotated 90 ° to be disposed in parallel with the longitudinal direction of the support plate 310. In addition, the first driver 251 moves the main support plate 210 in a second direction such that an area between the center area CA and the gate area BA2 of the flat panel display panel 11 is located above the auxiliary support plate 310. Go to 3). When the main support plate 210 is moved in the second direction 3, the main support plate 210 is lowered by the driving of the second driver 252, and the center area CA and the gate area of the flat panel display panel 11 are lowered. The area between the BA2 is supported by the auxiliary support plate 310.

FIG. 13A is a plane view illustrating a process of inspecting a gate area of a flat panel display panel according to an exemplary embodiment of the present invention, and FIG. 13B is a side view illustrating one side of FIG. 13A.

Referring to FIGS. 13A and 13B, when the flat panel display panel 11 is supported by the auxiliary support plate 310, the second valve 376 is opened to individually control the pressure inside the auxiliary vacuum holes 312. Since the width of the gate area BA2 of the flat panel display panel 11 is shorter than the length of the auxiliary supporting plate 310, the first and second vacuum holes 312a and 312b are depressurized. Due to the reduced pressure of the auxiliary vacuum hole 312, the area between the center area CA and the gate area BA2 of the flat panel display panel 11 is vacuum-adsorbed to the auxiliary support plate 310. At this time, the second valve 376 is opened larger than the first valve 375, and the auxiliary vacuum hole 312 vacuum-adsorbs the flat panel display panel 11 with a suction force greater than that of the main vacuum hole 213. do. Due to the attraction force of the auxiliary support plate 312, the area between the center area CA and the gate area BA2 of the flat panel display panel 11 maintains flatness and is followed by the flatness so that the gate area BA2 has a length. The degree of bending along the direction is minimized.

When the gate area BA2 of the flat panel display panel 11 follows the flatness, the inspection process by the inspection unit 400 proceeds. Since the inspection process is performed in the same manner as the inspection process of the data area BA1 of the flat panel display panel 11, detailed description thereof will be omitted.

When the inspection of the gate area BA2 of the flat panel display panel 11 is completed, the pressure regulating member 370 maintains the second valve 376 in the closed state. As a result, the internal pressure of the auxiliary vacuum hole 312 is maintained at an atmospheric pressure state, and the vacuum suction state of the area between the central area CA and the attachment area BA of the flat panel display panel 11 is released.

When the vacuum suction state of the auxiliary support plate 310 is released, the second driver 252 raises the main support plate 210, and the third driver 253 moves the data area BA1 of the flat panel display panel 11 to the auxiliary support plate 310. The main support plate 210 is rotated 90 ° to be disposed in parallel with the longitudinal direction of the support plate 310.

When the main support plate 210 is rotated and the first valve 375 is closed to release the vacuum suction state of the main support plate 210, the unloading transfer 520 moves to one side of the main support plate 210. To be positioned below the flat panel display panel 11. Thereafter, the main support plate 210 is lowered by the driving of the second driver 252 so that the flat panel display panel 11 is loaded on the unloading transfer 520.

The unloading transfer 520 loaded with the flat panel display panel 11 moves in the first direction 2 along the transfer guide rail 530 to provide the flat panel panel 11 to the post-processing device.

In addition, in the above embodiment, the tester has been described as being capable of performing indentation test, foreign material test, and alignment test. However, the tester may perform only one or two selected tests.

14 is a perspective view illustrating a substrate support unit and a substrate transfer unit according to another embodiment of the present invention.

Referring to FIG. 14, the substrate support unit 100 includes a main support unit 200, an auxiliary support unit 300, and a pressure adjusting member (not shown).

The main support unit 200 includes a main support plate 210 for supporting the center area of the flat panel display panel 11 and a main support plate driver 250 for moving the main support plate 210 in the first direction 2.

The main support plate 210 includes a first stage 211, a second stage 212, and a support pad 213. The first stage 211 is disposed in the direction perpendicular to the longitudinal direction of the auxiliary support plate 310 when viewed from the top. The second stage 212 is spaced apart from the first stage 211 in the longitudinal direction of the auxiliary support plate 310. The first stage 211 and the second stage 212 are provided in a rod shape, and are arranged side by side. A support pad 213 is provided on the first stage 211 and the second stage 212, and a center area of the flat panel display panel 11 is disposed on the support pad 213. The support pads 213 are provided on the top surface of the first stage 211 and the top surface of the second stage 212 along the length directions of the first stage 211 and the second stage 212, respectively. The support pads 213 are spaced apart from each other and provided in plurality. The support pad 213 is provided of an elastic material and performs the same function as described in the above embodiment. The upper surface of the support pad 213 is provided higher than the upper surface of the first stage 211 or the upper surface of the second stage 212, and is provided at the same height as the upper surface of the auxiliary support plate 310. Each support pad 213 is formed with a main vacuum hole 214. The main vacuum hole 214 is connected to a pressure regulating member (not shown), and the internal pressure is reduced by the pressure regulating member to vacuum-adsorb the flat panel display panel 11.

The main support plate driver 250 moves the first stage 211 or the second stage 212 in the first direction 2 so that the relative distance between the first stage 211 and the second stage 212 is adjusted. The main support plate driver 250 may adjust the relative distance by moving the first stage 211 and the second stage 212 in directions opposite to each other. The main support plate driver 250 includes pulleys 251a and 251b, a belt 252, a driver 253, a guide rail 254, and brackets 255a and 255b.

The pulleys 251a and 251b are provided with a pair, and are spaced apart from each other along the longitudinal direction of the auxiliary support plate 310. The pair of pulleys 251a and 251b are disposed at both sides of the auxiliary support plate 310 at intervals greater than the length of the auxiliary support plate 310.

The belt 252 is wound around the pulleys 251a and 251b to surround the outer side of the pair of pulleys 251a and 251b. The belt 252 surrounds the upper ends of the pulleys 251a and 251b and is positioned at the upper portion 252a and the lower end of the pulleys 251a and 251b and is positioned at the lower portion relative to the upper portion 252a. 252b). The upper end 252a and the lower end 252b move in opposite directions when the pulleys 251a and 251b rotate.

The driver 253 is connected to any one pulley 251a. The driver 253 rotates the pulley 251a at an angle. The driver 253 may rotate the pulley 251a in a different direction of rotation, that is, clockwise 6 or counter-clockwise 7 about the rotation axis of the pulley.

The guide rail 254 is disposed along the first direction 2 between the auxiliary supporting plate 310 and the belt 252. The guide rail 254 is provided from one end of the auxiliary support plate 310 to the outside of the other end. When the guide rail 254 supports the brackets 255a and 255b, the guide rail 254 guides the movement of the brackets 255a and 255b in the first direction 2. According to an embodiment two guide rails 254 are provided at different heights. Each rail 254 is disposed in parallel with the first direction 2. In the present invention, since two guide rails 254 are provided, the brackets 255a and 255b may be firmly supported by the guide rails 254 even when a large force acts on the brackets 255a and 255b from the outside.

The brackets 255a and 255b are mounted to the guide rail 254 and move in the first direction 2 along the guide rail 254. The brackets 255a and 255b support the stages 211 and 212. The brackets 255a and 255b include a first bracket 255a for supporting the first stage 211 and a second bracket 255b for supporting the second stage 212. The first bracket 255a and the second bracket 255b are spaced apart from each other. The brackets 255a and 255b are fixedly coupled to the belt 253 by the fixing clip 256. The first bracket 255a is fixedly coupled to the upper end 252a of the belt 252, and the second bracket 255b is fixedly coupled to the lower end 252b of the belt 252.

By the above structure, the first stage 211 and the second stage 212 are moved in opposite directions to each other to adjust the relative distance. When the pulley 251a rotates in the clockwise direction 6, the first stage 211 and the second stage 212 move in a direction closer to each other, and the pulley 251a rotates in the counterclockwise direction 7. In this case, the first stage 211 and the second stage 212 moves in a direction away from each other. As described above, in the present invention, since the distance between the first stage 211 and the second stage 212 can be adjusted, the flat display is made by varying the width of the support area according to the size of the flat panel display panel 11 provided in the inspection process. The panel 11 can be different.

Alternatively, one stage 211 is fixedly positioned and the other stage 212 is moved to adjust the distance between the stages 211 and 212. The first stage 211 is fixed and the second stage 212 is moved in the first direction 2 along the guide rail 254 by a driver (not shown) directly connected to the second stage 212. The distance from the first stage 211 can be adjusted. Alternatively, only the second stage 212 may be fixedly coupled to the belt 252 to adjust the distance from the first stage 211 fixedly positioned by the rotation of the pulley 251a.

The auxiliary support unit 300 is disposed between the main support unit 200 and the inspection unit (400 in FIG. 3) and supports an area between the center area and the attachment area of the flat panel display panel 11. The pressure regulating member (not shown) independently adjusts the pressure of the main vacuum hole 214 and the pressure of the auxiliary vacuum hole 311. The pressure regulating member adjusts the pressure of the main vacuum hole 214 and the auxiliary vacuum hole 311 such that the adsorption force of the auxiliary vacuum hole 311 is greater than that of the main vacuum hole 214.

Since the auxiliary support unit 300 and the pressure regulating member are provided in the same configuration as described in the above embodiment, detailed description thereof will be omitted.

The substrate transfer unit includes a transfer robot 500, a first transfer unit (not shown), and a second transfer unit (not shown).

The transport robot 500 loads the flat panel display panel 11 provided for inspection into the substrate support unit 100, and unloads the flat panel display panel 11 from which the inspection is completed from the substrate support unit 100. The transport robot 500 includes a transport plate 511, a support shaft 515, a moving bracket 516, a guide rail 517, and a transport plate driver 550.

The conveying plate 511 supports the flat panel display panel 11 to be conveyed. The conveying plate 511 includes a stage 512 provided in a quadrangular shape and a support pad 513 provided on the stage 512. The support pads 513 are spaced apart from each other, and the flat panel display panel 11 is disposed on an upper surface of the support pads 513. The support pad 513 is provided with an elastic material, and a vacuum hole is formed therein. The vacuum hole is connected to a vacuum pump (not shown) through a vacuum line (not shown), and vacuum-adsorbs the flat panel display panel 11 while the transport robot 500 is transported.

The support shaft 515 is located below the conveying plate 511 and supports the conveying plate 511. The support shaft 515 moves the conveyance plate 511 in the up-down direction by the driving force in the conveyance plate driver 550.

The movement bracket 516 is positioned below the rotation shaft 515 and moves in the second direction 3 along the guide rail 517. The moving bracket 516 moves in the second direction 3 to position the transfer plate 511 between the first stage 211 and the second stage 212.

The conveying plate driver 550 generates a driving force to move the conveying plate 511. The conveying plate driver 550 includes a first driver 551, a second driver 552, a third driver 553, and a fourth driver (not shown).

The first driver 551 is located at one side of the guide rail 517, and transports the conveying plate 511 along with the moving bracket 516 along the guide rail 517 in the second direction 3. The second driver 552 is located at one side of the movement bracket 516 and moves the transport plate 511 in the vertical direction. The conveying plate 511 is raised and lowered when the flat panel display panel 11 supported by the conveying plate 511 is loaded onto the substrate support unit 100 or unloaded from the substrate support unit 100. The third driver 553 is located below the support shaft 515 and rotates the transport play 511 together with the support shaft 515. The fourth driver (not shown) moves the transport robot 500 in the first direction 2. The transport robot 500 is placed on the support bracket 518 installed on the guide rail 561 disposed in the first direction 2, and along the guide rail 561 with the support bracket 518 in the first direction 2. Go to).

The first transfer unit loads the flat panel display panel 11 brought into the substrate inspection apparatus from the preprocessing apparatus onto the transport robot 500. The second transfer unit unloads the flat panel display panel 11 from which the inspection process is completed from the transport robot 500 and transfers the flat panel display panel 11 to the post-processing device. The first transfer unit and the second transfer unit are installed on the transfer guide rail 531 of FIG. 9 and move in the first direction 2 along the transfer guide rail. The first transfer unit is installed adjacent to the prefabricated device relative to the second transfer unit. The first transfer unit is provided in the same configuration as the loading transfer 510 described with reference to FIG. 9, and the second transfer unit is provided with the same configuration as the unloading transfer 540 described with reference to FIG. 9.

The process of the process by the substrate support unit and the substrate transfer unit will be described below.

First, when the flat panel display panel 11 is carried into the board | substrate inspection apparatus from the preprocessing apparatus, the 1st transfer | transfer supports the flat panel display panel 11. The first transfer unit moves in the first direction 2 along the transfer guide rail to load the flat panel display panel 11 onto the transfer plate 511. Subsequently, the transport robot 500 moves along the guide rail 561 so that the transport plate 511 is positioned to face the space between the first stage 211 and the second stage 212 by driving the fourth driver. Move in direction (2). In addition, the movement bracket 516 is moved in the second direction 3 by the driving of the first driver 551. The moving bracket 516 moves along the guide rail 517 such that the transport plate 511 is located in the space between the first stage 211 and the second stage 212. In this case, the first stage 211 and the second stage 212 are positioned with a relative distance adjusted according to the size of the flat panel display panel 11 provided for the inspection. The transport plate 511 is lowered by the driving of the second driver 552 to load the flat panel display panel 11 into the substrate support unit 100. In the flat panel display panel 11, a central area is supported by the main support plate 210, and an area between the attachment area and the central area is supported by the auxiliary support plate 310. Thereafter, an inspection unit (not shown) moves along the attachment region of the flat panel display panel 11 to inspect the adhered state of the flat panel display panel 11 and the flexible printed circuit board 14. During the inspection process, the main support plate 511 and the auxiliary support plate 310 vacuum-adsorb the flat panel display panel 11 at different pressures. The transport robot 500 loads the flat panel display panel 11 onto the substrate support unit 100, moves to one side of the substrate support unit 100, and waits until the inspection process is completed.

When the inspection process for the flat panel display panel 11 is completed, the transport robot 500 moves to the space between the first stage 211 and the second stage 212. Then, the transport plate 511 is lifted by the second driver 552 to unload the flat panel display panel 11 from the substrate support unit 100. After unloading the flat panel display panel 11, the moving bracket 516 moves in the second direction 3 to be positioned outside the space between the first stage 211 and the second stage 212, and the transfer robot ( 500 moves in the first direction 2 along the guide rail 561. The unloading transfer moves to the transport robot 500 to support the flat panel display panel 11 placed on the transport robot 500. The unloading transfer moves along the transfer guide rail in the first direction 2 to provide the flat panel display panel 11 to the post-processing device.

In the above embodiments, the substrate support unit is described as being provided to the inspection process of the flat panel display panel. However, the present invention is not limited thereto, and the substrate support unit is provided to various processes to minimize the degree of bending of the flat panel display panel during the process. Can be.

The foregoing detailed description illustrates the present invention. In addition, the above-mentioned contents show preferred embodiments of the present invention, and the present invention can be used in various other combinations, modifications, and environments. That is, changes or modifications may be made within the scope of the concept of the invention disclosed in the present specification, the scope equivalent to the disclosures described above, and / or the skill or knowledge in the art. The described embodiments illustrate the best state for implementing the technical idea of the present invention, and various modifications required in the specific application field and use of the present invention are possible. Thus, the detailed description of the invention is not intended to limit the invention to the disclosed embodiments. Also, the appended claims should be construed to include other embodiments.

1A is a diagram illustrating a conventional substrate inspection apparatus.

FIG. 1B is an enlarged view of I of FIG. 1A.

2A is a plan view illustrating a flat panel display device.

FIG. 2B is a cross-sectional view taken along the line II ′ of FIG. 2A.

FIG. 2C is a cross-sectional view taken along the line II-II ′ of FIG. 2A.

FIG. 2D is an enlarged view of III of FIG. 2A.

FIG. 2E is a cross-sectional view taken along line IV-IV 'of FIG. 2A.

3 is a perspective view showing a substrate inspection apparatus according to an embodiment of the present invention.

4 is a perspective view illustrating the substrate support unit of FIG. 3.

FIG. 5A is a plan view illustrating the substrate supporting unit of FIG. 4. FIG.

FIG. 5B is a cross-sectional view taken along the line II ′ of FIG. 5A.

FIG. 5C is an enlarged view of II of FIG. 5B.

6 is a perspective view illustrating the inspection unit of FIG. 3.

7 is a perspective view illustrating the photographing unit of FIG. 6.

8 is a perspective view showing an inspection unit according to another embodiment of the present invention.

9 is a perspective view illustrating the substrate transfer unit of FIG. 3.

FIG. 10 is a perspective view illustrating the prealign unit of FIG. 3. FIG.

11A is a plan view illustrating a process of inspecting a data area of a flat panel display panel according to an exemplary embodiment of the present invention.

FIG. 11B is a side view illustrating one side of FIG. 11A. FIG.

FIG. 12 is a graph illustrating a bending deformation of a flat panel display panel when an auxiliary support plate is provided and an auxiliary support plate is not provided in an embodiment of the present invention.

13A is a plan view illustrating a process of inspecting a gate area of a flat panel display panel according to an exemplary embodiment of the present invention.

FIG. 13B is a side view illustrating one side of FIG. 13A.

14 is a perspective view illustrating a substrate support unit and a substrate transfer unit according to another embodiment of the present invention.

Claims (25)

In the apparatus for inspecting the adhesion state of the flat panel display panel and the flexible printed circuit board attached to one side thereof, A substrate support unit which supports the flat panel display panel; And Located on one side of the substrate support unit, including an inspection unit for inspecting the attachment region to which the flexible printed circuit board is attached, The substrate support unit A main support plate supporting a central area of the flat panel display panel; And An auxiliary support plate disposed between the main support plate and the inspection unit, supporting an area between the central area and the attachment area, and provided independently of the main support plate, The main support plate is formed with a main vacuum hole for vacuum adsorption of the central region, the auxiliary support plate is formed with an auxiliary vacuum hole for vacuum adsorption between the center region and the attachment region, The substrate inspection device And a pressure adjusting member capable of independently adjusting the pressure of the main vacuum hole and the pressure of the auxiliary vacuum hole. The method of claim 1, The main support plate stage; A support pad provided on the stage and on which the flat panel display panel is placed, The support pad is a substrate inspection device, characterized in that provided by an elastic material. The method of claim 2, And said stage is provided in a rectangular plate shape. The method of claim 2, The stage is When viewed from the top, the first stage disposed in a direction perpendicular to the longitudinal direction of the auxiliary support plate; And A second stage spaced apart from the first stage in a longitudinal direction of the auxiliary support plate, The substrate inspection unit And a main support plate driver for moving the first stage or the second stage such that a relative distance between the first stage and the second stage is adjusted. The method of claim 3, wherein The auxiliary support plate is a substrate inspection apparatus, characterized in that the longitudinal direction is disposed in parallel with one side of the stage, the length is longer than one side of the stage. The method of claim 4, wherein The first stage and the second stage are provided in a rod shape, and the support pads are provided in a plurality of spaced apart from each other in the first stage and the second stage in the longitudinal direction of the first stage and the second stage, respectively. Substrate inspection apparatus, characterized in that. The method of claim 3, wherein The substrate support unit Further comprising a main support plate driver for driving the main support plate, The main support plate driver When viewed from the top, the first driver for moving the main support plate in a direction perpendicular to the longitudinal direction of the auxiliary support plate; A second driver for moving the main support plate in a vertical direction; And And a third driver for rotating the main support plate. delete The method of claim 1, The auxiliary vacuum hole And a plurality of substrates spaced apart from each other along the longitudinal direction of the auxiliary support plate. The method of claim 1, The inspection unit A line scan camera moving along a first direction parallel to a longitudinal direction of the auxiliary support plate and scanning an image of the attachment area to provide an image; A coaxial illuminator fixed to the line scan camera and irradiating light to the attachment region; And Including an inspector for receiving the image to inspect the attachment area, The checker And an indentation inspection unit for indenting the attachment region. 11. The method of claim 10, The checker Substrate inspection apparatus comprising a foreign material inspection unit for inspecting the foreign matter of the attachment region. 11. The method of claim 10, The inspection unit An external light positioned above the line scan camera and configured to radiate transmitted light to the attachment region; And A bracket connecting the external light and the line scan camera to fix the relative position of the external light with respect to the line scan camera, The checker And an alignment inspection unit configured to perform alignment inspection between the flat panel display panel and the flexible printed circuit board in the attachment region. 13. The method of claim 12, The line scan camera is positioned lower than the upper surface of the auxiliary support plate, the external illumination is positioned higher than the upper surface of the auxiliary support plate. The method of claim 1, The main support plate A pair is spaced apart from each other along a first direction parallel to the longitudinal direction of the auxiliary support plate, And the auxiliary supporting plate is arranged in pairs corresponding to each of the main supporting plates. In a unit for supporting a flat panel display panel with a flexible printed circuit board attached to one side thereof, A main support plate supporting a central area of the flat panel display panel; And An auxiliary vacuum hole disposed at one side of the main support plate, supporting an area between the attachment area and the center area to which the flexible printed circuit board is attached, and vacuum adsorbing the area between the attachment area and the center area, and Including an auxiliary support plate provided independently of the main support plate, The main support plate stage; And a support pad provided on the stage, on which the flat panel display panel is disposed, provided with an elastic material, and having a main vacuum hole for vacuum suction of the central region. The unit is And a pressure adjusting member capable of independently adjusting the pressure of the main vacuum hole and the pressure of the auxiliary vacuum hole. The method of claim 15, The auxiliary supporting plate is provided with a length longer than the long side of the stage, The auxiliary vacuum hole is provided with a plurality of substrate spaced apart along the longitudinal direction of the auxiliary support plate. The method of claim 15, The stage is When viewed from the top, the first stage disposed in a direction perpendicular to the longitudinal direction of the auxiliary support plate; A second stage disposed side by side with the first stage, The substrate inspection unit And a main support plate driver for moving the first stage or the second stage such that a relative distance between the first stage and the second stage is adjusted. In the method of inspecting the adhesion state of the flat panel display panel and the flexible printed circuit board attached to one side thereof, The line scan camera moves along the attachment area to which the flexible printed circuit board is attached, scans the attachment area to provide an image, and inspects the inspection item of the attachment state with the image. During the scan photographing, the center region of the flat panel display panel is supported by the main support plate, and the region between the center region and the attachment region is parallel with the moving direction of the line scan camera to maintain flatness of the attachment region. Supported by a secondary supporting plate, A main vacuum hole is formed in the main support plate, and an auxiliary vacuum hole is formed in the auxiliary support plate. And a suction force of the auxiliary vacuum hole is greater than that of the main vacuum hole. delete The method of claim 18, The flat panel display panel is placed on the elastic member in the main support plate. The method of claim 18, The main support plate When viewed from the top, includes a first stage disposed in a direction perpendicular to the longitudinal direction of the auxiliary support plate and a second stage spaced apart from the first stage in the longitudinal direction of the auxiliary support plate, The first stage and the second stage is a substrate inspection method, characterized in that the relative distance is adjusted according to the size of the flat panel display panel. The method according to any one of claims 18, 20, and 21, The inspection item is A substrate inspection method comprising indentation inspection. The method of claim 22, The inspection item is Further comprising a foreign material inspection on the flexible printed circuit board, The foreign material inspection is a substrate inspection method, characterized in that made in the same image as the indentation inspection. The method of claim 22, The inspection item is Further comprising an alignment inspection of the flat panel and the flexible printed circuit board, The alignment inspection is a substrate inspection method, characterized in that the same image as the indentation inspection. The method according to any one of claims 18, 20, and 21, The inspection item is At least two inspections selected from indentation inspection, foreign material inspection on the flexible printed circuit board, and alignment inspection of the flat panel display panel and the flexible printed circuit board, Wherein said inspections are made in the same image.

Images