KR100986133B1 - Illuminance measuring instrument for UV cure machine - Google Patents

Abstract

The present invention relates to a measuring device for measuring the ultraviolet light intensity of the ultraviolet curing device, an illumination intensity measurement unit having an illumination sensor for measuring the ultraviolet light intensity of a specific part in the chamber, a first transfer unit for reciprocating transfer of the illumination measurement unit, and A second transfer part is provided on both sides of the chamber to face each other so as to support both sides of the first transfer part and to transfer the first transfer part in the forward and rearward directions, and at one side of the second transfer part. The drive means for interlocking operation of the second transfer part enables the illuminance measurement unit to move in the X-axis and Y-axis directions in the chamber and the illuminance sensor to move in the Z-axis direction, thereby providing a large glass substrate. Even when it is applied, it is possible to easily and automatically measure the ultraviolet light intensity of a plurality of specific areas, and inadvertently In addition to being able to prevent damage to the substrate or the like, to a ultraviolet radiation in reducing the cost of equipment by using one of the illumination sensor it can be reduced as well as the operation airborne roughness measuring device.

UV light, sealant, driving means

Description

UV illuminance measuring device {Illuminance measuring instrument for UV cure machine}

The present invention relates to a measuring device for measuring the ultraviolet light intensity of the ultraviolet curing device, and to transfer the light intensity measurement unit and the illumination measuring unit provided with an illumination sensor for measuring the ultraviolet light intensity of a specific part in the chamber to the front, rear, left, right. It is provided with a first conveying part and a second conveying part which are orthogonal to each other so that the illuminance measuring part can not only move in the X-axis and Y-axis directions in the chamber, but also the light sensor can move in the Z-axis direction, thereby providing a plurality of specific features. Ultraviolet illuminance of the site can be easily and automatically measured to ensure reliability of the illuminance measurement value, and also to prevent damage to the substrate due to carelessness of the operator during manual work, and also to reduce equipment costs. It is about.

In general, liquid crystal displays (LCDs) are not only lighter than other displays, but also have a large screen and high resolution, and thus are used as major flat panel display devices. After the liquid crystal is injected into two glass substrates, the liquid crystal is sealed with a sealant, and a voltage or a current is added through an electrode installed on each substrate to change the arrangement of the liquid crystal so that light can be transmitted or shielded and displayed. Device.

At this time, the sealant, which is a sealant applied to the glass substrate, injects liquid crystal between two glass substrates, and then is applied along the edge of the glass substrate to seal the glass substrate so that the liquid crystal in the glass substrate does not leak to the outside.

The ultraviolet curing device is a device for selectively curing only the sealant by irradiating ultraviolet (UV: Ultra Violet) on the glass substrate.

In this case, the ultraviolet curing device has a problem in that ultraviolet rays deteriorate the liquid crystal and shorten the life, so that a mask glass is installed between the ultraviolet lamp and the glass substrate so that the ultraviolet ray can be selectively irradiated only to the sealant of the glass substrate.

In the mask glass, a masking pattern having a slot-like transmission portion formed on the surface thereof corresponds to the position of the sealant so that ultraviolet rays can be irradiated locally only on the sealant of the glass substrate.

Hereinafter, a conventional ultraviolet curing device will be described with reference to FIG. 1.

Figure 1 shows a schematic cross-sectional view of a conventional ultraviolet curing device.

As shown, the ultraviolet curing device includes a chamber 1, a light emitting unit 5 provided with an ultraviolet lamp 6 for irradiating ultraviolet rays, and a mask glass fixing unit 120 for fixing the mask glass 100; It is configured to include a substrate support 130 for loading and supporting the glass substrate 110 which is an LCD panel.

The mask glass fixing unit 120 by forcibly discharging the air of the suction groove 127 formed in the lower side of the mask support glass 121 to the outside through the air suction member 125, the lower surface of the mask support glass 121 It is fixed to the mask glass 100 by vacuum adsorption.

Meanwhile, the curing of the sealant 115 to seal the liquid crystal 116 of the glass substrate 110 may be performed by placing the glass substrate 110 placed on the stage 135 on the upper portion of the support 136 using the substrate support 130 at an appropriate position. After loading, the ultraviolet lamp 6 of the light emitting unit 5 is operated to irradiate the sealant 115 of the glass substrate 110 through the mask support glass 121 and the mask glass 100.

In this case, the ultraviolet illuminance measurement is to determine whether appropriate ultraviolet rays are irradiated onto the glass substrate 110, and the ultraviolet illuminance is measured at a specific portion of the upper portion of the glass substrate 110 using an illuminance sensor.

Conventional ultraviolet light measurement is performed by the operator using a separate jig (JIG) to measure the illuminance manually for a plurality of specific areas with the illuminance sensor, or by installing a plurality of illuminance sensors on the top of the stage (15) The illuminance at the illuminance sensor position is measured, and the average value of the illuminance values measured as described above is calculated.

However, the conventional ultraviolet light measurement as described above has the following problems.

First, when a large area substrate is used as the size of the substrate increases, it is difficult for a worker to measure using a jig. Second, there is a high risk of damage to a glass substrate due to carelessness of the operator. Third, when measuring by installing several illuminance sensors on the top of the stage, the illuminance measurement value is about ± 20% difference depending on the measuring point, so a large number of measuring points are required. There was a problem that the installation cost is significantly increased by the need for a relatively high cost of the light sensor, fourth, there is a problem that the process efficiency is significantly reduced due to the increase in the number of work required to correct the plurality of light sensor.

The present invention has been made to solve the above problems, an object of the present invention is to move the roughness measurement unit in the X-axis and Y-axis direction in the chamber by using the first transfer unit and the second transfer unit installed to be perpendicular to each other. In addition, the illuminance sensor can be moved in the Z-axis direction so that the illuminance at a plurality of specific parts can be easily and automatically measured, thereby improving the reliability of the illuminance measurement value.

Another object of the present invention is to implement an automatic illuminance measuring system, so that it is possible to prevent damage to the substrate due to carelessness during manual operation of the operator as well as accurate and rapid illuminance measurement.

Still another object of the present invention is to reduce the cost of equipment and to reduce the labor cost by using one illuminance sensor.

Still another object of the present invention is to improve the work efficiency by enabling effective application to a large area glass substrate without additional auxiliary equipment.

Still another object of the present invention is to provide a plurality of illuminance measuring units in the first transfer part to measure illuminance by a scan method, thereby enabling rapid illuminance measurement.

In order to achieve the above object, the present invention provides an illuminance measuring unit having an illuminance sensor for measuring the illuminance of ultraviolet rays irradiated to a specific portion in the chamber, and installed at a predetermined length on one side of the chamber to support the illuminance measuring unit. However, the first conveying part for reciprocating the roughness measuring part along the longitudinal direction, and both sides of the first conveying part to support each side and at the same time to face each other on both sides in the chamber so as to convey the first conveying part in the forward and backward directions The second transfer unit is installed to correspond to each other, and the second transfer unit is installed on one side of the second transfer unit, but the same driving force is distributed to the second transfer unit interlocking the second transfer unit so that both sides of the first transfer unit can be transferred at the same speed It comprises a drive means for operating.

In addition, the first transfer unit of the present invention is provided with a linear module provided to a predetermined length and the sliding is provided on the linear module, it is composed of a moving plate for supporting the roughness measuring unit.

In addition, one side of the moving plate may be provided with a limit sensor and an origin sensor for limiting the moving area to set the reference point, so that the illuminance measuring unit is movable within a specific area.

Meanwhile, the illuminance measuring unit includes a cylinder coupled to one side of the moving plate and a sensor support block coupled to the piston rod of the cylinder to move upward and downward, and an illumination sensor provided on an upper portion of the sensor support block. do.

In addition, the upper surface of the sensor support block may be further provided with an elastic support portion provided with a cushioning member to elastically support the lower surface of the illumination sensor to absorb the shock applied to the illumination sensor.

In addition, the elastic support of the present invention is installed inside the guide member and the guide member for guiding the outer circumferential surface of the illuminance sensor so that the illuminance sensor can be slid in the up and down direction, while supporting the illuminance sensor in the up and down direction It may be composed of a support that is slidably installed and a buffer member that is disposed between the support and the sensor support block to absorb the shock applied to the illuminance sensor.

On the other hand, the second transfer unit is provided with a linear module provided to a predetermined length and slidably installed on the linear module, it may be composed of a moving plate for supporting one side of the first transfer unit.

In addition, the driving means of the present invention is connected to one end of the second transfer portion provided on one side of the inside of the chamber is a second drive motor for transmitting a rotational force and the second transfer portion provided on both sides of the inside of the chamber each other It is composed of a rotating shaft for transmitting the rotational force by connecting the second transfer unit with each other so as to interlock operation.

In addition, both sides of the rotating shaft may be coupled to the inner surface of the chamber to prevent the deflection of the rotating shaft and at the same time may be provided with a rotary support having a bearing to support the rotation.

In addition, the second driving motor may be coupled to a support bracket coupled to the inner surface of the chamber, and the driving shaft may be connected to a driven shaft and a belt protruding from one end of the linear module of the second transfer part to transmit a rotational force.

In addition, the illuminance measuring unit of the present invention may be arranged to be spaced apart from the first transfer portion to enable the measurement of illuminance in a scanning manner to enable a quick illuminance measurement.

As described above, the present invention, firstly, also in the case of a large-area glass substrate can ensure the reliability of the roughness measurement value, there is an effect that can improve the quality of the glass substrate.

Second, there is an effect of increasing the process efficiency according to the improved work efficiency can be automatically measured easily.

Third, there is an effect that can increase the productivity by preventing damage to the glass substrate due to carelessness due to the manual work of the operator.

Fourth, it is possible to easily measure the illuminance of a plurality of specific parts by using one illuminance sensor, which not only reduces equipment cost, but also makes it easy to calibrate the illuminance sensor, thereby reducing the workmanship.

Fifth, by installing a plurality of illuminance measuring unit is possible to measure the illuminance even by a scan method has the effect of measuring the illuminance quickly.

Hereinafter, an illuminance measuring apparatus of the ultraviolet curing device of the present invention will be described in detail with reference to the accompanying drawings.

Figure 2 shows a side view of an embodiment of the ultraviolet illuminance measuring apparatus of the present invention installed in the ultraviolet curing device, Figure 3 shows a perspective view of the ultraviolet illuminance measuring apparatus of the present invention.

As shown in FIG. 3, the illuminance measuring apparatus of the present invention includes an illuminance measuring unit 10, a first conveying unit 30, a second conveying unit 40, and a driving means 50.

The first transfer unit 30 and the second transfer unit 40 are transfer means installed in a horizontal state to be orthogonal to each other on the inner surface of the chamber 1, the first transfer unit 30 is located on one side of the inside of the chamber 1. It is installed to support the roughness measuring unit 10 and at the same time reciprocating transfer in the X-axis direction, the second transfer unit 40 is installed correspondingly to face each other on both sides of the interior of the chamber 1, the first transfer unit 30 While supporting both ends of the first transfer portion 30 is to be transferred in the Y-axis direction.

Meanwhile, the illuminance measuring unit 10 is provided with an illuminance sensor 15 at an upper side thereof and is installed to be transported on the first transfer unit 30.

The second transfer part 40 may be fixedly installed on the inner surface of the chamber 1 by the plurality of support brackets 70.

The first transfer unit 30 and the second transfer unit 40 may use a linear module that is commonly used to support a specific member to reciprocate along the longitudinal direction.

The linear module is a position control conveying means generally used to precisely control the feed rate and the feed amount, such as a conveyor belt (not shown) and a linear rail guide (not shown) inside a housing of a predetermined length. ) Is provided.

At this time, the housing of the linear module may be provided with moving plates 35 and 45 (shown in FIG. 6) fixedly coupled to the conveyor belt and coupled to a moving block (not shown) of the LM guide.

Therefore, the movable plates 35 and 45 are slid along the longitudinal direction of the LM guide by the operation of the conveyor belt, and may be provided in various forms such as rectangular or round depending on the characteristics of the object to be conveyed. .

At this time, the linear module of the first transfer unit 30 receives the rotational force from the first drive motor 32 (shown in FIG. 5) directly connected to one end, and the conveyor belt is operated to transfer the moving plate 35. The linear module of the second transfer unit 40 receives the rotational force from the second driving motor 52 of the driving means 50 to be described below to operate the internal conveyor belt to transfer the moving plate 45. .

The linear module is not limited thereto, and may be configured in various forms such as a ball screw type in addition to the belt type as described above.

As shown in FIG. 2, the first transport unit 30 and the second transport unit 40 measure the ultraviolet light intensity of the lower surface of the mask glass 100 by the illuminance sensor 15 of the illuminance measurement unit 10. It is to be installed in the horizontal direction on the inner surface of the chamber 1 between the mask glass 100 and the glass substrate 110.

On the other hand, the driving means 50 is installed so that the second transfer unit 40 can be interlocked and operated so that the same driving force can be added to the second transfer unit 40 on both sides.

Therefore, the first transfer unit 30 and the second transfer unit 40, the illuminance measuring unit 10 is moved on the same plane inside the chamber 1, the illuminance sensor 15 to measure the ultraviolet illuminance of a specific site It is possible to precise position control for.

Hereinafter, the illuminance measuring unit 10 of the present invention will be described in detail with reference to FIG. 4.

Figure 4 shows a partially enlarged perspective view of the roughness measuring unit 10 provided in the present invention.

As shown, the illuminance measuring unit 10 is composed of a cylinder 12, the sensor support block 13 and the illuminance sensor 15.

The cylinder 12 is coupled and fixed in a vertical direction to one side of the fixed block 11 coupled to the upper portion of the movable plate 35 slidably provided on the upper portion of the first transfer portion 30.

In this case, a plurality of piston rods 12a are provided at an upper portion of the cylinder 12 so as to be elevated, and a sensor support block 13 is coupled to an end of the piston rod 12a.

Therefore, the sensor support block 13 is provided to be able to move up and down by the operation of the cylinder 12, is formed in a predetermined length and width, the lower end of the piston rod 12a of the cylinder 12 ) Is coupled, and an illumination sensor 15 measuring the illumination of the ultraviolet light is installed at the upper end of the other end.

In this case, the sensor support block 13 may be formed in various shapes such as a rectangle or a circle. The sensor support block 13 may be elastic to absorb external shocks applied to the light sensor 15 between the light sensor 15 and the sensor support block 13. Support 20 may be placed.

Since the illuminance sensor 15 measures the illuminance of the ultraviolet light in a state spaced about 1 mm to 3 mm from the lower side of the mask glass 100, the collision with the lower side of the mask glass 100 in the process of adjusting the correct separation distance The impact may be applied to the upper surface.

Therefore, the elastic support 20 absorbs an external shock applied to the upper part of the illuminance sensor 15 to prevent breakage or damage of the illuminance sensor 15 and moves the upper and lower directions of the illuminance sensor 15. It will act as a buffer to accommodate in a certain range.

The elastic support 20 is composed of a guide member 21, the support 25 and the buffer member (27).

The guide member 21 is fixed to the upper surface of the sensor support block 13 to guide the outer circumferential surface of the illuminance sensor 15 so that the illuminance sensor 15 can slide in the up and down directions, and the illuminance sensor 15 Is formed in a cylindrical shape corresponding to the outer circumferential surface of the), the upper one side of a predetermined depth so that the guide projection 16 protruding to one side of the outer circumferential surface of the illuminance sensor 15 is inserted to prevent rotation of the illuminance sensor 15. Guide groove 22 may be formed.

On the other hand, the support 25 is supported to support the lower surface of the illuminance sensor 15 and is slidably installed in the guide member 21 in the up and down direction, is formed as a circular plate of a predetermined thickness, Guide bar 26 is formed to project downward.

The guide bar 26 is inserted into a through hole (not shown) formed in the sensor support block 13 so that the guide bar 26 is slidably installed in the up and down directions, or as shown, the sensor support block 13. Inserted into the through-holes formed in the guide block 28 separately installed on the upper surface may be installed to be slidable in the vertical direction.

Meanwhile, the shock absorbing member 27 is extrapolated to the guide bar 26 so as to be placed between the support 21 and the sensor support block 13 to elastically support the lower surface of the support 21, but a spring may be used. Not necessarily, various types of elastic materials such as elastic rubber materials may be used.

However, the elastic support 20 is not limited thereto, and various conventional shock absorbing structures capable of absorbing the shock applied from the upper and lower sides may be applied.

Therefore, the illuminance sensor 15 of the illuminance measuring unit 10 is movable up and down by the cylinder 12 sliding integrally with the moving plate 35 of the first conveying unit 30, so that the X axis direction It is possible to move in the Z-axis direction.

Hereinafter, the driving means 50 provided in the present invention will be described in detail with reference to FIGS. 5 and 6.

5 and 6 show partially enlarged perspective views of both sides of the drive means 50 of the present invention, respectively.

As shown in FIG. 5, the driving means 50 includes a second driving motor 52 and a rotation shaft 55.

The second driving motor 52 drives the second transfer part 40 and is fixedly installed on the inner side surface of the chamber 1 so as to be positioned below the one end of the second transfer part 40.

In this case, the second driving motor 52 is fixed to the support bracket 53 coupled to the inner surface of the chamber 1, and the driving wheel 54 is coupled to the end of the driving shaft 52a.

On the other hand, the driven shaft 40a for rotating the conveyor belt installed therein protrudes in the same direction as the drive shaft 52a of the second drive motor 52 at the end of the linear module of the second transfer part 40, and the driven shaft At the end of the 40a, the driven wheel 44 is engaged.

The driving wheel 54 and the driven wheel 44 are rotatably integrated with the driving shaft 52a and the driven shaft 40a, and are connected by a belt 58 to transmit rotational force.

On the other hand, the rotation shaft 55 is to transmit the rotational force so that the second transfer unit 40 respectively installed on both sides of the chamber 1 is interlocked with each other, one end of the second transfer unit 40 to which the second drive motor 52 is connected. Driven shaft 40a provided at the linear module end of the coupling shaft 57 and the other end thereof, as shown in FIG. 6, the driven shaft of the end of the linear module of the opposite second transfer portion 40 (shown in FIG. 6). Not connected) via a coupling 57.

At this time, both sides of the rotation shaft 55 is coupled to the rotary support 56 adjacent to the coupling 57, respectively.

Rotating support 56 is coupled to one side in the chamber 1 to support both sides of the rotation shaft 55, respectively, and a bearing (not shown) for supporting the rotation shaft 55 is provided inside the housing In order to prevent sag deformation of both sides of the rotation shaft 55, the rotational force of the second driving motor 52 is accurately distributed to the second transfer parts 40 on both sides.

Therefore, the driving means 50 transmits the rotational force of the second driving motor 52 to the driven shaft 40a of the second conveying part 40 through the belt 58 to drive the second conveying part 40. By transmitting the rotational force of the second transfer portion 40 on one side via the rotary shaft 55 to the second transfer portion 40 on the other side, the second transfer portion 40 on both sides can be driven at the same speed.

Meanwhile, as shown in FIG. 6, the side of the moving plate 35 of the first transfer unit 30 to which the cylinder 12 of the illuminance measuring unit 10 is coupled may be moved integrally with the moving plate 35. The limit sensor 85 and the origin sensor 86 may be combined.

The limit sensor 85 limits the moving range of the illuminance measuring unit 10, and the origin sensor 86 may determine a reference point for selecting an ultraviolet illuminance measuring point.

Hereinafter, the operation of the present invention will be described in detail with reference to FIG. 3.

First, a separate controller (not shown) receives information from the origin sensor 86 and selects a reference point as a reference point, and selects a plurality of measurement points based on the reference point.

In order to move the illuminance sensor 15 to a predetermined measurement point, the controller first operates the second driving motor 52 to simultaneously drive the second transfer unit 40, thereby supporting both ends of the first transfer unit 30. The moving plate 45 is transferred in the Y-axis direction on the second transfer part 40 to move the first transfer part 30 to a desired position.

When the position of the first transfer unit 30 is determined as described above, the controller operates the first driving motor 32 to transfer the moving plate 35 on the first transfer unit 30 in the X-axis direction to measure the roughness measurement unit ( Place the illuminance sensor 15 of 10) at the set measurement point.

In addition, the controller operates the cylinder 12 to move the illuminance sensor 15 in the Z-axis direction so that the illuminance sensor 15 is spaced apart from the lower surface of the mask glass 100 by a desired distance to measure the illuminance of ultraviolet rays.

On the other hand, Figure 7 is a perspective view of another embodiment of the ultraviolet illuminance measuring apparatus of the present invention, except for the configuration provided with a plurality of illuminance measuring unit is the same as the above embodiment will be described only the changed configuration.

As shown, the roughness measuring unit 10 is arranged in a plurality of spaced apart from the first transfer unit 30.

Each illuminance measuring unit 10 may be spaced apart at regular intervals on the first transfer unit 30 or spaced apart at different intervals so that the illuminance sensor 15 may be positioned at a preset measurement point. At this time, the moving plate 35 is installed in the first transfer unit 30 to correspond to the illuminance measurement unit 10, respectively.

Since each of the roughness measuring units 10 are simultaneously transferred on the first transfer unit 30, a plurality of roughness measuring units may be installed on only one side of the first transfer unit 30 so as to be able to sequentially scan the divided roughness measurement areas. Could be

Therefore, the illuminance measuring unit 10 can measure illuminance by a scan method while moving in the Y-axis direction by the second conveying unit 40 together with the first conveying unit 30, thereby enabling quicker illuminance measurement. Will be.

As described above, the present invention moves the illuminance sensor 15 in the chamber 1 along the X, Y, Z-axis direction to enable automatic measurement of ultraviolet illuminance at a plurality of measurement points, It can be effectively applied to glass substrates to improve the reliability of roughness measurement values, and to prevent damages to the substrates that may occur during manual operation, as well as to reduce labor and improve work efficiency. Will be.

As described above, the above embodiments are merely described as examples for convenience of description and are not intended to limit the scope of the claims.

1 is a schematic cross-sectional view of a conventional ultraviolet curing device,

2 is a side view of an embodiment in which the ultraviolet illuminance measuring apparatus of the present invention is installed inside the chamber of the ultraviolet curing apparatus;

3 is a perspective view of the ultraviolet illuminance measuring apparatus of the present invention,

4 is a partially enlarged perspective view of the illuminance measurement unit of FIG. 3;

5 is a partially enlarged perspective view of one side of the driving means of FIG. 3;

6 is a partially enlarged perspective view of the other side of the driving means of FIG.

7 is a perspective view of another embodiment of the present invention.

Explanation of symbols on the main parts of the drawings

1 chamber 5 light emitting unit

6: ultraviolet lamp 10: illuminance measuring unit

11: fixed block 12: cylinder

12a: Piston Rod 13: Sensor Support Block

15: Ambient light sensor 16: Guide protrusion

20: elastic support 21: guide member

22: guide groove 25: support

26: guide bar 27: buffer member

28: guide block 30: first transfer unit

32: first driving motor 35, 45: moving plate

40: second transfer part 40a: driven shaft

44: driven wheel 50: drive means

52: second drive motor 53,70: support bracket

54 drive shaft 55 rotation shaft

56: rotational support 57: coupling

58: belt 85: limit sensor

86: origin sensor 100: mask glass

110: glass substrate 115: sealant

116 liquid crystal 120 mask glass fixing unit

121: mask support glass 125: air suction member

127: adsorption groove 130: substrate support

135: stage 136: lifting support

Claims (11)

An illuminance measuring unit having an illuminance sensor measuring an illuminance of ultraviolet rays irradiated to a specific part of the chamber; A first transfer part installed on one side of the chamber to have a predetermined length so as to support the illuminance measuring unit, and reciprocally conveying the illuminance measuring unit along a longitudinal direction; A second transfer part correspondingly installed to support both sides of the first transfer part and face each other on both sides of the chamber so as to transfer the first transfer part in the front and rear directions; And A driving means installed in one side of the second transfer part and configured to operate the second transfer part in such a manner that the same driving force is distributed to the second transfer part so that both sides of the first transfer part can be transferred at the same speed; Including but not limited to The first transfer part is composed of a linear module provided with a predetermined length and a movable plate which is provided on the linear module to be slidable and supports the roughness measuring unit, The illuminance measuring unit is composed of a cylinder coupled to one side of the moving plate and a sensor support block coupled to the piston rod of the cylinder to be lifted up and down, and an illumination sensor provided on an upper portion of the sensor support block. , The upper surface of the sensor support block is an ultraviolet illuminance measuring apparatus, characterized in that the elastic support is further provided with a cushioning member to elastically support the lower surface of the illuminance sensor to absorb the shock applied to the illuminance sensor. delete The method of claim 1, One side of the moving plate is a UV illuminance measuring apparatus, characterized in that the limit sensor and the origin sensor for limiting the moving area and set the reference point so that the illuminance measuring unit is movable within a specific area, respectively. delete delete The method of claim 1, The elastic support includes a guide member for guiding the outer circumferential surface of the illuminance sensor so that the illuminance sensor can slide in the up and down directions; A support installed inside the guide member to support the illuminance sensor and to be slidable in up and down directions; And A buffer member disposed between the support and the sensor support block to absorb a shock applied to the illuminance sensor; UV illuminance measuring apparatus, characterized in that consisting of. The method according to any one of claims 1, 3, and 6, The second conveying unit is provided with a linear module provided to a predetermined length and slidable above the linear module, characterized in that consisting of a moving plate for supporting one side of the first transfer unit. The method of claim 7, wherein The driving means is connected to one end of the second transfer portion provided in one side of the chamber and the second drive motor for transmitting the rotational force and the second transfer unit provided on both sides of the inside of the chamber to operate in conjunction with each other Ultraviolet illuminance measuring device, characterized in that consisting of a rotating shaft for transmitting the rotational force by connecting the second transfer unit. The method of claim 8, Both sides of the rotating shaft is coupled to the inner surface of the chamber to prevent the deflection of the rotating shaft and at the same time the rotational support provided with a bearing to support the rotation is characterized in that the ultraviolet illuminance measuring apparatus. The method of claim 8, The second driving motor is coupled to the support bracket coupled to the inner surface of the chamber, the ultraviolet light intensity characterized in that the drive shaft is connected to the driven shaft and a belt protruding one end of the linear module of the second transfer portion to transmit the rotational force Measuring device. The method of claim 7, wherein The illuminance measuring unit is a UV illuminance measuring apparatus, characterized in that a plurality is arranged to be spaced apart from the first transfer unit to enable the illuminance measurement in a scan method.

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