KR101045793B1 - Coating method and device - Google Patents

Abstract

The disclosed coating method and apparatus aggregates powder having an average particle diameter of 30 to 5,000 nm by high frequency vibration to form the powder into granules having an average particle diameter of 1 to 20 μm, and breaks the granules by high speed rotation. After the granules are formed into a coating powder having an average particle diameter of 30 to 5,000 nm, the base metal is coated by performing an atmospheric plasma spray coating process using the coating powder as a thermal spraying material.

Description

Coating method and apparatus {Apparatus and method of forming a coating layer}

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a coating method and apparatus, and more particularly, to a method and apparatus for coating a component used in a manufacturing process of a semiconductor device.

In general, in the manufacture of semiconductor devices, a process using a plasma such as dry etching, chemical vapor deposition, and the like is frequently performed. In the process of using the plasma mentioned above, a gas having corrosiveness such as a fluorine-based gas or a chlorine-based gas is mainly used. Therefore, a manufacturing apparatus, a component such as a chamber inner wall, a component installed inside the chamber, and the like, which are applied to a process using plasma, requires a material having excellent plasma resistance. Therefore, the above-mentioned manufacturing apparatus and components are coated with a ceramic having excellent plasma resistance on its surface.

The ceramic coating mentioned here is mainly achieved by atmospheric plasma spraying (APS). In the atmospheric plasma spraying, a granule having an average particle diameter of several to several tens of micrometers is mainly used as the thermal spraying material. In addition, the granule having an average particle diameter of several to several tens of micrometers, which is a thermal spraying material, performs a ball-mill to which organic substances such as a dispersant and a binder are added, and then performs baking for a long time to remove organic substances. Obtained by.

However, in performing the above-mentioned atmospheric plasma spraying, there is a disadvantage in that productivity is reduced because a large amount of time is required to prepare a granule having an average particle diameter of several to several tens of micrometers. In addition, since the granule has an average particle diameter of several to several tens of micrometers, the pores of the coating film on which the ceramic coating is made are increased, and as a result, the porosity is increased. In addition, since the granule has an average particle diameter of several to several tens of micrometers, the process cost increases slightly because power exceeding 40 Kwatts must be used as output energy when performing atmospheric plasma spraying.

 It is a first object of the present invention to provide a coating method using a thermal spray material having an average particle diameter of nanometer size.

It is a second object of the present invention to provide a coating apparatus in which the coating method mentioned above can be easily applied.

Coating method according to a preferred embodiment of the present invention for achieving the first object is agglomerated powder having an average particle diameter of 30 to 5,000nm by high frequency vibration granules having an average particle diameter of 1 to 20㎛ formed into granules, and the granules are crushed by high-speed rotation to form the granules into coating powders having an average particle diameter of 30 to 5,000 nm, and then use the coating powders as a spraying material. A thermal spray coating process is performed to coat the base material.

In the coating method according to the aforementioned embodiment, the atmospheric plasma spray coating process may be performed using 1 to 40 Kwatt of power as output energy.

In the coating method according to the mentioned embodiment, the powder for forming into the granules may include ceramic powder, which may include yttrium oxide, aluminum oxide, aluminum nitride, silicon carbide, mixtures thereof, and the like.

In the coating method according to the mentioned embodiment, the high frequency vibration may be 1 to 300Hz, the high speed rotation may be 8,000 to 20,000rpm.

In the coating method according to the mentioned embodiment, it is possible to provide an inert gas to the granules, resulting in aerosolization of the granules.

In the coating method according to the mentioned embodiment, it is possible to transfer the granules and coating powder, and in particular, the granules and coating powder may be heated when transferring the granules and coating powder.

Coating apparatus according to a preferred embodiment of the present invention for achieving the second object is agglomerated powder having an average particle diameter of 30 to 5,000nm by high frequency vibration granules having an average particle diameter of 1 to 20㎛ Granules forming portion formed with, and the granules are connected to receive the granules from the granules, the granules are broken by the high-speed rotation to the granules 30 to 5,000nm coating powder having an average particle diameter A coating powder forming part to be formed of a coating powder, and the coating powder forming part is connected to receive the coating powder from the coating powder forming part, and performs a atmospheric plasma spray coating process using the coating powder as a spraying material to coat the base material. Contains wealth.

In the coating apparatus according to the above-mentioned embodiment, the coating unit may perform the atmospheric plasma spray coating process using the power of 1 to 40Kwatt as the output energy.

In the coating apparatus according to the above-mentioned embodiment, the granule forming part may include a high frequency vibration providing part providing high frequency vibration of 1 to 300 Hz and a guide rail providing a path through which powder for forming into the granule moves. In addition, the granule may further include an inert gas providing unit for providing an inert gas for aerosolizing the granules.

In the coating apparatus according to the above-mentioned embodiment, the coating powder forming part is a rotating body rotating at a high speed at a speed of 8,000 to 20,000rpm to break the granules, a fixed body surrounding the rotating body while maintaining a constant distance and the It may include an internal space between the rotating body and the stationary body.

In the coating apparatus according to the above-mentioned embodiment, the granules are formed to be heated to heat the granules and the coating powder between the granulation forming portion, the coating powder forming portion and the coating portion, and the path through which the powder is provided to the granule forming portion. The heating unit may further include.

As mentioned, in the case of the coating method and apparatus of the present invention, high frequency vibration is used to form a powder having an average particle size of nanometer size into granules having a micrometer size, that is, an average particle diameter of 1 to 20 μm, Using high speed rotation, granules are crushed into coating powders with nanometer size, i.e., an average particle diameter of 30 to 5,000 nm, which are used as a spray material in atmospheric plasma spraying.

Therefore, the present invention can omit the step of forming the granule to which the organic material is added for the powder supply in the atmospheric plasma spraying process and the baking process for removing the organic material. Thus, the present invention can perform the atmospheric plasma spraying in a short time, as a result can be expected to improve the productivity. In addition, since the coating powder having an average particle diameter of 30 to 5,000 nm, which is a nanometer size, is used as the thermal spraying material, the porosity of the coating film on which the ceramic coating is formed can be sufficiently reduced. In addition, since the coating powder mentioned above has an average particle diameter of 30 to 5,000 nm, the output energy can be sufficiently lowered to 40 Kwatt or less when performing atmospheric plasma spraying, thereby reducing the process cost.

Hereinafter, exemplary embodiments of the present invention will be described in detail with reference to the accompanying drawings. As the inventive concept allows for various changes and numerous embodiments, particular embodiments will be illustrated in the drawings and described in detail in the text. However, this is not intended to limit the present invention to a specific disclosed form, it should be understood to include all modifications, equivalents, and substitutes included in the spirit and scope of the present invention. In describing the drawings, similar reference numerals are used for similar elements. In the accompanying drawings, the dimensions of the structures are shown in an enlarged scale than actual for clarity of the invention.

Terms such as first and second may be used to describe various components, but the components should not be limited by the terms. The terms are used only for the purpose of distinguishing one component from another. For example, without departing from the scope of the present invention, the first component may be referred to as a second component, and similarly, the second component may also be referred to as a first component.

The terminology used herein is for the purpose of describing particular embodiments only and is not intended to be limiting of the invention. Singular expressions include plural expressions unless the context clearly indicates otherwise. In this application, the terms "comprise" or "having" are intended to indicate that there is a feature, number, step, action, component, part, or combination thereof described in the specification, and that one or more other features It should be understood that it does not exclude in advance the possibility of the presence or addition of numbers, steps, actions, components, parts or combinations thereof.

Unless defined otherwise, all terms used herein, including technical or scientific terms, have the same meaning as commonly understood by one of ordinary skill in the art. Terms such as those defined in the commonly used dictionaries should be construed as having meanings consistent with the meanings in the context of the related art and shall not be construed in ideal or excessively formal meanings unless expressly defined in this application. Do not.

Coating device

1 is a schematic diagram illustrating a coating apparatus according to an embodiment of the present invention.

Referring to FIG. 1, the coating apparatus 100 of the present invention may be understood as coating a material such as a manufacturing apparatus applied to a process using a plasma, for example, an inner wall of a chamber, a component installed in the chamber, and the like. It may be limited to coating the material of the manufacturing apparatus or the component applied to the manufacturing process of the semiconductor device which performs dry etching, chemical vapor deposition and the like frequently.

Thus, the coating apparatus 100 of FIG. 1 includes a granule forming part 11, a coating powder forming part 13, a coating part 15, and further includes heating parts 17a, 17b, 17c, and the like. It may also be included. The heating units 17a, 17b, and 17c mentioned herein may be divided into a first heating unit 17a, a second heating unit 17b, and a third heating unit 17c for convenience, and the first heating unit 17a may be It is installed in the path provided to the granule forming part 11, the second heating part 17b is installed in the path between the granule forming part 11 and the coating powder forming part 13, and the third heating part. 17c may be understood to be installed in a path between the coating powder forming part 13 and the coating part 15.

The coating apparatus 100 mentioned above uses the granule forming part 11 to form a powder having an average particle size of nanometer (nm) into granules having an average particle size of a micrometer (μm). Then, the granule is formed into a coating powder having an average particle size of nanometer (nm) size using the coating powder forming part 13, and then the coating part 15 using the coating powder as a spraying material is used. The base material 21 is coated by the atmospheric plasma spray coating. In particular, the aforementioned coating powder may be supplied in the form of an aerosol or the like. In addition, it is preferable that the average particle diameter of the nanometer size of the powder for forming the granules, that is, the raw material powder, is about 30 to 5,000 nm, and the granules obtained by the granule forming unit 11 mentioned above. It is preferable that an average particle diameter is about 1-20 micrometers, and it is preferable that the average particle diameter of the coating powder obtained by the coating powder formation part 13 is about 30-5,000 nm.

Hereinafter, the coating apparatus 100 of FIG. 1 mentioned above will be described in more detail.

FIG. 2 is a schematic diagram illustrating the granule formation of FIG. 1. FIG.

Referring to FIG. 2, the granule forming unit 11 forms a powder having an average particle diameter of 30 to 5,000 nm as a granule having an average particle diameter of 1 to 20 μm as mentioned above, and mainly generates high frequency vibration. To form granules by agglomerating the mentioned powders. In particular, in the case of the powder for forming with the mentioned granules, it may have an average particle diameter of 30 to 5,000 nm, but preferably may have an average particle diameter of 30 to 2500 nm, more preferably of 30 to 1500 nm. It may have an average particle diameter, and more preferably may have an average particle diameter of 30 to 800nm.

Therefore, the granule forming part 11 includes a high frequency vibration providing part 11a that provides high frequency vibration so that the powder having a mean particle size of 30 to 5,000 nm is aggregated. Here, when the high frequency vibration provided by the high frequency vibration providing unit 11a is very weak, it is not preferable because the aggregation of the powder is not easy, and when it is very strong, the rate at which the powder is aggregated is not properly controlled. Because it is not desirable. Therefore, the high frequency vibration provided by the high frequency vibration providing unit 11a is preferably adjusted to provide several to several hundred Hz. Thus, the high frequency vibration providing unit 11a in the present invention is preferably adjusted to provide high frequency vibration of about 1 to 300 Hz, more preferably about 20 to 200 Hz to provide high frequency vibration, and about 50 to about It is more desirable to adjust to provide a high frequency vibration of 150 Hz. Here, as an example of the high frequency vibration providing part 11a mentioned above, the member which vibrates by a piezoelectric element, the member which vibrates by a motor, etc. are mentioned. In particular, in the present invention, the powder for forming into granules includes ceramic powder such as yttrium oxide (Y ₂ O ₃ ), aluminum oxide (Al ₂ O ₃ ), aluminum nitride (AlN), silicon carbide (SiC), and the like, which will be described later. Therefore, the high frequency vibration provided by the high frequency vibration providing unit 11a is preferably adjusted to about 1 to 300 Hz as mentioned.

In addition, the high frequency vibration provided by the high frequency vibration providing unit 11a may be limited by the type of powder to be formed into granules. That is, when using other types of powders than ceramic powder, the range of the high frequency vibration is not limited to the mentioned range, but may have various ranges.

And the granule forming portion 11 is formed of a powder that is initially supplied, the raw powder having an average particle diameter of about 30 to 5,000nm into a granule having an average particle diameter of about 1 to 20㎛, and providing a path for transferring the same. And a guide rail 11b. If the guide rail 11b mentioned above is omitted, it is not easy to form the powder to be aggregated to form a granule so as to have a constant average particle diameter, that is, an average particle diameter of about 1 to 20 μm. In other words, when the guide rail 11b is omitted, it is not easy to control to have a desired average particle diameter because the raw material powder provided to the granule forming part 11 aggregates while floating in the granule forming part 11. Because it does not. Thus, the granule forming portion 11 can easily form a granule having an average particle diameter of 1 to 20㎛ by providing the guide rail 11b mentioned.

As such, the mentioned granule forming portion 11 includes a high frequency vibration providing portion 11a for providing a high frequency vibration of about 1 to 300 Hz and a guide rail 11b for providing a path through which the powder moves. The powder having an average particle diameter of 30 to 5,000 nm provided to the forming portion 11 is agglomerated by high frequency vibration to form granules having an average particle diameter of 1 to 20 μm.

In addition, the granule forming unit 11 may adjust the average particle diameter of the granules to be aggregated and the speed of providing the granules to the powder forming unit 13 for coating through the control of the high frequency vibration and the control of the output current. have. That is, the granule formation part 11 can form the granule which has a desired average particle diameter by appropriately controlling a high frequency vibration, and also the granule which moves along the guide rail 11b through the appropriate control of an output current. By adjusting the speed, the granules can be provided to the powder forming portion 13 for coating at a desired speed. In other words, by adjusting the intensity of the high frequency vibration transmitted to the granules through proper control of the output current, the speed of the granules moving along the guide rail 11b mentioned above can be adjusted.

In addition, the raw material powder, which is a powder provided to the granule forming part 11, is for ceramic coating and may include ceramic powder. In particular, examples of the ceramic powder mentioned include yttrium oxide (Y ₂ O ₃ ), aluminum oxide (Al ₂ O ₃ ), aluminum nitride (AlN), silicon carbide (SiC), and the like. These may be used alone or in combination of two. In particular, the powder mentioned is provided to the granule forming part 11 using a carrier gas. Here, the aforementioned carrier gas is used not only to provide the raw powder to the granule forming portion 11 but also to aerosolize the granule obtained from the raw powder. Thus, the mentioned carrier gas preferably contains an inert gas. Thus, examples of the inert gas that can be used as the carrier gas include oxygen, argon, nitrogen, hydrogen, helium, and the like, and these can be used alone or in combination of two or more.

In the case of the aforementioned carrier gas, that is, inert gas, the granule forming part 11 may be provided together with the powder, or alternatively, only the inert gas may be separately provided after the powder is provided to the granule forming part 11. In addition, the granule forming part 11 may be provided together with the powder, and then may be separately provided to the granule forming part 11 again.

As such, since the raw powder is provided using the inert gas and the granule can be aerosolized, the granule forming unit 11 may further include an inert gas providing unit capable of providing an inert gas. In particular, when providing the inert gas to the granule forming part 11 together with the powder, it can be understood that the inert gas providing part is the same as the member for providing the carrier gas.

The first heating part 17a mentioned above is installed in the path through which the powder is provided to the granule forming part 11. That is, since the powder provided to the granule forming part 11 is not easy to control the size of the granule due to the influence of moisture adsorbed to the granule forming part 11 or the powder itself, the first heating part ( It is possible to secure the formation of granules of a predetermined size by installing 17a) to remove moisture adsorbed to the granule forming portion 11 or the powder itself. Therefore, the coating apparatus 100 may provide the powder to the granule forming part 11 stably and easily by installing the first heating part 17a. In particular, when the temperature provided by the first heating unit 17a is less than about 80 ° C., the removal of moisture for securing the fluidity of the powder is not preferable, and it is not preferable. Because it is not desirable. Thus, the temperature provided by the first heating unit 17a mentioned above is about 80 to 200 ° C., and may be sufficient to remove moisture of the powder itself or moisture inside the granule forming unit 11.

In addition, although the first heating unit 17a mentioned above is limited to being installed in a path through which powder is provided to the granule forming unit, the first heating unit 17a also heats the granule forming unit 11 itself. It may be installed.

In addition, in the case of the 2nd heating part 17b, it is provided for the improvement of the crushing efficiency by the high speed rotation of the rotating body 131a of the powder formation part 13 for coating mentioned later. That is, the second heating unit 17b is installed to dry the granules provided to the coating powder forming unit 13, so that the granules in a sufficiently dried state have good crushing efficiency due to high speed rotation. Because. Accordingly, the second heating unit 17b mentioned above is heated to a temperature of about 80 to 200 ° C. similarly to the first heating unit 17a.

And in the case of the third heating unit (17c) by heating the coating powder crushed by the high-speed rotation, this can be understood as preheating for improving the coating property of the coating powder. That is, the third heating unit 17c is provided to improve the spraying efficiency in the atmospheric plasma spray coating process by preheating the coating powder as mentioned above. Therefore, it is preferable that heating of the coating powder using the 3rd heating part 17c is performed at the temperature of about 100-600 degreeC.

3 is a schematic diagram illustrating a powder forming part for coating of FIG. 1.

Referring to FIG. 3, the coating powder forming part 13 is connected to receive granules from the granule forming part 11. And the coating powder forming part 13 to form a granule having an average particle diameter of about 1 to 20㎛ provided from the granule forming portion 11 as a coating powder having an average particle diameter of about 30 to 5,000nm As a result, the granules mentioned above are mainly broken by high speed rotation to form a coating powder. That is, the coating powder forming part 13 mainly forms powder for coating by crushing the granules by shear force and collision due to high speed rotation of the rotor.

Thus, the coating powder forming part 13 is a rotating body 131a rotating at a speed of about 8,000 to 20,000rpm, the fixed body 131b surrounding the rotating body 131a while maintaining a predetermined distance, and the aforementioned times The internal space 131c which is a predetermined interval between the whole 131a and the fixed body 131b is included. Therefore, the aforementioned coating powder forming part 13 is provided with the granules in the inner space 131c, and breaks the granules by shear force and collision due to high-speed rotation using the rotating body 131a, and thus, about 30 to 5,000 nm. It is possible to form a coating powder having an average particle diameter of. Here, as an example of the rotating body 131a of the powder forming part 13 for coating, members, such as a motor which can rotate at high speed, etc. are mentioned.

In addition, the inner space 131c of the coating powder forming part 13 may be provided to have various shapes. Particularly, in the case of one embodiment of the present invention, the inner space 131c mentioned for easy provision of the coating powder to the subsequent coating part 15 may be provided in a cone shape, that is, concentric shape. In other words, the inner space 131c of the coating powder forming part 13 may have a concentric shape in which the width of the upper space is larger than the width of the lower space.

Here, the high speed rotation of the rotating body 131a of the powder forming part 13 for coating is preferably about 8,000 to 20,000, more preferably about 10,000 to 20,000. This is not preferable because the granules are not easily broken when the rpm, the rotational speed of the rotating body mentioned above, is low, and it is not preferable because the process control due to obtaining powder for coating is not easy at high speed. Not. In other words, it is because the formation of the coating powder having an average particle diameter of 30 to 5,000 nm is easy when the rpm, which is the rotation speed of the rotating part 13a, cannot be properly adjusted.

As such, the coating powder forming part 13 mentioned above is coated from the granule forming part 11 by crushing the granules by shearing force and impact by rotating the rotating body 131a at a high speed of about 8,000 to 20,000 rpm. The granule having an average particle diameter of about 1 to 20 μm provided to the powder forming portion 13 may be formed of a coating powder having an average particle diameter of 30 to 5,000 nm.

Hereinafter, a method of forming the coating powder using the coating powder forming part 13 of FIG. 3 will be described.

4 is a view showing a state of forming a coating powder using the coating powder forming part of FIG.

Referring to FIG. 4, a granule 41 is provided from the granule forming portion 11 to the inner space 131c of the powder forming portion 13 for coating. And the rotating body (131a) of the coating powder forming part 13 is rotated at a high speed of about 8,000 to 20,000rpm. As described above, the rotating body 131a of the powder forming part 13 for coating is rotated at high speed to generate shear stress due to viscosity in the internal space 131c between the rotating body 131a and the fixed body 131b. do. Thus, the granules 41 having an average particle diameter of about 1 to 20 탆 are broken by the aforementioned shear stress, thereby forming a coating powder 43 having an average particle diameter of about 30 to 5,000 nm. In particular, in the present invention, since the granule is provided as an aerosol as mentioned in the inner space 131c of the coating powder forming part 13, it is possible to form a coating powder having a uniform size, and Uniform coating is possible with the coating part 15. That is, the aerosolized granule 41 provided in the inner space 131c of the coating powder forming part 13 is coated powder by the high speed rotation of the rotating body 131a of the coating powder forming part 13. Since the coating powder 43 and the inert gas are mixed with the 43 and the inert gas at the same time, the coating powder 43 can be formed with a uniform nanometer size as mentioned, and the subsequent coating part It is possible to provide uniform in (15).

Referring again to FIG. 1, the coating part 15 coats the base material 21 by using the coating powder provided from the coating powder forming part 13 as a spraying material, as mentioned above. Coating portion 15 in one embodiment of the invention has a configuration to coat the base material 21 by the atmospheric plasma spray coating.

Thus, the coating part 15 mentioned above coats the base material 21 by instantaneously melting and spraying the coating powder provided from the coating powder forming part 13. At this time, the coating part 15 mentioned above uses a coating powder having an average particle diameter of about 30 to 5,000 nm formed by the powder forming part 13 for coating as a thermal spraying material can sufficiently lower the output energy. . That is, when using the thermal spraying material having an average particle diameter of 20 to 80㎛ as in the prior art, the coating portion 15 requires an output energy of more than 40 Kwatt, but the average particle diameter of 30 to 5,000 nm as in the present invention In the case of using the coating powder having a thermal spraying material, since the thermal spraying material can be easily melted even at a somewhat low temperature, the coating part 15 requires an output energy of 40 Kwatt or less. Thus, the coating unit 15 is a coating material having an average particle diameter of 30 to 5,000nm as a thermal spraying material, and the base material 21 by performing a thermal plasma spray coating using the power of 1 to 40Kwatt as the output energy ) Is coated. At this time, when the output energy of the coating unit 15 mentioned below is less than 1Kwatt, it is not preferable because the coating is not easily performed, and since the coating powder having an average particle diameter of 30 to 5,000 nm is used as the thermal spraying material, the coating is performed. The output energy of the section 15 need not exceed 40 Kwatts. In other words, the output energy in the coating 15 is preferably about 1 to 40 Kwatts, more preferably about 5 to 35 Kwatts, still more preferably about 10 to 30 Kwatts.

This is because the coating powder having an average particle diameter of about 30 to 5,000 nm can be used as the spraying material, and the spraying material mentioned above can be uniformly supplied to the coating unit 15, thereby performing the atmospheric plasma coating process. This is because uniform melt spraying of the coating powder is possible even at a lower output energy than the conventional 40 Kwatt, and the amount of insoluble powder can be suppressed to the maximum.

In addition, as mentioned above, the third heating unit 17c may improve the efficiency according to the coating by preheating the coating powder, and also provide an effect of further reducing the output energy.

In addition, reference numeral 19 denotes a stage on which the base material 21 is placed when plasma spray coating is performed using the coating part 15, and the process conditions are performed by coating the x-axis, the y-axis, and the z-axis. Satisfies

As described above, the coating apparatus 100 of the present invention uses the granule forming portion 11 and the powder forming portion 13 for coating to form a coating powder having an average particle diameter of 30 to 5,000 nm as a thermal spraying material. Therefore, a separate process performed for removing organic matters and the like, as in the conventional formation of the thermal spraying material, can be omitted. Thus, in the case of using the coating apparatus 100 of the present invention can be performed in a short time, as a result can be expected to improve the productivity. In addition, since the coating apparatus 100 of the present invention uses a coating powder having an average particle diameter of 30 to 5,000 nm as the thermal spraying material, it is possible to sufficiently reduce the porosity of the coating film coated on the base material 21. In addition, since the coating powder, which is a thermal spraying material, has an average particle diameter of 30 to 5,000 nm, the output energy may be sufficiently lowered to 40 Kwatt or less when performing atmospheric plasma spraying, thereby reducing the process cost.

Coating method

5 is a process chart showing a coating method using the coating apparatus of FIG.

Referring to FIG. 5, a powder having an average particle diameter of 30 to 5,000 nm is prepared. (S51) At this time, the powder includes yttrium oxide, aluminum oxide, aluminum nitride, silicon carbide, and the like. Then, the powder mentioned is provided to the granule forming part 11. In addition, the granule forming part 11 is provided to the granule forming part 11 by using the first heating part 17a mentioned to remove moisture in the powder or the powder itself. The powder is heated or the inside of the granule forming part 11 is heated. (S59a)

As the powder having the average particle diameter of 30 to 5,000 nm is provided to the granule forming part 11, the high frequency vibration is provided by the powder mentioned by the high frequency vibration providing part 11a of the granule forming part 11. The powder having an average particle diameter of about 5,000 nm is aggregated to form a granule having an average particle diameter of 1 to 20 μm. (S53) In this case, an average particle diameter of 30 to 5,000 nm provided to the granule forming part 11 is obtained. The powder having agglomeration is formed while moving along the guide rail 11b of the granule forming portion 11, and as a result, it is formed into a granule having an average particle diameter of 1 to 20 mu m.

Subsequently, the granules formed using the granule forming portion 11 are aerosolized by an inert gas supplied to the granule forming portion 11 to be provided to the powder forming portion 13 for coating as mentioned. . At this time, as mentioned, the heating is performed in the path where the granules are provided using the second heating unit 17b. (S59b) This also removes the moisture contained in the mentioned granules to facilitate the crushing. For sake.

As such, the granule provided to the coating powder forming part 13 is formed of a coating powder having an average particle diameter of 30 to 5,000 nm by high speed rotation of the rotating body 131a.

Then, the coating powder formed by using the coating powder forming part 13 is provided to the coating part 15. At this time, as mentioned above, heating is performed in a path in which the coating powder is provided using the third heating unit 17c. (S59c) As described above, the coating efficiency is improved by preheating the coating powder. To induce further reduction in output energy.

Subsequently, the coating part 15 coats the base material 21 using a coating powder having an average particle diameter of 30 to 5,000 nm provided from the coating powder forming part 13 as a thermal spraying agent (S57). 15 uses a coating powder having an average particle diameter of 30 to 5,000 nm as the thermal spraying material, so that coating using power of about 1 to 40 Kwatts as an output energy can be easily performed. That is, the coating unit 15 is capable of performing the atmospheric plasma spray coating despite the use of a somewhat lower output energy.

Coating evaluation

In fact, using a yttrium oxide powder as shown in Table 1, a granule having a mean particle size of about 35 μm was prepared as a first sample by a conventional method, and as a second sample, a granule having a mean particle size of about 100 nm was used. A coating powder having an average particle diameter is prepared as a thermal spray material, and a coating powder having an average particle diameter of about 300 nm is provided as a thermal spray material by a method of the present invention as a third sample, and a method of the present invention is provided as a fourth sample. A coating powder having an average particle diameter of about 400 nm was provided as a thermal spray material, and a coating powder having an average particle diameter of about 800 nm was provided as a thermal spray material as a fifth sample by the method of the present invention.

In addition, an atmospheric plasma spray coating using each of the first to fifth samples as a thermal spraying material was performed to form a coating having a thickness of about 200 μm on the base material. The atmospheric plasma spray coating mentioned herein is the same as the coating using the coating of the present invention.

As a result, in the case of the first sample, it was confirmed that the porosity was about 5.5%, the adhesion was about 35 MPa, and the leakage current was not measurable. The second to fifth samples were found to have porosity of about 1.5% or less, adhesion of about 64 to 66 Mpa, and little leakage current. In addition, it was confirmed that the volume resistance of the second to fifth samples was also good.

As such, when using the coating apparatus and method of the present invention, it can be seen that coating having excellent porosity and adhesion as well as excellent electrical properties is possible.

Thus, the coating apparatus and method of the present invention provide easy formation of a coating film having excellent physical and electrical properties despite the improvement of productivity and the reduction of the process cost.

1 is a schematic diagram illustrating a coating apparatus according to an embodiment of the present invention.

FIG. 2 is a schematic diagram illustrating the granule formation of FIG. 1. FIG.

3 is a schematic diagram illustrating a powder forming part for coating of FIG. 1.

4 is a view showing a state of forming a coating powder using the coating powder forming part of FIG.

5 is a process chart showing a coating method using the coating apparatus of FIG.

Claims (13)

Aggregating the yttrium oxide raw material powder having an average particle diameter of 30 to 5,000 nm by high frequency vibration to form the raw material powder into granules having an average particle diameter of 1 to 20 μm; Crushing the granules by high speed rotation to form the granules as a powder for yttrium oxide coating having an average particle diameter of 100 to 800 nm ; And Coating method comprising the step of performing an atmospheric plasma spray coating process using the coating powder as a spray material to coat the base material. The coating method according to claim 1, wherein the atmospheric plasma spray coating process is performed using 1 to 40 Kwatt of power as output energy. delete delete The method of claim 1, wherein the high frequency vibration is 1 to 300Hz, the high speed rotation is 8,000 to 20,000rpm. The method of claim 1 wherein forming the granules further comprises providing an inert gas to the granules, wherein the granules are aerosolized by providing the inert gas. Coating method. The method of claim 1, further comprising transferring the granules and the coating powder, wherein the granules and the coating powder are heated when the granules and the coating powder are transferred. A granule forming part which aggregates the yttrium oxide raw material powder having an average particle diameter of 30 to 5,000 nm by high frequency vibration to form the raw material powder into granules having an average particle diameter of 1 to 20 μm; Forming powder for coating is connected to receive the granules from the granules forming portion, and crushing the granules by high-speed rotation to form the granules as a powder for yttrium oxide coating having an average particle diameter of 100 to 800 nm part; And And a coating unit connected to receive the coating powder from the coating powder forming unit and performing an atmospheric plasma spray coating process using the coating powder as a spraying material to coat the base material. The coating apparatus according to claim 8, wherein the coating unit performs an atmospheric plasma spray coating process using power of 1 to 40 Kwatts as output energy. The coating according to claim 8, wherein the granule forming part includes a high frequency vibration providing part for providing a high frequency vibration of 1 to 300 Hz and a guide rail for providing a path through which the powder for forming into the granule moves. Device. 11. The coating apparatus of claim 10, wherein the granule forming portion further comprises an inert gas providing portion for providing an inert gas for aerosolizing the granules. The method of claim 8, wherein the coating powder forming portion is rotating at high speed at a speed of 8,000 to 20,000rpm to crush the granules, the fixed body surrounding the rotating body while maintaining a predetermined distance from the rotating body and the high Coating device comprising an interior space between the stagnation. The heating apparatus of claim 8, further comprising a heating unit installed to heat the granules and the coating powder between the granule forming unit, the coating powder forming unit and the coating unit, and a path through which the powder is provided to the granule forming unit. Coating device, characterized in that.

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