KR101059024B1 - Display device - Google Patents

Abstract

SUMMARY OF THE INVENTION An object of the present invention is to provide a display device in which the size of a thin film transistor aimed at reducing off current can be configured small. The present invention provides a display device in which a thin film transistor is formed on a substrate, wherein the thin film transistor is formed by arranging a gate electrode through a gate insulating film with respect to the semiconductor layer, and in each of the divided regions of the semiconductor layer. And at least a first thin film transistor and a second thin film transistor each having a semiconductor layer, wherein one of a drain region and a source region of the first thin film transistor and a drain region of the second thin film transistor are formed in the semiconductor layer. The first thin film transistor and the second thin film transistor are provided with a common area having the other of the source areas in common, and each of the first thin film transistor and the second thin film transistor is provided between the channel region and the drain region, and the channel region and the source region. LDD regions of which impurity concentrations are lower than those of the drain region and the source region, respectively, between And the gate electrode includes at least the channel region and the respective LDD region of the first thin film transistor and the channel region and the respective LDD of the second thin film transistor over the common region of the semiconductor layer. It is formed to face the area.

 Pixel electrode, through hole, thin film transistor, source electrode, drain electrode

Description

Display device {DISPLAY DEVICE}

This application is based on the JP Patent application 2008-202525 of an application on August 6, 2008, The content is taken in here as a reference.

The present invention relates to a display device, and more particularly to a display device in which a thin film transistor is formed on a substrate.

For example, in an active matrix liquid crystal display device, a thin film transistor made of a switching element is formed in a region of each pixel of the substrate.

In this case, the thin film transistor is preferably configured as a so-called bottom gate type in which a gate electrode is arranged with respect to the semiconductor layer via a gate insulating film on the substrate side. This is because the gate electrode functions as a light shielding film, and the light from the backlight can be prevented from being irradiated to the semiconductor layer, thereby forming a thin film transistor with little generation of photo leakage current.

As the bottom gate type thin film transistor, a so-called multi-gate structure composed of a plurality of thin film transistors in which each divided region of the semiconductor layer is a semiconductor layer has also been used. This is because such a thin-gate transistor having a multi-gate structure can reduce the off current due to relaxation of the electric field concentration between the drain region and the channel region, for example.

Further, in such a structure, in the semiconductor layer of each thin film transistor, between the channel region and the drain region, and between the channel region and the source region, the impurity concentration of LDD (Lightly Doped Drain) is lower than that of the drain region and the source region, respectively. It is usual to have a structure provided with a) area. This is because the LDD region can alleviate electric field concentration that is likely to occur between the drain region and the channel region in the semiconductor layer, and is easily formed in a bottom gate type thin film transistor without increasing the man-hours of manufacture.

8 is a cross-sectional view showing a configuration of the above-described thin film transistor formed in the display device. In FIG. 8, the thin film transistor TFT is comprised by the 1st thin film transistor TFT1 and the 2nd thin film transistor TFT2 which make each divided | segmented area | region of the semiconductor layer PS into each semiconductor layer. In this case, the common region CMD is provided at the center of the semiconductor layer PS in common with the source region SD of the first thin film transistor TFT1 and the drain region DD of the second thin film transistor TFT2. The gate electrode of the first thin film transistor TFT1 (shown as GT1 in the figure) and the gate electrode of the second thin film transistor TFT2 (shown as GT2 in the figure) via the gate insulating film GI on the substrate SUB1 side with respect to the semiconductor layer PS. ) Are physically separated from each other (electrically connected to each other). In Fig. 8, reference numeral DD denotes a drain region, reference numeral SD denotes a source region, and reference numeral LD denotes an LDD region. In addition, about the structure shown in FIG. 8, it is only the description within the above-mentioned range here. It is because it demonstrates in detail later at the time of description of the structure of FIG. 1 drawn corresponding to FIG.

However, the thin film transistor TFT having the above-described configuration has its dimensions even when the width of the common region CMD in which the source region SD of the first thin film transistor TFT1 and the drain region DD of the second thin film transistor TFT2 are common is minimized. Lp had to be about 5 micrometers.

The reason for this is that at the time of manufacture, in addition to the minimum development dimensions (for example, 3 µm) of the photoresist in photolithography technology, the processing dimension variations (for example, 0.5 µm) of the gate electrodes GT1 and GT2, and the development dimension variations ( For example, 0.5 mu m) and misalignment (for example, 1 mu m) of a mask for forming channel regions of the gate electrodes GT1, GT2 and the semiconductor layer PS must be considered.

For this reason, the thin film transistor TFT which consists of the above-mentioned structure produced the limit even if the size was made small.

SUMMARY OF THE INVENTION An object of the present invention is to provide a display device capable of reducing the size of a bottom gate type thin film transistor aimed at reducing off current.

In the display device of the present invention, the gate electrode of the first thin film transistor TFT1 and the gate electrode of the second thin film transistor TFT2 are formed as integral ones which are connected to each other without physically separating each other. The thin film transistor can be manufactured by considering only the minimum development dimension.

The structure of this invention can be made as follows, for example.

(1) The display device of the present invention is a display device in which a thin film transistor is formed on a substrate.

In the thin film transistor, a gate electrode is arranged with respect to the semiconductor layer of the thin film transistor via a gate insulating film.

At least a first thin film transistor and a second thin film transistor each having a respective divided region of the semiconductor layer as a semiconductor layer,

A common region in the semiconductor layer having one of the drain region and the source region of the first thin film transistor and the other region of the drain region and the source region of the second thin film transistor,

The first thin film transistor and the second thin film transistor are, in the semiconductor layer of the first thin film transistor and the semiconductor layer of the second thin film transistor, respectively, between the channel region and the drain region, and between the channel region and the source region, Each having an LDD region having an impurity concentration lower than that of the drain region and the source region,

The gate electrode is disposed to face at least the channel region and each LDD region of the first thin film transistor and the channel region and each LDD region of the second thin film transistor over the common region of the semiconductor layer. It is characterized by being formed.

(2) In the display device of the present invention, in (1), the semiconductor layer is formed of polysilicon.

(3) In the display device of the present invention, in (1), the thin film transistor is formed such that a gate electrode is disposed on a substrate side of the thin film transistor via a gate insulating film.

(4) In the display device of the present invention, in (1), the drain region, the source region, and the common region are each formed in an island shape in the region of the semiconductor layer, and the LDD region is And surrounding the drain region, the source region, and the common region.

(5) In the display device of the present invention, in (1), the thin film transistor is formed in each pixel.

(6) In the display device of the present invention (1), the thin film transistor is formed in a scan signal driving circuit.

(7) In the display device of the present invention (1), the thin film transistor is formed in an RGB switching circuit.

(8) In the display device of the present invention (1), the display device is a liquid crystal display device.

In addition, the said structure is an example to the last, and this invention can be suitably changed within the range which does not deviate from a technical idea. In addition, the example of the structure of this invention other than the above-mentioned structure becomes clear from description or drawing of the whole this specification.

The display device configured in this manner can be configured to have a small size of the thin film transistor aimed at reducing the off current.

Other effects of the present invention will become apparent from the description of the entire specification.

An embodiment of the present invention will be described with reference to the drawings. In addition, in each figure and each Example, the same or similar component is attached | subjected with the same code | symbol, and description is abbreviate | omitted.

≪ Example 1 >

(Overall Configuration of Display Unit)

2 is a plan view showing a first embodiment of a display device according to the present invention. 2 shows the overall configuration of a liquid crystal display device incorporated in, for example, a mobile phone.

In FIG. 2, the liquid crystal display device is comprised from the square-shaped board | substrate SUB1 and board | substrate SUB2 which consist of glass, for example. A liquid crystal (not shown) is sandwiched between the substrate SUB1 and the substrate SUB2, and the liquid crystal is sealed by the sealing material SL that fixes the substrate SUB1 and the substrate SUB2. The area | region in which liquid crystal was enclosed by the sealing material SL is comprised so that liquid crystal display area | region AR may be comprised in the center part except the slight periphery. This liquid crystal display area AR is a region in which a plurality of pixels are arranged in a matrix.

The lower side part of the board | substrate SUB1 has the part exposed from the board | substrate SUB2, and the one end of the flexible board | substrate FPC which inputs a signal from the exterior is connected to this part. Further, on the substrate SUB1, the semiconductor device SCN made of chips is mounted in the region between the flexible substrate FPC and the substrate SUB2. In the semiconductor device SCN, signals from the flexible substrate FPC are input through the wiring WL formed on the surface of the substrate SUB1.

In addition, as a region between the sealing material SL and the liquid crystal display region AR, for example, the scan signal driving circuit V is formed in the left region of the liquid crystal display region A, and the RGB switching circuit RGBS is formed in the lower region. Signals are supplied from the semiconductor device SCN to these scan signal driving circuits V and the RGB switching circuit RGBS. The scan signal driving circuit V is constituted by a circuit for sequentially supplying scan signals to a plurality of gate signal lines GL to be described later, and the RGB switching circuit RGBS is used for red and green video signals to be supplied to the plurality of drain signal lines DL to be described later. And a blue circuit for switching time-series.

Here, the scan signal driving circuit V and the RGB switching circuit RGBS are circuits formed on the substrate SUB1 in parallel with the formation of the pixels in the liquid crystal display area AR, and are each provided with a plurality of thin film transistors (not shown). .

The gate signal line GL and the drain signal line DL are formed in the liquid crystal display area AR. The gate signal line GL extends in the x direction and is parallel to the y direction in the drawing, and the left end thereof is connected to the scan signal driving circuit V. As shown in FIG. The drain signal line DL extends in the y direction in the figure and is parallel to the x direction, and the lower ends thereof are connected to the RGB switching circuit RGBS.

A region (for example, in a dotted ellipse frame in the drawing) surrounded by a pair of adjacent gate signal lines GL and a pair of adjacent drain signal lines DL is formed to correspond to a region of the pixel PIX. The pixel PIX is a thin film transistor TFT which is turned on by the scanning signal from the gate signal line GL and an image from the drain signal line DL through the turned thin film transistor TFT, as shown in the equivalent circuit diagram in the solid line elliptic frame A in the figure. The pixel electrode PX to which a signal is supplied is provided.

In addition, the pixel electrode PX generates an electric field according to the voltage difference between the substrate SUB1 and the counter electrode (not shown) which is formed in common in each pixel on the surface of the substrate SUB2 facing each other via the liquid crystal. The liquid crystal is driven by this electric field.

In FIG. 2, although the liquid crystal display device built in the mobile telephone was demonstrated as an example, this invention is not limited to this kind of liquid crystal display device.

In addition, although the pixel shown in FIG. 2 was shown about the structure called what is called a longitudinal electric field system, it is not limited to this, For example, it is applicable also to the pixel called a horizontal electric field system.

(Configuration of Pixel and Thin Film Transistor)

FIG. 3A shows a plan view of a specific configuration of the pixel PIX, and shows an enlarged view of the formation region (in the dashed line frame α) of the thin film transistor TFT in FIG. 3B. 1B is a cross-sectional view taken along the line I-I in FIG. 3B.

First, as shown in FIG. 1, substrate SUB1 exists, and the base layer GRL which consists of a silicon nitride film is formed in the surface on the liquid crystal side of this substrate SUB1. This base layer GRL serves as a film which prevents impurities in the substrate SUB1 from invading into the polycrystalline semiconductor layer PS of the thin film transistor TFT described later.

The gate electrode GT is formed on the upper surface of the base layer GRL. As described later, the thin film transistor TFT includes a first thin film transistor TFT1 and a second thin film transistor TFT2, and the gate electrode of the first thin film transistor TFT1 and the gate electrode of the second thin film transistor TFT1 are not separated and connected to each other. It is formed as two gate electrodes GT.

On the upper surface of the base layer GRL, the gate electrode GT is also covered, and a gate insulating film GI made of, for example, a silicon oxide film or a silicon nitride film is formed.

On the upper surface of the gate insulating film GI, a semiconductor layer PS made of, for example, polysilicon is formed so as to intersect the gate electrode GT.

This semiconductor layer PS is composed of the semiconductor layer of the first thin film transistor TFT1 and the semiconductor layer of the second thin film transistor TFT2 in the divided regions.

In the semiconductor layer PS of the first thin film transistor TFT1, a drain region DD, an LDD region LD, a channel region CD, an LDD region LD, and a source region SD are formed from the left end of the figure, and the semiconductor layer of the second thin film transistor TFT2 is illustrated. From the right end, source region SD, LDD region LD, channel region CD, LDD region LD, and drain region DD are formed. In this case, the source region SD of the first thin film transistor TFT1 and the drain region DD of the second thin film transistor TFT2 are configured as a common region (hereinafter referred to as common region CMD). In the semiconductor layer PS, the channel region CD, the LDD region LD, the source region SD, and the drain region DD have a high impurity concentration in that order.

Here, the gate electrode GT is at least the channel region CD and the respective LDD region LD of the first thin film transistor TFT1 and the channel region CD of the second thin film transistor TFT2 over the common region CMD of the semiconductor layer PS. And positional positions facing the respective LDD regions LD.

In addition, although the source region SD and the drain region DD of the thin film transistor TFT are replaced according to the bias application state, in this embodiment, the side connected to the drain signal line DL is the drain region DD for convenience, and the pixel electrode PX The side connected to and will be described as the source area SD.

The interlayer insulating film IN is formed on the upper surface of the gate insulating film GI to cover the semiconductor layer PS. On the upper surface of the interlayer insulating film IN, a drain electrode DT electrically connected to the drain region DD of the semiconductor layer PS through the through hole THd, and a source electrode ST electrically connected to the source region SD of the semiconductor layer PS through the through hole THs. Is formed.

Here, the drain electrode DT is formed as part of the drain signal line DL (not shown), and the source electrode ST is provided with an extension part (pad) for connection with the pixel electrode PX described later.

On the upper surface of the interlayer insulating film IN, the drain electrode DT (drain signal line DL) and the source electrode ST are also covered and the protective film PAS is formed. This protective film PAS is formed in order to avoid the thin film transistor TFT coming into direct contact with the liquid crystal and causing deterioration of characteristics. The flattening film OC is formed in the upper surface of protective film PAS by the resin material formed by application | coating. This is to flatten the surface on the liquid crystal side.

On the surface of the planarization film OC, for example, a pixel electrode PX made of indium tin oxide (ITO) is formed, and the pixel electrode PX is a source of the thin film transistor TFT through the through hole THp formed of the planarization film OC and the protective film PAS. It is electrically connected with the electrode ST.

The display device configured as described above has a width Li of a common region CMD composed of a source region SD of the first thin film transistor TFT1 or a drain region DD of the second thin film transistor TFT2 at almost the center of the semiconductor layer PS of the thin film transistor TFT. For example, it can be comprised significantly narrowly to 3 micrometers. This is because the gate electrode GT of the thin film transistor TFT is integrally formed over the common region CMD, without being separated into each of the first thin film transistor TFT1 and the second thin film transistor TFT2. By doing in this way, in the photolithography technique at the time of manufacture, the processing dimension variation (for example, 0.5 micrometer) of the two gate electrodes formed separately, the development dimension variation (for example, 0.5 micrometer), and each gate electrode and a semiconductor This is because it can be configured by considering the minimum developing dimension (for example, 3 m) of the photoresist without considering misalignment (for example, 1 m) of the mask for forming the channel region of the layer PS. Therefore, the size of the bottom gate type thin film transistor TFT aimed at reducing the off current can be reduced.

(Production method)

4A to 4E, 5F to 5I, and 6J to 6L are process charts showing an embodiment of a method of manufacturing the display device of the present invention. These process diagrams are drawn corresponding to FIG. 1. Hereinafter, it demonstrates in process order.

Step 1. (FIG. 4A)

First, a substrate SUB1 made of, for example, glass is prepared, and a base layer GRL made of a silicon nitride film is formed on the main surface of the substrate by, for example, CVD. This base layer GRL serves as a film which prevents impurities in the substrate SUB from invading into the polycrystalline semiconductor layer PS of the thin film transistor TFT described later.

Step 2. (FIG. 4B)

The gate electrode GT of the thin film transistor TFT is formed by patterning a metal layer on the upper surface of the base layer GRL of the substrate SUB. This gate electrode is formed with a relatively large width. This is because the gate electrodes of the first thin film transistor TFT1 and the second thin film transistor TFT2 described later are integrally formed without being physically separated. The metal layer is made of a high melting point material such as Mo, W, Ti, or an alloy thereof. It is because it becomes high temperature in the crystallization process of amorphous semiconductor layer AS mentioned later.

Step 3. (FIG. 4C)

The gate electrode GT is also covered and formed by sequentially laminating an amorphous semiconductor layer AS made of the gate insulating film GI and amorphous silicon on the upper surface of the base layer GRL, for example, by the CVD method. As the gate insulating film GI, a silicon oxide film or a silicon nitride film is used.

Step 4. (FIG. 4D)

The dehydrogenation process of the semiconductor layer AS is performed. Then, by irradiating the excimer laser to the semiconductor layer AS, the semiconductor layer AS is crystallized and deteriorated into the polycrystalline semiconductor layer PS which is polysilicon.

Step 5. (FIG. 4E)

The semiconductor layer PS is patterned into an island shape using a selective etching method by a known photolithography technique.

Step 6. (FIG. 5F)

An insulating film IN1 made of, for example, a silicon oxide film is formed on the upper surface of the gate insulating film GI by covering the patterned semiconductor layer PS, for example, by the CVD method. This insulating film IN1 has the function of an impurity implanted through film of the following implantation, and the film thickness thereof is preferably about 200 nm or less. Then, an impurity made of, for example, phosphorus or boron is injected into the semiconductor layer PS (implantation) through the insulating film IN1, thereby controlling Vth of the thin film transistor TFT to be completed later.

Process 7. (FIG. 5G)

The photoresist is applied to the upper surface of the insulating film IN1, and using the well-known photolithography technique, the photoresist film RST of each channel region and LDD region of each of the thin film transistor TFT1 and thin film transistor TFT2 to be formed in the semiconductor layer PS remain. Let's do it.

In this case, the gate electrode GL is integrally formed without being separated into each of the first thin film transistor TFT1 and the second thin film transistor TFT2. For this reason, in the semiconductor layer PS, the width Li of the common region CMD also present in the source region SD of the first thin film transistor TFT1 and the drain region DD of the second thin film transistor TFT2 can be set so as not to be affected by the gate electrode GL. That is, since the minimum development dimension (for example, 3 micrometers) of a photoresist can be considered and formed, the width Li of the common area CMD can be narrowed to about 3 micrometers significantly.

By implanting a high concentration of impurities (for example, phosphorus) with the photoresist film RST remaining, the source region SD and the drain region DD of the thin film transistor TFT1, the thin film transistor TFT2 are formed in the semiconductor layer PS. High concentrations of impurities are implanted, for example, 1e20 (atm / cm 3) in the polycrystalline semiconductor layer PS.

Step 8. (FIG. 5H)

The photoresist film RST is subjected to ashing and heat treatment, and the peripheral contour of the photoresist film is retracted inward by about 0.5 to 2 占 퐉, thereby forming a new pattern of photoresist film RST '. Thus formed photoresist film RST 'can suppress the influence of mask misalignment compared with the case where a photoresist film is newly formed by photolithography technique, and after forming using this photoresist film RST' The variation in the length of the LDD layer to be described can be reduced.

A low concentration of impurities (for example, phosphorus) are ion-implanted in a state where the new pattern photoresist film RST 'is left, thereby forming LDD regions LD of the first thin film transistor TFT1 and the second thin film transistor TFT2 in the semiconductor layer PS. . Low concentration impurities are implanted, for example, 1e17 to 1e19 (atm / cm 3) in the polycrystalline semiconductor layer PS. Thereafter, the photoresist film RST 'of the new pattern is removed.

Step 9. (FIG. 5i)

The insulating film IN2 is formed on the upper surface of the insulating film IN1. This insulating film IN2 is formed in order to reduce the capacitance which each of the below-mentioned source electrode ST and drain electrode DT formed on this insulating film IN2 generate | occur | produces with the gate electrode GT. Thereafter, annealing is performed. This annealing treatment is performed for the activation of impurities implanted in the semiconductor layer PS and for repairing crystal defects caused by impurity implantation. In addition, the insulating film IN2 forms the interlayer insulating film IN together with the insulating film IN1.

Process 10. (FIG. 6J)

Through hole THd and THs are formed in interlayer insulation film IN using the selective etching method by a well-known photolithography technique. Through hole THd is a through hole for exposing a part of drain region DD in semiconductor layer PS, and through hole THs is a through hole for exposing a part of source region SD in semiconductor layer PS.

A metal layer is formed over the entire surface of the interlayer insulating film IN to cover the through holes THd and THs, and the drain electrode DT and the source electrode ST of the thin film transistor TFT are formed using a selective etching method by a known photolithography technique. do. The drain electrode DT is an electrode electrically connected to the drain region in the polycrystalline semiconductor layer PS through the through hole THd, and the source electrode ST is an electrode electrically connected to the source region in the polycrystalline semiconductor layer PS through the through hole THs.

Step 11. (FIG. 6K)

The drain electrode DT and the source electrode ST are also covered to form a protective film PAS on the upper surface of the interlayer insulating film IN. As this protective film PAS, a silicon nitride film is used, for example.

Process 12. (FIG. 6L)

The planarizing film OC is formed by apply | coating and forming resin, for example on the upper surface of protective film PAS. Through-hole THp is formed in planarization film OC and protective film PAS, and a part of drain electrode DT is exposed. Through-hole THp is also covered over the entire surface of the planarization film OC to form a transparent conductive film made of, for example, indium tin oxide (ITO), and the pixel electrode PX is formed using a selective etching method using a known photolithography technique. do. The pixel electrode PX is formed to be electrically connected to the source electrode ST of the thin film transistor TFT through the through hole THp.

<Example 2>

7 is a configuration diagram showing a second embodiment of the display device of the present invention. FIG. 7A corresponds to FIG. 1, and FIG. 7B is a plan view of the semiconductor layer PS of the thin film transistor TFT.

In FIG. 7, the configuration different from that in the case of FIG. 1 is that in the semiconductor layer PS, the drain region DD of the first thin film transistor TFT1, the source region SD, the drain region DD of the second transistor TFT2, and the source region SD are respectively. It is in what is formed in island shape in the semiconductor layer PS. The LDD region LD of the first thin film transistor TFT1 is formed so as to surround each of the drain region DD and the source region SD, and the LDD region LD of the second thin film transistor TFT2 is the drain region DD and the source region SD, respectively. It is formed so as to surround each edge of.

Also in the case of such a structure, the gate electrodes GL of the first thin film transistor TFT1 and the second transistor TFT2 are not physically separated, and the source region SD and the second thin film transistor of the first thin film transistor TFT1 are almost at the center of the semiconductor layer PS. It is integrally formed over the common area CMD used as the drain region of TFT2. For this reason, the width | variety of the said common area CMD can be narrowed for the reason similar to the above-mentioned reason.

Although the thin film transistor TFT of each Example mentioned above was demonstrated as having two thin film transistors, three or more may be sufficient as it. In this case, one thin film transistor among a plurality of thin film transistors arranged adjacent to each other can be regarded as a first thin film transistor, and another thin film transistor adjacent to the first thin film transistor can be regarded as a second thin film transistor.

Although the thin film transistor TFT of each embodiment mentioned above was shown to be a bottom gate type, it is not limited to this, It is applicable also to a top gate type.

The thin film transistor TFT of each embodiment described above represents a thin film transistor formed in each pixel. However, you may apply to the thin film transistor which comprises the scanning signal drive circuit V shown in FIG. 2, or RGB switching circuit RGBS.

In the above-described thin film transistor TFTs, the side connected to the drain signal line DL is the drain region DD and the side connected to the pixel electrode PX is the source region SD. However, this relationship changes according to the bias application state as described above, and the side connected to the drain signal line DL can be the drain region DD on the side connected to the source region SD and the pixel electrode PX.

1 is an essential part cross sectional view showing a configuration of Embodiment 1 of a display device of the present invention;

2 is a schematic plan view showing a configuration of Embodiment 1 of a display device of the present invention;

3 is a schematic plan view showing a configuration of Embodiment 1 of a pixel of a display device of the present invention;

FIG. 4 is a process diagram showing an embodiment of a method of manufacturing a display device of the present invention, showing a series of processes in conjunction with FIGS. 5 and 6.

FIG. 5 is a process diagram showing an embodiment of a method of manufacturing a display device of the present invention, showing a series of processes together with FIGS. 4 and 6.

FIG. 6 is a process diagram showing an embodiment of a method of manufacturing a display device of the present invention, showing a series of processes together with FIGS. 4 and 5; FIG.

7 is an essential part cross sectional view showing a configuration of Embodiment 2 of a display device of the present invention;

8 is a cross-sectional view showing the structure of a conventional display device, which is drawn in correspondence with FIG.

<Explanation of symbols for the main parts of the drawings>

PX: pixel electrode

THp: Through Hole

TFT: thin film transistor

ST: source electrode

PS: semiconductor layer

DD: drain region

SD: Source Area

GL: Gate Electrode

CMD: Common Area

DL: Drain signal line

DT: Drain Electrode

ST: source electrode

PAS: Shield

Claims (8)

A display device in which a thin film transistor is formed on a substrate, In the thin film transistor, a gate electrode is arranged with respect to the semiconductor layer of the thin film transistor via a gate insulating film. At least a first thin film transistor and a second thin film transistor each having a respective divided region of the semiconductor layer as a semiconductor layer, A common region in the semiconductor layer having one of the drain region and the source region of the first thin film transistor and the other region of the drain region and the source region of the second thin film transistor, The first thin film transistor and the second thin film transistor are, in the semiconductor layer of the first thin film transistor and the semiconductor layer of the second thin film transistor, respectively, between the channel region and the drain region, and between the channel region and the source region, Each having an LDD region having an impurity concentration lower than that of the drain region and the source region, The gate electrode is disposed to face at least the channel region and each LDD region of the first thin film transistor and the channel region and each LDD region of the second thin film transistor over the common region of the semiconductor layer. The display device characterized by the above-mentioned. The method of claim 1, And said semiconductor layer is formed of polysilicon. The method of claim 1, The thin film transistor is formed with a gate electrode disposed on the substrate side of the thin film transistor via a gate insulating film. The method of claim 1, In plan view, in the region of the semiconductor layer, the drain region, the source region, and the common region are each formed in an island shape, and the LDD region surrounds the drain region, the source region, and the common region. The display device is formed surrounding. The method of claim 1, The thin film transistor is formed in each pixel. The method of claim 1, And the thin film transistor is formed in a scan signal driving circuit. The method of claim 1, The thin film transistor is formed in an RGB switching circuit. The method of claim 1, A display device is a liquid crystal display device.

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