KR101037646B1 - Laser Processing Apparatus Having Beam Split Function - Google Patents

Abstract

A laser processing apparatus having a beam splitting function capable of automatically controlling a distance between divided laser beams is provided.

The laser processing apparatus according to the present invention comprises a control unit for controlling the overall operation, a control parameter including a beam spacing adjustment amount and a control command, a user interface for displaying an operation state, a memory for storing data, and a control of the control unit. A laser generator for outputting a laser beam having a specified aperture, a beam splitter for dividing the laser beam emitted from the laser generator into at least two, and driving the beam splitter according to the beam spacing amount to adjust the spacing of the split beams And an optical system for focusing and irradiating a plurality of laser beams, each of which is divided so as to have a predetermined interval, under the control of the interval adjusting unit and the interval adjusting unit to the object.

Laser, segmentation, thickness

Description

Laser Processing Apparatus Having Beam Split Function

The present invention relates to a laser processing apparatus and method, and more particularly, to a laser processing apparatus having a beam splitting function capable of dividing a laser beam into a plurality and automatically controlling a distance between the divided laser beams.

In general, manufacturing an article using various materials such as wafers, metals, plastics, and the like requires processing procedures such as cutting and grooving, which are important because they have a great impact on quality and productivity in subsequent processes. Has meaning.

Recently, in the semiconductor market, as a method of increasing chip production per wafer, the number of chips per wafer is increased by reducing the gap between chips formed on the wafer. As a result, the industry demands a very narrow wafer processing line width of about 15 mu m. In order to satisfy such a narrow line width, it is necessary to increase the processing overlap of the laser beam, that is, increase the laser frequency and keep the beam intensity relatively low so as to reduce the breakage around the process line width. However, the current laser is used, the power is reduced as the frequency of the laser beam increases due to its characteristics can improve the processing quality, but there is a problem that can not guarantee the processing time. In addition, when using a laser beam of a low frequency in order to improve the processing speed, the laser beam is overheated by the object to be processed to increase the line width, which makes fine processing impossible.

In order to solve this problem, a method of improving the processing efficiency by dividing a laser beam and increasing power by the number of divided beams while maintaining the intensity of the beam equal to the intensity before dividing has been studied.

After dividing the laser beam into a plurality of pieces, the divided beams must be precisely irradiated to the area to be processed. Otherwise, the laser beam is irradiated on the undesired area, which reduces the production yield. However, at present, there is no method for controlling the spacing between the divided beams, there is a problem that it is difficult to process the object at a narrow line width and high speed.

SUMMARY OF THE INVENTION The present invention has been made to solve the above problems, and there is a technical problem to provide a laser processing apparatus capable of automatically controlling a distance between a plurality of divided laser beams.

Another technical problem of the present invention is to provide a laser processing apparatus capable of automatically controlling the line width of a plurality of divided laser beams.

Laser processing apparatus having a beam splitting function according to an embodiment of the present invention for achieving the above technical problem is a control unit for controlling the overall operation; A user interface for inputting a control parameter and control command including a beam spacing adjustment amount and displaying an operating state; A memory for storing data; A laser generator for outputting a laser beam having a specified aperture under the control of the controller; A beam splitter dividing the laser beam emitted from the laser generator into at least two; A spacing controller for controlling the spacing of the split beams by driving the beam splitter according to the beam spacing amount; And an optical system for focusing and irradiating a plurality of laser beams divided to have a predetermined spacing in the beam splitter under the control of the spacing adjuster to irradiate the object.

According to the present invention, it is possible to automatically adjust the spacing of the split beams to accurately focus the laser beam on the processing target site.

Accordingly, an object requiring fine processing can be processed multiple times with a laser beam having a low energy to ensure a narrow line width, and a high processing speed can be ensured because a plurality of divided laser beams are irradiated onto the object at the same time. have.

Hereinafter, exemplary embodiments of the present invention will be described in detail with reference to the accompanying drawings.

1 is a block diagram of a laser processing apparatus having a beam splitting function according to an embodiment of the present invention.

As shown, the laser processing apparatus according to the present invention includes a control unit 110 for controlling the overall operation, a laser generator 120 for outputting a laser beam of a specified aperture, and a laser emitted from the laser generator 120. The beam splitter 130 for dividing the beam into at least two, the beam splitter 140 for controlling the spacing of the split beams by driving the beam splitter 130, and the beam splitter 140 according to the control of the gap adjuster 140. An optical system 150 for focusing a plurality of laser beams divided to have a predetermined distance at 130 and inputting control parameters and control commands, and displaying user information such as an operation state and the like. And a memory 170 for data storage.

Here, the optical system 150 is for concentrating each of a plurality of laser beams emitted from the beam splitter 130 and irradiating them vertically to the processing target region of the object. The optical system 150 includes a mirror and a laser beam for controlling the irradiation direction of the laser beam. And a condenser lens for focusing the light. The configuration of the optical system 150 may be configured in accordance with the irradiation direction of the laser beam, the light condensing properties required.

In addition, the object is seated on the stage and moves in the direction specified by the conveying means.

In the laser processing apparatus of the present invention, the beam splitter 130 divides the beam into at least two, and inputs a control parameter for adjusting the distance between beams through the user interface 160 to automatically adjust the distance between the divided beams. do. The control parameter is set according to the type and processing type of the object to be processed, and may include a beam spacing adjustment amount, coordinates of the processing site, an output power of the laser beam, a processing time, a stage feed speed, and the like.

When the laser processing apparatus is driven, the spacing controller 140 physically drives the beam splitter 130 to control the spacing between beams with reference to a control parameter input in advance under the control of the controller 110.

2A and 2B are detailed configuration diagrams of the beam splitter shown in FIG. 1 and cross-sectional views of the split beams.

2A is a detailed configuration diagram of the beam splitter 130, and it can be seen that the pair of prisms 1301 and 1303 face each other.

More specifically, the beam splitter 130 applied to the present invention includes a pair of triangular prisms 1301 and 1303 facing each other with respect to a vertex, and the first triangular prism 1301 has two incident laser beams. The second triangular prism 1303 splits the beam so that the laser beams split by the first triangular prism 1301 are parallel to each other.

In a preferred embodiment of the present invention, the folding angles of the first and second triangular prisms 1301 and 1303 may be 120 °, respectively.

In the beam splitter 130, the distance between the two divided laser beams may be changed by adjusting the optical axis X of the second triangular prism 1303.

On the other hand, the cross-sectional view of the laser beam emitted from the second triangular prism 1303 has a semi-circular shape as shown in Fig. 2B.

When the optical axes of the first and second triangular prisms 1301 and 1303 are the same, the laser beam split by the beam splitter 130 is incident on the condensing lens of the optical system 150 in a side-by-side state and focuses as one beam. do. Accordingly, since the effect of beam splitting cannot be obtained, in the present invention, the distance between the split beams is adjusted by changing the divergence angle of the split two beams.

3 and 4 are diagrams for explaining the relationship between the rotation angle of the prism and the divergence angle of the laser beam.

FIG. 3 shows a case where the second triangular prisms 1303A and 1303B are rotated by 5 ° and 10 ° in the clockwise direction, and FIG. 4 shows the case where the second triangular prisms 1303C and 1303D are rotated by 5 ° and 10 ° in the counterclockwise direction. The case where it was made is shown.

As can be seen in Figures 3 and 4, by fine-tuning the second triangular prism 1303 along the optical axis (X), it is possible to change the distance between the two divided laser beams.

The interval adjusting unit 140 for changing the optical axis of the second triangular prism 1303 may be configured using a motorized rotation stage or a motorized goniometer. have.

If the desired rotation angle of the prism is input through the user interface 160 before the laser processing apparatus is driven, as the laser processing apparatus is driven, the gap adjusting unit 140 is driven by the control of the control unit 110. The two triangular prisms 1303 are rotated at a specified angle.

Accordingly, the divergence angle of the split beam emitted from the beam splitter 150 is changed, and as a result, two beams are condensed on the condenser lens and irradiated to the processing target site.

To this end, the angle between the laser beam split in the beam splitter 150 and the distance between the laser beam focused and emitted from the optical system 160 should be defined to have a specific correlation.

5 is a diagram for describing a relationship between a divergence angle and a spacing of a split beam.

When the two laser beams emitted from the beam splitter 130 have an angle of θ, the distance between the two laser beams passing through the optical system 150 is D, and the optical system 150 is a general focusing lens, θ and D are Has the following relationship:

[Equation 1]

Here, f1 means the focal length of the focusing lens.

If the optical system 150 is an f-theta lens or an f-theta telecentric lens, θ and D have the following relationship.

[Equation 2]

Here, f2 means the focal length of the f-theta lens or the f-theta telecentric lens.

The rotation angle of the prism can be determined based on the relationship between the separation distance and the distance between the split beams defined in Equations 1 and 2 below. Then, by rotating the prism in the interval adjusting unit 140, the divided laser beam is spaced apart by a desired interval, so that the object 200 is irradiated.

As described above, in the present invention, the plurality of laser beams emitted from the beam splitter 130 have a predetermined angle according to a predetermined value, and thus the split beam can be accurately irradiated to a desired position of the processing area.

6 is a configuration diagram of a laser processing apparatus having a beam splitting function according to another embodiment of the present invention.

The laser processing apparatus according to the present embodiment further includes a line width adjusting unit 180 in addition to the laser processing apparatus shown in FIG. 1. The line width adjusting unit 180 adjusts the distance between the pair of prisms (1301 and 1303 of FIG. 2A) constituting the beam splitter 150 to change the size of the laser beam emitted from the beam splitter 150. .

To this end, the line width adjusting unit 180 may be configured as a motorized linear stage.

Before machining the object, the distance between the prisms is determined according to the line width required for the processing area and input as a control parameter. When the laser processing apparatus is driven, the line width adjusting unit 180 linearly moves at least one of the prisms 1301 and 1303 constituting the beam splitter 150 under the control of the controller 110 to reduce the distance between the prisms. And, as a result, the size of the split laser beam.

In this embodiment, the distance between the laser beams divided by the spacing controller 140 may be adjusted, and the size of each of the laser beams divided by the line width controller 180 may be adjusted. Accordingly, it is possible to accurately irradiate the divided laser beam of the line width specified in the region to be processed, further improving the processing quality.

As such, those skilled in the art will appreciate that the present invention can be implemented in other specific forms without changing the technical spirit or essential features thereof. Therefore, the above-described embodiments are to be understood as illustrative in all respects and not as restrictive. The scope of the present invention is shown by the following claims rather than the detailed description, and all changes or modifications derived from the meaning and scope of the claims and their equivalents should be construed as being included in the scope of the present invention. do.

According to the present invention, when processing an object by dividing the laser beam into a plurality, it is possible to accurately control the interval of the divided laser beam, it is possible to improve the processing efficiency of the object requiring fine line width processing.

1 is a block diagram of a laser processing apparatus having a beam splitting function according to an embodiment of the present invention;

2A and 2B are detailed configuration diagrams of the beam splitter shown in FIG. 1 and cross-sectional views of the split beams;

3 and 4 are views for explaining the relationship between the rotation angle of the prism and the divergence angle of the laser beam,

5 is a view for explaining the relationship between the divergence angle and the spacing of the split beam;

6 is a configuration diagram of a laser processing apparatus having a beam splitting function according to another embodiment of the present invention.

Description of the Related Art [0002]

110: control unit 120: laser generation unit

130: beam splitter 140: spacing adjuster

150: optical system 160: user interface

170: memory 180: intensity control

Claims (10)

A laser processing apparatus having a beam splitting function, A controller for controlling the overall operation; A user interface for inputting a control parameter and control command including a beam spacing adjustment amount and displaying an operating state; A memory for storing data; A laser generator for outputting a laser beam having a specified aperture under the control of the controller; A beam splitter dividing the laser beam emitted from the laser generator into at least two; A spacing controller for controlling the spacing of the split beams by driving the beam splitter according to the beam spacing amount; An optical system for focusing and irradiating a plurality of laser beams divided to have a predetermined interval in the beam splitter under the control of the gap adjuster to an object; And And a line width adjusting unit for adjusting the size of the laser beam split by the beam splitting unit. The beam splitter includes first and second triangular prisms facing each other about vertices, The line width adjusting unit is a laser processing apparatus having a beam splitting function, which is a motor driven linear stage for horizontally moving the first or second triangular prism. The method of claim 1, And said beam splitter is a pair of triangular prisms facing each other with respect to a vertex. The method of claim 2, The beam splitter may include: a first triangular prism dividing an incident laser beam into two; And A second triangular prism for changing a direction of the beam such that the laser beam split in the first triangular prism is parallel to each other; Laser processing apparatus having a beam splitting function comprising a. The method according to claim 2 or 3, The folding angle of the said triangular prism is 120 degrees, respectively, The laser processing apparatus with a beam splitting function characterized by the above-mentioned. The method of claim 1, The spacing adjuster is a motor-driven rotation stage (Motorized rotation stage), or a motor-driven goniometer (Motorized goniometer) characterized in that the laser processing apparatus having a beam splitting function. The method of claim 1, The beam splitter includes first and second triangular prisms facing opposite vertices, And the spacing adjuster rotates the first or second triangular prism about an optical axis in accordance with the beam spacing adjustment amount. The method of claim 1, When the angle between the two laser beams emitted from the beam splitter is θ and the optical system is a focusing lens, when the focal length of the focusing lens is f1, the distance D between the two laser beams emitted from the optical system is

The laser processing apparatus which has a beam splitting function characterized by the above-mentioned. The method of claim 1, When the angle between the two laser beams emitted from the beam splitter is θ, and the optical system is an f-theta lens or an f-theta telecentric lens, the f- When the focal length of theta lens or f-theta telecentric lens is f2, the distance D between the two laser beams emitted from the optical system is

The laser processing apparatus which has a beam splitting function characterized by the above-mentioned. delete delete

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