KR20130089408A - Coating material for thermal spray using ceramic composite materials and fabrication method and coating method therof - Google Patents

Coating material for thermal spray using ceramic composite materials and fabrication method and coating method therof Download PDF

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KR20130089408A
KR20130089408A KR1020120010741A KR20120010741A KR20130089408A KR 20130089408 A KR20130089408 A KR 20130089408A KR 1020120010741 A KR1020120010741 A KR 1020120010741A KR 20120010741 A KR20120010741 A KR 20120010741A KR 20130089408 A KR20130089408 A KR 20130089408A
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powder
aln
yag
coating
coating layer
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KR1020120010741A
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Korean (ko)
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백경호
이정환
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충남대학교산학협력단
한국기계연구원
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    • C—CHEMISTRY; METALLURGY
    • C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
    • C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
    • C04B41/00—After-treatment of mortars, concrete, artificial stone or ceramics; Treatment of natural stone
    • C04B41/80—After-treatment of mortars, concrete, artificial stone or ceramics; Treatment of natural stone of only ceramics
    • C04B41/81—Coating or impregnation
    • C04B41/85—Coating or impregnation with inorganic materials
    • C04B41/87—Ceramics
    • C—CHEMISTRY; METALLURGY
    • C09—DYES; PAINTS; POLISHES; NATURAL RESINS; ADHESIVES; COMPOSITIONS NOT OTHERWISE PROVIDED FOR; APPLICATIONS OF MATERIALS NOT OTHERWISE PROVIDED FOR
    • C09D—COATING COMPOSITIONS, e.g. PAINTS, VARNISHES OR LACQUERS; FILLING PASTES; CHEMICAL PAINT OR INK REMOVERS; INKS; CORRECTING FLUIDS; WOODSTAINS; PASTES OR SOLIDS FOR COLOURING OR PRINTING; USE OF MATERIALS THEREFOR
    • C09D1/00—Coating compositions, e.g. paints, varnishes or lacquers, based on inorganic substances
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C4/00—Coating by spraying the coating material in the molten state, e.g. by flame, plasma or electric discharge
    • C23C4/04—Coating by spraying the coating material in the molten state, e.g. by flame, plasma or electric discharge characterised by the coating material
    • C23C4/10—Oxides, borides, carbides, nitrides or silicides; Mixtures thereof
    • C23C4/11—Oxides
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C4/00—Coating by spraying the coating material in the molten state, e.g. by flame, plasma or electric discharge
    • C23C4/12—Coating by spraying the coating material in the molten state, e.g. by flame, plasma or electric discharge characterised by the method of spraying
    • C23C4/134—Plasma spraying
    • C—CHEMISTRY; METALLURGY
    • C01—INORGANIC CHEMISTRY
    • C01P—INDEXING SCHEME RELATING TO STRUCTURAL AND PHYSICAL ASPECTS OF SOLID INORGANIC COMPOUNDS
    • C01P2004/00—Particle morphology
    • C01P2004/60—Particles characterised by their size
    • C01P2004/61—Micrometer sized, i.e. from 1-100 micrometer

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  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Organic Chemistry (AREA)
  • Materials Engineering (AREA)
  • Physics & Mathematics (AREA)
  • Plasma & Fusion (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Inorganic Chemistry (AREA)
  • Ceramic Engineering (AREA)
  • Structural Engineering (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Wood Science & Technology (AREA)
  • Coating By Spraying Or Casting (AREA)

Abstract

In manufacturing substrate supporting parts of semiconductor / display panel manufacturing equipment, nitrides or carbides with excellent thermal conductivity are mixed with oxide ceramics such as Al 2 O 3 or Y 2 O 3 in order to uniformly control the temperature of the surface of the parts. The present invention relates to a technique for forming a thermal spray coating layer using a composite powder, comprising: (a) mixing a powder mixed with AlN particles and YAG particles, a binder and a dispersant in a liquid solvent, and ball milling a slurry (B) spraying the mixed solution of the slurry into micron-sized droplets and removing the solvent in a hot air or inert gas atmosphere to prepare granule powder, (c) the granules in step (b) Heat-treating the powder at 1000-1600 ° C., (d) exposing the heat-treated granulated powder to a high-temperature plasma jet to undergo melting and solidification. To provide a configuration including a step of preparing a powder.
AlN-YAG composite exhibiting excellent thermal conductivity in the surface coating of the substrate support part of the semiconductor / display panel manufacturing apparatus using the thermal spray method by using the thermal spray coating material using the above-described composite material and its manufacturing method and coating method. By densely forming the material coating layer, the effect of providing temperature uniformity of the substrate is obtained.

Description

Coating material for thermal spray using ceramic composite materials and fabrication method and coating method therof}

The present invention relates to a thermal spray coating material using a ceramic composite material, a method for manufacturing the same, and a coating method thereof. The present invention relates to a technique for forming a thermal spray coating layer using a composite powder obtained by mixing nitride or carbide having excellent thermal conductivity with an oxide ceramic such as 2 O 3 or Y 2 O 3 .

Generally, plasma deposition / etching techniques have been widely used due to various requirements such as high integration, large area, and increased deposition / etch rate in the semiconductor / display field. The ions and radicals formed through plasmaization of the process gas cause chemical reactions at low temperatures and proceed with relatively fast and uniform thin film deposition or etching on the surface of the substrate (wafer or glass substrate).

Positional nonuniformity of the substrate temperature in the deposition or etching process causes a nonuniformity in the deposition or etching thickness of the thin film, and consequently is a major factor in increasing the defect rate of the semiconductor device or the display panel.

In the manufacturing process of a semiconductor / display panel, the substrate surface temperature is controlled by heat transfer between the substrate and a substrate support component such as a heater, susceptor, lower substrate or electrostatic chuck. Substrate support parts are usually made of aluminum alloy having excellent processability and economic advantages, and are used by coating oxide ceramics having excellent chemical resistance and corrosion resistance such as Al 2 O 3 or Y 2 O 3 on the surface.

Ceramic coating by thermal spraying is currently performed as the most widely used coating method, and the main purpose of the coating is to improve electrical insulation and chemical resistance to reactive gases and plasma.

Patent Document 1 proposes a method of manufacturing an electrostatic chuck member using a thermal spray coating process, and the surface layer in contact with the substrate is made of Al 2 O 3 ceramic. In Patent Documents 2 and 3, (Al x Y 1 -x ) 2 O 3 (x is 0.05 to 0.95) and Al 2 (1-x) Zr x O 3-x (x is 0.2 to 0.8), respectively. By thermally spraying a ceramic having an amorphous coating layer, it is disclosed to minimize internal defects of the coating layer and to greatly improve corrosion resistance in plasma processing equipment.

In addition, Patent Documents 4 and 5 disclose that the plasma corrosion resistance of various semiconductor manufacturing equipment components including a substrate support part is formed by forming a Y 2 O 3 spray coating.

(Document 1) Republic of Korea Patent Publication No. 2002-0070340 (published Sep. 05, 2002) (Document 2) Korean Patent Publication No. 2007-0121561 (published Dec. 27, 2007) (Document 3) Republic of Korea Patent Publication No. 2010-0130432 (published Dec. 13, 2010) (Document 4) Japanese Unexamined Patent Publication No. 2001-164354 (Document 5) United States Patent No. 6,777,873

However, in the conventional technology as described above, oxide-based ceramics such as Al 2 O 3 , Y 2 O 3 , Al-YO-based, Al-Zr-O-based, and the like are thermally spray coated on the surface of the substrate support part. Since the ceramic coating layer has a very low thermal conductivity, the heat transfer rate with the substrate may be slow and cause temperature nonuniformity between the contact portion and the non-contact portion.

As a solution to this problem, a method of coating nitride or carbide ceramics such as AlN and SiC having excellent thermal conductivity may be proposed. However, these nitride or oxide ceramics may be subjected to reactions with oxygen in the atmosphere and high temperature exposure during thermal spraying. There is a disadvantage that can not form a dense coating layer due to decomposition.

An object of the present invention is to solve the problems described above, AlN particles having excellent thermal conductivity as a way to improve the thermal conductivity of the thermal spray ceramic coating layer in the substrate support component used in the semiconductor / display panel manufacturing process To prepare a ceramic composite powder containing a volume fraction of 50% or more, and thermally sprayed to provide a thermal spray coating material using a dense ceramic composite material having a relative density of 95% or more, and a manufacturing method and a coating method thereof.

In order to achieve the above object, the thermal spray coating according to the present invention is characterized by using a ceramic composite powder containing AlN particles having a high thermal conductivity of 50% or more by volume. As the binder phase, there are Al 2 O 3 , Y 2 O 3 , Al-YO, Al-Zr-O, and the like, which are used as existing substrate support parts. In the present invention, Al-YO-based YAG (Y 3 Al) is preferable. 5 0 12 ) was used.

In addition, in the thermal spray coating according to the present invention, the AlN and YAG is a purity of 98wt% or more, characterized in that the particles of 0.05 to 5.0㎛ diameter.

In addition, the method for producing a thermal spray coating material according to the present invention in order to achieve the above object is (a) a slurry in which a mixed powder, AlN particles and YAG particles are mixed, a binder and a dispersant are added in a liquid solvent, ball milling and uniformly mixed. (B) spraying the mixed solution of the slurry into micron-sized droplets and removing the solvent in a hot air or inert gas atmosphere to prepare granule powder, (c) in step (b) Heat-treating the granular powder at 1000-1600 ° C., (d) exposing the heat-treated granular powder to a high temperature plasma jet and subjecting the granulated powder to a dense and solidified process.

In addition, in the method of manufacturing a ceramic composite powder according to the present invention, the mixed powder in the step (a) is characterized in that the mixture of 50% to 80% AlN and 50% to 20% YAG.

In addition, in the method for producing a thermal spray coating according to the present invention, the composite powder in the step (d) has a spherical shape and exhibits high density, and the particle size is in the range of 5-100㎛.

In addition, the thermal spray coating method according to the present invention to achieve the above object is a thermal spray coating method used on the surface of the metal or ceramic components used in the semiconductor / display panel manufacturing equipment, the step of preparing an AlN-YAG composite material powder And blasting the surface of the metal or ceramic base material, which is the substrate support part, and thermally spraying the AlN-YAG composite material powder to form a ceramic coating layer on the surface of the metal or ceramic base material. .

In the thermal spray coating method according to the invention, the thickness of the thermal spray coating material is characterized in that the range of 50-1000㎛.

In addition, in the thermal spray coating method according to the invention, the thermal spray is characterized in that it is carried out with a powder supply gas pressure of 3-5 kg / ㎠.

In the thermal spraying coating method according to the present invention, the thermal spraying is characterized in that it is carried out by a plasma spraying method or a reduced pressure plasma spraying method.

As described above, according to the thermal-spray coating material using the ceramic composite material according to the present invention, and a manufacturing method and coating method thereof, excellent thermal conductivity in the surface coating of the substrate support part of the semiconductor / display panel manufacturing apparatus using the thermal spraying method By densely forming the AlN-YAG composite coating layer shown, the effect of providing the temperature uniformity of the substrate is obtained. In order to form the dense AlN-YAG thermal spray coating as described above, the thermal spraying using a plasma jet-treated AlN-YAG composite powder.

1 is a scanning electron micrograph showing the shape and cross section of the AlN-YAG granule powder prepared by the spray drying of the present invention.
Figure 2 is a scanning electron micrograph showing the shape and cross section of the plasma-treated AlN-YAG granules of the present invention.
Figure 3 is a microstructure of the ceramic coating layer prepared using the spray-dried AlN-YAG granules of the present invention.
Figure 4 is a microstructure of the ceramic coating layer prepared using the plasma-treated AlN-YAG granules of the present invention.
5 is a diagram showing the results of measuring the thermal conductivity of the AlN-YAG coating layer of the present invention and the existing Al 2 O 3 coating layer as a function of the measurement temperature.

These and other objects and novel features of the present invention will become more apparent from the description of the present specification and the accompanying drawings.

First, the main features of the present invention will be described.

The thermal spray coating material according to an embodiment of the present invention is an AlN-YAG composite material, to prepare a coating layer from the YAG powder is added AlN of the volume fraction 50-80%, wherein the AlN-YAG coating layer formed is 95% or more relative density Characterized in having a.

The AlN-YAG coating layer is formed by a process of thermally spraying AlN-YAG composite material powder, the AlN-YAG composite powder is a slurry after preparing a slurry containing AlN particles and YAG particles having a purity of 50% or more, respectively, It is preferable to use the spheronized and densified by spray-drying to prepare granule powder and exposing it to hot plasma jet to melt / solidify the binder phase YAG.

In addition, the AlN-YAG composite powder is preferably made of 50 to 80% AlN and 50 to 20% YAG, which is difficult to obtain excellent thermal conductivity of the thermal spray coating layer when the content of the AlN is less than 50%, This is because if the content exceeds 80%, a dense coating layer with a relative density of 95% or more cannot be formed.

In addition, the AlN-YAG coating layer preferably has a thickness of 50-1000㎛, the relative density of the coating layer is 95% or more and the thermal conductivity is 10W / mK or more.

Hereinafter, the configuration of the present invention will be described with reference to the drawings.

As described above, the present invention is to produce a coating layer by thermally spraying AlN-YAG composite material powder on a substrate support part of a semiconductor / display panel manufacturing apparatus, characterized in that formed as a coating layer having a porosity of 3% or less. It is done.

First, a method of manufacturing AlN-YAG composite powder will be described.

AlN-YAG composite powder is prepared by spray drying and subsequent plasma treatment of 5-100 ㎛ composite powder, which is suitable for thermal spraying using AlN and YAG raw powder. At this time, the initial raw material powder preferably has a purity of 98wt% or more and a particle size of 0.05-5.0㎛ range. The content of AlN based on the total weight of the composite material is preferably 50 to 80% by volume in order to realize the effects of the present invention.

As an example of the manufacturing method of the AlN-YAG composite material powder will be described the manufacturing process by spray drying and subsequent plasma jet treatment.

AlN powder, YAG powder, binder and dispersant are added to a liquid solvent, and ball milled to make a uniformly mixed slurry. AlN-YAG granule powder is prepared by spraying the slurry mixture solution into a micron-sized droplet by a high speed atomizer or a high pressure gas atomizer to remove the solvent in a hot air or an inert gas atmosphere. . Spray dried AlN-YAG composite powders suitably have a size range of 5-100 μm. Since the granular powder should have a strength that can maintain its shape while being transferred to a high temperature plasma jet, heat treatment is performed in a nitrogen atmosphere at 1000-1600 ° C. The heat treated AlN-YAG granular powder is melted by being injected into an Ar-H 2 or Ar-He plasma jet formed by DC or RF, and then solidified while flying out of the plasma jet. The AlN-YAG powder produced through the plasma treatment has a very smooth powder surface and spherical shape, and is very dense with little pores.

Hereinafter, a method of forming an AlN-YAG coating layer using the thermal spray coating method using the AlN-YAG composite material powder will be described in detail.

The surface of the metal or ceramic base material is blasted to increase the interfacial bonding strength of the thermal sprayed coating layer, and then the AlN-YAG composite powder is thermally sprayed on the roughened base material surface to form a ceramic coating layer. The AlN-YAG composite powder injected into the flame at high temperature and high speed should melt YAG, a binder during flight, and for this purpose, the powder supply gas pressure should be set so that the composite powder can pass through the central part showing the highest temperature of the flame. It is preferable to set it as -5 kg / cm <2>. The molten droplets are rapidly cooled and solidified by forming a thin disk shaped splat by collision with a metal or ceramic base material.

The AlN-YAG coating layer is preferably limited to the porosity of 5% or less, and also to minimize the generation of microporous channels of the three-dimensional network structure in the coating layer. The thickness of the coating layer is usually preferably in the range of 50-1000 µm.

Here, the thermal spraying method used to form the AlN-YAG coating layer may be any known method such as gas flame spraying, low-speed and high-speed flame spraying, explosion spraying, atmospheric plasma spraying, reduced pressure plasma spraying, but the quality stability It is preferable to use an atmospheric plasma spraying method, a reduced pressure plasma spraying method, or the like from the viewpoint of high productivity.

Hereinafter, the present invention will be described in more detail with reference to Examples, but the scope of the present invention is not limited by the following Examples.

Preparation Example Preparation of AlN-YAG Composite Powder

Granule powders of 5-100 μm were prepared by the above-mentioned spray drying method by mixing raw material powders of AlN and YAG having a purity of 98 wt% or more and a particle size of 0.05-5.0 μm. The content of AlN based on the total weight of the composite powder was limited to 50 to 80% by volume in order to implement the effects of the present invention. Spray dried AlN-YAG composite powder was heat-treated at 1400 ° C. for 1 hour in a nitrogen atmosphere to prevent powder cracking. For densification and spheronization of AlN-YAG powder, spray-drying granulated powder was subjected to plasma melting treatment using a powder plasma processing apparatus and Ar-He plasma jet, which were manufactured in-house.

[Example 1]

One surface of the Al substrate (width 100 mm x length 100 mm x thickness 5 mm) of the plate was blasted using # 100 Al 2 O 3 particles to give a surface roughness (Ra: 3 μm), and then the front surface of the surface. In the AlN-YAG composite powder prepared in the preparation example to form an AlN-YAG coating layer with a thickness of 200㎛ by atmospheric plasma spraying method. Plasma sprayer used the SG-100 plasma system from Praxair, USA, and the resulting plasma jet showed an output of 36 kW using argon gas and hydrogen gas. The feed rate of the AlN-YAG composite powder was 12-16 g / min, and the distance between the plasma gun and the Al base material was 120 mm.

[Comparative Example 1-2]

A coating layer was formed in the same manner as in Example 1, but instead of the AlN-YAG composite powder, the coating layer was formed with a ceramic coating layer having a thickness of 200 μm using 99.9 wt% Al 2 O 3 spray powder.

Hereinafter, the superiority of the present invention will be described based on a coating material made of AlN (volume fraction 50%)-YAG (volume fraction 50%) composite powder.

The shape and cross-sectional microstructure of the spray-dried AlN-YAG granule powder and the plasma-treated AlN-YAG melt powder are shown in FIGS. 1 and 2, respectively. Spray dried granule powder had a spherical shape and a particle size distribution of about 10-50 μm, and exhibited a relatively porous internal structure in which initial raw material powders were physically simply combined (FIG. 1). On the other hand, the plasma-treated powder exhibited a completely molten spherical shape with a smooth surface (FIG. 2), and had a very dense powder structure as shown in the cross-sectional microstructure.

Spray drying (nitrogen atmosphere heat treatment) The granulated powder and the plasma treated molten powder exhibited sufficient mechanical strength and fluidity to form a plasma spray coating, and the powder could be used to prepare a coating layer having a thickness of about 200 μm or more. 3 and 4 are cross-sectional microstructures of a plasma spray coating layer prepared using spray drying and plasma-treated AlN-YAG powders, respectively, and show a difference in coating layer microhistological characteristics that are significantly different according to powder characteristics. AlN-YAG coating layer prepared by spray-drying powder is present in the form of irregularly shaped dozens of micrometers in a specific area where incomplete melt droplets are stacked, whereas the coating layer by the plasma-treated powder is a few micrometers spherical The pores of are relatively evenly distributed. The porosity measured by image analysis was 16.8 ± 2.4% for the coating by spray-dried powder and about 3.2 ± 0.5% for the coating by plasma-treated powder.

The difference in porosity of the coating layer is due to the characteristics of AlN-YAG powder. Since the plasma-treated powder having a fine microstructure has excellent thermal conductivity, it is highly likely to be melted in a high-temperature, high-speed plasma jet. Stacking of melt droplets is greatly limited. On the other hand, the high porosity spray-dried granule powder has a low thermal conductivity, which increases the fraction of the unmelted / partially melted droplets that reach the laminated surface, and the lamination of these droplets results in the formation of microstructures with many pores with a very limited amount of liquid. (Fig. 3). The coating layer microstructure formed by lamination of molten AlN-YAG droplets was dense in which AlN particles of various sizes were uniformly dispersed in the YAG matrix regardless of the characteristics of the initial powder.

The AlN particles constituting the plasma spray coating layer had slightly smoother edges than AlN particles in the plasma-treated powder and the size was greatly reduced. This is because the solid AlN particles in the droplets were exposed to YAG in the fully molten liquid phase during the plasma spray and at the same time some AlN particles were destroyed due to the high-speed impact on the substrate surface.

The AlN-YAG coating layer by plasma-treated molten powder showed a higher hardness than the coating layer by spray-drying granulated powder. The AlN-YAG coating layer was composed of only AlN crystal phase and amorphous binder phase. In particular, the hardness of the PAS-treated molten powder coating layer is expected to have a high mechanical properties by showing a significantly improved 795 ± 85 Hv compared to 488 ± 153 Hv of the spray-dried granule powder coating layer. From the above results, it can be seen that it is effective to use a powder having a fine microstructure in order to produce a dense AlN-YAG coating layer having excellent mechanical properties.

In order to measure the thermal conductivity of the AlN-YAG composite material produced by plasma spray, the coating layer was prepared to have a thickness of about 2 mm. Thermal diffusivity was measured using a Laser Flash device (NETZSCH-LFA 427, Germany), Al2O3 coating was prepared by using a plasma spray to compare the thermal conductivity of the AlN-YAG composite coating layer (Fig. 5). The thermal conductivity of the AlN-YAG composite coating layer showed almost similar values from 25 ° C. to 400 ° C., and the AlN-YAG composite material had about 11 W / mK, about 5 times higher than the Al 2 O 3 coating layer. AlN-YAG composite coatings produced by plasma spray show low thermal conductivity due to the composite with YAG which has insulating properties, and at the same time defects such as splat boundary, macropore and crack of plasma spray coating Due to the lower thermal conductivity properties.

Although the present invention has been described in detail with reference to the above embodiments, it is needless to say that the present invention is not limited to the above-described embodiments, and various modifications may be made without departing from the spirit of the present invention.

The thermal spray coating material using the ceramic composite material according to the present invention, a manufacturing method and a coating method thereof are applied to a substrate supporting part of a semiconductor / display panel manufacturing equipment.

Claims (10)

As a thermal spray coating material used on the surface of metal or ceramic parts used in semiconductor / display panel manufacturing equipment,
The coating material is a coating material, characterized in that consisting of 50 to 80% AlN and 50 to 20% YAG (Y 3 Al 5 O 12 ). The method of claim 1,
The AlN and YAG is a coating material, characterized in that the purity of 98wt% or more, each of the particles having a diameter of 0.05 to 5.0㎛. (a) adding AlN particles and YAG (Y 3 Al 5 O 12 ) mixed powder, a binder and a dispersant in a liquid solvent, and ball milling to prepare a uniformly mixed slurry,
(b) preparing a granulated powder by spraying the mixed solution of the slurry into droplets of micron size and removing the solvent in a high-temperature air or inert gas atmosphere;
(c) heat-treating the granular powder in step (b) at 1000-1600 ° C,
(d) exposing the heat-treated granulated powder to a high temperature plasma jet and subjecting it to melting and solidifying to produce a dense powder. The method of claim 3,
In the step (a), the mixed powder is a method for producing a coating material, characterized in that the mixture of 50% to 80% AlN and 50% to 20% YAG. The method of claim 3,
Composite material powder in the step (d) has a spherical shape, the particle size is a method for producing a coating material, characterized in that the range of 5-100㎛. As a thermal spray coating method used on the surface of metal or ceramic parts used in semiconductor / display panel manufacturing equipment,
Preparing AlN-YAG (Y 3 Al 5 O 12 ) composite powder,
Blasting the surface of the metal or ceramic base material which is the substrate support part;
And thermally spraying the AlN-YAG composite material powder to form a ceramic coating layer on the surface of the metal or ceramic base material. The method according to claim 6,
The coating method of the thermal spray coating material is characterized in that the range of 50-1000㎛. The method according to claim 6,
The composite powder is a coating method comprising a volume fraction of 50 to 80% AlN and 50 to 20% YAG. The method according to claim 6,
The thermal spraying coating method, characterized in that carried out at a powder supply gas pressure of 3-5 kg / ㎠. 10. The method of claim 9,
The thermal spraying method is characterized in that the coating is carried out by a plasma spraying method or a reduced pressure plasma spraying method.
KR1020120010741A 2012-02-02 2012-02-02 Coating material for thermal spray using ceramic composite materials and fabrication method and coating method therof KR20130089408A (en)

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KR20210061608A (en) * 2019-11-20 2021-05-28 한국생산기술연구원 Method For Forming Powder Of High Entropy Ceramic And Method For Forming Thermal Spray Coatings Layer Using Powder Of High Entropy Ceramic
CN111252799A (en) * 2020-01-22 2020-06-09 东北大学秦皇岛分校 Preparation of YAG Ce by containerless solidification3+Method for mixing amorphous material with aluminum nitride
CN111252799B (en) * 2020-01-22 2022-06-28 东北大学秦皇岛分校 Preparation of YAG Ce by containerless solidification3+Method for mixing amorphous material with aluminum nitride
CN113845376A (en) * 2021-09-29 2021-12-28 常州联德电子有限公司 Preparation method of dew point resistant protective coating for vehicle oxygen sensor

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