KR101071308B1 - A pressurizing device for imprinting, imprinting appartus including the same and imprinting method utilizing the same - Google Patents

Abstract

Disclosed is a pressing device for imprinting. Imprinting pressurization device 100 according to an embodiment of the present invention includes an elastic plate 110 and the sealed inner space 120, the fluid is supplied to the inner space 120 is the elastic plate 110 The pattern of the stamp 50 is imprinted on the substrate 40 by being pressed, and the internal space 120 is divided into a plurality of unit spaces 122 blocked from each other, and the fluid supply unit 140 for supplying the fluid is unit It is characterized in that it is installed in each of the spaces 120.

Description

PRESSURIZING DEVICE FOR IMPRINTING, IMPRINTING APPARTUS INCLUDING THE SAME AND IMPRINTING METHOD UTILIZING THE SAME}

The present invention relates to a pressing device for imprinting, an imprinting device including the same, and an imprinting method using the same. More specifically, the present invention relates to an imprinting pressurizing apparatus capable of uniformly applying pressure to a stamp or a substrate, an imprinting apparatus including the same, and an imprinting method using the same.

The technique for forming nanoscale patterns is often referred to as nanotechnology. Nanotechnology is a technology that produces and utilizes nanoscale materials, structures, instruments, machines, and devices. Nanotechnology is a foundational technology that realizes information technology and biotechnology. Most of the production, processing and application technologies are closely related to nanotechnology.

The core technology in nano technology with the above meaning is nano process technology that enables the production and utilization of nano sized materials, devices, and the like. Nano process technology is divided into top down method such as planar technology in semiconductor device fixing and bottom up method for manufacturing nanomaterials and devices using self-assembly technology of atoms and molecules. The bottom up method is not used at present stage due to technical limitations, but the top town method is commercially available at this stage.

Nano process technology is the core technology of lithography technology to form nano-sized ultra-fine micro-patterns. Currently, optical lithography is mainly used as a lithography technique for forming fine patterns. However, the optical lithography technique can be excellently applied to the formation of micron-sized patterns having a size of 100 nm or more, but there is a limit to the formation of ultra-fine micro patterns having a size of less than that.

Therefore, there is a need for a new method of lithography that can form nanopatterns in place of optical lithography. X-ray lithography technology, e-beam lithography technology, proximal lithography technology, nano imprinting lithography technology, etc. are alternatives to optical lithography technology. Was presented.

X-ray lithography technology can form a nano-pattern of 20nm or less, but it is difficult to manufacture the optical system used and the high cost is required, there is a problem that can not be commercially practical.

Electron beam lithography technology can form nanopatterns at low cost but has a low process yield.

The proximal lithography technology can form nano-patterns of several nanometers corresponding to the size of atoms or molecules, but as a representative bottom-up technique, as described above, there is a problem of low practical availability.

On the other hand, nano imprinting lithography (nano imprinting lithography) technology can easily form a nano-pattern (nano pattern), it is possible to mass production has the advantage of high process yield. Such nanoimprinting lithography techniques can also be used to form micrometer-sized patterns. That is, imprinting lithography techniques may be used in place of optical lithography techniques to form micrometer-sized patterns.

Hereinafter, an imprinting lithography technique for forming a pattern of nanometer or micrometer size will be described.

1 is a view showing a state in which the imprinting lithography process generally proceeds.

First, referring to FIG. 1A, it can be seen that the stamp 1 and the substrate 4 on which the predetermined pattern 2 is formed are located correspondingly. In addition, it can be seen that the polymer layer 3 for imprinting the pattern 2 is formed on the substrate 4. In this case, an alignment alignment process may be further performed to accurately match the stamp 1 and the substrate 4.

Next, referring to FIG. 1B, it can be seen that the stamp 1 is pressed onto the substrate 4. As the stamp 1 is pressed onto the substrate 4, the pattern 2 of the stamp 1 may be imprinted onto the polymer layer 3 formed on the substrate 4. At this time, a predetermined heat may be applied to the substrate 4.

Next, referring to FIG. 1C, it can be seen that the stamp 1 and the substrate 4 are separated. In addition, it can be seen that the pattern 2 of the stamp 1 is imprinted on the polymer layer 3 formed on the substrate 4.

2 is a view showing the configuration of an imprinting substrate supporting apparatus 60 that plays an important role in the conventional imprinting apparatus 60.

Referring to FIG. 2, it can be seen that the conventional imprinting substrate supporting apparatus 60 may include the elastic plates 5 and 6 and the fixing bodies 7 and 8.

As shown in FIG. 2, a stamp 1 and a substrate 4 may be disposed between the first elastic body plate 5 and the second elastic body plate 6. At this time, as the first elastic plate 5 and the second elastic plate 6 are pressed together, the pattern 2 of the stamp 1 can be imprinted on the substrate 4.

Meanwhile, the fixing bodies 7 and 8 may serve to fix the first elastic body plate 5 and the second elastic body plate 6.

3 is a view showing the configuration of a conventional imprinting apparatus 60 including the imprinting substrate supporting apparatus 60 of FIG.

Referring to FIG. 3, it can be seen that the imprinting substrate support device 60 of FIG. 2 is located in the chamber 9. In addition, it can be confirmed that a predetermined fluid is supplied into the chamber 9.

As the fluid is supplied into the chamber 9, the first elastic body plate 5 and the second elastic body plate 6 are compressed to each other by the pressure of the fluid, and the pattern 2 of the stamp 1 is bonded to the substrate. (4) can be imprinted.

However, according to this conventional imprinting apparatus 60, the fluid supplied into the chamber 9 is determined by various environmental factors (such as the slope with respect to the ground, the temperature, the humidity, the density of the fluid, etc.). Since it is biased in the area | region, there existed a problem that the pressure applied to the 1st elastic body plate 5 and the 2nd elastic body plate 6 was not uniform. This problem caused the pattern 2 of the stamp 1 not to be imprinted correctly on the substrate 4.

In addition, according to the conventional imprinting apparatus 60, bubbles are generated in a portion where the first elastic body plate 5 and the stamp 1 contact and a portion where the second elastic body plate 6 and the substrate 4 contact. There was a problem. The presence of such bubbles also caused the stamp pattern to be imprinted on the substrate accurately.

Accordingly, the present invention has been made to solve the above-mentioned problems of the prior art, an imprinting press device for applying pressure to a stamp or a substrate uniformly, an imprinting device comprising the same and an imprinting method using the same The purpose is to provide.

In order to achieve the above object, the pressing device for imprinting according to an embodiment of the present invention includes an elastic plate and a sealed inner space, and the fluid is supplied to the inner space to press the elastic plate to press the pattern of the stamp. Imprinted on a substrate, the internal space is divided into a plurality of unit spaces are separated from each other, the fluid supply for supplying the fluid is characterized in that the installed in each of the unit spaces.

The fluid may be supplied to the internal space in a heated state.

The fluid may be at least one of a liquid or a gas.

The plurality of unit spaces may be blocked from each other by the partition member, and the length of the partition member blocking the unit space located at the center may be the shortest.

The fluid may be operated to be supplied in the order of the unit space located at the edge from the unit space located at the center of the plurality of unit space.

The internal space is divided into a first unit space that is blocked from each other and a second unit space disposed in the center of the first unit space, wherein the first unit space includes a first elastic body plate, and the second unit space Includes a second elastic body plate, and when the fluid is supplied to the second unit space, a central portion of the first elastic body plate may be compressed by the second elastic body plate.

In order to achieve the above object, an imprinting apparatus according to an embodiment of the present invention is a pressing device including an elastic body plate and an enclosed inner space; And a supporting plate for supporting the substrate and the stamp having a predetermined pattern stacked thereon, wherein the fluid is supplied into the pressing device to press the elastic plate to imprint the pattern of the stamp onto the substrate, and the internal space is The apparatus may be divided into a plurality of unit spaces which are blocked from each other, and a fluid supply unit for supplying the fluid is installed in each of the unit spaces.

The pressurizing device includes an extension part extending from both ends of the elastic body plate and protruding from both ends of the pressurizing device, and the support plate includes a connection part connecting the extension part and the support plate, and the extension part and the extension part. The imprinting space generated by the extension part, the elastic plate, the support plate, and the connection part in the state in which the support plate is connected may accommodate the stamp and the substrate and may be sealed from the outside.

The apparatus may further include a vacuum pump capable of maintaining the imprinting space in a vacuum state.

The vacuum pump may be installed through the support plate.

The fixing plate may further include a fixing part for fixing the supporting plate and the extension part to maintain the state in which the supporting plate and the elastic plate are connected by the connecting part.

The support plate may include a heater for heating the substrate.

It may further include a light transmission means for irradiating ultraviolet or infrared rays toward the substrate.

The support plate may include a window for transmitting ultraviolet or infrared rays.

The material of the stamp may be transparent to ultraviolet or infrared light.

The support plate may include a cooling unit for cooling the substrate.

The apparatus may further include a position alignment unit which controls a position alignment state of the stamp and the substrate.

In order to achieve the above object, an imprinting method according to an embodiment of the present invention includes an elastic body plate and an enclosed inner space, the inner space is divided into a plurality of unit spaces are blocked from each other, to supply fluid By using the imprinting pressurizing device installed in each of the unit space, the fluid supply unit for supplying a fluid to each of the unit space by pressing the elastic plate characterized in that the imprint of the stamp pattern on the substrate.

According to the present invention, it is possible to provide an imprinting pressurizing device capable of uniformly applying pressure to a stamp or a substrate by dividing an internal space supplied with a fluid into a plurality of unit spaces.

Moreover, according to this invention, the imprinting apparatus which can effectively imprint the pattern of a stamp on a board | substrate can be provided by employ | adopting the imprinting pressurization apparatus mentioned above in an imprinting apparatus.

In addition, according to the present invention, by performing the imprinting process using the above-described imprinting pressurizing apparatus, it is possible to effectively imprint the pattern of the stamp on the substrate.

In addition, according to the present invention, the fluid is supplied in the order of the unit space located at the edge from the unit space located at the center, the elastic body plate and the substrate can be completely compressed without bubbles.

1 is a view showing a state in which the imprinting lithography process generally proceeds.
2 is a view showing the configuration of an imprinting substrate supporting apparatus that plays an important role in a conventional imprinting apparatus.
3 is a view showing the configuration of a conventional imprinting apparatus including the imprinting substrate supporting apparatus of FIG. 2.
4 is a view showing the configuration of an imprinting pressurization device according to a first embodiment of the present invention.
FIG. 5 is a view schematically showing a state of the imprinting pressurization device of FIG. 4 viewed from above. FIG.
6 is a diagram illustrating various forms in which one internal space is divided into a plurality of unit spaces.
7 is a view showing the operation of the imprinting pressing device according to the first embodiment of the present invention.
8 is a view schematically showing a process in which the pressing device for imprinting according to the first embodiment of the present invention operates in a predetermined order.
9 is a view schematically showing the appearance of the imprinting pressurization device according to a second embodiment of the present invention.
FIG. 10 is a view sequentially showing a state in which the elastic plate is pressed using an imprinting press device according to a second embodiment of the present invention.
11 is a view showing a state of the imprinting pressing device according to a third embodiment of the present invention.
12 is a view showing a process for operating the imprinting pressurization device according to a third embodiment of the present invention in a certain order.
13 is a view showing the configuration of an imprinting apparatus according to a first embodiment of the present invention.
14 is a view showing a state of the connecting portion formed on the support plate.
15 is a view showing the configuration of the fixing part according to the first embodiment of the present invention.
16 is a view showing an operation process of the imprinting apparatus according to the first embodiment of the present invention.
17 is a view showing the configuration of an imprinting apparatus according to a second embodiment of the present invention.
18 is a view showing the configuration of an imprinting apparatus according to a third embodiment of the present invention.

DETAILED DESCRIPTION The following detailed description of the invention refers to the accompanying drawings that show, by way of illustration, specific embodiments in which the invention may be practiced. These embodiments are described in sufficient detail to enable those skilled in the art to practice the invention. It should be understood that the various embodiments of the present invention are different but need not be mutually exclusive. For example, certain features, structures, and characteristics described herein may be implemented in other embodiments without departing from the spirit and scope of the invention in connection with an embodiment. It is also to be understood that the position or arrangement of the individual components within each disclosed embodiment may be varied without departing from the spirit and scope of the invention. The following detailed description, therefore, is not to be taken in a limiting sense, and the scope of the present invention, if properly described, is defined only by the appended claims, along with the full range of equivalents to which such claims are entitled. In the drawings, like reference numerals refer to the same or similar functions throughout the several aspects, and length, area, thickness, and the like may be exaggerated for convenience.

DETAILED DESCRIPTION Hereinafter, preferred embodiments of the present invention will be described in detail with reference to the accompanying drawings so that those skilled in the art can easily implement the present invention.

For imprinting  Pressurization

The imprinting pressurization apparatus 100 or 200 described below is a device for providing the stamp 50 or the substrate 40 with a pressure for imprinting the pattern formed on the stamp 50 on the substrate 40.

The stamp 50 of the present invention may mean a stamp 50 that is configured to have a predetermined pattern and is used to imprint the pattern onto the substrate 40. The stamp 50 may be manufactured using silicon, glass, metal, etc., but preferably, may be manufactured using a polymer such as PDMS, h-PDMS, PVC, or the like.

In addition, the substrate 40 of the present invention may mean a substrate that requires an imprinting process. The substrate 40 may generally mean a silicon substrate, but in some cases, may also mean a gallium arsenide substrate, a quartz substrate, an alumina substrate, or the like. In addition, the substrate 40 of the present invention may mean that a certain layer such as a polymer layer (not shown) is formed on a substrate generally used in a semiconductor process such as a silicon substrate.

4 is a view showing the configuration of the imprinting pressing device 100 according to the first embodiment of the present invention.

Referring to FIG. 4, it can be seen that the imprinting pressing device 100 according to the first embodiment of the present invention includes an elastic plate 110 and an inner space 120.

First, the elastic plate 110 may be configured as a portion of the inner wall of the imprinting pressing device 100 may serve to compress the stamp 50 and the substrate 40. More specifically, the elastic plate 110 may be elastically deformed by being pressurized by a fluid supplied from the outside, and the stamp 50 and the substrate 40 may be compressed by such elastic deformation. The elastic plate 110 may be made of an elastic polymer material such as polydimethylsiloxane (polydimethylsiloxane) or silicone rubber.

As shown in FIG. 4, the extension 130 may be connected to both ends of the elastic body 110. The extension 130 may extend from both ends of the elastic body plate 110 to protrude to both ends of the imprinting pressing device 100. The configuration of the extension 130 will be described later.

Next, the internal space 120 may serve as a space in which fluid may be supplied from the outside. The internal space 120 may be sealed so that the supplied fluid does not escape to the outside. As the fluid is continuously supplied to the sealed inner space 120, the elastic plate 110 may be pressurized by the fluid. As the elastic plate 110 is pressed, the elastic plate 110 is deformed, and the pattern of the stamp 50 can be imprinted onto the substrate 40. A process in which the fluid is supplied to the internal space 120 and the pattern of the stamp 50 is imprinted on the substrate 40 will be described in detail later with reference to FIG. 7.

Referring to FIG. 4, it can be seen that the internal space 120 is divided into a plurality of unit spaces 122 that are blocked from each other. Here, the unit space 122 may be defined as one closed independent space for pressing the local position of the elastic plate 110. In other words, the local position of the elastic plate 110 may be pressed by the fluid supplied to the enclosed unit space 122.

5 is a view schematically showing a state of the imprinting pressurization device 100 of FIG. 4 as viewed from the top. Referring to FIG. 5, it can be seen that the internal space 120 having a disc shape is divided into three unit spaces 122 having concentric circles having different sizes.

The shape in which one internal space 120 is divided into a plurality of unit spaces 122 may vary. FIG. 6 is a diagram schematically illustrating various forms in which one internal space 120a, 120b, 120c is divided into a plurality of unit spaces 122a, 122b, 122c.

First, in FIG. 6A, an inner space 120a having a disc shape is divided into a unit space 122a positioned at the center and four unit spaces 122a surrounding the unit space 122a. have.

Next, in FIG. 6B, the quadrangular internal space 120b is divided into a plurality of concentric rectangular unit spaces 122b.

Next, in FIG. 6C, the quadrangular internal space 120c is divided into four identical rectangular shape unit spaces 122c and the four unit spaces 122c are arranged in a line. It shows the appearance.

Of course, the form in which the internal space 120 is divided into a plurality of unit spaces 122 is not limited to those illustrated in FIGS. 5 and 6 and may be variously changed according to the purpose of the present invention.

Meanwhile, referring to FIGS. 4 and 5, it can be seen that the partition member 150 serves as a criterion for dividing the plurality of unit spaces 122. Such a partition member 150 will be described later in detail. would.

Next, referring back to FIG. 4, it can be seen that the fluid supply unit 140 is installed in each of the plurality of unit spaces 122. The fluid supply unit 140 may perform a function of supplying a fluid existing outside to the unit space 122. As described above, the local position of the elastic plate 110 may be pressed by the fluid supplied to the unit space 122.

As shown in FIG. 4, a valve 142 may be installed on the fluid supply unit 140. By using the valve 142, the operator may automatically or manually control the flow rate or pressure of the fluid supplied to the unit space 122.

In the present invention, as described above, the internal space 120 to which the fluid is supplied is divided into a plurality of unit spaces 122 that are separated from each other, and the fluid supply unit 140 is installed in each unit space 122. Features of the jacket.

According to the conventional imprinting pressurization apparatus, there is a problem in that the stamp or the substrate cannot be uniformly pressurized by various environmental factors such as inclination with the ground, temperature, humidity, and fluid density. For example, there is a problem in that a higher pressure is applied to the central portion than the edge of the stamp or the substrate because the fluid supplied into the pressurizing apparatus for imprinting is biased to the central portion due to various environmental factors.

However, according to the present invention, the above-described problems occur by dividing the internal space 120 into which the fluid is supplied into a plurality of unit spaces 122 that are blocked from each other, and supplying the fluid to each of the divided unit spaces 122. You will not. In other words, since the plurality of unit spaces 122 are blocked from each other, the supplied fluid is not biased to a specific region of the internal space 120. Accordingly. The entire surface of the elastic plate 110 may be uniformly pressed, and further, the pattern of the stamp 50 may be effectively imprinted on the substrate 40.

On the other hand, it is necessary to apply a predetermined heat to the substrate 40 during the imprinting process. Of course, the heater 320 to be described later may be used to apply heat to the substrate 40, but a method of heating the fluid in advance and supplying the fluid in the heated state to the internal space 120 may be used. Accordingly, since the heat of the heated fluid can be supplied to the substrate 40 via the elastic plate 110, the configuration of the imprinting apparatus (10, 20, 30) can be achieved more simplified. .

In addition, as described above, a fluid may flow into the internal space 120, and the fluid may be at least one of a liquid and a gas. Unlike using only gas, there is an advantage in that a high pressure can be secured even in a small amount when using a liquid together.

7 is a view showing the operation of the imprinting pressing device 100 according to the first embodiment of the present invention.

Referring to FIG. 7, as a certain amount of fluid is supplied to each unit space 122 of the imprinting pressurizing device 100, the elastic plate 110 is elastically deformed and the substrate 40 and the stamp 50 ), You can see how it is compressed. By the pressing process, the pattern of the stamp 50 may be imprinted onto the substrate 40. At this time, since the fluid is not biased to a specific region of the internal space 120, the front surface of the elastic plate 110 can be uniformly pressed. Furthermore, the pattern of the stamp 50 can be effectively imprinted on the substrate 40.

On the other hand, in some cases, the imprinting pressurizing device 100 may operate to supply the fluid to each unit space 122 based on a predetermined order. More specifically, the imprinting pressurizing device 100 may operate to supply fluid from the unit space 122 located at the center of the plurality of unit spaces 122 to the unit space 122 located at the edge thereof.

8 is a view schematically showing a process in which the pressing device 100 for imprinting according to the first embodiment of the present invention operates in a predetermined order.

Referring to (a) to (c) of Figure 8, as the fluid is first supplied to the unit space 122 located in the center, the central portion of the elastic plate 110 is pressed, and then the unit space 122 located at the edge As the fluid is supplied, the edge portion of the elastic plate 110 may be pressed.

As described above, in the present invention, the elastic plate 110 and the substrate 40 are bubbled by operating the imprinting pressurizing device 100 so that the fluid is supplied from the unit space 122 located at the center to the unit space 122 located at the edge. It is possible to achieve an effect that can be completely pressed without.

This will be described in more detail as follows.

According to the conventional imprinting pressurization device, since the fluid is supplied to the entire inner space of the imprinting pressurization device using the fluid supply unit installed on one side, there is a problem that bubbles are generated between the elastic plate and the substrate. For example, when the fluid supplied to the entire inner space of the imprinting press device presses the edge portion of the elastic plate first and then presses the center portion of the elastic plate, at the center between the elastic plate 110 and the stamp 50, There was a problem that bubbles are generated.

However, in the imprinting pressurization device 100 of the present invention, the internal space 120 to which the fluid is supplied is divided into a plurality of unit spaces 122 that are blocked from each other, and the fluid supply unit 140 in each unit space 122. Since a configuration is adopted, the above problems can be prevented by actively using such a configuration. In other words, as shown in (a) to (c) of FIG. 8, first, the fluid is supplied to the central unit space 122 to push the bubbles existing at the center to the edge, and then the unit space located at the edge. By supplying the fluid to 122 to push the bubbles present at the edge to the outside, the effect that the elastic plate 110 and the stamp 50 can be completely compressed without bubbles can be achieved.

Meanwhile, referring back to FIGS. 4 and 5, it can be seen that the plurality of unit spaces 122 are separated from each other by the partition member 150. The partition member 150 may perform a function of blocking a plurality of unit spaces 122. Accordingly, each unit space 122 may function as one enclosed space, and further, the local position of the elastic plate 110 may be pressed by the fluid supplied to the enclosed unit space 122. do.

Although not shown, a sealing O-ring (not shown) may be further disposed at a portion where the partition member 150 and the elastic plate 110 are connected. If the sealing O-ring is not disposed, there is a fear that the fluid supplied to the central unit space 122 may leak to the neighboring unit space 122.

On the other hand, in order to maximize the effect according to the above-described operation (operation of supplying fluid in the order of the unit space 122 located at the edge from the unit space 122 located at the center), the central unit space 122 is blocked The shortest length of the partition member 150 can be employed in the imprinting pressurizing device 100 of the present invention. Hereinafter, referring to FIGS. 9 and 10, the imprinting pressurizing device 100 having such a configuration will be described.

9 is a view schematically showing a state of the imprinting pressurizing device 200 according to the second embodiment of the present invention.

The second embodiment of the present invention is a modification of the first embodiment of the present invention will be omitted for the same or corresponding configuration as the first embodiment of the present invention and will be described only for the configuration added or modified Shall be.

9, among the partition members 250 of the imprinting pressurization device 200 according to the second embodiment of the present invention, the length of the partition member 250 for blocking the unit space 222 located at the center is You can see the shortest one. Accordingly, it can be confirmed that the elastic body 210 is deformed into a convex shape before the fluid is supplied to the unit space 222.

FIG. 10 is a view sequentially showing a state in which the elastic plate 210 is pressed using the imprinting pressing device 200 according to the second embodiment of the present invention.

First, referring to FIGS. 10A to 10C, in the fluid supply to the internal space 220 of the imprinting pressurization device 200, a unit located at an edge from a centrally located unit space 222. It can be seen that the fluid is supplied in the space 222 order. As described above with respect to the process of operating the imprinting pressurizing device 200 based on a predetermined order as described above will be omitted.

At this time, if all of the partition member 250 is the same length, since the central portion of the elastic plate 210 is first put down as the fluid is first supplied to the central unit space 222, all the unit space Even when the same amount of fluid is supplied to the 222, a problem may occur in which pressure is concentrated at the center portion of the elastic plate 210.

However, the imprinting pressurization device 200 according to the second embodiment of the present invention has the shortest length of the partition member 250 for blocking the unit space 222 located at the center, thereby effectively preventing the above-mentioned problems. Will be. In other words, since the elastic plate 210 is supplied with the fluid in a convex form, it is possible to minimize the concentration of the fluid to the central portion of the elastic plate 210. Therefore, it is possible to achieve the effect that the entire area of the elastic plate 210 can be uniformly pressed.

As a result, the shortest length of the partition member 250 blocking the unit space 222 located at the center, and by supplying fluid from the unit space 222 located at the center to the unit space 222 located at the edge In addition, it can be seen that the elastic plate 210 and the stamp 50 can be completely contacted without bubbles, as well as the effect that the entire surface of the elastic plate 210 can be uniformly pressed.

Meanwhile, in order to simplify the structure and to facilitate manufacturing, one internal space 120 may be divided into two unit spaces 124 and 126 including the elastic plates 114 and 116, respectively. Hereinafter, referring to FIGS. 11 and 12, an imprinting pressurizing device 260 having such a configuration will be described.

11 is a view showing a state of the imprinting pressing device 260 according to the third embodiment of the present invention.

The third embodiment of the present invention is a modification of the first embodiment of the present invention will be omitted for the same or corresponding configuration as the first embodiment of the present invention will be described only for the configuration added or modified Shall be.

Referring to FIG. 11, the internal space 120 of the imprinting pressurizing device 260 according to the third embodiment of the present invention is divided into a first unit space 124 and a second unit space 126 that are blocked from each other. You can see how it looks. In addition, it may be further confirmed that the second unit space 126 is disposed at the inner center of the first unit space 124. Of course, the fluid supply unit 140 for supplying a fluid may be installed in the first unit space 124 and the second unit space 126.

11, it can be seen that both the first unit space 124 and the second unit space 126 include elastic plates 114 and 116. More specifically, the first unit space 124 has a first elastic body 114 is disposed below the first unit space 124, the second unit space 126 is a lower portion of the second unit space 126 It can be seen that the second elastic plate 116 is disposed in the.

At this time, when the fluid is supplied to the fluid supply unit 140 installed in the second unit space 126, the first elastic body plate 114 may be pressed by the second elastic body plate 116. Here, since the second unit space 126 including the second elastic plate 116 is disposed at the inner center of the first unit space 124, the first elastic plate 114 is formed by the second elastic plate 116. As the pressure is applied, pressure may be applied to the central portion of the first elastic body 114.

12 is a view showing a process in which the imprinting pressurizing device 260 according to the third embodiment of the present invention operates in a certain order.

First, FIG. 12A shows a state in which no fluid is supplied to the imprinting pressurizing device 260 according to the third embodiment of the present invention. At this time, as shown in FIG. 12A, the first elastic body plate 114 and the second elastic body plate 116 may be in contact with each other.

Next, referring to FIG. 12B, a fluid may be supplied to the second unit space 126. When the fluid is supplied to the second unit space 126, the center portion of the first elastic plate 114 may be pressed while the second elastic plate 116 is pressed by the fluid.

Next, referring to FIG. 12C, the fluid may be supplied together to the first unit space 124 and the second unit space 126. Accordingly, not only the center portion but also the edge portion of the first elastic plate 114 may be pressed together.

The imprinting pressurizing device 260 according to the third embodiment of the present invention having the above configuration has a much simpler structure than the imprinting pressurizing device 100 according to the first embodiment of the present invention. Accordingly, when manufacturing the imprinting pressurizing device 260 in the above configuration, there is an effect that can reduce the manufacturing cost of the pressurizing device for printing 260.

In addition, the imprinting pressurization device 260 according to the third embodiment of the present invention, while having a simple structure, the basic configuration of the imprinting pressurization device 100 according to the first embodiment of the present invention Since it is included, the pressure can be uniformly applied to the substrate 40, it is possible to achieve the effect that the first elastic plate 114 and the substrate 40 can be completely contacted without bubbles.

Imprinting  Device

The imprinting apparatuses 10, 20, and 30 of the present invention apply a high pressure to the substrate 40 or the stamp 50 with the pressing apparatus 100 to imprint the pattern formed on the stamp 50 onto the substrate 40. It is an apparatus for doing so.

13 is a view showing the configuration of the imprinting apparatus 10 according to the first embodiment of the present invention.

Referring to FIG. 13, it can be seen that the imprinting apparatus 10 according to the first embodiment of the present invention may include a pressing device 100 and a support plate 300.

First, since the configuration and function of the imprinting pressurization device 100 described above may be equally applied to the pressurization device 100 employed in the imprinting device 10, a detailed description of the pressurization device 100 is omitted. I'll do it.

Next, the support plate 300 may perform a function of supporting the stamp 50 and the substrate 40 in a stacked state. In order to perform this function smoothly, the upper surface of the support plate 300 is preferably configured to be flat. In addition, the shape of the support plate 300 may be a disk shape, but is not necessarily limited thereto. In addition, the support plate 300 is preferably made of a material that can easily withstand high pressure, such as quartz.

On the other hand, referring to Figure 13, it can be seen that the support plate 300 may include a connection portion 310 formed on the support plate 300.

14 is a view showing a state of the connecting portion 310 formed on the support plate 300.

The connection portion 310 may perform a function of connecting the pressing device 100 and the support plate 300. The components of the pressing device 100 connected to the support plate 300 by the connection part 310 may be the connection part 310. In this sense, it will be assumed and described below that the supporting plate 300 and the connecting portion 310 are connected by the connecting portion 310.

Coupling means (not shown) for physically coupling with the extension 130 may be further disposed at one end of the connecting portion 310 to easily connect the extension 130 and the support plate 300. Of course, a predetermined groove (not shown) may be formed in the extension 130 so that the coupling means may be inserted. By the coupling means and the grooves such that the extension 130 and the support plate 300 can be firmly fixed in a connected state.

Referring to Figure 14, it can be seen that the connecting portion 310 is configured in a ring shape. As such, configuring the connection part 310 in a ring shape is connected to the connection part 310, the support plate 300, the extension part 130 and the elastic body in a state in which the extension part 130 and the support plate 300 are connected by the connection part 310. This is to accommodate the stamp 50 and the substrate 40 in the space (hereinafter, the imprinting space 400) generated by the plate 110. Therefore, if the stamp 50 and the substrate 40 can be smoothly performed in the imprinting space 400, the shape of the connecting portion 310 is not limited to a ring shape.

On the other hand, the connecting portion 310 may be made of a material capable of performing the buffer operation. Accordingly, the pressing unit 100 can be easily sealed while pressing the connecting unit 310 in a state in which the extension 130 of the pressing device 100 is connected to the connecting unit 310. In addition, the elastic plate 110 is deformed so that the connection portion 310 is not disturbed while the substrate 40 and the stamp 50 are compressed.

The imprinting space 400 described above may serve as a space in which a process of imprinting the pattern of the stamp 50 on the substrate 40 is performed. Therefore, the imprinting space 400 may be configured to accommodate the stamp 50 and the substrate 40 in the stacked state. In addition, the imprinting space 400 is configured to be sealed from the outside, thereby preventing foreign matter from entering the substrate 40 disposed in the imprinting space 400 during the imprinting process. do.

Referring to FIG. 13, it can be seen that the imprinting space 400 is connected to the vacuum pump 500. When the imprinting space 400 is formed in a vacuum state using the vacuum pump 500, the imprinting process using the pressurizing device 100 may be more smoothly performed. More specifically, when the imprinting space 400 is formed in a vacuum state by using the vacuum pump 500, since the pressure difference between the internal space 120 and the imprinting space 400 of the pressurizing device 100 increases. Even when a small amount of fluid is supplied to the internal space 120 of the pressurizing device 100, a high pressure can be obtained.

The position where the vacuum pump 500 is installed is not particularly limited but may be preferably installed through the support plate 300. A sealing O-ring (not shown) may be further disposed near the support plate 300 and the vacuum pump 500 so that the vacuum state of the imprinting space 400 may be continuously maintained.

In addition, referring to FIG. 10, the imprinting apparatus 10 according to the first embodiment of the present invention may further include a fixing part 600. The fixing part 600 may perform a function of fixing the support plate 300 and the extension part 130 so that the extension part 130 and the support plate 300 are maintained by the connection part 310. .

15 is a view showing the configuration of the fixing part 600 according to the first embodiment of the present invention.

Referring to FIG. 15, it can be seen that the fixing part 600 according to the first embodiment of the present invention may include a first fixing body 610 and a second fixing body 620.

The first fixture 610 and the second fixture 620 may be configured to face each other with the support plate 300 and the extension 130 interposed therebetween. As the first fixture 610 and the second fixture 620 are compressed in the direction of the support plate 300 and the extension part 130, the support plate 300 and the extension part 130 can be fixed and the substrate ( 40 can be easily pressed to the stamp (50).

In addition, although not shown, the coupling means is configured to penetrate the first fixture 610 and the second fixture 620 in a state where the first fixture 610 and the second fixture 620 face each other. Can be. The coupling means may be composed of a screw to control the degree of fixation by the first fixture 610 and the second fixture 620.

Meanwhile, as described above, a predetermined heat needs to be applied to the substrate 40 during the imprinting process. To this end, a method of supplying the fluid in a heated state to the pressurizing device 100 may be used. In some cases, the heater 320 may be used to directly apply heat to the substrate 40.

The heater 320 may be installed at any position where it is easy to apply heat to the substrate 40, but as shown in FIG. 13, preferably, the heater 320 may be installed inside the support plate 300. The type of the heater 320 is not particularly limited and may be heat applied to the substrate 40 (for example, a halogen lamp of tungsten or a general kanthal heater). It can be preferably employed as the heater 320.

After the pattern of the stamp 50 is imprinted onto the substrate 40, the substrate 40 needs to be cooled below a predetermined temperature. For this purpose, although not shown in FIG. The imprinting apparatus 10 of the present invention may include a cooling unit (not shown) for cooling the substrate 40. The cooling unit may be installed at any position where it is easy to cool the substrate 40, but may be preferably installed inside the support plate 300. As the cooling method of the cooling unit, water cooling or air cooling may be used without limitation.

Hereinafter, an operation process of the imprinting apparatus 10 according to the first embodiment of the present invention having the above configuration will be described with reference to FIG. 16.

First, referring to FIG. 16A, the support plate 300 may be prepared in a state in which the stamp 50 and the substrate 40 are stacked. In FIG. 16A, the stamp 50 is stacked on the substrate 40. However, this is not necessarily the case, and the substrate 40 may be stacked on the stamp 50 to perform an imprinting process. However, in the following description, it will be assumed and described that the imprinting process is performed in a state in which the stamp 50 is stacked on the substrate 40.

Next, referring to FIG. 16B, the pressing device 100 may be lowered to allow the extension 130 of the pressing device 100 to be connected to the support plate 300 by the connection part 310. Accordingly, the imprinting space 400 generated by the connection part 310, the support plate 300, the extension part 130, and the elastic plate 110 may be sealed. At this time, the coupling means of the connection part 310 may be coupled to the groove formed in the extension part 130 so that the support plate 300 and the elastic plate 110 may be fixed. In addition, the fixing part 600 is coupled to the upper part of the extension part 130 and the lower part of the support plate 300 so that the support plate 300 and the extension part 130 may be further fixed.

Next, referring to FIG. 16C, the fluid may be supplied to the unit space 122 of the pressurizing device 100 while forming the inside of the imprinting space 400 in a vacuum state by using the vacuum pump 500. Can be. The supply of fluid may be performed in the order of the unit space 122 located at the center of the unit space 122 located at the edge. Accordingly, the elastic plate 110 is elastically deformed from the center to press the substrate 40, the pattern of the stamp 50 is imprinted on the substrate 40. At this time, the heat of the heater 320 may be applied to the substrate 40 in order to easily imprint the pattern of the stamp 50 on the substrate 40. After the pattern of the stamp 50 is completely imprinted onto the substrate 40, the cooling unit may cool the substrate 40 below a predetermined temperature.

Meanwhile, when the pattern of the stamp 50 is transferred to the substrate 40, only pressure and heat may be used, but in some cases, ultraviolet or infrared rays may be used. As such, the method using ultraviolet rays or infrared rays may be mainly used when the polymer layer is formed on the substrate 40. Hereinafter, a configuration of the imprinting apparatus 20 using ultraviolet or infrared rays will be described with reference to FIG. 17.

17 is a view showing the configuration of an imprinting apparatus 20 according to a second embodiment of the present invention.

The second embodiment of the present invention is a modification of the first embodiment of the present invention will be omitted for the same or corresponding configuration as the first embodiment of the present invention and will be described only for the configuration added or modified Shall be.

Referring to FIG. 17, the imprinting apparatus 20 according to the second embodiment of the present invention may include a light transmission means 700.

The light transmitting means 700 may perform a function of irradiating ultraviolet or infrared rays to the substrate 40. As the light transmitting means 700, a known light lamp for irradiating ultraviolet rays or infrared rays may be used without limitation. As shown in FIG. 17, the light transmission means 700 may be installed under the support plate 300.

When using the light transmitting means 700 for irradiating infrared rays it is possible to achieve the effect of transferring heat as well as light to the substrate 40. Therefore, the light transmitting means 700 for irradiating infrared rays to the substrate 40 or the light transmitting means for irradiating infrared rays and ultraviolet rays together on the substrate 40 rather than the light transmitting means 700 for simply irradiating the ultraviolet rays to the substrate 40. It may be more advantageous to use 700.

The support plate 300 may be configured to transmit ultraviolet rays or infrared rays so that ultraviolet rays or infrared rays irradiated from the light transmitting means 700 may easily reach the substrate 40. For example, the support plate 300 may be selected and configured as a transparent material against ultraviolet rays or infrared rays, such as quartz. In addition, as shown in FIG. 17, a portion of the support plate 300 contacting the stamp 50 may be configured as a window 330 for transmitting ultraviolet rays or infrared rays.

Although not shown in FIG. 17, a protector may be further installed below the support plate 300. The protector may function to protect the support plate 300 from an external impact. The protector may be fitted and fixed to the fixing part 600, and may be made of quartz so as to transmit ultraviolet rays or infrared rays.

In addition, the stamp 50 may be made of a material transparent to the ultraviolet or infrared ray so that the ultraviolet or infrared rays irradiated from the light transmitting means 700 can easily reach the substrate 40. For example, the stamp 50 may be made of a polymer such as PDMS, h-PDMS, PVC that is transparent to ultraviolet or infrared light.

Hereinafter, an operation process of the imprinting apparatus 20 according to the second embodiment of the present invention having the above configuration will be described.

First, the stamp 50 and the substrate 40 may be prepared on the support plate 300. At this time, the substrate 40 may be prepared in a stacked state on the stamp 50. In addition, the substrate 40 may include a polymer layer composed of a polymer.

Next, the pressing device 100 can be lowered to allow the extension 130 of the pressing device 100 to be connected to the support plate 300 by the connection part 310. Accordingly, the imprinting space 400 generated by the connection part 310, the support plate 300, the extension part 130, and the elastic plate 110 may be sealed. At this time, the coupling means of the connection part 310 may be coupled to the groove formed in the extension part 130 so that the support plate 300 and the elastic plate 110 may be fixed. In addition, the fixing part 600 is coupled to the upper part of the extension part 130 and the lower part of the support plate 300 so that the support plate 300 and the extension part 130 may be further fixed.

Next, the fluid may be supplied to the unit space 122 of the pressurizing device 100 while forming the inside of the imprinting space 400 in a vacuum state by using the vacuum pump 500. The supply of fluid may be performed in the order of the unit space 122 located at the center of the unit space 122 located at the edge. Accordingly, the elastic plate 110 is elastically deformed from the center to press the substrate 40, the pattern of the stamp 50 is imprinted on the substrate 40. At this time, in order to cure the polymer layer, the light transmission means 700 may irradiate the substrate 40 with ultraviolet or infrared rays toward the substrate 40. The irradiated ultraviolet rays or infrared rays may pass through the protector and the ultraviolet or infrared rays transmitting window 330, and then may pass through the transparent stamp 50 to reach the substrate 40. The polymer layer formed on the substrate 40 by such ultraviolet or infrared rays may be cured. After the pattern of the stamp 50 is completely imprinted onto the substrate 40, the substrate 40 may be cooled to a temperature below a predetermined temperature by using a cooling unit.

On the other hand, when the pattern of the stamp 50 is imprinted onto the substrate 40, the alignment state of the substrate 40 and the stamp 50 accommodated in the imprinting space 400 needs to be maintained accurately. For example, the substrate 40 and the stamp 50 need to be accurately positioned and aligned in the central portion of the support plate 300. In this sense, the imprinting apparatus of the present invention may be configured to include a separate position alignment unit 800, hereinafter with reference to FIG. 18 with respect to the configuration of the imprinting apparatus including a position alignment unit 800 Let's look at it.

18 is a view showing the configuration of an imprinting apparatus 30 according to the third embodiment of the present invention.

The third embodiment of the present invention is a modification of the first embodiment of the present invention, the description of the same or corresponding components as the third embodiment of the present invention will be omitted, and only the configuration added or modified will be described. Shall be.

Referring to FIG. 18, it can be seen that the imprinting apparatus 30 according to the third embodiment of the present invention may include a position alignment unit 800.

The position alignment unit 800 may perform a function of controlling the position of the substrate 40 and the stamp 50 so that the alignment state of the substrate 40 and the stamp 50 can be maintained. In order to control the positions of the substrate 40 and the stamp 50, the position alignment unit 800 may use a magnetic force.

Referring to FIG. 18, the position aligning unit 800 may be configured to include a first magnetic body 810 and a second magnetic body 820. The first magnetic body 810 and the second magnetic body 820 may precisely control the alignment state of the stamp 50 and the substrate 40 by using mutual induction of the magnetic field.

As shown in FIG. 18, the first magnetic body 810 may be installed under the support plate 300, and the second magnetic body 820 may be installed at both ends of the stamp 50. The second magnetic body 820 may be coupled to the outer circumferential surface of the stamp 50 by using an adhesive. In some cases, the second magnetic body 820 may be formed in a thin film form on the upper or lower surface of the stamp 50.

 The first magnetic body 810 and the second magnetic body 820 having such a configuration may move the stamp 50 in a horizontal direction by mutually inducing a mutual action. Accordingly, the stamp 50 is moved and fixed to a position capable of accurately performing imprinting, and the substrate 40 in contact with the stamp 50 is also moved and fixed to a position capable of accurately performing imprinting. It becomes possible.

Hereinafter, an operation process of the imprinting apparatus 30 according to the third embodiment of the present invention having the above configuration will be described.

First, the substrate 40 and the stamp 50 may be prepared in a state in which the supporting plate 300 is laminated in order. At this time, the first magnetic body 810 and the second magnetic body 820 may move the stamp 50 in a horizontal direction by mutually inducing a mutual action. Accordingly, the position of the stamp 50 is moved and fixed to a position that can accurately perform imprinting, and the substrate 40 in contact with the stamp 50 also moves to a position that can accurately perform imprinting. Can be fixed.

Next, the pressing device 100 can be lowered to allow the extension 130 of the pressing device 100 to be connected to the support plate 300 by the connection part 310. Accordingly, the imprinting space 400 generated by the connection part 310, the support plate 300, the extension part 130, and the elastic plate 110 may be sealed. At this time, the coupling means of the connection part 310 may be coupled to the groove formed in the extension part 130 so that the support plate 300 and the elastic plate 110 may be fixed. In addition, the fixing part 600 is coupled to the upper part of the extension part 130 and the lower part of the support plate 300 so that the support plate 300 and the extension part 130 may be further fixed.

Next, the fluid may be supplied to the unit space 122 of the pressurizing device 100 while forming the inside of the imprinting space 400 in a vacuum state by using the vacuum pump 500. The supply of fluid may be performed in the order of the unit space 122 located at the center of the unit space 122 located at the edge. Accordingly, the elastic plate 110 is elastically deformed from the center to press the substrate 40, the pattern of the stamp 50 is imprinted on the substrate 40. At this time, the heat of the heater 320 may be applied to the substrate 40 in order to easily imprint the pattern of the stamp 50 on the substrate 40. After the pattern of the stamp 50 is completely imprinted onto the substrate 40, the cooling unit may cool the substrate 40 below a predetermined temperature.

In the case of performing the imprinting process using the imprinting apparatuses 10, 20, and 30 according to the first, second and third embodiments of the present invention described above, the advantageous effects that have been described in relation to the pressurizing apparatus 100 The same can be achieved. In other words, it is possible to achieve the effect of uniformly pressing the entire surface of the elastic plate 110, it is possible to achieve the effect of the elastic plate 110 and the stamp 50 is completely contacted without bubbles.

While the present invention has been particularly shown and described with reference to exemplary embodiments thereof, it is clearly understood that the same is by way of illustration and example only and is not to be taken in conjunction with the present invention. Variations and changes are possible. Such modifications and variations are intended to fall within the scope of the invention and the appended claims.

10, 20, 30: imprinting device
40: substrate
50: stamp
100, 200, 260: pressurization device
110: elastic body plate
114: first elastic body plate
116: second elastic body plate
120: interior space
122: unit space
124: first unit space
126: second unit space
130: extension
140: fluid supply
142: valve
150: partition member
300: support plate
310: connection
320: heater
330: Windows
400: imprinting space
500: vacuum pump
600: fixed part
610: first fixture
620: second fixture
700: light transmission means
810: first magnetic material
820: second magnetic material

Claims (28)

An elastic plate and an enclosed interior space,
When the fluid is supplied to the internal space and the elastic plate is pressed, the pattern of the stamp is imprinted on the substrate.
The internal space is divided into a plurality of unit spaces blocked from each other,
A fluid supply unit for supplying the fluid is installed in each of the unit spaces,
The plurality of unit spaces are blocked from each other by the partition member, the shortest length of the partition member for blocking the unit space located in the center of the plurality of unit spaces, the pressing device for imprinting. An elastic plate and an enclosed interior space,
When the fluid is supplied to the internal space and the elastic plate is pressed, the pattern of the stamp is imprinted on the substrate.
The internal space is divided into a plurality of unit spaces blocked from each other,
A fluid supply unit for supplying the fluid is installed in each of the unit spaces,
The internal space is divided into a first unit space that is blocked from each other and a second unit space disposed in the center of the first unit space,
The first unit space includes a first elastic body plate, and the second unit space includes a second elastic body plate,
When the fluid is supplied to the second unit space, the central portion of the first elastic body plate is pressed by the second elastic body plate, the pressing device for imprinting. The method according to claim 1 or 2,
And the fluid is supplied to the internal space in a heated state. The method according to claim 1 or 2,
And the fluid is at least one of a liquid or a gas. The method according to claim 1 or 2,
Impressing device for imprinting is operated so that the fluid is supplied in the order of the unit space located at the edge in the unit space located in the center of the plurality of unit spaces. delete A pressing device comprising an elastic body plate and a closed inner space; And a support plate supporting the stamp and the substrate having the predetermined pattern stacked thereon,
The pattern of the stamp is imprinted on the substrate by supplying a fluid into the pressing device to pressurize the elastic plate.
The internal space is divided into a plurality of unit spaces blocked from each other,
A fluid supply unit for supplying the fluid is installed in each of the unit spaces,
The plurality of unit spaces are blocked from each other by the partition member, the shortest length of the partition member for blocking the unit space located in the center of the plurality of unit printing, the imprinting apparatus. A pressing device comprising an elastic body plate and a closed inner space; And a support plate supporting the stamp and the substrate having the predetermined pattern stacked thereon,
The pattern of the stamp is imprinted on the substrate by supplying a fluid into the pressing device to pressurize the elastic plate.
The internal space is divided into a plurality of unit spaces blocked from each other,
A fluid supply unit for supplying the fluid is installed in each of the unit spaces,
The internal space is divided into a first unit space that is blocked from each other and a second unit space disposed in the center of the first unit space,
The first unit space includes a first elastic body plate, and the second unit space includes a second elastic body plate,
And a central portion of the first elastic body plate is pressed by the second elastic body plate when the fluid is supplied to the second unit space. The method according to claim 7 or 8,
And the fluid is supplied to the internal space in a heated state. The method according to claim 7 or 8,
And the fluid is at least one of a liquid or a gas. The method according to claim 7 or 8,
Imprinting apparatus operative to supply the fluid in the order of the unit space located at the edge of the unit space located in the center of the plurality of unit spaces. delete The method according to claim 7 or 8,
The urging device includes an extension, the extension extending from both ends of the elastic plate and protruding from both ends of the urging device;
The support plate includes a connecting portion connecting the extension portion and the support plate,
The imprinting space generated by the extension part, the elastic plate, the support plate and the connection part in a state in which the extension part and the support plate are connected by the connection part may accommodate the stamp and the substrate and may be sealed from the outside. Imprinting device. The method of claim 13,
An imprinting apparatus, further comprising a vacuum pump capable of maintaining the imprinting space in a vacuum state. The method of claim 14,
The vacuum pump is installed through the support plate, the imprinting apparatus. The method of claim 13,
Imprinting apparatus further comprises a fixing part for fixing the support plate and the extension so that the state in which the support plate and the elastic plate is connected by the connecting portion. The method according to claim 7 or 8,
And the support plate comprises a heater for heating the substrate. The method according to claim 7 or 8,
Imprinting apparatus further comprising a light transmitting means for irradiating ultraviolet or infrared rays toward the substrate. The method of claim 18,
The support plate, the imprinting apparatus comprising a window for transmitting ultraviolet or infrared rays. The method of claim 18,
The material of the stamp is transparent to the ultraviolet or infrared, the imprinting apparatus. The method according to claim 7 or 8,
The support plate, the imprinting apparatus comprising a cooling unit for cooling the substrate. The method according to claim 7 or 8,
Imprinting apparatus further comprising a position alignment portion for controlling the position alignment state of the stamp and the substrate. An elastic printing plate and an enclosed inner space, wherein the inner space is divided into a plurality of unit spaces which are blocked from each other, and a fluid supply unit for supplying a fluid is installed in each of the unit spaces by using an imprinting pressurizing device. An imprinting method of imprinting a pattern of a stamp on a substrate by supplying a fluid to each of the unit space to press the elastic plate,
The plurality of unit spaces are blocked from each other by the partition member, the shortest length of the partition member for blocking the unit space located in the center of the plurality of unit spaces, the imprinting method. An elastic printing plate and an enclosed inner space, wherein the inner space is divided into a plurality of unit spaces which are blocked from each other, and a fluid supply unit for supplying a fluid is installed in each of the unit spaces by using an imprinting pressurizing device. An imprinting method of imprinting a pattern of a stamp on a substrate by supplying a fluid to each of the unit space to press the elastic plate,
The internal space is divided into a first unit space that is blocked from each other and a second unit space disposed in the center of the first unit space, wherein the first unit space includes a first elastic body plate, and the second unit space Includes a second elastic body plate, and when the fluid is supplied to the second unit space, the central portion of the first elastic body plate is pressed by the second elastic body plate. The method of claim 23 or 24,
And the fluid is supplied to the internal space in a heated state. The method of claim 23 or 24,
And the fluid is at least one of a liquid or a gas. The method of claim 23 or 24,
Imprinting method for supplying the fluid in the order of the unit space located at the edge in the unit space located in the center of the plurality of unit spaces. delete

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