KR101074265B1 - Gas supply integration unit - Google Patents

Abstract

At a normal temperature and normal pressure, the first manual valve 22 provided in the outlet flow path, the first manual valve 22 and the process gas common flow path (providing a gas supply integration unit for supplying a process gas which is easy to liquefy while heating and keeping heat) An air operator valve 26 provided at a position communicating with 44 and a second manual valve 25 provided at a position communicating with the first manual valve 22 and the purge gas common flow passage 43 are flow path blocks 46. And a support member 18 having a U-shaped cross section and fitted with a flow path block 46 and a unit fixing plate 15 to a gas supply integrated unit including a plurality of gas units connected in series by the unit fixing plate 15. ) And a planar heater 16 fixed between the support member 18, the flow path block 46, and the unit fixing plate 15.

Description

Gas Supply Integration Unit {GAS SUPPLY INTEGRATION UNIT}

BACKGROUND OF THE INVENTION Field of the Invention The present invention relates to a gas supply integrated unit used in a semiconductor manufacturing apparatus or the like, and more particularly, dichlorosilane (or dichlorsilane) which has a high vaporization temperature and is easy to liquefy if no external heat is applied at room temperature. (dichloresilane), WF6, HBr and the like relates to a gas supply integration unit for supplying with high accuracy without liquefying.

As a conventional insulating film in a semiconductor integrated circuit, a silicon oxide thin film formed by a vapor phase film is used. Such vapor-phase film formation, such as silicon oxide, is usually carried out by a chemical vapor deposition method on a wafer placed in a film formation tank.

When supplying a process gas which is easy to liquefy, such as dichlorosilane (or dichlorsilane), it is necessary to heat a high pressure bombe, a pipe, a mass flow controller, a reaction chamber, etc. in the supply gas supply route. It is necessary. The reason is that when the dichlorosilane (or dichlorsilane) liquefies in the middle of the supply route, the flowmeter does not operate correctly and degrades the performance of the semiconductor integrated circuit to be manufactured or the like. Further, liquefied dichlorosilane (or dichlorsilane) or the like has a problem in that the flowmeter side is inaccurate by aggregating the capillary of the mass flow meter solenoid valve.

In order to prevent the liquefaction of process gas, such as dichlorosilane (or dichlorosilane), in the gas supply apparatus of patent document 1, as shown, for example in FIG. 9, piping, a coefficient, a gas valve 62, 64 and tape-shaped heaters 60 on the support holes 53 and 54 formed of the heat transfer block 51 and the non-heat transfer block 52 on both sides of the gas unit constituted by the mass flow meter portion solenoid valve 61. ) Is supported and excreted, so that the dichlorosilane (or dichlorsilane) or the like is heated and kept to be above the vaporization temperature.

In addition, as shown in FIG. 10, the upper surface of the heat-transfer block 51 becomes a contact surface 65 which contacts the mass flowmeter part solenoid valve 61 below, and heat-insulates the mass flowmeter part solenoid valve 61, and heats it. have.

Patent Document 1: Japanese Patent Application Laid-Open No. 7-286720

However, the gas supply apparatus of patent document 1 has the following problems.

(1) The gas supply device is preferably miniaturized and integrated in order to reduce production costs. However, the gas supply device shown in FIG. 9 is formed by the heat transfer block 51 and the non-heat transfer block 52 on both sides of the gas unit. Since it is arrange | positioned so that the tape-shaped heater 60 may be supported by the earth 53 and 54, a gas unit width becomes large compared with the gas unit which does not require a heater.

(2) The gas supply apparatus requires many components for heating and keeping, such as the heater 6, the heat transfer block 51, and the non-heat transfer block 52, on both sides of the gas unit, and the production cost is high.

Then, an object of the present invention is to provide a gas supply integration unit for supplying a process gas that is easy to be weakened at normal temperature and pressure while being heated and maintained.

In order to solve the said problem, the gas supply integrated unit of this invention has the following structures.

(1) The first manual valve provided in the outlet flow path, the air operator valve provided in the position which communicates the said 1st manual valve, and the process gas common flow path, and the 1st manual valve and the purge gas common flow path communicate ( A gas supply integrated unit comprising a plurality of gas units in which a second manual valve provided at a position to be in communication is integrally connected by a flow path block and a unit fixing plate, wherein a cross section is U-shaped, and the flow path block and the unit fixing plate are U-shaped. And a support heater to be fitted, and a planar heater to be clamped between the support member, the flow path block, and the unit fixing plate.

(2) The gas supply integrated unit described in (1), wherein the gas unit is fitted to the support member, and is formed in a plate shape between the rail to be fastened and the support member and the rail. And a spacer member.

(3) The gas supply integrated unit described in (1), wherein one or two or more planar heaters disposed in contact with the bottom surface of the gas unit, a support member for supporting the planar heater, and the planar heater are And a supporting member fixing plate for sandwiching the supporting member with the flow path block and the unit fixing plate to fix the supporting member.

The gas supply integrated unit of the present invention functions the following effects.

The gas supply integrated unit of the present invention includes a first manual valve provided in an outlet flow passage, an air operator valve provided at a position in communication with the first manual valve and a process gas common flow passage, and the first manual valve and purge. A gas supply integrated unit comprising a plurality of gas units in which a second manual valve provided at a position communicating a gas common flow path is integrally connected by a flow path block and a unit fixing plate, the cross section being U-shaped, Since it has a support member to which a flow path block and the said unit fixing plate fit, and a flat heater clamped between the said support member, the said flow path block, and the said unit fixing plate, the external shape method of a gas unit is a plane heater. It can be made exactly the same as the gas unit does not require. Therefore, the external appearance method does not change even in the whole gas supply integration unit which integrated the gas unit. Furthermore, since the flow path of the gas unit and the unit fixing plate are heated and kept on the back surface, as a part for heating and keeping, only one flat heater and one support member are required for one gas unit. Fewer production lines can reduce production costs.

Further, the gas supply integration unit of the present invention has a spacer member because the gas unit is fitted with the support member and has a rail to be fastened and a plate-shaped spacer member sandwiched between the support member and the rail. By pulling out, it is possible to disassemble a flat heater and provide another flat heater, maintaining the state which can use a gas supply integration unit. In this way, the exchange of the flat heater is easy and easy to repair.

In addition, the gas supply direct unit of the present invention includes one or two or more flat heaters disposed in contact with the bottom surface of the gas unit, a support member for supporting the flat heater, and the flat heater with the support member and the flow path. Since it has a support member fixing plate which sandwiches between a block and the said unit fixing plate, and fixes a support member, it does not need each plane heater and one support member for every gas unit, and is planar heater throughout the gas supply integrated unit. If the and support members are one or two or more, respectively, the number of parts for heating and maintaining the gas supply integrated unit is often low, and the production cost can be reduced. In addition, since the number of flat heaters is reduced, wiring becomes easy and replacement of the flat heater is easy.

1 is a plan view showing a configuration of a gas supply integration unit that is a first embodiment of the present invention.

2 is a front view of a gas supply integration unit, which is the first embodiment of the present invention.

3 is a circuit diagram showing the configuration of FIG.

4 is a perspective view showing an assembling procedure of a gas unit of a first embodiment of the present invention.

5 is a cross-sectional view of the A-A portion of FIG.

FIG. 6 is a diagram illustrating the detachment of the heater 16 in FIG. 5.

7 is a plan view showing a configuration of a gas supply integration unit that is a second embodiment of the present invention.

8 is a cross-sectional view of the B-B portion of FIG.

9 is a perspective view of a conventional gas supply device.

10 is a view for explaining the heat transfer block of FIG. 9.

10 rails 12 rails

15 unit fixing plate 16 flat heater

17 flat heater 18 support member

19 spacer member 22 first manual valve

25 Second hand valve 26 Air operator valve

43 Common purge gas flow path 44 Common process gas flow path

46 Euro block 47 Support member fixing plate

48 support member

EMBODIMENT OF THE INVENTION Hereinafter, the Example of the gas supply integrated unit which concerns on this invention is described based on an accompanying drawing.

(First embodiment)

FIG. 1 is a plan view showing the configuration of a gas supply integration unit that supplies process gas to five lines, and FIG. 2 is a front view of FIG. FIG. 3 shows the circuit diagram of FIG. 1.

The two rails 10 and 12 are fixed at both ends in parallel by rail fixing rods 13 and 14. Parallel to the rail fixing rods 13 and 14, the purge gas unit, the process gas unit, and the gas units A, B, C, D, and E are respectively connected to the rail fixing rods 13 and 14 by the unit fixing plate 15. ) In parallel to the transverse direction. The circuit configuration of the mechanism mounted on the purge gas unit, the process gas unit, and the gas units A, B, C, D, and E, respectively, is shown in FIG.

The purge gas manual valve 29 contacts the purge gas tank not shown using the purge gas supply path 28. The purge gas manual valve 29 uses the air operator valve 32, the check valve 33, the purge gas common flow path 43, and the second manual valves 25A, 25B, 25C, 25D, It contacts one port of 25E). As for the purge gas manual valve 29, the pressure gauge 31 communicates with the flow path which communicates the air operator valve 32. As shown in FIG. The other ports of the second manual valves 25A, 25B, 25C, 25D, and 25E are in contact with one port of the regulators 24A, 24B, 24C, 24D, and 24E.

The process gas manual valve 35 is in contact with a process gas tank (not shown) using the process gas supply passage 34. The process gas manual valve 35 is in contact with one port of the air operator valves 26A, 26B, 26C, 26D, and 26E using the air operator valve 37 and the process gas supply flow passage 44. The pressure gauge 36 communicates with the flow path between the process gas manual valve 35 and the air operator valve 37.

The other ports of the air operator valves 26A, 26B, 26C, 26D, and 26E are in contact with one port of the regulators 24A, 24B, 24C, 24D, and 24E. The other ports of the regulators 24A, 24B, 24C, 24D and 24E use the first manual valves 22A, 22B, 22C, 22D and 22E to process gas outlets 21A, 21B, 21C, 21D and 21E. In communication with. Pressure gauges 23A, 23B, 23C, 23D, and 23E in flow paths communicating with the regulators 24A, 24B, 24C, 24D, and 24E and the first manual valves 22A, 22B, 22C, 22D, and 22E. Is in communication.

The end of the process gas common flow path 44 is sealed by the process gas common flow path end manual valve 41. In addition, the end of the purge gas common flow path 43 is sealed by the purge gas common flow path end manual valve 38.

4 is a perspective view illustrating a procedure of assembling one line of the gas supply integration unit. The gas unit of any of the purge gas unit, the process gas unit, and the gas units A B, C, D, and E is completely orientated. In the gas unit, each mechanism is connected in series by the unit fixing plate 15 using the flow path block 46 (see FIG. 2). The unit fixing plate 15 and the flat heater 16 disposed below the unit fixing plate 15 are fitted to the U-shaped cross section of the supporting member 18. The unit fixing plate 15 sandwiches the plate-shaped spacer member 19 between the support member 18, the rail 10, and the rail 12, and fastens the fastening means to the rail 10 and the rail 12. It is fixed by 20.

The operation of the gas supply integration unit and the operation effect thereof according to the first embodiment of the present invention thus prepared will be described. First, the operation of the entire gas supply integration unit will be described. When supplying the process gas to the semiconductor manufacturing process, the process gas manual valve 35 and the first manual valves 22A, 22B, 22C, 22D, and 22E are opened, and the air operator valve 37 and the air operator valve 26A, 26B, 26C, 26D, 26E) are opened by signals. The purge gas manual valve 29 and the second manual valves 25A, 25B, 25C, 25D, and 25E of the purge gas circuit are closed, and the air operator valve 32 is closed by a signal. As a result, the process gas is supplied to the process gas supply path 34, the process gas manual valve 35, the air operator valve 37, the process gas common flow path 44, and the air operator valve in a process gas tank (not shown). Via 26A, 26B, 26C, 26D, 26E, flows into regulators 24A, 24B, 24C, 24D, 24E, and at first hand valves 22A, 22B, 22C, 22D, 22E, the process gas outlet ( 21A, 21B, 21C, 21D, 21E) to the supply line.

Next, when maintenance of a gas unit is needed, it is implemented after stopping supply of a process gas. In this case, since the circuit is captured in the atmosphere, a purge gas, which is nitrogen gas, is introduced into the circuit in order to remove moisture in the atmosphere. That is, when the process gas manual valve 35 is opened and the air operator valve 37 is opened by a signal, the flow of process gas is interrupted. Then, the purge gas manual valve 29 and the second manual valves 25A, 25B, 25C, 25D, and 25E are opened, and the air operator valve 32 is opened by a signal. In a purge gas tank (not shown), purge gas, which is nitrogen gas, is introduced into each line of the gas units A, B, C, D, and E. That is, the purge gas is a purge gas manual valve 29, an air operator valve 32, a check valve 33, a purge gas common flow path 43, and second manual valves 25A, 25B, 25C, and 25D. , 25E, flows to regulators 24A, 24B, 24C, 24D, 24E, and at first manual valves 22A, 22B, 22C, 22D, 22E, process gas outlets 21A, 21B, 21C, 21D. 21E) is discharged to the exhaust system. Then, after a predetermined time, when the purge gas manual valve 29 and the second manual valves 25A, 25B, 25C, 25D, and 25E are opened, and the air operator valve 32 is opened by a signal, the inflow of the purge gas is stopped.

Next, the operation of the flat heater 16 will be described. The gas unit of any of the purge gas unit, the process gas unit, and the gas units A, B, C, D, and E is completely orientated. The planar heater 16 is arrange | positioned under the unit fixing plate 15, and is fitted in the U-shaped cross section of the support member 18. As shown in FIG. When process gas is flowing to the gas supply integrated unit, when the joule heat is generated by energizing the planar heater 16, the heat is transferred to the purge gas unit and the process gas using the unit fixing plate 15. The unit and the flow path block 46 of the gas units A, B, C, D, and E are transferred to the mechanism mounted on the flow path block 46. Thus, the heat is transferred to the mechanism mounted on the flow path block and the unit fixing plate 15 of the gas unit, so that the temperature inside the gas unit through which the process gas flows is maintained above the condensation temperature of the process gas. Therefore, occurrence of various abnormalities due to the liquefaction of the process gas in the process gas unit and the gas units A, B, C, D, and E can be prevented.

Next, the operation of the spacer member 19 will be described with reference to FIG. 5 showing a cross section of the A-A portion in FIG. 1 and FIG. 6 showing the detachment of the flat heater 16. Although it demonstrates with sectional drawing of the gas unit E, it is also completely oriental also in purge gas unit, process gas unit, and gas unit A, B, C, D. As shown in FIG. The unit fixing plate 15 and the flat heater 16 disposed below the unit fixing plate 15 are fitted to a U-shaped cross section of the supporting member 18, so that the unit fixing plate 15 is connected to the supporting member 18. The plate-shaped spacer member 19 is sandwiched between the rail 10 and the rail 12 and fixed to the rail 10 and the rail 12 by the fastening means 20. When the flat heater 16 needs to be replaced, by disassembling the fastening means 20 and pulling out the spacer member 16, the gas supply integrated unit is shown in FIG. It is possible to dismantle the flat heater 16 so that each flat heater 16 can be attached.

As described in detail above, according to the gas supply integration unit of the first embodiment, the air provided at a position where the first manual valve 22 provided in the outlet flow passage, the first manual valve 22 and the process gas common flow passage 44 communicate with each other. A second manual valve 25 provided at a position where the operator valve 26 and the first manual valve 22 communicate with the purge gas common flow passage 43 is connected in series by the flow path block 46 and the unit fixing plate 15. In the gas supply integrated unit including a plurality of gas units connected integrally, the support member 18 and the support member 18 having a U-shaped cross section and to which the flow path block 46 and the unit fixing plate 15 are fitted. And the flat heater 16 sandwiched and fixed between the flow path block 46 and the unit fixing plate 15, the external irregularity of the gas unit is made to be exactly the same as that of the gas unit which does not require the flat heater 16. To appear. Therefore, the appearance irregularity does not change even in the whole gas supply integration unit which integrated the gas unit. Furthermore, since the flow paths of the gas block 46 and the unit fixing plate 15 of the gas unit are kept warm from the rear surface, only one flat heater and one support member are required for one gas unit as a component for heat insulation. As a result, the number of parts is small and production costs can be reduced.

Further, according to the gas supply integration unit of the first embodiment, the gas unit is fitted to the support member 18, and the rail 10, the rail 12, the support member 18, the rail 10, and the rail are fastened. Since it has the plate-shaped spacer member 19 clamped between 12, replacement of the flat heater 16 is easy and production cost is easy. That is, by pulling out the spacer member 19, the plane heater 16 can be disassembled and each plane heater 16 can be attached, maintaining the state which can use a gas supply integrated unit.

(2nd Example)

Next, a second embodiment of a gas supply integration unit according to the present invention will be described with reference to the accompanying drawings. FIG. 7 is a plan view showing the configuration of the gas supply integration unit of FIG. 1 and FIG. 8, and FIG. 8 shows a cross section of the B-B section of FIG. Two rails 10 and 12 are fixed at both ends in parallel by rail fixing rods 13 and 14. Parallel to the rail fixing rods 13 and 14, the purge gas unit, the process gas unit, and the gas units A, B, C, D, and E are respectively connected to the rail fixing rods 13 and 14 by the unit fixing plate 15. It is mounted so as to be able to move in the horizontal direction. One or two or more planar heaters 17 are shown in Figs. 7 and 8 as two examples. The two flat heaters 17 are in contact with the lower portion of the unit fixing plate 15 to which the purge gas unit, the process gas unit, and the gas units A, B, C, D, and E are respectively fixed, and the unit fixing plate 15 Is orthogonal in the longevity direction of). The two flat heaters 17 are supported by the support members 48, respectively, and the support members 48 are fixed by the fastening means 49 and by the two support member fixing plates 47. One support member fixing plate 47 is mounted to the left side of the process gas unit in parallel with the rail fixing rod 13, and another support member fixing plate 47 is parallel to the rail fixing rod 14 in the gas unit. It is mounted on the right side of (E). Two support member fixing plates 47 are fixed to both ends of the rails 10 and 12, respectively.

The operation and effect of the gas supply integrated unit according to the second embodiment of the present invention thus prepared will be described. The operation of the entire gas supply integrated unit is omitted because it is the same as in the first embodiment, and the operation of the flat heater 17 will be described. The flat heater 17 is disposed in contact with the lower portion of the unit fixing plate 15 and is supported by the support member 48. When Joule heat is generated by energizing the planar heater 17 when the process gas is flowing into the gas supply integrated unit, the heat is transferred to the purge gas unit, the process gas unit, and the gas using the unit fixing plate 15. It is transmitted to the mechanism mounted in the flow path block 46 of the unit A, B, C, D, E. And heat is transmitted to the mechanism attached to the flow path block 46 of each unit, and the temperature inside the gas unit through which a process gas flows is maintained above the condensation temperature of a process gas. Therefore, occurrence of various abnormalities due to liquefaction of the process gas in the process gas unit and the gas units A, B, C, D, and E can be prevented.

Next, the desorption of the planar heater 17 will be described with a plan view showing the configuration of the gas supply integrated unit of the second embodiment of FIG. 7 and a cross section of the B-B section of FIG. 7. The planar heaters 17 are two sheets left and right, as seen from the right surface direction of FIG. The mounting state of the left side flat heater 17 shows the state in which the support member 48 is not fastened by the fastening means 49 in FIG. 8, The mounting state of the right side flat heater 17 is 8 shows a state in which the supporting member 48 is fastened by the fastening means 49. For example, when the right side flat heater 17 needs to be replaced when viewed from the right side direction in FIG. 7, the left side flat heater 17 is in the state (see FIG. 8) as viewed from the right side direction in FIG. 7. The plane heater 17 is pulled out in the direction of the arrow K1 shown in FIG. 7 while the gas supply integrated unit can be used, and disassembled, and each plane heater 17 is removed by the arrow shown in FIG. After inserting in the (K2) direction, the supporting member 48 is fixed to the supporting member fixing plate 47 by the fastening means 49.

As described in detail above, according to the gas supply integrated unit of the second embodiment, one or two or more planar heaters 17 disposed in contact with the bottom of the gas unit, a support member 48 for supporting the planar heaters 17, Since the planar heater 17 is sandwiched between the support member 48, the flow path block 46, and the unit fixing 15, and the support member fixing plate 47 is fixed to the support member 48, the gas The external shape method of the unit can be made exactly the same as the gas unit which does not require the flat heater 17. Therefore, the external appearance method does not change even in the whole gas supply integration unit which integrated the gas unit. Further, one or two flat heaters 17 and support members 48 are provided in the entire gas supply integration unit without requiring one flat heater 17 and one support member 48 for each gas unit. It is good to be over. Therefore, the number of parts for heating and maintaining the gas supply integrated unit is reduced, resulting in a reduction in production cost. In addition, the number of the flat heaters 17 decreases, so that wiring becomes easy, and the flat heaters 17 are also easily replaced.

In addition, although one Embodiment of this invention was described, this invention is not limited to the said Example, Various applications are possible.

For example, in the above embodiment, although the air operator valve is mounted in the gas supply integration unit, the type and line of the fluid control mechanism to be mounted are not limited to this, and can be changed as appropriate.

For example, in the second embodiment, when the flat heater 7 is detached and detached, the flat heater 17 is pulled out in the direction of the arrow K1 shown in FIG. 7 and disassembled. The flat heater 17 is pulled out in the direction of the arrow K2 shown in FIG. 7 to be inserted in the direction of the arrow K2 shown in FIG. 7, and the other flat heater 17 is removed by the arrow K1 shown in FIG. It is also good to insert in the () direction.

Claims (3)

The first manual valve provided in the outlet flow path, the air operator valve provided in the position which communicates the said 1st manual valve and a process gas common flow path, and the 2nd manual | operation provided in the position which communicates the said 1st manual valve and the purge gas common flow path. A gas supply direct unit comprising a plurality of gas units in which a valve is connected in series by a flow path block and a unit fixing plate, A support member having a U-shaped cross section and to which the flow path block and the unit fixing plate are fitted; And a flat heater sandwiched between the support member, the flow path block, and the unit fixing plate. The method of claim 1, The gas unit is fitted to the support member, the rail is fastened, And a plate-shaped spacer member sandwiched between the support member and the rail. The method of claim 1, One or two planar heaters fixed in contact with the bottom of the gas unit, A support member for supporting the flat heater, And a supporting member fixing plate for sandwiching the planar heater between the supporting member, the flow path block, and the unit fixing plate, and fixing the supporting member.

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