KR101049220B1 - Manufacturing method of stamp for imprint lithography - Google Patents

Abstract

The manufacturing method of the stamp for imprint lithography according to the present invention comprises the steps of applying an aluminum layer to a cylindrical body, anodizing the aluminum layer to form a pattern having a fine pattern on the aluminum layer, and etching by the fine And transferring the pattern to the body, and separating the aluminum layer from the body.

Imprint Lithography, Stamp, Anodized, Aluminum

Description

Manufacturing method of stamp for imprint lithography {FABRICATING METHOD OF STAMP FOR IMPRINT LITHOGRAPHY}

The present invention relates to a method of manufacturing a stamp for forming a fine pattern, and more particularly, to a method of manufacturing a cylindrical roll stamp using an aluminum anode (Anonic Aluminuim Oxide) to form a fine pattern.

Nano Technology (NT), along with Information Technology (IT) and Biotechnology (BT), is attracting attention as a new paradigm that will lead industrial development in the 21st century.

In addition, nanotechnology is a convergence of various scientific and technological fields such as physics, chemistry, biology, electronics, and materials engineering, overcoming the limitations of existing technologies, and innovating technology in various industries to dramatically improve the quality of human life. It is expected to improve.

Patterns ranging in size from several nanometers to hundreds of nanometers are being applied to many applications such as nanomemory, biosensors, cell applications, bio applications, photonic crystals, high-efficiency displays, and solar cells. have.

For example, a few nano to several hundred nanopoint or pillar (Pillar) structure can be applied to nano memory, hundreds of nano photonic crystal structure can be applied as a structure to increase the external light efficiency in OLED (LED).

In recent years, researches that mimic natural creatures have also been actively conducted to study the structural application of gecko feet and lotus leaves.

All of these structures have nanostructures ranging from tens to hundreds of nanometers, each with unique behaviors that can be applied to devices. For example, the lizard's paw has a long pillar structure that adheres well to slippery walls. Lotus leaf also has a super water-repellent function that effectively removes water droplets and dust. By artificially imitating these natural structures, you can create products that are useful for real life.

For example, the artificial lizard sole structure can be used as a new concept adhesive that can be easily attached and detached, and the artificial lotus leaf structure can be used as a separator such as automobile glass and selective wastewater separation.

Such nanopattern fabrication techniques include electron beam lithography, extreme ultraviolet lithography (EUV), interference lithography, nanoimprint and soft lithography, and injection molding. The method is applicable. Electron beam lithography and extreme ultraviolet patterning EUV are difficult to commercialize due to the disadvantages of large area and high price due to process time and expensive equipment. Interference lithography is still a suitable process for patterns of 200nm or more due to the limitation of technology. In addition, pattern replication techniques (nanoimprint, soft etching, injection molding) are relatively inexpensive in processing cost, but have the limitation that the first nano-class mold should be manufactured using existing techniques.

In order to overcome this drawback, bottom-up patterning technologies such as block copolymer patterning, nanosphere lithography, and anodized aluminum oxide have been attracting attention. These methods eliminate the need for expensive equipment and enable parallel patterning on the substrate at one time, resulting in high productivity due to faster process speeds.

On the other hand, applying nano-imprint technology using stamps for self-assembly patterning can produce the same pattern more effectively. In addition, continuous process such as roll to roll, reel to reel, roll to plate, etc., using a roll-shaped stamp for ultimately increasing production volume and low cost production This is most preferable, but all the existing patterning methods have a limitation in productivity because the pattern is manufactured using a flat stamp due to the convenience and limitations in manufacturing.

In addition, it is possible to use a flexible flat stamp wound on the roll, but in this case there is a problem that the height difference occurs in the overlapping pattern and the finish is not perfect, the final pattern is not perfect and the pattern loss rate is high. In addition, commercially available patterning using conventional roll stamps has been limited to the micro scale due to the price and manufacturing limitations of nano roll stamps.

The present invention has been made to solve the above problems, an object of the present invention is to provide a stamp manufacturing method that can easily produce a stamp having a nano-pattern.

Method of manufacturing a stamp for lithography for imprint according to an embodiment of the present invention to achieve the above object is Applying an aluminum layer to a cylindrical body, anodizing the aluminum layer to form a pattern having a fine pattern on the aluminum layer, etching the body to transfer the fine pattern to the body, And separating the aluminum layer from the body.

In the pattern forming step, the fine pattern may be formed as a groove, and in the transferring step, the fine pattern may be transferred to the body by putting the body in a bath containing an etching solution.

In the separating step, the aluminum layer may be dissolved by an alkaline solution and separated from the body. In addition, the body may be made of synthetic resin or metal.

Method of manufacturing a stamp according to an embodiment of the present invention comprises the steps of preparing a body made of a surface aluminum, a pattern forming step of forming a fine pattern by anodizing the body, the surface of the body the fine pattern is formed The first support layer forming step of forming a first support layer in close contact with the, and the first support layer separating step of separating the first support layer from the body.

The body is made of a tubular shape, the pattern may be formed on the inner surface of the body. In addition, the first support layer may be made of a synthetic resin or metal having a greater strength than a fine pattern formed by oxidation of the aluminum in the pattern forming step.

The body has a cylindrical outer surface, the pattern is formed on the outer surface of the body, the second support layer forming step of forming a second support layer inside the first support layer, and the second support layer to the first A second support layer separation step of separating from the support layer may be included.

The second support layer may be made of synthetic resin or metal having a greater strength than the fine pattern formed by oxidation of the aluminum in the pattern forming step.

According to an embodiment of the present invention, the surface of the cylindrical body made of aluminum can be anodized to form a pattern to easily produce a stamp in roll form.

In addition, by coating the first support layer on the anodized base and the second support layer having excellent strength on the first support layer, the pattern formed on the base can be transferred to the second support layer to easily produce a stamp having excellent strength.

In addition, by anodizing the tubular aluminum inner surface to form a pattern and coating a first support layer having excellent strength on the inside thereof, a roll stamp may be manufactured to more easily produce a stamp having excellent strength.

In the present invention, the fine pattern refers to a pattern having a nano or micro size. Patterns include irregular patterns as well as regular patterns.

Hereinafter, exemplary embodiments of the present invention will be described in detail with reference to the accompanying drawings so that those skilled in the art may easily implement the present invention. As those skilled in the art would realize, the described embodiments may be modified in various different ways, all without departing from the spirit or scope of the present invention. In the drawings, parts irrelevant to the description are omitted in order to clearly describe the present invention, and like reference numerals designate like elements throughout the specification.

1A to 1F are views for explaining a process of manufacturing a stamp according to an embodiment of the present invention.

Referring to the drawings described above, first prepare a body 110 made of a cylindrical as shown in Figure 1a.

Body 110 is polymethly methacrylate (PMMA), polystyrene (PS), polyacrylonitrile (PAN), polyurethane acrylate (PUA), PTFE (Teflon, PolyTetra Floro Ethylene), Epoxy, Acrylate, PE, PP, PU, PDMS and mixtures thereof And synthetic rubbers such as elastic rubbers, mutual mixtures of all, thermosetting resins, thermoplastic resins, and photocurable polymer materials, or metals such as aluminum, copper, iron, and nickel.

Body 110 is formed in a roll shape to enable a continuous process.

As shown in FIG. 1B, an aluminum layer 112 is coated on the body 110. The aluminum layer 112 may be coated in various ways, and the thickness of the aluminum layer 112 may be such that the oxidation of aluminum causes the pattern to be formed. At this time, if the aluminum is a cylindrical coating is not necessary.

As shown in FIG. 1C, the body 110 having the aluminum layer 112 coated on the surface is placed in the water tank 121 containing the electrolyte solution 125, and then the power source 127 is connected to the aluminum layer 112 and the water tank 121. Connect to the negative electrode terminal 123 contained in). In this case, an anode is connected to the aluminum layer 112, and a cathode is connected to the cathode terminal 123 to oxidize the aluminum layer 112.

Here, sulfuric acid, chromic acid, oxalic acid, or the like may be used as the electrolyte 125. When the aluminum layer 112 impregnated in the electrolyte 125 is connected to the positive electrode, the current flows through the aluminum layer 112 connected with the positive electrode, and oxygen gas is generated, and the negative electrode terminal 123 connected with the negative electrode generates hydrogen gas. The oxygen generated in the aluminum layer forms a thin layer of an aluminum oxide layer (Al ₂ O ₃ ) on the surface of aluminum. At this time, if the voltage is large enough, a considerable amount of heat is generated as the thin film is destroyed along with the erosion effect of the electrolyte, and the heat further encourages erosion by the electrolyte to form a porous film.

Various methods according to various electrolytes may be applied for anodizing aluminum, and since such methods are widely known, a detailed description thereof will be omitted.

As illustrated in FIG. 1D, a plurality of grooves 114 are formed in the aluminum oxide layer 117 formed by oxidizing aluminum, and the grooves 114 are regularly or irregularly formed to form a fine pattern.

The groove 114 may have a diameter of 5 nm to 600 nm, and the pitch between the grooves 114 may be 10 nm to 1200 nm. However, the present invention is not limited to the size of the groove.

In the state in which the groove 114 is formed in the aluminum oxide layer 117, the body 110 is put in the water tank 131 containing the etching solution 135 so that the fine pattern is transferred to the body 110. The etchant 135 penetrates into the body 110 through the groove 114 to etch the body 110. When the body 110 is made of a polymer, the etching solution 135 may be made of an organic solvent. When the body is made of metal, the etching solution 135 may be patterned with a metal etching solution including an acid.

In addition, the present invention is not necessarily limited to the method of etching with an etchant, and etching of various methods such as etching using an oxygen plasma may be applied.

When etching, it is possible to form a fine pattern consisting of a groove having a desired depth in the body by adjusting the etching time etching solution and the like.

As shown in FIG. 1E, when the etching is completed, the groove 114 formed in the aluminum oxide layer 117 is transferred to the body 110 to form a fine pattern including the groove 116 in the body 110.

In order to remove the aluminum oxide layer 117 formed on the body 110, the body 110 is placed in a water tank 132 containing an alkaline aqueous solution 134 such as sodium hydroxide to remove the aluminum oxide layer 117 from the body.

When the aluminum oxide layer 117 on the body 110 is removed, a roll stamp 100 having a fine pattern formed of a groove 116 on the surface thereof may be obtained as shown in FIG. 1F.

When the micro pattern is formed using the present embodiment and aluminum anodization, and the micro pattern is transferred to the body 110 made of a hard material, the stamp 100 having the micro pattern can be easily formed. In addition, unlike the optical lithography process, the pattern can be easily formed on the body of the roll structure having a curved surface, and thus, the nano-pattern can be formed in a continuous process using a roll-shaped stamp.

2A to 2E are perspective views illustrating a method of manufacturing a roll stamp according to a second embodiment of the present invention.

As shown in FIG. 2A, a cylindrical base 211 having a surface made of aluminum is prepared, and the surface of the base 211 is oxidized by the aforementioned anodizing method to form a fine pattern made of the grooves 212.

As shown in FIG. 2B, the first support layer 221 is formed on the outer surface of the base 211 where the grooves 212 are formed. The first support layer 221 may be made of a polymer or a metal, and may be formed by a coating method to be in close contact with the outer surface of the base 211.

When the first support layer 221 is formed as shown in FIG. 2C, the first support layer 221 is separated from the base 211 using sodium hydroxide or the like. When the first support layer 221 is separated from the base 211, a tubular first support layer 221 is formed, and the groove of the base 211 is formed on the inner surface of the first support layer 221 which is in contact with the base 211. A pattern consisting of protrusions 223 corresponding to 212 is formed. In the process of forming the first support layer 221, the material forming the first support layer 221 is not filled with the grooves 212 by adjusting the viscosity, time, and wettability of the material forming the first support layer 221. You can do that. In this way, the height of the protrusion 223 formed on the first support layer 221 may be adjusted to a desired size.

As shown in FIG. 2D, a second support layer 231 in close contact with the inner surface of the first support layer 221 is formed inside the first support layer 221. The second support layer 231 is formed by filling the inside of the first support layer 221 with a metal such as synthetic resin or nickel having a greater strength than a fine pattern formed by oxidation of aluminum.

As shown in FIG. 2E, when the second support layer 231 is separated from the first support layer 221, a stamp having a fine pattern formed of a groove 235 corresponding to the protrusion 223 of the first support layer 221 may be formed. 200) can be obtained.

Thus, according to this embodiment, a fine pattern is formed by aluminum anodic oxidation, and the fine pattern can be easily produced by transferring the fine pattern to the second support layer having excellent strength. Further, by transferring the fine pattern to the roll-shaped stamp, a stamp can be produced easily in a continuous process.

3A to 3C are diagrams for explaining a manufacturing process of a stamp according to a third embodiment of the present invention.

As shown in FIG. 3A, the inner surface of the tubular base 311 made of aluminum is prepared, and the inner surface of the base 311 is oxidized by the anodic oxidation method described above to form a fine pattern made of the grooves 312 on the inner surface. Form.

As shown in FIG. 3B, the first support layer 321 in close contact with the inner surface of the base 311 is formed. The first support layer 321 may be made of a metal such as synthetic resin or nickel having a greater strength than a fine pattern formed by oxidation of aluminum. In this process, the material constituting the first support layer 321 is filled in the groove 312 so that a fine pattern made of a protrusion 325 corresponding to the groove of the base 311 is formed on the surface of the first support layer 321.

In forming the first support layer 321, a material formed of a liquid may be filled in the base 321, and an auxiliary material such as a cylinder smaller than an inner diameter of the base 321 may be formed in the base 321. The first support layer 321 may be formed by filling a material made of a liquid in a state where the c) is inserted.

As shown in FIG. 3C, when the first support layer 321 is separated from the base 311, a roll stamp 300 having a fine pattern formed of protrusions 325 may be obtained on the surface thereof.

As described above, according to the third embodiment, a roll-shaped stamp can be produced more easily by oxidizing the inner surface of the tubular base to form a pattern.

4 is a diagram illustrating a process of forming a fine pattern by an imprint lithography method using a roll stamp having a pattern made of protrusions.

Referring to FIG. 4, a resist layer 423 is formed on an upper surface of the substrate 421, and a roll stamp 412 having a fine pattern of protrusions 414 is provided on the resist layer 423. When the resist layer 423 is pressed with the roll stamp 412, and the roll stamp 412 is rotated and transferred, the fine pattern formed of the groove 425 corresponding to the protrusion 414 formed on the roll stamp 412 is resisted. Transferred to layer 423.

5 is a perspective view illustrating an imprint lithography process using a roll stamp 432 having a fine pattern of grooves 434.

Referring to FIG. 5, a resist layer 423 is formed on an upper surface of the substrate 421, and a roll stamp 432 having a fine pattern of grooves 434 is provided on the resist layer 423. When the resist layer 423 is pressed with the roll stamp 432 and the roll stamp 432 is rotated and transferred, the fine pattern formed of the protrusions 427 corresponding to the grooves 434 formed in the roll stamp 432 is resisted. Transferred to layer 423.

By using a roll stamp as described above, it is possible to transfer a fine pattern continuously to a line-shaped substrate, thereby improving productivity.

In the above description of the preferred embodiment of the present invention, the present invention is not limited thereto, and various modifications and changes can be made within the scope of the claims and the detailed description of the invention and the accompanying drawings. Naturally, it belongs to the range of.

1A to 1F illustrate a process of manufacturing a stamp for imprint lithography according to a first embodiment of the present invention.

2A to 2E illustrate a process of manufacturing a stamp for imprint lithography according to a second embodiment of the present invention.

3A to 3C are diagrams illustrating a process of manufacturing a stamp for imprint lithography according to a third embodiment of the present invention.

4 is a diagram illustrating a process of forming a pattern on a substrate using a roll stamp having a pattern made of protrusions.

5 is a diagram illustrating a process of forming a pattern on a substrate using a roll stamp having a pattern made of grooves.

Claims (10)

delete delete delete delete delete Preparing a body whose surface is made of aluminum; A pattern forming step of forming a fine pattern by anodizing on the body; A first support layer forming step of forming a first support layer in close contact with an inner surface of the body having the fine pattern formed thereon; And A first supporting layer separating step of separating the first supporting layer from the body; Including; The body is made of a tubular shape, the fine pattern is a method of manufacturing a stamp formed on the inner surface of the body. delete The method of claim 6, The first support layer is a method of manufacturing a stamp made of a synthetic resin or metal having a greater strength than the fine pattern formed by the oxidation of the aluminum in the pattern forming step. Preparing a body whose surface is made of aluminum; A pattern forming step of forming a fine pattern by anodizing on the body; A first support layer forming step of forming a first support layer in close contact with the surface of the body on which the fine pattern is formed; And A first supporting layer separating step of separating the first supporting layer from the body; Including; The body has a cylindrical outer surface, the pattern is formed on the outer surface of the body, A second support layer forming step of forming a second support layer in close contact with the inside of the first support layer; And a second support layer separating step of separating the second support layer from the first support layer. 10. The method of claim 9, The second support layer is a method of producing a stamp made of a synthetic resin or metal having a greater strength than the fine pattern formed by the oxidation of the aluminum in the first support layer is the pattern forming step.

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