KR100991976B1 - Control method for chiller of manufacturing equipment - Google Patents

Abstract

The present invention relates to a control method of a cooling device for a manufacturing facility, and all the control valves of the cooling water supply line when the power failure occurs in the freezer of the cooling device to maintain the optimum temperature during the manufacturing process through the manufacturing equipment proportional to By controlling it, it is possible to minimize the damages caused by the interruption of manufacturing by controlling so that the manufacturing equipment can be returned to the proper temperature and maintained in a short time.

Semiconductor, manufacturing equipment, manufacturing process, refrigerator, chiller, power failure recovery, automatic control, temperature

Description

CONTROL METHOD FOR CHILLER OF MANUFACTURING EQUIPMENT}

The present invention relates to a control method of a cooling apparatus for manufacturing equipment, and more particularly, to return the manufacturing equipment to the set temperature as soon as a power failure occurs in the freezer of the cooling apparatus for maintaining a proper temperature during the manufacturing process through the manufacturing equipment. The present invention relates to a control method of a cooling device for a manufacturing facility for maintaining it.

In general, a semiconductor device is formed by selectively and repeatedly performing a process such as photographing, etching, diffusion, chemical vapor deposition, ion implantation, metal deposition, etc. on a wafer, and etching, diffusion, and chemical vapor deposition during the manufacturing process of these semiconductor devices. For example, the process may be performed on a wafer in the process chamber by introducing a process gas into a closed process chamber under a predetermined atmosphere.

In the semiconductor manufacturing process, the wafer chuck in the process chamber is cooled by using a process cooling water system (PCW) to maintain a constant temperature.

Cooling device (PCW) is a temperature control device for stable process control in the manufacturing process of semiconductor devices. It is mainly used in etching and exposure processes during various processes. It is used to uniformly adjust the temperature of electrode plates and chambers in which excessive heat is generated during the process. This prevents wafer breakage and productivity loss due to temperature changes.

In the refrigeration cycle of the cooling device that performs this function, the cooling water path and the coolant path overlap in part to perform heat exchange.

1 is a system diagram showing an example of a cooling apparatus for a general manufacturing facility.

As shown here, the cooling device for a manufacturing facility includes a coolant supply line 32 for supplying a coolant for cooling the inside of the manufacturing facility 30 in a circulation manner, and a coolant for recovering the coolant circulating in the manufacturing facility 30. Recovery line 34, the cooling water supply line 12 for supplying the cooling water cooled in the freezer (10), the cooling water recovery line 14 for recovering the heat exchanged cooling water to the freezer (10), and the coolant supply line (32) Heat exchanger 20 having a coolant circulation path 24 connected to the coolant recovery line 34 and a coolant circulation path 22 connected to the coolant supply line 12 and the coolant recovery line 14, respectively. And a flow valve 40 installed in the coolant supply line 12 to adjust the flow rate of the coolant.

Therefore, the coolant circulated in the manufacturing facility 30 is recovered to the heat exchanger through the coolant recovery line 34 and the coolant cooled in the freezer 10 is supplied to the heat exchanger 20 through the coolant supply line 12 to cool the coolant. The coolant having heat exchanged while circulating in the circulation path 24 and the cooling water circulation path 22 is supplied to the manufacturing facility 30 through the coolant supply line 32 and the cooling water is supplied to the freezer 10 through the cooling water recovery line 14. By recovering, the manufacturing facility 30 is cooled.

At this time, the flow rate of the cooling water is controlled through the flow valve 40 in accordance with the maintenance temperature of the manufacturing facility (30).

The technology described above refers to the background of the technical field to which the present invention belongs, and does not mean the prior art.

As such, when the power failure occurs in the freezer during the operation of the cooling equipment for the manufacturing equipment that cools the manufacturing equipment by the heat exchange method according to the circulation of the cooling water and the coolant, the cooling water and the heat exchanger are not made smoothly. Serious problems arise in maintaining the temperature.

Therefore, in the event of a power failure, even if the refrigerator operates normally, even if the freezer operates normally, the set temperature can be quickly adjusted by adjusting the flow rate of the cooling water to recover the portion where the temperature of the manufacturing equipment is changed by the circulation of the coolant that is not cooled. Adjust the flow valve to maintain.

However, in the case of manually adjusting the control of the flow valve, not only the temperature control is incorrect but also takes a long time to normalize, which causes a problem in the production process by the manufacturing equipment.

The present invention has been created to improve the above problems, the present invention is to maintain the production facilities to return to the set temperature within a short time when a power failure occurs in the freezer of the cooling device to maintain the proper temperature during the manufacturing process through the manufacturing facilities It is an object of the present invention to provide a control method of a cooling device for a manufacturing facility for controlling so as to make it possible.

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According to an aspect of the present invention, there is provided a method for controlling a cooling device for a manufacturing facility, the method comprising: adjusting a flow rate of cooling water flowing in a first to second cooling water supply line having different diameters to supply cooling water supplied from a freezer to a heat exchanger; A control method of a cooling apparatus for a manufacturing facility, comprising: a two solenoid valve for maintaining a set temperature of the manufacturing facility; Proportionally controlling the first solenoid valve after opening the second solenoid valve in a manual mode; Determining whether the opening degree of the first solenoid valve is greater than or equal to the first set value; If the opening amount of the first solenoid valve is opened more than the first set value, storing the opening amount of the second solenoid valve as the second set value and switching the second solenoid valve to the automatic mode for proportional control; Judging whether the opening amount of the second solenoid valve is determined to be less than the second set value; And setting the opening amount of the second solenoid valve to the second set value and switching to the manual mode when the opening amount of the second solenoid valve is opened below the second set value.

In the present invention, the first to second cooling water supply lines are characterized in that the lines of different diameters.

In the present invention, the second cooling water supply line is characterized in that the diameter is larger than the first cooling water supply line.

As described above, the present invention is controlled to restore the manufacturing equipment to the set temperature within a short time when the power failure occurs in the freezer of the cooling apparatus to maintain the optimum temperature during the manufacturing process through the manufacturing equipment damage caused by the manufacturing interruption. Can be minimized.

Hereinafter, with reference to the accompanying drawings will be described an embodiment of a control method of a cooling device for a manufacturing facility according to the present invention. In this process, the thickness of the lines or the size of the components shown in the drawings may be exaggerated for clarity and convenience of description. In addition, the terms described below are defined in consideration of the functions of the present invention, which may vary depending on the intention or custom of the user, the operator. Therefore, definitions of these terms should be made based on the contents throughout the specification.

Figure 2 is a simplified system diagram showing a cooling device for manufacturing equipment according to an embodiment of the present invention.

As shown here, the cooling device for manufacturing facilities corresponds to a coolant supply line 310 and a coolant supply line 310 for supplying a coolant for cooling the inside of the manufacturing facility 300 in a circulation manner, respectively. Coolant recovery line 320 to recover the coolant circulated 300; A cooling water recovery line 130 for recovering the first to second cooling water supply lines 110 and 120 for supplying the cooling water cooled by the freezer 100 and the cooling water that has undergone heat exchange to the freezer 100; A coolant circulation path 220 connected to the coolant supply line 310 and a coolant recovery line 320, respectively, and a coolant circulation path 210 connected to the first to second coolant supply lines 110 and 120 and the coolant recovery line 130, respectively. Heat exchanger 200 is installed adjacently; First to second solenoid valves 610 and 620 respectively adjusting flow rates of the cooling water flowing to the first to second cooling water supply lines 110 and 120; A temperature sensor 500 for sensing the temperature of the coolant output to the coolant supply line 310; And a controller 400 for controlling the opening amount of the first to second solenoid valves 610 and 620 according to the set temperature of the manufacturing facility 300 and the value of the temperature sensor 500.

Such a cooling device for manufacturing equipment may be installed in parallel in plurality according to the manufacturing equipment 300 to maintain a constant set temperature of each manufacturing equipment 300.

The first to second coolant supply lines 110 and 120 are lines having different diameters, and the second coolant supply line 120 has a larger diameter than the first coolant supply line 110.

For example, when the diameter of the first cooling water supply line 110 is 40mm, the second cooling water supply line 120 is 80mm.

Therefore, the control unit 400 receives the value of the temperature sensor 500 according to the temperature set in the manufacturing facility 300, the opening amount of the second solenoid valve 620 for adjusting the flow rate of the second cooling water supply line 120 Heat exchange in the heat exchanger 200 by controlling the flow rate of the cooling water supplied to the heat exchanger 200 by controlling the opening amount of the first solenoid valve 610 to adjust the flow rate of the first cooling water supply line 110 based on the This is made to maintain a constant temperature of the output coolant is made so that the manufacturing facility 300 can maintain the set temperature.

In this case, the controller 400 may be connected to the TCP / IP network 700 to monitor the state of the controller 400 and the overall operation of the cooling apparatus in the remote automatic control server 800.

Referring to the flow chart for explaining the control method of the cooling device for manufacturing equipment according to an aspect of the present invention shown in Figure 3 made in this way as follows.

First, the first solenoid valve 610 is set to the automatic mode in order to control the cooling device for manufacturing equipment so that proportional control is performed according to the set temperature of the manufacturing equipment 300 and the value of the temperature sensor 500. The flow rate of the cooling water supplied to the heat exchanger 200 through the cooling water supply line 110 is adjusted, and the second solenoid valve 620 is set to the manual mode so that the user sets the opening amount arbitrarily to open the supply of the second cooling water. The flow rate of the cooling water supplied to the heat exchanger 200 through the line 120 is adjusted (S10).

In the embodiment of the present invention, when the diameter of the first cooling water supply line 110 is 40 mm and the diameter of the second cooling water supply line 120 is 80 mm, the opening amount of the second solenoid valve 610 is set to 30%. After that, control the cooling system for manufacturing equipment.

As such, the second solenoid valve 620 is set to the manual mode and the first solenoid valve 610 controls the flow rate of the coolant supplied from the refrigerator 100 to the heat exchanger 200 through proportional control (S12).

In this way, while the proportional control of the first solenoid valve 610, the opening amount of the first solenoid valve 610 is determined to determine whether or not the opening is more than the first set value (S14).

In the present embodiment, it is determined whether the first solenoid valve 610 is opened by more than 85%.

This is an operation of the first solenoid valve 610, which is an operation of the first solenoid valve 610, that is, an abnormality such as a power failure, that is, the temperature of the temperature sensor 500 rises and rapidly requires cooling water to cool the coolant. It is possible to judge that the opening degree alone is difficult to return to the set temperature in a short time.

Therefore, when the opening degree of the first solenoid valve 610 is opened by 85% or more, the opening amount of the second solenoid valve 620, which is currently opened in the manual mode, is stored as the second set value and then the second solenoid valve is opened. 620 is switched to the automatic mode to allow proportional control (S16 to S20).

At this time, the first solenoid valve 610 is in proportional control.

Thereafter, the opening amount of the second solenoid valve 620 is determined to determine a case where the current opening amount of the proportionally controlled second solenoid valve 620 is less than the second set value (S22).

At this time, when the current opening amount of the second solenoid valve 620 is less than the second set value, the opening amount of the second solenoid valve 620 is set to the second set value and is switched to the manual mode (S24) (S26).

Therefore, after that, only the first solenoid valve 610 determines the opening amount while performing proportional control in the automatic mode, and when the opening degree is 85% or more, the above process is repeated to maintain the set temperature within a short time.

Figure 4 is a simulation graph by the manufacturing method of the cooling device for manufacturing equipment according to an embodiment of the present invention.

As shown here, graph A is an operation graph of the first solenoid valve 610, graph B is an operation graph of the second solenoid valve 620, and graph C is a graph showing a temperature change of the manufacturing facility.

In the graph B, the second solenoid valve 620 is controlled in a state having an opening amount of 30%, and in the graph A, the first solenoid valve 610 is proportionally controlled.

Then, when the opening amount of the first solenoid valve 610 is opened by more than 85%, the second solenoid valve 620 is switched to the automatic mode and then proportionally controlled to be opened at 100%, thereby rapidly cooling the coolant to lower the temperature of the manufacturing equipment. When the set temperature is reached, the opening amount of the second solenoid valve 620 decreases to less than the manually set opening amount, and is again set to 30%, which is the manually set opening amount, and is proportionally controlled by the first solenoid valve 610. .

In the case of controlling in this manner, it can be seen that the time taken for the manufacturing facility 300 set to 11.5 ° C. to return to the set temperature is returned and controlled to about 9 minutes.

While the present invention has been particularly shown and described with reference to exemplary embodiments thereof, it is clearly understood that the same is by way of illustration and example only and is not to be taken by way of limitation, . Therefore, the technical protection scope of the present invention will be defined by the claims below.

1 is a system diagram showing an example of a cooling apparatus for a general manufacturing facility.

Figure 2 is a simplified system diagram showing a cooling device for manufacturing equipment according to an embodiment of the present invention.

3 is a flowchart illustrating a manufacturing method of a cooling apparatus for a manufacturing facility according to an embodiment of the present invention.

Figure 4 is a simulation graph by the manufacturing method of the cooling device for manufacturing equipment according to an embodiment of the present invention.

   -Explanation of symbols for the main parts of the drawings-

100: freezer 110: first cooling water supply line

120: second cooling water supply line 130: cooling water recovery line

200: heat exchanger 210: cooling water circulation path

220: coolant circulation path 300: manufacturing equipment

310: coolant supply line 320: coolant recovery line

400: control unit 500: temperature sensor

610: first solenoid valve 620: second solenoid valve

700: TCP / IP network 800: Automatic control server

Claims (8)

delete delete delete delete delete Manufacturing equipment for maintaining the set temperature of the manufacturing equipment by providing a first to second solenoid valve for controlling the flow rate of the cooling water flowing in the first to second cooling water supply line having a different diameter to supply the cooling water supplied from the freezer to the heat exchanger A control method of a cooling device for a system; Proportionally controlling the first solenoid valve after opening the second solenoid valve in a manual mode; Judging whether the opening amount of the first solenoid valve is greater than or equal to a first set value; If the opening amount of the first solenoid valve is opened more than the first set value, storing the opening amount of the second solenoid valve as a second set value and switching the second solenoid valve to an automatic mode for proportional control; Judging whether the opening amount of the second solenoid valve is determined to be less than the second set value; And When the opening amount of the second solenoid valve is opened below the second set value, setting the opening amount of the second solenoid valve to the second set value and switching to a manual mode; Control method of facility cooling system. 7. The method of claim 6, wherein the first to second cooling water supply lines are lines of different diameters. 8. The control method according to claim 7, wherein the second cooling water supply line has a diameter larger than that of the first cooling water supply line.

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