KR100945235B1 - 반도체 발열기의 제조방법 - Google Patents
반도체 발열기의 제조방법 Download PDFInfo
- Publication number
- KR100945235B1 KR100945235B1 KR1020080109198A KR20080109198A KR100945235B1 KR 100945235 B1 KR100945235 B1 KR 100945235B1 KR 1020080109198 A KR1020080109198 A KR 1020080109198A KR 20080109198 A KR20080109198 A KR 20080109198A KR 100945235 B1 KR100945235 B1 KR 100945235B1
- Authority
- KR
- South Korea
- Prior art keywords
- powder
- heating element
- metal silicon
- semiconductor
- silicon layer
- Prior art date
Links
- 239000004065 semiconductor Substances 0.000 title claims abstract description 66
- 238000004519 manufacturing process Methods 0.000 title claims abstract description 18
- 238000010438 heat treatment Methods 0.000 claims abstract description 90
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 claims abstract description 66
- 239000002184 metal Substances 0.000 claims abstract description 63
- 229910052751 metal Inorganic materials 0.000 claims abstract description 63
- 229910052710 silicon Inorganic materials 0.000 claims abstract description 49
- 239000010703 silicon Substances 0.000 claims abstract description 49
- BQCADISMDOOEFD-UHFFFAOYSA-N Silver Chemical compound [Ag] BQCADISMDOOEFD-UHFFFAOYSA-N 0.000 claims abstract description 46
- 238000005260 corrosion Methods 0.000 claims abstract description 26
- 230000007797 corrosion Effects 0.000 claims abstract description 26
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 claims abstract description 12
- 239000000843 powder Substances 0.000 claims description 24
- 239000011863 silicon-based powder Substances 0.000 claims description 21
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 claims description 19
- 239000011248 coating agent Substances 0.000 claims description 16
- 238000000576 coating method Methods 0.000 claims description 16
- GNPVGFCGXDBREM-UHFFFAOYSA-N germanium atom Chemical compound [Ge] GNPVGFCGXDBREM-UHFFFAOYSA-N 0.000 claims description 10
- HBMJWWWQQXIZIP-UHFFFAOYSA-N silicon carbide Chemical compound [Si+]#[C-] HBMJWWWQQXIZIP-UHFFFAOYSA-N 0.000 claims description 10
- 230000005611 electricity Effects 0.000 claims description 9
- 239000007921 spray Substances 0.000 claims description 9
- 238000005507 spraying Methods 0.000 claims description 9
- 239000011521 glass Substances 0.000 claims description 8
- 239000004927 clay Substances 0.000 claims description 4
- 239000010432 diamond Substances 0.000 claims description 4
- 229910003460 diamond Inorganic materials 0.000 claims description 4
- 238000001035 drying Methods 0.000 claims description 4
- 238000004898 kneading Methods 0.000 claims description 4
- SBEQWOXEGHQIMW-UHFFFAOYSA-N silicon Chemical compound [Si].[Si] SBEQWOXEGHQIMW-UHFFFAOYSA-N 0.000 claims description 4
- 238000001704 evaporation Methods 0.000 claims description 3
- 230000008020 evaporation Effects 0.000 claims description 3
- 239000012212 insulator Substances 0.000 claims description 3
- 229910052709 silver Inorganic materials 0.000 claims description 3
- 239000004332 silver Substances 0.000 claims description 3
- 239000013078 crystal Substances 0.000 claims description 2
- 238000000034 method Methods 0.000 abstract description 8
- 229910052802 copper Inorganic materials 0.000 abstract 1
- 239000010949 copper Substances 0.000 abstract 1
- 239000003921 oil Substances 0.000 description 5
- 239000000446 fuel Substances 0.000 description 3
- 238000010586 diagram Methods 0.000 description 2
- 229910052732 germanium Inorganic materials 0.000 description 2
- 239000000463 material Substances 0.000 description 2
- 239000010453 quartz Substances 0.000 description 2
- 229910010271 silicon carbide Inorganic materials 0.000 description 2
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N silicon dioxide Inorganic materials O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 2
- 239000004020 conductor Substances 0.000 description 1
- 239000000203 mixture Substances 0.000 description 1
- 239000002994 raw material Substances 0.000 description 1
Images
Classifications
-
- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05B—ELECTRIC HEATING; ELECTRIC LIGHT SOURCES NOT OTHERWISE PROVIDED FOR; CIRCUIT ARRANGEMENTS FOR ELECTRIC LIGHT SOURCES, IN GENERAL
- H05B3/00—Ohmic-resistance heating
- H05B3/10—Heating elements characterised by the composition or nature of the materials or by the arrangement of the conductor
- H05B3/12—Heating elements characterised by the composition or nature of the materials or by the arrangement of the conductor characterised by the composition or nature of the conductive material
- H05B3/14—Heating elements characterised by the composition or nature of the materials or by the arrangement of the conductor characterised by the composition or nature of the conductive material the material being non-metallic
- H05B3/141—Conductive ceramics, e.g. metal oxides, metal carbides, barium titanate, ferrites, zirconia, vitrous compounds
- H05B3/143—Conductive ceramics, e.g. metal oxides, metal carbides, barium titanate, ferrites, zirconia, vitrous compounds applied to semiconductors, e.g. wafers heating
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F24—HEATING; RANGES; VENTILATING
- F24H—FLUID HEATERS, e.g. WATER OR AIR HEATERS, HAVING HEAT-GENERATING MEANS, e.g. HEAT PUMPS, IN GENERAL
- F24H1/00—Water heaters, e.g. boilers, continuous-flow heaters or water-storage heaters
- F24H1/18—Water-storage heaters
- F24H1/20—Water-storage heaters with immersed heating elements, e.g. electric elements or furnace tubes
-
- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05B—ELECTRIC HEATING; ELECTRIC LIGHT SOURCES NOT OTHERWISE PROVIDED FOR; CIRCUIT ARRANGEMENTS FOR ELECTRIC LIGHT SOURCES, IN GENERAL
- H05B3/00—Ohmic-resistance heating
- H05B3/02—Details
- H05B3/06—Heater elements structurally combined with coupling elements or holders
-
- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05B—ELECTRIC HEATING; ELECTRIC LIGHT SOURCES NOT OTHERWISE PROVIDED FOR; CIRCUIT ARRANGEMENTS FOR ELECTRIC LIGHT SOURCES, IN GENERAL
- H05B2203/00—Aspects relating to Ohmic resistive heating covered by group H05B3/00
- H05B2203/013—Heaters using resistive films or coatings
-
- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05B—ELECTRIC HEATING; ELECTRIC LIGHT SOURCES NOT OTHERWISE PROVIDED FOR; CIRCUIT ARRANGEMENTS FOR ELECTRIC LIGHT SOURCES, IN GENERAL
- H05B2203/00—Aspects relating to Ohmic resistive heating covered by group H05B3/00
- H05B2203/017—Manufacturing methods or apparatus for heaters
-
- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05B—ELECTRIC HEATING; ELECTRIC LIGHT SOURCES NOT OTHERWISE PROVIDED FOR; CIRCUIT ARRANGEMENTS FOR ELECTRIC LIGHT SOURCES, IN GENERAL
- H05B2203/00—Aspects relating to Ohmic resistive heating covered by group H05B3/00
- H05B2203/021—Heaters specially adapted for heating liquids
-
- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05B—ELECTRIC HEATING; ELECTRIC LIGHT SOURCES NOT OTHERWISE PROVIDED FOR; CIRCUIT ARRANGEMENTS FOR ELECTRIC LIGHT SOURCES, IN GENERAL
- H05B2203/00—Aspects relating to Ohmic resistive heating covered by group H05B3/00
- H05B2203/026—Heaters specially adapted for floor heating
Landscapes
- Engineering & Computer Science (AREA)
- Chemical & Material Sciences (AREA)
- Ceramic Engineering (AREA)
- Physics & Mathematics (AREA)
- Thermal Sciences (AREA)
- Combustion & Propulsion (AREA)
- Mechanical Engineering (AREA)
- General Engineering & Computer Science (AREA)
- Resistance Heating (AREA)
Abstract
Description
Claims (1)
- 내열성이고 절연체인 수정(水晶), 유리, 도토(陶土) 중에서 어느 하나의 재질을 원료로 하여 원통형이나 평판형으로 제조된 발열체의 상,하단에 상,하부 고무밴드를 고정 부착시키게 되는 고무밴드 부착단계;상기 고무밴드 부착단계에서 고정 부착된 상,하부 고무밴드 사이에 노출되어 있는 상기 발열체의 표면 전체가 고르게 거칠어진 부식면이 형성되도록 상기한 표면에 다이아몬드사를 공압으로 분사하여 부식시키는 샌딩처리단계;미립자상의 금속규소가루에 소정 비율의 은가루를 혼합한 후 물에 풀어서 스프레이건을 이용하여 분사가능하도록 묽게 반죽한 다음, 이를 상기 샌딩처리단계에서 거칠게 부식처리된 발열체의 부식면 전체에 고르게 분사하되, 분사된 은가루 및 금속규소가루가 흘러내리지 않을 정도로 상기 발열체의 부식면에 고르게 피복된 상태가 되면 분사작동을 일시 중단하고, 이어서 상기 발열체의 부식면에 피복된 은가루와 금속규소가루를 가열건조하여 수분은 증발시키고 은가루와 금속규소가루는 상기 발열체의 부식면에 부착되어 있도록 하는 작업을 1회 이상 반복하여 상기 발열체의 부식면에 은가루가 혼합된 금속규소층을 소정 두께로 피복시키는 금속규소층 피복단계;미립자상의 탄화규소가루, 무기게르마늄가루 중 어느 하나 종류의 가루만으로 구성되거나 또는 두 종류의 가루를 소정 비율로 혼합 구성하여서 된 반도체가루에다 소정 비율의 은가루를 혼합한 후 물에 풀어서 스프레이건을 이용하여 분사가 능하도록 묽게 반죽한 다음, 이를 상기 금속규소층 피복단계에서 발열체의 부식면에 피복된 금속규소층의 표면 전체에 고르게 분사하되, 분사된 은가루와 반도체가루가 흘러내지지 않을 정도로 상기 금속규소층의 표면에 고르게 피복된 상태가 되면 분사작동을 일시 중단하고, 이어서 상기 금속규소층의 표면에 피복된 은가루와 반도체가루를 가열건조하여 수분은 증발시키고 은가루와 반도체가루는 상기 금속규소층의 표면에 부착되도록 하는 작업을 1회 이상 반복하여 상기 금속규소층의 표면에 은가루가 혼합된 반도체층을 소정 두께로 피복시키는 반도체층 피복단계;상기 반도체층 피복단계를 거친 발열체의 상,하단에 부착되어 있는 상,하부 고무밴드를 벗겨내고, 가열로에서 900∼1400℃의 고온으로 가열하여 상기 발열체의 부식면에 차례로 피복된 금속규소층과 반도체층이 단단하게 부착되도록 응결시키는 가열단계;상기 가열단계를 거친 발열체의 부식면에 단단하게 부착된 반도체층의 상,하단에 전기를 통전시키기 위한 상,하부 동선밴드를 부착시키는 동선밴드 부착단계;를 포함하여 구성된 것을 특징으로 하는 반도체 발열기의 제조방법.
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
KR1020080109198A KR100945235B1 (ko) | 2008-11-05 | 2008-11-05 | 반도체 발열기의 제조방법 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
KR1020080109198A KR100945235B1 (ko) | 2008-11-05 | 2008-11-05 | 반도체 발열기의 제조방법 |
Publications (1)
Publication Number | Publication Date |
---|---|
KR100945235B1 true KR100945235B1 (ko) | 2010-03-03 |
Family
ID=42182891
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
KR1020080109198A KR100945235B1 (ko) | 2008-11-05 | 2008-11-05 | 반도체 발열기의 제조방법 |
Country Status (1)
Country | Link |
---|---|
KR (1) | KR100945235B1 (ko) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
WO2016078030A1 (zh) * | 2014-11-19 | 2016-05-26 | 史利利 | 发热器件及电加热器 |
Citations (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
KR20060128772A (ko) * | 2006-11-15 | 2006-12-14 | 강선어플라이언스(주) | 위상 적응형 변조 제어기법을 사용한 유도가열 조리기 |
-
2008
- 2008-11-05 KR KR1020080109198A patent/KR100945235B1/ko active IP Right Grant
Patent Citations (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
KR20060128772A (ko) * | 2006-11-15 | 2006-12-14 | 강선어플라이언스(주) | 위상 적응형 변조 제어기법을 사용한 유도가열 조리기 |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
WO2016078030A1 (zh) * | 2014-11-19 | 2016-05-26 | 史利利 | 发热器件及电加热器 |
Similar Documents
Publication | Publication Date | Title |
---|---|---|
KR101103453B1 (ko) | 가열 장치 및 이의 제조 방법 | |
CN110117765A (zh) | 一种TiO2基电热涂层及其制备方法 | |
CN111511049A (zh) | 一种发热板及其制造方法 | |
KR100945235B1 (ko) | 반도체 발열기의 제조방법 | |
CN2195745Y (zh) | 强辐射传热节能工业炉 | |
CN107949080A (zh) | 一种电热转换体涂层及制备方法 | |
CN211982162U (zh) | 一种发热板 | |
JP2909778B2 (ja) | フライアッシュを主材とした遠赤外線放射体 | |
CN109735140A (zh) | 一种热喷电热涂料、电热发热板和电热转换涂层及其制备方法 | |
EP1681905A1 (en) | Method of fabricating semiconductor electric heating film | |
KR101252253B1 (ko) | 원적외선 난방장치의 방사패널 | |
CN1052843C (zh) | 导热耐温复合电热体及其制造方法 | |
KR100695339B1 (ko) | 운모 면상발열체의 제조방법 | |
JPH10225657A (ja) | 塗装乾燥炉における近赤外線ランプの効果的な配列 | |
KR102173248B1 (ko) | 건축 내장재 제조방법 | |
CN102843793B (zh) | 一种电热转换体涂层及使用方法 | |
JPH04357167A (ja) | セラミックスヒータ | |
CN218333283U (zh) | 一种烘炉温度移相控制装置 | |
KR20140102552A (ko) | 다중 온도 자가조절형 면상발열체를 이용한 전기레인지 | |
JP2636978B2 (ja) | 導電性セラミック焼結体およびその製造方法 | |
US20140238975A1 (en) | Monolithic thermal heating block made from refractory phosphate cement | |
KR101596216B1 (ko) | 원적외선을 방출하는 탄화규소 허니콤 히터의 제조방법 | |
CN111365995A (zh) | 一种提高加热炉热能转化的装置及方法 | |
KR200441701Y1 (ko) | 원적외선 히터 | |
JP2003036756A (ja) | エナメル線製造装置 |
Legal Events
Date | Code | Title | Description |
---|---|---|---|
A201 | Request for examination | ||
E701 | Decision to grant or registration of patent right | ||
GRNT | Written decision to grant | ||
FPAY | Annual fee payment |
Payment date: 20121231 Year of fee payment: 4 |
|
FPAY | Annual fee payment |
Payment date: 20131216 Year of fee payment: 5 |
|
FPAY | Annual fee payment |
Payment date: 20141204 Year of fee payment: 6 |
|
FPAY | Annual fee payment |
Payment date: 20151209 Year of fee payment: 7 |
|
FPAY | Annual fee payment |
Payment date: 20161216 Year of fee payment: 8 |
|
FPAY | Annual fee payment |
Payment date: 20171220 Year of fee payment: 9 |
|
FPAY | Annual fee payment |
Payment date: 20190502 Year of fee payment: 10 |