KR100977250B1 - 대상물 분석 장치 - Google Patents

대상물 분석 장치 Download PDF

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Publication number
KR100977250B1
KR100977250B1 KR1020080067431A KR20080067431A KR100977250B1 KR 100977250 B1 KR100977250 B1 KR 100977250B1 KR 1020080067431 A KR1020080067431 A KR 1020080067431A KR 20080067431 A KR20080067431 A KR 20080067431A KR 100977250 B1 KR100977250 B1 KR 100977250B1
Authority
KR
South Korea
Prior art keywords
providing
solution
detector
liquid sample
light
Prior art date
Application number
KR1020080067431A
Other languages
English (en)
Korean (ko)
Other versions
KR20100007025A (ko
Inventor
임흥빈
Original Assignee
단국대학교 산학협력단
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 단국대학교 산학협력단 filed Critical 단국대학교 산학협력단
Priority to KR1020080067431A priority Critical patent/KR100977250B1/ko
Priority to PCT/KR2009/003793 priority patent/WO2010005263A2/fr
Publication of KR20100007025A publication Critical patent/KR20100007025A/ko
Application granted granted Critical
Publication of KR100977250B1 publication Critical patent/KR100977250B1/ko

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    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/75—Systems in which material is subjected to a chemical reaction, the progress or the result of the reaction being investigated
    • G01N21/76—Chemiluminescence; Bioluminescence
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J3/00—Spectrometry; Spectrophotometry; Monochromators; Measuring colours
    • G01J3/28—Investigating the spectrum
    • G01J3/443—Emission spectrometry
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/84—Systems specially adapted for particular applications
    • G01N21/88—Investigating the presence of flaws or contamination
    • G01N21/94—Investigating contamination, e.g. dust
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/84—Systems specially adapted for particular applications
    • G01N21/88—Investigating the presence of flaws or contamination
    • G01N21/95—Investigating the presence of flaws or contamination characterised by the material or shape of the object to be examined
    • G01N21/9501—Semiconductor wafers

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  • Physics & Mathematics (AREA)
  • Chemical & Material Sciences (AREA)
  • General Physics & Mathematics (AREA)
  • General Health & Medical Sciences (AREA)
  • Health & Medical Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Biochemistry (AREA)
  • Immunology (AREA)
  • Pathology (AREA)
  • Spectroscopy & Molecular Physics (AREA)
  • Plasma & Fusion (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Engineering & Computer Science (AREA)
  • Investigating Or Analysing Materials By The Use Of Chemical Reactions (AREA)
KR1020080067431A 2008-07-11 2008-07-11 대상물 분석 장치 KR100977250B1 (ko)

Priority Applications (2)

Application Number Priority Date Filing Date Title
KR1020080067431A KR100977250B1 (ko) 2008-07-11 2008-07-11 대상물 분석 장치
PCT/KR2009/003793 WO2010005263A2 (fr) 2008-07-11 2009-07-10 Dispositif d'analyse de solution échantillon

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
KR1020080067431A KR100977250B1 (ko) 2008-07-11 2008-07-11 대상물 분석 장치

Publications (2)

Publication Number Publication Date
KR20100007025A KR20100007025A (ko) 2010-01-22
KR100977250B1 true KR100977250B1 (ko) 2010-08-23

Family

ID=41507595

Family Applications (1)

Application Number Title Priority Date Filing Date
KR1020080067431A KR100977250B1 (ko) 2008-07-11 2008-07-11 대상물 분석 장치

Country Status (2)

Country Link
KR (1) KR100977250B1 (fr)
WO (1) WO2010005263A2 (fr)

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0783831A (ja) * 1993-09-17 1995-03-31 Toyobo Co Ltd 発光測定装置
JPH07140143A (ja) * 1993-11-19 1995-06-02 Inax Corp 便検査方法及び装置

Family Cites Families (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2626738B2 (ja) * 1990-03-13 1997-07-02 三共株式会社 化学発光検出装置
US6949377B2 (en) * 2001-03-05 2005-09-27 Ho Winston Z Chemiluminescence-based microfluidic biochip

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0783831A (ja) * 1993-09-17 1995-03-31 Toyobo Co Ltd 発光測定装置
JPH07140143A (ja) * 1993-11-19 1995-06-02 Inax Corp 便検査方法及び装置

Also Published As

Publication number Publication date
WO2010005263A2 (fr) 2010-01-14
WO2010005263A3 (fr) 2010-04-29
KR20100007025A (ko) 2010-01-22

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