KR100982850B1 - 기판을 주입하는 방법 및 상기 방법을 수행하기 위한 이온 주입기 - Google Patents
기판을 주입하는 방법 및 상기 방법을 수행하기 위한 이온 주입기 Download PDFInfo
- Publication number
- KR100982850B1 KR100982850B1 KR1020047016179A KR20047016179A KR100982850B1 KR 100982850 B1 KR100982850 B1 KR 100982850B1 KR 1020047016179 A KR1020047016179 A KR 1020047016179A KR 20047016179 A KR20047016179 A KR 20047016179A KR 100982850 B1 KR100982850 B1 KR 100982850B1
- Authority
- KR
- South Korea
- Prior art keywords
- substrate
- raster
- scans
- uniformity
- injection
- Prior art date
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Classifications
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/30—Electron-beam or ion-beam tubes for localised treatment of objects
- H01J37/317—Electron-beam or ion-beam tubes for localised treatment of objects for changing properties of the objects or for applying thin layers thereon, e.g. for ion implantation
- H01J37/3171—Electron-beam or ion-beam tubes for localised treatment of objects for changing properties of the objects or for applying thin layers thereon, e.g. for ion implantation for ion implantation
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/30—Electron-beam or ion-beam tubes for localised treatment of objects
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/30—Electron-beam or ion-beam tubes for localised treatment of objects
- H01J37/304—Controlling tubes by information coming from the objects or from the beam, e.g. correction signals
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J2237/00—Discharge tubes exposing object to beam, e.g. for analysis treatment, etching, imaging
- H01J2237/20—Positioning, supporting, modifying or maintaining the physical state of objects being observed or treated
- H01J2237/202—Movement
- H01J2237/20221—Translation
- H01J2237/20228—Mechanical X-Y scanning
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J2237/00—Discharge tubes exposing object to beam, e.g. for analysis treatment, etching, imaging
- H01J2237/30—Electron or ion beam tubes for processing objects
- H01J2237/317—Processing objects on a microscale
- H01J2237/31701—Ion implantation
- H01J2237/31703—Dosimetry
Landscapes
- Chemical & Material Sciences (AREA)
- Analytical Chemistry (AREA)
- Physical Vapour Deposition (AREA)
- X-Ray Techniques (AREA)
- Electron Sources, Ion Sources (AREA)
Applications Claiming Priority (5)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US10/119,290 US6956223B2 (en) | 2002-04-10 | 2002-04-10 | Multi-directional scanning of movable member and ion beam monitoring arrangement therefor |
US10/119,290 | 2002-04-10 | ||
US10/251,780 US6908836B2 (en) | 2002-09-23 | 2002-09-23 | Method of implanting a substrate and an ion implanter for performing the method |
US10/251,780 | 2002-09-23 | ||
PCT/GB2003/001222 WO2003088299A2 (en) | 2002-04-10 | 2003-03-21 | A method of implanting a substrate and an ion implanter for performing the method |
Publications (2)
Publication Number | Publication Date |
---|---|
KR20040097335A KR20040097335A (ko) | 2004-11-17 |
KR100982850B1 true KR100982850B1 (ko) | 2010-09-16 |
Family
ID=29253953
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
KR1020047016179A KR100982850B1 (ko) | 2002-04-10 | 2003-03-21 | 기판을 주입하는 방법 및 상기 방법을 수행하기 위한 이온 주입기 |
Country Status (7)
Country | Link |
---|---|
EP (1) | EP1493171A2 (zh) |
JP (1) | JP4347068B2 (zh) |
KR (1) | KR100982850B1 (zh) |
CN (1) | CN100401449C (zh) |
AU (1) | AU2003214435A1 (zh) |
TW (1) | TWI319894B (zh) |
WO (1) | WO2003088299A2 (zh) |
Families Citing this family (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US6908836B2 (en) | 2002-09-23 | 2005-06-21 | Applied Materials, Inc. | Method of implanting a substrate and an ion implanter for performing the method |
US7282427B1 (en) | 2006-05-04 | 2007-10-16 | Applied Materials, Inc. | Method of implanting a substrate and an ion implanter for performing the method |
US7049210B2 (en) * | 2002-09-23 | 2006-05-23 | Applied Materials, Inc. | Method of implanting a substrate and an ion implanter for performing the method |
GB2432039B (en) * | 2004-01-09 | 2009-03-11 | Applied Materials Inc | Improvements relating to ion implantation |
US7473909B2 (en) * | 2006-12-04 | 2009-01-06 | Axcelis Technologies, Inc. | Use of ion induced luminescence (IIL) as feedback control for ion implantation |
TW201133536A (en) * | 2010-03-16 | 2011-10-01 | Kingstone Semiconductor Co Ltd | Ions injection system and method |
Citations (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US5898179A (en) | 1997-09-10 | 1999-04-27 | Orion Equipment, Inc. | Method and apparatus for controlling a workpiece in a vacuum chamber |
WO2000005744A1 (en) * | 1998-07-21 | 2000-02-03 | Applied Materials, Inc. | Ion implantation beam monitor |
Family Cites Families (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US5389793A (en) * | 1983-08-15 | 1995-02-14 | Applied Materials, Inc. | Apparatus and methods for ion implantation |
US4980562A (en) * | 1986-04-09 | 1990-12-25 | Varian Associates, Inc. | Method and apparatus for high efficiency scanning in an ion implanter |
US4775796A (en) * | 1987-01-06 | 1988-10-04 | Purser Kenneth H | Treating workpieces with beams |
US5886356A (en) * | 1997-03-17 | 1999-03-23 | Taiwan Semiconductor Manufacturing Co., Ltd. | Automatic supervision system on the ion beam map for ion implantation process |
JP3341749B2 (ja) * | 1999-12-28 | 2002-11-05 | 日新電機株式会社 | イオン注入方法およびイオン注入装置 |
US6323497B1 (en) * | 2000-06-02 | 2001-11-27 | Varian Semiconductor Equipment Assoc. | Method and apparatus for controlling ion implantation during vacuum fluctuation |
-
2003
- 2003-03-21 WO PCT/GB2003/001222 patent/WO2003088299A2/en active Application Filing
- 2003-03-21 CN CNB038081210A patent/CN100401449C/zh not_active Expired - Fee Related
- 2003-03-21 AU AU2003214435A patent/AU2003214435A1/en not_active Abandoned
- 2003-03-21 KR KR1020047016179A patent/KR100982850B1/ko active IP Right Grant
- 2003-03-21 JP JP2003585136A patent/JP4347068B2/ja not_active Expired - Fee Related
- 2003-03-21 EP EP03710007A patent/EP1493171A2/en not_active Withdrawn
- 2003-04-10 TW TW092108269A patent/TWI319894B/zh not_active IP Right Cessation
Patent Citations (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US5898179A (en) | 1997-09-10 | 1999-04-27 | Orion Equipment, Inc. | Method and apparatus for controlling a workpiece in a vacuum chamber |
WO2000005744A1 (en) * | 1998-07-21 | 2000-02-03 | Applied Materials, Inc. | Ion implantation beam monitor |
Also Published As
Publication number | Publication date |
---|---|
WO2003088299A2 (en) | 2003-10-23 |
CN100401449C (zh) | 2008-07-09 |
JP2005522843A (ja) | 2005-07-28 |
CN1647236A (zh) | 2005-07-27 |
TWI319894B (en) | 2010-01-21 |
KR20040097335A (ko) | 2004-11-17 |
AU2003214435A8 (en) | 2003-10-27 |
JP4347068B2 (ja) | 2009-10-21 |
WO2003088299A3 (en) | 2004-01-08 |
EP1493171A2 (en) | 2005-01-05 |
TW200402096A (en) | 2004-02-01 |
AU2003214435A1 (en) | 2003-10-27 |
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