KR101006504B1 - Method for fabricating semiconductor device - Google Patents

Method for fabricating semiconductor device Download PDF

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KR101006504B1
KR101006504B1 KR1020030046341A KR20030046341A KR101006504B1 KR 101006504 B1 KR101006504 B1 KR 101006504B1 KR 1020030046341 A KR1020030046341 A KR 1020030046341A KR 20030046341 A KR20030046341 A KR 20030046341A KR 101006504 B1 KR101006504 B1 KR 101006504B1
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forming
metal layer
passivation
film
layer
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KR20050006502A (en
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맹종선
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매그나칩 반도체 유한회사
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    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/70—Manufacture or treatment of devices consisting of a plurality of solid state components formed in or on a common substrate or of parts thereof; Manufacture of integrated circuit devices or of parts thereof
    • H01L21/71—Manufacture of specific parts of devices defined in group H01L21/70
    • H01L21/768—Applying interconnections to be used for carrying current between separate components within a device comprising conductors and dielectrics
    • H01L21/76838—Applying interconnections to be used for carrying current between separate components within a device comprising conductors and dielectrics characterised by the formation and the after-treatment of the conductors
    • H01L21/76877—Filling of holes, grooves or trenches, e.g. vias, with conductive material
    • H01L21/76883—Post-treatment or after-treatment of the conductive material
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
    • H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer
    • H01L21/18—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising elements of Group IV of the Periodic Table or AIIIBV compounds with or without impurities, e.g. doping materials
    • H01L21/30—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26
    • H01L21/31—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26 to form insulating layers thereon, e.g. for masking or by using photolithographic techniques; After treatment of these layers; Selection of materials for these layers
    • H01L21/3205—Deposition of non-insulating-, e.g. conductive- or resistive-, layers on insulating layers; After-treatment of these layers
    • H01L21/321—After treatment
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/70—Manufacture or treatment of devices consisting of a plurality of solid state components formed in or on a common substrate or of parts thereof; Manufacture of integrated circuit devices or of parts thereof
    • H01L21/71—Manufacture of specific parts of devices defined in group H01L21/70
    • H01L21/768—Applying interconnections to be used for carrying current between separate components within a device comprising conductors and dielectrics
    • H01L21/76801—Applying interconnections to be used for carrying current between separate components within a device comprising conductors and dielectrics characterised by the formation and the after-treatment of the dielectrics, e.g. smoothing
    • H01L21/76802—Applying interconnections to be used for carrying current between separate components within a device comprising conductors and dielectrics characterised by the formation and the after-treatment of the dielectrics, e.g. smoothing by forming openings in dielectrics

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  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Manufacturing & Machinery (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Internal Circuitry In Semiconductor Integrated Circuit Devices (AREA)

Abstract

본 발명은 반도체소자의 제조방법을 개시한다. 개시된 발명은 반도체기판 상에 유전율막을 형성하는 단계; 상기 유전율막내에 트렌치를 형성 하는 단계; 상기 트렌치내에 금속배선을 형성하는 단계; 상기 금속배선을 포함한 유전율막상에 패시베이션막을 형성하는 단계; 상기 패시베이션막과 상기 유전율막을 패터닝하여 콘택홀을 형성하는 단계; 및 상기 콘택홀내에 상부면이 상기 패시베이션막 외부로 노출되는 히트씽크용 금속층패턴을 형성하는 단계를 포함하여 구성되며, 패시베이션 공정완료후 일부 패시베이션층을 식각한후 금속박막을 식각홀에 매립한후 일부 금속막을 잔존시켜 열방출을 용이하게 하여 반도체소자의 열적 기계적 안정성을 확보하고자한 것이다.The present invention discloses a method for manufacturing a semiconductor device. The disclosed invention includes forming a dielectric constant film on a semiconductor substrate; Forming a trench in the dielectric film; Forming metallization in the trench; Forming a passivation film on the dielectric film including the metallization; Patterning the passivation layer and the dielectric constant layer to form contact holes; And forming a heat sink metal layer pattern in which the upper surface of the contact hole is exposed to the outside of the passivation layer. After the passivation process is completed, the metal layer is buried in the etching hole after the passivation layer is etched. Some metal films remain to facilitate heat dissipation, thereby securing thermal mechanical stability of the semiconductor device.

Description

반도체소자의 제조방법{Method for fabricating semiconductor device} Method for fabricating semiconductor device

도 1a 및 도 1e는 본 발명에 따른 반도체소자의 제조방법을 설명하기 위한 공정별 단면도.1A and 1E are cross-sectional views of processes for describing a method of manufacturing a semiconductor device according to the present invention.

[도면부호의설명][Description of Drawing Reference]

21 : 반도체기판 23 : 유전율막21 semiconductor substrate 23 dielectric constant film

25 : 트렌치 27 : 금속층25 trench 27 metal layer

27a : 금속배선 29 : 패시베이션막27a: metal wiring 29: passivation film

31 : 콘택홀 33 : 금속층배선31: contact hole 33: metal layer wiring

본 발명은 반도체소자의 제조방법에 관한 것으로서, 보다 상세하게는 패시베이션 공정완료후 일부 패시베이션층을 식각한후 금속박막을 식각홀에 매립한후 일부 금속막을 잔존시켜 열방출을 용이하게 하여 반도체소자의 열적 기계적 안정성을 확보하고자한 반도체소자의 제조방법에 관한 것이다.The present invention relates to a method for manufacturing a semiconductor device. More particularly, after a passivation process is completed, a part of a passivation layer is etched, a metal thin film is embedded in an etching hole, and a part of the metal film is left to facilitate heat dissipation. The present invention relates to a method for manufacturing a semiconductor device to secure thermal mechanical stability.

집적회로에서 Al 합금은 배선재료로 널리 사용되어 왔다. 그러나, 공정의 미세화, 빠른 동작속도, 높은 신뢰성이 요구됨에 따라 Al 합금배선에서 구리배선공정 으로 전환되고 있는 추세이다.Al alloys have been widely used as wiring materials in integrated circuits. However, due to the demand for miniaturization of the process, fast operation speed, and high reliability, the trend is shifting from Al alloy wiring to copper wiring.

구리배선 공정에서 사용되는 절연층도 SiO2에서 빠르게 낮은 유전율을 갖는 절연물질로 전환되는 추세이다. The insulating layer used in the copper wiring process is also rapidly converted to an insulating material having a low dielectric constant in SiO 2 .

저유전물질의 적용시에 발생되는 대표적인 문제점으로 기계적 강도 및 접착력 저하 그리고 가공성 물질을 사용함에 따라 낮은 열전도도 등이 있다.Representative problems that occur during the application of low dielectric materials include mechanical strength and adhesion, and low thermal conductivity due to the use of processable materials.

이중 낮은 열전도도는 소자가 미세화됨에 따라 배선에 높은 전류밀도가 인가되고, 이 전류밀도에 많은 열이 발생하며, 이 열이 잘 배출되지 않으면 소자성능에 악영향을 미치며 신뢰성 또한 감소된다.The low thermal conductivity results in a high current density applied to the wiring as the device becomes finer, and a lot of heat is generated in the current density. If this heat is not discharged well, the device performance is adversely affected and reliability is also reduced.

이에 본 발명은 상기 종래기술의 제반 문제점을 해결하기 위하여 안출한 것으로서, 패시베이션 공정완료후 일부 패시베이션층을 식각한후 금속박막을 식각홀에 매립한후 일부 금속막을 잔존시켜 열방출을 용이하게 하여 반도체소자의 열적 기계적 안정성을 확보하고자한 반도체소자의 제조방법을 제공함에 그 목적이 있다.Accordingly, the present invention has been made in order to solve the above problems of the prior art, after the passivation process is completed, after the passivation layer is etched, the metal thin film is embedded in the etching hole and some metal film remains to facilitate heat dissipation It is an object of the present invention to provide a method for manufacturing a semiconductor device to secure the thermal mechanical stability of the device.

상기 목적을 달성하기 위한 본 발명에 따른 반도체소자의 제조방법은, 반도체기판상에 유전율막을 형성하는 단계;According to an aspect of the present invention, there is provided a method of manufacturing a semiconductor device, the method including: forming a dielectric film on a semiconductor substrate;

상기 유전율막내에 트렌치를 형성하는 단계;Forming a trench in the dielectric film;

상기 트렌치내에 금속배선을 형성하는 단계;Forming metallization in the trench;

상기 금속배선을 포함한 유전율막상에 패시베이션막을 형성하는 단계; Forming a passivation film on the dielectric film including the metallization;                     

상기 패시베이션막과 상기 유전율막을 패터닝하여 콘택홀을 형성하는 단계; 및Patterning the passivation layer and the dielectric constant layer to form contact holes; And

상기 콘택홀을 매립하여 상부면이 상기 패시베이션막 외부로 노출되는 히트씽크용 금속층 패턴을 형성하는 단계를 포함하여 구성되는 것을 특징으로 한다.And filling the contact hole to form a heat sink metal layer pattern having an upper surface exposed to the outside of the passivation layer.

(실시예)(Example)

이하, 본 발명에 따른 반도체소자의 제조방법을 첨부된 도면을 참조하여 상세히 설명한다.Hereinafter, a method of manufacturing a semiconductor device according to the present invention will be described in detail with reference to the accompanying drawings.

도 1a 및 도 1e는 본 발명에 따른 반도체소자의 제조방법을 설명하기 위한 공정별 단면도이다.1A and 1E are cross-sectional views of processes for describing a method of manufacturing a semiconductor device according to the present invention.

본 발명에 따른 반도체소자의 제조방법은, 도 1a에 도시된 바와같이, 먼저 반도체기판(21)상에 유전율막(23)을 증착한후 상기 유전율막(23)을 선택적으로 제거하여 트렌치(25)를 형성한다. In the method of manufacturing a semiconductor device according to the present invention, as shown in FIG. 1A, a dielectric film 23 is first deposited on a semiconductor substrate 21, and then the dielectric film 23 is selectively removed to form a trench 25. ).

그다음, 도 1b에 도시된 바와같이, 상기 트렌치(25)를 포함한 유전율막(23)상에 금속배선용 도전층(27)을 증착하여 상기 트렌치(25)를 매립한다.Next, as shown in FIG. 1B, the trench 25 is embedded by depositing a conductive layer 27 for metal wiring on the dielectric film 23 including the trench 25.

이어서, 도 1c에 도시된 바와같이, 상기 도전층(27)을 CMP 또는 전면식각에 의해 평탄화시켜 상기 콘택홀(25)내에 금속배선 (27a)을 형성한다.Subsequently, as illustrated in FIG. 1C, the conductive layer 27 is planarized by CMP or full surface etching to form the metal wiring 27a in the contact hole 25.

그다음, 도 1d에 도시된 바와 같이, 상기 금속배선(27a)을 포함한 상기 유전율막(23)상에 패시베이션막(29)을 증착한다.Next, as shown in FIG. 1D, a passivation film 29 is deposited on the dielectric film 23 including the metal wiring 27a.

이어서, 상기 금속배선(27a)사이에 콘택홀을 형성하기 위해 상기 패시베이션 막(29)상에 감광물질을 도포한후 이를 노광 및 현상공정을 거쳐 선택적으로 제거 하여 감광막패턴(미도시)을 형성한다. Subsequently, a photosensitive material is coated on the passivation film 29 to form contact holes between the metal wires 27a and then selectively removed through the exposure and development processes to form a photosensitive film pattern (not shown). .

그다음, 상기 감광막패턴(미도시)을 마스크로 건식 또는 습식 식각에 의해 상기 패시베이션막(29) 및 유전율막(23)을 패터닝하여 콘택홀(31)을 형성한다. 상기 콘택홀(31)은 유전율막(23)에서보다 패시베이션막(29)에서 큰 선폭을 갖도록 형성한다. Next, the passivation layer 29 and the dielectric constant layer 23 are patterned by dry or wet etching using the photoresist pattern (not shown) as a mask to form a contact hole 31. The contact hole 31 is formed to have a larger line width in the passivation layer 29 than in the dielectric constant layer 23.

이어서, 도면에는 도시하지 않았지만, 상기 유전율막(23)내에 형성된 콘택홀(31)을 포함한 패시베이션막(29)상에 금속층(미도시)을 형성하여 상기 콘택홀(31)을 매립한다. 이때, 상기 콘택홀(31) 내에 금속층패턴을 형성하기 전에 장벽층을 형성하는 공정을 추가로 진행할 수도 있다. 상기 금속층은 열전도도가 우수한 Al, Au 또는 Cu 등을 사용한다. 또한, 상기 금속층은 450℃ 이하 온도, 예컨데, 150 내지 450℃의 온도에서 형성한다. 그리고, 상기 콘택홀내에 금속층을 매립한후 플라즈마 처리 또는 습식세정공정을 추가로 실시할 수도 있다.Subsequently, although not shown in the figure, a metal layer (not shown) is formed on the passivation film 29 including the contact holes 31 formed in the dielectric film 23 to fill the contact holes 31. In this case, before forming the metal layer pattern in the contact hole 31, a process of forming the barrier layer may be further performed. As the metal layer, Al, Au, Cu, or the like having excellent thermal conductivity is used. In addition, the metal layer is formed at a temperature of 450 ° C or less, for example, 150 to 450 ° C. After the metal layer is embedded in the contact hole, a plasma treatment or a wet cleaning process may be further performed.

그다음, 도 1e에 도시된 바와같이, 상기 금속층을 특정패턴에서만 잔존하고 실제 소자동작과 관여되는 배선과의 영향이 없도록 고립시키기 위해 에치백, 즉 감광막을 도포하는 단계없이 식각을 진행하여 홀에 금속을 잔존시키는 방법 또는 기계적 화학적 연막을 진행하여 콘택홀에 금속을 잔존시키는 방법으로 선택적으로 제거하여 히트 싱크(heat sink)의 기능을 하는 금속층패턴(33)을 형성한다.Then, as shown in FIG. 1E, the metal layer is etched without the step of applying an etch back, i.e., a photosensitive film, to isolate the metal layer so as to remain only in a specific pattern and have no effect on the wiring involved in actual device operation. The metal layer pattern 33 functioning as a heat sink is formed by selectively removing the remaining metal by a method of remaining a metal or a method of remaining a metal in a contact hole by performing a mechanical chemical smoke film.

이러한 금속층 즉, 금속핀을 형성하여 소자 동작시 배선에 발생하는 주울 (joule)열을 용이하게 열손실(heat dissipation)될 수 있도록 하므로써 소자의 신뢰성 및 내구성을 향상시킨다.By forming such a metal layer, that is, a metal pin, heat dissipation of joule heat generated in the wiring during device operation can be easily heat dissipated, thereby improving reliability and durability of the device.

상기에서 설명한 바와같이, 본 발명에 따른 반도체소자의 제조방법에 의하면, 패시베이션 공정완료후 일부 패시베이션층을 식각한후 금속박막을 식각홀에 매립한후 일부 금속막을 잔존시켜 열방출을 용이하게 하여 반도체소자의 열적 기계적 안정성을 확보할 수 있다. As described above, according to the method of manufacturing a semiconductor device according to the present invention, after the passivation process is completed, after the passivation layer is etched, the metal thin film is embedded in the etching hole, and then some metal film remains to facilitate heat dissipation. It is possible to ensure the thermal mechanical stability of the device.

또한, 열방출이 용이하므로 인해 더 높은 전류밀도에서도 사용가능하므로 소자 미세화에 기여할 수 있다.In addition, heat dissipation is easy, and thus can be used at higher current densities, thereby contributing to device miniaturization.

그리고, 소자 동작시에 발생되는 주울열 축적에 따른 저항 증가를 감소시키는데 기여할 수 있으며, 주울열에 의한 원자수송(atomic transport)를 감소시키는데 기여할 수 있다.In addition, it may contribute to reducing the increase in resistance due to the accumulation of Joule heat generated during operation of the device, and may contribute to reducing atomic transport due to Joule heat.

한편, 본 발명은 상술한 특정의 바람직한 실시예에 한정되지 아니하며, 청구범위에서 청구하는 본 발명의 요지를 벗어남이 없이 당해 발명이 속하는 분야에서 통상의 지식을 가진 자라면 누구든지 다양한 변경 실시가 가능할 것이다.On the other hand, the present invention is not limited to the above-described specific preferred embodiments, and various changes can be made by those skilled in the art without departing from the gist of the invention claimed in the claims. will be.

Claims (7)

반도체기판상에 유전율막을 형성하는 단계;Forming a dielectric constant film on the semiconductor substrate; 상기 유전율막내에 트렌치를 형성하는 단계;Forming a trench in the dielectric film; 상기 트렌치내에 금속배선을 형성하는 단계;Forming metallization in the trench; 상기 금속배선을 포함한 유전율막상에 패시베이션막을 형성하는 단계;Forming a passivation film on the dielectric film including the metallization; 상기 패시베이션막과 상기 유전율막을 패터닝하여 콘택홀을 형성하는 단계; 및Patterning the passivation layer and the dielectric constant layer to form contact holes; And 상기 콘택홀을 매립하여 하부면이 상기 금속배선 사이에 위치하고 상부면이 상기 패시베이션막 외부로 노출되는 히트씽크용 금속층 패턴을 형성하는 단계를 포함하여 구성되는 것을 특징으로하는 반도체소자의 제조방법.And embedding the contact hole to form a heat sink metal layer pattern having a lower surface between the metal wires and an upper surface exposed to the outside of the passivation layer. 제1항에 있어서, 상기 금속층패턴은 100 내지 450℃의 온도에서 형성하는 것을 특징으로하는 반도체소자의 제조방법.The method of claim 1, wherein the metal layer pattern is formed at a temperature of 100 to 450 ° C. 7. 제1항에 있어서, 상기 콘택홀내에 금속층패턴을 형성하기 전 단계로 장벽층을 형성하는 단계를 더 포함하는 것을 특징으로하는 반도체소자의 제조방법.The method of claim 1, further comprising forming a barrier layer before forming the metal layer pattern in the contact hole. 제1항에 있어서, 상기 금속층 패턴을 형성하는 단계는, The method of claim 1, wherein the forming of the metal layer pattern comprises: 상기 콘택홀을 포함한 패시베이션막상에 금속층을 형성하는 단계와,Forming a metal layer on the passivation film including the contact hole; 상기 패시베이션막이 노출되도록 상기 금속층을 식각하는 단계를 포함하여 구성되는 것을 특징으로하는 반도체소자의 제조방법.And etching the metal layer so that the passivation film is exposed. 제4항에 있어서, 상기 콘택홀을 포함한 패시베이션막 상에 금속층을 형성한 후 플라즈마 처리 또는 습식세정공정을 추가로 실시하는 것을 특징으로 하는 반도체소자의 제조방법.The method of claim 4, further comprising performing a plasma treatment or a wet cleaning process after forming a metal layer on the passivation film including the contact hole. 제4항에 있어서, 상기 유전율막이 노출되도록 상기 금속층을 식각하는 단계는, 에치백공정 또는 CMP공정으로 수행되는 것을 특징으로 하는 반도체소자의 제조방법.The method of claim 4, wherein the etching of the metal layer to expose the dielectric film is performed by an etch back process or a CMP process. 제1항에 있어서, 상기 금속층 패턴으로는 열전도도가 우수한 Al, Au 또는 Cu을 사용하는 것을 특징으로하는 반도체소자의 제조방법.The method of claim 1, wherein Al, Au, or Cu having excellent thermal conductivity is used as the metal layer pattern.
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Citations (4)

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JPH0870005A (en) * 1994-05-31 1996-03-12 Texas Instr Inc <Ti> Dummy lead wire and metal lead wire in which reliability in high-speed lsi semiconductor device using heat transfer layer is enhanced.
KR20000027568A (en) * 1998-10-28 2000-05-15 김영환 Metal line structure of semiconductor device
KR100283110B1 (en) * 1998-12-28 2001-04-02 김영환 Metal wiring formation method of semiconductor device
KR100598705B1 (en) * 1997-11-17 2006-12-01 소니 가부시끼 가이샤 Semiconductor device having low dielectric layer and method of manufacturing thereof

Patent Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0870005A (en) * 1994-05-31 1996-03-12 Texas Instr Inc <Ti> Dummy lead wire and metal lead wire in which reliability in high-speed lsi semiconductor device using heat transfer layer is enhanced.
KR100598705B1 (en) * 1997-11-17 2006-12-01 소니 가부시끼 가이샤 Semiconductor device having low dielectric layer and method of manufacturing thereof
KR20000027568A (en) * 1998-10-28 2000-05-15 김영환 Metal line structure of semiconductor device
KR100283110B1 (en) * 1998-12-28 2001-04-02 김영환 Metal wiring formation method of semiconductor device

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