WO2013035759A1 - Fluid pressure imprinting device provided with rigid stage, and pressurizing stage - Google Patents
Fluid pressure imprinting device provided with rigid stage, and pressurizing stage Download PDFInfo
- Publication number
- WO2013035759A1 WO2013035759A1 PCT/JP2012/072654 JP2012072654W WO2013035759A1 WO 2013035759 A1 WO2013035759 A1 WO 2013035759A1 JP 2012072654 W JP2012072654 W JP 2012072654W WO 2013035759 A1 WO2013035759 A1 WO 2013035759A1
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- pressurizing
- stage
- pressure
- mold
- molding
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B29—WORKING OF PLASTICS; WORKING OF SUBSTANCES IN A PLASTIC STATE IN GENERAL
- B29C—SHAPING OR JOINING OF PLASTICS; SHAPING OF MATERIAL IN A PLASTIC STATE, NOT OTHERWISE PROVIDED FOR; AFTER-TREATMENT OF THE SHAPED PRODUCTS, e.g. REPAIRING
- B29C59/00—Surface shaping of articles, e.g. embossing; Apparatus therefor
- B29C59/02—Surface shaping of articles, e.g. embossing; Apparatus therefor by mechanical means, e.g. pressing
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B29—WORKING OF PLASTICS; WORKING OF SUBSTANCES IN A PLASTIC STATE IN GENERAL
- B29C—SHAPING OR JOINING OF PLASTICS; SHAPING OF MATERIAL IN A PLASTIC STATE, NOT OTHERWISE PROVIDED FOR; AFTER-TREATMENT OF THE SHAPED PRODUCTS, e.g. REPAIRING
- B29C59/00—Surface shaping of articles, e.g. embossing; Apparatus therefor
- B29C59/02—Surface shaping of articles, e.g. embossing; Apparatus therefor by mechanical means, e.g. pressing
- B29C59/022—Surface shaping of articles, e.g. embossing; Apparatus therefor by mechanical means, e.g. pressing characterised by the disposition or the configuration, e.g. dimensions, of the embossments or the shaping tools therefor
- B29C2059/023—Microembossing
Definitions
- the present invention relates to a fluid pressure imprint apparatus including a rigid stage and a pressure stage.
- nanoimprint technology has attracted attention as a method for forming micro-order and nano-order ultrafine patterns.
- a mold having a fine pattern is pressed on a molding object such as a resin, and the pattern is transferred to the molding object using heat or light (for example, see Patent Document 1).
- an imprint apparatus that pressurizes a flexible mold or stage with fluid pressure is also considered (for example, see Patent Document 2).
- the flatness on the molding surface is very important in a subsequent process such as etching.
- an object of the present invention is to provide a fluid pressure imprint apparatus capable of improving the flatness of a molding surface and a stage used therefor.
- an imprint apparatus transfers a molding pattern of a mold onto a workpiece by fluid pressure in a pressurizing chamber, and is an additive that constitutes a part of the pressurizing chamber.
- a pressure receiving stage that supports the mold that receives the pressure of the pressure stage and the workpiece, and a pressure unit that adjusts the pressure of the fluid in the pressure chamber. It is characterized by that.
- a first recess for locking a part of the sealing member is formed on the pressurization chamber side of the pressurization stage, and the pressurization chamber housing is a portion facing the first recess.
- a second recess for locking a part of the sealing member is formed, and the sealing member can be made of a resin elastic member that engages with the first recess and the second recess. Further, it is preferable that an auxiliary elastic member for pressing the sealing member to the outside of the pressurizing chamber is disposed inside the first recess and the second recess.
- the pressurizing stage of the present invention constitutes a part of the pressurizing chamber together with the pressurizing chamber casing in an imprint apparatus that transfers a molding pattern of a mold to an object to be molded by fluid pressure in the pressurizing chamber.
- the sealing member can be a flexible film.
- the imprint apparatus of the present invention can average thickness unevenness by pressing a workpiece with a rigid member to move a part of the workpiece in the lateral direction by pressure. Therefore, the flatness of the molding surface can be improved.
- the imprint apparatus of the present invention transfers the molding pattern of the mold 1 to the molding object 2 by the fluid pressure in the pressurizing chamber 30 in the pressurizing unit 3, Between the pressurizing chamber casing 33 constituting a part of the pressurizing chamber 30, the rigid member 311 for pressurizing the mold 1 and the workpiece 2, and between the pressurizing chamber casing 33 and the rigid member 311.
- a pressure stage 31 having a sealing member 312 which is disposed and hermetically seals the pressure chamber 30; a pressure receiving stage 32 which supports the mold 1 and the workpiece 2 that have received pressure from the pressure stage 31;
- pressurizing means 35 for adjusting the pressure of the fluid.
- the mold 1 mainly means a film-shaped mold that is flexible with respect to the molding surface of the molding 2, and one end surface or both surfaces thereof (hereinafter referred to as molding surface). ) Having a predetermined pattern.
- a resin mold in which a predetermined pattern is produced on the molding surface using an imprint technique can be used.
- a mold made of a rigid body that is not flexible with respect to the molding surface of the molding 2 such as “metal such as nickel”, “ceramics”, “carbon material such as glassy carbon”. ”,“ Silicon ”and the like can also be applied.
- the pattern in this case can be formed by subjecting the molding surface to precision machining.
- the material and manufacturing method of the mold 1 are not limited to these as long as a fine pattern can be formed.
- the molding pattern formed on the mold 1 is not only a geometrical shape composed of irregularities, but also for transferring a predetermined surface state, such as a mirror surface transfer having a predetermined surface roughness, Also included are those for transferring an optical element such as a lens having a predetermined curved surface.
- the molding pattern is formed in various sizes such as the minimum width of the convex portion and the concave portion in the plane direction is 100 ⁇ m or less, 10 ⁇ m or less, 2 ⁇ m or less, 1 ⁇ m or less, 100 nm or less, 10 nm or less.
- dimensions in the depth direction are formed in various sizes such as 10 nm or more, 100 nm or more, 200 nm or more, 500 nm or more, 1 ⁇ m or more, 10 ⁇ m or more, 100 ⁇ m or more.
- the molded object 2 means a substrate or a film made of a resin, an inorganic compound, a metal, or the like, and the molded layer 21 is formed on the substrate or film. It doesn't matter.
- the shape of a to-be-molded surface is not limited to a plane.
- the surface to be molded may be a three-dimensional shape such as a curved surface like a lens.
- a fluid molding layer may be formed on the mold, and the molding layer may be bonded to the substrate side when the substrate and the mold are pressed.
- a photocurable resin, a thermosetting resin, a thermoplastic resin, or an inorganic polymer may be used as the material of the molding 2.
- thermoplastic resin examples include cyclic olefin ring-opening polymerization / hydrogenated product (COP) and cyclic olefin-based resin such as cyclic olefin copolymer (COC), acrylic resin, polycarbonate, vinyl ether resin, perfluoroalkoxyalkane (PFA), and the like.
- Fluorine resin such as polytetrafluoroethylene (PTFE), polystyrene, polyimide resin, polyester resin, or the like can be used.
- unsaturated hydrocarbons such as vinyl and allyl groups such as epoxide-containing compounds, (meth) acrylic acid ester compounds, vinyl ether compounds, and bisallyl nadiimide compounds Group-containing compounds
- molding pattern may be used.
- Organic peroxides and azo compounds can be preferably used as the heat-reactive radical initiator, and acetophenone derivatives, benzophenone derivatives, benzoin ether derivatives, xanthone derivatives and the like can be preferably used as the photoreactive radical initiator.
- the reactive monomer may be used without a solvent, or may be used after being dissolved in a solvent and desolvated after coating.
- the inorganic polymer for example, a polysilazane compound can be used.
- the mold 1 is arranged on the pressure stage 31 side and the molding 2 is arranged on the pressure receiving stage 32 side. However, the molding 2 and the pressure stage 31 side are arranged on the pressure receiving stage 32 side.
- the mold 1 may be disposed on the substrate.
- the pressurizing unit 3 includes a pressurizing chamber 30 for pressurizing the mold 1 and the workpiece 2 with a fluid, and a pressurizing means 35 for adjusting the pressure of the fluid in the pressurizing chamber 30.
- the pressurizing chamber 30 may be constituted by, for example, a pressurizing stage 31 and a pressurizing chamber casing 33.
- the pressurizing chamber casing 33 is formed in a bottomed cylindrical shape having an opening, and constitutes a pressurizing chamber 30 which is a sealed space by closing the opening with the pressurizing stage 31.
- This opening is preferably formed larger than the pattern area transferred to the molding 2.
- the material may be anything as long as it has pressure resistance and heat resistance with respect to the molding conditions during the imprint process. For example, a metal such as stainless steel can be used.
- the pressurizing stage 31 includes a rigid member 311 for pressurizing the mold 1 and the molding 2, and a sealing member 312 that is disposed between the pressurizing chamber casing 33 and the rigid member 311 and seals the pressurizing chamber 30. And consist of
- the rigid member 311 is for moving the molding 2 in the lateral direction by the applied pressure and averaging the thickness unevenness. Therefore, the surface of the rigid member 311 on the side in contact with the workpiece 2 is sufficiently wide and smoothly formed.
- the shape of the rigid member 311 is formed in accordance with the shape of the object 2 to be formed. For example, the shape of the rigid member 311 is a flat surface when the object 2 is flat, and a curved surface when it is curved. .
- the material may be any material as long as it has pressure resistance and heat resistance with respect to the molding conditions during the imprint process.
- iron materials such as carbon steel, metals such as SUS, silicon, glass, etc. are used. be able to.
- a thing with high heat conductivity such as a metal.
- a material having low thermal conductivity may be used to prevent heat from escaping to the pressure chamber 30 side.
- the surface of the rigid member 311 be made of a material having high thermal conductivity.
- a transparent material such as glass may be used.
- the sealing member 312 is arranged in an annular shape between the pressurizing chamber casing 33 and the rigid member 311, and seals the pressurizing chamber 30.
- the sealing member 312 is pressure resistant and heat resistant against molding conditions during the imprint process. Resin elastic members such as natural rubber and synthetic rubber can be used.
- the sealing member 312 has a convex cross section and is formed in an annular shape surrounding the side surface of the pressurizing chamber 30 with a circle or a square.
- the sealing member 312 includes a first concave portion 311a in which the first convex portion 312a and the second convex portion 312b of the sealing member 312 are formed in the rigid member 311 and a second concave portion formed in the casing 33 for the pressure chamber. It arrange
- the first recess 311a is formed in an annular shape such as a circle or a square on the pressurization chamber 30 side of the pressurization stage 31, and locks the first projection 312a of the sealing member 312.
- the second concave portion 33b is formed in an annular shape at a portion facing the first concave portion 311a of the rigid member 311, and locks the second convex portion 312b of the sealing member 312.
- an auxiliary elastic member 38 such as a spring or rubber that presses the sealing member 312 to the outside of the pressurizing chamber 30 may be disposed inside the first recess 311a and the second recess 33b. good.
- a third recess 39a may be provided inside the first recess 311a
- a fourth recess 39b may be provided inside the second recess 33b.
- the pressurization stage 31 can be attached to the pressurization chamber casing 33 by any method as long as the pressurization stage 31 and the pressurization chamber casing 33 can be freely approached or separated.
- a mounting groove is formed in each of the rigid member 311 and the pressurizing chamber housing 33, a guide shaft is disposed in the mounting groove, and a spring is inserted into the guide shaft so that the elastic force of the spring is increased. What is necessary is just to urge between the rigid member 311 and the casing 33 for pressurizing chambers.
- the sealing member can be directly bonded and connected to both the pressurizing chamber casing 33 and the pressurizing stage 31.
- the pressure receiving stage 32 is for supporting the mold 1 and the workpiece 2 that have received the pressure of the pressurizing unit 3.
- the surface of the pressure receiving stage 32 that comes into contact with the mold 1 (or the workpiece 2) may be formed in a sufficiently wide and smooth flat surface. However, it is not limited to this, and can be appropriately selected according to the shape of the mold 1 or the molding 2.
- the material may be anything as long as it has pressure resistance and heat resistance with respect to the molding conditions during the imprint process. For example, iron materials such as carbon steel and metals such as SUS can be used.
- iron materials such as carbon steel and metals such as SUS can be used.
- a material having low thermal conductivity may be used to prevent heat from escaping to the pressure receiving stage 32 side.
- the stage surface is made of a material having high thermal conductivity.
- a transparent material such as glass may be used.
- the mold 1 and the pressure receiving stage 32 may be integrally formed in order to prevent unnecessary transfer marks from being generated on the molding object 2. For example, conventionally, after a pattern is formed by electroforming, only the pattern portion is cut out and used, but this can be used as it is without being cut out.
- the pressurizing means 35 may be anything as long as the pressure of the fluid in the pressurizing chamber 30 can be adjusted to a pressure at which the pattern of the mold 1 can be transferred to the workpiece 2.
- a pressurizing chamber gas supply / discharge channel 351 is connected to the pressurizing chamber casing 33, and the pressurizing chamber is connected via the pressurizing chamber gas supply / exhaust channel 351.
- a gas such as air or inert gas may be supplied or exhausted to 30.
- a gas supply source 352 such as a cylinder or a compressor having a compressed gas can be used.
- the gas may be exhausted by opening and closing a deaeration valve. In addition, you may provide a safety valve etc. suitably.
- the opening / closing means is for moving the pressurizing unit 3 and the pressure receiving stage 32 relatively, although not shown.
- the pressurizing chamber housing 33 may be moved close to or away from the pressure receiving stage 32 by an electric motor and a ball screw.
- the pressurizing chamber casing 33 can be moved by a hydraulic or pneumatic cylinder. Of course, it is also possible to move the pressure receiving stage 32 to the casing 33 for the pressurizing chamber.
- the imprint apparatus includes a decompression unit 4 having a decompression chamber for decompressing the atmosphere around the mold 1 and the molding object 2, particularly the atmosphere between the mold 1 and the molding object 2. Also good. Thereby, the gas which exists between the type
- the decompression unit 4 includes a decompression chamber 40 that encloses one or both of the mold 1 and the molding object 2, and decompression means that exhausts the gas in the decompression chamber 40 What is necessary is just to comprise.
- the decompression chamber 40 includes a decompression chamber casing, a decompression chamber sealing means 44, and a pressure receiving stage 32 or a molded object 2 (or mold 1) placed on the pressure receiving stage 32.
- the decompression chamber casing includes, for example, a pressurization chamber casing 33, a flange portion 431 extending horizontally from the upper portion of the pressurization chamber casing 33, and a flange portion so as to cover the pressurization chamber casing 33. And accordion 432 depending from 431.
- the pressurization chamber 30 is also a part of the decompression chamber 40.
- the decompression chamber sealing means 44 is provided between the decompression chamber casing 33 and the pressure receiving stage 32 or the workpiece 2 (or mold 1) placed on the pressure receiving stage 32 in order to seal the decompression chamber 40. It is something that is closely related.
- an O-ring is prepared as the decompression chamber sealing means 44, and a concave groove 432b shallower than the diameter of the cross section of the O-ring is formed at the stage side end of the bellows 432.
- An O-ring may be disposed on the side. Thereby, the inside of the decompression chamber 40 can be sealed. Even if there is an inclination between the decompression chamber casing and the pressure receiving stage 32, the decompression chamber 40 can be reliably sealed if the parallelism is within the crushing margin of the O-ring.
- the decompression chamber casing and the decompression chamber sealing means 44 have strengths that can withstand external forces when decompressed.
- the decompression means includes a decompression chamber gas supply / discharge passage 451 connected to the decompression chamber 40, and a decompression pump 452 that exhausts the gas in the decompression chamber 40 through the decompression chamber gas supply / exhaust passage 451. Just do it.
- the decompression pump 452 is capable of reducing the pressure in the decompression chamber 40 to such an extent that a transfer failure does not occur when the mold 2 is pressurized to the mold 1 and removing the gas between the mold 1 and the mold 2. It ’s fine.
- the imprint apparatus of the present invention may further include a temperature adjusting means for adjusting the temperature of the molding object 2 by heating or cooling the molding object 2.
- a temperature adjusting means for adjusting the temperature of the molding object 2 by heating or cooling the molding object 2.
- a heating means for directly or indirectly heating the molding 2 or a cooling means for cooling can be used.
- any heating means can be used as long as it can heat either one or both of the mold 1 and the molding 2 to a predetermined temperature, for example, the glass transition temperature or the melting temperature or higher of the molding 2. But it ’s okay.
- the workpiece 2 may be heated from the pressure stage 31 side or heated from the pressure receiving stage 32 side.
- a heater that is provided in the pressure receiving stage 32 and that heats the mold 1 or the workpiece 2 from the pressure receiving stage 32 side can be used.
- the rigid member 311 is formed of a transparent material such as glass, and a radiant heat source that is heated by electromagnetic radiation such as a ceramic heater or a halogen heater is provided in the pressurizing chamber 30 to heat the mold 1 or the molding 2. Things can also be used. It is also possible to heat the pressurized chamber 30 by supplying heated gas.
- any cooling means may be used as long as it can cool either one or both of the mold 1 and the molding 2 to a predetermined temperature, for example, below the glass transition temperature or below the melting temperature of the molding 2. But it ’s okay.
- the workpiece 2 may be cooled from the pressure receiving stage 32 side or may be cooled from the pressurizing chamber 30 side.
- a cooling water channel provided in the pressure receiving stage 32 to cool the mold 1 and the workpiece 2 from the pressure receiving stage 32 side can be used.
- the rigid member 311 is formed of a transparent material such as glass, and a light source capable of emitting electromagnetic waves of a predetermined wavelength to the molding object 2 is used as a pressure chamber.
- the pressure receiving stage 32 may be formed in a transparent material such as glass, and a light source capable of radiating an electromagnetic wave having a predetermined wavelength may be disposed on the back side of the pressure receiving stage 32.
- the inside of the pressurizing chamber 30 is pressurized after the mold 1 and the workpiece 2 are sandwiched between the pressurizing stage 31 and the pressure receiving stage 32 using the opening / closing means.
- the mold 1 and the molding object 2 can be pressurized with the rigid member 311. This also allows a part of the workpiece to be moved in the lateral direction by the applied pressure, and the thickness unevenness can be averaged. That is, the flatness of the molding surface can be improved.
- the conventional imprint apparatus transfers the molding pattern of the mold 1 to the molding object 2 by the fluid pressure in the pressurizing chamber 30A.
- the film-shaped mold 1 (or film-shaped workpiece 2) and the pressurizing chamber casing 33A are formed.
- the pressurizing chamber casing 33A is formed in a bottomed cylindrical shape having an opening, and the pressurizing chamber 30A, which is a sealed space, is configured by closing the opening with the mold 1 or the molding object 2.
- a sealing member 313 such as an O-ring is disposed in a portion of the pressurizing chamber casing 33A that comes into contact with the mold 1 (or the molding object 2) to make the pressurizing chamber 30A airtight.
- the other parts such as the pressurizing means 35 for supplying the fluid into the pressurizing chamber 30A are the same as those of the above-described imprint apparatus of the present invention. To do.
- the pressurizing stage 31A of the present invention is a part of the pressurizing chamber 30A together with the pressurizing chamber casing 33A in place of the film-shaped mold 1 or the film-shaped molding object 2 in the conventional imprint apparatus described above.
- the rigid member 311A is for moving the workpiece 2 in the lateral direction by the applied pressure and averaging the thickness unevenness. Therefore, the surface of the rigid member 311A on the side in contact with the workpiece 2 is sufficiently wide and smoothly formed. Further, the shape of the rigid member 311A is formed in accordance with the shape of the object 2 to be formed, for example, when the object 2 is flat, it is formed into a flat shape, and when it is curved, it is formed into a curved shape. .
- the material may be any material as long as it has pressure resistance and heat resistance with respect to the molding conditions during the imprint process.
- iron materials such as carbon steel, metals such as SUS, silicon, glass, etc. are used. be able to.
- a thing with high heat conductivity such as a metal.
- a material having low thermal conductivity may be used to prevent heat from escaping to the pressure chamber 30A side.
- the surface of the rigid member 311A be made of a material having high thermal conductivity.
- a transparent material such as glass may be used.
- the sealing member 312A is arranged around the rigid member 311A, and seals the pressurizing chamber 30A when the sealing member 313 of the pressurizing chamber casing 33A comes into contact therewith.
- Any material can be used for the sealing member 312A as long as it is flexible with respect to the fluid pressure in the pressurizing chamber 30A and has pressure resistance and heat resistance against the molding conditions during the imprint process.
- a resin film can be used.
- the rigid member 311A and the sealing member 312A may be joined by, for example, applying an adhesive to the surface of the rigid member 311A on the pressure chamber 30A side and attaching the sealing member 312A thereto.
- the sealing member has a shape (sealing member 312A) that can be bonded to the entire pressure chamber 30A side of the rigid member 311A, such as the pressing stage 31A of FIG. 5A, or the sealing member of FIG.
- the pressurization stage 31B it is also possible to use one having a shape in which a hole is formed in the center part that can be bonded only to the periphery of the surface on the pressurization chamber side of the rigid member 311B (sealing member 312B).
- a rigid member 311C may be disposed on the pressurizing chamber 30A side
- a sealing member 312C may be disposed on the pressure receiving stage side.
- the rigid member 311A is sealed.
- the member 312A may be independent.
Abstract
Description
2 被成形物
3 加圧部
30 加圧室
30A 加圧室
31 加圧ステージ
31A 加圧ステージ
31B 加圧ステージ
31C 加圧ステージ
32 受圧ステージ
33 加圧室用筐体
33A 加圧室用筐体
33b 第2凹部
35 加圧手段
38 補助弾性部材
311 剛体部材
311A 剛体部材
311B 剛体部材
311C 剛体部材
311a 第1凹部
312 密閉部材
312A 密閉部材
312B 密閉部材
312C 密閉部材
312a 第1凸部
312b 第2凸部 1
Claims (5)
- 加圧室内の流体圧によって型の成型パターンを被成形物に転写するインプリント装置であって、
前記加圧室の一部を構成する加圧室用筐体と、
前記型と前記被成形物を加圧するための剛体部材と、前記加圧室用筐体と前記剛体部材との間に配置され前記加圧室を密閉する密閉部材と、を有する加圧ステージと、
前記加圧ステージの圧力を受けた前記型および前記被成形物を支持する受圧ステージと、
前記加圧室内の流体の圧力を調節する加圧手段と、
を具備することを特徴とするインプリント装置。 An imprint apparatus that transfers a molding pattern of a mold to a molding by fluid pressure in a pressurizing chamber,
A pressurizing chamber casing constituting a part of the pressurizing chamber;
A pressurizing stage having a rigid member for pressurizing the mold and the molding; and a sealing member disposed between the pressurizing chamber casing and the rigid member to seal the pressurizing chamber; ,
A pressure receiving stage that supports the mold and the molding that have received pressure from the pressure stage;
Pressurizing means for adjusting the pressure of the fluid in the pressurization chamber;
An imprint apparatus comprising: - 前記加圧ステージの加圧室側には、前記密閉部材の一部を係止する第1凹部が形成され、
前記加圧室用筐体には、前記第1凹部と対向する部分に前記密閉部材の一部を係止する第2凹部が形成され、
前記密閉部材は、前記第1凹部及び第2凹部に係合する樹脂製弾性部材からなることを特徴とする請求項1記載のインプリント装置。 A first recess for locking a part of the sealing member is formed on the pressure chamber side of the pressure stage,
The pressurizing chamber casing is formed with a second recess for locking a part of the sealing member at a portion facing the first recess.
2. The imprint apparatus according to claim 1, wherein the sealing member is made of a resin elastic member that engages with the first recess and the second recess. - 前記第1凹部及び第2凹部の内側には、前記密閉部材を加圧室の外側に押圧する補助弾性部材が配置されることを特徴とする請求項2記載のインプリント装置。 3. An imprinting apparatus according to claim 2, wherein an auxiliary elastic member that presses the sealing member to the outside of the pressurizing chamber is disposed inside the first recess and the second recess.
- 加圧室内の流体圧によって型の成型パターンを被成形物に転写するインプリント装置において、加圧室用筐体と共に前記加圧室の一部を構成する加圧ステージであって、
前記型又は前記被成形物を加圧するための剛体部材と、
前記剛体部材と前記加圧室用筐体との間を密閉する密閉部材と、
を具備することを特徴とする加圧ステージ。 In an imprint apparatus that transfers a molding pattern of a mold to a molding by fluid pressure in a pressurizing chamber, a pressurizing stage that constitutes a part of the pressurizing chamber together with a casing for the pressurizing chamber,
A rigid member for pressurizing the mold or the molding;
A sealing member that seals between the rigid member and the pressurizing chamber housing;
A pressure stage characterized by comprising: - 前記密閉部材は、可撓性のある膜からなることを特徴とする請求項4記載の加圧ステージ。 The pressure stage according to claim 4, wherein the sealing member is made of a flexible film.
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JP2013532635A JP6031655B2 (en) | 2011-09-06 | 2012-09-05 | Fluid pressure imprint apparatus with a rigid stage |
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JP2011194168 | 2011-09-06 | ||
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Cited By (2)
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US10343312B2 (en) * | 2012-08-27 | 2019-07-09 | Scivax Corporation | Imprint device and imprint method |
WO2021124682A1 (en) * | 2019-12-19 | 2021-06-24 | 株式会社 ベアック | Press device and press method |
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US10343312B2 (en) * | 2012-08-27 | 2019-07-09 | Scivax Corporation | Imprint device and imprint method |
WO2021124682A1 (en) * | 2019-12-19 | 2021-06-24 | 株式会社 ベアック | Press device and press method |
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